JP2009000804A - Absorption table - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibration absorption device preventing vibrations from transmitting to a plate-shaped member such as an inspection substrate by absorbing vibrations with various frequencies. <P>SOLUTION: The vibration absorption device is a plate-shaped structure connected with a vacuum adsorbing means and used for an absorption table retaining a member as a mounting object. A mounting member is mounted on one side of the vibration absorption device, the vacuum adsorbing means is connected with the other side of the vibration absorption device, and a ventilation passage is provided to connect a connecting section of the vacuum absorbing means and one side of the vibration absorption device. The ventilation passage is formed with numerous small holes with various sizes which are made of wall surfaces consisting of metallic splinters combined with each other in point contacts, and prevents the vibration from transmitting to the mounted member by adsorbing the vibration caused by the vacuum adsorbing means. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a suction table, and more particularly to a vibration absorber used in a suction table that sucks and holds a plate-like member such as a substrate.

  The substrate is not limited to a printed wiring board, but is, for example, a flexible board, a multilayer wiring board, an electrode plate for a liquid crystal display or a plasma display, a package board or film carrier for a semiconductor package, a semiconductor wafer, or an inspection object. The sheet-like member is a generic name for various substrates.

When a circuit pattern is formed on a printed wiring board, a defect such as a short circuit or disconnection may occur in the circuit pattern. In order to find such a substrate defect, for example, an optical inspection apparatus is used. Such an optical inspection apparatus includes a table that holds an inspection substrate, a light irradiation device that outputs inspection light toward a circuit pattern on the inspection substrate, and a light detection device that receives light reflected from the circuit pattern. And a control device for analyzing the circuit pattern from the detected light and checking the state of the defect.
JP 2004-90137 A discloses a substrate holder having a porous adsorbing member. The adsorbing member is ceramic, and the pores have an average pore diameter of 30 μm to 50 μm. This substrate holder provides a stable suction by having a suction portion that closes the through hole of the substrate.

  In addition, as the adsorbing member, a foamable resin having a small hole having a certain diameter is used.

  A suction device such as a vacuum pump is connected to the suction table via a hose, and a plate-like member such as a substrate on the suction table is fixed to the placement surface of the suction table by the suction force of the suction device. Yes. When the suction device is operated for the suction, periodic pressure fluctuations occur in the hose connecting the suction device and the suction table, and the vacuum pressure varies. If such a periodic pressure variation is transmitted as it is to the plate-like member on the suction table, the variation is transmitted to the plate-like member and vibrates. As a result, the displacement of the plate member in the height direction occurs in response to the vibration, and the optical beam arrival distance of the optical inspection apparatus set in advance or the height direction of the electric inspection apparatus (z direction) There will be a shift in the movement. For this reason, due to this shift, a situation has occurred in which the captured image is disturbed or the jig that enables electrical connection and the plate-like member do not come into stable contact.

  Further, the present invention is not limited to the optical inspection apparatus for carrying out the inspection, and a plate-like member placed on a processing apparatus or a processing apparatus for carrying out a predetermined process by placing a plate-like member such as a substrate. There is a demand for providing a suction table in which vibration is not transmitted to a member.

  In view of the above problems, the present invention provides a suction table capable of absorbing vibrations of various frequencies and preventing transmission of vibrations to a plate-like member such as a substrate that performs predetermined processing such as inspection and processing. The purpose is to do.

  Therefore, the vibration absorbing device according to the present invention is a plate-like device that is connected to a vacuum suction unit and is used for a suction table that holds a member to be placed, and places the placed member on one side, The side is connected to the vacuum suction means, and includes a ventilation path that communicates and connects one side of the connection portion with the vacuum suction means, and the ventilation path is formed by a wall formed of metal strips joined by point contact. It is composed of a large number of small holes, and is characterized by absorbing vibration caused by the vacuum suction means and preventing the vibration from being transmitted to the placement member.

  Therefore, the inspection substrate holding device according to the present invention is a plate-like vibration absorber that is connected to a vacuum suction means and is used for a suction table that holds a substrate to be inspected. The side is connected to the vacuum suction means, and includes a ventilation path that communicates and connects one side of the connection portion with the vacuum suction means, and the ventilation path is formed by a wall formed of metal strips joined by point contact. It is composed of a large number of small holes and is placed on one side of the vibration absorbing device and the vibration absorbing device, which absorbs the vibration caused by the vacuum suction means and prevents the vibration from being transmitted to the substrate to be inspected A sheet-like member, on which the board to be inspected is placed, and the sheet-like member has a ventilation path of the vibration absorbing device and a surface on which the board to be inspected of the sheet-like member is placed. A communicating vent For example, the vent path, be formed to a uniform size smaller than the pores of the vibration absorber, thereby characterized in that the air is sucked evenly distributed.

  A large number of small holes may be grouped into at least three according to the opening diameter, and the three groups may be arranged in a laminated structure.

  The metal strip may be a cast iron cutting strip.

  The sheet-like member may be dustless paper.

  The diameter of the large number of small holes is preferably within 100 μm.

  An optical inspection apparatus according to the present invention is a suction table that is connected to a vacuum suction means and holds a substrate to be inspected, and a plate-like vibration absorber provided on the suction table, and the substrate to be inspected is provided on one side. The other side is connected to the vacuum suction means, and has a ventilation path that connects and connects the connection portion with the vacuum suction means, and the ventilation path is formed by a wall surface composed of metal strips joined by point contact. The vibration absorbing device, which is composed of a large number of small holes of different sizes, absorbs the vibration caused by the vacuum suction means and prevents the vibration from being transmitted to the substrate to be inspected, and on one side of the vibration absorbing device. A sheet-like member placed on the sheet-like member on which the board to be inspected is placed, and the sheet-like member on which the ventilation path of the vibration absorbing device and the board to be inspected of the sheet-like member are placed Communicate with the surface An air passage is provided, and the air passage is smaller than the small hole of the vibration absorbing device and is formed to have a uniform size, whereby air is evenly dispersed and sucked and further placed on the sheet-like member. The optical device that irradiates the inspection substrate with the inspection light and receives the light reflected from the inspection substrate and either the suction table or the optical device, or both the suction table and the optical device are moved on the XY plane. And a control device for controlling the operation of the optical device and the drive device and analyzing the light received by the optical device.

  A processing apparatus according to the present invention is a suction table that is connected to a vacuum suction means and holds a workpiece, and a plate-like vibration absorber provided on the suction table, the workpiece being placed on one side. The other side is connected to the vacuum suction means, and has a ventilation path that connects and communicates with the connection portion with the vacuum suction means, and the ventilation path is formed by a wall surface composed of metal strips joined by point contact. It is composed of a large number of small holes of different sizes and is placed on one side of the vibration absorbing device and the vibration absorbing device, which absorbs the vibration caused by the vacuum suction means and prevents the vibration from being transmitted to the workpiece. The sheet-like member is a sheet-like member on which the workpiece is placed on the sheet-like member, and the sheet-like member is a surface on which the ventilation path of the vibration absorber and the workpiece of the sheet-like member are placed Ventilation that communicates with And the air passage is smaller than the small hole of the vibration absorbing device and has a uniform size, whereby air is evenly dispersed and sucked, and further, the object placed on the suction table. A processing means for performing a predetermined process on the surface of the processing member and a moving means for relatively moving the suction table and the processing means to perform the predetermined process are provided.

  Further, the vibration absorbing device according to the present invention is a plate-like device that is connected to a vacuum suction unit and used for a suction table that holds a member to be placed, and the placed member is placed on one side. The other side is connected to the vacuum suction means, and has a ventilation path that connects and connects one side of the connection with the vacuum suction means, and the ventilation path joins the metal strips by point contact to form a three-dimensional cross-linking structure. Thus, it is composed of a large number of small holes of different sizes, and is characterized by absorbing vibration caused by the vacuum suction means and preventing the vibration from being transmitted to the placement member.

  According to the present invention, there is provided a vibration absorbing device for a suction table that can absorb vibrations of various frequencies from a suction device or the like and prevent transmission of vibrations to an object to be placed such as an inspection substrate. be able to. Thereby, it can prevent that a mounting target object vibrates and can perform an exact process with respect to a mounting target object.

  Further, by using a vibration absorbing device having small holes of various sizes by connecting metal strips by point contact, it is possible to manufacture a vibration absorbing device having a size larger than that of the conventional one.

  Hereinafter, a suction table according to the present invention will be described in detail with reference to the accompanying drawings. In the figure, the same elements are denoted by the same reference numerals, and redundant description is omitted.

  In the following description of the suction table, the case where it is provided in the optical inspection apparatus 10 is described. However, the present invention is not particularly limited to this, and the suction table can also be used as a suction table for other processing apparatuses.

[Outline of vacuum table]
For example, as shown in FIG. 4 to be described later, the suction table 22 can be provided, for example, in the inspection substrate holding device 20 of the optical inspection device 10 for substrate inspection. Placed. In the embodiment of this figure, the inspection board is the inspection object, but other plate-like members can be the inspection object according to the inspection contents.

  FIGS. 1 and 2 are a side sectional view and a perspective view, respectively, for explaining the outline of the configuration of the suction table 22.

  As shown in FIG. 1, the suction table 22 has a recess, and a plate-like vibration absorber 24 is disposed in the recess. Further, a dust-free paper 26 as a sheet-like member is disposed on the upper surface of the vibration absorbing device 24. As will be described in detail later, the vibration absorbing device 24 is made of a porous metal member, and the porous metal member includes a ventilation path that connects the upper surface and the lower surface. The air passage has a large number of small holes of various opening diameters, and air is sucked through the small holes. The dust-free paper 26 has finer eyes than the small holes of the vibration absorbing device 24 so that air is sucked evenly onto the inspection substrate.

  When air is sucked through a suction pipe 35 connected to a vacuum suction device (not shown), the air is sucked almost uniformly from the upper surface of the dust-free paper 26 and further vibrates as indicated by an arrow in FIG. The suction pipe 35 is sucked through a large number of small holes in the absorption device 24. Therefore, in FIG. 1, when the inspection substrate 28 is placed on the dust-free paper 26 and suction is started, the inspection substrate 28 is sucked onto the dust-free paper 26 with equal pressure and is fixed to the suction table 22 in position. It will be.

  As will be described in detail later, as shown in FIG. 2, the suction table 22 can move on the XY plane relative to the optical device of the optical inspection device.

[Structure of vibration absorber]
3A to 3C show first to third embodiments of the vibration absorbing device 24 of FIGS. 1 and 2, respectively. As shown in these drawings, the vibration absorbing devices 24a, 24b and 24c are made of a porous metal member having a large number of small holes having openings of various sizes. The large number of small holes function as an air passage communicating from the upper surface to the lower surface of the vibration absorbing device 24.

  The porous metal member is a metal having a structure with innumerable small pores, such as a sponge, and is made of a composite material having metallic properties and properties unique to pores. Among porous metal members, for example, plate-like porous cast iron produced by special compression molding by collecting cutting strips having a complicated and sharp shape is different from general porous metals in that cutting strips ( Alternatively, a three-dimensionally cross-linked structure is formed in which the cutting strips are bonded to each other by point contact so that the shape of the metal strips) is not impaired. As a result, a wall surface forming a large number of small holes of different sizes is formed, and irregular slits communicating with the small holes are formed on the surface, and the size and the inclination angle differ depending on the wall surface inside. Countless pantographs are raging. The air passage is constituted by a large number of small holes having different sizes.

  In other words, the air passage is composed of a number of communicating small holes of different sizes formed by wall surfaces composed of metal strips joined by point contact. That is, the metal strips that are cutting strips are uneven in size, the shape is not constant, and it is not a flat shape, so even if the metal strips contact each other, they do not come in contact on a wide surface However, the contact is made on a very narrow surface (point). Therefore, when a large number of metal strips are connected to each other by point contact, a large number of spaces are formed between the metal strips. In addition, the position of the point contact between the metal strips is not a regular position, but is in various indefinite positions, so the sizes of the spaces are not uniform and uneven, and the spaces communicate with each other. It will be. For this reason, the small holes formed by the wall surfaces composed of a large number of metal strips joined by point contact are a large number of different sizes, which are in communication.

  Porous cast iron can exhibit extremely great vibration damping properties due to such a porous structure and a three-dimensionally crosslinked structure. Further, plate-like porous cast iron has a wide range of spring constants due to such a structure so as to exhibit various spring constants for various magnitudes of compressive force. With such a wide spring constant, even when vibrations of various sizes and directions are applied, the displacement is absorbed in the vertical and horizontal directions, and the resonance phenomenon does not occur. Other methods for producing a porous metal member include, for example, metal powder injection molding, powder sintering, plating, foaming, hollow sphere, gas injection, fiber sintering, etc., but a large number of irregularly sized small holes Any method may be used as long as it can be formed.

  FIG. 3A conceptually shows a structure in which a large number of small holes are formed by joining a large number of cutting strips facing various directions such as upward, downward, and oblique directions by point contact. In the figure, the solid line of the curve inside the vibration absorbing device 24a is a simplified illustration of the cutting strips joined together by point contact, and shows the state of constituting the wall surface of the small hole. In the figure, the point where the wall surfaces represented by solid lines intersect is a point contact. As shown typically in FIG. 3A as small holes 40 and small holes 41, a large number of small holes of different sizes are arranged at arbitrary positions in the vibration absorbing device 24a. In the figure, all the small holes have different sizes. However, instead, a plurality of small hole groups having the same size may be arbitrarily mixed. The diameter of the large number of small holes is preferably within 100 μm.

  Since the wall surface of the small hole forming the vibration absorbing device 24a is formed by point contact of the cutting strip, the width, size, and inclination direction are various. Therefore, even if vibrations of various sizes and directions are applied to the vibration absorbing device 24a, such various vibrations can be absorbed by the cutting strips being displaced in various directions. Therefore, no resonance phenomenon occurs. As such, the vibration absorbing device 24a can absorb vibrations of any frequency because it has small holes of various sizes. In addition, for example, it has a wide range of spring constants, for example, from about 2 kgf / mm to 150 kgf / mm, thereby showing various spring constants for a wide range of compressive forces, thus achieving a highly elastic structure. Has been. In addition, a large number of small holes in the vibration absorbing device 24a are irregularly changed toward the inside, such as medium sparse, large dense, medium dense, large sparse, and small dense. For this reason, the effect of vibration suppression by the wall surface constituted by the cutting strips forming these small holes is high.

  Further, since the pressure fluctuation in the suction pipe 35 is vibrational, the vibrational pressure fluctuation is also transmitted to the small hole of the vibration absorbing device 24a. At this time, since the sizes of the small holes are different, vibrations of pressure transmitted through the space in the small holes interfere with each other and cancel each other. As a result, such an oscillating pressure fluctuation is not transmitted to the inspection substrate or the like placed on the vibration absorbing device 24a. Such a small hole function is also exhibited in the vibration absorbing devices 24b and 24c having the structure shown in FIGS. 3B and 3C described in detail below.

  FIG. 3B schematically shows a vibration absorber 24b composed of two layers of a layer LA and a layer LB. The size of the small holes 42 in the layer LA is relatively smaller than the small holes 43 in the layer LB. In this case, in each layer, the sizes of all the small holes 42 and 43 are different as in the case of the vibration absorbing device 24a shown in FIG. 3A. However, instead of this, a plurality of groups of small holes having the same size may be arbitrarily mixed in each layer. Further, although the sizes of the small holes 42 of the layer LA and the small holes 43 of the layer LB are different, all the small holes may be the same size in each layer. Furthermore, in the vibration absorber 24b shown in FIG. 3B, the size of the small hole 42 in the layer LA is smaller than the small hole 43 in the layer LB, but conversely, the size of the small hole 43 in the layer LB is smaller than that of the layer LA. It may be made smaller than the small hole 42.

  FIG. 3C schematically shows a vibration absorbing device 24c composed of three layers such as a layer LB, a layer LA, and a layer LB from the top toward the figure. The size of the small holes 45 in the layer LA is smaller than the small holes in the layers LB44 and 46. In each layer, as in the case of the vibration absorber 24a shown in FIG. 3A, the sizes of all the small holes are different. However, instead, a plurality of small hole groups having the same size may be arbitrarily mixed in each layer. In place of this, similarly to the vibration absorber 24b shown in FIG. 3B, the small holes 45 of the layer LA and the small holes 44 and 46 of the layer LB are different in size, but all the small holes are formed in each layer. You may make it the same magnitude | size. In the vibration absorber 24c shown in FIG. 3C, the size of the small holes 45 in the layer LA is smaller than the small holes 44 and 46 in the layer LB, but conversely, the size of the small holes 44 and 46 in the layer LB is smaller than the layer LA. It may be made smaller than the small hole 45. Further, the size of the small holes may be different among the three layers of the vibration absorbing device 24c. In the configuration in which the dense layer LA is disposed between the two sparse layers LB as in this embodiment, since the density of the cutting strips forming the small holes of the layer LA is high, the layer LA Thus, the strength of the vibration absorbing device 24c can be increased.

[Usage table usage example]
FIG. 4 is a schematic perspective view showing an example of the optical inspection apparatus 10 for substrate inspection. The optical inspection device 10 includes an inspection substrate holding device 20 on which a plate-shaped inspection substrate 28 is mounted, an optical device 14, and a control device 16. The inspection board holding device 20 includes drive motors 22a and 22b, which can move the suction table 22 to an arbitrary position in the XY direction.

  The optical device 14 includes a light irradiation device 15 and a light receiving system 17. The light irradiation device 15 irradiates the substrate 28 with light that changes in phase at a predetermined pitch. The light receiving system 17 guides the light output from the light irradiation device 15 to the substrate 28 and reflects the light reflected therefrom. To capture. Therefore, the light receiving system 17 includes a spectroscope 18a, reflection mirrors 18b and 18c, and a CCD camera 19 that captures light reflected from the inspection substrate 28. Although not shown, a device for blocking light is provided between the spectroscope 18a and the reflection mirrors 18b and 18c.

The control device 16 controls the movement of the drive motors 22a and 22b, controls the light irradiation of the light irradiation device 15, and analyzes the light received by the CCD camera 19 of the light receiving system 17 to thereby analyze the inspection substrate 28. Diagnose the situation.

  The suction table 22 of the inspection substrate holding device 20 is connected to a suction device (not shown) such as a vacuum pump via a suction pipe 35.

  FIG. 5 is a side view showing a state where the inspection substrate 28 is placed on the suction table 22. When the inspection substrate 28 is inspected, as shown in the figure, the inspection substrate 28 to be inspected is placed on the dust-free paper 26 on the vibration absorbing device 24 of the suction table 22. In this case, although not shown, two positioning pins protrude from the vibration absorbing device 24, and holes through which the two positioning pins pass are provided in the dust-free paper 26 and the inspection substrate 28. Therefore, the dust-free paper 26 and the inspection substrate 28 are positioned by inserting the two positioning pins into the holes.

  In this state, when air is sucked by a vacuum suction device (not shown) connected to the suction pipe 35, an air flow as indicated by an arrow is generated in the vibration absorbing device 24a through a large number of small holes. Further, since the air is sucked through a large number of air passages of the dust-free paper 26, the inspection substrate 28 is attracted to the dust-free paper 26 and fixed in position.

  The size of the air passage path of the dust-free paper 26 is smaller than the large number of small holes in the vibration absorber 24a and is relatively uniform in size, so that the air passing therethrough is relatively evenly distributed. Therefore, the inspection substrate 28 is sucked evenly over the entire surface of the dust-free paper 26.

  In this state, as shown in FIG. 4, the drive motors 22a and 22b are controlled by the control device 16 to move the suction table 22 in the X and Y directions, so that the inspection light is applied to predetermined locations on the substrate. It converges at a predetermined location.

  Next, a light beam is output from the light irradiation device 15. The beam is split in two directions orthogonal to each other by the spectroscope 18a, reflected by the reflection mirrors 18b and 18c, and condensed at a predetermined position on the inspection substrate 28. At this time, the light of one of the paths 11 and 12 is made to reach the inspection substrate 28 by a light path blocking device (not shown). The light reflected from a predetermined position on the inspection board 28 is imaged by the CCD 19, and the control device 16 determines the state of the board based on the imaging signal and outputs it.

[Others]
As mentioned above, although embodiment of the suction table concerning the present invention was described, they are illustrations and the present invention is not limited to these. In the above embodiment, an example in which the suction table is used in the optical inspection apparatus has been described. However, the suction table can be used in, for example, a substrate inspection apparatus using a probe other than the optical inspection apparatus. The suction table according to the present invention can also be used for a plate-shaped member processing apparatus.

  Moreover, since this adsorption | suction table can perform a predetermined process, without giving a vibration to the mounted plate-shaped member, it can provide the processing apparatus which provides a high positional accuracy.

  Additions, deletions, changes, improvements, and the like that can be easily made by those skilled in the art to these embodiments are included in the present invention. The technical scope of the present invention is defined by the description of the appended claims.

FIG. 1 is a side sectional view for explaining an outline of a configuration of a suction table according to the present invention. FIG. 2 is a perspective view for explaining the outline of the configuration of the suction table according to the present invention. FIG. 3A is a partial cross-sectional view of the first embodiment of the suction table according to the present invention. FIG. 3B is a partial cross-sectional view of the second embodiment of the suction table according to the present invention. FIG. 3C is a partial cross-sectional view of a third embodiment of the suction table according to the present invention. FIG. 4 is a schematic perspective view showing an embodiment of an optical inspection apparatus for substrate inspection provided with a suction table according to the present invention. FIG. 5 is a side sectional view showing an example of use of the suction table according to the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Optical inspection apparatus 14 for board | substrate inspection ... Optical apparatus 17 ... Light receiving system 20 ... Inspection board holding device 22 ... Suction table 22a, 22b ... Drive motor 24 ... Vibration Absorber 26 ... dustless paper 28 ... inspection substrate 35 ... suction pipes 40, 41, 42, 43, 44, 45, 46 ... small holes

Claims (9)

A plate-like vibration absorber that is connected to a vacuum suction means and is used for a suction table that holds a member to be placed.
Place the mounting member on one side, the other side is connected to the vacuum suction means,
An air passage that communicates and connects the connecting portion with the vacuum suction means and the one side;
The air passage is composed of a large number of small holes of different sizes formed by wall surfaces composed of metal strips joined by point contact, and absorbs vibration caused by the vacuum suction means to A vibration absorbing device that prevents vibration from being transmitted to the mounting member. A plate-like vibration absorbing device connected to a vacuum suction means and used for a suction table that holds a substrate to be inspected,
Place the substrate to be inspected on one side, the other side is connected to the vacuum suction means,
An air passage that communicates and connects the connecting portion with the vacuum suction means and the one side;
The air passage is composed of a large number of small holes of different sizes formed by wall surfaces composed of metal strips joined by point contact, and absorbs vibration caused by the vacuum suction means to A vibration absorber that prevents vibration from being transmitted to the substrate to be inspected;
A sheet-like member placed on one side of the vibration-absorbing device, and the sheet-like member on which the substrate to be inspected is placed on the sheet-like member,
The sheet-like member includes an air passage that communicates the air passage of the vibration absorbing device and a surface of the sheet-like member on which the substrate to be inspected is placed, and the air passage passes through a small hole of the vibration absorbing device. The inspection substrate holding device is also formed in a small and uniform size, whereby air is evenly dispersed and sucked. The vibration absorber according to claim 1.
The large number of small holes are grouped into at least three according to the opening diameter, and the three groups are arranged in a laminated structure. The vibration absorber according to claim 1.
The vibration absorbing device, wherein the metal strip is a cut strip of cast iron. The inspection substrate holding apparatus according to claim 2,
The inspection substrate holding apparatus, wherein the sheet-like member is dust-free paper. The vibration absorber according to claim 1.
The vibration absorbing device, wherein the diameter of the plurality of small holes is within 100 μm. A suction table connected to a vacuum suction means and holding a substrate to be inspected;
A plate-like vibration absorber provided on the suction table, wherein the substrate to be inspected is placed on one side, the other side is connected to the vacuum suction means, and a connection site with the vacuum suction means and the one side are An air passage that communicates and connects, and the air passage is composed of a large number of small holes of different sizes formed by wall surfaces made of metal strips joined by point contact, and is connected to the vacuum suction means. A vibration absorbing device that absorbs the vibration caused and prevents the vibration from being transmitted to the substrate to be inspected;
A sheet-like member placed on one side of the vibration-absorbing device, and the sheet-like member on which the substrate to be inspected is placed on the sheet-like member,
The sheet-like member includes an air passage that communicates the air passage of the vibration absorbing device and a surface of the sheet-like member on which the substrate to be inspected is placed, and the air passage passes through a small hole of the vibration absorbing device. Is also formed in a small and uniform size, so that the air is evenly distributed and sucked,
An optical device that irradiates the inspection substrate placed on the sheet-like member with inspection light and receives light reflected from the inspection substrate;
A driving device for moving one of the suction table or the optical device, or both the suction table and the optical device on an XY plane;
An optical inspection apparatus comprising: a control device that controls operations of the optical device and the driving device and analyzes light received by the optical device. A suction table connected to a vacuum suction means and holding a workpiece;
A plate-like vibration absorber provided on the suction table, wherein the workpiece is placed on one side, the other side is connected to the vacuum suction means, and a connection site with the vacuum suction means and the one side are An air passage that communicates and connects, and the air passage is composed of a large number of small holes of different sizes formed by wall surfaces made of metal strips joined by point contact, and is connected to the vacuum suction means. A vibration absorbing device that absorbs vibration caused by the vibration and prevents the vibration from being transmitted to the workpiece;
A sheet-like member placed on one side of the vibration absorbing device, the sheet-like member on which the workpiece is placed,
The sheet-like member includes an air passage that communicates the air passage of the vibration absorbing device and a surface of the sheet-like member on which the workpiece is placed, and the air passage is formed from a small hole of the vibration absorbing device. Is also formed in a small and uniform size, so that the air is evenly distributed and sucked,
Processing means for applying a predetermined process to the surface of the workpiece to be mounted on the suction table;
In order to perform the said predetermined process, the processing apparatus provided with the moving means which moves the said adsorption | suction table and the said process means relatively. A plate-like vibration absorber that is connected to a vacuum suction means and is used for a suction table that holds a member to be placed.
Place the mounting member on one side, the other side is connected to the vacuum suction means,
An air passage that communicates and connects the connecting portion with the vacuum suction means and the one side;
The air passage is composed of a large number of small holes of different sizes by bonding metal strips by point contact to form a three-dimensionally cross-linked structure, and absorbs vibration caused by the vacuum suction means to A vibration absorbing device that prevents vibration from being transmitted to the mounting member.

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