JP2009076127A - Magnetic head and magnetic recording device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a highly reliable magnetic head capable of preventing occurrence of pole erasing caused by residual magnetization of a laminated structure magnetic film even in the main magnetic pole of a narrow core width made to correspond to high recording density, and preventing output deterioration and data erasure. <P>SOLUTION: A main magnetic pole 21 for generating a magnetic field for recording in a direction vertical to a medium opposite surface is provided with a laminated structure magnetic film 30 constituted of a plurality of magnetic layers 31 to 34 which are stacked in the thickness direction of the main magnetic pole 21 and where nonmagnetic layers 36 to 38 are interposed, and an end surface magnetic layer 35 which is formed along the stacked end surface of the medium opposite surface side of the laminated structure magnetic film 30 and where a surface opposite the stacked end surface becomes a medium opposite surface. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a magnetic head and a magnetic recording apparatus, and more particularly to a magnetic head and a magnetic recording apparatus used in a perpendicular recording system.

  The amount of information processed by a computer or the like is increasing at a remarkable speed, and a higher recording density is required for a recording apparatus used with the computer. Among the recording devices, magnetic recording devices are historically old and are widely spread.

  Most of the magnetic recording systems supplied to the market so far are called in-plane magnetic recording systems in which the direction of magnetization recorded in the recording layer is in the plane direction. In order to obtain a high recording density in this in-plane magnetic recording method, it is necessary to make the recording layer thin and to make the magnetic crystal grains constituting the recording layer fine.

However, if the recording layer is made thin, a phenomenon that information is lost when heat is applied to the magnetic disk, that is, a thermal fluctuation phenomenon occurs, which is one factor that prevents high recording density.
On the other hand, there is a perpendicular magnetic recording method in which the direction of magnetization in the recording layer is directed to the direction perpendicular to the surface of the recording layer, which has been put into practical use in recent years.

  In the perpendicular magnetic recording system, the area of each magnetic domain on the surface of the recording layer can be reduced as compared with the in-plane magnetic recording system, so that a higher recording density can be achieved. Further, since the magnetization is oriented in the direction perpendicular to the film surface of the recording layer, the recording layer can be made thicker, and the occurrence of the thermal fluctuation phenomenon that occurs when the recording layer is made thinner is prevented.

  However, in the perpendicular magnetic recording system, there are problems such as output deterioration due to residual magnetization of the head main pole that generates a recording magnetic field and data erasure due to residual magnetization called pole erase. Residual magnetization at the main pole is a phenomenon in which magnetization remains in the main pole after the end of the recording operation.

  As means for reducing pole erase, as shown in FIG. 8, it is known to use a main magnetic pole 103 composed of a plurality of magnetic layers 101a to 101d stacked with nonmagnetic layers 102a to 102c interposed therebetween. .

  In the core portion 104 at the tip of the main magnetic pole 103, when the core width is wide, the direction of the remanent magnetization of the magnetic film 101 is directed in the core width direction as shown by the arrow A, and is nonmagnetic. Since antiferromagnetic coupling occurs through the layers 102a to 102c, they are antiparallel to each other.

The magnetic fields generated by the residual magnetizations of the nearest upper and lower magnetic films 101a, 101b, 101c, and 101d are returned to each other on both sides as indicated by arrow B, and are transferred from the main pole 103 to the magnetic recording medium. The leaking magnetic field is reduced.
The construction of the main pole from a plurality of magnetic layers is described in Patent Documents 1 and 2 below.
JP 2006-18985 A JP 2006-302421 A

  However, as shown in FIG. 9, when the core width w of the core portion 104 of the main pole 103 is narrowed to increase the recording density, the ratio of the length h in the height direction of the main pole 103 to the core width w, that is, the aspect ratio. The ratio (= h / w) becomes relatively large.

  When the aspect ratio increases in this way, the magnetization of the core portion 104 faces the height direction as indicated by an arrow C due to the shape anisotropy. A part of the residual magnetic field generated by the residual magnetization of the nearest upper and lower layers of the magnetic layers 101a, 101b, 101c, and 101d constituting the core portion 104 is refluxed in the vicinity of the tip.

However, since the difference in the area of the tip surfaces of the plurality of magnetic layers 101a, 101b, 101c, and 101d shown in FIG. 9 is larger than that in FIG. 8, the entire core unit 104 is changed to a magnetic recording medium due to residual magnetization. The leakage magnetic field component H ₁ in one direction increases, and problems such as pole erasure still exist.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a perpendicular magnetic head and a magnetic recording apparatus capable of preventing the occurrence of pole erasure in a main pole having a narrow core width corresponding to a high recording density.

  According to one aspect of the present invention, there is provided a main magnetic pole having a core medium facing surface that is disposed opposite to a surface of a magnetic recording medium and through which a recording magnetic field passes in a vertical direction. A laminated structure magnetic film composed of a plurality of magnetic layers laminated in the thickness direction and sandwiching a nonmagnetic layer therebetween, and a laminated end face formed along the laminated end face on the medium facing surface side of the laminated structured magnetic film; There is provided a magnetic head having an end face magnetic layer whose opposite surface is a medium facing surface.

According to the present invention, the end face magnetic layer is formed along the laminated facet on the medium facing side of the core through which the recording magnetic field passes in the laminated magnetic layer of the main pole.
Therefore, even in a narrow core width corresponding to a high recording density, the magnetic field generated by the residual magnetization of the laminated structure magnetic film flows back in the direction parallel to the medium facing surface via the end face magnetic layer. As a result, the leakage magnetic field to the magnetic recording medium caused by the residual magnetization can be reduced to prevent the occurrence of pole erase, and a highly reliable perpendicular recording head free from output deterioration and data erasure can be obtained.

Embodiments of the present invention will be described below in detail with reference to the drawings.
FIG. 1 is a cross-sectional view showing a magnetic head according to an embodiment of the present invention.

A magnetic head 1 shown in FIG. 1 is formed through a substrate 1 made of a nonmagnetic material such as AlTiC (Al ₂ O ₃ —TiC) and an insulating layer 2 such as alumina (Al ₂ O ₃ ) thereon. The reproducing magnetic head 10 and a perpendicular recording magnetic head 20 formed on the reproducing magnetic head 10 via an insulating separation layer 3 such as alumina.

The reproducing magnetic head 10 is arranged on the leading side, the perpendicular recording magnetic head 20 is arranged on the trailing side, and the magnetic head constituted by these is arranged facing the recording surface of the magnetic recording medium 5.
The nonmagnetic substrate 1 becomes a slider by processing such as cutting and polishing.
The reproducing magnetic head 10 includes a lower magnetic shield layer 11, an insulating gap layer 12, a reproducing element 13, and an upper magnetic shield layer 14 that are sequentially formed on the insulating layer 2.

  The lower magnetic shield layer 11 and the upper magnetic shield layer 14 are made of, for example, a NiFe alloy layer, and the insulating layer gap 12 is made of an insulating material such as alumina. The reproducing element 13 is connected to a pair of electrodes (not shown) formed in the insulating gap layer 12, but depending on the element structure, the lower and upper magnetic shield layers 11 and 14 are also used as a pair of electrodes. Sometimes.

As the reproducing element 13, for example, a magneto-resistance (MR) effect element, a giant magneto-resistance (GMR) effect element, or a tunneling magneto-resistance (TMR) effect element is formed.
The reproducing element 13 is formed on the air bearing surface (ABS surface) of the magnetic head, that is, the region that becomes the medium facing surface.

  The perpendicular recording magnetic head 20 includes a main magnetic pole 21 formed on the insulating separation layer 3, a planarizing insulating layer 22 formed around the main magnetic pole 21, and the main magnetic pole 21 and the planarizing insulating layer 22. The formed nonmagnetic gap layer 23, a base insulating layer 24a formed on the nonmagnetic gap layer 23, an excitation coil 25 formed on the base insulating layer 24a, and a covering insulating layer covering the excitation coil 25 24 b, a return yoke 26 formed on the trailing side of the covering insulating layer 24 b, and a main portion of the return yoke 26 formed on the nonmagnetic gap layer 23 and connected to the tip of the return yoke 26 on the medium facing surface side. A trailing magnetic shield layer 27 close to the magnetic pole 21 and a side magnetic shield (not shown) formed close to the cross track side of the main magnetic pole 21 are included.

The perpendicular recording head 20 has a structure in which an excitation coil and a return yoke are arranged not only on the trailing side of the main magnetic pole 21 but also on the leading side.
For example, as shown in the plan view of FIG. 2, the main magnetic pole 21 includes a rectangular yoke portion 21a, a tapered throttle portion 21b protruding from the yoke portion 21a toward the medium facing surface side, and a medium facing surface of the throttle portion 21b. It is comprised from the stripe-shaped core part 21c which protrudes from the front-end | tip of the side.

  The yoke portion 21 a is connected to the return yoke 26 through a contact hole 28 formed through a substantially central gap of the exciting coil 25. Moreover, a part of core part 21c and the aperture | diaphragm | squeeze part 21b have a shape as shown in the perspective view of FIG.

  In FIG. 3, the region of the main magnetic pole 21 from the yoke portion 21a to the middle of the core portion 21c, for example, the region where the tip is left about 50 nm is the first to fourth magnetic layers with the nonmagnetic layers 36 to 38 interposed therebetween. The layer 31 is composed of a laminated structure magnetic film 30.

As shown in FIG. 4, each of the first to fourth magnetic layers 31 to 34 includes NiFe (nickel) layers 31a, 32a, 33a having a thickness of about 2 nm containing Ni (nickel) at a ratio of 80 wt%. 34a and FeCo (iron cobalt) layers 31b, 32b, 33b, and 34b having a thickness of about 50 nm are alternately stacked.
The plurality of nonmagnetic layers 36 to 38 formed between the first to fourth magnetic layers 31 to 34 are made of alumina, for example.

  On the other hand, the end surface magnetic layer 35 that covers the end surfaces of the first to fourth magnetic layers 31 to 34 and the nonmagnetic layers 36 to 38 is formed on the stacked end surface of the stacked structure magnetic film 30 in the core portion 21c on the medium facing surface side. Has been. The end face magnetic layer 35 is formed of a thickness and a material that reduce a component in a direction perpendicular to the magnetic recording medium surface of the magnetic field generated by the residual magnetization of the laminated structure magnetic film 30.

The end face magnetic layer 35 is formed on the laminated end face of the laminated structure magnetic film 30 constituting the core portion 21 c, and each of the first to fourth magnetic layers 31 to 34 constituting the laminated structure magnetic film 30 is left. Of the magnetic field generated by magnetization, leakage of components in the direction perpendicular to the surface of the magnetic recording medium is suppressed.
Further, as shown in FIG. 4, the end face magnetic layer 35 includes a NiFe layer 35 a having a thickness of about 2 nm containing Ni at a rate of 80 wt% and a FeCo layer 35 b having a thickness of about 50 nm. It has a structure in which it is stacked in the height direction from the tip toward the medium facing surface. Here, the height direction is a direction orthogonal to the core width and parallel to the surface of the insulating separation layer 3.

  The thickness direction of the end face magnetic layer 35 is the height direction of the core portion 21c. The total length in the height direction of the core portion 21c including the end face magnetic layer 35 is, for example, about 100 nm to 200 nm.

  The cross-sectional shape of the core portion 25c in the main magnetic pole 21 is, for example, a triangle. The triangular base of the end face is formed with a width of, for example, 50 to 120 nm and is located near the return yoke 26, that is, on the side opposite to the reproducing magnetic head 10, while the vertex formed by the remaining left and right sides is It is located on the insulating separation layer 3 near the reproducing magnetic head 10.

  In the main magnetic pole 21 having the above-described configuration, when the aspect ratio of the core portion 21c is increased and the magnetization direction is directed to the height direction due to shape anisotropy, the first to first layers of the laminated structure magnetic film 30 are arranged. The remanent magnetization directions of the four magnetic layers 31 to 34 are antiferromagnetically coupled between the upper and lower sides via the nonmagnetic layers 36 to 38, respectively. The remanent magnetization is stabilized in an antiparallel state.

When the residual magnetization M ₁ exists in the _first to fourth magnetic layers 31 to 34, the leakage magnetic field emitted from the front end surfaces thereof is recirculated in the end surface magnetic layer 35 at the front end of the laminated structure magnetic film 30.
Further, in the core portion 21c having a large aspect ratio, the area ratio of the top surface of the upper layer to the lower layer of each of the front surfaces of the first to fourth magnetic layers 31 to 34 is large. In the system, there may be a leakage magnetic field component perpendicular to the magnetic recording medium surface.

  However, the leakage magnetic field component can be changed in a direction parallel to the magnetic recording medium surface by the thickness and material selection of the end surface magnetic layer 35 formed along the front end surface of the laminated structure magnetic film 30. The leakage magnetic field that exits in the vertical direction from the front end surface, that is, the medium facing surface, is greatly reduced as compared with the conventional structure.

  Thereby, the leakage magnetic field in the perpendicular direction of the magnetic recording medium 5 from the core portion 21c due to the residual magnetization is reduced, the occurrence of pause erase is prevented, and the output deterioration to the magnetic recording medium 5 is prevented.

Further, the distance from the medium facing surface of the end face magnetic layer 35 to the tip face of the laminated structure magnetic film 30, that is, the thickness of the end face magnetic layer 35 in the height direction is t _1, and the saturation magnetic flux density of the end face magnetic layer 35 is On the other hand, the thickness of each of the first to fourth magnetic layers 31 to 34 in the stacked structure 30 is t _2, and the saturation of each of the first to fourth magnetic layers 31 to 34 is set to Bs _1. the magnetic flux density and Bs _2.

When the thickness, material, etc. are adjusted so that the relationship of the following formula (1) is satisfied, the amount of magnetic flux becomes equal in any region of the first to fourth magnetic layers 31 to 34, and there is no excess or deficiency. Magnetic flux is obtained, and the leakage magnetic field from the core portion 21c of the main magnetic pole 21 can be further suppressed.
t ₁ × Bs ₁ ≒ t ₂ × Bs ₂ (1)
The allowable range of the difference between the value of t ₁ · Bs _{1 and} the value of t ₂ · Bs ₂ is about ± 10%.

  Further, by forming the magnetic layers 31 to 34 with two or more even layers having substantially the same thickness in the laminated structure magnetic film 30, the magnetization at the tip of the main pole 21 is unidirectional as shown by an arrow C in FIG. Therefore, the occurrence of a domain wall that causes a new leakage magnetic field can be prevented.

  Even if the laminated structure magnetic film 30 is composed of an odd number of magnetic layers, pole erasure can be suppressed as compared with the conventional structure in which the end face magnetic layer 35 is not provided on the tip face. However, in such a configuration, the leakage magnetic field recirculates in a reverse direction in a partial region of the end face magnetic layer 35 at the tip of the core portion 21c of the main magnetic pole 21, so that a domain wall that causes a new leakage magnetic field is easily generated. Therefore, it is more desirable to form the laminated structure magnetic film 30 with the even number of magnetic films 31 to 34.

Next, an example of the manufacturing process of the main magnetic pole 21 when the number of magnetic layers constituting the laminated magnetic film 30 is four will be described with reference to FIGS.
First, the reproducing magnetic head 10 having the structure as shown in FIG. 1 is formed on the substrate 1 via the insulating layer 2, and the insulating separation layer 3 is further formed on the reproducing magnetic head 10.

  After that, as shown in FIG. 5A, the first magnetic layer 31, the nonmagnetic layer 36, the second magnetic layer 32, the nonmagnetic layer 37, the first magnetic layer 31, and the laminated structure magnetic film 30 are formed on the insulating separation layer 3. The third magnetic layer 33, the nonmagnetic layer 38, and the fourth magnetic layer 34 are sequentially formed by sputtering, for example.

  Each of the first, second, third, and fourth magnetic layers 31, 32, 33, and 34 includes a NiFe layer 31a, 32a, 33a, and 34a having a thickness of 2 nm containing Ni at a ratio of 80 wt%, for example. It has a two-layer structure in which FeCo layers 31b, 32b, 33b, and 34b having a thickness of 50 nm are sequentially formed by sputtering.

For the plurality of nonmagnetic layers 36, 37, and 38, for example, an alumina layer having a thickness of 1.5 nm formed by sputtering is applied.
Here, the NiFe layers 31a, 32a, 33a, and 34a are formed thinly as an underlayer for controlling the crystals of the FeCo layers 31b, 32b, 33b, and 34b having a high saturation magnetic flux density, that is, for improving soft magnetic characteristics. Is done.

  Next, as shown in FIG. 5B, a first mask 41 made of photoresist, metal, or the like is provided on the second magnetic film 32. The first mask 41 covers at least the yoke portion 21a, the narrowed portion 21b, and a part of the core portion 21c in the main magnetic pole 21 as shown in FIG. 2 and the periphery thereof, while the end face magnetism of the core portion 21c. It has a shape having an opening 42 in a region where the layer 35 is formed and a region protruding from the region facing the medium facing surface side.

  Subsequently, as shown in FIG. 5C, the stacked structure magnetic film 30 exposed in the opening 42 of the first mask 41 is removed in the vertical direction by an ion milling method, a reactive ion etching (RIE) method, or the like. An opening 30a is formed in the tip portion of the region to be the core portion 21c of the main magnetic pole 21 and the region protruding from the medium facing surface side, and the insulating separation layer 3 is exposed therefrom.

  Further, after the mask 41 is peeled off, as shown in FIG. 5D, a NiFe layer 35a having a thickness of 2 nm containing Ni at a rate of 80 wt% and an FeCo layer 35b on the inside of the opening 30a and on the laminated structure magnetic layer 30 are formed. Are formed in order. The total thickness of the NiFe layer 35a and the FeCo layer 35b in the direction perpendicular to the height direction is the total thickness of the first to fourth magnetic layers 31 to 34 and the nonmagnetic layers 36 to 38 therebetween. It forms by sputtering so that it may become the above thickness.

  Next, the upper surface of the fourth magnetic layer 34 is polished by chemical mechanical polishing (CMP) by polishing the FeCo layer 35b and the NiFe layer 35a with the position indicated by the one-dot chain line L in FIG. 5D as the polishing end point position. The FeCo layer 35b and the NiFe layer 35a are planarized.

  Thereafter, a second mask (not shown) having the same planar shape as the main magnetic pole 21 is provided on the laminated structure magnetic layer 30, the NiFe layer 35a, and the FeCo layer 35b. In this case, the second mask is arranged so that the mask region corresponding to the tip portion which is a part of the core portion 21c of the main magnetic pole 21 shown in FIG. 2 overlaps the FeCo layer 35b and the NiFe layer 35a. Note that a photoresist, metal, or the like is used as the material of the second mask.

  Further, by removing the layered structure magnetic layer 30, NiFe layer 35a, and FeCo layer 35b in a region not covered by the main mask-shaped second mask by ion milling, RIE, or the like, the main magnetic pole 21 shown in FIG. To complete.

Here, as shown in FIG. 5E, the FeCo layer 35 b and the NiFe layer 35 a exist at the tip portion of the core portion 21 c of the main magnetic pole 21, and this portion becomes the end face magnetic layer 35.
In this state, the cross-sectional shape of the core portion 21c of the main magnetic pole 21 is substantially quadrilateral, so that the cross-sectional shape becomes a triangle by ion milling the left side surface and the right side surface of the core portion 21c in an oblique direction. To form.

  In addition, the cross-sectional shape of the core part 21c is not restricted to the above triangles, A trapezoid may be sufficient. In the case of a trapezoidal shape, the bottom surface on the reproducing magnetic head 10 side may have a very short shape compared to the bottom surface on the return yoke 26 side.

  Subsequently, the planarization insulating layer 22, the nonmagnetic gap layer 23, the base insulating layer 24a, the exciting coil 25, the covering insulating layer 24b, the return yoke 26, and the like as shown in FIG. 1 are formed by a known recording magnetic head process. Then, a magnetic head wafer is completed.

  Thereafter, the magnetic head wafer is cut and processed into a predetermined shape, and finally the magnetic head slider is formed. When the medium facing surface is formed by polishing or the like in the process, as shown in FIG. The length in the height direction of the end face magnetic layer 35 in the core portion 21c of the magnetic pole 21 is adjusted. The distance D from the medium facing surface of the end face magnetic layer 35 is adjusted to be 50 nm, for example.

  By the way, the laminated structure film 30 constituting the main magnetic pole 21 is composed of first to fourth magnetic layers 31 to 34, that is, four magnetic layers. As shown in FIG. A single magnetic layer 51, a nonmagnetic layer 52, and a second magnetic layer 53 may be formed in this order to form two magnetic layers.

  Each of the first and second magnetic layers 51 and 53 shown in FIG. 6 is formed by sequentially sputtering NiFe layers 51a and 53a having a thickness of 2 nm containing Ni at a rate of 80 wt% and FeCo layers 51b and 53b having a thickness of 100 nm. It has the structure formed by.

As the nonmagnetic layer 52, for example, an alumina layer having a thickness of 1.5 nm formed by sputtering is applied.
Further, the end face magnetic layer 35 formed at the tip of the core 21c of the main magnetic pole 21 has a layer structure made of the same material as that shown in FIG. 4, but its length in the height direction is 100 nm. Yes.

As a result, the condition shown in the above formula (1) is satisfied for the laminated structure magnetic layer 30 and the end face magnetic layer 35 of the main magnetic pole 21.
The main magnetic pole 21 shown in FIG. 6 is also formed by the steps shown in FIGS. 5A to 5E. However, the layer structure of the laminated structure film 30 is different from that of the end face magnetic layer 35 in the height direction. The process is almost the same except for the difference.

  By the way, in the above-described embodiment, an example in which the laminated magnetic layer 30 is composed of the four magnetic films 31 to 34 and the two magnetic films 51 and 53 has been described. However, the present invention is not limited thereto. However, even if it is composed of an even number of 6 or more layers or an odd number of 5 or more magnetic layers with a nonmagnetic layer interposed therebetween, a perpendicular recording head can be obtained by the same process as described above.

  Further, although alumina is shown as the nonmagnetic layer 30 constituting the laminated structure layer 30, the present invention is not limited to this. For example, titanium (Ti), tantalum (Ta), chromium (Cr), ruthenium (Ru), etc. These nonmagnetic metals or nonmagnetic alloys of these metals can also be used.

Further, as shown in FIG. 7, the direction of residual magnetization of the core portion 21c of the main magnetic pole 21 is not limited to a parallel to the height direction as indicated by the arrow M ₁ in FIG. 3, the arrow M ₀ in FIG. 7 In some cases, it may tilt from the height direction. However, since the leakage magnetic field due to the component parallel to the height direction of such residual magnetization is recirculated by the end face magnetic layer 35, the pole erasure due to the residual magnetization can be significantly suppressed as described above, and output deterioration is prevented. it can.

Note that the component in the core width direction of the remanent magnetization in FIG. 7 is returned to the side in the core width direction in the same manner as shown in FIG.
The magnetic head including the main magnetic pole 21 having the above configuration is applied to a magnetic recording device such as a hard disk device or a flexible tape-shaped magnetic recording medium, and is disposed to face the magnetic recording medium.

Next, features of the embodiment of the present invention will be described.
(Additional remark 1) It has the main magnetic pole provided with the medium opposing surface of the core which is arrange | positioned facing the surface of a magnetic recording medium, and a recording magnetic field passes in a perpendicular direction, The said main magnetic pole is the thickness direction of the said main magnetic pole. A laminated structure magnetic film composed of a plurality of magnetic layers laminated with a nonmagnetic layer sandwiched therebetween, and is formed along a laminated end face on the medium facing surface side of the laminated structured magnetic film and opposite to the laminated end face A magnetic head comprising: an end surface magnetic layer whose side surface is the medium facing surface.
(Supplementary note 2) The magnetic head according to supplementary note 1, wherein the laminated structure magnetic film is composed of an even number of magnetic films.
(Supplementary Note 3) The thickness of the end surface magnetic layer is t ₁ from the medium facing surface of the main magnetic pole becomes the distance to the laminated structure film, the saturation magnetic flux density of the end surface magnetic layer and Bs _1, wherein the laminated structure magnetic Note that the thickness of each of the magnetic layers constituting the film is t ₂ and the saturation magnetic flux density of the magnetic layer is Bs ₂ , so that t ₁ × Bs ₁ ≈t ₂ × Bs _2. The magnetic head according to 1 or 2
(Additional remark 4) The said end surface magnetic layer is comprised from the 1st magnetic layer which consists of a magnetic material which has iron and cobalt, The magnetic head as described in any one of Additional remark 1 thru | or Additional remark 3 characterized by the above-mentioned.
(Supplementary note 5) The magnetic head according to supplementary note 4, wherein a second magnetic layer made of a magnetic material containing nickel and iron is formed below the first magnetic layer in the end face magnetic layer.
(Supplementary note 6) The magnetic head according to any one of supplementary notes 1 to 5, wherein the nonmagnetic layer is any one of a nonmagnetic metal, a nonmagnetic metal alloy, and an insulating layer.
(Supplementary note 7) The magnetic head according to any one of supplementary notes 1 to 6, wherein a side magnetic shield is disposed close to the cross track side of the main magnetic pole.
(Supplementary note 8) A trailing magnetic shield is disposed adjacent to the trailing side of the main magnetic pole, and an exciting coil is disposed between the trailing magnetic shield and the main magnetic pole. The magnetic head according to any one of?
(Additional remark 9) The magnetic head which has the magnetic head as described in any one of the said additional remarks 1 thru | or appendix 8, and the magnetic recording medium arrange | positioned facing the said recording medium opposing surface of the said magnetic head, Recording device.

FIG. 1 is a cross-sectional view showing a magnetic head according to an embodiment of the present invention. FIG. 2 is a plan view showing the main pole applied to the perpendicular recording magnetic head in the magnetic head according to the embodiment of the present invention. FIG. 3 is a perspective view showing a part of the main magnetic pole shown in FIG. FIG. 4 is a cross-sectional view showing a part of the main pole shown in FIG. 5A to 5C are cross-sectional views (No. 1) showing a process of forming the main magnetic pole shown in FIG. 5D to 5F are cross-sectional views (part 2) illustrating the formation process of the main magnetic pole illustrated in FIG. 6 is a perspective view showing another example of the layer structure constituting the main magnetic pole shown in FIG. FIG. 7 is a perspective view showing another example of the remanent magnetization direction in the main magnetic pole shown in FIG. FIG. 8 is a perspective view showing the core portion of the main magnetic pole and its periphery in a conventional recording magnetic head. FIG. 9 is a perspective view showing the core portion of the main magnetic pole and its periphery in another conventional magnetic head.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate 2 Insulating layer 3 Insulating separation layer 5 Magnetic recording medium 10 Reproducing magnetic head 20 Perpendicular recording magnetic head 21 Main magnetic pole 21a Yoke part 21b Aperture part 21c Core part 22 Flattening insulating layer 23 Nonmagnetic gap layer 25 Excitation coil 28 Return yoke 30 Laminated structure magnetic film 31, 32, 33, 34, 51, 52 Magnetic layer 35 End face magnetic layer 36, 37, 38, 52 Nonmagnetic layer

Claims (4)

A main magnetic pole provided with a medium facing surface of a core disposed opposite to the surface of the magnetic recording medium and passing a recording magnetic field in a vertical direction;
The main pole is
A laminated structure magnetic film comprising a plurality of magnetic layers laminated in the thickness direction of the main magnetic pole and sandwiching a nonmagnetic layer therebetween,
A magnetic head comprising: an end face magnetic layer formed along a laminated end face on the medium facing surface side of the laminated structure magnetic film and having a surface opposite to the laminated end face serving as the medium facing surface. .   The magnetic head according to claim 1, wherein the laminated magnetic film is composed of an even number of the magnetic films. The thickness of the end face magnetic layer that is the distance from the medium facing surface of the main pole to the laminated structure film is t _1, and the saturation magnetic flux density of the end face magnetic layer is Bs ₁ to constitute the laminated structure magnetic film. the respective film thicknesses of the magnetic layer is t _2, the saturation magnetic flux density of the magnetic layer as Bs _2,
t ₁ × Bs ₁ ≒ t ₂ × Bs ₂
The magnetic head according to claim 1, wherein the magnetic head is in a relationship of: The magnetic head according to any one of claims 1 to 3,
A magnetic recording medium disposed opposite to the recording medium facing surface of the magnetic head.

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