[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

JP2008039717A - Thin-film sample cutter for analysis and fluorescent x-ray analyzing method using it - Google Patents

Thin-film sample cutter for analysis and fluorescent x-ray analyzing method using it Download PDF

Info

Publication number
JP2008039717A
JP2008039717A JP2006217819A JP2006217819A JP2008039717A JP 2008039717 A JP2008039717 A JP 2008039717A JP 2006217819 A JP2006217819 A JP 2006217819A JP 2006217819 A JP2006217819 A JP 2006217819A JP 2008039717 A JP2008039717 A JP 2008039717A
Authority
JP
Japan
Prior art keywords
film sample
thin film
blade
analysis
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006217819A
Other languages
Japanese (ja)
Inventor
Kohei Shizutoshi
浩平 閑歳
Masamichi Mori
正道 森
Michiko Inoue
未知子 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku Corp
Original Assignee
Rigaku Industrial Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku Industrial Corp filed Critical Rigaku Industrial Corp
Priority to JP2006217819A priority Critical patent/JP2008039717A/en
Publication of JP2008039717A publication Critical patent/JP2008039717A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thin-film sample cutter for analysis and to enhance not only the cutting workability of a thin-film sample but also the analyzing precision of the thin film sample. <P>SOLUTION: Thin-film sample cutter for circularly cutting the thin-film sample S for analysis is equipped with: a cylindrical pressing part 2 having the ring-shaped under end surface 22 pressed to the thin-film sample S; the rotary part 3 having a columnar or cylindrical shape concentric to the pressing part 2, housed in the pressing part 2 in an freely rotational manner around at its axis and having a plurality of downward protruded blades 34 located equally in its circumference; and a the grasping part 41 piercing through the upper part 21 of the pressing part 2 to protrude and fixed to the upper part 33 of the rotary part. The thin-film sample S is cut into a circular shape. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、分析用の薄膜試料を円形に切断する薄膜試料切断器および前記切断器によって切断された薄膜試料を分析する蛍光X線分析方法に関する。   The present invention relates to a thin film sample cutter for cutting a thin film sample for analysis into a circle and a fluorescent X-ray analysis method for analyzing a thin film sample cut by the cutter.

PETフイルム、ポリマー性フイルム、剥離紙、金属ホイルなど多種類の薄膜が多くの産業分野で開発・製造され、いろいろな用途に使用されている。そのため、薄膜の開発や製造段階で、主にこれらの薄膜の表面に施されているコーティングなどの表面処理部分に含まれているSi、Al、Fなどの元素の付着量や表面処理部分の膜厚測定が行われている。また、薄膜材料に含有されている元素や薄膜そのものの膜厚測定も行われている。   Many kinds of thin films such as PET film, polymer film, release paper, metal foil, etc. have been developed and manufactured in many industrial fields and used in various applications. Therefore, in the development and manufacturing stages of thin films, the amount of adhesion of elements such as Si, Al, and F contained in the surface treatment parts such as coatings applied to the surfaces of these thin films and the film of the surface treatment parts Thickness measurement is being performed. Moreover, the film thickness measurement of the element contained in thin film material and the thin film itself is also performed.

従来から蛍光X線分析法などにより薄膜試料の分析が行われてきたが、分析を行うときは、この薄膜試料を円形に切り取り、切り取った円形試料を蛍光X線分析用の円筒形試料ホルダにセットして分析を行っている。しかし、厚みが1μm〜数百μmの薄膜試料の1枚を円形に切り取るのに適した切断器は市販されていない。   Conventionally, thin film samples have been analyzed by fluorescent X-ray analysis. However, when performing analysis, this thin film sample is cut into a circular shape, and the cut circular sample is put into a cylindrical sample holder for fluorescent X-ray analysis. Set and analyze. However, a cutter suitable for cutting out a thin film sample having a thickness of 1 μm to several hundreds of μm into a circle is not commercially available.

紙、布地などのシート状物を円形に切り取る道具として、工作やアートワーク用としてコンパスの原理を応用したサークルカッターが市販されている。サークルカッターはコンパスで円を描く要領で、回転中心軸の先端をシート状物の平面上の所望の位置に保持し、刃をその回転中心軸を中心にして回転させてシート状物を円形に切り取る。このサークルカッターを薄膜試料の切り取りに使用すると、回転中心軸が薄膜試料の分析面の中心部分と接触するため、薄膜試料の分析部位が汚染したり、傷が付くなどするため、分析試料を切り取る道具としては適していない。また、サークルカッターを用いて薄膜試料を切り取るときに、薄膜試料が移動しないように薄膜試料の一部を作業者が手で押さえて行うが、極薄い薄膜試料であるため、サークルカッターの切断刃の回転力に引っ張られて薄膜試料がひずんだり、皺が寄ったりするために、いびつな円形になり易い。   As a tool for cutting a sheet of paper, fabric or the like into a circle, a circle cutter applying the principle of a compass is commercially available for work or artwork. A circle cutter is a method of drawing a circle with a compass, holding the tip of the rotation center axis at a desired position on the plane of the sheet, and rotating the blade around the rotation center to make the sheet into a circle. cut out. When this circle cutter is used to cut a thin film sample, the center axis of rotation comes into contact with the central part of the analysis surface of the thin film sample, so that the analysis site of the thin film sample is contaminated or scratched. Not suitable as a tool. In addition, when a thin film sample is cut using a circle cutter, the operator holds a part of the thin film sample by hand so that the thin film sample does not move. Since the thin film sample is distorted or wrinkled by being pulled by the rotational force, it tends to be an irregular circle.

そのため、薄膜試料をはさみで円形に切り取っているが、薄膜試料の厚みが1μm〜数百μmであるため、はさみの刃が薄膜試料に接触すると薄膜試料が変形し易く、いびつな円形や円形の切断面がぎざぎざなどの凹凸状になり易く、真円形状に切り取ることは難しく、長時間を要し、また切り取り作業中に薄膜試料の分析面を汚染させたり、傷付けたりすることがあり、作業性がよくない。   Therefore, the thin film sample is cut into a circle with scissors. However, since the thickness of the thin film sample is 1 μm to several hundred μm, the thin film sample is easily deformed when the blade of the scissors comes into contact with the thin film sample. The cut surface tends to be uneven, such as jagged, difficult to cut into a perfect circle, takes a long time, and may contaminate or damage the analysis surface of the thin film sample during the cutting operation. Not good.

従来、薄膜試料を蛍光X線分析方法で分析する場合は、はさみなどで円形に切り取った円形薄膜試料を試料ホルダにセットして分析を行うが、円形薄膜試料の切断面が凹凸状であったり、いびつな円形であったりすると薄膜試料をセットする試料ホルダの円筒部の円筒内径に適合せず、薄膜試料が試料ホルダの分析セット面にぴったりと配置することができず、図7に示すように薄膜試料の全面や一部の面が浮いているために、照射X線に対する薄膜試料の高さの変動により蛍光X線強度の変動が生じ、精度のよい分析を行うことができなかった。   Conventionally, when a thin film sample is analyzed by a fluorescent X-ray analysis method, a circular thin film sample cut into a circle with scissors or the like is set in a sample holder for analysis, but the cut surface of the circular thin film sample is uneven. In the case of an irregular circle, the cylindrical inner diameter of the cylindrical portion of the sample holder on which the thin film sample is set does not fit, and the thin film sample cannot be placed exactly on the analysis setting surface of the sample holder, as shown in FIG. In addition, since the whole surface or a part of the surface of the thin film sample is floating, the fluctuation of the fluorescent X-ray intensity is caused by the fluctuation of the height of the thin film sample with respect to the irradiated X-ray, and the accurate analysis cannot be performed.

本発明は前記従来の問題に鑑みてなされたもので、分析用の薄膜試料切断器を提供し、薄膜試料の切り取りの作業性を向上させるとともに、薄膜試料の分析精度を向上させることを目的とする。   The present invention has been made in view of the above-mentioned conventional problems, and provides a thin film sample cutter for analysis, and aims to improve the workability of cutting a thin film sample and improve the analysis accuracy of a thin film sample. To do.

前記目的を達成するために、本発明の第1構成は分析用の薄膜試料を円形に切断するための薄膜試料切断器であって、円筒状で、前記薄膜試料に押圧される輪状の下端面を有する押圧部と、その押圧部と同心の円柱状または円筒状で軸心回りに回転自在に前記押圧部に収納され、下方に突出する複数の刃を周方向に均等に有している回転部と、前記押圧部の上部を貫通して突出する前記回転部の上部に固定される把持部とを備え、薄膜試料を円形に切断する。   In order to achieve the above object, a first configuration of the present invention is a thin film sample cutter for cutting a thin film sample for analysis into a circular shape, which is cylindrical and has an annular lower end face pressed against the thin film sample. A rotation portion having a plurality of blades that are evenly arranged in the circumferential direction and are housed in the pressure portion so as to be rotatable around an axis center in a columnar or cylindrical shape concentric with the pressure portion. And a gripping part fixed to the upper part of the rotating part protruding through the upper part of the pressing part and cutting the thin film sample into a circle.

本発明の第1構成においては、押圧部は、円筒状であり、薄膜試料を押圧する輪状の下端面と回転部が貫通する上部とを有し、上部で回転部を支持する。円筒の外径および輪状の下端面の内径は切断円の大きさに適合した径に形成すればよく、円筒の外径は切断円径より10〜35mm大きい外径が好ましく、5〜20mm大きい外径がより好ましい。輪状の下端面の内径は切断円径より10〜35mm大きい内径が好ましく、5〜20mm大きい内径がより好ましい。上部は回転部の機構に適合した形状にすることが好ましい。例えば、押圧部はポリエチレンやポリプロピレンなどの高分子樹脂やステンレスなどの金属で形成される。   In the first configuration of the present invention, the pressing portion is cylindrical and has a ring-shaped lower end surface that presses the thin film sample and an upper portion through which the rotating portion penetrates, and the rotating portion is supported by the upper portion. The outer diameter of the cylinder and the inner diameter of the lower end surface of the ring shape may be formed to a diameter suitable for the size of the cutting circle. The outer diameter of the cylinder is preferably 10 to 35 mm larger than the cutting circle diameter, and 5 to 20 mm larger. A diameter is more preferable. The inner diameter of the ring-shaped lower end surface is preferably 10 to 35 mm larger than the cutting circle diameter, and more preferably 5 to 20 mm larger. It is preferable that the upper part has a shape suitable for the mechanism of the rotating part. For example, the pressing portion is formed of a polymer resin such as polyethylene or polypropylene, or a metal such as stainless steel.

回転部は、押圧部と同心の円柱状または円筒状であり、軸心周りに回転自在に押圧部に収納され、下方に突出する複数の刃を周方向に均等に配置する刃保持部と、押圧部の上部を貫通し把持部が固定される上部とを有している。回転部は、押圧部の上部と把持部とで保持される。押圧部の上部を貫通する回転部の上部は把持部を取り付けて、手で回転する強度に耐えられる直径であればよい。   The rotating part is a columnar or cylindrical shape concentric with the pressing part, and is housed in the pressing part so as to be rotatable around the axis, and a blade holding part that uniformly arranges a plurality of blades protruding downward in the circumferential direction; And an upper portion through which the grip portion is fixed. The rotating part is held by the upper part of the pressing part and the grip part. The upper part of the rotating part that penetrates the upper part of the pressing part may have a diameter that can withstand the strength of rotating by hand with a gripping part attached.

刃保持部は刃固定部と刃止め具とで形成されている。刃固定部は所望の切断径と同径の外径の円筒または円柱が好ましい。刃は両方の長辺に刃を有する両刃かみそりまたは片側の長辺に刃を有する片刃かみそり刃、工作ナイフやアートワークナイフなどの替え刃が好ましく、両刃かみそり刃がより好ましい。1つの輪状の複数部分に複数の刃が周方向に均等に設けられている輪状刃であってもよい。   The blade holding part is formed by a blade fixing part and a blade stopper. The blade fixing part is preferably a cylinder or a column having the same outer diameter as the desired cutting diameter. The blade is preferably a double-edged razor having blades on both long sides, a single-edged razor blade having a blade on one long side, a replacement blade such as a work knife or an art work knife, and more preferably a double-edged razor blade. A ring-shaped blade in which a plurality of blades are equally provided in the circumferential direction in one ring-shaped plurality of portions may be used.

例えば、刃止め具は内径が刃固定部の円筒または円柱の外径と同径か、0.5mm程度小さい内径の円筒の一部で厚み3〜8mmの板材であり、幅は固定する刃の大きさに適合した大きさで形成される。刃固定部と刃止め具の間に刃が挟み込まれ、刃止め具がネジなどで刃固定部に押さえられ刃が所定の位置に固定される。回転部はポリエチレンやポリプロピレンなどの高分子樹脂やステンレスやアルミニウムなどの金属材料で形成される。   For example, the blade stopper is a plate material having a thickness of 3 to 8 mm with a part of a cylinder having an inner diameter that is the same as the outer diameter of the cylinder or the column of the blade fixing portion or about 0.5 mm, and the width is the width of the blade to be fixed. It is formed with a size suitable for the size. The blade is sandwiched between the blade fixing portion and the blade stopper, and the blade stopper is pressed by the blade fixing portion with a screw or the like, and the blade is fixed at a predetermined position. The rotating portion is formed of a polymer resin such as polyethylene or polypropylene, or a metal material such as stainless steel or aluminum.

把持部は、押圧部の上部を貫通する回転部の上部に固定されて、回転させることにより回転部を回転させる。   The gripping part is fixed to the upper part of the rotating part that penetrates the upper part of the pressing part, and rotates the rotating part by rotating.

押圧部の上部と前記把持部との間に弾性部材を配置することが好ましく、この弾性部材により把持部および回転部が上方に付勢されて、薄膜試料切断器の未使用時には、刃の先端が押圧部の輪状の下端面よりも上方に位置し押圧部に収納される。使用時には、把持部を下方に押圧することにより、刃の先端が押圧部の輪状の下端面より突出する。   It is preferable to dispose an elastic member between the upper portion of the pressing portion and the gripping portion, and the gripping portion and the rotating portion are biased upward by the elastic member, and when the thin film sample cutter is not used, the tip of the blade Is positioned above the annular lower end surface of the pressing portion and is accommodated in the pressing portion. In use, the tip of the blade protrudes from the annular lower end surface of the pressing portion by pressing the gripping portion downward.

本発明の第1構成によれば、薄膜試料の切断円の直近の外周が押圧部の輪状の下端面で押圧されているので、薄膜試料が切断台にしっかり固定され、切断時に、刃の回転押圧力により薄膜試料が回転方向に引っ張られることがなく、短時間で容易に真円状に切断することができる。さらに、回転部が複数の刃を有し、各刃が回転円周上に均等に配置されているので、切断刃の回転押圧力が薄膜試料の切断平面に偏って加わることがなく、均等に加わり、皺や偏りが生じず、容易に真円状に切断することができる。また、複数の刃を有しているので、把持部を1回転未満の操作で薄膜試料を円形に切断することができ、短時間で容易に真円状に切断することができる。   According to the first configuration of the present invention, the thin film sample is firmly fixed to the cutting table, and the blade rotates at the time of cutting because the outer periphery immediately near the cutting circle of the thin film sample is pressed by the annular lower end surface of the pressing portion. The thin film sample is not pulled in the rotation direction by the pressing force, and can be easily cut into a perfect circle in a short time. Furthermore, since the rotating part has a plurality of blades and each blade is evenly arranged on the rotation circumference, the rotation pressing force of the cutting blade is not applied to the cutting plane of the thin film sample evenly and evenly. In addition, there is no wrinkle or bias, and it can be easily cut into a perfect circle. Moreover, since it has a some blade, a thin film sample can be cut | disconnected circularly by operation of a holding | grip part less than 1 rotation, and it can cut | disconnect in a perfect circle shape easily in a short time.

薄膜試料が真円状に切断されているので、試料ホルダの分析セット面の内径にぴったりと適合し、所定の分析セット面に撓むことなく、ぴったりと配置することができ、照射X線に対する薄膜試料の高さの変動がなくなり、安定した蛍光X線強度を測定することができ、精度のよい分析を行うことができる。押圧部の上部と前記把持部との間に弾性部材を配置している場合には、この弾性部材により把持部および回転部が上方に付勢されて、薄膜試料切断器の未使用時には、刃の先端が押圧部の輪状の下端面よりも上方に位置し押圧部に収納され、刃が押圧部の輪状の下端面より突出することがなく、使用者の指や手など身体を傷付けることがなく、安全に取り扱うことができる。本発明の薄膜試料切断器は、1枚の薄膜試料を切断するために考え出された切断器であるが、複数枚の薄膜試料を重ねて1度に切断するためにも使用することができる。   Since the thin film sample is cut into a perfect circle, it fits closely to the inner diameter of the analysis set surface of the sample holder, and can be placed closely without bending to a predetermined analysis set surface. The fluctuation of the height of the thin film sample is eliminated, stable fluorescent X-ray intensity can be measured, and accurate analysis can be performed. When an elastic member is arranged between the upper part of the pressing part and the grip part, the grip part and the rotating part are urged upward by the elastic member, and when the thin film sample cutter is not used, the blade The tip of the blade is positioned above the ring-shaped lower end surface of the pressing portion and is stored in the pressing portion, and the blade does not protrude from the ring-shaped lower end surface of the pressing portion, so that the user's finger or hand may be damaged. And can be handled safely. The thin film sample cutting device of the present invention is a cutting device conceived for cutting one thin film sample, but can also be used to cut a plurality of thin film samples at once. .

第1構成にかかる薄膜試料切断器は蛍光X線分析方法以外の分析方法でも使用することができ、例えば、原子吸光分析方法、ICP分光分析法などにおいて、第1構成にかかる薄膜試料切断器を使用して薄膜試料を切断すると、薄膜試料を一定の直径を有する真円状にサンプリングすることができ、切断された薄膜試料は厚さが同一であれば、一定の重量を有し、試料の秤量誤差を軽減することができ、精度のよい分析を行うことができる。   The thin film sample cutter according to the first configuration can be used in an analysis method other than the fluorescent X-ray analysis method. For example, in the atomic absorption analysis method, the ICP spectroscopic analysis method, the thin film sample cutter according to the first configuration is used. When used to cut a thin film sample, the thin film sample can be sampled into a perfect circle with a constant diameter, and if the cut thin film sample has the same thickness, it has a constant weight, Weighing errors can be reduced, and accurate analysis can be performed.

本発明の第2構成にかかる蛍光X線分析方法は、第1構成にかかる薄膜試料切断器によって円形に切断された薄膜試料を蛍光X線分析方法で分析する。   In the fluorescent X-ray analysis method according to the second configuration of the present invention, a thin film sample cut into a circle by the thin film sample cutter according to the first configuration is analyzed by the fluorescent X-ray analysis method.

本発明の第2構成においては、蛍光X線分析用の試料ホルダに第1構成にかかる薄膜試料切断器によって切断された薄膜試料を試料ホルダにセットし、薄膜試料がセットされた試料ホルダを蛍光X線分析装置の分析位置に載置し、測定を開始し、薄膜試料の表面に施されているコーティングなどの表面処理部分に含まれているSi、Al、Fなどの元素の付着量、表面処理部分の膜厚測定、薄膜試料に含有されている元素や薄膜そのものの膜厚測定が行われる。試料ホルダおよび蛍光X線分析装置は従来から用いられている下面型あるいは上面型のどちらを用いてもよい。また、波長分散型蛍光X線分析装置でも、エネルギー分散型蛍光X線分析装置のどちらを用いてもよい。   In the second configuration of the present invention, the thin film sample cut by the thin film sample cutter according to the first configuration is set in the sample holder in the sample holder for fluorescent X-ray analysis, and the sample holder on which the thin film sample is set is fluorescent. Placed at the analysis position of the X-ray analyzer, started measurement, the amount of adhesion of elements such as Si, Al and F contained in the surface treatment part such as coating applied to the surface of the thin film sample, surface Measurement of the film thickness of the processed part and the element contained in the thin film sample and the film thickness of the thin film itself are performed. As the sample holder and the fluorescent X-ray analysis apparatus, either a conventionally used lower surface type or upper surface type may be used. Further, either a wavelength dispersive X-ray fluorescence analyzer or an energy dispersive X-ray fluorescence analyzer may be used.

本発明の第2構成によれば、前記の第1構成にかかる薄膜試料切断器によって切断された薄膜試料を分析するので、第1構成と同様の作用効果が得られる。   According to the second configuration of the present invention, since the thin film sample cut by the thin film sample cutter according to the first configuration is analyzed, the same effect as the first configuration can be obtained.

以下、本発明の第1実施形態である蛍光X線分析用の薄膜試料を円形に切断する薄膜試料切断器について説明する。図1に示すように、押圧部2は、円筒状であり、薄膜試料を押圧する輪状の下端面22と、回転部3が貫通する上部21とを有し、上部21で把持部である取っ手41とで回転部3を支持する。円筒の外径は50〜80mmが好ましく、55〜65mmがより好ましい。輪状の下端面の内径は35〜70mmが好ましく、40〜60mmがより好ましい。例えば、円筒の外径は60mm、内径は54mmである。上部21はコイルばね43とカラーリング44の下部が貫通孔24の全周にわたってはめ込まれる輪状溝23が形成されている。例えば、押圧部2はポリエチレンやポリプロピレンなどの高分子樹脂やステンレスやアルミニウムなどの金属で形成される。   Hereinafter, a thin film sample cutter that cuts a thin film sample for fluorescent X-ray analysis into a circle according to the first embodiment of the present invention will be described. As shown in FIG. 1, the pressing portion 2 has a cylindrical shape, and has a ring-shaped lower end surface 22 that presses the thin film sample and an upper portion 21 through which the rotating portion 3 penetrates. 41 supports the rotating part 3. The outer diameter of the cylinder is preferably 50 to 80 mm, more preferably 55 to 65 mm. The inner diameter of the annular lower end surface is preferably 35 to 70 mm, more preferably 40 to 60 mm. For example, the outer diameter of the cylinder is 60 mm, and the inner diameter is 54 mm. The upper portion 21 is formed with an annular groove 23 in which the lower portions of the coil spring 43 and the collar ring 44 are fitted over the entire circumference of the through hole 24. For example, the pressing portion 2 is formed of a polymer resin such as polyethylene or polypropylene, or a metal such as stainless steel or aluminum.

回転部3は、押圧部2と同心の円柱状であり、その上部33が押圧部の貫通孔24を貫通し、その貫通部分に把持部4である取っ手41が取っ手固定ねじ42で固定されており、刃保持部30で、例えば2枚の刃34を保持しており、取っ手41を回転させることにより、軸心回りに回転する。例えば、刃34は両刃かみそり刃である。刃保持部30は刃固定部32と刃止め具35とで形成されている。例えば、刃固定部32の径は43.7mm、高さ30mmであり、回転部の上部33の径は20mm、高さ25mmである。押圧部の貫通孔24と回転部の上部33とのはめ合は通常の設計値程度でよい。例えば、回転部3はポリエチレンやポリプロピレンなどの高分子樹脂やステンレスやアルミニウムなどの金属材料で形成される。刃止め具35は、例えば、外径54mm、内径43.7mm程度の円筒の半周部分で、幅25mm、厚み5mmの板状に、形成される。   The rotating portion 3 has a cylindrical shape concentric with the pressing portion 2, and an upper portion 33 passes through the through hole 24 of the pressing portion, and a handle 41 as a grip portion 4 is fixed to the penetrating portion by a handle fixing screw 42. The blade holding unit 30 holds, for example, two blades 34 and rotates around the axis by rotating the handle 41. For example, the blade 34 is a double-edged razor blade. The blade holding part 30 is formed by a blade fixing part 32 and a blade stopper 35. For example, the diameter of the blade fixing part 32 is 43.7 mm and the height is 30 mm, and the diameter of the upper part 33 of the rotating part is 20 mm and the height is 25 mm. The fit between the through hole 24 of the pressing portion and the upper portion 33 of the rotating portion may be about a normal design value. For example, the rotating part 3 is formed of a polymer resin such as polyethylene or polypropylene, or a metal material such as stainless steel or aluminum. The blade stopper 35 is formed in a plate shape having a width of 25 mm and a thickness of 5 mm, for example, at a half circumference of a cylinder having an outer diameter of 54 mm and an inner diameter of 43.7 mm.

図2に示すように、刃固定部32と刃止め具35の間に刃であるかみそり刃34が2枚挟み込まれる。図3に示すように、かみそり刃の刃面37が右側下がりに傾斜した状態で挟み込まれ、刃止め具固定ねじ36を締めることにより刃止め具35が刃固定部32に押さえ付けられ、回転部3の底面よりかみそり刃の刃面37が所定の長さ突出した状態で固定される。図2に示すように、2枚のかみそり刃34は直径44mm(公差+0〜−0.5mm)の刃固定部32の円周上に対向して均等に配置されているので、切断される薄膜試料の直径も44mm(公差+0〜−0.5mm)の円形になる。刃面37が突出する所定の長さは、例えば1.0mm未満程度が望ましい。2枚のかみそり刃34の突出長さが1.0mm未満の同程度になるように刃止め具固定ねじ36の孔径が工夫されている。3枚以上の刃を回転円周上に均等に配置してもよい。図3に示すように、両刃かみそり刃の角を使用すると、4箇所の角を使用することができ、1枚で4回使用することができ替え刃として好ましい。刃はアートワーク用カッターや工作用カッターの替え刃を使用してもよい。   As shown in FIG. 2, two razor blades 34 that are blades are sandwiched between the blade fixing portion 32 and the blade stopper 35. As shown in FIG. 3, the blade surface 37 of the razor blade is sandwiched with the blade surface 37 inclined to the right, and the blade stopper 35 is pressed against the blade fixing portion 32 by tightening the blade stopper fixing screw 36, so that the rotating portion The blade surface 37 of the razor blade is fixed with a predetermined length protruding from the bottom surface of 3. As shown in FIG. 2, the two razor blades 34 are disposed uniformly on the circumference of the blade fixing portion 32 having a diameter of 44 mm (tolerance +0 to −0.5 mm), so that the thin film to be cut The diameter of the sample is also a circle of 44 mm (tolerance +0 to −0.5 mm). The predetermined length from which the blade surface 37 protrudes is preferably less than about 1.0 mm, for example. The hole diameter of the blade stopper fixing screw 36 is devised so that the protruding lengths of the two razor blades 34 are about the same, less than 1.0 mm. Three or more blades may be evenly arranged on the rotation circumference. As shown in FIG. 3, when the corners of a double-edged razor blade are used, four corners can be used, and one blade can be used four times, which is preferable as a replacement blade. The blade may be a replacement blade for an artwork cutter or a work cutter.

押圧部の輪状溝23と取っ手溝45との間に配置された弾性部材であるコイルばね43
により、取っ手41および回転部3が上方に付勢されて、刃34の先端が押圧部の下端面22よりも、例えば2mm程度上方に位置している。コイルばね43の位置ずれ防止のためと回転部3を下方に押し下げた時に、刃が突出し過ぎないためのストッパーとしてカラーリング44がコイルばね43の外側に配置されている。コイルばね43は通常のばね材で製作すればよく、回転部の上部33が貫通できる直径であり、例えば10mm程度の長さであればよい。カラーリング44は、コイルばね43の外形より大きく、輪状溝23と取っ手溝45とが形成する溝に配置できればよく、例えば外径30mm、内径24mm、長さ11mmである。取っ手41を下方に押し下げることによって回転部が下方に押し下げられ、取っ手41を開放することによって、コイルばね43の弾力により回転部3が上方に押し上げられる。取っ手41の上下手動操作が行い易いストローク長が望ましく、例えば1〜数mm程度になるように設計されるのが好ましい。
A coil spring 43 that is an elastic member disposed between the annular groove 23 and the handle groove 45 of the pressing portion.
As a result, the handle 41 and the rotating portion 3 are urged upward, and the tip of the blade 34 is positioned, for example, about 2 mm above the lower end surface 22 of the pressing portion. A color ring 44 is arranged outside the coil spring 43 as a stopper for preventing the blade from protruding too much when the rotating portion 3 is pushed down to prevent the position deviation of the coil spring 43. The coil spring 43 may be made of a normal spring material, and may have a diameter that allows the upper portion 33 of the rotating portion to pass through, for example, a length of about 10 mm. The color ring 44 only needs to be larger than the outer shape of the coil spring 43 and can be disposed in a groove formed by the annular groove 23 and the handle groove 45, and has an outer diameter of 30 mm, an inner diameter of 24 mm, and a length of 11 mm, for example. The rotating part is pushed downward by pushing down the handle 41, and the rotating part 3 is pushed up by the elasticity of the coil spring 43 by opening the handle 41. The stroke length that allows easy manual operation of the handle 41 is desirable, and it is preferably designed to be, for example, about 1 to several mm.

薄膜試料切断器1の操作方法と動作について説明する。薄膜試料を切断するための切断台、例えば市販の工作マットやアートワークのカティング台を準備し、この切断台に分析対象の薄膜試料の測定面を上方にし、所望の測定個所を汚染させないようにして切断台に載置する。薄膜試料切断器1の押圧部2の円筒側面を一方の手で把持し、薄膜試料の所望の測定個所と薄膜試料切断器1の中心がほぼ一致するように、輪状の下端面22を薄膜試料に接触させ、上方から押圧部2を手で押さえ、薄膜試料を固定する。この操作により所望の測定個所の直近周辺が輪状の下端面22で固定される。薄膜試料を輪状の下端面22で固定した状態で、押圧部2を押えていない他方の手で取っ手41を下方に下げ、図1に示されている回転矢印のように、上から見て時計回りの方向に取っ手41を回転させる。この取っ手41の回転により、回転部3に保持されている複数の刃34が回転し、薄膜試料を円形に切断される。取っ手41から手を離し、薄膜試料切断器1を上方に持ち上げると、薄膜試料の所望の測定個所が円形に切断された円形薄膜試料が作製されている。   The operation method and operation of the thin film sample cutter 1 will be described. Prepare a cutting table for cutting a thin film sample, for example, a commercially available work mat or a cutting table for artwork, and place the measuring surface of the thin film sample to be analyzed on the cutting table so as not to contaminate the desired measurement location. And place it on the cutting table. The cylindrical side surface of the pressing portion 2 of the thin film sample cutter 1 is grasped with one hand, and the annular lower end surface 22 is placed on the thin film sample so that the desired measurement location of the thin film sample and the center of the thin film sample cutter 1 are substantially aligned. The pressing part 2 is pressed by hand from above and the thin film sample is fixed. By this operation, the immediate vicinity of the desired measurement location is fixed by the annular lower end surface 22. With the thin film sample fixed at the annular lower end surface 22, the handle 41 is lowered downward with the other hand not pressing the pressing portion 2, and the watch is viewed from above as indicated by the rotating arrow shown in FIG. The handle 41 is rotated in the surrounding direction. By rotating the handle 41, the plurality of blades 34 held by the rotating unit 3 are rotated, and the thin film sample is cut into a circular shape. When the hand is released from the handle 41 and the thin film sample cutter 1 is lifted upward, a circular thin film sample in which a desired measurement location of the thin film sample is cut into a circular shape is produced.

なお、複数の刃を円周上に均等に配置しているので、1回転させなくても薄膜試料を円形に切断できる。図3では、刃面37が右側下がりに傾斜するように配置したが、左側下がりに傾斜するように配置した場合は、取っ手41を図1に示されている回転矢印と逆の方向で、上から見て反時計回りの方向に回転させればよい。操作者が操作し易い方向に刃を配置すればよい。   Since the plurality of blades are evenly arranged on the circumference, the thin film sample can be cut into a circle without rotating once. In FIG. 3, the blade surface 37 is disposed so as to be inclined downward to the right. However, when the blade surface 37 is disposed to be inclined downward to the left, the handle 41 is placed in the direction opposite to the rotation arrow shown in FIG. Rotate counterclockwise as viewed from the top. What is necessary is just to arrange | position a blade in the direction where an operator is easy to operate.

次に、前記した第1実施形態の薄膜試料切断器1によって切断された薄膜試料を分析する本発明の第2実施形態である蛍光X線分析方法について説明する。図4に示す蛍光X線分析用の下面型の試料ホルダ400に第1実施形態の薄膜試料切断器1によって切断されたポリエステルシートSの全面が試料ホルダの分析セット面402に密着するようにセットする。ポリエステルシートSがセットされた試料ホルダ400を下面型の蛍光X線分析装置の分析位置に載置し、測定を開始し、ポリエステルシートSの表面に施されているコーティングに含まれているシリコン(Si)の付着量の測定を行う。   Next, a fluorescent X-ray analysis method that is a second embodiment of the present invention for analyzing a thin film sample cut by the thin film sample cutter 1 of the first embodiment will be described. The bottom surface type sample holder 400 for fluorescent X-ray analysis shown in FIG. 4 is set so that the entire surface of the polyester sheet S cut by the thin film sample cutter 1 of the first embodiment is in close contact with the analysis set surface 402 of the sample holder. To do. The sample holder 400 on which the polyester sheet S is set is placed at the analysis position of the bottom surface type fluorescent X-ray analyzer, the measurement is started, and silicon contained in the coating applied to the surface of the polyester sheet S ( The adhesion amount of Si) is measured.

試料ホルダ400の内径は、例えば44mm+0.数mm(公差)で製作されている。薄膜試料切断器1によって切断されたポリエステルシートSは、直径44mm(公差0〜−0.5mm)であり、真円状に切断されているので、図4に示すように分析セット面402に密着してセットすることができる。   The inner diameter of the sample holder 400 is 44 mm + 0. It is manufactured with several mm (tolerance). The polyester sheet S cut by the thin-film sample cutter 1 has a diameter of 44 mm (tolerance 0 to −0.5 mm) and is cut into a perfect circle, so that it closely contacts the analysis set surface 402 as shown in FIG. Can be set.

はさみで円形に切り取ったポリエステルシートSがいびつな円形になり、分析セット面402にぴったりと密着して配置することができず、図7に示すようにポリエステルシートSの一部の面が1mm程度浮いている状態で測定した蛍光X線強度Bと、薄膜試料切断器1によって切断されたポリエステルシートSが図4に示すように分析セット面402に密着してセットされた状態で測定した蛍光X線強度Aとの比較データを図5に示す。図5から分かるように、ポリエステルシートSが浮いていると、分析セット面402に密着している状態に比べて、ポリエステルシートSからの蛍光X線強度が小さくなっている。したがって、ポリエステルシートSの浮いている度合によって蛍光X線強度が変動し、分析精度が低下する。   The polyester sheet S cut into a circle with scissors becomes a distorted circle and cannot be placed in close contact with the analysis set surface 402. As shown in FIG. 7, a part of the polyester sheet S has a surface of about 1 mm. Fluorescence X-ray intensity B measured in the floating state and fluorescence X measured in a state where the polyester sheet S cut by the thin film sample cutter 1 is set in close contact with the analysis set surface 402 as shown in FIG. Comparison data with the line intensity A is shown in FIG. As can be seen from FIG. 5, when the polyester sheet S is floating, the fluorescent X-ray intensity from the polyester sheet S is smaller than that in the state of being in close contact with the analysis set surface 402. Therefore, the fluorescent X-ray intensity varies depending on the degree to which the polyester sheet S is floating, and the analysis accuracy is lowered.

それに比べ、薄膜試料切断器1によって切断されたポリエステルシートSは分析セット面402に密着してセットされるので、ポリエステルシートSからの蛍光X線強度を安定して測定することができ、精度のよい分析を行うことができる。   In comparison, since the polyester sheet S cut by the thin film sample cutter 1 is set in close contact with the analysis set surface 402, the fluorescent X-ray intensity from the polyester sheet S can be stably measured, and the accuracy is improved. A good analysis can be done.

図7は、ポリエステルシートSの一部の面が浮いている距離は1mm程度であるが、浮いている状態を分かり易く示すために浮いている距離を大きく描いている。   In FIG. 7, the distance that a part of the surface of the polyester sheet S is floating is about 1 mm, but the floating distance is drawn large for easy understanding of the floating state.

薄膜試料切断器1によって切断されたポリエステルシートSを下面型の試料ホルダ400にセットした場合について上述したが、上面型の試料ホルダにセットして測定した場合も同様の作用効果がある。   The case where the polyester sheet S cut by the thin film sample cutter 1 is set in the lower surface type sample holder 400 has been described above. However, the same effect is obtained when the polyester sheet S is set in the upper surface type sample holder and measured.

ポリエステルシートSを測定した蛍光X線分析装置の測定条件を表1に、作成した検量線を図6に、分析結果を表2に示している。表2の分析結果から分かるように分析値と標準値と誤差が少なく、精度のよい良好な分析結果が得られている。   Table 1 shows the measurement conditions of the fluorescent X-ray analyzer for measuring the polyester sheet S, FIG. 6 shows the prepared calibration curve, and Table 2 shows the analysis results. As can be seen from the analysis results in Table 2, there are few errors in analysis values, standard values, and good analysis results with good accuracy.

Figure 2008039717
Figure 2008039717

Figure 2008039717
Figure 2008039717

本発明の第1実施形態である薄膜試料切断器の縦断面図である。It is a longitudinal cross-sectional view of the thin film sample cutting device which is 1st Embodiment of this invention. 同切断器の下面図である。It is a bottom view of the cutter. 同切断器のかみそり刃の配置図である。It is a layout view of the razor blade of the cutter. 同切断器で切断された薄膜試料Sが下面型の試料ホルダにセットされている縦断面図である。It is the longitudinal cross-sectional view by which the thin film sample S cut | disconnected with the cutter is set to the lower surface type sample holder. 薄膜試料Sが試料ホルダに密着してセットされた状態と薄膜試料Sが浮いている状態の蛍光X線強度の比較図である。It is a comparison figure of the fluorescent X-ray intensity of the state where the thin film sample S was set in close contact with the sample holder and the state where the thin film sample S was floating. 第2実施形態の分析方法で作成した検量線図である。It is a calibration curve created by the analysis method of the second embodiment. 薄膜試料Sが浮いている状態でセットされた試料ホルダの縦断面図である。It is a longitudinal cross-sectional view of the sample holder set in the state where the thin film sample S is floating.

符号の説明Explanation of symbols

1 薄膜試料切断器
2 押圧部
3 回転部
21 押圧部の上部
22 輪状の下端面
34 刃
41 把持部(取っ手)
43 弾性部材(コイルばね)
S 薄膜試料(ポリエステルシート)
DESCRIPTION OF SYMBOLS 1 Thin film sample cutter 2 Press part 3 Rotating part 21 Upper part 22 of press part Ring-shaped lower end surface 34 Blade 41 Grasping part (handle)
43 Elastic member (coil spring)
S thin film sample (polyester sheet)

Claims (3)

分析用の薄膜試料を円形に切断するための薄膜試料切断器であって、
円筒状で、前記薄膜試料に押圧される輪状の下端面を有する押圧部と、
その押圧部と同心の円柱状または円筒状で軸心回りに回転自在に前記押圧部に収納され、下方に突出する複数の刃を周方向に均等に有している回転部と、
前記押圧部の上部を貫通して突出する前記回転部の上部に固定される把持部とを備えた薄膜試料切断器。
A thin film sample cutter for cutting a thin film sample for analysis into a circle,
A pressing portion having a cylindrical lower end surface that is pressed against the thin film sample,
A rotating part having a plurality of blades that are concentric with the pressing part and are accommodated in the pressing part so as to be rotatable about an axis in a columnar or cylindrical shape, and projecting downward in the circumferential direction;
A thin film sample cutter comprising: a gripping portion fixed to an upper portion of the rotating portion that projects through the upper portion of the pressing portion.
請求項1において、
前記押圧部の上部と前記把持部との間に配置された弾性部材により、前記把持部および回転部が上方に付勢されて、前記刃の先端が前記押圧部の下端面よりも上方に位置している薄膜試料切断器。
In claim 1,
By the elastic member arranged between the upper part of the pressing part and the gripping part, the gripping part and the rotating part are biased upward, and the tip of the blade is positioned above the lower end surface of the pressing part. Thin film sample cutter.
請求項1または2に記載の薄膜試料切断器によって切断された薄膜試料を分析する蛍光X線分析方法。   A fluorescent X-ray analysis method for analyzing a thin film sample cut by the thin film sample cutter according to claim 1.
JP2006217819A 2006-08-10 2006-08-10 Thin-film sample cutter for analysis and fluorescent x-ray analyzing method using it Pending JP2008039717A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006217819A JP2008039717A (en) 2006-08-10 2006-08-10 Thin-film sample cutter for analysis and fluorescent x-ray analyzing method using it

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006217819A JP2008039717A (en) 2006-08-10 2006-08-10 Thin-film sample cutter for analysis and fluorescent x-ray analyzing method using it

Publications (1)

Publication Number Publication Date
JP2008039717A true JP2008039717A (en) 2008-02-21

Family

ID=39174878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006217819A Pending JP2008039717A (en) 2006-08-10 2006-08-10 Thin-film sample cutter for analysis and fluorescent x-ray analyzing method using it

Country Status (1)

Country Link
JP (1) JP2008039717A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014202620A (en) * 2013-04-05 2014-10-27 学校法人福岡大学 Film sample for surface analysis and film sample sampling jig, and sampling method
CN115494100A (en) * 2022-11-17 2022-12-20 济南弗莱德科技有限公司 Online oil analyzer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014202620A (en) * 2013-04-05 2014-10-27 学校法人福岡大学 Film sample for surface analysis and film sample sampling jig, and sampling method
CN115494100A (en) * 2022-11-17 2022-12-20 济南弗莱德科技有限公司 Online oil analyzer
CN115494100B (en) * 2022-11-17 2023-03-14 济南弗莱德科技有限公司 Online oil analyzer

Similar Documents

Publication Publication Date Title
US8631731B2 (en) Safety holder for a microtome knife
JP2008039717A (en) Thin-film sample cutter for analysis and fluorescent x-ray analyzing method using it
JP7165927B2 (en) Positioning jig and processing equipment
US7685719B2 (en) Circle cutting device
CN107015027B (en) Sample positioning and fixing method and device of scanning probe microscope
CN211762657U (en) Manual cutting device for wafer and glass sheet
CN104764657A (en) Center-cracked Brazilian discs I and II and combined fracture auxiliary experimental apparatus
CN206780169U (en) Metallographic specimen clamp
US4559712A (en) Cutter tip measuring device
US7703368B2 (en) Knife holder for a microtome having a vibrating knife
US9533427B1 (en) Corrugated sample cutter
CN211485108U (en) Cartilage slicer for plastic surgery
CN109187153B (en) Compact type small punch rod sample preparation tool
JP2009122017A (en) Fixture for raman spectroscopic analysis
JP2011064476A (en) Jig for parallel-feeding of samples
CN201438155U (en) Parallel sample cutter
CN215702237U (en) Device for manufacturing asbestos gasket
CN217960511U (en) Auricular cartilage thinning device
CN220136686U (en) Film sampling device
JP2009220183A (en) Cutting tool and method of forming cut line for use in paint film adhesion test
CN216578227U (en) Cutter for embedding experiment
CN210981059U (en) Detection device
JP7246090B2 (en) Tools for transmission electron microscope observation samples
CN209132002U (en) A kind of lithium battery coating machine sampler
KR20210058653A (en) Apparatus for cutting for surface

Legal Events

Date Code Title Description
A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20090113