JP2008089397A - Surface observation method for optical member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface observation method for an optical member suitable for observation as to quality determination of the optical member, capable of correcting a shift between respective images about two surfaces of the optical member to correlate an image of a defect itself with a reflected image of the defect, while adopting a so-called one-face imaging method. <P>SOLUTION: This surface observation method for the optical member has a process for imaging the first and second images including respectively the first and second surface images in the optical member of a specimen, by an imaging part, a magnification regulating process for regulating magnifications of the respective images, a rough regulation process for regulating roughly a relative position between the first image and the second image, a scanning area setting process, a detection area moving process for moving detection areas respectively at the same velocity in the same route, respectively in the first scanning area and the second scanning area, a correlation process for correlating the respective images detected in the detection area moving process to form a set, and a fine regulation process for regulating finely the relative position between the first image and the second image, based on a detection result. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a method for observing a surface of an optical member suitable for observing a foreign substance existing on the surface of the member under dark field illumination when performing pass / fail judgment regarding a transmissive plate-like optical member such as an optical filter. The present invention relates to an optical member observation apparatus capable of observing foreign matters on a surface by a method.

  Conventionally, when determining whether a flat transparent optical member such as an optical filter is good or defective, an object such as dust that appears on the surface of the optical member is imaged using dark field illumination, and this is used as a foreign object. The method of observation is taken. The observation method includes a so-called double-sided imaging method in which the front and back surfaces of an optical member, which is a test object, are simultaneously imaged in one image, and a so-called imaging in which one surface of the test object is imaged and the other surface is imaged. One-sided imaging methods are known. The former is described in, for example, the following Patent Document 1, and the latter is described in, for example, the following Patent Document 2. The latter has the advantage that the cost can be reduced and the apparatus can be miniaturized, such as a single imaging unit or a simple optical path to be secured, compared to the former.

  In the present text, for convenience of explanation, the surface refers to a surface on which normal light contributing to image formation is incident or emitted from an optical member disposed in an apparatus or the like. Further, when the optical member is disposed in the imaging apparatus, a surface on which light from a subject is incident is referred to as a front surface, and a surface on which the light is emitted is referred to as a back surface.

JP-A-2005-274404 JP 2000-146554 A

  In general, when one surface of a transmissive optical member is imaged, there is a phenomenon in which foreign matter present on the other surface is reflected. Therefore, in order to realize high-precision foreign object observation and pass / fail judgment, the image of the specific foreign object shown in one image is associated with the reflected image of the specific foreign object shown in the other image. Therefore, it is necessary to exclude the reflected image from the object of the quality determination. However, in the conventional single-sided imaging method described in Patent Document 2, there is a time lapse between imaging one surface and imaging the other surface. For this reason, the optical member may move or tilt in the holder, and the images on the respective surfaces may deviate from each other. If the images on the respective surfaces are displaced, the image of the foreign material itself cannot be matched with the reflected image of the foreign material, and there is a possibility that high-precision foreign material observation and pass / fail judgment cannot be realized.

  In view of the above circumstances, the present invention adopts a so-called single-sided imaging method, and corrects the deviation of each image related to the two surfaces of the optical member to correspond to the image of the defect itself and the reflected image of the defect. An object of the present invention is to provide an optical member surface observation method and an optical member observation apparatus suitable for observation relating to quality determination of a flat optical member such as an optical filter.

  In order to achieve the above object, the surface observation method for an optical member according to the present invention is an optical in an optical member observation apparatus that images a first surface and a second surface of a test object with an imaging unit at time intervals. A method for observing a surface of a member, wherein a first imaging step of capturing a first image including a first surface image of an optical member that is a test object by an imaging unit, and a second of the optical member by an imaging unit A second imaging step for capturing a second image including the surface image of the image, a magnification adjustment step for adjusting the magnification of each image so that the sizes of the respective surface images in each image substantially match, and after the magnification adjustment step, A coarse adjustment step for roughly adjusting the relative positions of the first image and the second image so that the inclinations of the surface images substantially coincide with each other; a first scan region including the first image after the coarse adjustment step; Includes the second image after the adjustment process and the first scan A scan area setting step for setting a second scan area having the same shape as the scan area, and detection for moving a detection area having a predetermined size in each of the first scan area and the second scan area An area moving step, an associating step that associates each detected light image when a light image related to a foreign substance is detected in the detection area in both scan areas during the detection area moving step, and a detection area moving step Thereafter, a fine adjustment step of finely adjusting the relative positions of the first image and the second image so that the sum of squares of the distances between the positions of the two optical images in all the sets in each scan region is minimized. It is characterized by having.

  According to the surface observation method of the optical member according to claim 1, rough adjustment performed after the magnification adjustment of each image relating to the first and second surfaces, and between two optical images in one or a plurality of associated groups By performing the two-stage adjustment of fine adjustment performed so that the sum of squares of the distance is minimized, it is possible to correct the deviation of each image, and to perform foreign object observation and pass / fail judgment with high accuracy.

  The optical member surface observation method according to claim 2 further includes a detection region reduction step of reducing the size of the detection region when all of the above sets do not satisfy a predetermined condition in the fine adjustment step. After the detection area reduction process, it is desirable to repeat the detection area movement process, the association process, the fine adjustment process, and the detection area reduction process until all the sets satisfy a predetermined condition. Thereby, more accurate image shift correction is realized.

  According to the method for observing a surface of an optical member according to claim 3, the predetermined condition is that an average of the distances related to all the sets is smaller than a predetermined value. According to the optical member surface observation method of the fourth aspect, the predetermined condition is that a distance related to each set is smaller than a predetermined value. The predetermined value is preferably one pixel.

  According to the optical member surface observation method of the sixth aspect, the rough adjustment step is performed by matching the edges of the first surface image and the second surface image.

  In addition, by making the scanning area and the detection area rectangular, the entire image can be scanned and foreign matter can be detected (claim 7).

  In the optical member surface observation method according to the eighth aspect, in the detection region moving step, it is preferable that each detection region moves along the same path at the same speed.

  As described above, the surface observation method according to the present invention performs the two adjustments of the coarse adjustment and the fine adjustment, and the fine adjustment is performed by adjusting the position of the image of the foreign material in one image and the reflected image of the foreign material in the other image. Are performed so that they substantially match. Thereby, the shift | offset | difference of two images regarding each surface of the optical member imaged at time intervals by what is called a single-sided imaging method can be corrected with high accuracy. That is, it can be said that the surface observation method according to the present invention is suitable for observation related to the quality determination of a flat optical member such as an optical filter.

  An optical member observation apparatus suitable for the optical member surface observation method according to the present invention will be described below. FIG. 1 is a diagram schematically showing an overall view of the optical member observation apparatus 100. The optical member observation apparatus 100 includes an imaging system 110, a processor 130, and a monitor 150.

  The imaging system 110 includes a camera unit 101, a table 102, a leg unit 103, an X direction rail 104, a Y direction rail 105, a ring illumination 106, a base 107, and a drive unit 108. In the following description, for the sake of convenience, the direction of the optical axis of the camera unit 101 (indicated by the alternate long and short dash line in FIG. 1) is referred to as the Z direction, and the two directions orthogonal to the Z direction and orthogonal to each other are referred to as the X direction and Y direction, respectively. . In FIG. 1, the direction orthogonal to the paper surface is defined as the X direction, and the direction along the paper surface is defined as the Y direction.

  Although not shown, the camera unit 101 includes an imaging element such as a CCD and one or a plurality of lenses. The table 102 has a donut shape with an opening 102a provided at the center. In FIG. 1, for convenience, the table 102 is shown as a cross-sectional shape on a plane including the optical axis. The table 102 is disposed so as to be driven in the X direction by the X direction rail 104. Moreover, the table 102 is mounted on the leg part 103 via the X direction rail. The leg portion 103 is disposed so as to be driven in the Y direction by the Y direction rail 105. Further, the leg portion 103 is configured to be extendable and contractible in the Z direction. The table 102 and the leg part 103 are each connected to the drive part 108. As a result, the table 102 can be moved not only on the XY plane by the drive unit 108 but also in the Z direction in conjunction with the expansion and contraction of the leg portion 103.

  The Y-direction rail 105 is disposed on the base 107. A ring illumination 106 is disposed on the base 107 and irradiates the table 102 and the camera unit 101 with divergent light.

  The imaging system 110 is connected to the processor 130. The processor 130 performs predetermined image processing on the image signal transmitted from the camera unit 101 of the imaging system 110, and performs processing related to the surface observation and pass / fail judgment of the optical member, which is a feature of the present invention. In addition, overall control of driving of the entire imaging system 110 is performed. The captured image that has been subjected to image processing by the processor 130 and information related to the observation result and the pass / fail judgment result are displayed on the monitor 150.

  At the time of observing the surface of the optical member, an optical member which is a test object held by the holder 10 is placed on the table 102. The holder 10 of this embodiment is configured to be able to hold a plurality of optical members F1 to Fn. The optical member is a transparent plate-like member, and an optical filter or the like is exemplified. In FIG. 1, the holder 10 is shown as a cross-sectional shape on the plane including the optical axis, like the table 102. Therefore, only F1 to F3 appearing on the surface including the optical axis are also shown for the optical member held by the holder 10.

  When the holder 10 (more specifically, the optical members F1 to Fn) that has undergone the previous process is placed on the table 102, one optical member to be imaged (hereinafter referred to as an optical member F1) is taken. The drive unit 108 moves the table 102 on the XY plane under the control of the processor 130 so as to be positioned in the imaging range of the camera unit 101. In addition, the drive unit 108 drives the table 102 in the Z direction by expanding and contracting the leg unit 103 under the control of the processor 130. Then, the first surface of the optical member F <b> 1 is matched with the focal position of the camera unit 101. When the above position adjustment is completed, light is emitted from the ring illumination 106.

  In the following description, the surface facing the camera unit 101 is referred to as a first surface for convenience. The opposite side of the first surface, that is, the surface facing the ring illumination 106 is referred to as the second surface. Furthermore, when the optical member F1 is mounted on an actual imaging device, the first surface is the front surface and the second surface is the back surface.

  The irradiated light illuminates the optical member F1. Here, as described above, the light from the ring illumination 106 is divergent light. For this reason, when no foreign matter is present on the surface of the optical member F1, no image is formed on the camera unit 101, and the portion corresponding to the surface appears dark. On the other hand, when a foreign substance such as a scratch or dust is present on the surface, light scattered by the foreign substance forms an image on the camera unit, so that a part corresponding to the foreign substance appears bright. That is, the optical member observation apparatus 100 of this embodiment is an apparatus for performing surface observation of the optical member by dark field illumination. The camera unit 101 outputs image data regarding the first surface of the optical member F1 to the processor 130 as a signal (image signal).

  When the imaging of the first surface of the optical member F <b> 1 is finished, the processor 130 moves the table 102 on the XY plane and positions the next imaging target within the imaging range of the camera unit 101. For example, when the next imaging target is the optical member F2, the processor 130 moves the table 102 in the Y direction by a predetermined amount via the drive unit 108. Since the position adjustment in the Z direction is not performed, the first surface of the next imaging target (optical member F2) located within the imaging range and the focal position of the camera unit 101 inevitably coincide. When the optical member F2 is positioned within the imaging range, the camera unit 101 performs imaging on the first surface of the optical member F2. Note that the positions of the table 102 and the holder 10 shown in FIG. 1 correspond to positions at the time of imaging the first surface of the optical member F2.

  Thereafter, similarly to the above, imaging of the test object and movement of the table 102 are executed alternately. When the imaging of the first surface of all the optical members is completed, the processor 130 then moves the table 102 so that the optical member F1 is positioned within the imaging range and expands / contracts the leg 103. The second surface of the member F1 is made to coincide with the focal position.

  And the imaging regarding the 2nd surface of each optical member F1-Fn is performed according to the flow similar to the above. The image data relating to each surface is associated with each other as data relating to the same specimen (here, the optical member F1). The optical member observation apparatus 100 performs image processing, which will be described in detail below, based on information such as on which surface foreign matter is present and how large the foreign matter is, using an image relating to each surface. Then, the quality of the optical member that is the test object is determined.

  Hereinafter, image processing performed by the processor 130, which is a feature of the present invention, will be described in detail. In the following description, only images relating to the respective surfaces of the specific optical member F1 will be described. However, in an actual apparatus, image processing described in detail below is performed for all the captured optical members. FIG. 2 is a flowchart showing image processing performed by the processor 130.

  An example of the first image P1 and the second image P2 before image processing, that is, when captured by the imaging system 110, is schematically shown in FIGS. 3A and 3B, respectively. Hereinafter, the image including the first surface image associated as the image relating to the optical member F1 is referred to as a first image P1. An image including the second surface image associated as an image related to the optical member F1 is hereinafter referred to as a second image P2.

  As described above as the background art, in the method of sequentially imaging the surface of the optical member one by one at a time like the optical member observation apparatus 100 of the present embodiment, since several imaging conditions change, it is included in each image. Each surface image to be printed is not necessarily in the same state. For example, the change in the imaging condition may be that the optical member moves slightly in the holder 10 or the distance in terms of air from each surface to the camera unit 101 differs due to the thickness of the optical member itself. Can be mentioned. Therefore, at the time of image processing, it is necessary to first correct the discrepancy between the images due to the change in each imaging condition. For example, in FIGS. 3A and 3B, the first surface image i1 in the first image P1 is positioned along the contour of the first image P1, while the first surface image i1 in the second image P2 is The second surface image i2 is inclined with respect to the contour of the second image P2. Further, the second surface image i2 is smaller than the first surface image i1, that is, the imaging magnification is different. As a result, the surface images in both the images P1 and P2 are shifted.

  Therefore, the processor 130 reads each image data from a storage unit (not shown). Then, the processor 130 unifies the size of each surface image by adjusting the magnification of one or both of the images in S1. Here, the size of the second surface image i2 is enlarged and unified to the first surface image i1. The enlargement ratio is determined based on the object distance at the air equivalent length at the time of capturing each image. The first image P1 and the second image P2 after the size unification are shown in FIGS. 4A and 4B, respectively. In FIG. 4B, the broken line area is the second surface image before the size change.

  Next, the processor 130 detects the outlines (outlines) of the surface images i1 and i2 included in the images P1 and P2. In general, when a subject is imaged using a dark field illumination method, diverging light incident on an optical member that is the subject is not only a foreign substance on the surface but also an edge (end) of the optical member. Scattered. Therefore, in each of the images P1 and P2, the outer shape of each surface image appears brighter and more blurred than other regions. Therefore, the processor 130 performs well-known image processing such as binarization processing on the images P1 and P2, and extracts the outer shape of each surface image (S3).

  Next, the processor 130 adjusts the inclination of each surface image so that the outer shapes of the surface images in the images P1 and P2 substantially coincide with each other (S5). Here, the inclination of the second surface image i2 is adjusted by rotating the second surface image i2 by a predetermined amount with the image center of the second image as the rotation center, and the outer shape of the surface image i2 is changed to the first state. It is made to substantially coincide with the surface image i1. FIGS. 5A and 5B show the first image P1 and the second image P2 after the size unification, respectively. In FIG. 5B, the broken line areas are the second image and the second surface image before the inclination adjustment. As shown in FIG. 5B, by performing the tilt adjustment process, the second image P2 itself has a tilt with respect to the first image P1, but each surface image i1, i2 in each image. Are in substantially the same state, that is, in a state having no inclination. If further explanation is added, in this embodiment, a rectangular optical member is assumed. Therefore, the state in which the surface images i1 and i2 are substantially identical to each other means a state in which the corresponding edges are substantially parallel.

  Next, the processor 130 sets, for each of the images P1 and P2, a scan area S for detecting foreign matter and a detection area D for scanning the scan area S (S7). FIGS. 6A and 6B show the images P1 and P2 in which the scan area S is set. The scan areas S set for the images P1 and P2 have the same shape as each other, and when the center of the scan area S is coincident with the centers of the images P1 and P2, the entire areas of the images P1 and P2 are within the scan area S. Designed to have a size that fits in 6A and 6B is set in a rectangular shape, but the present invention is not limited to this, and scanning is possible as long as it is similar in shape to the outer shape of the optical member F1 that is the test object. It becomes possible to do. In addition, a predetermined size is set in advance in the detection area indicated by the hatched area in FIGS. In the present embodiment, the detection area is set to have a shape similar to the scan area (in this case, a rectangular shape) so that the scan area can be scanned without fail.

  When the scan area S and the detection area D are set in S7, the detection area D existing in both the scan areas S is moved (scanned) at the same speed and the same path in S9. When a bright light image (image related to a foreign object) exists in both detection areas (S11: YES), the processor 130 detects each image and records it as a set in association with each other (S13). That is, the two optical images that are paired in S13 are regarded as images corresponding to the same foreign object. The above processes of S9, S11, and S13 are repeated until the entire scan area S is scanned (S15: NO).

  In the present embodiment, it has been described that the detection area D in each scan area S is moved along the same speed and the same route in order to reduce the processing load on the processor 130. However, if the processor 130 can acquire position information (coordinate information or the like) when a foreign object is detected by the detection area D in each scan area S, each detection area D is necessarily moved at the same speed and the same route. There is no need.

  When the scanning of the entire scanning region S is completed (S15: YES), the processor 130 then performs arithmetic processing so that the sum of squares of the distances between the two light images constituting each group is minimized using the least square method. Perform (S17). And the place where the foreign material corresponding to the two optical images which comprise each group will exist is approximated by the arithmetic processing using the least square method of S17. Then, the state (position and inclination in the image) of each surface image in each of the images P1 and P2 is finely adjusted so that the two light images constituting all the sets are located at approximate locations. Next, the processor 130 determines whether or not the distance average between the two optical images constituting each group is sufficiently small (S19). Specifically, an average distance between two light images constituting the set is calculated, and it is determined whether the average value is smaller than a predetermined reference value. In the present embodiment, one pixel is set as a predetermined reference value in order to reduce the error range as much as possible while reducing the processing load on the processor 130. Here, when the average distance is 1 pixel or more, it is determined that the error between the place where the foreign substance originally exists and the place where the foreign substance exists determined in the process described later is too large (S19: NO). Then, the size of the detection area set in S7 is reduced (S21), and the processes after S9 are repeated.

  If it is determined in S19 that the distance average is smaller than one pixel (S19: YES), the deviation of the two images related to each surface obtained by the single-sided imaging method is corrected, and a series of processes Ends. In the above processing, only the position where the foreign matter corresponding to the two optical images exists in the optical member F1 is determined, and the determination as to which surface of the optical member F1 the foreign matter is present. Is performed during the pass / fail judgment process described below.

  The above is the description of a series of image processing including two image shift corrections, which is also a feature of the present invention. When the above-described image processing is completed and the deviation between the two images related to the optical member F1 is corrected with high accuracy, the processor 130 then performs a pass / fail determination process related to the optical member F1 using the two images. . For the pass / fail determination process, a known method can be used, but in the present embodiment, the process described below is performed in order to realize a pass / fail determination with higher accuracy. Specifically, in the quality determination process of the present embodiment, first, determination is made as to which surface of the optical member F1 contains foreign matter corresponding to the two optical images associated in the image processing (first determination). , And optical device quality determination (second determination) according to different criteria for each surface.

First, the first determination will be described. In the first determination, a first determination value M1 defined by the following equation is obtained for each of two optical images associated with each other in the image processing. Then, it is determined that the light image having a large first determination value M1 is an image of the foreign object itself (hereinafter simply referred to as a foreign object image). Here, for each light image, the processor 130 can determine which surface is an image generated when each surface is captured, based on an image in which each image is reflected. That is, in the first determination, the processor 130 can also determine on which surface of the optical member the actual foreign matter is present.
M1 = A ^α × (IB) ^β
Here, A represents the area of the optical image, I represents the average luminance of the optical image, and B represents the luminance around the optical image (that is, background luminance). Further, 0 ≦ α ≦ 1 and 0 ≦ β ≦ 1.

  In this embodiment, α = 0 and β = 1 are set. That is, in the present embodiment, the area of the optical image is not considered in the first determination. However, the values of α and β can be arbitrarily set by the user according to the characteristics of the test object and the imaging conditions.

  If the first determination determines which of the two light images constituting the set, in other words, the two light images associated with each other in the image processing is a foreign object image, the processor 130 then makes a second determination. Do.

In the second determination, the foreign object image determined by the first determination is targeted. That is, by performing the first determination, the reflected image of the foreign matter is appropriately removed from the inspection target. In the second determination, the processor 130 obtains a second determination value M2 defined by the following expression for each foreign object image.
M2 = A × (IB)

In the present embodiment, in order to simplify the processing contents and improve the processing speed, the area of the optical image is not considered in the first determination as described above. When the area of the optical image is not considered in the first determination, the area A of the optical image can be ignored also in the second determination. That is, the second determination value M2 is obtained by the following equation.
M2 = IB

  Then, the processor 130 determines whether or not the optical member F1 is a non-defective product based on the calculated second determination value M2 of each foreign object image. Here, generally, in the case of an optical member such as an optical filter, there may be a difference in the acceptance criteria for foreign matter between the front surface and the back surface, depending on how the optical member is used in the mounted device. For example, when an optical filter is provided in the imaging apparatus, the back surface where the light is emitted is closer to the imaging element than the front surface where the light from the subject is incident. Therefore, the tolerance with respect to the foreign material adhering to the back surface is narrower than the front surface. Therefore, different thresholds ref1 and ref2 are set in advance in the processor 130 for the first surface and the second surface. Assuming here that the first surface is the front surface and the second surface is the back surface, the threshold value ref2 corresponding to the second surface that is located close to the image sensor is set lower.

  For each foreign object image, the processor 130 sequentially compares the second determination value M2 of each image with a threshold value corresponding to the surface on which the foreign object corresponding to each image exists. If there is a foreign object image having a second determination value M2 that exceeds each threshold value, the optical member F1 is determined to be a defective product.

  Hereinafter, with reference to FIG. 7, the difference in pass / fail judgment accuracy between the observation method according to the present invention and the conventional observation method will be described. FIG. 7 shows two optical images obtained by the foreign matter existing on the first surface of each optical member when 80 optical members are observed (that is, the foreign matter images and the reflections constituting the set by the image processing S13). It is a graph which shows the result of a 2nd determination about (image). In the graph shown in FIG. 7, the vertical axis represents the second determination value M2 regarding the foreign object image (that is, the light image included in the first image P1), and the horizontal axis represents the reflected image (that is, the light image of the second image P2). 2nd determination value M2 regarding each is represented.

  According to the conventional surface observation method based on single-sided imaging, it is impossible to determine on which surface the foreign object exists, in other words, whether the detected light image is a foreign object image or a reflected image. It was. Therefore, since it is an optical image corresponding to the foreign matter originally present on the first surface, it should be judged on the basis of the threshold value ref1, but it appeared in the second image P2 in the conventional observation method. The reflected image is also a determination target. If the reflected image is equal to or greater than the threshold value ref2, it is determined as an unnecessary product. For example, the sampling point in the region G in FIG. 7 is within an allowable range as a foreign matter existing on the first surface. However, in the conventional observation method, the reflected image is regarded as a foreign object image existing on the second surface. As a result, since the second determination value M2 of the reflected image is equal to or greater than the threshold value ref2, the test object that is originally a good product is processed as a defective product.

  On the other hand, according to the present embodiment, since the deviation between the images on each surface is well corrected based on the above-described image processing, the foreign object image and the reflected image are distinguished with high accuracy by the first determination. be able to. Therefore, in the second determination, there is no possibility that the product is treated as a defective product even though it is originally a good product.

It is a figure showing typically the whole optical member observation device of an embodiment of the present invention. It is a flowchart regarding image processing performed by the processor of the embodiment. It is a figure for demonstrating the process in image processing. It is a figure for demonstrating the process in image processing. It is a figure for demonstrating the process in image processing. It is a figure for demonstrating the process in image processing. It is a graph for comparing the quality determination result using the surface observation method of the embodiment and the quality determination result using the conventional observation method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Holder 100 Optical member inspection apparatus 101 Camera part 102 Table 106 Ring type illumination 110 Imaging system 130 Processor 150 Monitor P1, P2 Image i1, i2 Surface image

Claims (8)

A method for observing the surface of an optical member in an optical member observing apparatus that images the first surface and the second surface of a test object with an imaging unit at a time interval,
A first imaging step of capturing a first image including a first surface image of an optical member as a test object by the imaging unit;
A second imaging step of capturing a second image including the second surface image of the optical member by the imaging unit;
A magnification adjustment step of adjusting the magnification of each image so that the size of each surface image in each image substantially matches;
After the magnification adjustment step, a rough adjustment step of roughly adjusting the relative positions of the first image and the second image so that the inclinations of the respective surface images substantially coincide with each other.
A first scan region including the first image after the rough adjustment step; a second scan region including the second image after the rough adjustment step and having the same shape as the first scan region; Scanning area setting step for setting,
In each of the first scan area and the second scan area, a detection area moving step of moving a detection area having a predetermined size, and
An association step of associating each detected light image with a set when a light image relating to a foreign object is detected in the detection region in both scan regions during the detection region moving step;
After the detection area moving step, the relative relationship between the first image and the second image is such that the sum of squares of the distance between the positions of the two optical images in all the sets in each scan area is minimized. A method for observing the surface of an optical member, comprising: a fine adjustment step of finely adjusting the position. In the surface observation method of the optical member according to claim 1,
In the fine adjustment step, when all the sets do not satisfy a predetermined condition, the fine adjustment step further includes a detection region reduction step of reducing the size of the detection region,
After the detection area reduction process, the detection area moving process, the association process, the fine adjustment process, and the detection area reduction process are repeated until all the sets satisfy a predetermined condition. Method. In the surface observation method of the optical member according to claim 1 or 2,
The method for observing a surface of an optical member, wherein the predetermined condition is that an average of the distances related to all the sets is smaller than a predetermined value. In the surface observation method of the optical member according to claim 1 or 2,
The method for observing a surface of an optical member, wherein the predetermined condition is that the distance related to each group is smaller than a predetermined value. In the surface observation method of the optical member according to claim 3 or 4,
The method for observing a surface of an optical member, wherein the predetermined value is one pixel. In the surface observation method of the optical member in any one of Claims 1-5,
In the rough adjustment step, the first image and the outer shape of the first surface image in the first image substantially match the outer shape of the second surface image in the second image. A method for observing a surface of an optical member, wherein the second image is rotated and adjusted. In the surface observation method of the optical member in any one of Claims 1-6,
The method for observing a surface of an optical member, wherein the scan region and the detection region have a shape similar to the outer shape of the test object. In the surface observation method of the optical member according to any one of claims 1 to 7,
In the detection region moving step, each detection region moves on the same speed and on the same route, and the optical member surface observation method is characterized in that:

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