JP2007256312A - Manufacturing method for color filter, manufacturing method for organic electroluminescence element, and ink jet coating device used therefor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ink jet coating device which is free of striped absence and unevenness, and a method for manufacturing an optical element such as a color filter and an organic EL element which is free of striped absence and unevenness. <P>SOLUTION: The ink jet coating device is characterized in that ink jet heads (n) (n: a natural number not less than 2) which discharge ink of the same color among ink jet heads discharging ink of a plurality of colors are arranged in parallel having their nozzles arrayed in a first direction and also having the nozzles shifted by L/n each in the first direction, where L is an interval between adjacent nozzles of the ink jet heads. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

The present invention relates to an inkjet coating apparatus for producing a printed matter having an ink film and a printed matter (mainly a color filter) for forming a coating layer using the inkjet coating apparatus.
As a coating layer of this printed matter, a color layer of a color filter, a color conversion layer of a color conversion filter, an organic light emitting layer and a charge transport layer of an organic electroluminescence element (hereinafter referred to as an organic EL element), a circuit pattern of a circuit board, a thin film transistor Examples thereof include a wiring pattern, a microlens lens pattern, a biochip flow path pattern, and the like.

For example, a photolithography method, an etching method, and the like are known as a color filter manufacturing method. A method for producing a color filter by a photolithography method is to form a coating film of a photosensitive resin layer of each color on the entire substrate, and after exposing in a pattern, remove unnecessary portions of the coating film, and use the remaining pattern as each pixel. . In this method, a large amount of material is wasted because most of the coating film is developed and removed. Further, since the exposure and development processes are performed for each pixel, the number of processes increases. This photolithography system is used not only for color filters but also for manufacturing various optical elements and electrical elements (hereinafter referred to as optical elements) such as organic electroluminescence elements.
However, the substrate size of color filters is increasing year by year. In order to reduce the cost of the color filter, the conventional pigment dispersion method that repeats the photolithography process is wasteful, and recently, a method using an ink jet has been studied.

  The ink jet coating apparatus includes an ink jet head in which a plurality of nozzles are aligned. In the inkjet coating apparatus, drawing is performed by relatively moving the nozzle and the substrate table along the surface of the substrate table. In consideration of the yield with the increase in the size of the substrate, the inkjet coating apparatus is provided with a plurality of inkjet heads arranged in an array, and creates ejection pattern information so that the ejection liquid amount is uniform. In addition, several methods are known as methods for creating an optical element or the like having a pattern of a plurality of colors arranged in a stripe using an inkjet coating apparatus. For example, a first method in which the longitudinal direction of the stripe pattern is substantially orthogonal to the direction of the inkjet head of a specific color and the inkjet head is main-scanned along the longitudinal direction of the stripe pattern (Patent Document 1 and Patent Document 2) There is also known a second method (Patent Document 3) in which the longitudinal direction of the stripe pattern and the direction of the inkjet head of a specific color are substantially parallel, and the inkjet head is scanned in a direction perpendicular to the longitudinal direction of the stripe pattern. ing.

In an inkjet coating apparatus, high positional accuracy of the nozzle is required during printing. Also, in recent years, display devices have become higher in definition. For example, in a color filter for a liquid crystal display device compatible with full-spec high-vision (horizontal 1920 × vertical 1080), when manufactured with an ink jet coating apparatus, a higher level of pixels than conventional ones is used. It is necessary to provide density.
However, in the first method described above, when manufacturing an optical element having a high pixel density, there is a problem that color mixing occurs if the arrangement of the inkjet head is slightly shifted, and an optical element having a high pixel density is manufactured accurately. I couldn't. In the second method described above, even when color mixing occurs between pixels of different colors, defects can be prevented by changing the ejection timing of the nozzles belonging to the inkjet head. However, the interval (pitch) between a specific pixel constituting a stripe pattern of the same color and the pixel of the same color adjacent to this pixel depends on the interval of the nozzles of the inkjet head. For this reason, in the second method, there is a limit to the ejection resolution for the same color.
If the ejection resolution is insufficient, gaps in the ejected ink pattern occur or dots overlap. When such a phenomenon occurs, streaky omissions and unevenness are generated, causing problems that cause defects.
JP-A-8-292319 JP 2001-228320 A JP 2003-127343 A

An object of the present invention is to solve the above-described problems, and to provide an inkjet coating apparatus that does not cause streak-like omission or unevenness. Another object of the present invention is to provide a method that does not cause streak-like omission or unevenness in a method of manufacturing an optical element such as a color filter or an organic EL element using an inkjet coating apparatus.
More specifically, it is an object to improve the resolution of ejection between a specific pixel constituting a stripe pattern of a color filter and an interval (pitch) between pixels of the same color adjacent to the pixel. .

The present invention has been made to solve the above-described problems, and the configuration thereof will be described below.
(Claim 1)
A nozzle that is arranged at substantially uniform intervals in a substantially first direction, and an inkjet head that ejects ink of a plurality of colors from the nozzle and a substrate are relatively disposed in a second direction that is substantially orthogonal to the first direction. While performing main scanning, ink is ejected from the inkjet head onto the substrate,
A method of manufacturing a color filter by coloring so that adjacent pixels in the second direction have different colors,
When the interval between adjacent nozzles of the inkjet head is L,
Among the inkjet heads that eject ink of the plurality of colors, n inkjet heads that eject ink of the same color (n is a natural number of 2 or more),
N inkjet heads of the same color are arranged in parallel so that the nozzles of the n inkjet heads of the same color are substantially aligned in the first direction,
The n number of inkjet heads of the same color are arranged by sequentially shifting the nozzles in the first direction by L / n,
Discharging ink while relatively scanning the inkjet head and the substrate in a second direction;
And a step of sub-scanning the inkjet head and the substrate relatively in a first direction.

(Claim 2)
The method for producing a color filter according to claim 1, wherein the inkjet head that ejects ink of a plurality of colors is an inkjet head that ejects red, green, and blue inks.

(Claim 3)
When ejecting ink in the n specific color inkjet heads,
The ejection timing is changed by the time obtained by dividing the difference in position in the second direction of each inkjet head by the main scanning speed of the substrate,
The method for producing a color filter according to claim 1, wherein the ink is ejected linearly across the n specific color inkjet heads.

(Claim 4)
A nozzle that is arranged at substantially uniform intervals in a substantially first direction, and an inkjet head that ejects ink of a plurality of colors from the nozzle and a substrate are relatively disposed in a second direction that is substantially orthogonal to the first direction. Discharging ink from the inkjet head to the substrate while performing main scanning,
A method of manufacturing an organic electroluminescent element by patterning an organic light emitting layer so that pixels adjacent to each other in the second direction have different colors,
When the interval between adjacent nozzles of the inkjet head is L,
Among the inkjet heads that eject ink of the plurality of colors, n inkjet heads that eject ink of the same color (n is a natural number of 2 or more),
N inkjet heads of the same color are arranged in parallel so that the nozzles of the n inkjet heads of the same color are substantially aligned in the first direction,
The n number of inkjet heads of the same color are arranged by sequentially shifting the nozzles in the first direction by L / n,
Discharging ink while relatively scanning the inkjet head and the substrate in a second direction;
And a step of relatively sub-scanning the ink jet head and the substrate in a first direction.

(Claim 5)
When ejecting ink in the n specific color inkjet heads,
The ejection timing is changed by the time obtained by dividing the difference in position in the second direction of each inkjet head by the main scanning speed of the substrate,
5. The method of manufacturing an organic electroluminescence element according to claim 4, wherein the ink is ejected linearly over the entire n specific color inkjet heads.

(Claim 6)
The apparatus includes nozzles arranged at substantially uniform intervals in a first direction, and an inkjet head that discharges a plurality of colors of ink from the nozzles and a transport stage are relatively relative to a second direction that is substantially orthogonal to the first direction. An ink jet coating apparatus comprising means for discharging ink from the ink jet head to the substrate while performing main scanning.
When the interval between adjacent nozzles of the inkjet head is L,
Among the inkjet heads that eject inks of a plurality of colors, the inkjet head subunit includes n inkjet heads that eject ink of the same color (n is a natural number of 2 or more),
The inkjet heads of the same color constituting the inkjet subunit are all arranged in parallel so that the arrangement direction of the nozzles is aligned with the first direction, and
An inkjet coating apparatus comprising: an inkjet head subunit in which each inkjet head constituting the inkjet subunit is arranged by sequentially shifting nozzles by L / n in the first direction.

(Claim 7)
The inkjet head subunit for a specific color includes an inkjet head subunit that ejects red ink, an inkjet head subunit that ejects green ink, and an inkjet head subunit that ejects blue ink. The inkjet coating apparatus according to claim 6.

As described above, according to the present invention, it is possible to improve the resolution of ejection between the specific pixel constituting the stripe pattern of the color filter and the interval (pitch) between the pixels of the same color adjacent to the pixel. did it. As a result, it was possible to provide a method for manufacturing a color filter that does not cause streak-like omission or unevenness.
In addition, it was possible to provide a method for manufacturing an organic EL element in which streak-like omission and unevenness do not occur. Further, according to the present invention, there is provided an ink jet coating apparatus in which the ejection resolution between a specific pixel constituting a stripe pattern and an interval (pitch) between the same pixels adjacent to the pixel is improved. I was able to.

According to a first aspect of the present invention, there is provided a second nozzle that is provided with nozzles that are arranged at substantially uniform intervals in the first direction, and an inkjet head that discharges a plurality of colors of ink from the nozzle and the substrate substantially orthogonal to the first direction. A color filter is manufactured by discharging ink from the inkjet head to the substrate while performing main scanning relatively in the direction of, and coloring adjacent pixels in the second direction to different colors. The method is assumed. That is, the present invention relates to a method for manufacturing a color filter by the second method in the background art described above.
In the first invention, among the inkjet heads that eject the plurality of colors of ink, n inkjet heads that eject the same color ink (n is a natural number of 2 or more) are arranged.
At this time, the n inkjet heads of the same color are arranged in parallel so that the nozzles of the n inkjet heads of the same color are aligned in the first direction.
Furthermore, when the interval between adjacent nozzles among nozzles belonging to a specific inkjet head is L, the nozzles of the n same-color inkjet heads are sequentially shifted by L / n in the first direction. Deploy.
In the first aspect of the invention, ink is discharged while the ink jet head unit arranged in this manner is relatively main-scanned in the second direction, and the ink jet head and the substrate are relatively moved in the first direction. And a sub-scanning step.
That is, in the first invention, the n number of inkjet heads are shifted in parallel by L / n, so that the resolution of the specific color can be increased by a factor of n compared to the conventional inkjet coating apparatus. As a result, problems such as streak-like unevenness could be solved. n may be a natural number of 2 or more, more preferably 3 or 4 or 5 or more.

  The second invention is characterized in that the inkjet head subunits specified by the first invention are respectively provided for three colors of red, green, and blue. As a result, in the color filter manufacturing method, it was possible to form a linear pixel pattern with n times the resolution of the conventional three colors of red, green, and blue.

  According to a third aspect of the present invention, when ink is ejected from n number of specific color ink jet heads, the difference in position in the Y direction of each ink jet head is divided by the time obtained by dividing by the main scanning speed of the substrate. Change the discharge timing. That is, in the first invention and the second invention, since the inkjet heads of a specific color are arranged in parallel, all the inkjet heads of the specific color are not arranged linearly in the first direction, and the second direction It is shifted and arranged. For this reason, all the inkjet heads of the specific color cannot be discharged at the same time to obtain a linear pixel pattern. Therefore, in the third aspect of the invention, the number of specified nozzles is changed by changing the discharge timing of the inkjet head of the specific color by dividing the position difference of the inkjet head in the second direction by the main scanning speed. A color filter is manufactured by ejecting ink linearly across the entire color inkjet head. By doing so, a color filter having striped pixels could be manufactured with high accuracy.

According to a fourth aspect of the invention, there are provided nozzles arranged at a uniform interval substantially in the first direction, and an organic electroluminescence element that discharges a plurality of colors of ink from the nozzle and the substrate are substantially orthogonal to the first direction. Organic electroluminescence is achieved by discharging ink from the inkjet head onto the substrate while performing main scanning relatively in the second direction, and coloring the adjacent pixels in the second direction to have different colors. A method for manufacturing an element is assumed. That is, the present invention relates to a method for manufacturing an organic electroluminescence element by the second method in the background art described above.
In the fourth invention, among the inkjet heads that eject the plurality of colors of ink, n inkjet heads that eject the same color ink (n is a natural number of 2 or more) are arranged.
At this time, the n inkjet heads of the same color are arranged in parallel so that the nozzles of the n inkjet heads of the same color are aligned in the first direction.
Furthermore, when the interval between adjacent nozzles among nozzles belonging to a specific inkjet head is L, the nozzles of the n same-color inkjet heads are sequentially shifted by L / n in the first direction. Deploy.
In the fourth aspect of the invention, ink is ejected while the ink jet head unit arranged in this manner is relatively main-scanned in the second direction, and the ink jet head and the substrate are relative to each other in the first direction. And a sub-scanning step.
That is, in the fourth invention, the resolution of the specific color can be increased by n times compared to the conventional inkjet coating apparatus by arranging n inkjet heads in parallel by shifting by L / n. As a result, problems such as streak-like unevenness could be solved. n may be a natural number of 2 or more, more preferably a natural number of 3, 4 or 5 or more.

  According to a fifth aspect of the present invention, when ink is ejected from n specific color inkjet heads, the difference in Y-direction position of each inkjet head is divided by the time obtained by dividing the substrate by the main scanning speed. Change the discharge timing. In other words, in the fourth invention, since the inkjet heads of a specific color are arranged in parallel, all the inkjet heads of the specific color are not arranged linearly in the first direction but are shifted in the second direction. The For this reason, all the inkjet heads of the specific color cannot be discharged at the same time to obtain a linear pixel pattern. Therefore, in the fifth aspect of the invention, the number of specific times is determined by changing the discharge timing of the inkjet head of the specific color by dividing the difference in position of the inkjet head in the second direction by the main scanning speed. A color filter is manufactured by ejecting ink linearly across the entire color inkjet head. By doing in this way, the organic electroluminescent element which has a striped pixel was able to be manufactured with high precision.

A sixth invention relates to an ink jet coating apparatus, comprising nozzles arranged at substantially uniform intervals in a first direction, and an ink jet head for discharging a plurality of colors from the nozzle and a substrate. Ink is ejected from the inkjet head onto the substrate while being relatively main-scanned in a second direction substantially orthogonal to the first direction so that adjacent pixels in the second direction have different colors. It is premised on an ink jet coating apparatus that prints by coloring. That is, the present invention relates to an inkjet coating apparatus that produces printed matter by the second method in the background art described above.
In a sixth aspect of the invention, in the inkjet coating apparatus, among the inkjet heads that eject the plurality of colors of ink, n inkjet heads that eject the same color ink (n is a natural number of 2 or more) are arranged. .
At this time, the n ink jet heads of the same color are arranged in parallel so that the nozzles of the n ink jet heads of the same color are aligned in the first direction.
Furthermore, when the interval between adjacent nozzles among nozzles belonging to a specific inkjet head is L, the nozzles of the n same-color inkjet heads are sequentially shifted by L / n in the first direction. An inkjet head is arranged.
That is, in the sixth invention, the resolution of the specific color can be increased by n times compared to the conventional inkjet coating apparatus by arranging n inkjet heads in parallel by shifting by L / n. As a result, problems such as streak-like unevenness could be solved. n may be a natural number of 2 or more, more preferably 3 or 4, or a natural number of 5 or more.

  A seventh invention is an ink jet coating apparatus provided with the ink jet head subunits specified by the first invention for three colors of red, green, and blue, respectively. By using this ink jet coating device, the resolution of each of red, green and blue is n times (2 times when n = 2, 3 times when n = 3). A linear pixel pattern could be formed.

Hereinafter, the inkjet coating apparatus of the present invention will be described in detail with reference to the drawings.
FIG. 1 is an overall view of an inkjet coating apparatus and peripheral equipment according to an embodiment of the present invention. The inkjet coating apparatus includes a coating conveyance stage 2, an inkjet head unit 14, an inkjet head unit moving shaft 4, a main controller 10, and a discharge controller 9.
A substrate to be coated is mounted on the coating conveyance stage 2. Examples of the substrate include the above-described printed matter or optical element. Hereinafter, a case where a color filter is formed will be described as an example. The transport stage 2 moves along a predetermined transport direction 11 (which is the main scanning direction; hereinafter also referred to as the Y direction).
The inkjet head unit 14 moves on the inkjet head unit moving shaft 4. The inkjet head unit moving shaft 4 is orthogonal to the scanning direction 11 of the inkjet head unit. The direction parallel to this axis is taken as the X direction.
The conveyance stage 2 includes a vacuum suction hole for fixing the coated substrate 1 and can fix the substrate without protruding from the surface of the substrate. As a result, the gap between the substrate 1 and the inkjet head 13 can be brought to a minimum.
The ejection control unit 9 includes a storage unit (not shown) that stores a measurement value of linearity of the locus of movement of the inkjet head unit.
Thereby, the linearity at an arbitrary position on the X axis of the inkjet head unit can be grasped, and even if the inkjet head unit 14 is not a straight line with respect to the X axis at a desired position, a straight line at that position is obtained. The coating accuracy can be corrected by changing the discharge timing of the nozzle according to the property (deviation).

FIG. 2 shows details of the inkjet head unit 14 and its peripheral mechanism diagram.
The inkjet head unit 14 includes a plurality of inkjet heads. The inkjet head includes a plurality of nozzles that eject ink. The ink jet head must be oriented in a preferred direction so that the nozzle spacing is a predetermined spacing. The deviation of the orientation of the inkjet head from a predetermined orientation is referred to as the rotational deviation of the inkjet head. For this reason, the inkjet coating apparatus includes a θ adjustment mechanism 15 for correcting a shift in the rotation direction (hereinafter also referred to as the θ direction). The θ adjustment mechanism 15 can adjust the general direction of the plurality of inkjet heads when the inkjet head unit is mounted with a plurality of inkjet heads.
However, when using a plurality of inkjet heads, the orientation of each inkjet head must be further adjusted. 1 and 2 show two detection means (inverted microscope 7) for detecting the rotational deviation of the inkjet head.

FIG. 3 is a plan view showing an example of the arrangement of the inkjet heads in the inkjet head unit of the present invention. The ink jet head unit 19 is configured by arranging a large number of ink jet head subunits composed of two sets of an ink jet head and an ink jet head. Among the inkjet heads constituting the inkjet head unit, the inkjet head arranged in the left 1/3 region of FIG. 3 ejects Red (red) ink, and the inkjet head arranged in the central 1/3 region is Green (green). ) The ink jet head which ejects ink and is disposed in the right third region ejects blue (blue) ink. The ink jet head has a large number of nozzles that eject ink, and the nozzles are substantially arranged in the X direction (first direction). The main scanning direction of the inkjet head unit is the Y direction (second direction) orthogonal to the X direction.
FIG. 3 shows an inkjet head subunit 131 composed of two sets of an inkjet head 13a that ejects Blue ink and an inkjet head 13b that ejects Blue ink. Both the inkjet head 13a and the inkjet head 13b are arranged in parallel in a direction (referred to as the first direction, also referred to as the X direction) that is substantially orthogonal to the scanning direction (also referred to as the Y direction). In the inkjet head 13a and the inkjet head 13b, the nozzles are arranged so that the nozzle spacing is the same and uniform. In addition, the inkjet head 13a and the inkjet head 13b are arranged so that the position of the nozzle in the X direction is shifted by a distance that is ½ of the nozzle interval.
Each of the inkjet head subunits 131 includes two inkjet heads that discharge Blue ink. Since the inkjet heads are arranged with a shift of 1/2 the nozzle interval, the blue ink ejection resolution in the X direction is twice that of the inkjet head 13a or the inkjet head b alone.
In the ink jet head unit shown in FIG. 3, 26 such ink jet head subunits are arranged in the blue discharge area (right side area) to form a unit that discharges blue ink at a high resolution as a whole. Inkjet subunits other than the inkjet head subunit 131 are not shown in a box.
Further, similar inkjet subunits are provided in the green ejection region and the red ejection region, and the inkjet head subunit is formed so that ejection of RGB three colors can be performed with high resolution.

FIG. 7 is a plan view showing a relationship between an example of the arrangement of the inkjet heads in the inkjet head unit of the present invention and the substrate. The inkjet head unit 74 is an inkjet head unit similar to that shown in FIG. A linear pixel pattern is formed on the substrate 75 along the first direction.
The inkjet head subunits 131 are arranged in a staggered pattern shifted in the second direction. In this case, the ejection timing of the nozzle to which the inkjet head belongs is changed by the time obtained by dividing the difference in position in the second direction between adjacent inkjet heads of the same color by the main scanning speed of the substrate to be coated. Thus, the ink can be ejected linearly across the entire inkjet head unit. In this manner, ink can be applied linearly and with high density to the base material, and linear pixels (Blue pixels 71, Green pixels 72, Red pixels 73) can be formed with high accuracy. The main scanning speed of the base material can be obtained from the moving speed of the base material transport stage.

  FIG. 4 is a drawing of an alignment (position adjustment) mechanism portion of the inkjet head. In this example, the alignment mechanism is arranged around the ink jet head, and the ink jet head is not arranged at the center position in the subunit (25). The alignment mechanism is provided in each inkjet head, which allows each inkjet head to be parallel (direction perpendicular to the substrate transport direction) and to adjust the mutual relationship in the X direction. Since the discharge timing is changed by the difference, mechanical adjustment is not necessary.

The left side of FIG. 8 shows an example of the inkjet head sub-unit and the nozzle positional relationship of the inkjet head constituting the subunit. The inkjet head subunit 52 includes two sets of the inkjet head head 13c and the inkjet head 13d (or the inkjet head 13e and the inkjet head 13f). As for the inkjet head 13c, all the inkjet heads 13d have nozzles arranged at substantially uniform intervals in the first direction. The ink jet head 13c and the ink jet 13d are arranged so as to be parallel to each other in the first direction while being shifted by a distance of ½ of the nozzle interval. The inkjet head 13e and the inkjet head 13f are similarly arranged to constitute an inkjet head subunit. The ejection ink pattern 51 formed from these two inkjet head subunits can improve the resolution twice as compared with the case where the ejection ink pattern is formed by the inkjet head alone.
The right side of FIG. 8 shows an example of an inkjet subunit arrangement composed of two inkjet heads 13g. Also in this case, the corresponding inkjet heads in the second direction are arranged so as to be shifted by 1/2 of the nozzle interval.

  FIG. 5 shows examples of the positional relationship between the inkjet head subunits in the second direction and the positional relationship between the inkjet heads constituting the specific inkjet head subunit in the second direction. 4 shows.

FIG. 6 is a table summarizing the adjacent head distances of FIG.
According to this, the order of adjacent head distances changes depending on the magnitude relationship between 2c and db, but it can be seen that pattern 1 has the shortest adjacent head distance in either case.
The pattern 1 was excellent in order to make the ejection timing of the adjacent head as close as possible and suppress unevenness due to drying.

1 is an overall view of an inkjet coating apparatus according to an embodiment of the present invention. It is an inkjet head unit of this invention and its periphery mechanism figure. It is a top view which shows the arrangement | sequence of the inkjet head in the inkjet head unit of this invention. It is drawing of the alignment mechanism part of the inkjet head of this invention. It is a schematic diagram which shows the arrangement | sequence of an inkjet head subunit, and adjacent head distance. It is the schematic diagram which represented the adjacent head distance by the table | surface. It is a schematic diagram which shows the relationship between the inkjet head unit of this invention, and a base material. It is a schematic diagram which shows the relationship between an inkjet head subunit and a nozzle position.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Coating base material 2 ... Conveyance stage 3 ... Maintenance station 4 ... Inkjet head unit movement axis (X axis)
DESCRIPTION OF SYMBOLS 5 ... Linear scale 6 ... Inkjet head unit movement base 7 ... Inverted microscope 8 ... Conveyance stage control part 9 ... Discharge control part 10 ... Main controller 11 ... Conveyance stage conveyance direction (Y direction)
12 ... Inkjet head unit moving direction (X direction)
13a ... inkjet head 13b ... inkjet head 13c ... inkjet head 13d ... inkjet head 13e ... inkjet head 13f ... inkjet head 13g ... inkjet head 131 ... inkjet head subunit 14 ... inkjet head unit 15 ... θ adjustment mechanism (θ axis)
16 ... Elevating mechanism (Z axis)
DESCRIPTION OF SYMBOLS 17 ... Z direction 18 ... (theta) direction 19 ... Inkjet head base board 20 ... Alignment mark 21 ... Inkjet head mounting part 22 ... Adjustment stage 23 ... Inkjet head unit base 24 ... Nozzle 25 ... Subunit 51 ... Discharged ink pattern 52 ... Inkjet head Sub unit 71 ... Blue pixel 72 ... Green pixel 73 ... Red pixel 74 ... Inkjet head unit 75 ... Base material

Claims (7)

A nozzle that is arranged at substantially uniform intervals in a substantially first direction, and an inkjet head that ejects ink of a plurality of colors from the nozzle and a substrate are relatively disposed in a second direction that is substantially orthogonal to the first direction. While performing main scanning, ink is ejected from the inkjet head onto the substrate,
A method of manufacturing a color filter by coloring so that adjacent pixels in the second direction have different colors,
When the interval between adjacent nozzles of the inkjet head is L,
Among the inkjet heads that eject ink of the plurality of colors, n inkjet heads that eject ink of the same color (n is a natural number of 2 or more),
N inkjet heads of the same color are arranged in parallel so that the nozzles of the n inkjet heads of the same color are substantially aligned in the first direction,
The n number of inkjet heads of the same color are arranged by sequentially shifting the nozzles in the first direction by L / n,
Discharging ink while relatively scanning the inkjet head and the substrate in a second direction;
And a step of sub-scanning the inkjet head and the substrate relatively in a first direction.   The method for producing a color filter according to claim 1, wherein the inkjet head that ejects ink of a plurality of colors is an inkjet head that ejects red, green, and blue inks. When ejecting ink in the n specific color inkjet heads,
The ejection timing is changed by the time obtained by dividing the difference in position in the second direction of each inkjet head by the main scanning speed of the substrate,
The method for producing a color filter according to claim 1, wherein the ink is ejected linearly across the n specific color inkjet heads. A nozzle that is arranged at substantially uniform intervals in a substantially first direction, and an inkjet head that ejects ink of a plurality of colors from the nozzle and a substrate are relatively disposed in a second direction that is substantially orthogonal to the first direction. Discharging ink from the inkjet head to the substrate while performing main scanning,
A method of manufacturing an organic electroluminescent element by patterning an organic light emitting layer so that pixels adjacent to each other in the second direction have different colors,
When the interval between adjacent nozzles of the inkjet head is L,
Among the inkjet heads that eject ink of the plurality of colors, n inkjet heads that eject ink of the same color (n is a natural number of 2 or more),
N inkjet heads of the same color are arranged in parallel so that the nozzles of the n inkjet heads of the same color are substantially aligned in the first direction,
The n number of inkjet heads of the same color are arranged by sequentially shifting the nozzles in the first direction by L / n,
Discharging ink while relatively scanning the inkjet head and the substrate in a second direction;
And a step of relatively sub-scanning the ink jet head and the substrate in a first direction. When ejecting ink in the n specific color inkjet heads,
The ejection timing is changed by the time obtained by dividing the difference in position in the second direction of each inkjet head by the main scanning speed of the substrate,
5. The method of manufacturing an organic electroluminescence element according to claim 4, wherein the ink is ejected linearly over the entire n specific color inkjet heads. The apparatus includes nozzles arranged at substantially uniform intervals in a first direction, and an inkjet head that discharges a plurality of colors of ink from the nozzles and a transport stage are relatively relative to a second direction that is substantially orthogonal to the first direction. An ink jet coating apparatus comprising means for discharging ink from the ink jet head to the substrate while performing main scanning.
When the interval between adjacent nozzles of the inkjet head is L,
Among the inkjet heads that eject inks of a plurality of colors, the inkjet head subunit includes n inkjet heads that eject ink of the same color (n is a natural number of 2 or more),
The inkjet heads of the same color constituting the inkjet subunit are all arranged in parallel so that the arrangement direction of the nozzles is aligned with the first direction, and
An inkjet coating apparatus comprising: an inkjet head subunit in which each inkjet head constituting the inkjet subunit is arranged by sequentially shifting nozzles by L / n in the first direction.   The inkjet head subunit for a specific color includes an inkjet head subunit that ejects red ink, an inkjet head subunit that ejects green ink, and an inkjet head subunit that ejects blue ink. The inkjet coating apparatus according to claim 6.