JP2007069325A - Minute electromagnetic device manufacturing method and minute electromagnetic device manufactured thereby - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a minute electromagnetic device manufacturing method for manufacturing a small minute-electromagnetic device at an arbitrary place and into an arbitrary shape by using FIB-CVD, and a minute electromagnetic device manufactured by the method. <P>SOLUTION: The minute electromagnetic device manufacturing method is used for manufacturing the minute electromagnetic device composed of an iron core 35 and a DLC coil 36 on the tip face of a glass capillary 31 by controlling the irradiation position of a focused ion beam of a FIB-CVD device emitting the focused ion beam to a material gas, beam strength, irradiation time, irradiation interval, and irradiation direction from drawing data based on a three-dimensional structure model of the minute electromagnetic device designed by using a three-dimensional CAD. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a micro electromagnetic device using focused ion beam chemical vapor deposition (FIB-CVD) capable of manufacturing an arbitrary micro three-dimensional structure with various materials, places, shapes, and sizes, and The present invention relates to a micro electromagnetic device manufactured thereby.

  So far, the present inventors have already proposed the production of an arbitrary three-dimensional structure such as nano wine glass, coil, pillar, etc. as a three-dimensional structure production technique using FIB-CVD (Patent Document 1 below). -4, the following nonpatent literature 1-2 reference).

By the way, conventionally, an electromagnetic device is obtained by winding a copper wire in a horizontal direction or a vertical direction, and a manufacturing method of winding a copper wire from a μm size to a metric size is taken.
JP 2004-345209 A WO2004 / 077536 WO2004 / 076343 JP 2001-107252 A S. Matsui et. al, “Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition”, J. Am. Vac. Sci. Technol. B, Vol. 18, no. 6, Nov / Dec 2000, pp. 3181-3184 T.A. Hoshino et. al, “Development of three-dimensional pattern-generating system for focused-ion-beam chemical-vapor deposition”. Vac. Sci. Technol. B, Vol. 21, no. 6, Nov / Dec 2003, pp. 2732-2736

  The manufacturing method of winding a copper wire has been taken in the conventional method for manufacturing an electromagnetic device. Therefore, there is a limit to the diameter of the copper wire by winding a single copper wire, and it has been difficult to reduce the outer diameter. In addition, when there is no core material such as an iron core at the center where the copper wire is wound, it is difficult to maintain the shape, and there is a restriction to manufacture it at an arbitrary place and shape.

  In view of the above situation, the present invention provides a method for manufacturing a micro electromagnetic device that can be manufactured in a small size and in an arbitrary place and shape using FIB-CVD, and a micro electromagnetic device manufactured thereby. The purpose is to provide.

In order to achieve the above object, the present invention provides
(1) Focused ion of FIB-CVD apparatus that irradiates source gas with focused ion beam from drawing data based on three-dimensional structural model of micro-electromagnetic apparatus designed by using three-dimensional CAD in manufacturing method of micro-electromagnetic apparatus The present invention is characterized in that a minute electromagnetic device including a coil is manufactured on a substrate by controlling a beam irradiation position and beam intensity, irradiation time, irradiation interval, and irradiation direction.

  (2) In the method for manufacturing a micro electromagnetic device according to (1), the base is a substrate, and a micro electromagnetic device including an iron core and a coil at an arbitrary portion of the substrate is manufactured.

  (3) The method for manufacturing a micro electromagnetic device according to (1), wherein the base is a glass capillary, and a micro electromagnetic device including an iron core and a coil at an arbitrary portion of the glass capillary is manufactured. To do.

(4) In the manufacturing method of the micro electromagnetic device according to (1), the iron core uses ferrocene gas [Fe (C ₅ H ₅ ) ₂ ] or pentacarbonyl gas [Fe (CO) ₅ ] as a source gas, The coil is made of phenanthrene gas (C ₁₄ H ₁₀ ), and the micro electromagnetic device is made of a different material.

  (5) In the method for manufacturing a micro electromagnetic device according to (1), two wirings are opposed to each other at a predetermined distance on a base, and a first micro coil is disposed between one end portions of the two wirings. And a second micro coil is arranged between the other ends of the two wirings.

  (6) The method for manufacturing a micro electromagnetic device according to (1) above, wherein a micro coil is wound around a convex portion on a base, a diaphragm for sound expansion is attached to the convex portion, and a speaker is configured. To do.

  (7) In the method for manufacturing a micro electromagnetic device according to (1), two wirings are opposed to each other at a predetermined distance on a base, and a first micro coil is disposed between one end portions of the two wirings. And arranging a second microcoil between the other ends of the two wires, and an iron core forming a magnetic path between the first microcoil and the second microcoil. And forming a transformer.

  (8) In the method for manufacturing a micro electromagnetic device according to (1), a plurality of sets of two wirings are provided on a substrate, the plurality of sets of wirings are arranged radially with respect to a central portion, and the plurality of sets of wirings An electromagnetic induction motor is configured by arranging a minute coil between each end of each of the coils and facing each other, and a rotor having a plurality of salient poles each having a rotation shaft disposed at the center.

  (9) A minute electromagnetic device, which is produced by the method for producing a minute electromagnetic device according to any one of claims 1 to 8.

  According to the present invention, a micro electromagnetic device can be manufactured in a small size and in an arbitrary place and shape by using FIB-CVD.

  The manufacturing method of the micro electromagnetic device of the present invention is based on the focused ion of the FIB-CVD apparatus that irradiates the source gas with the focused ion beam from the drawing data based on the three-dimensional structural model of the micro electromagnetic device designed using the three-dimensional CAD. A minute electromagnetic device including a coil on a substrate is manufactured by controlling the irradiation position and intensity of the beam, irradiation time, irradiation interval, and irradiation direction.

  Hereinafter, embodiments of the present invention will be described in detail.

  FIG. 1 is a schematic configuration diagram of an apparatus for producing a micro electromagnetic device (electromagnet) by FIB-CVD according to the present invention.

  First, the three-dimensional model data of the micro electromagnetic device is designed using a computer (CAD), and then the three-dimensional model data of the micro electromagnetic device is divided in the height direction, and the cross-sectional shape is calculated and stacked. Create discrete drawing data of structure. Next, based on the drawing data, a beam irradiation position, beam and beam intensity, irradiation time, irradiation interval, and irradiation direction are determined, and the focused ion beam is controlled. For this purpose, the control device 15 includes a CPU (central processing unit) 16, a three-dimensional model data memory 17 for producing a minute electromagnetic device, an input / output interface 18, a display device 19, and a data input device 20.

Therefore, phenanthrene gas (C ₁₄ H ₁₀ ) 12 is injected from the gas nozzle 11 as a CVD gas. The phenanthrene gas 12 is heated to about 85 ° C., injected at a gas pressure of 1.0 × 10 ⁻⁴ Pa, and irradiated with a Ga ⁺ focused ion beam 13 having a beam irradiation current of about 7 pa in the gas atmosphere. Do.

In the CVD using the Ga ⁺ focused ion beam 13, the phenanthrene molecules adsorbed on the substrate (silicon substrate) 14 (which may be a glass capillary) by irradiating the Ga ⁺ focused ion beam 13 in the phenanthrene gas 12 atmosphere. Is grown by beam-excited surface reaction, and carbon is deposited and deposited to grow DLC. By scanning the Ga ⁺ focused ion beam 13 in any direction, the DLC can be shaped arbitrarily. Can do.

Here, the drawing device (not shown) used for controlling the Ga ⁺ focused ion beam 13 is a 3D that divides and draws external waveform generator and three-dimensional CAD data into cross-sectional data for each layer in the Z-axis direction. -CAM (not shown). By performing electromagnetic field deflection control of the Ga ⁺ focused ion beam 13 using these drawing apparatuses, the DLC can be grown into an arbitrary shape by controlling the Ga ⁺ focused ion beam 13 during the injection of the source gas 12. Create a micro electromagnetic device.

  FIG. 2 is a schematic view of an apparatus for manufacturing a micro electromagnetic device showing an embodiment of the present invention.

  Hereinafter, specific fabrication of the micro electromagnetic device will be described with reference to FIG.

First, a source gas (phenanthrene gas 12) is injected from the gas nozzle 11 toward the substrate 14. The injected source gas molecules are adsorbed on the surface of the substrate 14. When irradiated with the Ga ⁺ focused ion beam 13, the source gas molecules are decomposed and a deposit 21 is generated. Through this repeated process, the deposit 21 grows. By using 3D-CAM (three-dimensional CAM) uniquely developed in the growth process and controlling the Ga ⁺ focused ion beam 13 in an arbitrary direction, irradiation position, and irradiation interval, a micro electromagnetic device can be manufactured. In addition, micro electromagnetic devices of various materials can be manufactured by changing the type of raw material gas to be injected. This focused ion beam chemical vapor deposition (FIB-CVD) is a very effective means for producing nano-sized micro electromagnetic devices. In addition, the minute electromagnetic device can be manufactured at an arbitrary place.

  FIG. 3 is a view showing a micro electromagnetic device manufactured on a glass capillary showing an embodiment of the present invention.

  In this figure, 31 is a glass capillary, 31A is the tip of the glass capillary 31, 32 is the inside of the glass capillary 31, 33 is an Al-Ni wire disposed in the inside 32 of the glass capillary 31, and 33A is its Al-Ni. The terminal electrode of the wire 33, 34 is the outside of the glass capillary 31, 34A is a terminal electrode made of gold coating provided on the outside 34, 35 is an iron core formed perpendicular to the tip surface 31A of the glass capillary 31, and 36 is The DLC coil is wound around the iron core 35, and has one end connected to the terminal electrode 33A of the Al-Ni wire 33 and the other end connected to the terminal electrode 34A made of gold coating.

  Thus, the Al—Ni wire 34 was passed through the inside of the glass capillary 31 and gold coating was applied to the outside to produce the two-terminal electrodes 33A and 34A. FIB-CVD is used between the electrodes 33A and 34A to control the irradiation position of the focused ion beam, the intensity of the beam, the irradiation time, the irradiation interval, and the irradiation direction. First, the iron core 35 is produced and wound around it. Thus, the DLC coil 36 was produced as a micro electromagnetic device.

As source gases, phenanthrene gas (C ₁₄ H ₁₀ ) was used for the DLC coil 36, and ferrocene gas [Fe (C ₅ H ₅ ) ₂ ] or pentacarbonyl gas [Fe (CO) ₅ ] was used for the iron core 35. The diameter of the DLC coil 36 was 2 μm, the height of the coil was 11 μm, and the wire diameter was 200 nm. The pillar height of the ferrocene gas or pentacarbonyl gas used as the iron core 35 is 13.5 μm, and the wire diameter is 100 nm.

  FIG. 4 is a schematic view of an experimental apparatus that performs the operation of the micro electromagnetic device manufactured according to the present invention.

  In this figure, reference numeral 40 denotes a micro electromagnetic device obtained as described above, and this micro electromagnetic device 40 is disposed at the tip of a glass capillary 41 and comprises an iron core 42 and a DLC coil 43. Both ends of 43 are connected to a constant current power supply 45 having a changeover switch 44.

  Thus, the operation | movement confirmation of the micro electromagnetic device 40 produced on the glass capillary 41 was arrange | positioned like FIG. 4, and it performed under the room temperature indoor optical microscope.

  First, the electromagnetic device 40 side is connected to a constant current power supply 45, and an Fe pillar 46 (grounded and grounded) grown to about 20 μm by FIB-CVD is placed at a position of 5 μm at the tip of the micro electromagnetic device 40, A method of confirming the operation of the Fe pillar 46 when a current of 1 A was passed through the micro electromagnetic device 40 was adopted.

  FIG. 5 is a diagram showing the results. FIG. 5A shows an initial state in which the micro electromagnetic device 40 is de-energized, and FIG. 5B shows a positive current in the DLC coil 43 of the micro electromagnetic device 40. FIG. 5B is a diagram showing a state in which a reverse current is applied to the DLC coil 43 of the micro electromagnetic device 40.

  That is, first, when a current in the positive direction from FIG. 5A, which is the initial state, that is, when a current of 1 A flows from the Al—Ni wire side to the gold coating, as shown in FIG. The Fe pillar 46 was repelled and moved away from the micro electromagnetic device 40 by about 2.5 μm from the original position. Then, when a current in the reverse direction, that is, a current of 1 A is passed from the gold coating side to the Al—Ni wire side, the Fe pillar 46 is attracted to the micro electromagnetic device 40 as shown in FIG. From the initial state of FIG. 5A, the micro electromagnetic device 40 was approached by about 1.0 μm. This revealed that the micro electromagnetic device 40 generates a magnetic field.

  Next, a micro electromagnetic induction device in which micro coils are arranged adjacent to each other was verified.

  FIG. 6 is a view showing a minute electromagnetic induction device in which minute coils showing an embodiment of the present invention are arranged adjacent to each other.

  In this figure, first, four terminal electrodes 52A, 53A; 54A, 55A having left and right wirings 52, 53; 54, 55 on a silicon substrate 51 were produced. The distance between the left and right wirings 52, 54 and 53, 55 is 6 μm, the distance between the facing electrodes 52A, 53A and 54A, 55A is 4 μm, and the FIB is bridged between the left and right electrodes 52A and 53A and 54A and 55A. The microcoils 56 and 57 were produced using -CVD.

  The diameter of the microcoil 56 was 2 μm, the height of the coil was 11 μm, and the wire diameter was 200 nm. The shape of the facing microcoil 57 is the same as that of the microcoil 56.

  FIG. 7 shows the value of the induced current generated in the other microcoil 57 when an AC voltage of 1 Hz is applied to one microcoil 56. FIG. 7A is a characteristic diagram of input voltage and induced current when a sine wave is input. FIG. 7B is a characteristic diagram of the input voltage and the induced current when a square wave is input. FIG. 8 shows a graph of the induced current and the value obtained by further differentiating the input voltage from this measurement data. FIG. 8A is a characteristic diagram of the time differential value of the voltage and the induced current in the case of a sine wave, and FIG. 8B is a characteristic diagram of the time differential value of the voltage and the induced current in the case of a square wave.

  Thereby, it can be seen that the value obtained by differentiating the input voltage with time overlaps the value of the induced current. This indicates an induced current generated by electromagnetic induction accompanying a change in magnetic flux.

  Next, an application example of a micro electromagnetic induction device manufactured by FIB-CVD will be described.

  FIG. 9 is a diagram showing a small speaker as a small electromagnetic induction device of the present invention.

  In this figure, a minute coil 63 is wound around a convex portion 62 of a base body 61, and a diaphragm 64 that performs loudspeaking is disposed above it.

  FIG. 10 is a diagram showing a micro-transformer as a micro-electromagnetic induction device according to the present invention.

  In this figure, two wirings 72, 73 and 75, 76 are opposed to each other on a substrate 71 at a predetermined distance, and a primary micro coil 74 connected between the wirings 72, 73 is opposed to this. A secondary microcoil 77 connected between the wirings 75, 76 arranged in this manner is disposed, and an iron core that forms a magnetic path in the primary microcoil 74 and the secondary microcoil 77. 78 is arranged.

  FIG. 11 is a view showing a minute electromagnetic induction motor as the minute electromagnetic induction device of the present invention.

  In this figure, four sets of wirings 82A, 82B: 83A, 83B: 84A, 84B: 85A, 85B, which are a pair of two wires, are arranged on the substrate 81 from the four directions toward the central position, and the wiring 82A. , 82B, a first microcoil 86 connected between the wires 83A, 83B, a second microcoil 87 connected between the wires 83A, 83B, a third microcoil 88 connected between the wires 84A, 84B, and a wire A fourth microcoil 89 connected between 85A and 85B is disposed, and a rotor 90 having a rotation shaft 90A and four salient poles 90B is disposed in the center thereof.

  FIG. 12 is a view showing a micro pickup as the micro electromagnetic induction device of the present invention.

  In this figure, an iron core 92 is provided on a permanent magnet 91, a minute coil 93 is wound around the iron core 92, and the end of the minute coil 93 is connected to a guitar amplifier. A metal string 94 is disposed above the iron core 92.

  Moreover, the application to the electromagnetic coil of a nuclear magnetic resonance apparatus (NMR: Nuclear Magnetic Resonance) is also possible.

  Since the minute coil itself of the minute electromagnetic induction device is on the order of nm to μm, the speaker (FIG. 9), transformer (FIG. 10), electromagnetic induction motor (FIG. 11), pickup (FIG. 12), nucleus An electromagnetic induction device mainly composed of an electromagnetic coil such as a magnetic resonance device can be manufactured on the order of μm.

  In addition, a minute electromagnetic induction motor can be incorporated into the operation part of the manipulator to perform minute operation control. Furthermore, it can be incorporated as a mechanically operated component of a micromachine or nanomachine.

  Since FIB-CVD can produce an arbitrary minute three-dimensional structure, the number of turns of the minute coil can be freely determined as shown in FIG. 13A shows a three-turn microcoil 101, FIG. 13B shows a four-turn microcoil 102, and FIG. 13C shows a five-turn microcoil 103, respectively.

  For this reason, it is possible to produce a micro-transformer by connecting electromagnetic induction devices having different numbers of windings with an iron core. Further, the range of the magnetic field generated by a small coil such as a magnetic head of an HDD can be reduced to increase the capacity. In NMR using an electromagnetic device, the sample can be observed in a minute amount by making the surrounding coil where the sample is placed and the electromagnetic device that applies the magnetic field minute.

As mentioned above, according to the present invention,
(1) By using a manufacturing method of a micro electromagnetic device by FIB-CVD, a micro electromagnetic device having an arbitrary size and shape can be manufactured.
(2) By using the manufacturing method of the micro electromagnetic device by FIB-CVD, it is possible to manufacture the micro electromagnetic device in an arbitrary place on the silicon substrate or the glass capillary.
(3) By using the manufacturing method of the micro electromagnetic induction device by FIB-CVD, it is possible to manufacture the micro electromagnetic induction device at an arbitrary place.
(4) Application to various devices (speakers, transformers, motors, pickups, etc.) is possible by using the manufacturing method of the micro electromagnetic induction device by FIB-CVD.

  In addition, this invention is not limited to the said Example, A various deformation | transformation and application are possible based on the meaning of this invention, These are not excluded from the scope of the present invention.

  A manufacturing method of a micro electromagnetic device of the present invention and a micro electromagnetic device manufactured by the method are manufactured in a small size and in an arbitrary place and shape using FIB-CVD, and a manufacturing method of the micro electromagnetic device It is suitable as a micro electromagnetic device to be used, and can be used to obtain a part of a nano machine.

It is a schematic block diagram of the manufacturing apparatus of the micro electromagnetic device (electromagnet) by FIB-CVD concerning this invention. It is a schematic diagram of the manufacturing apparatus of the micro electromagnetic device which shows the Example of this invention. It is a figure which shows the micro electromagnetic device manufactured on the glass capillary which shows the Example of this invention. It is a schematic diagram of the experimental apparatus which performs operation | movement of the micro electromagnetic device produced by this invention. It is a figure which shows the experimental result by the experimental apparatus in FIG. It is a figure which shows the micro electromagnetic induction apparatus which arranged the micro coil which shows the Example of this invention adjacently. FIG. 8 is a diagram (No. 1) for explaining the induction action by the microcoil shown in FIG. 7. FIG. 8 is a diagram (part 2) for explaining the inductive action by the microcoil shown in FIG. It is a figure which shows the micro speaker as a micro electromagnetic induction apparatus of this invention. It is a figure which shows the microtransformer as a micro electromagnetic induction apparatus of this invention. It is a figure which shows the micro electromagnetic induction motor which it has as a micro electromagnetic induction apparatus of this invention. It is a figure which shows the micro pick-up as a micro electromagnetic induction apparatus of this invention. It is a figure which shows the micro coil from which the number of various turns of this invention differs.

Explanation of symbols

11 Gas nozzle 12 Phenanthrene (C ₁₄ H ₁₀ ) gas as a CVD gas 13 Ga + focused ion beam 14, 51 Substrate (silicon substrate)
15 Control device 16 CPU (Central processing unit)
17 Three-dimensional model data memory for producing a minute electromagnetic induction device 18 Input / output interface 19 Display device 20 Data input device 21 Deposit 31, 41 Glass capillary 31A End surface of glass capillary 32 Inside glass capillary 33 Inside glass capillary Al-Ni wire 33A Al-Ni wire terminal electrode 34 External of glass capillary 34A Terminal electrode made of gold coating 35 Iron core formed perpendicular to the tip surface of the glass capillary 36, 43 DLC coil 40 Micro electromagnetic Induction device 42, 78, 92 Iron core 44 Changeover switch 45 Constant current power supply 46 Fe pillar 52, 53; 54, 55, 72, 73, 75, 76, 82A, 82B: 83A, 83B: 84A, 84B: 85A, 85B Wires 52A, 53A; 54A, 55A Four-terminal electrodes 56, 57, 63, 93 Micro coil 61 Base body 62 Convex section 64 Diaphragm 71, 81 Substrate 74 Primary micro coil 77 Secondary micro coil 86 First Minute coil 87 Second minute coil 88 Third minute coil 89 Fourth minute coil 90 Rotor having four salient poles 90A Rotating shaft 90B Salient pole 91 Permanent magnet plate 94 Metal string 101 Three-turn minute coil 102 4 turns micro coil 103 5 turns micro coil

Claims (9)

  The irradiation position, beam intensity, and irradiation time of the focused ion beam of the FIB-CVD apparatus that irradiates the source gas with the focused ion beam from the drawing data based on the three-dimensional structural model of the micro electromagnetic device designed using the three-dimensional CAD. A method of manufacturing a micro electromagnetic device, comprising: controlling a irradiation interval and an irradiation direction, and manufacturing a micro electromagnetic device including a coil on a substrate.   2. The method of manufacturing a micro electromagnetic device according to claim 1, wherein the base is a substrate, and a micro electromagnetic device including an iron core and a coil at an arbitrary position of the substrate is manufactured. A manufacturing method of a minute electromagnetic device.   2. The method of manufacturing a micro electromagnetic device according to claim 1, wherein the base is a glass capillary, and a micro electromagnetic device including an iron core and a coil at an arbitrary position of the glass capillary is manufactured. Manufacturing method. 2. The method for manufacturing a micro electromagnetic device according to claim 1, wherein the iron core uses ferrocene gas [Fe (C ₅ H ₅ ) ₂ ] or pentacarbonyl gas [Fe (CO) ₅ ] as a source gas, and the coil includes A method for manufacturing a micro electromagnetic device, characterized in that the micro electromagnetic device is manufactured from a different material using phenanthrene gas (C ₁₄ H ₁₀ ).   2. The method of manufacturing a micro electromagnetic device according to claim 1, wherein two wires are opposed to each other at a predetermined distance on a base, a first micro coil is disposed between one end portions of the two wires, A method of manufacturing a micro electromagnetic device, wherein a second micro coil is disposed between the other ends of two wires.   2. The method of manufacturing a micro electromagnetic device according to claim 1, wherein a micro coil is wound around a convex portion on a base, a diaphragm for sound expansion is attached to the convex portion, and a speaker is configured. Manufacturing method.   2. The method of manufacturing a micro electromagnetic device according to claim 1, wherein two wires are opposed to each other at a predetermined distance on a base, a first micro coil is disposed between one end portions of the two wires, A second microcoil is disposed between the other ends of the two wires, and an iron core forming a magnetic path is disposed between the first microcoil and the second microcoil, and a transformer A manufacturing method of a minute electromagnetic device characterized by comprising.   2. The method of manufacturing a micro electromagnetic device according to claim 1, wherein a plurality of sets of two wirings are provided on a base, the plurality of sets of wirings are arranged radially with respect to a central portion, and each end of the plurality of sets of wirings. Production of a micro electromagnetic device characterized in that an electromagnetic induction motor is constructed by arranging a micro coil between each other and facing each other, and arranging a rotor having a plurality of salient poles with a rotation axis arranged in the central portion. Method. A micro electromagnetic device manufactured by the method for manufacturing a micro electromagnetic device according to claim 1.