JP2009063540A - Alignment apparatus for ultrahigh positive direction load - Google Patents
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- JP2009063540A JP2009063540A JP2007233873A JP2007233873A JP2009063540A JP 2009063540 A JP2009063540 A JP 2009063540A JP 2007233873 A JP2007233873 A JP 2007233873A JP 2007233873 A JP2007233873 A JP 2007233873A JP 2009063540 A JP2009063540 A JP 2009063540A
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 48
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 25
- 230000013011 mating Effects 0.000 claims description 8
- 230000000087 stabilizing effect Effects 0.000 claims description 8
- 239000003381 stabilizer Substances 0.000 claims 1
- 238000011084 recovery Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
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Abstract
Description
本発明は、超高正方向負荷用位置合せ装置に係り、特に、プラットホーム装置に駆動装置を設けることにより、プラットホーム装置は前後移動、左右移動、又は回転移動が可能になり、なお、変位軸受プラットホームがプラットホーム装置を支える超高正方向負荷用位置合せ装置に関するものである。 The present invention relates to an alignment device for an ultra-high forward load, and in particular, by providing a drive device in the platform device, the platform device can be moved back and forth, left and right, or rotated, and a displacement bearing platform is provided. Relates to a super high positive load alignment device for supporting the platform device.
目下、従来の6自由度を持つミクロ/ナノクラスの位置決めプラットホームには、両側にリニアガイドウェーが設けてあるベースと、前記ベースのリニアガイドウェーと垂直に設けられる第一駆動装置と、前記ベースの一側に設けられるX軸バネ回復装置と、前記第一駆動装置に取付けられる第一楔形状ブロック機構とが設けてあり、なお、前記第一駆動装置と第一楔形状ブロック機構とX軸バネ回復装置とが一緒に移動して第二駆動装置とZ軸バネ回復装置とを駆動し、このような構成によれば構造が複雑であり、作動しているときに変形や分離が発生し易く、安全性が低く、作製工数がかなり掛られる欠点があった。 At present, a conventional micro / nano class positioning platform having 6 degrees of freedom includes a base provided with linear guideways on both sides, a first driving device provided perpendicular to the linear guideway of the base, and the base An X-axis spring recovery device provided on one side and a first wedge-shaped block mechanism attached to the first drive device are provided, wherein the first drive device, the first wedge-shaped block mechanism, and the X-axis are provided. The spring recovery device moves together to drive the second drive device and the Z-axis spring recovery device. According to such a configuration, the structure is complicated, and deformation and separation occur during operation. It has the disadvantages that it is easy, safety is low, and manufacturing man-hours are considerably increased.
本発明の主な目的は、圧力抵抗性が高く、構造が簡単であり、位置決めの精度が高く、使用の安全性が高く、操作性が優れる超高正方向負荷用位置合せ装置を提供することにある。 The main object of the present invention is to provide an ultra-high positive load alignment device having high pressure resistance, a simple structure, high positioning accuracy, high use safety, and excellent operability. It is in.
上記目的を達成するためになされた本願の発明は、一つのプラットホーム装置と、三つ以上の駆動装置と、三つ以上の変位装置と、三つ以上の変位軸受プラットホームとを含む超高正方向負荷用位置合せ装置において、前記プラットホーム装置には、台座と作動プラットホームとが設けてあり、前記駆動装置は前記台座の隅に設けられ、モータと、ねじ軸と、接合具とを有し、前記モータが前記ねじ軸の一端に連接され、前記ねじ軸の他端が前記接合具にねじ込まれ、前記変位装置は前記台座に設けられ、前記駆動装置と連接しており、合せ具と、第一リニアガイドウェー装置と、第二リニアガイドウェー装置と、軸受具とを有し、前記合せ具が前記駆動装置の接合具に固定され、また、前記合せ具の前記台座に近接する箇所では前記第一リニアガイドウェー装置が設けてあり、前記第二リニアガイドウェー装置が前記合せ具の他端に設けられ、また、前記第一リニアガイドウェー装置が前記駆動装置に平行するように設けられ、また、前記第二リニアガイドウェー装置が前記第一リニアガイドウェー装置と垂直するように設けられ、前記第二リニアガイドウェー装置の作動プラットホームに近接する箇所では軸受具が設けてあり、前記軸受具が前記作動プラットホームの一端に設けられ、前記変位軸受プラットホームは、前記台座の前記駆動装置に近接する箇所に位置し、一端が前記作動プラットホームを支え、且つプラットホーム装置の受ける引張応力と圧縮応力とを受け可能であることを特徴とする、超高正方向負荷用位置合せ装置であることを要旨としている。 The invention of the present application made to achieve the above object is an ultra-high positive direction including one platform device, three or more drive devices, three or more displacement devices, and three or more displacement bearing platforms. In the load alignment device, the platform device includes a pedestal and an operating platform, the drive device is provided at a corner of the pedestal, and includes a motor, a screw shaft, and a joint, A motor is connected to one end of the screw shaft, the other end of the screw shaft is screwed into the connector, the displacement device is provided on the pedestal, and is connected to the drive device. A linear guideway device, a second linear guideway device, and a bearing tool, wherein the mating tool is fixed to a joint tool of the driving device, and the first tool is disposed at a position close to the base of the mating tool One An guideway device is provided, the second linear guideway device is provided at the other end of the mating tool, the first linear guideway device is provided in parallel with the drive device, and The second linear guideway device is provided so as to be perpendicular to the first linear guideway device, and a bearing tool is provided at a location close to an operation platform of the second linear guideway device, and the bearing tool is Provided at one end of the operating platform, the displacement bearing platform is located at a location close to the drive device of the pedestal, one end supports the operating platform, and can receive the tensile stress and the compressive stress received by the platform device The gist of the present invention is an ultra-high positive load alignment device.
本願の発明では、前記台座の上では、駆動装置と、変位装置と、変位軸受プラットホームとが設けてあり、前記台座の他端にある作動プラットホームの上では、前記変位装置と変位軸受プラットホームとが連動可能であることを特徴とする、請求項1に記載の超高正方向負荷用位置合せ装置であることを要旨としている。 In the invention of the present application, a drive device, a displacement device, and a displacement bearing platform are provided on the pedestal, and the displacement device and the displacement bearing platform are provided on the operating platform at the other end of the pedestal. The gist of the present invention is the super high positive direction load alignment device according to claim 1, characterized in that it can be interlocked.
本願の発明では、前記変位軸受プラットホームには、安定台と、圧力抵抗体と、調節部とが設けてあり、前記安定台が前記台座の前記駆動装置に近接するモータの一端に設けられ、そして前記調節部は、前記安定台と圧力抵抗体とを挿通し、一端が前記作動プラットホームを支えることを特徴とする、請求項1に記載の超高正方向負荷用位置合せ装置であることを要旨としている。 In the invention of the present application, the displacement bearing platform is provided with a stabilizing base, a pressure resistor, and an adjusting portion, and the stabilizing base is provided at one end of the motor close to the driving device of the base, and 2. The super high positive load alignment device according to claim 1, wherein the adjustment unit is inserted through the stabilization base and the pressure resistor, and one end supports the operation platform. It is said.
本願の発明では、前記台座には変位軸受プラットホームが四つ設けてあり、前記変位軸受プラットホームが前記台座の四つの隅に設けられることを特徴とする、請求項1に記載の超高正方向負荷用位置合せ装置であることを要旨としている。 In the invention of the present application, the pedestal includes four displacement bearing platforms, and the displacement bearing platforms are provided at four corners of the pedestal. The main point is that it is a position alignment device.
本願の発明では、前記駆動装置は、モータと、連動具と、固定台と、ねじ軸と、接合具とを有し、前記モータが前記台座のエッジの近傍に設けられ、前記モータの一端が前記連動具と連結しており、前記連動具の一端には固定台が設けてあり、ねじ軸の一端は、前記固定台を挿通して連動具と連結しており、且つ、前記ねじ軸の他端が前記接合具にねじ込まれ、前記接合具が前記変位装置に連結されることを特徴とする、請求項1に記載の超高正方向負荷用位置合せ装置であることを要旨としている。 In the invention of the present application, the driving device includes a motor, an interlocking tool, a fixing base, a screw shaft, and a joining tool, and the motor is provided in the vicinity of the edge of the base, and one end of the motor is It is connected with the interlocking tool, a fixing base is provided at one end of the interlocking tool, and one end of the screw shaft is connected to the interlocking tool through the fixing base, and the screw shaft The gist of the super high positive direction load alignment device according to claim 1, wherein the other end is screwed into the joint and the joint is connected to the displacement device.
本発明の超高正方向負荷用位置合せ装置によれば、圧力抵抗性が高く、構造が簡単であり、位置決めの精度が高く、使用の安全性が高く、操作性が優れる効果を有する。 According to the alignment apparatus for an ultra-high positive direction load of the present invention, pressure resistance is high, the structure is simple, positioning accuracy is high, use safety is high, and operability is excellent.
以下、添付図面を参照して本発明の好適な実施の形態を詳細に説明する。 Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings.
まず、図1ないし図3を参照する。本発明の実施例の超高正方向負荷用位置合せ装置は、一つのプラットホーム装置10と、三つの駆動装置20と、三つの変位装置30と、三つの変位軸受プラットホーム40とを含む。 Reference is first made to FIGS. The super high positive load alignment apparatus of the embodiment of the present invention includes one platform device 10, three drive devices 20, three displacement devices 30, and three displacement bearing platforms 40.
前記プラットホーム装置10には、四方形を呈する台座11と、作動プラットホーム12とが設けてあり、前記台座11の上では、駆動装置20と、変位装置30と、変位軸受プラットホーム40とが設けてあり、且つ前記台座11の他端にあるプラットホーム12の上では、変位装置30と、変位軸受プラットホーム40とが設けてある。 The platform device 10 is provided with a pedestal 11 having a quadrangular shape and an operation platform 12, and on the pedestal 11, a drive device 20, a displacement device 30, and a displacement bearing platform 40 are provided. On the platform 12 at the other end of the pedestal 11, a displacement device 30 and a displacement bearing platform 40 are provided.
前記駆動装置20は、前記台座11の隅に設けられ、立方体を呈するモータ21と、円盤形状を呈する連動具22と、立方体を呈する固定台23と、ねじ軸24と、立方体を呈する接合具25とを有し、前記モータ21が前記台座11のエッジの近傍に設けられ、前記モータ21の一端が前記連動具22と連結しており、前記連動具22の一端には固定台23が設けてあり、ねじ軸24の一端は、前記固定台23を挿通して連動具22と連結しており、且つ前記ねじ軸24の他端が前記接合具25にねじ込まれ、前記接合具25が前記変位装置30に連結される。 The driving device 20 is provided at the corner of the base 11 and has a motor 21 that presents a cube, an interlocking tool 22 that exhibits a disk shape, a fixing base 23 that exhibits a cube, a screw shaft 24, and a joint tool 25 that exhibits a cube. The motor 21 is provided in the vicinity of the edge of the base 11, one end of the motor 21 is connected to the interlocking tool 22, and a fixing base 23 is provided at one end of the interlocking tool 22. Yes, one end of the screw shaft 24 is inserted through the fixed base 23 and connected to the interlocking tool 22, and the other end of the screw shaft 24 is screwed into the connecting tool 25, so that the connecting tool 25 is displaced. Connected to device 30.
前記変位装置30は、L字形を呈する合せ具31と、第一リニアガイドウェー装置32と、第二リニアガイドウェー装置33と、変位装置34とを有し、前記合せ具31が前記駆動装置20の接合具25に固定され、また、前記合せ具31の前記台座11に近接する箇所では前記第一リニアガイドウェー装置32が設けてあり、前記第二リニアガイドウェー装置33が前記合せ具31の他端に設けられ、また、前記第一リニアガイドウェー装置32が前記駆動装置20に平行するように設けられ、また、前記第二リニアガイドウェー装置33が前記第一リニアガイドウェー装置32と垂直するように設けられ、前記第二リニアガイドウェー装置33の作動プラットホーム12に近接する箇所では軸受具34が設けてあり、前記軸受具34が前記作動プラットホーム12の一端に設けられる。 The displacement device 30 includes an L-shaped fitting tool 31, a first linear guideway device 32, a second linear guideway device 33, and a displacement device 34, and the matching tool 31 is the driving device 20. The first linear guideway device 32 is provided at a location near the base 11 of the mating tool 31, and the second linear guideway device 33 serves as the mating tool 31. Provided at the other end, the first linear guideway device 32 is provided so as to be parallel to the driving device 20, and the second linear guideway device 33 is perpendicular to the first linear guideway device 32. The second linear guideway device 33 is provided with a bearing tool 34 at a location close to the operating platform 12, and the bearing tool 34 is disposed at the front. Provided at one end of the working platform 12.
前記変位軸受プラットホーム40は、多層に積み上げられたものであり、四方盤を円盤に連接して構成される安定台41と、円盤形状を呈する圧力抵抗体42と、円形の突起を呈する調節部43とを有し、前記安定台41は、前記台座11の前記駆動装置20に近接するモータ21の一端に設けられ、二組以上の軸受が設けてあり、そして前記調節部43は、前記安定台41と圧力抵抗体42とを挿通する。 The displacement bearing platform 40 is stacked in multiple layers, and includes a stabilizing base 41 formed by connecting a four-sided disk to a disk, a pressure resistor 42 having a disk shape, and an adjusting part 43 having a circular protrusion. The stabilizing base 41 is provided at one end of the motor 21 in the vicinity of the driving device 20 of the pedestal 11, two or more sets of bearings are provided, and the adjusting unit 43 includes the stabilizing base 43. 41 and the pressure resistor 42 are inserted.
また、図4と図5を参照する。図4は本発明の別の変位位置合せ動作を示す概略図であり、図5は本発明の更に別の変位位置合せ動作を示す概略図である。プラットホーム装置10の両端に設けられた駆動装置20A,20Bのモータ21A,21Bが連動具22A,22Bをそれぞれ駆動して、ねじ軸24A,24Bは一つが前へ、一つが後ろへ回動し、且つ接合具25A,25Bが合せ具31A,31Bを駆動して、第一リニアガイドウェー装置32A,32Bは、前後方向の変位および位置決めが精確になり、且つ作動プラットホーム12の軸受具34A,34Bと第二リニアガイドウェー装置33Cを駆動し、これにより、作動プラットホーム12は、前後方向または左右方向の変位および位置決めが精確になる。また、図5に示すように、プラットホーム装置10の三つのエッジに設けられた駆動装置20A,20B,20Cのモータ21A,21B,21Cが連動具22A,22B,22Cをそれぞれ駆動して、ねじ軸24A,24B,24Cが前へ又は後ろへ回動し、且つ接合具25A,25B,25Cが合せ具31A,31B,31Cを駆動して、第一リニアガイドウェー装置32A,32B,32Cと第二リニアガイドウェー装置33A,33B,33Cとは、回動変位および位置決めが精確になり、且つ作動プラットホーム12の軸受具34A,34B,34Cを駆動し、これにより作動プラットホーム12は回動変位および位置決めが精確になる。 Reference is also made to FIGS. FIG. 4 is a schematic diagram showing another displacement alignment operation of the present invention, and FIG. 5 is a schematic diagram showing still another displacement alignment operation of the present invention. The motors 21A and 21B of the driving devices 20A and 20B provided at both ends of the platform device 10 drive the interlocking devices 22A and 22B, respectively, and one of the screw shafts 24A and 24B rotates forward, and one rotates backward. Further, the joining tools 25A and 25B drive the mating tools 31A and 31B, so that the first linear guideway devices 32A and 32B have accurate displacement and positioning in the front-rear direction, and the bearing tools 34A and 34B of the operating platform 12 The second linear guideway device 33C is driven, so that the operating platform 12 is accurately displaced and positioned in the front-rear direction or the left-right direction. Further, as shown in FIG. 5, motors 21A, 21B, and 21C of driving devices 20A, 20B, and 20C provided at three edges of the platform device 10 drive the interlocking tools 22A, 22B, and 22C, respectively, and screw shafts. 24A, 24B, and 24C rotate forward or backward, and the joining tools 25A, 25B, and 25C drive the mating tools 31A, 31B, and 31C, and the first linear guideway devices 32A, 32B, and 32C and the second The linear guideway devices 33A, 33B, and 33C are accurate in rotational displacement and positioning, and drive the bearing tools 34A, 34B, and 34C of the operating platform 12, so that the operating platform 12 is in rotational displacement and positioning. Become accurate.
10 プラットホーム装置
11 台座
12 作動プラットホーム
20,20A,20B,20C 駆動装置
21,21A,21B,21C モータ
22,22A,22B,22C 連動具
23 固定台
24,24A,24B,24C ねじ軸
25,25A,25B,25C 接合具
30,30A,30B,30C 変位装置
31,31A,31B,31C 合せ具
32,32A,32B,32C 第一リニアガイドウェー装置
33,33A,33B,33C 第二リニアガイドウェー装置
34,34A,34B,34C 軸受具
40 変位軸受プラットホーム
41 安定台
42 圧力抵抗体
43 調節部
10 Platform device 11 Base 12 Actuating platform 20, 20A, 20B, 20C Drive device 21, 21A, 21B, 21C Motor 22, 22A, 22B, 22C Interlocking tool 23 Fixing base 24, 24A, 24B, 24C Screw shaft 25, 25A, 25B, 25C Joiner 30, 30A, 30B, 30C Displacement device 31, 31A, 31B, 31C Matching tool 32, 32A, 32B, 32C First linear guideway device 33, 33A, 33B, 33C Second linear guideway device 34 , 34A, 34B, 34C Bearing 40 Displacement bearing platform 41 Stabilizing base 42 Pressure resistor 43 Adjusting part
Claims (5)
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CN103295651A (en) * | 2013-05-10 | 2013-09-11 | 上海大学 | Piezoelectrically-driven inchworm-type positioning workbench based on flexible amplification principle |
WO2015093046A1 (en) * | 2013-12-17 | 2015-06-25 | 日本精工株式会社 | XYθ TABLE DEVICE |
CN104759939A (en) * | 2015-02-15 | 2015-07-08 | 南京航空航天大学 | Normal alignment gesture adjusting mechanism and gesture adjusting method thereof |
CN105467877A (en) * | 2015-12-09 | 2016-04-06 | 珠海市运泰利自动化设备有限公司 | A high precision optical deviation rectifying apparatus based on an eccentric wheel platform |
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JPH09155666A (en) * | 1995-12-01 | 1997-06-17 | Kazuya Hirose | Lateral and longitudinal movement and rotation supporting mechanism of stage |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103295651A (en) * | 2013-05-10 | 2013-09-11 | 上海大学 | Piezoelectrically-driven inchworm-type positioning workbench based on flexible amplification principle |
WO2015093046A1 (en) * | 2013-12-17 | 2015-06-25 | 日本精工株式会社 | XYθ TABLE DEVICE |
JP2015117958A (en) * | 2013-12-17 | 2015-06-25 | 日本精工株式会社 | XYθ table device |
CN105981107A (en) * | 2013-12-17 | 2016-09-28 | 日本精工株式会社 | Xy[theta] table device |
US9919394B2 (en) | 2013-12-17 | 2018-03-20 | Nsk Ltd. | WYθ table apparatus |
CN104759939A (en) * | 2015-02-15 | 2015-07-08 | 南京航空航天大学 | Normal alignment gesture adjusting mechanism and gesture adjusting method thereof |
CN105467877A (en) * | 2015-12-09 | 2016-04-06 | 珠海市运泰利自动化设备有限公司 | A high precision optical deviation rectifying apparatus based on an eccentric wheel platform |
CN105467877B (en) * | 2015-12-09 | 2018-11-16 | 珠海市运泰利自动化设备有限公司 | High-precision optical deviation correcting device based on eccentric wheel platform |
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