[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

JP2008300852A - Manufacturing method of airtight terminal and electronic component - Google Patents

Manufacturing method of airtight terminal and electronic component Download PDF

Info

Publication number
JP2008300852A
JP2008300852A JP2008162708A JP2008162708A JP2008300852A JP 2008300852 A JP2008300852 A JP 2008300852A JP 2008162708 A JP2008162708 A JP 2008162708A JP 2008162708 A JP2008162708 A JP 2008162708A JP 2008300852 A JP2008300852 A JP 2008300852A
Authority
JP
Japan
Prior art keywords
leads
lead
fixing material
airtight terminal
fixing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008162708A
Other languages
Japanese (ja)
Inventor
Koichi Komoda
孝一 薦田
Kazutaka Oseto
一隆 大瀬戸
Isato Yamauchi
勇人 山内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Schott Components Corp
Original Assignee
NEC Schott Components Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Schott Components Corp filed Critical NEC Schott Components Corp
Priority to JP2008162708A priority Critical patent/JP2008300852A/en
Publication of JP2008300852A publication Critical patent/JP2008300852A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an airtight terminal for preventing the generation of double defects by the fitting of the lead of another airtight terminal between the leads of a certain airtight terminal, bending of the lead and the dispersion of the thickness of a plating layer between the leads, when plating many airtight terminals altogether by a barrel plating method. <P>SOLUTION: The manufacturing method of the airtight terminal comprises a process of fixing the lower ends of the leads 3A and 3A by a fixing material 5 while keeping a prescribed interval for each airtight terminal Ao, a process of forming the plating layer 4 on the fixed leads, and a process of cutting the plated leads 3A and 3A from the part near the fixing material 5. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、気密端子の製造方法およびその方法で製造された電子部品に関し、より詳細には、バレルめき方法を適用して例えば2本のリード表面にめっき層を形成した円筒型気密端子の製造方法に関する。   The present invention relates to a method for manufacturing a hermetic terminal and an electronic component manufactured by the method, and more specifically, manufacturing a cylindrical hermetic terminal in which, for example, two lead surfaces are formed by applying a barreling method. Regarding the method.

従来、気密端子はその用途に応じて各種の構造のものがあり、金属外環やリード等の金属部材の露出部分には用途に応じた材質および厚さのめっき層が形成されている。図13は、腕時計向け水晶振動子用の円筒型気密端子Cの一部を断面で示した斜視図を示す。図13において、61は円筒状の金属外環で、その内部にガラス62を介してリード63,63が気密に封着されている。そして、前記金属外環61およびリード63,63の露出表面に、防錆およびはんだ付け性等のために、Ni,Au,はんだ等のめっき層64,64が形成されている。   Conventionally, there are various types of hermetic terminals depending on the application, and a plating layer of a material and thickness corresponding to the application is formed on an exposed portion of a metal member such as a metal outer ring or a lead. FIG. 13 is a perspective view showing a part of a cylindrical airtight terminal C for a quartz crystal unit for wristwatches in cross section. In FIG. 13, reference numeral 61 denotes a cylindrical metal outer ring, and leads 63 and 63 are hermetically sealed through a glass 62 therein. On the exposed surfaces of the metal outer ring 61 and the leads 63, 63, plated layers 64, 64 of Ni, Au, solder, etc. are formed for rust prevention and solderability.

上記気密端子Cは、図14の製造工程ブロック図に示す製造方法で製造されている。まず、金属外環61、ガラス微粉末を有機バインダとともに混練し造粒したものを所定形状に成形し仮焼きしたガラスタブレット62aおよび所定長さ寸法lのリード63,63を用意し[図14(a)]、これらをグラファイト製の封着治具を用いて所定の位置関係に組み立て[図14(b)]、全体を中性または弱還元性雰囲気中で980〜1000℃で加熱して、前記ガラスタブレット62aを溶融させたガラス62を介して、金属外環61とリード63,63とを絶縁してかつ気密に封着する[図14(c)]。この後、金属外環61およびリード63,63の露出部分にめっき層64,64を形成する。すると、前述した図13に示すような気密端子Cが製造できる[図14(d)]。例えば、この種のリードめっきの方法については、特許文献1および2が開示する。
特開昭61−216349号公報 特開平01−096395号公報
The airtight terminal C is manufactured by the manufacturing method shown in the manufacturing process block diagram of FIG. First, a metal outer ring 61, a glass tablet 62a obtained by kneading and granulating glass fine powder together with an organic binder, and pre-baking the glass tablet 62a and leads 63, 63 having a predetermined length l are prepared [FIG. a)], these are assembled in a predetermined positional relationship using a graphite sealing jig [FIG. 14 (b)], and the whole is heated at 980-1000 ° C. in a neutral or weakly reducing atmosphere, The metal outer ring 61 and the leads 63 and 63 are insulated and hermetically sealed through the glass 62 in which the glass tablet 62a is melted [FIG. 14 (c)]. Thereafter, plating layers 64 and 64 are formed on the exposed portions of the metal outer ring 61 and the leads 63 and 63. Then, the airtight terminal C as shown in FIG. 13 can be manufactured [FIG. 14D]. For example, Patent Documents 1 and 2 disclose this type of lead plating method.
Japanese Patent Laid-Open No. 61-216349 Japanese Patent Laid-Open No. 01-096395

ところで、前記金属外環61やリード63,63の露出部分へのめっき層64の形成であるが、腕時計向け水晶振動子用の円筒型気密端子Cは、金属外環61の外径寸法が0.90〜0.95mm程度と非常に小さいため、めっき工程の作業能率を高めるためには、バレル内に多数の気密端子Cを収容して一括してめっきする,いわゆるバレルめっき法で行なうことが望まれる。しかしながら、前述のとおり、腕時計向け水晶振動子用の円筒型気密端子Cは、金属外環61の外径寸法が0.90〜0.95mm程度と非常に小さく、それに応じてリード63,63の外径寸法dも0.13〜0.17mm程度と小さくなり、しかもリード63,63間の間隔寸法gが0.10〜0.20mm程度と、リード63,63の外径寸法dとほぼ同等程度になっているため、バレルめっき法を採用すると、ある気密端子C1のリード63が他の気密端子C2のリード63,63間に嵌まり込んでしまい、その状態でめっき層64が形成されるために、ある気密端子C1のリード63と他の気密端子C2のリード63同士がめっき層64によってくっ付いてしまう,いわゆるアベック不良が多発するという問題点があった。また、前述のとおり、リード63,63が細く腰が弱いため、リード63,63が折れ曲る,いわゆるリード曲がり不良も発生しやすいという問題点があった。さらに、リード63,63同士がガラス62によって絶縁されているので、一方のリード63と他方のリード63とのめっき層64の形成条件(めっき条件)が微妙に相違して、両リード63,63に均一なめっき層64,64が形成しにくいという問題点もあった。   By the way, although the plating layer 64 is formed on the exposed portions of the metal outer ring 61 and the leads 63 and 63, the outer diameter of the metal outer ring 61 is 0 in the cylindrical airtight terminal C for a quartz resonator for a wristwatch. .90-0.95 mm, which is very small, in order to increase the working efficiency of the plating process, a so-called barrel plating method in which a large number of hermetic terminals C are accommodated in a barrel and plated at once is performed. desired. However, as described above, the cylindrical airtight terminal C for a quartz crystal for a wristwatch has a very small outer diameter of the metal outer ring 61 of about 0.90 to 0.95 mm, and the leads 63 and 63 accordingly. The outer diameter d is also reduced to about 0.13 to 0.17 mm, and the distance g between the leads 63 and 63 is about 0.10 to 0.20 mm, which is substantially equal to the outer diameter d of the leads 63 and 63. Therefore, when the barrel plating method is employed, the lead 63 of one hermetic terminal C1 fits between the leads 63 and 63 of the other hermetic terminal C2, and the plating layer 64 is formed in this state. For this reason, there is a problem that so-called Abeck failure, in which the lead 63 of one hermetic terminal C1 and the lead 63 of another hermetic terminal C2 are adhered to each other by the plating layer 64, occurs. Further, as described above, since the leads 63 and 63 are thin and the waist is weak, there is a problem that the leads 63 and 63 are bent, so-called lead bending failure is likely to occur. Furthermore, since the leads 63 and 63 are insulated from each other by the glass 62, the formation conditions (plating conditions) of the plating layer 64 between the one lead 63 and the other lead 63 are slightly different from each other. In addition, there is a problem that uniform plating layers 64 and 64 are difficult to form.

前述のリード同士のアベック不良を防止するためには、例えば、特許文献1の特開昭61−216349号公報に記載されるように、複数の気密端子のリード63,63同士を共通接続導電線によって溶接して、同電位にしてめっきする方法もあるが、前述の腕時計向け水晶振動子用のように非常に小さな円筒型気密端子Cにあっては、リード63,63同士を前記共通接続導電線によって溶接する作業が極めて煩雑であり、めっき層の形成原価が著しく高騰してしまい、安価な腕時計向け水晶振動子用の気密端子Cには到底採用できない。しかも、各気密端子Cが共通接続導電線によって溶接されていると、気密端子Cをバレルめっき法でめっきしようとする際に、共通接続導電線が邪魔になってバレル内への気密端子Cの収容量が制限を受ける。さらに、前述のリード63,63同士を前記共通接続導電線によって溶接して同電位にする作業時に、細くて腰の弱いリード63,63を曲げてしまいやすいため、めっき層64,64の形成工程後にリード63,63の修正作業が必要になる。したがって、このような観点からも原価が高騰してしまい、安価な水晶時計用の気密端子Cには到底採用できない。さらにまた、リードの固着に用いた共通接続導電線は、リードの切断後は金属屑として処分するしかなく、資材費や処分費用が嵩むという問題点もある。また、特許文献2の特開平01―096395号公報は、複数本のリードを同一方向に引き出した気密端子のめっき工程でのリード曲がりやアベック不良を防止するめっき方法として、リードの先端部分を樹脂液に浸漬して複数本のリード間に樹脂材を使用して橋絡して一体に固着し、前記リード間を一定に保持してめっきを施す気密端子の製造方法を記載する。   In order to prevent the above-mentioned Abeck failure between the leads, for example, as described in Japanese Patent Application Laid-Open No. 61-216349 of Patent Document 1, a plurality of airtight terminal leads 63 and 63 are connected to a common connection conductive wire. However, in the case of a very small cylindrical airtight terminal C as in the above-described quartz resonator for wristwatches, the leads 63 and 63 are connected to the common connection conductive material. The operation of welding with a wire is extremely complicated, and the formation cost of the plating layer is remarkably increased, so that it cannot be adopted as an inexpensive hermetic terminal C for a quartz resonator for wristwatches. In addition, when each hermetic terminal C is welded by the common connection conductive wire, when the hermetic terminal C is to be plated by the barrel plating method, the common connection conductive wire becomes an obstacle and the hermetic terminal C enters the barrel. Capacity is limited. Furthermore, since the leads 63 and 63 that are thin and weak are easily bent when the leads 63 and 63 are welded to the same potential by welding the common connection conductive wires, the formation process of the plating layers 64 and 64 is performed. Later, it is necessary to correct the leads 63 and 63. Therefore, from this point of view, the cost is soared that it cannot be used for an inexpensive hermetic terminal C for a quartz watch. Furthermore, the common connection conductive wires used for fixing the leads must be disposed of as metal scraps after the leads are cut, resulting in a problem of increased material costs and disposal costs. Japanese Patent Application Laid-Open No. 01-096395 of Patent Document 2 discloses a method for plating which prevents lead bending or Abeck failure in a plating process of an airtight terminal in which a plurality of leads are drawn out in the same direction. A manufacturing method of an airtight terminal is described in which a resin material is used between a plurality of leads immersed in a liquid solution and bridged and fixed integrally, and plating is performed while holding the leads constant.

本発明の目的は上述するような腕時計向け水晶振動子用の円筒型気密端子Cのように小さな電子部品であっても、リード同士のアベック不良や、リード曲がりが発生させないために、上記導電材あるいは樹脂材を使用して事前に固着短絡または橋絡した気密端子部品を用意し、この気密端子部品をバレルめっきする気密端子としての電子部品を提供する。すなわち、多数の気密端子部品をバレルめっき法によりそのリード表面にろう材層を形成する際、ある気密端子のリード間に他の気密端子のリードが嵌まり込んでアベック不良を発生させたり、リードが折れ曲ったり、あるいはリード間でめっき層の厚さがばらついたりすることのない気密端子の製造方法、およびその方法により製造した電子部品の提供を目的とする。   The object of the present invention is to prevent the above-mentioned conductive material from causing bad Abeck or bending of leads even in a small electronic component such as the above-described cylindrical airtight terminal C for a quartz crystal for a wristwatch. Alternatively, an airtight terminal component that is preliminarily fixed short-circuited or bridged using a resin material is prepared, and an electronic component is provided as an airtight terminal for barrel-plating the airtight terminal component. That is, when forming a brazing filler metal layer on the lead surface of a large number of hermetic terminal parts by barrel plating, leads of other hermetic terminals are fitted between the leads of a certain hermetic terminal, causing an Abeck failure, An object of the present invention is to provide a method for manufacturing an airtight terminal that does not bend or the thickness of a plating layer does not vary between leads, and an electronic component manufactured by the method.

本発明によれば、金属外環に絶縁材を介し相互に離隔し気密封着して貫通させた複数個のリードを備える気密端子部品に関し、それぞれのリード下端部同士を固着材により固着させる工程と、多数の気密端子部品をバレルに収容して複数個のリードにめっき層を形成するバレルめっき工程と、めっき層の形成後にリードを所定位置で切断して固着材を除去する工程とを含み、金属外環から貫通して伸び出るリード部分に均一なめっき層を設けたことを特徴とする気密端子の製造方法が提示される。ここで、前記めっき層ははんだ付け性のよいろう材層である。めっき層がろう材層であると、このめっき層を利用して、リードに水晶振動片等の電子部品素子をろう付けしたり、リードをプリント基板にろう付けする場合にろう付け作業を容易確実にできる。また、前記固着材はボール状塊の外径寸法がリード間の間隔寸法より大きくする。ボール状の固着材の外径寸法が電子部品のリード間の間隔寸法よりも大きいと、電子部品のリードの下端部をボール状の固着材の上に容易かつ確実に配置でき、製造効率が高くなる。   The present invention relates to a hermetic terminal component including a plurality of leads that are separated from each other through an insulating material and hermetically sealed through a metal outer ring, and the steps of fixing the lower ends of each lead with a fixing material And a barrel plating process in which a plurality of hermetic terminal components are accommodated in a barrel and a plating layer is formed on a plurality of leads, and a lead is cut at a predetermined position after the plating layer is formed, and a fixing material is removed. A method for manufacturing an airtight terminal is provided, in which a uniform plating layer is provided on a lead portion extending through the metal outer ring. Here, the plating layer is a brazing material layer with good solderability. If the plating layer is a brazing material layer, this brazing layer can be used to easily braze electronic components such as crystal vibrating pieces to the leads or braze the leads to the printed circuit board. Can be. The fixing material has a ball-shaped lump having an outer diameter larger than a distance between leads. If the outer diameter of the ball-shaped fixing material is larger than the distance between the leads of the electronic component, the lower end of the lead of the electronic component can be easily and reliably placed on the ball-shaped fixing material, resulting in high manufacturing efficiency. Become.

本発明の別の観点によれば、金属外環にガラス絶縁材の介在で相互に離隔させて貫通するリードを気密に封着し、リード上下の伸び出た部分にめっき層を形成した気密端子であって、前記めっき層は、リードの下端部同士を所定間隔に保ったまま固着材で固着した気密端子部品を準備し、準備された多数の気密端子部品をバレル内に収容して一括めっきによりリード表面にめっき層を形成し、めっき処理後にリードの下端部切断により固着材を除去したことを特徴とする電子部品を提供する。好ましくは、気密端子はリードの間隔寸法が0.1〜0.2mm程度である水晶振動子用の円筒型気密端子である。また、気密端子は金属外環が低炭素鋼、Fe―Ni合金またはFe−Ni−Co合金からなる外径寸法が0.90〜0.95mmであり、前記リードがFe―Ni合金またはFe−Ni−Co合金からなる外径寸法が0.13〜0.17mmである水晶振動子用の円筒型気密端子である。このように、電子部品が水晶振動子用の円筒型気密端子であると、外径寸法が小さく、リードが細く腰が弱い上に、リードの間隔寸法がリードの外径寸法にほぼ等しいような場合であっても、リード同士のアベック不良がなく、リード曲がりがなく、しかも均一なめっき層を有する気密端子の製造方法を利用した電子部品が提供できる。   According to another aspect of the present invention, an airtight terminal having hermetically sealed leads penetrating the outer metal ring with a glass insulating material interposed therebetween, and forming plating layers on the extended portions above and below the lead The plating layer is prepared by preparing a hermetic terminal component fixed with a fixing material while keeping the lower end portions of the leads at a predetermined interval, and housing a number of prepared hermetic terminal components in a barrel and batch plating. Thus, an electronic component is provided in which a plating layer is formed on the surface of the lead and the fixing material is removed by cutting the lower end portion of the lead after the plating process. Preferably, the hermetic terminal is a cylindrical hermetic terminal for a crystal unit having lead spacing of about 0.1 to 0.2 mm. The hermetic terminal has an outer diameter of 0.90 to 0.95 mm in which the metal outer ring is made of low carbon steel, Fe—Ni alloy or Fe—Ni—Co alloy, and the lead is Fe—Ni alloy or Fe— This is a cylindrical airtight terminal for a crystal resonator having an outer diameter of 0.13 to 0.17 mm made of a Ni—Co alloy. Thus, when the electronic component is a cylindrical hermetic terminal for a crystal resonator, the outer diameter is small, the leads are thin and the waist is weak, and the distance between the leads is almost equal to the outer diameter of the leads. Even in this case, it is possible to provide an electronic component using a manufacturing method of an airtight terminal having no lead failure between leads, no lead bending, and a uniform plating layer.

気密端子ごとにリードの下端部同士をその相互間隔を保ったまま固着するために、リード間を橋絡する固着装置が利用される。この固着装置は、例えば、固着材として使用する樹脂または導電材を溶融状態で収容する箱型容器と、溶融状態を保つよう容器底部に配置したヒータと、気密端子部品を所定間隔で保持して上下動する固着治具と、この固着治具の一定以上の下降を阻止するストッパとを具備する。固定治具には、気密端子リードが平面内でX方向に移動可能でY方向には移動不可能な多数のスリットを有する櫛歯が使用され、スリットの幅寸法wはリードの外径寸法よりも若干大きく、かつ金属外環の外径寸法よりも小さく設定する。各スリットの開口端には、リードの挿入を容易にするためにテーパが設けられ、多数の気密端子部品を吊り下げ状態で保持した固着治具をストッパによって停止する位置まで下降させて、リード下端部のみを溶融状態の固着材に浸漬する。所定時間固着材に浸漬保持した後、固着治具が引き上げられる。   In order to fix the lower end portions of the leads to each hermetic terminal while maintaining the mutual spacing, a fixing device that bridges the leads is used. This fixing device, for example, holds a box-shaped container for containing a resin or conductive material used as a fixing material in a molten state, a heater arranged at the bottom of the container so as to keep the molten state, and airtight terminal components at predetermined intervals. A fixing jig that moves up and down and a stopper that prevents the fixing jig from descending above a certain level are provided. The fixing jig uses comb teeth having a large number of slits in which the airtight terminal lead can move in the X direction and cannot move in the Y direction in a plane. The width w of the slit is larger than the outer diameter of the lead. Is set to be slightly larger and smaller than the outer diameter of the metal outer ring. A taper is provided at the open end of each slit to facilitate lead insertion. The fixing jig holding a number of airtight terminal parts in a suspended state is lowered to a position where it is stopped by a stopper, and the lower end of the lead Only the part is immersed in the molten fixing material. After dipping and holding in the fixing material for a predetermined time, the fixing jig is pulled up.

導電材の固着材によるリードの固着は、固着治具を用いて多数の気密端子部品のリード下端部をボール状固着材の上に配置し、前記固着材の溶融点以上に加熱することによって行われる。このように、リード下端部をボール状の低融点合金の上に配置して、前記低融点合金の溶融点以上に加熱すると、多数の気密端子部品のリードを一括して固着材により固着することができ、各リードの下端部を従来のように共通接続導電線を溶接する方法に比較して、格段に作業性が優れており、大量生産に適する。固着材が樹脂材であっても同様な効果が期待できる。   The fixing of the lead with the fixing material of the conductive material is performed by placing the lower end portions of the leads of the many airtight terminal parts on the ball-shaped fixing material using a fixing jig and heating the same at or above the melting point of the fixing material. Is called. In this way, when the lower end of the lead is placed on a ball-shaped low melting point alloy and heated to the melting point or higher of the low melting point alloy, the leads of a large number of hermetic terminal parts are fixed together by a fixing material. Compared to the conventional method of welding the common connection conductive wire at the lower end of each lead, the workability is remarkably superior and suitable for mass production. The same effect can be expected even if the fixing material is a resin material.

多数の気密端子部品のリード下端部を固着する工程は上記のバッチ方式で行なうほかに連続または間欠的に処理することもできる。また、固着工程は固着材を溶融状態で収容する収容容器と、必要に応じ、温度調節する下部ヒータを具備し、前記固着材収容容器内には、溶融状態の固着材が収容されて、この収容容器の上には、整流板が設置される。加えて、前記溶融状態の固着材をポンプで整流板の上に供給して、所定厚さの溶融状態の固着材による層流を作る。さらに、この層流の上方には、所定間隙でコンベアが設置され連続的または間欠的に移送されるように構成されている。   The process of fixing the lower ends of the leads of a large number of airtight terminal parts can be performed continuously or intermittently in addition to the batch method described above. In addition, the fixing step includes a storage container that stores the fixing material in a molten state, and a lower heater that adjusts the temperature if necessary. The fixing material storage container contains the fixing material in a molten state. A baffle plate is installed on the storage container. In addition, the molten fixing material is supplied onto the rectifying plate by a pump to create a laminar flow with the molten fixing material having a predetermined thickness. Furthermore, a conveyor is installed above the laminar flow with a predetermined gap, and is configured to be transferred continuously or intermittently.

本発明の特徴は、固着材によりリードが固着された多数の気密端子部品をバレルに収容して一括めっきすることであり、特に、その後工程でめっきされたリードの下端部を切断して固着材を除去することである。すなわち、図2に示すように、気密端子部品を用意した後、固着材5による固着、バレルめっき法によるめっき層4の形成、および固着材5を除去するためのリード3の切断の工程を含めて気密端子を製造する方法が開示され、この方法により製造された新規かつ改良された電子部品が提供される。   A feature of the present invention is that a large number of hermetic terminal parts with leads fixed by a fixing material are accommodated in a barrel and collectively plated. In particular, the lower end portion of the lead plated in the subsequent process is cut to fix the fixing material. Is to remove. That is, as shown in FIG. 2, after preparing an airtight terminal component, the steps of fixing by the fixing material 5, forming the plating layer 4 by barrel plating, and cutting the lead 3 to remove the fixing material 5 are included. A method for manufacturing an airtight terminal is disclosed, and a new and improved electronic component manufactured by this method is provided.

本発明はリードの下端部同士を導電材または樹脂材等の固着材によって固着した後にバレルめっき法によりめっき層を形成するので、めっき工程である気密端子のリードが他の気密端子のリード間に嵌まり込むことが防止されて、いわゆるアベック不良が発生しなくなる。また、リード同士が固着材によって固着されているので、各リードの強度が見かけ上増大するため、リードの折れ曲り不良が発生しなくなる。特に、リードのめっき層形成がバレルめっき法で行なわれるので大量の気密端子部品を一括してめっき処理でき生産性が向上する。また、リードの間隔寸法が所定寸法で保たれ、リード曲がりがなく、しかもリード間で均一なめっき層を有する。また、リード同士をボール状固着材で固着する場合、その外径寸法がリード間の間隔寸法よりも大きくすることで、ある気密端子のリードの先端部が他のリード間に嵌まり込むことがなくなり、アベック不良発生率が低減できるのみならず、細く腰の弱いリードであっても固着材によって固着され、見かけ上その強度が増大するため、リード曲がり不良発生率が低減され、さらに絶縁材によって絶縁されているリードが固着材によって固着されることによって同一のめっき条件になり、リード間のめっき厚さのばらつきが低減されるといった顕著な作用効果を奏する。   In the present invention, since the plating layer is formed by barrel plating after the lower ends of the leads are fixed to each other with a fixing material such as a conductive material or a resin material, the lead of the hermetic terminal, which is a plating process, is between the leads of the other hermetic terminals. The fitting is prevented and so-called Abeck failure does not occur. Further, since the leads are fixed to each other by the fixing material, the strength of each lead is apparently increased, so that the bending failure of the leads does not occur. In particular, since the lead plating layer is formed by the barrel plating method, a large amount of hermetic terminal parts can be plated at a time, and the productivity is improved. Further, the distance between the leads is kept at a predetermined dimension, the leads are not bent, and a uniform plating layer is provided between the leads. In addition, when the leads are fixed with a ball-shaped fixing material, the outer diameter of the lead is larger than the distance between the leads, so that the tip of the lead of a certain airtight terminal can be fitted between the other leads. Not only can the occurrence of Abeck defects be reduced, but even thin and weak leads can be fixed by a fixing material, and the strength increases apparently, leading to a reduction in the occurrence of lead bending defects, and further by insulation. When the insulated lead is fixed by the fixing material, the same plating conditions are obtained, and the remarkable effect is obtained that variation in plating thickness between the leads is reduced.

また、本発明の気密端子の製造方法によれば、気密端子部品から細長く伸びる一対のリードに均一なめっき層を形成させるため、めっき処理に先立って細長く伸びた一対のリードの先端間を橋絡して、バレルめっき法を採用するので、アベック不良,リード曲がりおよびリード間のめっき厚さのばらつきがないかまたは少ない電子部品が提供できる。   In addition, according to the method for manufacturing an airtight terminal of the present invention, in order to form a uniform plating layer on a pair of elongated leads extending from the hermetic terminal component, a bridge is formed between the ends of the elongated leads prior to the plating process. In addition, since the barrel plating method is adopted, it is possible to provide an electronic component with little or no variation in Abeck, lead bending and plating thickness variation between leads.

本発明の実施態様について、以下、図面を参照して説明する。
図1は本発明の電子部品の第1の実施態様である。具体的には腕時計向け水晶振動子用の円筒型気密端子Aの斜視図を示す。図において、1は円筒形の金属外環で、その内部にガラス2を介して、2本のリード3,3が気密に封着されている。前記金属外環1は、例えば低炭素鋼やFe−Ni合金やFe−Ni−Co合金等よりなり、外径寸法d1が0.90〜0.95mm、高さ寸法が0.75〜0.85mmのものである。前記ガラス2は、ソーダライムガラスやソーダバリウムガラスやホウケイ酸ガラス等よりなる。前記リード3,3は、Fe−Ni合金やFe−Ni−Co合金等よりなり、外径寸法d3が0.13〜0.17mm、長さlが7.0〜8.0mmのもので、リード3,3間の間隔寸法gは0.10〜0.20mmのものである。前記金属外環1およびリード3,3の露出部分には、めっき層4,4が形成されている。
Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 shows a first embodiment of the electronic component of the present invention. Specifically, a perspective view of a cylindrical airtight terminal A for a quartz resonator for a wristwatch is shown. In the figure, reference numeral 1 denotes a cylindrical metal outer ring, and two leads 3 and 3 are hermetically sealed through a glass 2 therein. The metal outer ring 1 is made of, for example, low carbon steel, Fe—Ni alloy, Fe—Ni—Co alloy or the like, and has an outer diameter dimension d1 of 0.90 to 0.95 mm and a height dimension of 0.75 to 0.00. 85 mm. The glass 2 is made of soda lime glass, soda barium glass, borosilicate glass, or the like. The leads 3 and 3 are made of Fe-Ni alloy, Fe-Ni-Co alloy or the like, and have an outer diameter d3 of 0.13 to 0.17 mm and a length l of 7.0 to 8.0 mm. The distance g between the leads 3 and 3 is 0.10 to 0.20 mm. Plated layers 4 and 4 are formed on exposed portions of the metal outer ring 1 and the leads 3 and 3.

図2は、前記気密端子Aの金属部材,すなわち金属外環1およびリード3,3の露出部分に、めっき層4,4の一例として,例えば厚さが20〜30μmのろう材層4,4であるSn−90wt%Pb層を形成した状態の断面図である。このろう材層4,4は、金属外環1にあっては後述するように金属キャップの圧入封止時に、金属外環1と金属キャップ間の封止材として作用して気密封止に役立つ。また、リード3,3にあっては、リード3,3の上方部分のろう材層4は、水晶振動片等の電子部品素子のろう付け用に役立ち、リード3,3の下方部分のろう材層4は、リード3,3をプリント基板等へろう付けするときのろう付け性を確保するのに役立つ。ここで、リード3,3のろう材層4,4は、リード3,3の周面部のみに形成されており、その下端面3a,3aには形成されていない。この理由は、後述する本発明の製造方法に由来する。また、このようにリード3,3の下端面3a,3aにろう材層4,4がなくても、一般に気密端子Aのリード3,3の下端部は、プリント基板等の透孔に挿入されてろう付けされた後に切断除去されるので、何ら問題になることはない。   FIG. 2 shows a brazing material layer 4, 4 having a thickness of, for example, 20 to 30 μm as an example of the plating layers 4, 4 on the exposed portion of the metal member of the airtight terminal A, ie, the metal outer ring 1 and the leads 3, 3. It is sectional drawing of the state which formed Sn-90 wt% Pb layer which is. The brazing filler metal layers 4 and 4 serve as a sealing material between the metal outer ring 1 and the metal cap when the metal outer ring 1 is pressed and sealed as will be described later, and serve for airtight sealing. . Further, in the leads 3 and 3, the brazing material layer 4 in the upper part of the leads 3 and 3 is useful for brazing electronic component elements such as a crystal vibrating piece, and the brazing material in the lower part of the leads 3 and 3. The layer 4 serves to ensure brazing properties when the leads 3 and 3 are brazed to a printed circuit board or the like. Here, the brazing filler metal layers 4 and 4 of the leads 3 and 3 are formed only on the peripheral surface portion of the leads 3 and 3, and are not formed on the lower end surfaces 3a and 3a thereof. This reason originates in the manufacturing method of this invention mentioned later. Even if the lower end surfaces 3a and 3a of the leads 3 and 3 are not provided with the brazing material layers 4 and 4, the lower ends of the leads 3 and 3 of the airtight terminal A are generally inserted into through holes such as a printed circuit board. Since it is cut off after being brazed, there is no problem.

以下、前述した本発明の気密端子Aの製造方法の第1実施態様について、図面を参照して説明する。図3は、本発明の製造方法の第1実施態様の製造工程ブロック図を示す。まず、所定厚さの鉄・ニッケル合金等の金属板を押し出しプレス後に打ち抜いて金属外環1を製作する。また、ホウケイ酸ガラス等のガラス微粉末と有機バインダとを混練し、所定の粒度に造粒した後に、所定形状にプレス成形し、仮焼きしてガラス粒同士を結着させるとともに有機バインダを焼き飛ばしてガラスタブレット2aを製作する。さらに、所定の外径寸法のFe−Ni−Co合金等の金属線を前記気密端子Aのリード3,3の長さlよりも長い適宜の長さ寸法la(=l+Δl)に切断して、リード3A,3Aを製作する[図3(a)]。   Hereinafter, a first embodiment of the method for manufacturing the hermetic terminal A of the present invention described above will be described with reference to the drawings. FIG. 3 shows a manufacturing process block diagram of the first embodiment of the manufacturing method of the present invention. First, a metal outer ring 1 is manufactured by extruding and punching a metal plate of iron / nickel alloy or the like having a predetermined thickness. In addition, glass fine powder such as borosilicate glass and an organic binder are kneaded and granulated to a predetermined particle size, then press-formed into a predetermined shape, calcined to bind the glass particles together, and the organic binder is baked. Fly to make a glass tablet 2a. Further, a metal wire such as an Fe—Ni—Co alloy having a predetermined outer diameter is cut into an appropriate length dimension la (= l + Δl) longer than the length l of the leads 3 and 3 of the airtight terminal A, Leads 3A and 3A are manufactured [FIG. 3A].

そして、これら金属外環1,ガラスタブレット2aおよびリード3A,3Aを、グラファイト製の封着治具(図示省略)を用いて所定の関係位置に組み立て[図3(b)]、中性ないし弱還元性の雰囲気中で約980〜1000℃で加熱して、前記ガラスタブレット2aを溶融させて、ガラス2によりリード3A,3Aを気密に封着する[図3(c)]。以上の図3(a)ないし図3(c)の工程によって、図1および図2の気密端子Aの原形となる気密端子部品Aoが製造される。   Then, these metal outer ring 1, glass tablet 2a and leads 3A, 3A are assembled at predetermined positions using a graphite sealing jig (not shown) [FIG. 3 (b)], neutral to weak The glass tablet 2a is melted by heating at about 980 to 1000 ° C. in a reducing atmosphere, and the leads 3A and 3A are hermetically sealed with the glass 2 [FIG. 3 (c)]. 3A to 3C, the airtight terminal component Ao that is the original form of the airtight terminal A of FIGS. 1 and 2 is manufactured.

次に、前記気密端子部品Aoのリード3A,3Aの外方端を、リード3A,3Aの間隔寸法gを保持したまま導電材による固着材5で固着する[図3(d)、図4]。この気密端子部品Aoのリード3A,3Aの下端部を固着材5によって固着する方法については、後で詳述する。   Next, the outer ends of the leads 3A and 3A of the hermetic terminal component Ao are fixed with the fixing material 5 made of a conductive material while maintaining the distance g between the leads 3A and 3A [FIGS. 3 (d) and 4]. . A method of fixing the lower ends of the leads 3A, 3A of the hermetic terminal component Ao with the fixing material 5 will be described in detail later.

次に、上記図4のように、リード3A,3Aの下端部が固着材5で固着された多数の気密端子部品Aoをバレル(図示省略)に収容し、このバレルをめっき浴中に浸漬して回転させる,いわゆるバレルめっき法によって、金属外環1およびリード3A,3Aの露出部分にろう材層4,4を形成する[図3(e)、図5]。   Next, as shown in FIG. 4, a number of hermetic terminal parts Ao having the lower ends of the leads 3A and 3A fixed by the fixing material 5 are accommodated in a barrel (not shown), and this barrel is immersed in a plating bath. Then, the brazing material layers 4 and 4 are formed on the exposed portions of the metal outer ring 1 and the leads 3A and 3A by a so-called barrel plating method [FIG. 3 (e), FIG. 5].

次に、このろう材層4,4が形成された気密端子Aoのリード3A,3Aの下方部分を、上端から所定寸法lの位置6で切断する[図3(f)、図5]。すると、リード3A,3Aを固着していた固着材5が切断除去されて、図2に示すような、所定の長さ寸法lのリード3,3を有する気密端子Aが得られる。このようにして得られた気密端子Aの金属外環1およびリード3,3の露出表面にはろう材層4,4が形成されているが、先に図2において説明したように、リード3,3の下端面3a,3aにはろう材層4,4がない。   Next, the lower portions of the leads 3A and 3A of the airtight terminal Ao on which the brazing filler metal layers 4 and 4 are formed are cut from the upper end at a position 6 having a predetermined dimension 1 [FIG. 3 (f) and FIG. 5]. Then, the fixing material 5 to which the leads 3A and 3A are fixed is cut and removed, and an airtight terminal A having leads 3 and 3 having a predetermined length l as shown in FIG. 2 is obtained. The brazing filler metal layers 4 and 4 are formed on the exposed surfaces of the metal outer ring 1 and the leads 3 and 3 of the airtight terminal A thus obtained. As described above with reference to FIG. , 3 have no brazing filler metal layers 4 on the lower end surfaces 3a, 3a.

この種の腕時計向けの水晶振動子用気密端子Aは、リード3,3の上端部に水晶振動片(図示省略)を固着するが、このときリード3,3の上方部分のろう材層4,4は、水晶振動片のろう付け性を高くして、確実にろう付けするのに役立つ。また、水晶振動片を固着した後は、図6に示すように、金属キャップ7を圧入により封止して水晶振動子8とするが、このとき金属外環1のろう材層4は、金属外環1と金属キャップ7との間を満たして、気密封止を確実にするのに役立つ。   In this type of airtight terminal A for a quartz oscillator for a wristwatch, a quartz crystal vibrating piece (not shown) is fixed to the upper ends of the leads 3 and 3. 4 increases the brazing performance of the crystal vibrating piece and helps to ensure brazing. Further, after the quartz crystal vibrating piece is fixed, as shown in FIG. 6, a metal cap 7 is sealed by press fitting to form a quartz crystal resonator 8. At this time, the brazing filler metal layer 4 of the metal outer ring 1 is made of metal. Filling the space between the outer ring 1 and the metal cap 7 helps to ensure a hermetic seal.

また、気密端子Aを用いた水晶振動子8は、前述の図6に示すように、プリント基板10の透孔11にリード3,3を挿通し、噴流式めっき法により、この透孔11の周囲にレジスト層12から露出させた導電層13にリード3,3をろう材14によりろう付けして組み付けられる。このとき、リード3,3の周面部のろう材層4a,4aは、ろう材14,14によるろう付け性の確保に役立つ。なお、気密端子Aのリード3,3の下端面3a,3aには、ろう材層4,4がないが、この位置にはろう材層4,4がなくても、ほとんどの場合何ら問題はない。すなわち、この水晶振動子8のリード3,3をプリント基板10にろう付けした後、リード3,3は、ろう付け部分に近い図示一点鎖線位置15から切断される。したがって、リード3,3の下端面3a,3aには、ろう材層4,4がなくても、実用上何ら問題は生じない。   Further, in the crystal resonator 8 using the airtight terminal A, as shown in FIG. 6, the leads 3 and 3 are inserted into the through holes 11 of the printed circuit board 10, and the through holes 11 are formed by the jet plating method. The leads 3 and 3 are brazed with a brazing material 14 to the conductive layer 13 exposed from the resist layer 12 and assembled. At this time, the brazing material layers 4 a and 4 a on the peripheral surface portions of the leads 3 and 3 are useful for securing brazing properties by the brazing materials 14 and 14. The lower end surfaces 3a and 3a of the leads 3 and 3 of the airtight terminal A do not have the brazing material layers 4 and 4. However, even if the brazing material layers 4 and 4 are not provided at this position, in most cases there is no problem. Absent. That is, after the leads 3 and 3 of the crystal resonator 8 are brazed to the printed circuit board 10, the leads 3 and 3 are cut from the illustrated alternate long and short dash line position 15 near the brazed portion. Therefore, even if the lower end surfaces 3a and 3a of the leads 3 and 3 are not provided with the brazing material layers 4 and 4, no problem is caused in practice.

しかしながら、もし、リード3,3の下端面3a,3aにもろう材層4,4が必要な場合は、図3の製造工程ブロック図において、リード3A,3Aの切断工程[図3(f)]の後に鎖線で付加的に示したように、リード3,3の下端面3a,3aへのめっき工程を付加してもよい[図3(g)]。このような方法を採用すると、図7に示すように、リード3A,3Aの周面には厚いろう材層4a,4aが形成されており、リード3,3の下端面3a,3aには薄いろう材層4b,4bが形成された気密端子Bが電子部品として得られる。   However, if the brazing filler metal layers 4 and 4 are also required on the lower end surfaces 3a and 3a of the leads 3 and 3, in the manufacturing process block diagram of FIG. 3, the cutting process of the leads 3A and 3A [FIG. ], As additionally indicated by a chain line, a plating step may be added to the lower end surfaces 3a and 3a of the leads 3 and 3 [FIG. 3 (g)]. When such a method is employed, as shown in FIG. 7, thick brazing material layers 4a and 4a are formed on the peripheral surfaces of the leads 3A and 3A, and the lower end surfaces 3a and 3a of the leads 3 and 3 are thin. The airtight terminal B on which the brazing filler metal layers 4b and 4b are formed is obtained as an electronic component.

次に、前記気密端子部品Aoのリード3A,3Aの下端部を固着材5により固着する第1の実施態様について説明する。図8は、前記固着材5によるリード3A,3Aの固着工程に用いる第1実施態様の固着材固着装置20の概略断面図である。図8において、21は固着材5が融着しない材料、例えばグラファイト製の下治具である。この下治具21は、後述するボール状の固着材5aが1個だけすっぽりと入り込む大きさで底部がすり鉢状の多数の凹部22を有し、各凹部22の開口部23はテーパ状になっている。24は上治具で、例えば前記下治具21と同様の材料で構成されており、前記下治具21の各凹部22と対応する位置に気密端子Aoが入る大きさの透孔25を有し、各透孔25の下端開口部26はテーパ状になっている。   Next, a first embodiment in which the lower ends of the leads 3A and 3A of the hermetic terminal component Ao are fixed by the fixing material 5 will be described. FIG. 8 is a schematic cross-sectional view of the fixing material fixing device 20 of the first embodiment used in the fixing process of the leads 3A and 3A by the fixing material 5. In FIG. 8, 21 is a material to which the fixing material 5 is not fused, for example, a lower jig made of graphite. The lower jig 21 has a large number of recesses 22 having a mortar shape at the bottom, with a size enough for a single ball-shaped fixing material 5a, which will be described later, to enter, and the opening 23 of each recess 22 is tapered. ing. Reference numeral 24 denotes an upper jig, which is made of, for example, the same material as that of the lower jig 21 and has a through hole 25 having a size that allows the airtight terminal Ao to enter the position corresponding to each recess 22 of the lower jig 21. The lower end opening 26 of each through hole 25 is tapered.

次に、前記下治具21の各凹部22にボール状の固着材5aを1個ずつ収容する。この場合、各種の方法が採用できる。例えば、下治具21をその周囲から所定寸法だけ立ち上がる枠体の中に入れ、下治具21と枠体の壁面とで形成される凹所に多数のボール状の固着材5aを収容し、この下治具21を揺動させることにより、各凹部22に1個ずつのボール状の固着材5aを収容することができる。このとき、前記凹部22のテーパ状の開口部23は、ボール状の固着材5aを凹部22に収容する動作を円滑にする機能を営む。各凹部22に1個ずつボール状の固着材5aが収容されると、余分の固着材5aを下治具21上から排出する。   Next, one ball-shaped fixing material 5 a is accommodated in each recess 22 of the lower jig 21. In this case, various methods can be employed. For example, the lower jig 21 is put into a frame that rises from the periphery by a predetermined dimension, and a large number of ball-shaped fixing members 5a are accommodated in the recesses formed by the lower jig 21 and the wall surface of the frame, By swinging the lower jig 21, one ball-shaped fixing material 5 a can be accommodated in each recess 22. At this time, the tapered opening 23 of the concave portion 22 functions to smoothly move the ball-shaped fixing material 5 a into the concave portion 22. When one ball-shaped fixing material 5 a is accommodated in each recess 22, the excess fixing material 5 a is discharged from the lower jig 21.

あるいは、図9に示すような固着材供給補助具30を用いることができる。図9において、固着材供給補助具30は、前記下治具21の各凹部22に対応する位置にそれぞれ透孔32,34を有する上板31と下板33とを所定間隔で有し、これら上板31および下板33の3方を側板35で連結してある。この側板35は、前記上板31の上方および下板33の下方にそれぞれ所定寸法だけ突出する枠体部36,37を有する。また、前記上板31および下板33間に、前記透孔32,34と対応する配置,すなわち前記下治具21の各凹部22と対応する配置で透孔39を有するスライド可能なシャッタ38を介在させた構成を有する。   Alternatively, a fixing material supply auxiliary tool 30 as shown in FIG. 9 can be used. In FIG. 9, the fixing material supply assisting tool 30 has an upper plate 31 and a lower plate 33 having through holes 32 and 34 at positions corresponding to the concave portions 22 of the lower jig 21 at predetermined intervals. Three sides of the upper plate 31 and the lower plate 33 are connected by a side plate 35. The side plate 35 has frame portions 36 and 37 that protrude by a predetermined dimension above the upper plate 31 and below the lower plate 33, respectively. Further, a slidable shutter 38 having a through hole 39 is disposed between the upper plate 31 and the lower plate 33 in an arrangement corresponding to the through holes 32 and 34, that is, an arrangement corresponding to the concave portions 22 of the lower jig 21. It has an intervening configuration.

上記、固着材供給補助具30を用いる固着材5aの供給方法について説明する。まず、固着材供給補助具30の下板33の下方に枠体部37を利用して下治具21を位置決めして配置する。次に、シャッタ38を図9に示すように、その透孔39が上板31および下板33の各透孔32,34と一致しない位置になるようにしておき、上板31の上に多数のボール状の固着材5aを供給する。そして、前記と同様に揺動により上板31の各透孔32に1個ずつボール状の固着材5aを収容する。上板31の各透孔32にボール状の固着材5aが1個ずつ収容されると、シャッタ38を図9の左方に移動させてその透孔39を上板31および下板33の各透孔32,34と一致させる。すると、上板31の透孔32に収容されていた各固着材5aは、シャッタ38の透孔39および下板33の透孔34を通過して、下治具21の各凹部22に収容される。   A method for supplying the fixing material 5a using the fixing material supply auxiliary tool 30 will be described. First, the lower jig 21 is positioned and arranged using the frame body portion 37 below the lower plate 33 of the fixing material supply assisting tool 30. Next, as shown in FIG. 9, the shutter 38 has its through holes 39 positioned so as not to coincide with the through holes 32 and 34 of the upper plate 31 and the lower plate 33, and a large number of the shutters 38 are formed on the upper plate 31. The ball-shaped fixing material 5a is supplied. Then, one ball-shaped fixing material 5a is accommodated in each through hole 32 of the upper plate 31 by swinging in the same manner as described above. When one ball-shaped fixing material 5 a is accommodated in each through hole 32 of the upper plate 31, the shutter 38 is moved to the left in FIG. 9 so that the through hole 39 passes through each of the upper plate 31 and the lower plate 33. Align with the through holes 32 and 34. Then, each fixing member 5 a accommodated in the through hole 32 of the upper plate 31 passes through the through hole 39 of the shutter 38 and the through hole 34 of the lower plate 33 and is accommodated in each recess 22 of the lower jig 21. The

次に、上治具24の各透孔25に気密端子部品Aoを1個ずつ収容する。まず、上治具24の上に補助板(図示省略)を当てがい、上下逆転して開口部26が上側になるようにし、各透孔25に気密端子部品Aoを振り込んでいく。このとき、気密端子部品Aoは金属外環1やガラス2のために重心が偏っているので、自然に金属外環1側が下になって振り込まれる。このとき、上治具24の透孔25の開口部26がテーパ状になっているので、気密端子部品Aoの透孔25への振り込みが円滑に行われる。   Next, one airtight terminal component Ao is accommodated in each through hole 25 of the upper jig 24. First, an auxiliary plate (not shown) is placed on the upper jig 24 so that the opening 26 is turned upside down and the airtight terminal component Ao is transferred into each through hole 25. At this time, since the center of gravity of the airtight terminal part Ao is biased due to the metal outer ring 1 and the glass 2, the metal outer ring 1 side is naturally transferred downward. At this time, since the opening 26 of the through hole 25 of the upper jig 24 is tapered, the airtight terminal component Ao is smoothly transferred to the through hole 25.

次に、上記の各透孔25に1個ずつ気密端子部品Aoを収容した上治具24を上下逆転させて、各凹部22に1個ずつ固着材5aを収容している下治具21の上に被せる。すると、上治具24の透孔25に収容されている気密端子Aoが自重で降りてきて、そのリード3A,3Aの下端部がボール状の固着材5aの上に乗っかる。図8はこの状態を示している。   Next, the upper jig 24 in which the airtight terminal parts Ao are accommodated one by one in the respective through holes 25 is turned upside down, and the lower jig 21 in which the fixing material 5a is accommodated one by one in each recess 22. Put on top. Then, the airtight terminal Ao accommodated in the through hole 25 of the upper jig 24 comes down by its own weight, and the lower ends of the leads 3A and 3A ride on the ball-shaped fixing material 5a. FIG. 8 shows this state.

この状態で、固着材5aの溶融点以上に加熱する。すると、固着材5aが溶融して、先に説明した図4に示すように、気密端子Aoのリード3A,3Aの下端部が固着材5によって機械的に固着されるとともに電気的に固着される。ここで、図4に示すように、前記表面張力によってボール状になった固着材5の直径d5は、リード3A,3Aの間隔寸法gよりも大きい(d5>g)。この寸法関係が、後述するめっき時に効果的に機能する。   In this state, it heats more than the melting point of the adhering material 5a. Then, the fixing material 5a is melted, and the lower ends of the leads 3A and 3A of the airtight terminal Ao are mechanically fixed by the fixing material 5 and electrically fixed as shown in FIG. . Here, as shown in FIG. 4, the diameter d5 of the fixing material 5 formed into a ball shape by the surface tension is larger than the distance g between the leads 3A and 3A (d5> g). This dimensional relationship functions effectively during plating described later.

次に、気密端子部品Aoのリード3A,3Aの下端部を固着材5により固着する第2の実施態様について説明する。図10は第2の実施態様における固着材の固着装置40の概略断面図で、箱型の固着材の収容容器41と、この収容容器41の底部に配置されたヒータ42と、収容容器41内に溶融状態で収容されている固着材5bと、多数の気密端子Aoを所定間隔で保持して上下動する固着治具43と、この固着治具43の一定以上の下降を阻止するストッパ44とを備えている。前記固着材5bは、気密端子Aoのリード3A,3Aにめっき層,例えばろう材層4,4を形成するめっき浴温度よりも高い融点、例えば100〜150℃程度高い融点を有するろう材,例えばSn−60wt%Pbが好適する。   Next, a second embodiment in which the lower ends of the leads 3A and 3A of the airtight terminal component Ao are fixed by the fixing material 5 will be described. FIG. 10 is a schematic cross-sectional view of a fixing material fixing device 40 according to the second embodiment. A box-shaped fixing material storage container 41, a heater 42 disposed at the bottom of the storage container 41, and the inside of the storage container 41 A fixing member 5b accommodated in a molten state, a fixing jig 43 that moves up and down while holding a large number of hermetic terminals Ao at predetermined intervals, and a stopper 44 that prevents the fixing jig 43 from descending more than a certain level. It has. The fixing material 5b is a brazing material having a melting point higher than the plating bath temperature for forming the plating layers, for example, the brazing material layers 4 and 4 on the leads 3A and 3A of the airtight terminal Ao, for example, a melting point higher by about 100 to 150 ° C. Sn-60 wt% Pb is preferred.

図11は、前記固着治具43の一例の斜視図で、気密端子部品Aoのリード3A,3Aが平面内でX方向に移動可能でY方向には移動不可能な、多数のスリット43aを有する櫛歯状のものである。したがって、前記スリット43aの幅寸法wは、リード3A,3Aの外径寸法d3よりも若干大きく、かつ金属外環1の外径寸法d1よりも小さく設定されている(d3<w<d1)。また、各スリット43aの開口端には、リード3A,3Aの挿入を容易にするために、テーパ43bが設けてある。   FIG. 11 is a perspective view of an example of the fixing jig 43. The leads 3A and 3A of the airtight terminal component Ao have a large number of slits 43a that can move in the X direction and cannot move in the Y direction in a plane. It is comb-shaped. Therefore, the width w of the slit 43a is set to be slightly larger than the outer diameter d3 of the leads 3A and 3A and smaller than the outer diameter d1 of the metal outer ring 1 (d3 <w <d1). In addition, a taper 43b is provided at the open end of each slit 43a in order to facilitate the insertion of the leads 3A and 3A.

前記の図10に示すように、多数の気密端子部品Aoを吊り下げ状態で保持した固着治具43を、ストッパ44によって停止する位置まで下降させて、各気密端子部品Aoのリード3A,3Aの下端部のみを溶融状態の固着材5bに浸漬して所定時間保持した後、固着治具43を引き上げる。   As shown in FIG. 10, the fixing jig 43 holding a large number of hermetic terminal parts Ao in a suspended state is lowered to a position where it is stopped by a stopper 44, and the leads 3A, 3A of the hermetic terminal parts Ao are lowered. Only the lower end is immersed in the molten fixing material 5b and held for a predetermined time, and then the fixing jig 43 is pulled up.

すると、図4に示すように、各気密端子部品Aoのリード3A,3Aの下端部に融着した溶融状態の固着材5bが表面張力で球状化および固化して、ボール状の固着材5としてリード3A,3Aが所定の間隔寸法gを保持したまま固着される。ここで、図4に示すように、前記表面張力によってボール状になった固着材5の直径d5は、リード3A,3Aの間隔寸法gよりも大きい(d5>g)。   Then, as shown in FIG. 4, the fused fixing material 5b fused to the lower ends of the leads 3A and 3A of each hermetic terminal component Ao is spheroidized and solidified by surface tension to form a ball-shaped fixing material 5. The leads 3A and 3A are fixed while maintaining a predetermined gap dimension g. Here, as shown in FIG. 4, the diameter d5 of the fixing material 5 formed into a ball shape by the surface tension is larger than the distance g between the leads 3A and 3A (d5> g).

前記本発明の固着材による固着方法の第1実施態様および第2実施態様では、多数の気密端子部品Aoのリード3A,3Aの下端部を導電材等の固着材5で固着する工程を、バッチ方式で行なう場合について説明したが、固着材による固着方法の第3の実施態様として、連続または間欠的に処理することもできる。図12は、本発明の製造方法の第3実施態様について説明する固着装置50の概略断面図を示す。図12において、51は固着材の収容容器で、その下部にヒータ52を具備している。前記固着材の収容容器51内には、溶融状態の固着材5bが収容されている。また、この固着材の収容容器51の上には、整流板53が設置されており、前記溶融状態の固着材5bをポンプ54で整流板53の上に供給して、所定厚さの溶融状態の固着材5bによる層流5cを作っている。また、この層流5cの上方には、所定間隙でコンベア55が設置されており、図12の矢印のように図示左側から右側に向かって連続的または間欠的に移送されるように構成されている。   In the first embodiment and the second embodiment of the fixing method using the fixing material of the present invention, the step of fixing the lower ends of the leads 3A and 3A of a large number of airtight terminal parts Ao with the fixing material 5 such as a conductive material is performed in a batch. Although the case where it carries out by a system was demonstrated, as a 3rd embodiment of the adhering method by an adhering material, it can also process continuously or intermittently. FIG. 12 is a schematic cross-sectional view of a fixing device 50 for explaining a third embodiment of the manufacturing method of the present invention. In FIG. 12, 51 is a container for fixing material, and has a heater 52 in the lower part thereof. In the fixing material container 51, a molten fixing material 5b is accommodated. Further, a rectifying plate 53 is installed on the fixing material container 51, and the molten fixing material 5b is supplied onto the rectifying plate 53 by a pump 54 so that the molten material has a predetermined thickness. The laminar flow 5c is formed by the fixing material 5b. Further, a conveyor 55 is installed above the laminar flow 5c with a predetermined gap, and is configured to be continuously or intermittently transferred from the left side to the right side as shown by the arrows in FIG. Yes.

したがって、上記固着材固着装置50において、所定の長さ寸法lよりも長い長さ寸法laのリード3A,3Aを有する多数の気密端子部品Aoをコンベア55に吊り下げ状態で保持して、図12の左側から右側に向かって連続的または間欠的に移送させれば、気密端子部品Aoの各リード3A,3Aが装置50の上方に来たとき、溶融状態の固着材5bによる層流5cに浸漬されるため、溶融状態の固着材5bが濡れて、リード3A,3Aが層流5cから出たときに、リード3A,3Aに融着した固着材5bが表面張力で球状化および固化して、図4に示すように、リード3A,3Aが所定の間隙寸法gを保持したままボール状の固着材5によって相互に固着される。このような装置50および方法によれば、図10に示す固着材固着装置40および方法を用いる場合に比較して、連続的または間欠的に作業できるので、生産効率が向上する。   Accordingly, in the fixing material fixing device 50, a large number of hermetic terminal parts Ao having leads 3A and 3A having a length dimension la longer than the predetermined length dimension l are held on the conveyor 55 in a suspended state. If the leads 3A and 3A of the airtight terminal component Ao come above the device 50, they are immersed in the laminar flow 5c by the molten fixing material 5b. Therefore, when the fixing material 5b in the molten state gets wet and the leads 3A and 3A come out of the laminar flow 5c, the fixing material 5b fused to the leads 3A and 3A is spheroidized and solidified by surface tension, As shown in FIG. 4, the leads 3 </ b> A and 3 </ b> A are fixed to each other by a ball-shaped fixing material 5 while maintaining a predetermined gap dimension g. According to such an apparatus 50 and a method, since it can work continuously or intermittently compared with the case where the fixing material adhering apparatus 40 and method shown in FIG. 10 are used, production efficiency improves.

次に、ろう材層形成の実施態様としては、上記のように、リード3A,3Aが固着材5で固着された多数の気密端子部品Aoをバレル(図示省略)に収容し、このバレルをめっき浴中に浸漬して回転させる,いわゆるバレルめっき法によって、金属外環1およびリード3A,3Aの露出部分にろう材層4,4を形成する。このとき、前述のとおり、固着材5の外径寸法d5が、リード3A,3Aの間隔寸法gよりも大きい(d5>g)ので、めっき工程中にある気密端子A1のリード3A,3A間に、他の気密端子A2のリード3A,3Aが嵌まり込みにくくなる。したがって、気密端子A1,A2のリード3A,3A同士が絡み合うことが防止され、リード3A,3A同士がめっき層によってくっ付いてしまう、いわゆるアベック不良が発生しにくくなる。また、前述のとおり、固着材5によってリード3A,3Aが固着されていることによって、各リード3A,3Aが単独の場合に比較して、見かけ上リード3A,3Aの強度が増大するので、リード3A,3Aの折れ曲り不良も発生しにくくなる。さらに、固着材5によってリード3A,3Aが電気的に固着されて同電位,すなわち同一めっき条件になっているので、ガラス2によって絶縁されているリード3A,3Aに均一なろう材層4,4が形成される。なお、前記固着材5の融点をめっき浴の温度よりも高く設定しているので、めっき工程中に固着材5がめっき浴の温度で溶融することはない。   Next, as an embodiment of the brazing material layer formation, as described above, a large number of hermetic terminal parts Ao in which the leads 3A and 3A are fixed by the fixing material 5 are accommodated in a barrel (not shown), and this barrel is plated. The brazing filler metal layers 4 and 4 are formed on the exposed portions of the metal outer ring 1 and the leads 3A and 3A by so-called barrel plating, which is immersed in a bath and rotated. At this time, as described above, since the outer diameter dimension d5 of the fixing material 5 is larger than the distance dimension g between the leads 3A and 3A (d5> g), between the leads 3A and 3A of the airtight terminal A1 in the plating process. The leads 3A and 3A of the other airtight terminal A2 are not easily fitted. Therefore, the leads 3A and 3A of the airtight terminals A1 and A2 are prevented from being entangled with each other, and the so-called Abeck failure in which the leads 3A and 3A are adhered to each other by the plating layer is less likely to occur. Further, as described above, since the leads 3A and 3A are fixed by the fixing material 5, the strength of the leads 3A and 3A is apparently increased as compared with the case where each of the leads 3A and 3A is single. 3A and 3A bending defects are less likely to occur. Further, since the leads 3A and 3A are electrically fixed by the fixing material 5 and have the same potential, that is, the same plating conditions, the uniform brazing material layers 4 and 4 on the leads 3A and 3A insulated by the glass 2 are used. Is formed. Since the melting point of the fixing material 5 is set higher than the temperature of the plating bath, the fixing material 5 does not melt at the temperature of the plating bath during the plating process.

次に、本発明の実施例について説明する。
気密端子部品Ao
金属外環1 材質:Fe−Ni合金、
寸法:外径0.92mm×高さ0.8mm×厚さ0.1mm
ガラス2 材質:ホウケイ酸ガラス
リード3A 材質:Fe−Ni−Co合金、
寸法:外径0.15mm×長さ9.65mm
リード間隔:0.15mm
上記の気密端子部品Aoのリード3A,3Aに、前記図8に示す固着材による固着方法の第1の実施態様によってボール状の
固着材5a 直径:0.5mm、
材質:Sn−60wt%Pb合金
を固着したところ、リード3A,3Aの下端部が外径寸法d5=0.5mmの導電固着材5で固着された。次に、上記のリード3A,3Aが固着材5で固着された多数の気密端子部品Aoを、バレルに収容し、めっき浴中に浸漬するバレルめっき法によりめっきして、
ろう材層4 材質:Sn−90wt%Pb合金、
厚さ:20μm
を形成した。上記のろう材層4をバレルめっき法により形成する工程で、ある気密端子A1のリード3A,3Aが他の気密端子A2のリード3A,3A間に嵌まり込んでろう材層4によって固着されてしまう、いわゆるアベック不良発生率、およびリード3A,3Aの曲がり不良発生率は、それぞれ10%および3%であった。また、リード3A,3A相互間のろう材層4,4の厚さのばらつきは、0.1〜0.3μmであった。
Next, examples of the present invention will be described.
Airtight terminal parts Ao
Metal outer ring 1 Material: Fe-Ni alloy,
Dimensions: Outer diameter 0.92mm x Height 0.8mm x Thickness 0.1mm
Glass 2 Material: Borosilicate glass
Lead 3A Material: Fe-Ni-Co alloy,
Dimensions: Outer diameter 0.15mm x Length 9.65mm
Lead interval: 0.15mm
According to the first embodiment of the fixing method using the fixing material shown in FIG. 8, the ball-shaped fixing material 5a has a diameter of 0.5 mm.
Material: Sn-60 wt% Pb alloy was fixed, and the lower ends of the leads 3A, 3A were fixed with the conductive fixing material 5 having an outer diameter d5 = 0.5 mm. Next, a large number of hermetic terminal parts Ao in which the leads 3A, 3A are fixed by the fixing material 5 are accommodated in a barrel and plated by a barrel plating method in which the lead is immersed in a plating bath,
Brazing material layer 4 Material: Sn-90 wt% Pb alloy,
Thickness: 20μm
Formed. In the step of forming the brazing material layer 4 by the barrel plating method, the leads 3A and 3A of a certain hermetic terminal A1 are fitted between the leads 3A and 3A of the other hermetic terminal A2 and fixed by the brazing material layer 4. The so-called Abeck defect occurrence rate and the bending defect occurrence rates of the leads 3A and 3A were 10% and 3%, respectively. The variation in the thickness of the brazing filler metal layers 4 and 4 between the leads 3A and 3A was 0.1 to 0.3 μm.

比較例Comparative example

これに対して、上記のリード3A,3A間を固着材5によって固着していない他は上記と同一条件でバレルめっき法によりろう材層4を形成したところ、ある気密端子A1のリード3A,3Aが他の気密端子A2のリード3A,3A間に嵌まり込んでろう材層4によって固着されてしまう、いわゆるアベック不良発生率、およびリード3A,3Aの曲がり不良発生率は、それぞれ60%および10%であった。また、リード3A,3A相互間のろう材層4,4の厚さのばらつきは、2〜3μmであった。   On the other hand, when the brazing material layer 4 is formed by barrel plating under the same conditions as described above except that the above leads 3A and 3A are not fixed by the fixing material 5, the leads 3A and 3A of a certain airtight terminal A1. Of the other airtight terminal A2 is fitted between the leads 3A and 3A and fixed by the brazing material layer 4, so-called Abeck failure occurrence rate and lead 3A and 3A bending failure occurrence rate are 60% and 10%, respectively. %Met. Further, the variation in the thickness of the brazing filler metal layers 4 and 4 between the leads 3A and 3A was 2 to 3 μm.

上記本発明の実施例および比較例の結果から、本発明の製造方法が格段にアベック不良発生率、リード3A,3Aの曲がり不良発生率およびリード3A,3A相互間のろう材層4,4の厚さのばらつきともに小さいことが明らかである。この理由は、本発明の製造方法によれば、第1に気密端子Aoのリード3A,3Aを固着材5によって固着することによって、その固着材5の外径寸法d5がリード3A,3Aの間隔寸法gよりも大きくなることに起因して、リード3A,3Aの下端部が他の気密端子Aoのリード3A,3A間に嵌まり込みにくくなり、したがって、そのようにリード3A,3A同士が絡まった状態でろう材層4によって固着されてしまう,いわゆるアベック不良が発生しにくくなること、第2に気密端子Aoのリード3A,3Aを固着材5によって固着することによって、リード3A,3Aが単独の場合に比較してその見かけ上の強度が増大することに起因して、リード3A,3Aの曲がり不良が発生しにくくなること、第3にガラス2によって絶縁されているリード3A,3Aが固着材5によって固着されることに起因して、リード3A,3Aのめっき条件が同一になり、リード3A,3A間でめっき厚さにばらつきが生じなくなることによる。   From the results of the examples of the present invention and the comparative examples, the manufacturing method of the present invention has a remarkable Abeck defect occurrence rate, a bending defect occurrence rate of the leads 3A and 3A, and the brazing material layers 4 and 4 between the leads 3A and 3A. It is clear that the thickness variation is small. This is because, according to the manufacturing method of the present invention, the lead 3A, 3A of the hermetic terminal Ao is first fixed by the fixing material 5 so that the outer diameter d5 of the fixing material 5 is the distance between the leads 3A, 3A. Due to the fact that it is larger than the dimension g, the lower ends of the leads 3A, 3A are less likely to fit between the leads 3A, 3A of the other airtight terminals Ao, so that the leads 3A, 3A are entangled with each other. In this state, the so-called Abeck defect that is fixed by the brazing material layer 4 is less likely to occur, and secondly, the leads 3A and 3A of the airtight terminal Ao are fixed by the fixing material 5 so that the leads 3A and 3A are independent. The lead 3A, 3A is less likely to be bent due to an increase in its apparent strength as compared with the above case, and thirdly, it is insulated by the glass 2. Leads 3A that are, due to the 3A is fixed by a fixing member 5, leads 3A, 3A plating conditions is the same, due to the fact that leads 3A, a variation in plating thickness between 3A does not occur.

最後に、上記めつき層4,4を形成した気密端子Aoのリード3A,3Aを、図5に示すように上端から寸法lの位置6で切断して、図1および2に示す気密端子Aを製作した。   Finally, the leads 3A and 3A of the hermetic terminal Ao on which the adhesive layers 4 and 4 are formed are cut from the upper end at a position 6 having a dimension l as shown in FIG. 5, and the hermetic terminal A shown in FIGS. Was made.

なお、本発明の上記実施態様および実施例は、電子部品の一例として腕時計向けの水晶振動子用の円筒型気密端子Aについて説明したが、本発明は上記実施態様および実施例に限定されるものではなく、その他の実施態様として、本発明の精神を逸脱しない範囲で、各種の電子部品およびその製造方法に適用することが可能であることはいうまでもない。   In addition, although the said embodiment and Example of this invention demonstrated the cylindrical airtight terminal A for quartz crystal units for wristwatches as an example of an electronic component, this invention is limited to the said embodiment and Example. However, it is needless to say that the present invention can be applied to various electronic components and manufacturing methods thereof as other embodiments without departing from the spirit of the present invention.

例えば、上記実施例においては、電子部品の一例として、金属外環1の形状が直円筒形状の圧入封止型水晶振動子用の気密端子Aについて説明したが、もし、必要ならば、金属外環1の形状を、高さ寸法の中途部から上方部を上部に行くほど小径になるような傾斜面に形成するとともに、中途部から下方を円筒状に形成してもよい。このような形状によれば、金属外環の金属キャップへの最初の挿入作業および圧入作業が容易かつ円滑になる利点がある。   For example, in the above-described embodiment, the airtight terminal A for the press-fitting type quartz crystal resonator in which the shape of the metal outer ring 1 is a right cylindrical shape has been described as an example of the electronic component. The shape of the ring 1 may be formed on an inclined surface such that the diameter decreases from the middle part of the height dimension to the upper part from the upper part, and the lower part may be formed in a cylindrical shape from the middle part. According to such a shape, there is an advantage that the initial insertion operation and press-fitting operation into the metal cap of the metal outer ring are easy and smooth.

また、リード3A,3Aを固着する固着材5は、上記実施例に示した導電材に限らず、他の材質のもの、例えば樹脂材を適用することができる。ただし、固着材5の材質は、金属外環1やリード3A,3Aにろう材層4,4を形成する際のめっき浴の温度で溶融するものであってはならない。より詳細には、固着材5の融点は、めつき浴の温度よりも100℃以上高いことが望ましい。   Further, the fixing material 5 for fixing the leads 3A and 3A is not limited to the conductive material shown in the above embodiment, and other materials such as a resin material can be applied. However, the material of the fixing material 5 should not be melted at the temperature of the plating bath when the brazing material layers 4 and 4 are formed on the metal outer ring 1 and the leads 3A and 3A. More specifically, the melting point of the fixing material 5 is desirably higher by 100 ° C. or more than the temperature of the plating bath.

さらに、上記実施例では、圧入封止型の水晶振動子用の気密端子について説明したが、抵抗溶接封止型や冷間圧接封止型の水晶振動子用の気密端子についても、同様に実施できるものである。   Further, in the above embodiment, the airtight terminal for the press-fit sealing type quartz crystal unit has been described, but the same applies to the airtight terminal for the resistance welding sealed type and the cold pressure sealed type crystal unit. It can be done.

さらにまた、上記実施例においては、水晶振動子用の気密端子について説明したが、水晶振動子用の気密端子以外の他の用途の電子部品用気密端子等についても同様に実施できるものである。   Furthermore, in the above-described embodiment, the airtight terminal for the crystal resonator has been described. However, the present invention can be similarly applied to an airtight terminal for electronic components other than the airtight terminal for the crystal resonator.

さらに、上記実施例では、金属外環1およびリード3,3の露出面に形成するめっき層としてろう材層4を形成する場合について説明したが、Ni,Au等の他のめつき層を形成する場合にも同様に適用できるものである。   Further, in the above embodiment, the case where the brazing material layer 4 is formed as the plating layer formed on the exposed surface of the metal outer ring 1 and the leads 3 and 3 has been described. However, other adhesive layers such as Ni and Au are formed. The same applies to the case.

本発明の製造方法により製造した電子部品の一例の水晶振動子用円筒型気密端子Aの斜視図The perspective view of the cylindrical airtight terminal A for crystal oscillators of an example of the electronic component manufactured by the manufacturing method of this invention 本発明の製造方法により製造した電子部品の一例の水晶振動子用円筒型気密端子Aの拡大断面図The expanded sectional view of the cylindrical airtight terminal A for crystal oscillators of an example of the electronic component manufactured by the manufacturing method of this invention 本発明の電子部品の製造方法における製造工程ブロック図Manufacturing process block diagram in the electronic component manufacturing method of the present invention 本発明の製造方法においてリードの下端部同士を固着材で固着した状態の気密端子Aoの一部を断面で示す正面図The front view which shows a part of airtight terminal Ao of the state which fixed the lower end parts of the lead with the adhering material in the manufacturing method of this invention in a cross section 本発明により金属外環およびリードの露出部分にめっき層を形成した後の気密端子Aの一部を正面で示した拡大断面図The expanded sectional view which showed a part of airtight terminal A after forming the plating layer in the metal outer ring and the exposed part of a lead by this invention in the front 本発明による電子部品の一例としての水晶振動子をプリント基板に組み付けた状態を示す断面図Sectional drawing which shows the state which assembled | attached the crystal resonator as an example of the electronic component by this invention to the printed circuit board 本発明の製造方法の第2実施態様により製造した他の気密端子Bの要部を断面で示した拡大正面図The enlarged front view which showed the principal part of the other airtight terminal B manufactured by the 2nd embodiment of the manufacturing method of this invention in the cross section. 本発明の製造方法においてリードの下端部同士を固着材で固着する工程で用いる第1実施態様の固着材固着装置の概略断面図1 is a schematic cross-sectional view of a fixing material fixing device according to a first embodiment used in a process of fixing lower end portions of leads with a fixing material in a manufacturing method of the present invention. 本発明の製造方法においてリードの下端部同士を固着材で固着する工程に用いる第1実施態様の固着材固着装置の補助具の要部拡大断面図The principal part expanded sectional view of the auxiliary tool of the fixing material fixing device of the 1st embodiment used for the process which fixes the lower end parts of a lead with fixing material in the manufacturing method of the present invention. 本発明のリードの下端部同士を固着材で固着する第2実施態様の固着材固着装置の概略断面図Schematic sectional view of a fixing material fixing device of a second embodiment for fixing the lower ends of leads of the present invention with a fixing material. 本発明のリードの下端部同士を固着材で固着する第2実施態様の固着材固着装置で用いる固着治具の一例の斜視図The perspective view of an example of the fixing jig used with the fixing material fixing device of the 2nd embodiment which fixes the lower end parts of the lead of this invention with a fixing material. 本発明のリードの下端部同士を固着材で固着する第3実施態様の固着材固着装置の概略断面図Schematic sectional view of a fixing material fixing device according to a third embodiment for fixing the lower ends of leads of the present invention with a fixing material. 従来の電子部品の一例としての気密端子Cの一部を断面で示した斜視図The perspective view which showed a part of airtight terminal C as an example of the conventional electronic component in the cross section 従来の電子部品の一例としての気密端子Cの製造工程ブロック図Manufacturing process block diagram of hermetic terminal C as an example of a conventional electronic component

符号の説明Explanation of symbols

A、B 電子部品(気密端子)
Ao 気密端子部品
1 金属外環
2 絶縁材(ガラス)
3 リード
3A 切断前のリード
3a リードの下端面
4 めっき層(ろう材層)
4a 厚いめっき層(ろう材層)
4b 薄いめっき層(ろう材層)
5 固着材(導電材または樹脂材)
5a ボール状の固着材
5b 溶融状態の固着材
5c 溶融状態の固着材による層流
6 リードの切断位置
7 金属キャップ
8 水晶振動子
10 プリント基板
11 透孔
12 レジスト層
13 導電層
14 ろう材
15 リードの切断位置
20 固着装置(ボール状固着材)
21 下治具
22 凹部
23 開口部
24 上治具
25 透孔
26 開口部
30 供給補助具
31 上板
32、34、39 透孔
33 下板
35 側板
36、37 枠体部
38 シャッタ
40 固着装置(バッチ式)
41、51 固着材収容容器
42、52 ヒータ
43 固着治具
43a スリツト
43b テーパ
44 ストッパ
50 固着装置(連続または間欠式)
53 整流板
54 ポンプ
55 コンベア
A, B Electronic components (airtight terminals)
Ao Airtight terminal parts 1 Metal outer ring 2 Insulation material (glass)
3 Lead 3A Lead 3a before cutting Lead lower end surface 4 Plating layer (brazing material layer)
4a Thick plating layer (brazing material layer)
4b Thin plating layer (brazing material layer)
5 Fixing material (conductive material or resin material)
5a Ball-shaped adhesive material 5b Molten adhesive material 5c Laminar flow 6 by molten adhesive material Lead cutting position 7 Metal cap 8 Crystal resonator 10 Printed circuit board 11 Through hole 12 Resist layer 13 Conductive layer 14 Brazing material 15 Lead Cutting position 20 fixing device (ball-shaped fixing material)
21 Lower jig 22 Recess 23 Opening 24 Upper jig 25 Through-hole 26 Opening 30 Supply auxiliary tool 31 Upper plate 32, 34, 39 Through-hole 33 Lower plate 35 Side plate 36, 37 Frame body 38 Shutter 40 Fixing device ( Batch type)
41, 51 Adhering material container 42, 52 Heater 43 Adhering jig 43a Slitting 43b Taper 44 Stopper 50 Adhering device (continuous or intermittent)
53 Current plate 54 Pump 55 Conveyor

Claims (5)

金属外環に絶縁材を介し相互に離隔し気密封着して貫通させた複数個のリードを備える気密端子部品に関し、それぞれのリード下端部同士を固着材により固着させる工程と、多数の気密端子部品をバレルに収容して前記複数個のリードにめっき層を形成するバレルめっき工程と、めっき層の形成後に前記リードを所定位置で切断して前記固着材を除去する工程とを含み、前記金属外環から貫通して伸び出るリード部分に均一なめっき層を設けたことを特徴とする気密端子の製造方法。   In connection with a hermetic terminal component having a plurality of leads that are separated from each other through an insulating material and hermetically sealed and passed through an outer metal ring, a process of fixing the lower ends of each lead with a fixing material, and a number of hermetic terminals A barrel plating step of housing a part in a barrel and forming a plating layer on the plurality of leads; and a step of cutting the lead at a predetermined position after the plating layer is formed to remove the fixing material; A method for manufacturing an airtight terminal, characterized in that a uniform plating layer is provided on a lead portion extending through an outer ring. 前記めっき層ははんだ付け性のよいろう材層であることを特徴とする請求項1に記載の気密端子の製造方法。   The method for manufacturing an airtight terminal according to claim 1, wherein the plating layer is a brazing material layer having good solderability. 前記固着材はボール状塊の外径寸法が前記リード間の間隔寸法より大きくしたことを特徴とする請求項1に記載の気密端子の製造方法。   2. The method of manufacturing an airtight terminal according to claim 1, wherein the fixing material has an outer diameter dimension of a ball-shaped lump larger than a distance dimension between the leads. 金属外環にガラス絶縁材の介在で相互に離隔させて貫通するリードを気密に封着し、リード上下の伸び出た部分にめっき層を形成した気密端子であって、前記めっき層は、リードの下端部同士を所定間隔に保ったまま固着材で固着した気密端子部品を準備し、準備された多数の気密端子部品をバレル内に収容して一括めっきによりリード表面にめっき層を形成し、めっき処理後に前記リードの下端部切断により前記固着材を除去したことを特徴とする電子部品。   An airtight terminal in which leads that penetrate through a metal outer ring with a glass insulating material interposed therebetween are hermetically sealed, and a plating layer is formed on a portion extending above and below the lead, the plating layer being a lead Preparing a hermetic terminal part fixed with a fixing material while keeping the lower end portions of each at a predetermined interval, accommodating a number of prepared hermetic terminal parts in a barrel and forming a plating layer on the lead surface by batch plating, An electronic component, wherein the fixing material is removed by cutting a lower end portion of the lead after plating. 前記気密端子は前記金属外環が低炭素鋼、Fe―Ni合金またはFe−Ni−Co合金からなる外径寸法が0.90〜0.95mmであり、前記リードがFe―Ni合金またはFe−Ni−Co合金からなる外径寸法が0.13〜0.17mmである水晶振動子用の円筒型気密端子であることを特徴とする請求項4に記載の電子部品。
The hermetic terminal has an outer diameter of 0.90 to 0.95 mm in which the metal outer ring is made of low carbon steel, Fe—Ni alloy or Fe—Ni—Co alloy, and the lead is Fe—Ni alloy or Fe— 5. The electronic component according to claim 4, wherein the electronic component is a cylindrical airtight terminal for a crystal resonator having an outer diameter of 0.13 to 0.17 mm made of a Ni—Co alloy.
JP2008162708A 2008-06-23 2008-06-23 Manufacturing method of airtight terminal and electronic component Pending JP2008300852A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008162708A JP2008300852A (en) 2008-06-23 2008-06-23 Manufacturing method of airtight terminal and electronic component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008162708A JP2008300852A (en) 2008-06-23 2008-06-23 Manufacturing method of airtight terminal and electronic component

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2000083238A Division JP4812154B2 (en) 2000-03-21 2000-03-21 Airtight terminal manufacturing method

Publications (1)

Publication Number Publication Date
JP2008300852A true JP2008300852A (en) 2008-12-11

Family

ID=40174001

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008162708A Pending JP2008300852A (en) 2008-06-23 2008-06-23 Manufacturing method of airtight terminal and electronic component

Country Status (1)

Country Link
JP (1) JP2008300852A (en)

Similar Documents

Publication Publication Date Title
JP5216290B2 (en) Piezoelectric device and method for manufacturing piezoelectric device
JP2000058401A (en) Solid electrolytic capacitor
JP4812154B2 (en) Airtight terminal manufacturing method
JP2008300852A (en) Manufacturing method of airtight terminal and electronic component
JP4854049B2 (en) Manufacturing method of electronic parts
JPH0945817A (en) Surface mount electronic part and manufacture thereof
JP5311968B2 (en) Airtight terminal plating method
JP4263765B1 (en) Electronic component soldering method
JP2001267190A5 (en)
JP2006351807A (en) Surface-mounting solid state electrolytic capacitor and its manufacturing method
JP2006217547A (en) Piezoelectric vibrator and its manufacturing method, oscillator and electronic equipment
KR102527714B1 (en) Tantalum capacitor and method of fabricating the same
JP4618790B2 (en) Hermetic seal cover and method for manufacturing the same
JP3751080B2 (en) Electronic components
JP4494849B2 (en) Sealing plate with brazing material for package and manufacturing method thereof
JP3744611B2 (en) Electronic components
JP2002280509A (en) Semiconductor device and method for manufacturing the same
JP2004342838A (en) Hermetically sealed electronic equipment
JP2005175654A (en) Quartz resonator
JP4430061B2 (en) Electrode manufacturing method for external electrode fluorescent lamp
JP2001313534A (en) Manufacturing method for capacitor incorporated piezoelectric resonator and lead terminal
JP2007173973A (en) Manufacturing method of crystal device
KR950003640Y1 (en) Discharging registor
KR100486758B1 (en) a quartz vibrator
KR100517477B1 (en) a package of electron parts

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090220

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090421

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20090602