JP2007168393A - Droplet discharge head, droplet discharge device, and manufacturing method of droplet discharge head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a droplet discharge head which is excellent in adhesiveness and directional property and has a water-repellent film, a droplet discharge device, and a manufacturing method of a droplet discharge head. <P>SOLUTION: The droplet discharge head 1 has a reservoir plate 3 and a nozzle plate 2 which has a nozzle 2a with the water-repellent film 10 overlying the surface thereof. In the head, the water-repellent film 10 comprises an undercoat layer 10a overlying the surface of the nozzle plate 2 for improving adhesiveness between the nozzle plate 2 and the surface and a water-repellent layer 10b formed on the undercoat layer 10a. The undercoat layer 10a comprises a first undercoat layer 10a<SB>1</SB>having adhesiveness with respect to the surface of the nozzle plate 2 higher than that of the water-repellent layer 10b and a second undercoat layer 10a<SB>2</SB>having adhesiveness with respect to the water-repellent layer 10b higher than that of the first undercoat layer 10a<SB>1</SB>. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a droplet discharge head, a droplet discharge device, and a method for manufacturing a droplet discharge head, and more particularly, a droplet having a water-repellent film excellent in adhesion (peeling resistance) and discharge directionality. The present invention relates to a discharge head, a droplet discharge device, and a method for manufacturing a droplet discharge head.

  Conventionally, a droplet discharge head has formed a water-repellent film on the discharge-side surface of a nozzle plate having nozzles to impart water repellency to prevent the adhesion of droplets and improve the uniformity of the surface of the nozzle plate. Increasing the stability of the droplet discharge direction has been attempted (see, for example, Patent Documents 1 and 2).

Specifically, in the droplet discharge head described in Patent Document 1, a SiO ₂ film is formed by sputtering on the surface of a nozzle forming member (nozzle plate), and a fluorine-based water repellent is coated on the SiO ₂ film. Has been.

In the droplet discharge head described in Patent Document 2, a SiO ₂ film is deposited on the surface of a discharge port plate (nozzle plate), and a water-repellent organic material such as a silane coupling agent is formed on the SiO ₂ film by deposition. Has been.
JP 2003-341070 A (Claims 6 and 8) JP-A-11-91109 (paragraphs [0025] and [0026])

However, according to the invention described in Patent Document 1, the SiO ₂ film formed by sputtering as the underlayer has good adhesion (peeling resistance) to the nozzle plate when polyimide resin is used as the nozzle plate. When a fluorine-based water-repellent film is formed on a SiO ₂ film formed by sputtering, minute irregularities are generated on the surface of the water-repellent film, which is not necessarily satisfactory in terms of liquid droplet ejection direction. There's a problem.

According to the invention described in Patent Document 2, the SiO ₂ film formed by vapor deposition as the underlayer has insufficient adhesion (peel resistance) to the nozzle plate when a polyimide resin is used as the nozzle plate. There is a problem that.

  The present invention has been made in view of the above-described problem, and is a droplet discharge head, a droplet discharge device, and a droplet including a water-repellent film having excellent adhesion (peeling resistance) and discharge directionality It is an object of the present invention to provide a method for manufacturing a discharge head.

  In order to achieve the above object, one embodiment of the present invention provides the following droplet discharge head, droplet discharge apparatus, and method for manufacturing the droplet discharge head.

[1] A nozzle plate having a nozzle for discharging droplets and having a base layer and a water-repellent layer formed in this order as a water-repellent film on the surface and joined to the back surface of the nozzle plate and communicated with the nozzle In a droplet discharge head comprising a pool plate having a communicating hole that
The foundation layer is formed on the surface of the nozzle plate, and has a first foundation layer that has a greater adhesion to the surface of the nozzle plate than the water repellent layer, and a surface of the first foundation layer. A droplet discharge head, comprising: a second underlayer formed and having a higher adhesion to the water repellent layer than the first underlayer.

  With this configuration, it is possible to provide a droplet discharge head including a water-repellent film having excellent adhesion and discharge directionality. Adhesion is synonymous with peel resistance.

[2] The nozzle plate has a convex portion around the nozzle on the surface thereof,
The droplet discharge head according to [1], wherein the water repellent film is formed on a surface around the nozzle of the nozzle plate, and on a side surface and a surface of the convex portion.

  According to this configuration, by providing the protrusion around the nozzle, the water repellent film around the nozzle can be protected from mechanical wear such as wiping.

[3] The droplet discharge head according to [1] or [2], wherein the water repellent layer is made of a fluorine-based compound.

  Thereby, water repellency and adhesiveness can be improved.

[4] The droplet discharge head according to [1] or [2], wherein the first underlayer is made of SiO ₂ and the second underlayer is made of SiO _x .

  By combining silicon oxide films as the first base layer and the second base layer, the adhesion between the first base layer and the second base layer is improved.

[5] The droplet discharge head according to [4], wherein the SiO ₂ has a thickness of 30 to 100 nm, and the SiO _x has a thickness of 30 to 100 nm.

[6] The droplet discharge head according to [1] or [2], wherein the first underlayer is made of Si ₂ N ₃ and the second underlayer is made of SiN _x .

  By combining silicon nitride films as the first underlayer and the second underlayer, the adhesion between the first underlayer and the second underlayer is improved.

[7] The liquid droplet ejection head according to any one of [1] to [6] and the liquid droplet ejection head controlled based on an image signal to eject liquid droplets from the liquid droplet ejection head, A droplet discharge apparatus comprising: a control unit that records an image on a recording medium.

  With this configuration, it is possible to provide a droplet discharge device that has excellent durability and enables recording of high-definition image information.

[8] A nozzle plate having a nozzle for discharging droplets and having a base layer and a water-repellent layer formed in this order as a water-repellent film on the surface, joined to the back surface of the nozzle plate, and communicated with the nozzle In the method of manufacturing a droplet discharge head including a pool plate having a communicating hole that is formed on the surface of the nozzle plate, the adhesion of the nozzle plate to the surface is greater than that of the water repellent layer. Forming a first underlayer, forming a second underlayer formed on the surface of the first underlayer, and having a greater adhesion to the water-repellent layer than the first underlayer; A method for manufacturing a droplet discharge head, comprising forming the water repellent layer on a ground layer.

  With this configuration, a method for manufacturing a droplet discharge head including a water-repellent film having excellent adhesion and discharge directionality can be obtained.

[9] The method for manufacturing a droplet discharge head according to [8], wherein the first underlayer is formed by sputtering, and the second underlayer is formed by vapor deposition.

  According to this configuration, the adhesion between the nozzle plate and the first underlayer is further improved by sputtering, and the flatness of the water repellent film is improved by vapor deposition.

  ADVANTAGE OF THE INVENTION According to this invention, the manufacturing method of the droplet discharge head provided with the water-repellent film excellent in adhesiveness and discharge directionality, a droplet discharge apparatus, and a droplet discharge head can be provided.

[First Embodiment]
(Configuration of droplet discharge head)
1 and 2 show a droplet discharge head according to a first embodiment of the present invention. FIG. 1 is a plan view, FIG. 2A is a cross-sectional view taken along line AA in FIG. FIG. 2B is a detailed view of a portion B in FIG.

  As shown in FIG. 1, the droplet discharge head 1 includes a substantially parallelogram-shaped diaphragm 7, a plurality of piezoelectric elements 8 disposed on the diaphragm 7, and positions facing the plurality of piezoelectric elements 8. It has a plurality of nozzles 2a formed and by driving the piezoelectric element 8, the liquid stored inside is ejected as droplets from the nozzle 2a. Reference numeral 7a denotes a supply hole that is provided in the diaphragm 7 and through which liquid is supplied from a liquid tank (not shown) to the inside of the head 1.

  Further, as shown in FIG. 2A, the droplet discharge head 1 has a nozzle plate 2 on which nozzles 2a are formed, and communicates with a surface (back surface) opposite to the discharge side of the nozzle plate 2. Pool plate 3 having hole 3a and liquid pool 3b, supply hole plate 4 having communication hole 4a and supply hole 4b, supply path plate 5 having communication hole 5a and supply path 5b, and pressure having pressure generation chamber 6a The generation chamber plate 6, the diaphragm 7, and the piezoelectric element 8 are sequentially stacked. The liquid pool 3b communicates with the pressure generation chamber 6a via the supply hole 4b and the supply path 5b, and the pressure generation chamber 6a communicates with the nozzle 2a via the communication holes 5a, 4a and 3a.

Further, as shown in FIG. 2B, the droplet discharge head 1 has a convex plate 9 on the discharge side surface (front surface) of the nozzle plate 2 so that a convex portion 9a is formed around the nozzle 2a. The water repellent film 10 composed of the first base layer 10a ₁ , the second base layer 10a ₂ and the water repellent layer 10b is formed on the surface around the nozzle 2a of the nozzle plate 2 and the side surface and surface of the convex portion 9a. is doing. By forming the water repellent film 10 around the nozzle 2a, the liquid droplets discharged from the nozzle 2a are discharged in a direction perpendicular to the nozzle 2a. Further, by providing the convex portion 9a around the nozzle 2a, the water repellent film 10 around the nozzle 2a can be protected from mechanical wear due to wiping or the like.

  The configuration in which the nozzle plate 2 in which the nozzles 2a are formed, the pool plate 3 having the communication holes 3a and the liquid pool 3b, the convex plate 9 in which the convex portions 9a are formed, and the water repellent film 10 is laminated is described below. 1 laminate S1. A vibration including a supply hole plate 4 having a communication hole 4a and a supply hole 4b, a supply path plate 5 having a communication hole 5a and a supply path 5b, a pressure generation chamber plate 6 having a pressure generation chamber 6a, and a piezoelectric element 8. Hereinafter, the configuration in which the plates 7 are stacked is referred to as a second stacked body S2.

  1 and 2 show one droplet discharge head 1, a plurality of droplet discharge heads 1 are combined to form a droplet discharge head unit, and a plurality of droplet discharge head units are arranged to form a droplet. It can be used as an ejection head array.

  Next, details of each part of the droplet discharge head 1 will be described.

(Nozzle plate)
The nozzle plate 2 is preferably made of a synthetic resin because the nozzle 2a can be easily formed. For example, a polyimide resin, a polyethylene terephthalate resin, a liquid crystal polymer, an aromatic polyamide resin, a polyethylene naphthalate resin, or a polysulfone resin. Etc. Among these, a self-bonding polyimide resin is preferable. The thickness of the nozzle plate 2 is preferably 15 to 100 μm.

(Pool plate)
As the pool plate 3, a material made of a metal such as SUS from the viewpoint of corrosiveness can be cited as a preferred example.

(Piezoelectric element)
In the piezoelectric element 8, electrodes are formed on the upper surface and the lower surface by sputtering or the like, and the electrodes on the lower surface are electrically connected to the diaphragm 7 by a conductive adhesive and are grounded via the diaphragm 7. The electrode on the upper surface of the piezoelectric element 8 is connected to a conductive pattern of a flexible printed board (not shown) by solder. The piezoelectric element 8 is joined to the portion of the diaphragm 7 corresponding to the pressure generating chamber 6a.

(Convex plate)
The convex plate 9 is made of a metal such as SUS or a resin such as polyimide resin. 5-30 micrometers is preferable and, as for the height of the convex part 9a, 10-20 micrometers is more preferable.

(Water repellent film)
First underlayer 10a ₁ of the water-repellent film 10 is formed on the surface of the nozzle plate 2, adhesiveness to the surface of the nozzle plate 2 (peel resistance) is greater than the water-repellent layer 10b, the second lower strata 10a ₂ is formed on the first underlayer 10a ₁ on the surface, the adhesion to the water-repellent layer 10b (peeling resistance) becomes larger than the first base layer 10a _1.

The first underlayer 10a ₁ is not particularly limited as long as the adhesion to the surface of the nozzle plate 2 is greater than that of the water repellent layer 10b. For example, SiO, SiO ₂ , SiO having a thickness of 30 to 100 nm. It may be a silicon oxide film or _Si 2 _N 3, a silicon nitride film such as SiN _x of _x or the like. Among them, since it is excellent in ink resistance, it also has excellent adhesion (peeling resistance) with a resin such as polyimide used as the nozzle plate 2 and a fluorine-based water repellent material, and therefore, from SiO ₂ and Si ₂ N _3. Is preferred.

As the second underlayer 10a _2, it is not particularly limited as long as larger than adhesiveness first underlayer 10a ₁ relative to the water-repellent layer 10b, for example, a thickness of 30 to 100 nm, the first base layer 10a _{If 1} is SiO _2, consisting preferably is made of SiO _x, when the first base layer 10a ₁ is made of _Si 2 _{N 3} is preferably one made of SiN _x. Thus, adhesion between the first base layer 10a ₁ and the second base layer 10a ₂ is improved.

  Examples of the water repellent layer 10b include a fluorine water repellent film made of a fluorine compound, a silicone water repellent film, a plasma polymerization protective film, polytetrafluoroethylene (PTFE) nickel eutectoid plating, and the like. Among these, a fluorine-based water repellent film made of a fluorine-based compound is preferable because of its excellent water repellency and adhesion. The thickness of the water repellent layer 10b is preferably 10 to 50 nm.

(Method for manufacturing droplet discharge head)
3A to 3G show the manufacturing process of the present droplet discharge head 1.

(1) Production of First Laminate S1 First, as shown in FIG. 3A, in order to form the convex portion 9a, for example, on the nozzle plate 2 made of a self-bonding polyimide film, for example, The convex plate 9 made of SUS is joined by heating and pressing (for example, 300 ° C., 300 kgf). In the case where a self-bonding polyimide film is not used as the nozzle plate 2, an adhesive or the like may be used for bonding.

  Next, as shown in FIG. 3B, the resist 11 is patterned on the convex plate 9 by photolithography so as to have a desired shape.

  Next, as shown in FIG. 3C, the convex plate 9 is etched using the resist 11 as a mask, and the convex portion is formed in a region other than the portion on the surface of the nozzle plate 2 where the nozzle 2a is to be formed. 9a is formed.

  Next, as shown in FIG. 3D, for example, a pool plate 3 made of SUS, for example, having a communication hole 3a and a liquid pool 3b on the back surface of the nozzle plate 2 made of a self-bonding polyimide film. Bonding is performed by heating and pressing (for example, 300 ° C., 300 kgf). In FIG. 3, only the periphery of the communication hole 3a is shown.

  When a self-bonding polyimide film is not used as the nozzle plate 2, an adhesive or the like may be used.

  When the nozzle plate 2 and the convex plate 9 and the nozzle plate 2 and the pool plate 3 are bonded with an adhesive, a thermoplastic resin such as polyimide or polystyrene, or a heat such as phenol resin or epoxy resin is used as the adhesive. A curable resin can be used.

Next, as shown in FIG. 3E, a SiO ₂ film, for example, is formed by sputtering as the first underlayer 10a _{1 on} the surface around the nozzle 2a of the nozzle plate 2 and the side surface and surface of the convex portion 9a. To do. By using the SiO ₂ film as the first underlayer 10a ₁ , the adhesion between the nozzle plate 2 and the convex portion 9a can be improved. This is because the film formed by sputtering generally has better adhesion than the film formed by vapor deposition.

Next, the first on the underlayer 10a _1, a second base layer 10a _2, for example, be formed by depositing a SiO _x film. By using a SiO _x film as the second underlayer 10a ₂ , adhesion and flatness with the water repellent layer 10b can be improved. This is because there is a micro gap in the SiO _x film, and molecules of the water-repellent layer 10b enter there to improve the adhesion.

Next, after the water-repellent layer 10b made of a fluorine-based water-repellent film having a thickness of 10~50nm on the second underlayer 10a ₂ is formed by vapor deposition, a fluorine-based water-repellent film by heating (for example 50 ° C., 1 hour) Is polymerized. Regarding the compatibility between the SiO ₂ film and the SiO _x film and the water repellent layer 10b, when the second undercoat film 10a ₂ is a SiO ₂ film, the water repellent layer 10b has a thickness greater than 30 nm. In contrast to the unevenness, when the second base film 10a ₂ is a SiO _x film, it is confirmed by experiments that the water-repellent layer 10b is uneven when the thickness of the water-repellent layer 10b is greater than 50 nm. ing. Therefore, the ejection direction and the nozzle processability, furthermore, in consideration of abrasion resistance, since it is thicker in the water-repellent layer 10b also becomes larger advantage, as the second base film 10a ₂ SiO _x A membrane is preferred.

  Next, as shown in FIG.3 (f), the nozzle 2a is formed by irradiating a laser from the pool plate 3 side, and 1st laminated body S1 is obtained. By using a laser, fine processing becomes possible. The laser may be a gas laser or a solid laser. Examples of the gas laser include an excimer laser, and examples of the solid laser include a YAG laser. Among these, it is preferable to use an excimer laser.

  Alternatively, the nozzle plate 2 and the pool plate 3 may be joined after the nozzle 2 a is formed on the nozzle plate 2.

Before forming the nozzle 2a, a protective layer made of sheet-like adhesive tape, thermoplastic resin, or the like is formed in advance on the water-repellent film 10, and after forming the nozzle 2a, the protective layer is formed. It may be peeled off.
(2) Production of Second Laminate S2 On the other hand, as shown in FIG. 2A, the supply hole plate 4, the supply path plate 5, the pressure generating chamber plate 6, the vibration plate 7 and the piezoelectric element 8 are joined. A second stacked body S2 is formed.

  Examples of a method for forming the second laminate S2 by joining the supply hole plate 4, the supply path plate 5, the pressure generation chamber plate 6, and the vibration plate 7 include a thermoplastic resin such as polyimide and polystyrene, and phenol. An adhesive such as a thermosetting resin such as a resin or an epoxy resin can be used.

(3) Joining of the first laminate S1 and the second laminate S2 Next, as shown in FIG. 3G, the pool plate 3 of the first laminate S1 and the second laminate S2 The supply hole plate 4 is joined to obtain the droplet discharge head 1.

  As a method of joining the first laminate S1 and the second laminate S2, for example, an adhesive such as a thermoplastic resin such as polyimide or polystyrene, or a thermosetting resin such as phenol resin or epoxy resin is used. For example, the bonding may be performed at a temperature lower than the heat resistant temperature of the water repellent film 10.

(First embodiment)
According to the first embodiment described above, the following effects can be obtained.
(B) on the surface of the nozzle plate 2, a first underlayer 10a _1, a SiO ₂ film formed by sputtering, on the first surface of the base layer 10a _1, a second base layer 10a _2, SiO _x film Are formed by vapor deposition so that the adhesion between the nozzle plate 2 and the first underlayer 10a ₁ , the first underlayer 10a ₁ and the second underlayer 10a ₂ , and the second underlayer 10a ₂ and the water repellent layer 10b is improved. improves. Therefore, the adhesion between the nozzle plate 2 and the water repellent film 10 is improved.
Since the deposited second underlayer 10a ₂ on a first underlayer 10a ₁ formed by (ii) sputtering, improve the flatness of the water-repellent layer 10b formed thereon, the ejection direction is improved .

[Second Embodiment]
(Color printer configuration)
FIG. 4 is a configuration diagram schematically showing a color printer to which the droplet discharge device according to the second embodiment of the present invention is applied. This color printer 100 has a substantially box-shaped casing 101, a paper feed tray 20 for storing paper P in the lower part of the casing 101, and a recorded paper P in the upper part of the casing 101. Each of the discharged paper discharge trays 21 is disposed, main conveyance paths 31a to 31e from the paper feed tray 20 via the recording position 102 to the paper discharge tray 21, and from the paper discharge tray 21 side to the recording position 102 side. A transport mechanism 30 that transports the paper P along the reverse transport path 32 is provided.

  As shown in FIG. 4B, a plurality of droplet discharge heads 1 shown in FIG. 1 are arranged in parallel at the recording position 102 to form a recording head unit, and each of the four recording head units is yellow (Y ), Magenta (M), cyan (C), and black (K) recording head units 41Y, 41M, 41C, and 41K that eject ink droplets of each color are arranged in the transport direction of the paper P to form a recording head array. ing.

  Further, the color printer 100 includes a charging roll 43 as an adsorbing unit that adsorbs the paper P, a platen 44 disposed opposite to the recording head unit 20 via the endless belt 35, and recording head units 41Y, 41M, and 41C. The piezoelectric element of the droplet discharge head 1 that controls the maintenance unit 45 arranged in the vicinity of 41K and each part of the color printer 100 and constitutes the recording head units 41Y, 41M, 41C, 41K based on image signals 8 includes a control unit (not shown) that applies a driving voltage to eject ink droplets from the nozzle 2a and records a color image on the paper P.

  The recording head units 41 </ b> Y, 41 </ b> M, 41 </ b> C, and 41 </ b> K have an effective print area that is equal to or larger than the width of the paper P. In addition, although the piezoelectric method was used as a method for discharging droplets, there is no particular limitation, and for example, a widely used method such as a thermal method can be appropriately used.

  Ink tanks 42Y, 42M, 42C, and 42K that store inks corresponding to the recording head units 41Y, 41M, 41C, and 41K are disposed above the recording head units 41Y, 41M, 41C, and 41K. From each ink tank 42Y, 42M, 42C, 42K, it is comprised so that ink may be supplied to each droplet discharge head 1 via piping which is not shown in figure.

  The ink stored in the ink tanks 42Y, 42M, 42C, and 42K is not particularly limited, and for example, commonly used inks such as water-based, oil-based, and solvent-based inks can be appropriately used.

  The transport mechanism 30 is arranged in each part of the pick-up roll 33 that takes out the paper P one by one from the paper feed tray 20 and supplies it to the main transport path 31a, the main transport paths 31a, 31b, 31d, 31e, and the reverse transport path 32. A plurality of transport rolls 34 that transport the paper P, an endless belt 35 that is provided at the recording position 102 and transports the paper P in the direction of the paper discharge tray 21, a drive roll 36 on which the endless belt 35 is stretched, and a follower A roll 37 and a drive motor (not shown) for driving the transport roll 34 and the drive roll 36 are provided.

(Color printer operation)
Next, the operation of the color printer 100 will be described. The transport mechanism 30 drives the pickup roll 33 and the transport roll 34 under the control of the control unit, takes out the paper P from the paper feed tray 20, and transports it along the main transport paths 31a and 31b. When the paper P reaches the vicinity of the endless belt 35, electric charge is applied to the paper P by the electrostatic attraction force of the charging roll 43, and the paper P is attracted to the endless belt 35.

  The endless belt 35 is rotated by driving of the driving roll 36, and when the paper P is conveyed to the recording position 102, a color image is recorded by the recording head units 41Y, 41M, 41C, and 41K.

  That is, the liquid pool 3b of the droplet discharge head 1 shown in FIG. 2 is filled with ink supplied from the ink tanks 42Y, 42M, 42C, and 42K, and ink is supplied from the liquid pool 3b to the supply holes 4b and the supply paths 5b. Is supplied to the pressure generating chamber 6a, and ink is stored in the pressure generating chamber 6a. When the control unit selectively applies a drive voltage to the plurality of piezoelectric elements 8 based on the image signal, the vibration plate 13 bends as the piezoelectric elements 8 are deformed, thereby changing the volume in the pressure generating chamber 6a. Then, the ink stored in the pressure generating chamber 6a is ejected as ink droplets from the nozzle 2a onto the paper P through the communication holes 5a, 4a, 3a, and an image is recorded on the paper P. On the paper P, Y, M, C, and K images are sequentially overwritten, and a color image is recorded.

  The paper P on which the color image is recorded is discharged to the paper discharge tray 21 by the transport mechanism 30 via the main transport path 31d.

  When the duplex recording mode is set, the paper P once discharged to the paper discharge tray 21 returns to the main transport path 31e again, passes through the reverse transport path 32, and again passes through the main transport path 31b. Then, the color image is recorded on the surface opposite to the surface of the paper P recorded last time by the recording head units 41Y, 41M, 41C, and 41K.

(Effect of the second embodiment)
According to the second embodiment described above, the following effects can be obtained.
(A) Since the recording head units 41Y, 41M, 41C, and 41K having high adhesion between the nozzle plate 2 and the water repellent film 10 are used, a highly reliable color printer can be provided.
(B) Since the recording head units 41Y, 41M, 41C, and 41K having high discharge directionality are used, a high-definition and high-quality color image can be provided.

Examples of the present invention will be described below.

Table 1 shows that for Example 1 and Comparative Examples 1, 2, 3, and 4, a SiO ₂ film was used as the first underlayer 10a ₁ , a SiO _x film was used as the second underlayer 10a ₂ , and a SiO ₂ film and a SiO ₂ film were used. _The evaluation result performed about the adhesiveness at the time of changing the film thickness of _x film | membrane, nozzle processability, discharge directionality, and the flatness (unevenness | corrugation) of a water-repellent film is shown.

Example 1, SiO ₂ film having a film thickness 35nm as the first base layer 10a _1, SiO _x film of the second base layer 10a ₂ film thickness 100 nm, using a fluorine resin film with a thickness of 10nm as a water-repellent layer 10b . As a result, good results (circles) were obtained for the adhesion, nozzle processability, ejection directionality, and flatness of the water-repellent film.

In contrast, Comparative Example 1, compared Example 1, without using the first base layer 10a _1, the thickness of the water-repellent layer 10b is increased to 35 nm. As a result, the adhesion was poor (x mark), but good results (◯ mark) were obtained for nozzle processability, ejection directionality, and flatness of the water-repellent film.

In Comparative Example 2, the first underlayer 10a ₁ was not used as compared with Example 1, and the film thickness of the water repellent layer 10b was 55 nm, which was thicker than Comparative Example 1. As a result, the adhesion was poor (x mark), the nozzle processability was good (circle mark), the discharge directionality was slightly good (triangle mark), and the flatness of the water-repellent film was poor (x mark).

In Comparative Example 3, compared with Example 1, the thickness of the SiO ₂ film of the first underlayer 10a ₁ was increased to 120 nm. As a result, the adhesion was poor (x mark), but the nozzle processability, the discharge directionality, and the flatness of the water-repellent film were all bad (x mark).

In Comparative Example 4, compared to Example 1, the second base layer 10a ₂ was not used, and the film thickness of the water repellent layer 10b was increased to 35 nm. As a result, the adhesion and nozzle processability were good (◯ marks), but the discharge directionality was slightly good (Δ marks), and the flatness of the water-repellent film was poor (x marks).

  The present invention is not limited to the above-described embodiments and examples, and various modifications can be made without departing from the spirit of the invention.

  For example, in the embodiment and the example described above, the convex portions 9 a are formed on the surface of the nozzle plate 2, and the water-repellent layer 10 having a three-layer structure is formed on the surfaces thereof, but the convex portions are formed on the surface of the nozzle plate 2. The water-repellent layer 10 having a three-layer structure may be formed on the surface of the nozzle plate 2 without forming 9a.

  Further, the nozzle plate may be subjected to processing such as electric discharge processing, photoetching, press processing using a punch, laser processing, or the like to form a convex portion around the nozzle. Thereby, since a nozzle plate and a convex part can be formed integrally, a joining process etc. can be omitted.

  The droplet discharge head, the droplet discharge device, and the manufacturing method of the droplet discharge head of the present invention are various industrial fields in which it is required to form a pattern of high-definition image information by discharging droplets, for example, Ink is ejected onto a polymer film or glass surface using an ink jet method to form a color filter for display, or a solder paste is ejected onto a substrate to form component mounting bumps. It is effectively used in the electrical / electronic industry fields, such as forming wiring, and in the medical field, which manufactures biochips that test reaction with a sample by discharging a reaction reagent onto a glass substrate or the like.

1 is a plan view of a droplet discharge head according to a first embodiment of the present invention. (A) is the sectional view on the AA line of FIG. 1, (b) is the B section detailed drawing of (a). (A)-(g) is sectional drawing which shows the manufacturing process of the droplet discharge head which concerns on the 1st Embodiment of this invention. It is a block diagram which shows typically the color printer to which the droplet discharge apparatus which concerns on the 2nd Embodiment of this invention is applied.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Droplet discharge head 2 Nozzle plate 2a Nozzle 3 Pool plate 3a Communication hole 3b Liquid pool 4 Supply hole plate 4a Communication hole 4b Supply hole 5 Supply path plate 5a Communication hole 5b Supply path 6 Pressure generation chamber plate 6a Pressure generation chamber 7 Vibration Plate 7a Supply hole 8 Piezoelectric element 9 Protruding plate 9a Protruding portion 10 Water repellent film 10a ₁ First underlayer 10a ₂ Second underlayer 10b Water repellent layer 11 Resist 20 Paper feed tray 21 Paper discharge tray 30 Transport mechanisms 31a to 31e Main transport path 32 Reverse transport path 33 Pickup roll 34 Transport roll 35 Endless belt 36 Drive roll 37 Driven roll 41Y, 41M, 41C, 41K Recording head unit 42Y, 42M, 42C, 42K Ink tank 43 Charging roll 44 Preten 45 Maintenance unit 100 Color printer 101 Case 102 Position P sheets S1 stack S2 laminate

Claims (9)

A nozzle plate having a nozzle for discharging droplets and having a base layer and a water-repellent layer formed in this order as a water-repellent film on the surface, and a communication hole joined to the back surface of the nozzle plate and communicating with the nozzle In a droplet discharge head comprising a pool plate having
The foundation layer is formed on the surface of the nozzle plate, and has a first foundation layer that has a greater adhesion to the surface of the nozzle plate than the water repellent layer, and a surface of the first foundation layer. A droplet discharge head, comprising: a second underlayer formed and having a higher adhesion to the water repellent layer than the first underlayer. The nozzle plate has a convex portion around the nozzle on its surface,
2. The liquid droplet ejection head according to claim 1, wherein the water repellent film is formed on a surface of the nozzle plate around the nozzle and on a side surface and a surface of the convex portion.   The droplet discharge head according to claim 1, wherein the water repellent layer is made of a fluorine-based compound. The first underlayer is made of SiO ₂ .
The droplet discharge head according to claim 1, wherein the second underlayer is made of SiO _x . The SiO ₂ has a thickness of 30 to 100 nm,
The droplet discharge head according to claim 4, wherein the SiO _x has a thickness of 30 to 100 nm. The first underlayer is made of Si ₂ N ₃ ,
The droplet discharge head according to claim 1, wherein the second underlayer is made of SiN _x . A liquid droplet ejection head according to any one of claims 1 to 6;
A droplet ejection apparatus comprising: a control unit that controls the droplet ejection head based on an image signal to eject droplets from the droplet ejection head and records an image on a recording medium. A nozzle plate having a nozzle for discharging droplets and having a base layer and a water-repellent layer formed in this order as a water-repellent film on the surface, and a communication hole joined to the back surface of the nozzle plate and communicating with the nozzle In a method of manufacturing a droplet discharge head comprising a pool plate having
Forming a first base layer formed on the surface of the nozzle plate and having a greater adhesion to the surface of the nozzle plate than the water repellent layer;
Forming a second underlayer formed on the surface of the first underlayer and having a greater adhesion to the water-repellent layer than the first underlayer;
A method of manufacturing a droplet discharge head, comprising forming the water repellent layer on the second underlayer. The first underlayer is formed by sputtering,
The method for manufacturing a droplet discharge head according to claim 8, wherein the second underlayer is formed by vapor deposition.

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