JP2007003637A - Matrix type light switch - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a matrix type light switch in which a micromirror is vertically moved in a sufficient range even when the switch is low and flat, the insertion loss of an optical signal is reduced, the size of the light switch is reduced, and manufacturing cost is reduced. <P>SOLUTION: A flat plate 51, which is connected to one end of armature 33 having a supporting part 34 in its middle part on a fixed substrate block 41, and a connecting pin 52, which is connected to a micromirror 21 on a movable substrate block 11, are connected and vertically freely driven, and the distance from a connected point P3 of the flat plate 51 and a connecting pin 52 to the supporting part 34 is longer than the distance from an end P1 of the armature 33 on which the flat plate 51 is not connected to the supporting part 34. Thus, even when the end P1 of the armature 33 slightly moves downwards, the connected point P3 largely pushes the connecting pin 52 up, and the micromirror 21 fixed on the connecting pin 52 largely moves upwards to an optically accurate position. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a technique for reducing optical signal insertion loss, size reduction, and manufacturing cost with respect to a matrix type optical switch.

  2. Description of the Related Art In recent years, with the spread of the Internet, with the increase in the amount of communication information transmitted in an optical fiber network, wavelength division multiplexing (WDM) transmission technology for transmitting and receiving signals of different wavelengths on one optical fiber has been used. In addition to the point-to-point method of combining point-to-point communication using an optical multiplexer / demultiplexer, an OADM (Optical Add & Drop Module) method of branching and inserting a specific wavelength at a relay base has been introduced. In such a system, an optical switch that selectively switches an optical signal of an arbitrary wavelength from a plurality of input ports and connects it to a predetermined output port is necessary to flexibly cope with communication demands and communication circuit failures. It is said.

  On the other hand, as an optical communication system development direction, all-optical transmission that transmits an optical signal without changing to an electrical signal has been promoted for the purpose of reducing the cost, simplifying the system, and increasing the transmission rate. In this case, even in a large-scale switch that performs optical path setting, instead of converting light once into electricity and rearranging the transmission path, an all-optical cross-connect that switches the path as it is is used as an optical switch. Become.

  As a switch in the system as described above, for example, a 1 × 2 optical switch as shown in Non-Patent Document 1 is connected in parallel or in a hierarchical manner to form an N × M multi-input / multi-output optical switch. It can be realized by configuring. However, in this case, since the insertion loss increases as the hierarchy increases, there is a problem that it is not suitable for a large-scale optical switch.

  As a large-scale optical switch aimed at reducing insertion loss and downsizing, there is a matrix type optical switch as disclosed in Patent Document 1, for example. This optical switch includes a first layer having a movable micromirror, an optical fiber, and a collimating microlens, a second layer made of a glass substrate, a third layer made of an electromagnetic actuator having a planar microcoil, and a permanent magnet. The fourth layer made of is laminated and integrated.

  In addition, the optical signal of this optical switch (the optical signal incident from the optical fiber, the optical signal reflected by the movable micromirror at the protruding position and incident on the optical fiber, and the movable micromirror at the immersion position are not reflected. All of the optical signals) pass through the collimating microlenses. Therefore, it is collimated in the meantime to reduce the optical signal insertion loss. In addition, this optical switch drives the movable micromirror of the first layer by generating a magnetic field in the microcoil of the electromagnetic actuator of the third layer. Therefore, the optical switch can be miniaturized by integrally stacking the mirror portion and the actuator portion. We are trying to make it.

However, the above optical switch requires three layers in addition to the first layer having the mirror block, and a material cost such as a substrate is required for each layer. The height at which the micromirror moves up and down can be increased by increasing the number of turns of the microcoil of the electromagnetic actuator. However, when the number of turns of the microcoil is increased, there is a problem that the size of the optical switch increases and the size cannot be reduced. On the other hand, when the number of turns of the coil is not increased, the height of the vertical movement of the micromirror is limited, so the micromirror does not move to a position where the insertion loss is sufficiently reduced, and the insertion loss is sufficiently reduced. There is a problem that cannot be achieved.
NTT R & D Vol48 No. 9: 1999 p. 655-673 JP 2002-287048 A

  The present invention has been made to solve the above-described conventional problems, and even when the height of the optical switch is low and flat, the micromirror can be moved up and down to a sufficient height, An object of the present invention is to provide a matrix type optical switch capable of reducing the insertion loss, reducing the size, and reducing the manufacturing cost.

  In order to achieve the above object, a first aspect of the present invention provides a matrix type optical switch that switches an optical path by projecting and retracting a micromirror disposed in an optical path through which an optical signal is transmitted. A mirror block comprising a plurality of micromirrors, an electromagnet block comprising a plurality of electromagnets for driving each of the micromirrors, and a plurality of collimating lenses forming an optical path through which an optical signal is input / output. The block and the collimating lens are arranged on one substrate layer (referred to as the first layer), and the electromagnet block is disposed on the first layer and another substrate layer (referred to as the second layer) having a laminated structure. Thus, a two-layer structure is formed, and each of the collimating lenses is arranged so as to have an axial center in a radial direction with the mirror block as a center. Each of the electromagnets is arranged concentrically around the mirror block, and the movable piece swinging the electromagnet and the micromirror are connected via a rod supported so as to be movable in the vertical direction. When the micromirror is moved by the operation of the electromagnet and the micromirror is in the protruding position, incident light passing through one collimating lens is reflected by the micromirror and collimated in the other direction. When the micromirror is emitted from the lens and in the immersion position, the incident light is emitted from the collimating lens in the same direction without being reflected by the micromirror.

  According to a second aspect of the present invention, the movable piece has a support portion that supports an intermediate portion, and when the one end portion of the movable piece moves up and down, the other end portion of the movable piece is the movable piece. The rod has a first rod and a second rod, and the other end of the first rod and one end of the second rod are movable in the vertical direction. One end of the first rod is fixed to one end of the movable piece, and the other end of the second rod is fixed to the micromirror, and the first rod and the second rod are connected to each other. The distance from the point to the support portion of the movable piece is longer than the distance from the other end portion of the movable piece to the support portion of the movable piece.

  The invention according to claim 3 is provided with a guide block that is positioned below the mirror block and provided with a plurality of through holes, and each of the holes of the guide block extends in a direction directly below each of the micromirrors. And the rod passes through the hole of the guide block and is fixed in a direction directly below the micromirror.

  According to a fourth aspect of the present invention, the first layer and the second layer include a hole for mounting a third rod for connecting the first layer and the second layer, One end of the third rod is inserted into the hole, and the other end of the third rod is inserted into the hole of the second substrate, thereby connecting the first layer and the second layer. is there.

  The invention according to claim 5 is provided with a cap that covers the mirror block from above and protects the micromirror.

  According to a sixth aspect of the present invention, the guide block is formed at a lower portion of the surface on which the mirror block on the first layer is mounted, and the electromagnet block is mounted on a surface opposite to the surface. It is characterized by this.

  According to a seventh aspect of the present invention, the guide block is joined immediately below the mirror block, and each hole of the guide block is located directly below each of the micromirrors.

  In the invention according to claim 8, the first layer also serves as the guide block.

  According to the first aspect of the present invention, the movable piece of the electromagnet swinging and the micromirror are connected via the rod supported so as to be movable in the vertical direction, so that the operation of the electromagnet is directly transmitted to the micromirror. And the micromirror can be sufficiently moved up and down. As a result, the micromirror can be moved to an optically accurate position, and the insertion loss of the optical switch can be reduced. Moreover, since it can be comprised from a total of two layers, a 1st layer and a 2nd layer, size reduction of an optical switch and reduction of manufacturing cost can be aimed at.

  According to the invention of claim 2, the distance from the connecting point of the first rod and the second rod to the support portion of the movable piece is greater than the distance from the other end portion of the movable piece to the support portion of the movable piece. Because it is long, when one end of the movable piece of the electromagnet moves up and down, the connection point between the first rod and the second rod moves up and down more greatly than one end of the movable piece of the electromagnet. For this reason, even when the vertical movement of the movable piece of the electromagnet is small, the micromirror can be moved greatly up and down, so that the height of the optical switch can be reduced and the optical switch can be miniaturized. .

  According to the invention of claim 3, since the second rod penetrating the hole pushes up the micromirror vertically, the micromirror can be reliably moved in the vertical direction. Therefore, the micromirror can be reliably moved to an optically accurate position, and insertion loss can be reduced.

  According to invention of Claim 4, since the 1st layer and the 2nd layer are equipped with the hole which mounts a 3rd rod, the 1st layer and the 2nd layer are inserted by inserting the 3rd rod in each hole. Can be easily connected, so that the assembly process can be reduced, and the manufacturing cost can be reduced.

  According to the invention of claim 5, since the person does not directly touch the micromirror during assembly, the micromirror can be prevented from being damaged.

  According to the invention of claim 6, since the mirror block, the guide block, and the electromagnet block are mounted on the same substrate, the size can be reduced and the manufacturing cost can be reduced. Since the electromagnet block and the electromagnet block are mounted on the same substrate, horizontal position error is small, optically accurate positioning is possible, and insertion loss can be reduced.

  According to the seventh aspect of the present invention, since the position of the guide block with respect to the micromirror does not change, the hole of the guide block can be surely positioned directly below the micromirror, so that the horizontal position error is small and optically Accurate positioning is possible, and insertion loss can be reduced.

  According to the invention of claim 8, since the first layer also serves as the guide block, the guide block is not required. Therefore, the distance between the mirror block and the electromagnet block is reduced, the horizontal position error is small, and optically. Accurate positioning is possible, and insertion loss can be reduced. In addition, since no guide block is required, the size can be reduced and the manufacturing cost can be reduced.

  Hereinafter, an optical switch according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 shows an upper surface of the first layer of the optical switch according to the present embodiment, and FIG. 2 shows a cross section of the optical switch. The optical switch 1 includes, for example, a movable substrate block 11 (first layer) made of an Si substrate, and a fixed substrate block 41 (second plate) made of a printed substrate or a ceramic substrate, for example, below the movable substrate block 11. Layer), each of which is connected by a fixing pin 53 (third rod). On the upper surface of the movable substrate block 11, a movable mirror block unit 20 having a micromirror 21 for switching the optical path of an optical signal, input / output optical fibers 13a to 13f, and fixed pins for mounting fixed pins 53 at four corners. Mounting holes 12a to 12d are provided. An electromagnetic actuator 31 (electromagnet) is mounted on the upper surface of the fixed substrate block 41, and a power feeding unit 32 of the electromagnetic actuator is mounted on the lower surface. As will be described later, the electromagnetic actuator 31 is connected to the micromirrors 21a to 21d through a flat plate 51 (first rod) and a connection pin 52 (second rod) so as to be movable in the vertical direction. The micromirrors 21a to 21d are connected to each other through a guide block 24 formed below the movable mirror block 23. The detailed configuration of each will be described later.

  The optical fibers 13 a to 13 f on the movable substrate block 11 are arranged so as to face the micro mirrors 21 a to 21 d of the movable mirror block unit 20 formed at the center of the movable substrate block 11. The input side optical fiber 13a extends from one side of the peripheral edge of the movable substrate block 11 on a plane passing through the central portions of the micromirrors 21a and 21d, and the input side optical fiber 13b is similarly a micromirror. They are formed in parallel to each other so as to extend on a plane passing through the central portions of 21b and 21c. The optical fiber 13e on the output side 2 is on a plane that passes through the respective central portions of the micromirrors 21d and 21a from the side facing the peripheral side of the movable substrate block 11 on which the input side optical fibers 13a and 13b are installed. Similarly, the optical fibers 13f on the output side 2 are also formed in parallel with each other so as to extend on a plane passing through the central portions of the micromirrors 21c and 21b. The optical fiber 13c on the output side 1 is on a plane that passes through the central portions of the micromirrors 21b and 21a from one side of the periphery of the movable substrate block 11 where the optical fibers on the input side and the output side 2 are not installed. Similarly, the optical fiber 13d on the output side 1 is also formed in parallel with each other so as to extend on a plane passing through the central portions of the micromirrors 21c and 21d.

  The configuration of the movable mirror block unit 20 is shown in FIG. The movable mirror block unit 20 includes a movable mirror block 23, a mirror unit M having a micromirror, and a V groove 25 that holds the collimating lens 22. The movable mirror block 23 is made of, for example, a Si substrate, and the mirror surfaces of the micromirrors 21a to 21d are formed by deeply etching the central portion. The collimating lens 22 is connected to the optical fibers 13a to 13f so as to collimate (converge) the optical signals entering and exiting the optical fiber. Under the collimating lens 22, the peripheral portion of the movable mirror block 23 is anisotropically etched. By doing so, a V-groove is formed. Therefore, the optical signal incident from the input-side optical fiber and the optical signal emitted from the output-side optical fiber pass through the collimator lens 22, so that the insertion loss of the optical switch can be reduced.

  The configuration of the mirror unit M is shown in FIG. The mirror unit M includes a micro mirror 21 formed on the micro mirror base 27 and a support spring 26 formed around the micro mirror 21. The support spring 26 and the micro mirror base 27 are composed of a mirror unit. It is formed by penetrating etching the bottom surface of M. The micromirror 21 is set to an angle at which the optical signal incident from the input-side optical fiber is reflected to the output-side optical fiber. For example, the micromirror 21a receives the optical signal incident from the input-side optical fiber 13a. The angle is set to reflect in the direction of exiting to the optical fiber 13c on the output side 1. The support spring 26 supports the vertical movement of the micromirror 21 by a spring force. Note that the support spring 26 is not limited to a spring, and may be made of elastic plastic or the like.

  Next, the configuration of the fixed substrate block 41 is shown in FIG. On the upper surface of the fixed substrate block 41, electromagnetic actuators 31a to 31d and fixed pin mounting holes 42a to 42d for mounting the fixed pins 53 at the four corners are provided. The plurality of electromagnetic actuators 31 form an electromagnetic actuator block 30 (electromagnet block). The fixed pin mounting holes 42a to 42d and the fixed pin mounting holes 12a to 12d on the movable substrate block 11 are connected by a fixed pin 53. For example, the fixed pin mounting holes 42a to 42d are fixed to the fixed pin mounting holes 12a on the movable substrate block 11. One end of the pin 53 is inserted, and the other end of the fixed pin 53 is inserted into the fixed pin mounting hole 42 a on the fixed substrate block 41. As a result, the fixed substrate block 41 is disposed below the movable substrate block 11, and the optical switch 1 can be easily formed into a two-layer laminated structure. Therefore, since the man-hour at the time of the assembly of the optical switch 1 can be reduced, the manufacturing cost can be reduced.

  The electromagnetic actuators 31 a to 31 d are arranged concentrically from a position perpendicularly intersecting the center of the movable mirror block 23, and the electromagnetic actuators 31 a and 31 c are arranged at positions where the electromagnetic actuators 31 a and 31 c face the diagonal line of the fixed substrate block 41. 31b and 31d are mounted at positions facing diagonal lines different from the above. The configuration of the electromagnetic actuator is shown in FIG. The electromagnetic actuator 31 includes an armature 33 (movable piece) and a support portion 34 that supports the center of the armature 33 inside, and a power feeding portion 32 at the bottom.

  A configuration in which the flat plate 51 and the connection pin 52 are attached to the electromagnetic actuator 31 is shown in FIGS. One end of the amateur 33 and one end of the flat plate 51 are fixed, and the other end of the flat plate 51 and one end of the connection pin 52 are movably connected in the vertical direction. The other end of the connection pin 52 and the micromirror base 27 are connected. Are fixed via a guide block 24. If one end of the amateur 33 that is not connected to the flat plate 51 is P1, the portion where the amateur 33 and the flat plate 51 are connected is P2, and the portion where the flat plate 51 and the connection pin 52 are connected is P3, the flat plate 51 The distance from the connection point P3 with the connection pin 52 to the support portion 34 of the amateur 33 is longer than the distance from one end P1 of the amateur 33 to the support portion 34. FIG. 8A shows a state where the micromirror 21 is in the immersive position, and FIG. 8B shows a state where the micromirror is in the protruding position.

  The configuration of the guide block 24 is shown in FIG. The guide block 24 is formed with a plurality of through holes 28, and the holes 28 are positioned directly below the micromirror 21. The connection pin 52 passes through the hole 28 and is connected to the micromirror base 27. Therefore, since the micromirror 21 is pushed vertically from directly below, the micromirror 21 can be reliably moved in the vertical direction, and insertion loss can be reduced.

  Next, the operation of the optical switch according to the present embodiment configured as described above will be described. Switching of the optical switch 1 between the on state and the off state is performed by controlling power feeding to the power feeding unit 32 of the electromagnetic actuator 31. When power is not supplied, the micromirror 21 is in the immersive position as shown in FIG. At this time, when power is supplied to the power supply unit 32, a magnetic flux is generated in the armature 33, so that an electromagnetic force is generated. One end P1 of the armature 33 is attracted downward by the electromagnetic force, and the center of the armature 33 is centered by the support unit 34. Since it is supported, the other end of the armature 33 is pushed up. For this reason, the flat plate 51 connected to the amateur 33 is pushed up, the connection pin 52 connected to the flat plate 51 is pushed up, and the micromirror base 27 is pushed up. At this time, if the pushing-up force is stronger than the spring force of the support spring 26, the micro mirror 21 moves from the immersion position to the protruding position as shown in FIG. 8B. Thus, the state of the micromirror can be switched from the off state to the on state.

  Next, when the power supply to the power supply unit 32 is stopped, the magnetic flux of the amateur 33 disappears, and the electromagnetic force disappears. And since the force which attracts | sucks the end P1 of the armature 33 is suppressed, the force which pushes up the flat plate 51 is suppressed, The force which pushes up the connection pin 52 connected to the flat plate 51 is suppressed, This connection pin 32 is micromirror base. The force which pushes up the base 27 is suppressed. At this time, if the pushing force becomes weaker than the spring force of the support spring 26, the micro mirror 21 moves from the protruding position to the immersive position by the spring force. Thus, the state of the micromirror can be switched from the on state to the off state.

  As described above, since the center of the armature 33 is supported by the support portion 34, when one end P1 of the armature 33 moves up and down, the other end P2 of the armature 33 moves up and down in the opposite direction. Further, the flat plate 51 connected to the armature 33 also moves in the same direction as the other end P2 of the armature 33. At this time, the vertical movement distance of the one end P1 of the armature 33 and the other end P2 of the armature 33 is the same, but the vertical movement distance of the connecting point P3 between the flat plate 51 and the connecting pin 52 is the same as the length of the flat plate 51. Longer because the ratio is larger. Therefore, even when the vertical movement distance of the one end P1 of the armature 33 is short, the vertical movement distance of the connection point P3 between the flat plate 51 and the connection pin 52 can be increased. Even if the optical switch 1 is flat, The mirror 21 can be sufficiently moved up and down, and the insertion loss can be reduced. In addition, if a lightweight thing is used for the flat plate 51 and the connection pin 52, it is also possible to move the micromirror 21 up and down quickly.

  Next, the operation of the optical signal will be described with reference to FIG. 10 and FIG. FIG. 10 shows a state in which the micromirrors 21a and 21c are in the protruding position and the micromirrors 21b and 21d are in the immersive position. At this time, the optical signal F1 incident from the input-side optical fiber 13a is reflected by the mirror surface of the micromirror 21a and emitted to the output-side 1 optical fiber 13c. Further, the optical signal F2 incident from the input side optical fiber 13b passes through the upper side of the mirror surface of the micromirror 21b, is reflected by the mirror surface of the micromirror 21c, and is emitted to the output side optical fiber 13d. The Thereby, the output side optical fibers 13c and 13d are turned on, and the output side optical fibers 13e and 13f are turned off.

  FIG. 11 shows a state where the micromirrors 21a to 21d are in the immersion position. At this time, the optical signal F1 incident from the input-side optical fiber 13a passes through the upper side of the mirror surface of the micromirrors 21a and 21c, and proceeds straight without being reflected. Therefore, the optical signal F1 is output to the output-side optical fiber 13f. Is done. Further, the optical signal F2 incident from the input side optical fiber 13b passes through the upper side of the mirror surfaces of the micromirrors 21b and 21d, and proceeds straight without being reflected, so that it is emitted to the output side optical fiber 13e. The Thereby, the output side optical fibers 13e and 13f are turned on, and the output side optical fibers 13c and 13d are turned off.

  In addition, optical signals incident from the input-side optical fibers 13a and 13b pass through the collimator lens 22, and also pass through the collimator lens 22 when emitted to the output-side optical fibers 13c to 13f. Head to the optical fiber. Therefore, since the optical signal is collimated (converged) by the collimating lens 22, the insertion loss of the optical switch 1 can be reduced.

  Next, an optical switch according to a second embodiment of the present invention will be described with reference to FIG. 12 and FIG. The optical switch 1 has the same configuration as that of the first embodiment except that a guide cap 29 made of, for example, a glass material is joined to the upper surface of the movable mirror block 23 by, for example, anodic bonding.

  FIG. 13 shows the configuration of the movable mirror block 23 of the optical switch 1 according to this embodiment. A guide cap 29 formed on the movable mirror block 23 is joined to the movable mirror block 23 by pressing the collimating lens 22 against the V groove 25. As a result, the collimating lens 22 can be fixed to the V-groove 25 without using an adhesive or the like. Therefore, the position of the collimating lens 22 is shifted from an optically accurate position due to the thickness of the adhesive or the like. Can be prevented. Therefore, the optical switch according to this embodiment can reduce insertion loss. In addition, since the guide cap 29 covers the micromirrors 21a to 21d, the micromirrors 21a to 21d are not directly touched, and a person can be prevented from damaging the micromirror during assembly.

  In the optical switch according to the present embodiment configured as described above, the power supply to the power supply unit 32 of the electromagnetic actuator 31 is controlled and the on / off state is switched as in the first embodiment. At this time, since the guide cap 29 does not affect the operation of the optical switch 1, the optical switch 1 can perform the same operation as in the first embodiment.

  Next, an optical switch according to a third embodiment of the present invention will be described with reference to FIGS. In this optical switch 1, the electromagnetic actuator 31 is mounted concentrically on a surface opposite to the surface on which the movable mirror block 23 is mounted on the movable substrate block 11 from a position perpendicular to the center of the movable mirror block 23. The optical switch is the same as the optical switch according to the first embodiment except that the fixed substrate block and the fixed pins are not provided. As a result, the optical switch can be miniaturized and the manufacturing cost can be reduced. In addition, since the movable mirror block 23 and the electromagnetic actuator 31 are mounted on the same substrate, there is little error in the horizontal position due to the horizontal displacement between the movable substrate block and the fixed substrate block, and the optical accuracy is high. Positioning is possible and insertion loss can be reduced.

  Further, as shown in FIG. 15, the connection configuration between the armature 33 and the micromirror 21 of the optical switch according to the present embodiment is such that one end of the flat plate 51 is connected to the lower surface of one end of the armature 33 of the electromagnetic actuator 31. These are the same as those of the optical switch according to the first embodiment. FIG. 15A shows a state in which the micromirror 21 is in the immersive position, and FIG. 15B shows a case in which the micromirror 21 is in the protruding position.

  The operation of the optical switch according to this embodiment configured as described above will be described. The switching between the on state and the off state of the optical switch 1 is performed by controlling power feeding to the power feeding unit 32 of the electromagnetic actuator 31 as in the optical switch according to the first embodiment. When power is not supplied, the micromirror 21 is in the immersion position as shown in FIG. At this time, when power is supplied to the power supply unit 32, magnetic flux is generated in the armature 33, and one end P1 of the armature 33 is attracted downward. Thus, as in the first embodiment, the micromirror 21 is configured as shown in FIG. As shown in b), it moves from the immersive position to the protruding position. Further, when the power supply to the power supply unit 32 is stopped, the force for attracting the one end P1 of the armature 33 is suppressed as in the first embodiment, so that the micromirror 21 moves from the protruding position to the immersive position. Therefore, the operation of the micromirror of the optical switch 1 according to this embodiment is the same as that of the first embodiment.

  Next, an optical switch according to a fourth embodiment of the present invention will be described with reference to FIG. The optical switch 1 has the same configuration as that of the third embodiment except that a guide block 24 made of, for example, a glass material is joined to the lower surface of the movable mirror block 23 by, for example, anodic bonding. As a result, the hole 28 of the guide block 24 can be surely positioned directly below the micromirror 21, so that the error in the horizontal position due to the horizontal displacement of the guide block 24 is reduced, and optically accurate positioning is achieved. And insertion loss can be reduced

  In the optical switch according to the present embodiment configured as described above, the power supply to the power supply unit 32 of the electromagnetic actuator 31 is controlled and the on / off state is switched as in the third embodiment. At this time, since the joining of the guide block 24 and the movable mirror block 23 does not affect the operation of the optical switch 1, the optical switch 1 can obtain the same operation as in the third embodiment.

  Next, an optical switch according to a fifth embodiment of the present invention will be described with reference to FIG. The optical switch 1 is the same as the optical switch according to the fourth embodiment except that the movable substrate block 11 also serves as a guide block. The movable substrate block 11 includes a guide according to the fourth embodiment. Similar to the block, a plurality of through holes (not shown) are formed. Further, this hole is located directly below the micromirror 21, and the connection pin 52 passes through this hole and is connected to a micromirror base (not shown). For this reason, the distance between the micro mirror 21 of the movable mirror block 23 and the armature 33 of the electromagnetic actuator 31 is short, and since they are mounted on the same substrate, the horizontal position error is reduced and the optical accuracy is high. Positioning is possible and insertion loss can be reduced. In addition, since no guide block is required, the size can be reduced and the manufacturing cost can be reduced. When the movable substrate block 11 is made of, for example, a glass material and the movable substrate block 23 is bonded to the upper surface of the movable substrate block 11 by, for example, anodic bonding, the movable substrate block 11 and the movable substrate block 23 The horizontal position error due to the horizontal displacement can be reduced, and optically accurate positioning can be performed, and the insertion loss can be reduced. In the present embodiment, the movable substrate block 11 also serves as the guide block. However, the guide block may also serve as the movable substrate block 11.

  In the optical switch according to the present embodiment configured as described above, the on / off state is switched by controlling the power feeding to the power feeding unit 32 of the electromagnetic actuator 31 as in the fourth embodiment. At this time, since the movable substrate block 11 also serving as the guide block does not affect the operation of the optical switch 1, the optical switch 1 can perform the same operation as in the fourth embodiment.

  The present invention is not limited to the configuration of each of the embodiments described above, and various modifications can be made without departing from the spirit of the invention. For example, the flat plate 51 is connected to one end of the armature 33 even when the support portion 34 that supports the amateur 33 is not disposed at the center but at any position in the middle portion. When the distance from the connecting point P3 to the support portion 34 of the amateur 33 is longer than the distance from one end of the amateur 33 to the support portion 34, the same effect as in the present invention is produced. Therefore, even when the vertical movement distance of one end of the amateur is short, the vertical movement distance of the micromirror can be increased.

  Each of the above embodiments is an example of a two-input two-output (2 × 2) optical switch. However, the present invention is not limited to this, and the present invention is applied to an optical switch having three or more inputs and three or more outputs. Can also be applied. Moreover, although the plane of the movable substrate block 11 and the fixed substrate block 41 of each of the above-described embodiments has been shown to be rectangular, it is not limited to this, and may be a square, other polygons, a circle, or the like. I do not care.

1 is a top view of an optical switch according to a first embodiment of the present invention. Sectional drawing of the AA line of the optical switch same as the above. The perspective view of the movable mirror block of an optical switch same as the above. The perspective view of the micromirror unit of an optical switch same as the above. The figure which shows the fixed board | substrate block of an optical switch same as the above. (A) is a top view of the electromagnetic actuator of the optical switch same as the above, (b) is a side view. Top view after attaching the connection block to the electromagnetic actuator of the optical switch (A) is a schematic sectional drawing of a structure in case the micromirror of an optical switch same as the above exists in an immersion position, (b) is a schematic sectional drawing of a structure in the case of being in a protrusion position. The figure which shows the guide block of an optical switch same as the above. The inclination figure explaining the operation state of an optical switch same as the above. The inclination figure explaining the operation state of an optical switch same as the above. Sectional drawing of the optical switch which concerns on the 2nd Embodiment of this invention. The side view of the movable mirror block of an optical switch same as the above. Sectional drawing of the optical switch which concerns on the 3rd Embodiment of this invention. (A) is a schematic sectional drawing of a structure in case the micromirror of an optical switch same as the above exists in an immersion position, (b) is a schematic sectional drawing of a structure in the case of being in a protrusion position. Sectional drawing of the optical switch which concerns on the 4th Embodiment of this invention. Sectional drawing of the optical switch which concerns on the 5th Embodiment of this invention.

Explanation of symbols

1 optical switch 11 movable substrate block (first layer)
12 Fixing pin mounting hole (hole for mounting the third rod)
13a Optical fiber 21 Micro mirror 22 Collimating lens 23 Movable mirror block (mirror block)
24 Guide Block 25 V Groove 26 Support Spring 27 Micromirror Base 28 Hole 29 Guide Cap (Cap)
30 Electromagnetic actuator block (electromagnet block)
31 Electromagnetic actuator (electromagnet)
32 Feeder 33 Amateur (movable piece)
34 Supporting part 41 Fixed substrate block (second layer)
42 Fixing pin mounting hole (hole for mounting the third rod)
51 Flat plate (first rod)
52 pin (second rod)
53 Fixing pin (third rod)

Claims (8)

In the matrix type optical switch that switches the optical path by making the micromirrors arranged in the optical path where the optical signal is transmitted appear and disappear,
A mirror block composed of a plurality of micromirrors movable in the vertical direction;
An electromagnet block comprising a plurality of electromagnets for driving each of the micromirrors;
A plurality of collimating lenses that form an optical path through which optical signals are input and output, and
The mirror block and the collimating lens are disposed on one substrate layer (referred to as a first layer), and the electromagnet block is disposed on another substrate layer (referred to as a second layer) having a laminated structure with the first layer. Arranged in a two-layer laminated structure,
Centering on the mirror block, each of the collimating lenses is arranged to have an axial center in a radial direction,
Each of the electromagnets is arranged concentrically around the mirror block,
The movable piece that the electromagnet swings and the micromirror are connected via a rod that is supported so as to be movable in the vertical direction,
When the micro-mirror is moved by the operation of the electromagnet and the micro-mirror is at the protruding position, incident light passing through one collimating lens is reflected by the micro-mirror and emitted from the collimating lens in the other direction. The optical switch is characterized in that when the micromirror is in the immersion position, the incident light is emitted from the collimating lens in the same direction without being reflected by the micromirror. The movable piece has a support portion supported by an intermediate portion;
When one end of the movable piece moves up and down, the other end of the movable piece moves up and down in the direction opposite to the one end of the movable piece,
The rod has a first rod and a second rod;
The other end of the first rod and the one end of the second rod are connected to be movable in the vertical direction,
One end of the first rod is fixed to one end of the movable piece, and the other end of the second rod is fixed to the micromirror.
The distance from the connection point of the first rod and the second rod to the support portion of the movable piece is longer than the distance from the other end portion of the movable piece to the support portion of the movable piece, The optical switch according to claim 1. Located below the mirror block, comprising a guide block provided with a plurality of through holes,
Each of the holes of the guide block is located directly below each of the micromirrors,
The optical switch according to claim 1, wherein the rod passes through a hole of the guide block and is fixed in a direction directly below the micromirror. The first layer and the second layer include a hole for mounting a third rod for connecting the first layer and the second layer;
One end of the third rod is inserted into the hole of the first layer, and the other end of the third rod is inserted into the hole of the second substrate, thereby connecting the first layer and the second layer. The optical switch according to claim 1, wherein:   The optical switch according to claim 1, further comprising a cap that covers the mirror block from above and protects the micromirror.   4. The guide block according to claim 3, wherein the guide block is formed at a lower portion of the surface on the first layer where the mirror block is mounted, and the electromagnet block is mounted on a surface opposite to the surface. The optical switch described. The guide block is joined directly under the mirror block,
4. The optical switch according to claim 3, wherein each of the holes of the guide block is located immediately below each of the micromirrors. The optical switch according to claim 6, wherein the first layer also serves as the guide block.

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