JP2007315708A - Fan filter unit mounting structure and mounting method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fan filter unit mounting structure and a fan filter unit mounting method solving problems of a gas leakage, a fall of a filter and the pollution of the filter caused by idle operation when a factory is put in operation. <P>SOLUTION: The fan filter unit mounting structure for mounting a fan filter unit 10 to an opening part of a grid-like frame 1 of the system ceiling comprising the grid-like frame 1, includes a fan unit 13 holding a fan 11 in a fan frame 12, and a filter unit 23 holding a filter pack 21 in a filter frame 22. The fan unit 13 is placed on the grid-like frame 1 through a gasket 5, and a folded part 12c of the fan frame 12 is pressed by a fan frame presser member 3. The fan frame presser member 3 is fixedly engaged with a receiving part 4a of a member 4 for a hanging bolt, and the filter unit 23 is mounted and fixed to the fan frame 12 from the indoor side by a fastening member 6. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a fan filter unit mounting structure for mounting a fan filter unit to a system ceiling made of a lattice frame in a clean room or the like via a gasket and a mounting method thereof.

Conventionally, as a fan filter unit mounting structure in which a fan filter unit is attached to a system ceiling of a lattice frame such as a clean room via a gasket, a fan filter in which a fan unit and a filter unit are laminated and integrated on the upper surface of the lattice frame. A mounting structure in which the unit is mounted from the upstream side is common.
In such a conventional fan filter unit mounting structure, it is necessary to secure a large maintenance space that allows an operator to enter the ceiling of a clean room. However, in recent clean rooms, production pipes and electrical wiring are stored under the floor, and the space behind the ceiling is narrowed by the height of the floor. For this reason, even with the conventional fan filter unit mounting structure, it is necessary to perform maintenance such as filter replacement from the indoor side of the clean room after the factory operation.

From this point of view, an attachment structure has been proposed that can perform maintenance such as filter replacement from the indoor side after factory operation (see, for example, Patent Document 1). With reference to FIG. 6, the fan filter unit mounting structure disclosed in Patent Document 1 will be described in detail. FIG. 6 is a cross-sectional view of a conventional fan filter unit mounting structure.
In this fan filter unit mounting structure, a rectangular tube-like lattice frame 101 is suspended via a long suspension bolt 120 and a suspension bolt member 108, and a rectangular shape covering the entire circumference is formed on the side surface of the lattice frame 101. The frame material (attachment member) 110 is detachably provided by a bolt 111 provided at a predetermined location, and the filter unit 107 is placed on the upper surface of the frame material 110 via a gasket 106. A fan unit 103 is mounted on the upper surface of the filter unit 107 via a gasket 105.
The bolt head is positioned in the lattice frame 101 below the folded portion 104 of the fan unit 103, the slide bolt 112 is screwed at a predetermined interval, and the bolt head is rotated. The tip portion is provided so as to be able to appear and retract toward the folded portion 104. The slide bolt 112 is formed to have a length that can support the load of the fan unit 103 by contacting the folded portion 104 when protruding from the upper surface of the grid frame 101. On the other hand, an opening 102 having a size capable of rotating the slide bolt 112 is formed in the lower surface of the lattice frame 101 located below the slide bolt 112.

JP 2003-120978 A

  However, in the mounting structure disclosed in Patent Document 1, a gasket 105 is provided between the fan unit 103 and the filter unit 107, and the gasket is crimped by the weight of the fan unit 103 to maintain airtightness. The fan unit 103 is supported by a plurality of slide bolts 112 and a gasket 105, and is not firmly fixed by bolts or the like. Further, the filter unit 107 is also merely placed on the filter mounting member 110 and is not firmly fixed with a bolt or the like. Therefore, there is a possibility that the pressure bonding between the fan unit 103 and the filter unit 107 is loosened or detached due to vibration such as an earthquake and the airtightness is lowered. In the worst case, there is a possibility that the filter unit 107 may fall off the filter mounting member 110 and fall into the clean room.

Further, in recent clean rooms, it is required to remove not only dust but also gas. In particular, it is difficult to remove gaseous boric acid (B) from a glass fiber that uses a filter as a source, and a urethane resin sealing material. Organophosphorus compounds (P), etc., from fuels, liquefaction agents, etc. are problematic in semiconductor dopant control. In addition, organic gases such as siloxane, DOP, and DBP may cause a problem that they adhere to the semiconductor wafer and reduce the product yield. Furthermore, attention is also focused on the control of acidic gases such as SO ₂ and alkaline gases such as NH ₃ . For this reason, so-called low gas emission filters that do not generate gas from the filter have been developed and used.
Here, in order to eliminate the influence of gas generated from the components of the clean room during factory operation and to clean the piping route, etc., the clean room system is in full operation after being idle. However, this idle operation places a load on a new filter, which is one of the causes for shortening the filter life. In particular, in the fan filter unit of the low gas emission filter specification, although there is almost no gas emission from the filter itself, the clean room system is polluted by the gas generated from other clean room components due to the idle operation of the clean room system. There was a risk of losing the gas filter.

  Therefore, the present invention provides a fan filter unit mounting structure and a method for mounting such a fan filter unit that can solve the problem of leakage due to vibrations such as earthquakes and the problem of filter dropping, and the problem of filter contamination due to idling during factory operation. The purpose is to provide.

The fan filter unit mounting structure according to the present invention includes a fan unit that is mounted on an opening portion of a grid frame of a system ceiling made of a grid frame, and that houses the fan in the fan frame, and a filter pack. A fan filter unit mounting structure including a filter unit housed in a filter frame,
The fan unit is placed on the grid frame via a gasket, the end of the fan frame is pressed by a fan frame pressing member, and the fan frame pressing member is engaged and fixed in the groove of the suspension bolt member. The filter unit is attached and fixed to the fan frame from the indoor side by a fastening member.
Further, the fan filter unit mounting structure according to claim 2 is the fan filter unit mounting structure according to claim 1, wherein the width of the upper surface of the grid frame is extended along the longitudinal direction of the grid frame. A narrower suspension bolt member is provided, and the lattice frame is suspended by suspension bolts via the suspension bolt member, and at the end of the fan frame, a side surface of the suspension bolt member is provided. The bent portion is provided so as to stand up along the fan frame, and the bent portion is pressed by the fan frame pressing member.
A fan filter unit mounting structure according to claim 3 is the fan filter unit mounting structure according to claim 1 or 2, wherein a chemical filter is installed on the upstream side of the fan unit.
According to a fourth aspect of the present invention, there is provided a fan filter unit mounting method comprising: a fan unit housing a fan in a fan frame at an opening portion of a grid frame of a system ceiling made of a grid frame in a clean room; A fan filter unit comprising a filter unit housed in a filter frame,
The fan unit is mounted on the grid frame via a gasket, and the filter unit is attached and fixed to the fan frame from the indoor side after the clean room is idling.
Further, the fan filter unit mounting method according to claim 5 is the fan filter unit mounting method according to claim 4, wherein a chemical filter is installed upstream of the fan unit either before or after the empty operation of the clean room. It is characterized by having been installed.

In the fan filter unit mounting structure of the present invention, the fan unit and the filter unit are firmly attached and fixed by the tightening member, and the fan frame pressing member is used for the vertical direction and the lattice frame frame for the suspension bolt member. Since the movement of the fan unit in the (horizontal) direction is sealed, it does not cause problems such as gas leaks due to vibrations such as earthquakes, gas leaks, and filter units falling into the room. .
In addition, since the filter unit can be finally attached from the indoor side, it is not necessary to secure a maintenance space for replacing the filter behind the ceiling. Furthermore, since it is not necessary to handle a fan filter unit in which a fan and a filter are integrated, problems such as damage to the filter unit that may occur when the fan filter unit is installed are eliminated.
In the fan filter unit mounting method of the present invention, the clean unit is idled during factory operation, and the filter unit is mounted last, thereby reducing the conventional filter life and gas generated by gas generated from other clean room components. Problems such as contamination can be avoided. In particular, in the case of a low gas emission filter specification, the effect is remarkable.
In addition, in the fan filter unit mounting method of the present invention, when the clean room is idling during factory operation, a pollutant gas generated from other than the filter circulates in the clean room by installing a chemical filter upstream of the fan unit. The pollutant gas can be removed in a short time without being circulated forever.

DESCRIPTION OF EMBODIMENTS Hereinafter, a preferred embodiment of a fan filter unit mounting structure and a mounting method thereof according to the present invention will be described in detail with reference to the accompanying drawings.
First, the fan filter unit mounting structure of the present invention will be described. 1 is a plan view of a fan filter unit mounting structure according to an embodiment of the present invention, FIG. 2 is a cross-sectional view taken along line AA in FIG. 1, and FIG. 3 is a cross-sectional view taken along line BB in FIG. FIG.
As shown in FIGS. 1 to 3, the fan filter unit mounting structure of the present invention is used for a system ceiling composed of a grid frame 1, and the upper surface of the grid frame 1 has a longitudinal direction of the grid frame 1. A suspension bolt member 4 narrower than the width is provided along the direction. The fan filter unit mounting structure is a fan comprising a filter unit 23 and a fan unit 13 on a lattice frame 1 suspended by a suspension bolt 2 via a receiving portion (groove) 4a of the suspension bolt member 4. The filter unit 10 is mounted and fixed. In the present embodiment, as shown in FIG. 1, the suspension bolt 2 is provided at each intersection of the grid frame 1.

As shown in FIG. 2, the fan unit 13 houses the fan 11 in the fan housing portion 12 a of the fan frame 12, and the filter unit 23 houses the filter pack 21 in the filter frame 22. Hereinafter, the fan unit 13 and the filter unit 23 will be described in detail.
The fan unit 13 is dropped into a space surrounded by the suspension bolt member 4 on the upper surface of the grid frame 1, and the mounting portion 12 b of the fan frame 12 is inserted into the grid frame 1 via the gasket 5. While being placed on the upper surface, the folded portion 12 c which is an end portion of the fan frame 12 is configured to rise along the inner peripheral surface (side surface) of the suspension bolt member 4. The engagement piece 3 a of the fan frame pressing member 3 is engaged and fixed to the receiving portion 4 a of the suspension bolt member 4 so that the folded portion 12 c of the fan frame 12 is pressed by the fan frame pressing member 3. Further, the filter unit 23 is attached and fixed by a fastening member (screw) 6 to a portion of the mounting portion 12 b of the fan frame 12 that is not in contact with the gasket 5 from the downstream side. With such a configuration, the loads of the fan unit 13 and the filter unit 23 are supported by the upper surface of the lattice frame 1 provided around the fan filter unit 10 via the gasket 5. Moreover, since the vertical movement and the horizontal movement of the fan unit 13 are respectively sealed by the fan frame pressing member 3 and the suspension bolt member 4 on the grid frame 1, the airtightness is reduced due to vibration such as an earthquake. As a result, problems such as gas leakage and filter falling into the room do not occur.

As shown in FIG. 2, the filter frame 22 has a hollow shape as a whole, and each corner of the filter frame 22 has an opening 22 a through which the tightening member 6 can be inserted into the lower surface and the upper surface. An opening 22b through which the core rod portion of the tightening member 6 can be inserted but the head portion cannot be inserted is provided. When the filter unit 23 is attached to the mounting portion 12b of the fan frame 12 from the indoor side, the core rod member of the tightening member 6 is attached to the nutsert 7 provided on the upper surface of the mounting portion 12b through the openings 22a and 22b. The filter unit 23 can be firmly fixed to the fan unit 13 by inserting and tightening the tightening member 6. The tightening member 6 is provided with a seal member (packing) 8 for sealing the upper surface opening 22 b of the filter frame 22.
In the present embodiment, for ease of explanation, the case where one fan filter unit 10 is provided in one opening portion of the grid frame 1 is illustrated. The fan filter unit 10 may be provided in each opening portion, and a predetermined opening may be appropriately sealed.

The filter pack 21 used in the filter unit 23 is a filter for removing particles. The filter pack 21 for removing particles may be a medium performance filter or a high performance filter depending on the level of cleaning required in the clean room. Any one of the filters may be selected as appropriate.
Further, in the present embodiment, the case where the filter unit 23 and the fan unit 13 are fastened and integrated using the screw 6 and the nutsert 7 as the fastening member 6 and a member for inserting and fixing the fastening member 6 is shown. However, the present invention is not limited to this, and a combination of ordinary bolts and nuts may be used.
Further, in the present embodiment, the case where packing is used as the seal member 8 between the screw head and the mounting portion 12b of the fan frame 12 has been described, but in order to further improve the airtightness of the fan filter unit 10 The gap between the nutsert 7 and the mounting portion 12b of the fan frame 12 may be sealed with a caulking agent.
In the present embodiment, the folded portion 12c of the fan frame 12 is fixed in contact with the suspension bolt member 4 by being pressed by the flat plate portion of the fan frame pressing member 3, but the present invention is not limited thereto. The flat portion of the fan frame pressing member 3 is formed into a substantially U-shaped plate (substantially U-shaped plate opened downward), so that the folded portion 12c of the fan frame 12 is wrapped and fixed, and the mounting portion 12b is fixed. It is good also as a structure pressed down toward the gasket 5 side. Further, when the substantially U-shaped plate is used as described above, the fan frame 12 may not have the folded portion 12c.

Next, an attachment method (assembly method) of the fan filter unit attachment structure in one embodiment of the present invention will be described in detail with reference to FIG. FIG. 4 is a cross-sectional view showing an example of an assembled state of the fan filter unit mounting structure of the present invention.
The operator enters the back of the ceiling of the clean room and drops the fan unit 13 in which the fan 11 is mounted and fixed in advance in the fan frame 12 into a space on the upper surface of the lattice frame 1 and surrounded by the suspension bolt member 4. Then, it is placed on the upper surface of the lattice frame 1 through the gasket 5 attached to the back surface of the fan unit 13, and the space between the clean room and the ceiling is sealed by the weight of the fan unit 13.
Next, by engaging and fixing the engagement piece 3 a of the fan frame pressing member 3 to the receiving portion 4 a of the suspension bolt member 4, the folded portion 12 c which is the end of the mounted fan frame 12 is fixed to the fan frame pressing member 3. The folded portion 12c is firmly fixed so that the fan filter unit 10 does not move due to vibration or the like.

After working behind the ceiling, the worker returns to the clean room, operates the clean room system (runs idly), and takes the clean outside air from the external air conditioner incorporating the prefilter and the medium performance filter into the clean room. As a result, the inside of the path of the return circuit is first cleaned and then circulated into the clean room to clean the inside of the clean room.
Next, after the idling operation is completed, the filter unit 23 is lifted from the indoor side to the opening formed by the grid frame 1, and is tightened through the openings 22 a and 22 b of the filter frame 22 to each nutsert 7 provided in the fan frame 12. By tightening the attachment member 6 and fixing the filter unit 23, the sealing member (packing) 8 is brought into contact with the upper surface opening 22 b for hermetic sealing (attachment process). Thereby, the filter unit 23 and the fan unit 13 are integrated, and the assembly method of the fan filter unit attachment structure in one Embodiment of this invention is completed.
In the present invention, such an assembling method is used. Therefore, when replacing the filter unit 23, after loosening each fastening member 6 and removing the used filter unit 23, the above-described attachment process is performed. Thus, the new filter unit 23 may be fastened and fixed to the fan frame 12 from the indoor side.

Next, a fan filter unit mounting structure according to another embodiment of the present invention will be described with reference to FIG. FIG. 5 is a cross-sectional view of a fan filter unit mounting structure according to another embodiment of the present invention.
In the above-described embodiment, the case where the filter pack 21 for removing particles is used for the filter unit 23 is shown. However, as shown in FIG. 5, the chemical filter 30 for gas adsorption is installed on the upstream side of the fan unit 13. May be. Thereby, the contaminated gas generated from other than the filter pack 21 does not circulate indefinitely when circulating in the clean room, and the contaminated gas can be removed in a short time.

The fan filter unit mounting structure and the mounting method of the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to the configurations of the above-described embodiments. Each part constituting the fan filter unit mounting structure of the present invention can be replaced with one having any structure that can exhibit the same function. In addition, an arbitrary component may be added to the fan filter unit mounting structure of the present invention.
The fan filter unit mounting method of the present invention may include a step of placing a chemical filter 30 as shown in FIG. 5 after the idling operation of the clean room system.

  The fan filter unit mounting structure and the mounting method of the present invention are not particularly limited as long as the filter can be replaced from the indoor side which is the downstream side. It has industrial applicability in that it can contribute.

The top view of the fan filter unit attachment structure in one Embodiment of invention AA line sectional view of FIG. BB sectional view of FIG. Sectional drawing which shows an example of the assembly state of the fan filter unit attachment structure of this invention Sectional drawing of the fan filter unit attachment structure in another embodiment of this invention Sectional view of conventional fan filter unit mounting structure

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Lattice frame 2 Suspension bolt 3 Fan frame pressing member 3a Engagement piece 4 Suspension bolt member 4a Receiving part 5 Gasket 6 Tightening member 7 Nutsert 8 Seal member 10 Fan filter unit 11 Fan 12 Fan frame 12a Fan accommodating part 12b Mount Placement part 12c Folding part 13 Fan unit 21 Filter pack 22 Filter frame 22a Lower surface opening 22b Upper surface opening 23 Filter unit 30 Chemical filter

Claims (5)

A fan filter unit mounting structure that includes a fan unit that is attached to an opening portion of a grid frame of a system ceiling made of a grid frame and that houses a fan in the fan frame and a filter unit that houses a filter pack in the filter frame. ,
The fan unit is placed on the grid frame via a gasket, the end of the fan frame is pressed by a fan frame pressing member, and the fan frame pressing member is engaged and fixed in the groove of the suspension bolt member. A fan filter unit mounting structure, wherein the filter unit is mounted and fixed to the fan frame from the indoor side by a fastening member.   On the upper surface of the grid frame, a suspension bolt member narrower than the width is provided along the longitudinal direction of the grid frame, and the grid frame is suspended by the suspension bolt via the suspension bolt member. A bent portion is provided at the end of the fan frame so as to rise along a side surface of the suspension bolt member, and the bent portion is pressed by the fan frame pressing member. A fan filter unit mounting structure characterized by that.   The fan filter unit mounting structure according to claim 1, wherein a chemical filter is installed upstream of the fan unit. In this method, a fan filter unit consisting of a fan unit containing a fan in a fan frame and a filter unit containing a filter pack in a filter frame is attached to the opening of the grid frame on the system ceiling consisting of a grid frame in a clean room. And
A fan filter unit mounting method comprising: mounting the fan unit on the lattice frame via a gasket; and mounting and fixing the filter unit to the fan frame from the indoor side after the clean room is idling. . The fan filter unit mounting method according to claim 3, wherein a chemical filter is installed upstream of the fan unit either before or after the idling operation of the clean room.

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