JP2007180334A - Horn, horn unit, and bonding apparatus using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a horn capable of restraining vibration components, in directions other than the horizontal direction in a crimping surface, and to provide a horn unit and a bonding apparatus that uses the horn unit. <P>SOLUTION: The horn unit 40 comprises the horn 50 vibrated by a vibrator 42; and a nozzle 56 that has a crimping surface 56b and is mounted to the horn 50 so that the crimping surface 56b is arranged at a position Q, offset from a position P3 corresponding to the antinode of standing waves of vibration excited by the horn 50, thus restraining the vibration components in Y and Z directions on the crimping surface 56b, as compared with the case of using the horn unit, where the crimping surface 56b of the nozzle 56 is arranged at the position P3 corresponding to the antinode. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a horn, a horn unit, and a bonding apparatus using the horn.

Conventionally, a horn in the field of this technology is disclosed in, for example, Patent Document 1 below. The horn described in this publication is for applying vibration to the electronic component while holding the bumped electronic component such as a flip chip and ultrasonically contacting the electronic component on the substrate. This horn is provided with a surface (crimp surface) for crimping the electronic component to the substrate at a position corresponding to the antinode of the standing wave of vibration excited by the horn.
Japanese Patent No. 3374856

  When the horn is used for ultrasonic pressure welding of an electronic component, it is preferable to vibrate the electronic component held by the horn in one horizontal direction. However, the above-described conventional horn cannot excite vibrations that sufficiently suppress vibration components other than one horizontal direction on the crimping surface.

  Accordingly, the present invention has been made to solve the above-described problems, and provides a horn, a horn unit, and a bonding apparatus using the horn that can suppress vibration components other than one horizontal direction on the crimping surface. Objective.

  A horn according to the present invention is a horn to which vibration is imparted by a vibrator, wherein a crimping surface is disposed at a position offset from a position corresponding to an antinode of a standing wave of vibration excited by the horn. And

  When the inventors used a horn having a crimping surface disposed at a position offset from the position corresponding to the antinode of the standing wave of vibration excited by the horn, the crimping surface is disposed at a position corresponding to the antinode. It was newly found that vibration components other than one horizontal direction on the crimping surface can be significantly suppressed as compared with the case where the horn is used.

  The offset position is preferably a position where the vibration component in the first direction intersecting the vibration direction of the horn by the vibrator is minimized. By using this horn, the vibration component in the first direction can be suppressed.

  The horn unit according to the present invention has a horn to which vibration is applied by a vibrator and a crimping surface, and the crimping surface is arranged at a position offset from a position corresponding to an antinode of a standing wave of vibration excited by the horn. The pressure-bonding nozzle attached to the horn is provided.

  Inventors used the horn unit which attached the crimping nozzle to the horn so that the crimping surface of the crimping nozzle was arranged at a position offset from the position corresponding to the antinode of the standing wave of vibration excited by the horn. In this case, it is possible to significantly suppress vibration components other than one horizontal direction on the crimping surface compared to the case of using the horn unit in which the crimping surface of the crimping nozzle is arranged at the position corresponding to the belly. I found it.

  The offset position is preferably a position where the vibration in the first direction intersecting the vibration direction of the horn by the vibrator is minimized. By using this horn unit, the vibration component in the first direction can be suppressed.

  The bonding apparatus according to the present invention includes a vibrator that applies vibration to the horn and a horn that is provided with vibration by the vibrator, and is offset from a position corresponding to an antinode of a standing wave of vibration excited by the horn. A horn having a pressure-bonding surface disposed at a position, and a pressurizing unit that performs pressure control in the pressure-bonding direction of the horn are provided. Since this bonding apparatus includes the horn, vibration components other than one horizontal direction can be suppressed.

  The bonding apparatus according to the present invention has a vibrator for applying vibration to the horn, a horn to which vibration is applied by the vibrator, and a crimping surface, and corresponds to an antinode of a standing wave of vibration excited by the horn. A horn unit including a crimping nozzle attached to the horn so that the crimping surface is disposed at a position offset from the position, and a pressurizing unit that performs pressurization control in the crimping direction of the crimping nozzle of the horn unit. It is characterized by. Since this bonding apparatus includes the horn unit, vibration components other than one horizontal direction can be suppressed.

ADVANTAGE OF THE INVENTION According to this invention, the horn which can suppress vibration components other than the horizontal one direction in a crimping | compression-bonding surface, a horn unit, and a bonding apparatus using the same are provided.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, embodiments that are considered to be the best in carrying out the invention will be described in detail with reference to the accompanying drawings. In addition, the same code | symbol is attached | subjected about the same or equivalent element, and the description is abbreviate | omitted when description overlaps.
(Bonding equipment)

  FIG. 1 shows a bonding apparatus 1 according to an embodiment of the present invention. The bonding apparatus 1 is an apparatus for mounting electronic components on a mounting substrate by ultrasonic pressure welding, and a Y table 4 mounted on a gantry frame 2 and a Z axis driven in the horizontal direction by the Y table 4. The servomotor 6 (vertical drive unit 20A) and the bonding unit 8 that is vertically moved by the Z-axis servomotor 6 are provided.

  The bonding unit 8 includes a vertical movement block 10, a bonding head 12 held by the vertical movement block 10 so as to freely move up and down, and a load by which the bonding head 12 presses the electronic component 22 onto the pressure-bonded surface 24 a of the mounting substrate 24. A voice coil motor 14 (VCM driving unit 20B) for controlling the movement, a locking solenoid 16 (solenoid driving unit 20C) for regulating the vertical movement of the bonding head 12 with respect to the vertical movement block 10, and the position of the bonding head 12 in the Z-axis direction. And a linear scale 18 (position detector 20D). The bonding head 12 holds the electronic component 22 and vibrates the electronic component 22 in a state in which the electronic component 22 is pressed against the surface to be bonded 24a of the mounting substrate 24, and a vibrator 42 (ultrasonic vibration driving unit 20E) to be described later. ) Is included.

  The vertical drive unit 20A, the VCM drive unit 20B, the solenoid drive unit 20C, the position detection unit 20D, and the ultrasonic vibration drive unit 20E are controlled by the control unit 20. The control unit 20 includes a CPU, a ROM, a RAM, an A / D converter, various I / Fs, and the like. An input signal from the position detection unit 20D and the like, for example, other input signals and storage Based on various information such as values, perform various arithmetic processes based on a predetermined program, send drive signals to the vertical drive unit 20A, VCM drive unit 20B, solenoid drive unit 20C, etc., and control their drive, A drive signal is sent to the ultrasonic vibration drive unit 20E to control the drive of the vibrator 42.

  Although not shown in the drawing, the bonding apparatus 1 is provided with a camera for detecting the position of each component.

When performing ultrasonic pressure welding using this bonding apparatus 1, it is performed by the procedure shown below.
(1) First, the Z-axis servo motor 6 and the bonding unit 8 are driven by the Y table 4 in a state where the locking solenoid 16 integrally attached to the vertical movement block 10 is driven to restrict the vertical movement of the bonding head 12. Are integrally moved to align the electronic component 22 with the substrate 24 on the substrate stage 26 in the horizontal direction.
(2) Next, the Z-axis servomotor 6 is driven to lower the bonding unit 8 and lower the electronic component 22 held by the bonding head 12 to the contact detection start position. Then, the current supplied to the voice coil motor 14 is set so that the load when the electronic component 22 contacts the substrate 24 becomes a set value, and the locking solenoid 16 is opened.
More specifically, the current supplied to the voice coil motor 14 so that the load acting on the electronic component 22 held by the bonding head 12 becomes a set value (for example, about 10 to 100 g) when in contact with the substrate 24. A value (that is, a torque generated by the voice coil motor 14) is set. That means
“Set value” = “Bonding head weight” + “Voice coil motor torque”
When the bonding head 12 is equal to or larger than the set value, the voice coil motor 14 generates a torque upward (torque in the pulling direction) in FIG. That is, for example, it is set as follows.
“Set value (ie, allowable load at the time of contact between electronic component and substrate)” = 50 g
“Bonding head weight” = 1000 g
Then,
“Voice coil motor torque” = − 950 g (pull-up direction torque acting upward in FIG. 1)
Will be set to. That is, the voice coil motor (pressurizing means) 14 performs pressurization control in the pressing direction (Z direction) of the horn 50 described later.
(3) The Z-axis servo motor 6 is further driven to lower the vertical movement block 10 until the electronic component 22 held by the bonding head 12 contacts the substrate 24. When the electronic component 22 comes into contact with the pressure-bonded surface 24a of the substrate 24, the bonding head 12 interlocked with the downward movement of the vertical movement block 10 stops at that position, and only the vertical movement block 10 continues to lower. As a result, the bonding head 12 floats away from the vertically moving block 10 that has been interlocked so far, and the linear scale 18 detects the change (that is, the start of contact between the electronic component and the substrate).
In this way, by detecting the start of contact between the electronic component 22 held by the bonding head 12 using the linear scale 18 and the substrate 24 on the substrate stage 26, the detection value of the motor drive current or the detection value of the load cell is detected. As compared with the case where the start of contact between the electronic component 22 and the substrate 24 is detected based on the above, the start of contact can be detected with high accuracy while maintaining high detection stability.
(4) When the vertical movement block 10 is lowered after the electronic component 22 and the substrate 24 come into contact with each other, only the vertical movement block 10 continues the downward movement. However, the downward movement of the vertical movement block 10 is limited to a predetermined pushing amount (for example, , About 300 μm).
(5) The electronic component 22 is vibrated by driving the vibrator 42 to ultrasonically press the electronic component 22 to the substrate 24. While the ultrasonic pressure welding is performed, the output value of the linear scale 18 is monitored and the driving force of the voice coil motor 14 is adjusted so that the contact pressure between the electronic component 22 and the substrate 24 is set to a predetermined value. It can be controlled to the target value.
(6) After the ultrasonic pressure welding is completed, the Z-axis servo motor 6 is driven to raise the bonding head 12 to the contact detection start position.
(7) The locking solenoid is driven to restrict the movement of the bonding head 12.
(8) Further, the Z-axis servo motor 6 is driven to raise the vertical movement block 10 to a predetermined standby position, and the mounting process is completed.
(Bonding head)

  Next, the above-described bonding head 12 will be described in more detail.

The bonding head 12 has a horn unit 40 and a vibrator 42 attached to the horn unit 40 at a lower portion thereof. The electronic component 22 is held by the horn unit 40, and vibration is applied to the electronic component 22 through the horn unit 40 by the vibrator 42. As shown in FIGS. 2 and 3, the horn unit 40 is formed by integrally forming a long SUS horn 50 and a SUS horn holder 60 that holds the horn 50.
(Horn)

The standing wave excited by the horn 50 has a wavelength (λ) that matches the full length (L) of the horn 50 in the longitudinal direction (for example, 80 mm). The positions of the front end surface 50a and the rear end surface 50b of the horn 50 correspond to the antinode positions of the standing wave. Therefore, if the position of the tip surface 50a is P1, and the positions spaced apart from P1 by λ / 4 along the longitudinal direction are P2, P3, P4 and P5 in order, P1, P3 and P5 correspond to antinodes of standing waves. P2 and P4 are positions corresponding to nodes of standing waves. That is, theoretically, the amplitude of the standing wave is maximum at the positions P1, P3, and P5, and the amplitude of the standing wave is zero at the positions P2 and P4. The total length (L) of the horn 50 described above is
L = λ
As appropriate,
L = λ + mλ / 2 (m: natural number)
You may change to L given by the general formula.

  In the present specification, for convenience of explanation, the longitudinal direction of the horn 50 is defined as the X direction, the pressure contact direction of the horn 50 is defined as the Z direction, and the direction orthogonal to the X direction and the Z direction is defined as the Y direction.

  As shown in FIGS. 4 and 5, the horn 50 is a portion between P1 and P2 and has no cross-sectional change 52A, and a portion between P2 and P4 that has a cross-sectional change. It consists of a portion 54 and a cross-section unchanged portion 52B that is a portion between P4-P5 and has no change in cross-sectional shape. The horn 50 has a substantially symmetrical shape with respect to the position of P3.

  The cross-section invariant portions 52A and 52B both have a length of λ / 4, and the cross-section does not change at any position in the longitudinal direction (X direction) of the horn 50. Specifically, the cross-sectional shapes of the cross-section invariant portions 52A and 52B are squares having the same length (width) in the Y direction and the same length (height) in the Z direction.

  The cross section changing portion 54 has a length of λ / 2, and its cross section changes as shown in FIG. 6 depending on the position in the X direction. 6A is a cross-sectional view taken along the line AA of FIGS. 4 and 5, FIG. 6B is a cross-sectional view taken along the line BB of FIGS. 4 and 5, and FIG. It is CC sectional view taken on the line of FIG. 6A is a cross-sectional view at P2, FIG. 6C is a cross-sectional view at P3, and FIG. 6B is a cross-sectional view at a position between P2 and P3. .

Here, in describing the cross-sectional shape of the cross-section changing portion 54, the outer cross-sectional shape of the cross-section changing portion 54 is divided into a first region A1 and a second region A2. The first area A1 is a rectangular area extending in the Z direction. The second region A2 is a pair of rectangular regions that sandwich the first region A1 from a direction (Y direction) orthogonal to the X direction. The heights of the first region A1 and the second region A2 are h ₁ and h ₂ , respectively, the widths of the first region A1 and the second region A2 are w ₁ and w ₂ , respectively, The areas of the region A1 and the second region A2 are S ₁ (= h ₁ · w ₁ ) and S ₂ (= h ₂ · w ₂ ), respectively.

As shown in FIG. 6A, the cross section of the cross section changing portion 54 at P2 is a square, similar to the cross sectional shapes of the cross section unchanged portions 52A and 52B. That is, the height of the first region A1 h ₁ and the height h ₂ of the second area A2 are the same.

The cross section of the cross-section change portion 54 between the P2 and P3, as shown in FIG. 6 (B), the first region A1, the width w ₁ in comparison with the first region A1 in P2 is unchanged the height because the higher is h ₁ is, the area S ₁ in comparison with the first region A1 in P2 is increasing. On the other hand, in the cross section of the cross-section change portion 54 between the P2 and P3, the second region A2, the width w ₂ as compared to the second area A2 in P2 is unchanged its height h ₂ is lowered because there, the area S ₂ than the second region A2 of P2 is decreased.

The cross section of the cross-section change portion 54 in the P3, as shown in FIG. 6 (C), the first region A1 is further a height h ₁ is higher than that in the first region A1 between the P2 and P3 , area _{S 1} is the largest. On the other hand, in the cross section of the cross-section change portion 54 in the P3, the second area A2, P2 and further a height h ₂ is lower than the second area A2 between the P3, and the area S ₂ is minimum It has become.

In other words, the cross section of the cross-section changing portion 54 between P2 and P3 has a height of the first region A1 from the position P3 corresponding to the antinode of the standing wave to the position P2 corresponding to the node of the standing wave. h ₁ is gradually decreased, the area S ₁ of the first region A ₁ is gradually decreased, the height h ₂ of the second region A ₂ is gradually increased, and the area S ₂ of the second region A ₂ is gradually increased.

Since the cross-section changing portion 54 has a substantially symmetrical shape with respect to the position P3, the cross-section of the cross-section changing portion 54 between P3 and P4 is also a node of the standing wave from the position P3 corresponding to the antinode of the standing wave. The area S1 of the _first region A1 gradually decreases and the area S2 of the _second region A2 gradually increases as it goes to the position of P4 corresponding to.

That is, the cross section of the cross section changing portion 54 has the maximum area S1 of the _first region A1 and the minimum area S2 of the _second region A2 at the position P3 corresponding to the antinode of the standing wave. It has become. Furthermore, the area S1 of the _first area A1 decreases from the position P3 corresponding to the antinode of the standing wave toward the positions P2 and P4 corresponding to the nodes of the standing wave, and the second area area _{S 2} of A2 is increasing.

The horn 50 includes a main body 53 having a width (w ₁ + 2 · w ₂ ) and a protruding portion 55 having a width w ₁ when viewed from the viewpoint of the width. Here, the main body 53 includes the above-described cross-section invariant portions 52A and 52B and the cross-section changing portion 54 of the portion including the first region A1 and the second region A2 in the width direction. Is constituted by a cross-section changing portion 54 of a portion including only the first region A1 in the width direction. That is, the protrusion 55 is thinner than the main body 53 and protrudes from the main body 53 in the thickness direction of the main body 53.
(Horn holder)

The horn holder 60 is fixed to the horn 50 at four positions P2 and P4 on both side surfaces 50c, 50d orthogonal to the Y direction of the horn 50. Thus, since the horn holder 60 holds the horn 50 at the positions P2 and P4 where the amplitude of the standing wave is theoretically zero, the situation where the standing wave excited by the horn 50 propagates to the horn holder 60 is effective. Can be suppressed. As a result, the horn 50 is securely held by the horn holder 60, and the situation where the vibration propagated from the horn 50 to the horn holder 60 affects the vibration mode of the horn 50 is suppressed.
(Vibrator)

The vibrator 42 is a piezoelectric vibrator that vibrates at 60 kHz when a voltage is applied from a power source (not shown), and is attached to the rear end surface 50 b of the horn 50. The vibrator 42 applies vibration in the X direction to the horn 50 from the rear end face 50 b side of the horn 50, thereby exciting the standing wave in the horn 50. The vibrator 42 is attached to the horn 50 by, for example, providing a male screw portion on the vibrator 42 and providing a female screw portion on the rear end face 50b side of the horn 50, and connecting the male screw portion and the female screw portion. This is done by screwing.
(nozzle)

  As shown in FIG. 5, the protrusion 55 of the horn 50 (that is, near the center of the cross-section changing portion 54) is provided with a slit 54a along the X direction. The slit 54a penetrates the horn 50 in the Z direction. is doing. Then, at the position where the slit 54a is provided and shifted to the position of P2 by a minute length ΔL (offset length) from the center position of the cross-section changing portion 54 (that is, the position of P3), A nozzle mounting through-hole (nozzle accommodation hole) 54b is provided along the Z direction. Therefore, the through hole 54b intersects with the slit 54a.

And the nozzle 56 made from a superalloy (for example, WC-Co alloy) or SUS is inserted and accommodated in the through-hole 54b. The nozzle (crimp nozzle) 56 extending along the through hole 54b is provided with a vacuum suction hole 56a along the longitudinal direction (that is, the Z direction). The vacuum suction hole 56a communicates with a vacuum device (not shown) of the bonding apparatus 1, and the nozzle 56 can hold the electronic component 22 in vacuum at the lower end surface 56b of the nozzle 56 where the vacuum suction hole 56a is exposed. It has become. The lower end surface 56 b of the nozzle 56 is a surface (crimp surface) for actually crimping the electronic component 22 to the substrate 24. The center position of the crimping surface 56b is also shifted from the position P3 by the offset length ΔL (for example, 1 mm) as the through hole 54b is shifted from the position P3 by the offset length ΔL.
(Adjustment screw)

  As shown in FIG. 3, in the formation region of the slit 54 a in the protrusion 55 of the horn 50, a screw hole pair (fastening hole) including a release screw hole 57 </ b> A and a fastening screw hole 57 </ b> B that penetrates the protrusion 55 in the Y direction. Are provided in two pairs vertically. A release screw 58A is screwed into each release screw hole 57A, and a fastening screw (fixing means) 58B is screwed into each fastening screw hole 57B. These screw holes 57A and 57B and screws 58A and 58B are used to widen or narrow the slit 54a, and the width of the slit 54a of the cross-section changing portion 54 can be adjusted by adjusting the screws 58A and 58B. .

  The diameter of the through hole 54b provided at the position of the slit 54a is designed to be slightly larger than the diameter of the nozzle 56. Therefore, by narrowing the width of the slit 54a through the screw hole pair 57A, 57B with the screws 58A, 58B, the nozzle 56 inserted through the through hole 54b can be fastened and fixed to the horn 50 (so-called split tightening). it can. That is, the nozzle 56 is firmly sandwiched by the horn 50 from the side peripheral surface 56c side over the entire length of the through hole 54b. On the other hand, the nozzle 56 can be removed from the horn 50 by widening the slit 54a through the screw hole pairs 57A and 57B with the screws 58A and 58B.

That is, by adjusting the width of the slit 54a through the screw hole pairs 57A and 57B by the screws 58A and 58B and changing the fastening force of the nozzle 56, the length of the nozzle 56 attached to and detached from the horn 50 and the protruding length of the nozzle 56 are shown. Can be easily adjusted. When the protruding length of the nozzle 56 reaches the above-mentioned half-wave of the standing wave, the nozzle 56 vibrates greatly and does not vibrate integrally with the horn 50. Therefore, the protruding length of the nozzle 56 is the standing wave. The length is shorter than the half wavelength (for example, 1 mm).
(Horn vibration mode)

  Next, the vibration mode (steady vibration mode) of the horn 50 when a standing wave is excited in the horn 50 by the vibrator 42 will be described with reference to FIG. FIG. 7 is a graph showing the amplitudes of the Y-direction component and the Z-direction component of the standing wave at the respective positions P1 to P5 of the horn 50.

  As is apparent from the graph of FIG. 7, the amplitude in the Y direction and the amplitude in the Z direction are minimal at the position of P3. That is, at the position P3, there is substantially no vibration in the Y-direction component and Z-direction component of the standing wave, and only the vibration in the X-direction component of the standing wave occurs.

  In the present embodiment, the vibrator 42 that is different from the horn 50 is fixed in close contact with the rear end surface 50b of the horn 50, so that the direction (Y direction and Z direction) is different from the vibration direction (X direction). The vibration component of (direction) does not have a symmetric distribution around the position P3 corresponding to the antinode of the standing wave. Therefore, by shifting the center position of the crimping surface 56b of the nozzle 56 toward the P2 side by the offset length ΔL, the center position of the crimping surface 56b is set to a position Q where the Y direction component and the Z direction component of the standing wave are minimized. Match. Here, when the electronic component 22 is pressed against the substrate 24, the vibration in the Y direction component acts to rotate the electronic component 22 relative to the substrate 24, and the vibration in the Z direction component strikes the electronic component 22 against the substrate 24. Will act on. As a result, when the electronic component 22 is, for example, a semiconductor chip component, the chip itself or the electrode film already formed on the substrate is damaged.

Such a vibration mode of the standing wave largely depends on the shape of the horn 50, and the inventors have studied the amplitude of the Y direction component and the amplitude of the Z direction component of the standing wave substantially after extensive research. A horn shape that is minimal at the position of P3 was found. That is, when the horn 50 has the cross-section changing portion 54 and the cross-section changing portion 54 has the following two features, the amplitude of the Y-direction component and the amplitude of the Z-direction component of the standing wave is at the position P3. It becomes zero (or an amplitude very close to zero).
(1) At the position P3 corresponding to the antinode of the standing wave of vibration excited by the horn 50, the area S1 of the _first region A1 is maximized, and the area S2 of the _second region A2 is minimized. Become.
(2) The area S1 of the _first region A1 decreases from the position P3 corresponding to the antinode of the standing wave of vibration excited by the horn 50 toward the positions P2 and P4 corresponding to the nodes, and the second area _{S 2} of the region A2 is increased.

  And since the nozzle 56 holding the electronic component 22 is attached to the position of P3 of the horn 50, no vibration component other than the vibration component in one horizontal direction (that is, the X direction) is applied to the electronic component 22. Become. On the other hand, in the conventional horn, the standing wave vibration mode is not sufficiently suppressed in the Y direction component and the Z direction component of the standing wave at the position P3. Large vibrations occurred in the Y and Z directions. That is, according to the horn 50, the electronic component 22 can be given substantially only vibration in one horizontal direction, and good ultrasonic pressure welding of the electronic component 22 can be realized.

In addition, in the horn 50, by more of the area S ₂ position than the area S ₂ P2 side and P4 side of the second region A2 are wider at the position of P3, ultrasonic vibration from the vibrator 42 Is amplified, and a vibration having an amplitude larger than that of the vibration of the vibrator 42 is transmitted to the position P3, thereby improving the use efficiency of the vibration. Furthermore, since the more the height h ₁ of the first area A1 in the position of P3 is larger than the height h ₁ of the position of the P2 side and P4 side, effective bending stiffness of the horn 50 is at the position of P3 Thus, the bending of the horn 50 at the time of ultrasonic pressure welding is significantly suppressed.

  As described in detail above, in the bonding apparatus 1 and the horn unit 40 described above, the portion accommodated in the through hole 54b of the nozzle 56 is formed by the cooperation of the through hole 54b, the slit 54a, and the fastening screw 58B. Further, it is cleaved from the side peripheral surface 56c side in a direction (Y direction) orthogonal to the pressure contact direction of the nozzle 56. Therefore, the nozzle 56 is firmly sandwiched by the horn 50 and is stably fixed. Thereby, the nozzle 56 and the horn 50 vibrate integrally, and a good crimping state can be realized. In addition, when a load is applied to the nozzle 56 during crimping, the crimping direction (Z direction) and the fastening direction (Y direction) of the nozzle 56 are not the same direction, so the fastening force is hardly affected by the load during crimping. It is like that.

  In addition, since the nozzle 56 can be attached to and detached from the horn 50 by split fastening, the nozzle 56 can be fixed to the horn 50 without preparing a separate member, and when the crimping surface 56b is worn. The nozzle 56 can be easily replaced. Further, since the nozzle 56 is not integrated with the horn 50, the nozzle 56 and the horn 50 may be formed of different materials, or may be changed to nozzles having different lengths and shapes, and different shapes / dimensions of the crimping surface according to applications. it can.

  Further, in the horn unit 40, the center position of the crimping surface 56b of the nozzle 56 is crimped so as to be a position Q offset by ΔL from the position P3 corresponding to the antinode of the standing wave of vibration excited by the horn 50. A surface 56b is disposed. Therefore, the horn unit 40 has a Y direction and a Z direction (first direction in the present invention) in the crimping surface 56b as compared with the conventional horn unit in which the crimping surface is disposed at the position corresponding to the belly (P3). The vibration component is suppressed, and a good crimped state can be realized. Here, the first direction is a direction that intersects the X direction that is the vibration direction of the horn 50 by the vibrator 42, and the vibration component is a vibration component other than the X direction. When the first direction is one of the Y direction and the Z direction, the center position of the pressure-bonding surface 56b of the nozzle 56 is set to either the vibration component in the Y direction or the vibration component in the Z direction of the standing wave. Only one of the vibration components is offset to a minimum position.

  The present invention is not limited to the above embodiment, and various modifications are possible. For example, the horn of the horn unit and the horn holder may be appropriately separated. In addition to the rectangle, the shape of the first region or the second region may be an elliptical shape whose major axis is the Z direction, a polygon that is elongated in the Z direction, or the like. Furthermore, the nozzle accommodation hole does not need to penetrate the horn.

Further, instead of employing the nozzle 56 having the crimping surface 56b, an embodiment in which a horn having a protrusion 56A having a crimping surface 56b formed on the lower surface as shown in FIG. 8 is also possible.
Since the center position of the crimping surface 56b is also arranged at the position Q offset from the position P3 corresponding to the antinode of the standing wave, the crimping surface 56b of this horn has the above-described effects even if this horn is adopted. Similar effects can be obtained.

1 is a schematic configuration diagram illustrating a bonding apparatus according to an embodiment of the present invention. It is the perspective view which showed the horn unit of the bonding apparatus of FIG. FIG. 3 is an exploded perspective view of the horn unit shown in FIG. 2. It is a side view of the horn unit shown in FIG. It is a bottom view of the horn unit shown in FIG. It is sectional drawing of the horn of the horn unit of FIG. It is the figure which showed the vibration mode of the horn unit of FIG. It is the side view which showed the horn of a different aspect.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Bonding apparatus, 40 ... Horn unit, 42 ... Vibrator, 50 ... Horn, 53 ... Main-body part, 54 ... Cross-section change part, 54a ... Slit, 54b ... Through-hole, 55 ... Projection part, 56 ... Nozzle, 56A ... projections, 56b ... crimping surface, 57B ... screw hole, 58B ... fastening screw, 60 ... horn holder, A1 ... first area, A2 ... second area, _{S 1,} S 2 _... area.

Claims (6)

  A horn to which vibration is imparted by a vibrator, wherein a crimping surface is disposed at a position offset from a position corresponding to an antinode of a standing wave of vibration excited by the horn.   The horn according to claim 1, wherein the offset position is a position where a vibration component in a first direction intersecting a vibration direction of the horn by the vibrator is minimized. A horn that is vibrated by a vibrator;
A horn comprising a crimping surface and a crimping nozzle attached to the horn so that the crimping surface is disposed at a position offset from a position corresponding to an antinode of a standing wave of vibration excited by the horn. unit.   The horn unit according to claim 3, wherein the offset position is a position where a vibration component in a first direction intersecting a vibration direction of the horn by the vibrator is minimized. A vibrator for applying vibration to the horn;
The horn to which vibration is applied by the vibrator, the horn having a crimping surface disposed at a position offset from a position corresponding to an antinode of a standing wave of vibration excited by the horn,
A bonding apparatus comprising: a pressure unit that performs pressure control in a pressing direction of the horn. A vibrator for applying vibration to the horn;
The horn to which vibration is applied by the vibrator, and a pressure bonding surface, and the pressure bonding surface is disposed at a position offset from a position corresponding to an antinode of a standing wave of vibration excited by the horn. A horn unit including a crimp nozzle attached to the horn;
A bonding apparatus comprising pressure means for performing pressure control in the pressure bonding direction of the pressure bonding nozzle of the horn unit.

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