JP2008089085A - Manifold structure for fluid apparatus and body block used for the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manifold structure for a fluid apparatus capable of reducing cost by using common parts. <P>SOLUTION: In the manifold structure 1 for the fluid apparatus wherein a manifold 3 is constituted by connecting a plurality of body blocks 4 to which the fluid apparatus 2 is attached in a lateral direction, the body block 4 is equipped with a through-flow passage 21 formed in a direction perpendicular to an attachment direction of the fluid apparatus 2, seal grooves 34 and 22 provided on an opening outer side of the through-flow passage 21, a plurality of through-holes 33 provided on the outside of the through-flow passage 21 so that a connection member 41 for connecting the body block 4 is arranged, and a branch flow passage 25 formed to be connected from an attachment surface 4a to which the fluid apparatus 2 is attached to the through-flow passage 21. An opening of the through flow passage 21, the seal grooves 34 and 22, and an opening of the through hole 33 are symmetrically provided on a first side surface 4b and a second side surface 4c confronting with each other while having the attachment surface 4a therebetween. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a manifold structure of a device that forms a manifold by connecting a plurality of body blocks to which a fluid device is attached.

  2. Description of the Related Art Conventionally, a semiconductor manufacturing apparatus integrates fluid devices in a manifold in order to reduce the size. If the manifold is composed of one block, it is necessary to prepare a manifold having a different shape when it is desired to change the flow path, and there is a problem that the number of types of manifolds increases. In the manifold valve structure described in Patent Document 1, a manifold is formed by connecting valve blocks to which a valve mechanism is attached in the lateral direction so that the auxiliary flow path can be changed easily and quickly.

FIG. 17 is a cross-sectional view of a conventional manifold valve structure 100 described in Patent Document 1. As shown in FIG.
In the conventional manifold valve structure 100, the first valve block 110, the second valve block 120, and the third valve block 130 to which the valve mechanisms 101, 102, and 103 are attached are connected to each other using a connecting member such as a bolt from the side of the block. Are connected to form a manifold 104.

  In the manifold 104, a main fluid outflow / inlet 112 provided on the front side of the first valve block 110 is electrically connected to the internal flow paths 114, 124, and 134 of the first to third valve blocks 110, 120, and 130. The internal flow path 114 communicates with the first outlet / inlet 113 via the chamber 111 that houses the valve portion of the first valve mechanism 101. The internal flow path 134 communicates with the third outlet / inlet 133 via a chamber 131 that houses the valve portion of the third valve mechanism 103. Further, the internal flow path 124 communicates with the second outlet / inlet 123 through a chamber 121 that houses the second valve mechanism 102. The manifold 104 has a connection portion between the first communication opening 115 of the internal flow path 114 and the third communication opening 135 of the internal flow path 134 and a fourth communication opening 136 of the internal flow path 134 in order to prevent fluid leakage. And the second communication opening 125 of the internal flow path 124 are sealed by the seal structure shown in FIG. 18 to prevent fluid leakage.

18 is an enlarged cross-sectional view of a P portion of the manifold valve structure 100 shown in FIG.
The first valve block 110 is formed with an annular groove 116 so as to surround the first communication opening 115. The third valve block 130 has a head 137 protruding along the outer periphery of the third communication opening 135. The first valve block 110 and the third valve block 130 are connected in an airtight manner by fitting the head 137 in the annular concave groove 116 in an airtight manner. Further, when the third valve block 130 is connected to the first valve block 110, the third valve block 130 crushes the annular protrusion 138 provided around the third communication opening 135 to generate a sealing force. Therefore, the connecting portion between the first communication opening 115 and the third communication opening 135 is double-sealed, and the sealing performance is enhanced.
Note that the seal structure of the connection portion between the fourth communication opening 136 and the second communication opening 125 is the same as the seal structure of the connection portion between the first communication opening 115 and the third communication opening 135, and therefore the reference numerals are attached to the drawings. The description is omitted.

  In the conventional manifold valve structure 100, since the first to third valve blocks 110, 120, and 130 are independent from each other, the number of the third valve blocks 130 is increased or decreased to easily and quickly increase the number of sub-flow paths. Can be changed.

Japanese Patent No. 3655155

However, the conventional manifold valve structure 100 has the following problems.
(1) In the conventional manifold valve structure 100, as shown in FIG. 18, the third valve block 130 is provided with a head 137 around the third communication opening 135 and is annular around the fourth communication opening 136. Since the recessed groove portion 139 is provided, the direction of connection to the first valve block 110 and the second valve block 120 is limited. Therefore, in order to change the direction of the third outflow inlet 133 from the back side to the front side, a valve block for arranging the third outflow inlet 133 on the front side has to be separately prepared. As described above, the conventional manifold valve structure 100 is expensive because there are many types of valve blocks and a large number of stock parts.

(2) Further, the conventional manifold valve structure 100 does not embody the connection method of the first to third valve blocks 110, 120, and 130. As estimated from FIG. 17, in the conventional manifold valve structure 100, for example, four bolts from the second valve block 120 side are passed through the third and first valve blocks 130 and 110, and the first valve block 110 side is passed. It is considered that the first to third valve blocks 110, 120, and 130 are integrated by fastening the tip of the bolt to the provided nut. In this case, bolts having different lengths must be prepared according to the number of the third valve blocks 130 arranged between the first and second valve blocks 110 and 120, which is expensive.

  The present invention has been made to solve the above problems, and an object of the present invention is to provide a fluid device manifold structure capable of reducing the cost by using common parts.

The manifold structure of a fluid device according to the present invention has the following configuration.
(1) In a manifold structure of a fluid device in which a plurality of body blocks to which a fluid device is attached are connected in the lateral direction to form a manifold, the body block is formed in a direction orthogonal to the attachment direction of the fluid device. A plurality of through-flow passages, seal grooves provided on the outside of the opening of the through-flow passage, and a plurality of connection members provided on the outside of the through-flow passage for connecting the body block to other body blocks. A through-hole and a branch channel formed so as to be connected to the through-channel from an attachment surface to which the fluid device is attached; and a first side surface and a second side surface facing each other across the attachment surface The opening of the through channel, the seal groove, and the opening of the through hole are provided symmetrically.

(2) In the invention described in (1), the fluid device is a valve, and the bottomed recess that forms a valve chamber between the branch flow channel and the valve attached to the attachment surface; A valve hole is formed coaxially with the bottomed recess and communicates the bottomed recess with the through channel, and the body block is provided with a valve seat along the outside of the opening of the valve hole. And a joint channel projectingly provided on a third side surface interposed between the first side surface and the second side surface, and a joint channel for connecting the joint unit to the bottomed recess is provided. It is characterized by that.

(3) In the invention according to (1) or (2), a joint portion that communicates with the through channel in a state of being coupled to the body block, or the through channel in a state of being coupled to the body block. And having an end block in which an end side through hole is formed at a position corresponding to the through hole, and the end block is disposed in the end side through hole. It is connected to the 1st side or the 2nd side of the body block using the end side connecting member made.

(4) A body block used in the invention according to any one of (1) to (3).

(5) In a manifold structure of a fluid device in which a body block to which a fluid device is attached is connected in a lateral direction to form a manifold, the body block has a through-hole for arranging the connecting member in the fluid device. A plurality of through-holes are formed in a direction orthogonal to the mounting direction, and the through-holes have a plurality of counterbore holes opened on a first side surface and a second side surface facing each other across an attachment surface to which the fluid device is mounted, and a hole diameter is the counterbore A connecting hole for connecting and communicating a counterbore formed on the first side surface and the second side surface, the connecting member includes a female screw member disposed in the counterbore hole, and the connection hole The fastening member inserted in the second body block is fastened to the female screw member arranged in the counterbore hole of the first body block. In the state, characterized in that said first body block and said second body block is connected.

(6) In the invention described in (5), the female screw member has an overall length longer than the depth of the counterbore hole, and the fastening member has the female screw member at one end of a fastening rod formed with male screw portions at both ends. It is fastened and the fastening rod is longer than the connection hole and shorter than the width of the body block.

(7) In the invention described in (5), the fastening member is a male screw member whose overall length is longer than the width dimension of the body block and shorter than the width dimension when two body blocks are arranged in series, and is connected to each other. The first body block and the second body block are arranged with the male screw member in a through hole specified from among a plurality of through holes, and connected to the second body block and the second body block. The third body block is characterized in that the male screw member is disposed in a corresponding through hole other than the specified through hole.

  In the manifold structure of the fluid device having the above-described configuration, the opening of the through flow path, the seal groove, and the opening of the through hole are symmetrically arranged on the first side surface and the second side surface facing the body block with the mounting surface interposed therebetween. For example, when the manifold is formed by connecting the first to third body blocks, the second body block can be reversed even if the orientation of the second body block is reversed 180 degrees about the mounting surface. The block can be directly connected to the first and third body blocks. As described above, according to the manifold structure for a fluid device of the present invention, any number of body blocks can be connected without restricting the direction of the body block. be able to.

  Further, when the valve is attached to the attachment surface of the body block and the valve chamber is formed between the valve and the bottomed recess, for example, the connection between the first body block and the second body block is released, and the first body If the direction of the block is reversed 180 degrees and the direction of the joint portion is changed, the flow path configuration can be easily changed.

  The end block is attached to the first side surface or the second side surface of the body block, and outputs the fluid flowing through the body block from the joint portion or shuts off at the closing portion of the end block. Therefore, even when body blocks having the same structure are connected, any flow path configuration can be adopted if the type of the end block is changed. Moreover, the end block is provided with an end-side through hole at a position corresponding to the through-hole of the body block, and the end-side connecting member is disposed in the end-side through hole so that the first side surface or the first side of the body block is disposed. Since it is connected to the two side surfaces, it can be used as it is even when the direction of the body block is changed.

  The manifold structure of the fluid device of the present invention includes a first body block, a second body block, and a second body block, by fastening a fastening member inserted into the second body block to a female screw member disposed in a counterbore hole of the first body block. Therefore, it is possible to increase or decrease the body block by one unit using the female screw member and the connecting member. As described above, the manifold structure of the fluid device of the present invention can connect any number of body blocks using the female screw member and the fastening member, so that the female screw member and the fastening member can be used in common to reduce costs. Can do.

  In the manifold structure of the fluid device according to the present invention, the female screw member whose overall length is longer than the depth of the counterbore hole is disposed between the counterbore hole of the first body block and the counterbore hole of the second body block. With the second body block positioned, the first and second body blocks are connected by a fastening member, so that a fastening force is generated in the vicinity of the first and second body blocks coming into contact, and the first and second body blocks Can be firmly brought into contact with each other.

  The manifold structure of the fluid device according to the present invention is a male screw member having a fastening member longer than the width dimension of the body block and shorter than the width dimension when two body blocks are connected in series. For example, when connecting the first, second, and third body blocks, the first and second body blocks are arranged in the through holes in which the male screw member is specified from among the plurality of through holes, In the second and third body blocks, male screw members are disposed in corresponding through holes other than the specific through holes specified when the first and second body blocks are connected. As described above, the manifold structure of the fluid device of the present invention is adjacent to the case where the first and second body blocks are connected and the case where the second and third body blocks are connected while changing the arrangement of the male screw members. Since the body blocks are connected, the body blocks can be connected with a small number of male screw members.

  Next, an embodiment of a manifold structure of a fluid device according to the present invention and a body block used therefor will be described with reference to the drawings.

1. First Embodiment A. FIG. 1 is a front view showing a manifold structure 1 of a fluid device according to the first embodiment.
A manifold structure 1 of a fluid device is obtained by integrating valves 2A, 2B, and 2C, which are examples of fluid devices, on a manifold 3, and is, for example, attached to a semiconductor manufacturing apparatus to control a chemical solution or a gas. . The manifold 3 is formed by connecting the first to third body blocks 4A, 4B, 4C in the lateral direction and connecting the end blocks 5A, 5B to both ends. The manifold structure 1 of the fluid device is attached to a semiconductor manufacturing apparatus or the like via attachment plates 6A, 6B, 6C attached to the lower surfaces of the first to third body blocks 4A, 4B, 4C. Note that the subscripts A, B, and C of the above-described symbols are shown to distinguish parts having the same configuration, but the subscripts are omitted when it is not necessary to distinguish them individually.

B. Configuration of Valve FIG. 2 is a central longitudinal sectional view of the manifold structure 1 of the fluid device shown in FIG. FIG. 3 is a cross-sectional view taken along the line AA of FIG. In addition, since it becomes difficult to see the drawings if all the components are attached with symbols, in FIGS. 2 and 3, the components of the third valve 2 </ b> C and the third body block 4 </ b> C are attached with symbols without subscripts, Reference numerals of components of the first and second valves 2A and 2B and the first and second body blocks 4A and 4B are omitted.
In the valve 2, the cylinder 11 and the cover 12 form a cylindrical or quadrangular prism appearance. A piston chamber 13 is formed between the cylinder 11 and the cover 12. The piston 14 is slidably loaded in the piston chamber 13, and divides the piston chamber 13 into a primary chamber 13a and a secondary chamber 13b. The primary chamber 13 a is in communication with a supply / exhaust port 16 provided in the cover 12 with a compression spring 15 contracted. On the other hand, the secondary chamber 13 b communicates with an operation port 17 provided in the cylinder 11. A diaphragm 18 is integrally attached to the lower end portion of the piston 14. The diaphragm 18 is firmly sandwiched between the cylinder 11 and the body block 4 at the periphery, and forms a valve chamber 19 between the bottomed recess 23 of the body block 4. The valve chamber 19 is provided with a valve seat 20 with which the diaphragm 18 abuts or separates. Therefore, the valve 2 is supplied and exhausted with the operation fluid from the operation port 17 to the secondary chamber 13b, and moves the diaphragm 18 integrally with the piston 14 in the vertical direction in the drawing to control the valve opening and closing. The valve 2 is made of resin except for the compression spring 15 and a fixing member that fixes the valve 2 to the body block 4 in order to ensure corrosion resistance.

C. Configuration of Body Block FIG. 5 is an external perspective view of the body block 4 shown in FIG. Since the first to third body blocks 4A, 4B, and 4C have the same structure, the reference numerals are not shown in FIG.
The body block 4 is formed by molding a resin such as PFA (tetrafluoroethylene perfluoroalkyl vinyl ether copolymer), PVDF (polyvinylidene fluoride), or PTFE (polytetrafluoroethylene) in order to ensure corrosion resistance. The appearance is a substantially hexahedron shape.

  As shown in FIG. 2, the body block 4 is provided with a through channel 21 penetrating straight in a direction (horizontal direction) orthogonal to the mounting direction (vertical direction) of the valve 2. The first side surface 4b and the second side surface 4c have seal grooves 34 and 22 formed in an annular shape on the outer side of the opening portion of the through passage 21, respectively, so that the seal member 50 can be attached. Therefore, in the body block 4, the opening of the through passage 21 and the seal grooves 34 and 22 are provided symmetrically at the same height and position on the first side face 4b and the second side face 4c, respectively.

A bottomed recess 23 is formed in a columnar shape along the mounting direction (vertical direction) of the bulb 2 at the center of the mounting surface 4a. On the same axis as the bottomed recess 23, a valve hole 24 is bored so as to communicate with the through flow path 21. In 1st Embodiment, the bottomed recessed part 23 and the valve hole 24 comprise the branched flow path 25 provided so that it might connect to the penetration flow path 21 from the attachment surface 4a. At the bottom of the bottomed recess 23, the valve seat 20 projects in a ring shape along the outside of the opening of the valve hole 24.
The mounting surface 4a of the body block 4 has an annular mounting groove 27 for positioning the diaphragm 18 with respect to the valve seat 20 by fitting the peripheral edge of the diaphragm 18 outside the opening of the bottomed recess 23. Has been. In the body block 4, bolt holes 26, 26, 26, 26 for fastening bolts (not shown) inserted through the valve 2 are formed around the mounting groove 27 at equal intervals (FIG. 5). reference).

As shown in FIG. 3, the body block 4 has a joint portion 28 on the center line of the front side surface (third side surface) 4d interposed between the first side surface 4b and the second side surface 4c. Are integrally provided. The joint portion 28 communicates with the bottomed recess 23 on the outside of the valve seat 20 via a joint passage 29 formed on the body block 4 on the same cross section as the valve seat 20.
The body block 4 having the above-described flow path configuration is connected to another body block 4 using a connecting member 41 disposed outside the through flow path 21.

4 is a cross-sectional view taken along line BB in FIG. In FIG. 4, since it is difficult to see the drawings when all the components are marked, the second body block 4B and the end block 5B are marked with symbols without subscripts, and the first and third body blocks. Reference numerals of 4A and 4C and the end block 5A are omitted.
On the first side surface 4b and the second side surface 4c of the body block 4, four counterbores 30 and 31 are formed in a cylindrical shape. The counterbore holes 30 and 31 are provided at four corners of the first side surface 4b and the second side surface 4c having the same rectangular shape (see FIG. 5), and are symmetrical with the same shape and arrangement on the first side surface 4b and the second side surface 4c. Is provided. A pair of counterbore holes 30, 31 arranged to face the first and second side surfaces 4 a, 4 b communicate with each other through a connection hole 32. The connection hole 32 is formed coaxially with the pair of counterbore holes 30 and 31, and the hole diameter is smaller than the hole diameter of the counterbore hole 31. Therefore, the connection hole 32 has a step between the counterbore holes 30 and 31. In the first embodiment, the pair of counterbore holes 30, 31 and the connection hole 32 constitute a through hole 33. Therefore, the body block 4 is provided with four through holes 33 parallel to the through flow path 21 on the outside of the through flow path 21. A connecting member 41 that connects the body blocks 4 to each other is disposed in each through-hole 33.

  The connecting member 41 is configured by connecting a fastening rod 42 in the axial direction via a nut 44 which is an example of a female screw member. The fastening rod 42 is a rigid metal rod, and is set so that the total length W1 is longer than the total length W2 of the connection hole 32 and shorter than the width dimension W3 of the body block 4. Male threaded portions 43 a and 43 b are formed on the outer peripheral surfaces of both ends of the fastening rod 42. The nut 44 is formed of a metal in a cylindrical shape in order to ensure rigidity. The total length of the nut 44 is set to a dimension that is longer than the depth of each counterbore hole 30, 31 and fits tightly into a gap formed by connecting the counterbore holes 30, 31, and between the counterbore holes 30, 31. The movement in the axial direction is restricted. The nut 44 has an outer diameter slightly smaller than the hole diameter of the counterbored holes 30 and 31 and is inserted into the counterbored holes 30 and 31 in a rotatable manner. On the inner peripheral surface of the nut 44, a female screw portion 45 corresponding to the male screw portions 43a and 43b is formed.

D. End Block Configuration As shown in FIG. 2, the end block 5 is made of a material such as PFA (tetrafluoroethylene perfluoroalkyl vinyl ether copolymer), PVDF (polyvinylidene fluoride), PTFE (polytetrafluoroethylene), or the like. It is formed from a corrosive resin and has a substantially hexahedral shape. In the end block 5, an end-side through channel 35 is formed in a straight shape corresponding to the through channel 21 of the body block 4 with the same effective cross-sectional area as the through channel 21. An end side joint portion 36 is integrally provided on the outer periphery of the one end opening of the end side through passage 35 by cutting or injection molding. An end-side seal groove 40 for mounting the seal member 50 is annularly formed outside the opening of the end-side through passage 35 on the side surface opposite to the side surface on which the end-side joint portion 36 is provided. Has been.

  As shown in FIG. 4, the end block 5 is formed with end-side through holes 37, 37, 37, 37 corresponding to the through-holes 33 of the body block 4. Each end-side through hole 37 includes a pair of end-side counterbore holes 38 and 38 and an end-side connection hole 39 that connects the end-side through holes 37. The end-side counterbore hole 38 and the end-side connection hole 39 are provided in the same manner as the counterbore holes 30 and 31 and the connection hole 32 of the body block 4. The end block 5 is connected to the body block 4 using an end side connecting member 51. The end-side connecting member 51 includes a nut 44 that can be disposed in the end-side counterbore hole 38 and an end-side male screw member 52 that can be fastened to the nut 44.

E. Next, a method for assembling the manifold 3 will be described with reference to FIGS. 6A and 6B are external perspective views showing a method of assembling the manifold 3 shown in FIG. 1, wherein FIG. 6A shows a method of fixing the nut 44 to the end block 5A, and FIG. 6B shows the end block 5A and the first block. A method of connecting the body blocks 4A is shown, and (c) shows a method of connecting the first and second body blocks 4A and 4B. FIG. 7 is a cross-sectional view of a main part showing a method of assembling the manifold 3 shown in FIG. 1, wherein (a) shows a method of fixing the nut 44 to the end block 5A, and (b) shows the end block 5A and the second block. A method of connecting the 1 body block 4A is shown, and (c) shows a method of connecting the first and second body blocks 4A and 4B.
As shown in FIGS. 6A and 7A, the end side connecting member 51 is fixed to the end block 5. That is, first, the nut 44 is inserted into one of the end side counterbore holes 38A provided on the side surface opposite to the side surface provided with the end side joint portion 36A, and the nut 44 is rotated and held with a tool. In this state, the end-side male screw member 52 is attached to the tip of a tool such as a Phillips screwdriver, and the end-side male screw member 52 is inserted from one of the end-side counterbored holes 38A provided around the end-side joint portion 36A. Then, the nut 44 held in the end side counterbore hole 38A on the opposite side is tightened. When the end-side male screw member 52 is tightened to the nut 44 by a specified amount, the tool is removed from the end-side male screw member 52 and pulled out. Thereby, the end part side connection member 51 is fixed to one of the end part side through-holes 37A. Similarly, the end-side connecting member 51 is fixed to the other end-side through hole 37A.

  Next, as shown in FIGS. 6B and 7B, the first body block 4A is connected to the end block 5A. That is, first, each nut fixed to the end block 5A in a state where the seal member 50 is lightly fitted in the seal groove 34A (see FIG. 2) of the first body block 4A or the end side seal groove 40A of the end block 5A. 44, 44, 44, 44 are inserted into the counterbore holes 30A, 30A, 30A, 30A of the first body block 4A. Thereby, the first body block 4A is positioned with respect to the end block 5A. Further, the male threaded portion 43b of the fastening rod 42 is screwed into the female threaded portion 45 of the nut 44 to prepare a bolt-shaped fastening member 47. Then, a tool such as a flat-blade screwdriver is fitted into the slit 46 formed on the end surface of the nut 44 to attach the fastening member 47 to the tip of the tool, and the fastening member 47 is attached to one of the counterbored holes 31A opened in the first body block 4A. insert. When the distal end portion of the fastening rod 42 reaches the nut 44 fixed to the end block 5A, the fastening member 47 is rotated so that the male screw portion 43a of the fastening rod 42 is fastened to the female screw portion 45 of the nut 44. When the fastening rod 42 is fastened to the nut 44 until the fastening member 47 cannot rotate, the tool is removed from the fastening member 47 and pulled out from the through hole 33A. Accordingly, the fastening member 47 connects the first body block 4A to the end block 5A while being fixedly disposed in one of the through holes 33A of the first body block 4A. The fastening member 47 is similarly fastened to the nut 44 for the other through holes 33A.

  Here, the fastening amount of the fastening members 47, 47, 47, 47 is restricted to a constant amount by the step formed between the counterbore hole 31A and the connection hole 32A. Therefore, the seal member 50 disposed between the first body block 4A and the end block 5A is crushed with a uniform force in the circumferential direction, and the through flow path 21A and the end side through flow path 35A are A stable sealing force is generated outside the connecting part.

  Next, as shown in FIGS. 6C and 7C, the second body block 4B is connected to the first body block 4A. That is, first, the fastening member 47 fixed to the first body block 4A with the seal member 50 lightly fitted in the seal groove 22A of the first body block 4A or the seal groove 34B (see FIG. 2) of the second body block 4B. , 47, 47, 47 nuts 44, 44, 44, 44 are inserted into counterbore holes 30B, 30B, 30B, 30B of the second body block 4B. Accordingly, the second body block 4B is positioned with respect to the first body block 4A. Then, a fastening member 47 provided by fastening the male thread portion 43b of the fastening rod 42 to the nut 44 is attached to the tool, and the fastening member 47 is inserted into one of the counterbore holes 31B opened in the second body block 4B. When the distal end portion of the fastening rod 42 reaches the nut 44 fixed to the first body block 4A, the fastening member 47 is rotated so that the male screw portion 43a of the fastening rod 42 is fastened to the female screw portion 45 of the nut 44. When the fastening rod 42 is fastened to the nut 44 until the fastening member 47 cannot be rotated, the tool is removed from the fastening member 47 and pulled out from the through hole 33B. Thereby, the said fastening member 47 connects the 2nd body block 4B to 4 A of 1st body blocks in the state fixed in the through-hole 33B of the 2nd body block 4B. Similarly, the connecting member 41 is fixed to the other through holes 33B.

  Here, the fastening amount of the fastening members 47, 47, 47, 47 is restricted to a constant amount by the step formed between the counterbore hole 31B and the connection hole 32B. Therefore, the seal member 50 disposed between the first and second body blocks 4A and 4B is crushed with a uniform force in the circumferential direction, and a stable seal is provided on the outside of the connecting portion of the through flow passages 21A and 21B. Generate power.

  The third body block 4C is connected to the second body block 4B in the same manner as the connection method of the first and second body blocks 4A and 4B shown in FIGS. 6 (c) and 7 (c). And in this body block 4C, the fastening member which fixed to the 3rd body block 4C the edge part side external thread member 52 penetrated from each edge part side through-hole 37B of the edge part block 5B from the edge part side coupling part 36B side. The end block 5B is connected by tightening to the nuts 44 of 47 respectively.

F. Next, the operation of the manifold structure 1 of the fluid device shown in FIG. 2 will be described.
When the operation fluid is not supplied to the operation ports 17A, 17B, and 17C (see FIG. 3), the first to third valves 2A, 2B, and 2C move the piston 14 down to bring the diaphragm 18 into contact with the valve seat 20. Yes. Therefore, for example, even if the working fluid is supplied to the end side joint portion 36A of the end block 5A, the working fluid is not output from any of the joint portions 28A, 28B, 28C, and the end side of the end block 5B. It is output as it is from the joint part 36B.
Thereafter, for example, when the operating fluid is supplied to the operating port 17C of the third valve 2C and the piston 14 is raised against the elastic force of the compression spring 15, the diaphragm 18 is separated from the valve seat 20. Therefore, the working fluid that has flowed from the end-side joint portion 36A to the through-flow passages 21A, 21B, and 21C has a predetermined flow rate from the joint portion 28C via the valve hole 24C, the valve seat 20C, the valve chamber 19C, and the joint passage 29C. Is output.
Then, when the supply of the operation fluid to the operation port 17C of the third valve 2C is stopped, the piston 14 is lowered by the elastic force of the compression spring 15, and the diaphragm 18 is brought into contact with the valve seat 20. Therefore, the working fluid is not output from the joint portion 28C.

The above operation is the same for the first and second valves 2A and 2B. Therefore, if the on-off valve operations of the first to third valves 2A, 2B, 2C are controlled, the working fluid can be output from the desired joint portions 28A, 28B, 28C.
The working fluid supplied to the joint portions 28A, 28B, and 28C may be output from the end-side joint portions 36A and 36B alone or in combination.

G. Effects The manifold structure 1 of the fluid device described above has a through-flow passage between the body block 4 and the first side surface 4b and the second side surface 4c having the same shape facing each other across the center of the mounting surface 4a and the joint portion 28. The openings 21, the seal grooves 34 and 22, and the openings of the through holes 33, 33, 33, and 33 are provided symmetrically with the same shape and arrangement (see FIGS. 2, 4, and 5).

  Therefore, for example, a flow path configuration in which the joint portions 28A, 28B, 28C are directed in the same direction as shown in FIG. 1, and a flow path configuration in which the joint portion 28B is opposite to the joint portions 28A, 28C as shown in FIG. In the case of changing to, the end-side male screw member 52 disposed in each end-side through hole 37B of the end block 5B and the through-holes 33B, 33C of the second and third body blocks 4B, 4C are disposed. Each fastening member 47 is removed with a tool, and the connection between the end block 5B, the third body block 4C, and the second body block 4B is released. Thereafter, the direction of the second body block 4B is reversed around the mounting hole 23B, and the direction of the joint portion 28B is changed by 180 degrees. Along with this, the first and second side surfaces 4b and 4c of the third body block 4C are interchanged, but the opening positions of the through passages 21B provided in the first and second side surfaces 4b and 4c, the seal grooves 34B and 22B, The positions and the opening positions of the through holes 33A, 33A, 33A, 33A are also replaced as they are, and the arrangement is not changed. Therefore, the inverted second body block 4B can be connected to the first body block 4A using the seal member 50 and the fastening member 47 as they are. Similarly, the second body block 4B can be connected to the third body block 4C. If the end block 5B is connected to the third body block 4C using the end-side male screw member 52, the flow path configuration of the manifold 3 can be changed by changing the direction of the joint portion 28B.

  Further, when the manifold 3 having the triple structure shown in FIG. 1 is changed to the double structure shown in FIG. 9, after the connection between the end block 5B and the third body block 4C is released, the end block 5B The end block 5B is connected to the second body block 4B by fastening the end side male screw member 52 inserted into the end portion through hole 37B to the nut 44 fixed to the counterbore hole 31B of the second body block 4B. That's fine.

  Furthermore, when the manifold 3 having the triple structure shown in FIG. 1 is changed to the quadruple structure shown in FIG. 10, the end block 5B is removed from the third body block 4C, and the fourth body block 4D is replaced with the third body block. 4C may be connected using the fastening member 47, and then the end block 5B may be connected to the fourth body block 4D using the end side male screw member 52.

  Thus, since the manifold structure 1 of the fluid device of the first embodiment can connect any number of body blocks 4 without limiting the orientation of the body block 4, the body block 4 is shared, Cost can be reduced. Further, if the direction of the joint block 28 is changed by reversing the direction of the body block 4 by 180 degrees, the flow path configuration can be easily changed without using another type of body block having a different flow path configuration or seal structure.

  Further, the end blocks 5A and 5B shown in FIG. 2 are configured so that the end side joint portions 36A and 36B communicate with the through channels 21A, 21B and 21C via the end side through channels 35A and 35B. Input and output the working fluid flowing through 21A, 21B, and 21C. Here, the end blocks 7 </ b> A and 7 </ b> B shown in FIG. 11 are inserted into the open end of the through flow channel 21 to close the open end of the through flow channel 21 when connected to the body block 4. 8A and 8B are provided. Therefore, if the end blocks 5A and 5B shown in FIG. 2 are replaced with the end blocks 7A and 7B shown in FIG. 11, the first to third body blocks 4A, 4B and 4C having the same structure are connected. The flow path configuration of the manifold 3 shown in FIG. 2 can be changed to a flow path configuration including only the joint portions 28A, 28B, and 28C as shown in FIG. In the flow path configuration shown in FIG. 11, for example, the working fluid supplied to the joint portion 28A is output from one or both of the joint portions 28B and 28C, or the working fluid supplied to the joint portions 28A and 28B. Can be mixed and output from the joint portion 28C.

  Furthermore, the first and third body blocks 4A and 4B shown in FIG. 2 may be replaced with the end block 9 shown in FIG. The end block 9 has the same configuration as the body block 4 except that the end block 9 includes a flow path 10 formed from one of the side surfaces to the valve hole 24 instead of the through flow path 21. The inner wall at the end of the flow path 10 serves as a closing portion that stops the flow of fluid. Therefore, according to the flow path configuration shown in FIG. 12, both ends of the through flow path 21B can be closed without using the end blocks 7A and 7B as shown in FIG. It can be reduced to save space.

As described above, the manifold structure 1 of the fluid device according to the first embodiment is optional in a state where the first to third body blocks 4A, 4B, and 4C are connected by exchanging the end blocks 5, 7, and 9. The flow path configuration can be adopted.
Moreover, the end block 5 is provided with an end-side through hole 37 at a position corresponding to the through-hole 33 of the body block 4, and the end-side connecting member 51 is disposed in the end-side through hole 37. 4 is connected to the first side surface 4b or the second side surface 4c, so that it can be used as it is even when the direction of the body block 4 is changed.

  The manifold structure 1 of the fluid device according to the first embodiment includes, for example, a fastening member 47 inserted into the second body block 4B in each nut 44 disposed in the counterbore holes 31A, 31A, 31A, 31A of the first body block 4A. Since the first body block 4A and the second body block 4B are coupled by fastening (see FIG. 4, FIG. 6 (c), FIG. 7 (c)), the body is formed using the nut 44 and the fastening member 47. It is possible to increase or decrease the block 4 by one unit. As described above, the manifold structure 1 of the fluid device according to the first embodiment can connect the body block 4 by any number of stations using the nut 44 and the fastening member 47. Therefore, the nut 44 and the fastening member 47 are shared. Cost reduction can be achieved.

In addition, the manifold structure 1 of the fluid device of the first embodiment has a nut 44 whose overall length is longer than the depth of the counterbore holes 30 and 31, a counterbore hole 31A of the first body block 4A, and a counterbore hole 30B of the second body block 4B. In the state where the first and second body blocks 4A and 4B are positioned, the fastening member 47 inserted into the second body block 4B is fastened to the nut 44, whereby the first and second body The blocks 4A and 4B are connected (see FIGS. 6C and 7C). Therefore, a fastening force can be generated on the surface where the first and second body blocks 4A and 4B abut, and the first and second body blocks 4A and 4B can be firmly abutted.
In particular, a seal member 50 is disposed between the first and second body blocks 4A and 4B so as to surround the connection portion outside of the through flow passages 21A and 21B, and the nut 44 is fastened to the outside of the seal member 50. Since the sealing member 50 is crushed by generating the fastening force with the member 47 at four locations (see FIGS. 2 and 4), the outside of the connecting portion of the through flow passages 21A and 21B can always be sealed with a stable sealing force.

2. Second Embodiment Subsequently, a second embodiment of the manifold structure of the fluid device of the present invention will be described.

A. Overall Configuration FIG. 13 is a plan view of a manifold 61 used in the manifold structure of the fluid device in the second embodiment. 14 is a cross-sectional view taken along the line CC of FIG. 15 is a cross-sectional view taken along the line DD of FIG. 16 is an exploded perspective view of the manifold shown in FIG.
A manifold 61 shown in FIG. 13 is provided with a valve 2 (fluid device) as in the first embodiment, and constitutes a manifold structure of the fluid device. The manifold 61 is different from the connection structure of the first embodiment shown in FIG. 4 in the connection structure shown in FIGS. 14 and 15, and the other points are common. Therefore, the manifold 61 is exactly the same in appearance and flow path configuration as shown in FIG. 13 as the manifold 3 of the first embodiment. Therefore, here, it demonstrates centering on a different point from 1st Embodiment, and abbreviate | omits description about a common point suitably. In the second embodiment, the subscripts A, B, and C for distinguishing the component parts are appropriately omitted if it is not necessary to distinguish the component parts.

  As shown in FIGS. 14 and 15, the first to third body blocks 4A, 4B, 4C are formed of the counterbore holes 38A, 38A, 38A, 38A of the end block 5A and the counterbore holes of the first body block 4A. The space formed between 30A, 30A, 30A, 30A and the counterbore holes 31A, 31A, 31A, 31A of the first body block 4A and the counterbore holes 30B, 30B, 30B, 30B of the second body block 4B The nuts 66 are alternately arranged in the space formed therebetween, and the male screw members 67 are inserted into the connection holes 42A, 42B, and 42C of the first, second, and third body blocks 4A, 4B, and 4C corresponding to the nuts 66. Are respectively connected and fastened to the nuts 66 to be connected in the lateral direction. Therefore, in the second embodiment, the “coupling member” is configured by the nut 66 and the male screw member 67.

The male screw member 67 has a total length W4 longer than the width dimension W3 of the body block 4 and shorter than a width dimension W3 × 2 when two body blocks 4 are connected. In other words, the male screw member 67 extends from the counterbore 31 provided in the body block 4 to the through hole 33 of the body block 4 and the through holes 33 of the other body blocks 4 so as not to interfere with the handling of the body block 4. The full length is set to such a length that the tip does not protrude from the other body block 4 when inserted.
The nut 66 is formed by forming a metal into a cylindrical shape and forming an internal thread portion 45 corresponding to the external thread member 67 on the inner peripheral surface. The nut 66 has a diameter slightly larger than the hole diameter of the counterbored holes 30 and 31, and has a total length shorter than the depth of the counterbored holes 30 and 31, and is press-fitted and fixed in a state of entering the counterbored holes 30 and 31. .

  On the other hand, the end block 62 includes an end-side through hole 63 instead of the end-side through hole 37 of the first embodiment. The end portion side through hole 63 includes an end portion side counterbore hole 64 and an end portion side connection hole 65. The end side counterbore hole 64 is opened in the same shape as the counterbore holes 30 and 31 of the body block 4 only on the side surface where the end side joint portion 36 is provided. On the other hand, the end-side connection hole 65 has a smaller diameter than the end-side counterbore hole 64 and is provided coaxially with the end-side counterbore hole 64. Therefore, one end of the end portion side connection hole 65 is connected to the end portion side counterbore hole 64, and the other end is opened to the side surface facing the side surface where the end portion side joint portion 36 is provided. An end-side male screw member 68 is disposed in the end-side through hole 63. The end-side male screw member 68 is made of metal in order to ensure rigidity. When the full length of the end-side male screw member 68 is inserted into the end-side through hole 63 of the end block 62 and the through-hole 33 of the body block 4 so as not to disturb the handling of the connected body block 4. In addition, both ends are set to a length that does not protrude from the end block 62 or the body block 4.

B. Next, a method for assembling the manifold 61 will be described with reference to FIG. For convenience of explanation, the diagonal position provided on the first diagonal line that rises to the right from the joint portion 28 side of the manifold 4 is referred to as a first diagonal position, and the first diagonal position that is lowered to the right from the joint portion 28 side of the manifold 4. A diagonal position provided on two diagonal lines is referred to as a second diagonal position.
The first body block 4A is connected to the end block 62A. That is, first, using a press-fitting tool or the like, the nuts 66 are respectively inserted into the end side counterbored holes 64A and 64A (see FIG. 15) at the second diagonal position across the end side joint portion 36A of the end block 62A. Press fit and fix. Further, in order to connect the next second body block 4B, the counterbore holes 30A at the first diagonal position among the counterbore holes 30A, 30A, 30A, 30A opened in the first side surface 4b of the first body block 4A, A nut 66 is press-fitted and fixed to 30A. Then, the seal member 50 is lightly fitted between the seal groove 34A of the first body block 4A and the seal groove 40A of the end block 62A, and the first body block 4A and the end block 62A are aligned.

  Then, the end-side male screw member 68 is attached to the driver, and the end-side male screw member 68 is inserted from one of the through holes 33A provided at the second diagonal position of the first body block 4A. When the end of the end-side male screw member 68 reaches the nut 66, the end-side male screw member 68 is tightened into the nut 66 press-fitted and fixed in the end-side counterbore hole 64A (see FIG. 15) of the end block 62A. . When the end-side male screw member 68 hits the head against a step formed between the counterbore hole 31A and the connection hole 32A and can no longer rotate, the tool is removed from the end-side male screw member 68 and pulled out. Thus, the end-side male screw member 68 is fixedly disposed through the through-hole 33A of the first body block 4A and the end-side through-hole 63A of the end block 62A. Are connected to the end block 62A. Similarly, the end-side male screw member 68 is fixedly disposed in another through-hole 33A provided at the second diagonal position of the first body block 4A.

  The end block 62A and the first body block 4A are connected by the fastening force of the end-side male screw members 68, 68 disposed at the second diagonal position. Since the fastening force of the end-side male screw members 68 and 68 is regulated by a step provided between the counterbored hole 31A and the connection hole 32A, it is substantially equal. Therefore, the seal member 50 disposed between the end block 62A and the first body block 4A is substantially in the circumferential direction by a fastening force that is generated substantially evenly at positions facing each other across the seal grooves 40A and 34A. It is crushed with a uniform force and generates a stable sealing force.

  Thereafter, the second body block 4B is connected to the first body block 4A. Of the counterbored holes 30A, 30A, 30A, 30A opened to the first side surface 4b of the second body block 4B using a press-fit tool or the like, nuts 66 are provided in the counterbored holes 30A, 30A provided at the second diagonal position. Press fit and fix. Then, the seal member 50 is lightly fitted between the seal groove 34B of the second body block 4B and the seal groove 22A of the first body block 4A, and the second body block 4B is positioned with respect to the first body block 4A.

  Then, the male screw member 67 is attached to the tip of the tool, and the male screw member 67 is inserted into one of the through holes 33B provided at the first diagonal position of the second body block 4B. When the distal end portion of the male screw member 67 reaches the nut 66 press-fitted and fixed in the counterbore hole 30A of the first body block 4A, the male screw member 67 is screwed into the nut 66. When the head of the male screw member 67 hits a step formed between the counterbore hole 31B and the connection hole 32B and the male screw member 67 cannot be rotated any more, the tool is removed from the male screw member 67 and pulled out. As a result, the male screw member 67 passes through the through hole 33B of the second body block 4B and the through hole 33A of the first body block 4A and is fixedly disposed in the second body block 4B. Connect to 4A. Similarly, the male screw member 67 is fixedly disposed in the other through holes 33A and 33B provided at the first diagonal positions of the first and second body blocks 4A and 4B.

  The second body block 4B is connected to the first body block 4A by the fastening force of the male screw members 67 and 67 arranged at the first diagonal position. The fastening force of the male screw members 67 and 67 is regulated by a step formed between the counterbore hole 31B and the connection hole 32B. Therefore, the sealing member 50 disposed between the first and second body blocks 4A and 4B has a uniform force in the circumferential direction due to a fastening force that is generated substantially evenly at positions facing each other across the sealing grooves 22A and 34B. It is crushed by and generates a stable sealing force.

  Further, the third body block 4C is connected to the second body block 4B at the second diagonal position in the same manner as the connection procedure of the first and second body blocks 4A and 4B.

  Thereafter, after positioning the end block 62B and the third body block 4C via the seal member 50, the end-side male screw member is inserted into the end-side through hole 63B provided at the first diagonal position of the end block 62B. 68 is inserted and screwed into the nut 66 press-fitted and fixed in the counterbore 30A of the third body block 4C. Thus, the end block 62B is connected to the third body block 4C in a state where the seal member 50 disposed between the end block 62B and the third body block 4C is crushed.

C. Effects The fluid structure manifold structure of the second embodiment described above fastens, for example, a male screw member 67 inserted into the second body block 4B to a nut 66 disposed in the counterbore hole 30A of the first body block 4A. Thus, since the first body block 4A and the second body block 4B are connected, the body block 4 can be added by one unit using the nut 66 and the male screw member 67. Thus, since the manifold structure of the fluid device of the second embodiment can connect the body block 4 in any number using the nut 66 and the male screw member 67, the nut 66 and the male screw member 67 are shared, Cost can be reduced.

Further, the manifold structure of the fluid device of the second embodiment is configured such that the male screw members 67 are alternately arranged in the through holes 33A provided in the first diagonal position and the through holes 33A provided in the second diagonal position. 4 is connected. Therefore, the manifold 61 can reduce the number of nuts 66 and male screw members 67 necessary for connecting the body blocks 4 to more than half the number of nuts 44 and fastening rods 42 used in the first embodiment, thereby reducing costs. it can.
In the manifold structure according to the second embodiment, a nut 66 is disposed in the vicinity where the body blocks 4 are in contact with each other, that is, in a place slightly entering the counterbore hole 66 from the contact surface of the body block 4. The male block members 67 are screwed into the body blocks 4 to individually connect the body blocks 4 with a certain force. Therefore, the manifold structure of the fluid device according to the second embodiment includes the seal member 50 disposed between the adjacent body blocks 4 even if the adjacent body blocks 4 are connected by only the two male screw members 67. By crushing with a substantially uniform force in the circumferential direction, a stable sealing force is generated, and fluid leakage can be prevented.

In addition, this invention is not limited to the said embodiment, Various application is possible.
(1) In the above embodiment, the air operated valve 2 is used as an example of the fluid device, but a regulator, a pressure gauge, a flow meter, an electromagnetic valve, or the like may be used as the fluid device.
(2) In the above embodiment, the body block is formed of resin, but may be formed of metal such as SUS.
(3) In the above embodiment, the body block 4 has four through holes 33 outside the through flow path 21, but two, three, or five or more through holes 33 around the through flow path 21. May be provided. Also in this case, the through channel 21, the seal grooves 34 and 22, and the through hole 33 are provided symmetrically in the body block 4, and the opening of the through channel 21, the seal grooves 34 and 33, and the opening of the through hole 33 are provided. Since the body block 4 can be freely inverted and connected to another body block 4, the same parts can be shared and the cost can be reduced.
(4) In the above embodiment, the seal grooves 34 and 22 corresponding to the H-shaped seal member 50 are provided in the first and second side surfaces 4b and 4c of the body block 4, but a seal member such as an annular rubber ring is used. A sealing groove having a rectangular cross section or a semicircular cross section may be provided in an annular shape outside the opening of the through flow passage 21 so as to be mounted.
(5) In the above embodiment, the branch flow path 25 for forming the valve chamber 19 is constituted by the bottomed recess 23 and the valve hole 24. However, when a pressure gauge, a flow sensor or the like is mounted as a fluid device, The branch channel 25 may be formed with the same thickness so as to communicate with the through channel 21 from the mounting surface 4a of the body block 4.
(6) Although the external appearance of the body block 4 is a hexahedron shape in the above embodiment, a shape such as a regular cube shape or a decahedron shape can be obtained by providing a first side surface and a second side surface that face each other across the mounting surface. It is not limited.
(7) In the above embodiment, the body block 4 is individually added using the connecting member 41, the nut 44, and the male screw member 67. On the other hand, a long connecting member that matches the horizontal dimension of the manifold 3 is inserted into the first to third body blocks 4A, 4B, 4C to connect the first to third body blocks 4A, 4B, 4C. May be. Also in this case, since the shape of the first side surface 4b and the second side surface 4c of the body block 4 is the same, even if one of the body blocks 4 is inverted, another body block is used using a long connecting member. Needless to say, it can be linked to.
(8) In the second embodiment, the through hole 33 provided at the first diagonal position of the body block 4 is referred to as “specific through hole”, and the through hole provided at the second diagonal position is referred to as “specific through hole”. Through-holes ". The relationship between the “specific through-hole” and the “through-hole other than the specific through-hole” is not limited to the diagonal position. For example, six through-holes are provided at equal intervals around the through-flow channel 21, and an equilateral triangle A through hole at a position may be a “specific through hole”, and a through hole at a different equilateral triangle position (a position where the male screw member 67 is not disposed) may be a “through hole other than the specific through hole”.
(9) In the second embodiment, the nut 66 is press-fitted and fixed. However, it may be previously provided integrally with the body block 4 by insert molding to reduce the labor and time required for assembling the manifold 61.

It is a front view which shows the manifold structure of the fluid apparatus which concerns on 1st Embodiment of this invention. It is a center longitudinal cross-sectional view of the manifold structure of the fluid apparatus shown in FIG. It is AA sectional drawing of FIG. It is BB sectional drawing of FIG. It is an external appearance perspective view of the body block shown in FIG. FIG. 2 is an external perspective view showing a method of assembling the manifold shown in FIG. 1, wherein (a) shows a method of fixing a nut to the end block, and (b) shows a method of connecting the end block and the first body block. (C) shows the method of connecting the first body block and the second body block. It is principal part sectional drawing which shows the assembly method of the manifold shown in FIG. 1, (a) shows the method of fixing a nut to an end block, (b) shows the method of connecting an end block and a 1st body block. (C) shows the method of connecting a 1st body block and a 2nd body block. It is the modification which changed the joint part direction of the manifold shown in FIG. It is the modification which changed the body block of the manifold shown in FIG. 1 into 2 stations. It is the modification which changed the body block of the manifold shown in FIG. 1 into 4 stations. It is the modification which changed the edge part block of the manifold shown in FIG. 1 from what is provided with a joint part into what is provided with a closing part. It is the modification which replaced the 1st, 3rd body block shown in FIG. 1 with the body block of another shape. It is a top view of the manifold used for the manifold structure of the fluid apparatus which concerns on 2nd Embodiment of this invention. It is CC sectional drawing of FIG. It is DD sectional drawing of FIG. It is a disassembled perspective view of the manifold shown in FIG. It is sectional drawing which shows the conventional manifold valve structure. It is the P section expanded sectional view of the manifold valve structure shown in FIG.

Explanation of symbols

1 Fluid equipment manifold structure 2 (2A, 2B, 2C) Valve (fluid equipment)
3 Manifold 4 (4A, 4B, 4C) Body block 21 (21A, 21B, 21C) Through channel 22 (22A, 22B, 22C) Seal groove 25 (25A, 25B, 25C) Branch channel 30 (30A, 30B, 30C) Counterbored hole 31 (31A, 31B, 31C) Counterbored hole 32 (32A, 32B, 32C) Connection hole 33 (33A, 33B, 33C) Through hole 34 (34A, 34B, 34C) Seal groove 41 Connecting member 42 Fastening rod 44 Nut (Female thread member)
47 Fastening member 52 Male thread member 61 Manifold 66 Nut 67 Male thread member

Claims (7)

In a fluid device manifold structure in which a plurality of body blocks to which a fluid device is attached are connected in the lateral direction to form a manifold,
The body block is
A through channel formed in a direction perpendicular to the mounting direction of the fluid device;
A seal groove provided outside the opening of the through-flow channel;
A plurality of through-holes provided outside the through-flow path, in which a connecting member for connecting the body block to another body block is disposed;
A branch channel formed so as to be connected to the through channel from an attachment surface to which the fluid device is attached,
The first side surface and the second side surface facing each other across the mounting surface are provided with the opening portion of the through flow path, the seal groove, and the opening portion of the through hole symmetrically. Manifold structure for fluid equipment. In the manifold structure of the fluid device according to claim 1,
The fluid device is a valve;
The branched channel is formed with a bottomed recess that forms a valve chamber between the valve and the valve attached to the mounting surface, and is formed coaxially with the bottomed recess and communicates the bottomed recess with the through channel. Consisting of a valve hole,
The body block is
A valve seat is provided along the outside of the opening of the valve hole;
A joint portion projecting from the third side surface interposed between the first side surface and the second side surface;
A joint flow path for connecting the joint portion to the bottomed recess is provided;
A fluid device manifold structure. In the manifold structure of the fluid device according to claim 1 or 2,
A joint portion that communicates with the through-flow passage in a state connected to the body block, or a closing portion that closes an opening portion of the through-flow passage in a state connected to the body block. It has an end block in which an end side through hole is formed at a corresponding position,
The fluid block manifold is connected to the first side surface or the second side surface of the body block using an end side connecting member disposed in the end side through hole. Structure.   A body block for use in a manifold structure of a fluid device according to any one of claims 1 to 3. In the manifold structure of the fluid device that forms a manifold by horizontally connecting body blocks to which the fluid device can be attached,
The body block is
A plurality of through holes for disposing the connecting member are formed in a direction orthogonal to the mounting direction of the fluid device, and the through hole is opposite to the first side surface across the mounting surface to which the fluid device is mounted. A plurality of counterbore holes opened on two side surfaces, and a hole diameter smaller than the hole diameter of the counterbore hole, and a connection hole that connects and communicates the first side surface and the counterbore formed on the second side surface;
The connecting member comprises a female screw member disposed in the counterbore hole and a fastening member disposed in the connection hole;
The first body block and the second body block are connected to the female screw member arranged in the counterbore hole of the first body block in a state where the fastening member inserted through the second body block is fastened. A fluid device manifold structure. In the manifold structure of the fluid device according to claim 5,
The female screw member has a total length longer than the depth of the counterbore,
The fastening member is obtained by fastening the female screw member to one end of a fastening rod formed with male screw portions at both ends, and the overall length of the fastening rod is longer than the connection hole and shorter than the width dimension of the body block. A fluid device manifold structure. In the manifold structure of the fluid device according to claim 5,
The fastening member is a male screw member whose overall length is longer than the width dimension of the body block and shorter than the width dimension when two of the body blocks are continuously provided,
The first body block and the second body block that are connected to each other have the male screw member disposed in a through hole specified from among a plurality of through holes, and are connected to the second body block and the second body block. The third body block is a manifold structure for a fluid device, wherein the male screw member is disposed in a corresponding through hole other than the specified through hole.

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