JP2007206352A - Method of manufacturing element substrate for liquid crystal display device, liquid crystal display device and method of manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a flexible type of element substrate for liquid crystal display device capable of patterning and forming a columnar spacer which has sufficient adhesiveness for a part corresponding to a black matrix according to photolithography without generating any malfunction. <P>SOLUTION: An alignment layer 34 is formed on the uppermost surface side, a plastic film 10 on which a color filter 30 including a black matrix 30BM is formed on the lower side of the alignment layer 34 is prepared, a positive type of photosensitive resin layer 36 is formed on the alignment layer 34, thereafter, the photosensitive resin layer 36 is exposed from the surface side via a photomask such that a pattern superimposed on the black matrix 30 BM is obtained and, at the same time, the photosensitive resin layer 36 is exposed from the back surface side by using a black matrix 30BM as a mask. Thereafter, by developing the photosensitive resin layer 36, a plurality of columnar spacers S which are self-alignedly arranged on the part of the alignment layer 34 corresponding to the black matrix 30BM are obtained. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method for manufacturing an element substrate for a liquid crystal display device, a liquid crystal display device, and a method for manufacturing the same, and more specifically, a method for manufacturing an element substrate for a flexible liquid crystal display device using a plastic film as a substrate And a manufacturing method thereof.

  Liquid crystal display devices have the advantages of being thin and light, and being capable of being driven at a low voltage and consuming little power, and are widely used in various displays. In recent years, a flexible liquid crystal display device using a plastic film as a substrate has attracted attention. Such a flexible display can be used not only for an ultra-thin and light-weight mobile that can be rolled up and stored, but also as a display with a curved display screen.

  As an example of a method for manufacturing an element substrate of a flexible liquid crystal display device, manufacturing conditions are limited on a heat-resistant and rigid glass substrate in order to avoid warping or expansion / contraction of the plastic film in the manufacturing process. There is a method in which a transparent electrode, a color filter layer, and the like are aligned and formed with high accuracy to form a transfer layer, and then this transfer layer is transferred and formed on a plastic film (Patent Document 1).

  By the way, the liquid crystal display device has a structure in which a liquid crystal is sandwiched between two element substrates, and it is important to keep the cell gap constant in order to maintain the display quality. In general, the cell gap is controlled by interposing spherical spacers coated with an adhesive between two element substrates.

  Patent Document 2 describes a method of forming a plurality of spacers on a black matrix by exposing, developing, and electrodepositing a photoresist. Patent Document 3 describes that a columnar spacer made of a resin in which particles having a size approximately equal to the thickness of a liquid crystal layer is dispersed is provided on an element substrate.

Further, in Patent Document 4, after a photodegradable resin is formed on a glass substrate provided with a black matrix and an electrode, exposure is performed using the black matrix as a mask from the back side of the glass substrate, thereby forming a black matrix on the black matrix. A method is described in which protrusions are formed into spacers.
JP 2003-131199 A JP 2001-166314 A JP 2000-275654 A Japanese Patent No. 3071076

  However, in a flexible liquid crystal display device, the method of using a spherical spacer to maintain the cell gap does not provide sufficient adhesion of the spherical spacer when the display screen is curved and used. Uniformity is lost and uneven display tends to occur. Further, since the spherical spacer is also arranged in the display area, there is a possibility that the display characteristics are deteriorated by the spherical spacer.

  Furthermore, in the case of an element substrate that uses a plastic film as a substrate, since the plastic film expands and contracts due to heat, misalignment occurs in photolithography, so a dod-like spacer is patterned on the black matrix with high precision. It is extremely difficult to form. In the method of Patent Document 4, although the back exposure method can be used to form the protrusions on the black matrix in a self-aligning manner, it is difficult to pattern the dodd spacers on the black matrix. It is.

  The present invention has been created in view of the above-described problems, and patterning columnar spacers that can provide sufficient adhesion to a portion corresponding to a black matrix based on photolithography without causing any problems. It is an object of the present invention to provide a manufacturing method of a flexible type element substrate for a liquid crystal display device, a liquid crystal display device, and a manufacturing method thereof.

  In order to solve the above problems, the present invention relates to a method for manufacturing an element substrate for a liquid crystal display device, wherein an alignment film is formed on the uppermost surface side, and a color filter including a black matrix is formed below the alignment film. A step of preparing a plastic film, a step of forming a positive photosensitive resin layer on the alignment film, and a photomask from the surface side of the plastic film so that a pattern overlapping the black matrix is obtained. Exposing the photosensitive resin layer and exposing the photosensitive resin layer from the back side of the plastic film using the black matrix as a mask; developing the photosensitive resin layer; A plurality of columnar spacers are formed by forming a resin layer pattern arranged in a self-aligned manner on a portion of the alignment film corresponding to Characterized by a step of obtaining a service.

  In one preferred embodiment of the present invention, first, after a color filter, an electrode, and the like including a black matrix are formed on a plastic film by a transfer technique, an alignment film is formed at the top. Then, first exposure is performed on the positive photosensitive resin layer from the upper surface side of the plastic film through a photomask so that a pattern overlapping the black matrix is obtained. For example, the black matrix is arranged in a stripe shape, and the first exposure is performed so as to obtain a stripe-shaped resin pattern orthogonal to the black matrix.

  Subsequently, second exposure (backside exposure) is performed on the positive photosensitive resin layer from the back side of the plastic film using the black matrix as a mask without using a photomask. Thus, only the portion of the non-exposed portion in the first exposure that overlaps the black matrix becomes a non-exposed portion in a self-aligned manner, and the resin layer pattern is formed in a self-aligned manner on the portion of the alignment film corresponding to the black matrix. A columnar spacer is obtained by forming a dod.

  As described above, in the present invention, high-level alignment is unnecessary, and a dod-like columnar spacer can be formed in a portion corresponding to the black matrix in a self-aligning manner. Therefore, even when a plastic film that easily expands and contracts due to heat is used for the substrate, it is not necessary to consider positional displacement due to the expansion and contraction of the substrate in photolithography.

  Moreover, the columnar spacer (photosensitive resin layer) used in the present invention has an adhesive function when it is fully cured. When a liquid crystal display device is configured using the element substrate obtained by the manufacturing method of the present invention, when the sealing material provided on the peripheral edge of the cell portion is heat-treated and bonded with the counter substrate facing the element substrate. The columnar spacers are fully cured, so that the columnar spacers are bonded to the cell portions of the element substrate and the counter substrate with sufficient strength.

  For this reason, even when the display screen of the liquid crystal display device is installed in a curved shape, the uniformity of the cell gap is maintained, and the display characteristics can be improved.

  As described above, in the present invention, columnar spacers can be formed in a self-aligned pattern on the portion corresponding to the black matrix, so that no problem occurs even if a plastic film is used for the substrate. In addition, since columnar spacers having adhesiveness are used, the uniformity of the cell gap can be maintained and the display characteristics can be improved when configuring as a plexable liquid crystal display device.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

  1 to 9 are views showing a method of manufacturing an element substrate for a liquid crystal display device according to an embodiment of the present invention, and FIGS. 10 and 11 are sectional views showing the liquid crystal display device.

  In the method for manufacturing an element substrate for a liquid crystal display device according to an embodiment of the present invention, as shown in FIG. A release layer 22 of a degree is formed.

Next, as shown in FIG. 1B, an inorganic insulating layer 24 is formed on the release layer 22. As the inorganic insulating layer 24, a barrier layer such as a silicon nitride layer (SiN _x layer), a silicon oxide layer (SiO _x layer), or a silicon oxynitride layer (SiON layer) that can block gas intrusion is used. The film thickness is about 15 nm by sputtering.

  Subsequently, as shown in FIG. 1C, after forming an ITO (Indium Tin Oxide) layer having a thickness of 150 nm on the inorganic insulating layer 24, the ITO layer is patterned by photolithography and etching. An electrode 26 made of a transparent conductive layer is formed. The electrode 26 is supplied with a display signal, and FIG. 1C illustrates a striped electrode 26 for driving a simple matrix of a liquid crystal display device.

  Since the ITO layer constituting the electrode 26 is formed on the heat-resistant glass substrate 20, a sputtering method having a film forming temperature of about 180 ° C. can be employed. Therefore, an ITO layer having crystallinity and low resistance (sheet resistance value: 15Ω / mouth) can be obtained.

  Subsequently, as shown in FIG. 2A, a protective layer 28 made of acrylic resin or the like and having a thickness of about 2 to 5 μm is formed on the inorganic insulating layer 24 and the electrode 26. At this time, the step of the electrode 26 is flattened by the protective layer 28. Further, as shown in FIG. 4A, a black matrix 30BM is formed between the patterns of the electrodes 26 on the protective layer 28. Subsequently, a red color filter 30R is formed in a portion constituting the red pixel portion. Next, a green color filter 30G is formed in a portion constituting the green pixel portion. Thereafter, a blue color filter 30B is formed in a portion constituting the blue pixel portion.

  In this manner, the color filter 30 including the red color filter 30R, the green color filter 30G, the blue color filter 30B, and the black matrix 30BM is formed. The color filters 30R to 30BM for each color are formed, for example, by patterning a pigment dispersion type photosensitive coating film by photolithography.

  Next, as shown in FIG. 2B, the plastic film 10 is disposed on the upper surface of the structure of FIG. As the plastic film 10, a polyethersulfone film or a polycarbonate film having a film thickness of 100 to 200 μm is preferably used.

  Further, the adhesive layer 32 is cured by heat treatment, and the plastic film 10 is bonded onto the structure shown in FIG. 2B, the roll 40 is fixed to one end of the plastic film 10, and the glass substrate 20 is peeled off while the roll 40 is rotated. At this time, it peels along the interface (A part of FIG.2 (b)) of the glass substrate 20 and the peeling layer 22, and the glass substrate 20 is discarded.

  Thereby, as shown in FIG.2 (c), it is comprised on the plastic film 10 by the adhesive layer 32, the color filter 30, the protective layer 28, the electrode 26, the inorganic insulating layer 24, and the peeling layer 22 in an order from the bottom. The transfer layer T is transferred and formed.

  As described above, in this embodiment, after the transfer layer T including various desired elements is accurately formed on the heat-resistant and rigid glass substrate 20, the transfer layer T is transferred and formed on the plastic film 10. Is adopted. For this reason, various desired elements can be formed on the plastic film 10 with high alignment accuracy.

  Next, as shown in FIG. 3A, the release layer 22 on the plastic film 10 is removed by etching using an alkaline solution such as oxygen plasma or a choline system to expose the inorganic insulating layer 24. Subsequently, as shown in FIG. 3B, an alignment film 34 made of polyimide is formed on the inorganic insulating layer 24.

  Next, as shown in FIG. 3C, after applying a positive photosensitive resin having an adhesive function on the alignment film 34 by spin coating, heat treatment is performed in a clean oven at 80 ° C. for 20 minutes. Thus, the resin layer 36 is obtained. At this time, the resin layer 36 is in a semi-cured state, and the resin layer 36 has adhesiveness when fully cured as will be described later. Since the resin layer 36 is later patterned and functions as a columnar spacer, its thickness is set to be about 0.2 to 0.5 μm thicker than the target cell gap of the liquid crystal display device (for example, 5 to 8 μm).

Next, as shown in FIG. 4A, 140 to 200 mj / cm ² from the surface side of the plastic film 10 (surface on the resin layer 36 side) through a photomask 42 having a striped exposure pattern. The resin layer 36 is exposed (first exposure). At this time, as shown in FIG. 4B, the stripe-shaped first exposed portion of the resin layer 36 is obtained so that the stripe-shaped resin layer 36 orthogonal to the stripe-shaped black matrix 30BM is obtained (defined). E1 (filled portion) is exposed.

Further, as shown in FIG. 5A, the resin layer 36 is exposed from the back side of the plastic film 10 under the condition of 800 to 900 mj / cm ² without using a photomask (second exposure). At this time, as shown in FIG. 5B, exposure is performed using the black matrix 30BM as a mask, so the region of the resin layer 36 between the stripe-shaped black matrix 30BM (second exposure portion indicated by E2). Are exposed. That is, paying attention to the area between the black matrixes 30BM, the area exposed in the exposure process of FIG. 4 is exposed again, and the area not exposed in the exposure process of FIG. 4 (shaded area in FIG. 5) is additionally exposed. It will be done. Therefore, the entire region of the resin layer 36 between the black matrixes 30BM is exposed in a self-aligned manner, and only the portion where the columnar spacers are disposed is not self-exposed in the region of the resin layer 36 corresponding to the black matrix 30BM. Part (the white part in FIG. 5B).

  Subsequently, the exposed resin layer 36 is developed with an organic alkali (tetramethylammonium hydroxide aqueous solution: 2.38%), and then washed and dried.

  Thereby, as shown in FIGS. 6A and 6B, the resin layer 36 is formed in a columnar pattern on the portion of the alignment film 34 corresponding to each black matrix 30BM. Become.

  Thus, in the present embodiment, first, the first resin layer 36 from the upper surface side of the plastic film via the photomask 42 is obtained so as to obtain a stripe-shaped resin layer 36 orthogonal to the black matrix 30BM. Exposure is performed. Further, the second exposure is performed on the resin layer 36 from the back side of the plastic film 10 using the black matrix 30BM as a mask without using a photomask. Thus, only the portion of the non-exposed portion in the first exposure that overlaps the black matrix 30BM becomes a non-exposed portion in a self-aligned manner, and the resin layer 36 is self-aligned on the alignment film 34 corresponding to the black matrix 30BM. As a result, the columnar spacer S is obtained.

  For this reason, in the present embodiment, high-level alignment is unnecessary, and a plurality of columnar spacers S can be formed in a pattern corresponding to the black matrix 30BM in a self-aligning manner. Therefore, even when a plastic film that easily expands and contracts due to heat is used for the substrate, it is not necessary to consider positional displacement due to the expansion and contraction of the substrate in photolithography.

  Thereafter, a rubbing process is performed on the alignment film 34 of FIG. Thereby, the element substrate 1 for a liquid crystal display device of the present embodiment is obtained.

  7 and 8 show another method for forming the columnar spacer S. As shown in FIGS. 7A and 7B, first, when performing the first exposure, the resin layer 36 is exposed through a photomask 42x in which a dot-like pattern is formed over the entire surface of the alignment film 34. To do. As a result, as shown in FIG. 7B, the resin layer 26 is exposed so that dot-like non-exposed portions (dashed circles) are obtained on the black matrix 30BM and in the region between them. Next, the region of the resin layer 36 between the black matrix 30BM is exposed by the second exposure (back exposure). Thereafter, when the resin layer 36 is developed, as shown in FIG. 8, columnar spacers S are formed by patterning on the portion of the alignment film 36 corresponding to the black matrix 30BM.

  Alternatively, the second exposure (backside exposure) may be performed after the exposure using a photomask in which a long island-like line pattern is formed on the entire surface in the first exposure. Also in this case, columnar spacers S made of long island line patterns are formed in a self-aligned manner on the alignment film 36 corresponding to the black matrix 30BM.

  7B shows an example in which the dot pattern is arranged inside the black matrix 30BM, the dot pattern may be formed so as to protrude outside the black matrix 30BM. In this case, since the protruding portion is exposed at the time of the second exposure (back exposure), the columnar spacers S are similarly formed on the black matrix 30BM in a self-aligning manner.

  In other words, in the present invention, the second exposure (backside exposure) may be performed after the exposure so that a pattern overlapping the black matrix 30BM is obtained when the first exposure is performed, and is defined by the first exposure. The shape of the resin layer pattern can be set arbitrarily.

  Note that similar columnar spacers S can be formed even if the order of the first exposure and the second exposure (back exposure) is reversed.

  In the above-described embodiment, the example in which the columnar spacer S is formed on the element substrate on which the color filter 30 and the electrode 26 are formed on the plastic film 10 by transfer is shown. Columnar spacers may be formed by a similar method on the element substrate on which electrodes and the like are formed.

  Next, a manufacturing method of the liquid crystal display device of this embodiment will be described. As shown in FIG. 9, first, the above-described element substrate 1 for a liquid crystal display device is used as a first element substrate 1a, and a second element substrate 1b serving as a counter substrate is prepared. The second element substrate 1b is formed by sequentially forming a protective layer 28a, a striped electrode 26a, an inorganic insulating layer 24a, and an alignment film 34a on a plastic film 10a via an adhesive layer 32a. The second element substrate 1b is manufactured by a transfer technique in the same manner as the first element substrate 1a, and after the alignment film 32a is formed on the inorganic insulating layer 24a, the surface thereof is subjected to a rubbing process.

  Similarly, as shown in FIG. 9, a sealing material 44 is formed on the peripheral edge of the cell portion of the second element substrate 1b by screen printing or the like. As the sealing material 44, a solventless two-component thermosetting adhesive is preferably used. The sealing material 44 may be provided at the peripheral edge of the cell portion of the first element substrate 1a.

  Next, the first element substrate 1a is arranged on the second element substrate 1b so that the electrodes 26, 26a are orthogonal to each other, and the first and second element substrates 1a, 1b are pressed with a press machine in a range of 120 to 130. Heat treatment is performed at a temperature of °.

  As a result, as shown in FIG. 10, the first and second element substrates 1a and 1b are bonded by curing the sealing material 44 to obtain a liquid crystal display member. At this time, since the columnar spacer S has an adhesive function when the main curing is performed, the upper and lower surfaces of the columnar spacer S are sufficient for the cell portions of the first element substrate 1a and the second element substrate 1b, respectively. Glue with good strength.

  Next, after putting the liquid crystal display member in the vacuum chamber and making the vacuum chamber in a vacuum state, the vacuum chamber is returned to atmospheric pressure in a state where the liquid crystal is brought into contact with the inlet previously opened in the liquid crystal display member. As a result, the liquid crystal 46 is sealed between the first and second element substrates 1a and 1b using the pressure difference and the capillary phenomenon, and then the injection port is sealed with the ultraviolet curable resin.

  As described above, the liquid crystal display device 2 of the present embodiment is obtained as shown in FIG.

  As shown in FIG. 10, the liquid crystal display device 2 of the present embodiment is basically constituted by a first element substrate 1a, a second element substrate 1b, and a liquid crystal 46 sandwiched therebetween. In the first element substrate 1a, the adhesive layer 32 is formed on the plastic film 10a (lower in FIG. 10), and the color filter 30 is formed thereon. A protective layer 28 is formed on the color filter 30, and the electrode 26 is embedded in the protective layer 28. Further, an inorganic insulating layer 24 is formed on the electrode 26, and an alignment film 34 is formed thereon.

  In the second element substrate 1b, a protective layer 28a, an electrode 26a, an inorganic insulating layer 24a, and an alignment film 34a are sequentially formed on the plastic film 10a via an adhesive layer 32a.

  The first element substrate 1a and the second element substrate 1b are not only bonded by the sealing material 44 provided at the peripheral portion of the cell portion, but also the alignment films 34 corresponding to the black matrix 30BM of the cell portion, The cell gap is held in a state of being bonded by the plurality of columnar spacers S arranged in the portion 34a. Since the columnar spacer S of the present embodiment has an upper surface and a lower surface that are larger in area than the spherical spacer, unlike the spherical spacer, the columnar spacer S is bonded to the cell portions of the first and second element substrates 1a and 1b with sufficient strength. .

  For this reason, even when the display screen of the liquid crystal display device 2 of the present embodiment is arranged in a curved shape, the uniformity of the cell gap is maintained throughout, so that the display characteristics can be improved. In the example of FIG. 10, since the columnar spacer S does not exist in the display area other than the black matrix 30BM of the cell portion, there is no possibility that display characteristics are deteriorated due to the spacer.

  FIG. 11 shows a liquid crystal display device 2a according to a modification of the present embodiment. As shown in FIG. 11, spherical spacers SX may be scattered in the display region between the columnar spacers S when it is possible to allow the display characteristics to be deteriorated by the spacers and to further improve the uniformity of the cell gap. . In this case, since the uniformity of the cell gap when the display screen of the liquid crystal display device 2a is curved is further improved, a curved image with higher reliability can be obtained. In FIG. 11, the elements other than the spherical spacer SX are the same as those in FIG. 10, and therefore, the other elements are denoted by the same reference numerals and the description thereof is omitted.

1A to 1C are sectional views (No. 1) showing a method for manufacturing an element substrate for a liquid crystal display device according to an embodiment of the present invention. 2A to 2C are cross-sectional views (part 2) illustrating the method for manufacturing the element substrate for a liquid crystal display device according to the embodiment of the present invention. 3A to 3C are cross-sectional views (No. 3) showing the method for manufacturing the element substrate for a liquid crystal display device according to the embodiment of the present invention. 4A and 4B are a cross-sectional view and a plan view (part 4) showing the method for manufacturing the element substrate for a liquid crystal display device according to the embodiment of the present invention. 5A and 5B are a cross-sectional view and a plan view (No. 5) showing the method for manufacturing the element substrate for a liquid crystal display device according to the embodiment of the present invention. 6A and 6B are a cross-sectional view and a plan view (No. 6) showing the method for manufacturing the element substrate for a liquid crystal display device according to the embodiment of the present invention. 7A and 7B are a cross-sectional view and a plan view (No. 1) showing another method for forming the columnar spacer in the method for manufacturing the element substrate for a liquid crystal display device according to the embodiment of the present invention. 8A and 8B are a cross-sectional view and a plan view (No. 2) showing another method for forming the columnar spacer in the method for manufacturing the element substrate for a liquid crystal display device according to the embodiment of the present invention. FIG. 9 is a sectional view (No. 7) showing the method for manufacturing the liquid crystal display device of the embodiment of the present invention. FIG. 10 is a cross-sectional view showing a liquid crystal display device according to an embodiment of the present invention. FIG. 11 is a cross-sectional view showing a liquid crystal display device according to a modification of the embodiment of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Element board | substrate for liquid crystal display devices, 1a ... 1st element substrate, 1b ... 2nd element substrate, 2, 2a ... Liquid crystal display device 10, 10a ... Plastic film, 20 ... Glass substrate, 22 ... Release layer, 24, 24a ... inorganic insulating layer 26, 26a ... electrode, 28, 28a ... protective layer, 30 ... color filter, 30R ... red color filter, 30G ... green color filter, 30B ... blue color filter, 30BM ... black matrix, 32, 32a ... Adhesive layer, 34, 34a ... Alignment film, 36 ... Resin layer, 40 ... Roll, 42, 42x ... Photomask, 44 ... Sealing material, 46 ... Liquid crystal, S ... Columnar spacer, SX ... Spherical spacer.

Claims (8)

A step of preparing a plastic film in which an alignment film is formed on the uppermost surface side and a color filter including a black matrix is formed below the alignment film;
Forming a positive photosensitive resin layer on the alignment film;
The photosensitive resin layer is exposed through a photomask from the front side of the plastic film so that a pattern overlapping the black matrix is obtained, and the photosensitive film is masked from the back side of the plastic film using the black matrix as a mask. A step of exposing the conductive resin layer;
And developing the photosensitive resin layer to form a resin layer pattern arranged in a self-aligned manner on a portion of the alignment film corresponding to the black matrix to obtain a plurality of columnar spacers. A method for manufacturing an element substrate for a liquid crystal display device.   The method for producing an element substrate for a liquid crystal display device according to claim 1, wherein the photosensitive resin layer has an adhesive function when the resin is fully cured.   In the step of preparing the plastic film, an adhesive layer, the color filter, a protective layer, an electrode, an inorganic insulating layer, and the alignment film are formed on the plastic film in order from the bottom. The manufacturing method of the element substrate for liquid crystal display devices of Claim 1 or 2.   3. The element substrate for a liquid crystal display device according to claim 1, wherein the black matrix is arranged in a stripe shape, and a pattern overlapping the black matrix is a stripe pattern orthogonal to the black matrix. Production method.   3. The method of manufacturing an element substrate for a liquid crystal display device according to claim 1, wherein the pattern overlapping the black matrix is a dodd pattern or a longitudinal island pattern disposed over the entire surface of the alignment film. . Preparing a first element substrate made of an element substrate for a liquid crystal display device obtained by the manufacturing method according to claim 1 and a second element substrate serving as a counter substrate;
A sealing material is provided on a peripheral portion of one of the cell portions of the first and second element substrates, the second element substrate is opposed to a surface of the first element substrate on the columnar spacer side, and the first and second element substrates are opposed to each other. By heat-treating the two-element substrate while pressing, the peripheral portions of the cell portions of the first and second element substrates are bonded with the sealing material, and at the same time, the columnar spacer is cured to cure the columnar spacer. Bonding each cell part to the second element substrate;
And a step of encapsulating liquid crystal between the first and second element substrates. A first element substrate having a structure in which an alignment film is formed at the top and a color filter including a black matrix is formed below the alignment film, the substrate being a plastic film;
A second element substrate having a plastic film on which an alignment film is formed at the top as a substrate, the first element being arranged by a sealing material disposed opposite to the first element substrate and provided at a peripheral portion of a cell portion. The second element substrate bonded to the substrate;
The first element substrate is formed of a positive photosensitive resin that is disposed on the alignment film corresponding to the black matrix and that adheres to the cell portions of the first and second element substrates to maintain a cell gap. A plurality of columnar adhesive spacers,
A liquid crystal display device comprising: a liquid crystal sandwiched between the first and second element substrates. The first element substrate is configured by forming an adhesive layer, the color filter, a protective layer, an electrode, an inorganic insulating layer, and the alignment film in order from the bottom on the plastic film,
8. The second element substrate according to claim 7, wherein an adhesive layer, a protective layer, an electrode, an inorganic insulating layer, and the alignment film are formed in order from the bottom on the plastic film. The liquid crystal display device described.

Images