JP2008116392A - Geometrical properties calculating method for object to be measured, geometrical property program, and profile-shape measuring instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To automate or semi-automate working for assigning the range used for calculating a geometrical properties of the profile shape from among shape measured data, when calculating the geometrical properties of the profile shape, using the shape measured data of the measured profile shape formed on a surface of an object to be measured. <P>SOLUTION: This profile-shape measuring instrument 1 is provided with an alignment part 61 for aligning a design data, including a geometrical element for specifying the profile shape with the shape-measured data of the profile shape of an object surface to be measured formed according thereto; and a data range determining part 63 for determining an outer end of a profile shape measured range, formed corresponding to the geometric element from among the shape measured data, based on the position of the outer end of the geometrical element, included in the design data aligned to the shape measured data. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a contour shape measuring apparatus for measuring the contour shape of an object to be measured, and shape measurement data obtained by measuring the contour shape formed on the surface of the object to be measured. The present invention relates to a method and program for calculating geometric properties such as degrees. In particular, the present invention relates to a technique for designating a data range in which a geometric property is to be calculated from shape measurement data obtained by measuring the contour shape of the surface of an object to be measured.

  Generally, the contour shape measuring apparatus moves the stylus and the object to be measured relative to each other while pressing the stylus against the surface of the object to be measured with a predetermined measurement pressure. By converting the displacement amount into an electrical signal and reading it with a computer such as a computer. Surface shape data of an object to be measured is created (for example, Patent Document 1 below). FIG. 1 shows a basic configuration of the contour shape measuring apparatus.

  In the specification, the present invention will be described by exemplifying a “contour shape measuring device”, but the present invention is not limited to this, and the “three-dimensional coordinate measuring device”, “roundness measuring device”, “surface” The present invention can be applied to any apparatus capable of measuring the contour shape of the object to be measured even if the name and application are different, such as “roughness measuring apparatus”. Further, the present invention is applicable not only to a contact-type measuring device for bringing a stylus along the surface of an object to be measured as described below, but also to a contour shape measuring device using a non-contact sensor that does not contact the measurement surface. Is possible.

The contour shape measuring apparatus 1 is provided with a table 2 along the XY plane for placing the workpiece W to be measured. A column 3 is erected on the table 2. A Z-direction movable part 4 is attached to the column 3. The column 3 incorporates a motor (not shown), and the motor can move the Z-direction movable portion 4 up and down along the column 3 (that is, along the Z direction).
The Z-direction movable portion 4 is provided with an X-direction movable portion 5, an arm portion 10 is attached to the X-direction movable portion 5, and a pickup 6 is attached to the tip of the arm portion 10. The Z direction movable part 4 also includes a motor (not shown), and the X direction movable part 5 can be driven in the X direction.

A measuring element (pickup) 6 for measuring the contour shape of an object to be measured placed on the table 2 is provided at the tip of the arm portion 10. The pickup 6 has a stylus 11 at one end. A cantilever 7 provided with is attached.
In a state where the stylus 11 is pressed against the measurement surface 103 of the workpiece W, the calculation unit 30 such as a computer for controlling the operation of the contour shape measuring apparatus 1 is connected via the moving mechanism driving circuit 70 to the X direction driving unit 4. Is moved at a constant speed. Then, the stylus 11 moves up and down along the contour of the measurement surface, and thereby the cantilever 7 swings. This swing amount is converted into an electric signal by an operating transformer or an operating inductance in the pickup 6.

The output signal of the pickup 6 is input to an analog / digital conversion circuit (ADC) 20, and the analog / digital conversion circuit 20 converts the analog signal into a digital displacement signal string at a predetermined sampling period.
The digital displacement signal sequence is input to the calculation unit 30. The calculating unit 30 moves the X-direction movable unit 5 at a constant speed and moves the stylus 11 on the surface of the object to be measured 103 while sequentially reading the displacement signal values and the stylus 11 and the target at each position. The Z coordinate of the contact point with the surface 103 to be measured is obtained, and this is sequentially arranged on the movement path of the stylus 11 to create surface shape data of the object to be measured.

FIG. 2A is a diagram illustrating an example of shape measurement data of a contour shape formed on the surface of the workpiece W. In this figure, the data is shown as a straight line or a curve for simplicity, but the actual shape measurement data usually consists of a measurement data point sequence of coordinates at each position on the surface of the object to be measured. The shape measurement data illustrated in FIG. 2A includes two arc-shaped data portions MD1 and MD3 and one linear data portion MD2.
Here, a known geometric shape such as an arc, a straight line, a circle, or a rectangle that can be used to specify a contour shape is referred to as a “geometric element” in the present specification and claims. .

In the contour shape measuring apparatus 1, not only the shape measurement data of the surface of the workpiece W but also the contour shape indicated by the shape measurement data MD1 to MD3 (in the example shown, arcs A1 and A2 and straight line L). Some of them have a function of calculating the dimensions.
For example, as shown in FIG. 2B, for the contour A1 portion having an arc shape, the center position O1 of the entire circle including the arc A1, the radius R of the entire circle, the start point P1 and end point P2 of the arc, the start angle θ1, end angle θ2, and roundness can be calculated. For the straight contour L portion, the start point P3 and end point P4 of the straight line L, the length LN, the angle with respect to a predetermined coordinate axis, and the like are calculated.

Here, with respect to the geometric element and the contour shape having a shape corresponding thereto, information specifying the type of the geometric element such as “arc”, “straight line”, “circle”, “rectangular”, etc. is simply used in the present specification and claims. In the range, the “type” of the geometric element and the “type” of the contour shape are described.
Further, for the geometric element and the contour shape having a shape corresponding to the geometric element, numerical information that specifically specifies any one of the size, shape, and position of the geometric element when used together with the above “type” is described in this specification. In the description and the claims, the “geometric characteristics” of the geometric elements and the “geometric characteristics” of the contour shape are described. Examples of the geometric properties of the arc are the radius R, the start angle θ1 and the end angle θ2, the center position O, the start point P1, and the end point P2. Examples of the geometrical properties of the straight line are the length LN, the angle with respect to the coordinate axis, the start point P3, and the end point P4.

  In addition to the primary geometric properties directly calculated for each geometric element, the contour shape measuring apparatus 1 further calculates numerical values indicating these primary geometric properties to obtain secondary geometric properties. Some have a function of calculating properties. An example of such a secondary geometric property is the pitch between the center points O1 and O2 of the two arcs shown in FIG.

JP 2002-107144 A Japanese Patent Laid-Open No. 2005-127934

In order to calculate the geometric properties of the contour shape formed on the surface of the workpiece W, the range of the portion where the contour shape is measured from the measurement shape data obtained by measuring the surface of the workpiece W It is necessary to specify the type of contour shape.
In the conventional contour shape measuring apparatus 1, this designation work has been performed by a human. For example, when calculating the geometric properties of the arc A1 shown in FIG. 2B, the operator uses the start point P1 of the arc-shaped measurement data MD1 displayed on the computer display as the calculation unit 30. The end point P2 is designated by an input means such as a mouse. Further, the operator operates a graphical user interface (GUI) realized by the calculation unit 30 to input the contour shape type “arc” indicated by the measurement data MD1.

  For this reason, not only the input operation is complicated, but also the calculation results are not uniform due to individual differences among operators. That is, even when measuring the surface of an object to be measured having a contour shape equal to a certain geometric element, the actual object to be measured usually has minute irregularities on the surface and the edge portion is sag. is there. For this reason, a large difference may occur in the calculation result due to a minute difference in designation of the data range for calculating the geometric property.

  Therefore, in the present invention, when calculating the geometric properties of the contour shape using the shape measurement data obtained by measuring the contour shape formed on the surface of the object to be measured, the contour shape of the shape measurement data is calculated. The purpose is to automate or semi-automate the work of specifying the range to be used for calculating geometric properties.

To achieve the above object, in the present invention, when the contour shape on the surface of the object to be measured is formed based on the design data, the contour shape in the shape measurement data obtained by measuring the surface of the object to be measured. Is determined from the position of the contour shape in the design data.
According to the first aspect of the present invention, the geometric property of the object to be calculated for calculating the geometric property of the contour shape on the surface of the object to be measured, which is formed according to the design data including the geometric element for specifying the contour shape. A calculation method is provided. In this method, alignment is performed between the shape measurement data obtained by measuring the contour shape on the surface of the object to be measured and the design data, and the data of the contour shape portion formed according to the geometric element in the shape measurement data. The position of the outer end of the range is determined from the position of the outer end of the geometric element included in the design data aligned with the shape measurement data.

According to the second aspect of the present invention, the geometry of the object to be measured for calculating the geometric property of the contour shape on the surface of the object to be measured, which is formed according to the design data including the geometric element specifying the contour shape. A program for calculating physical properties is provided.
The program includes a step of positioning between shape measurement data obtained by measuring the contour shape of the surface of the object to be measured and design data, and a contour shape portion formed according to a geometric element in the shape measurement data. Determining the position of the outer edge of the range of data from the position of the outer edge of the geometric element included in the design data aligned with the shape measurement data.

  According to the third aspect of the present invention, the contour shape measuring unit that measures the contour shape on the surface of the object to be measured and the shape measurement data of the contour shape on the surface of the object to be measured are generated from the result of the contour shape measurement. There is provided a contour shape measurement device having a shape measurement data generation unit and a geometric property calculation unit that calculates the geometric property of the contour shape indicated by the shape measurement data. Here, the contour shape measuring device includes a positioning unit that performs positioning between design data including geometric elements that specify the contour shape and contour shape shape measurement data of the surface of the object to be measured formed in accordance therewith, Data for determining the position of the outer edge of the data range of the contour shape portion formed according to the geometric element from the shape measurement data from the position of the outer edge of the geometric element included in the design data aligned with the shape measurement data A range determining unit.

According to the present invention, it is possible to automatically specify the calculation range and type necessary for calculating the geometric properties of the contour shape formed on the surface of the object to be measured, so that the work efficiency is greatly improved. It becomes possible to do.
In addition, since it is possible to always keep the determination criterion for determining the boundary position of the calculation range, variations in calculation results by the operator are eliminated.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 3 is a diagram showing a schematic configuration example of a calculation unit that controls the contour shape measuring apparatus shown in FIG. 1 to realize the contour shape measuring apparatus according to the present invention. Since the other components of the contour shape measuring apparatus according to the embodiment of the present invention are the same as those of the contour shape measuring apparatus 1 shown in FIG.

  The calculation unit 30 realized by a computer or the like includes a CPU 31 that executes a control program for the contour shape measuring apparatus 1, a program that processes output signals from the pickup 6 and creates surface shape data, and the like. A main storage device 32 such as a RAM and a ROM for storing data necessary for the execution, a sub storage device 33 for storing each program executed by the CPU 31 and the created surface shape data, and a sub storage device 33. And an interface 34 for exchanging data between the CPU 31 and the CPU 31.

The calculation unit 30 includes an input unit 35 such as a keyboard and a mouse that accepts an operation of inputting commands and data by an operator, an interface 36 for inputting commands and data by the operator input from the input unit 35 to the calculation unit 30 body, A display unit 37 that is a display device that displays an operation screen of the contour shape measuring device 1 realized by measurement result data of the contour shape measuring device 1, a graphical user interface (GUI), and the like, and a CPU 31 that controls the display unit 37 to control the display unit 37. A display control unit 38 that causes the display unit 37 to display display content generated by each program to be executed.
Further, the calculation unit 30 includes an interface 39 for inputting a displacement signal obtained by converting the output signal from the pickup 6 into a digital signal by the analog-to-digital conversion circuit 20, and the Z direction movable unit 4 and the X direction movable unit. And an interface unit (I / F) 40 for outputting a control signal for controlling the operation of 5 to the moving mechanism drive circuit 70.

  FIG. 4 is a functional block diagram realized by the contour shape measurement program 50 executed by the CPU 31 of the calculation unit 30 shown in FIG. The CPU 31 of the calculation unit 30 executes the geometric shape measurement program 50 stored in the secondary storage device 33, thereby calculating the geometric property calculated by the geometric property calculation program incorporated in the contour shape measurement program 50. The functional blocks of the unit 52, the shape measurement data generation unit 51, and the GUI unit 53 that generates a graphical user interface to be displayed on the display unit 37 are realized.

  The shape measurement data generation unit 51 generates shape measurement data of the contour shape of the surface of the workpiece W. For example, the shape measurement data generating unit 51 is an analog-to-digital conversion circuit while the X-direction movable unit 5 is moving at a constant speed with the stylus 11 shown in FIG. 1 in contact with the surface of the workpiece W. The displacement signal detected by the pickup 6 is sequentially read via 20, and the Z coordinate of the contact point between the stylus 11 and the workpiece W indicated by the displacement signal read at this time is indicated on the movement path of the stylus 11. The shape measurement data of the surface of the object W to be measured is created by disposing each of the above.

The GUI unit 53 allows the operator to perform an input operation necessary for the geometric property calculation unit 52 to calculate the geometric property for the contour shape included in the shape measurement data. A GUI screen is generated for performing through the menu.
For example, the GUI unit 53 includes the shape measurement data of the surface of the measurement object W generated by the shape measurement data generation unit 51 and the surface of the measurement object W that is used when forming the surface shape of the measurement object W. A GUI screen for displaying the contour shape design data in a predetermined window portion is generated.
The GUI unit 53 generates a GUI screen having operation units such as a menu, a pull-down menu, and a check box necessary for the operator to specify the operation of the geometric property calculation unit 52. Further, the GUI unit 53 detects that the shape measurement data or design data displayed on the GUI screen is indicated by a mouse or the like as necessary, and the range of the shape measurement data or design data designated by the operator is detected. It is also possible to detect and parts.

The geometric property calculation unit 52 calculates the geometric property of the contour shape included in the shape measurement data generated by the shape measurement data generation unit 51. Therefore, the geometric property calculation unit 52 has a primary property calculation unit 64 that calculates a geometric property that is directly determined from the contour shape included in the shape measurement data, and a primary property that the primary property calculation unit 64 has calculated from the shape measurement data. A secondary property calculation unit 65 for calculating a secondary geometric property by further calculating a specific geometric property.
The geometric property data calculated by the primary property calculation unit 64 and the secondary property calculation unit 65 is stored in the secondary storage device 33 or displayed on the GUI screen.
Of the shape measurement data generated by the shape measurement data generation unit 51, any range of data is used as a range of data for which the geometric property is to be calculated by the primary property calculation unit 64, and the contour shape included in this data range The type can be designated as usual by operating the GUI screen by the operator.

However, the geometric property calculation unit 52, when the shape measurement data generated by the shape measurement data generation unit 51 is the measurement object W having a surface contour shape formed according to known design data, Based on this design data, the range of data for which the geometrical properties of the contour shape are to be calculated and the type of contour shape are automatically determined.
In other words, design data such as CAD data used for designating the contour shape of an object includes a plurality of types of known geometries such as “arc”, “straight line”, “circle”, and “rectangle”. The contour shape is specified using a geometric element having a geometric shape. The design data used as the basis for forming the contour shape of the surface of the workpiece W includes type data, coordinate data of geometric elements corresponding to the contour shape formed on the surface of the workpiece W, And property data for specifying a geometric property such as a dimension of the geometric element is included.

  Therefore, the geometric property calculation unit 52 uses the design data of the contour shape of the surface of the workpiece W read by the calculation unit 30 and stored in the secondary storage device 33 or the like, and the type of the geometric element included in the design data. Data, coordinate data, and property data are read out. Then, out of the shape measurement data generated by the shape measurement data generation unit 51, the position of the outer end of the range in which the portion of the contour shape formed according to the geometric element included in the design data is measured, and the type of the contour shape, This is determined based on the type data and property data of this geometric element.

For this reason, the geometric property calculation unit 52 forms the shape measurement data of the contour shape of the surface of the workpiece W generated by the shape measurement data generation unit 51 and the contour shape of the surface of the workpiece W. A positioning unit 61 is provided for positioning the design data.
Further, the geometric property calculation unit 52 determines the shape of the contour portion formed corresponding to the geometric element from the shape measurement data based on the type of the geometric element included in the design data aligned with the shape measurement data. A geometric element type determining unit 62 that determines the type is provided.
Further, the geometric property calculation unit 52 calculates a contour shape portion formed according to the geometric element from the position of the outer edge of the geometric element included in the design data aligned with the shape measurement data. A data range determining unit 63 is provided for determining the range in which the values are measured.

Then, the data range determination unit 63 designates all or part of the determined data range as the data range for which the geometric property is to be calculated, to the primary property calculation unit 64. The geometric element type determination unit 62 gives the shape type of the contour portion formed corresponding to the geometric element to the primary property calculation unit 64.
Based on the data range and type, the primary property calculation unit 64 calculates the geometric property of the contour shape included in the designated data range among the shape measurement data generated by the shape measurement data generation unit 51. .

FIG. 5 is an overall flowchart of the geometric property calculation method according to the embodiment of the present invention.
First, in step S11, the contour shape measuring apparatus 1 shown in FIG. 1 moves the X-direction movable unit 5 at a constant speed while the stylus 11 is in contact with the surface of the object W to be measured, and the pickup 6 detects during that time. The contour shape of the surface of the workpiece W is measured by detecting the displacement signal.
Next, in step S12, the shape measurement data generation unit 51 of the contour shape measurement program 50 shown in FIG. 4 realized by the calculation unit 30 sequentially reads the displacement signals detected by the pickup 6 via the analog-digital conversion circuit 20. Then, shape measurement data of the contour shape of the surface of the workpiece W is generated.

Here, it is assumed that the surface of the workpiece W from which the shape measurement data is generated by the shape measurement data generation unit 51 has a portion where a contour shape is formed according to the geometric elements included in the known design data. To do. 6A is a diagram illustrating an example of the shape measurement data MD by the shape measurement data generation unit 51, and FIG. 6B is a diagram illustrating the shape measurement data MD illustrated in FIG. 6A. It is a figure which shows the design data DD of the outline shape of a location.
As shown in FIG. 6A, the shape measurement data obtained by measuring the arc-shaped concave portion is included in the MD1 range of the shape measurement data MD. The contour shape in the MD1 range is formed according to the arc A included in the design data DD shown in FIG.

The design data DD includes geometric element type data that specifies the contour shape, coordinate data, and property data that specifies the dimensions of the geometric elements. For example, design data DD including a geometric element whose type is “arc”, such as an arc A shown in FIG. 6B, includes the center point O of the entire circle including the arc A as the coordinate data of the geometric element A. Are included as the property data of the geometric element A, the radius R of the entire circle, the start angle θ1 of the arc A, and the end angle θ2 of the arc A.
Returning to FIG. 5, in step S <b> 13, calculation of the geometric properties of the contour shape from the shape measurement data MD of the surface of the workpiece W is performed using the design data DD of the contour shape of the surface of the workpiece W. The data range to perform and the type of the contour shape are determined.

FIG. 7 is a flowchart of the subroutine S13 shown in FIG. In the subroutine S13, after the alignment between the shape measurement data MD and the design data DD, the position of the outer end of the geometric element included in the aligned design data DD is obtained, and the shape is formed according to this geometric element. The outer end of the range of the shape measurement data of the contour portion is obtained from the position of the outer end of this geometric element.
First, in step S20, the alignment unit 61 of the geometric property calculation unit 52 shown in FIG. 4 obtains a relative position difference between the coordinates of the shape measurement data MD and the coordinates of the design data DD, thereby determining the relative position difference therebetween. Perform alignment. 8A to 8C are explanatory diagrams illustrating an example of a method for aligning the shape measurement data MD and the design data DD.

  Since the coordinates of the shape measurement data MD change depending on where the object to be measured W is placed on the table 2 of the contour shape measuring apparatus 1, the coordinates of the shape measurement data MD and the coordinates of the design data DD are shown in FIG. There is a relative position difference e as shown in FIG. Therefore, in order to obtain the data range MD1 of the contour portion formed according to the geometric element A from the positions of the outer ends P1 and P2 of the geometric element A as shown in FIG. 8B, the shape measurement data MD It is necessary to obtain the relative position difference e between the coordinates of the design data DD and the coordinates of the design data DD.

Therefore, for example, in the alignment method shown in FIG. 8C, each of the points PD1 to PD5 on the design data DD and the points PM1 to PM5 on the shape measurement data closest to these points, respectively. Position errors ei1 to ei5 are calculated, and a relative movement amount between the shape measurement data MD and the design data DD is calculated so that these total errors Σeij (j = 1 to 5) are minimized.
FIG. 9 shows, for example, the relationship between the shape measurement data MD and the design data DD when it is assumed that the relative position difference e between the coordinates of the shape measurement data MD and the coordinates of the design data DD does not include a data rotation error. It is a flowchart which shows an example of the alignment method.

In step S31, the alignment unit 61 determines each position error ei1 between the M points on the design data DD and the point on the shape measurement data closest to these points in the current relative positional relationship. eiM is obtained, the total error e0 (= Σe0j (j = 1 to M)) is calculated, and the total error e0 is temporarily stored in step S32.
Next, in step S33 to step S36, the alignment unit 61 determines the relative position between the shape measurement data MD and the design data DD in each direction θi (i = 1 to N) obtained by equally dividing 360 degrees in all directions. Each total error ei (= Σeij (j = 1 to M)) is calculated and stored when it is shifted by a predetermined distance in the direction.

In step S <b> 37, if any of the total errors ei calculated for each direction θi is greater than the total error e <b> 0 before movement stored in step S <b> 32, the alignment unit 61 currently determines the shape measurement data. It is determined that the MD and the design data DD are best aligned, and the process ends.
If any of the total errors ei calculated for each angle θi is smaller than the total error e0, the alignment unit 61 determines the direction θt that is the smallest total error et among these total errors ei, The direction in which the relative position between the shape measurement data MD and the design data DD is shifted is determined. In step S39, the alignment unit 61 relatively moves the position of the shape measurement data MD and the design data DD by a predetermined distance in the direction of θt, and each total error eo (= Σeoj (j = 1 to M) at that time. ) Is calculated and stored (steps S40 and S41).

In step S42, the alignment unit 61 further moves the positions of the shape measurement data MD and the design data DD by a predetermined distance in the direction of θt, and each total error en (= Σenj (j = 1 to M) at that time. )) Is calculated and stored (steps S43 and S44).
In step S45, the alignment unit 61 determines whether or not the position error between the shape measurement data MD and the design data DD has increased due to the relative movement in step S42 (that is, whether or not en> eo). If the total error eo has not yet increased, the value of each total error eo is updated to the value of each total error en in step S46, and then the process returns to step S42.

Thereafter, the alignment unit 61 repeats steps S42 to S46 until the position error between the shape measurement data MD and the design data DD starts to increase beyond the minimum value due to relative movement in the θt direction, and the shape measurement data When the position error between the MD and the design data DD exceeds the minimum value (that is, en> eo in the determination in step S45), the relative value between the shape measurement data MD and the design data DD is determined in step S47. The position is returned by one step in the direction of -θt, and the process returns to step S31.
When the alignment unit 61 moves the shape measurement data MD and the design data DD in all directions relative to each other, the position error between the shape measurement data MD and the design data DD increases in any direction. Repeat until
As a result, the coordinates of the shape measurement data MD and the coordinates of the design data DD are relatively moved until these data overlap best as shown in FIG. The relative positional difference e can be obtained by comparing the positional relationships of.

Returning to FIG. 7, in step S <b> 21, the geometric element type determination unit 62 shown in FIG. 4 includes the geometric element type data included in the design data DD aligned with the shape measurement data MD (example shown in FIG. 6B). Then, the type data “arc” of the geometric element “A” is determined as the type of the contour shape formed according to this geometric element.
Further, the data range determination unit 63 selects the contour shape data range (data range MD1 in the example shown in FIG. 6A) formed from the shape measurement data MD of the surface of the workpiece W according to this geometric element. decide.

A flowchart showing an example of each step executed in the routine S21 shown in FIG. 7 is shown in FIG.
First, in step S51, the geometric element type determination unit 62 determines the geometric element type data included in the design data DD aligned with the shape measurement data MD as the type of the contour shape formed according to this geometric element. .
In step S52, the data range determination unit 63 acquires the coordinates of the outer end of this geometric element from the property data of this geometric element according to the type data determined in step S51.

Here, the “outer end” of the geometric element means both ends EP1 and EP2 when the geometric element in the design data DD is an open curve such as an arc OC shown in FIG. . The same applies to the case where the geometric element is a straight line or an open figure defined by removing a part of the sides of the closed figure constituting the polygon.
For example, when the geometric element is an arc OC, the outer end EP1 is calculated by a known calculation formula according to the type data, the center position O of the leading edge C including the arc OC, and the start angle θ1 and the end angle θ2. And the position of EP2 can be calculated.
When the geometric element in the design data DD is an open surface S such as a hemispherical spherical surface shown in FIG. 11B, for example, the data range determining unit 63 closes the closed curve EC surrounding the open surface S. Is the “outer end” of the geometric element.

Here, when the shape measurement data MD for which calculation of geometric properties is desired is a closed figure such as a closed curve or a closed curved surface, it is necessary to specify the start point and end point of the data range to be calculated in the first place. There is no need to calculate the position of the outer end.
In such a case, the data range determination unit 63 does not determine the data range of the contour shape corresponding to this geometric element, and the primary property calculation unit 64 uses only the type determined by the geometric element type determination unit 62. The geometric properties of the contour shape included in the shape measurement data are calculated.

  In step S53, the data range determination unit 63 determines a position on the shape measurement data corresponding to the outer end of the geometric element acquired in step S52, and measures the position of the contour shape formed according to the geometric element. The outer edge of the data range. For example, the data range determination unit 63 may determine the position closest to the outer end of the geometric element acquired in step S52 among the positions on the shape measurement data as the outer end of such a data range.

Returning to FIG. 7, in step S <b> 22, the data range determination unit 63 determines all or part of the determined data range as the data range for which the geometric property is to be calculated. FIG. 12 shows an example of a calculation range determination method by the data range determination unit 63.
First, in step S21, the points P1 ′ and P2 ′ on the measurement data MD closest to the outer ends P1 and P2 of the arc A, which is the geometric element of the design data DD, represent the contour portion RN1 corresponding to the arc A of the design data DD. Suppose that it was determined as the measured data range.

However, as shown in the drawing, in the normal object to be measured W, the edges of the points P1 ′ and P2 ′ are sag rather than the theoretical design data DD, and the data in the range RN1 including the vicinity of the points P1 ′ and P2 ′. If the geometric properties are calculated based on the above, a large error may occur in the calculation result.
Therefore, the data range determination unit 63 sets the range RN2 that is inward by a predetermined margin ΔM from the range RN1 determined as the range of the contour portion formed corresponding to the geometric element, and the data range for calculating the geometric properties. Determine as.

  Returning to FIG. 5, in step S14, the primary property calculation unit 64 uses the calculation range determined by the data range determination unit 63 and the contour shape type determined by the geometric element type determination unit 62. A numerical value for specifying the geometric property of the contour shape indicated by the shape measurement data is calculated. For example, when the shape measurement data of the calculation range indicates the arc-shaped contour shape shown in FIG. 6A, the primary property calculation unit 64 starts the center position, radius, and arc of the entire circle including the contour shape. Geometric properties such as corners and end angles, and start and end positions are calculated.

In step S15, the GUI unit 53 further calculates an operation means for calculating a secondary geometric property by further calculating the numerical value indicating the primary geometric property calculated in step S14. This is provided on the GUI screen displayed on the display unit 37.
For example, the GUI unit 53 allows the operator to select the data range for which the primary geometric property has been calculated and the type of the secondary geometric property to be calculated by using the mouse. A selection screen may be generated.
Next, in step S16, according to the operator's operation command input via the GUI screen generated by the GUI unit 53, the numerical value indicating the primary geometric property calculated in step S14 is further calculated to obtain the secondary To calculate the geometrical properties.

FIG. 13 is a flowchart of a second example of the subroutine S13 for determining the range of the shape measurement data MD for calculating the geometric property and the type of the contour shape shown in FIG.
If the design data includes multiple geometric elements, and the shape measurement data also includes contour shapes corresponding to these multiple geometric elements, it may not be necessary to calculate geometric properties for all of them. is there. Therefore, the flowchart shown in FIG. 13 shows an example in which the calculation range is determined for only the contour shapes included in the shape measurement data that need to be calculated for geometric properties.

First, in step S <b> 60, the GUI unit 53 illustrated in FIG. 4 displays the shape measurement data MD generated by the shape measurement data generation unit 51 on the display unit 37. At this time, for example, the GUI unit 53 may display the shape measurement data MD on the window unit 101 on the GUI screen as shown in FIG.
When the operator designates one place on the display unit 37, the shape measurement data displayed in a predetermined range including this place is selected as calculation target data.
For example, when the operator operates the input unit 35 such as a mouse to move the position of the cursor 102 displayed in the window 101 onto the display location 103 of the measurement data MD and designates this position 103, the GUI unit 53 Shape measurement data in a rectangular area having a width W and a height H centered on this position is selected.

  In step S <b> 61, the GUI unit 53 displays the design data DD read into the calculation unit 30 and stored in the secondary storage device 33 on the display unit 37. Then, when the operator operates the GUI screen and designates a geometric element that is the design data of the contour shape of the part of the shape measurement data selected in step S60, the GUI unit 53 selects the geometric element in step S60. A geometric element corresponding to the shape measurement data is selected.

In step S20, the alignment unit 61 performs a relative operation between the shape measurement data in the range selected in step S60 and the geometric element selected in step S61, as described with reference to FIGS. Position alignment between the shape measurement data and the design data is performed so that the position difference is eliminated.
In step S21, the geometric element type determination unit 62 and the data range determination unit 63 select in step S61 out of the shape measurement data in the range selected in step S60, as described with reference to FIG. A data range obtained by measuring the contour shape formed according to the geometric element and the type of the contour shape are determined.
In step S22, the data range determination unit 63 determines all or part of the determined data range as the data range for which the geometric property is to be calculated, as described with reference to FIG.

  The present invention relates to a contour shape measuring device for measuring the contour shape of an object to be measured, and shape measurement data obtained by measuring the contour shape of the contour shape formed on the surface of the object to be measured. Alternatively, the present invention can be used for a method and program for calculating geometric properties such as roundness.

It is a basic lineblock diagram of a contour shape measuring device. (A) is an example of the shape measurement data of the contour shape formed on the surface of the object to be measured, and (B) is a diagram showing an example of the geometric property calculated for the contour shape shown in (A). . It is a figure which shows the example of schematic structure of the calculation part which controls the outline shape measuring apparatus shown in FIG. 1, and implement | achieves the outline shape measuring apparatus by this invention. It is a functional block diagram implement | achieved by the calculation part shown in FIG. 4 is an overall flowchart of a geometric property calculation method according to an embodiment of the present invention. (A) is a figure which shows the example of shape measurement data MD by the shape measurement data production | generation part 51, (B) is a figure which shows the design data DD of the contour shape of the location which extracted the shape measurement data MD shown to (A). It is. It is a flowchart of the 1st example of subroutine S13 shown in FIG. (A)-(C) are explanatory drawings of an example of the positioning method of shape measurement data and design data. It is a flowchart of an example of subroutine S20 shown in FIG. It is a flowchart of subroutine S21 shown in FIG. (A)-(D) are explanatory drawings which show the example of the outer end of a geometric element. It is explanatory drawing of the determination method of the calculation range of geometric property. It is a flowchart of the 2nd example of subroutine S13 shown in FIG. It is a figure which shows the GUI screen which selects the shape measurement data which calculates geometric property.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Contour shape measuring apparatus 2 Table 3 Column 4 Z direction movable part 5 X direction movable part 6 Pickup 7 Cantilever 10 Arm part 11 Stylus 50 Contour shape measurement program 52 Geometric property calculation part

Claims (6)

A geometric property calculation method for an object to be measured for calculating a geometric property of a contour shape on a surface of the object to be measured, which is formed according to design data including a geometric element for specifying the contour shape,
Performing alignment between the shape measurement data obtained by measuring the contour shape on the surface of the object to be measured and the design data;
Out of the shape measurement data, the position of the outer end of the data range of the contour shape portion formed according to the geometric element is the outer end of the geometric element included in the design data aligned with the shape measurement data. Determining from the position of
A geometric property calculation method characterized by comprising:   Determining a shape type of a portion of a contour shape formed according to the geometric element from the shape measurement data, based on the type of the geometric element included in the design data aligned with the shape measurement data; The geometric property calculation method according to claim 1, further comprising: A program for calculating geometric properties of an object to be measured for calculating the geometric properties of the contour shape on the surface of the object to be measured, which is formed according to design data including a geometric element for specifying the contour shape,
Performing alignment between the shape measurement data obtained by measuring the contour shape of the surface of the object to be measured and the design data;
Out of the shape measurement data, the position of the outer end of the data range of the contour shape portion formed according to the geometric element is the outer end of the geometric element included in the design data aligned with the shape measurement data. Determining from the position of
A geometric property calculation program for causing a computer to execute.   Determining a shape type of a portion of a contour shape formed according to the geometric element from the shape measurement data, based on the type of the geometric element included in the design data aligned with the shape measurement data; The geometric property calculation program according to claim 3, further causing a computer to execute the program. A contour shape measuring unit for measuring the contour shape on the surface of the object to be measured; a shape measurement data generating unit for generating shape measurement data of the contour shape on the surface of the object to be measured from the result of the contour shape measurement; A contour shape measuring device having a geometric property calculation unit for calculating a geometric property of the contour shape indicated by shape measurement data,
An alignment unit that performs alignment between design data including a geometric element that specifies a contour shape and the shape measurement data of the contour shape of the surface of the object to be measured formed according to the design data;
Out of the shape measurement data, the position of the outer end of the data range of the contour shape portion formed according to the geometric element is the outer end of the geometric element included in the design data aligned with the shape measurement data. A data range determining unit that determines from the position of
A contour shape measuring apparatus comprising:   Of the shape measurement data, a shape type of a portion of a contour shape formed according to the geometric element is determined from a type of the geometric element included in the design data aligned with the shape measurement data. The contour shape measuring apparatus according to claim 5, further comprising a determining unit.

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