JP2006322730A - Sensor device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sensor device suitable for finding the distribution of pressure, light, temperature, sound pressure, etc., from the distribution of the electromagnetic wave transfer characteristics of a region sandwiched by proper sheet-like conductors. <P>SOLUTION: The first and the second conductive layers 111, 112 of the sensor device 101 are good sheet-shaped conductors. A transceiving element 115 transmits electromagnetic waves to a sensing region 113 sandwiched between them, and measures the intensity, changes in phase, the time of arrival, etc. of the electromagnetic waves, when the electromagnetic waves transmitted out from itself or another transceiving element 115 are transferred via the sensing region 113. A inferring section, provided to an external computer or the like, infers the distribution of transfer characteristic values of the electromagnetic waves in the sensing region 113 from the reception result of the transceiving element 115, and an output section outputs physical amounts, made to correspond to them respectively as distribution of measurements. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention is based on the distribution of electromagnetic wave transmission characteristics in a region sandwiched between sheet-like (cloth-like, paper-like, foil-like, film-like, plate-like, film-like, or mesh-like) good conductors, from pressure, light, temperature, sound. The present invention relates to a sensor device suitable for obtaining a distribution such as pressure.

Conventionally, a good conductor in the form of a sheet (cloth, paper, foil, plate, mesh, etc., having a wide surface and a small thickness) (if it is a good conductor in the signal frequency band used for communication) The inventors of the present application have proposed a technology related to a communication device using a good conductor for direct current. For example, in the following documents, a communication device is proposed that transmits a signal by relaying a signal by a plurality of communication elements embedded in a sheet-like member without forming individual wiring.
Japanese Patent Laid-Open No. 2004-007448

  [Patent Document 1] discloses a technique in which external communication devices communicate with each other via a connector specially provided on a sheet-like member.

  Therefore, there is a need for a sensor device that has a structure suitable for use together with the sheet-like communication device as described above and measures various physical quantities such as pressure, light, temperature, and sound pressure.

  The present invention is for solving the above-described problems, and is a sensor suitable for obtaining the distribution of pressure, light, temperature, sound pressure, and the like from the distribution of electromagnetic wave transmission characteristics in a region sandwiched between sheet-like good conductors. An object is to provide an apparatus.

  The sensor device according to the present invention includes a first conductive layer, a second conductive layer, a plurality of transmission units, a plurality of reception units, an estimation unit, and an output unit, and is configured as follows.

  First, the first conductive layer has a cloth shape, a paper shape, a foil shape, a film shape, a plate shape, a film shape, or a mesh shape.

  Next, the second conductive layer is disposed so as to be substantially equidistant from the first conductive layer, and has a cloth shape, a paper shape, a foil shape, a film shape, a plate shape, a film shape, or a mesh shape.

  Further, the plurality of transmission units transmit electromagnetic waves to a region sandwiched between the first conductive layer and the second conductive layer.

  And a some receiving part receives electromagnetic waves transmitted from each of a plurality via a field sandwiched between the 1st conductive layer and the 2nd conductive layer.

  On the other hand, the estimator includes the positions of the plurality of transmitters, the positions of the plurality of receivers, and the signals when each of the plurality of receivers receives the signals transmitted by the plurality of transmitters. The distribution of electromagnetic wave transmission characteristic values in a region sandwiched between the first conductive layer and the second conductive layer is estimated.

  Further, the output unit acquires a value associated with the estimated electromagnetic wave transfer characteristic value in advance, and distributes the distribution of the acquired value between the first conductive layer and the second conductive layer. Output as distribution of measured values.

  The first conductive layer and the second conductive layer are good conductors at least in the frequency band of the electromagnetic wave transmitted by each of the plurality of transmission units.

  In addition, the sensor device of the present invention may be configured to dispose a member that changes the attenuation rate of the electromagnetic wave in the frequency band due to a change in pressure between the first conductive layer and the second conductive layer. it can.

  In addition, the sensor device of the present invention can be configured such that at least one of the first conductive layer and the second conductive layer uses a member whose resistivity in the frequency band changes due to a change in pressure.

  In the sensor device of the present invention, at least one of the first conductive layer and the second conductive layer allows light to pass between them, and between the first conductive layer and the second conductive layer. In addition, a member whose carrier is changed by light can be arranged.

  In addition, the sensor device of the present invention can be configured such that a member whose carrier changes with temperature is disposed between the first conductive layer and the second conductive layer.

  In the sensor device of the present invention, the member disposed between the first conductive layer and the second conductive layer can be configured to be an organic semiconductor.

  In addition, the sensor device of the present invention can be configured such that an electromagnetic wave absorber is disposed in a peripheral portion of a region sandwiched between the first conductive layer and the second conductive layer. This electromagnetic wave absorber can be in contact with the first conductive layer and the second conductive layer.

  In the sensor device of the present invention, the boundary between the region where the electromagnetic wave absorber is disposed and the region where the electromagnetic wave absorber is not disposed in the region sandwiched between the first conductive layer and the second conductive layer is a saw-tooth shape. It can be configured to have a (wedge shape) shape.

  In the sensor device of the present invention, a voltage is applied between the first conductive layer and the second conductive layer, and the plurality of transmission units and the plurality of reception units include the first conductive layer, A potential difference between the second conductive layer and the second conductive layer can be used as a power supply voltage.

  In the sensor device of the present invention, the first conductive layer and the second conductive layer are replaced with the first dielectric layer and the second dielectric layer, and the dielectric constant of these layers is set to at least a plurality of dielectric constants. In the frequency band of the electromagnetic wave transmitted by each of the transmission units, the dielectric constant of the region sandwiched between these layers can be different.

  In the sensor device of the present invention, the dielectric constant of the first dielectric layer and the second dielectric layer is configured to be smaller than the dielectric constant of the region sandwiched between the first dielectric layer and the second dielectric layer. can do.

  In the sensor device of the present invention, the second conductive layer is replaced with a dielectric layer, and the dielectric constant of the dielectric layer is sandwiched between these layers at least in the frequency band of the electromagnetic wave transmitted by each of the plurality of transmitters. It can be configured to be different from the dielectric constant of the region to be processed.

  In the sensor device of the present invention, the dielectric layer can be configured so that the dielectric constant of the dielectric layer is smaller than the dielectric constant of the region sandwiched between the first conductive layer and the dielectric layer.

  According to the present invention, in order to solve the above-described problem, it is suitable for obtaining a distribution of pressure, light, temperature, sound pressure, and the like from a distribution of electromagnetic wave transmission characteristics in a region sandwiched between sheet-like good conductors. Can be provided.

  Embodiments of the present invention will be described below. In addition, embodiment described below is for description and does not restrict | limit the scope of the present invention. Therefore, those skilled in the art can employ embodiments in which each of these elements or all of the elements are replaced with equivalent ones, and these embodiments are also included in the scope of the present invention.

  In particular, the term “dielectric material” below does not necessarily have to be a homogeneous material, but it is equivalent by mixing a material with a large dielectric constant or metal fine particles, or arranging those structures smaller than the wavelength. Including those with a higher dielectric constant.

  Furthermore, in the following, when referring to a “good conductor” or “insulator”, it is sufficient to function as a “good conductor” or “insulator” in the frequency band of electromagnetic waves used for transmission. ”Or“ insulator ”.

  In the following description, “outside” is typically assumed to be in the air (in the air), but also includes soil, water, and vacuum.

  In addition, the term “sheet shape” generally refers to a cloth shape, a paper shape, a foil shape, a plate shape, a mesh shape, a film shape, etc. that has a wide surface and is thin.

  In the following description, microwaves are used as electromagnetic waves. However, the principles of the present invention can be applied to electromagnetic waves of other wavelengths.

  1 and 2 are a plan view and a cross-sectional view showing a schematic configuration of a sensor device according to one embodiment of the present invention. Hereinafter, description will be given with reference to these drawings.

  In the sensor device 101 according to the present embodiment, the sheet-shaped first conductive layer 111 and the sheet-shaped second conductive layer 112 whose surface is arranged substantially in parallel, the sensing region 113 and the periphery thereof And a terminating resistor 114 surrounding the.

  Therefore, the sensing region 113 and the termination resistor 114 are sandwiched between the first conductive layer 111 and the second conductive layer 112. Since these have a simple layered structure, the area can be increased. It can be made easily and with a flexible material that can be stretched and with painting techniques.

  In order to transmit electromagnetic waves between the first conductive layer 111 and the second conductive layer 112, a plurality of microwave transmitting / receiving elements 115 are arranged. A voltage is applied between the first conductive layer 111 and the second conductive layer 112, and the microwave transmitting / receiving element 115 charges the built-in capacitor or storage battery with this voltage while the transmitting / receiving operation is not performed. The power supply when performing transmission / reception operation.

  Further, this voltage can also be used as a power source for a computer constituting an estimation unit and an output unit described later.

  The microwave transmitting / receiving element 115 transmits an electromagnetic wave in a predetermined frequency band between the first conductive layer 111 and the second conductive layer 112 and receives the electromagnetic wave propagated through the sensing region 113. Therefore, the microwave transmission / reception element 115 functions as a transmission unit and a reception unit of the present invention.

  The microwave transmitting / receiving element 115 is connected to the second conductive layer 112 through a hole penetrating the first conductive layer 111 in this figure, but the first conductive layer 111, the second conductive layer 112, It is good also as arrange | positioning so that it may pinch | interpose between.

  In the case where the sensing region 113 between the first conductive layer 111 and the second conductive layer 112 is arranged as an insulator, a point where the first conductive layer 111 is located and the second conductive layer opposite thereto When the potential between the point 112 and the scalar potential / vector potential are changed, an electromagnetic wave traveling in parallel with the sheet-shaped surfaces of the first conductive layer 111 and the second conductive layer 112 is generated. The inside of the sensing area 113 is advanced.

  Therefore, it is sufficient that the first conductive layer 111 and the second conductive layer 112 are good conductors in the frequency band of the transmitted electromagnetic wave, and it is not necessary to make good conductors for direct current for signal transmission. As will be described later, when power is supplied, it is desirable to use a good conductor for direct current.

  The first conductive layer 111 and the second conductive layer 112 are for confining electromagnetic waves between them. Therefore, the first conductive layer 111 and the second conductive layer 112 may be confined in the sensing region 113 by total reflection by using a material having an electromagnetic wave propagation speed higher than that of the sensing region 113.

  In addition, instead of “good conductor”, the first conductive layer 111 and the second conductive layer 112 are “dielectric”, and the dielectric constant thereof is different from the dielectric constant of the sensing region 113 in the frequency band of electromagnetic waves. Even so, it is possible to confine electromagnetic waves. In this case, the dielectric constant of the dielectric layer replacing the first conductive layer 111 and the second conductive layer 112 should be smaller than the dielectric constant of the sensing region 113. This is advantageous from the viewpoint of utilizing total reflection and selecting the material. It is. The dielectric constant of the dielectric layer that replaces the first conductive layer 111 and the second conductive layer 112 may be larger than the dielectric constant of the sensing region 113.

  Alternatively, one of the two layers may be a conductor, and the other may be a dielectric, and the dielectric constant of the conductor may be adjusted to confine electromagnetic waves in the sensing region 113.

  In addition, in order to contain the electromagnetic wave in the sensing region 113, a dielectric having a dielectric constant different from the dielectric constant of the sensing region 113 is used for one of the two outer layers sandwiching the sensing region 113, and the other is dielectric or conductive. It is good as a body.

  That is, if the dielectric constant of the outer dielectric is sufficiently larger than the dielectric constant of the sensing region 113, even if the other is a conductive layer, confinement occurs due to reflection. It may be desirable to adopt such a mode because a material having a good conductor such as metal may become a high dielectric constant material when the frequency band becomes high.

On the other hand, when the dielectric constant ε ′ of the outer dielectric is smaller than the dielectric constant ε of the sensing region 113, the thickness of the sensing region 113 is d, the distance from the boundary is z, and the electromagnetic wave velocity 1 / ( If ε'μ) ^0.5 = c 'and d is sufficiently smaller than the electromagnetic wave wavelength, the evanescent wave in the outer layer is
exp (-0.5d (ω / c ') ² (1-ε' / ε) z)
Attenuates in proportion to.

Therefore, when the thickness of the outer layer is D,
exp (-0.5d (ω / c ') ² (1-ε' / ε) D) << 1
If is established, electromagnetic waves do not leak outside. If one of the outer layers is a conductive layer,
exp (-d (ω / c ') ² (1-ε' / ε) D) << 1
Should be satisfied.

In addition, if d is not sufficiently small compared to the electromagnetic wave wavelength and has a certain thickness,
exp (-(ω / c ') ((ε / ε'-1) ^0.5 ) D) << 1
If is established, electromagnetic waves do not leak to the outside.

  The termination resistor 114 functions as an electromagnetic wave absorber for preventing the reflection of microwaves. In order to efficiently prevent the reflection, the boundary between the sensing region 113 and the termination resistor 114 is a plan view of FIG. As shown in FIG. 4, it is desirable to have a saw blade shape (wedge shape). The electromagnetic wave absorber is not necessarily prepared. For example, the first conductive layer 111 and the second conductive layer 112 form a substantially closed curved surface such as a wall surface or an outer surface of a room.

  Further, in this drawing, the termination resistor 114 is in direct contact with the first conductive layer 111 and the second conductive layer 112, but can absorb electromagnetic waves even if both are electrically insulated. .

  In FIG. 1, the transmitting / receiving element 115 is located at the periphery of the sensing region 113 and in the vicinity of the termination resistor 114, but is not limited to this, and can be arranged at an arbitrary location as shown in FIG. 4. . However, as will be described later, it is necessary to arrange so that the distribution of electromagnetic wave propagation characteristics at each location can be found.

  Now, the electromagnetic wave propagation characteristics at each point in the sensing region 113 change as the physical quantities such as pressure, light, sound pressure, and temperature change. Therefore, in this embodiment, the distribution of the electromagnetic wave propagation characteristic is obtained by the same technique as the X-ray CT scan, and the physical quantity distribution is measured by outputting the physical quantity associated with the characteristic.

  The estimation unit (not shown) is configured by a computer connected to each transmission / reception element 115, and in each of the transmission / reception elements 115, only one transmission / reception element 115 simultaneously has a constant amplitude and phase wave of electromagnetic waves (pulses and Burst may be employed.) And the intensity, phase, arrival time, etc. of the electromagnetic wave received by the other transmitting / receiving element 115 at that time are measured. When the electromagnetic wave propagation characteristics (such as the attenuation rate and impedance of the electromagnetic wave) change in the middle, the intensity, phase, arrival time, etc. of the electromagnetic wave received by the transmitting / receiving element 115 also change.

  Therefore, the transmitting / receiving elements 115 are arranged with sufficient density, and the estimation unit estimates the two-dimensional distribution of the electromagnetic wave propagation characteristics in the sensing region 113 by the same technique as the already known X-ray CT scan.

  In the CT scan, a beam is emitted from the transmission side, received by the reception side, and the distribution of the transmission attenuation factor of the wave is calculated from the transmission attenuation amount until reaching the reception side.

  An output unit (not shown) is also configured by the computer, and obtains a physical quantity (pressure, light intensity, temperature, sound pressure, etc.) associated with the electromagnetic wave propagation characteristics estimated by the estimation unit, and calculates the distribution. Output.

  The estimation unit and the output unit can be realized by a computer on which software operates as described above. However, if the estimation unit and the output unit are configured by a dedicated electronic circuit, it is possible to make the sensor unit or downsize. It is.

  Hereinafter, what kind of material is filled in the sensing region 113 will be described in more detail.

(Pressure sensor, displacement sensor)
When a dielectric is used as a material to be filled in the sensing region 113, the attenuation rate of electromagnetic waves changes depending on the pressure between the first conductive layer 111 and the second conductive layer 112, so that a pressure sensor can be configured. Details will be described below.

  A material mixed with dielectric fine particles can be used as a material whose dielectric loss changes with pressure and whose electromagnetic wave attenuation rate changes.

  Instead of using a member whose dielectric loss varies depending on pressure as described above, the sensing region 113 is formed as a void (including air, vacuum, etc.) or a deformable dielectric, and the first conductive layer 111 and There may be a method of measuring the pressure by examining the displacement of the second conductive layer 112. This will be described below.

  The conductivity of the first conductive layer 111 and the second conductive layer 112 in the frequency band (angular frequency ω) of the electromagnetic wave is σ, and the dielectric constant of the sensing region 113 is ε. The distance between the conductive layer 112, that is, the thickness of the sensing region 113 is defined as d.

Both of the magnetic permeability are μ and d are assumed to be sufficiently smaller than the wavelength of the electromagnetic wave, and the skin depth of the first conductive layer 111 and the second conductive layer 112 is assumed.
(2 / σμω) ^1/2
Assuming that the thickness is smaller than the thickness of the first conductive layer 111 and the second conductive layer 112, the electromagnetic wave attenuation constant α (when the distance is separated by x, the strength of the electric field or magnetic field is attenuated by exp (−αx). .) Is given as follows.
α ≒ (1 / d) (εω / 2σ) ^1/2

  When pressure is applied to the first conductive layer 111 and the second conductive layer 112, the distance between them (the thickness of the sensing region 113) d changes, so that the displacement distribution and pressure distribution can be known by examining the distribution of the attenuation constant α. be able to.

  As an example, a material mixed with conductive fine particles may be used. Further, a structure in which the resistivity (at the signal frequency) of the conductive layer, not the sensing layer, is changed by pressure, and the attenuation factor is changed by the conductive layer is also possible. As an example, this can also be realized by a material mixed with conductive fine particles.

In addition to the above assumption, here, the electromagnetic wave velocity in the sensing region 113 is c,
| σ / ω | >>ε;
d << 1 / α;
(ωε / σ) ^1.5 << ωd / c << (σ / (ωε)) ^0.5
Is assumed.

  In addition, the complex dielectric constant of the first conductive layer 111 and the second conductive layer 112 is approximated to be proportional to σ / ω in a pure imaginary number. However, even when the real part cannot be ignored, the same applies due to the pressure applied. Since the damping coefficient changes, the pressure sensor can function. If the sensitivity of pressure measurement is increased, the sound pressure distribution can also be measured.

  Of course, the size of the first conductive layer 111 and the second conductive layer 112 of the sensor device 101 configured as shown in FIG. Each time, the propagation path characteristics are estimated by the estimation unit, and the correspondence between the pressure values and the estimated values of the propagation path characteristics is stored as a table. In actual measurement, the present pressure value may be obtained from a past estimated value (actually measured value) with reference to this table. In other words, this is a method based on experimentally measured values.

  Note that some dielectric materials change dielectric loss when they absorb moisture. If this is used, a humidity sensor can also be realized.

(Optical sensor, temperature sensor)
If a material whose carrier density (holes or excess electrons) changes in density or movement resistance, such as an organic semiconductor, is used as a material to be filled in the sensing region 113, the light intensity distribution and the temperature distribution can be detected.

  In this case, as in the case of the pressure sensor described above, the distribution of the electromagnetic wave propagation path characteristics in a state in which the light intensity and temperature are known in advance is obtained, and in the stage of actually functioning as a sensor, a linear sum of the obtained values is obtained. It is only necessary to perform the calculation assuming that

  In some cases, it is desired to adjust the average attenuation rate of the microwave in order to obtain the desired accuracy and measurement range. At this time, the sensing region 113 has a two-layer structure of a carrier changing member layer and a derivative layer that does not attenuate microwaves. If the layer of the carrier changing member is thinned or thickened, the average attenuation rate can be reduced or increased.

  Further, if a material whose carrier changes with temperature is used for the sensing layer, the temperature distribution can be measured, and if a material which absorbs moisture and changes its dielectric loss is used, the humidity distribution can be measured.

  In the above embodiment, the sensing region 113 is filled with some material, but in this embodiment, an electromagnetic wave transmitted from a transmitting / receiving element 115 generated in a region corresponding to the sensing region 113 is transmitted to the first conductive layer 111 or the first conductive layer 111. Various measurements are performed by detecting the state of reflection on the two conductive layers 112. This is based on the same principle as the ultrasonic diagnostic apparatus (ultrasonic echo).

  In the technique of the ultrasonic diagnostic apparatus, a pulsed beam is transmitted from the transmission side, and the distance from the arrival time of the reflected wave to the point where the impedance changes is measured.

  FIG. 5 is a cross-sectional view of an example of a sensor device based on such an embodiment. Hereinafter, a description will be given with reference to FIG. The transmitting / receiving element 115 is not shown.

  A spacer 121 made of an insulator is arranged between the first conductive layer 111 and the second conductive layer 112 so as to keep the distance between them as much as possible.

  Under such circumstances, when the impedance through which the electromagnetic wave passes changes due to pressure, the reflection of the electromagnetic wave occurs in a place where the spatial change rate is large, that is, a place where the pressure change is large. In such a case, the region other than the spacer 121 between the first conductive layer 111 and the second conductive layer 112 may be filled with a member whose dielectric loss changes due to pressure, or the filling may not be performed. Instead, as the first conductive layer 111 and the second conductive layer 112, a member whose resistivity changes with pressure may be employed.

  In addition, when the distance between the first conductive layer 111 and the second conductive layer 112 in a place where the spacer 121 is not changed, the impedance of the electromagnetic wave changes, so that reflection occurs at the place where the change occurs. .

  In order to obtain the distribution of the physical quantity due to the influence of such reflection, a known method similar to that of the ultrasonic diagnostic apparatus may be used.

  FIG. 6 is a cross-sectional view of a sensor device according to another embodiment. Hereinafter, a description will be given with reference to FIG. The transmitting / receiving element 115 is not shown.

  This figure (a) shows the situation where no pressure or displacement is applied, and this figure (b) shows the situation where pressure or displacement is applied.

  In the present embodiment, when pressure or displacement is applied, the first conductive layer 111 and the second conductive layer 112 come into contact with each other (a portion surrounded by a circle in the drawing). Then, more remarkable electromagnetic wave reflection occurs at the contact point.

  The electromagnetic wave is radiated as a burst of several wavelengths from the transmitting / receiving elements 115 arranged at each location, and this is observed by all the transmitting / receiving elements 115 including itself, and reflection occurs due to the arrival time of the reflected wave. The location is identified, and this is used as the estimation result of the location of the contact portion, and the distribution of pressure and displacement is output.

  When a plurality of transmission / reception elements 115 are phased arrays, the transmission direction of electromagnetic waves is scanned and only electromagnetic waves from the same direction are detected, measurement is performed by connecting the phased array to at least one location of the sensor device 101. Is possible. That is, the location where reflection occurs can be specified by the arrival time of the reflected wave. In addition, by arranging a plurality of the arrays, it is possible to perform measurement with higher accuracy.

  FIG. 7 is an explanatory diagram showing a state in which a part of the transmitting / receiving elements is used as a phased array.

  The array 701 composed of a plurality of transmitting / receiving elements 115 of the sensor device 101 transmits electromagnetic waves having the same waveform, and the phase of the array 701 is adjusted by adjusting the direction of the directivity of the electromagnetic waves emitted from the array 701 as a whole. Can do. This is a phased array.

  Therefore, the direction 702 of the electromagnetic wave directivity is changed as appropriate, and the sensing area 113 is scanned. By sending out electromagnetic waves in a specific direction and observing the reflected waves, distribution information is obtained by a method similar to radar.

  Further, when the electromagnetic wave is emitted from the central part of the sensor device 101 and the reflection is measured by the transmission / reception element 115 arranged at the peripheral part, the terminal resistor 114 serving as a peripheral electromagnetic wave absorber is unnecessary.

  In the above embodiment, transmission and reception are performed by the transmission / reception element 115, but the transmission side and the reception side may be separate elements.

  Even when a material whose carrier or resistivity changes due to temperature, humidity, light, or the like is used, reflection occurs at a portion where the carrier or resistivity changes significantly. Therefore, it is possible to obtain distribution information by applying a measurement method based on reflection detection as described above.

  According to the present invention, in order to solve the above-described problem, it is suitable for obtaining a distribution of pressure, light, temperature, sound pressure, and the like from a distribution of electromagnetic wave transmission characteristics in a region sandwiched between sheet-like good conductors. Can be provided. This sensor device can be used not only in air but also in vacuum, water and soil.

It is a top view which shows schematic structure of the sensor apparatus which concerns on one of embodiment of this invention. It is sectional drawing which shows schematic structure of the sensor apparatus which concerns on one of embodiment of this invention. It is a top view which shows the shape of the boundary of a sensing area | region and termination resistance. It is a top view which shows schematic structure of the sensor apparatus which concerns on one of embodiment of this invention. It is sectional drawing of the Example of the sensor apparatus which concerns on other embodiment of this invention. It is sectional drawing of the Example of the sensor apparatus which concerns on other embodiment of this invention. It is sectional drawing of the Example of the sensor apparatus which concerns on other embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 101 Sensor apparatus 111 1st conductive layer 112 2nd conductive layer 113 Sensing area | region 114 Terminating resistance 115 Transmission / reception element 121 Spacer 701 Array 702 Direction of electromagnetic wave directivity

Claims (13)

A first conductive layer in the form of a cloth, paper, foil, film, plate or mesh,
A second conductive layer having a cloth shape, a paper shape, a foil shape, a film shape, a plate shape, or a mesh shape, which is disposed so as to be substantially equidistant from the first conductive layer;
A plurality of transmitters for transmitting electromagnetic waves to a region sandwiched between the first conductive layer and the second conductive layer;
A plurality of receiving units for receiving electromagnetic waves transmitted from the plurality of the plurality of electromagnetic waves through a region sandwiched between the first conductive layer and the second conductive layer;
From the position of the plurality of transmission units, the position of the plurality of reception units, and the signal when each of the plurality of reception units receives a signal transmitted from each of the plurality of transmission units, the first An estimation unit that estimates a distribution of electromagnetic wave transmission characteristic values in a region sandwiched between the conductive layer and the second conductive layer;
A value associated with the estimated electromagnetic wave transfer characteristic value is acquired in advance, and a distribution of the acquired value is measured in a region sandwiched between the first conductive layer and the second conductive layer. An output section that outputs as a distribution, wherein the first conductive layer and the second conductive layer are good conductors at least in a frequency band of an electromagnetic wave transmitted by each of the plurality of transmission sections. Sensor device. The sensor device according to claim 1,
A sensor device is provided between the first conductive layer and the second conductive layer, wherein a member that changes an attenuation factor of electromagnetic waves in the frequency band due to a change in pressure is disposed. The sensor device according to claim 1,
At least one of the first conductive layer and the second conductive layer uses a member whose resistivity in the frequency band changes due to a change in pressure. The sensor device according to claim 1,
At least one of the first conductive layer and the second conductive layer allows light to pass between them;
A member in which a carrier is changed by light is disposed between the first conductive layer and the second conductive layer. The sensor device according to claim 1,
A sensor device in which a member whose carrier changes with temperature is disposed between the first conductive layer and the second conductive layer. The sensor device according to claim 4 or 5,
The member arranged between the first conductive layer and the second conductive layer is an organic semiconductor. The sensor device according to any one of claims 1 to 6,
An electromagnetic wave absorber is disposed in a peripheral portion of a region sandwiched between the first conductive layer and the second conductive layer. A sensor device. The sensor device according to claim 7,
Of the regions sandwiched between the first conductive layer and the second conductive layer, the boundary between the region where the electromagnetic wave absorber is disposed and the region where the electromagnetic wave absorber is not disposed has a saw-shaped shape. A characteristic sensor device. The sensor device according to any one of claims 1 to 8,
A voltage is applied between the first conductive layer and the second conductive layer,
The plurality of transmitting units and the plurality of receiving units operate using a potential difference between the first conductive layer and the second conductive layer as a power supply voltage. A first dielectric layer in the form of a cloth, paper, foil, film, plate or mesh;
A second dielectric layer in a cloth-like, paper-like, foil-like, film-like, plate-like or mesh-like shape arranged so as to be substantially equidistant from the first dielectric layer;
A plurality of transmitters for transmitting electromagnetic waves to a region sandwiched between the first dielectric layer and the second dielectric layer;
A plurality of receiving units for receiving electromagnetic waves transmitted from the plurality of the plurality of receiving units via a region sandwiched between the first dielectric layer and the second dielectric layer;
From the position of the plurality of transmission units, the position of the plurality of reception units, and the signal when each of the plurality of reception units receives a signal transmitted from each of the plurality of transmission units, the first An estimation unit for estimating a distribution of electromagnetic wave transfer characteristic values in a region sandwiched between the dielectric layer and the second dielectric layer;
A value associated with the estimated electromagnetic wave transfer characteristic value is acquired in advance, and the distribution of the acquired value is measured in a region sandwiched between the first dielectric layer and the second dielectric layer. The first dielectric layer and the second dielectric layer have a dielectric constant at least in the frequency band of the electromagnetic wave transmitted by each of the plurality of transmission units. The sensor device is characterized in that the dielectric constant of a region sandwiched between the layer and the second dielectric layer is different. The sensor device according to claim 10,
The sensor device according to claim 1, wherein a dielectric constant of the first dielectric layer and the second dielectric layer is smaller than a dielectric constant of a region sandwiched between the first dielectric layer and the second dielectric layer. A dielectric layer in the form of a cloth, paper, foil, film, plate or mesh,
A conductive layer having a cloth shape, a paper shape, a foil shape, a film shape, a plate shape, or a mesh shape, which is disposed so as to be substantially equidistant from the first dielectric layer;
A plurality of transmitters that transmit electromagnetic waves to a region sandwiched between the dielectric layer and the conductive layer;
A plurality of receiving units that receive electromagnetic waves transmitted from each of the plurality of regions via a region sandwiched between the dielectric layer and the conductive layer;
From the position of the plurality of transmission units, the position of the plurality of reception units, and the signal when each of the plurality of reception units receives a signal transmitted from each of the plurality of transmission units, the dielectric layer And an estimation unit that estimates a distribution of electromagnetic wave transfer characteristic values of a region sandwiched between the conductive layers,
A value associated in advance with the estimated electromagnetic wave transfer characteristic value is acquired, and a distribution of the acquired value is output as a distribution of measured values in a region sandwiched between the dielectric layer and the conductive layer. The dielectric layer has a dielectric constant different from that of a region sandwiched between the dielectric layer and the conductive layer at least in the frequency band of the electromagnetic wave transmitted by each of the plurality of transmission units. A sensor device. The sensor device according to claim 12,
The dielectric constant of the said dielectric layer is smaller than the dielectric constant of the area | region pinched | interposed into the said dielectric layer and the said conductive layer. The sensor apparatus characterized by the above-mentioned.

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