JP2008134207A - Inspection device for frame and frame inspection method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection device for a frame and a frame inspection method for achieving the speedup of inspection and the standardization of inspection results. <P>SOLUTION: This inspection device for inspecting the degree of deformation of a frame 30 is equipped with: a stand 1 which is a main body; a table 20 rotatably pivoted on the stand 1 for horizontally thereon mounting the frame 30 which is hollow and has no adhesion layer; an AC motor rotating the table 20; a laser sensor 50 detecting whether the height of the frame 30 is proper or not by applying laser light to the frame 30 mounted on the table 20 that is rotating, with the laser light traveling from a light projecting part 51 to a light receiving part 52; a communicator 60 communicating at least a detection result of the laser sensor 50; and a controller controlling the AC motor and the communicator 60. Since the condition of the frame 30 is automatically observed by means of the laser sensor 50 without spending time in visual observation, etc., it is possible to make inspection smoother, more rapid, and easier. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a frame inspection apparatus and a frame inspection method for inspecting a frame that accommodates a substrate such as a semiconductor wafer.

  Various devices and apparatuses are used in the semiconductor manufacturing process, particularly in the post-process, and one of them is a carrier jig for dicing (see Patent Documents 1 and 2). This carrier jig has a hollow ring frame that is larger than a semiconductor wafer (not shown), and an RFID system for history management is attached to the ring frame. The semiconductor wafer is coated with UV tape in the ring frame hollow. It is accommodated and held through.

By the way, if the ring frame of the carrier jig is flat or has a uniform thickness, if the ring frame of the carrier jig is partially warped or the thickness is uneven and deformed, Inspect the state of the ring frame of the carrier jig, as it may hinder the progress of the subsequent processes of semiconductor manufacturing, cause problems when storing the semiconductor wafer in the cassette, or cause damage to the semiconductor wafer. There is a need.
Conventionally, this type of inspection involves placing a carrier jig ring frame on a table and observing the state of the ring frame over time or measuring the height of the ring frame with a dedicated ruler. It was done by.
Japanese Patent Laid-Open No. 10-233431 Japanese Patent Laid-Open No. 06-338564

  The inspection of the ring frame of the conventional carrier jig is carried out by visually observing the ring frame over time as described above, or by measuring with a dedicated ruler, so a long time is required for the inspection. Moreover, there is a problem that the inspection result may differ depending on the judgment criteria of the worker.

  The present invention has been made in view of the above, and an object of the present invention is to provide a frame inspection apparatus and a frame inspection method capable of speeding up inspection and uniforming inspection results.

In the present invention, in order to solve the above-mentioned problem, a frame for accommodating a substrate is inspected,
A table that mounts a hollow frame, a sensor that detects the suitability of the frame by irradiating the light beam from the light projecting unit to the light receiving unit on the frame, and a drive that rotates either the table or the sensor It is characterized by comprising a mechanism, a notification device that notifies at least the detection result of the sensor, and a control device that controls at least the drive mechanism and the notification device.

  Appropriateness of the frame is achieved by irradiating a table mounted on a table that mounts a hollow frame that does not have an adhesion layer, a driving mechanism that rotates the table, and a light beam from the light projecting unit to the light receiving unit. A sensor that detects at least a detection result of the sensor, and a control device that controls at least the drive mechanism and the notification device.

  In addition, the table includes a table on which the table is mounted and supported. The table is provided with first and second supports, and a light projecting portion of the sensor is attached to the first support, and the second support is mounted on the table. The sensor light receiving part is attached to the exposed part of the sensor, and a part of the frame on the table is interposed between the light projecting part and the light receiving part of the sensor. May be irradiated from the lateral direction.

The drive mechanism can be an AC (alternating current) motor and the sensor can be a laser sensor.
The notification device emits an OK lamp that emits light when the height of the frame detected by the sensor is equal to or lower than a predetermined height, and emits light when the height of the frame detected by the sensor exceeds a predetermined height. And an NG lamp.
In addition, the control device has a function of causing the OK lamp of the notification device to emit light when the height of the frame detected by the sensor is equal to or lower than a predetermined height, and the height of the frame detected by the sensor has a predetermined height. In the case of exceeding, it is preferable to include a function of causing the NG lamp of the notification device to emit light.

Further, in the present invention, in order to solve the above-mentioned problem, a method for inspecting a frame for accommodating a substrate,
The hollow frame is inspected by using the frame inspection apparatus according to any one of claims 1 to 5.

  Here, the substrate in the claims includes at least a semiconductor wafer (200 mm, 300 mm, 450 mm type, etc.), a glass substrate, a mask glass, and the like. The frame is not particularly limited to a synthetic resin, a metal, a ring shape or a frame shape. The table is preferably a rotary type, but may be a fixed type. When the table is a fixed type, it is preferable that the first and second support members rotate together and the first support member rotates along the periphery of the table. The sensor is mainly a laser sensor, but various non-contact photoelectric sensors (reflective type, transmissive type, regressive reflection type, etc.) may be used as long as the same effect can be expected.

  The drive mechanism may be only various motors (stepping motor, torque motor, etc.), but may be a combination of an AC motor and a brake mechanism, a combination of an AC motor, a gear mechanism, a brake mechanism, and / or a controller. The notification device is not particularly limited to a device that notifies the suitability of the frame by the light emission of the lamp, a device that notifies the speaker by sound, and a device that notifies the light emission and sound of the lamp together. The light emitted from the lamp of the notification device may be turned on or blinked. Further, the control device does not ask whether a contact relay system, a contactless relay system, or a microcomputer is used.

  According to the present invention, when it is desired to inspect the frame, the frame is set on the table of the inspection device, the drive mechanism is driven to rotate either the table or the sensor, and the light beam of the sensor is rotated to the relatively rotating frame. To detect the state of the frame. If the sensor detects the state of the frame and, as a result, the frame is non-defective, the notification device notifies that. On the other hand, when the frame is a defective product, the notification device notifies that it is a defective product.

According to the present invention, it is possible to speed up the inspection relating to the frame and uniform the inspection results.
If the drive mechanism is an AC motor, the rotational speed of the table or sensor can be easily controlled. Further, if the sensor is a laser sensor, irregularities that cannot be detected by the photoelectric sensor can be read with high contrast.

  Further, the notification device emits an OK lamp that emits light when the height of the frame detected by the sensor is equal to or lower than a predetermined height, and emits light when the height of the frame detected by the sensor exceeds the predetermined height. If it is composed of an NG lamp, the inspection result relating to the frame can be easily and clearly grasped visually.

  Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. A frame inspection apparatus according to this embodiment includes a gantry 1 as a main body and a bearing on the gantry 1 as shown in FIGS. A table 20 on which the frame 30 is rotatably supported via the table, an AC motor 40 for driving the table, a small laser sensor 50 for detecting whether or not the frame 30 is suitable, and at least, A notification device 60 that notifies the detection result of the laser sensor 50 and a control device 70 that controls at least the AC motor 40 and the notification device 60 are provided.

  As shown in FIG. 1 and FIG. 2, the gantry 1 is formed in a horizontally long casing with a safety cover that can be removed from the periphery, and screws with legs can be raised and lowered at four corners of a flat bottom surface. The table 20 and the first and second supports 2 and 3 are vertically arranged on the surface which is a flat stage. The first and second support tools 2 and 3 are erected so as to be horizontally opposed to each other, and the first support tool 2 is fixedly adjacent to the table 20 at an interval from the lateral direction. The support 3 is fixed through the center of the table 20.

  As shown in FIGS. 1, 2, and 3, a horizontally long operation panel 4 that is inclined in the front-rear direction is mounted on the upper portion of the gantry 1. The operation panel 4 and the like are provided with a breaker 5 that is a main power switch, A rotation speed knob 6 that changes the rotation speed of the table 20 (for example, 5 to 8 seconds / rotation), an inspection start switch 7 that lights during inspection, and a rotatable emergency stop switch 8 that shuts off the power supply, A stop switch 9 for stopping inspection during inspection, an amplifier unit 10 for amplifying a signal by cutting noise of the laser sensor 50, and a notification device 60 are arranged side by side.

  When the table 20 is not at the start position origin, the start switch 7 blinks to visually warn the operator and to return the table 20 to the start position origin based on the operator's pressing operation. Function.

  As shown in the figure, the table 20 is basically formed in a cylindrical shape, and a flange 21 extends horizontally outward from the upper peripheral edge, and an adhesion layer is formed on the flat surface of the flange 21. A hollow frame 30 that does not have 38 is detachably mounted horizontally by an operator. On the surface of the flange 21, a plurality of positioning pins (not shown) for positioning the frame 30 to be mounted are erected at a predetermined interval.

  As shown in FIGS. 1, 2, 5 to 7, the frame 30 is formed in a substantially hollow ring shape having a size capable of accommodating the semiconductor wafer W through a gap using a predetermined material. An elastic adhesive layer 38 is detachably attached to the semiconductor wafer W, and a semiconductor wafer W is detachably held and mounted on the surface of the adhesive layer 38. The material of the frame 30 is not particularly limited, and examples thereof include PPS, PA, PEI, PAI, PEEK, PES, LCP, and PBT which are excellent in mechanical strength. In these materials, a filler such as glass fiber, carbon fiber, or calcium carbonate that ensures strength and rigidity is blended as necessary.

  The frame 30 is formed with notches 31 for positioning on both sides of the front part of the outer peripheral surface thereof, and a horizontally long storage hole 32 is selectively recessed at the center of the rear part of the surface. The RF tag 34 for constructing the RFID system (mobile object identification system) 33 is selectively attached.

  As shown in FIG. 5, the RFID system 33 includes an RF tag 34 that accesses an internal memory by radio waves and moves with the frame 30, an antenna unit 35 that transmits and receives radio waves and power between the RF tags 34, and an RF A reader / writer 36 for controlling the communication of the tag 34 and a computer 37 for controlling the reader / writer 36 are configured to increase the amount of information compared to the barcode, facilitate the rewriting of information, or Facilitates remote reading.

  The inspection history of the frame 30 can be written in the RF tag 34. The antenna unit 35 and the reader / writer 36 are configured separately, but are integrated as necessary. Various controllers are used in place of the computer 37 if the control of the reader / writer 36 is not hindered.

  The adhesion layer 38 is formed into a flexible thin disk that can be deformed using a predetermined material, and is adhered and held on the back surface of the frame 30 to cover the hollow of the frame 30 from below. It functions to detachably attach the back surface of the semiconductor wafer W to the exposed surface exposed in the hollow.

  The material of the adhesion layer 38 is not particularly limited. For example, PP, PE, ethylene-propylene copolymer, ethylene-vinyl acetate copolymer, ethylene-methyl acrylate copolymer, chloride, having a thickness of 20 to 300 μm. Examples of the film include vinyl resin and PET. As the adhesive for the adhesion layer 38, a polymer made of acrylic acid, methacrylic acid or various ester derivatives of these acids, or an adhesive resin such as an acrylic resin made of a copolymer is used. The

  The semiconductor wafer W is made of, for example, a round silicon wafer sliced to a diameter of 300 mm (12 inches), a circuit pattern is drawn and formed on the front surface, and the back surface is back-ground so that the thickness is reduced to 100 μm or less. (See FIG. 7). A positioning orientation flat and a semicircular notch are selectively formed on the peripheral edge of the semiconductor wafer W.

  As shown in FIG. 3, the AC motor 40 is composed of, for example, a small AC speed control brake motor or the like whose speed can be easily controlled by the rotation number knob 6, and is built in the gantry 1 and horizontally used as a turntable. It functions to rotate a predetermined number of times.

  As shown in FIGS. 1, 2, and 3, the laser sensor 50 includes a light projecting unit 51 that is mounted on the first support 2 so that the position thereof can be adjusted, and a second support that is exposed from the center of the table 20. A light receiving portion 52 that is mounted on the exposed portion of the tool 3 so as to be position-adjustable and that is spaced horizontally from the light projecting portion 51 and that is horizontally opposed is connected to the amplifier unit 10. The parallel laser beam (light beam) is irradiated so as to cross the frame 30 on the table 20 to function to detect the degree of deformation of the frame 30.

  That is, the laser sensor 50 horizontally irradiates the frame 30 mounted on the rotating table 20 with a high-definition thin laser beam from the light projecting unit 51 to the light receiving unit 52 such as a CCD (see FIG. 1). Thus, the height of the frame 30, in other words, the frame 30 is received by receiving the reflected laser light by the light receiving unit 52 or by receiving the change in the amount of laser light shielded by the frame 30 by the light receiving unit 52. The warp and thickness of 30 are detected, and the suitability of the frame 30 is detected from the detected height.

  As shown in FIGS. 1 to 3, the notification device 60 includes a power switch 61 that turns on a power lamp while the power of the device is turned on, and the height of the frame 30 detected by the laser sensor 50 is a predetermined height. An OK lamp 62 that is turned on for a non-defective product below and an NG lamp 63 that is turned on for a defective product when the height of the frame 30 detected by the laser sensor 50 exceeds a predetermined height due to deformation such as warping. And is configured.

  The power switch 61, the OK lamp 62, and the NG lamp 63 are mounted side by side on the operation panel 4 of the gantry 1. In addition, the OK lamp 62 or the NG lamp 63 functions so as to be lit according to the inspection result at the end of the inspection. The NG lamp 63 is lit whenever a deformation such as a warp of the frame 30 is found.

  As shown in FIG. 3, the control device 70 includes a CPU 71 that performs an arithmetic processing function, a ROM 72 that stores a predetermined inspection program, and a RAM 73 that stores a history of inspection and the like. The circuit board is mounted on a circuit board together with predetermined circuit elements. The circuit board is built in the gantry 1 and includes a breaker 5, various switches 6, 7, 8 and 9, an amplifier unit 10 for the laser sensor 50, an AC motor 40, It is connected to the notification device 60 and the like. The control device 70 configured as described above realizes a predetermined function as a computer by the CPU 71 reading a predetermined program stored in the ROM 72 using the RAM 73 as a work area.

  As a predetermined function of the control device 70, at least a function for determining whether or not the start switch 7 is turned on, an OK lamp 62 and an NG lamp 63 of the notification device 60 that are turned on when the start switch 7 is turned on, A function to turn off the light, a function to determine whether or not the table 20 is at the origin of the start position, a function to determine whether or not the emergency stop switch 8 is turned ON when the table 20 is at the origin of the start position, A function for determining whether or not the stop switch 9 is turned on when the emergency stop switch 8 is not turned on. When the stop switch 9 is not turned on, the AC motor 40 as a drive mechanism is driven, and the laser sensor 50 is turned on. A function to determine whether or not the frame 30 is non-defective, and as a result of this determination, the height of the frame 30 is equal to or higher than a predetermined height. The function of turning on the OK lamp 62 of the notification device 60 when it is determined to be a non-defective product and the result of the determination indicate that the height of the frame 30 exceeds a predetermined height and is determined to be defective. A function for turning on the NG lamp 63 is given.

  In the above, when it is desired to inspect whether the frame 30 before shipment or the frame 30 from which the adhesion layer 38 has been peeled is warped or uneven in thickness, first, the breaker 5 and the power switch of the frame inspection device are used. 61 is turned on sequentially (S1, S2 in FIG. 4), the power lamp is turned on (S3), the frame inspection device is inspected (S4), and if there is no abnormality in this inspection, the inspection work is started. (S5).

  When the inspection reveals an abnormality in the frame inspection device, the operator checks (S6) and the engineer adjusts (S7). When the normal state is restored, the power switch 61 may be turned OFF ( S8).

  When the inspection work is started, the hollow frame 30 is horizontally positioned on the flange 21 of the table 20 as a work (S9), the start switch 7 is turned on (S10), and the inspection of the frame 30 is started (S11). Then, the OK lamp 62 and the NG lamp 63 of the notification device 60 that are lit are turned off (S12).

  When both the OK lamp 62 and the NG lamp 63 of the notification device 60 are extinguished, it is detected whether or not the table 20 is at the start position origin (S13), the table 20 is at the start position origin, and the emergency stop switch. 8 and the stop switch 9 are not turned ON (S14, S15), the AC motor 40 is driven under the control of the control device 70 to rotate the table 20 and the frame 30 together, and the laser sensor. The deformation of the frame 30 is detected by horizontally irradiating the laser beam across the frame 30 on the table 20 on which the 50 rotates.

  If there is no table 20 at the starting position, the start switch 7 blinks (S16) to alert the operator, so that the start switch 7 is turned on (S17) to bring the table 20 to the start position. Can be rotated and returned. If the emergency stop switch 8 is turned on, the power is shut off (S18). However, if it is desired to recover, the power switch 61 may be turned on again.

  When the stop switch 9 is turned on, the start switch 7 blinks to alert the operator (S19), but when the inspection is to be resumed, the start switch 7 is turned on again (S20). ) To return the table 20 to the start position and restart the inspection (S21).

  Then, the laser sensor 50 detects the degree of deformation of the frame 30, that is, whether or not the frame 30 is non-defective (S22). As a result of this detection, the frame 30 is substantially flat and non-defective when the height of the frame 30 is a predetermined height or less. The OK lamp 62 of the notification device 60 is lit and displayed under the control of the control device 70 (S23).

On the other hand, when the height of the frame 30 exceeds a predetermined height due to deformation such as warping, the NG lamp 63 of the notification device 60 is lit and displayed under the control of the control device 70 (S24). Therefore, it is possible to objectively and clearly grasp that the frame 30 being inspected is warped or uneven in thickness.
When the inspection is completed, the frame 30 is removed from the flange 21 of the table 20, and the above operation is repeated for each inspection operation.

  According to the above configuration, since the state of the frame 30 is visually observed over time, and the height of the frame 30 is not measured with a dedicated ruler, but mechanically measured by the laser sensor 50, Significant smoothing, speeding up, and facilitation can be achieved, and in addition to inspection outside the process, inspection inside the process can be realized. Further, since there is no room for the operator's arbitrary judgment to enter the inspection, the inspection results can be made uniform. Therefore, there is no possibility that the progress of the post-process of semiconductor manufacturing will be hindered, a trouble will occur when the semiconductor wafer W is stored in the cassette, or the semiconductor wafer W will be damaged.

  Further, since the AC motor 40 is used instead of a mere motor, it can be easily operated with a commercial power source in the factory, the speed of the table 20 can be easily controlled, and a stable rotation can be obtained with respect to load fluctuations. It becomes possible. In addition, since the laser sensor 50 is used instead of a mere photoelectric sensor, irregularities that cannot be detected by the photoelectric sensor can be easily read in a non-contact manner with extremely high contrast, and even slight warping and deformation of the frame 30 can be accurately performed. It becomes possible to detect.

  Further, by adopting the laser beam, even when the frame 30 is made of a glossy material, it is possible to easily and surely detect whether it is a non-defective product, and the laser beam can be clearly seen. Therefore, the optical axis adjustment and the position correction are facilitated, and the detection distance can be increased. Furthermore, since the laser sensor 50 irradiates the rotating frame 30 with the laser beam not from above but from the horizontal direction, it does not take time to inspect all of the surface that is the inspection area of the frame 30. However, the deformation of the frame 30 can be detected and found at an early stage. Therefore, a short time inspection of the frame 30 can be greatly expected.

  In addition, although the table 20 was rotated in the said embodiment, it is not limited to this at all. For example, the table 20 is fixed and the first and second supports 2 and 3 are rotated to make the frame 30 on the table 20 relatively rotatable, and laser light is applied to the relatively rotating frame 30. It is also possible to detect the suitability of the frame 30 by irradiating substantially horizontally so as to cross the frame. Further, the notification device 60 may be composed of an OK lamp 62 and an NG lamp 63. Furthermore, if the same function is exhibited, the structure of the control apparatus 70 can be changed suitably.

It is a perspective explanatory view showing typically an embodiment of a frame inspection device concerning the present invention. It is front explanatory drawing which shows typically embodiment of the test | inspection apparatus for flame | frames concerning this invention. It is a circuit diagram showing typically an embodiment of an inspection device for frames concerning the present invention. 3 is a flowchart schematically showing an embodiment of a frame inspection apparatus and a frame inspection method according to the present invention. It is a perspective explanatory view showing typically the RFID system in the embodiment of the inspection device for frames concerning the present invention. It is a plane explanatory view showing typically an embodiment of a frame inspection device concerning the present invention. It is a section explanatory view showing typically an embodiment of a frame inspection device concerning the present invention.

Explanation of symbols

1 stand
2 First support 3 Second support 6 Rotation knob 7 Start switch 8 Emergency stop switch 9 Stop switch 10 Amplifier unit 20 Table 21 Flange 30 Frame 33 RFID system 34 RF tag 38 Adhesion layer 40 AC motor (drive mechanism) )
50 Laser sensor (sensor)
51 Light Emitting Unit 52 Light Receiving Unit 60 Notification Device 61 Power Switch 62 OK Lamp 63 NG Lamp 70 Control Device 71 CPU
72 ROM
73 RAM
W Semiconductor wafer (substrate)

Claims (6)

  An inspection device for a frame that inspects a frame that accommodates a substrate, and detects the suitability of the frame by irradiating a light beam from the light projecting unit to the light receiving unit onto the table mounted on the table. And a driving mechanism that rotates any one of the table and the sensor, a notification device that notifies at least a detection result of the sensor, and a control device that controls at least the driving mechanism and the notification device. A frame inspection device.   The table includes a table for supporting the table. The table is provided with first and second supports, and the first support is attached with the light projecting portion of the sensor. A light receiving part of the sensor is attached to the exposed part at the center part, and a part of the frame on the table is interposed between the light projecting part and the light receiving part of the sensor, and the light beam of the sensor is part of this frame. The frame inspection apparatus according to claim 1, wherein the frame is irradiated from the lateral direction.   3. The frame inspection apparatus according to claim 1, wherein the driving mechanism is an AC motor and the sensor is a laser sensor.   The notification device includes an OK lamp that emits light when the height of the frame detected by the sensor is equal to or less than a predetermined height, and an NG lamp that emits light when the height of the frame detected by the sensor exceeds a predetermined height. The frame inspection device according to claim 1, 2, or 3.   The control device has a function of causing the OK lamp of the notification device to emit light when the height of the frame detected by the sensor is equal to or lower than the predetermined height, and the case where the height of the frame detected by the sensor exceeds the predetermined height The frame inspection device according to claim 4, further comprising a function of causing the NG lamp of the notification device to emit light.   A frame inspection method for inspecting a frame that accommodates a substrate, wherein the hollow frame is inspected by using the frame inspection device according to claim 1.

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