JP2007092959A - Compound fluid control unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a structure capable of positively removing air bubbles in supply fluid and preventing supply fluid from remaining in a flow passage. <P>SOLUTION: A compound fluid control unit 10 having a valve 20 for supply, a valve 30 for discharge, a valve 40 for washing, and a valve 50 for purging is constituted. In this case, this compound fluid control unit 10 has a flow passage block 11 forming a valve seat of each valve, an output port 15 and an air exhaust port 16 are provided at a lower end and an upper end of the flow passage block 11, respectively, a first flow passage 12 provided in the flow passage block 11 passes through a valve chamber 24 of the valve 20 for supply, the valve 30 for discharge is provided in the front of the valve 20 for supply, a second flow passage 13 communicates the valve chamber 24 of the valve for supply with a valve chamber 34 of the valve for discharge, the valve 50 for purging is provided in the front of the valve 40 for washing, and a third flow passage 14 for communicating a valve chamber 44 of the valve for washing with a valve chamber 54 of the valve for purging is provided by crossing the first flow passage 12. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a composite valve that can suppress the generation of particles, improve cleaning properties, eliminate liquid retention, and suppress the inclusion of bubbles when supplying a high-purity fluid in a semiconductor manufacturing process.

In the semiconductor manufacturing process, it is not uncommon to manufacture products using high-purity fluid. In particular, ultrapure water is frequently used.
Ultrapure water is water from which electrolytes, microorganisms, solid fine particles, organic substances, and the like have been removed, and is mainly used in a cleaning process in a semiconductor manufacturing process. In recent years, it is also used in a technique used in an exposure process called immersion exposure.
In this immersion exposure technique, by filling ultrapure water between the silicon wafer and the projection lens, the resolution can be increased as compared with dry exposure. This is because the refractive index of water is higher than the refractive index of air, thereby producing a lens effect. In order to use water as a lens, it is required that impurities are not included.
Thus, as the semiconductor manufacturing process is required to be miniaturized, high-purity ultrapure water is required, and facilities for supplying ultrapure water are regarded as important.

When supplying the generated ultrapure water, it is necessary not to generate particles in the supply path, and a material with less elution such as PTFE is used so as not to elute metal ions and the like.
In addition, in the semiconductor manufacturing process, it is necessary to supply a liquid with a high purity requirement in addition to water. If there are factors that generate particles in the supply flow path or residual chemicals, the liquid is being supplied. However, there is a problem that the purity of the liquid is lowered.
Therefore, it is necessary to regularly clean the inside of the flow path by purging with an inert gas such as N ₂ and then cleaning.
Further, highly corrosive liquids such as hydrochloric acid, hydrofluoric acid, phosphoric acid, and ammonia are often used. Such a liquid is harmful because it is highly corrosive, and it is necessary to clean the inside of the flow path completely before performing a work such as removing the valve during maintenance.

Among such problems, Patent Document 1 discloses a method for cleaning valves.
FIG. 14 shows a cross-sectional view of the chemical valve of Patent Document 1.
The chemical valve disclosed in Patent Document 1 includes an output channel space 114 formed in the vicinity of the output side of the input channel 118, a pure water channel 126, an output channel space 114, and a pure water input port. A pure water passage 126 communicating with 127 and a pure water valve seat 128 provided in the middle of the pure water passage 126 are formed in a central block 111 which is a valve body block.
Further, since the pure water valve main body 129 is brought into contact with or separated from the pure water valve seat 128, the pure water flows directly into the output flow path space 114 from the pure water valve.
The diaphragm valve 115 in the output flow path space 114 is cylindrical and abuts against the valve seat 117 to block the flow of the chemical solution from the input flow path 118 to the output path 116.

When the chemical solution is used, the chemical solution is supplied from the output path 116 connected to the output flow path space 114 while the diaphragm valve 115 is separated from the valve seat 117, and the chemical liquid flows to the input flow path 118 side.
During maintenance, the diaphragm valve 115 is brought into contact with the valve seat 117, and the pure water is supplied from the pure water valve seat 128 in a state where the pure water valve main body 129 is separated from the pure water valve seat 128. Pure water is discharged from the output path 116 through the output flow path space 114.
By flowing the pure water in this way, the chemical liquid remaining in the output flow path space 114 is washed away, so that the chemical liquid remaining in the chemical valve 101 can be quickly washed away. In addition, since the diaphragm valve 115 has a cylindrical shape, a decrease in the kinetic energy of pure water flowing from the pure water passage 126 can be minimized, and the chemical solution remaining on the downstream pipe wall can be removed in a short time. Can be washed away.
Furthermore, since the pure water passage 126, the pure water valve seat 128, and the pure water input port 127 are formed in the central block 111, the size of the chemical valve can be made compact compared to the conventional chemical valve. it can.

As described above, in the chemical valve disclosed in Patent Document 1, the pure water flow path 126 to the output path 116 via the output flow path space 114 are arranged in a straight line, and the valve seat 117 that is an obstacle on the way is also provided. Since it has a cylindrical shape, the decrease in kinetic energy during washing is minimized so that the inside of the pipe downstream of the pure water input port 127 can be washed away without loss.
As a result, the amount of cleaning pure water used is reduced and the chemical valve itself is made compact.
JP 2001-149844 A

However, the prior art has the following problems.
(1) When the liquid is transferred by a pump or tank used in a semiconductor manufacturing line or a liquid crystal manufacturing line, particularly a metering pump that transfers a small amount of liquid such as a reciprocating pump, air is introduced into the fluid on the suction port side or the like. There is a problem that bubbles are transferred as they are mixed into the fluid as they are on the secondary side (hereinafter simply referred to as the secondary side) that is the outlet of the piping system.
When transferring the resist in the photo process of the semiconductor manufacturing line, if the bubbles are transferred to the discharge port to the secondary side in a state where the bubbles are mixed in the fluid as they are, they remain as bubbles on the wafer etc. Will occur. In particular, this phenomenon is likely to be a problem when a highly viscous liquid is transferred because bubbles are difficult to escape.
In addition, the ultrapure water used in the above-described immersion exposure technique is not useful as a lens if there is even a small amount of air bubbles inside because the water itself becomes a lens.
Therefore, when bubbles are generated in the liquid as described above, there is a problem that if the bubbles are not removed from the liquid before being discharged from the secondary-side discharge port, the product may be defective.

In addition, about this problem, the solution for extracting a bubble is shown to invention described in Japanese Patent Application No. 2004-336517 for which this applicant applied previously.
The contents are that the air bubbles in the fluid valve are easy to escape, the discharge port is on the bottom, the air vent port is on the top, and the air bubbles are collected in the air vent port on the upper side. .
According to this method, since the bubbles are lighter than the liquid, the bubbles gather upward and air can be extracted from the air vent port.

(2) In addition to the above problem (1), there is a problem that when the ultrapure water stays and the time passes, the bacteria grow and are no longer ultrapure water. Therefore, it is desirable to keep the ultrapure water always flowing even when supply is not necessary.
Also, depending on the liquid to be supplied, it may be solidified due to retention, and in liquid that requires severe temperature control, temperature unevenness occurs due to retention and temperature control becomes impossible. It can also be considered.
However, in the method of Patent Document 1, when the supply is stopped, the diaphragm valve 115 is brought into contact with the valve seat 117 to shut off the flow path, so that the fluid to be supplied to the output flow path space 114 is not supplied. It will stay.
That is, when the supply fluid stays in the flow path, problems such as generation of bacteria, solidification of liquid, and temperature change occur. This problem is not solved even in the invention described in Japanese Patent Application No. 2004-336517.

  That is, in the prior art, as described above, in supplying high-purity fluid or the like in the semiconductor manufacturing process, bubbles are mixed in the supply fluid or the supply fluid stays in the flow path. There has been a problem that the manufacturing apparatus to which the supply fluid is supplied leads to product defects.

  Accordingly, the present invention has been made to solve such a problem, and the invention described in Japanese Patent Application No. 2004-336517 is further developed to reliably remove bubbles in the supply fluid, and to supply fluid. An object of the present invention is to provide a composite fluid control unit capable of realizing a structure that does not stay in the flow path.

In order to achieve the above object, the composite fluid control unit of the present invention has the following characteristics.
(1) A composite fluid control unit having a first supply valve for communicating or blocking a flow of a supply fluid from an input port, and a second discharge valve for communicating the supply fluid to a discharge port during drainage. The flow path block is formed with valve seats for the first supply valve and the second discharge valve, and an output port for the supply fluid is provided at the lower end of the flow path block. An air vent port is provided at the upper end of the path block, and a first flow path is provided in the flow path block for communicating the output port and the air vent port. The first flow path is used for the supply. The discharge second valve is provided at the same height as the supply first valve through the valve chamber of the first valve, and the second flow path is formed between the valve chamber of the supply first valve and the discharge. Through the valve chamber of the second valve And at least one third valve for communicating, adjusting or blocking the flow of the fluid in the first flow path is provided above the first supply valve and the second discharge valve. The valve block is provided with a valve seat for the third valve, and is connected to the first flow path.

The term “integrated flow path block” as used herein refers to a block that is molded from a resin such as PTFE and the flow path is processed by cutting or the like. However, since it may be finally integrated, it may be integrally assembled by a method such as adhesion, welding, or mechanical joining after being divided and manufactured. In addition, it is desirable that the first flow path provided in the interior is formed so that the output port and the air vent port are linearly formed.
In addition, the “valve chamber” here refers to a space surrounded by the inner wall of the valve and the valve body and through which fluid flows. For example, in the case of a diaphragm valve, it is a room in which the diaphragm valve body moves up and down, and indicates a portion composed of a diaphragm valve body, a diaphragm membrane, and a diaphragm inner wall. In the present invention, the valve chamber is formed integrally with the flow path block like the valve seat.

In addition, the “same height” here means that, for example, the supply valve is a diaphragm valve, and the first flow path and the supply valve valve body are orthogonal to the side surface of the substantially rectangular flow path block. If attached, it means that the discharge valve is attached at a position opposite to the supply valve, or attached at a position shifted by 90 degrees from the supply valve. The second flow path is desirably provided in the shortest in terms of preventing retention, and the third flow path is preferably provided in the shortest time in order to increase the cleaning efficiency. In this sense, it is desirable that the supply valve and the discharge valve, the cleaning valve and the purge valve are brought to the same height, and the second flow path and the third flow path are provided linearly.
In addition, the “third valve” referred to here is an accompanying valve provided in the flow path, for example, a valve such as a cleaning valve, a purge valve, or a suction valve used during maintenance. . Such a valve is “provided with at least one”, and a corresponding “valve seat of the third valve” is provided in the flow path block. Therefore, the configuration may be such that not only one third valve but also a required number are provided above the supply valve and the discharge valve.

(2) In the composite fluid control unit according to (1), the third valve includes a cleaning valve for supplying a cleaning fluid at the time of cleaning, a purge valve for supplying a purge fluid at the time of liquid discharge, and the above-mentioned at the time of liquid suction. It is at least one of the suction valves for sucking the supply fluid or the cleaning fluid.
Here, “at least one” corresponds to “provided at least one third valve” in (1). For example, the first valve for supply and the first discharge valve Two valves, the third valve, the cleaning valve and the purge valve, or the three valves, the cleaning valve, the purge valve, and the suction valve, are provided above the two valves. This means that a plurality of configurations may be provided in various combinations.

(3) In the composite fluid control unit according to (1) or (2), the supply fluid supplied from the input port is opened by opening the first supply valve and closing the second discharge valve. Supply to the output port side, close the first supply valve, open the second discharge valve, discharge to the discharge port side, switch the switch, the supply fluid always flows It is characterized by maintaining the state.

(4) The composite fluid control unit according to any one of (1) to (3), further including a suck back valve that prevents dripping, wherein the suck back valve includes the first valve for supply and the discharge. It is provided above the second valve for use and below the third valve, and the first flow path penetrates the valve chamber of the suck back valve.
Here, the suck back valve has a drive unit, a diaphragm valve body connected to the drive unit, a valve membrane formed integrally with the diaphragm valve body, and a valve chamber, and the diaphragm valve body operates. This is a valve in which the volume of the valve chamber of the suck-back valve changes, and does not have a function of blocking the flow of fluid passing through the valve. Therefore, when the diaphragm valve body of the suck back valve operates to the retracted end, the volume of the valve chamber of the suck back valve increases, pulling the liquid in the flow path ahead of the suck back valve, By pulling back the fluid, the valve can prevent dripping from the tip of the pipe connected to the suck back valve.

(5) In the composite fluid control unit described in any one of (1) to (4), the supply first valve is a membrane open / close valve using a diaphragm type actuator, It is characterized in that the opening and closing speed is reduced to reduce particles generated during opening and closing.
As used herein, the membrane-type opening / closing valve uses a diaphragm membrane for the air drive type valve drive unit, thereby reducing the sliding resistance of the valve drive unit and reducing the slide resistance of the valve drive unit, A valve that can respond sensitively to changes in air pressure required for operation and facilitates adjustment of the valve's operating speed.

(6) In the composite fluid control unit described in any one of (1) to (5), the supply exhausted from the air vent port by providing an open / close valve with a flow rate adjustment in the air vent port. The fluid flow rate can be adjusted.
(7) In the composite fluid control unit described in (6), the opening / closing function and the flow adjustment function of the opening / closing valve with flow adjustment are separated, and the flow adjustment function is provided on the opening / closing valve having the opening / closing function. A minute flow rate adjusting valve having

(8) In a composite fluid control unit having a first supply / discharge valve that switches the supply fluid flow from the input port to supply and discharge, the first supply / discharge channel is formed in the integrally formed flow path block. A valve seat is formed, an output port for the supply fluid is provided at the lower end of the flow path block, an air vent port is provided at the upper end of the flow path block, and the output is provided in the flow path block. A first flow path that communicates the port and the air vent port, and a valve chamber of a supply section and a valve chamber of the discharge section provided in the first supply / discharge first valve are communicated by a second flow path; A first flow path passes through the valve chamber of the supply section of the first supply / discharge valve, and a second valve for communicating, adjusting, or blocking the flow of the fluid in the first flow path is the first supply / discharge first valve. At least one on top of the valve Valve seat of the fluid valve is provided in the flow path block, characterized in that it is connected to the first flow path.

  Here, the first supply / discharge valve refers to a three-way valve having the functions of both the first supply valve and the second drainage valve described in (1). It consists of two parts. The supply valve body in the supply section and the discharge valve body in the discharge section are interlocked, and when the supply valve body in the supply section is separated from the valve seat of the supply section, The discharge flight pair is in contact with the valve seat of the discharge portion. By interlocking in this way, only one drive part of the supply / discharge first valve is required.

With the composite fluid control unit of the present invention having such characteristics, the following actions and effects can be obtained.
(1) A composite fluid control unit having a first supply valve for communicating or blocking a flow of a supply fluid from an input port, and a second discharge valve for communicating the supply fluid to a discharge port during drainage. The flow path block is formed with valve seats for the first supply valve and the second discharge valve, and an output port for the supply fluid is provided at the lower end of the flow path block. An air vent port is provided at the upper end of the path block, and a first flow path is provided in the flow path block for communicating the output port and the air vent port. The first flow path is used for the supply. The discharge second valve is provided at the same height as the supply first valve through the valve chamber of the first valve, and the second flow path is formed between the valve chamber of the supply first valve and the discharge. Through the valve chamber of the second valve And at least one third valve for communicating, adjusting or blocking the flow of the fluid in the first flow path is provided above the first supply valve and the second discharge valve. Since the valve block is provided with the valve seat of the third valve and connected to the first flow path, bubbles in the fluid supplied by the composite fluid control unit are discharged from the air vent port. Since the functions of the plurality of valves are integrated into the block in an integrated and compact manner, it is possible to save space.

Among these, the point that the gas in the supply fluid can be discharged from the air vent port is realized by providing the air vent port in the upper part of the flow path block and providing the output port in the lower part.
Since the bubbles mixed in the supply fluid have a specific gravity lighter than that of the liquid, they gather on the upper side of the supply valve valve chamber when passing through the supply valve valve chamber.
A first flow path passes through the supply valve valve chamber and is connected to an air vent port on the upper side of the valve chamber and to an output port on the lower side of the valve chamber. Accordingly, the bubbles gathered on the upper side of the supply valve valve chamber are pushed away by the supply fluid supplied later, and are discharged together with the fluid to the air vent port side. On the other hand, the supply fluid from which the bubbles are separated is guided downward and output from the output port.

Further, by bringing the third valve to the upper part of the supply valve and the discharge valve, it is possible to efficiently perform cleaning, purging, suction, and the like. It is possible to wash away all necessary portions in one flow path with the cleaning fluid.
If the unit is configured with the same function by connecting the valve with a joint and a tube, the cleaning fluid does not flow into the connected part such as the connection from the supply valve, etc. A part is made. However, as in the configuration described in (1), the cleaning valve arranged as a third valve and disposed as the third valve is provided with a supply valve in which the first flow path passes through the valve chamber, and an upper portion of the discharge valve. In this way, the parts that cannot be cleaned can be eliminated.

Also, regarding the point that the functions of multiple valves can be integrated into the flow path block in an integrated and compact manner, it has been traditionally attempted to reduce the size by using multiple valves as manifolds. Thus, by providing the input port, the first supply valve for supplying and shutting off the supply fluid, and the output port, it is possible to achieve an unprecedented effect that makes it possible to arrange the supply flow path in the shortest time.
In addition, by arranging the flow path for the supply fluid in the shortest possible and integrating it into one unit, it is possible to reduce the size and simplify the internal structure as much as possible, generating particles, elution from the base material, liquid Factors that adversely affect the supply fluid, such as pools, can be minimized.

(2) In the composite fluid control unit according to (1), the third valve includes a cleaning valve for supplying a cleaning fluid at the time of cleaning, a purge valve for supplying a purge fluid at the time of liquid discharge, and the above-mentioned at the time of liquid suction. Since it is at least one of suction valves for sucking the supply fluid or the cleaning fluid, at least one of the cleaning valve, the purge valve, and the suction valve Thus, the supply valve and the discharge valve can be compactly combined into the flow path block, and the cleaning and purging efficiency in the flow path is improved.

(3) In the composite fluid control unit according to (1) or (2), the supply fluid supplied from the input port is opened by opening the first supply valve and closing the second discharge valve. Supply to the output port side, close the first supply valve, open the second discharge valve, discharge to the discharge port side, switch the switch, the supply fluid always flows Since the state is maintained, the fluid supplied from the input port is prevented from staying in the flow path, and an excellent effect of preventing a change in the temperature of the fluid is obtained.
By supplying fluid constantly, for example, when supplying ultrapure water, etc., to prevent the growth of bacteria generated by staying inside, or when supplying fluid that is easy to coagulate, It is possible to prevent the solidification caused by staying inside.
In addition, regarding temperature changes, if the temperature control device is provided outside the composite fluid control unit, there is an adverse effect such as the temperature rising locally if the fluid flow is lost. Can be prevented.

(4) The composite fluid control unit according to any one of (1) to (3), further including a suck back valve that prevents dripping, wherein the suck back valve includes the first valve for supply and the discharge. When the supply valve is closed, the first flow passage is provided above the second valve for use and at the lower part of the third valve and passes through the valve chamber of the suck back valve. Therefore, it is possible to prevent so-called dropping of a pipe or the like connected to the tip of the output port or a drop of liquid supplied from the tip of the apparatus to the supply destination.
In the semiconductor manufacturing process, particularly when it is desired to accurately control the amount of the chemical solution to be supplied or when it is directly applied to a silicon wafer, the quality of the product is often affected by the dropping of drops. Therefore, the function of preventing the dropping of the pot by providing the suck back valve in this way is effective.

(5) In the composite fluid control unit described in any one of (1) to (4), the supply first valve is a membrane open / close valve using a diaphragm type actuator, Membrane type open / close valves using diaphragm type actuators respond more to open / close valves using spring type actuators by reducing the opening / closing speed and reducing particles generated during opening and closing. Excellent characteristics make it possible to reduce the valve opening / closing speed in an area where the spring type is not possible with the spring type, minimizing particles generated when the valve opens and closes due to the decrease in valve opening / closing speed. It has an excellent effect of preventing particles from entering the fluid to be supplied. .

(6) In the composite fluid control unit described in any one of (1) to (5), the supply exhausted from the air vent port by providing an open / close valve with a flow rate adjustment in the air vent port. Since the flow rate of the fluid can be adjusted, it is possible to reduce the amount of fluid discharged from the air vent port.
The fluid discharged from the air vent port is in a state where air bubbles are mixed. If the supply fluid is ultra pure water, the air bubbles are mixed and go through multiple paths, so it is not ultra pure water. It cannot be used as ultrapure water. In addition, even a fluid that easily solidifies or a liquid whose concentration control is severe cannot be used as it is. Accordingly, it is possible to reduce the cost by providing a function for minimizing the amount of such ultrapure water to be discharged.

(7) In the composite fluid control unit described in (6), the opening / closing function and the flow adjustment function of the opening / closing valve with flow adjustment are separated, and the flow adjustment function is provided on the opening / closing valve having the opening / closing function. It is characterized by having a micro flow rate adjusting valve having a so that an excellent effect that the micro flow rate can be adjusted accurately is obtained.
The opening / closing valve and the flow rate adjusting valve cannot perform the same function with a single valve under the minute flow rate adjustment.
This is because if the opening / closing function is a diaphragm type, the diaphragm valve body shuts off the fluid by contacting the diaphragm valve seat, but in order to obtain a sealing force, the diaphragm valve body is at a constant pressure. There is a need to press against the valve seat. This is because if this force is weak, leakage will occur and blocking will not be performed completely.
However, since the pressure is applied in this way, there is a possibility that the valve body is deformed even after a small amount after being shut off. If the diaphragm valve body and the diaphragm valve seat are separated from each other, this deformation is gradually restored, but in order to accompany such a deformation, the separation distance between the diaphragm valve body and the diaphragm valve seat in a strict sense is set. It is difficult to make it constant. Therefore, when fine adjustment is required, it is desirable to separate the open / close valve and the fine flow rate adjustment valve as in the configuration of (7).

(8) In a composite fluid control unit having a first supply / discharge valve that switches the supply fluid flow from the input port to supply and discharge, the first supply / discharge channel is formed in the integrally formed flow path block. A valve seat is formed, an output port for the supply fluid is provided at the lower end of the flow path block, an air vent port is provided at the upper end of the flow path block, and the output is provided in the flow path block. A first flow path that communicates the port and the air vent port, and a valve chamber of a supply section and a valve chamber of the discharge section provided in the first supply / discharge first valve are communicated by a second flow path; A first flow path passes through the valve chamber of the supply section of the first supply / discharge valve, and a second valve for communicating, adjusting, or blocking the flow of the fluid in the first flow path is the first supply / discharge first valve. At least one is provided on the top of the valve Since the flow path block is provided with a valve seat for the fluid valve and is connected to the first flow path, air bubbles supplied from the composite fluid control unit are removed from the air vent port. Since the functions of multiple valves can be integrated into a block in a compact and compact manner, it is possible to save space and reduce the number of valves. Can be realized.

  Since the supply function and the discharge function are often not used at the same time, when the supply function is used, a three-way valve can be substituted to stop the discharge function. Therefore, the number of valves can be reduced by using a three-way valve as the first supply / discharge valve and not draining at the time of supply. As a result, control air and solenoid valves can be reduced, which is effective in reducing initial costs and running costs.

Embodiments of the present invention will be described below with reference to the drawings. First, the configuration of the first embodiment will be described.
(First embodiment)
FIG. 1 shows a sectional view of a composite fluid control unit used in the semiconductor manufacturing process of the first embodiment. 2 shows the AA cross section of FIG. 1, and FIG. 3 shows the BB cross section of FIG.
The composite fluid control unit 10 of the first embodiment is composed of four valves, a flow path block 11, a supply valve 20, a discharge valve 30, a cleaning valve 40, and a purge valve 50, and is assembled integrally. It has been.
The flow path block 11 is made of a block made of a material having high corrosion resistance such as PTFE, and has valve seat portions for the supply valve 20, the discharge valve 30, the cleaning valve 40, and the purge valve 50. .
An output port 15 is provided at the lower end of the flow path block 11, and an air vent port 16 is provided at the upper end, and a first flow that communicates the output port 15 and the air vent port 16 in the flow path block 11. A path 12 is formed. The first flow path 12 is connected to the supply valve 20, the discharge valve 30, the cleaning valve 40, and the purge valve 50.

The supply valve 20 shown in FIG. 2 is a diaphragm valve that communicates or blocks the fluid input from the input port 21.
The supply valve 20 is provided with a supply diaphragm valve body 23, and the supply diaphragm valve body 23 comes into contact with the supply valve seat portion 22 formed in the flow path block 11, thereby flowing from the input port 21. The supply fluid 17 flows into the supply valve valve chamber 24 by shutting off and separating the supply fluid 17.
The supply valve valve chamber 24 is provided in the flow path block 11 with the first flow path 12 passing therethrough. The shape of the supply valve valve chamber 24 is substantially cylindrical, and the supply diaphragm valve body 23 is located in the center portion thereof.
Since the supply valve 20 is an air drive type, the supply valve operation port 25 is provided. When air is supplied to the supply valve operation port 25, the supply diaphragm valve body 23 is supplied to the supply valve seat portion 22. Separate from. The supply valve 20 shown in FIG. 2 is a normally closed type, but can be replaced with a normally open type or a double acting type as required.
The supply valve 20 functions as a valve by being assembled integrally with the flow path block 11.

The discharge valve 30 shown in FIG. 2 is a diaphragm valve for discharging a fluid to the discharge port 31.
The discharge valve 30 is provided with a discharge diaphragm valve body 33, and the discharge diaphragm valve body 33 comes into contact with the discharge valve seat portion 32 formed in the flow path block 11 to discharge to the discharge port 31. By shutting off and separating the fluid, the fluid flows into the discharge valve valve chamber 34 and drains into the discharge port 31.
The discharge valve 30 is provided with a drainage adjustment knob 36, whereby the stroke of the discharge diaphragm valve element 33 is adjusted, and the amount of drainage can be adjusted.
The discharge valve valve chamber 34 of the discharge valve 30 and the supply valve valve chamber 24 are communicated with each other through the second flow path 13.
Since the discharge valve 30 is an air-driven type, the discharge valve operation port 35 is provided. When air is supplied to the discharge valve operation port 35, the discharge diaphragm valve body 33 becomes the discharge valve seat portion 32. Abut. Although the discharge valve 30 shown in FIG. 2 is a normally open type, it can be replaced with a normally closed type or a double acting type as required.
The discharge valve 30 functions as a valve by being integrally assembled with the flow path block 11.
Since the supply valve 20 and the discharge valve 30 operate in conjunction with each other, when the supply valve 20 is normally closed, the discharge valve 30 is normally open, and the supply valve 20 and the discharge valve 30 always moves in the opposite direction, so that fluid always flows in either direction.

The cleaning valve 40 shown in FIG. 3 is a diaphragm valve for supplying cleaning water from the cleaning water input port 41 to the first flow path 12.
The cleaning valve 40 is provided with a cleaning diaphragm valve element 43, and is supplied from the cleaning water input port 41 by the cleaning diaphragm valve element 43 coming into contact with the cleaning valve seat 42 formed in the flow path block 11. The cleaning fluid 19a is shut off and separated, whereby the cleaning fluid 19a is supplied from the cleaning valve valve chamber 44 to the first flow path 12. In this case, pure water is often used as the cleaning fluid 19a.
The cleaning valve valve chamber 44 is connected to the third flow path 14, and the third flow path 14 is connected to the first flow path 12.
Since the cleaning valve 40 is an air drive type, a cleaning valve operation port 45 is provided. When air is supplied to the cleaning valve operation port 45, the cleaning diaphragm valve body 43 is removed from the cleaning valve seat 42. Separate. Although the cleaning valve 40 shown in FIG. 3 is a normally closed type, it can be replaced with a normally open type or a double acting type as required.
The cleaning valve 40 functions as a valve by being assembled integrally with the flow path block 11.

The purge valve 50 shown in FIG. 3 is a diaphragm valve for supplying the purge fluid 19 b from the purge port 51 to the first flow path 12.
The purge valve 50 is provided with a purge diaphragm valve element 53, and is supplied from the purge port 51 when the purge diaphragm valve element 53 abuts against the purge valve seat 52 formed in the flow path block 11. The purge fluid 19b is supplied from the purge valve valve chamber 54 by shutting off and separating the purge fluid 19b. In this case, an inert gas such as N ₂ is often used as the purge fluid 19b.
The purge valve valve chamber 54 is connected to the third flow path 14, and the cleaning valve valve chamber 44 and the purge valve valve chamber 54 are communicated by the third flow path 14.
Since the purge valve 50 is an air drive type, a purge valve operation port 55 is provided. When air is supplied to the purge valve operation port 55, the purge diaphragm valve body 53 is removed from the purge valve seat 52. Separate. The purge valve 50 shown in FIG. 3 is a normally closed type, but can be replaced with a normally open type or a double acting type as required.
The purge valve 50 functions as a valve by being integrally assembled with the flow path block 11.

A suction valve for sucking the inside of the first flow path 12 may be provided at any position of the cleaning valve 40 and the purge valve 50 as necessary. Similarly to the cleaning valve 40 and the purge valve 50, the suction valve is a diaphragm valve, and a suction device (not shown) is connected to an external connection port corresponding to the cleaning water input port 41 or the purge port 51. The fluid in the first flow path 12 can be sucked.
That is, a valve used for maintenance such as purge or cleaning is replaced with this position, or a valve used for maintenance such as a suction valve is provided above the cleaning valve 40 and the purge valve 50. Further, it may be provided.

Next, the operation of the composite fluid control unit 10 of the first embodiment will be described.
The composite fluid control unit 10 is held and used with the output port 15 on the bottom and the air vent port 16 on the top.
FIG. 4 is a cross-sectional view showing a state in which the supply valve 20 of the composite fluid control unit 10 of the first embodiment is open and the discharge valve 30 is closed.
FIG. 5 is a cross-sectional view showing a state where the supply valve 20 of the composite fluid control unit 10 of the first embodiment is closed and the discharge valve 30 is opened.

First, the case where the supply fluid 17 from the input port 21 is supplied to the output port 15 will be described.
In the state of FIG. 4, the supply fluid 17 supplied from the input port 21 is configured such that the supply diaphragm valve body 23 of the supply valve 20 is separated from the supply valve seat portion 22, and the discharge diaphragm valve body of the discharge valve 30. In a state where 33 is in contact with the discharge valve seat portion 32, the first flow passage 12 is supplied.
The supply fluid 17 supplied to the first flow path 12 goes out of the composite fluid control unit 10 through the output port 15 and the air vent port 16.
The output port 15 is connected to a tube, and the supply fluid 17 supplied from the output port 15 is used in a semiconductor manufacturing process apparatus connected to the tip of the tube. For example, when ultrapure water used in the immersion exposure technique flows through the composite fluid control unit 10 as the supply fluid 17, an ultrapure water supply unit to the projection lens is connected to the tip of the tube.
On the other hand, the air vent port 16 is discharged together with the supply fluid 17 in a state where the bubbles 18 contained in the supply fluid 17 are mixed.

The supply fluid 17 supplied from the input port 21 reaches the supply valve valve chamber 24 from the second flow path 13 in a state where the bubbles 18 are mixed.
When the supply fluid 17 that has flowed into the supply valve valve chamber 24 enters the supply valve valve chamber 24 from the gap between the supply diaphragm valve element 23 and the supply valve seat portion 22, it flows to the output port 15 and the air vent port 16. However, since the bubbles 18 have a specific gravity lower than that of the supply fluid 17, the bubbles 18 gather above the flow path by their buoyancy. Accordingly, in the supply valve valve chamber 24 of the supply valve 20, the bubbles 18 are moved to the supply fluid 17 supplied from the output port 15 while being gathered upward.
Since the supply valve valve chamber 24 is formed so that the first flow path 12 penetrates vertically, the bubbles 18 gathered at the upper part of the supply valve valve chamber 24 are pushed away by the supply fluid 17 coming later. Accordingly, the upper first flow path 12 is inevitably introduced from the connection port with the first flow path 12 on the upper side of the supply valve valve chamber 24. Thereafter, bubbles 18 are discharged to the outside of the composite fluid control unit 10 through a connected tube together with the supply fluid 17 from an air vent port 16 provided at the upper part of the flow path block 11 and connected to the first flow path 12. Is done.

On the other hand, when the supply fluid 17 enters the supply valve valve chamber 24, the bubbles 18 and the supply fluid 17 mixed inside are separated, so the first flow path 12 below the supply valve valve chamber 24 is separated. In the stage where the supply fluid 17 enters the first flow path 12 from the connection port, the bubbles 18 are mostly upward. Therefore, the supply fluid 17 that does not include the bubbles 18 can be output from the output port 15.
That is, the supply fluid 17 supplied from the input port 21 passes through the supply valve valve chamber 24 and the first flow path 12 from the second flow path 13, and the output port 15 does not include the bubbles 18. It can be supplied to the secondary side through the shortest route.
Note that the supply fluid 17 supplied from the composite fluid control unit 10 is often low in flow rate because the supply fluid 17 is expensive, and sufficient time is allowed to pass through the supply valve valve chamber 24. As a result, most of the bubbles 18 are discharged from the air vent port 16.

Next, the case where the supply fluid 17 is not supplied from the output port 15 will be described.
When the supply fluid 17 is not supplied from the output port 15, as shown in FIG. 5, the supply diaphragm valve element 23 of the supply valve 20 is brought into contact with the supply valve seat portion 22 and the discharge valve 30 is discharged. The diaphragm valve body 33 is separated from the discharge valve seat portion 32.
By doing so, the second flow path 13 is disconnected from the first flow path 12, and the supply fluid 17 does not flow into the first flow path 12 but flows into the discharge valve valve chamber 34 and enters the discharge port 31. Supply fluid 17 is discharged.
And the supply fluid 17 will be in the state which is always flowing by switching a flow path. As a result, the supply fluid 17 is prevented from convection inside the composite fluid control unit 10, and it is effective in preventing the growth of bacteria and the coagulation of a fluid that tends to coagulate.

Next, in the case where the complex fluid control unit 10 is purged and washed, as shown in FIG. 5, the supply diaphragm valve body 23 of the supply valve 20 is in contact with the supply valve seat portion 22. By operating the cleaning valve 40 or the purge valve 50, purging and cleaning can be performed.
In general, when cleaning a valve for a chemical solution, the purge fluid 19b is purged with an inert gas such as N ₂ gas, and the liquid accumulated in the internal flow path is pushed out to the outside. This is a procedure in which pure water is used as the fluid 19a to wash away the chemical solution remaining on the wall surface. If necessary, further purging may be performed thereafter.
In order to perform the purge, with the supply valve 20 closed, the purge diaphragm valve body 53 of the purge valve 50 is separated from the purge valve seat 52 and the purge fluid 19b supplied from the purge port 51 is supplied. Supply to the first flow path 12. In this state, the cleaning diaphragm valve element 43 of the cleaning valve 40 is kept in contact with the cleaning valve seat 42.
By doing so, the supply fluid 17 remaining in the first flow path 12 and the supply valve valve chamber 24 is discharged from the composite fluid control unit 10.

Next, with the supply valve 20 closed, the purge diaphragm valve element 53 of the purge valve 50 is brought into contact with the purge valve seat 52, and the cleaning diaphragm valve element 43 of the cleaning valve 40 is cleaned. The cleaning fluid 19 a supplied from the cleaning water input port 41 is supplied to the first flow path 12 while being separated from the seat 42.
By doing so, the supply fluid 17 remaining on the inner wall of the first flow path 12 is also washed away and discharged from the composite fluid control unit 10.
Since the first flow path 12 that communicates the output port 15 and the air vent port 16 is provided in a straight line, the cleaning fluid 19a and the purge fluid 19b are efficiently supplied to the output port when performing the cleaning and purging. 15, and can be discharged from the air vent port 16.
Further, the first flow path 12 is provided so as to penetrate the supply valve valve chamber 24, and the supply diaphragm valve body 23 is also cylindrical, so that the movement of the cleaning fluid 19a and the purge fluid 19b is performed. Since the decrease in energy can be minimized, cleaning and purging can be performed effectively in a short time, and the amount of cleaning fluid 19a and purging fluid 19b used for cleaning and purging can be suppressed.

Note that when the suction valve is used, for example, when the suction valve is disposed at the position of the cleaning valve 40 or the purge valve 50, the supply valve 20 is also closed.
The suction valve sucks the fluid in the flow path, as opposed to the purge valve 50, so that the remaining fluid existing in the composite fluid control unit 10 and the tubes connected to the composite fluid control unit 10 is removed. Suction.
Therefore, unlike the cleaning valve 40 and the purge valve 50, there is an advantage that it is not necessary to discharge the fluid to the secondary side in order to suck the remaining fluid in the flow path. It is also effective to provide such a valve when the fluid cannot be discharged.

As described above, since the composite fluid control unit 10 of the first embodiment is configured, the following operations and effects are exhibited.
(1) In the composite fluid control unit 10 having the supply valve 20 for communicating or blocking the flow of the supply fluid 17 from the input port 21 and the discharge valve 30 for communicating the supply fluid 17 to the discharge port 31 during drainage. , The supply valve seat 22 of the supply valve 20 and the discharge valve seat 32 of the discharge valve 30 are formed in the integrally formed flow path block 11, and the supply is made at the lower end of the flow path block 11. An output port 15 for the fluid 17 is provided, an air vent port 16 is provided at the upper end of the flow channel block 11, and the output port 15 and the air vent port 16 communicate with each other in the flow channel block 11. 12, the first flow path 12 penetrates the supply valve valve chamber 24, the discharge valve 30 is provided at a position facing the supply valve 20, and the second flow path 13 is the supply valve valve 24 and the discharge valve valve chamber 34 are provided in communication with each other, and a third valve for communicating, adjusting, or blocking the flow of the fluid in the first flow path 12 includes the supply valve 20 and the discharge valve 30. Since at least one is provided in the upper part, the valve block of the third valve is provided in the flow path block 11, and is connected to the first flow path 12, the supply fluid supplied by the composite fluid control unit 10 17 can be discharged from the air vent port 16, and the functions of a plurality of valves are integrated into the block in an integrated and compact manner, so that space can be saved.

Among these, the point that the bubbles 18 in the supply fluid 17 can be discharged from the air vent port 16 is realized by providing the air vent port 16 in the upper part of the flow path block 11 and providing the output port 15 in the lower part.
Since the bubbles 18 mixed in the supply fluid 17 have a specific gravity lighter than that of the liquid, the bubbles 18 gather on the supply valve valve chamber 24 when passing through the supply valve valve chamber 24.
The first flow path 12 passes through the supply valve valve chamber 24, and the air supply port 16 is provided above the supply valve valve chamber 24, and the output port 15 is provided below the supply valve valve chamber 24. Connecting. Accordingly, the bubbles 18 collected on the upper side of the supply valve valve chamber 24 are pushed away by the supply fluid 17 supplied later, and are discharged together with the supply fluid 17 to the air vent port 16 side. On the other hand, the supply fluid 17 from which the bubbles 18 are separated is guided downward and output from the output port 15.

  Further, by bringing the third valve to the upper part of the supply valve 20 and the discharge valve 30, cleaning, purging, suction, etc. can be performed efficiently. All necessary portions in the first flow path 12 through which the 17 passes can be washed away. When the valve is connected with a joint and a tube to form a unit with the same function, the cleaning fluid does not flow into the connected part such as the connection from the supply valve, etc. However, the first flow path 12 penetrates the supply valve valve chamber 24 through the cleaning valve 40 which is prepared as an integrated block as in the configuration described in (1) and arranged as the third valve. By bringing it to the upper part of the supply valve 20 and the discharge valve 30, it is possible to eliminate such a portion that cannot be cleaned.

In addition, regarding the point that the functions of the plurality of valves are integrated into the flow path block 11 in an integrated and compact manner, it has been conventionally performed to make the plurality of valves into a manifold by making them into manifolds. Thus, by providing the input port 21, the supply valve 20 that supplies and shuts off the supply fluid 17, and the output port 15, an unprecedented effect that enables the supply flow path to be arranged in the shortest time is achieved. ing.
And, by arranging the flow path through which the supply fluid 17 flows in the shortest and collecting them into one unit, it is possible to make the internal structure as simple as possible, and to reduce the generation of particles, elution from the base material, Factors that adversely affect the supply fluid, such as liquid pools, can be minimized.

(2) In the composite fluid control unit 10 according to (1), the third valve includes a cleaning valve 40 that supplies the cleaning fluid 19a when cleaning, and a purge valve 50 that supplies the purge fluid 19b when discharging the liquid, The suction valve, the cleaning valve 40, and the purge valve 50 are characterized by being at least one of the suction valves for sucking the supply fluid 17 or the cleaning fluid 19a during liquid suction. At least any one of them can be collected in a compact manner, and there is an excellent effect that the efficiency of cleaning and purging in the flow path is improved.

(3) In the composite fluid control unit 10 described in (1) or (2), the supply fluid 17 supplied from the input port 21 is opened by opening the supply valve 20 and closing the discharge valve 30 to thereby output the output port 15. The supply valve 17 is closed, the discharge valve 30 is opened, and the discharge valve 30 is opened to discharge to the discharge port 31 side. By switching this, the state where the supply fluid 17 always flows is maintained. Therefore, the fluid supplied from the input port 21 is prevented from staying in the flow path, and an excellent effect of preventing a change in the temperature of the fluid is obtained.
By always allowing the fluid to flow, it becomes possible to prevent liquid pooling in the flow path. For example, when supplying ultrapure water, it prevents bacterial growth caused by stagnation inside. In the case of supplying a fluid that is easily solidified, it is possible to prevent the liquid from being solidified by staying inside.
Further, regarding the temperature change, when the temperature control device is provided outside the composite fluid control unit 10, there is an adverse effect such as a local increase in temperature when the fluid flow is lost. Can be prevented.

(Second embodiment)
Next, a second embodiment of the present invention will be described.
In the composite fluid control unit 10 of the second embodiment, a suck back valve 60 is added to the composite fluid control unit 10 of the first embodiment.
FIG. 6 shows a cross-sectional view of the composite fluid control unit 10 of the second embodiment.
The suck-back valve 60 is disposed above the supply valve 20 and the discharge valve 30 and at a position below the cleaning valve 40 and the purge valve 50 or the suction valve.
The suck back valve 60 has a suck back diaphragm valve element 63, and the suck back valve valve chamber 64 is formed in the flow path block 11 so that the first flow path 12 passes therethrough. However, unlike a normal diaphragm valve, the suck back valve 60 does not have a shut-off function, and therefore a valve seat is not provided.
The suck back valve valve chamber 64 is a substantially cylindrical space, and the distance in the height direction of the cylinder, that is, the horizontal direction in the drawing, is set larger than that of other valves.
Further, a suck back stroke adjusting knob 66 is provided, and the stroke amount of the suck back diaphragm valve element 63 can be adjusted.

The suck back valve 60 is air-driven and includes a suck back operation port (not shown). When air is supplied to the suck back operation port, the suck back diaphragm valve body 63 moves to the forward end. The volume of the suck back valve valve chamber 64 is reduced. When the air supply is shut off, the suck back diaphragm valve element 63 moves to the retracted end by the force of the built-in spring, and the volume of the suck back valve valve chamber 64 increases.
The suck back valve 60 functions as a valve by being integrally assembled with the flow path block 11.
The composite fluid control unit 10 of the second embodiment is a supply valve 20, a discharge valve 30, a cleaning valve 40, a purge valve 50, and a flow path, which are valves other than the suck back valve 60. Although it has the 1st flow path 12, the 2nd flow path 13, the 3rd flow path 14, etc., since a structure is the same as that of a 1st Example, description is abbreviate | omitted.

Next, the operation of the second embodiment will be described.
When the supply valve 20 is open, the operation is the same as in the first embodiment. When the supply valve 20 is open, the suck back valve 60 is in a state where air is supplied to the suck back operation port and the suck back diaphragm valve element 63 is at the forward end.
What is changed by adding the suck back valve 60 is the operation immediately after the supply valve 20 is closed.
The supply diaphragm valve body 23 of the supply valve 20 is brought into contact with the supply valve seat portion 22 to shut off the supply of the supply fluid 17 from the input port 21 and at the same time, the suck back diaphragm valve body of the suck back valve 60. 63 is operated to the right side of FIG. 6, that is, the retracted end of the suck-back diaphragm valve element 63.
Normally, when the supply valve 20 is shut off in order to stop the supply of the supply fluid 17, several drops of the supply fluid 17 from the tip of a tube or the like connected to the output port 15 due to the surface tension of the supply fluid 17 or the like. Drops drop on a silicon wafer or the like as a supply destination.

In order to avoid this, the volume of the suck back valve valve chamber 64 is increased by retracting the suck back diaphragm valve body 63 of the suck back valve 60, and the supply fluid 17 is pulled.
In this way, for example, if ultrapure water is supplied onto the silicon wafer from the tip of the tube connected to the output port 15, after the supply of the supply fluid 17 supplied by the composite fluid control unit 10 is shut off, Since the supply fluid 17 is pulled, the supply fluid 17 accumulated at the tip of the tube connected to the output port 15 is retracted into the tube, thereby preventing a dropping phenomenon that drops unnecessary drops on the silicon wafer.
For example, the water surface of the supply fluid 17 at the tip of the tube works to create a sphere by the action of the water surface tension, and the amount of the water surface of the supply fluid 17 protruding from the tip of the tube increases. It is a phenomenon that makes a sphere away from the tip of the tube and falls by its own weight. Therefore, as long as the supply fluid 17 does not protrude from the tip of the tube and the supply fluid 17 is not supplied from behind, it does not fall as a water droplet. If the supply fluid 17 is pulled by increasing the volume of the suck back valve valve chamber 64, the water surface is pulled toward the inside of the tube, and the water surface tension acts on the opposite side. Will not fall as.

As described above, since the composite fluid control unit 10 of the second embodiment is configured, the following operations and effects are exhibited.
In addition to the composite fluid control unit 10 of the first embodiment, a suck back valve 60 that prevents liquid dripping by blocking the flow path is provided, and the suck back valve 60 is provided above the supply valve 20 and the discharge valve 30. In addition, the first valve 12 is provided in the lower part of the cleaning valve 40, the purge valve 50 or the suction valve, which is the third valve, and the first flow path 12 passes through the suck back valve valve chamber 64. When the supply valve 20 is closed, it is possible to prevent a so-called potter drop in which a tube connected to the tip of the output port or a drop of liquid supplied from the tip of the apparatus falls to the supply destination.
In the semiconductor manufacturing process, particularly when it is desired to accurately control the amount of the chemical solution to be supplied or when it is directly applied to a silicon wafer, the quality of the product is often affected by the dropping of drops. Therefore, the function of preventing the dropping of the pot by providing the suck back valve 60 in this way is effective.

(Third embodiment)
Next, a third embodiment of the present invention will be described.
FIG. 7 shows a sectional view of the composite fluid control unit 10 of the third embodiment.
The composite fluid control unit 10 in the third embodiment is characterized in that the supply valve 20 in the composite fluid control unit 10 of the first embodiment or the second embodiment uses a membrane type opening / closing valve 26.
The membrane type open / close valve 26 is air driven, and operates the supply diaphragm valve body 23 by supplying air to an operation port (not shown). However, the membrane open / close valve 26 includes a sliding portion like the piston portion of the supply valve 20. Instead, by using the diaphragm 27 as an alternative means of the guide mechanism, the sliding resistance is reduced, and the operation speed of the supply diaphragm valve body 23 can be easily adjusted.
Examples of such control valves are introduced in detail in, for example, Japanese Patent No. 3010912 and Japanese Utility Model Laid-Open No. 6-40551, and a description thereof is omitted here.

Thus, by using the membrane type opening / closing valve 26 in the composite fluid control unit 10, it is possible to adjust the operating speed of the supply diaphragm valve element 23, and by adjusting this operating speed to operate gently, This brings about an effect of reducing the amount of particles generated at the moment when the diaphragm valve body 23 comes into contact with the supply valve seat portion 22.
Also in the membrane type opening / closing valve 26, air is supplied from the supply valve operation port 25 to operate the supply diaphragm valve element 23.
In order to shut off the supply fluid 17 flowing in from the second flow path 13, it is necessary to bring the supply diaphragm valve body 23 into contact with the supply valve seat portion 22. The speed of the diaphragm valve body 23 depends on the pressure of air from the supply valve operation port 25 in the case of an air-driven diaphragm valve.

The drive part of the diaphragm valve has a cylinder structure, and when air is supplied to the supply valve operation port 25, the piston moves up and down. The sliding portion of the piston contains packing and is sealed so that air does not leak, but this seal provides sliding resistance. Because of this sliding resistance, a large amount of force is required until the piston starts to move, and the air pressure is also required to be above a certain level. As a result, the operating speed cannot be reduced below a certain level.
On the other hand, the sliding resistance can be reduced by changing the sliding portion of the piston to the diaphragm 27 as in the membrane type opening / closing valve 26. Of course, resistance is generated by the restoring force of the diaphragm 27, but it does not become as high as the sliding resistance of the piston. Therefore, it becomes possible to drive the supply diaphragm valve body 23 with a lower air pressure, resulting in an increase in operating speed. It can be reduced as compared with the piston type.
If the speed of the supply diaphragm valve body 23 hitting the supply valve seat portion 22 becomes moderate, the impact can be reduced, and the generation of particles can be suppressed.

Since the composite fluid control unit 10 of the third embodiment is configured as described above, the following operational effects are exhibited.
In the composite fluid control unit 10 described in any one of the first embodiment and the second embodiment, the supply valve 20 is a membrane type opening / closing valve 26 using a diaphragm type actuator, thereby opening and closing the valve. Since the speed is reduced and particles generated at the time of opening and closing are reduced, the membrane type opening / closing valve 26 using a diaphragm type actuator is more responsive than the opening / closing valve using a spring type actuator. Therefore, it is possible to reduce the valve opening / closing speed to an area that is impossible with the spring type, minimizing particles generated when the valve opens and closes due to the decrease in valve opening / closing speed, and to the output port 15 Prevent particles from entering the fluid supply fluid 17 An excellent effect that the door can be.

(Fourth embodiment)
Next, a fourth embodiment of the present invention will be described.
FIG. 8 is a sectional view of the composite fluid control unit 10 in the fourth embodiment.
The composite fluid control unit 10 of the fourth embodiment is obtained by adding an on-off valve 70 with a flow rate adjustment to the composite fluid control unit 10 of the third embodiment.
The on-off valve 70 with flow rate adjustment is a valve that is connected to the first flow path 12 and is provided in front of the air vent port 16 to adjust the amount of the supply fluid 17 mixed with bubbles 18 discharged from the air vent port 16.
The on / off valve 70 with flow rate adjustment has a diaphragm valve structure, and an on / off valve valve seat 72, which is the valve seat of the on / off valve 70 with flow rate adjustment, is formed in the flow path block 11. It is possible for the body 73 to abut and block the fluid. Further, since the opening / closing stroke adjustment knob 76 is provided, the opening degree can be adjusted.
The on-off valve 70 with flow rate adjustment has an on-off valve operation port (not shown). When air is supplied, the on-off valve diaphragm valve body 73 is separated from the on-off valve valve seat 72 and the supply of air is cut off. This is a normally closed type on-off valve that shuts off the supply of the supply fluid 17 by the force of a built-in spring. However, it can be replaced with a normal open type or a double acting type as required.
The supply valve operation port 25 functions as a valve by being integrally assembled with the flow path block 11.

Next, the operation of the fourth embodiment will be described.
When supplying the supply fluid 17, the supply fluid 17 passes through the second flow path 13 from the input port 21, flows into the supply valve valve chamber 24, passes through the first flow path 12, and is connected to the output port 15 side. It flows separately to the air vent port 16 side. The description on the output port 15 side will not be described because it has not changed, but the supply fluid 17 mixed with the bubbles 18 flowing into the air vent port 16 side is pushed out to the upper part of the first flow path 12.
The on-off valve diaphragm valve element 73 of the on-off valve 70 with flow rate adjustment is in a state of being separated from the on-off valve valve seat 72, and the supply fluid 17 flows into the on-off valve valve chamber 74.
Since the amount of inflow is controlled by the gap between the opening / closing valve diaphragm valve element 73 and the opening / closing valve valve seat 72, the flow rate of the supply fluid 17 can be controlled by adjusting the opening / closing stroke adjustment knob 76. .
Then, the supply fluid 17 is discharged from the air vent port 16 through the fourth flow path 75 connected to the air vent port 16 from the opening / closing valve valve chamber 74.
The fourth flow path 75 is provided narrower than the first flow path 12, but this is effective when it is desired to reduce the consumption of the supply fluid 17 as much as possible.

During cleaning and purging, the composite fluid control unit 10 is cleaned and purged in a state where the on-off valve diaphragm valve body 73 and the on-off valve valve seat 72 are in contact with each other. The description of this case is omitted because the operation of the on-off valve 70 with flow rate adjustment is not particularly relevant.
Regarding the opening and closing of the on-off valve 70 with flow rate adjustment, when the supply fluid 17 is not desired to be discharged from the air vent port 16, the on-off valve diaphragm valve body 73 of the on-off valve 70 with flow rate adjustment is applied to the on-off valve valve seat 72. In contact therewith, the discharge of the supply fluid 17 from the air vent port 16 is blocked.
For example, when the amount of bubbles 18 mixed into the supply fluid 17 is small, it is possible to store a certain amount of bubbles 18 above the supply valve valve chamber 24 in the first flow path 12 to a certain amount. Therefore, the discharge amount of the supply fluid 17 can be reduced by opening and closing regularly.

Since the composite fluid control unit 10 of the fourth embodiment is configured as described above, the following operational effects are exhibited.
In the composite fluid control unit 10 described in the fourth embodiment, the flow rate of the supply fluid 17 discharged from the air vent port 16 can be adjusted by providing the air vent port 16 with an on-off valve 70 with a flow rate adjustment. Therefore, an excellent effect that the amount of fluid discharged from the air vent port 16 can be reduced can be obtained.
The fluid discharged from the air vent port 16 is a supply fluid 17 in a state where bubbles 18 are mixed. When the supply fluid 17 is ultrapure water, the bubbles 18 are mixed and go through a plurality of paths. It is no longer ultrapure water to go and can not be used as ultrapure water. In addition, even a fluid that easily solidifies or a liquid whose concentration control is severe cannot be used as it is. Accordingly, it is possible to reduce the cost by providing a function for minimizing the amount of such ultrapure water to be discharged.

(5th Example)
Next, a fifth embodiment of the present invention will be described.
FIG. 9 shows a sectional view of the composite fluid control unit 10 of the fifth embodiment.
The composite fluid control unit 10 of the fifth embodiment is obtained by adding an opening / closing valve 70a and a minute flow rate adjusting valve 70b to the composite fluid control unit 10 of the third embodiment.
That is, the open / close valve 70 with flow rate adjustment of the fourth embodiment has a configuration in which the open / close function is separated into the open / close valve 70a and the flow rate adjustment function is separated into the minute flow rate adjustment valve 70b.
The on-off valve 70 a communicates and blocks the flow of the supply fluid 17 by bringing the on-off valve diaphragm valve body 73 a into contact with and separating from the on-off valve valve seat 72 a provided in the flow path block 11.
Since the on-off valve 70a is an air drive type, it has an on-off valve operation port (not shown). By supplying air, the on-off valve diaphragm valve body 73a is separated from the on-off valve valve seat 72a, When the supply is shut off, this is a normally closed type on-off valve that shuts off the supply of the supply fluid 17 by the force of a built-in spring. However, it can be replaced with a normal open type or a double acting type as required.
The fifth flow path 77 connected to the open / close valve valve chamber 74a is connected to the fine flow rate adjustment valve valve chamber 74b of the fine flow rate adjustment valve 70b, and connects the open / close valve valve chamber 74a and the fine flow rate adjustment valve valve chamber 74b.

  The minute flow rate adjusting valve 70 b adjusts the flow rate of the supply fluid 17 by the gap between the minute flow rate adjusting valve valve seat 72 b and the minute flow rate adjusting valve valve body 73 b provided in the flow path block 11. The minute flow rate adjusting valve valve body 73b has a conical protrusion at the tip, and enters the minute flow rate adjusting valve valve seat 72b. The micro flow rate adjusting valve 70b is provided with a micro flow rate adjusting screw 76b. By turning the micro flow rate adjusting screw 76b, the clearance between the micro flow rate adjusting valve valve body 73b and the micro flow rate adjusting valve valve seat 72b is adjusted.

Next, the operation of the fifth embodiment will be described.
When supplying the supply fluid 17, the supply fluid 17 passes through the second flow path 13 from the input port 21 and flows into the supply valve valve chamber 24, and the supply fluid 17 passes through the second flow path 13 from the input port 21. Passes through and flows into the supply valve valve chamber 24, passes through the first flow path 12, and flows into the output port 15 side and the air vent port 16 side separately. The description on the output port 15 side will not be described because it has not changed, but the supply fluid 17 mixed with the bubbles 18 flowing into the air vent port 16 side is pushed out to the upper part of the first flow path 12.
The open / close valve diaphragm valve body 73a of the open / close valve 70a is in a state of being separated from the open / close valve valve seat 72a, and the supply fluid 17 flows into the open / close valve valve chamber 74a.
Then, the supply fluid 17 flows from the opening / closing valve valve chamber 74a through the fifth flow path 77 into the micro flow rate adjusting valve valve chamber 74b, and the micro flow rate adjusting valve valve body 73b and the micro flow rate adjusting valve valve seat of the micro flow rate adjusting valve 70b. The supply fluid 17 mixed with the bubbles 18 is discharged from the air vent port 16 through the fourth flow path 75 through the gap 72b.
Since the discharge amount of the supply fluid 17 from the air vent port 16 is controlled by the gap between the minute flow rate adjusting valve valve body 73b and the opening / closing valve valve seat 72, the gap is adjusted by the minute flow rate adjusting screw 76b. The discharge amount of the fluid 17 can be controlled.
The fourth flow path 75 and the fifth flow path 77 are provided narrower than the first flow path 12, but this is effective when it is desired to reduce the consumption amount of the supply fluid 17 as much as possible.

Regarding cleaning, purging, and suction, the composite fluid control unit 10 is cleaned, purged, and sucked while the on-off valve diaphragm valve body 73a and the on-off valve valve seat 72a are separated from each other. The description of this case is omitted because the operations of the on-off valve 70a and the minute flow rate adjusting valve 70b are not particularly relevant.
Regarding the opening and closing of the opening / closing valve 70a, when the supply fluid 17 is not desired to be discharged from the air vent port 16, the opening / closing valve diaphragm valve body 73a of the opening / closing valve 70a is brought into contact with the opening / closing valve valve seat 72a to supply the supply fluid. The discharge from the 17 air vent port 16 is blocked.
For example, when the amount of the bubbles 18 mixed into the supply fluid 17 is small, a certain amount can be stored above the supply valve valve chamber 24 in the first flow path 12, so that it is periodically opened and closed. As a result, the discharge amount of the supply fluid 17 can be reduced.

As described above, since the composite fluid control unit 10 of the fifth embodiment is configured, the following operations and effects are exhibited.
In the composite fluid control unit 10 of the fifth embodiment, the opening / closing function and the flow adjustment function of the opening / closing valve 70 with flow adjustment of the fourth embodiment are separated, and the flow adjustment is performed on the opening / closing valve 70a having the opening / closing function. Since the micro flow rate adjusting valve 70b having a function is provided, the micro flow rate can be adjusted accurately.

When the flow rate adjustment and the opening / closing valve function are performed by one valve as in the case of the on / off valve with flow rate adjustment 70 of the fourth embodiment, it may be difficult to adjust accurately in the adjustment region of the minute flow rate.
This is because when the on-off valve diaphragm valve body 73 of the on-off valve 70 with flow rate adjustment is brought into contact with the on-off valve valve seat 72, it is brought into contact with a certain pressure in order to completely shut off the supply fluid 17. . At this time, since the on-off valve diaphragm valve body 73 and the on-off valve valve seat 72 are made of PTFE, some elastic deformation is involved.
On the other hand, when the on-off valve diaphragm valve body 73 and the on-off valve valve seat 72 are separated, the flow rate is determined by the gap between the on-off valve diaphragm valve body 73 and the on-off valve valve seat 72. The gap is slightly different between the deformed state and the original restoration after a while.
Moreover, since PTFE is also a resin-based material, a dimensional change due to a temperature change acts more greatly than a metal. Therefore, there is a possibility of an influence depending on the use environment.

  For the adjustment of minute flow rate, the effect of such deformation is great. Therefore, in the fifth embodiment, the opening / closing valve 70a and the minute flow rate adjusting valve 70b are divided into the opening / closing valve 70a only for the opening / closing function and the minute flow rate adjusting valve 70b for only the adjusting function to avoid this influence. In addition, reducing the diameter of the on-off valve valve seat 72 also reduces this effect.

(Sixth embodiment)
Next, a sixth embodiment of the present invention will be described.
FIG. 10 shows a sectional view of the composite fluid control unit 10 of the sixth embodiment. Moreover, FIG. 11 has shown CC cross section of FIG.
The composite fluid control unit 10 of the sixth embodiment is replaced with a supply / discharge valve 80 in which the functions of the supply valve 20 and the discharge valve 30 are integrated in the composite fluid control unit 10 of the first embodiment. It is.
Even in the case of the first embodiment, since there are many cases where drainage is not performed during supply, the function is limited by integrating the supply valve 20 and the discharge valve 30 as a three-way valve. Cost can be reduced.
The supply / discharge valve 80 includes a supply unit 81 and a discharge unit 82 and is configured as an integral valve.

As shown in FIG. 11, the supply portion 81 has substantially the same shape as the supply valve 20, and has a supply valve seat portion 22, a supply diaphragm valve body 23, and a supply valve valve chamber 24. However, the supply valve operation port 25 is not provided. The supply valve valve chamber 24 is the same as that of the first embodiment in that the supply valve valve chamber 24 is formed in the flow path block 11 with the first flow path 12 passing therethrough.
On the other hand, the discharge portion 82 has a discharge valve seat portion 32, a discharge diaphragm valve body 33, and a discharge valve valve chamber 34 like the discharge valve 30, and instead of the discharge valve operation port 35, A supply / discharge valve operation port 85 for driving both sides of the supply unit 81 and the discharge unit 82 is provided. It does not have a function like the drainage adjustment knob 36.
The input port 21 is connected to the second flow path 13, and the discharge valve valve chamber 34 is connected to the discharge port 31. Further, the connecting rod 83 passes through the second flow path 13.
The connecting rod 83 is held in a state of being embedded in the supply diaphragm valve body 23 and the discharge diaphragm valve body 33 in order to connect the supply diaphragm valve body 23 and the discharge diaphragm valve body 33. Since the connecting rod 83 has a liquid contact portion, the material is selected by chemicals such as PVDF, PCTFE, PPS, PEEK, ceramic, titanium, etc., which are stronger than PTEF and have higher corrosion resistance.
Other configurations are almost the same as those in the first embodiment.

Next, the operation of the composite fluid control unit 10 of the sixth embodiment will be described.
The operation of the sixth embodiment is basically the same as that of the first embodiment, but the portion where the supply valve 20 and the discharge valve 30 are replaced with the supply / discharge valve 80 operates slightly differently. I will explain the part.
The supply / discharge valve 80 includes a supply / discharge valve operation port 85 on the discharge portion 82 side, thereby driving both sides of the supply diaphragm valve body 23 of the supply portion 81 and the discharge diaphragm valve body 33 of the discharge portion 82. Yes.
This is because the connecting rod 83 that connects the supply valve seat portion 22 and the supply diaphragm valve body 23 is provided through the second flow path 13, so that the operation air is supplied to the supply / discharge valve operation port 85. As a result, the discharge diaphragm valve element 33 is pushed to the left side of the drawing, and the discharge diaphragm valve element 33 and the supply diaphragm valve element 23 are connected by the connecting rod 83, so that the discharge diaphragm valve element 33 is connected to the discharge diaphragm valve element 33. In conjunction with this, the supply diaphragm valve body 23 is pushed to the left side of the drawing.
Since the supply unit 81 includes a compression spring, the compression spring is compressed by supplying operation air to the supply / discharge valve operation port 85. As a result, the supply diaphragm valve body 23 and the supply valve seat part 22 of the supply part 81 are separated from each other, and the discharge diaphragm valve body 33 and the discharge valve seat part 32 of the discharge part 82 come into contact with each other. As a result, the supply fluid 17 supplied from the input port 21 is supplied to the output port 15 side. Further, the supply fluid 17 containing the bubbles 18 is discharged from the air vent port 16.

When the supply of the operation air to the supply / discharge valve operation port 85 is stopped, the supply diaphragm valve body 23 and the discharge diaphragm valve body 33 are moved to the right side of the drawing by the force of the compression spring, and the supply unit 81 The supply diaphragm valve body 23 and the supply valve seat portion 22 are in contact with each other, and the discharge diaphragm valve body 33 and the discharge valve seat portion 32 are separated from each other. As a result, the supply of the supply fluid 17 to the output port 15 is stopped, and the supply fluid 17 is discharged to the discharge port 31 side.
However, in FIG. 11, the normally closed type supply / discharge valve 80 is shown, but it can be replaced with a normally open type or a return type valve as necessary.
Note that the functions of the cleaning valve 40 and the purge valve 50 and the like work in the sixth embodiment in the same manner as in the other embodiments, and thus the description thereof is omitted here.

(Seventh embodiment)
Next, a seventh embodiment will be described.
The seventh embodiment is a modification of the sixth embodiment.
12A is a top view of the composite fluid control unit 10 of the seventh embodiment, and FIG. 12B is a cross-sectional view of the composite fluid control unit 10 of the seventh embodiment. FIG. 13 shows a DD cross section of FIG.
As in the sixth embodiment, the composite fluid control unit 10 of the seventh embodiment is a supply / discharge unit that integrates the functions of the supply valve 20 and the discharge valve 30 in the composite fluid control unit 10 of the first embodiment. The valve 80 is replaced. However, the internal structure of the sixth embodiment is slightly different.
In the case of the sixth embodiment, the functions of the supply valve 20 and the discharge valve 30 are integrated into a three-way valve to form the supply / discharge valve 80. A connecting rod 83 is provided between them to synchronize the supply diaphragm valve body 23 and the discharge diaphragm valve body 33. However, the supply diaphragm valve body 23 and the discharge diaphragm valve body 33 are often made of PTFE in order to pursue chemical resistance and minimize elution of the material into the supply fluid 17. However, since the material strength of PTFE is not so high, in order to link the supply diaphragm valve body 23 and the discharge diaphragm valve body 33, a load is applied to the valve body itself, and the connecting rod 83 itself is also resistant to chemicals. Therefore, it is necessary to use a special material as described above. Further, since the connecting rod 83 is provided in the second flow path 13, there is a problem that the inner diameter of the second flow path 13 must be increased in order to ensure an equivalent flow rate.
Therefore, the supply / discharge valve 80 of the seventh embodiment has a structure in which this point is devised.

As shown in FIG. 13, the supply portion 81 has substantially the same shape as the supply valve 20, and has a supply valve seat portion 22, a supply diaphragm valve body 23, and a supply valve valve chamber 24. Although not shown, a supply / discharge valve operation port 85 is provided on the supply unit 81 side. The supply valve valve chamber 24 is the same as that of the first embodiment in that the supply valve valve chamber 24 is formed in the flow path block 11 with the first flow path 12 passing therethrough.
On the other hand, the discharge portion 82 has a discharge valve seat portion 32, a discharge diaphragm valve body 33, and a discharge valve valve chamber 34 like the discharge valve 30, but includes a supply / discharge valve operation port 85. ing.
Instead of the connecting rod 83 of the sixth embodiment, a connecting shaft 84 is provided inside the body of the supply / discharge valve 80 as shown in FIG. Two connecting shafts 84 are provided diagonally to the supply / discharge valve 80, and their bases are connected so that the supply diaphragm valve body 23 of the supply section 81 and the discharge diaphragm valve body 33 of the discharge section 82 are interlocked. It is connected. Note that the number of the connecting shafts 84 is not necessarily two, and does not prevent the number of connecting shafts from being increased as necessary. However, in the seventh embodiment, since the connecting shaft 84 is brought diagonally to the supply / discharge valve 80, there is no need to change the size of the supply / discharge valve 80, but the number of connection shafts 84 is increased. Considers that it is necessary to increase the size of the supply / discharge valve 80 because of the balance with the mounting bolt.
The connecting rod 83 is made of a general stainless steel shaft. However, it does not prevent the material from being changed as necessary depending on the use environment.
Thus, by providing the connecting shaft 84 instead of the connecting rod 83 of the sixth embodiment, it is not necessary to use a connecting member for the liquid contact portion like the connecting rod 83, so the range of selection of materials is widened, Since the liquid does not come into contact with the supply fluid 17 in the second flow path 13, there is an advantage that the problem of particles, elution from the member, and the like can be avoided.

Next, the operation of the composite fluid control unit 10 of the seventh embodiment will be described.
The operation of the seventh embodiment is basically the same as that of the first embodiment and the sixth embodiment, but the supply / discharge valve 80 is slightly different.
The supply / discharge valve 80 of the seventh embodiment is provided with a supply / discharge valve operation port 85 on the supply portion 81 side, so that the supply diaphragm valve body 23 of the supply portion 81 and the discharge diaphragm valve body 33 of the discharge portion 82 are provided. Both can be driven.
This is because the supply / discharge valve 80 is provided with a connecting shaft 84 that connects the supply valve seat portion 22 and the supply diaphragm valve body 23, so that the operation air is rescued in the supply / discharge valve operation port 85. Thus, the supply diaphragm valve body 23 moves to the left side, and the compression spring provided in the supply unit 81 is compressed. At this time, since the discharge diaphragm valve element 33 is also connected by the connecting shaft 84, the discharge diaphragm valve element 33 also moves to the left side of the drawing.
As a result, the supply valve seat portion 22 and the supply diaphragm valve body 23 of the supply portion 81 are separated from each other, and the discharge valve seat portion 32 and the discharge diaphragm valve body 33 of the discharge portion 82 come into contact with each other. The supplied supply fluid 17 is supplied to the output port 15 side. Further, the supply fluid 17 including the bubbles 18 is discharged from the air vent port 16.

When the supply of the operation air to the supply / discharge valve operation port 85 is stopped, the supply diaphragm valve body 23 and the discharge diaphragm valve body 33 move to the right side of the drawing by the force of the compression spring. The valve seat portion 22 and the supply diaphragm valve element 23 come into contact with each other, and the discharge valve seat portion 32 and the discharge diaphragm valve element 33 are separated from each other. As a result, the supply of the supply fluid 17 to the output port 15 is stopped, and the supply fluid 17 is discharged to the discharge port 31 side.
However, although the normally closed type supply / discharge valve 80 is shown in FIG. 13, it can be replaced with a normally open type or a return type valve as necessary.
Note that the functions of the cleaning valve 40 and the purge valve 50 and the like work in the seventh embodiment in the same manner as in the other embodiments, so that the description thereof is omitted here.

As described above, since the composite fluid control unit 10 of the sixth embodiment and the seventh embodiment is configured, the following operations and effects are shown.
In the composite fluid control unit 10 having a supply / discharge valve 80 for switching the flow of the supply fluid 17 from the input port 21 to supply and discharge, the supply / discharge valve 80 is connected to the integrally formed flow path block 11. A supply diaphragm valve body 23 and a discharge diaphragm valve body 33, which are valve seats, are formed, an output port 15 for supply fluid 17 is provided at the lower end of the flow path block 11, and an air port is provided at the upper end of the flow path block 11. A supply port of the supply unit 81 provided in the supply / discharge valve 80 is provided with the first flow path 12 provided in the flow path block 11 to communicate the output port 15 and the air release port 16. The valve chamber 24 and the discharge valve valve chamber 34 of the discharge part 82 are communicated with each other by the second flow path 13, and the first flow path 12 is the supply valve valve of the supply part 81 of the supply / discharge valve 80. At least one cleaning valve 40 or purge valve 50 that passes through 24 and communicates, adjusts, or shuts off the fluid flow in the first flow path 12 is provided above the supply / discharge valve 80. Since the valve seat of the washing valve 40 or the purge valve 50 is provided in the block 11 and connected to the first flow path 12, the bubbles 18 in the fluid supplied by the composite fluid control unit 10 are provided. As described in (1), it is possible to discharge the air from the air vent port 16 and the functions of a plurality of valves are integrated into the flow path block 11 in an integrated and compact manner. This effect can be realized by reducing the number of valves.

  Since the supply function and the discharge function are often not used at the same time, when the supply function is used, a three-way valve can be substituted to stop the drainage function. Therefore, the supply / discharge valve 80 can be reduced in number by using a three-way valve and not draining at the time of supply. As a result, control air and solenoid valves can be reduced, which is effective in reducing initial costs and running costs.

Although the embodiments of the present invention have been described, the present invention is not limited to the above-described embodiments, and various applications are possible.
For example, a combination of a supply valve 20, a discharge valve 30, a cleaning valve 40, a purge valve 50, a suck back valve 60, an on-off valve 70 with flow rate adjustment, an on-off valve 70a, and a minute flow rate adjustment valve 70b can be used. It does not prevent you from changing it together.
Specifically, in the composite fluid control unit 10 of the fifth embodiment, the on-off valve 70a may be omitted, and the discharge to the air vent port 16 may not be interrupted, and the supply fluid 17 is a high viscosity liquid, The suck-back valve 60 may be omitted as long as it does not easily drop.
Further, the material or the like of the flow path block 11 is not limited to PTFE, and does not prevent the material having necessary properties from being appropriately selected depending on the supply fluid 17.
Each valve adopts an air drive system, but may be a motor drive type.

1 is a cross-sectional view of a composite fluid control unit used in a semiconductor manufacturing process according to a first embodiment. The AA cross section of the composite fluid control unit of Drawing 1 of the 1st example is shown. The BB cross section of the composite fluid control unit of FIG. 1 of 1st Example is shown. It is sectional drawing which showed the state with the supply valve of the composite fluid control unit of 1st Example opened and the valve | bulb for discharge | emission closed. It is sectional drawing which showed the state with the supply valve of the composite fluid control unit of 1st Example closed, and the valve | bulb for discharge | emission. It shows about sectional drawing of the composite fluid control unit of 2nd Example. It shows about sectional drawing of the composite fluid control unit of 3rd Example. It shows about sectional drawing of the composite fluid control unit of 4th Example. It shows about sectional drawing of the composite fluid control unit of 5th Example. It shows about sectional drawing of the composite fluid control unit of 6th Example. 11 shows a CC cross section of the composite fluid control unit of FIG. 10 in the sixth embodiment. (A) It shows about the top view of the composite fluid control unit of 7th Example. (B) It shows about sectional drawing of the composite fluid control unit of 7th Example. The DD section of the composite fluid control unit of Drawing 7 (a) of the 7th example is shown. The cross-sectional view of the chemical valve of patent document 1 is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Composite fluid control unit 11 Flow path block 12 1st flow path 13 2nd flow path 14 3rd flow path 15 Output port 16 Air vent port 17 Supply fluid 18 Bubble 19a Cleaning fluid 19b Purge fluid 20 Supply valve 21 Input Port 22 Supply valve seat portion 23 Supply diaphragm valve body 24 Supply valve valve chamber 25 Supply valve operation port 26 Membrane open / close valve 27 Diaphragm 30 Discharge valve 31 Discharge port 32 Discharge valve seat portion 33 Discharge diaphragm valve Body 34 discharge valve valve chamber 35 discharge valve operation port 36 drainage adjustment knob 40 washing valve 41 washing water input port 42 washing valve seat 43 washing diaphragm valve body 44 washing valve valve chamber 45 washing valve operation port 50 Purge valve 51 Purge port 52 Purge valve seat 53 Purge diaphragm Valve valve 54 Purge valve valve chamber 55 Purge valve operating port 60 Suck back valve 63 Suck back diaphragm valve body 64 Suck back valve valve chamber 66 Suck back stroke adjustment knob 70 Open / close valve 70a with flow rate adjustment Open / close valve 70b Small flow rate Adjustment valve 72 Open / close valve valve seat 72a Open / close valve valve seat 72b Micro flow rate adjustment valve valve seat 73 Open / close valve diaphragm valve body 73a Open / close valve diaphragm valve body 73b Micro flow rate adjustment valve valve body 74 Open / close valve valve chamber 74a Open / close valve valve chamber 74b Flow adjustment valve valve chamber 75 Fourth flow path 76 Opening / closing stroke adjustment knob 76b Micro flow rate adjusting screw 77 Fifth flow path 80 Supply / discharge valve 81 Supply section 82 Discharge section 83 Connecting rod 84 Connection shaft 85 Supply / discharge valve operation port

Claims (8)

In a composite fluid control unit comprising: a first supply valve for communicating or blocking a flow of a supply fluid from an input port; and a second discharge valve for communicating the supply fluid to a discharge port during drainage.
A valve seat for the first supply valve and the second discharge valve is formed in the integrally formed flow path block,
An output port for the supply fluid is provided at the lower end of the flow path block,
An air vent port is provided at the upper end of the flow path block,
A first flow path is provided in the flow path block for communicating the output port and the air vent port.
The first flow path penetrates the valve chamber of the first valve for supply;
The second discharge valve is provided at the same height as the first supply valve, and the second flow path communicates the valve chamber of the first supply valve and the valve chamber of the second discharge valve. Provided,
At least one third valve for communicating, adjusting, or blocking the flow of the fluid in the first flow path is provided above the first supply valve and the second discharge valve.
A composite fluid control unit, wherein the flow path block is provided with a valve seat of the third valve and is connected to the first flow path. The composite fluid control unit according to claim 1,
The third valve is a cleaning valve that supplies a cleaning fluid when cleaning, a purge valve that supplies a purge fluid when discharging liquid, and a suction valve that sucks the supply fluid or cleaning fluid when sucking liquid A composite fluid control unit characterized by being at least one of them. The composite fluid control unit according to claim 1 or 2,
The supply fluid supplied from the input port is supplied to the output port side by opening the first supply valve and closing the second discharge valve, and closing the first supply valve, The composite fluid control unit according to claim 1, wherein the discharge fluid is discharged to the discharge port side by opening the second discharge valve, and the state in which the supply fluid always flows is maintained by switching the second valve. In the composite fluid control unit according to any one of claims 1 to 3,
Equipped with a suck back valve to prevent dripping,
The suck back valve is provided above the first supply valve and the second discharge valve and below the third valve, and the first flow path passes through the valve chamber of the suck back valve. A composite fluid control unit. In the complex fluid control unit according to any one of claims 1 to 4,
A composite fluid control unit characterized in that the first valve for supply is a membrane type opening / closing valve using a diaphragm type actuator, thereby reducing the valve opening / closing speed and reducing particles generated during opening / closing. The composite fluid control unit according to any one of claims 1 to 5,
A composite fluid control unit characterized in that a flow rate of the supply fluid discharged from the air vent port can be adjusted by providing an open / close valve with flow rate adjustment at the air vent port. The composite fluid control unit according to claim 6,
The opening / closing function of the opening / closing valve with flow rate adjustment is separated from the flow rate adjustment function,
A composite fluid control unit comprising a micro flow rate adjusting valve having the flow rate adjusting function on an open / close valve having the open / close function. In a composite fluid control unit having a first valve for supply and discharge for switching the flow of supply fluid from the input port to supply and discharge,
A valve seat of the first valve for supply and discharge is formed in the integrally formed flow path block,
An output port for the supply fluid is provided at the lower end of the flow path block,
An air vent port is provided at the upper end of the flow path block,
A first flow path is provided in the flow path block for communicating the output port and the air vent port.
The valve chamber of the supply section and the valve chamber of the discharge section provided in the first valve for supply and discharge are communicated with each other through the second flow path.
The first flow path penetrates the valve chamber of the supply section of the first valve for supply and discharge;
At least one second valve for communicating, adjusting, or blocking the flow of fluid in the first flow path is provided on the upper part of the first valve for supply and discharge,
A composite fluid control unit, wherein the flow path block is provided with a valve seat of the fluid valve and is connected to the first flow path.

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