JP2007256242A - Infrared gas detector - Google Patents
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本発明は、例えばガスフィルタ相関分析法を利用してガス検知を行う赤外線式ガス検知器に関する。 The present invention relates to an infrared gas detector that performs gas detection using, for example, a gas filter correlation analysis method.
現在、例えばＣＯなどのガス検知を行う方法として、赤外線が検知対象ガスによって吸収されることによる赤外線光量の減衰の程度に応じてガス濃度を検出する非分散型赤外線吸収法が知られており、高い精度でかつ安定的にガス検知を行うことができることから、赤外線光源から放射される赤外光をガス検知用相関セル（ガス相関フィルタ）を介して導入する、ガスフィルタ相関法が利用されている。このようなガスフィルタ相関法を利用したガス検知器としては、これまでに種々の構成のものが提案されている（例えば特許文献１参照）。 Currently, as a method for detecting gas such as CO, for example, a non-dispersive infrared absorption method for detecting a gas concentration according to the degree of attenuation of the amount of infrared light due to absorption of infrared light by a detection target gas is known. Since gas detection can be performed with high accuracy and stability, a gas filter correlation method is used in which infrared light emitted from an infrared light source is introduced through a correlation cell (gas correlation filter) for gas detection. Yes. As gas detectors using such a gas filter correlation method, various types of detectors have been proposed so far (see, for example, Patent Document 1).
図４は、ガスフィルタ相関法を利用した従来における赤外線式ガス検知器の一例における、ガス検知部の構成を概略的に示す説明図である。
この赤外線式ガス検知器におけるガス検知部は、内部空間に被検ガスが導入されるガス導入空間を形成するサンプルセル６０を備え、このサンプルセル６０の外部に、赤外線光源６１および赤外センサ６２が配置されていると共に、赤外線光源６１とサンプルセル６０との間に、例えばモータなどの駆動源６５によって回転駆動されて用いられる、２つのガス室７１，７２が回転中心軸Ｃに対照的に形成されてなる相関セル（ガス相関フィルタ）７０が配設されて、構成されている。このガス検知部のサンプルセル６０内の両端位置には、２つの反射ミラー６６，６７が互いに対向して配置されており、これにより、多重反射構造が採用されている。
相関セル７０の一方のガス室７１には、検知対象ガスと同種のガスが一定濃度で封入されており、他方のガス室７２には、赤外線に対して不活性なガスが封入されている。
このようなガス検知部を備えた赤外線式ガス検知器においては、相関セル７０が回転駆動されることにより２つのガス室７１，７２が赤外線光源６１からサンプルセル６０に至る赤外線光路上を交互に通過し、検知対象ガスと同種のガスが封入された一方のガス室７１を透過した赤外線についてのセンサ出力信号と、不活性ガスが封入された他方のガス室７２を透過した赤外線についてのセンサ出力信号とが得られ、これらのセンサ出力信号の信号比に基づいて、検知対象ガスの濃度が検出される。
FIG. 4 is an explanatory diagram schematically showing a configuration of a gas detection unit in an example of a conventional infrared gas detector using a gas filter correlation method.
The gas detector in the infrared gas detector includes a sample cell 60 that forms a gas introduction space into which a test gas is introduced into an internal space. An infrared light source 61 and an infrared sensor 62 are provided outside the sample cell 60. Are disposed between the infrared light source 61 and the sample cell 60 by a driving source 65 such as a motor, for example, in contrast to the rotation center axis C. A formed correlation cell (gas correlation filter) 70 is provided. Two reflection mirrors 66 and 67 are disposed opposite to each other in the sample cell 60 of the gas detection unit, thereby adopting a multiple reflection structure.
One gas chamber 71 of the correlation cell 70 is filled with a gas of the same type as the detection target gas, and the other gas chamber 72 is filled with a gas inert to infrared rays.
In the infrared type gas detector having such a gas detector, the correlation cell 70 is driven to rotate so that the two gas chambers 71 and 72 alternately alternate on the infrared light path from the infrared light source 61 to the sample cell 60. Sensor output signal for infrared light that has passed through and passed through one gas chamber 71 filled with the same type of gas as the detection target gas, and sensor output for infrared light that passed through the other gas chamber 72 filled with inert gas A signal is obtained, and the concentration of the detection target gas is detected based on the signal ratio of these sensor output signals.
しかしながら、ガス検知用相関セルは概して大型のものであるため、ガス検知用相関セルを回転駆動させる例えばモータなどの駆動源も容量の大きい大型のものを用いることが必要とされ、その結果、ガス検知部全体が大型のものとなるばかりか、消費電流が大きくなると共に発熱量も大きくなり、所要のガス検知を行うためには大きな電力が必要となる、という問題がある。 However, since the correlation cell for gas detection is generally large, it is necessary to use a large-capacity driving source such as a motor for rotating the correlation cell for gas detection. There is a problem that not only the entire detection unit becomes large, but also the current consumption increases and the amount of heat generation increases, and a large amount of electric power is required to perform the required gas detection.
本発明は、以上のような事情に基づいてなされたものであって、所要のガス検知を高い精度でかつ高い安定性で行うことができ、しかも、小型・軽量化および省電力化を図ることのできる赤外線式ガス検知器を提供することを目的とする。 The present invention has been made based on the circumstances as described above, and can perform required gas detection with high accuracy and high stability, and further achieve miniaturization, weight reduction, and power saving. It is an object of the present invention to provide an infrared gas detector capable of performing the above.
本発明の赤外線式ガス検知器は、被検ガスが導入されるガス導入空間を形成するサンプルセルを備え、このサンプルセル内の一端に点滅駆動される赤外線光源が配置されていると共に他端に赤外センサが配置されてなるガス検知部を有する赤外線式ガス検知器であって、
サンプルセル内には、赤外線に対して不活性なガスが封入された測定ガス室および検知対象ガスと同種のガスが封入された比較ガス室を有するガスフィルタが設けられており、 赤外線光源から測定ガス室を介して赤外センサに至る赤外線光路を有する測定光学系および赤外光源から比較ガス室を介して赤外センサに至る赤外線光路を有する測定光学系の２つの測定光学系が、共通のガス導入空間内に形成されていることを特徴とする。
An infrared gas detector according to the present invention includes a sample cell that forms a gas introduction space into which a test gas is introduced, and an infrared light source that is driven to blink is disposed at one end of the sample cell, and at the other end. An infrared type gas detector having a gas detection unit in which an infrared sensor is arranged,
The sample cell is equipped with a gas filter that has a measurement gas chamber filled with a gas inert to infrared rays and a comparison gas chamber filled with the same type of gas as the detection target gas. Two measurement optical systems, that is, a measurement optical system having an infrared optical path leading to an infrared sensor via a gas chamber and a measurement optical system having an infrared optical path leading from the infrared light source to the infrared sensor via a comparative gas chamber, are common. It is formed in the gas introduction space.
本発明の赤外線式ガス検知器においては、サンプルセル内の一端に１つの赤外線光源が配置されていると共に他端に２つの赤外センサが並んで配置されており、
サンプルセル内の他端側の位置には、ガスフィルタが測定ガス室および比較ガス室の各々が赤外センサの各々に対向する状態で設けられており、ガス導入空間を透過した赤外線が測定ガス室を透過して一方の赤外センサに入射される測定光学系と、ガス導入空間を透過した赤外線が比較ガス室を透過して他方の赤外センサに入射される測定光学系とが形成された構成とすることができる。
In the infrared type gas detector of the present invention, one infrared light source is arranged at one end in the sample cell and two infrared sensors are arranged side by side at the other end,
A gas filter is provided at a position on the other end side in the sample cell in a state where each of the measurement gas chamber and the comparison gas chamber faces each of the infrared sensors, and the infrared light transmitted through the gas introduction space is measured gas. A measurement optical system that passes through the chamber and enters the one infrared sensor, and a measurement optical system that transmits the infrared light that passes through the gas introduction space and enters the other infrared sensor are formed. Can be configured.
また、本発明の赤外線式ガス検知器においては、サンプルセル内の一端に各々点滅駆動される２つの赤外線光源が並んで配置されていると共に他端に１つの赤外センサが配置されており、
サンプルセル内の一端側の位置には、ガスフィルタが測定ガス室および比較ガス室の各々が赤外線光源の各々に対向する状態で設けられており、一方の赤外線光源から照射される赤外線が測定ガス室を透過して赤外センサに入射される測定光学系と、他方の赤外線光源から照射される赤外線が比較ガス室を透過して赤外センサに入射される測定光学系とが形成された構成とすることができる。
このような構成のものにおいては、点滅駆動されるべき赤外線光源が一定周期毎に切り替えられる。
Further, in the infrared type gas detector of the present invention, two infrared light sources that are each driven to blink are arranged side by side at one end in the sample cell, and one infrared sensor is arranged at the other end,
A gas filter is provided at a position on one end side in the sample cell in a state in which each of the measurement gas chamber and the comparison gas chamber faces each of the infrared light sources. A configuration in which a measurement optical system that passes through the chamber and enters the infrared sensor, and a measurement optical system in which the infrared light emitted from the other infrared light source passes through the comparison gas chamber and enters the infrared sensor It can be.
In such a configuration, the infrared light source to be blinked is switched at regular intervals.
本発明の赤外線式ガス検知器によれば、赤外線に対して不活性なガスが封入された測定ガス室および検知対象ガスと同種のガスが封入された比較ガス室を有するガスフィルタがサンプルセル内に設けられており、赤外線光源から測定ガス室を介して赤外センサに至る赤外線光路を有する測定光学系（測定側）および赤外線光源から比較ガス室を介して赤外センサに至る赤外線光路を有する測定光学系（参照側）の２つの測定光学系が共通のガス導入空間内に形成されていることにより、基本的には、回転駆動される相関セルを備えた赤外線式ガス検知器と同様の、測定ガス室を透過した赤外線についてのセンサ出力信号および比較ガス室を透過した赤外線についてのセンサ出力信号を取得することができるので、これらのセンサ出力信号に基づいて、所要のガス検知を高い精度でかつ高い安定性で行うことができ、しかも、回転駆動される相関セルを備えたものであれば強度の異なる赤外線についてのセンサ出力信号を得るために必要とされる駆動源等の構成部材が、本発明の赤外線式ガス検知器によれば不要であるので、ガス検知部それ自体の小型・軽量化、並びに省電力化を図ることができる。 According to the infrared type gas detector of the present invention, a gas filter having a measurement gas chamber in which a gas inert to infrared rays is sealed and a comparison gas chamber in which the same kind of gas as the detection target gas is sealed is provided in the sample cell. A measuring optical system (measurement side) having an infrared light path from the infrared light source to the infrared sensor via the measurement gas chamber and an infrared light path from the infrared light source to the infrared sensor via the comparison gas chamber Since the two measurement optical systems of the measurement optical system (reference side) are formed in a common gas introduction space, basically the same as an infrared gas detector having a correlation cell driven to rotate. Since the sensor output signal for the infrared light transmitted through the measurement gas chamber and the sensor output signal for the infrared light transmitted through the comparative gas chamber can be acquired, the sensor output signal can be obtained based on these sensor output signals. The required gas detection can be performed with high accuracy and high stability, and if it is equipped with a rotationally driven correlation cell, it is necessary to obtain sensor output signals for infrared rays with different intensities. According to the infrared gas detector of the present invention, a component such as a drive source to be used is unnecessary, so that the gas detection unit itself can be reduced in size and weight and can save power.
２つの測定光学系が１つの赤外線光源と２つの赤外センサとにより形成される構成のものにおいては、上記効果を得ることができることに加え、赤外線光源が共有されることにより、赤外センサ間の誤差が比較的小さいことから、測定光学系間における誤差を小さくすることができ、信頼性の高いガス検知を確実に行うことができる。 In the configuration in which two measurement optical systems are formed by one infrared light source and two infrared sensors, in addition to obtaining the above effect, the infrared light source is shared, so Therefore, the error between the measurement optical systems can be reduced, and highly reliable gas detection can be reliably performed.
２つの測定光学系が２つの赤外線光源と１つの赤外センサとにより形成される構成のものにおいては、上記効果を得ることができることに加え、各々の赤外線光源が切り替えられて点滅駆動されることにより、個々の赤外線光源に所期の使用寿命が得られるので、所期のガス検知を長期間の間にわたって確実に行うことができる。 In a configuration in which two measurement optical systems are formed by two infrared light sources and one infrared sensor, the above effects can be obtained, and each infrared light source is switched and driven to blink. As a result, the intended service life of each infrared light source can be obtained, so that the desired gas detection can be performed reliably over a long period of time.
＜第１実施形態＞
本発明の第１実施形態に係る赤外線式ガス検知器は、１つの赤外線光源および２つの赤外センサがサンプルセル内に配置されると共に、ガスフィルタが測定ガス室および比較ガス室の各々が赤外センサの各々に対向した状態で配置され、これにより、共通のガス導入空間内において２つの測定光学系が形成されてなるガス検知部を有するものである。
<First Embodiment>
In the infrared type gas detector according to the first embodiment of the present invention, one infrared light source and two infrared sensors are arranged in the sample cell, and the gas filter is red in each of the measurement gas chamber and the comparison gas chamber. It is arranged in a state of facing each of the outer sensors, and thereby has a gas detection part in which two measurement optical systems are formed in a common gas introduction space.
図１は、本発明の第１実施形態に係る赤外線式ガス検知器の一例における、ガス検知部の構成の概略を示す説明用断面図である。
この赤外線式ガス検知器におけるガス検知部は、被検ガスが導入されるガス導入空間Ｓを形成する、例えば断面矩形枠状の箱型のサンプルセル１０を備えてなり、点滅駆動型の赤外線光源２１とこれを囲むよう設けられた反射部材２２とからなる光源装置２０がサンプルセル１０内の一端に配置されていると共に、２つの赤外センサ１５，１６が、例えば赤外線光源２１から一方の赤外センサ１５に至る赤外線光路Ｌ１と、赤外線光源２１から他方の赤外センサ１６に至る赤外線光路とが同一の大きさの光路長となるよう、サンプルセル１０内の他端に並んで配置されている。２つの赤外センサ１５，１６は、以下に示すガスフィルター３０の筺体３１および隔壁１７によって互いに区画された空間内に配置されている。ここに、本発明においては、一方の赤外センサ１５に係る赤外線光路Ｌ１と他方の赤外センサ１６に係る赤外線光路Ｌ２とが同一の大きさの光路長を有する状態とされている必要はない。
図１において、１１は、被検ガスをガス導入空間Ｓに導入するためのガス導入口、１２は、ガス導入空間Ｓに導入された被検ガスを排出するためのガス排出口であり、２４は、赤外線に対して高い透過性を示す材料よりなる窓部材である。
FIG. 1 is an explanatory cross-sectional view illustrating an outline of a configuration of a gas detection unit in an example of an infrared gas detector according to the first embodiment of the present invention.
The gas detector in this infrared gas detector includes a box-shaped sample cell 10 having a rectangular frame shape, for example, which forms a gas introduction space S into which a test gas is introduced. A light source device 20 including a light source 21 and a reflecting member 22 provided so as to surround the light source device 21 is disposed at one end of the sample cell 10, and two infrared sensors 15 and 16 are connected to, for example, the red light source 21 from the red light source 21. The infrared light path L1 leading to the outer sensor 15 and the infrared light path leading from the infrared light source 21 to the other infrared sensor 16 are arranged side by side at the other end in the sample cell 10 so as to have the same optical path length. Yes. The two infrared sensors 15 and 16 are disposed in a space partitioned from each other by a casing 31 and a partition wall 17 of the gas filter 30 described below. Here, in the present invention, it is not necessary that the infrared light path L1 related to one infrared sensor 15 and the infrared light path L2 related to the other infrared sensor 16 have the same optical path length. .
In FIG. 1, 11 is a gas inlet for introducing a test gas into the gas introduction space S, 12 is a gas outlet for discharging the test gas introduced into the gas introduction space S, and 24 Is a window member made of a material exhibiting high transparency to infrared rays.
サンプルセル１０内の他端側の位置には、内部空間が隔壁３２によって区画されて２つのガス室が隔壁３２を中心に対照的に形成されてなるガスフィルタ３０が、各々のガス室が各々の赤外センサ１５，１６に対向する状態で設けられており、ガス導入空間Ｓを透過した、赤外線光源２１から照射される赤外線のうち、いずれか一方のガス室を透過した赤外線はこのガス室に対応する赤外センサのみに入射される構成とされている。
ガスフィルタ３０における一方のガス室には、赤外線に対して不活性なガス例えばＮ2 ガスが封入されており、他方のガス室には、検知対象ガスと同種のガスが一定濃度で封入されている。
In the position on the other end side in the sample cell 10, there is a gas filter 30 in which an internal space is partitioned by a partition wall 32 and two gas chambers are formed in contrast to the partition wall 32. The infrared rays transmitted through one of the gas chambers of the infrared rays irradiated from the infrared light source 21 that are transmitted through the gas introduction space S and are transmitted through the gas chamber are the gas chambers. It is set as the structure which injects only into the infrared sensor corresponding to.
One gas chamber in the gas filter 30 is filled with an inert gas such as N 2 gas, and the other gas chamber is filled with a gas of the same type as the detection target gas at a constant concentration. Yes.
ガスフィルタ３０を構成する筺体３１は、赤外線に対して高い透過性を示す材料により構成されており、サンプルセル１０の内形形状に適合する形態を有する。
隔壁３２の内面には、例えば赤外線に対して高い反射性を有する反射膜（図示せず）が形成されている。
従って、この赤外線式ガス検知器においては、赤外線に対して不活性なガスが封入された測定ガス室３５を透過した赤外線を一方の赤外センサ１５によって検出する測定光学系（測定側）と、検知対象ガスと同種のガスが封入された比較ガス室３６を透過した赤外線を他方の赤外センサ１６によって検出する測定光学系（参照側）との２つの測定光学系が共通のガス導入空間Ｓ内に形成されている。
The casing 31 constituting the gas filter 30 is made of a material exhibiting high transmittance with respect to infrared rays, and has a form adapted to the inner shape of the sample cell 10.
On the inner surface of the partition wall 32, for example, a reflective film (not shown) having high reflectivity with respect to infrared rays is formed.
Therefore, in this infrared type gas detector, a measurement optical system (measurement side) that detects the infrared light transmitted through the measurement gas chamber 35 filled with a gas inert to the infrared light by one infrared sensor 15; A gas introduction space S in which two measurement optical systems, that is, a measurement optical system (reference side) that detects infrared rays transmitted through the comparison gas chamber 36 in which the same kind of gas as the detection target gas is sealed, are detected by the other infrared sensor 16. Is formed inside.
赤外線光源２１は、例えば１Ｈｚの周期で、すなわち０．５秒間の間点灯された後、０．５秒間の間消灯されるよう、点滅駆動される。 The infrared light source 21 is driven to blink so that it is turned on, for example, at a frequency of 1 Hz, that is, for 0.5 seconds and then turned off for 0.5 seconds.
そして、上記ガス検知部を有する赤外線式ガス検知器においては、赤外線光源２１が所定の周期で点滅駆動されることにより、赤外線光源２１から照射される赤外線は、被検ガスが導入されたガス導入空間Ｓ内を透過した後、一部の赤外線がガスフィルタ３０の測定ガス室３５を透過して一方の赤外センサ１５に入射されると共に、実質的に他の全部の赤外線がガスフィルタ３０の比較ガス室３６を透過して他方の赤外センサ１６に入射される。これにより、各々の赤外センサ１５，１６によって赤外線光量に応じたセンサ出力信号が得られ、ガスフィルタ３０の測定ガス室３５を透過した赤外線についての、一方の赤外センサ１５からのセンサ出力信号と、比較ガス室３６を透過した赤外線についての、他方の赤外センサからのセンサ出力信号との信号比に基づいて、検知対象ガスの濃度が算出される。 In the infrared gas detector having the gas detector, the infrared light source 21 is blinked and driven at a predetermined cycle, so that the infrared light emitted from the infrared light source 21 is introduced into the gas into which the test gas is introduced. After passing through the space S, some infrared rays pass through the measurement gas chamber 35 of the gas filter 30 and enter one infrared sensor 15, and substantially all other infrared rays pass through the gas filter 30. The light passes through the reference gas chamber 36 and enters the other infrared sensor 16. Thereby, a sensor output signal corresponding to the amount of infrared light is obtained by each of the infrared sensors 15 and 16, and the sensor output signal from one infrared sensor 15 for the infrared light transmitted through the measurement gas chamber 35 of the gas filter 30. The concentration of the detection target gas is calculated based on the signal ratio of the infrared light transmitted through the comparison gas chamber 36 to the sensor output signal from the other infrared sensor.
而して、上記構成のガス検知部を具えた赤外線式ガス検知器によれば、点滅駆動される１つの赤外線光源２１に対して２つの赤外センサ１５，１６が配置されていると共に、ガスフィルタ３０が測定ガス室３５および比較ガス室３６が各々の赤外センサ１５，１６に対向する状態で設けられ、これにより、共通のガス導入空間Ｓ内において、２つの測定光学系が形成された構成とされていることにより、基本的には、回転駆動される相関セルを備えた赤外線式ガス検知器と同様の、測定ガス室３５を透過した赤外線についてのセンサ出力信号および比較ガス室３６を透過した赤外線についてのセンサ出力信号を取得することができるので、これらのセンサ出力信号に基づいて、所要のガス検知を高い精度でかつ高い安定性で行うことができ、しかも、回転駆動される相関セルを備えたものであれば強度の異なる赤外線についてのセンサ出力信号を得るために必要とされる駆動源等の構成部材が、本発明の赤外線式ガス検知器によれば不要であるので、ガス検知部それ自体の小型・軽量化、並びに省電力化を図ることができる。 Thus, according to the infrared type gas detector having the gas detection unit having the above-described configuration, the two infrared sensors 15 and 16 are arranged for one infrared light source 21 that is driven to blink. The filter 30 is provided with the measurement gas chamber 35 and the comparison gas chamber 36 facing each of the infrared sensors 15 and 16, thereby forming two measurement optical systems in the common gas introduction space S. By being configured, basically, the sensor output signal and the comparison gas chamber 36 for the infrared rays transmitted through the measurement gas chamber 35 are similar to those of the infrared gas detector having the correlation cell that is driven to rotate. Since the sensor output signal for the transmitted infrared light can be acquired, the required gas detection can be performed with high accuracy and high stability based on these sensor output signals. In addition, if a rotationally driven correlation cell is provided, components such as a drive source required for obtaining sensor output signals for infrared rays having different intensities can be obtained from the infrared gas detector of the present invention. Therefore, the gas detection unit itself can be reduced in size and weight, and power can be saved.
しかも、２つの測定光学系において赤外線光源２１が共有されることにより、赤外センサ１５，１６間の誤差は比較的小さいことから、２つの測定光学系間における誤差を小さくすることができ、信頼性の高いガス検知を確実に行うことができる。 In addition, since the infrared light source 21 is shared by the two measurement optical systems, the error between the infrared sensors 15 and 16 is relatively small. Therefore, the error between the two measurement optical systems can be reduced, and the reliability is improved. Highly reliable gas detection.
＜第２実施形態＞
本発明の第２実施形態に係る赤外線式ガス検知器は、各々点滅駆動される２つの赤外線光源および１つの赤外センサがサンプルセル内に配置されていると共に、ガスフィルタが測定ガス室および比較ガス室の各々が赤外線光源の各々に対向した状態で配置されて、これにより、共通のガス導入空間内において、２つの測定光学系が形成されてなるガス検知部を有するものである。
Second Embodiment
The infrared gas detector according to the second embodiment of the present invention includes two infrared light sources and one infrared sensor, which are each driven to blink, in a sample cell, and a gas filter which is a measurement gas chamber and a comparison. Each of the gas chambers is disposed in a state of being opposed to each of the infrared light sources, and thereby has a gas detection unit in which two measurement optical systems are formed in a common gas introduction space.
図２は、本発明の第２実施形態に係る赤外線式ガス検知器の一例における、ガス検知部の構成の概略を示す説明用断面図である。
このガス検知部は、ガス導入空間Ｓを形成するサンプルセル４０内の一端に、各々、点滅駆動される赤外線光源５１，５６とこれを囲むよう設けられた反射部材５２とからなる２つの光源装置５０，５５が並んで配置されていると共に、サンプルセル４０内の他端に、赤外センサ４５が、例えば一方の赤外線光源５１から赤外センサ４５に至る赤外線光路Ｌ１と、他方の赤外線光源５６から赤外センサ４５に至る赤外線光路Ｌ２とが同一の大きさの光路長となるよう、配置されている。ここに、一方の赤外線光源５１に係る赤外線光路Ｌ１と他方の赤外線光源５６に係る赤外線光路Ｌ２とが同一の大きさの光路長を有する状態とされている必要はない。
図２において、４１はガス導入口、４２はガス排出口である。
FIG. 2 is a cross-sectional view for explaining the outline of the configuration of the gas detector in an example of an infrared gas detector according to the second embodiment of the present invention.
The gas detection unit includes two light source devices including infrared light sources 51 and 56 that are driven to blink at one end of the sample cell 40 that forms the gas introduction space S, and a reflection member 52 that is provided so as to surround the light sources. 50 and 55 are arranged side by side, and an infrared sensor 45 is connected to the other end in the sample cell 40, for example, an infrared light path L1 from one infrared light source 51 to the infrared sensor 45, and the other infrared light source 56. The infrared light path L2 from the light source to the infrared sensor 45 is arranged so as to have the same optical path length. Here, it is not necessary that the infrared light path L1 related to one infrared light source 51 and the infrared light path L2 related to the other infrared light source 56 have the same optical path length.
In FIG. 2, 41 is a gas inlet, and 42 is a gas outlet.
サンプルセル４０内の一端側の位置には、上記ガスフィルタ３０が、その筺体３１の一面が各々の光源装置５０，５５における反射部材５２の開口端面に対接された状態で、設けられており、いずれか一方の赤外線光源から照射される赤外線が対応する一方のガス室のみに入射されるよう、測定ガス室３５および比較ガス室３６が各々の赤外線光源５１，５６に対向した状態とされている。
従って、この赤外線式ガス検知器におけるガス検知部においては、測定ガス室３５を透過する一方の赤外線光源５１から照射される赤外線を赤外センサ４５によって検出する測定光学系（測定側）と、比較ガス室３６を透過する他方の赤外線光源５６から照射される赤外線を赤外センサ４５によって検出する測定光学系（参照側）の２つの測定光学系が共通のガス導入空間Ｓ内に形成されている。
The gas filter 30 is provided at a position on one end side in the sample cell 40 in a state where one surface of the casing 31 is in contact with the opening end surface of the reflection member 52 in each of the light source devices 50 and 55. The measurement gas chamber 35 and the comparison gas chamber 36 are opposed to the respective infrared light sources 51 and 56 so that the infrared rays emitted from either one of the infrared light sources are incident only on the corresponding one of the gas chambers. Yes.
Therefore, in the gas detection part in this infrared type gas detector, it is compared with a measurement optical system (measurement side) that detects infrared rays emitted from one infrared light source 51 that passes through the measurement gas chamber 35 by the infrared sensor 45. Two measurement optical systems, that is, a measurement optical system (reference side) for detecting infrared rays radiated from the other infrared light source 56 that passes through the gas chamber 36 by the infrared sensor 45 are formed in a common gas introduction space S. .
上記赤外線式ガス検知器においては、一方の赤外線光源５１および他方の赤外線光源５６が、一方が点滅駆動された状態にあるときに他方が消灯状態となるよう、一定周期毎に切り替えられて点滅駆動される。
２つの赤外線光源５１，５６の動作制御方法について具体的に説明すると、例えば図３に示すように、２つの赤外線光源５１，５６のうちのいずれか一方の赤外線光源例えば一方の赤外線光源５１が所定の周期Ｔで点滅駆動されると、一方の赤外線光源５１が所定時間の間継続して使用されると共に、他方の赤外線光源５６は消灯状態が維持される。
その後、使用される赤外線光源が他方の赤外線光源５６に切り替えられ、他方の赤外線光源５６が所定の周期Ｔで点滅駆動されて、所定時間の間継続して使用されると共に、一方の赤外線光源５１が消灯状態とされる。
In the above-described infrared gas detector, one infrared light source 51 and the other infrared light source 56 are switched at regular intervals so as to be turned off when one of them is in a state of being driven to blink. Is done.
The operation control method for the two infrared light sources 51 and 56 will be specifically described. For example, as shown in FIG. 3, one of the two infrared light sources 51 and 56, for example, one of the infrared light sources 51 is predetermined. When one of the infrared light sources 51 is continuously used for a predetermined time, the other infrared light source 56 is kept off.
Thereafter, the infrared light source to be used is switched to the other infrared light source 56, and the other infrared light source 56 is driven to blink at a predetermined period T and is continuously used for a predetermined time. Is turned off.
ここに、各々の赤外線光源５１，５６は、例えば１Ｈｚの周期で、すなわち０．５秒間の間点灯された後、０．５秒間の間消灯されるよう、点滅駆動される。
点滅駆動されるべき赤外線光源の切り替えは、例えば点灯回数に基づいて行うことができ、例えば３回連続して点灯される毎に切り替えられる。
Here, each of the infrared light sources 51 and 56 is driven to blink so as to be turned on for a period of 1 Hz, for example, for 0.5 seconds, and then turned off for 0.5 seconds.
The infrared light source to be driven to blink can be switched based on, for example, the number of times of lighting, and is switched every time the light is lit continuously three times, for example.
そして、上記ガス検知部を有する赤外線式ガス検知器においては、例えば一方の赤外線光源５１が所定回数連続して点灯されるよう点滅駆動されることにより、一方の赤外線光源５１から照射される赤外線は、ガスフィルタ３０の測定ガス室３５を透過し、被検ガスが導入されたガス導入空間Ｓ内を透過して赤外センサ４５に入射される。これにより、赤外線光量に応じたセンサ出力信号が得られる。
次いで、点滅駆動されるべき赤外線光源が切り替えられて、他方の赤外線光源５６が一方の赤外線光源５１と同様に所定回数連続して点灯されるよう点滅駆動されることにより、他方の赤外線光源５６から照射される赤外線は、ガスフィルタ３０の比較ガス室３６を透過し、被検ガスが導入されたガス導入空間Ｓを透過して赤外センサ４５に入射される。これにより、赤外線光量に応じたセンサ出力信号が得られる。
このようして得られた、ガスフィルタ３０の測定ガス室３５を透過した赤外線についてのセンサ出力信号と、比較ガス室３６を透過した赤外線についてのセンサ出力信号との信号比に基づいて、検知対象ガスの濃度が算出される。
In the infrared gas detector having the gas detector, for example, one infrared light source 51 is driven to blink so that the infrared light source 51 is continuously turned on a predetermined number of times. Then, it passes through the measurement gas chamber 35 of the gas filter 30, passes through the gas introduction space S into which the test gas is introduced, and enters the infrared sensor 45. Thereby, a sensor output signal corresponding to the amount of infrared light is obtained.
Next, the infrared light source to be blinked is switched, and the other infrared light source 56 is driven to blink so that the other infrared light source 56 is continuously turned on a predetermined number of times similarly to the one infrared light source 51, thereby The irradiated infrared rays pass through the comparison gas chamber 36 of the gas filter 30, pass through the gas introduction space S into which the test gas is introduced, and enter the infrared sensor 45. Thereby, a sensor output signal corresponding to the amount of infrared light is obtained.
Based on the signal ratio between the sensor output signal for the infrared light transmitted through the measurement gas chamber 35 of the gas filter 30 and the sensor output signal for the infrared light transmitted through the comparison gas chamber 36, the detection target is obtained. The gas concentration is calculated.
而して、上記構成のガス検知部を具えた赤外線式ガス検知器によれば、各々点滅駆動される２つの赤外線光源５１，５６に対して１つの赤外センサ４５が設けられると共に、ガスフィルタ３０が測定ガス室３５および比較ガス室３６が各々の赤外線光源５１，５６に対向する状態で設けられ、これにより、共通のガス導入空間Ｓ内において、２つの測定光学系が形成された構成とされていることにより、基本的には、上記第１実施形態に係るものと同様の効果を得ることができる。すなわち、所要のガス検知を高い精度でかつ高い安定性で行うことができると共に、ガス検知部それ自体の小型・軽量化並びに省電力化を図ることができる。
しかも、２つの赤外線光源５１，５６を備え、点滅駆動されるべき赤外線光源が切り替えられて用いられることにより、個々の赤外線光源５１，５６に所期の使用寿命が得られるので、所期のガス検知を長期間の間にわたって確実に行うことができる。
Thus, according to the infrared type gas detector having the gas detection unit having the above-described configuration, one infrared sensor 45 is provided for each of the two infrared light sources 51 and 56 that are driven to blink, and the gas filter. 30 is provided in a state in which the measurement gas chamber 35 and the comparison gas chamber 36 are opposed to the respective infrared light sources 51 and 56, whereby two measurement optical systems are formed in the common gas introduction space S. As a result, basically the same effects as those according to the first embodiment can be obtained. That is, the required gas detection can be performed with high accuracy and high stability, and the gas detection unit itself can be reduced in size, weight, and power can be saved.
In addition, since the two infrared light sources 51 and 56 are provided and the infrared light sources to be driven to blink are switched and used, the intended service life can be obtained for each of the infrared light sources 51 and 56. Detection can be performed reliably over a long period of time.
以上、本発明の実施形態について説明したが、本発明は上記の実施形態に限定されるものではなく、ガスフィルタの具体的な構成、赤外線光源の動作条件、赤外線光源から赤外センサ素子に至る赤外線光路の光路長の大きさなどの構成は、検知対象ガスの種類に応じて適宜に変更することができる。
また、検知対象ガスは一種のガス成分に限定されるものではなく、例えば測定ガス室に目的とするガス成分の混合ガスを封入することにより、複数種のガス成分を検出することもできる。
As mentioned above, although embodiment of this invention was described, this invention is not limited to said embodiment, The specific structure of a gas filter, the operating condition of an infrared light source, From an infrared light source to an infrared sensor element The configuration such as the size of the optical path length of the infrared optical path can be appropriately changed according to the type of the detection target gas.
Further, the detection target gas is not limited to one kind of gas component. For example, a plurality of kinds of gas components can be detected by sealing a mixed gas of a target gas component in a measurement gas chamber.
本発明の赤外線式ガス検知器は、上述したように、小型・軽量化並びに省電力化が図られたものであるので、ガス検知が必要あるいは要請されるポータブル機器に搭載する場合に、極めて有用なものとなることが期待される。 As described above, the infrared type gas detector of the present invention has been reduced in size, weight, and power consumption, and thus is extremely useful when mounted on a portable device that requires or requires gas detection. It is expected to be
１０ サンプルセル
１１ ガス導入口
１２ ガス排出口
１５ 一方の赤外センサ
１６ 他方の赤外センサ
１７ 隔壁
２０ 光源装置
２１ 赤外線光源
２２ 反射部材
２４ 窓部材
３０ ガスフィルタ
３１ 筺体
３２ 隔壁
３５ 測定ガス室
３６ 比較ガス室
Ｓ ガス導入空間
Ｌ１，Ｌ２ 赤外線光路
４０ サンプルセル
４１ ガス導入口
４２ ガス排出口
４５ 赤外センサ
５０ 一方の光源装置
５１ 一方の赤外線光源
５２ 反射部材
５５ 他方の光源装置
５６ 他方の赤外線光源
６０ サンプルセル
６１ 赤外線光源
６２ 赤外センサ
６５ 駆動源
６６，６７ 反射ミラー
７０ 相関セル（ガス相関フィルタ）
７１ 一方のガス室
７２ 他方のガス室
Ｃ 回転中心軸
DESCRIPTION OF SYMBOLS 10 Sample cell 11 Gas inlet 12 Gas outlet 15 One infrared sensor 16 The other infrared sensor 17 Partition 20 Light source device 21 Infrared light source 22 Reflective member 24 Window member 30 Gas filter 31 Housing 32 Partition 35 Measurement gas chamber 36 Comparison Gas chamber S Gas introduction space L1, L2 Infrared light path 40 Sample cell 41 Gas introduction port 42 Gas exhaust port 45 Infrared sensor 50 One light source device 51 One infrared light source 52 Reflective member 55 The other light source device 56 The other infrared light source 60 Sample cell 61 Infrared light source 62 Infrared sensor 65 Drive source 66, 67 Reflection mirror 70 Correlation cell (gas correlation filter)
71 One gas chamber 72 The other gas chamber C Rotation center axis
Claims (4)
サンプルセル内には、赤外線に対して不活性なガスが封入された測定ガス室および検知対象ガスと同種のガスが封入された比較ガス室を有するガスフィルタが設けられており、 赤外線光源から測定ガス室を介して赤外センサに至る赤外線光路を有する測定光学系および赤外光源から比較ガス室を介して赤外センサに至る赤外線光路を有する測定光学系の２つの測定光学系が、共通のガス導入空間内に形成されていることを特徴とする赤外線式ガス検知器。 Gas detection comprising a sample cell that forms a gas introduction space into which a test gas is introduced, an infrared light source that is driven to blink at one end of the sample cell, and an infrared sensor at the other end An infrared gas detector having a portion,
The sample cell is equipped with a gas filter that has a measurement gas chamber filled with a gas inert to infrared rays and a comparison gas chamber filled with the same type of gas as the detection target gas. Two measurement optical systems, that is, a measurement optical system having an infrared optical path leading to an infrared sensor via a gas chamber and a measurement optical system having an infrared optical path leading from the infrared light source to the infrared sensor via a comparative gas chamber, are common. An infrared gas detector formed in a gas introduction space.
サンプルセル内の他端側の位置には、ガスフィルタが測定ガス室および比較ガス室の各々が赤外センサの各々に対向する状態で設けられており、ガス導入空間を透過した赤外線が測定ガス室を透過して一方の赤外センサに入射される測定光学系と、ガス導入空間を透過した赤外線が比較ガス室を透過して他方の赤外センサに入射される測定光学系とが形成されていることを特徴とする請求項１に記載の赤外線式ガス検知器。 One infrared light source is arranged at one end in the sample cell and two infrared sensors are arranged side by side at the other end,
A gas filter is provided at a position on the other end side in the sample cell in a state where each of the measurement gas chamber and the comparison gas chamber faces each of the infrared sensors, and the infrared light transmitted through the gas introduction space is measured gas. A measurement optical system that passes through the chamber and enters the one infrared sensor, and a measurement optical system that transmits the infrared light that passes through the gas introduction space and enters the other infrared sensor are formed. The infrared gas detector according to claim 1, wherein:
サンプルセル内の一端側の位置には、ガスフィルタが測定ガス室および比較ガス室の各々が赤外線光源の各々に対向する状態で設けられており、一方の赤外線光源から照射される赤外線が測定ガス室を透過して赤外センサに入射される測定光学系と、他方の赤外線光源から照射される赤外線が比較ガス室を透過して赤外センサに入射される測定光学系とが形成されていることを特徴とする請求項１に記載の赤外線式ガス検知器。 Two infrared light sources that are driven to blink each at one end in the sample cell are arranged side by side and one infrared sensor is arranged at the other end,
A gas filter is provided at a position on one end side in the sample cell in a state in which each of the measurement gas chamber and the comparison gas chamber faces each of the infrared light sources. A measurement optical system that passes through the chamber and enters the infrared sensor, and a measurement optical system that transmits the infrared light emitted from the other infrared light source through the comparison gas chamber and enters the infrared sensor are formed. The infrared gas detector according to claim 1.
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| JP2010204024A (en) * | 2009-03-05 | 2010-09-16 | Jfe Steel Corp | Apparatus and method for monitoring leakage of co-containing gas |
| WO2011102315A1 (en) | 2010-02-16 | 2011-08-25 | 浜松ホトニクス株式会社 | Gas concentration calculation device, gas concentration measurement module, and light detector |
| WO2011102316A1 (en) | 2010-02-16 | 2011-08-25 | 浜松ホトニクス株式会社 | Gas concentration calculation device and gas concentration measurement module |
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