JP2007232648A - Stage device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To stably and precisely control the rotating operation of a θ table. <P>SOLUTION: A stage device 10A comprises a surface plate 20; a stage 30 which moves over the plane of the surface plate 20; and the θ table 40 mounted onto the stage 30. Both a pivot shaft 80 for rotatably supporting the θ table 40 in a θz direction and a bearing 82 for rotatably pivoting the pivot shaft 80 are provided between an X-stage 38 and the θ table 40. A pair of θ linear motors 74 are provided for symmetrical locations in parallel with each other with respect to the pivot shaft 80 when viewed from above. Since the θ linear motors 74 are supported by supporting parts 79 in such a way that magnet yokes 76 may be at the same height as the side surfaces of the θ table 40 and the supporting parts 79 are raised from a floor surface laterally separated from the surface plate 20, a reaction force when the θ table 40 is rotated in a θz direction is transmitted to the floor surface via the supporting parts 79. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a stage apparatus, and more particularly, to a stage apparatus configured to be able to rotate a θ table more stably and precisely.

  For example, a stage apparatus has a Y stage that moves in the Y direction and an X stage that moves in the X direction, and the Y stage guides the movement direction along a pair of Y direction guide rails fixed on a surface plate. Then, the X stage is guided in the moving direction along the X direction guide rail mounted on the Y stage (see, for example, Patent Document 1).

  In a stage apparatus used for moving a semiconductor wafer, sliders provided at both ends of the Y stage are translated in the Y direction by a linear motor, and a θ table on which the wafer is placed on the X stage is in the θz direction. Is rotatably supported.

In this type of stage device, when a wafer as an object is transported and held on the θ table, the θ table is rotated in the θz direction around the Z axis to position the wafer with high accuracy. Positioning control for adjusting the position of the wafer is performed. Further, in this stage apparatus, since the θ linear motor is arranged below the θ table, the stator of the θ linear motor is fixed to the X stage.
JP 2003-28974 A

  In the conventional stage device, the stator of the θ linear motor provided on the lower side of the θ table is supported on the stage, so that a reaction force when rotating the θ table in the θz direction acts on the stage. The stage moves in the θz direction (opposite to the θ table) by the clearance between the guide rail that guides the stage and the air pad (also called an air bearing or static pressure pad) that moves in a non-contact manner by air pressure with respect to the guide rail. There is a problem that it is difficult to stably and precisely control the rotation position of the θ table supported on the stage.

  In view of the above circumstances, an object of the present invention is to provide a stage apparatus that solves the above problems.

  In order to solve the above problems, the present invention has the following means.

  The present invention includes a stage that moves on a surface plate, and a θ table that is rotatably supported on the stage, and a stage device that moves the stage together with the θ table on a side surface of the θ table. A pair of θ linear motors having a coupled mover and a stator disposed opposite to the mover and driving the θ table around the Z axis, and positions spaced laterally of the surface plate And a support portion that supports the stator of the θ linear motor.

  The pair of θ linear motors drive the stage together with the θ table by driving the movers in translation in the same direction.

  The present invention also provides a pivot shaft that stands vertically between the center of the upper surface of the stage and the center of the lower surface of the θ table, and the pivot shaft so that the θ table rotates about the axis of the pivot shaft. And a bearing for bearing.

  Further, the present invention is characterized by comprising a plurality of pillars extending from the lower surface of the θ table in the hanging direction, and an air pad that floats and moves on the stage by air pressure at the lower ends of the pillars. To do.

  In addition, the present invention includes a plurality of support columns extending in a hanging direction from the lower surface of the θ table, and air pads that float and move on the surface plate by air pressure at the lower ends of the support columns. And

  The bearing is a cross roller bearing that supports an outer periphery of an upper end or a lower end of the pivot shaft.

  The stage has a Y stage that moves in the Y direction and an X stage that moves in the X direction perpendicular to the Y direction, and the θ table is supported on the X stage so as to be rotatable about the Z axis. It is characterized by that.

  The pivot shaft is supported by a support plate arranged to face the lower surface of the θ table, and the support plate is supported via a height adjustment mechanism that adjusts a height position. .

  The height adjustment mechanism is provided on the support column and adjusts the height position of the support plate via the support column.

  According to the present invention, the reaction force of the θ linear motor generated when the θ table is rotated is fixed by fixing the support portion supporting the stator of the θ linear motor at a position spaced apart to the side of the surface plate. It is possible to prevent the stage from acting on the stage, and it is possible to stably and precisely control the rotation position of the θ table by eliminating an error due to a reaction force when driving the θ table.

  In addition, according to the present invention, the pair of θ linear motors can drive the stage together with the θ table by driving each mover in the same direction, so the θ linear motor also serves as a stage driving linear motor. Therefore, it is possible to reduce the number of linear motors, thereby simplifying the configuration and reducing the manufacturing cost.

  In addition, since the bearing is supported by the pivot shaft, the θ table can be rotated at a low load, and the θ linear motor can be driven from the side without contact with the θ linear motor. It is possible to minimize the influence on the table.

  Further, according to the present invention, there are a plurality of support pillars formed extending in the hanging direction from the lower surface of the θ table, and an air pad that floats and moves on the stage or the surface plate by air pressure at the lower end of the support pillar. When the θ table is rotated, the θ table can be prevented from swinging with the pivot shaft as a fulcrum, and the plane of the θ table can be kept horizontal.

  In addition, according to the present invention, the pivot shaft is supported by the support plate disposed so as to face the lower surface of the θ table, and the height adjustment mechanism for adjusting the height position of the support plate is provided. The moving position can be adjusted stably and with high accuracy, and the height position of the θ table can be adjusted.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

  FIG. 1 is a perspective view showing Embodiment 1 of the stage apparatus according to the present invention. FIG. 2 is a front view showing the stage apparatus of the first embodiment. FIG. 3 is a plan view showing the stage apparatus of the first embodiment.

  As shown in FIGS. 1 to 3, the stage apparatus 10 </ b> A is incorporated in, for example, an exposure apparatus used in a semiconductor wafer manufacturing process, and a stage 20 and a stage 30 that moves on the plane of the stage 20. And a θ table 40 mounted on the stage 30 on which a work (not shown) is placed, and a pair of Y linear motors 50 that move the stage 30 in the Y direction.

  The stage 30 protrudes on the plane of the stone surface plate 20 and moves in parallel along a pair of guides 28 extending in the moving direction (Y direction), and on the surface of the stone surface plate 20 by air pressure. And an air pad 34 that floats and moves.

  The stage 30 includes a Y stage 36 that moves in the Y direction parallel to the extending direction of the stone surface plate 20, and an X stage 38 that moves in the X direction orthogonal to the Y direction. The Y stage 36 is inserted into the X stage 38 and extends in the X direction, and is formed in an H shape to which the slider 32 is coupled at both ends thereof. Further, the X stage 38 is provided with air pads 34 at the four corners of the lower surface, and can move in the Y direction along with the Y stage 36 on the surface of the stone surface plate 20 and can move in the X direction along the Y stage 36. Is provided.

  The θ table 40 is formed in a quadrangular shape when viewed from above, and its upper surface 42 serves as a workpiece mounting surface (a wafer mounting surface in the case of a semiconductor exposure apparatus). In the present embodiment, the θ table 40 is formed with dimensions in the X direction and Y direction larger than those of the lower X stage 38, so that a workpiece having a size corresponding to the dimension of the upper surface 42 can be placed. That is, a workpiece (wafer) having a size larger than that of the X stage 38 can be placed on the θ table 40.

  The upper surface 42 is provided with a mirror 44 that reflects laser light from a laser interferometer (not shown) that detects the position of the θ table 40 in the Y direction.

  The pair of Y linear motors 50 are arranged side by side on the left and right sides of the surface plate 20, and a magnet yoke (stator) 52 extending in the Y direction and a coil extending downward from the outer surface of the slider 32. A unit (movable element) 54 is included. The magnet yoke 52 is formed in a U shape having an opening in the upper part when viewed from the front, and a plurality of permanent magnets are arranged in parallel on the side surface of the inner wall. Further, the magnet yoke 52 is supported by the support member 56 so as to be positioned outside and below the slider 32.

  The coil unit 54 has a plurality of coils connected in the Y direction, and is inserted between the magnets of the magnet yoke 52 from above. Therefore, when the coil unit 54 is energized, it can form a magnetic flux with respect to the permanent magnet and obtain a thrust in the Y direction with respect to the permanent magnet. The coil unit 54 is coupled to the outer lower surface of the slider 32. Therefore, the Y-direction thrust obtained by the coil unit 54 is applied to the slider 32 and drives the Y stage 36.

  Further, in the stage apparatus 10A, there are four support columns 60 extending downward from the lower surface of the θ table 40, and a plurality of air pads that are provided at the lower end of each support column 60 and float and move on the X stage 38 by air pressure. 70. Therefore, the support column 60 and the air pad 70 can move on the X stage 38 while directly supporting the θ table 40.

  Therefore, the θ table 40 can be lifted and moved on the X stage 38 by the four support columns 60 and the four air pads 70, and the stage 30 is maintained with the plane accuracy (horizontal accuracy) of the upper surface 42 maintained. Can move. Further, in the stage apparatus 10A, since the overall length (length in the height direction) of the support column 60 can be shortened, the stability of the θ table 40 when the X stage 38 is moved can be improved.

  Further, since the θ table 40 is supported by the four support columns 60 and the four air pads 70, it can be prevented from swinging around the pivot shaft 80 when rotating, and the horizontal accuracy of the upper surface 42 can be improved. It becomes possible to maintain.

  Further, on both the left and right sides of the θ table 40, a pair of θ linear motors 74 that rotate the θ table 40 in the θz direction from the side are provided. The θ linear motor 74 includes a magnet yoke (stator) 76 supported by a support portion 79 and a coil unit (movable element) 78 fixed to the side surface of the θ table 40. The support portion 79 is fixed to a concrete floor that is spaced apart from the surface plate 20, and is a support base for supporting the magnet yoke 76 that extends in the Y direction at a predetermined height position. is there. The support portion 79 of the present embodiment is formed to have a dimension that makes the magnet yoke 76 the same height as the side surface of the θ table 40.

  The magnet yoke 76 has a U-shaped cross section, and its opening side faces the side surface of the θ table 40. A permanent magnet is attached to the inner surface of the magnet yoke 76. The coil unit 78 is inserted from the side so as not to contact between the permanent magnets of the magnet yoke 76.

  Therefore, the θ linear motor 74 is provided so that the magnet yoke 76 and the coil unit 78 can be relatively rotated in the θz direction when the θ table 40 is rotated in the θz direction.

  Further, the pair of θ linear motors 74 are provided in parallel to positions that are symmetrical about the pivot shaft 80 when viewed from above. Therefore, the pair of θ linear motors 74 energize the coil unit 78 to generate a couple centered on the pivot shaft 80 to rotate the θ table 40 in the θz direction from the side surface.

  Further, the θ linear motor 74 is supported by a support part 79 so that the magnet yoke 76 is flush with the side surface of the θ table 40, and the support part 79 is spaced apart from the surface plate 20 to the side. Therefore, the reaction force when the θ table 40 is rotated in the θz direction is transmitted to the floor surface via the support portion 79.

  Accordingly, the stage apparatus 10A is configured such that the reaction force of the θ linear motor 74 is not transmitted to the Y stage 36 and the X stage 38, and the Y stage 36 and the X stage 38 are guided by the reaction force of the θ linear motor 74. Therefore, the position control error of the θ table 40 can be prevented from occurring, and the rotational position of the θ table 40 can be controlled stably and precisely.

  Further, since the support portion 79 is provided so as to stand up on the floor surface separated from the side of the slider 32, the θ linear motor 74 is configured not to be affected by vibration when the slider 32 is moved. ing.

  FIG. 4 is a side sectional view of the stage 30 and the θ table 40 as viewed from the side. As shown in FIG. 4, between the X stage 38 and the θ table 40, a pivot shaft 80 that rotatably supports the θ table 40 in the θz direction, and a bearing 82 that rotatably supports the pivot shaft 80. And are provided. In the present embodiment, the pivot shaft 80 is provided integrally so as to stand on the upper surface of the X stage 38, and the outer ring of the bearing 82 is provided so as to fit into the recess 40a provided in the center of the lower surface of the θ table 40. The inner ring is fitted to the outer periphery of the upper end of the pivot shaft 80.

  Further, the bearing 82 is composed of, for example, a cross roller bearing in which cylindrical roller spacers are alternately arranged on a rolling surface of a 90 ° V groove via a retainer, so that radial load (radial load), axial load ( Axial load), moment load (pitching / rolling / yaw load), and so on, can be rotated smoothly even when subjected to loads in all directions.

  Therefore, the θ table 40 is supported in a stable state by a pivot bearing structure including the pivot shaft 80 and the bearing 82. Further, the bearing 82 is provided at the center of the lower surface of the θ table 40, and the axis of the pivot shaft 80 coincides with the rotation center of the θ table 40. The thrust of the Y linear motor 50 that drives the stage 30 and the X linear motor described later is also transmitted to the θ table 40 via the pivot shaft 80 and the bearing 82.

  In the pivot bearing structure of the present embodiment, the upper end of the pivot shaft 80 is described as being supported by the bearing 82. However, the present invention is not limited to this, and the pivot shaft 80 is provided at the center of the lower surface of the θ table 40. By providing 82 on the upper surface of the X stage 38, the lower end of the pivot shaft 80 may be supported by the bearing 82.

  Further, since the θ table 40 rotates around the axis of the pivot shaft 80 (θz direction) by the thrust from the pair of θ linear motors 74 arranged on the left and right sides in the X direction, the θ table 40 is reduced by a couple of forces on the same horizontal plane. It can rotate with friction and low vibration. Since the θ linear motor 74 is a non-contact structure driving means, when the θ table 40 is rotated, the θ table 40 is rotated without being affected by the loss or fluctuation of the driving force due to the transmission path. Thus, the rotation operation of the θ table 40 can be controlled stably and precisely.

  Further, in the stage apparatus 10A, since the θ linear motor 74 is disposed on the side of the surface plate 20, the height dimension in the Z-axis direction is higher than that of the configuration in which the θ linear motor 74 is provided below the θ table 40. Can be made smaller, and can be made thinner.

  Further, since the θ table 40 is supported so as to float and move on the X stage 38 by the air pad 70 provided at the lower end of the column 60 described above, the thrust from the pair of θ linear motors 74 is a rotational force. When applied as (couple), it can rotate in the θz direction in a low friction state where only the rotational resistance of the bearing 82 is a load. In the θ linear motor 74, the relative position in the θz direction between the magnet yoke 76 and the coil unit 78 changes according to the rotation angle of the θ table 40, so that a gap corresponding to the maximum rotation angle is separated from the magnet yoke 76. It is formed in the horizontal direction between the coil unit 78 and is configured so that the magnet yoke 76 and the coil unit 78 do not interfere with each other.

  A space 120 through which the Y stage 36 is inserted is formed inside the X stage 38, and an X linear motor 124 that drives the X stage 38 in the X direction is provided in the space 120. Since the Y stage 36 is provided with sliders 32 at both ends and is guided and moved along the guide 28, the Y stage 36 moves in a non-contact manner with the inner wall of the X stage 38.

  The Y stage 36 has a vertical portion 36 a that supports the air pad 122 facing the inner wall of the X stage 38, and a flat portion 36 b to which the X linear motor 124 is attached. Since the air pad 122 faces the inner wall in the Y direction of the space 120 via air pressure, the inner wall of the space 120 can move without contact with the air pad 122 when the X stage 38 is moved in the X direction. Further, when the Y stage 36 is moved in the Y direction, the X stage 38 is moved in the Y direction by pressing the inner wall of the space 120 in the moving direction via the air pressure from the air pad 122. .

  The X linear motor 124 includes a magnet yoke (stator) 126 and a coil unit (movable element) 128 that extend in the X direction. The magnet yoke 126 is formed in a U shape when viewed from the side, and a plurality of permanent magnets are arranged in parallel on the upper and lower surfaces of the inner wall. Further, the magnet yoke 126 is fixed to the flat portion 36 b of the Y stage 36, and the coil unit 128 is supported by a bracket 130 fixed to the inner wall of the X stage 38.

  The coil unit 128 has a plurality of coils arranged in the X direction, and is inserted between the magnets of the magnet yoke 126 from the front. Therefore, when the coil unit 128 is energized, the coil unit 128 can form a magnetic flux and obtain thrust in the X direction with respect to the permanent magnet. Further, since the coil unit 128 is coupled to the X stage 38 via the bracket 130, the X direction thrust obtained by the coil unit 128 is applied to the X stage 38.

  Accordingly, the X stage 38 is driven in the X direction by the thrust from the X linear motor 124. The θ table 40 mounted on the X stage 38 moves in the X direction together with the X stage 38 because the X direction thrust of the X linear motor 124 is transmitted through the pivot shaft 80 and the bearing 82.

  When the X stage 38 moves in the Y direction together with the Y stage 36, the θ table 40 supported on the X stage 38 via the pivot shaft 80 and the bearing 82 also moves in the Y direction, and the lower end of the support column 60. The air pad 70 provided on the surface moves in a non-contact manner on the surface plate 20 by air pressure to maintain the horizontal accuracy of the θ table 40.

  Accordingly, in the stage apparatus 10A, the X table 38 is rotated in the θz direction about the axis of the pivot shaft 80 by the thrust from the pair of θ linear motors 74 input from the left and right side surfaces. Even when an error occurs in the movement position in the Y direction, an increase in error due to the rotation position of the θ table 40 is prevented. Therefore, even when the θ table 40 is rotated in the θz direction after the stage 30 is moved in the Y direction, the mirror 44 provided on the upper surface 42 of the θ table 40 is displaced from the irradiation position of the laser light from the laser interferometer. The position detection accuracy is prevented from being lowered by the laser interferometer. Further, in the stage apparatus 10A, for example, when used in an exposure apparatus, the position of the workpiece (wafer or the like) relative to the optical system is prevented from being shifted due to the rotation position of the θ table 40.

  FIG. 5 is a front view showing the stage apparatus of the second embodiment. In FIG. 5, the same parts as those in the above embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  As shown in FIG. 5, in the stage apparatus 10 </ b> B, a pair of Y linear motors 50 are provided on the left and right sides of the surface plate 20, as in the first embodiment. The Y linear motor 50 is disposed below the slider 32, and the magnet yoke 52 is attached in a U-shaped orientation so that the opening side is positioned at the top. A coil unit 54 attached so as to extend from the slider 32 in the hanging direction is inserted between the magnets of the magnet yoke 52 from above.

  Therefore, the Y linear motor 50 is provided such that the magnet yoke 52 and the coil unit 54 are combined so as to be relatively movable in the Y direction, and are also relatively movable in the upper direction (Z direction).

  Further, in the stage apparatus 10B, similarly to the first embodiment described above, a plurality of air pads 70 provided at the lower ends of the respective columns 60 float and move on the surface plate 20 outside the X stage 38. Yes. Therefore, the support 60 and the air pad 70 move together with the stage 30 while maintaining the plane accuracy (horizontal accuracy) of the θ table 40 by moving on the surface plate 20 while directly supporting the θ table 40.

  Further, the pair of θ linear motors 74 are provided at positions spaced laterally from the left and right side surfaces of the θ table 40 as in the first embodiment. The magnet yoke 76 is supported via a support portion 79 so as to have the same height as the side surface of the θ table 40. The support portion 79 is provided so as to stand on a floor surface that is separated from the side of the slider 32, and is configured not to be affected by vibration when the θ linear motor 74 moves the slider 32. ing.

  Further, since the pair of θ linear motors 74 are provided in parallel to positions symmetrical with respect to the pivot shaft 80 as viewed from above, a couple of forces about the pivot shaft 80 is energized by energizing the coil unit 78. And the θ table 40 is rotated in the θz direction from the side surface.

  At that time, a reaction force when the θ table 40 is rotated in the θz direction is transmitted to the floor surface via the support portion 79.

  Therefore, the stage apparatus 10B is configured so that the reaction force of the θ linear motor 74 is not transmitted to the Y stage 36 and the X stage 38, and accordingly, an error in the position control of the θ table 40 is prevented. It becomes possible to control the rotational position of the table 40 stably and precisely.

  FIG. 6 is a front view showing a stage apparatus according to the third embodiment. FIG. 7 is a side sectional view showing a height adjusting mechanism of the third embodiment. 6 and 7, the same reference numerals are given to the same portions as those in the above embodiment, and the description thereof is omitted.

  As shown in FIG. 6, the stage apparatus 10 </ b> C has a configuration in which a plurality of air pads 70 provided at the lower ends of the respective columns 60 float and move on the X stage 38, as in the first embodiment. Yes. Therefore, the support 60 and the air pad 70 move together with the stage 30 while maintaining the plane accuracy (horizontal accuracy) of the θ table 40 by moving on the X stage 38 while directly supporting the θ table 40.

  Further, in the stage apparatus 10C, as in the first embodiment, a pair of Y linear motors 50 are provided in a vertical state on the left and right sides of the surface plate 20. Further, on the side of the slider 32, a θ linear motor 74 supported by a support portion 79 is arranged in a vertical state.

  The height adjusting mechanism 200 (see FIG. 7) is provided between the θ table 40 and the X stage 38. The height adjusting mechanism 200 includes a support plate 210 having a pivot shaft 80 and a pair of leveling units 220 that adjust the height position of the support plate 210.

  In the support plate 210, the pivot shaft 80 stands integrally at the center of the upper surface, and furthermore, air pads 212 facing the lower surface of the θ table 40 are provided at four corners of the upper surface. Therefore, when the rotational force (couple) from the pair of θ linear motors 74 is applied, the θ table 40 can stably rotate in the θz direction with the axis of the pivot shaft 80 as the center of rotation. Become.

  Further, in the stage apparatus 10G, the Y linear motor 50 is disposed below the slider 32, and the magnet yoke 52 is attached in a U-shaped orientation so that the opening side is positioned at the top. The Y linear motor 50 is provided such that the magnet yoke 52 and the coil unit 54 are relatively movable in the Y direction and upward (Z direction).

  Since the Y linear motor 50 and the θ linear motor 74 are provided vertically, the coil units 54 and 78 are provided so as to be movable relative to the magnet yokes 52 and 76 in the Y direction and upward (Z direction). ing. Therefore, when the θ table 40 is moved up and down by the height adjustment mechanism 200, the magnet yokes 52 and 76 of the Y linear motor 50 and θ linear motor 74 do not interfere with the coil units 54 and 78, and the Y linear motor 50 and θ A linear motor 74 is provided so as not to hinder the lifting / lowering operation of the θ table 40.

  As shown in FIG. 7, the leveling unit 220 includes a lower block 230 supported by the air pad 70, an upper block 240 suspended from the lower surface of the support plate 210, and the lower block 230 and the upper block 240. The actuator 250 is provided. The lower block 230 is provided in a direction extending in the Y direction, and a plurality of air pads 70 that float and move on the X stage 38 are disposed on the lower surface.

Further, a pair of inclined portions 232 and a concave portion 234 are provided on the upper portion of the lower block 230. The pair of inclined portions 232 have inclined surfaces having the same direction and the same angle with respect to the horizontal plane, and are formed in an inclined direction in which the left side is low and the right side is high in FIG. A sliding member 260 that slides with low friction with respect to the lower surface of the support plate 210 is provided at an upper portion of 240. Further, a pair of inclined portions 242 and a concave portion 244 are provided in the lower portion of the upper block 240. The pair of inclined portions 242 have inclined surfaces having the same direction and the same angle with respect to the horizontal plane, respectively, and are inclined in an inclined direction parallel to the inclined portion 232.

  Further, through holes 246 penetrating in the vertical direction (Z direction) are formed inside the inclined portions 242 of the upper block 240, and the through holes 246 stand above the inclined portions 232. Each of the support columns 270 is inserted. The support column 270 has a rectangular cross-sectional shape, and its upper end faces the lower surface of the support plate 210 but is spaced apart. Each through hole 246 is formed in a rectangular shape that is wide in the Y direction when viewed from above, and is inserted in a state in which the support column 270 is loosely fitted. Therefore, each through hole 246 is configured to be movable in the Y direction with respect to the support column 270.

  The actuator 250 disposed between the concave portion 234 and the concave portion 244 includes, for example, driving means configured to generate a driving force in the Y direction by driving a ball screw mechanism with a motor. Is coupled to the upper block 240, and the right end bracket 254 is coupled to the lower block 230.

  Further, a low friction member 280 that reduces sliding resistance is interposed between the inclined portion 232 and the inclined portion 242. For example, when the driving force of the actuator 250 acts in the direction in which the left end step-252 and the right end step-254 are close to each other, the inclined portion 242 of the upper block 240 is rightward with respect to the inclined portion 232 of the lower block 230. Move to. Therefore, the upper block 240 rises according to the inclination angle of the inclined portions 232 and 242 with respect to the lower block 230 and raises the support plate 210 and the θ table 40.

  In addition, when the driving force of the actuator 250 acts in the direction in which the left end step-252 and the right end step-254 are separated from each other, the inclined portion 242 of the upper block 240 is leftward with respect to the inclined portion 232 of the lower block 230. Move to. Therefore, the upper block 240 descends according to the inclination angle of the inclined portions 232 and 242 with respect to the lower block 230 and lowers the support plate 210 and the θ table 40.

  Therefore, in the stage apparatus 10E, the θ table 40 is rotated in the θz direction by the rotational force (couple) from the pair of θ linear motors 74, and the θ table 40 is driven by the driving direction of the actuator 250 of the height adjustment mechanism 200. It is possible to adjust the height position with respect to the optical system by raising or lowering.

  FIG. 8 is a front view showing the stage apparatus of the fourth embodiment. In FIG. 8, the same parts as those in the above embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  As shown in FIG. 8, the stage apparatus 10 </ b> D has a configuration in which a plurality of air pads 70 provided at the lower end of each column 60 float and move on the surface plate 20, as in the second embodiment. Yes. Therefore, the support 60 and the air pad 70 move together with the stage 30 while maintaining the plane accuracy (horizontal accuracy) of the θ table 40 by moving on the surface plate 20 while directly supporting the θ table 40.

  Further, in the stage apparatus 10D, as in the third embodiment, a pair of Y linear motors 50 are provided in a vertical state on the left and right sides of the surface plate 20. Further, on the side of the slider 32, a θ linear motor 74 supported by a support portion 79 is arranged in a vertical state.

  The height adjusting mechanism 200 (see FIG. 7) is provided between the θ table 40 and the X stage 38. The height adjusting mechanism 200 includes a support plate 210 having a pivot shaft 80 and a pair of leveling units 220 that adjust the height position of the support plate 210.

  In the stage device 10H, since the Y linear motor 50 and the θ linear motor 74 are provided vertically as in the third embodiment, the coil units 54, 78 are positioned in the Y direction and above (with respect to the magnet yokes 52, 76). Z direction) is relatively movable. Therefore, when the θ table 40 is moved up and down by the height adjustment mechanism 200, the magnet yokes 52 and 76 of the Y linear motor 50 and θ linear motor 74 do not interfere with the coil units 54 and 78, and the Y linear motor 50 and θ A linear motor 74 is provided so as not to hinder the lifting / lowering operation of the θ table 40.

  FIG. 9 is a front view showing the stage apparatus of the fifth embodiment. In FIG. 9, the same parts as those in the above embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  As shown in FIG. 9, the stage apparatus 10E is a modification of the above-described first embodiment, and a Y linear motor 50 for driving the Y stage 36 among the constituent elements of the first embodiment (see FIG. 2) is provided. Not provided. In the stage apparatus 10E of the present embodiment, a pair of θ linear motors 74 generate thrust in opposite directions to rotate the θ table 40 in the θz direction, and the pair of θ linear motors 74 are in the same direction. Y control for generating a thrust force to move the θ table 40 in the Y direction.

  Therefore, according to the present embodiment, when the θ table 40 is moved in the Y direction by the Y control, the stage 30 can be moved in the Y direction via the pivot shaft 80 and the bearing 62. 50 can be made unnecessary, and the configuration can be simplified correspondingly to reduce the manufacturing cost.

  FIG. 10 is a front view showing the stage apparatus of the sixth embodiment. In FIG. 10, the same parts as those in the above embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  As shown in FIG. 10, the stage apparatus 10F is a modification of the above-described second embodiment, and a Y linear motor 50 for driving the Y stage 36 among the components of the second embodiment (see FIG. 5) is provided. Not provided. In the stage apparatus 10F of the present embodiment, as in the fifth embodiment, a pair of θ linear motors 74 generate thrust in opposite directions to rotate the θ table 40 in the θz direction, and a pair of Each of the θ linear motors 74 has Y control for generating thrust in the same direction and moving the θ table 40 in the Y direction.

  Therefore, according to the present embodiment, when the θ table 40 is moved in the Y direction by the Y control, the stage 30 can be moved in the Y direction via the pivot shaft 80 and the bearing 62. 50 can be made unnecessary, and the configuration can be simplified correspondingly to reduce the manufacturing cost.

  FIG. 11 is a front view showing the stage apparatus of the seventh embodiment. In FIG. 11, the same parts as those in the above embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  As shown in FIG. 11, the stage apparatus 10G is a modification of the above-described third embodiment, and includes a Y linear motor 50 for driving the Y stage 36 among the components of the third embodiment (see FIG. 6). Not provided. In the stage apparatus 10E of the present embodiment, as in the fifth to sixth embodiments, the pair of θ linear motors 74 respectively generate thrust in opposite directions to rotate the θ table 40 in the θz direction, Each of the pair of θ linear motors 74 has Y control that generates thrust in the same direction and moves the θ table 40 in the Y direction.

  Therefore, according to the present embodiment, when the θ table 40 is moved in the Y direction by the Y control, the stage 30 can be moved in the Y direction via the pivot shaft 80 and the bearing 62. 50 can be made unnecessary, and the configuration can be simplified correspondingly to reduce the manufacturing cost.

  FIG. 12 is a front view showing the stage apparatus of the eighth embodiment. In FIG. 12, the same parts as those in the above embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  As shown in FIG. 12, the stage apparatus 10H is a modification of the above-described fourth embodiment, and a Y linear motor 50 for driving the Y stage 36 among the components of the fourth embodiment (see FIG. 8) is provided. Not provided. In the stage apparatus 10H of the present embodiment, as in the fifth to seventh embodiments, the pair of θ linear motors 74 generate thrust in opposite directions, and rotate the θ table 40 in the θz direction. Each of the pair of θ linear motors 74 has Y control that generates thrust in the same direction and moves the θ table 40 in the Y direction.

  Therefore, according to the present embodiment, when the θ table 40 is moved in the Y direction by the Y control, the stage 30 can be moved in the Y direction via the pivot shaft 80 and the bearing 62. 50 can be made unnecessary, and the configuration can be simplified correspondingly to reduce the manufacturing cost.

  In the above embodiment, the case where the support portion 79 that supports the stator 76 of the θ linear motor 74 is fixed to the floor surface that is spaced apart from the side of the surface plate 20 is described as an example. Since the reaction force of the θ linear motor 74 received by the support portion 79 may be provided at a position where it does not propagate to the surface plate 20, it may be configured to be fixed to a fixed surface other than the floor surface.

  In the fifth to eighth embodiments, the configuration example in which the Y linear motor 50 is removed is illustrated. However, the present invention is not limited to this. For example, also in the first to fourth embodiments, the θ linear motor 74 performs the θz control and Y. It goes without saying that control can also be performed. As such a case, for example, a case where the Y linear motor 50 malfunctions or the Y linear motor 50 is removed for maintenance can be considered.

  In the above-described embodiment, the configuration in which the θ table 40 is rotatably supported by bearing the outer periphery of the upper end of the pivot shaft 80 with the bearing 82 is described as an example. Needless to say, the upper end shape of 80 may be formed in a conical shape or a hemispherical shape, and a bearing corresponding to the tip shape may be provided.

  In the above-described embodiment, the case where the height adjustment mechanism 200 includes the support plate 210 having the pivot shaft 80 and the pair of leveling units 220 that adjust the height position of the support plate 210 has been described. Of course, not only this but the raising / lowering mechanism of another structure may be used.

It is a perspective view which shows Example 1 of the stage apparatus by this invention. 1 is a front view showing a stage device of Example 1. FIG. 1 is a plan view showing a stage device of Example 1. FIG. FIG. 3 is a side sectional view of the stage 30 and the θ table 40 according to the first embodiment when viewed from the side. It is a front view which shows the stage apparatus of Example 2. FIG. FIG. 10 is a side sectional view showing a stage apparatus of Example 3. FIG. 10 is a side sectional view showing a height adjustment mechanism of Example 5. FIG. 10 is a front view showing a stage apparatus of Example 4. FIG. 10 is a front view showing a stage apparatus of Example 5. It is a front view which shows the stage apparatus of Example 6. FIG. It is a front view which shows the stage apparatus of Example 7. FIG. FIG. 10 is a front view showing a stage apparatus of Example 8.

Explanation of symbols

10A to 10H Stage device 20 Surface plate 28 Y direction guide rail 30 Stage 32 Slider 34, 70 Air pad 36 Y stage 38 X stage 40 θ table 50 Y linear motor 52 Magnet yoke 54 Coil unit 60 Column 74 θ linear motor 76 Magnet yoke 78 Coil unit 79 Support portion 80 Pivot shaft 82 Bearing 200 Height adjustment mechanism

Claims (9)

In a stage apparatus that has a stage that moves on a surface plate, and a θ table that is rotatably supported on the stage, and moves the stage together with the θ table,
A pair of θ linear motors having a mover coupled to a side surface of the θ table, and a stator disposed opposite to the mover, and driving the θ table about the Z axis;
A support portion fixed to a position spaced apart to the side of the surface plate, and supporting a stator of the θ linear motor;
A stage apparatus comprising:   2. The stage device according to claim 1, wherein the pair of θ linear motors drives the stage together with the θ table by driving the movable elements in parallel in the same direction. A pivot shaft that stands vertically between the center of the upper surface of the stage and the center of the lower surface of the θ table;
A bearing for bearing the pivot shaft such that the θ table rotates about the axis of the pivot shaft;
The stage apparatus according to claim 1, further comprising: A plurality of struts formed extending in the hanging direction from the lower surface of the θ table;
An air pad that floats and moves on the stage by air pressure at the lower end of the column;
The stage apparatus according to claim 1, comprising: A plurality of struts formed extending in the hanging direction from the lower surface of the θ table;
An air pad that floats and moves on the surface plate by air pressure at the lower end of the column;
The stage apparatus according to claim 1, comprising:   The stage apparatus according to claim 3, wherein the bearing is a cross roller bearing that supports an outer periphery of an upper end or a lower end of the pivot shaft. The stage has a Y stage that moves in the Y direction, and an X stage that moves in the X direction perpendicular to the Y direction,
7. The stage apparatus according to claim 1, wherein the θ table is supported on the X stage so as to be rotatable about the Z axis. The pivot shaft is supported by a support plate arranged to face the lower surface of the θ table,
The stage apparatus according to claim 3, wherein the support plate is supported via a height adjustment mechanism that adjusts a height position.   The stage apparatus according to claim 8, wherein the height adjustment mechanism is provided on the support column and adjusts a height position of the support plate via the support column.

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