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JP2008060241A - High resistance rare-earth permanent magnet - Google Patents

High resistance rare-earth permanent magnet Download PDF

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JP2008060241A
JP2008060241A JP2006233804A JP2006233804A JP2008060241A JP 2008060241 A JP2008060241 A JP 2008060241A JP 2006233804 A JP2006233804 A JP 2006233804A JP 2006233804 A JP2006233804 A JP 2006233804A JP 2008060241 A JP2008060241 A JP 2008060241A
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rare earth
magnet
fluoride layer
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earth fluoride
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JP4700578B2 (en
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Satoru Hirozawa
哲 広沢
Sensuke Nozawa
宣介 野澤
Matahiro Komuro
又洋 小室
Yuuichi Satsuu
祐一 佐通
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Hitachi Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • H01F41/0293Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets diffusion of rare earth elements, e.g. Tb, Dy or Ho, into permanent magnets

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Abstract

<P>PROBLEM TO BE SOLVED: To provide a high resistance rare-earth permanent magnet to which high electric resistance is imparted and which exhibits an excellent magnetic characteristic, and to provide its manufacturing method. <P>SOLUTION: The high resistance rare-earth permanent magnet has the excellent characteristic where a relative density is not less than 98%, intrinsic coercitivity is not less than 800 kA/m, and volume resistance ratio is not less than 2 μΩm, by using a rare-earth fluorine compound as an insulating layer and optimizing a magnet composition. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、エレベータ、電動自動車、ハイブリッド自動車などに使用される高速回転機を構成する、体積抵抗率の高い希土類系永久磁石に関する。   The present invention relates to a rare earth permanent magnet having a high volume resistivity and constituting a high-speed rotating machine used for an elevator, an electric vehicle, a hybrid vehicle, and the like.

Nd−Fe−B系磁石に代表されるR−Fe−B系磁石(R:Yを含む希土類元素)などの希土類系磁石は、高い磁気特性を有していることから、スピンドルモータやステッピングモータなどのモータに多く用いられ、近年、モータの小型化に伴いその需要が増加している。
中でも、所定の組成を有する希土類系磁石合金を水素中で加熱して水素を吸蔵させた後、脱水素処理し、次いで冷却してから粉砕することによって得られる、磁気的異方性を有するHDDR(Hydrogenation-Disproportionation-Desorption-Recombination)磁石粉末(例えば特許文献1や特許文献2などを参照)を用いて所定形状に加熱成形したボンド磁石は、磁気特性に優れることから、これまで磁気的等方性希土類系ボンド磁石などが用いられていた製品への応用展開に注目が高まっている。
しかしながら、希土類系ボンド磁石は、樹脂バインダを含んでいるために希土類系焼結磁石に比較すれば磁気特性が低くなる。HDDR磁石粉末から高密度化バルク磁石を製造することができれば、その優れた磁気特性を有効に発揮させることができるので望ましいことであり、それについては特許文献3や特許文献4で提案されている。
ところが、高密度化バルク磁石は樹脂バインダを用いたボンド磁石に比べて電気抵抗が低い。一般的なNd−Fe−B系焼結磁石の体積抵抗率は1.2μΩm程度であるが、高密度化バルク磁石の体積抵抗率もこれと同等である。このため、モータに組み込んだ場合、渦電流損が増大し、モータ効率を低下させる問題が生じる。そこで、希土類系永久磁石の電気抵抗を高めて、この問題を解決する技術が各種提案されている。
例えば、特許文献5には、希土類系永久磁石用粉末粒子がSiO粒子およびAl粒子の少なくとも一方で結着された構造を有する希土類系永久磁石が提案されている。この提案に基づけば、磁石粒子の間にSiO粒子およびAl粒子の少なくとも一方が存在していると、磁石の電気抵抗を高めることができる。しかしながら、SiO粒子およびAl粒子を希土類系永久磁石に対して単独で加えると、磁石の電気抵抗を上昇させることができても、その一方で磁気特性の大幅な低下を引き起こしてしまう。これでは、中〜大出力モータには適用が難しい。
この問題を解決するために、磁石中で希土類フッ化物を絶縁層として用いる技術が特許文献6で提案されている。この技術は優れたものとして評価されているが、希土類フッ化物の粉末を用いるため、十分な絶縁を確保するには絶縁層の厚みを0.1μm(100nm)以上とする必要があり、よってその体積比率を低く設定できないので磁石成分の体積比率が相対的に低下し、必ずしも充分高い磁気特性が得られない。
そこで、特許文献7には、磁石中で希土類フッ化物の絶縁層を100nm以下の薄さで形成し得る手法が開示されている。特許文献7の技術に依れば、磁石成分の体積比率を極度に低下させることなく体積抵抗率の高い希土類系永久磁石を製造することができる。しかしながら、特許文献7では、磁石の電気抵抗を高めることに主眼が置かれていることから、電気抵抗を高めた上で優れた磁気特性を発揮させるための磁石組成の最適化に関する検討は為されていない。
特公平6−82575号公報 特公平7−68561号公報 特開平4−246803号公報 特開平4−253304号公報 特開平10−321427号公報 特開2006−66853号公報 特開2006−66870号公報
Since rare earth magnets such as R-Fe-B magnets (R: rare earth elements including Y) represented by Nd-Fe-B magnets have high magnetic properties, spindle motors and stepping motors In recent years, the demand for such motors has increased with the miniaturization of motors.
Among them, an HDDR having magnetic anisotropy obtained by heating a rare-earth magnet alloy having a predetermined composition in hydrogen to occlude hydrogen, then dehydrogenating, cooling and then pulverizing. (Hydrogenation-Disproportionation-Desorption-Recombination) Bonded magnets heat-formed into a predetermined shape using magnet powder (see, for example, Patent Document 1 and Patent Document 2) have excellent magnetic properties, so Attention has been focused on the development of applications for products that used conductive rare earth bonded magnets.
However, since the rare earth-based bonded magnet contains a resin binder, the magnetic properties are lower than that of the rare-earth sintered magnet. If it is possible to manufacture a high-density bulk magnet from HDDR magnet powder, it is desirable because it can effectively exhibit its excellent magnetic properties, which is proposed in Patent Document 3 and Patent Document 4. .
However, a high-density bulk magnet has a lower electrical resistance than a bonded magnet using a resin binder. The volume resistivity of a general Nd—Fe—B sintered magnet is about 1.2 μΩm, but the volume resistivity of a high-density bulk magnet is also equivalent to this. For this reason, when it is incorporated in a motor, eddy current loss increases, resulting in a problem of reducing motor efficiency. Thus, various techniques for solving this problem by increasing the electric resistance of rare earth permanent magnets have been proposed.
For example, Patent Document 5 proposes a rare earth permanent magnet having a structure in which powder particles for rare earth permanent magnets are bound to at least one of SiO 2 particles and Al 2 O 3 particles. Based on this proposal, if at least one of SiO 2 particles and Al 2 O 3 particles is present between the magnet particles, the electrical resistance of the magnet can be increased. However, if SiO 2 particles and Al 2 O 3 particles are added alone to a rare earth-based permanent magnet, the electrical resistance of the magnet can be increased, but on the other hand, the magnetic properties are greatly deteriorated. . This is difficult to apply to medium to high output motors.
In order to solve this problem, Patent Document 6 proposes a technique using a rare earth fluoride as an insulating layer in a magnet. Although this technology has been evaluated as excellent, since rare earth fluoride powder is used, the thickness of the insulating layer needs to be 0.1 μm (100 nm) or more in order to ensure sufficient insulation. Since the volume ratio cannot be set low, the volume ratio of the magnet component is relatively lowered, and sufficiently high magnetic properties cannot always be obtained.
Thus, Patent Document 7 discloses a technique capable of forming a rare earth fluoride insulating layer with a thickness of 100 nm or less in a magnet. According to the technique of Patent Document 7, a rare earth-based permanent magnet having a high volume resistivity can be manufactured without extremely reducing the volume ratio of the magnet component. However, since Patent Document 7 focuses on increasing the electrical resistance of a magnet, studies on optimizing a magnet composition for exhibiting excellent magnetic properties after increasing electrical resistance have been made. Not.
Japanese Patent Publication No. 6-82575 Japanese Patent Publication No. 7-68561 JP-A-4-246803 JP-A-4-253304 Japanese Patent Laid-Open No. 10-32427 JP 2006-66853 A JP 2006-66870 A

そこで本発明は、高い電気抵抗が付与されているとともに優れた磁気特性を発揮する高抵抗希土類系永久磁石とその製造方法を提供することを目的とする。   Accordingly, an object of the present invention is to provide a high-resistance rare earth-based permanent magnet that has high electrical resistance and exhibits excellent magnetic properties, and a method for manufacturing the same.

発明者らは上記の点に鑑み、磁石中で希土類フッ化物を絶縁層として用いたHDDRバルク磁石に関する検討を詳細に行ったところ、その製造工程で希土類フッ化物層とHDDR磁石粉末が化学反応し、該化学反応が得られる磁石の磁気特性に影響を及ぼすようであること、そのため、希土類フッ化物層を設けることで高い電気抵抗が付与されたHDDRバルク磁石においては、磁気特性を最大限に発揮できる磁石組成が限定されていることを知見した。   In view of the above points, the inventors have conducted a detailed study on HDDR bulk magnets using rare earth fluoride as an insulating layer in a magnet. In the manufacturing process, the rare earth fluoride layer and HDDR magnet powder chemically react. The chemical reaction seems to affect the magnetic properties of the magnets that can be obtained. Therefore, HDDR bulk magnets that are provided with a high electrical resistance by providing a rare earth fluoride layer exhibit the maximum magnetic properties. It has been found that the magnet composition that can be produced is limited.

上記の知見に基づいてなされた本発明の高抵抗希土類系永久磁石は、請求項1記載の通り、
主として、NdFe14B型結晶構造を有する磁石粒子と、該磁石粒子の表面に存在する希土類フッ化物層によって構成され、
相対密度が磁石粒子の体積比率と希土類フッ化物層の体積比率の合計から算定される真密度の98%以上であり、
磁石粒子は平均粒子径が20μm〜150μmであり、
組成式:R(Fe1−mCo1−x−y−z(RはPrおよびNdの少なくとも1つが70%以上を占め、残部がある場合には残部はランタニド系列の元素から選ばれる少なくとも1つからなる。Qは、BまたはBをCで部分置換したもの。MはTi,V,Cr,Mn,Ni,Cu,Al,Ga,In,Sn,Ta,Zr,Nb,Mo,Wからなる群から選ばれる少なくとも1つからなる。
xは12at%〜18at%、
yは5.5at%〜8at%、
zは0at%〜10at%、
mは0〜0.2である)を満足し、
磁石粒子を構成するNdFe14B型結晶相は平均結晶粒径が200nm〜700nmであり、
磁石粒子の磁化容易方向が粒子内部で特定方向に概ね揃っており、
磁石としての固有保磁力が800kA/m以上であり、体積抵抗率が2μΩm以上であることを特徴とする。
また、請求項2記載の高抵抗希土類系永久磁石は、請求項1記載の高抵抗希土類系永久磁石において、磁石粒子の体積比率と希土類フッ化物層の体積比率の合計に対する希土類フッ化物層の体積比率の割合が0.1%〜10%であることを特徴とする。
また、請求項3記載の高抵抗希土類系永久磁石は、請求項1または2記載の高抵抗希土類系永久磁石において、希土類フッ化物層が希土類元素としてLa,Ce,Pr,Nd,Tb,Dy,Hoからなる群から選ばれる少なくとも1つを含み、その含有量が希土類フッ化物層に含まれる希土類元素全体の少なくとも50at%以上であることを特徴とする。
また、請求項4記載の高抵抗希土類系永久磁石は、請求項1から3のいずれかに記載の高抵抗希土類系永久磁石において、残留磁束密度が磁石粒子の体積比率と希土類フッ化物層の体積比率の合計から算定される飽和磁気分極の80%以上であることを特徴とする。
また、請求項5記載の高抵抗希土類系永久磁石は、請求項1から4のいずれかに記載の高抵抗希土類系永久磁石において、希土類フッ化物層の平均厚みが10nm〜5μmであることを特徴とする。
また、本発明の高抵抗希土類系永久磁石の製造方法は、請求項6記載の通り、
組成式:R(Fe1−mCo1−x−y−z(RはPrおよびNdの少なくとも1つが70%以上を占め、残部がある場合には残部はランタニド系列の元素から選ばれる少なくとも1つからなる。Qは、BまたはBをCで部分置換したもの。MはTi,V,Cr,Mn,Ni,Cu,Al,Ga,In,Sn,Ta,Zr,Nb,Mo,Wからなる群から選ばれる少なくとも1つからなる。
xは12at%〜18at%、
yは5.5at%〜8at%、
zは0at%〜10at%、
mは0〜0.2である)を満足し、
平均粒子径が20μm〜150μmであるNdFe14B型結晶構造を有する磁石粒子をHDDR法によって製造し、
該磁石粒子の表面に希土類フッ化物層を形成し、
表面に希土類フッ化物層を有する磁石粒子を、温度を600℃〜900℃にしてから20MPa〜200MPaの圧力を印加して熱間成形を行い、相対密度が磁石粒子の体積比率と希土類フッ化物層の体積比率の合計から算定される真密度の98%以上とすることを特徴とする。
また、請求項7記載の製造方法は、請求項6記載の製造方法において、熱間成形を行う前に磁界配向を行うことを特徴とする。
The high resistance rare earth-based permanent magnet of the present invention made based on the above knowledge is as described in claim 1.
Mainly composed of magnet particles having an Nd 2 Fe 14 B type crystal structure and a rare earth fluoride layer present on the surface of the magnet particles,
The relative density is 98% or more of the true density calculated from the sum of the volume ratio of the magnet particles and the volume ratio of the rare earth fluoride layer,
The magnet particles have an average particle size of 20 μm to 150 μm,
Composition formula: R x (Fe 1-m Co m) 1-x-y-z Q y M z (R although at least one of Pr and Nd accounts for 70% or more, the balance lanthanide series if there is balance Q is B or B partially substituted with C. M is Ti, V, Cr, Mn, Ni, Cu, Al, Ga, In, Sn, Ta, Zr. , Nb, Mo, W, at least one selected from the group consisting of.
x is 12 at% to 18 at%,
y is 5.5 at% to 8 at%,
z is 0 at% to 10 at%,
m is 0 to 0.2),
The Nd 2 Fe 14 B type crystal phase constituting the magnet particles has an average crystal grain size of 200 nm to 700 nm,
The direction of easy magnetization of magnet particles is generally aligned in a specific direction inside the particles,
The intrinsic coercive force as a magnet is 800 kA / m or more, and the volume resistivity is 2 μΩm or more.
The high resistance rare earth based permanent magnet according to claim 2 is the high resistance rare earth based permanent magnet according to claim 1, wherein the volume of the rare earth fluoride layer relative to the sum of the volume ratio of the magnet particles and the volume ratio of the rare earth fluoride layer. The ratio is 0.1% to 10%.
The high resistance rare earth permanent magnet according to claim 3 is the high resistance rare earth permanent magnet according to claim 1 or 2, wherein the rare earth fluoride layer is composed of La, Ce, Pr, Nd, Tb, Dy, It contains at least one selected from the group consisting of Ho, and its content is at least 50 at% or more of the entire rare earth element contained in the rare earth fluoride layer.
The high resistance rare earth based permanent magnet according to claim 4 is the high resistance rare earth based permanent magnet according to any one of claims 1 to 3, wherein the residual magnetic flux density is a volume ratio of magnet particles and a volume of the rare earth fluoride layer. It is characterized by being 80% or more of the saturation magnetic polarization calculated from the sum of the ratios.
The high-resistance rare earth-based permanent magnet according to claim 5 is the high-resistance rare earth-based permanent magnet according to any one of claims 1 to 4, wherein the average thickness of the rare earth fluoride layer is 10 nm to 5 μm. And
Moreover, the manufacturing method of the high resistance rare earth based permanent magnet of the present invention is as described in claim 6.
Composition formula: R x (Fe 1-m Co m) 1-x-y-z Q y M z (R although at least one of Pr and Nd accounts for 70% or more, the balance lanthanide series if there is balance Q is B or B partially substituted with C. M is Ti, V, Cr, Mn, Ni, Cu, Al, Ga, In, Sn, Ta, Zr. , Nb, Mo, W, at least one selected from the group consisting of.
x is 12 at% to 18 at%,
y is 5.5 at% to 8 at%,
z is 0 at% to 10 at%,
m is 0 to 0.2),
Magnet particles having an Nd 2 Fe 14 B type crystal structure having an average particle diameter of 20 μm to 150 μm are manufactured by the HDDR method,
Forming a rare earth fluoride layer on the surface of the magnet particles;
Magnet particles having a rare earth fluoride layer on the surface are hot-formed by applying a pressure of 20 MPa to 200 MPa after the temperature is set to 600 ° C. to 900 ° C., and the relative density is the volume ratio of the magnet particles to the rare earth fluoride layer. The true density calculated from the total volume ratio is 98% or more.
The manufacturing method according to claim 7 is characterized in that, in the manufacturing method according to claim 6, magnetic field orientation is performed before hot forming.

本発明によれば、希土類フッ化物を絶縁層として用いることで高い電気抵抗が付与されているとともに、磁石組成が最適化されていることで優れた磁気特性を発揮する高抵抗希土類系永久磁石とその製造方法を提供することができる。   According to the present invention, a high-resistance rare earth-based permanent magnet that provides high electrical resistance by using rare earth fluoride as an insulating layer and exhibits excellent magnetic properties by optimizing the magnet composition, A manufacturing method thereof can be provided.

以下、本発明の高抵抗希土類系永久磁石とその製造方法について説明する。   Hereinafter, the high resistance rare earth based permanent magnet of the present invention and the manufacturing method thereof will be described.

<出発合金の組成>
本発明の高抵抗希土類系永久磁石を製造するために用いる出発合金は、
組成式:R(Fe1−mCo1−x−y−z(RはPrおよびNdの少なくとも1つが70%以上を占め、残部がある場合には残部はランタニド系列の元素から選ばれる少なくとも1つからなる。Qは、BまたはBをCで部分置換したもの。MはTi,V,Cr,Mn,Ni,Cu,Al,Ga,In,Sn,Ta,Zr,Nb,Mo,Wからなる群から選ばれる少なくとも1つからなる。
xは12at%〜18at%、
yは5.5at%〜8at%、
zは0at%〜10at%、
mは0〜0.2である)を満足する組成を有するものである。ここで、ランタニド系列の元素としては、例えば、La,Ce,Sm,Gd,Tb,Dy,Ho,Er,Tm,Ybが挙げられる。
<Composition of starting alloy>
The starting alloy used to produce the high resistance rare earth permanent magnet of the present invention is:
Composition formula: R x (Fe 1-m Co m) 1-x-y-z Q y M z (R although at least one of Pr and Nd accounts for 70% or more, the balance lanthanide series if there is balance Q is B or B partially substituted with C. M is Ti, V, Cr, Mn, Ni, Cu, Al, Ga, In, Sn, Ta, Zr. , Nb, Mo, W, at least one selected from the group consisting of.
x is 12 at% to 18 at%,
y is 5.5 at% to 8 at%,
z is 0 at% to 10 at%,
m is 0 to 0.2). Here, examples of the lanthanide series elements include La, Ce, Sm, Gd, Tb, Dy, Ho, Er, Tm, and Yb.

本発明者らの検討によると、希土類フッ化物を絶縁層として用いたHDDRバルク磁石においては、HDDR磁石粒子の表面に形成した希土類フッ化物層が磁石粒子と化学反応することにより、磁石粒子の磁気特性に影響を与えるようである。具体的には、希土類フッ化物がHDDR磁石粒子に含まれるRを奪う形で反応する(例えばRF→RF)。この反応による磁石粒子のRの減少量自体は無視し得るが、高密度化バルク磁石として800kA/m以上の固有保磁力(HcJ)を得るためには、出発合金中のRの含有量は12at%以上必要であることがわかった(磁石粒子のRの減少量は無視し得るので出発合金中のRの含有量が磁石粒子のRの含有量に相当する)。なお、Rの含有量が増えるに従い、残留磁束密度(B)は減少するので、Rの含有量の上限は18at%以下とする。800kA/mよりさらに良好な固有保磁力と、高い残留磁束密度を両立させるためには、Rの含有量は、12.6at%〜18at%が好ましく、12.6at%〜14at%がより好ましく、12.8at%〜13.8at%がさらに好ましい。高い保磁力を得るためには、Rの一部にDyやTbを含ませることが有効であるが、Dyおよび/またはTbの増加は、HDDR反応の進行を阻害するため、その置換量はR全体に対して30at%以下とすることが好ましい。 According to the study by the present inventors, in an HDDR bulk magnet using a rare earth fluoride as an insulating layer, the rare earth fluoride layer formed on the surface of the HDDR magnet particle chemically reacts with the magnet particle, thereby causing magnetism of the magnet particle. It seems to affect the characteristics. Specifically, the rare earth fluoride reacts in a manner that takes away R contained in the HDDR magnet particles (for example, RF 3 → RF 2 ). Although the reduction amount of R of the magnet particles due to this reaction can be ignored, in order to obtain an intrinsic coercive force (H cJ ) of 800 kA / m or more as a high-density bulk magnet, the content of R in the starting alloy is It was found that 12 at% or more is necessary (the amount of R decrease in the magnet particles is negligible, so the R content in the starting alloy corresponds to the R content in the magnet particles). As the R content increases, the residual magnetic flux density (B r ) decreases, so the upper limit of the R content is 18 at% or less. In order to achieve both an intrinsic coercivity better than 800 kA / m and a high residual magnetic flux density, the R content is preferably 12.6 at% to 18 at%, more preferably 12.6 at% to 14 at%, 12.8 at% to 13.8 at% is more preferable. In order to obtain a high coercive force, it is effective to include Dy or Tb in a part of R. However, since the increase in Dy and / or Tb inhibits the progress of the HDDR reaction, the amount of substitution is R It is preferable to be 30 at% or less with respect to the whole.

Qは、BまたはBをCで部分置換したものであり、その含有量は、5.5at%〜8at%とするが、5.8at%〜6.5at%が好ましい。   Q is obtained by partially substituting B or B with C, and the content thereof is set to 5.5 at% to 8 at%, but preferably 5.8 at% to 6.5 at%.

また、磁石の磁気特性の向上などを目的として、鉄族遷移金属であるTi,V,Cr,Mn,Ni,Cuや、Al,Ga,In,Sn,Ta,Zr,Nb,Mo,Wを含んでいてもよい。ただし、その含有量の増加は、特に磁化の低下を招く。従って、その含有量は総量で全体の10at%以下とする。   For the purpose of improving the magnetic properties of magnets, iron group transition metals such as Ti, V, Cr, Mn, Ni, Cu, Al, Ga, In, Sn, Ta, Zr, Nb, Mo, and W are used. May be included. However, an increase in the content particularly causes a decrease in magnetization. Therefore, the total content is 10 at% or less of the total.

Feは、Nd−Fe−B系永久磁石の主要成分であり、最も大きな強磁性的に結合する原子磁気モーメントを持ち、しかも、価格が低廉であるので、その含有量はできるだけ多いことが好ましい。なお、Feの一部をCoで置換することによりキュリー温度を上昇させることができる。Coの含有量がFeの含有量とCoの含有量の合計の約20%までであれば、室温近傍における磁化が大きく低下することはない。   Fe is a main component of the Nd—Fe—B permanent magnet, has the largest ferromagnetically coupled atomic magnetic moment, and is inexpensive, so its content is preferably as high as possible. Note that the Curie temperature can be increased by replacing part of Fe with Co. If the Co content is up to about 20% of the total of the Fe content and the Co content, the magnetization in the vicinity of room temperature does not drop significantly.

CoはHDDR法における合金の水素化反応に対して直接的に影響を与える元素であり、Coの含有量によってその適正反応条件が大きく異なる。Coの含有量が少ないと水素化反応における平衡水素圧力が低下し、多いと増加する傾向がある。これは水素圧力が一定の条件下では、Coの含有量が少ないと適正反応温度が低下し、多いと上昇することと等価である。Coの含有量が約5at%よりも少ない場合、水素化反応を進行させる通常の温度以下の全ての温度範囲において平衡水素圧力が大気圧を下回る。よって、大気圧中で昇温すると適正反応速度で反応させることができなくなる結果、高い磁気特性を有するHDDR磁石粉末が得られなくなる。ただし、この場合には、水素分圧が平衡水素圧力以下の気体中または真空中で昇温した後、適正反応温度で水素を導入する方法を取り得る。従って、Coの含有量の下限値は0at%であってもよい。一方、Coの含有量の上限値は次のように考える。即ち、Coの含有量がCoの含有量とFeの含有量の合計の約20%よりも多い場合、平衡水素圧力が高くなり、それに伴い水素の使用量が圧力に比例して増加するので好ましくなく、また、処理設備に対して炉内を十分に加圧できるだけの強度設計が必要となるので、設備コストの増加を招く。従って、Coの含有量の上限値はCoの含有量とFeの含有量の合計の約20%とすることが好ましい。   Co is an element that directly affects the hydrogenation reaction of the alloy in the HDDR method, and the appropriate reaction conditions vary greatly depending on the Co content. When the Co content is low, the equilibrium hydrogen pressure in the hydrogenation reaction decreases, and when it is high, the equilibrium hydrogen pressure tends to increase. This is equivalent to lowering the appropriate reaction temperature when the Co content is low and increasing it when the hydrogen pressure is constant. When the Co content is less than about 5 at%, the equilibrium hydrogen pressure is below atmospheric pressure in all temperature ranges below the normal temperature at which the hydrogenation reaction proceeds. Therefore, if the temperature is raised at atmospheric pressure, the reaction cannot be performed at an appropriate reaction rate, and as a result, HDDR magnet powder having high magnetic properties cannot be obtained. However, in this case, a method of introducing hydrogen at an appropriate reaction temperature after raising the temperature in a gas having a hydrogen partial pressure equal to or lower than the equilibrium hydrogen pressure or in a vacuum can be employed. Therefore, the lower limit value of the Co content may be 0 at%. On the other hand, the upper limit of the Co content is considered as follows. That is, when the Co content is more than about 20% of the total of the Co content and the Fe content, the equilibrium hydrogen pressure is increased, and accordingly, the amount of hydrogen used is preferably increased in proportion to the pressure. In addition, since it is necessary to design the strength to sufficiently pressurize the inside of the furnace with respect to the processing equipment, the equipment cost increases. Accordingly, the upper limit of the Co content is preferably about 20% of the total of the Co content and the Fe content.

<出発合金粉末の作製方法>
出発合金は、公知の合金作製方法、例えば、ブックモールド法や、遠心鋳造法、ストリップキャスト法、アトマイズ法、拡散還元法などによって得ることができる。
<Preparation method of starting alloy powder>
The starting alloy can be obtained by a known alloy production method such as a book mold method, a centrifugal casting method, a strip casting method, an atomizing method, a diffusion reduction method, or the like.

これらの方法で得られる合金に対して、マクロ偏析の解消や結晶粒の粗大化、α−Fe相の減少などを目的として、均質化熱処理を行ってもよい。   An alloy obtained by these methods may be subjected to homogenization heat treatment for the purpose of eliminating macro segregation, coarsening of crystal grains, reduction of α-Fe phase, and the like.

これらの方法で得られる合金は、合金組織中に同一結晶方向を向いたNdFe14B型化合物相領域が20μm以上ある金属組織を有していることが、最終的に高い磁気特性、特に飽和磁束密度(Br)を得る上で重要である。 Alloys obtained by these methods have a metal structure in which the Nd 2 Fe 14 B type compound phase region oriented in the same crystal direction in the alloy structure has a thickness of 20 μm or more. This is important in obtaining the saturation magnetic flux density (Br).

これらの方法で得られた合金は、公知の方法で粉砕され、出発合金粉末となる。粉砕方法としては、ジョークラッシャーなどを用いた機械的粉砕法や、水素吸蔵崩壊法が主に用いられる。本発明の効果を十分に得るためには、粉砕によって得られる出発合金粉末の平均粒径は、10μm〜500μmが好ましく、30μm〜150μmがより好ましい。   The alloy obtained by these methods is pulverized by a known method to form a starting alloy powder. As the pulverization method, a mechanical pulverization method using a jaw crusher or the like, and a hydrogen storage / disintegration method are mainly used. In order to sufficiently obtain the effects of the present invention, the average particle size of the starting alloy powder obtained by pulverization is preferably 10 μm to 500 μm, more preferably 30 μm to 150 μm.

<HDDR処理>
HDDR処理は、HD処理(水素化:Hydrogenationと不均化:Disproportionation)およびDR処理(脱水素化:Desorptionと再結合化:Recombination)からなり、これらの処理は、連続的または非連続的(例えばHD処理とDR処理を別の設備で実施するなど)に行われる。
<HDDR processing>
The HDDR process consists of an HD process (hydrogenation and disproportionation) and a DR process (dehydrogenation and recombination), which can be continuous or discontinuous (eg, HD processing and DR processing are performed in separate facilities).

HD処理は、Hガス中またはHガスと不活性ガス(例えばArやHeなど)の混合ガス中、750℃〜950℃で行なわれる。HD処理時の水素分圧は、合金組成によって適宜選定されるが、通常、10kPa〜500kPaである。処理時間は、通常、10分〜10時間、典型的には20分〜5時間である。 The HD treatment is performed at 750 ° C. to 950 ° C. in H 2 gas or a mixed gas of H 2 gas and inert gas (for example, Ar, He, etc.). The hydrogen partial pressure during HD treatment is appropriately selected depending on the alloy composition, but is usually 10 kPa to 500 kPa. The treatment time is usually 10 minutes to 10 hours, typically 20 minutes to 5 hours.

HD処理を行った後、DR処理を行う。DR処理時の雰囲気の制御方法(雰囲気ガス種、圧力、温度、時間)は、公知の方法を適宜採用すればよいが、例えば、不活性ガス(例えばArやHeなど)雰囲気中や真空雰囲気中において、処理温度750℃〜900℃、処理時間10分〜5時間といった方法が挙げられる。なお、DR処理時の雰囲気を、例えば、水素分圧を段階的に下げたり、減圧圧力を段階的に下げたりするなどして、段階的に制御してもよいことは言うまでもない。   After performing HD processing, DR processing is performed. As a control method (atmosphere gas type, pressure, temperature, time) of the DR treatment, a known method may be adopted as appropriate. For example, in an inert gas (eg, Ar or He) atmosphere or in a vacuum atmosphere , A processing temperature of 750 ° C. to 900 ° C., a processing time of 10 minutes to 5 hours, and the like. Needless to say, the atmosphere during the DR process may be controlled stepwise by, for example, decreasing the hydrogen partial pressure stepwise or decreasing the reduced pressure stepwise.

<解砕、粉砕>
DR処理が終了した後に室温まで冷却されたHDDR磁石粉末は、弱い凝集体となっている場合がある。この場合には、公知の方法で磁石粉末の解砕を行えばよい。また、最終的な目的に応じてさらに粉砕による粒度調整を行っても構わない。粉砕方法は、公知の粉砕技術を用いることができるが、粉砕時の磁石粉末の酸化を抑制するためには、Arなどの不活性ガス雰囲気中で粉砕を行うことが好ましい。
<Crushing and grinding>
The HDDR magnet powder that has been cooled to room temperature after the completion of the DR treatment may be a weak aggregate. In this case, the magnet powder may be crushed by a known method. Further, the particle size may be adjusted by pulverization according to the final purpose. As a pulverization method, a known pulverization technique can be used. However, in order to suppress oxidation of the magnet powder during pulverization, it is preferable to perform pulverization in an inert gas atmosphere such as Ar.

以上のHDDR処理により得られる磁石粒子は、NdFe14B型結晶構造を有し、平均結晶粒径が200nm〜700nmである多数の一次粒子を内包し、それらの一次結晶粒の磁化容易方向が特定方向に配向しており、800kA/m以上の固有保磁力を有する平均粒子径が20μm〜150μmの二次粒子である。 The magnet particles obtained by the above HDDR treatment have a Nd 2 Fe 14 B type crystal structure, include a large number of primary particles having an average crystal grain size of 200 nm to 700 nm, and the direction of easy magnetization of these primary crystal grains Are secondary particles having an average particle diameter of 20 μm to 150 μm and having an intrinsic coercive force of 800 kA / m or more.

<磁石粒子の表面への希土類フッ化物層の形成>
磁石粒子の表面に形成する絶縁層としての希土類フッ化物層は、例えば、LaF,CeF,PrF,NdF,NdF,SmF,EuF,GdF,TbF,DyF,HoF,ErF,YbF,LuFなどの希土類フッ化物からなる。絶縁層を構成する化合物として希土類フッ化物を用いることで、Nd−Fe−B系HDDR磁石粉末の優れた磁気特性を維持させたまま、緻密化して高密度化バルク磁石を製造することができる。希土類フッ化物層に含まれる希土類元素は1種類であってもよいし複数種類であってもよい。希土類フッ化物層が希土類元素としてLa,Ce,Pr,Nd,Tb,Dy,Hoからなる群から選ばれる少なくとも1つを含み、その含有量が希土類フッ化物層に含まれる希土類元素全体の少なくとも50at%以上とした場合、磁気特性に優れたバルク磁石が得られやすくなる。とりわけ好適な希土類元素はPr,Nd,Tb,Dyであり、これらの希土類元素からなる群から選ばれる少なくとも1つを選択することで、通常の方法でHDDR磁石粉末を用いて製造されたボンド磁石と同等またはそれ以上の保磁力を有するホットプレスバルク磁石を得ることができる。なお、希土類フッ化物は、希土類元素とフッ素とで構成されるものであるが、これらの他に、酸素,窒素,炭素などが構成元素として含まれていてもよい。また、希土類フッ化物層には、希土類フッ化物に加え、MgFやCaFなどのアルカリ土類フッ化物が含まれていてもよい。磁石成分の体積比率を極度に低下させることなく高い電気抵抗を付与するためには、磁石粒子の体積比率と希土類フッ化物層の体積比率の合計に対する希土類フッ化物層の体積比率の割合は0.1%〜10%であることが好ましく、また、希土類フッ化物層の平均厚みは10nm〜5μmであることが好ましい。
<Formation of rare earth fluoride layer on the surface of magnet particles>
The rare earth fluoride layer as an insulating layer formed on the surface of the magnet particle is, for example, LaF 3 , CeF 3 , PrF 3 , NdF 3 , NdF 2 , SmF 3 , EuF 3 , GdF 3 , TbF 3 , DyF 3 , HoF. 3 , rare earth fluorides such as ErF 3 , YbF 3 , and LuF 3 . By using rare earth fluoride as the compound constituting the insulating layer, it is possible to produce a densified bulk magnet by densification while maintaining the excellent magnetic properties of the Nd-Fe-B HDDR magnet powder. The rare earth element contained in the rare earth fluoride layer may be one kind or plural kinds. The rare earth fluoride layer contains at least one selected from the group consisting of La, Ce, Pr, Nd, Tb, Dy, and Ho as the rare earth element, and the content thereof is at least 50 at least of the entire rare earth element contained in the rare earth fluoride layer. When it is at least%, a bulk magnet having excellent magnetic properties can be easily obtained. Particularly suitable rare earth elements are Pr, Nd, Tb, and Dy. By selecting at least one selected from the group consisting of these rare earth elements, a bonded magnet manufactured by using the HDDR magnet powder in a usual manner. It is possible to obtain a hot-pressed bulk magnet having a coercive force equivalent to or higher than. The rare earth fluoride is composed of a rare earth element and fluorine, but in addition to these, oxygen, nitrogen, carbon and the like may be included as a constituent element. In addition to the rare earth fluoride, the rare earth fluoride layer may contain an alkaline earth fluoride such as MgF 2 or CaF 2 . In order to provide high electrical resistance without extremely reducing the volume ratio of the magnet component, the ratio of the volume ratio of the rare earth fluoride layer to the sum of the volume ratio of the magnet particles and the volume ratio of the rare earth fluoride layer is 0. It is preferably 1% to 10%, and the average thickness of the rare earth fluoride layer is preferably 10 nm to 5 μm.

希土類フッ化物層は、HDDR処理した磁石粒子の表面に、スパッタリング法、蒸着法、溶射法、溶液を利用した塗布法などの手法により形成することができる。これらの手法の中では、工業的操業の容易さと操業の効率性の観点から溶液を利用した塗布法を採用することが好ましい。   The rare earth fluoride layer can be formed on the surface of the HDDR-treated magnet particle by a technique such as sputtering, vapor deposition, thermal spraying, or coating using a solution. Among these methods, it is preferable to employ a coating method using a solution from the viewpoints of easy industrial operation and operational efficiency.

溶液を利用した塗布法では、希土類フッ化物を含む溶液(溶媒としてはアルコールが例示される)を用いて希土類フッ化物層を磁石粒子の表面に形成する。この方法によれば、後の工程で加熱して固体化することで希土類フッ化物層となる被膜が、溶液中で磁石粒子の表面全体乃至一部において成長しながら表面に沿って形成される。磁石粒子の表面の溶媒を除去した後、この希土類フッ化物被膜を表面に有する磁石粒子を好適には400℃〜800℃で加熱することで、希土類フッ化物被膜を固体化し、希土類フッ化物層とする。この加熱温度の上限は、HDDR磁石粉末の磁気特性の低下を回避し、かつ、希土類フッ化物層と磁石粒子との間で起こる化学反応の進行による絶縁性の低下を回避するための観点から設定される。溶液中で磁石粒子の表面に希土類フッ化物被膜を成長させる際、予め磁石粒子の表面に酸化層を形成しておいて、その酸化層を下地にして希土類フッ化物被膜を成長させたり、予め磁石粒子と異なる組成の希土類元素を含む層を磁石粒子の表面に形成しておいて、その層を下地にして希土類フッ化物被膜を成長させたりすることで、希土類フッ化物層が磁石粒子の表面に直接的に形成されないようにしてもよい。希土類フッ化物被膜をこのような下地の表面に形成して加熱処理を行った場合、下地である酸化層の一部が希土類フッ化物層と混合したり、磁石粒子と異なる組成の希土類元素を含む層の一部が希土類フッ化物層と相互拡散を起こしたりし、希土類フッ化物層の厚みが厚くなる。このような下地の厚みと希土類フッ化物層の厚みの関係は、加熱処理の熱履歴により変化するが、下地の厚みよりも希土類フッ化物層の厚みの方が厚くなると、損失低減効果が低下する傾向がある。なお、このような両者の厚みの関係は、磁石粒子の表面や粒界の表面などの比較的平坦な場所における関係であり、粒界3重点や磁石粒子の突起部などの特殊な場所における関係ではない。ここで、「比較的平坦な場所」とは、磁石粒子の鋭角部でない部分であり、希土類フッ化物層の厚みがその平均厚みの−50%〜+200%の範囲内にある場所である。溶液を利用した塗布法を採用した場合、希土類フッ化物層の厚みがその平均厚みの−50%〜+200%の範囲内にある場所の面積が、磁石粒子の表面全体の面積の50%以上にすることが可能である。   In a coating method using a solution, a rare earth fluoride layer is formed on the surfaces of magnet particles using a solution containing a rare earth fluoride (an alcohol is exemplified as a solvent). According to this method, a film that becomes a rare earth fluoride layer by heating and solidifying in a later step is formed along the surface while growing on the entire surface or part of the surface of the magnet particles in the solution. After removing the solvent on the surface of the magnet particles, the magnet particles having the rare earth fluoride coating on the surface are preferably heated at 400 ° C. to 800 ° C. to solidify the rare earth fluoride coating, To do. The upper limit of the heating temperature is set from the viewpoint of avoiding a decrease in magnetic properties of the HDDR magnet powder and avoiding a decrease in insulation due to the progress of a chemical reaction occurring between the rare earth fluoride layer and the magnet particles. Is done. When a rare earth fluoride film is grown on the surface of a magnet particle in a solution, an oxide layer is previously formed on the surface of the magnet particle, and the rare earth fluoride film is grown on the oxide layer as a base, or a magnet is previously formed. A layer containing a rare earth element having a composition different from that of the particles is formed on the surface of the magnet particle, and the rare earth fluoride layer is grown on the surface of the magnet particle by growing a rare earth fluoride coating on the layer. It may not be formed directly. When a rare earth fluoride film is formed on the surface of such a base and heat-treated, a part of the underlying oxide layer is mixed with the rare earth fluoride layer or contains a rare earth element having a composition different from that of the magnet particles. A part of the layer causes mutual diffusion with the rare earth fluoride layer, and the thickness of the rare earth fluoride layer increases. The relationship between the thickness of the base and the thickness of the rare earth fluoride layer varies depending on the heat history of the heat treatment, but if the thickness of the rare earth fluoride layer becomes thicker than the thickness of the base, the loss reduction effect decreases. Tend. The relationship between the thicknesses of the two is a relationship in a relatively flat place such as the surface of the magnet particle or the surface of the grain boundary, and a relationship in a special place such as the triple point of the grain boundary or the protrusion of the magnet particle. is not. Here, the “relatively flat location” is a portion that is not an acute angle portion of the magnet particle, and is a location where the thickness of the rare earth fluoride layer is within a range of −50% to + 200% of the average thickness. When a coating method using a solution is adopted, the area of the rare earth fluoride layer having a thickness within the range of −50% to + 200% of the average thickness is 50% or more of the entire surface of the magnet particles. Is possible.

<希土類フッ化物層を表面に有する磁石粒子を用いたバルク磁石化>
公知の方法によって熱間成形を行うことで高密度化することにより行う。なお、磁石の高性能化を図るために、熱間成形を行う前に異方性付加のための磁界配向を行ってもよい。こうすることで、磁石の残留磁束密度を磁石粒子の体積比率と希土類フッ化物層の体積比率の合計から算定される飽和磁気分極(Js)の80%以上とすることができる。
<Bulk magnetization using magnet particles having a rare earth fluoride layer on the surface>
It is performed by densifying by hot forming by a known method. In order to improve the performance of the magnet, magnetic field orientation for adding anisotropy may be performed before hot forming. By doing so, the residual magnetic flux density of the magnet can be made 80% or more of the saturation magnetic polarization (Js) calculated from the sum of the volume ratio of the magnet particles and the volume ratio of the rare earth fluoride layer.

磁界配向を効率的に行うためには、希土類フッ化物層を形成したHDDR磁石粉末は充分に解砕し、粉体として流動する状態かつ磁石粒子が磁界によるトルクで回転して配向できる状態にしておく必要がある。このような磁石粉末を磁界の存在下で型の中で圧縮成形して磁化容易方向が整列した仮成形体を得る。この時、磁石粒子の表面に存在する希土類フッ化物層が圧下力により破壊されてしまって磁石粒子間の絶縁性がとれなくなることを回避するため、成形圧力を調整することが重要である。   In order to efficiently perform magnetic field orientation, the HDDR magnet powder with the rare earth fluoride layer is sufficiently crushed so that it can flow as powder and the magnet particles can be rotated and oriented with torque by the magnetic field. It is necessary to keep. Such a magnet powder is compression molded in a mold in the presence of a magnetic field to obtain a temporary molded body in which easy magnetization directions are aligned. At this time, it is important to adjust the molding pressure in order to avoid that the rare earth fluoride layer present on the surface of the magnet particles is broken by the rolling force and insulation between the magnet particles cannot be taken.

HDDR磁石粉末のバルク磁石化は、具体的には、例えば、真空容器内で非酸化性雰囲気(例えばArなどを用いた不活性ガス雰囲気)下、温度を600℃〜900℃にしてから20MPa〜200MPaの圧力を印加して熱間成形を行って緻密化することにより行う。成形時間は標準的には30分〜120分である。このように、成形圧力を加熱開始時から印加したり、成形温度に到達させる途中で印加したりするのではなく、成形温度に到達させてから印加するのは次の理由による。HDDR磁石粒子は、室温近傍では塑性変形しにくく脆いため、室温近傍で過大な圧力を印加すると、磁石粒子が壊れてしまう性質を有する。従って、希土類フッ化物層が表面に存在するHDDR磁石粒子に室温近傍で成形圧力を印加すると、希土類フッ化物層も破壊されてしまって膜としての連続性が失われ、もはや得られる成形体が高い電気抵抗を保持することは困難となる。これに対し、HDDR磁石粒子は、高温では塑性変形しやすくなる。その変形メカニズムは、磁石粒子の内部にNdに富む液相成分が生成することによる粒界すべりであると考えられている。この変形メカニズムにより磁石粒子が塑性変形できる温度は約600℃以上である。これに加え、今般、本発明者らは、HDDR磁石粒子が塑性変形可能となる温度域において、希土類フッ化物層が展延性を獲得することを実験によりはじめて知見した。よって、成形圧力の印加を成形温度に到達させた後に行うことで、HDDR磁石粒子を塑性変形させることが可能になるとともに、その表面に存在する希土類フッ化物層を展延させることが可能になる。従って、成形温度未満では緻密化を目的とする成形圧力を印加せず、成形温度に到達させた後にはじめて成形圧力を印加することにより、磁石粒子の表面に希土類フッ化物層が存在することによる絶縁性を確保した状態で、磁石粒子間の隙間を埋めるように磁石粒子を塑性変形させてバルク磁石の緻密化が可能になる。   Specifically, the HDDR magnet powder is converted into a bulk magnet, for example, in a non-oxidizing atmosphere (for example, an inert gas atmosphere using Ar or the like) in a vacuum vessel, and after the temperature is changed from 600 ° C. to 900 ° C., 20 MPa to It is carried out by applying a pressure of 200 MPa to perform hot forming and densifying. The molding time is typically 30 minutes to 120 minutes. In this way, the molding pressure is not applied from the start of heating or applied in the middle of reaching the molding temperature, but is applied after reaching the molding temperature for the following reason. Since HDDR magnet particles are difficult to plastically deform near room temperature and are brittle, they have the property that when excessive pressure is applied near room temperature, the magnet particles break. Therefore, when molding pressure is applied to HDDR magnet particles having a rare earth fluoride layer on the surface at around room temperature, the rare earth fluoride layer is also destroyed and the continuity as a film is lost. It becomes difficult to maintain electrical resistance. On the other hand, HDDR magnet particles are easily plastically deformed at high temperatures. The deformation mechanism is considered to be grain boundary sliding due to the generation of a liquid phase component rich in Nd inside the magnet particles. The temperature at which the magnet particles can be plastically deformed by this deformation mechanism is about 600 ° C. or higher. In addition to this, the present inventors have now found for the first time through experiments that the rare earth fluoride layer acquires ductility in a temperature range in which HDDR magnet particles can be plastically deformed. Therefore, by applying the molding pressure after reaching the molding temperature, the HDDR magnet particles can be plastically deformed, and the rare earth fluoride layer existing on the surface can be spread. . Therefore, if the molding pressure is applied only after reaching the molding temperature without applying the molding pressure for the purpose of densification below the molding temperature, insulation due to the presence of the rare earth fluoride layer on the surface of the magnet particles is achieved. In such a state, the bulk magnets can be densified by plastically deforming the magnet particles so as to fill the gaps between the magnet particles.

こうして得られる本発明の高密度化磁石は、磁石粒子を構成するNdFe14B型結晶相の平均結晶粒径が200nm〜700nmであること、それらの磁化容易方向が特定方向に配向していること、平均粒子径が20μm〜150μmの磁石粒子の表面には希土類フッ化物層が絶縁層として存在していることといった構成要素が、隙間無く圧密化されることで得られるものであり、相対密度がNdFe14B型結晶構造を有する磁石粒子の体積比率と希土類フッ化物層の体積比率の合計から算定される真密度の98%以上で、磁石粒子の磁化容易方向が粒子内部で特定方向に概ね揃っており、磁石としての固有保磁力が800kA/m以上であり、体積抵抗率が2μΩm以上である磁石の内部組織が形成される。 The densified magnet of the present invention thus obtained has an average crystal grain size of the Nd 2 Fe 14 B type crystal phase constituting the magnet particles of 200 nm to 700 nm, and their easy magnetization direction is oriented in a specific direction. And a component such that a rare earth fluoride layer exists as an insulating layer on the surface of magnet particles having an average particle diameter of 20 μm to 150 μm is obtained by compacting without gaps, The density is 98% or more of the true density calculated from the sum of the volume ratio of the magnet particles having the Nd 2 Fe 14 B type crystal structure and the volume ratio of the rare earth fluoride layer, and the easy magnetization direction of the magnet particles is specified inside the particles. An internal structure of the magnet is formed that is generally aligned in the direction, has an intrinsic coercive force of 800 kA / m or more, and a volume resistivity of 2 μΩm or more.

なお、磁石粒子の体積比率と希土類フッ化物層の体積比率の合計(含有体積比率)から算定される真密度に対する相対密度X(%)は、得られた磁石の密度Vを測定し、磁石粒子(真密度A)の体積比率と希土類フッ化物層(真密度B)の体積比率の合計αから算定される真密度を100%として、以下の式により算出することができる。   In addition, relative density X (%) with respect to the true density calculated from the sum of the volume ratio of the magnet particles and the volume ratio of the rare earth fluoride layer (containing volume ratio) is obtained by measuring the density V of the obtained magnet, The true density calculated from the sum α of the volume ratio of (true density A) and the volume ratio of the rare earth fluoride layer (true density B) can be calculated by the following formula, assuming that the true density is 100%.

(数1)
X(%)={V/(A×(100−α)+(B×α))}×100
(Equation 1)
X (%) = {V / (A × (100−α) + (B × α))} × 100

以下、本発明を実施例によってさらに詳細に説明するが、本発明はこれに限定して解釈されるものではない。   EXAMPLES Hereinafter, although an Example demonstrates this invention further in detail, this invention is limited to this and is not interpreted.

実施例A:
例えば特許文献1や特許文献2などに記載の方法に順じ、組成式:NdDyCo16Zr0.09Ga0.56.5Febal(Nd含有量xが12.4at%〜12.9at%でDy含有量yが0と0.3at%)を満足する組成の4種類の合金を作製し、HDDR処理を施して、表1に示す磁気特性を有する平均粒子径が約80μmの磁石粒子(HDDR磁石粉末)を得た。
Example A:
For example, in accordance with the methods described in Patent Document 1 and Patent Document 2, the composition formula: Nd x Dy y Co 16 Zr 0.09 Ga 0.5 B 6.5 Fe bal (Nd content x is 12.4 at%) Four types of alloys having compositions satisfying ˜12.9 at% and Dy content y of 0 and 0.3 at%) were prepared and subjected to HDDR treatment, and the average particle diameter having magnetic properties shown in Table 1 was about 80 μm magnet particles (HDDR magnet powder) were obtained.

Figure 2008060241
Figure 2008060241

以下のプロセスにより上記の磁石粒子の表面に希土類フッ化物層を形成した。
(1)Ndフッ化物層を形成するためのNdF被膜形成処理液を次のようにして調製した。最初に水に溶解度の高いNd塩(例えば酢酸ネオジム水和物など)を水と混合し、攪拌溶解させ、その後、希釈したフッ化水素酸(1wt%〜10wt%)を徐々に添加した。このような操作により液中にゲル状沈殿のNdフッ化物(NdF)が生成した溶液をさらに攪拌し、遠心分離後、上澄み液を除去し、メタノールを添加した。このようにして得られたNdFを含むメタノール溶液を攪拌し、遠心分離後、上澄み液を除去し、再びメタノールを添加することで、腐食性イオンを除去したNdFを含むメタノール溶液を得、これを処理液とした。
(2)HDDR磁石粉末100gに対してNdF被膜形成処理液を10mL添加し、磁石粉末全体が濡れるのが確認できるまで混合した。
(3)NdF被膜形成処理液で処理したHDDR磁石粉末(NdF被膜が表面に形成された磁石粒子)から、270Pa〜670Paの減圧下で、メタノールを除去した。
(4)メタノールを除去した磁石粉末を石英製ボートに移し、1.3×10−3Paの減圧下で、200℃×30分の熱処理と400℃×30分の熱処理を行った。
(5)熱処理を行った磁石粉末を蓋付き容器に移し、1.3×10−3Paの減圧下で、400℃〜800℃×30分の熱処理を行い、磁石粒子の表面に形成されたNdF被膜を固体化し、NdF層とした。
A rare earth fluoride layer was formed on the surface of the magnet particles by the following process.
(1) A NdF 3 film forming treatment liquid for forming an Nd fluoride layer was prepared as follows. First, an Nd salt having high solubility in water (for example, neodymium acetate hydrate) was mixed with water and dissolved by stirring, and then diluted hydrofluoric acid (1 wt% to 10 wt%) was gradually added. The solution in which the gel-like precipitate Nd fluoride (NdF 3 ) was generated in the liquid by such operation was further stirred, centrifuged, the supernatant was removed, and methanol was added. The methanol solution containing NdF 3 thus obtained was stirred, centrifuged, the supernatant was removed, and methanol was added again to obtain a methanol solution containing NdF 3 from which corrosive ions had been removed, This was used as a treatment liquid.
(2) 10 mL of NdF 3 film forming treatment liquid was added to 100 g of HDDR magnet powder and mixed until it was confirmed that the entire magnet powder was wet.
(3) Methanol was removed under reduced pressure of 270 Pa to 670 Pa from HDDR magnet powder (magnet particles with NdF 3 coating formed on the surface) treated with the NdF 3 coating forming treatment liquid.
(4) The magnet powder from which methanol was removed was transferred to a quartz boat and subjected to heat treatment at 200 ° C. × 30 minutes and 400 ° C. × 30 minutes under reduced pressure of 1.3 × 10 −3 Pa.
(5) The heat-treated magnet powder was transferred to a lidded container, and heat treatment was performed at 400 ° C. to 800 ° C. for 30 minutes under a reduced pressure of 1.3 × 10 −3 Pa to form the surface of the magnet particles. The NdF 3 coating was solidified to form an NdF 3 layer.

上記のようにして磁石粒子の表面に形成されたNdF層は、磁石粉末と反応することにより一部がNdFに変化していた。磁石粒子の体積比率とNdF層の体積比率の合計に対するNdF層の体積比率の割合は約3%で、その平均厚みは約600nmであった。 The NdF 3 layer formed on the surface of the magnet particles as described above partially changed to NdF 2 by reacting with the magnet powder. Ratio of the volume ratio of the NdF 3 layer to the total volume ratio of the volume ratio and the NdF 3 layers of magnet particles is about 3%, the average thickness was about 600 nm.

NdF層を形成したHDDR磁石粉末を、ホットプレス用金型に無配向で装填し、真空ホットプレス装置を用いて真空雰囲気(<10−3Pa)中で設定到達温度700℃まで昇温速度10℃/minで加熱し、設定温度到達後にプレス圧50MPaを印加した。温度700℃、プレス圧50MPaを60分間保持し、緻密な磁石体を作製した。この磁石体を破壊して粉砕し、分析したところ、得られた磁石体は約2000ppmの酸素を不可避の不純物として含んでおり、また、磁石体断面のEPMA分析に依れば希土類フッ酸化物の生成が示唆された。 The HDDR magnet powder on which the NdF three layers are formed is loaded in a hot press mold in a non-oriented manner, and the rate of temperature rise to a set ultimate temperature of 700 ° C. in a vacuum atmosphere (<10 −3 Pa) using a vacuum hot press device Heating was performed at 10 ° C./min, and a press pressure of 50 MPa was applied after reaching the set temperature. The temperature was maintained at 700 ° C. and the pressing pressure of 50 MPa for 60 minutes to produce a dense magnet body. When this magnet body was broken and crushed and analyzed, the obtained magnet body contained about 2000 ppm of oxygen as an inevitable impurity, and according to EPMA analysis of the cross section of the magnet body, Generation was suggested.

得られた磁石体(実施例1〜実施例4)の磁気特性と相対密度を表2に示す。表2から明らかなように、実施例の磁石体の固有保持力は、原料として用いたHDDR磁石粉末のそれとほぼ同等の優れた値であった。また、4種類の実施例の磁石体の体積抵抗率は2.2〜2.4μΩmであった。なお、Nd含有量xが11.8at%の合金を用いて実施例と同様にして作製した磁石体では、固有保持力も残留磁束密度も低い値であった(比較例1)。一方、Nd含有量xが18.1at%の合金を用いて実施例と同様にして作製した磁石体では、固有保持力は優れた値であったが、残留磁束密度は低い値であった(比較例2)。   Table 2 shows the magnetic properties and relative densities of the obtained magnet bodies (Examples 1 to 4). As is apparent from Table 2, the intrinsic holding force of the magnet body of the example was an excellent value almost equivalent to that of the HDDR magnet powder used as a raw material. Moreover, the volume resistivity of the magnet body of four types of Examples was 2.2-2.4 microhm. In the magnet body manufactured in the same manner as in the example using an alloy having an Nd content x of 11.8 at%, the intrinsic coercive force and the residual magnetic flux density were low values (Comparative Example 1). On the other hand, in the magnet body produced in the same manner as in the example using an alloy having an Nd content x of 18.1 at%, the intrinsic coercive force was an excellent value, but the residual magnetic flux density was a low value ( Comparative Example 2).

Figure 2008060241
Figure 2008060241

実施例B:
例えば特許文献1や特許文献2などに記載の方法に順じ、組成式:Nd12.1Dy0.9CoGa0.56.5Febalを満足する組成の合金を作製し、HDDR処理を施して、表3に示す磁気特性を有する平均粒子径が約80μmの磁石粒子(HDDR磁石粉末)を得た。磁石粉末のサンプルとして、実施例Aと同様にして磁石粉末の表面に平均厚みが約800nmのNdF層を形成したサンプルとNdF層を形成していないサンプル(即ちHDDR磁石粉末そのもの)を用意し、真空雰囲気中で表4に示す4種類の熱間成形条件を用いて緻密化を行うことで磁石体を作製した。
Example B:
For example, following the method described in Patent Document 1, Patent Document 2, and the like, an alloy having a composition satisfying the composition formula: Nd 12.1 Dy 0.9 Co 8 Ga 0.5 B 6.5 Fe bal is manufactured. The HDDR process was performed to obtain magnet particles (HDDR magnet powder) having the magnetic properties shown in Table 3 and having an average particle diameter of about 80 μm. As a sample of the magnet powder, a sample in which an NdF 3 layer having an average thickness of about 800 nm is formed on the surface of the magnet powder and a sample in which the NdF 3 layer is not formed (that is, the HDDR magnet powder itself) are prepared as in Example A Then, the magnet body was produced by densification using four types of hot forming conditions shown in Table 4 in a vacuum atmosphere.

Figure 2008060241
Figure 2008060241

Figure 2008060241
Figure 2008060241

得られた磁石体の磁気特性と相対密度を表5に示す。表5から明らかなように、NdF層を形成したHDDR磁石粉末を用いると、相対密度が低いほど体積抵抗率(比抵抗)は高い値となる一方、固有保持力は低い値となるが、相対密度が98%以上の緻密化された磁石体において、800kA/m以上の固有保持力を得るためには、設定温度到達後にプレス圧を印加して熱間成形を行う必要があることがわかった。また、得られた磁石体について、10kHz,2.5Aの条件下で高周波発熱測定を行った結果を図1に示す。図1から明らかなように、体積抵抗率が高くなるほど渦電流による発熱が抑制されることが確認できた。 Table 5 shows the magnetic properties and relative density of the obtained magnet body. As is clear from Table 5, when the HDDR magnet powder with the NdF 3 layer formed is used, the lower the relative density, the higher the volume resistivity (specific resistance), while the lower the specific holding force, It was found that, in a densified magnet body with a relative density of 98% or more, in order to obtain a specific holding force of 800 kA / m or more, it is necessary to perform hot forming by applying a press pressure after reaching the set temperature. It was. Moreover, the result of having performed the high frequency heat_generation | fever measurement on the conditions of 10 kHz and 2.5A about the obtained magnet body is shown in FIG. As is clear from FIG. 1, it was confirmed that the heat generation due to the eddy current is suppressed as the volume resistivity increases.

Figure 2008060241
Figure 2008060241

本発明は、希土類フッ化物を絶縁層として用いることで高い電気抵抗が付与されているとともに、磁石組成が最適化されていることで優れた磁気特性を発揮する高抵抗希土類系永久磁石とその製造方法を提供することができる点において産業上の利用可能性を有する。   The present invention provides a high-resistance rare earth-based permanent magnet that exhibits high magnetic resistance by using a rare earth fluoride as an insulating layer and that exhibits excellent magnetic properties by optimizing the magnet composition, and its manufacture It has industrial applicability in that it can provide a method.

実施例Bにおいて得られた磁石体について高周波発熱測定を行った結果を示すグラフである。It is a graph which shows the result of having performed the high frequency heat generation measurement about the magnet body obtained in Example B.

Claims (7)

主として、NdFe14B型結晶構造を有する磁石粒子と、該磁石粒子の表面に存在する希土類フッ化物層によって構成され、
相対密度が磁石粒子の体積比率と希土類フッ化物層の体積比率の合計から算定される真密度の98%以上であり、
磁石粒子は平均粒子径が20μm〜150μmであり、
組成式:R(Fe1−mCo1−x−y−z(RはPrおよびNdの少なくとも1つが70%以上を占め、残部がある場合には残部はランタニド系列の元素から選ばれる少なくとも1つからなる。Qは、BまたはBをCで部分置換したもの。MはTi,V,Cr,Mn,Ni,Cu,Al,Ga,In,Sn,Ta,Zr,Nb,Mo,Wからなる群から選ばれる少なくとも1つからなる。
xは12at%〜18at%、
yは5.5at%〜8at%、
zは0at%〜10at%、
mは0〜0.2である)を満足し、
磁石粒子を構成するNdFe14B型結晶相は平均結晶粒径が200nm〜700nmであり、
磁石粒子の磁化容易方向が粒子内部で特定方向に概ね揃っており、
磁石としての固有保磁力が800kA/m以上であり、体積抵抗率が2μΩm以上であることを特徴とする、高抵抗希土類系永久磁石。
Mainly composed of magnet particles having an Nd 2 Fe 14 B type crystal structure and a rare earth fluoride layer present on the surface of the magnet particles,
The relative density is 98% or more of the true density calculated from the sum of the volume ratio of the magnet particles and the volume ratio of the rare earth fluoride layer,
The magnet particles have an average particle size of 20 μm to 150 μm,
Composition formula: R x (Fe 1-m Co m) 1-x-y-z Q y M z (R although at least one of Pr and Nd accounts for 70% or more, the balance lanthanide series if there is balance Q is B or B partially substituted with C. M is Ti, V, Cr, Mn, Ni, Cu, Al, Ga, In, Sn, Ta, Zr. , Nb, Mo, W, at least one selected from the group consisting of.
x is 12 at% to 18 at%,
y is 5.5 at% to 8 at%,
z is 0 at% to 10 at%,
m is 0 to 0.2),
The Nd 2 Fe 14 B type crystal phase constituting the magnet particles has an average crystal grain size of 200 nm to 700 nm,
The direction of easy magnetization of magnet particles is generally aligned in a specific direction inside the particles,
A high resistance rare earth-based permanent magnet having an intrinsic coercive force of 800 kA / m or more as a magnet and a volume resistivity of 2 μΩm or more.
磁石粒子の体積比率と希土類フッ化物層の体積比率の合計に対する希土類フッ化物層の体積比率の割合が0.1%〜10%であることを特徴とする、請求項1記載の高抵抗希土類系永久磁石。   The high resistance rare earth system according to claim 1, wherein the ratio of the volume ratio of the rare earth fluoride layer to the sum of the volume ratio of the magnet particles and the volume ratio of the rare earth fluoride layer is 0.1% to 10%. permanent magnet. 希土類フッ化物層が希土類元素としてLa,Ce,Pr,Nd,Tb,Dy,Hoからなる群から選ばれる少なくとも1つを含み、その含有量が希土類フッ化物層に含まれる希土類元素全体の少なくとも50at%以上であることを特徴とする、請求項1または2記載の高抵抗希土類系永久磁石。   The rare earth fluoride layer includes at least one selected from the group consisting of La, Ce, Pr, Nd, Tb, Dy, and Ho as the rare earth element, and the content thereof is at least 50 at least of the entire rare earth element contained in the rare earth fluoride layer. The high-resistance rare earth-based permanent magnet according to claim 1, wherein the permanent magnet is at least%. 残留磁束密度が磁石粒子の体積比率と希土類フッ化物層の体積比率の合計から算定される飽和磁気分極の80%以上であることを特徴とする、請求項1から3のいずれかに記載の高抵抗希土類系永久磁石。   The high residual magnetic flux density according to any one of claims 1 to 3, wherein the residual magnetic flux density is 80% or more of the saturation magnetic polarization calculated from the sum of the volume ratio of the magnet particles and the volume ratio of the rare earth fluoride layer. Resistive rare earth permanent magnet. 希土類フッ化物層の平均厚みが10nm〜5μmであることを特徴とする、請求項1から4のいずれかに記載の高抵抗希土類系永久磁石。   5. The high resistance rare earth permanent magnet according to claim 1, wherein the rare earth fluoride layer has an average thickness of 10 nm to 5 μm. 組成式:R(Fe1−mCo1−x−y−z(RはPrおよびNdの少なくとも1つが70%以上を占め、残部がある場合には残部はランタニド系列の元素から選ばれる少なくとも1つからなる。Qは、BまたはBをCで部分置換したもの。MはTi,V,Cr,Mn,Ni,Cu,Al,Ga,In,Sn,Ta,Zr,Nb,Mo,Wからなる群から選ばれる少なくとも1つからなる。
xは12at%〜18at%、
yは5.5at%〜8at%、
zは0at%〜10at%、
mは0〜0.2である)を満足し、
平均粒子径が20μm〜150μmであるNdFe14B型結晶構造を有する磁石粒子をHDDR法によって製造し、
該磁石粒子の表面に希土類フッ化物層を形成し、
表面に希土類フッ化物層を有する磁石粒子を、温度を600℃〜900℃にしてから20MPa〜200MPaの圧力を印加して熱間成形を行い、相対密度が磁石粒子の体積比率と希土類フッ化物層の体積比率の合計から算定される真密度の98%以上とすることを特徴とする、高抵抗希土類系永久磁石の製造方法。
Composition formula: R x (Fe 1-m Co m) 1-x-y-z Q y M z (R although at least one of Pr and Nd accounts for 70% or more, the balance lanthanide series if there is balance Q is B or B partially substituted with C. M is Ti, V, Cr, Mn, Ni, Cu, Al, Ga, In, Sn, Ta, Zr. , Nb, Mo, W, at least one selected from the group consisting of.
x is 12 at% to 18 at%,
y is 5.5 at% to 8 at%,
z is 0 at% to 10 at%,
m is 0 to 0.2),
Magnet particles having an Nd 2 Fe 14 B type crystal structure having an average particle diameter of 20 μm to 150 μm are manufactured by the HDDR method,
Forming a rare earth fluoride layer on the surface of the magnet particles;
Magnet particles having a rare earth fluoride layer on the surface are hot-formed by applying a pressure of 20 MPa to 200 MPa after the temperature is set to 600 ° C. to 900 ° C., and the relative density is the volume ratio of the magnet particles to the rare earth fluoride layer. A method for producing a high-resistance rare earth-based permanent magnet, characterized in that the density is 98% or more of the true density calculated from the sum of the volume ratios.
熱間成形を行う前に磁界配向を行うことを特徴とする、請求項6記載の製造方法。   The manufacturing method according to claim 6, wherein magnetic field orientation is performed before hot forming.
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JP2010258412A (en) * 2009-03-30 2010-11-11 Tdk Corp Method of producing rare-earth magnet
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EP4390981A1 (en) * 2022-12-13 2024-06-26 Yantai Zhenghai Magnetic Material Co., Ltd. R-t-b based permanent magnet material, preparation method therefor and use thereof

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