JP2006320907A - Micro laser peening treatment and parts using micro laser peening treatment using powder and coating - Google Patents

Abstract

The present invention provides a laser peening treatment method for improving wear resistance and seizure resistance of sliding surfaces such as bearings and bearings, which are parts of transportation equipment such as automobiles, and rotating machinery, and adhesive wear.
After a powder, such as resin, metal, ceramics, lubricant, and hardener, and a film 2 are attached to the surfaces of various metal materials and resin parts 1, a laser absorption enhancement film 3 is provided thereon, and further A laser interference film is formed thereon, and a short-pulse high-peak output laser is condensed from the laser interference film, and laser peening is performed. A fine dent is generated on the surface of the workpiece, and a lubricating oil pool is formed in the dent, improving lubricity, sliding property and wear resistance. In addition, a modified layer in which foreign powder is embedded in the surface layer is formed on the surface. As a result, surface layer modification effects such as introduction of a large compressive residual stress, expansion of the surface area, hardening of the structure, refinement of the structure, and disappearance of the cavity immediately below the surface occur on the surface.
[Selection] Figure 1

Description

The present invention proposes a new method for improving the mechanical properties, fatigue strength, wear resistance, sliding resistance, etc. of various metal products / parts, metal castings, welded joints, etc. Is widely related to tools, machinery products, transportation equipment, high-speed rotating devices, office equipment, medical equipment, etc., mechanical parts such as bearing members, bearings, sliding parts, pistons, bushes, shafts, rollers, and metal parts, The present invention relates to a technology that brings about a significant improvement in the service life of vehicle power machine parts, power machine tools, hydraulic machines, and surface treatment machine elements.

Currently, lubricating oil is applied to sliding surfaces such as pistons, bushes, crankshafts and other power machinery parts for vehicles, rollers, shafts, conveyors, power machinery and equipment, pistons, cylinders, bearings, bearings, etc. The pour friction coefficient is lowered, and a special coating is formed by plating treatment such as phosphoric acid coating treatment and oxide coating treatment and surface coating treatment of metal coating to prevent seizure and surface wear. In addition, solid lubricants such as ceramic powder and molybdenum disulfide are applied to form a lubricating oil reservoir on the surface to improve wear resistance and seizure resistance. However, further improvements in wear resistance and seizure resistance are desired in order to promote high performance and high-speed rotation of machine products. The present invention uses laser powder peening treatment or ultrasonic laser multiple peening treatment to generate innumerable fine dents on the rotating surface and sliding surface, thereby changing the rotational resistance from surface contact to point contact. It provides a technique for improving sliding characteristics and wear resistance.

In recent years, castings made of light metals such as aluminum alloys and magnesium alloys have been widely used to reduce the weight of electronic equipment and transportation equipment products, but their surfaces have low wear resistance and scratch resistance, Various coatings are applied, or quality is improved by processing such as die casting in a semi-solid state. Further, if there are various defects in the vicinity of the surface or inside the casting, the yield is greatly reduced. In addition, various metal products and welded joints that have been heat-processed such as plastic processing, welding, and casting have surface shapes such as irregularities on the cast material that are not sufficiently smooth, requiring post-processing, or near the surface. Leaves tensile residual stress or causes material deterioration.

Austenitic stainless steel welds are susceptible to stress corrosion cracking in a corrosive environment due to the residual tensile stress of the weld. Nickel superalloys cause grain boundary embrittlement when heated at a high temperature just below the melting point. When various metals are heated to a high temperature, various problems arise in terms of metal structure and strength.
Heat-treatable aluminum alloys and magnesium alloys such as duralumin have a low melting point, and the heat-affected zone is easily softened by the heat of welding, and the joint efficiency (ratio of welded joint strength to base metal strength) ) Is from 50% to about 90%, and it is difficult to increase it to 100%. When it is absolutely 100%, heat treatment is performed on the structure after welding.

As a new transportation system, there is a magnesium alloy tri-fold ultralight bicycle that can be easily carried in the subway, but there is a problem that the heat affected zone softens at the welded part of this frame, and it is hoped that it will be strengthened by shot peening etc. It is rare.
These are major problems in structures such as aircraft, nuclear power plants, automobiles, high-speed trains, space equipment, and lifesaving equipment that require advanced functions. Improvements in the performance of these products and structures will lead to improved product performance and extended service life.

Thanks to improved wear resistance and seizure resistance of sliding surfaces that are subject to rotational wear and adhesive wear, such as power machine parts, power machine tools, bearings, and bearings for vehicles, it has been more difficult than conventional metal parts. High speed rotation, no lubrication and long life. Furthermore, the wear resistance and scratch resistance of the surface of the light metal casting are improved, the quality is improved, various defects are removed in the vicinity of the surface and inside the casting, and the yield is improved. In addition, the surface shape of various heat-processed metal products and welded joints is smoothed, and the tensile residual stress in the vicinity of the surface is changed to compressive residual stress, thereby improving fatigue strength and preventing deterioration of the material.

Prevents stress corrosion cracking of metal products that tend to occur in corrosive environments (eg, welded joints), and solves material problems of various metals that cause grain boundary embrittlement when heated at high temperatures. It also prevents softening of the heat affected zone of heat treated aluminum alloys and magnesium alloys, and improves joint efficiency.
These are major problems in structures such as aircraft, nuclear power plants, automobiles, high-speed trains, space equipment, and lifesaving equipment that require advanced functions. Improvements in the performance of these products and structures will lead to improved product performance and extended service life.

As shown in FIG. 1, the workpiece 1 is a steel material, a casting material, a non-ferrous metal die cast casting, a titanium alloy, an aluminum alloy or a magnesium alloy, a nickel alloy, a copper alloy, silver, a gold metal material, and a resin product. Metal powder, carbide and oxide ceramic powder, catalytic metal, semiconductor, hydrogen storage alloy, carbon nanotube, diamond powder, cBN powder, cemented carbide, amorphous alloy, nickel superalloy, molybdenum disulfide , Intermetallic compound, or solid lubricant of fluororesin, or hardener 2 is applied by plating, plating, thermal spraying, welding or ultrasonic peening, and graphite is used as a film to protect the workpiece from shock waves. A laser absorption enhancement coating 3 coated with black paint or release material is provided, and further, laser interference with water, oil, and glass windows is provided thereon. Laser powder peening process in which the laser beam peening process is performed on the surface of the workpiece 1 by using a laser 5 having a short pulse high peak output of 1 megaW or more in the order of nanoseconds. Or, perform laser film peening treatment. In this case, an interference film 4 such as a laser interference film or film of water or oil may be used to enhance the impact effect due to the generation of several giga Pa of plasma. As a result, as shown in FIG. 2, a plurality of micron-order dimples and depressions are formed on the surface of the workpiece 7 as a result of the microplastic processing, and on the surface, the modified layer 8 in which foreign powder is embedded in the surface layer is formed. Form. As a result, surface layer modification effects such as introduction of a large compressive residual stress, expansion of the surface area, hardening of the structure, refinement of the structure, and disappearance of the cavity immediately below the surface occur on the surface.
Further, as shown in FIG. 1, the laser beam and the focusing optical system are swung or oscillated from position (A) to position (B) or position (C) by computer control, so that the surface of the workpiece The uneven portion can be laser-peened locally or locally, and the surface treatment can be effected by surface treatment efficiently and locally.

In the laser coating peening process using a coating instead of the powder, solid lubricant, or curing material 2 in FIG. 1, the surface treatment of the phosphate coating or oxide coating on the surface of the workpiece 9 as shown in FIG. Beam absorption by applying or supplying graphite, black paint, film or release material as a beam absorption-enhanced coating after coating 10 with metal plating treatment, thermal spraying, metal coating for welding, ceramic coating treatment An enhancement film 11 is provided, and a laser interference film 12 is further provided thereon, and the light is condensed through a condensing optical system 14 using a laser 13 having a short pulse high peak output of 1 megaW or more in the order of nanoseconds. Laser coating peening is performed on the surface for laser peening. Then, as shown in FIG. 4, this is a surface treatment method in which a modified layer 16 having a fine depression on the order of microns is formed on the surface, and at the same time, the above-mentioned coating layer is applied. In this case as well, an interference film 12 (in FIG. 3) such as an interference liquid or film of water or oil that transmits the laser may be used in order to enhance the impact effect due to the generation of plasma.
FIG. 1 shows one workpiece, 2 solid lubricant and hardener, 3 beam absorption enhancement coating, 4 transmission laser interference film, 5 laser beam, and 6 focusing optical system. 2 shows 7 workpieces, solid lubricant and hardened material under 8 micro dimples, and FIG. 3 shows 9 workpieces, 10 plating treatment, metal coating, ceramic coating coating, 11 beam absorption An enhancement coating, a 12 laser interference film, a 13 laser beam, and a 14 focusing optical system are shown. FIG. 4 shows a modified layer on the surface of a fine dimple subjected to 15 workpieces and 16 laser peening.

Beam absorption enhancing coatings 6 and 11 applied to the surface of the solid lubricant and hardener 2 used in the present invention improve the laser absorption and protect the workpiece from shock waves by applying graphite, black paint or separating A film coated with a mold material, such as a transparent film, nylon film, metal film or glass film, is used.

As shown in FIG. 5, when the surface of the work piece is not flat, spherical or cylindrical, or has irregularities on the surface, or has a toe at both ends like a welded joint, , Metal powder, carbide and oxide ceramic powder, diamond powder, cBN powder, cemented carbide powder, amorphous alloy, nickel superalloy, molybdenum disulfide, A solid lubricant such as an intermetallic compound and a fluorine-based resin, or a hardener 23 is jetted onto the surface at high speed using a carrier gas 22 argon or the like and a jet nozzle 21. Since it is necessary to make the laser absorption enhancing coating 19, the feeding device 24 is provided in the vicinity of the upper part of the nozzle, and 19 is supplied to the processing part to cover the solid lubricant and the hardened material 18, and immediately after that the injected part Na Laser powder peening is performed using a laser with a short pulse high peak output of 1 megaW or more in the order of no seconds.
In FIG. 5, 17 workpieces, 18 sprayed powders, solid lubricants and hardeners, 19 laser absorption enhancement coatings, 20 laser beams, 21 spray nozzles, 22 carrier gases, argon, etc., 23 sprayed powders, Solid lubricants and hardeners, 24 laser absorption enhancing coating feeding device.

The type of laser to be used is a laser having a wavelength that can sufficiently transmit an interference liquid / film such as a laser transmission interference film, water, oil, and film (for example, when water is used as an interference liquid, a double wave or wavelength of a YAG laser having a wavelength of 532 nm 1,063 nm glass laser), a pulse width of several ns to several tens of ns, a pulse energy of about several hundred mJ to several J, and a peak output of several hundred megaW to several gigaW. Laser peening can be performed at several tens to several hundreds of Hz using water. Note that the laser beam to be irradiated is focused by a lens or the like, and it is necessary to use a laser beam narrowed to about mm or less on the surface of the non-workpiece. These laser irradiation conditions vary greatly depending on the difference in materials and the purpose of use. The interference liquid layer of water or oil may have a thickness of 5 mm or less, and it is possible to use running water. As the laser interference film, an interference film such as a photographic film that transmits a laser can be used. In particular, a strip-like film used in laser powder peening can be a coil-like film having a thickness of 10 to 500 microns and a width of several millimeters. Further, glass that transmits laser can be used.

When ultrasonic peening is applied to a metal member surface that has been subjected to a surface treatment such as a metal coating, or to a metal member surface that has been coated with an intermetallic compound and a fluororesin, or a solid lubricant and a hardener, After lightly grooving the workpiece surface layer at the tip of the impact needle, peening is performed so that dimples are generated deeper by laser peening. When performing this ultrasonic laser multiple peening treatment, a surface treatment method for modifying the surface of the condensing optical system used in FIGS. 1 and 3 is performed at a high speed by a method such as multipointing or using an XY galvanometer mirror. It is also possible to increase the processing speed per hour by devising to move and performing computer control.

Powders are scattered in the dimples on the surface of parts that have been carburized or nitrogenated, metal or ceramic coated parts, or parts that have been injected with fine particles of metal, ceramics, etc., and laser peening cannot be performed immediately after There is. In such a case, it is necessary to perform ultrasonic peening treatment to embed these powders on the surface, and then normally perform peening with laser powder peening using a laser absorption enhancement type film or a laser interference film. Alternatively, it is necessary to perform laser peening by pressing the powder in the powder injection portion using a laser interference film such as a coiled film. In this case as well, if necessary, a reforming treatment can be performed by applying graphite coating as a coating to protect the workpiece from shock waves, or applying a laser absorption enhancing coating such as black paint or release material on the bottom of the film. Become.

In the laser powder peening process or the ultrasonic laser multiple peening process, an infinite number of fine recesses 27 of several μm to several tens of μm are formed on the sliding surface 26 of the rotating part of the mechanical part 25 such as a crankshaft shown in FIG. Therefore, the sliding surface that is easily worn is improved and the shape is maintained, and the transition from the surface contact to the point contact with respect to the rotational resistance is increased. Not only can the wear resistance be improved, but also the rotational resistance is lowered, so that higher-speed rotation is possible than ever before.

Laser coating peening treatment, laser powder peening treatment, or ultrasonic laser multiple peening treatment method is used to make countless fine dents on the surface of metal, resin, or ceramics, and to embed foreign matter in metal, resin, ceramics, etc. And by groove processing, not only the surface modification of metal and resin products. Engraving / removal processing such as groove processing, patterning, patterning, edge processing, deburring processing, impurity removal, dimple processing, etc. can be performed, and processing that changes the surface shape of the product or adds fine patterns is also possible Become. If a lubricant is applied to the resulting dimples, it becomes possible to improve the formability of the plate material with respect to the plastic working, and the deep squeezing property can be improved. Further, if lubricating oil is applied to the dimples, rotation can be facilitated as described above, and wear resistance and seizure resistance can be improved.

When laser peening, using a metal or ceramic mask with many holes such as triangles, squares, polygons, circles, ellipses, etc. A fine recess having the same shape as the scraped pattern of the precision machine component can be formed on the surface of the work piece and processed into a desired surface state. In order to form a large number of small indentations on the surface of the workpiece, the laser beam is used with an XY scanner device during laser peening, and the beam operation is performed with computer control. By performing the operation, a laser peening process can be performed in which a plurality of desired dimples and depressions are formed, so that automation is possible. The scraping process currently performed by skilled technicians can be automated.
As a mask used for this treatment, a metal mask and a ceramic mask having a thickness of 0.1 mm to 5 mm and high hardness can be used.

Laser powder peening, laser film peening, and ultrasonic laser multiple peening have a wide range of effects, and the following effects can be expected.
Other laser peening is achieved by embedding or adhering powders and coatings of various foreign substances, metals, ceramics, intermetallic compounds, carbides and nitrides on the surface of metal and resin members, and generating countless dimples. Larger plastic deformation than processing occurs, and a large compressive residual stress can be introduced into the surface of the workpiece. As a result, not only toughness of products or parts, improvement of wear resistance and sliding resistance, but also improvement of fatigue strength and life of products, improvement of corrosion resistance and heat resistance can be achieved.
In addition, since the shape and distribution of the dimples can be controlled microscopically, the surface can be made smoother by changing the macro uneven portions to finer uneven portions like scraping. On the other hand, if the concave and convex portions of moderate size on the order of microns are formed on the sliding surfaces of machine parts such as bearings and bearings and used as a recess to store lubricant and lubricant, the wear resistance of the product, Can improve sliding resistance and seizure characteristics.
Since compressive residual stress is induced around the irradiated portion by plastic deformation, it becomes difficult for the crack to progress, and the progress of fatigue crack, stress corrosion cracking, and creep deformation of the product is suppressed.
At the same time as plastic deformation is induced in the metal or resin, microscopically, dislocations are propagated inside the metal or resin and the dislocation density is remarkably increased, so that the static strength and toughness are also improved. Further, when peened into a metal part such as a semi-solid cast, the metal structure becomes finer and can be toughened.
Using a metal or ceramic mask on the surface of the workpiece, the part where fine dimples are formed and the part where it is not formed can be clearly separated by peening, and this can be divided into various types by means of an XY beam scanner and computer control. Since the pattern can be expressed, the performance of the product surface can be diversified. For example, it can be patterned into a portion having a high optical reflectance and a portion having a low optical reflectance such as dull processing.
If peening is used for edge processing and deburring of parts, dimples are formed at the end of the part (edge) (compressed residual stress is applied), the edge is rounded, the edge is hardened, Impurities such as burrs can be removed.
When applied to a casting, the surface irregularities can be made smooth, and the casting nest, fine cracks and defects in the structure in the vicinity of the surface can be crushed and the surface performance can be improved.
Contributes greatly to effective use of earth resources. At present, various metals are widely used as parts as structures, but if applied to these structures, their strength will be improved, stress corrosion cracking will be prevented, fatigue life will be improved, and crack growth will be prevented. Since the life of the product itself can be improved and the consumption of the metal material can be greatly suppressed, various metals with limited reserves can be used effectively for a long time.
9) Welding parts such as automobiles, ships, buildings, bridges, chemical containers, pipelines, chemical plants, pump equipment, machine parts, electrical products, and various machines, which are various welding-applicable products, use repeated loads. Although it is susceptible to fatigue and stress corrosion cracking, laser powder peening, laser coating peening or ultrasonic laser multiple peening can be applied to these welded joints to increase the life of these welded products by 3 to 10 times. Can prolong life.
10) By forming an infinite number of fine recesses of several μm to several tens of μm on the sliding surface of the rotating part of the machine part, the contact area is not only improved, hardened, or softened on the sliding surface that is easily worn. Since it can be reduced and the shape can be maintained over a long period of time, it is possible to shift from conventional surface contact to point contact with respect to rotational resistance, and rotational resistance can be significantly reduced, enabling higher-speed rotation than before. In addition, lubricating oil accumulates in the dimples, thereby improving the sliding characteristics and wear resistance of the machine parts.

Examples will be described with reference to FIGS. Application of laser peening to the cylinder inner surface 29 of the engine block 28 made of aluminum alloy for automobiles shown in FIG. 7 can be considered. FIG. 8 shows a situation in which laser peening is applied with the cylinder inner surface 30 having an inner diameter of 20 mm to 1000 mm as a workpiece. A laser beam 31 having a short pulse high peak output of 100 megaW and a condensing optical system (parabolic mirror) 32 are arranged. After embossing of 1 to 2 microns on this cylinder inner surface 30, molybdenum disulfide (lubricant) ) Is applied to the film, and about 0.1 mm of graphite is applied as a film to improve laser absorption and protect the workpiece from shock waves, and a film is placed thereon as a laser interference film. The second harmonic of the Nd: YAG laser of the Q switch is set to a laser power density of 3.0 gigawatts / cm 2, 100 times per second (100 Hz), and a beam spot diameter (beam diameter on the workpiece) of 0.5 mm. Irradiate. In order to form fine dimples around the entire circumference of the cylinder, the optical system rotation device 34 holds both the beam condensing optical system (lens) 32 and the prism mirror 33 for deflecting the beam direction by 90 degrees. However, laser peening is performed on the laser irradiation unit 35. In this case, the processing optical system does not use the condensing optical system (lens) 32 and the prism mirror 33, but uses a parabolic mirror instead of the prism mirror, condenses directly, and deflects 90 degrees to be processed. A system that irradiates the light can be used.

As a result, innumerable minute dimples can be formed on the cylinder inner surface peening portion 35 on the cylinder inner surface 30 of the workpiece as shown in FIG. Further, when this cylinder is made of cast aluminum alloy, casting defects (cast nest, porosity, fine cracks, etc.) in the vicinity of the inner surface of the cylinder generated during casting may be compressed by the shock wave pressure during peening and disappear. Further, an indentation (dimple) is formed in the laser peening portion 35, and plastic deformation also occurs. In this way, dimples are formed on the surface of the aluminum alloy, so that not only the structure is refined and work hardening occurs, but also engine oil is supplied between the piston head outer periphery and this cylinder inner surface during engine operation. This accumulates in the dimple and operates effectively as a lubricating oil for a long time. Further, since the contact area between the piston and the cylinder can be reduced by the area of the dimple, the surface contact is changed to the point contact state, and the contact resistance during the reciprocating motion can be reduced, so that the life of the cylinder is greatly improved.

FIG. 9 shows a schematic diagram of a steel bearing. A bearing (bearing race) 37 and a bearing ball 39 are incorporated in the bearing outer ring 36, and a place where laser peening is performed is a sliding surface 38 of the bearing (bearing race) 37. Laser powder peening, laser coating peening, or ultrasonic laser multiple peening is performed on this surface.
As a result, as shown in FIG. 10, fine dimples 40 are generated on the sliding surface 38 of the bearing 37, and the surface is remarkably toughened by embedding foreign matter. In addition, lubricating oil accumulates in the dimples (small dents), which has an effect of enhancing the lubricating effect. During the operation of the bearing, a large number of indentations can significantly reduce the contact area between the bearing sliding surface 38 and the bearing ball 39, thereby reducing rotational resistance and heat generation, thereby enabling ultra-high speed rotation. . In addition, improvement in wear resistance and seizure resistance can be expected, and a significant improvement in life can be expected.

Laser powder peening, laser coating peening, or ultrasonic laser multiple peening is performed on the bearing parts (bearings) 41 and the sliding surfaces 42 of the bushes (sliding materials) used in the automobile or marine engine shown in FIG. . As a result, fine dimples 46 are formed on the sliding surface 42 of the bearing 41 as shown in FIG. 11, and the vicinity of the surface is remarkably toughened by embedding foreign matter. In addition, lubricating oil accumulates in the dimples (small dents), which has an effect of enhancing the lubricating effect of the bearing. During the operation of the bearing, a large number of indentations can significantly reduce the contact area between the sliding surface 38 of the bearing and the rotating body, thereby reducing rotational resistance and heat generation, thereby enabling ultra-high speed rotation. Also, improvement in wear resistance and seizure resistance can be expected, and the life of machine parts is remarkably improved.

FIG. 12 shows an application example of laser peening to the piston ring. The cast iron piston ring 47 is becoming thinner. To that end, it is necessary to reduce the sliding resistance of the outer periphery and the side sliding surface 48 and to improve the wear resistance. Therefore, as shown in FIG. 12, the second harmonic of the Nd: YAG laser of the Q switch is changed to a laser power density of 3.0 gigawatts / cm 2, 100 times per second (100 Hz), a beam spot diameter (beam on the workpiece If irradiation is performed with a diameter of 0.5 mm to 1.0 mm, a plurality of fine dimples 46 are formed on the sliding surface 42, and the vicinity of the surface is remarkably strengthened by embedding foreign matter. In addition, lubricating oil accumulates in the dimples (small dents), which has the effect of enhancing the lubricating effect of the bearing.
During operation of the piston, a large number of depressions reduce the contact area between the sliding surface 48 of the piston ring and the piston, lowering the sliding resistance and reducing heat generation, enabling ultra-high speed reciprocating motion. . Also, improvement in wear resistance and seizure resistance can be expected, and the life of the piston is remarkably improved.

FIG. 13 shows an application example of laser peening to the piston. In order to improve the sliding characteristics and wear resistance of the piston 52, the second harmonic wave of the Nd: YAG laser 55 of the Q switch is passed through the condensing optical system (lens) 56 on the sliding surface 54 of the outer peripheral portion thereof, and the laser power If the irradiation is performed with a density of 3.0 gigawatts / cm 2 and a repetition rate of 100 times per second (100 Hz) and a beam spot diameter (beam diameter on the workpiece) of 0.5 mm to 1.0 mm, fine dimples 46 are formed on the sliding surface 42. Are formed, and the vicinity of the surface is remarkably strengthened by embedding foreign matter. In addition, lubricating oil accumulates in the dimples (small dents), and there is an effect of improving the lubricating effect and sliding characteristics of the piston. During operation of the piston, a large number of depressions reduce the contact area between the sliding surface 54 of the piston and the inner surface of the engine block, reducing sliding resistance and heat generation, enabling ultra-high speed reciprocating motion Become. Also, improvement in wear resistance and seizure resistance can be expected, and the life of the piston is remarkably improved.

If the laser absorption rate of the solid lubricant or hardener applied to the surface of the workpiece is very low, two types of laser devices 57 and 58 having different wavelengths are used as shown in FIG. Laser absorptance can be improved. In this example, a Q-switched short pulse YAG laser device (wavelength = 1063 nm) 57 is transmitted by an optical fiber 59, and this is combined with a laser of a green laser device having a wavelength of 532 nm and an emission unit, and irradiated to a workpiece.
As the wavelength is shorter, the laser absorptance is improved and plasma generation can be facilitated. By using such a laser peening system, peening can be easily performed on metals such as copper, gold, silver, and aluminum.

Schematic diagram of laser powder peening process Enlarged view of the surface layer of the workpiece after laser powder peening Schematic diagram of laser film peening treatment Enlarged view of surface layer of workpiece after laser film peening treatment Schematic diagram of laser powder peening process using injection nozzle Rotating equipment parts with fine dimples on the sliding surface Application example of laser peening inside cylinder of automobile engine Mechanism of laser peening inside the cylinder of an automobile engine Laser peening treatment example of bearing sliding surface of bearing Bearing sliding surface of bearing to be laser peened Microlaser peening treatment of bearing sliding surface Application example of piston ring laser peening Application example of piston laser peening Hybrid laser peening system

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Workpiece 2 Solid lubricant and hardening material 3 Laser absorption enhancement film 4 Laser interference film 5 Laser 6 Condensing optical system 7 Workpiece 8 Modified layer 9 Workpiece 10 Film 11 Beam absorption enhancement film 12 Laser interference film 13 Laser 14 Condensing optical system 15 Work piece 16 Modified layer 17 Spray nozzle 18 Sprayed powder (solid lubricant or hardener)
19 Laser Absorption Enhancement Film 20 Laser Beam 21 Injection Nozzle 22 Carrier Gas 23 Solid Lubricant or Curing Material 24 Feed Device 25 Machine Part 26 Sliding Surface 27 Laser Peened Surface 28 Cylinder Block (Workpiece)
29 Cylinder inner surface 30 Cylinder inner surface 31 Laser beam 32 Condensing optical system 33 Prism mirror 34 Optical system rotating device 35 Peening unit 36 Bearing outer ring 37 Bearing 38 Bearing sliding surface 39 Ball 40 Fine dimple 41 Grooved bearing 42 Bearing sliding Surface 43 High peak output laser 44 Condensing lens 45 Groove 46 Processed minute dimple 47 Piston ring 48 Piston ring sliding surface 49 to be laser peened High peak output laser 50 Condensing lens 51 Surface subjected to peening treatment (many dimples many )
52 Piston head 53 Connecting rod 54 Sliding surface to be peened 55 High peak output laser 56 Condensing lens 57 Short pulse high peak output solid state laser device 58 Q switch green laser device 59 Optical fiber 60 Q switch 61 Output unit 62 Workpiece

Claims (16)

Steel material, casting material, non-ferrous metal die-casting, titanium alloy, aluminum alloy and magnesium alloy, nickel alloy, copper alloy, silver, gold, resin metal and resin product surface, phosphate coating treatment and oxide coating treatment Surface treatment, plating treatment, thermal spraying, welding metal coating and surface treatment, metal powder, sulfide and oxide lubricant, carbide and oxide ceramic powder, catalytic metal, semiconductor, hydrogen storage alloy, Carbon nanofibers, diamond powder, cBN powder, cemented carbide powder, amorphous alloy, nickel superalloy, molybdenum disulfide, intermetallic compound, or fluororesin solid lubricant and hardener Apply graphite, black paint, film or mold release agent as a coating on it to enhance laser absorption and protect the workpiece from shock waves. By applying a laser absorption peening treatment or a laser powder peening treatment that uses a laser with a short pulse high peak output of 1 megaW or more in the order of nanoseconds, or a laser powder peening treatment. A surface treatment method for generating a plurality of micron-order indents on the surface and simultaneously driving the above-mentioned solid lubricant and hardener Steel material, casting material, non-ferrous metal die-casting, titanium alloy, aluminum alloy and magnesium alloy, nickel alloy, copper alloy, silver, gold, resin metal and resin product surface, phosphate coating treatment and oxide coating treatment Surface treatment, plating treatment, thermal spraying, welding metal coating and surface treatment, metal powder, sulfide and oxide lubricant, carbide and oxide ceramic powder, catalytic metal, semiconductor, hydrogen storage alloy, Carbon nanofibers, diamond powder, cBN powder, cemented carbide powder, amorphous alloy, nickel superalloy, molybdenum disulfide, intermetallic compounds and fluororesin solid lubricants and hardeners, argon Or mixed with a carrier gas of nitrogen gas and sprayed onto the surface of the workpiece at high speed using a spray nozzle and at the same time onto these solid lubricants and hardeners After supplying the laser absorption enhancement coating of the belt-like film from the coating supply machine, laser coating peening treatment or laser powder using a laser with a short pulse high peak output of 1 megaW or more in nanosecond order at the sprayed portion By peening, a surface treatment method that generates multiple micron-order indentations on the surface and simultaneously implants the above-mentioned solid lubricants and hardeners. Metal powder, sulfide or oxide lubricant, carbide or oxide ceramic powder, catalytic metal, semiconductor, hydrogen storage alloy on plated metal surface or resin surface or sprayed metal surface or resin surface , Carbon nanofibers, diamond powder, cBN powder, cemented carbide powder, amorphous alloy, nickel superalloy, molybdenum disulfide, intermetallic compound, and fluorine resin, or solid lubricant and curing Laser coating peening treatment or laser powder peening treatment, in which laser peening treatment is performed using a laser with a short pulse high peak output of 1 megaW or more in nanosecond order at the same time or immediately after coating or spraying the material. A surface treatment method that dramatically improves the function of the surface of metal products by processing and forming multiple indentations on the surface. Laser film peening treatment, which is a laser peening treatment using a laser with a short pulse high peak output of 1 megaW or more in the order of nanoseconds in a nitrogen gas or carrier gas atmosphere on the surface of a metal member in a semi-solidification process, or A surface treatment method in which laser powder peening is performed to refine the solidified structure, change the structure, modify the surface, improve the surface nitriding, improve the performance, or remove defects such as cast nests. Surface treatment of phosphoric acid film treatment and oxide film treatment, plating treatment, thermal spraying, welding metal coating and surface treatment, metal powder, lubricant such as sulfide and oxide, ceramic powder of carbide and oxide , Catalytic metal, semiconductor, hydrogen storage alloy, carbon nanotube, diamond powder, cBN powder, cemented carbide, amorphous alloy, nickel superalloy, molybdenum disulfide, intermetallic compound, and fluorine-based resin, or After ultrasonic peening is applied to the surface of a metal member coated with solid lubricant and hardener, graphite coating is applied as a coating to protect the workpiece from shock waves, black paint or a laser absorption enhancement coating of a release material is applied, and then ultrasonic waves are applied. A table that modifies the surface by performing ultrasonic laser multiple peening treatment that performs peening and laser peening treatment. Processing method In Claim 1 to Claim 3 and Claim 5, the surface of the material is carburized or nitrocarburized, the metal or ceramic coated member, and fine particles of metal, ceramic, sulfide or oxide lubricant are irradiated. After ultrasonic peening is applied to the surface of the member, graphite coating, a black paint or a release material such as a mold release material are applied as a coating to protect the workpiece from shock waves, and water, oil, and melt are further applied thereon. A processing method for modifying the surface by applying a laser interference film such as a salt or a film and performing a laser coating peening process, a laser powder peening process, or an ultrasonic laser multiple peening process. Using the laser powder peening process or the ultrasonic laser multiple peening process as set forth in claims 1 to 4, an infinite number of minute micron-order indentations are generated on the rotating surface and sliding surface to further increase the rotational resistance. Mechanical parts such as bearing members, bearings, sliding parts, pistons, bushes, shafts, rollers, etc. that have improved sliding characteristics and wear resistance by changing from contact to point contact, or by creating a lubricant reservoir Or a metal member, a power machine part for a vehicle, a power machine tool, a hydraulic machine tool, a machine element for surface treatment. Using the laser coating peening process, the laser powder peening process or the ultrasonic laser multiple peening process shown in claims 1 to 6, a plurality of fine depressions are processed on a metal or ceramic surface, or the metal or ceramic Grooving, patterning, patterning, super-hardening, ultra-toughening, edge processing, deburring, impurity removal, dimple processing, compressive residual stress Processing method to give. A mold, a mold surface, a mold part, and a machine work whose surface is subjected to modification treatment such as hardening treatment, toughening treatment, and long life using the peening treatment method shown in claims 1 to 6 Tools, cutting tools for processing, bolts / nuts, valves, springs, gears, shafts, roller cam floors, chips, brooches, reamers, etc. and eyeglass frames, ornaments, medical implant products, 7. A laser coating peening process, a laser powder peening process, or an ultrasonic wave according to claim 1, wherein a mask made of metal or ceramics is used for laser peening to distinguish between a part to be peened and a part to be not peened. Laser multiple peening process 11. The laser beam peening process according to claim 10, wherein a laser beam is irradiated using a metal or ceramic mask provided with a large number of holes such as squares, polygons, circles and ellipses when laser peening is performed. A laser peening process in which the shape of the dimples and recesses formed is controlled by forming a minute recess having the same shape as the scraped pattern on the workpiece surface, and a thickness of 0.1 mm to 5 mm used for this process. Metal and ceramic masks 12. The sliding surface of a precision machine according to claim 10 and claim 11, wherein laser irradiation is performed using a metal or ceramic mask provided with a number of holes of square, polygon, circle, ellipse or the like during laser peening. The laser beam is operated at high speed using an XY scanner device and computer control during the laser peening process in order to form a large number of microscopic indentations on the surface of the workpiece, which are similar to the scraped pattern on the workpiece. Laser peening process to form multiple dimples and depressions Many holes such as squares, polygons, circles, ellipses, etc. are provided for laser peening after coating lubricant, metal or ceramic on the sliding surfaces of mechanical parts such as cylinders, shafts and bearings. It is formed by irradiating laser using a mask made of metal or ceramics and forming a fine recess on the surface of the work piece that has the same shape as the scraped pattern of rubbing on the sliding surface of a precision machine. A microlaser peening treatment method for forming a plurality of dimples and depressions at a depth of several μm to several tens of μm. In laser powder peening processing performed by injecting powder into the processing part, it is an interference film such as a photographic film that can transmit the laser used as a laser interference film, and its shape and size is a belt
Coiled solid interference film having a thickness of 10 to 500 microns and a width of several millimeters The sliding surface of the crankshaft, the inner surface of the cylinder of the engine block, the sliding surface, the bearing sliding surface of the bearing, or the sliding surface of the bearing such as a bush is coated with a sulfide or oxide lubricant, molybdenum disulfide. Thereafter, laser powder peening is performed to form a plurality of fine dimples having a depth of several μm to several tens of μm, or a mechanical component whose surface is modified by this process. The laser beam irradiation using a metal or ceramic mask provided with a large number of holes such as a square, a polygon, a circle, an ellipse, etc. in claim 15 and the same as a scraped pattern that is slid onto the sliding surface of a precision machine. By forming a small indentation of various shapes on the surface of the workpiece, by forming an infinite number of dimples with a depth of several μm to several tens of μm in any shape, the wear resistance and life of machine parts can be improved. Micro laser peening process to improve, or machine parts whose sliding surface has been modified by this process

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