JP2009048985A - Static eliminator using ion cloud which has self-running capability - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a static eliminator which can neutralize by making ion cloud to reach static electricity by self-running capability. <P>SOLUTION: Power is supplied from a power source 2 to a needle electrode 1 and a grounding electrode 3, and ion is filled up to a space 8 from a corona generating portion 7 of a needle point of the needle electrode 1, and under this condition, an impulse pressure is impressed into a space 6 and the space 8 by an impulse pressure generating unit 5, and as a result, a mass of ions of a ring shape reaches static electricity while self-running in rotation. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  About static electricity removal

Conventional method

Various techniques have been developed as countermeasures against static electricity, but the static eliminator has expanded its application to textiles, printing, petrochemicals, powders, biotechnology, medical technology, nanotechnology, security, electronics, etc. It is also useful in the industry. As a result, various types are available on the market corresponding to the variety of static electricity types and locations of use.
However, since the basic principle is “neutralizing and extinguishing static electricity by recombination of generated static elimination ions”, regarding the operation principle of the static elimination device, artificial ions are generated out of the generated ions. Some neutralize and extinguish part of the static electricity by recombination, some ions dipolarly bond with part of the static electricity and lower the electric field strength, some ions charge and reverse charge A qualitative explanation that some of the ions that flow out to the earth are qualitative, and a quantitative explanation of which parts recombine, which part produces dipolar coupling, and which part causes reverse charging. Is not done. In order to give a quantitative explanation, we have to start by solving Poisson's equation as an academic method, but since we have not yet obtained an instrument that can measure the charge distribution in-situ, there is no right answer. Inevitably, the materials, shapes, ion generation principles, etc. of the static eliminator and the conditions of use in the field are being studied, taking into account the measured values obtained with dust figures and field meters and the occurrence of failures.
From the above, the improvement of the static eliminator means the application method such as X-ray, ultraviolet ray, high voltage, etc. as the ion generation mode, the life change by the electrode material and shape, the improvement of the static elimination efficiency, the air flow and the ion transport tube Mainly the expansion or limitation of the working range, and the disappearance of ions due to recombination has relied on empirical accumulation. As a matter of fact, these situations can be inferred from the catalogs of each company as follows.
Compact design that reliably removes static electricity from a narrow space, tube-free discharge area layout using tubes, rotation-free nozzle direction, doubling of the induction area by air blowing, ion balance by stirring ion space feedback, nozzle ejection Air gun with integrated dust removal and static elimination, excellent X-ray static elimination, etc.

Reference document

(1) Issued by Japan Electronic Components Reliability Center 16th Reliability / ESD Countermeasure Technology Exhibition Technical Documents 2006.11.
(2) Electrostatic Handbook, Japan Electrostatics Society, 2000.11.

Problems with conventional methods

Regardless of whether there is an academic correct answer regarding the operation of the static eliminator, manufacturers are required to have an evaluation method and proper usage. As a result of various studies by related parties, the charged plate monitoring method is now officially recognized as a method for evaluating the performance of static eliminators.
The charged plate monitoring method is characterized by forming a 20 PF capacitor with 15 cm x 15 cm parallel plate electrodes, charging a DC voltage as a static charge, and reducing the potential when the charge is removed by a static eliminator. The following potential problems remain:
(1) The potential of the conductor can be reduced to 0 by grounding or the like. However, in the case of an insulator, it is almost impossible to make it zero potential except in special cases.
(2) In the case of a conductor, if the potential is set to 0, the charge amount is also reduced to 0. In the case of an insulator, if the sum of positive charges and the sum of negative charges is 0, the charge amount is formally 0, but the effect of static electricity is not 0.
That is, the meanings of potential, charge amount, electric field, and capacitance differ between conductors and nonconductors. Therefore, the performance of the static eliminator evaluated by the charged plate monitor cannot evaluate the performance required for static elimination of a finely processed composite material such as a device. It is necessary to abolish “approach to a value close to that” and change it to “adjust the charge density to 0 or close to any place on the charged body” and perform design, implementation and evaluation based on it.

Problems to be Solved by the Invention

  If you have a static eliminator that neutralizes and eliminates static electricity by moving the static elimination ions along the electric lines of force, positive ions are attracted to negative static electricity, negative ions are attracted to positive static electricity, High quality static elimination is possible without knowledge.

Means for solving the problem

In order for the charge-removing ions to proceed so that the charge density is 0 or close to it at any place on the charged body, it is necessary to maintain the free-running force that moves the required amount of charge-removing ions to the required place. is necessary. The ion for static elimination obtains a self-running force in the suction direction or the repulsion direction by Coulomb force or the like. Therefore, the direction and magnitude of the self-propelled force are determined by appropriately combining the attractive force and the repulsive force. Moreover, the ion which acquired self-propelled power maintains self-propelled power unless there is an obstacle by the law of inertia. Therefore, if the necessary amount of ion for static elimination is set and the self-running force is adjusted, the charge density can be zero or close to that at any place.
In addition, as a method of imparting self-propelled force to ions, when an impact pressure is applied to the ion cloud, the ion cloud is ejected by aerodynamics and self-propelled, and the attractive force between the positively or negatively charged electrode and the ion Or use self-propelling force by using repulsive force, generate self-propelling force by repulsion or suction force of the generated ions, keep the ion self-propelling force by light pressure, ultrasonic waves such as piezoelectric transformer There are various methods such as generating ions and free-running force.

The implementation of the above invention will be constructed with the basic elements of FIGS. 1, 2 and 3 and the additional parts for field use thereof. FIG. 1 does not use an air flow for transporting ions for discharging, the discharging device itself does not generate an air flow, there is no leakage electric field from the discharging device, but the discharging ions can move by themselves by a distance. In the explanatory diagram of the operation, the accessory as a practical machine is omitted in the drawing.
Reference numeral 1 in the figure denotes a needle electrode to which a high voltage is applied. However, it needs to be deformed into a linear shape, a disc shape, a cylindrical shape or the like depending on the purpose of use. In addition, the ion generation source is corona discharge in FIG. 1, but radiation such as X-rays and α rays, shock waves, and the like may be used. Reference numeral 2 denotes a high voltage power supply that supplies power for generating corona discharge to the electrode 1. Reference numeral 3 denotes a ground electrode for generating a corona between the electrode 1 and the electrode 3 is arranged concentrically with the needle electrode 1 in FIG. Reference numeral 4 denotes a container that holds the electrodes 1 and 3 and the device 5 for generating an impact pressure as well as the external structure of the static eliminator, and forms a sealed ion space 6. 7 is a corona generating portion at the end of the needle, and the ions fill the space 8 between the electrode 1 and the ground electrode 3.
In this state, when an impact pressure is applied to the ion spaces 6 and 8 by the pressure generator 5, a ring-shaped ion mass as shown in FIG. It is released to the outside and the ring starts to run.
FIG. 2 is a diagram showing the state of the released ions, where 9 is the ion mass, 10 is the direction of rotation of the ion mass, and 11 is the free-running direction of the ion mass.
Actually, the shape of the electrode 3 may be a rectangle, a slit, a triangle, or the like depending on the application, and the design of the electrode 1, the impact pressure generator 5, the container shape, or the like needs to be appropriately changed accordingly.
Next, FIG. 3 is an explanatory view of the present invention in which the static elimination ions are operated so that the static elimination ions reach the static elimination object by the electric force of the static elimination ions, and the case of a traveling film will be described as an example.
In FIG. 3 (1), 12 is a charged film, 13 and 14 are neutralization ion generators having self-propelled power of the present invention, and if 13 is a positive ion, the polarity is such that 14 generates a negative ion. The power supply is connected so that 13 and 14 are opposite. However, direct current or alternating current may be used. Reference numerals 15, 17, and 19 denote ion masses generated from the ion generator 13, and reference numerals 16, 18, and 20 denote ion masses generated from the ion generator 14. In FIG. 3B, 12 is a charged film, 21 and 22 are conventional static eliminators, and 21 and 22 are opposite in polarity. However, the power source may be direct current or alternating current. Further, 21 and 22 may be static eliminators using impact ionization by ultrasonic waves.
The operation of the static eliminator of FIG. 3 is performed as follows.
In FIG. 3 (1), the ion masses generated by the ion generators 13 and 14 follow the film in the traveling direction (arrow) with a self-propelled force, and proceed to the film surface with the Coulomb force between positive and negative ions. Charge the film. In the case of FIG. 3 (2), the film reaches the film by the Coulomb force of the ion for static elimination, and the charge is almost completely eliminated. However, when the ion supply capacity of the static eliminator is weak, they are used in parallel.
In addition, in such a symmetrical supply of positive and negative ions, since the directions of the positive and negative ions differ by 180 °, it becomes counterbalance to disturbance. If 14 is omitted in FIG. 3 (1), the ion masses 15, 17 and 19 diffuse in the radial direction by the repulsive force between their ions and reach the film by themselves.
Next, FIG. 4 is an example of the case where the present invention of FIG. 3 is commercialized, and instead of using the Coulomb force of positive and negative ions to reach the object to be neutralized, the static electricity is removed by using the image power of the static ion. A case where a charged film is made to reach the object to be discharged will be described as an example.
In FIG. 4, 12 is a charged film, 14 is a static eliminator, 16, 18 and 20 are ion masses for neutralization discharged from the static eliminator, and 23 is a grounded conductor. And a self-propelled force in the film direction is generated in the ions by the force between the ions and the image. It is an object of the present invention to provide a high degree of static elimination by controlling the magnitude and free-running direction of the ion flow by providing several electrodes instead of 23 and appropriately charging them.

FIG. 5 shows the case where the present invention is used for almost the same application as a clean air jet high-frequency thin type static eliminator widely used for static elimination on the surface of an IC tray, CD / DVD, LCD module pressure contact part, etc. Practical parts are omitted in the illustration of the tray static elimination.
In FIG. 5, 24 is a work table, 25 is an IC tray, 26 is a static eliminator of the present invention, 27 is a pipe for supplying clean air, and 28 is a direction of ion mass travel. The clean air supply pipe 27 is unnecessary in principle, but since the dust-free state is important in the IC relationship, the ion generation spaces 6 and 8 in FIG. 1 are used so that the ion mass is dust-free. In addition, it is added at the time of practical use in order to keep the ion block for static elimination in a dust-free state.

The invention's effect

  Although all work is performed in a dust-free state in relation to ICs, clean air is expensive, so air saving is the utmost command. According to the present invention, air is discharged as a rotating ring without being jetted out by a jet, so that it was possible to save the blown air, which is conventionally referred to as 5 l / min minimum, to 0.5 l / min or less. Further, in the present invention, since the non-uniform ion density due to the jet airflow does not occur, uniform static elimination is possible.

  FIG. 6 shows a work place where the entire work space must be uniformly charged, for example, a polarizing plate manufacturing factory, an automobile painting factory, a copying machine assembly factory, a plastic factory, and the like. The defect rate resulting from this is high. In such a place, it is necessary to distribute ions for static elimination in a wide range without wind. FIG. 6 shows an embodiment of the present invention, in which static eliminators are arranged in series and in parallel so as not to hinder the work. In FIG. 6, reference numeral 29 denotes a column for attaching the static eliminator, and reference numerals 30, 31, 32,. In the figure, the support columns are upright on the ground, but it is natural to select the appropriate arrangement depending on the application.

effect

  When the work-in-process dust removal and charge removal were used in the gas stove maker's painting process, the defect rate decreased to 1/10 compared to the conventional product. Further, when the positive ion neutralization device and the negative ion neutralization device were arranged symmetrically, the floating particles whose weight increased due to recombination of positive and negative ions had a large sedimentation rate, and the defect rate decreased to 1/100.

FIG. 7 is an explanatory diagram in the case where the present invention is used for static elimination of an uneven surface, and enables neutralization of a concave portion of an uneven surface that could not be sufficiently eliminated by a conventional method. In FIG. 7, 33 is a charged body having an uneven surface, 34 is a rotating ring-shaped ion for neutralization generated by a static eliminator, 35 is a direction of ion self-running, 36 and 37 are surface protrusions, and 38 is a surface recess. is there. In the figure, l is the thickness of the ring, L is the width of the recess, and r is the ring radius.
The ions supplied by the conventional static eliminator cover the upper surface of the charged body. Therefore, the ions are concentrated on the convex portions 36 and 37 and do not reach the concave portion 38. The static elimination ions of the present invention are ring-shaped, and if the ring thickness l is smaller than the width L of the concave portion, the electric lines of force reach the bottom surface 38 of the concave portion, so that static elimination is possible. Since the ring thickness is proportional to the impact pressure width, the pressure is generated by an abrupt pulse pressure generator. Further, the ring advances in the direction of the arrow while expanding the ring radius r while moving in the direction of the arrow and decreasing the speed. Therefore, it is natural to design the ion amount, pressure, etc. of the ion generator so as to adjust the initial speed and radius of the ring according to the width L and the depth thereof. As described above, the charge removal in the recess means transporting the charge removal ions to the recess, so that the arrangement of the charge removal device as shown in FIG. 3 increases the effectiveness.

effect

  It has become possible to remove static electricity on uneven surfaces, which has been difficult in the past, and three-dimensional details after assembly. When used to prevent discharge breakdown of LEDs on the substrate, the breakdown was zero. In relay production, the defect rate was zero.

  FIG. 8 is an explanatory diagram in the case where the present invention is used for removing static electricity when peeling a molded product or a film, and FIG. 8 shows the time when the film is peeled off. In FIG. 8, 39 is a mold base, 40 is a film to be peeled, 41 is a static eliminating device, and 42 is a self-running ion ring for static elimination. 43 is a part during peeling. In the case of peeling from a fixed mold as shown in the figure, the peeling location moves away from the static elimination device side of 41 toward the peeling, and therefore the ring traveling direction 42 may need to be changed in angle according to the operation. However, in the case of peeling in the case of roll drawing, the peeling position is a fixed position.

effect

  Since only the ion ring is supplied to the location immediately after peeling, there is almost no residual charge compared to the conventional static eliminator. When the residual charge was investigated by the dust figure method, it was a high-quality charge removal with no residual charge.

  The static eliminator of the present invention was arranged as shown in FIG. 3 to remove static electricity from the film stretched in the film manufacturing process, and the apparatus was arranged so as to eliminate static electricity by the Coulomb force of the ion for static elimination.

effect

  When the dust figure of the film after static elimination was created, there was no dust adhesion. The static charge was much better than the conventional one.

  FIG. 9 is an explanatory diagram of the case where the present invention is used for static electricity neutralization of a powder device, a liquid stirring reaction device, etc., and the drawing is a case where the present invention is used in a stirring reaction tank. In FIG. 9, 44 is a stirring blade, 45 is a liquid to be stirred, 46 is a reaction tank, and 47 is a static eliminator of the present invention. In general, when collecting powder with a bag filter or when stirring an insulating liquid in a reaction tank, strong static electricity is generated, which causes various obstacles. That is, in the reaction tank, a coating such as glass lining is applied so that the container and the stirring blade are not corroded, but the coating surface is damaged by static electricity. Moreover, if it is a combustible material, it will become a disaster, such as being ignited by electrostatic discharge. When the ion mass reaches the liquid surface by self-propelling force as in the present invention, the static electricity is neutralized and extinguished, and the destruction of the tank and the ignition explosion can be prevented.

effect

  When used in a reaction vessel, electrostatic damage to the coating surface disappeared. In the case of combustible materials, there was no ignition because no electrostatic discharge occurred. In the case of powder agitation, electrostatic aggregation disappeared.

FIG. 10 is an explanatory view when the present invention is used for transporting pipes of powder, pellets, etc., 48 is a pipe wall, 49 and 50 are neutralization devices of the present invention, and the neutralization is carried out as the transportation pipe diameter increases. The number of devices increases. 51 is a powder cloud during pipe transportation, 52 is a static elimination ion, 53 is a powder flow flowing into the pipe, and 54 is a powder flow flowing out. The powder moves in the direction of the arrow while being charged against the pipe wall, and flows into the silo, bag filter or container.
Since it is sufficient to reduce the static electricity to 0, ions for static elimination were mixed with the powder cloud during pipe transportation by the static eliminator of the present invention.

effect

In the conventional static eliminator that generates the corona from the needle-like electrode, powder and the like are accumulated in the corona generating portion, so that maintenance is difficult. In addition, various problems have arisen because the charge removal effect of the ion cloud on the powder is not uniform.
In the static eliminator of the present invention, in order to prevent the powder from flowing into the ion spaces 6 and 8 of FIG. In addition, since the ion ring is put into a pellet or powder flow in a rotating state, uniform discharge can be performed, and the conventional transportation trouble does not occur.

FIG. 11 is an explanatory view of an operation when the present invention is used for removing static electricity in a container having a narrow diameter with respect to the internal volume, and is a cross-sectional view of the container and the static eliminator along the central axis. In the figure, 55 is a static eliminator, 56 is a vessel wall, 57, 58, 59, 60, and 61 are ion advancing positions, and 62, 63, 64, 65, 66, and 67 are the self-propelled forces of ions. The electrodes for controlling the direction are supplied with a necessary charge amount from a separate control power source (not shown).
The ionizing ion mass started from 55 enters the container by a self-propelled force, and at 57, some charges neutralize the wall charges by the attraction between the control electrode 62 and the rest forward. proceed. The ions are neutralized on the wall surface while being attracted or repelled by the electrodes 63, 64, 65, 66, and 67 while proceeding as 58, 59, 60, and 61. However, since the magnitude and time of the control charge supplied to the control electrode are determined by the relationship between the static elimination ions emitted by the static elimination device and the magnitude of the container static electricity, they are adjusted by an adjustment experiment after installation.

effect

  Static electricity in the container, which has been regarded as a problem with powdered drugs and reagents, can be removed, and there is almost no loss of chemicals remaining in the container due to electrostatic adhesion.

12, 13, and 14 show the self-propelled ion for neutralization in FIG. 1, FIG. 2, and FIG. 3 in order to eliminate the charge so that the charge density is 0 or close to any part of the charged body. It is one of the usage examples which adjust self-running direction and self-running force, and is an explanatory view of what is generally called a superposition method.
Between the ion masses 15 and 16 in FIG. 3 (1) or between the ion masses 21 and 22 in FIG. 3 (2), the strongest on the center line as shown by the diagram 71 in FIG. Self-propelled power is generated, and the self-propelled power decreases rapidly when leaving the center line. However, 68 in FIG. 12 is a symmetrical plane of the positive ion mass 69 and the negative ion mass 70, and the line connecting the ion masses 69 and 70 is the center line of the free-running force distribution diagram.
By the way, the free-running force distribution diagram as shown in FIG. 12 can be obtained by replacing the ion mass 70 with a conductor supplied with electric charge. Therefore, as shown in FIG. 13, electrodes 72, 73, 74, and 75 for self-running force adjustment are arranged in the vicinity of the symmetry plane 68, and although not shown in the figure, control charges are respectively supplied from separately provided power sources. When supplied, the free-running force distribution of the ion mass is as shown in FIG. 14, the distribution 76 between the ion mass 69 and the electrode 72, the distribution 77 between the ion mass 69 and the electrode 73, and the ion mass 69 and the electrode 74. The sum of the distribution 78 between and the distribution 79 between the ion mass 69 and the electrode 75 is the free-running force distribution of the ion mass 69, and is almost uniform 80 at any location.
Three units A, B, and C that can be neutralized at the above-mentioned uniform density are arranged in the direction of travel of the uniaxially stretched film device, and are uniformly weakly and reversely charged with A, and then weakly neutralize again with B. Finally, a very weak charge removal was performed so that a charge density of 0 was distributed in C, and a charge removal effect with a residual charge of almost 0 was obtained.

effect

  In a conventional static elimination device that lowers the potential of a charged body, it is difficult to eliminate static electricity at a charge density of 0 or close to any location on the charged body. The neutralization device according to the present invention can supply static electricity to any place with almost the same charge density, so that the charge density of the charged body can be reduced step by step to neutralize the charge. High quality static neutralization is now possible.

A static eliminator that uses an ion cloud having a self-propelling force has a property that the ion cloud that is self-propelled diffuses and expands due to a repulsive force between charges of the same polarity. Since the enlargement speed increases as the ion density increases, positive ions and negative ions can be alternately arranged to increase the electroviscosity and reduce the cloud diameter expansion. However, even if alternating positive and negative ions are generated, the ion cloud does not become higher than the ion generation density of the ion generation portion.
FIG. 15 is an electrode layout for converging the ion cloud at a high density. 81, 82, 83, and 84 are spherical, elliptical, or similar electrodes, 85 is an alternating power source, and 86 is an explanation of the operation. , 87 is a turning point of the moving direction of 86, 88 is a convergence point of the ion cloud, 89 and 90 are turning points of the moving direction of the ion 86, and the electrodes 81 and 83 and the electrodes 82 and 84 have the same polarity. In addition, 81 and 82 are connected to the power source 85 so as to have different polarities, and the operation proceeds as follows.
If the ion 86 and the electrode 84 are positive and the electrode 83 is negative, 86 receives a repulsive force from 84 and a suction force from 83 and moves in the direction 87. Here, when the polarity of the power source is reversed, 86 moves in the direction 89. When the polarity of the power supply is reversed again, the ions are reversed in the 89 to 90 direction. Thereafter, 86 converges to a convergence point 88 in the same manner. Since all ions in the region surrounded by the electrodes 81, 82, 83, and 84 move in the same manner as 86, a high-density ion cloud centered on 88 is obtained.
Although not described in FIG. 15 based on the above operation principle, the ion cloud that has flowed into the electrode space from the static eliminator located above the drawing is converged around 88 by the electrode converging action, and a high-density ion cloud is formed. While forming, it is self-propelled in the direction of the back surface of FIG.
When the present invention was mounted on a tube or pipe for ion air conveyance, the ion concentration was hardly reduced even at a conveyance distance of 10 m.

effect

  Conventionally, it has been said that neutralization of a small area cannot be performed. When the static eliminator having a converged diameter of 0.3 mm according to the present invention was used for static elimination of minute partial charges generated during the GMR head production process, the incidence of defective products was reduced to 1/50.

When an IC or the like layered for improving the degree of integration is processed without sufficient removal of static electricity generated during the process, the static electricity is confined inside and causes a failure different from charging of the surface.
FIG. 16 is an explanatory diagram of the operation of a static eliminator that self-runs static electricity confined to the outside. Since static electricity leaked to the outside is eliminated by a conventional static eliminator, FIG. 16 does not describe the neutralization of surface charges. Not.
In FIG. 16, 91 is the surface of the charged body, 92 is the position of the internal charge, 93 and 94 are electrodes that give the internal charge 92 a free-running force, 95 is a power source for exciting the electrode, and 96 is the free-running direction of the internal charge. It is.
The operation is the same as in FIG. 15, but the free-running force of internal ions in the solid insulator is highly dependent on the power supply frequency. It is necessary to change depending on the type of insulator.

effect

  When the present invention was used for producing a material that hardly caused a heat-stimulated microcurrent, a material that hardly caused a heat-stimulated microcurrent could be produced.

FIG. 17 is an explanatory diagram for removing static electricity on the surface of a fine pore when a fine hole of 0.5 mmφ is made in the plate-like insulator. 97 is a plate-like insulator, 98 is a pore, 99 is impact ion generation The machine 100 is an ion generating part, and the radius is about ½ of the pores.
When the center line of the pore and the center line of the impact ion generator are arranged to coincide with each other and the impact ion generator is excited, the ion for static elimination self-runs from the ion generator 100 toward the pore, and the wall charge Move forward while neutralizing. By the way, the impact ion generator mentioned here uses the ion generation generated on the output side of a piezoelectric transformer or the like as it is in the static eliminator, and the ion generation is due to the shock wave at the interface due to the impact force of the piezoelectrons. Note that the phenomenon of air ionization due to shock waves is a phenomenon that has been known for quite some time, but there has been no example of use in a static eliminator.

effect

  A method of eliminating static electricity on the wall surface generated when a solid insulator is drilled has not been obtained. Since the present invention makes it possible to neutralize the pores, when used in the substrate processing process, defects due to dust adhesion are eliminated.

  Illustration of a device that generates self-propelled ion clouds by corona discharge and shock waves   Schematic diagram of rotating annular static elimination ions with self-propelled power   Explanatory drawing of the operation in which ion for static elimination adheres to the object to be neutralized by coulomb force between ion masses for static elimination   Explanatory diagram of the operation of self-propelled attachment of static elimination ions to the static elimination object with the image power of static elimination ions   Explanatory drawing of operation when using the static eliminator of the present invention for static elimination of the IC tray   An example of the arrangement of the static eliminator when the static eliminator of the present invention is used to uniformly neutralize the entire workplace.   Explanatory drawing of concave surface neutralization when the present invention is used for neutralization of a concave surface of a neutralized body with an uneven surface   Explanatory drawing of the operation when the static eliminator of the present invention is used for static elimination of peeling charge   Explanatory drawing when the static eliminator of the present invention is used to remove the stirring charge of the insulating liquid in the stirring solvent tank   Explanatory diagram of operation when using the static eliminator of the present invention for transporting powder and pellet pipes   Explanatory drawing of the device that optimizes the state of the ion for static elimination with the control electrode for removing static electricity from the inner wall of the small container   Distribution map of free-running force between positive and negative equivalent ion masses   Example of arrangement of multiple electrodes to control the free-running force distribution of ion mass   Explanatory drawing when self-running force distribution of ion mass by multiple electrodes is obtained by superposition method   Explanatory drawing of the device that converges the ion cloud with the control electrode and densifies it   Illustration of a static eliminator that self-propels static electricity confined inside   Explanatory drawing of the device that gives ion generation and self-propelled force to ions with impact ion generator

Explanation of symbols

1: Needle-shaped electrode 2: Power supply 3: Ground electrode 4: Static elimination device container 5: Impact pressure generator 6: Ion generation space 7: Corona generation part 8: Ion space between ground electrode and needle electrode 9: Ion ring 10: Direction of rotation of the ion ring 11: Direction of self-running of the ion ring 12 Charged film 13.14: Static elimination device 15.16 ... 19.20: Ion mass for static elimination 21.22: Static elimination device 23: Grounded Conductor 24: Work table 25: IC tray 26: Static elimination device 27: Clean air supply pipe 28: Ion traveling direction for static elimination 29: Post for attaching static elimination device 30.31.32: Static elimination device 33: Charged body with uneven surface 34 : Rotating ring-shaped ion ring for static elimination 35: Self-running direction of ions 36 and 37: Convex part of charged body 38: Concave part of charged body l: Thickness of ion ring for static elimination L: Width of concave part r: Ion Ring radius 39: Mold base 40: Peeling film 41: Static elimination device 42: Ion cloud for static elimination 43: Part during peeling 44: Stirring blade 45: Liquid 46: Reaction tank 47: Static elimination device 48: Transport pipe wall 49 50: Static elimination device 51: Powder during pipe transportation 52: Ion flow for static elimination 53: Powder flow flowing into the pipe 54: Powder flow flowing out from the pipe 55: Static elimination device 56: Container wall 57, 58, 59 60, 61: Ion for static elimination 62, 63, 64, 65, 66, 67: Control electrode 68: Symmetric plane of positive ion mass and negative ion mass 69: Positive ion mass 70: Negative ion mass 71: Positive and negative ions 72, 73, 74, and 75: Self-propelling force adjusting electrodes 76, 77, 78, and 79: Self-running force distribution between each electrode and the ion mass 80: Each electrode and the ion mass Overlap value of self-propelled power of 81 ・ 82 83.84: Ion converging electrode 85: Alternating power supply 86: Ion 87. 89.90: Ion movement direction turning point 88: Ion cloud convergence point 91: Charged body surface 92: Charge confined inside 93.94 : Self-propelled force application electrode 95: Power supply 96: Internal charge self-propelled direction 97: Plate insulator 98: Fine pore 99: Impact pressure generator 100: Ion generator

Claims (6)

  In the static eliminator that neutralizes and extinguishes static electricity with the artificially generated ion cloud, the static eliminator that gives the ion cloud self-propelling force by impact force, and the static electricity removing ion cloud reaches the static electricity by self-propelling force   In a static eliminator that neutralizes and extinguishes static electricity with an artificially generated ion cloud, a self-propelling force is applied to the ion cloud for static elimination by the attractive force between positive and negative charges or the repulsive force of the same polarity charge. Static eliminator that allows clouds to reach static electricity by self-propelled force   In a static eliminator that neutralizes and extinguishes static electricity with an artificially generated ion cloud, the static eliminator controls the direction and magnitude of the self-running force of the ion cloud for static elimination by applying a control charge or potential to the set electrode.   In static eliminators that neutralize and extinguish static electricity by transporting artificially generated ion clouds, multiple pairs of positive and negative control electrodes are provided symmetrically between the positive and negative electrodes in the length direction. Static electricity removal device that makes the ion cloud for static elimination self-run at the center of the electrode pair by applying an alternating charge or electric potential to the electrode to form a high density ion cloud or enable long-distance transportation   In a static eliminator that neutralizes and extinguishes static electricity with an artificially generated ion cloud, self-propelling force is applied by the alternating charge or potential of the electrode set to the static electricity existing inside the solid or liquid, and the static electricity inside is lifted , Static elimination equipment   In the static eliminator using ions generated by shock waves, the static eliminator gives self-running force to the ions by the impact pressure at the ion generation point of the impact pressure generating vibrator.

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