JP2008184377A - Aluminum-ceramic composite and method for producing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for producing an aluminum-ceramic composite. <P>SOLUTION: The method for producing an aluminum-ceramic composite comprises the steps of: (1) molding or processing a ceramic porous body into a shape larger than a product shape and molding or processing a hole and a groove into a shape larger than a final shape; (2) disposing a ceramic fiber in the hole and the groove and then inserting a carbon or boron nitride shaped body having a size smaller than the portion to be removed when processed into the final shape; (3) impregnating the ceramic porous body with a metal comprising aluminum as a main component; and (4) removing a layer comprising aluminum as a main component in the outer periphery of the aluminum-ceramic composite 4 and processing the hole 6 and the groove 7 into the final shape. This heat dissipating component has properties of low thermal expansion and high heat conduction and is suitable as a heat dissipating component used for large equipment components such as semiconductor fabrication tools. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an aluminum-ceramic composite and a method for producing the same.

  Metal-ceramic composites with ceramics added as dispersed particles and a matrix as a metal combine the characteristics of both metals and ceramics, while taking advantage of the characteristics of ceramics such as low thermal expansion and high rigidity. It is a material with added high toughness and workability, and is expected to be used in various fields. Conventionally, materials such as Cu-W and Cu-Mo have been studied as such materials, but the specific gravity is large and there is a problem when used as a large-sized device part. Metal-ceramic composites are attracting attention as next-generation materials.

As metal-ceramic composites, materials using aluminum as a matrix as a metal have been actively studied in recent years (Patent Document 1). Aluminum is lightweight, has excellent heat conduction characteristics, and has a low melting point. As such a method for producing an aluminum-ceramic composite, a method of impregnating aluminum or an aluminum alloy containing aluminum as a main component by a high-pressure forging method is conventionally known. (Hereinafter referred to as a preform), and an aluminum alloy is compounded under high temperature and high pressure.
As for the production method of the aluminum-ceramic composite, in addition to the high-pressure forging method, non-pressure impregnation method in which impregnation is performed without applying pressure (Patent Document 2), ceramic powder and aluminum powder are mixed, and temperature and pressure are applied. There is a manufacturing method such as a powder metallurgy method (Patent Document 3).
JP-A-3-509860. Japanese Patent Application Laid-Open No. 11-116362. Japanese Patent Laid-Open No. 10-8164

  In powder metallurgy and non-pressure impregnation methods, the dissolved metal is difficult to get wet with the ceramic particles. There was a difficult problem. In the conventional method for producing a composite, the filling amount of the reinforcing material is small, and it cannot be used for applications requiring high rigidity and low thermal expansion. When the content of the reinforcing material is forcibly increased, the interface between the reinforcing material and the metal cannot be secured, and problems such as a decrease in thermal conductivity and strength occur.

  The use of titanium or aluminum-ceramic composites with a low coefficient of thermal expansion as semiconductor manufacturing jigs, etc. has been studied, but since titanium and aluminum-ceramic composites are very hard and difficult to process, drilling and grooves For members that require processing, there has been a problem that the processing cost is high.

As a method for reducing the processing cost of an aluminum-ceramic composite, a method of making an aluminum alloy layer with excellent workability at a hole or groove processing portion has been studied, but when manufacturing a large part, an aluminum alloy to be processed There was a problem that peeling or cracking occurred at the interface between the two due to residual stress caused by the difference in thermal expansion between the layer and the aluminum-ceramic composite.

  The present invention has been made in view of the above-described problems, and its purpose is to adjust the thermal expansion coefficient while ensuring the workability of the processed portion, and to achieve low thermal expansion and characteristics such as thermal conductivity. An object of the present invention is to provide an aluminum-ceramic composite that can be applied to a large-sized component that is not damaged at low cost.

  As a result of intensive investigations to achieve the above-mentioned goal, the present inventors have inserted carbon or boron nitride molded bodies having a shape smaller than the shape to be removed when processing into a final shape into the processed portion, and these and aluminum By compounding the alloy, the resulting composite has a small difference in thermal expansion from that of the aluminum-ceramic composite, reduces the residual stress generated at the interface between the two, reduces cracks, etc. that occur during processing. Improved workability. Furthermore, the present invention was completed by obtaining the knowledge that the ceramics which are reinforcing materials and the content thereof can be adjusted, and the characteristics of the resulting composite can be adjusted. The present invention will be described in detail below.

That is, the present invention provides an aluminum-ceramic composite,
(1) forming or processing the ceramic porous body into a shape larger than the product shape, and forming or processing the hole and groove into a shape larger than the final shape;
(2) Disposing a ceramic fiber in the hole and groove, and further inserting a carbon or boron nitride molded body having a shape smaller than a portion to be removed when processed into a final shape;
(3) impregnating a metal mainly composed of aluminum;
(4) The step of removing the aluminum-ceramic composite outer peripheral layer containing aluminum as a main component and processing the hole and the groove into a final shape;
It is a manufacturing method of the aluminum-ceramics composite characterized by passing through.

Moreover, this invention is a manufacturing method of the aluminum-ceramics composite body whose ceramic fiber contains an alumina, a silica, or carbon.

Furthermore, the present invention is an aluminum-ceramic composite body obtained by the above-described manufacturing method, which is a flat plate and has a structure in which the aluminum-ceramic composite body is exposed on both main surfaces.

In addition, the present invention is a structural component in which the ceramic porous body is made of at least one of silicon carbide, silicon nitride, aluminum nitride, and alumina, and has a thermal conductivity of 120 W / mK at a temperature of 25 ° C. In addition, the structural component is characterized in that the coefficient of thermal expansion at a temperature of 150 ° C. is 10 × 10 ⁻⁶ / K or less.

The heat dissipation component of the present invention has characteristics of low thermal expansion and high thermal conductivity, and is suitable as a heat dissipation component used as a large-sized device component such as a semiconductor manufacturing jig. In addition, by making the hole part and the groove part into an aluminum-ceramic fiber composite having excellent processability, the processing cost can be suppressed, and a heat dissipation component having excellent characteristics can be provided at low cost.

  The manufacturing method of the aluminum-ceramic composite can be roughly classified into two types: an impregnation method and a powder metallurgy method. Of these, the large parts are actually commercialized by impregnation methods from the viewpoint of characteristics such as thermal conductivity. There are various methods of impregnation, and there are a method of performing under normal pressure and a method of performing under high pressure (high pressure forging method). High pressure forging methods include a molten metal forging method and a die casting method.

  A method suitable for the present invention is a high-pressure forging method in which impregnation is performed under high pressure, and a molten metal forging method is preferable for obtaining a large and dense composite. The high-pressure forging method is a method in which a ceramic preform is loaded into a high-pressure vessel, and a molten aluminum alloy is impregnated at a high temperature and high pressure to obtain a composite.

  Hereinafter, the example of a manufacturing method by the molten metal forging method is demonstrated about this invention. Ceramic powder as a raw material (adding a binder such as silica as necessary) is molded and fired to prepare a preform. The obtained preform may be subjected to surface processing as necessary in order to ensure a predetermined flatness. In addition, with respect to a portion to be subjected to hole processing or groove processing in the final product, holes or grooves having dimensions larger than those of the final product are processed into a preform. On the other hand, in order to expose the aluminum-ceramic composite in the final product, the thickness and the outer peripheral shape are set to dimensions larger than the thickness dimension and outer dimension of the final product.

Next, as shown in FIG. 1, after placing ceramic fibers in the hole-drilled and grooved parts of the preform, carbon or nitridized in a smaller shape than the part removed when further processed into the final shape Insert the boron compact. These portions become an aluminum-ceramic fiber composite and an aluminum-carbon composite or an aluminum-boron nitride composite through an impregnation step described later (FIG. 2). Aluminum-ceramic fiber composites, aluminum-carbon composites, and aluminum-boron nitride composites are excellent in processability, and can be easily processed by ordinary machining when performing drilling, grooving, and the like.

Aluminum-carbon composites and aluminum-boron nitride composites are excellent in workability, but when exposed on the product surface, there are problems with mechanical properties such as dust generation and chipping, and they are used as members of semiconductor manufacturing equipment and the like. Is not preferred. Therefore, in the present invention, when processing into the final product shape, a carbon or boron nitride molded body having a shape smaller than the portion to be removed is inserted to process the aluminum-carbon composite or the aluminum-boron nitride composite. Sometimes it can be removed. The porosity of the carbon or boron nitride molded body to be used is 40% by volume or less, preferably 20% by volume or less, because it is necessary to make the thermal expansion coefficient close to that of the aluminum-ceramic composite.

The ceramic fiber used in the present invention is preferably a ceramic fiber containing alumina, silica or carbon. The ceramic fiber has a function as a spacer for maintaining the positional relationship between the carbon or boron nitride molded body and the preform described above, and at the same time, if the ceramic fiber is filled and combined, it is effective in improving the strength of the aluminum alloy portion. is there. Furthermore, by reducing the difference in thermal expansion from the composite part surrounding the aluminum alloy part, there is an effect of reducing the stress generated at the boundary part between the aluminum alloy and the composite part. For this reason, as the ceramic fiber, ceramic fiber containing alumina, silica or carbon is preferable from the viewpoints of wettability with an aluminum alloy, stability at high temperature at the time of compounding, and control of thermal expansion coefficient.

  The ceramic used for the aluminum-ceramic composite of the present invention is preferably composed of at least one selected from the group consisting of silicon carbide, silicon nitride, aluminum nitride, and alumina. The aluminum-ceramic composite of the present invention is required to have high thermal conductivity from its application. The thermal conductivity of the aluminum-ceramic composite is determined by the thermal conductivity of the ceramic material itself and the interface state with the aluminum alloy. For this reason, the ceramic material is preferably selected from the group of silicon carbide, silicon nitride, aluminum nitride, and alumina from the viewpoints of thermal conductivity, wettability with an aluminum alloy, and adhesion. Furthermore, the porous body according to the present invention may contain a small amount of an oxide or composite oxide such as silica, alumina, magnesia and the like as long as the effects of the present invention are not impaired.

There is no restriction | limiting in particular regarding the manufacturing method of the preform which concerns on this invention, It can manufacture by a well-known method. For example, when the ceramic is silicon carbide, it can be obtained by adding colloidal silica or alumina as a binder to the silicon carbide powder, mixing, molding, and firing at 800 ° C. or higher. There is no restriction | limiting in particular also about a shaping | molding method, Well-known methods, such as press molding, extrusion molding, and casting, can be used, and the shape-retaining binder can be used together as needed.

  10-50 volume% is preferable and, as for the porosity of the preform used for this invention, 15-40 volume% is more preferable. The characteristics of the aluminum-ceramic composite, particularly the expansion coefficient, are determined by the expansion coefficient, elastic modulus and content of the ceramic used. When the aluminum-ceramic composite of the present invention is used as, for example, a heat radiating component of an electrostatic chuck module, if the difference in expansion coefficient from the electrostatic chuck material (alumina, aluminum nitride, etc.) increases, May occur and parts may warp. For this reason, in order to reduce the expansion coefficient of the aluminum-ceramic composite, the upper limit of the porosity is preferably 50% by volume, more preferably 40% by volume. On the other hand, when the porosity is less than 10% by volume, it is difficult to form a composite with an aluminum alloy, and there are problems such as pores remaining during the composite, resulting in a decrease in thermal conductivity. The porosity of the preform can be controlled by adjusting the type, particle form, particle size and blending ratio of the ceramic powder used. Further, the porosity of the preform can be adjusted by a molding method.

The method of laminating the preform to form one block is not particularly limited, but for example, the following method may be mentioned. A method in which the preform is sandwiched and laminated with a release plate coated with a release agent to form one block, arranged on both surfaces of the preform so that fibers mainly composed of alumina or silica are in direct contact with each other, It is a method of sandwiching between release plates to form one block.

After preheating the block at about 500 to 750 ° C., one or more of them are placed in a high-pressure vessel, and a molten aluminum alloy is supplied as quickly as possible to prevent the temperature of the block from dropping, and at a pressure of 20 MPa or more. The aluminum-ceramic composite is obtained by pressurizing and impregnating the aluminum alloy into the voids of the preform. For the purpose of removing distortion during impregnation, the impregnated product may be annealed.

  The aluminum alloy in the aluminum-ceramic composite of the present invention may contain magnesium or the like in addition to aluminum. As such an aluminum alloy, for example, an aluminum alloy containing 0.2 to 3% by mass of magnesium may be used. By containing magnesium, the bond between the ceramic particles and the metal portion becomes stronger, which is preferable. Furthermore, since the aluminum alloy is sufficiently penetrated into the voids of the preform at the time of impregnation, the melting point of the aluminum alloy is preferably as low as possible. For example, an aluminum alloy containing 5 to 25% by mass of silicon may be used. The metal components other than aluminum and magnesium in the aluminum alloy are not particularly limited as long as the characteristics do not change extremely. For example, copper or the like may be included.

  An example of a method for processing the obtained aluminum-ceramic composite will be described. Since the aluminum-ceramic composite of the present invention is produced by a high-pressure forging method, the periphery is covered with an aluminum alloy. First, this surface aluminum alloy layer is removed with a grinder or the like, and then surface processing is performed with a surface grinder using a diamond tool to obtain a flat aluminum-ceramic composite. In addition, it is also possible to directly perform surface processing with a surface grinder or the like using a diamond tool without removing the surface aluminum alloy layer. Next, peripheral machining, grooving, and hole machining are performed by a machining center, a water jet machining machine, an electric discharge machine, or the like. In particular, when processing a complicated tap hole or the like, a stainless steel helicate may be inserted as needed for the purpose of improving the strength of the hole. As described above, since the preform of the portion to be drilled or grooved is processed to be larger than the final shape in advance, this portion is made of an aluminum-ceramic fiber composite and an aluminum-carbon composite or aluminum-boron nitride. It becomes a composite and can be easily processed by ordinary machining, and the processing cost can be reduced.

  The aluminum-ceramic composite of the present invention is characterized in that the aluminum-ceramic composite is exposed on both main surfaces of a flat plate by performing the above-described processing. If the aluminum alloy layer on the surface cannot be completely removed and remains, warping occurs due to temperature changes during use due to the difference in thermal expansion coefficient between the aluminum-ceramic composite and the aluminum alloy layer, and in an environment with a temperature gradient. When used for jigs used in applications requiring high precision flatness, for example, semiconductor manufacturing jigs, the required flatness may not be ensured.

The aluminum-ceramic composite of the present invention preferably has a thermal expansion coefficient of 10 × 10 ⁻⁶ / K or less at a temperature of 150 ° C., and uses that require high-precision flatness in an environment with a temperature gradient. It is suitable for a jig used in the above, for example, a semiconductor manufacturing jig. When the thermal expansion coefficient at a temperature of 150 ° C. exceeds 10 × 10 ⁻⁶ / K, the flatness and the like may be reduced due to the thermal expansion of the composite itself due to a subtle temperature gradient when used in the semiconductor manufacturing jig described above. It may become impossible to secure. About a thermal expansion coefficient, when joining and using members, such as ceramic electrostatic chucks, for example, it is preferable to match | combine with the thermal expansion coefficient of the member to join.

The composite of the present invention preferably has a thermal conductivity of 120 W / mK or higher at a temperature of 25 ° C. This is suitable for use in parts that require heat dissipation, and even when used in the above-mentioned semiconductor manufacturing jigs, etc., the material having excellent heat conduction characteristics is effective in reducing the thermal gradient of the composite itself. Is preferable.

(Example 1)
1000 g of silicon carbide (hereinafter referred to as SiC) powder A (manufactured by Taiyo Random Company: NG-80, average particle size: 200 μm), silicon carbide powder B (manufactured by Taiyo Random Company: NG-150, average particle size: 100 μm) 1000 g, 1000 g of silicon carbide powder C (manufactured by Yakushima Electric Works: GC-1000F, average particle size: 10 μm) and 300 g of silica sol (manufactured by Nissan Chemical Industries: Snowtex) are weighed and mixed for 30 minutes with a stirring mixer. , 320 mm × 240 mm × 20 mm in a flat plate shape with a pressure of 10 MPa.

  The obtained molded body was dried at a temperature of 120 ° C. for 2 hours and then fired in the atmosphere at a temperature of 950 ° C. for 2 hours to obtain a SiC preform having a porosity of 30%. The obtained SiC preform was subjected to surface processing to a thickness of 15 mm using a diamond grindstone with a surface grinder, and then the outer peripheral portion was processed into a shape with an external dimension of 310 × 230 mm using a machining center.

The obtained SiC preform was subjected to Φ12 mm hole and 252 mm × 202 mm × 10 mmt groove processing using a diamond tool in the shape of FIG. Next, a carbon material with a porosity of 15% having a diameter of 9 mm was wrapped with 2 mmt of alumina / silica fiber (alumina / silica = 95/5) in the circumferential direction and inserted into six holes. Further, a carbon material of 248 mm × 198 mm × 8 mmt with a porosity of 15% was inserted into a groove portion of the SiC preform via a 2 mmt alumina / silica fiber (alumina / silica = 95/5). Then, individually sandwiched between stainless steel plates with dimensions of 330 mm x 255 mm x 0.8 mm with carbon coating on both sides, 12 mm thick iron plates are placed on top and bottom, and connected with eight M10 bolts to form one block. did. Next, the block was preheated to 700 ° C. in an electric furnace, and then placed in a preheated press mold having an inner diameter of 500 mm, and a molten aluminum alloy containing 0.8% by mass of magnesium was poured, The SiC preform was impregnated with an aluminum alloy by applying pressure for 25 minutes. After cooling to room temperature, cut along the shape of the release plate with a wet band saw, peel off the sandwiched stainless steel plate, and then anneal at 530 ° C for 3 hours to remove strain during impregnation An aluminum-silicon carbide composite was obtained.

From the obtained aluminum-silicon carbide composite, a thermal expansion coefficient measurement specimen (diameter 3 mm, length 10 mm) and a thermal conductivity measurement specimen (25 mm × 25 mm × 1 mm) were prepared by grinding. Using each test piece, the thermal expansion coefficient at a temperature of 150 ° C. was measured by a thermal dilatometer (Seiko Electronics Industry Co., Ltd .; TMA300), and the thermal conductivity at a temperature of 25 ° C. was measured by a laser flash method (manufactured by ULVAC; TC3000). It was measured. As a result, the thermal expansion coefficient at a temperature of 150 ° C. was 6.5 × 10 ⁻⁶ / K, and the thermal conductivity at a temperature of 25 ° C. was 215 W / mK.

Next, both sides of the obtained aluminum-silicon carbide composite were uniformly ground using a diamond tool with a surface grinder so that the thickness was 13 mm. Thereafter, the outer peripheral portion of the member was ground into a shape having an outer dimension of 300 × 225 mm. Next, the aluminum-silicon carbide composite subjected to grinding is machined into an aluminum-carbon composite part and an aluminum-ceramic fiber composite part in the shape of FIG. 2, and a φ10 mm hole and 250 mm × 200 mm × 8 mmt Grooving was formed. The obtained processed product was subjected to a heat treatment at a temperature of 400 ° C. for 1 hour to remove distortion during processing, and each surface grinder was adjusted so that the flatness of the upper and lower surfaces was 0.03 mm or less. The surface was ground by 0.5 mm to produce a structural part. In the obtained structural component, no crack was generated in the boundary portion between the aluminum alloy layer portion and the aluminum-silicon carbide composite portion where the hole processing and the groove processing were performed.

(Comparative Example 1)
Without placing anything in the holes and groove portions of the SiC preform of Example 1, 12 mm thick iron plates are placed up and down, sandwiched between 330 mm × 255 mm × 0.8 mm size stainless steel plates coated on both sides with carbon. And it connected with eight M10 bolts to form one block. Next, the block was preheated to 700 ° C. in an electric furnace, and then placed in a preheated press mold having an inner diameter of 500 mm, and a molten aluminum alloy containing 0.8% by mass of magnesium was poured, The SiC preform was impregnated with an aluminum alloy by applying pressure for 25 minutes. After cooling to room temperature, cut along the shape of the release plate with a wet band saw, peel off the sandwiched stainless steel plate, and then anneal at 530 ° C for 3 hours to remove strain during impregnation An aluminum-silicon carbide composite was obtained.

The obtained aluminum-silicon carbide composite was warped in a shape in which the groove portion side was concave, and the amount of warpage was 1.2 mm per 200 mm length. Next, both sides of this aluminum-silicon carbide composite were uniformly ground using a diamond tool with a surface grinder so that the thickness was 12 mm. Thereafter, the outer peripheral portion of the member was ground into a shape having an outer dimension of 300 × 225 mm. In the obtained aluminum-silicon carbide composite, cracks were generated at the boundary between the aluminum alloy layer and the aluminum-silicon carbide composite in the part where the SiC preform was subjected to Φ12 mm hole machining. Similar cracks were also generated at the boundary between the aluminum alloy layer portion and the aluminum-silicon carbide composite portion where the SiC preform was grooved.

(Example 2)
In Example 1, a boron nitride material having a porosity of 20% and having the same shape as in Example 1 is disposed in the hole and groove part, and contains 12% by mass of silicon and 0.8% by mass of magnesium as an aluminum alloy. An aluminum-silicon carbide composite was produced in the same manner as in Example 1 except that a molten aluminum alloy was used. From the obtained aluminum-silicon carbide composite, a thermal expansion coefficient measurement specimen (diameter 3 mm, length 10 mm) and a thermal conductivity measurement specimen (25 mm × 25 mm × 1 mm) were prepared by grinding. Using each test piece, the thermal expansion coefficient at a temperature of 150 ° C. and the thermal conductivity at a temperature of 25 ° C. were measured. As a result, the thermal expansion coefficient at a temperature of 150 ° C. was 6.1 × 10 ⁻⁶ / K, and the thermal conductivity at a temperature of 25 ° C. was 210 W / mK.

Next, both sides of the obtained aluminum-silicon carbide composite were uniformly ground using a diamond tool with a surface grinder so that the thickness was 13 mm. Thereafter, the outer peripheral portion of the member was ground into a shape having an outer dimension of 300 × 225 mm. Next, the aluminum-silicon carbide composite subjected to grinding is machined into an aluminum-carbon composite part and an aluminum-ceramic fiber composite part in the shape of FIG. 2, and a φ10 mm hole and 250 mm × 200 mm × 8 mmt Grooving was formed. The obtained processed product was subjected to 0.5 mm thickness grinding on each surface with a surface grinder so that the flatness of the upper and lower surfaces was 0.03 mm or less to produce a structural part. In the obtained structural component, no crack was generated in the boundary portion between the aluminum alloy layer portion and the aluminum-silicon carbide composite portion where the hole processing and the groove processing were performed.

(Example 3)
1000 g of silicon carbide (hereinafter referred to as SiC) powder A (manufactured by Taiyo Random Company: NG-80, average particle size: 200 μm), silicon carbide powder B (manufactured by Taiyo Random Company: NG-150, average particle size: 100 μm) 1000 g, 1000 g of silicon nitride powder (manufactured by Denki Kagaku Kogyo Co., Ltd .: SN-9S, average particle size: 2 μm), and 300 g of silica sol (Nissan Chemical Co., Ltd .: Snowtex) are weighed and mixed for 30 minutes with a stirring mixer. , 320 mm × 240 mm × 20 mm in a flat plate shape with a pressure of 10 MPa.

  The obtained molded body was dried at a temperature of 120 ° C. for 2 hours and then fired in a nitrogen atmosphere at a temperature of 1200 ° C. for 2 hours to obtain a preform having a porosity of 25%. The obtained preform was subjected to surface processing to a thickness of 15 mm using a diamond grindstone with a surface grinder, and then the outer peripheral portion was processed into a shape having an outer dimension of 310 × 230 mm using a machining center.

The obtained preform was subjected to Φ12 mm hole and 252 mm × 202 mm × 10 mmt groove processing using a diamond tool in the shape of FIG. Next, a carbon material with a porosity of 15% having a diameter of 9 mm was wrapped with 2 mmt of alumina / silica fiber (alumina / silica = 95/5) in the circumferential direction and inserted into six holes. Further, a carbon material of 248 mm × 198 mm × 8 mmt with a porosity of 15% was inserted into a groove portion of the preform through 2 mmt of alumina / silica fiber (alumina / silica = 95/5). Then, individually sandwiched between stainless steel plates with dimensions of 330 mm x 255 mm x 0.8 mm with carbon coating on both sides, 12 mm thick iron plates are placed on top and bottom, and connected with eight M10 bolts to form one block. did. Next, this block was preheated to 700 ° C. in an electric furnace, and then placed in a pre-heated press mold having an inner diameter of 500 mm, and an aluminum alloy containing 12% by mass of silicon and 0.8% by mass of magnesium. The molten metal was poured and pressurized at 30 MPa for 25 minutes to impregnate the preform with the aluminum alloy. After cooling to room temperature, cut along the shape of the release plate with a wet band saw, peel off the sandwiched stainless steel plate, and then anneal at 530 ° C for 3 hours to remove strain during impregnation An aluminum-silicon carbide / silicon nitride composite was obtained.

From the obtained aluminum-silicon carbide / silicon nitride composite, a thermal expansion coefficient measurement specimen (diameter 3 mm length 10 mm) and a thermal conductivity measurement specimen (25 mm × 25 mm × 1 mm) were prepared by grinding. Using each test piece, the thermal expansion coefficient at a temperature of 150 ° C. and the thermal conductivity at a temperature of 25 ° C. were measured. As a result, the thermal expansion coefficient at a temperature of 150 ° C. was 4.8 × 10 ⁻⁶ / K, and the thermal conductivity at a temperature of 25 ° C. was 135 W / mK.

The obtained aluminum-silicon carbide / silicon nitride composite was processed and heat-treated in the same manner as in Example 1 to produce a structural component having the shape shown in FIG. In the obtained structural component, no crack was generated in the boundary portion between the aluminum alloy layer portion and the aluminum-silicon carbide composite portion where the hole processing and the groove processing were performed.

Filling diagram before impregnation (compositing) showing one embodiment of the present invention Structural drawing of a structural component showing an embodiment of the present invention

Explanation of symbols

1) Ceramic porous body 2) Ceramic fiber 3) Carbon or boron nitride 4) Aluminum-ceramic composite 5) Aluminum-ceramic fiber composite 6) Through hole (φ10 mm)
7) Groove (250mm x 200mm x 8mm)

Claims (5)

In the production of an aluminum-ceramic composite,
(1) forming or processing the ceramic porous body into a shape larger than the product shape, and forming or processing the hole and groove into a shape larger than the final shape;
(2) Disposing a ceramic fiber in the hole and groove, and further inserting a carbon or boron nitride molded body having a shape smaller than a portion to be removed when processed into a final shape;
(3) impregnating a metal mainly composed of aluminum;
(4) The step of removing the aluminum-ceramic composite outer peripheral layer containing aluminum as a main component and processing the hole and the groove into a final shape;
The manufacturing method of the aluminum-ceramics composite characterized by passing through. The method for producing an aluminum-ceramic composite according to claim 1, wherein the ceramic fiber contains alumina, silica, or carbon. 3. An aluminum-ceramic composite obtained by the production method according to claim 1 or 2, wherein the aluminum-ceramic composite is flat and the aluminum-ceramic composite is exposed on both main surfaces. 4. The structural component according to claim 3, wherein the ceramic porous body is made of at least one of silicon carbide, silicon nitride, aluminum nitride, and alumina. 5. The structural component according to claim 3, wherein the thermal conductivity at a temperature of 25 ° C. is 120 W / mK or more, and the thermal expansion coefficient at a temperature of 150 ° C. is 10 × 10 ⁻⁶ / K or less.