JP2007071994A - Black photosensitive resin composition - Google Patents
Black photosensitive resin composition Download PDFInfo
- Publication number
- JP2007071994A JP2007071994A JP2005256761A JP2005256761A JP2007071994A JP 2007071994 A JP2007071994 A JP 2007071994A JP 2005256761 A JP2005256761 A JP 2005256761A JP 2005256761 A JP2005256761 A JP 2005256761A JP 2007071994 A JP2007071994 A JP 2007071994A
- Authority
- JP
- Japan
- Prior art keywords
- black
- resin composition
- photosensitive resin
- pigment
- black photosensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011342 resin composition Substances 0.000 title claims abstract description 77
- 239000000049 pigment Substances 0.000 claims abstract description 51
- 239000012860 organic pigment Substances 0.000 claims abstract description 29
- 239000011159 matrix material Substances 0.000 claims description 39
- 150000001875 compounds Chemical class 0.000 claims description 32
- 239000003999 initiator Substances 0.000 claims description 16
- 239000004973 liquid crystal related substance Substances 0.000 claims description 15
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 claims description 15
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 claims description 15
- 239000002904 solvent Substances 0.000 claims description 15
- 125000006850 spacer group Chemical group 0.000 claims description 8
- 238000005401 electroluminescence Methods 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 5
- 239000010408 film Substances 0.000 description 20
- 229940126062 Compound A Drugs 0.000 description 16
- NLDMNSXOCDLTTB-UHFFFAOYSA-N Heterophylliin A Natural products O1C2COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC2C(OC(=O)C=2C=C(O)C(O)=C(O)C=2)C(O)C1OC(=O)C1=CC(O)=C(O)C(O)=C1 NLDMNSXOCDLTTB-UHFFFAOYSA-N 0.000 description 16
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 description 14
- -1 methyl endomethylenetetrahydrophthalic anhydride Chemical compound 0.000 description 14
- 239000000203 mixture Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 10
- 239000001055 blue pigment Substances 0.000 description 10
- 239000001054 red pigment Substances 0.000 description 10
- 239000000758 substrate Substances 0.000 description 10
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 9
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical group COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 8
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Chemical group OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical group CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 7
- 230000001747 exhibiting effect Effects 0.000 description 7
- 239000000178 monomer Substances 0.000 description 7
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 7
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 6
- 238000012644 addition polymerization Methods 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 6
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 6
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 5
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical group OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 5
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 5
- 239000006229 carbon black Substances 0.000 description 5
- 150000001735 carboxylic acids Chemical class 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 229920001577 copolymer Polymers 0.000 description 5
- 150000002440 hydroxy compounds Chemical class 0.000 description 5
- LVHBHZANLOWSRM-UHFFFAOYSA-N itaconic acid Chemical group OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- WQGWDDDVZFFDIG-UHFFFAOYSA-N trihydroxybenzene Natural products OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 5
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical group FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 4
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 4
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical group OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 4
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 4
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 4
- 239000002518 antifoaming agent Substances 0.000 description 4
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical group OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 229920003986 novolac Polymers 0.000 description 4
- 238000006068 polycondensation reaction Methods 0.000 description 4
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 3
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 description 3
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000004952 Polyamide Substances 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 3
- 125000004018 acid anhydride group Chemical group 0.000 description 3
- 150000008064 anhydrides Chemical class 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 125000003118 aryl group Chemical group 0.000 description 3
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical group C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 3
- 239000003112 inhibitor Substances 0.000 description 3
- 150000002484 inorganic compounds Chemical class 0.000 description 3
- 229910010272 inorganic material Inorganic materials 0.000 description 3
- 239000011976 maleic acid Chemical group 0.000 description 3
- 239000004014 plasticizer Substances 0.000 description 3
- 229920002647 polyamide Polymers 0.000 description 3
- 229920005596 polymer binder Polymers 0.000 description 3
- 239000002491 polymer binding agent Substances 0.000 description 3
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 3
- 229940079877 pyrogallol Drugs 0.000 description 3
- 239000004094 surface-active agent Substances 0.000 description 3
- 238000012719 thermal polymerization Methods 0.000 description 3
- BJFHJALOWQJJSQ-UHFFFAOYSA-N (3-methoxy-3-methylpentyl) acetate Chemical compound CCC(C)(OC)CCOC(C)=O BJFHJALOWQJJSQ-UHFFFAOYSA-N 0.000 description 2
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 2
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 2
- YHMYGUUIMTVXNW-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione Chemical compound C1=CC=C2NC(S)=NC2=C1 YHMYGUUIMTVXNW-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- LEJBBGNFPAFPKQ-UHFFFAOYSA-N 2-(2-prop-2-enoyloxyethoxy)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOC(=O)C=C LEJBBGNFPAFPKQ-UHFFFAOYSA-N 0.000 description 2
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 description 2
- INQDDHNZXOAFFD-UHFFFAOYSA-N 2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOC(=O)C=C INQDDHNZXOAFFD-UHFFFAOYSA-N 0.000 description 2
- HCLJOFJIQIJXHS-UHFFFAOYSA-N 2-[2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOCCOC(=O)C=C HCLJOFJIQIJXHS-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- DZZAHLOABNWIFA-UHFFFAOYSA-N 2-butoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCCCC)C(=O)C1=CC=CC=C1 DZZAHLOABNWIFA-UHFFFAOYSA-N 0.000 description 2
- QAGHEHQMRFEQMB-UHFFFAOYSA-N 2-ethylidenepropanedioic acid Chemical compound CC=C(C(O)=O)C(O)=O QAGHEHQMRFEQMB-UHFFFAOYSA-N 0.000 description 2
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 2
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 2
- POYODSZSSBWJPD-UHFFFAOYSA-N 2-methylprop-2-enoyloxy 2-methylprop-2-eneperoxoate Chemical compound CC(=C)C(=O)OOOC(=O)C(C)=C POYODSZSSBWJPD-UHFFFAOYSA-N 0.000 description 2
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 2
- VRBUPQGTJAXZAE-UHFFFAOYSA-N 2-propylidenebutanedioic acid Chemical compound CCC=C(C(O)=O)CC(O)=O VRBUPQGTJAXZAE-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
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- JYFHMPAMYWZIAE-UHFFFAOYSA-N COC1=NN=NC=C1C=CC1=CC=CC=C1 Chemical compound COC1=NN=NC=C1C=CC1=CC=CC=C1 JYFHMPAMYWZIAE-UHFFFAOYSA-N 0.000 description 2
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 2
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- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 2
- DXVYLFHTJZWTRF-UHFFFAOYSA-N Ethyl isobutyl ketone Chemical compound CCC(=O)CC(C)C DXVYLFHTJZWTRF-UHFFFAOYSA-N 0.000 description 2
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 2
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- YNAVUWVOSKDBBP-UHFFFAOYSA-N Morpholine Chemical compound C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-N 0.000 description 2
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- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- GLUUGHFHXGJENI-UHFFFAOYSA-N Piperazine Chemical compound C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 description 2
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- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 2
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- 150000008065 acid anhydrides Chemical class 0.000 description 2
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- 125000001931 aliphatic group Chemical group 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- GCTPMLUUWLLESL-UHFFFAOYSA-N benzyl prop-2-enoate Chemical compound C=CC(=O)OCC1=CC=CC=C1 GCTPMLUUWLLESL-UHFFFAOYSA-N 0.000 description 2
- WGQKYBSKWIADBV-UHFFFAOYSA-N benzylamine Chemical compound NCC1=CC=CC=C1 WGQKYBSKWIADBV-UHFFFAOYSA-N 0.000 description 2
- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- HQABUPZFAYXKJW-UHFFFAOYSA-N butan-1-amine Chemical compound CCCCN HQABUPZFAYXKJW-UHFFFAOYSA-N 0.000 description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
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- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 150000004985 diamines Chemical class 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 2
- 239000001530 fumaric acid Chemical group 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 235000011187 glycerol Nutrition 0.000 description 2
- ZSIAUFGUXNUGDI-UHFFFAOYSA-N hexan-1-ol Chemical compound CCCCCCO ZSIAUFGUXNUGDI-UHFFFAOYSA-N 0.000 description 2
- NAQMVNRVTILPCV-UHFFFAOYSA-N hexane-1,6-diamine Chemical compound NCCCCCCN NAQMVNRVTILPCV-UHFFFAOYSA-N 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical compound CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- FDPIMTJIUBPUKL-UHFFFAOYSA-N pentan-3-one Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 description 2
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 150000007519 polyprotic acids Polymers 0.000 description 2
- 229960001755 resorcinol Drugs 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 125000006158 tetracarboxylic acid group Chemical group 0.000 description 2
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 2
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Chemical group CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 2
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- GWSFVTOFDIMEJF-UHFFFAOYSA-N phenylmethanethiol hydrate Chemical compound [OH-].C(C1=CC=CC=C1)[SH2+] GWSFVTOFDIMEJF-UHFFFAOYSA-N 0.000 description 1
- 235000021317 phosphate Nutrition 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920002755 poly(epichlorohydrin) Polymers 0.000 description 1
- 229920000768 polyamine Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920002338 polyhydroxyethylmethacrylate Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
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- 239000001267 polyvinylpyrrolidone Substances 0.000 description 1
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 150000003141 primary amines Chemical class 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- BOQSSGDQNWEFSX-UHFFFAOYSA-N propan-2-yl 2-methylprop-2-enoate Chemical compound CC(C)OC(=O)C(C)=C BOQSSGDQNWEFSX-UHFFFAOYSA-N 0.000 description 1
- LYBIZMNPXTXVMV-UHFFFAOYSA-N propan-2-yl prop-2-enoate Chemical compound CC(C)OC(=O)C=C LYBIZMNPXTXVMV-UHFFFAOYSA-N 0.000 description 1
- NHARPDSAXCBDDR-UHFFFAOYSA-N propyl 2-methylprop-2-enoate Chemical compound CCCOC(=O)C(C)=C NHARPDSAXCBDDR-UHFFFAOYSA-N 0.000 description 1
- FOWDZVNRQHPXDO-UHFFFAOYSA-N propyl hydrogen carbonate Chemical compound CCCOC(O)=O FOWDZVNRQHPXDO-UHFFFAOYSA-N 0.000 description 1
- PNXMTCDJUBJHQJ-UHFFFAOYSA-N propyl prop-2-enoate Chemical compound CCCOC(=O)C=C PNXMTCDJUBJHQJ-UHFFFAOYSA-N 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- CXZRDVVUVDYSCQ-UHFFFAOYSA-M pyronin B Chemical compound [Cl-].C1=CC(=[N+](CC)CC)C=C2OC3=CC(N(CC)CC)=CC=C3C=C21 CXZRDVVUVDYSCQ-UHFFFAOYSA-M 0.000 description 1
- INCIMLINXXICKS-UHFFFAOYSA-M pyronin Y Chemical compound [Cl-].C1=CC(=[N+](C)C)C=C2OC3=CC(N(C)C)=CC=C3C=C21 INCIMLINXXICKS-UHFFFAOYSA-M 0.000 description 1
- 239000001020 pyronin dye Substances 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 1
- AZJPTIGZZTZIDR-UHFFFAOYSA-L rose bengal Chemical compound [K+].[K+].[O-]C(=O)C1=C(Cl)C(Cl)=C(Cl)C(Cl)=C1C1=C2C=C(I)C(=O)C(I)=C2OC2=C(I)C([O-])=C(I)C=C21 AZJPTIGZZTZIDR-UHFFFAOYSA-L 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 150000003335 secondary amines Chemical class 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229940014800 succinic anhydride Drugs 0.000 description 1
- LPSWFOCTMJQJIS-UHFFFAOYSA-N sulfanium;hydroxide Chemical class [OH-].[SH3+] LPSWFOCTMJQJIS-UHFFFAOYSA-N 0.000 description 1
- 150000003464 sulfur compounds Chemical class 0.000 description 1
- SJMYWORNLPSJQO-UHFFFAOYSA-N tert-butyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(C)(C)C SJMYWORNLPSJQO-UHFFFAOYSA-N 0.000 description 1
- ISXSCDLOGDJUNJ-UHFFFAOYSA-N tert-butyl prop-2-enoate Chemical compound CC(C)(C)OC(=O)C=C ISXSCDLOGDJUNJ-UHFFFAOYSA-N 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- 239000001016 thiazine dye Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- ANRHNWWPFJCPAZ-UHFFFAOYSA-M thionine Chemical compound [Cl-].C1=CC(N)=CC2=[S+]C3=CC(N)=CC=C3N=C21 ANRHNWWPFJCPAZ-UHFFFAOYSA-M 0.000 description 1
- URAYPUMNDPQOKB-UHFFFAOYSA-N triacetin Chemical compound CC(=O)OCC(OC(C)=O)COC(C)=O URAYPUMNDPQOKB-UHFFFAOYSA-N 0.000 description 1
- 229960002622 triacetin Drugs 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
- 239000013638 trimer Substances 0.000 description 1
- MDTPTXSNPBAUHX-UHFFFAOYSA-M trimethylsulfanium;hydroxide Chemical compound [OH-].C[S+](C)C MDTPTXSNPBAUHX-UHFFFAOYSA-M 0.000 description 1
- 239000001018 xanthene dye Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Materials For Photolithography (AREA)
- Optical Filters (AREA)
- Liquid Crystal (AREA)
- Electroluminescent Light Sources (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Abstract
Description
本発明は、液晶ディスプレイ等のカラーフィルターやブラックマトリクス等の製造に好適な黒色感光性樹脂組成物に関する。 The present invention relates to a black photosensitive resin composition suitable for producing a color filter such as a liquid crystal display or a black matrix.
黒色感光性樹脂組成物は、カラーフィルター、液晶表示材料、有機エレクトロルミネッセンス(EL)ディスプレイパネル材料、等の表示素子の製造に不可欠の材料である。例えば、カラー液晶ディスプレイ等の各種多色表示体に備えられるカラーフィルターには、表示コントラストや発色効果を高めるために、R(赤)、G(緑)、B(青)などの着色層間の境界部分にブラックマトリクスが必要とされるが、このブラックマトリクスは黒色感光性樹脂組成物から形成されるものである。 The black photosensitive resin composition is an indispensable material for manufacturing display elements such as a color filter, a liquid crystal display material, and an organic electroluminescence (EL) display panel material. For example, a color filter provided in various multicolor displays such as a color liquid crystal display has a boundary between colored layers such as R (red), G (green), and B (blue) in order to enhance display contrast and coloring effect. A black matrix is required for the portion, and this black matrix is formed from a black photosensitive resin composition.
ブラックマトリクスに関しては、以下の文献が存在する。特許文献1では、高い黒色度と絶縁性を有するブラックマトリクスを得るために、黒色顔料としてコバルト酸化物類を含有させたブラックマトリクス材料が開示されている。特許文献2では、形成されたパターンの侵食率が小さく、現像時にパターン形状が逆テーパー状になり難く、ラビング布のパターン部分への引っ掛かりおよびパターンの剥がれを有効に防止することができ、しかも焼き付き等の表示不良を生じることがない、薄膜トランジスタ(TFT)方式カラー液晶表示装置の駆動用基板上にスペーサーおよび/またはブラックマトリックスを形成するために用いられることが開示されている。特許文献3では、ペリレン系化合物を用いたブラックマトリックス材料が開示されている。特許文献4では、高い遮光率を有する高絶縁性の遮光膜を形成するために、擬似黒色化した混色有機顔料からなる絶縁性有機顔料とカーボンブラック等の遮光材とを含むブラックマトリクス材料が開示されている。 Regarding the black matrix, the following documents exist. Patent Document 1 discloses a black matrix material containing cobalt oxides as a black pigment in order to obtain a black matrix having high blackness and insulating properties. In Patent Document 2, the erosion rate of the formed pattern is small, the pattern shape hardly forms a reverse taper at the time of development, and it is possible to effectively prevent the rubbing cloth from being caught on the pattern portion and peeling of the pattern, and to be seized. It is disclosed that it is used for forming a spacer and / or a black matrix on a driving substrate of a thin film transistor (TFT) type color liquid crystal display device that does not cause display defects such as the above. Patent Document 3 discloses a black matrix material using a perylene-based compound. Patent Document 4 discloses a black matrix material including an insulating organic pigment composed of a mixed-colored organic pigment that has been pseudo-blackened and a light shielding material such as carbon black in order to form a highly insulating light shielding film having a high light shielding rate. Has been.
さて、近年、ブラックマトリクス材料が液晶層を挟んで存在する電極基板間を指示するフォトスペーサーとして用いられる場合がある。この場合、フォトスペーサーには絶縁性が要求される。液晶パネル関連分野では、ビーズスペーサーの代わりとして黒色のフォトスペーサーを用いて画像コントラストを高める技術がある。 In recent years, there are cases where a black matrix material is used as a photospacer for indicating between electrode substrates present with a liquid crystal layer interposed therebetween. In this case, the photo spacer is required to have insulating properties. In the field related to liquid crystal panels, there is a technique for increasing image contrast using a black photo spacer instead of a bead spacer.
また、有機ELパネル素子の場合も画素と画素の間にも絶縁層が必要である。有機ELパネル関連分野では、黒色の格子(ブラックマトリクス)を形成して遮光性を高める技術がある。
しかしながら、現在主流のカーボン顔料分散型感光性組成物では電気抵抗が小さいため、フォトスペーサーまたは絶縁材料として使用するのが困難であった。したがって、特許文献1〜4のように有機化合物に比べに電気抵抗の小さい無機化合物を用いているブラックマトリクス材料の絶縁性では、不十分であった。また、特許文献3,4では、黒色有機系顔料としてペリレンブラックを用いているが、これ以外に例えばカーボンブラック等の無機系化合物を含んでおり、絶縁性としては不十分であった。 However, the current mainstream carbon pigment-dispersed photosensitive compositions have a low electrical resistance, and thus are difficult to use as photo spacers or insulating materials. Therefore, the insulating property of the black matrix material using an inorganic compound having a smaller electric resistance than the organic compound as in Patent Documents 1 to 4 is insufficient. In Patent Documents 3 and 4, perylene black is used as the black organic pigment, but other than this, for example, an inorganic compound such as carbon black is included, and the insulating property is insufficient.
また、赤・青・緑・シアン・マゼンダ・イエロー・ピンクなどの有機顔料を使用しても可視光線の遮光が十分でなく、顔料分散型感光性組成物内の顔料総量の含有率を高める必要があった。しかしながら、顔料分散型感光性樹脂に対する顔料の割合が相対的に増加するため、感度及び現像性が著しく悪化し、ブラックマトリクスパターン形状が満足なものを得ることができず、コントラストを向上させることができなかった。 In addition, even if organic pigments such as red, blue, green, cyan, magenta, yellow, and pink are used, the visible light is not sufficiently shielded, and the total pigment content in the pigment-dispersed photosensitive composition must be increased. was there. However, since the ratio of the pigment to the pigment-dispersed photosensitive resin is relatively increased, the sensitivity and developability are remarkably deteriorated, a satisfactory black matrix pattern shape cannot be obtained, and the contrast can be improved. could not.
上記の課題に鑑み、本発明では、絶縁性を有する膜を形成する黒色感光性樹脂組成物を提供し、さらに、より好ましい黒色を呈しパターン形状の良好な膜を形成する黒色感光性樹脂組成物を提供する。 In view of the above problems, the present invention provides a black photosensitive resin composition that forms a film having insulating properties, and further exhibits a more preferable black color and forms a film having a good pattern shape. I will provide a.
本発明にかかる黒色顔料を含む顔料成分を含有する黒色感光性樹脂組成物は、前記顔料成分が絶縁性有機顔料からなることを特徴とする。
このように構成することにより、当該黒色感光性樹脂組成物により形成された膜が絶縁性をすることができる。
The black photosensitive resin composition containing the pigment component containing the black pigment according to the present invention is characterized in that the pigment component is composed of an insulating organic pigment.
By comprising in this way, the film | membrane formed with the said black photosensitive resin composition can make insulation.
また、本発明にかかる黒色感光性樹脂組成物の前記黒色顔料は、ペリレンブラックであることを特徴とする。
このように構成することにより、導電性である無機化合物を使用せず、絶縁性有機材料を使用することができるため、当該黒色感光性樹脂組成物により形成された膜が絶縁性をすることができる。
The black pigment of the black photosensitive resin composition according to the present invention is perylene black.
By comprising in this way, since the insulating organic material can be used without using the conductive inorganic compound, the film formed of the black photosensitive resin composition may be insulative. it can.
本発明にかかる黒色感光性樹脂組成物の前記顔料成分は、赤色有機顔料と青色有機顔料を含むことを特徴とする。
このように構成することにより、黒色顔料を含む顔料成分の呈する黒色の度合いを向上させることができ、コントラストを向上させることができる。
The pigment component of the black photosensitive resin composition according to the present invention includes a red organic pigment and a blue organic pigment.
By comprising in this way, the black degree which the pigment component containing a black pigment exhibits can be improved, and contrast can be improved.
また、本発明にかかる黒色感光性樹脂組成物により形成された膜の誘電率は、7以下であることを特徴とする。
このように構成することにより、実用レベルでの絶縁性を得ることができる。
Moreover, the dielectric constant of the film formed with the black photosensitive resin composition concerning this invention is 7 or less, It is characterized by the above-mentioned.
With this configuration, insulation at a practical level can be obtained.
また、本発明にかかる前記黒色感光性樹脂組成物により形成された膜の光学密度は、膜厚1μm当たり1以上であることを特徴とする。
このように構成することにより、前記黒色感光性樹脂組成物により形成された膜が高遮光性を有する。
Moreover, the optical density of the film formed of the black photosensitive resin composition according to the present invention is 1 or more per 1 μm of film thickness.
By comprising in this way, the film | membrane formed with the said black photosensitive resin composition has high light-shielding property.
また、本発明にかかる前記黒色感光性樹脂組成物は、光重合性化合物、光重合開始剤、及び溶剤を含むことを特徴とする。
このように構成することにより、ネガ型の黒色感光性樹脂組成物を得ることができる。
Moreover, the said black photosensitive resin composition concerning this invention is characterized by including a photopolymerizable compound, a photoinitiator, and a solvent.
By comprising in this way, a negative type black photosensitive resin composition can be obtained.
本発明にかかる前記黒色感光性樹脂組成物に含まれる前記光重合性化合物、前記光重合開始剤、及び前記溶剤を合計した重量に対して、前記顔料成分が20重量%〜250重量%の割合で含まれることを特徴とする。 The ratio of the pigment component of 20% by weight to 250% by weight based on the total weight of the photopolymerizable compound, the photopolymerization initiator, and the solvent contained in the black photosensitive resin composition according to the present invention. It is included in.
このように構成することにより、この重量比の範囲内で最適な遮光率及びパターン形状を得ることができる。
また、本発明の黒色感光性樹脂組成物からブラックマトリクスを形成することを特徴とする。
By comprising in this way, the optimal light-shielding rate and pattern shape can be obtained within the range of this weight ratio.
Moreover, a black matrix is formed from the black photosensitive resin composition of the present invention.
このように構成することにより、高コントラストを得ることができる。
また、前記ブラックマトリクスを有機エレクトロルミネッセンス(EL)ディスプレイパネルに用いることを特徴とする。
With this configuration, a high contrast can be obtained.
The black matrix is used for an organic electroluminescence (EL) display panel.
このように構成することにより、高コントラストを有する有機ELディスプレイを得ることができる。
また、前記ブラックマトリクスを液晶ディスプレイパネルに用いることを特徴とする。
By comprising in this way, the organic electroluminescent display which has high contrast can be obtained.
The black matrix may be used for a liquid crystal display panel.
このように構成することにより、高コントラストを有する液晶ディスプレイパネルを得ることができる。
また、本発明の黒色感光性樹脂組成物からフォトスペーサーを形成することを特徴とする。
By comprising in this way, the liquid crystal display panel which has high contrast can be obtained.
Moreover, a photo spacer is formed from the black photosensitive resin composition of the present invention.
このように構成することにより、黒色感光性樹脂組成物により形成された膜をフォトスペーサーとして用いることができる。
また、前記フォトスペーサーを液晶ディスプレイパネルに用いることを特徴とする。
By comprising in this way, the film | membrane formed with the black photosensitive resin composition can be used as a photospacer.
Further, the photo spacer is used for a liquid crystal display panel.
このように構成することにより、黒色感光性樹脂組成物により形成された膜をフォトスペーサーとして用いた液晶ディスプレイパネルを得ることができる。 By comprising in this way, the liquid crystal display panel using the film | membrane formed with the black photosensitive resin composition as a photospacer can be obtained.
本発明を用いることにより、高絶縁性を有する黒色感光性樹脂膜を形成することができる。また、より好ましい黒色を呈し高い遮光性を有する黒色感光性樹脂膜を形成することができる。 By using the present invention, a black photosensitive resin film having high insulating properties can be formed. Moreover, the black photosensitive resin film which exhibits more preferable black and has high light-shielding property can be formed.
以下に、本発明の実施の形態を詳細に説明する。
本実施形態における黒色感光性樹脂組成物は、光重合性化合物、光重合開始剤、顔料、溶剤を含んでいる。そして、この顔料は、カーボンブラック等の導電性黒色顔料が含まれない、黒色を呈する絶縁性有機顔料からなる。さらに、顔料として、この絶縁性有機顔料以外にも赤色有機顔料、及び/または青色有機顔料を含んでいてもよく、また、イエロー、バイオレット等の色を呈する有機顔料を含んでいてもよい。
Hereinafter, embodiments of the present invention will be described in detail.
The black photosensitive resin composition in this embodiment contains a photopolymerizable compound, a photopolymerization initiator, a pigment, and a solvent. This pigment is made of an insulating organic pigment exhibiting black without containing a conductive black pigment such as carbon black. Further, as the pigment, in addition to the insulating organic pigment, a red organic pigment and / or a blue organic pigment may be included, and an organic pigment exhibiting a color such as yellow or violet may be included.
前記黒色感光性樹脂組成物は、前記光重合性化合物、前記光重合開始剤、及び前記溶剤を合計した重量に対して、前記顔料成分が20重量%〜250重量%の割合で含まれている。この顔料成分の割合は、黒色感光性樹脂組成物より形成された膜を使用するときの膜厚や必要な遮光率に合わせて変化させることができる。前記顔料成分割合が20重量%を下回ると遮光率が極端に小さくなる。また、前記顔料成分割合が250重量%を超えると、樹脂の架橋構造が全体として少なくなり、露光時に十分な感度が得られず、満足なパターン形状を得ることができない。 The black photosensitive resin composition contains the pigment component in a proportion of 20 wt% to 250 wt% with respect to the total weight of the photopolymerizable compound, the photopolymerization initiator, and the solvent. . The proportion of the pigment component can be changed in accordance with the film thickness when using a film formed from the black photosensitive resin composition and the required light shielding rate. When the pigment component ratio is less than 20% by weight, the light shielding ratio becomes extremely small. On the other hand, if the pigment component ratio exceeds 250% by weight, the cross-linked structure of the resin is reduced as a whole, sufficient sensitivity cannot be obtained during exposure, and a satisfactory pattern shape cannot be obtained.
前記光重合性化合物は、アルカリ可溶性樹脂となり得る光重合性化合物であり、下記一般式(1)で示される。 The photopolymerizable compound is a photopolymerizable compound that can be an alkali-soluble resin, and is represented by the following general formula (1).
但し、前記一般式(1)において、nは1〜20の整数であり、
Yはジカルボン酸無水物の酸無水物基を除いた残基であり、
Zはテトラカルボン酸二無水物の酸無水物基を除いた残基であり、
Xは、
However, in the said General formula (1), n is an integer of 1-20,
Y is a residue obtained by removing the acid anhydride group of the dicarboxylic acid anhydride,
Z is a residue obtained by removing the acid anhydride group of tetracarboxylic dianhydride;
X is
R1、R2は、H、CH3又は
R 1 and R 2 are H, CH 3 or
R3は、H又はCH3である。
R 3 is H or CH 3 .
ここで、「酸無水物基」とは、「−CO−O−CO−基」を言う。
また、ジカルボン酸無水物としては、例えば無水マレイン酸、無水コハク酸、無水イタコン酸、無水フタル酸、無水テトラヒドロフタル酸、無水ヘキサヒドロフタル酸、無水メチルエンドメチレンテトラヒドロフタル酸、無水クロレンド酸、メチルテトラヒドロ無水フタル酸、無水グルタル酸などが挙げられる。
また、テトラカルボン酸二無水物としては、例えば無水ピロメリット酸、ベンゾフェノンテトラカルボン酸二無水物、ビフェニルテトラカルボン酸二無水物、ビフェニルエーテルテトラカルボン酸二無水物等の芳香族多価カルボン酸無水物が挙げられる。
Here, the “acid anhydride group” refers to a “—CO—O—CO— group”.
Examples of the dicarboxylic acid anhydride include maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methyl endomethylenetetrahydrophthalic anhydride, chlorendic anhydride, methyl Examples include tetrahydrophthalic anhydride and glutaric anhydride.
Examples of tetracarboxylic dianhydrides include aromatic polycarboxylic anhydrides such as pyromellitic anhydride, benzophenonetetracarboxylic dianhydride, biphenyltetracarboxylic dianhydride, and biphenyl ether tetracarboxylic dianhydride. Things.
前記一般式(1)で示される光重合性化合物は、特開2001−354735号公報に記載の方法により得ることができる。一般式(1)で示される光重合性化合物は重合鎖内にジカルボン酸無水物残基を実質上有していないことから、重合鎖内にジカルボン酸無水物残基を有する化合物とは異なり、同じ固形分濃度でも、溶液粘度を制御し易く、塗布時の作業性の改善、コーティング特性の向上、膜厚の均一化を図ることができる。 The photopolymerizable compound represented by the general formula (1) can be obtained by the method described in JP-A No. 2001-354735. Since the photopolymerizable compound represented by the general formula (1) has substantially no dicarboxylic anhydride residue in the polymerization chain, it differs from a compound having a dicarboxylic anhydride residue in the polymerization chain, Even at the same solid content concentration, it is easy to control the viscosity of the solution, and it is possible to improve workability during coating, improve coating characteristics, and make the film thickness uniform.
また、前記一般式(1)で示される光重合性化合物は、付加重合可能なエチレン性不飽和二重結合を化合物中に少なくとも二つ有し、感光性樹脂組成物が光重合開始剤を活性化させる所定波長の光線の照射を受けたとき、光学濃度が高くても、光重合開始剤の作用により付加重合して硬化することができる。逆に言えば、液晶ディスプレイ等のカラーフィルターのブラックマトリックスパターンを形成する時に、本発明の感光性樹脂組成物を用いれば、黒色顔料の含有量を多くして遮光性を高くすることができる。このため、表示コントラストが高く、R、G、Bの発色の美しいカラーフィルターを製造することができる。 The photopolymerizable compound represented by the general formula (1) has at least two ethylenically unsaturated double bonds capable of addition polymerization in the compound, and the photosensitive resin composition activates the photopolymerization initiator. When irradiated with light of a predetermined wavelength to be converted, even if the optical density is high, it can be cured by addition polymerization by the action of a photopolymerization initiator. In other words, when the black matrix pattern of a color filter such as a liquid crystal display is formed, if the photosensitive resin composition of the present invention is used, the content of the black pigment can be increased to improve the light shielding property. For this reason, a color filter having a high display contrast and a beautiful color of R, G, B can be manufactured.
上記の感光性樹脂組成物に、更に付加重合可能なエチレン性不飽和二重結合を有する化合物を加えると好ましい。
ここで、「付加重合可能なエチレン性不飽和二重結合を有する化合物」(以下、「エチレン性化合物」という。)とは、感光性樹脂組成物が所定波長の光線の照射を受けたとき、光重合開始剤の作用により付加重合硬化するようなエチレン性不飽和二重結合を少なくとも1つ有する化合物であって、前記のエチレン性不飽和二重結合を有する単量体又は側鎖若しくは主鎖にエチレン性不飽和二重結合を有する重合体である。また、前記単量体はいわゆる高分子物質に相対する差違化した概念であって、狭義の「単量体」にとどまらず、二量体、三量体、オリゴマーを含有する。
It is preferable to add a compound having an ethylenically unsaturated double bond capable of addition polymerization to the photosensitive resin composition.
Here, “a compound having an ethylenically unsaturated double bond capable of addition polymerization” (hereinafter referred to as “ethylenic compound”) means that when the photosensitive resin composition is irradiated with light having a predetermined wavelength, A compound having at least one ethylenically unsaturated double bond that undergoes addition polymerization and curing by the action of a photopolymerization initiator, the monomer having the ethylenically unsaturated double bond, a side chain, or a main chain Is a polymer having an ethylenically unsaturated double bond. The monomer is a differentiated concept relative to a so-called polymer substance, and is not limited to a “monomer” in a narrow sense, but includes a dimer, a trimer, and an oligomer.
前記単量体としては、例えば、不飽和カルボン酸、脂肪族(ポリ)ヒドロキシ化合物と不飽和カルボン酸とのエステル、芳香族(ポリ)ヒドロキシ化合物と不飽和カルボン酸とのエステル、不飽和カルボン酸と多価カルボン酸および前述の脂肪族(ポリ)ヒドロキシ化合物、芳香族(ポリ)ヒドロキシ化合物等の多価ヒドロキシ化合物とのエステル化反応により得られるエステル、不飽和カルボン酸アミド、不飽和カルボン酸ニトリル等が挙げられる。 Examples of the monomer include unsaturated carboxylic acids, esters of aliphatic (poly) hydroxy compounds and unsaturated carboxylic acids, esters of aromatic (poly) hydroxy compounds and unsaturated carboxylic acids, and unsaturated carboxylic acids. , Unsaturated carboxylic acid amide, unsaturated carboxylic acid nitrile obtained by esterification reaction of polycarboxylic acid with polyhydric carboxylic acid and polyhydric hydroxy compound such as aliphatic (poly) hydroxy compound and aromatic (poly) hydroxy compound described above Etc.
具体的にはメチルアクリレート、メチルメタクリレート、エチルアクリレート、エチルメタクリレート、イソブチルアクリレート、イソブチルメタクリレート、2−ヒドロキシエチルアクリレート、2−ヒドロキシエチルメタクリレート、エチレングリコールモノメチルエーテルアクリレート、エチレングリコールモノメチルエーテルメタクリレート、エチレングリコールモノエチルエーテルアクリレート、エチレングリコールモノエチルエーテルメタクリレート、グリセロールアクリレート、グリセロールメタクリレート、アクリル酸アミド、メタクリル酸アミド、アクリロニトリル、メタクリロニトリル、2−エチルヘキシルアクリレート、2−エチルヘキシルメタクリレート、ベンジルアクリレート、ベンジルメタクリレート、エチレングリコールジアクリレート、ジエチレングリコールジアクリレート、エチレングリコールジメタクリレート、トリエチレングリコールジアクリレート、トリエチレングリコールジメタクリレート、テトラエチレングリコールジアクリレート、テトラエチレングリコールジメタクリレート、ブチレングリコールジメタクリレート、プロピレングリコールジアクリレート、プロピレングリコールジメタクリレート、トリメチロールエタントリアクリレート、トリメチロールエタントリメタクリレート、トリメチロールプロパントリアクリレート、トリメチロールプロパントリメタクリレート、テトラメチロールプロパンテトラアクリレート、テトラメチロールプロパンテトラメタクリレート、ペンタエリスリトールトリアクリレート、ペンタエリスリトールトリメタクリレート、ペンタエリスリトールテトラアクリレート、ペンタエリスリトールテトラメタクリレート、ジペンタエリスリトールペンタアクリレート、ジペンタエリスリトールペンタメタクリレート、ジペンタエリスリトールヘキサアクリレート、ジペンタエリスリトールヘキサメタクリレート、1,6−ヘキサンジオールジアクリレート、1,6−ヘキサンジオールジメタクリレート、カルドエポキシジアクリレート、カルドエポキシジメタクリレート、これら例示化合物のアクリレート、メタクリレートを、フマレート、マレエート、クロトネート、イタコネートに代えたものや、アクリル酸、メタクリル酸、フマル酸、マレイン酸、クロトン酸、イタコン酸、ヒドロキノンモノアクリレート、ヒドロキノンモノメタクリレート、ヒドロキノンジアクリレート、ヒドロキノンジメタクリレート、レゾルシンジアクリレート、レゾルシンジメタクリレート、ピロガロールジアクリレート、ピロガロールトリアクリレート、アクリル酸とフタル酸およびジエチレングリコールとの縮合物、アクリル酸とマレイン酸およびジエチレングリコールとの縮合物、メタクリル酸とテレフタル酸およびペンタエリスリトールとの縮合物、アクリル酸とアジピン酸およびブタンジオールとグリセリンとの縮合物、エチレンビスアクリルアミド、エチレンビスメタクリルアミド、フタル酸ジアリルのアリルエステル、ジビニルフタレートなどが有用である。 Specifically, methyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate, isobutyl acrylate, isobutyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, ethylene glycol monomethyl ether acrylate, ethylene glycol monomethyl ether methacrylate, ethylene glycol monoethyl Ether acrylate, ethylene glycol monoethyl ether methacrylate, glycerol acrylate, glycerol methacrylate, acrylic amide, methacrylic amide, acrylonitrile, methacrylonitrile, 2-ethylhexyl acrylate, 2-ethylhexyl methacrylate, benzyl acrylate, benzyl methacrylate, ethyl Glycol diacrylate, diethylene glycol diacrylate, ethylene glycol dimethacrylate, triethylene glycol diacrylate, triethylene glycol dimethacrylate, tetraethylene glycol diacrylate, tetraethylene glycol dimethacrylate, butylene glycol dimethacrylate, propylene glycol diacrylate, propylene glycol di Methacrylate, trimethylolethane triacrylate, trimethylolethane trimethacrylate, trimethylolpropane triacrylate, trimethylolpropane trimethacrylate, tetramethylolpropane tetraacrylate, tetramethylolpropane tetramethacrylate, pentaerythritol triacrylate, pentae Thritol trimethacrylate, pentaerythritol tetraacrylate, pentaerythritol tetramethacrylate, dipentaerythritol pentaacrylate, dipentaerythritol pentamethacrylate, dipentaerythritol hexaacrylate, dipentaerythritol hexamethacrylate, 1,6-hexanediol diacrylate, 1, 6-hexanediol dimethacrylate, cardoepoxy diacrylate, cardoepoxy dimethacrylate, acrylates and methacrylates of these exemplary compounds are replaced with fumarate, maleate, crotonate, itaconate, acrylic acid, methacrylic acid, fumaric acid, maleic acid , Crotonic acid, itaconic acid, hydroquinone monoacrylate, hydroquinone monometa Acrylate, hydroquinone diacrylate, hydroquinone dimethacrylate, resorcin diacrylate, resorcin dimethacrylate, pyrogallol diacrylate, pyrogallol triacrylate, condensate of acrylic acid with phthalic acid and diethylene glycol, condensate of acrylic acid with maleic acid and diethylene glycol, Useful condensates of methacrylic acid with terephthalic acid and pentaerythritol, condensates of acrylic acid with adipic acid and butanediol with glycerin, ethylene bisacrylamide, ethylene bismethacrylamide, allyl ester of diallyl phthalate, divinyl phthalate is there.
また、側鎖もしくは主鎖にエチレン性不飽和二重結合を有する重合体としては、例えば、不飽和二価カルボン酸とジヒドロキシ化合物との重縮合反応により得られるポリエステル、不飽和二価カルボン酸とジアミンとの重縮合反応により得られるポリアミド、イタコン酸、プロピリデンコハク酸、エチリデンマロン酸とジヒドロキシ化合物との重縮合反応により得られるポリエステル、イタコン酸、プロピリデンコハク酸、エチリデンマロン酸とジアミンとの重縮合反応により得られるポリアミド、フェノールノボラック型エポキシアクリレート、フェノールノボラック型エポキシメタクリレート、クレゾールノボラック型エポキシアクリレート、クレゾールノボラック型エポキシメタクリレート、ビスフェノールA型エポキシアクリレート、ビスフェノールS型エポキシアクリレート、ウレタンアクリレートオリゴマー、ウレタンメタクリレートオリゴマーなどが挙げられる。前記エポキシ(メタ)アクリレート樹脂にさらに多塩基酸無水物を反応させたものであってもよい。また、側鎖にヒドロキシ基やハロゲン化アルキル基のごとき反応活性を有する官能基を有する重合体、例えばポリビニルアルコール、ポリ(2−ヒドロキシエチルメタクリレート)、ポリエピクロルヒドリンなどとアクリル酸、メタクリル酸、フマル酸、マレイン酸、クロトン酸、イタコン酸等の不飽和カルボン酸との高分子反応により得られる重合体なども使用できる。中でも、アクリル酸エステルまたはメタクリル酸エステルの単量体を特に好ましく用いることができる。 Examples of the polymer having an ethylenically unsaturated double bond in the side chain or main chain include, for example, a polyester obtained by polycondensation reaction of an unsaturated divalent carboxylic acid and a dihydroxy compound, an unsaturated divalent carboxylic acid, Polyamide, itaconic acid, propylidene succinic acid obtained by polycondensation reaction with diamine, polyester obtained by polycondensation reaction of ethylidene malonic acid and dihydroxy compound, itaconic acid, propylidene succinic acid, ethylidene malonic acid and diamine Polyamide obtained by polycondensation reaction, phenol novolac type epoxy acrylate, phenol novolac type epoxy methacrylate, cresol novolac type epoxy acrylate, cresol novolac type epoxy methacrylate, bisphenol A type epoxy acrylate Bisphenol S-type epoxy acrylate, urethane acrylate oligomer, and urethane methacrylate oligomer. The epoxy (meth) acrylate resin may be further reacted with a polybasic acid anhydride. Polymers having a functional group having a reactive activity such as a hydroxy group or a halogenated alkyl group in the side chain, such as polyvinyl alcohol, poly (2-hydroxyethyl methacrylate), polyepichlorohydrin, and acrylic acid, methacrylic acid, fumaric acid Polymers obtained by polymer reaction with unsaturated carboxylic acids such as maleic acid, crotonic acid and itaconic acid can also be used. Among them, an acrylic ester or a methacrylic ester monomer can be particularly preferably used.
上記エチレン性化合物は、感光性樹脂組成物が所定波長の光線の照射を受けたとき、前記一般式(1)の光重合性化合物とともに付加重合する。よって、組成物全体を架橋されたような構造にすることができる。 The ethylenic compound undergoes addition polymerization together with the photopolymerizable compound of the general formula (1) when the photosensitive resin composition is irradiated with light having a predetermined wavelength. Therefore, the entire composition can be made to have a crosslinked structure.
本発明で用いることのできる光重合開始剤としては、例えば、2,2−ビス(2−クロロフェニル)−4,5,4’、5’−テトラフェニル−1,2’−ビイミダゾール(以下、B−CIM(保土ヶ谷化学社製))、1−ヒドロキシシクロヘキシルフェニルケトン、2,2−ジメトキシ−1,2−ジフェニルエタン−1−オン、2−メチル−1−〔4−(メチルチオ)フェニル〕−2−モルフォリノプロパン−1−オン、2−ベンジル−2−ジメチルアミノ−1−(4−モルフォリノフェニル)−ブタン−1−オン、2−ヒドロキシ−2−メチル−1−フェニルプロパン−1−オン、2,4,6−トリメチルベンゾイルジフェニルホスフィンオキシド、1−〔4−(2−ヒドロキシエトキシ)フェニル〕−2−ヒドロキシ−2−メチル−1−プロパン−1−オン、2,4−ジエチルチオキサントン、2,4−ジメチルチオキサントン、3,3−ジメチル−4−メトキシベンゾフェノン、ベンゾフェノン、2−クロロベンゾフェノン、4,4’−ビスジメチルアミノベンゾフェノン(以下、ミヒラーズケトン)、4,4’−ビスジエチルアミノベンゾフェノン(以下、EAB−F(保土ヶ谷化学社製))、1−(4−イソプロピルフェニル)−2−ヒドロキシ−2−メチルプロパン−1−オン、1−(4−ドデシルフェニル)−2−ヒドロキシ−2−メチルプロパン−1−オン、4−ベンゾイル−4’−メチルジメチルスルフィド、4−ジメチルアミノ安息香酸、4−ジメチルアミノ安息香酸メチル、4−ジメチルアミノ安息香酸エチル、4−ジメチルアミノ安息香酸ブチル、4−ジメチルアミノ安息香酸−2−エチルヘキシルエステル、4−ジメチルアミノ安息香酸−2−イソアミルエステル、アセトフェノン、2,2−ジエトキシアセトフェノン、p−ジメチルアセトフェノン、p−ジメチルアミノプロピオフェノン、トリクロロアセトフェノン、p−tert−ブチルアセトフェノン、ベンジルジメチルケタール、ベンジル−β−メトキシエチルアセタール、1−フェニル−1,2−プロパンジオン−2−(o−エトキシカルボニル)オキシム、o−ベンゾイル安息香酸メチル、ビス(4−ジメチルアミノフェニル)ケトン、4,4’−ビスジエチルアミノベンゾフェノン、ベンジル、ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテル、ベンゾイン−n−ブチルエーテル、ベンゾインイソブチルエーテル、ベンゾインブチルエーテル、p−ジメチルアミノアセトフェノン、チオキサントン、2−メチルチオキサントン、2−イソプロピルチオキサントン、ジベンゾスベロン、α,α−ジクロロ−4−フェノキシアセトフェノン、ペンチル−4−ジメチルアミノベンゾエート、2,4−ビス(トリクロロメチル)−6−(3−ブロモ−4−メトキシ)フェニル−s−トリアジン、2,4−ビス(トリクロロメチル)−6−(p−メトキシ)スチリル−s−トリアジン等のトリアジン化合物などを挙げることができる。 Examples of the photopolymerization initiator that can be used in the present invention include 2,2-bis (2-chlorophenyl) -4,5,4 ′, 5′-tetraphenyl-1,2′-biimidazole (hereinafter, B-CIM (manufactured by Hodogaya Chemical Co., Ltd.)), 1-hydroxycyclohexyl phenyl ketone, 2,2-dimethoxy-1,2-diphenylethane-1-one, 2-methyl-1- [4- (methylthio) phenyl]- 2-morpholinopropan-1-one, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butan-1-one, 2-hydroxy-2-methyl-1-phenylpropane-1- ON, 2,4,6-trimethylbenzoyldiphenylphosphine oxide, 1- [4- (2-hydroxyethoxy) phenyl] -2-hydroxy-2-methyl-1- Lopan-1-one, 2,4-diethylthioxanthone, 2,4-dimethylthioxanthone, 3,3-dimethyl-4-methoxybenzophenone, benzophenone, 2-chlorobenzophenone, 4,4′-bisdimethylaminobenzophenone (hereinafter, Michler's ketone), 4,4′-bisdiethylaminobenzophenone (hereinafter referred to as EAB-F (manufactured by Hodogaya Chemical Co., Ltd.)), 1- (4-isopropylphenyl) -2-hydroxy-2-methylpropan-1-one, 1- ( 4-dodecylphenyl) -2-hydroxy-2-methylpropan-1-one, 4-benzoyl-4′-methyldimethylsulfide, 4-dimethylaminobenzoic acid, methyl 4-dimethylaminobenzoate, 4-dimethylaminobenzoate Ethyl acetate, butyl 4-dimethylaminobenzoate, 4-di Tylaminobenzoic acid-2-ethylhexyl ester, 4-dimethylaminobenzoic acid-2-isoamyl ester, acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-dimethylaminopropiophenone, trichloroacetophenone, p-tert -Butylacetophenone, benzyldimethyl ketal, benzyl-β-methoxyethyl acetal, 1-phenyl-1,2-propanedione-2- (o-ethoxycarbonyl) oxime, methyl o-benzoylbenzoate, bis (4-dimethylamino) Phenyl) ketone, 4,4′-bisdiethylaminobenzophenone, benzyl, benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin-n-butyl ether Ter, benzoin isobutyl ether, benzoin butyl ether, p-dimethylaminoacetophenone, thioxanthone, 2-methylthioxanthone, 2-isopropylthioxanthone, dibenzosuberone, α, α-dichloro-4-phenoxyacetophenone, pentyl-4-dimethylaminobenzoate, 2,4-bis (trichloromethyl) -6- (3-bromo-4-methoxy) phenyl-s-triazine, 2,4-bis (trichloromethyl) -6- (p-methoxy) styryl-s-triazine, etc. And triazine compounds.
また、上記の他に、チオキサントン、2−クロロチオキサントン、2,4−ジエチルチオキサンテン、2−メチルチオキサンテン、2−イソプロピルチオキサンテン等のイオウ化合物や、2−エチルアントラキノン、オクタメチルアントラキノン、1,2−ベンズアントラキノン、2,3−ジフェニルアントラキノン等のアントラキノン類や、アゾビスイソブチロニトリル、ベンゾイルパーオキシド、クメンパーオキシド等の有機過酸化物や、2−メルカプトベンゾイミダール、2−メルカプトベンゾオキサゾール、2−メルカプトベンゾチアゾール等のチオール化合物等を用いることもできる。 In addition to the above, sulfur compounds such as thioxanthone, 2-chlorothioxanthone, 2,4-diethylthioxanthene, 2-methylthioxanthene, 2-isopropylthioxanthene, 2-ethylanthraquinone, octamethylanthraquinone, 1,2 -Anthraquinones such as benzanthraquinone and 2,3-diphenylanthraquinone, organic peroxides such as azobisisobutyronitrile, benzoyl peroxide, cumene peroxide, 2-mercaptobenzoimidar, 2-mercaptobenzoxazole Thiol compounds such as 2-mercaptobenzothiazole can also be used.
これらの光重合開始剤は、1種を単独で用いてもよいし、2種以上を組み合わせて用いてもよい。特に、B−CIMとEAB−Fは単独でも他のものを組み合わせても好ましく用いられる。 These photoinitiators may be used individually by 1 type, and may be used in combination of 2 or more type. In particular, B-CIM and EAB-F are preferably used either alone or in combination.
具体的な組み合わせとしては、例えば、B−CIMと、2−メチル−1−〔4−(メチルチオ)フェニル〕−2−モルホリノプロパン−1−オン又は2−ベンジル−2−ジメチルアミノ−1−(4−モルフォリノフェニル)−ブタン−1−オンとの組み合わせ、B−CIMと2,4−ビス(トリクロロメチル)−6−(3−ブロモ−4−メトキシ)フェニル−s−トリアジン又は2,4−ビス(トリクロロメチル)−6−(p−メトキシ)スチリル−s−トリアジンとの組み合わせ、B−CIMと、2−メチル−〔4−(メチルチオ)フェニル〕−2−モルホリノプロパン−1−オン又は2−ベンジル−2−ジメチルアミノ−1−(4−モルフォリノフェニル)−ブタン−1−オンと、2,4−ビス(トリクロロメチル)−6−(3−ブロモ−4−メトキシ)フェニル−s−トリアジン又は2,4−ビス(トリクロロメチル)−6−(p−メトキシ)スチリル−s−トリアジンとの組み合わせ、EAB−Fと2−ベンジル−2−ジメチルアミノ−1−(4−モルフォリノフェニル)−ブタン−1−オンとの組み合わせ、トリアジンとEAB−Fと2−メルカプトベンゾイミダゾールとp−メトキシスチリルトリアジンとの組み合わせ、2−メルカプトベンゾイミダゾールとp−メトキシスチリルトリアジンとの組み合わせ等を挙げることができる。 Specific examples of the combination include B-CIM and 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropan-1-one or 2-benzyl-2-dimethylamino-1- ( 4-morpholinophenyl) -butan-1-one, B-CIM and 2,4-bis (trichloromethyl) -6- (3-bromo-4-methoxy) phenyl-s-triazine or 2,4 -Bis (trichloromethyl) -6- (p-methoxy) styryl-s-triazine, B-CIM and 2-methyl- [4- (methylthio) phenyl] -2-morpholinopropan-1-one or 2-Benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butan-1-one and 2,4-bis (trichloromethyl) -6- (3-bromo 4-methoxy) phenyl-s-triazine or 2,4-bis (trichloromethyl) -6- (p-methoxy) styryl-s-triazine in combination, EAB-F and 2-benzyl-2-dimethylamino-1 Combination of-(4-morpholinophenyl) -butan-1-one, combination of triazine, EAB-F, 2-mercaptobenzimidazole and p-methoxystyryltriazine, 2-mercaptobenzimidazole and p-methoxystyryltriazine And the like.
黒色顔料として、絶縁性有機顔料を用いる。本実施形態では、黒色顔料に黒色を呈するペリレン系化合物、いわゆるペリレンブラックを用いる。ペリレンブラックは、カーボンブラック等の導電性無機物よりもかなり導電性の小さい有機化合物である。 An insulating organic pigment is used as the black pigment. In the present embodiment, a black-colored perylene-based compound, so-called perylene black, is used. Perylene black is an organic compound that is much less conductive than conductive inorganics such as carbon black.
ペリレンブラックの呈する黒色の度合いを向上させるために、補助顔料として赤色有機顔料や青色有機顔料等の有彩色有機顔料を加えても良い。有彩色有機顔料はペリレンブラックの補色を呈するものを適切に選択して加えることにより次の様な効果が得られる。例えば、赤みがかった黒色を呈する黒色顔料に対しては、補助顔料として赤色の補色である青色を呈する有機顔料を加えることによりその赤みを消することができ、全体としてより好ましい黒色を呈する。 In order to improve the blackness of perylene black, a chromatic organic pigment such as a red organic pigment or a blue organic pigment may be added as an auxiliary pigment. The following effects can be obtained by appropriately selecting and adding a chromatic organic pigment having a complementary color of perylene black. For example, with respect to a black pigment exhibiting a reddish black, the redness can be eliminated by adding an organic pigment exhibiting a blue color that is a complementary color of red as an auxiliary pigment, and as a whole, a more preferable black color is exhibited.
なお、顔料として、この黒色顔料に加える補助顔料として赤色有機顔料、及び/または青色有機顔料の他に、さらに、イエロー、バイオレット等の色を呈する有機顔料を含んでいてもよい。また、黒色顔料に加える補助顔料として、赤色有機顔料、及び/または青色有機顔料を含まずに、イエロー、バイオレット等の色を呈する有機顔料を含んでいてもよい。また、補助顔料は、赤色、青色、有彩色、イエロー、バイオレットに限定されず、黒色顔料感光樹脂組成物の成分の配合条件等に応じて、そのときに必要な色を呈する有機顔料を用いることができる。 In addition to the red organic pigment and / or the blue organic pigment as an auxiliary pigment to be added to the black pigment, the pigment may further contain an organic pigment exhibiting a color such as yellow or violet. Further, as an auxiliary pigment to be added to the black pigment, an organic pigment exhibiting a color such as yellow or violet may be included without including a red organic pigment and / or a blue organic pigment. The auxiliary pigment is not limited to red, blue, chromatic, yellow, and violet, and an organic pigment exhibiting a necessary color at that time is used according to the blending conditions of the components of the black pigment photosensitive resin composition. Can do.
また、本発明の感光性樹脂組成物を用いて黒色パターンを形成する際には、後述するように、基板上に本発明の感光性樹脂組成物を塗布、乾燥して感光性樹脂組成物層を形成する。このときの塗布性の改善、光硬化後の物性改善のために、上記した成分に加えてさらに結合剤として高分子バインダーを含有してもよい。結合剤は相容性、被膜形成性、現像性、接着性等改善目的に応じて適宜選択すればよい。 Moreover, when forming a black pattern using the photosensitive resin composition of the present invention, as described later, the photosensitive resin composition of the present invention is applied on a substrate and dried to form a photosensitive resin composition layer. Form. In order to improve the coating property and the physical properties after photocuring at this time, a polymer binder may be further contained as a binder in addition to the above components. What is necessary is just to select a binder suitably according to the objectives, such as compatibility, film formation property, developability, and adhesiveness.
前記高分子バインダーとしては、具体的にアクリル酸、メタクリル酸、メチルアクリレート、メチルメタクリレート、エチルアクリレート、エチルメタクリレート、プロピルアクリレート、プロピルメタクリレート、イソプロピルアクリレート、イソプロピルメタクリレート、n−ブチルアクリレート、n−ブチルメタクリレート、tert−ブチルアクリレート、tert−ブチルメタクリレート、2−ヒドロキシエチルアクリレート、2−ヒドロキシエチルメタクリレート、2−ヒドロキシプロピルアクリレート、2−ヒドロキシプロピルメタクリレート、ベンジルアクリレート、ベンジルメタクリレート、フェノキシアクリレート、フェノキシメタクリレート、イソボルニルアクリレート、イソボルニルメタクリレート、グリシジルメタクリレート、スチレン、アクリルアミド、メタアクリルアミド、アクリロニトリル、メタアクリロニトリルなどから選ばれた単量体を共重合させることによって得られたものや、側鎖にカルボキシル基を有する酸性セルロース変性物、ポリエチレンオキシド、ポリビニルピロリドン、アクリロニトリル、塩化ビニル、塩化ビニリデンとの共重合体、塩化ビニリデン、塩素化ポリオレフィン、または塩化ビニルと酢酸ビニルとの共重合体、ポリ酢酸ビニル、アクリロニトリルとスチレンとの共重合体、アクリロニトリルとスチレン、ブタジエンとの共重合体、ポリビニルアルキルエーテル、ポリビニルアルキルケトン、ポリスチレン、ポリアミド、ポリウレタン、ポリエチレンテレフタレートイソフタレート、アセチルセルロースおよびポリビニルブチラールなどを挙げることができる。特にアルカリ性水溶液での現像性を改善するためにアクリル酸、メタクリル酸などのカルボキシル基を有する単量体を共重合成分として使用することがよい。前記アクリル酸、メタクリル酸などは共重合成分中5〜40重量%の範囲が好ましい。また、カルボキシメチルセルロース、カルボキシエチルセルロース、カルボキシプロピルセルロースや、ヒドロキシメチルセルロース、ヒドロキシエチルセルロース、ヒドロキシプロピルセルロースのヒドロキシル基に多塩基酸無水物を反応させたセルロース樹脂も好ましく用いることができる。 Specific examples of the polymer binder include acrylic acid, methacrylic acid, methyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate, propyl acrylate, propyl methacrylate, isopropyl acrylate, isopropyl methacrylate, n-butyl acrylate, n-butyl methacrylate, tert-butyl acrylate, tert-butyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylate, 2-hydroxypropyl methacrylate, benzyl acrylate, benzyl methacrylate, phenoxy acrylate, phenoxy methacrylate, isobornyl acrylate , Isobornyl methacrylate, glycidylme Those obtained by copolymerizing monomers selected from acrylate, styrene, acrylamide, methacrylamide, acrylonitrile, methacrylonitrile, etc., modified with acidic cellulose having a carboxyl group in the side chain, polyethylene oxide, polyvinylpyrrolidone , Acrylonitrile, vinyl chloride, copolymer of vinylidene chloride, vinylidene chloride, chlorinated polyolefin, or copolymer of vinyl chloride and vinyl acetate, polyvinyl acetate, copolymer of acrylonitrile and styrene, acrylonitrile and styrene, Copolymers with butadiene, polyvinyl alkyl ether, polyvinyl alkyl ketone, polystyrene, polyamide, polyurethane, polyethylene terephthalate isophthalate, acetyl cellulose and poly Or the like can be mentioned butyral. In particular, a monomer having a carboxyl group such as acrylic acid or methacrylic acid is preferably used as a copolymerization component in order to improve developability in an alkaline aqueous solution. The acrylic acid, methacrylic acid and the like are preferably in the range of 5 to 40% by weight in the copolymer component. Moreover, the cellulose resin which made the polybasic acid anhydride react with the hydroxyl group of carboxymethylcellulose, carboxyethylcellulose, carboxypropylcellulose, hydroxymethylcellulose, hydroxyethylcellulose, and hydroxypropylcellulose can also be used preferably.
高分子バインダーは、光重合性化合物、エチレン性化合物、光重合開始剤、黒色顔料の総和100重量部に対して、400重量部以下、好ましくは200重量部以下の範囲で含有することができる。 The polymer binder can be contained in an amount of 400 parts by weight or less, preferably 200 parts by weight or less, based on 100 parts by weight of the total of the photopolymerizable compound, ethylenic compound, photopolymerization initiator, and black pigment.
本発明の感光性樹脂組成物の塗布性を更に改善するために、上記に加えて溶剤を配合してもよい。溶剤としては、エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル、エチレングリコールモノプロピルエーテル、エチレングリコールモノブチルエーテル、エチレングリコールジメチルエーテル、エチレングリコールジエチルエーテル、エチレングリコールジプロピルエーテル、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、プロピレングリコールモノプロピルエーテル、プロピレングリコールモノブチルエーテル、プロピレングリコールジメチルエーテル、プロピレングリコールジエチルエーテル、ジエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、ジエチレングリコールジメチルエーテル、ジエチレングリコールジエチルエーテル、エチレングリコールモノメチルエーテルアセテート、エチレングリコールモノエチルエーテルアセテート、エチレングリコールモノプロピルエーテルアセテート、エチレングリコールモノブチルエーテルアセテート、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテルアセテート、プロピレングリコールモノプロピルエーテルアセテート、2−メトキシブチルアセテート、3−メトキシブチルアセテート、4−メトキシブチルアセテート、2−メチル−3−メトキシブチルアセテート、3−メチル−3−メトキシブチルアセテート、3−エチル−3−メトキシブチルアセテート、2−エトキシブチルアセテート、4−エトキシブチルアセテート、4−プロポキシブチルアセテート、2−メトキシペンチルアセテート、3−メトキシペンチルアセテート、4−メトキシペンチルアセテート、2−メチル−3−メトキシペンチルアセテート、3−メチル−3−メトキシペンチルアセテート、3−メチル−4−メトキシペンチルアセテート、4−メチル−4−メトキシペンチルアセテート、アセトン、メチルエチルケトン、ジエチルケトン、メチルシソブチルケトン、エチルイソブチルケトン、炭酸メチル、炭酸エチル、炭酸プロピル、炭酸ブチル、ベンゼン、トルエン、キシレン、シクロヘキサノン、メタノール、エタノール、プロパノール、ブタノール、ヘキサノール、シクロヘキサノール、エチレングリコール、ジエチレングリコール、グリセリンなどが挙げられる。中でも3−メトキシブチルアセテートを好ましく用いることができる。 In order to further improve the applicability of the photosensitive resin composition of the present invention, a solvent may be added in addition to the above. Solvents include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, ethylene glycol dipropyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl Ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether, propylene glycol dimethyl ether, propylene glycol diethyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether Ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol monopropyl ether acetate, ethylene glycol monobutyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, 2- Methoxybutyl acetate, 3-methoxybutyl acetate, 4-methoxybutyl acetate, 2-methyl-3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, 3-ethyl-3-methoxybutyl acetate, 2-ethoxybutyl Acetate, 4-ethoxybutyl acetate, 4-propoxybutyl acetate, 2-methyl Xypentyl acetate, 3-methoxypentyl acetate, 4-methoxypentyl acetate, 2-methyl-3-methoxypentyl acetate, 3-methyl-3-methoxypentyl acetate, 3-methyl-4-methoxypentyl acetate, 4-methyl- 4-methoxypentyl acetate, acetone, methyl ethyl ketone, diethyl ketone, methyl isobutyl ketone, ethyl isobutyl ketone, methyl carbonate, ethyl carbonate, propyl carbonate, butyl carbonate, benzene, toluene, xylene, cyclohexanone, methanol, ethanol, propanol, butanol, Examples include hexanol, cyclohexanol, ethylene glycol, diethylene glycol, and glycerin. Of these, 3-methoxybutyl acetate can be preferably used.
上記溶剤は、前記一般式(1)で示される光重合性化合物、エチレン性化合物、光重合開始剤、黒色顔料の総和100重量部に対し、1000重量部以下、好ましくは500重量部以下の範囲で含有することができる。 The solvent is in a range of 1000 parts by weight or less, preferably 500 parts by weight or less, based on 100 parts by weight of the total of the photopolymerizable compound represented by the general formula (1), the ethylenic compound, the photopolymerization initiator, and the black pigment. Can be contained.
本発明の感光性樹脂組成物に、必要に応じて増感剤、熱重合禁止剤、可塑剤、界面活性剤、消泡剤、その他の添加剤を更に添加することができる。
増感剤としては、具体的にはエオシンB(C.I.No.45400)、エオシンJ(C.I.No.45380)、アルコール可溶性エオシン(C.I.No.45386)、シアノシン(C.I.No.45410)、ベンガルローズ、エリスロシン(C.I.No.45430)、2,3,7−トリヒドロキシ−9−フェニルキサンテン−6−オン、およびローダミン6Gなどのキサンテン色素、チオニン(C.I.No.52000)、アズレA(C.I.No.52005)およびアズレC(C.I.No.52002)などのチアジン色素、ピロニンB(C.I.No.45005)、およびピロニンGY(C.I.No.45005)などのピロニン色素や3−アセチルクマリン、3−アセチル7−ジエチルアミノクマリンなどのクマリン化合物が挙げられる。
If necessary, a sensitizer, a thermal polymerization inhibitor, a plasticizer, a surfactant, an antifoaming agent, and other additives can be further added to the photosensitive resin composition of the present invention.
Specific examples of the sensitizer include eosin B (C.I.No. 45400), eosin J (C.I.No. 45380), alcohol-soluble eosin (C.I.No. 45386), cyanocin (C I. No. 45410), Bengalrose, erythrosine (C.I. No. 45430), 2,3,7-trihydroxy-9-phenylxanthen-6-one, and xanthene dyes such as rhodamine 6G, thionine ( CI No. 52000), thiazine dyes such as Azure A (CI No. 52005) and Azure C (CI No. 52002), pyronin B (C.I. No. 45005), and Pyronin dyes such as pyronin GY (CI No. 45005), 3-acetylcoumarin, 3-acetyl7-diethylaminocoumarin, etc. They include coumarin compounds.
熱重合禁止剤としてはヒドロキノン、ヒドロキノンモノエチルエーテル、p−メトキシフェノール、ピロガロール、カテコール、2,6−ジ−tert−ブチル−p−クレゾール、β−ナフトールなどが使用できる。 As the thermal polymerization inhibitor, hydroquinone, hydroquinone monoethyl ether, p-methoxyphenol, pyrogallol, catechol, 2,6-di-tert-butyl-p-cresol, β-naphthol and the like can be used.
可塑剤としては、ジオクチルフタレート、ジドデシルフタレート、トリエチレングリコールジカプリレート、ジメチルグリコールフタレート、トリクレジルホスフェート、ジオクチルアジペート、ジブチルセバケート、トリアセチルグリセリンなどが使用できる。 As the plasticizer, dioctyl phthalate, didodecyl phthalate, triethylene glycol dicaprylate, dimethyl glycol phthalate, tricresyl phosphate, dioctyl adipate, dibutyl sebacate, triacetyl glycerol and the like can be used.
界面活性剤としては、アニオン系、カチオン系、ノニオン系の各種活性剤などが使用できる。また、消泡剤としてはシリコーン系、フッ素系各種消泡剤などが使用できる。
本発明の黒色パターンの形成方法は、1)感光性樹脂組成物の調整、2)基板上への感光性樹脂組成物層の形成、3)露光、4)現像、5)ポストベークの工程で基本的に形成することができる。
以下、各工程を説明する。
As the surfactant, various anionic, cationic and nonionic surfactants can be used. As the antifoaming agent, various silicone-based and fluorine-based antifoaming agents can be used.
The black pattern forming method of the present invention includes 1) adjustment of the photosensitive resin composition, 2) formation of the photosensitive resin composition layer on the substrate, 3) exposure, 4) development, and 5) post-baking. Basically it can be formed.
Hereinafter, each process will be described.
1)感光性樹脂組成物の調製
感光性樹脂組成物、必要により結合剤、溶剤、増感剤、熱重合禁止剤、可塑剤、界面活性剤、消泡剤等を加えて3本ロールミル、ボールミル、サンドミル、ジェットミル等でよく分散、混練する。
1) Preparation of photosensitive resin composition Photosensitive resin composition, 3 roll mill, ball mill with binder, solvent, sensitizer, thermal polymerization inhibitor, plasticizer, surfactant, antifoaming agent, etc. if necessary Disperse and knead well with a sand mill, a jet mill or the like.
2)感光性樹脂組成物層の形成
あらかじめ表面を清浄にした基板上に上記調製した感光性樹脂組成物を塗布する。基板としてはガラス、ポリエチレンテレフタレート、アクリル樹脂などの材料が挙げられる。また、基板と感光性樹脂組成物との密着性を向上させるためにシランカップリング剤を感光性樹脂組成物に添加するか、または基板に予め塗布しておいてもよい。感光性樹脂組成物の塗布にはロールコーター、リバースコーター、バーコーターなどの接触転写型塗布装置やスピンナー、カーテンフローコータなどの非接触型塗布装置が用いられる。特に厚膜の場合には複数回塗布するか前記塗布装置の数種を併用するのがよい。感光性樹脂組成物の塗布後は、室温にて数時間〜数日放置するか、温風ヒーター、赤外線ヒーター中に数十分〜数時間入れて溶剤を除去し、塗布膜厚1〜10μm程度の感光性樹脂組成物層とする。
2) Formation of photosensitive resin composition layer The photosensitive resin composition prepared above is applied onto a substrate whose surface has been cleaned in advance. Examples of the substrate include materials such as glass, polyethylene terephthalate, and acrylic resin. Moreover, in order to improve the adhesiveness of a board | substrate and the photosensitive resin composition, a silane coupling agent may be added to the photosensitive resin composition, or you may apply | coat to a board | substrate previously. For the application of the photosensitive resin composition, a contact transfer type coating device such as a roll coater, a reverse coater or a bar coater or a non-contact type coating device such as a spinner or a curtain flow coater is used. In particular, in the case of a thick film, it is preferable to apply a plurality of times or to use several kinds of the application devices together. After application of the photosensitive resin composition, it is allowed to stand for several hours to several days at room temperature, or is placed in a warm air heater or infrared heater for several tens of minutes to several hours to remove the solvent, and the coating film thickness is about 1 to 10 μm. The photosensitive resin composition layer.
3)露光
感光性樹脂組成物層の形成後、ネガマスクを介して、露光を行う。露光に用いる所定波長の光線とは、光重合開始剤が活性化しラジカルを発生するような波長の光を発する活性化光線であり、具体的には紫外線、エキシマレーザー光、エックス線、ガンマ線、電子線が好適である。照射光量は用いる感光性樹脂組成物の組成に応じて若干変わるが30〜2000mJ/cm2の範囲が好ましい。
3) Exposure After formation of the photosensitive resin composition layer, exposure is performed through a negative mask. The light beam having a predetermined wavelength used for exposure is an activation light beam that emits light having a wavelength that activates the photopolymerization initiator to generate radicals, and specifically includes ultraviolet rays, excimer laser light, X-rays, gamma rays, and electron beams. Is preferred. The amount of irradiation light varies slightly depending on the composition of the photosensitive resin composition used, but is preferably in the range of 30 to 2000 mJ / cm 2 .
4)現像
露光処理後、現像液を用いて浸漬法、スプレー法などにより現像が行われる。この現像液としては、リチウム、ナトリウム、カリウムなどアルカリ金属の水酸化物、炭酸塩、重炭酸塩、リン酸塩、ピロリン酸塩、ベンジルアミン、ブチルアミン等の第1級アミン、ジメチルアミン、ジベンジルアミン、ジエタノールアミンなどの第2級アミン、トリメチルアミン、トリエチルアミン、トリエタノールアミンなどの第3級アミン、モルホリン、ピペラジン、ピリジンなどの環状アミン、エチレンジアミン、ヘキサメチレンジアミンなどのポリアミン、テトラエチルアンモニウムヒドロキシド、トリメチルベンジルアンモニウムヒドロキシド、トリメチルフェニルベンジルアンモニウムヒドロキシドなどのアンモニウムヒドロキシド類、トリメチルスルホニウムヒドロキシド、ジエチルメチルスルホニウムヒドロキシド、ジメチルベンジルスルホニウムヒドロキシドなどのスルホニウムヒドロキシド類、その他コリンなどの水溶液が使用される。
4) Development After the exposure process, development is performed by using a developer by a dipping method, a spray method, or the like. Examples of the developer include alkali metal hydroxides such as lithium, sodium, and potassium, carbonates, bicarbonates, phosphates, pyrophosphates, primary amines such as benzylamine and butylamine, dimethylamine, and dibenzyl. Secondary amines such as amine and diethanolamine, tertiary amines such as trimethylamine, triethylamine and triethanolamine, cyclic amines such as morpholine, piperazine and pyridine, polyamines such as ethylenediamine and hexamethylenediamine, tetraethylammonium hydroxide, trimethylbenzyl Ammonium hydroxide such as ammonium hydroxide, trimethylphenylbenzylammonium hydroxide, trimethylsulfonium hydroxide, diethylmethylsulfonium hydroxide, di Sulfonium hydroxides, such as chill benzyl sulfonium hydroxide, an aqueous solution of other choline is used.
5)ポストベーク
ポストベーク工程では、現像して形成した黒色パターンの強度と耐薬品性、耐熱性を付与するために、温度を150〜250℃の範囲となるように調整するとよい。
5) Post-bake In the post-bake process, the temperature may be adjusted to be in the range of 150 to 250 ° C. in order to impart strength, chemical resistance and heat resistance of the black pattern formed by development.
上記したように、本発明の感光性樹脂組成物及びこの感光性樹脂組成物を用いて形成した黒色パターンは、特に液晶ディスプレイ等のカラーフィルターのブラックマトリックスとして好適である。上記の様に基板上に本発明の感光性樹脂組成物を用いてブラックマトリックスパターンとなる黒色パターンを形成し、染色法、印刷法、顔料分散法等により、R、G、B等に色付けすると、ブラックマトリックス部の遮光性が高いことから表示コントラストが高く、色漏れがなく発色の優れた液晶ディスプレイ等のカラーフィルターを製造することができる。 As described above, the photosensitive resin composition of the present invention and the black pattern formed using this photosensitive resin composition are particularly suitable as a black matrix for color filters such as liquid crystal displays. As described above, a black pattern that becomes a black matrix pattern is formed on the substrate using the photosensitive resin composition of the present invention, and R, G, B, etc. are colored by a dyeing method, a printing method, a pigment dispersion method, or the like. Since the black matrix portion has a high light shielding property, it is possible to produce a color filter such as a liquid crystal display having a high display contrast, no color leakage and excellent color development.
以下、本発明の実施例を説明するが、本発明の範囲はこれらの実施例に限定されるものではない。
[実施例1]
1.光重合性化合物Aの製造
500ml四つ口フラスコ中で、PGMEA(プロピレングリコールモノメチルエーテルアセテート)400g、メタクリル酸75g、ベンジルメタクリレート210g、2−ヒドロキシエチルメタクリレート15g、アゾビイソブチロニトリル5gを、窒素を吹き込みながら65〜70度で3時間攪拌反応させて光重合性化合物Aを得た。
Examples of the present invention will be described below, but the scope of the present invention is not limited to these examples.
[Example 1]
1. Production of photopolymerizable compound A In a 500 ml four-necked flask, 400 g of PGMEA (propylene glycol monomethyl ether acetate), 75 g of methacrylic acid, 210 g of benzyl methacrylate, 15 g of 2-hydroxyethyl methacrylate, 5 g of azobiisobutyronitrile, The photopolymerizable compound A was obtained by stirring and reacting at 65 to 70 degrees for 3 hours while blowing.
2.黒色感光樹脂組成物の調製
光重合性化合物(光重合性化合物A、DPHA(ジペンタエリスリトールヘキサアクリレート))、光重合開始剤(商品名:CGI369、チバ・スペシャルティ・ケミカルズ株式会社製)、顔料(ペリレンブラック、赤色顔料、青色顔料)を次の重量比で混合した。なお、赤色顔料は顔料分散液「CFレッドEX−109」(C.I.Pレッド−177、アントラキノン系赤顔料20%含有)を用い、青色顔料はブルー顔料分散液CFブルーUM(C.I.Pブルー−15:6を20%含有)を用いた。
光重合性化合物A:DPHA:CGI369:ペリレンブラック:赤色顔料:青色顔料=10:2:1:5:2:1
この混合物に対して、溶剤としてMBA(3−メトキシブチルアセテート)を加え、この混合物がMBAの20重量%となるように調製し、黒色感光樹脂組成物を得た。
2. Preparation of black photosensitive resin composition Photopolymerizable compound (photopolymerizable compound A, DPHA (dipentaerythritol hexaacrylate)), photopolymerization initiator (trade name: CGI369, manufactured by Ciba Specialty Chemicals Co., Ltd.), pigment ( Perylene black, red pigment, blue pigment) were mixed in the following weight ratio. The red pigment is a pigment dispersion “CF Red EX-109” (C.I.P Red-177, containing 20% anthraquinone red pigment), and the blue pigment is a blue pigment dispersion CF Blue UM (C.I. .P blue-15: 6 containing 20%).
Photopolymerizable compound A: DPHA: CGI 369: Perylene black: Red pigment: Blue pigment = 10: 2: 1: 5: 2: 1
To this mixture, MBA (3-methoxybutyl acetate) was added as a solvent, and the mixture was prepared so as to be 20% by weight of MBA to obtain a black photosensitive resin composition.
3.ブラックマトリクスパターンの形成
上記で調整した黒色感光樹脂組成物を、厚さ1mmの清浄な表面を有するガラス基板上にスピンコーター(TR25000:東京応化工業(株)製)を用いて乾燥膜厚が2μmとなるように塗布し、90度で2分間乾燥して黒色感光樹脂組成物層を形成した。
3. Formation of Black Matrix Pattern Using the spin photosensitive coater (TR25000: manufactured by Tokyo Ohka Kogyo Co., Ltd.) on the glass substrate having a clean surface with a thickness of 1 mm, the black photosensitive resin composition prepared above has a dry film thickness of 2 μm. And dried at 90 degrees for 2 minutes to form a black photosensitive resin composition layer.
次いで、この黒色感光樹脂組成物層にネガマスクを介して紫外線を選択的に照射した。その後、0.5重量%炭酸ナトリウム水溶液で25度、60秒間スプレー現像後、オーブン中で200℃で30分間ポストベークして、ブラックマトリクスパターンを形成した。 Subsequently, the black photosensitive resin composition layer was selectively irradiated with ultraviolet rays through a negative mask. Thereafter, spray development was performed with a 0.5 wt% sodium carbonate aqueous solution at 25 ° C. for 60 seconds, and then post-baked in an oven at 200 ° C. for 30 minutes to form a black matrix pattern.
[実施例2]
1.光重合性化合物Aの製造
実施例1と同様にして光重合性化合物Aを製造した。
[Example 2]
1. Production of photopolymerizable compound A Photopolymerizable compound A was produced in the same manner as in Example 1.
2.黒色感光樹脂組成物の調製
光重合性化合物(光重合性化合物A、DPHA)、光重合開始剤(CGI369)、顔料(ペリレンブラック、赤色顔料、青色顔料)を次の重量比で混合した。なお、赤色顔料、青色顔料は、実施例1と同様のものを使用した。
光重合性化合物A:DPHA:CGI369:ペリレンブラック:赤色顔料:青色顔料=10:2:1:1:0.4:0.2
この混合物に対して、溶剤としてMBA(3−メトキシブチルアセテート)を加え、この混合物がMBAの20重量%となるように調製し、黒色感光樹脂組成物を得た。
2. Preparation of Black Photosensitive Resin Composition A photopolymerizable compound (photopolymerizable compound A, DPHA), a photopolymerization initiator (CGI369), and a pigment (perylene black, red pigment, blue pigment) were mixed in the following weight ratio. In addition, the red pigment and the blue pigment used the same thing as Example 1.
Photopolymerizable compound A: DPHA: CGI 369: perylene black: red pigment: blue pigment = 10: 2: 1: 1: 0.4: 0.2
To this mixture, MBA (3-methoxybutyl acetate) was added as a solvent, and the mixture was prepared so as to be 20% by weight of MBA to obtain a black photosensitive resin composition.
3.ブラックマトリクスパターンの形成
実施例1と同様にしてブラックマトリクスパターンを形成した。
[実施例3]
1.光重合性化合物Aの製造
実施例1と同様にして光重合性化合物Aを製造した。
3. Formation of Black Matrix Pattern A black matrix pattern was formed in the same manner as in Example 1.
[Example 3]
1. Production of photopolymerizable compound A Photopolymerizable compound A was produced in the same manner as in Example 1.
2.黒色感光樹脂組成物の調製
光重合性化合物(光重合性化合物A、DPHA)、光重合開始剤(CGI369)、顔料(ペリレンブラック、赤色顔料、青色顔料)を次の重量比で混合した。なお、赤色顔料、青色顔料は、実施例1と同様のものを使用した。
光重合性化合物A:DPHA:CGI369:ペリレンブラック:赤色顔料:青色顔料=10:2:1:25:10:5
この混合物に対して、溶剤としてMBA(3−メトキシブチルアセテート)を加え、この混合物がMBAの20重量%となるように調製し、黒色感光樹脂組成物を得た。
3.ブラックマトリクスパターンの形成
実施例1と同様にしてブラックマトリクスパターンを形成した。
2. Preparation of Black Photosensitive Resin Composition A photopolymerizable compound (photopolymerizable compound A, DPHA), a photopolymerization initiator (CGI369), and a pigment (perylene black, red pigment, blue pigment) were mixed in the following weight ratio. In addition, the red pigment and the blue pigment used the same thing as Example 1.
Photopolymerizable compound A: DPHA: CGI 369: Perylene black: Red pigment: Blue pigment = 10: 2: 1: 25: 10: 5
To this mixture, MBA (3-methoxybutyl acetate) was added as a solvent, and the mixture was prepared so as to be 20% by weight of MBA to obtain a black photosensitive resin composition.
3. Formation of Black Matrix Pattern A black matrix pattern was formed in the same manner as in Example 1.
[比較例1]
1.光重合性化合物Aの製造
実施例1と同様にして光重合性化合物Aを製造した。
[Comparative Example 1]
1. Production of photopolymerizable compound A Photopolymerizable compound A was produced in the same manner as in Example 1.
2.黒色感光樹脂組成物の調製
光重合性化合物(光重合性化合物A、DPHA)、光重合開始剤(CGI369)、黒色顔料(カーボンブラック)を次の重量比で混合した。なお、黒色顔料として、カーボン分散液CFブラックEX−1455(高抵抗カーボン24%含有:御国色素製)を用いた。
光重合性化合物A:DPHA:CGI369:黒色顔料=10:2:1:8
この混合物に対して、溶剤としてMBA(3−メトキシブチルアセテート)を加え、この混合物がMBAの20重量%となるように調製し、黒色感光樹脂組成物を得た。
3.ブラックマトリクスパターンの形成
実施例1と同様にしてブラックマトリクスパターンを形成した。
2. Preparation of black photosensitive resin composition A photopolymerizable compound (photopolymerizable compound A, DPHA), a photopolymerization initiator (CGI369), and a black pigment (carbon black) were mixed in the following weight ratio. As the black pigment, carbon dispersion CF black EX-1455 (containing 24% high-resistance carbon: manufactured by Gokoku Dye) was used.
Photopolymerizable compound A: DPHA: CGI 369: black pigment = 10: 2: 1: 8
To this mixture, MBA (3-methoxybutyl acetate) was added as a solvent, and the mixture was prepared so as to be 20% by weight of MBA to obtain a black photosensitive resin composition.
3. Formation of Black Matrix Pattern A black matrix pattern was formed in the same manner as in Example 1.
[実施例1−3と比較例1の評価]
実施例1−3と比較例1で形成した各ブラックマトリクスパターンの誘電率、OD(光学密度)を測定した。また、光学顕微鏡により目視でブラックマトリックスパターンの形状を評価した。その結果を表1に示す。
[Evaluation of Example 1-3 and Comparative Example 1]
The dielectric constant and OD (optical density) of each black matrix pattern formed in Example 1-3 and Comparative Example 1 were measured. Further, the shape of the black matrix pattern was visually evaluated with an optical microscope. The results are shown in Table 1.
また、表1より実施例1,3で形成したブラックマトリクスパターンのODは1以上/μmであり、高遮光性であることが確認できる。
また、表1より実施例1,2で形成したブラックマトリクスパターンのパターン形状も良好であることが確認できる。
Further, from Table 1, the OD of the black matrix pattern formed in Examples 1 and 3 is 1 or more / μm, and it can be confirmed that the black matrix pattern is highly light-shielding.
Further, from Table 1, it can be confirmed that the pattern shape of the black matrix pattern formed in Examples 1 and 2 is also good.
Claims (12)
前記顔料成分は、絶縁性有機顔料からなる
ことを特徴とする黒色感光性樹脂組成物。 In the black photosensitive resin composition containing the pigment component including the black pigment,
The black pigment resin composition, wherein the pigment component comprises an insulating organic pigment.
ことを特徴とする請求項1に記載の黒色感光性樹脂組成物。 The black photosensitive resin composition according to claim 1, wherein the black pigment is perylene black.
ことを特徴とする請求項1または2に記載の黒色感光性樹脂組成物。 The black photosensitive resin composition according to claim 1, wherein the pigment component includes a red organic pigment and a blue organic pigment.
ことを特徴とする請求項1〜3のいずれか1項に記載の黒色感光性樹脂組成物。 The dielectric constant of the film formed with the said black photosensitive resin composition is 7 or less. The black photosensitive resin composition of any one of Claims 1-3 characterized by the above-mentioned.
ことを特徴とする請求項1〜4のうちいずれか1項に記載の黒色感光性樹脂組成物。 5. The black photosensitive resin composition according to claim 1, wherein an optical density of the film formed of the black photosensitive resin composition is 1 or more per 1 μm of film thickness. .
ことを特徴とする請求項1〜6のいずれか1項に記載の黒色感光性樹脂組成物。 The pigment component is contained in a proportion of 20% by weight to 250% by weight with respect to the total weight of the photopolymerizable compound, the photopolymerization initiator, and the solvent. The black photosensitive resin composition of any one of Claims.
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KR1020060074509A KR100814660B1 (en) | 2005-09-05 | 2006-08-08 | Black photosensitive polymer composition |
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Also Published As
Publication number | Publication date |
---|---|
KR20070026004A (en) | 2007-03-08 |
CN1928714A (en) | 2007-03-14 |
KR100814660B1 (en) | 2008-03-18 |
TW200712767A (en) | 2007-04-01 |
TWI390344B (en) | 2013-03-21 |
CN1928714B (en) | 2010-06-09 |
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