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JP2008189381A - Siphon container with residual amount reduction detector, bubbler container, and industrial airtight container - Google Patents

Siphon container with residual amount reduction detector, bubbler container, and industrial airtight container Download PDF

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JP2008189381A
JP2008189381A JP2007050537A JP2007050537A JP2008189381A JP 2008189381 A JP2008189381 A JP 2008189381A JP 2007050537 A JP2007050537 A JP 2007050537A JP 2007050537 A JP2007050537 A JP 2007050537A JP 2008189381 A JP2008189381 A JP 2008189381A
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container
vibration
siphon
raw material
tube
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Kazuo Yamada
一雄 山田
Namiko Yamada
奈美子 山田
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an automatic switching function of a container which solves the problem of the container being continuously used even when an residual amount is decreased and allowing treatment for one-time portion to be wasted when a raw material is depleted and eventually causing damage and enables the stable operation of a system. <P>SOLUTION: Piping enabling magnetization treatment to be executed on the inner piping surface of a siphon container, a bubbler container, and an industrial airtight container, piping enabling a magnetic body to be sealed therein, or a vibration pipe enabling a vibration motor, a magnet, and a magnetic sensor to be assembled and sealed into the inside of a piping material are electrically or magnetically vibrated from the outside of the container. A state where the vibration of the piping or the vibration pipe is prevented and damped by the amount of the raw material in the container is detected by a vibration sensor or the magnetic sensor from the inside or the outside of the container. Electrical and acoustic treatments are carried out and the position of the liquid surface of the raw material is determined and displayed. The supply of the raw material is stopped or the container is automatically switched by driving a valve through an obtained signal. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

この発明はサイホン容器およびバブラー容器および工業用密閉容器内原料の残量を容器内配管または振動管の振動の変化によって検出する機能を付加した容器及びシステムであり、配管又は振動管以外の構成物、例えば浮きセンサーや電極等の異物を容器内に設置することなく残量確認を行うことを可能とし、残量の目視確認による工数を減らすことを可能とし、原料の無駄を防ぎ容器内原料の突然の枯渇防止とプロセスの中断による損害の低減や複数の容器の自動切り替えによりシステムの連続運用を可能とした残量減少検出器付きサイホン容器およびバブラー容器および工業用密閉容器に関するものである。  The present invention is a container and system to which a function for detecting the remaining amount of raw material in siphon containers, bubblers containers and industrial sealed containers is detected by changes in vibrations in the pipes or vibration pipes in the containers, and is a component other than the pipes or vibration pipes For example, it is possible to check the remaining amount without installing foreign substances such as floating sensors and electrodes in the container, and it is possible to reduce the man-hours by visually checking the remaining amount, preventing waste of raw materials and The present invention relates to a siphon container and a bubbler container with a remaining amount reduction detector and an industrial sealed container that can prevent continuous depletion, reduce damage due to process interruption, and enable automatic operation of a plurality of containers to continuously operate the system.

従来、サイホン容器の内容物の残量検出方法としてはフロート又はフロートスッチと呼ばれている“浮き”を利用し、浮きの位置により液面の上限及び下限を検知する方法、又は容器側面から内部が覗けるガラス窓を目視検査による方法、又は容器外部に液面を表示するガラス管、又は透明チューブを垂直に配置し目視検査する方法、又は容器内部の上部に超音波発振器を設け、発射した超音波が内容物の液面から反射する時間を計算して液面を導き出す方法や、電極間の静電容量や抵抗値の変化を検出して液面を導き出す方法などが考えられる。  Conventionally, as a method for detecting the remaining amount of the contents of a siphon container, a method called “float” called “float” or “float switch” is used to detect the upper and lower limits of the liquid level based on the position of the float, or from the side of the container to the inside. A method of visual inspection of a glass window that can be seen through, a method of visual inspection by placing a glass tube or a transparent tube that displays the liquid level on the outside of the container vertically, or an ultrasonic oscillator provided at the top inside the container A method of deriving the liquid surface by calculating the time for which the sound wave reflects from the liquid surface of the contents, a method of deriving the liquid surface by detecting a change in capacitance or resistance value between the electrodes, and the like can be considered.

サイホン容器の一例としては食品用などに使われている数リットルから数十リットル以上のシロップタンクがあり、用途としては炭酸飲料容器などがある。炭酸ガスボンベと容器の加圧ガス供給ホースを接続し、その圧力で原料排出ホースから原料を排出す構造であり、広く普及している。容器の材質は衛生管理が容易なステンレス材を用いる場合が多い。内容物が食品である場合、細菌の増殖防止や品質保持の為に内部の洗浄を容易にし、残渣を減少させる為にセンサーや残量計を装着しない場合が多い。従って、容器内の内容物の残量を知る手段としては、容器から排出した内容物の累積量がら計算するか、ホースが繋がったまま持ち上げて揺らすなどして内容物の残量を推測している。An example of a siphon container is a syrup tank of several liters to several tens of liters or more used for food, and a carbonated drink container is used as an application. A structure in which a carbon dioxide gas cylinder and a pressurized gas supply hose of a container are connected and the raw material is discharged from the raw material discharge hose by the pressure is widely spread. The material of the container is often a stainless material that is easy to manage hygiene. When the contents are food, it is often not equipped with sensors or fuel gauges to facilitate internal cleaning to prevent bacterial growth and maintain quality, and to reduce residues. Therefore, as a means of knowing the remaining amount of contents in the container, the remaining amount of contents can be estimated by calculating the accumulated amount of the contents discharged from the container or lifting and shaking while the hose is connected. Yes.

他の例としては、工業用の容器であり、シロップタンクの場合と異なり、種々な科学薬品を収納し、容器の容量や形状も多種多様である。一例としては半導体製造装置などに組み込まれて使用されるバブラー容器がある。バブラー容器は構造的にサイホン容器に似ているが、入り口と出口が逆の使い方となる。容器内の原料をキャリアガスでバブリングして原料をキャリアガスとともに装置に供給する役目をもつ。その他、工業用容器には化学薬品や危険物が含まれる場合や高い圧力が必要な容器があり、ガラス管等の残量計やのぞき覗き窓などは好まれない。さらに容器自体又は配管が固定されている場合があり、それらの場合は重量を計測する事が出来ないので、排出した内容物の流量又はプロセスの回数により残量を計算する。Another example is an industrial container that, unlike a syrup tank, houses various chemicals and has a wide variety of container capacities and shapes. As an example, there is a bubbler container used by being incorporated in a semiconductor manufacturing apparatus or the like. A bubbler container is structurally similar to a siphon container, but the entrance and exit are reversed. The material in the container is bubbled with a carrier gas, and the material is supplied to the apparatus together with the carrier gas. In addition, industrial containers include chemicals and hazardous materials, and there are containers that require high pressure, and a fuel gauge such as a glass tube or a peep window is not preferred. In addition, the container itself or piping may be fixed, and in such cases, the weight cannot be measured, so the remaining amount is calculated based on the flow rate of the discharged contents or the number of processes.

容器自体が固定されず、かつ配管がフレキシブル配管やチューブを使用している場合は、重量計又は重量センサーで残量を計る。この場合は配管の重量や緊張により誤差を生じやすい。If the container itself is not fixed and the piping uses flexible piping or tubes, measure the remaining amount with a weigh scale or weight sensor. In this case, errors are likely to occur due to the weight and tension of the piping.

課題を解決する為の手段Means to solve the problem

本発明の図1に示す残量減少検出器付きサイホン容器(1)および図4に示す残量減少検出器付きバブラー容器(91)および図12に示す残量減少検出器付き工業用密閉容器(92)は目的を達成すために、サイホン容器を例にとって説明すれば図2に示すような一般的なサイホン容器(3)の下部安定台(5)の中心部に図1で示す様に磁気振動ドライバー兼センサー(21)と回路ユニット(40)を設置し、上部ポート保護兼取っ手(6)に警報器兼表示器(39)、インターフェイス(50)を組み込んだ構造である。図1は残量減少検出器付きサイホン容器(1)の断面でありステンレス容器(2)の内部に原料(20)が充填されている場合を示す。  The siphon container (1) with the remaining amount decrease detector shown in FIG. 1 and the bubbler container (91) with the remaining amount decrease detector shown in FIG. 4 and the industrial sealed container with the remaining amount decrease detector shown in FIG. 92), in order to achieve the purpose, if a siphon container is taken as an example, a magnetic field as shown in FIG. 1 is formed at the center of a lower stabilizer (5) of a general siphon container (3) as shown in FIG. The vibration driver / sensor (21) and the circuit unit (40) are installed, and the alarm / display (39) and interface (50) are incorporated in the upper port protection / handle (6). FIG. 1 is a cross section of a siphon container (1) with a remaining amount decrease detector, and shows a case where a raw material (20) is filled in a stainless steel container (2).

サイホン管(12)の一方は容器上部(10)の原料排出ポート(18)に確実に固定されていて、かつ先端がステンレス容器(2)の液溜り(15)に接触しないが近傍に設置し、液溜り(15)の外側に磁気振動ドライバー兼センサー(21)を設置した構造とする。サイホン管(12)は振動管として機能し直管であっても曲がっていても良い。また図9の様に加圧ガス管(13)の延長管や予備ポートに組み込まれたダミーのサイホン管又は予備のサイホン管を振動管として適用する事が可能である。容器底面が平坦な構造の場合、同様にサイホン管(12)の直下、容器の外側に磁気振動ドライバー兼センサー(21)を設置した構造とする。One of the siphon pipes (12) is securely fixed to the raw material discharge port (18) of the upper part of the container (10), and the tip does not contact the liquid reservoir (15) of the stainless steel container (2), but is installed in the vicinity. The magnetic vibration driver / sensor (21) is installed outside the liquid reservoir (15). The siphon tube (12) functions as a vibration tube and may be a straight tube or a bent tube. Further, as shown in FIG. 9, an extension pipe of the pressurized gas pipe (13), a dummy siphon pipe incorporated in a spare port, or a spare siphon pipe can be applied as a vibration pipe. In the case where the bottom surface of the container is flat, a structure in which a magnetic vibration driver / sensor (21) is similarly installed directly under the siphon tube (12) and outside the container is adopted.

図7の残量検出器ブロック図の中で示す様に磁気振動ドライバー兼センサー(21)の構造は永久磁石(24)とドライバーコイル(22)、センサーコイル(23)、磁気回路(29)、磁気シールド(30)で構成する。磁気振動ドライバー兼センサー(21)はドライバー部分とセンサー部分を磁気回路(29)を中心にして分割した構造にして、近傍に設置しても良い。As shown in the remaining amount detector block diagram of FIG. 7, the structure of the magnetic vibration driver / sensor (21) is composed of a permanent magnet (24), a driver coil (22), a sensor coil (23), a magnetic circuit (29), It consists of a magnetic shield (30). The magnetic vibration driver and sensor (21) may be installed in the vicinity of the driver part and the sensor part divided into the magnetic circuit (29).

発振器(66)及びタイミング発生器(65)で生成したタイミングにより波形発生器(64)で生成したパルスをレベル調整器2(36′)により適正なドライブ量を調整し、ドライバーアンプ(62)で増幅してパルス状のドライブ電流(61)をドライバーコイル(22)に印加する。そして磁気振動ドライバー兼センサー(21)の磁気回路(29)に磁力線A(25)を発生させる。The pulse generated by the waveform generator (64) is adjusted by the level adjuster 2 (36 ') according to the timing generated by the oscillator (66) and the timing generator (65), and an appropriate drive amount is adjusted by the driver amplifier (62). Amplified and pulsed drive current (61) is applied to the driver coil (22). Then, a magnetic force line A (25) is generated in the magnetic circuit (29) of the magnetic vibration driver / sensor (21).

磁力線A(25)は磁気回路(29)を通りサイホン管(12)の先端を通り、磁気回路(29)に戻ることによりサイホン管(12)を弾きサイホン管の振動(27)を生じさせる。残量減少検出器付きサイホン容器(1)の中には原料(20)が充填されているのでサイホン管(12)は振動が抑えられ持続時間も短い。原料(20)が減少するとサイホン管(12)の固有振動数で振動しやすくなり、サイホン管の振動(27)は持続し緩やかに減衰する。The magnetic field line A (25) passes through the magnetic circuit (29), passes through the tip of the siphon tube (12), and returns to the magnetic circuit (29) to play the siphon tube (12) and generate vibration (27) of the siphon tube. Since the raw material (20) is filled in the siphon container (1) with the remaining amount reduction detector, the siphon tube (12) is suppressed in vibration and has a short duration. When the raw material (20) decreases, the siphon tube (12) tends to vibrate at the natural frequency, and the siphon tube vibration (27) continues and attenuates gently.

サイホン管(12)の先端は磁気振動ドライバー兼センサー(21)の永久磁石(24)から放射する磁力線B(26)により磁化されているのでサイホン管の振動(27)は磁気回路(29)の磁力線(26)を変化させ、センサーコイル(23)に電流を生じ、抵抗器(31)の両端に電圧の変化を生じる。Since the tip of the siphon tube (12) is magnetized by the magnetic lines of force B (26) radiated from the permanent magnet (24) of the magnetic vibration driver and sensor (21), the vibration (27) of the siphon tube is generated by the magnetic circuit (29). The line of magnetic force (26) is changed, a current is generated in the sensor coil (23), and a voltage change is generated across the resistor (31).

抵抗器(31)の両端の電圧は微小であるので、センサープリアンプ(33)およびセンサーアンプ(35)により増幅される。センサープリアンプ(33)前後の制限器1(32)および制限器2(32′)はドライブ電流(61)による誘起起電力や雑音の高い電圧を制限し、得た信号を周波数フィルター(34)に通過させる。信号はサイホン管(12)の固有振動数および低次高調波のみを通す周波数フィルターによって外部雑音の50Hzや60Hzの商用周波数や高周波雑音の影響を低減し、レベル調整器1(36)を経由し、判定回路(37)によりタイミング発生器(65)で生成した判定タイミング信号(67)により周波数、振幅、持続時間の比較判定を行い原料の減少の判定を行う。Since the voltage across the resistor (31) is very small, it is amplified by the sensor preamplifier (33) and the sensor amplifier (35). The limiter 1 (32) and the limiter 2 (32 ') before and after the sensor preamplifier (33) limit the induced electromotive force and high noise voltage due to the drive current (61), and the obtained signal is passed to the frequency filter (34). Let it pass. The signal is reduced by the frequency filter that passes only the natural frequency of the siphon tube (12) and low-order harmonics, and the influence of commercial frequencies of 50Hz and 60Hz and high-frequency noise is reduced, and the signal passes through the level adjuster 1 (36). Then, the determination circuit (37) makes a comparison determination of the frequency, amplitude, and duration based on the determination timing signal (67) generated by the timing generator (65) to determine the reduction of the raw material.

判定信号は警報用信号変換器(38)を経由し、警報器兼表示器(39)へ送られる。同時番に判定回路(37)の出力は外部出力用信号変換器(44)へ導かれ外部出力信号(45)として送出される。外部信号および入力電源(41)はインターフェイス(50)より供給され、スイッチ(48)の操作又は容器検出信号(49)により電源回路(46)を経由して回路ユニット(40)の各機能にモジュール電源(47)を供給する。また容器検出信号(49)及び判定回路(37)の出力を外部出力用信号変換器(44)を経由して外部出力信号(45)をインターフェイス(50)に送出する。回路ユニット(40)の構成は装置の規模や目的によって簡略化しても良い。本発明は、以上の構成よりなる残量減少検出器付きサイホン容器(1)である。The determination signal is sent to the alarm / display unit (39) via the alarm signal converter (38). At the same time, the output of the determination circuit (37) is guided to the external output signal converter (44) and sent out as an external output signal (45). The external signal and the input power supply (41) are supplied from the interface (50), and the module is provided to each function of the circuit unit (40) via the power supply circuit (46) by the operation of the switch (48) or the container detection signal (49). Supply power (47). The container detection signal (49) and the output of the determination circuit (37) are sent to the interface (50) via the external output signal converter (44). The configuration of the circuit unit (40) may be simplified depending on the scale and purpose of the apparatus. The present invention is a siphon container (1) with a remaining amount decrease detector configured as described above.

本発明の残量減少検出器(90)を内蔵した架台(51)及びその架台システム(54)の断面図を図3に示し、ブロック図を図7に示す。サイホン容器(3)を架台(51)に乗せるだけでシステムを構成できる構造で、スイッチ(48)を操作しなくとも容器検出センサー(52)により、サイホン容器(3)が装着されたとことを示す容器検出信号(49)を回路ユニット(40)に伝達する。架台システムは壁型にして図12のような残量減少検出器付き工業用密閉容器(92)の側面の磁気振動ドライバー兼センサー(21)に対応する構造も可能である。A cross-sectional view of the gantry (51) and the gantry system (54) incorporating the remaining amount reduction detector (90) of the present invention is shown in FIG. 3, and a block diagram is shown in FIG. The system can be configured simply by placing the siphon container (3) on the gantry (51), and the container detection sensor (52) indicates that the siphon container (3) is mounted without operating the switch (48). The container detection signal (49) is transmitted to the circuit unit (40). The gantry system may be a wall-type structure corresponding to the magnetic vibration driver / sensor (21) on the side surface of the industrial sealed container (92) with the remaining amount decrease detector as shown in FIG.

次にサイホン容器内の原料(20)の減少の遷移を示す。最初は図1に示すように原料(20)は充填されているが、二酸化炭素ガス等の加圧ガス(16)が加圧ガス供給ホース(7)を経由し原料(20)の液面を押し付けると原料(20)はサイホン管(12)を通り原料排出ポート(18)より排出される。図5のサイホン管先端詳細図が示すように加圧ガス(16)により大部分の原料(20)がサイホン管(12)を経由して原料排出ホース(8)より排出される。そして原料(20)が少し残っている状態となる。さらに加圧ガス(16)を供給すると図6の原料(20)が殆ど残っていない状態となる。最終的には原料切れとなりサイホン管(12)の中には加圧ガス(16)のみ排出される。Next, the transition of the reduction of the raw material (20) in the siphon container is shown. At first, as shown in FIG. 1, the raw material (20) is filled, but a pressurized gas (16) such as carbon dioxide gas passes through the pressurized gas supply hose (7), and the liquid level of the raw material (20) is reduced. When pressed, the raw material (20) passes through the siphon tube (12) and is discharged from the raw material discharge port (18). As shown in the detailed view of the tip of the siphon tube in FIG. 5, most of the raw material (20) is discharged from the raw material discharge hose (8) through the siphon tube (12) by the pressurized gas (16). And the raw material (20) will be in the state which remains a little. When the pressurized gas (16) is further supplied, the raw material (20) in FIG. 6 is hardly left. Eventually, the raw material runs out and only the pressurized gas (16) is discharged into the siphon tube (12).

その時サイホン管(12)の振動の振幅は原料(20)が全く無い時に最大となり、発生する振動はサイホン管(12)の持つ固有振動数となる。逆に原料(20)が多いとサイホン管の振動(27)は抑えられ、とくに振動の持続時間は短くなり、振動数も僅かに低下する。また原料(20)の粘性によってサイホン管の振動(27)の挙動は異なる。At that time, the vibration amplitude of the siphon tube (12) becomes maximum when there is no raw material (20), and the generated vibration is the natural frequency of the siphon tube (12). Conversely, if the amount of the raw material (20) is large, the vibration (27) of the siphon tube is suppressed, in particular, the vibration duration is shortened and the vibration frequency is slightly decreased. Further, the behavior of the vibration (27) of the siphon tube varies depending on the viscosity of the raw material (20).

原料(20)が残り少なくなり、多くの加圧ガス(16)と僅かな原料(20)がサイホン管(12)を通る時は異常な振動をもたらす。その時々の状態において、サイホン管の振動(27)によりセンサーコイル(23)に誘起起電力が発生する。得られる微小な誘起起電力はサイホン管の振動(27)の強さに比例する。容器の大きさ、サイホン管(12)の長さ、太さ、肉厚により振動の大きさと振動数が異なり、1Hz以下から数百Hzの低い固有振動数による信号を得る。図7ブロック図に示すサイホン管(12)の選定、周波数フィルターのチューニングを行い、振動数、振幅値及び減衰時間を求めておく。When the raw material (20) is reduced and a large amount of pressurized gas (16) and a small amount of raw material (20) pass through the siphon tube (12), abnormal vibration is caused. In that state, an induced electromotive force is generated in the sensor coil (23) by the vibration (27) of the siphon tube. The small induced electromotive force obtained is proportional to the strength of the siphon tube vibration (27). The magnitude and frequency of vibration differ depending on the size of the container and the length, thickness, and thickness of the siphon tube (12), and a signal having a low natural frequency of 1 Hz or less to several hundred Hz is obtained. The siphon tube (12) shown in the block diagram of FIG. 7 is selected, the frequency filter is tuned, and the vibration frequency, amplitude value, and decay time are obtained.

得られた信号は判定回路(37)において原料(20)の残量の判定をして警報と表示を行う。そしてインターフェイス(50)から電気信号又は光信号などの外部出力信号(45)を発生する。外部出力信号(45)はインターフェイス(50)を経由して図1に示すバルブ操作ボタンロック(42)を作動させバルブ操作ボタン(70)が押せないようにするか、又は警報表示灯(43)を点灯させる為に使用することが可能である。The obtained signal is used to determine the remaining amount of the raw material (20) in the determination circuit (37) and display an alarm and display. Then, an external output signal (45) such as an electric signal or an optical signal is generated from the interface (50). The external output signal (45) activates the valve operation button lock (42) shown in FIG. 1 via the interface (50) to prevent the valve operation button (70) from being pressed, or the alarm indicator light (43). It can be used to light up.

図1および図2に示すサイホン容器(3)は主にステンレス容器(2)とサイホン管(12)、加圧ガス管(13)、容器上部(10)、容器下部(11)の主要部品から構成され、サイホン管(12)などに使用されている材質は耐食性の良いSUS316又はSUS304ステンレスの場合が多く、いずれの材質も非磁性を示し、SUS304の場合は冷間圧延処理により磁性が強まる場合がある。SUS430は冷間加工が容易であり磁性がある。もし磁性があるSUS430を容器の材料として使うと、容器が磁気シールドとして働き、サイホン管を振動管として働かせることが出来ない。この場合は後述する振動モータ・磁石・磁気センサー内蔵振動管(96)を使用する事で解決する。図7に示すブロック図のような構造で永久磁石(24)を用いればサイホン管(12)の先端を磁化させることが出来、サイホン管の振動(27)によりセンサーコイル(23)に誘起起電力を得ることが可能である。The siphon container (3) shown in FIG. 1 and FIG. 2 is mainly composed of main parts such as a stainless steel container (2), a siphon pipe (12), a pressurized gas pipe (13), a container upper part (10), and a container lower part (11). The material used for the siphon tube (12) and the like is often made of SUS316 or SUS304 stainless steel with good corrosion resistance, both of which are non-magnetic, and in the case of SUS304, the magnetism is strengthened by cold rolling. There is. SUS430 is easy to cold work and has magnetism. If SUS430 with magnetism is used as the material of the container, the container acts as a magnetic shield, and the siphon tube cannot act as a vibration tube. This case can be solved by using a vibration tube (96) with built-in vibration motor / magnet / magnetic sensor, which will be described later. If the permanent magnet (24) is used in the structure shown in the block diagram of FIG. 7, the tip of the siphon tube (12) can be magnetized, and the induced electromotive force is generated in the sensor coil (23) by the vibration (27) of the siphon tube. Can be obtained.

サイホン管(12)の材質がSUS316又は非金属では非磁性を示すのでサイホン管(12)先端部を製膜処理又は微小磁性体を埋め込む事によってサイホン管の磁性化処理部分(63)を作る。それにより充分な振動と誘起起電力を得ることが可能である。弱磁性を持ったSUS304を用いた場合であっても同様の処理によって、さらに大きな誘起起電力を得ることが可能である。When the material of the siphon tube (12) is SUS316 or non-metal, it shows non-magnetism, so the siphon tube (12) tip portion is formed into a film or embedded with a micro magnetic material to make the siphon tube magnetized portion (63). Thereby, sufficient vibration and induced electromotive force can be obtained. Even when SUS304 having weak magnetism is used, a larger induced electromotive force can be obtained by the same process.

図4に示すバブラー容器(71)は構造的に図2に示すサイホン容器(3)に似ているが、入り口と出口が逆の使い方となる。たとえば図1のサイホン容器(3)の場合、加圧ガスポート(17)に接続されている加圧ガス管(13)により原料(20)に圧力を与え、サイホン管(12)を通して排出する。図4のバブラー容器(71)の場合はキャリアガス注入管(72)を通るキャリアガス(79)により原料(20)をバブル(75)によりバブリングして料排出管(73)から原料ガス(76)を排出する構造であるので、原料(20)が少なくなるとキャリアガス注入管(72)が振動しやすくなる。残量減少検出器(90)を適用するとサイホン容器(3)と同様に残量減少検出器付きバブラー容器(91)を構成することが可能となる。The bubbler container (71) shown in FIG. 4 is structurally similar to the siphon container (3) shown in FIG. 2, but the entrance and exit are reversed. For example, in the case of the siphon container (3) of FIG. 1, a pressure is applied to the raw material (20) by the pressurized gas pipe (13) connected to the pressurized gas port (17), and the raw material is discharged through the siphon pipe (12). In the case of the bubbler container (71) of FIG. 4, the raw material (20) is bubbled by the bubble (75) by the carrier gas (79) passing through the carrier gas injection pipe (72) and the raw material gas (76 ), The carrier gas injection pipe (72) tends to vibrate when the amount of the raw material (20) decreases. When the remaining amount decrease detector (90) is applied, the bubbler container (91) with the remaining amount decrease detector can be configured similarly to the siphon container (3).

原料供給ポート(84)を備えたバブラー容器(71)の場合は残量減少の検出により原料(20)の補充を適時に行うためにインターフェイス(50)の信号により原料供給バルブ(85)の開閉を行う原料の自動供給装置が可能となる。In the case of a bubbler container (71) equipped with a raw material supply port (84), the raw material supply valve (85) is opened and closed by a signal of the interface (50) in order to replenish the raw material (20) in a timely manner by detecting a decrease in remaining amount It is possible to provide an automatic material supply apparatus for performing the above process.

図8に示すような複数のサイホン容器(3)又はバブラー容器(71)又は工業用密閉容器(4)の自動的切り替えシステムを構成するためには架台システム(54)を複数台用意して第一容器(82)の原料(20)が枯渇する直前に発生する信号をインターフェイス(50)からバルブ制御回路入力(86)に送り、バルブ制御回路(60)で生成される信号をバルブ制御回路出力(68)から送出し第一容器(82)の第1バルブ(56)及び第2バルブ(57)を閉じる。次に第二容器(83)の第3バルブ(58)及び第4バルブ(59)を開くことにより複数の容器の自動交換が可能となるシステムを構築することが可能となる。In order to configure an automatic switching system for a plurality of siphon containers (3), bubbler containers (71) or industrial closed containers (4) as shown in FIG. 8, a plurality of gantry systems (54) are prepared. A signal generated immediately before the material (20) of one container (82) is depleted is sent from the interface (50) to the valve control circuit input (86), and the signal generated by the valve control circuit (60) is output to the valve control circuit. (68), the first valve (56) and the second valve (57) of the first container (82) are closed. Next, by opening the third valve (58) and the fourth valve (59) of the second container (83), it is possible to construct a system that enables automatic replacement of a plurality of containers.

次に、本特許の振動管の変形例1は振動性を高めた磁性体内蔵振動管(93)であり配管材の先端に磁性体(87)を封入した振動管であり、図9に残量減少検出器付きサイホン容器(1)の断面図を示す。サイホン容器(3)の加圧ガス管(13)を延長し、先端内部に磁性体(87)を封入した構造の磁性体内蔵振動管(93)を組み込んだサイホン容器であり、図10に振動管先端詳細図を示す。図1のサイホン容器と同様に容器上部(10)近くの加圧ガス管口(14)から加圧ガスが供給される。図9に示す磁性体内蔵振動管(93)を使用すれば単なるサイホン管(12)の振動より大きな振動を得られ、磁気振動ドライバー兼センサー(21)のセンサーからはより大きな信号を得られ、磁性体内蔵振動管と磁気振動ドライバー兼センサーの組み合わせの例(101)を示す。Next, Modification 1 of the vibrating tube of this patent is a vibrating tube (93) with a built-in magnetic body that has improved vibration characteristics, and is a vibrating tube in which a magnetic body (87) is sealed at the end of the piping material. Sectional drawing of siphon container (1) with a quantity reduction | decrease detector is shown. The siphon container (3) is a siphon container in which a pressurized gas pipe (13) is extended and a magnetic body built-in vibration pipe (93) having a structure in which a magnetic body (87) is sealed inside is incorporated. A detailed view of the tube tip is shown. Similar to the siphon container of FIG. 1, pressurized gas is supplied from the pressurized gas pipe port (14) near the upper part (10) of the container. If the vibration tube with built-in magnetic body (93) shown in FIG. 9 is used, a vibration larger than that of a simple siphon tube (12) can be obtained, and a larger signal can be obtained from the sensor of the magnetic vibration driver / sensor (21). An example (101) of a combination of a magnetic substance built-in vibration tube and a magnetic vibration driver / sensor is shown.

次に本特許の振動管の各種変形例と設置例を図12に示す。本特許、振動管の変形例2は振動モータ・磁気センサー内蔵振動管(94)であり、配管材の先端にセンサーコイルやホール素子などの磁気センサーおよび振動モータ(88)を封入した振動管である。Next, various modifications and installation examples of the vibration tube of this patent are shown in FIG. In this patent, the vibration tube modification 2 is a vibration tube with built-in vibration motor and magnetic sensor (94), which is a vibration tube in which a magnetic sensor such as a sensor coil or a Hall element and a vibration motor (88) are sealed at the tip of the piping material. is there.

図12は各振動管を残量減少検出器付き工業用密閉容器(92)に設置した例である。図11は振動モータ・磁気センサー内蔵振動管(94)の詳細断面図である。振動モータ(88)は超小型のモータの軸に偏った錘を取り付けた構造であり、電流を流すと、錘のブレにより振動管の振動(28)を発生する。この場合は磁気振動ドライバー兼センサー(21)のドライバー部分を使用し少ない電力で大きな振動を得ることが可能であり、振動モータには短時間周期的に電流を印加する。電流を切断すると振動管は自身の固有振動で振動を持続するが、原料の量に応じて振動は妨げられる。電流の切断後の一定時間、内蔵のセンサーコイル(23)又は磁気振動ドライバー兼センサーのセンサー部分で振動の状態すなわち原料の量の状態を検査する。FIG. 12 shows an example in which each vibrating tube is installed in an industrial sealed container (92) with a remaining amount decrease detector. FIG. 11 is a detailed sectional view of the vibration tube (94) with built-in vibration motor / magnetic sensor. The vibration motor (88) has a structure in which a weight that is biased is attached to the shaft of an ultra-small motor. When an electric current is passed, vibration (28) of the vibration tube is generated by vibration of the weight. In this case, it is possible to obtain a large vibration with a small amount of electric power by using the driver portion of the magnetic vibration driver / sensor (21), and a current is periodically applied to the vibration motor for a short time. When the current is cut off, the vibrating tube continues to vibrate with its own natural vibration, but the vibration is hindered depending on the amount of raw material. For a certain period of time after the current is cut off, the state of vibration, that is, the amount of raw material is inspected by the built-in sensor coil (23) or the sensor portion of the magnetic vibration driver / sensor.

振動モータ・磁気センサー内蔵振動管(94)の内部には磁石が内蔵されていないので容器の外側の近傍に磁石(24)を設置して磁気センサーに磁界を与える。振動管の振動により磁界を乱し磁気センサーに電流を生じさせる。これを振動モータ・磁気センサー内蔵振動管と磁石の組み合わせ例(100)として図12に示す。振動管の先端と磁石との位置関係は充分近くにあり、必要な起電力が得られれば容器の底部でも、側面でもよい。Since the magnet is not built in the vibration motor / magnetic sensor built-in vibration tube (94), a magnet (24) is installed near the outside of the container to give a magnetic field to the magnetic sensor. The magnetic field is disturbed by the vibration of the vibrating tube, and an electric current is generated in the magnetic sensor. This is shown in FIG. 12 as an example (100) of a combination of a vibration motor / magnetic sensor built-in vibration tube and a magnet. The positional relationship between the tip of the vibrating tube and the magnet is sufficiently close, and may be on the bottom or side of the container as long as the required electromotive force is obtained.

図11の詳細図および図12の工業用密閉容器斜視図に示す振動モータ・磁気センサー内蔵振動管(94)の内部にセンサーコイル(23)を収納し、容器外部に磁石(24)を置き、振動管の振動(28)により磁石(24)が振動してセンサーコイル(23)に誘起起電力を得ることが可能である。The sensor coil (23) is housed inside the vibration motor / magnetic sensor built-in vibration tube (94) shown in the detailed view of FIG. 11 and the industrial sealed container perspective view of FIG. 12, and the magnet (24) is placed outside the container. The magnet (24) is vibrated by the vibration (28) of the vibrating tube, and an induced electromotive force can be obtained in the sensor coil (23).

次に本特許の振動管の変形例3としては図12のように振動モータ・磁石内蔵振動管(95)とセンサー管(97)を対向させた構造が考えられ、図13に断面詳細図を示す。振動モータ・磁石内蔵振動管(95)の内部には振動モータ(88)と磁石(24)を密閉し、センサー管(97)内部にはセンサーコイル(23)などの磁気センサーを密閉する。振動モータ・磁石内蔵振動管(95)が振動すると、磁力線(26)が変化してセンサーコイル(23)に起電力を生じる。振動モータ・磁石内蔵振動管とセンサー管の組み合わせ(103)の設置例を図12に示す。センサー管内部にはセンサーコイル(23)の替わりにホール効果素子または磁気抵抗素子などの磁気センサーを装備しても良い。Next, as a third modification of the vibration tube of this patent, a structure in which the vibration motor / magnet built-in vibration tube (95) and the sensor tube (97) are opposed to each other as shown in FIG. 12 can be considered. Show. A vibration motor (88) and a magnet (24) are sealed inside the vibration motor / magnet built-in vibration tube (95), and a magnetic sensor such as a sensor coil (23) is sealed inside the sensor tube (97). When the vibration motor / magnet built-in vibration tube (95) vibrates, the lines of magnetic force (26) change to generate an electromotive force in the sensor coil (23). An installation example of the combination (103) of the vibration motor / magnet built-in vibration tube and sensor tube is shown in FIG. A magnetic sensor such as a Hall effect element or a magnetoresistive element may be provided inside the sensor tube instead of the sensor coil (23).

次に本特許の振動管の変形例4としては図12のように振動管を水平又は水平に近い角度で取り付けた水平振動管(9)が考えられ、原料の上面の変化を捉えやすい。また側面に設置できるので従来からある水平フロートスイッチと置き換えが可能となる。水平振動管と磁気振動ドライバー兼センサーの組み合わせの例(102)として図12に示す。Next, as a fourth modification of the vibration tube of this patent, a horizontal vibration tube (9) in which the vibration tube is attached horizontally or at an angle close to the horizontal as shown in FIG. In addition, since it can be installed on the side, it can be replaced with a conventional horizontal float switch. FIG. 12 shows an example (102) of a combination of a horizontal vibration tube and a magnetic vibration driver / sensor.

次に本特許の振動管の変形例5として図14に振動モータ・磁石・磁気センサー内蔵振動管(96)を示す。この振動管は内部に振動モータ(88)を内蔵し、センサーコイル(23)又は磁石(24)のどちらかが支持スプリング(98)で支持され収納される。これはセンサーコイルにより振動の検出が可能である振動管とセンサーの機能を一つに集合したものである。Next, FIG. 14 shows a vibration tube (96) with a built-in vibration motor / magnet / magnetic sensor as a fifth modification of the vibration tube of this patent. The vibration tube includes a vibration motor (88) therein, and either the sensor coil (23) or the magnet (24) is supported and accommodated by a support spring (98). This is a collection of the functions of a vibration tube and a sensor that can detect vibrations with a sensor coil.

この振動モータ・磁石・磁気センサー内蔵振動管(96)は一本の振動管で振動を発生する機能と、内部磁石の振動をセンサーコイル(23)で検出する機能を持ち、容器の材質によらず各種容器に幅広く応用が可能である。また複数の振動管の設置により段階的な液面の検出が可能となる。図15に液面検出器ブロック図を示す。This vibration motor / magnet / magnetic sensor built-in vibration tube (96) has a function of generating vibration with one vibration tube and a function of detecting the vibration of the internal magnet with the sensor coil (23). It can be widely applied to various containers. In addition, it is possible to detect the liquid level stepwise by installing a plurality of vibrating tubes. FIG. 15 shows a block diagram of the liquid level detector.

これら変形例構成要素の振動モータ、磁石、センサー、磁気ドライバー兼センサーの構成および組み合わせは本特許の範囲とする。振動管の材質はサイホン管又は容器と同じ材質で密閉された構造であれば原料に対しての異物混入の可能性は低減される。これらの振動管は取り付け位置により原料の残量減少検出器および液面検出器として応用が可能である。The configurations and combinations of the vibration motors, magnets, sensors, and magnetic driver / sensors of these modified components are within the scope of this patent. If the material of the vibration tube is a structure sealed with the same material as the siphon tube or the container, the possibility of contamination of the raw material is reduced. These vibrating tubes can be applied as a raw material remaining amount detector and a liquid level detector depending on the mounting position.

発明の効果The invention's effect

本発明は、作業者の感覚による早めの容器交換による原料の無駄を減らし、容器中に電極やフロートスイッチなど原料に対する異物を設置することなく、従来使用してきた容器を使用し、容器内の配管に僅かの変更又は振動管の追加と容器外部に本発明の残量検出装置を追加する事により原料の枯渇を検出し、次に実施する操作に対して注意を与え、操作の禁止等の指示を可能とするシステムを提供する。また原料の突然の枯渇による処理の中断を防止し、安定したシステムの運用を可能とするものである。現場及び遠隔から容易に集中管理するシステムを構築することを可能とし、複数のサイホン容器及びバブラー容器および工業用密閉容器の自動切り替えを可能とする残量検出器内蔵サイホン容器およびバブラー容器および工業用密閉容器である。  The present invention reduces waste of raw materials due to early container replacement by the operator's sense, uses containers that have been used in the past without installing foreign substances such as electrodes and float switches in the containers, and pipes in the containers By adding a slight change or adding a vibration tube and adding the remaining amount detection device of the present invention to the outside of the container, the exhaustion of the raw material is detected, attention is given to the next operation, and instructions such as prohibition of operation are given. Provide a system that enables It also prevents processing interruption due to sudden depletion of raw materials and enables stable system operation. Siphon container and bubbler container with built-in residual amount detector and industrial use that enables construction of a system that can be easily and centrally managed from the field and remotely, and enables automatic switching between multiple siphon containers, bubbler containers, and industrial sealed containers It is a sealed container.

発明の実施のための最良形態BEST MODE FOR CARRYING OUT THE INVENTION

以下、図により本発明の実施の形態を説明する。
(イ)本発明、請求項1の液面検出器を構成するためには各種容器に対応した形状配管または振動管を選択する。既存のサイホン管(12)を振動管として使用する場合は先端に製膜等の磁性体処理を施した配管(19)を作成する。選択可能な二番目の例として図9に示す様に加圧ガス管(13)を延長した配管の先端に磁性体(83)を封入し磁性体内蔵振動管(93)を作成する。三番目の例として図11に示す様に振動モータ(88)およびセンサーコイル(23)を内蔵して密閉し振動モータ・磁気センサー内蔵振動管(94)を作成する。四番目の例として図13に示すように振動モータ(88)および磁石(24)を封入し振動モータ・磁石内蔵振動管(95)を作成する。五番目の例として図14に示すように振動モータ(88)および磁気センサー(23)および磁石(24)を封入して振動モータ・磁石・磁気センサー内蔵振動管(96)を作成する。
(ロ)対象となる容器に対して(イ)項で選択した配管又は振動管を採用し、対応した磁気振動ドライバー兼センサー(21)又は磁石(24)又はセンサーを選択し準備する。回路ユニット(40)、インターフェイス(50)、警報器兼表示器(39)などを組み合わせて図15に示す液面検出器(104)又は図7に示す残量減少検出器(90)を準備する。
(ハ)本発明、請求項2の残量減少検出器付きサイホン容器(1)を構成するためには図2に示す様に下部安定台(5)の厚みを調整した物に変更して請求項1の液面検出器(104)又は残量減少検出器(90)の主要部分すなわち磁気振動ドライバー兼センサー(21)および回路ユニット(40)などを収納するスペースを確保する。サイホン管(12)の先端が容器の液溜り(15)に接触せず、かつ液溜り(15)底面に近くなるように取り付け位置を調整する。
(ニ)容器下部(11)の液溜り(15)の下側に位置するように磁気ドライバー兼センサー(21)を下部安定台(5)内部に設置する。
(ホ)磁気振動ドライバー兼センサー(21)及び回路ユニット(40)を下部安定台(5)に収納する。
(ヘ)インターフェイス(50)を下部安定台(5)に収納する。
(ト)警報器兼表示器(39)を上部ポート等保護兼取っ手(6)の上面に設置する。
(チ)警報器兼表示器(39)と回路ユニット(40)をケーブルで接続し、配線配管(53)に収納する。
(リ)インターフェイス(50)と外部信号および入力電源(41)に接続し、動作を開始する。
(ヌ)警報器兼表示器(39)でサイホン容器内の原料(20)の状態を監視する。
(ル)本発明、請求項3の残量減少検出器付きバブラー容器(91)を構成するためには図4に示す様に下部安定台(5)の厚みを増した物に変更して請求項1の液面検出器(104)又は残量減少検出器(90)の主要部分を収納するスペースを確保する。
(ヲ)キャリアガス注入管(72)の先端が容器の液溜り(15)に接触せず、かつ液溜り(15)底面に近くなるように原料排出ポート(18)の取り付けを調整する。
(ワ)容器下部(11)の液溜り(15)の下側に位置するように磁気ドライバー兼センサー(21)を下部安定台(5)内部に設置する。
(カ)磁気振動ドライバー兼センサー(21)及び回路ユニット(40)を下部安定台(5)に収納する。
(ヨ)警報器兼表示器(39)を上部ポート保護兼取っ手(6)の上面に設置する。
(タ)警報器兼表示器(39)と回路ユニット(40)をケーブルで接続し、配線配管(53)に収納する。
(レ)インターフェイス(50)とバルブ操作ボタンロック(42)をケーブルで接続する。
(ソ)外部信号および入力電源(41)に接続し、動作を開始する。
(ツ)警報器兼表示器(39)でバブラー容器内の原料(20)の残量の状態を監視する。
(ネ)本発明、請求項4の残量減少検出器付き工業用密閉容器(92)を構成するためには請求項1の液面検出器(104)又は残量減少検出器(90)の振動管を選択して設置する。
(ナ)振動モータ・磁気センサー内蔵振動管と磁石の組み合わせ例(100)の場合は図12に示す様に工業用密閉容器(4)の容器上部(10)に振動モータ・磁気センサー内蔵振動管(94)を装着する。
(ラ)振動モータ・磁気センサー内蔵振動管(94)の先端に近い容器外側の近傍に永久磁石(24)を装着する。(但し、振動モータ・磁石・磁気センサー内蔵振動管(96)を採用する場合、永久磁石は装着しない。)
(ム)振動モータ・磁気センサー内蔵振動管(94)の振動モータ(88)及びセンサーコイル(23)のケーブルを回路ユニット(40)含む警報器兼表示器(39)に結線する。
(ウ)インターフェイス(50)を外部装置又は電源に接続し、動作を開始する。
(ヰ)警報器兼表示器(39)で工業用密閉容器内の原料(20)の残量の状態を監視する。
(ノ)本発明、請求項5の残量減少検出器(90)を組み込んだ架台(51)及びその架台システム(54)を構成するためには図3に示す様に架台(51)の内部に磁気振動ドライバー兼センサー(21)及び容器検出センサー(52)を収納するスペースを確保する。
(オ)振動ドライバー兼センサー(21)及び容器検出センサー(52)を収納する。
(ク)容器の液溜り(15)と磁気振動ドライバー兼センサー(21)の中心が一致するよう容器の左右の容器ガイド(55)を調整する。
(ヤ)配線配管(53)、警報器兼表示器(39)、回路ユニット(40)、インターフェイス(50)を架台(51)に設置する。
(マ)インターフェイス(50)と外部装置および入力電源(41)を接続する。
(ケ)架台(51)に請求項1の振動管を組み込んだサイホン容器(3)あるいはバブラー容器(71)をのせ架台システム(54)を作動させる。
(フ)警報器兼表示器(39)でサイホン容器(3)あるいはバブラー容器(71)の原料(20)の状態を監視する。
(コ)本発明、請求項6の複数のサイホン容器(3)又はバブラー容器(71)の自動的切り替えシステムを構成するためにはサイホン容器(3)を例にとれば、図3に示す請求項5の架台システム(54)を複数台用意して図8の様に各容器の配管は電磁バルブあるいはエアー駆動バルブなどを経由して加圧供給ライン(80)及び原料排出ライン(81)に並列接続する。各架台システム(54)のインターフェイス(50)はバルブ制御回路(60)に接続する。バルブ制御回路出力(68)を各容器の第1バルブ(56)及び第2バルブ(57)及び第3バルブ(58)及び第4バルブ(59)に接続する。各架台(51)のインターフェイス(50)の信号をバルブ制御回路(60)へ接続する。システムインターフェイス(69)を必要に応じて外部装置へ接続する。各容器の状態は警報器兼表示器(39)に容器の接続状態が表示されるので監視をする。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(A) In order to constitute the liquid level detector according to the present invention, the shape pipe or the vibration pipe corresponding to various containers is selected. When the existing siphon tube (12) is used as a vibration tube, a pipe (19) having a magnetic material treatment such as film formation at the tip is created. As a second selectable example, as shown in FIG. 9, a magnetic body (83) is sealed at the end of a pipe extending the pressurized gas pipe (13) to create a magnetic body built-in vibration pipe (93). As a third example, as shown in FIG. 11, a vibration motor (88) and a sensor coil (23) are housed and sealed to create a vibration motor / magnetic sensor built-in vibration tube (94). As a fourth example, as shown in FIG. 13, a vibration motor (88) and a magnet (24) are enclosed to create a vibration motor / magnet built-in vibration tube (95). As a fifth example, as shown in FIG. 14, a vibration motor (88), a magnetic sensor (23) and a magnet (24) are enclosed to produce a vibration motor / magnet / magnetic sensor built-in vibration tube (96).
(B) The pipe or the vibration pipe selected in the item (a) is adopted for the target container, and the corresponding magnetic vibration driver / sensor (21), magnet (24) or sensor is selected and prepared. The liquid level detector (104) shown in FIG. 15 or the remaining amount decrease detector (90) shown in FIG. 7 is prepared by combining the circuit unit (40), the interface (50), the alarm device / display (39) and the like. .
(C) In order to construct the siphon container (1) with the remaining amount decrease detector according to the present invention, the present invention is changed to the one having the lower stabilizing base (5) adjusted as shown in FIG. A space for storing the main part of the liquid level detector (104) or the remaining amount decrease detector (90) of item 1, that is, the magnetic vibration driver / sensor (21) and the circuit unit (40) is secured. The attachment position is adjusted so that the tip of the siphon tube (12) does not contact the liquid reservoir (15) of the container and is close to the bottom of the liquid reservoir (15).
(D) A magnetic driver and sensor (21) is installed inside the lower stabilizer (5) so as to be positioned below the liquid reservoir (15) in the lower part (11) of the container.
(E) The magnetic vibration driver / sensor (21) and the circuit unit (40) are housed in the lower stabilizer (5).
(F) The interface (50) is housed in the lower stabilizer (5).
(G) An alarm / display unit (39) is installed on the upper surface of the upper port protection / handle (6).
(H) The alarm unit / display unit (39) and the circuit unit (40) are connected by a cable and stored in the wiring pipe (53).
(I) Connect to the interface (50), the external signal and the input power source (41) and start the operation.
(N) The state of the raw material (20) in the siphon container is monitored by the alarm / display device (39).
(L) In order to construct the present invention, the bubbler container (91) with the remaining amount decrease detector according to claim 3, the lower stabilizer (5) is changed to a thicker one as shown in FIG. The space for storing the main part of the liquid level detector (104) or the remaining amount decrease detector (90) of Item 1 is secured.
(E) Adjust the attachment of the raw material discharge port (18) so that the tip of the carrier gas injection pipe (72) does not contact the liquid reservoir (15) of the container and is close to the bottom of the liquid reservoir (15).
(W) A magnetic driver and sensor (21) is installed inside the lower stabilizer (5) so as to be positioned below the liquid reservoir (15) in the lower part (11) of the container.
(F) The magnetic vibration driver / sensor (21) and the circuit unit (40) are housed in the lower stabilizer (5).
(Vi) Install the alarm / display (39) on the upper surface of the upper port protection / handle (6).
(T) The alarm unit / display unit (39) and the circuit unit (40) are connected by a cable and stored in the wiring pipe (53).
(L) Connect the interface (50) and the valve operation button lock (42) with a cable.
(G) Connect to external signal and input power supply (41) and start operation.
(Iv) The state of the remaining amount of the raw material (20) in the bubbler container is monitored by the alarm device / display device (39).
(E) In order to construct the industrial sealed container (92) with the remaining amount decrease detector according to the present invention, the liquid level detector (104) or the remaining amount decrease detector (90) according to claim 1 Select and install a vibrating tube.
(Na) In the case of the combination of the vibration motor / magnetic sensor built-in vibration tube and magnet (100), the vibration motor / magnetic sensor built-in vibration tube is placed on the upper part (10) of the industrial airtight container (4) as shown in FIG. Wear (94).
(La) A permanent magnet (24) is mounted in the vicinity of the outside of the container near the tip of the vibration motor / magnetic sensor built-in vibration tube (94). (However, if a vibration motor, magnet, or vibration tube with a built-in magnetic sensor (96) is used, no permanent magnet is installed.)
(M) The vibration motor (88) of the vibration motor / magnetic sensor built-in vibration tube (94) and the cable of the sensor coil (23) are connected to the alarm / display unit (39) including the circuit unit (40).
(C) Connect the interface (50) to an external device or a power source, and start operation.
(Ii) Monitor the state of the remaining amount of the raw material (20) in the industrial airtight container with an alarm and indicator (39).
(C) In order to construct the gantry (51) and the gantry system (54) incorporating the remaining amount reduction detector (90) according to the present invention, the interior of the gantry (51) as shown in FIG. A space for accommodating the magnetic vibration driver / sensor (21) and the container detection sensor (52) is secured.
(E) The vibration driver / sensor (21) and the container detection sensor (52) are accommodated.
(H) The left and right container guides (55) of the container are adjusted so that the center of the liquid reservoir (15) of the container and the center of the magnetic vibration driver / sensor (21) coincide.
(A) The wiring pipe (53), the alarm / display device (39), the circuit unit (40), and the interface (50) are installed on the mount (51).
(Ma) Connect the interface (50) to the external device and the input power source (41).
(G) The syringe container (3) or the bubbler container (71) incorporating the vibration tube of claim 1 is placed on the gantry (51) to operate the gantry system (54).
(F) The state of the raw material (20) of the siphon container (3) or the bubbler container (71) is monitored by the alarm / display device (39).
(G) In order to construct an automatic switching system for a plurality of siphon containers (3) or bubbler containers (71) according to the present invention, claim 6 shows the claim shown in FIG. 3 by taking siphon container (3) as an example. Prepare a plurality of gantry systems (54) of Item 5, and the piping of each container is connected to the pressure supply line (80) and the raw material discharge line (81) via electromagnetic valves or air drive valves as shown in FIG. Connect in parallel. The interface (50) of each gantry system (54) is connected to a valve control circuit (60). The valve control circuit output (68) is connected to the first valve (56), the second valve (57), the third valve (58) and the fourth valve (59) of each container. The signal of the interface (50) of each gantry (51) is connected to the valve control circuit (60). The system interface (69) is connected to an external device as necessary. The state of each container is monitored because the connection state of the container is displayed on the alarm / display (39).

残量減少検出器付きサイホン容器断面図である。It is a siphon container sectional view with a remaining amount decrease detector. サイホン容器の平面図である。It is a top view of a siphon container. サイホン容器及び架台システム断面図である。It is a siphon container and mount system sectional drawing. 残量減少検出器付きバブラー容器断面図である。It is a bubbler container sectional view with a remaining amount decrease detector. 原料が減少している場合のサイホン管先端詳細断面図である。It is a siphon tube tip detailed sectional view in case raw materials are decreasing. 原料が減少している場合のサイホン管先端詳細断面図である。It is a siphon tube tip detailed sectional view in case raw materials are decreasing. 残量減少検出器ブロック図である。It is a remaining amount decrease detector block diagram. サイホン容器の自動的切り替えシステム図である。It is an automatic switching system figure of a siphon container. 振動管を装着した残量減少検出器付きサイホン容器断面図である。It is a siphon container sectional view with a remaining amount decrease detector equipped with a vibration tube. 磁性体を内蔵した振動管先端詳細図である。It is a detailed view of the tip of a vibrating tube incorporating a magnetic body. 振動モータおよび磁気センサーを内蔵した振動管先端詳細図である。It is a detailed view of the tip of a vibration tube incorporating a vibration motor and a magnetic sensor. 残量減少検出器付き工業王密閉容器斜視図、一部破断図である。It is an industrial king airtight container perspective view with a residual amount reduction | decrease detector, and a partially broken figure. 振動管およびセンサー管先端詳細図である。It is a vibration pipe and a sensor pipe tip detailed drawing. 磁石・センサー内蔵振動管先端詳断面細図である。It is a detailed cross-sectional detailed view of the tip of a vibration tube with a built-in magnet / sensor. 液面検出器ブロック図である。It is a liquid level detector block diagram.

符号の説明Explanation of symbols

残量減少検出器付きサイホン容器(1)、ステンレス容器(2)、サイホン容器(3)、密閉容器(4)、下部安定台(5)、上部ポート保護兼取っ手(6)、加圧ガス供給ホース(7)、原料排出ホース(8)、水平振動管(9)、容器上部(10)、容器下部(11)、サイホン管(12)、加圧ガス管(13)、加圧ガス管口(14)、液溜り(15)、加圧ガス(16)、加圧ガス供給ポート(17)、原料排出ポート(18)、磁性体処理を施した配管(19)、原料(20)、磁気振動ドライバー兼センサー(21)、ドライバーコイル(22)、センサーコイル(23)、永久磁石(24)、磁力線A(25)、磁力線B(26)、サイホン管の振動(27)、振動管の振動(28)、磁気回路(29)、磁気シールド(30)、抵抗器(31)、制限器1(32)、制限器2(32′)、センサープリアンプ(33)、周波数フィルター(34)、センサーアンプ(35)、レベル調整器1(36)、レベル調整器2(36′)、判定回路(37)、警報用信号変換器(38)、警報器兼表示器(39)、回路ユニット(40)、外部信号および入力電源(41)、バルブ操作ボタンロック(42)、警報表示灯(43)、外部出力用信号変換器(44)、外部出力信号(45)、電源回路(46)、モジュール電源(47)、スイッチ(48)、容器検出信号(49)、インターフェイス(50)、架台(51)、容器検出センサー(52)、配線配管(53)、架台システム(54)、容器ガイド(55)、第1バルブ(56)、第2バルブ(57)、第3バルブ(58)、第4バルブ(59)、バルブ制御回路(60)、ドライブ電流(61)、ドライバーアンプ(62)、サイホン管の磁性化処理部分(63)、波形発生器(64)、タイミング発生器(65)、発振器(66)、判定タイミング信号(67)、バルブ制御回路出力(68)、システムインターフェイス(69)、バルブ操作ボタン(70)、バブラー容器(71)、キャリアガス注入管(72)、原料排出管(73)、バブル(75)、原料ガス(76)、原料ガス排出ポート(77)、キャリアガス注入ポート(78)、キャリアガス(79)、加圧供給ライン(80)、原料排出ライン(81)、第一容器(82)、第二容器(83)、原料供給ポート(84)、原料供給バルブ(85)、バルブ制御回路入力(86)、振動モータ(88)、磁性体(87)、残量減少検出器(90)、残量減少検出器付きバブラー容器(91)、残量減少検出器付き工業用密閉容器(92)、磁性体内蔵振動管(93)、振動モータ・磁気センサー内蔵振動管(94)、振動モータ・磁石内蔵振動管(95)、振動モータ・磁石・磁気センサー内蔵振動管(96)、センサー管(97)、支持スプリング(98)、振動モータ・磁気センサー内蔵振動管と磁石の組み合わせ例(100)、磁性体内蔵振動管と磁気振動ドライバー兼センサーの組み合わせの例(101)、水平振動管と磁気振動ドライバー兼センサーの組み合わせの例(102)、振動モータ・磁石内蔵振動管とセンサー管の組み合わせ(103)、液面検出器(104)Siphon container (1) with remaining amount reduction detector, stainless steel container (2), siphon container (3), sealed container (4), lower stabilizer (5), upper port protection and handle (6), pressurized gas supply Hose (7), raw material discharge hose (8), horizontal vibration pipe (9), container upper part (10), container lower part (11), siphon pipe (12), pressurized gas pipe (13), pressurized gas pipe port (14), liquid reservoir (15), pressurized gas (16), pressurized gas supply port (17), raw material discharge port (18), pipe (19) subjected to magnetic treatment, raw material (20), magnetic Vibration driver and sensor (21), driver coil (22), sensor coil (23), permanent magnet (24), magnetic field line A (25), magnetic field line B (26), siphon tube vibration (27), vibration tube vibration (28), magnetic circuit (29), magnetic shield (30 , Resistor (31), limiter 1 (32), limiter 2 (32 '), sensor preamplifier (33), frequency filter (34), sensor amplifier (35), level adjuster 1 (36), level adjustment 2 (36 '), judgment circuit (37), alarm signal converter (38), alarm / display (39), circuit unit (40), external signal and input power supply (41), valve operation button lock (42), warning indicator lamp (43), external output signal converter (44), external output signal (45), power supply circuit (46), module power supply (47), switch (48), container detection signal (49) ), Interface (50), gantry (51), container detection sensor (52), wiring piping (53), gantry system (54), container guide (55), first valve (56), second valve (57) The third bar (58), fourth valve (59), valve control circuit (60), drive current (61), driver amplifier (62), siphon tube magnetization processing part (63), waveform generator (64), timing Generator (65), oscillator (66), determination timing signal (67), valve control circuit output (68), system interface (69), valve operation button (70), bubbler container (71), carrier gas injection pipe ( 72), raw material discharge pipe (73), bubble (75), raw material gas (76), raw material gas discharge port (77), carrier gas injection port (78), carrier gas (79), pressurized supply line (80) , Raw material discharge line (81), first container (82), second container (83), raw material supply port (84), raw material supply valve (85), valve control circuit input (86), vibration Dynamic motor (88), magnetic body (87), remaining amount decrease detector (90), bubbler container (91) with remaining amount decrease detector, industrial sealed container (92) with remaining amount decrease detector, built-in magnetic body Vibration tube (93), Vibration motor / magnet sensor built-in vibration tube (94), Vibration motor / magnet built-in vibration tube (95), Vibration motor / magnet / magnetic sensor built-in vibration tube (96), Sensor tube (97), Support Example of combination of spring (98), vibration tube with built-in vibration motor / magnetic sensor and magnet (100), example of combination of vibration tube with built-in magnetic material and magnetic vibration driver / sensor (101), horizontal vibration tube and magnetic vibration driver / sensor Example of combination (102), vibration motor / magnet built-in vibration tube and sensor tube combination (103), liquid level detector (104)

Claims (6)

工業用容器の内部配管表面に磁性化処理を施した配管又は配管内部に磁性体を封入した配管、又は配管材の内部に振動モータおよび磁石および磁気センサーを組み合わせて封入した振動管を容器外部から電気的または磁気的に振動させ容器内の原料に量よって配管又は振動管の振動が妨げられ減衰する状態を容器の内部または外部より振動センサー又は磁気センサーにより検出し、電気的、音響的処理を行い原料の液面の位置を判定し、表示し、判定信号をインターフェイスから外部に送出を可能とする振動管を使用した液面検出器From the outside of the container, pipes that have been magnetized on the surface of the internal pipes of industrial containers, pipes that contain magnetic materials inside the pipes, or vibration pipes that contain a combination of a vibration motor, magnet, and magnetic sensor inside the pipe material Vibrating electrically or magnetically, the vibration of the pipe or vibrating tube is hindered and attenuated depending on the amount of the raw material in the container, and the electrical or acoustic processing is detected from the inside or outside of the container with a vibration sensor or magnetic sensor. Liquid level detector using a vibrating tube that can determine and display the position of the liquid level of the raw material and send the determination signal to the outside from the interface 請求項1の液面検出器を用いた残量減少検出器付きサイホン容器A siphon container with a remaining amount reduction detector using the liquid level detector according to claim 1. 請求項1の液面検出器を用いた残量減少検出器付きバブラー容器A bubbler container with a remaining amount reduction detector using the liquid level detector according to claim 1. 請求項1の液面検出器残量減少検出器付き工業用密閉容器An industrial airtight container with a liquid level detector remaining amount detector according to claim 1. 請求項2のサイホン容器又は請求項3のバブラー容器又は請求項4の工業用密閉容器から残量減少検出器を分離し、架台に組み込み、その架台にサイホン容器又はバブラー容器又は工業用密閉容器を装着すると、容器の有無を検出して、残量減少検出器が的確に内部配管の先端近傍にセットされ、内部配管の振動の状態により原料の減少状態を判定し、表示し、判定信号をインターフェイスから外部装置に送出することが可能な残量減少検出器を組み込んだ架台及びそのシステムA remaining amount reduction detector is separated from the siphon container of claim 2, the bubbler container of claim 3, or the industrial sealed container of claim 4, and incorporated in the mount, and the siphon container, bubbler container or industrial sealed container is mounted on the mount. When installed, the presence / absence of the container is detected, and the remaining amount reduction detector is accurately set in the vicinity of the tip of the internal pipe, and the reduced state of the raw material is judged and displayed according to the vibration state of the internal pipe, and the judgment signal is interfaced. And system for incorporating a remaining amount reduction detector capable of being sent from an external device to an external device 請求項1又は請求項2又は請求項3又は請求項4又は請求項5を用いて得たインターフェイスの信号を用い複数のサイホン容器又はバブラー容器又は工業用密閉容器のバルブの自動的切り替え及び原料の自動補給を可能としたシステムUsing the interface signal obtained using claim 1 or claim 2 or claim 3 or claim 4 or claim 5, automatic switching of valves of a plurality of siphon containers, bubbler containers or industrial sealed containers System that enables automatic replenishment
JP2007050537A 2007-01-31 2007-01-31 Siphon container with residual amount reduction detector, bubbler container, and industrial airtight container Pending JP2008189381A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180061206A (en) * 2015-10-02 2018-06-07 로베르트 보쉬 게엠베하 A tank having a charge level indicator and a compact assembly including the tank

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH032520U (en) * 1989-05-26 1991-01-11
JPH0372078A (en) * 1989-08-09 1991-03-27 Anelva Corp Method and device for forming thin film
JPH10176877A (en) * 1996-12-17 1998-06-30 Hitachi Ltd System for judging enclosing amount of refrigerant
JPH11351944A (en) * 1998-04-06 1999-12-24 Nooken:Kk Vibration type level detection device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH032520U (en) * 1989-05-26 1991-01-11
JPH0372078A (en) * 1989-08-09 1991-03-27 Anelva Corp Method and device for forming thin film
JPH10176877A (en) * 1996-12-17 1998-06-30 Hitachi Ltd System for judging enclosing amount of refrigerant
JPH11351944A (en) * 1998-04-06 1999-12-24 Nooken:Kk Vibration type level detection device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180061206A (en) * 2015-10-02 2018-06-07 로베르트 보쉬 게엠베하 A tank having a charge level indicator and a compact assembly including the tank
KR102611557B1 (en) * 2015-10-02 2023-12-11 로베르트 보쉬 게엠베하 Tank with fill level indicator and compact assembly containing said tank

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