JP2008005089A - Contour vibrating piece, contour vibrator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To achieve a contour vibrating piece in which degradation of oscillation characteristics due to supporting or securing of an oscillator is reduced and impact resistance is enhanced. <P>SOLUTION: The contour vibrating piece 10 comprises a quadratic prism oscillator 20 made of an isotropic material, a first piezoelectric thin film 30 and a second piezoelectric thin film 31 formed, respectively, on the opposite side faces 22 and 23 of the oscillator 20, and two exciting electrodes 41 and 42 opposing planarly in the side faces 22 and 23 and inputting an excitation signal to the first piezoelectric thin film 30 and the second piezoelectric thin film 31 wherein the exciting electrodes 41, 42 and the first and second piezoelectric thin films 30, 31 have an intersection region L of a predetermined area in the center of the oscillator 20 in the plan view, and the longitudinal central portion of the oscillator 20 performs contour vibration in an oscillation mode corresponding to an input excitation signal of a specific frequency. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a contour vibrating piece and a contour resonator. Specifically, the present invention relates to a contour vibrating piece in which a central portion of a columnar vibrating body performs contour vibration, and a contour vibrator on which the contour vibrating piece is mounted.

  As a high-frequency band reference signal source used in electronic devices such as portable devices, information communication devices, and measuring devices, DT cut resonators, GT cut crystal resonators, and lame mode resonators are well known.

  For example, in a contour sliding quartz crystal unit in which a vibrating part and a supporting part are integrally formed by an etching method, the supporting part is connected via a bent part at the center of opposite sides of the vibrating part, and the vibrating part There is known a so-called contour slip quartz crystal resonator provided at both ends (see, for example, Patent Document 1).

  Further, the vibration unit, the connection unit, and the support unit are configured, and at least a pair of electrodes having different polarities are provided on the upper and lower surfaces of the vibration unit, and the connection unit and the support unit having the vibration unit and the bending unit are provided. There is also known a contoured quartz crystal resonator that is integrally formed by a particle method or an etching method (for example, see Patent Document 2).

  In addition, excitation electrodes are formed on the front and back surfaces, and a rectangular vibration body main body having a vibration node at the end, a connection portion extending outward from the node, and the vibration main body is supported via the connection portion. There is also known a lame mode crystal resonator that is integrally formed with a terminal electrode portion (supporting portion) that extends and the connection portion extends from the node toward the terminal electrode portion (for example, Patent Document 3). reference).

  Further, in the contour piezoelectric crystal vibrator configured to include the vibration part, the connection part, and the support part, and electrodes are disposed on the upper surface and the lower surface of the vibration part, a frame is formed so as to surround the vibration part, There is also known a contoured piezoelectric crystal resonator in which the mount portion and the frame are bonded together and at the same time a gap having a step is provided between the vibrating portion and the frame (see, for example, Patent Document 4).

JP-A-1-241210 (page 3, FIGS. 1 and 2) Japanese Patent Laying-Open No. 2005-94727 (5th page, FIG. 1) JP 2004-242256 A (page 4, FIGS. 1 and 2) JP 2003-101362 A (page 3, FIG. 1)

  In Patent Document 1 and Patent Document 2 described above, the support portion is connected to the node portion where the vibration displacement becomes zero in the contour portion of the vibration portion. However, since it is necessary to have an area (cross-sectional area) necessary for securing the structural strength of the connection portion, it has a connection region in a range other than the nodal point, and inhibits vibration (deterioration of vibration characteristics). It has a problem of end.

  As a method for solving such a problem, Patent Document 2 proposes extending the connecting portion into a spring shape. Further, Patent Document 3 proposes that the connecting portion extends in a ring shape to reduce the factor of inhibiting vibration. According to Patent Literature 2 and Patent Literature 3 as described above, the connection portion and the support portion are larger than the area of the vibration portion, which is a disadvantageous structure for downsizing.

  Further, according to Patent Document 4, a frame is formed so as to surround the vibration part, and the mount part and the frame of the support part are bonded together, and at the same time, a gap having a step is provided between the vibration part and the frame. There is a problem that it becomes thick because it floats from the frame. Further, the area is increased by the amount of the frame surrounding the vibration part.

  The object of the present invention is to solve the above-mentioned problems, and to realize a contour resonator element and a contour vibrator that reduce the deterioration of vibration characteristics accompanying support and fixation of a vibrating body and improve impact resistance. It is.

  The contour resonator element according to the invention includes a rectangular columnar vibrating body made of an isotropic material, a piezoelectric thin film formed on a side surface of the vibrating body, an excitation signal input to the piezoelectric thin film, and the piezoelectric thin film interposed therebetween. Two excitation electrodes opposed to each other in a plane, and one excitation electrode and the other excitation electrode of the two excitation electrodes are in a predetermined crossing region in the longitudinal center of the vibrating body in a plan view. And the center part in the longitudinal direction of the vibrating body vibrates in a contour mode in a vibration mode corresponding to an excitation signal having a specific frequency input.

  According to the present invention, the vibration energy is concentrated in the intersecting region of the excitation electrodes provided in the longitudinal center portion of the vibrating body, whereby contour vibration is excited in the longitudinal center portion of the vibrating body. Accordingly, since both end face portions of the vibrating body hardly vibrate, there is no influence on vibration by supporting the both end face portions of the vibrating body, and deterioration of vibration characteristics can be reduced.

  Further, as will be described in detail in an embodiment described later, this contour vibration has a specific vibration mode corresponding to an input excitation signal having a specific frequency, and can obtain an accurate and stable vibration characteristic. it can.

  The piezoelectric thin film includes a first piezoelectric thin film and a second piezoelectric thin film provided on each of two opposing side surfaces of the vibrating body, and the first piezoelectric thin film and the second piezoelectric thin film are at least in the intersecting region. Preferably, the one excitation electrode is provided on the surface of the first piezoelectric thin film, and the other excitation electrode is provided on the surface of the second piezoelectric thin film.

  In this way, since the piezoelectric thin film that excites the vibrating body is provided on both of the opposing side surfaces of the vibrating body, the vibration energy is efficiently concentrated at the center in the longitudinal direction of the vibrating body, thereby increasing the vibration efficiency. be able to.

  The piezoelectric thin film is disposed on one side surface of the two opposing side surfaces of the vibrator and at least in the range of the intersecting region, and the one excitation electrode is provided on the surface of the piezoelectric thin film. In addition, it is preferable that the other excitation electrode is provided on the other side surface of the vibrating body.

  In this way, even if the piezoelectric thin film is provided on one side surface of the vibrating body, the vibration energy is more efficiently concentrated in the central portion of the vibrating body and the contour vibration is excited in the central portion of the vibrating body. be able to.

  Further, the one excitation electrode is provided on one side surface of the two opposing side surfaces of the vibrator, and the piezoelectric thin film is provided on the surface of the one excitation electrode at least in the range of the intersecting region. In both cases, it is preferable that the other excitation electrode is provided on the surface of the piezoelectric thin film.

  With such a structure, as in the structure according to the invention described above, contour vibration can be excited at the center of the vibrating body, and one excitation electrode, piezoelectric thin film, and the other are excited on one side of the vibrating body. Since the excitation thin film is laminated, it has an effect that it is easy to manufacture.

  Moreover, it is preferable that the vibrating body has a contour vibration region at the center portion in the longitudinal direction and a non-vibration region at the end portion in the longitudinal direction.

In the present invention, the contour vibration is excited at the longitudinal center portion of the vibrating body and does not vibrate at the longitudinal end surface portion. Although details will be described in the embodiment, the vibration body can be fixed at the end surface in the longitudinal direction or can be fixed without affecting the contour vibration by being connected to the external connection electrode.
Moreover, impact resistance can be improved by fixing a vibrating body in the both end surface part of a square columnar vibrating body.

  Furthermore, it is desirable that the one excitation electrode and the other excitation electrode extend to the longitudinal end surfaces of the vibrator.

  As described above, the longitudinal end face of the vibrating body is a non-vibrating region that does not vibrate, and each excitation electrode extends on both end faces in the longitudinal direction. Connection to the connection electrode can be performed.

  The contour vibrator of the present invention includes a columnar vibrator made of an isotropic material, a piezoelectric thin film formed on a side surface of the vibrator, and at least two excitation electrodes for inputting an excitation signal to the piezoelectric thin film. And one excitation electrode and the other excitation electrode of the pair of excitation electrodes are crossed with a predetermined crossing area at a central portion of the vibrator in plan view, and In the state where the contour vibration piece that contours vibrates in the vibration mode corresponding to the excitation signal of a specific frequency inputted in the longitudinal center portion, the contour vibration region of the contour vibration piece is separated from the base of the package, It is fixed to the base at the longitudinal direction end of the vibrating body.

  According to the present invention, the contour is fixed to the base at the longitudinal end face where no contour vibration is generated, and the contour vibration region is floated from the base, so that the contour is not affected. It is possible to provide a contour resonator that is small and has good vibration characteristics by fixing the resonator element in the package.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 and 2 show simulation results of the contour vibration piece and the contour vibration according to the first embodiment, FIG. 3 shows the second embodiment, FIG. 4 shows the contour vibration piece according to the third embodiment, and FIG. 5 shows the contour vibration according to the present invention. Showing a child. Note that the embodiments described below are preferred specific examples of the present invention, and thus various technically preferable limitations are given. However, the scope of the present invention is particularly limited in the following description. Unless otherwise stated, the present invention is not limited to these forms. The drawings referred to in the following description are schematic views in which the vertical and horizontal scales of members or parts are different from actual ones for convenience of illustration.
(Embodiment 1)

  FIG. 1 is a perspective view showing a contour vibrating piece according to Embodiment 1 of the present invention. In FIG. 1, the contour vibrating piece 10 is configured by forming a first piezoelectric thin film 30, a second piezoelectric thin film 31, and excitation electrodes 41 and 42 on opposite side surfaces 22 and 23 of a rectangular columnar vibrating body 20. ing.

The vibrating body 20 is a columnar member whose cross-sectional shape is a quadrangle (for example, including a square or a rectangle), and is made of a material having an isotropic vibration characteristic. Typical examples of the isotropic material include metals such as SiO ₂ , Si, glass, Al, and Cu. In this embodiment, a case where a non-conductive material is used is illustrated. In the present embodiment, as an example, the vibrating body 20 has a cross-sectional shape of a square having a side of 500 μm and a length of 5000 μm. A first piezoelectric thin film 30 and a second piezoelectric thin film 31 are formed on the side surface of the vibrating body 20 in the longitudinal direction (hereinafter sometimes simply referred to as the central portion).

  The first piezoelectric thin film 30 is formed on one side surface 22 (hereinafter, sometimes simply referred to as the side surface 22) of the vibrating body 20. The second piezoelectric thin film 31 is formed on the other side surface 23 (hereinafter, simply referred to as the side surface 23) that faces the side surface 22. The material of the first piezoelectric thin film 30 and the second piezoelectric thin film 31 is not particularly limited as long as it is a piezoelectric material, but PZT (registered trademark), AlN, ZnO, or the like can be employed.

  The first piezoelectric thin film 30 and the second piezoelectric thin film 31 are disposed so as to intersect with each other in plan view at the center of the vibrating body 20. In the present embodiment, the intersecting region L between the first piezoelectric thin film 30 and the second piezoelectric thin film 31 is set to 1/3 of the entire length of the vibrating body 20. Moreover, it is preferable that the 1st piezoelectric thin film 30 and the 2nd piezoelectric thin film 31 are formed with the same material and the same thickness.

  In FIG. 1, the first piezoelectric thin film 30 is formed in the range from the intersecting region L to one end in the outer direction, and the second piezoelectric thin film 31 is formed in the range from the intersecting region L to the other end in the outer direction. However, it may be formed only in the range of the intersecting region L. On the surfaces of the first piezoelectric thin film 30 and the second piezoelectric thin film 31, one excitation electrode 41 (hereinafter simply referred to as the excitation electrode 41) and the other excitation electrode 42 (hereinafter simply referred to as the excitation electrode 42). Is formed.

  The excitation electrode 41 is formed on the surface of the first piezoelectric thin film 30 and extends to the end face 21 of the vibrating body 20. On the other hand, the excitation electrode 42 is formed on the surface of the second piezoelectric thin film 31 and extends to the end face 24 of the vibrating body 20. The electrode extending to the end face 21 is referred to as an extraction electrode 41a, and the electrode extending to the end face 24 is referred to as an extraction electrode 42a.

Subsequently, the result of the vibration simulation of the contour vibrating piece 10 according to the present embodiment will be described. Here, the result of analyzing the vibration mode by the finite element method for the contour vibrating piece 10 having the shape shown in FIG. 1 is shown.
FIG. 2 is a perspective view showing a simulation result of the vibrating body 20. In the present embodiment, when the frequency of the excitation signal input to the first piezoelectric thin film 30 and the second piezoelectric thin film 31 is 12.3 MHz, the vibrating body 20 resonates and the contour vibration as shown in FIG. 2 is excited. . At this time, the vibration energy concentrates on the central portion V1 of the vibrating body 20 and has a maximum amplitude. As shown in FIG. 2, the vibration mode of the contour vibration according to the present embodiment vibrates so that opposing ridge lines of the vibrating body 20 expand and contract.

  The intersection region L (see FIG. 1) of the first piezoelectric thin film 30, the second piezoelectric thin film 31, or the excitation electrodes 41 and 42 is the main contour vibration region. Vibration nodes S1 and S2 appear at both ends of the intersection region L. The contour vibration region exists also from the nodes S1 and S2 to the end of the vibrating body 20, but the vibration is attenuated to reach both end portions L1 and L2 regions of the vibrating body 20, and the end portions L1 and L2 and the end faces 21 and 24 are reduced. Is a non-vibrating region that does not vibrate. Therefore, even if the vibrating body 20 is fixed in this non-vibration region (see also FIG. 5), the contour vibration region at the center is not affected.

Therefore, according to the first embodiment described above, in the intersecting region L of the excitation electrodes 41 and 42 provided in the longitudinal center portion of the vibrating body 20 (also the intersecting region of the first piezoelectric thin film 30 and the second piezoelectric thin film 31). Concentration of vibration energy excites contour vibration at the longitudinal center of the vibrating body 20. Accordingly, since the non-vibration region including the end portions L1 and L2 and the end faces 21 and 24 on both sides of the vibrating body 20 hardly vibrates, the contour vibration by supporting and fixing the non-vibrating region of the vibrating body 20 described above is prevented. There is no influence, and deterioration of vibration characteristics can be reduced.
The contour vibration has a vibration mode corresponding to an excitation signal having a specific frequency that is input, and an accurate and stable vibration characteristic can be obtained.

In addition, since the first piezoelectric thin film 30 and the second piezoelectric thin film 31 are provided on the two opposing side surfaces 22 and 23 of the vibrating body 20, vibration energy is more efficiently concentrated in the center of the vibrating body 20. , Vibration efficiency can be increased.
Moreover, impact resistance can be improved by fixing the vibrating body 20 at both ends.

Furthermore, since the excitation electrode 41 and the excitation electrode 42 are respectively extended to the end surfaces 21 and 24 of the vibrating body 20, it connects with an external connection electrode in the both end surfaces which do not affect a contour vibration. Can do.
(Embodiment 2)

Next, the contour vibrating piece according to the second embodiment of the present invention will be described with reference to the drawings. The second embodiment is characterized in that the configurations of the piezoelectric thin film and the excitation electrode are different from those of the first embodiment. The same functional parts as those in the first embodiment will be described with the same reference numerals.
FIG. 3 is a perspective view showing a contour vibrating piece according to the second embodiment. In FIG. 3, the contour vibrating piece 10 is configured such that a piezoelectric thin film 30 is formed on a side surface 22 of a rectangular columnar vibrating body 20, and an excitation electrode 41 is formed on the surface of the piezoelectric thin film 30. On the other hand, an excitation electrode 42 is formed on the side surface 23 facing the side surface 22.

  The piezoelectric thin film 30 is formed in the range from the vicinity of the central portion of the side surface 22 of the vibrating body 20 to the end face 21, and the excitation electrode 41 formed on the surface of the piezoelectric thin film 30 extends to the end face 21 of the vibrating body 20. Yes. On the other hand, the excitation electrode 42 extends from the surface of the side surface 23 of the vibrating body 20 to the end surface 24 of the vibrating body 20. The electrode extending to the end face 21 is referred to as an extraction electrode 41a, and the electrode extending to the end face 24 is referred to as an extraction electrode 42a.

  The piezoelectric thin film 30 and the excitation electrode 41 are stacked while having the same planar shape on the surface of the side surface 22 of the vibrating body 20. The excitation electrode 41 (piezoelectric thin film 30) is disposed so as to intersect the excitation electrode 42 and the center of the vibrating body 20 in plan view, and an intersection region L is formed. The intersecting region L is set to 1/3 of the entire length of the vibrating body 20 at the center.

  In FIG. 3, the piezoelectric thin film 30 is formed in the range from the intersecting region L to the end surface 21, but may be formed only in the range of the intersecting region L.

  It has been confirmed by simulation that the contour vibrating piece 10 configured as in the above-described embodiment is excited by the contour vibration having the vibration mode (see FIG. 2) shown in the first embodiment.

Therefore, according to the second embodiment described above, even if the piezoelectric thin film 30 is provided only on one side surface 22 of the vibrating body 20, the vibration energy is concentrated at the center of the vibrating body 20, and Contour vibration can be excited at the center.
Further, since the piezoelectric thin film is formed only on one side surface 22, the manufacturing process can be simplified as compared with the first embodiment described above (see FIG. 1).
(Embodiment 3)

Next, a contour vibrating piece according to Embodiment 3 of the present invention will be described with reference to the drawings. Embodiment 3 is characterized in that the piezoelectric thin film and the excitation electrode are formed only on one side surface. The same mechanism parts as those of the second embodiment will be described with the same reference numerals.
FIG. 4 is a perspective view showing a contour vibrating piece according to the third embodiment. In FIG. 4, the contour vibrating piece 10 is configured by forming the excitation electrode 41 on the side surface 23 of the rectangular columnar vibrator 20, the piezoelectric thin film 30 on the surface of the excitation electrode 41, and the excitation electrode 42 on the surface of the piezoelectric thin film 30. .

  The excitation electrode 41 is formed on the side surface 23 of the vibrating body 20 from the vicinity of the center to the end surface 21. The piezoelectric thin film 30 is formed on the surface of the excitation electrode 41 from the vicinity of the center to the end face 24. That is, the piezoelectric thin film 30 is formed over the surface of the excitation electrode 41 and the surface of the side surface 23 of the vibrating body 20. An excitation electrode 42 is formed on the surface of the piezoelectric thin film 30.

  The excitation electrode 41 extends to the end face 21 of the vibrating body 20, and the excitation electrode 42 extends to the end face 24. The electrodes extending on the end faces 21 and 24 are extraction electrodes 41a and 42a, respectively.

  The piezoelectric thin film 30 and the excitation electrode 42 are stacked while having the same plane shape on the surface of the side surface 23 of the vibrating body 20, and the excitation electrode 41 includes the excitation electrode 42 (piezoelectric thin film 30) and the central portion of the vibrating body 20. The crossing region L is formed so as to intersect with each other in plan view. The intersecting region L is set to 1/3 of the entire length of the vibrating body 20 at the center.

In FIG. 4, the piezoelectric thin film 30 is formed in the range from the intersecting region L to the end face 24, but may be formed only in the range of the intersecting region L.
Alternatively, the excitation electrode 41 may be formed over the entire side surface 23 of the vibrating body 20 and the piezoelectric thin film 30 may be disposed in a range corresponding to the intersecting region L. In this case, an insulating layer may be formed between the excitation electrode 41 and the excitation electrode 42, or the excitation electrode 41 and the excitation electrode 42 may be formed so as to be planarly separated in a region where the piezoelectric thin film 30 does not exist.

  It was confirmed by simulation that the contour vibrating piece 10 configured as in the above-described embodiment excites the contour vibration having the vibration mode (see FIG. 2) shown in the first embodiment.

Therefore, according to the third embodiment described above, the excitation electrode 41, the piezoelectric thin film 30, and the excitation electrode 42 are laminated on one side surface 23 of the vibrating body 20, and therefore, these may be formed sequentially from one direction. It has the effect of being easy to manufacture.
Further, like the structure according to the second embodiment described above, contour vibration can be excited at the center of the vibrating body.
(Contour vibrator)

Next, the contour resonator in which the contour resonator element according to the first to third embodiments is packaged will be described with reference to the drawings.
FIG. 5 is a cross-sectional view schematically showing the structure of the contour vibrator. In FIG. 5, the contour vibrator 1 is configured by housing the contour vibrating piece 10 in a package including a base 50 and a lid body 60. The contour vibrating piece 10 can be applied to all of the components described in the first to third embodiments. In FIG. 5, the contour vibrating piece 10 shown in the first embodiment (see FIG. 1). An example will be described.

  The contour vibrating piece 10 is mounted in a space formed by the base 50 and the lid body 60. Concave portions 51 are formed in the inner surface of the base 50, and both end portions of the contour vibrating piece 10 are fixed to both end portions of the concave portion 51. The range in which the vibrating body 20 contacts the base 50 is within the range of the end portions L1 and L2 as non-vibrating regions.

  Electrically independent connection electrodes 81 and 82 are formed on the surface of the base 50. The connection electrode 81 is connected to the external connection electrode 83 formed on the side surface of the base 50, and the connection electrode 82 is connected to the external connection electrode 84 formed on the other side surface of the base 50.

  The lead electrodes 41 a and 42 a provided on the end surfaces 21 and 24 of the vibrating body 20 are respectively connected to the connection electrodes 81 and 82 by the conductive adhesive 70, and the contour vibrating piece 10 is fixed to the base 50. The The contour vibration region (see FIG. 2) of the contour vibrating piece 10 is floated by the recess 51 of the base 50, and does not affect the contour vibration even if the contour vibrating piece is fixed to the base 50.

  Therefore, the above-described contour vibrator 1 according to the present invention is fixed to the base 50 in the non-vibration region at the end portion in the longitudinal direction where no contour vibration is generated, and the contour vibration region is floated from the base 50. For this reason, the contour resonator element can be fixed in the package without affecting the vibration characteristics, and a small contour oscillator having good vibration characteristics can be provided.

  The fixing structure shown in FIG. 5 has a structure in which the side surface 23 side of the vibrating body 20 is placed on the base 50, but the concave portion 51 is sized to allow the contour vibrating piece 10 to be inserted, and the side surface 23 is a concave portion. It is possible to adopt a structure in which the contour vibrating piece 10 is inserted into the recess 51 so as not to contact the bottom surface of the 51 and the lead electrodes 41 a and 42 a and the connection electrodes 81 and 82 are fixed using the conductive adhesive 70. it can.

In this way, the contour vibrating piece 10 is fixed to the base 50 at the end surfaces 21 and 24 of the vibrating body 20, and the end surfaces 21 and 24 are the regions that do not vibrate most. Can be further suppressed.
Further, the contour vibrator 1 can be further reduced in thickness.

It should be noted that the present invention is not limited to the above-described embodiment, but includes modifications and improvements as long as the object of the present invention can be achieved.
For example, in Embodiment 1 to Embodiment 3 described above, the non-conductive material is exemplified as the material of the vibrating body 20, but a conductive material such as a metal can be used.

  In the configuration of the contour vibrating piece as in the first embodiment (see FIG. 1), an insulating layer may be formed between the extraction electrodes 41a and 42a and the vibrating body 20, and the second embodiment (see FIG. 3). Such a configuration can be realized by forming an insulating layer between the extraction electrode 41a and the vibrating body and considering the excitation electrode 42 as the vibrating body 20 itself.

  Furthermore, in the structure as in Embodiment 3 (see FIG. 4), an insulating layer may be formed between the extraction electrode 42a and the vibrating body 20, and the excitation electrode 41a may be the vibrating body 20 itself.

  Therefore, according to the present embodiment, it is possible to realize a contour vibration piece and a contour vibrator that reduce the deterioration of vibration characteristics due to the support and fixation of the vibrator and improve the shock resistance.

The perspective view which shows the outline vibration piece which concerns on Embodiment 1 of this invention. The perspective view which shows the simulation result of the vibrating body which concerns on Embodiment 1 of this invention. The perspective view which shows the outline vibration piece which concerns on Embodiment 2 of this invention. The perspective view which shows the outline vibration piece which concerns on Embodiment 3 of this invention. Sectional drawing which shows the structure of the outline vibrator of this invention typically.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Contour vibration piece, 20 ... Vibrating body, 21, 24 ... End surface of a vibrating body, 22, 23 ... Side surface of a vibrating body, 30 ... 1st piezoelectric thin film, 31 ... 2nd piezoelectric thin film, 41, 42 ... Excitation electrode.

Claims (7)

A quadrangular prism-shaped vibrating body made of an isotropic material;
A piezoelectric thin film formed on a side surface of the vibrating body;
An excitation signal is input to the piezoelectric thin film, and two excitation electrodes that are planarly opposed across the piezoelectric thin film are provided,
One excitation electrode and the other excitation electrode of the two excitation electrodes have a predetermined intersection region in the longitudinal center of the vibrating body in plan view,
The contour vibrating piece characterized in that the center portion in the longitudinal direction of the vibrating body performs contour vibration in a vibration mode corresponding to an input excitation signal having a specific frequency. The contour vibrating piece according to claim 1,
The piezoelectric thin film comprises a first piezoelectric thin film and a second piezoelectric thin film provided on each of two opposing side surfaces of the vibrator,
The first piezoelectric thin film and the second piezoelectric thin film are arranged so as to intersect at least in the intersecting region;
The contour vibrating piece, wherein the one excitation electrode is provided on the surface of the first piezoelectric thin film and the other excitation electrode is provided on the surface of the second piezoelectric thin film. The contour vibrating piece according to claim 1,
The piezoelectric thin film is disposed on one side surface of the two opposing side surfaces of the vibrating body, and at least in the range of the intersecting region;
The contour vibrating piece, wherein the one excitation electrode is provided on a surface of the piezoelectric thin film, and the other excitation electrode is provided on the other side surface of the vibrating body. The contour vibrating piece according to claim 1,
The one excitation electrode is provided on one of the two opposing side surfaces of the vibrator,
The contour vibrating piece, wherein the piezoelectric thin film is provided at least in the range of the intersecting region on the surface of the one excitation electrode, and the other excitation electrode is provided on the surface of the piezoelectric thin film. 5. The contour vibrating piece according to claim 1, wherein the vibrating body includes a contour vibration region at a longitudinal center portion and a non-vibration region at a longitudinal end portion. Contour vibrating piece characterized by In the contour vibration piece according to any one of claims 1 to 5,
The contour vibrating piece characterized in that the one excitation electrode and the other excitation electrode are extended on respective longitudinal end faces of the vibrating body. A columnar vibrator made of an isotropic material, a piezoelectric thin film formed on a side surface of the vibrator,
At least two excitation electrodes for inputting an excitation signal to the piezoelectric thin film, and one excitation electrode and the other excitation electrode of the pair of excitation electrodes are arranged in a central portion of the vibrating body in plan view. A contour resonator element that has a predetermined intersection area and that contours and vibrates in a vibration mode corresponding to an excitation signal of a specific frequency that is input to the longitudinal central portion of the vibrator is defined as the contour of the contour resonator element. A contour resonator, wherein a vibration region is fixed to the base at a longitudinal end portion of the vibrator in a state where the vibration region is separated from the base of the package.