JP2006310257A - Electro-optical device and method of manufacturing same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electro-optical device provided with a uniform film and the method of manufacturing the same. <P>SOLUTION: A bank 25 surrounding the whole pixel electrodes 27 of a plurality of organic EL elements 24 on a substrate S is formed. A liquid composition is applied to the whole area of the recess 26 formed in the center of the substrate S formed by the bank 25 to form the light emitting layer 28 of each organic EL elements 24 in the same bank 25. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an electro-optical device and a method for manufacturing the electro-optical device.

  In recent years, electro-optical devices such as a display using an organic electroluminescence element (hereinafter referred to as “organic EL element”) as a light emitting element and an optical writing head of a printer have been actively developed.

  This type of electro-optical device has a manufacturing method depending on whether a light emitting material (hereinafter referred to as “organic EL material”) constituting an organic EL element is a high molecular organic material or a low molecular organic material. Different. When the organic EL material is a polymer organic material, the organic EL material is dissolved or dispersed in a predetermined solvent to form a liquid composition, and the liquid composition is discharged from the nozzle of the droplet discharge head. Then, it is known to manufacture using a so-called droplet discharge method in which coating is performed on a predetermined pixel electrode of a substrate. In this case, high-definition patterning is achieved by dividing the periphery of the pixel electrode with a partition wall to prevent the applied organic material liquid from being mixed with the liquid composition applied on the pixel electrode at another position. Is possible.

  By the way, in the above-described droplet discharge method, the evaporation of the solvent in the liquid composition applied onto the pixel electrode is extremely fast. Then, at the ends (upper end, lower end, right end, left end) on the substrate, the solvent molecular partial pressure is lower than that of the liquid composition applied to the center of the substrate, so that it begins to dry quickly. Therefore, there is a difference in drying time between the liquid composition applied to the edge of the substrate and the liquid composition applied to the center. Such a difference in the drying time of the liquid composition causes unevenness in the thickness of each layer of the organic EL element within the pixel and between the pixels, causing display unevenness such as luminance unevenness. Thus, it has been proposed to provide a dummy coating region that is not related to display around the edge on the substrate to widen the coating region and make the vapor pressure of the solvent in the substrate uniform (Patent Document 1).

Also, this type of electro-optical device and optical writing head are known in which a hole injection layer or an electron injection layer is provided between the light emitting layer and the electrode in order to increase the light emission efficiency of the organic EL element. Yes.
JP 2002-222695 A

  However, the dry state of the liquid composition is also affected by the surface state of each partition wall. Accordingly, there is a problem that it is difficult to form a uniform film when the surface state of each partition wall is not uniform even when the dummy application region is provided as described above.

  The present invention has been made to solve the above problems, and its purpose is to prevent unevenness in the thickness of each layer constituting the organic light-emitting element, and to prevent unevenness in brightness and reliability due to the unevenness in thickness. It is an object to provide an electro-optical device and a method of manufacturing the electro-optical device with less influence on the operation. It is another object of the present invention to provide an electro-optical device and a method for manufacturing the electro-optical device, in which light-emitting elements are arranged with high density while suppressing luminance unevenness, and high-definition images can be drawn.

The electro-optical device of the present invention includes a light emitting element array in which a plurality of light emitting elements are arranged, and a partition wall that surrounds the light emitting element array in common.
According to this, each light emitting element is not surrounded by the partition for each light emitting element. Therefore, when the layer constituting the light emitting element is formed by, for example, a droplet discharge method, the drying time of the discharged liquid composition does not differ for each light emitting element depending on the surface state of the partition wall. As a result, since the film thicknesses of all the light-emitting elements can be formed uniformly, an electro-optical device that does not cause display unevenness such as brightness unevenness can be provided.

  In this electro-optical device, the partition may be formed so that its shape follows the shape of each light emitting element. According to the shape of the light emitting element referred to here, the distance from the outer periphery of the light emitting element arranged on the side closer to the partition to the partition is made substantially equal.

  According to this, since the distance from each light emitting element to the partition, that is, the amount of the liquid composition surrounding the light emitting element is equal, in each light emitting element, the drying condition of the layer at each position is equal. As a result, there is no unevenness in the film thickness within each light emitting element and between light emitting elements.

In the electro-optical device, the plurality of light emitting elements may be formed by a liquid process.
According to this, at the time of forming the light emitting element, a liquid material containing a material constituting the light emitting element (for example, a light emitting material constituting the light emitting layer of the light emitting element) is applied in a region surrounded by the partition walls. The At this time, since the partition is not provided in the region, the liquid applied in the region is not affected by the surface state of the partition. As a result, since a uniform amount of liquid material is applied over the entire region regardless of the position in the region, the layer (for example, the light emitting layer) constituting the obtained light emitting element has a film thickness of It is uniform. Accordingly, since there is no film thickness unevenness of each layer within the pixel and between pixels, the occurrence of display unevenness such as brightness unevenness is suppressed.

  In the electro-optical device, the plurality of light-emitting elements include a functional layer including at least a light-emitting layer between the plurality of pixel electrodes and a common electrode disposed to face each of the plurality of pixel electrodes. The light emitting layer may be made of an organic material.

  According to this, it is possible to constitute an organic electroluminescence element including a light emitting layer having a uniform film thickness. Therefore, an electro-optical device that does not cause display unevenness such as brightness unevenness can be easily realized.

In the electro-optical device, the light emitting elements may be arranged in a staggered pattern.
According to this, light emitting elements can be formed with high density. As a result, it is possible to provide a high-resolution electro-optical device that does not cause display unevenness such as brightness unevenness.

  In this electro-optical device, the electrical resistance value of the functional layer is disposed in a region where the electrical resistance value of the functional layer disposed between the plurality of pixel electrodes is sandwiched between the pixel electrode and the common electrode. It may be higher than the electric resistance value of the functional layer.

  According to this, since the electrical resistance value of the functional layer disposed in the periphery of each of the plurality of pixel electrodes is higher than that of the functional layer disposed between the pixel electrode and the common electrode, it is supplied from each pixel electrode. The carriers do not flow into the functional layer opposite to the other adjacent pixel electrodes, but concentrate and flow into the functional layer in the region facing each pixel electrode. Accordingly, there is no so-called light emission crosstalk in which carriers supplied to a certain pixel electrode flow into a functional layer around the pixel electrode and emit light simultaneously. As a result, an electro-optical device including a light emitting unit that enables high-definition display can be realized.

  In this electro-optical device, the functional layer includes an organic conductive layer, and an electrical resistance value of the organic conductive layer disposed between the plurality of pixel electrodes is applied to the plurality of pixel electrodes and the common electrode. It may be higher than the electric resistance value of the organic conductive layer disposed in the sandwiched region.

  According to this, by providing the organic conductive layer, even if the organic conductive layer is a highly conductive material (low electrical resistance material), the organic conductive layer disposed around each pixel electrode is formed on the organic conductive layer. Can flow in a concentrated manner in the organic conductive layer arranged and formed in a region opposite to the pixel electrode. As a result, an electro-optical device that enables high-definition display can be realized.

In this electro-optical device, the organic conductive layer may contain polyethylene dioxythiophene.
According to this, the organic conductive layer containing polyethylene dioxythiophene (PEDOT) can obtain high conductivity and high hole injection efficiency for the light emitting layer. Therefore, a light emitting unit having high light emission efficiency with a low driving voltage is realized. As a result, it is possible to realize an electro-optical device including a light emitting unit that enables high-efficiency and high-definition drawing.

In this electro-optical device, the organic conductive layer may include polyaniline.
According to this, the organic conductive layer containing polyaniline is a highly conductive material (low electrical resistance material) and also functions as a hole injection layer. Therefore, by providing the organic conductive layer containing polyaniline, a light emitting unit having high luminous efficiency is realized. As a result, it is possible to realize an electro-optical device including a light emitting unit that enables high-efficiency and high-definition display.

In the electro-optical device, the light-emitting element array may selectively irradiate light on the photoconductor.
According to this, high-intensity optical writing can be performed on the photosensitive member with high resolution with little luminance unevenness.

  The electro-optical device manufacturing method of the present invention includes a step of forming a plurality of pixel electrodes, a step of forming a partition wall that surrounds the entire plurality of pixel electrodes in common, and a functional layer in a region surrounded by the partition wall. Forming a step.

  According to this, each light emitting element is not surrounded by the partition for each light emitting element. Therefore, when the layer constituting the light-emitting element is formed by, for example, a droplet discharge method, the drying time of the discharged liquid composition does not differ for each light-emitting element depending on the position of the pixel and the surface state of the partition wall. As a result, since the film thicknesses of all the light emitting elements formed in one partition wall can be formed uniformly, an electro-optical device that does not cause display unevenness such as brightness unevenness can be manufactured.

In the method of manufacturing the electro-optical device, the functional layer may be performed by a droplet discharge method.
According to this, a layer having a desired film thickness can be formed without using a vacuum device or the like.

The method for manufacturing the electro-optical device may further include a step of selectively irradiating the functional layer with light.
According to this, since the carrier supplied to a certain pixel electrode flows into the surrounding functional layer, it is possible to prevent the so-called light emission crosstalk that the functional layer around the pixel electrode emits light at the same time. .

In this method of manufacturing an electro-optical device, the functional layer disposed in a region between the pixel electrode may be selectively irradiated with light. According to this, since the carrier supplied to a certain pixel electrode flows into the surrounding functional layer, it is possible to prevent the so-called light emission crosstalk that the functional layer around the pixel electrode emits light at the same time. .

In the method for manufacturing the electro-optical device, the light may be ultraviolet light.
According to this, the electrical resistance value of the functional layer disposed and formed around each of the plurality of pixel electrodes can be easily increased.

In this electro-optical device manufacturing method, the functional layer may be heat-treated after the light irradiation.
According to this, after irradiating light to a functional layer, the electrical resistance of the region irradiated with light can be increased with good reproducibility by performing heat treatment.

(First embodiment)
Hereinafter, an optical printer as an electro-optical device including an optical writing head according to an embodiment of the present invention will be described with reference to the drawings. The optical printer described below is a tandem optical printer capable of full color display.

FIG. 1 is a main cross-sectional view of an optical printer.
As shown in FIG. 1, the optical printer 1 includes a black organic EL exposure head 2K, a cyan organic EL exposure head 2C, a magenta organic EL exposure head 2M, and a yellow organic EL as an optical writing head and a light emitting unit. An exposure head 2Y is provided. Further, the optical printer 1 includes a black photosensitive drum 3K, a cyan photosensitive drum 3C, a magenta photosensitive drum 3M, and a yellow photosensitive drum 3Y below the exposure heads 2K, 2C, 2M, and 2Y.

  Further, the optical printer 1 includes a driving roller 4, a driven roller 5, a tension roller 6, and an intermediate transfer belt 7 that is circulated and driven counterclockwise in FIG. 1 while being tensioned and stretched by the tension roller 6. Is provided. The photosensitive drums 3K, 3C, 3M, and 3Y are arranged at a predetermined interval with respect to the intermediate transfer belt 7.

  The photosensitive drums 3K, 3C, 3M, and 3Y are driven to rotate in the clockwise direction in FIG. 1 in synchronization with the driving of the intermediate transfer belt 7. The exposure heads 2K, 2C, 2M, and 2Y sequentially scan the outer circumferential surfaces of the photosensitive drums 3K, 3C, 3M, and 3Y in synchronization with the rotation of the photosensitive drums 3K, 3C, 3M, and 3Y. Then, electrostatic latent images corresponding to the drawing data are formed on the corresponding photosensitive drums 3K, 3C, 3M, 3Y.

  Corona chargers 8K, 8C, 8M, and 8Y are provided around the photosensitive drums 3K, 3C, 3M, and 3Y to uniformly charge the outer peripheral surfaces of the photosensitive drums 3K, 3C, 3M, and 3Y. ing.

  The optical printer 1 also includes a black developing device 9K around the black photosensitive drum 3K, a cyan developing device 9C around the cyan photosensitive drum 3C, and a magenta developing device 9M around the magenta photosensitive drum 3M. The yellow developing device 9Y is provided around the yellow photosensitive drum 3Y. The developing devices 9K, 9C, 9M, and 9Y have colors corresponding to the electrostatic latent images formed on the photosensitive drums 3K, 3C, 3M, and 3Y by the corresponding organic EL exposure heads 2K, 2C, 2M, and 2Y. A visible image (toner image) is formed by applying a toner which is a developer. For example, the cyan developing device 9C forms a visible image (toner image) by applying cyan toner to the electrostatic latent image formed on the cyan photosensitive drum 3C by the cyan organic EL exposure head 2C. .

  Specifically, each of the developing devices 9K, 9C, 9M, and 9Y uses, for example, a non-magnetic one-component toner as a toner. The film thickness of the adhered toner is regulated with a regulation blade. According to this regulation, the developing roller is brought into contact with or pressed against each of the photosensitive drums 3K, 3C, 3M, 3Y, and according to the potential level of the electrostatic latent image formed on each of the photosensitive drums 3K, 3C, 3M, 3Y. A developer is attached to develop a visible image (toner image).

  Further, the optical printer 1 performs intermediate transfer on which the visible images (toner images) developed by the developing devices 9K, 9C, 9M, and 9Y are primary transfer objects around the photosensitive drums 3K, 3C, 3M, and 3Y. Primary transfer rollers 10K, 10C, 10M, and 10Y that sequentially transfer to the belt 7 are provided. Furthermore, the optical printer 1 includes cleaning devices 11K, 11C, 11M, and 11Y around the photosensitive drums 3K, 3C, 3M, and 3Y. The cleaning devices 11K, 11C, 11M, and 11Y are for removing toner remaining on the surfaces of the photosensitive drums 3K, 3C, 3M, and 3Y after the primary transfer.

  The visible images (toner images) of black, cyan, magenta, and yellow formed on the photosensitive drums 3K, 3C, 3M, and 3Y are intermediate transfer belts by primary transfer rollers 10K, 10C, 10M, and 10Y. 7 is firstly transferred onto the upper surface. The visible image (toner image) that is sequentially superimposed on the intermediate transfer belt 7 by this primary transfer to become a full color is secondarily transferred onto a recording medium P such as paper by a secondary transfer roller, and a pair of fixing rollers 12. By passing through, it is fixed on the recording medium P. The recording medium P on which the visible image (toner image) is fixed is guided by the paper discharge roller 13 and discharged onto a paper discharge tray 14 formed on the upper portion of the optical printer 1.

  The optical printer 1 also includes a paper feeding cassette 15 that holds a large number of recording media P, a pickup roller 16 that feeds the recording media P from the paper feeding cassette 15 one by one, and a secondary transfer by a secondary transfer roller 66. A gate roller 17 is provided that defines the supply timing of the recording medium P to the printing unit. Further, the optical printer 1 includes a secondary transfer roller 18 that forms a secondary transfer portion with the intermediate transfer belt 7, and a cleaning blade 19 that removes toner remaining on the surface of the intermediate transfer belt 7 after the secondary transfer. I have.

  Next, details of the organic EL exposure heads 2K, 2C, 2M, and 2Y will be described. The black organic EL exposure head 2K, the cyan organic EL exposure head 2C, the magenta organic EL exposure head 2M, and the yellow organic EL exposure head 2Y all have the same structure. The organic EL exposure head 2K will be described, and the detailed description of the other organic EL exposure heads 2C, 2M, 2Y will be omitted.

  FIG. 2 is a perspective view of the organic EL exposure head 2K for black. The black organic EL exposure head 2K is positioned between the box 21 disposed in one direction, that is, in a direction orthogonal to the conveyance direction of the intermediate transfer belt 7, and between the box 21 and the black photosensitive drum 3K. The optical member 23 supported and fixed to the box 21 is provided. The box 21 has an opening on the black photosensitive drum 3K side, and the light emitting element array 22 is fixed so that light is emitted toward the opening.

3A is a top view of the light-emitting element array 22, FIG. 3B is a cross-sectional view taken along line aa in FIG. 3A, and FIG. 3C is FIG. ) Is a cross-sectional view along line bb.
As shown in FIG. 3A, the light emitting element array 22 has a plurality of organic electroluminescence elements (hereinafter referred to as “organic EL elements”) 24 as light emitting elements arranged on a substrate S. In the light emitting element array 22 of the present embodiment, a plurality of (in the present embodiment, 10) organic EL elements 24 arranged in an equal pitch in a vertical row are arranged in two rows. Each organic EL element 24 is arranged so as to be shifted by a half pitch in the vertical direction from the organic EL elements 24 in other adjacent rows. That is, the organic EL elements 24 are arranged in a staggered pattern.

  A bank 25 as a partition is formed around the plurality of organic EL elements 24 so as to surround the whole of the plurality of organic EL elements 24. As shown in FIG. 3A, the bank 25 in the present embodiment has a substantially rectangular shape so as to surround the plurality of organic EL elements 24 as a whole.

As shown in FIGS. 3B and 3C, the bank 25 includes a lyophilic bank 25a formed on the substrate S and a lyophobic bank 25b formed on the lyophilic bank 25a. It is configured. A part of the lyophilic bank 25a is formed so as to protrude from the liquid repellent bank 25b toward the center of the substrate S. The lyophilic bank 25a is originally a material having lyophilicity, and is made of, for example, silicon oxide (SiO ₂ ). Moreover, even if it does not have lyophilicity, the surface may be made lyophilic by performing a commonly used lyophilic process. On the other hand, the liquid repellent bank 25b may be originally composed of a liquid repellent material, for example, a fluorine resin. Moreover, even if it does not have liquid repellency, it may be formed by patterning an organic resin such as a commonly used acrylic resin or polyimide resin and making the surface liquid repellent by CF ₄ plasma treatment or the like.

  Further, as shown in FIGS. 3B and 3C, the bank 25 forms a concave region 26 as an element formation region in the center of the substrate S. A pixel electrode 27 as an anode is formed at the bottom of the concave region 26. The pixel electrode 27 of this embodiment has a circular shape. In addition, the pixel electrodes 27 of the present embodiment are formed in a plurality of rows (10 in the present embodiment) arranged at an equal pitch in a vertical row and are arranged in two rows in the horizontal direction. Each pixel electrode 27 is arranged so as to be shifted by a half pitch in the vertical direction from the pixel electrodes 27 in other adjacent columns. Each pixel electrode 27 is connected to a data signal output drive circuit (not shown) via an independent wiring. The drawing data signal output from the data signal output drive circuit is supplied to the pixel electrode 27.

  A light emitting layer 28 is formed on the bottom of the concave region 26 so as to cover the entire surface. Thereby, the light emitting layer 28 is also laminated on each pixel electrode 27. A cathode 29 as a common electrode is formed over the entire surface of the liquid repellent bank 25 b and the light emitting layer 28. The cathode 29 is connected to the data signal output drive circuit. Further, a sealing member 30 is formed on the entire cathode 29. The organic EL element 24 is configured by the pixel electrode 27, the cathode 29 formed opposite to the pixel electrode 27, and the light emitting layer 28 formed between the pixel electrode 27 and the cathode 29. .

  In the organic EL exposure head 2K having such a configuration, as shown in FIGS. 3B and 3C, the film thickness of the light emitting layer 28 is uniform over the entire concave region 26. Accordingly, a light emitting layer 28 having a uniform thickness is formed on each pixel electrode 27. The film thickness of the light emitting layer 28 formed on the predetermined pixel electrode 27 and the film thickness of the light emitting layer 28 formed on the other pixel electrode 27 are uniform.

  As shown in FIG. 4, the optical member 23 is provided at a position facing the light emitting element array 22. The optical member 23 includes a plurality of lenses 31 inside, collects the light emitted from the organic EL element 24, and then emits the light from the other end side to irradiate (draw) the black photosensitive drum 3K. .

Similarly, in the other organic EL exposure heads 2C, 2M, and 2Y, the film thickness of the light emitting layer of the organic EL element provided in each light emitting element array is uniform. Other organic EL exposure heads 2
C, 2M, and 2Y are emitted from the other end of the optical member 23 toward the corresponding photosensitive drums 3C, 3M, and 3Y. The potential level on the photosensitive drums 3K, 3C, 3M, and 3Y is changed according to the emitted light to control the adhesion force of the toner, and the drawing is performed on the photosensitive drums 3K, 3C, 3M, and 3Y. A visible image (toner image) based on the data signal is developed. At this time, since the film thickness of the light emitting layer of each organic EL element 24 provided in each organic EL exposure head 2K, 2C, 2M, 2Y is uniform, on each photosensitive drum 3K, 3C, 3M, 3Y. The visible image (toner image) to be developed is a visible image (toner image) having no display unevenness such as luminance unevenness.

  Next, a method for manufacturing the organic EL exposure heads 2K, 2C, 2M, and 2Y will be described with reference to FIG. The black organic EL exposure head 2K, the cyan organic EL exposure head 2C, the magenta organic EL exposure head 2M, and the yellow organic EL exposure head 2Y are all manufactured by the same method. Therefore, for convenience of explanation, only the method for manufacturing the black organic EL exposure head 2K will be described, and the detailed description of the other organic EL exposure heads 2C, 2M, and 2Y will be omitted.

First, the plurality of pixel electrodes 27 are patterned so as to be arranged in a staggered pattern at a substantially center on the substrate S by a known method. Subsequently, as shown in FIG. 5A, silicon oxide (SiO ₂ is patterned on the substrate S and around the plurality of pixel electrodes 27 so as to surround the whole of the plurality of pixel electrodes 27. Then, a liquid resin is formed on the formed lyophilic bank 25a so that a part of the lyophilic bank 25a protrudes toward the center of the substrate S, for example, a height of 1 to 2 μm. The liquid repellent bank 25b is formed by patterning so that the bank 25 is formed on the substrate S so as to surround the plurality of pixel electrodes 27 around the plurality of pixel electrodes 27. (Bank formation step) As a result, a concave region 26 is formed in the center of the substrate S on which the pixel electrode 27 is formed.

  Subsequently, the light emitting layer 28 is formed in the concave region 26 by a droplet discharge method as a liquid process (element forming step). That is, as shown in FIG. 5B, a liquid composition L formed by dissolving or dispersing a light emitting material as a composition constituting the light emitting layer 28 in a predetermined solvent such as xylene is used as a nozzle N of the ejection head 40. Discharge from. At this time, the liquid composition L is sequentially discharged while moving the discharge head 40 relative to the substrate S along the guide rail 41 provided along the front and back of the paper provided in the discharge head 40. The liquid composition L is discharged into the concave region 26 a plurality of times. Thereby, the liquid composition L is applied to the entire surface in the concave region 26.

  Next, the substrate S is heated, for example, by placing it on a hot plate to evaporate the solvent in the liquid composition L, thereby forming the light emitting layer 28 on the entire surface of the concave region 26 (see FIG. 5C). ).

  At this time, since there is no bank between the pixel electrodes 27, the drying time of the liquid composition L ejected according to the surface state of the bank formed between the pixel electrodes 27 as in the prior art is different for each pixel electrode. There is no difference every 27th. Therefore, after drying, the light emitting layer 28 is formed over the entire surface of the concave region 26, but the light emitting layer 28 has a uniform film thickness over the entire surface of the concave region 26.

  Thereafter, a LiF layer, a Ca layer, an Al layer, and the like are stacked on the bank 25 and the light emitting layer 28 by a vapor deposition method or the like, thereby forming the cathode 29. Subsequently, a sealing member 30 made of, for example, resin is formed on the entire surface of the cathode 29 (see FIG. 5D).

As described above, according to the present embodiment, the following effects are obtained.
(1) According to the present embodiment, the bank 25 on the substrate S and surrounding all the pixel electrodes 27 of the plurality of organic EL elements 24 is formed. Then, the light emitting layer 28 is formed by applying the liquid composition L over the entire area of the concave region 26 formed in the center of the substrate S formed by the bank 25.

Accordingly, since there is no bank for each pixel electrode 27 (organic EL element 24), the liquid composition L ejected according to the surface state of the bank for each pixel electrode 27 (organic EL element 24) is dried as in the prior art. The time does not differ within each pixel electrode 27. Therefore, the light emitting layer 28 has a uniform film thickness over the entire surface of the concave region 26. As a result, the organic EL elements 24 formed in the bank 25 can form visible images (toner images) having no display unevenness such as brightness unevenness.
(2) According to the present embodiment, each of the organic EL exposure heads 2K, 2C, 2M, 2Y is provided at a position facing the light emitting element array 22 and the light emitting element array 22 provided with a plurality of organic EL elements 24. The optical member 23 is provided. The light emitted from each organic EL element 24 is collected by the optical member 23 and irradiated onto the corresponding photosensitive drums 3K, 3C, 3M, and 3Y. At this time, since the light emitting layer 28 of each organic EL element 24 has a uniform film thickness, the toner image developed on each photosensitive drum 3K, 3C, 3M, 3Y is an image having no display unevenness such as brightness unevenness. It becomes. As a result, the optical printer 1 capable of printing an image with excellent display quality can be provided.
(3) According to the present embodiment, the light emitting layer 28 is formed in the concave region 26 by the droplet discharge method. Therefore, the light emitting layer 28 having a desired thickness can be formed without using a vacuum device or the like. In the droplet discharge method, a liquid composition L formed by dissolving or dispersing a light emitting material as a composition constituting the light emitting layer 28 in a predetermined solvent (for example, xylene) is discharged to the concave region 26. Then, since the light emitting layer 28 is formed by drying, high-definition patterning is possible regardless of the shape of the concave region 26.
(Second Embodiment)
Next, a second embodiment of the present invention will be described with reference to FIG. In the second embodiment, the same components as those in the first embodiment are given the same reference numerals, and detailed description thereof is omitted.

FIG. 6 is a top view of the light emitting element array 22A according to the second embodiment, FIG. 6B is a cross-sectional view taken along the line aa in FIG. 6A, and FIG. It is bb sectional view taken on the line in 6 (a).
As shown in FIG. 6A, the light emitting element array 22A has a structure in which a plurality of organic EL elements 24 are arranged on the substrate S, as in the first embodiment. 25b is arranged so as to surround the light emitting element array 22A in common. On the other hand, the lyophilic bank 45 is arranged so as to partition each pixel electrode 27 in the present embodiment.

The lyophilic bank 45 has, for example, a film thickness of 50 to 150 nm and is composed of silicon oxide (SiO ₂ ). Moreover, even if the lyophilic bank 45 is not provided with lyophilicity, the lyophilic bank 45 may have a surface made lyophilic by performing a commonly used lyophilic treatment.

By doing so, concentration of the electric field at the end of the pixel electrode 27 can be avoided. As a result, the life of the organic EL element 24 can be extended.
(Third embodiment)
Next, a third embodiment of the present invention will be described with reference to FIG. In the third embodiment, the same constituent members as those in the first and second embodiments are denoted by the same reference numerals, and detailed description thereof is omitted.

FIG. 7 is a top view of the light emitting element array 22B of the third embodiment. As shown in FIG. 7, the light emitting element array 22 </ b> B is formed so as to surround the entire plurality of organic EL elements 24 with one bank 50, as in the first embodiment. The light emitting element array 22A of the present embodiment is different from the bank 25 of the first embodiment only in the shape of the bank 50 formed on the substrate S. That is, as shown in FIG. 7, the bank 50 of the present embodiment is formed such that the shape of the concave region 26 on the center side of the substrate follows the shape of the pixel electrode 27 of the organic EL element 24. In the present embodiment, since the pixel electrode 27 has a circular shape, the pixel electrode 27 is formed in a circular shape so that the shape inside the concave region 26 of the bank 50 follows the shape of the pixel electrode 27. Therefore, the distance from the center position of each pixel electrode 27 to the bank 50 becomes equal. Then, after applying the liquid composition L in the concave region 26 by the droplet discharge method, the substrate S is dried by using, for example, a hot plate. At that time, the edges (upper end, lower end, At the right end and the left end), the solvent molecular partial pressure is lower than that of the liquid composition L applied to the center of the substrate S, so that drying starts from the end side on the substrate S. At this time, since the distance from the center position of each pixel electrode 27 to the bank 50 is equal, drying unevenness on the pixel electrode 27 can be reduced.

As described above, according to the present embodiment, the following effects are obtained.
(1) According to the present embodiment, the inner shape of the recessed region 26 of the bank 50 is formed so as to follow the shape of the pixel electrode 27 of the organic EL element 24. Therefore, the distance from the center position of each pixel electrode 27 to the bank 50 is equal. As a result, drying unevenness on the pixel electrode 27 can be reduced, so that the organic EL element 24 having the light emitting layer 28 with a more uniform thickness can be formed.
(Fourth embodiment)
Next, a fourth embodiment embodying the present invention will be described with reference to FIGS. In the fourth embodiment, the same constituent members as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

8A is a top view of the light emitting element array 22C, and FIG. 8B is a cross-sectional view taken along the line aa in FIG. 8A.
The organic EL element 24 of the light emitting element array 22C includes a hole injection layer 61 and an electron injection layer 62 in addition to the light emitting layer 28 in its functional layer.

  Specifically, as shown in FIG. 8B, a hole injection layer 61 is formed at the bottom of the concave region 26 so as to cover each pixel electrode 27. The hole injection layer 61 is composed of a mixture of polyethylene dioxythiophene (hereinafter referred to as “PEDOT”) and polystyrene sulfonic acid (hereinafter referred to as “PSS”). For convenience of explanation, the hole injection layer 61 disposed in the region Q1 sandwiched between the pixel electrode 27 and the cathode 29 (formed in the region Q1 on the pixel electrode 27) of the hole injection layer 61 is denoted by a reference numeral. The hole injection layer 61 disposed in the region Q2 between the plurality of pixel electrodes 27 is denoted by “61L” and denoted by “61H”.

  The hole injection layer 61L formed in each region Q1 has a sheet resistance value of about several tens of Ω / □ to several thousand Ω / □. On the other hand, the hole injection layer 61H formed in the region Q2 has a sheet resistance value of several MΩ / □ to several hundred MΩ / □ which is higher than that of a normal hole injection layer material. Accordingly, the carriers (holes) supplied from the pixel electrode 27 hardly flow into the hole injection layer 61H and flow into each hole injection layer 61L in a concentrated manner.

  A light emitting layer 28 is formed on the hole injection layer 61. An electron injection layer 62 is formed on the light emitting layer 28. A cathode 29 is formed on the electron injection layer 62 so as to cover each pixel electrode 27 and the liquid repellent bank 25b in common.

The electron injection layer 62 is an organic conductive layer and is a known electron injection layer material made of a polyphenylene vinylene polymer. For convenience of explanation, of the electron injection layer 62,
The electron injection layer 62 disposed in the region Q1 sandwiched between the pixel electrode 27 and the cathode 29 (formed in the region Q1 on the pixel electrode 27) is denoted by “62L”, and the region Q2 between the plurality of pixel electrodes 27 is formed. The electron injecting layer 62 disposed in the region is denoted by “62H”.

  The electron injection layer 62L formed in each region Q1 has the electric resistance value of the electron injection material containing the original polyphenylene vinylene polymer. On the other hand, the electron injection layer 62H formed in the region Q2 has a higher electrical resistance value than the electron injection layer 62 containing the original polyphenylene vinylene-based polymer. Therefore, the carriers (electrons) supplied from the cathode 29 hardly flow into the electron injection layer 62H and flow into each electron injection layer 62L in a concentrated manner.

  The sealing member 30 is formed on the entire upper surface of the cathode 29. The hole injection layer 61L, the light emitting layer 28, and the electron injection layer 62L constitute a functional layer. In addition, the pixel electrode 27 and the cathode 29 and the functional layer sandwiched therebetween constitute an organic EL element 24 that is a light emitting element.

  In the organic EL exposure head 2K having such a configuration, as shown in FIG. 8B, the film thicknesses of the hole injection layer 61, the light emitting layer 28, and the electron injection layer 62 are all over the concave region 26. It is uniform. Accordingly, a light emitting layer 28 having a uniform thickness is formed on each pixel electrode 27.

  Next, a method for manufacturing the organic EL exposure heads 2K, 2C, 2M, and 2Y will be described with reference to FIGS. The black organic EL exposure head 2K, the cyan organic EL exposure head 2C, the magenta organic EL exposure head 2M, and the yellow organic EL exposure head 2Y are all manufactured by the same method. Therefore, for convenience of explanation, only the method for manufacturing the black organic EL exposure head 2K will be described, and the detailed description of the other organic EL exposure heads 2C, 2M, and 2Y will be omitted.

First, 20 pixel electrodes 27 are patterned in a staggered pattern at a substantially center on the substrate S by a known method in the same manner as in the first embodiment. Subsequently, as shown in FIG. 9A, lyophilic banks 25a are formed by patterning silicon oxide (SiO ₂ ) on the substrate S so as to surround the entire pixel electrodes 27. Thereafter, a fluororesin is patterned on the formed lyophilic bank 25a so that a part of the lyophilic bank 25a protrudes toward the center of the substrate S, for example, to have a height of about 1 to 2 μm. The liquid repellent bank 25b is formed. Thereby, the bank 25 is formed on the substrate S so as to surround the entire pixel electrode 27 (bank forming step). As a result, a concave region 26 is formed in the center of the substrate S on which each pixel electrode 27 is formed.

  Subsequently, the hole injection layer 61 is formed in the concave region 26 by a droplet discharge method which is a kind of liquid process. That is, as shown in FIG. 9B, a liquid composition LA formed by dissolving or dispersing a hole injection layer material mainly composed of PEDOT / PSS in a predetermined solvent such as ethylene glycol is used as a nozzle of the ejection head 65. N is discharged. At this time, the liquid composition LA is moved while moving the ejection head 65 with respect to the substrate S along the guide rail 65A provided on the ejection head 65 and extending along the front and back of the paper. Is discharged into the concave region 26 a plurality of times. Thereby, liquid composition LA is apply | coated to the whole surface in the recessed area | region 26 (functional layer formation process).

In this embodiment, the ratio of PEDOT: PSS = 1: 5 to 1:10 is used as a mixing ratio of PEDOT / PSS which is a hole injection material. When the ratio of PEDOT is increased in this manner, the electrical resistance is lowered, and the light emission voltage of the formed light emitting element can be lowered, the efficiency can be increased, and the life can be increased. However, if the resistance of the hole injecting material is lowered, a part of the hole injecting layer also acts as an electrode, so that the periphery of the light emitting element that emits light emits light, or multiple light emitting elements emit light. In this case, so-called light emission crosstalk is likely to occur, in which light emitting elements arranged between them emit light. For this reason, usually PEDOT: PSS = 1: 20 is often used. In this embodiment, since there is a step of increasing the resistance of a part of the hole injection layer 61, a hole injection material having such a low electrical resistance can be used.

  Next, the solvent is removed from the liquid composition LA disposed on the substrate S by transporting the substrate S into the sealed container and depressurizing the container to form a film. When the pressure is reduced from atmospheric pressure to 1 Torr in a time of about 30 seconds to several minutes, the hole injection layer 61 with higher flatness can be formed. When a plurality of types of solvents are used, the pressure may be reduced in a plurality of steps so as to maintain the pressure near the vapor pressure of each solvent in accordance with the vapor pressure of each solvent used. By doing in this way, it becomes possible to make the drying speed on the entire surface of the disposed liquid composition LA more uniform, and a film with higher flatness can be formed. In the present invention, since each pixel electrode 27 is arranged in a region away from the bank 25 to some extent, the influence of the bank 25 on the dry state of the liquid composition LA arranged thereon is reduced, and all the pixel electrodes 27 are arranged. The hole injection layer 61 which is flat and has a high film thickness uniformity can be formed.

  Similarly to the first embodiment, the substrate S is heated, for example, by placing it on a hot plate to evaporate the solvent in the liquid composition LA, and the hole injection layer 61 is formed on the entire surface of the concave region 26. It may be formed (see FIG. 9C).

  Subsequently, as shown in FIG. 10A, a mask M <b> 1 is placed on the hole injection layer 61. The mask M1 has a size that covers the entire surface of the hole injection layer 61, and includes a transmission region Ta that is transmissive to ultraviolet light and a non-transmission region Tb that blocks transmission of ultraviolet light. Yes. The mask M1 has two rows of circular non-transparent regions Tb arranged at ten equal pitches in a vertical row. Each non-transmissive region Tb is arranged so as to be shifted by a half pitch in the vertical direction from the non-transmissive region Tb of another adjacent row. That is, each non-transmissive region Tb of the mask M1 is disposed at a position facing the region Q1 on the pixel electrode 27, and the transmissive region Ta is disposed at a position facing the region Q2 other than the pixel electrode 27. . Therefore, the hole injection layer 61 formed in the region Q1 on each pixel electrode 27 has a non-transmission region Tb, and the hole injection layer 61 formed in the region Q2 on each pixel electrode 27 has a transmission region. Ta is arranged.

  Then, as shown in FIG. 6A, the entire surface of the hole injection layer 61 is irradiated with ultraviolet light R through a mask M1 (light irradiation process). The ultraviolet light to be irradiated is preferably 350 nm or less, preferably 250 to 300 nm. As a result, the hole injection layer 61 located in the region Q1 is not irradiated with the ultraviolet light R, and only the hole injection layer 61 located in the region Q2 is irradiated with the ultraviolet light R. The hole injection layer 61 located in the region Q2 irradiated with the ultraviolet light R is denatured and has a high electric resistance value. On the other hand, the hole injection layer 61 located in the region Q1 that has not been irradiated with the ultraviolet light R is not modified in crystallinity and has a low electrical resistance value. In this way, the hole injection layer 61 including the hole injection layer 61L having a low electric resistance value and the hole injection layer 61H having a high electric resistance value is formed.

  Furthermore, heat treatment is performed at 100 ° C. to 150 ° C. for 1 minute to several minutes. By performing the heat treatment, the reaction of the region exposed to ultraviolet light proceeds more stably, and the electric resistance of the region irradiated with ultraviolet light can be increased with high reproducibility.

  In this embodiment, as a method of selectively irradiating ultraviolet light, a method of using a mask that is in direct contact with or close to the substrate S is described. However, a mask formed on a glass mask using a projection exposure apparatus is used. It is also possible to selectively irradiate with ultraviolet light.

  Subsequently, the light emitting layer 28 is formed by a droplet discharge method, as in the first embodiment. That is, as shown in FIG. 10C, a liquid composition L formed by dissolving or dispersing a light emitting material as a composition constituting the light emitting layer 28 in a predetermined solvent such as xylene is used as a nozzle N of the discharge head 40. Discharge from. At this time, the hole injection layer 61 is discharged by sequentially discharging the liquid composition L while moving the discharge head 40 toward the front and back of the paper S along the guide rail 41 provided on the discharge head 40. The liquid composition L is discharged over the entire surface. Thereby, the liquid composition L is applied to the entire upper surface of the hole injection layer 61.

  Next, similarly to the step of forming the hole injection layer 61, the substrate S is transported into a sealed container, and the solvent is removed from the liquid composition L disposed on the substrate S by reducing the pressure in the container. Turn into. Since each pixel electrode 27 is disposed in a region away from the bank 25 to some extent, the light emitting layer 28 that is flat and highly uniform in thickness can be formed on all the pixel electrodes 27.

  Alternatively, the light emitting layer 28 may be formed by heating the substrate S by, for example, placing it on a hot plate to evaporate the solvent in the liquid composition L. At this time, since the hole injection layer 61 has a uniform film thickness over the entire surface of the concave region 26, the light emitting layer 28 has a uniform film thickness over the entire surface of the concave region 26 after evaporation. It becomes.

  Subsequently, an electron injection layer 62 is formed on the light emitting layer 28 by a droplet discharge method. That is, a liquid composition formed by dissolving or dispersing an electron injection layer material containing a polyphenylene vinylene polymer as a composition constituting the electron injection layer 62 in a predetermined solvent such as xylene is discharged from the nozzle of the discharge head. Then, a liquid composition in which the electron injection layer material is dissolved or dispersed in a predetermined solvent is discharged on the entire surface of the light emitting layer. Thereafter, the substrate S is transported into a sealed container, and the inside of the container is decompressed to evaporate the solvent in the liquid composition, thereby forming the liquid composition disposed on the substrate S into a film. Further, for example, the solvent in the liquid composition of the electron injection layer material may be evaporated by heating by placing it on a hot plate. At this time, as shown in FIG. 11A, since the light emitting layer 28 has a uniform film thickness over the entire surface, the electron injection layer 62 has a uniform film thickness over the entire surface of the concave region 26.

  Next, as shown in FIG. 11A, a mask M <b> 2 is placed on the electron injection layer 62. The mask M2 has a size that covers the entire surface of the electron injection layer 62, and has the same shape as the mask M1 described above. That is, a transmission region Ta that is transmissive to ultraviolet light and a non-transmission region Tb that blocks transmission of ultraviolet light are provided, and the non-transmission region Tb is a position opposite to the region Q1 on each pixel electrode 27. The transmission region Ta is disposed at a position opposite to the region Q2 other than the pixel electrode 27. Therefore, the non-transmissive region Tb is formed in the electron injection layer 62 formed in the region Q1 on each pixel electrode 27, and the electron injection layer 62 formed in the region Q2 other than the region Q1 on each pixel electrode 27 is formed. A transmission region Ta is disposed.

  And as shown to Fig.11 (a), the ultraviolet-ray R is irradiated with respect to the electron injection layer 62 whole surface through the mask M2 (light irradiation process). The ultraviolet light to be irradiated is not more than 350 nm, preferably 250 to 300 nm, as described above. As a result, the electron injection layer 62 located in the region Q1 is not irradiated with the ultraviolet light R, and only the electron injection layer 62 located in the region Q2 is irradiated with the ultraviolet light R. As a result, the electron injection layer 62 located in the region Q2 irradiated with the ultraviolet light R is denatured and has an increased electrical resistance value. On the other hand, the crystallinity of the electron injection layer 62 located in the region Q1 where the ultraviolet light R has not been irradiated is not modified, and the electrical resistance value is low. In this manner, the electron injection layer 62 including the electron injection layer 62L having a low electric resistance value and the electron injection layer 62H having a high electric resistance value is formed.

Furthermore, heat treatment is performed at 100 ° C. to 150 ° C. for 1 minute to several minutes. By performing the heat treatment, the reaction of the region exposed to ultraviolet light proceeds more stably, and the electric resistance of the region irradiated with ultraviolet light can be increased with high reproducibility.

  In this embodiment, as a method of selectively irradiating ultraviolet light, a method of using a mask that is in direct contact with or close to the substrate S is described. However, a mask formed on a glass mask using a projection exposure apparatus is used. It is also possible to selectively irradiate with ultraviolet light.

  Subsequently, the mask M2 is removed from the hole injection layer 61 as shown in FIG. Thereafter, a LiF layer, a Ca layer, an Al layer, or the like is laminated on the bank 25 and the electron injection layer 62 by a known vapor deposition method or the like to form the cathode 29. Subsequently, in the same manner as in the first embodiment, a sealing member 30 made of, for example, a resin having light transmittance is formed on the entire surface of the cathode 29 (see FIG. 11C).

As described above, according to the present embodiment, the following effects are obtained.
(1) According to the present embodiment, the hole injection layer 61, the light emitting layer 28, and the electron injection layer 62 are formed in the concave region 26 by the droplet discharge method. Therefore, the hole injection layer 61, the light emitting layer 28, and the electron injection layer 62 having a desired film thickness can be formed without using a vacuum device or the like. In addition, by arranging a plurality of pixel electrodes 27 in the concave region 26, the film thicknesses of the hole injection layer 61, the light emitting layer 28, and the electron injection layer 62 formed on each pixel electrode are uniform over the pixel electrodes. Can be.
(2) According to the present embodiment, the holes supplied from each pixel electrode 27 and the electrons supplied from the cathode 29 are transferred to the region Q2 other than the region Q1 sandwiched between each pixel electrode 27 and the cathode 29. Do not flow. As a result, when holes and electrons are supplied to the light emitting layer 28 on the predetermined pixel electrode 27, the light emitting layer around it and the light emitting layer 28 on another adjacent pixel electrode 27 emit light simultaneously. The occurrence of so-called light emission crosstalk can be suppressed. For this reason, it is possible to realize the organic EL exposure heads 2K, 2C, 2M, and 2Y that enable higher-definition drawing. As a result, the optical printer 1 that can print a high-definition image can be realized.

In particular, in an optical writing head for an electrophotographic printer, the spread of the emitted light of each pixel to the peripheral portion leads to a decrease in contrast when an image is formed on the photoreceptor. A method for preventing light around the pixel by providing a light-shielding layer around the pixel has been proposed. However, since the emitted light is not used effectively, the light use efficiency decreases. In the case of the present invention, since the light emitting region is narrowed by concentrating charges on the light emitting layer 28 on the pixel electrode 27, both high light utilization efficiency and high resolution when imaged can be achieved.
(3) According to the present embodiment, by selectively irradiating with ultraviolet light, the hole injection layer 61 or the electron injection layer 62 can be divided into a region having a high electrical resistance and a region having a low electrical resistance. . Therefore, it is possible to improve the light emission efficiency of the light emitting element and achieve high definition without complicating the manufacturing process.
(4) According to the present embodiment, even when a hole injection material having a low sheet resistance value or an electron injection material is used, light emission crosstalk can be suppressed. Use of a hole injection material or an electron injection material having a low sheet resistance can be expected to lower the light emission voltage, improve the light emission efficiency, and improve the lifetime of the light emitting element. Therefore, by using the present invention, a hole injection material or electron injection material having a low sheet resistance value can be used to reduce the voltage and light emission without reducing the resolution of the light emitting device and the light use efficiency. The efficiency can be improved and the device life can be improved. In the present embodiment, the structure in which the pixel electrode 27 is used as an anode has been introduced. However, the present invention is also effective in a structure in which the pixel electrode 27 is used as a cathode. In that case, a high effect can be exhibited by increasing the resistance of the electron injection / transport layer of each pixel electrode 27 by selectively irradiating the electron injection / transport layer with ultraviolet light.
(Fifth embodiment)
Next, a fifth embodiment of the present invention will be described with reference to FIG. The fifth embodiment is the same as the fourth embodiment except for the bank structure. Therefore, the same components as those in the fourth embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

FIG. 12 is a top view of a light emitting element array 22D according to the fifth embodiment, and FIG. 12B is a cross-sectional view taken along the line aa in FIG.
As shown in FIG. 12A, the light emitting element array 22D includes an organic EL element having a hole injection layer 61 and an electron injection layer 62 on the substrate S in addition to the light emitting layer 28, as in the fourth embodiment. The liquid repellent bank 25b is arranged so as to surround the light emitting element array 22D in common. The hole injection layer 61L and the electron injection layer 62L located in the region Q1 above the pixel electrode 27 are compared with the hole injection layer 61H and the electron injection layer 62H located in the region Q2 other than the region above the pixel electrode 27. These are layers with low electrical resistance.

On the other hand, the lyophilic bank 45 is arranged so as to partition each pixel electrode 27 in the present embodiment. The lyophilic bank 45 has, for example, a film thickness of 50 to 150 nm and is composed of silicon oxide (SiO ₂ ). Moreover, even if the lyophilic bank 45 is not provided with lyophilicity, the lyophilic bank 45 may have a surface made lyophilic by performing a commonly used lyophilic treatment.

By doing so, concentration of the electric field at the end of the pixel electrode 27 can be avoided. As a result, the life of the organic EL element 24 can be extended.
In addition, embodiment of invention is not limited to the said 1st-5th embodiment, You may implement as follows.

  In the above-described embodiment, the case where it is mainly applied to an optical writing head for an electrophotographic printer has been described. However, the present invention is effectively applied to a structure having a continuous hole injection layer and electron injection layer. be able to. For example, it can be used for a display device that performs colorization by combining a white light emitting element in a matrix form with a color filter.

  In each of the above embodiments, the hole injection layer 61, the electron injection layer 62, and the light emitting layer 28 are formed using the droplet discharge method, but the present invention is not limited to this. For example, each liquid composition containing a hole injection layer material, an electron injection layer material, and a light emitting layer material may be applied using a dispenser. By doing in this way, the effect similar to the said embodiment can be acquired.

  In each of the above embodiments, the pixel electrode 27 has a circular shape. However, the pixel electrode 27 may have a substantially rectangular shape instead. In this case, the organic EL element 24 having the hole injection layer 61, the electron injection layer 62, and the light emitting layer 28 having a more uniform thickness is formed by using the bank 25 having the rectangular shape as in the above embodiment. can do.

  In each of the above embodiments, the hole injection layer 61 is an organic conductive layer containing PEDOT, but an organic conductive layer not containing PEDOT can also be applied. Further, although the electron injection layer 62 is an organic conductive layer containing a polyphenylene vinylene-based polymer, it can also be applied to an organic conductive layer containing no polyaniline.

  In each of the above embodiments, an organic EL element is used as a light emitting element, but the present invention is not limited to this. In short, any light emitting element may be used as long as at least a part of the layers is formed of a liquid composition.

  In the fourth and fifth embodiments, the organic EL element 24 includes the pixel electrode 27, the hole injection layer 61, the light emitting layer 28, the electron injection layer 62, and the cathode 29. However, the present invention is not limited to this. . For example, in addition to the pixel electrode 27, the hole injection layer 61, the light emitting layer 28, the electron injection layer 62, and the cathode 29, the organic EL element 24 is provided with a hole transport layer between the hole injection layer 61 and the light emitting layer 28. In addition, an electron transport layer may be provided between the electron injection layer 62 and the cathode 29.

  Further, when each hole transport layer and electron transport layer are provided, by increasing the electrical resistance value of each hole transport layer and electron transport layer in the region Q2 other than the region Q1 on the pixel electrode 27, The holes supplied from the pixel electrode 27 can be concentrated and supplied to the hole injection layer 61L formed in the region Q1 on each pixel electrode 27. Therefore, the occurrence of so-called light emission crosstalk can be suppressed.

  In the fourth and fifth embodiments, the electrical resistance values of the hole injection layer 61H and the electron injection layer 62H in all the regions Q2 other than the region Q1 on the pixel electrode 27 are increased. This is not the entire region Q2 other than the region Q1 on the pixel electrode 27 but the electric resistance values of only the hole injection layer 61 and the electron injection layer 62 in the region Q2 near the periphery of the region Q1 on each pixel electrode 27. May be made higher. By doing in this way, the effect similar to the said embodiment can be acquired.

  In the fourth and fifth embodiments, the pixel electrode 27, the hole injection layer 61, the light emitting layer 28, the electron injection layer 62, and the cathode 29 are stacked on the substrate S, and other than the region Q 1 on the pixel electrode 27. Although the electric resistance values of the hole injection layer 61 and the electron injection layer 62 in the region Q2 are increased, the layer that forms a high electric resistance value is not limited to the hole injection layer 61 and the electron injection layer 62. For example, the pixel electrode 27, the light emitting layer 28, and the cathode 29 may be stacked on the substrate S, and the electric resistance value of the light emitting layer 28 in the region Q2 other than the region Q1 on the pixel electrode 27 may be increased. In this way, holes supplied from each pixel electrode 27 can be concentrated and supplied to the light emitting layer 28 formed in the region Q1 on each pixel electrode 27, so-called light emission crosstalk. Can be suppressed.

  In addition to the pixel electrode 27, the hole injection layer 61, the light emitting layer 28, the electron injection layer 62, and the cathode 29, the organic EL element 24 is provided with a hole transport layer between the hole injection layer 61 and the light emitting layer 28. In addition, an electron transport layer is provided between the electron injection layer 62 and the cathode 29, and the electrical resistance value of each hole transport layer and electron transport layer in the region Q2 other than the region Q1 on the pixel electrode 27 is increased. May be. In short, it is only necessary that the electrical resistance value of each layer in the region Q2 other than the region Q1 on the pixel electrode 27 is higher than the electrical resistance value of each layer in the region Q1 on the pixel electrode 27.

  In each of the above embodiments, the hole injection layer 61 is an organic conductive layer containing PEDOT. However, even if it is an organic conductive layer containing polyaniline, the same effect as in the above embodiment can be obtained. .

In the fourth and fifth embodiments, the electrical resistance value is increased by a chemical reaction using ultraviolet light R as light, but the electrical resistance value is increased using light other than ultraviolet light R. You may do it. For example, a region irradiated by using a carbonic acid laser, an excimer laser, a YAG laser or the like may be thermally denatured so as to have a high resistance. Further, the film in the region irradiated by laser ablation may be removed by performing laser irradiation with higher energy. In addition, a material that has a high absorption rate of laser light to be irradiated in advance on the region to be increased in resistance is selectively placed, and a process that irradiates the entire surface of the film with an appropriate value is used. You may do it. Such laser processing is preferably performed in the current pressure atmosphere or in an inert gas atmosphere in order to prevent contamination and functional layer deterioration. In particular, it is desirable that the processing with a laser be performed in a step before the formation of the light emitting layer in order to prevent deterioration of the light emitting layer. For example, when the light emitting layer is formed on the hole injection layer, it is effective to process the hole injection layer with a laser.

  In the fourth and fifth embodiments, the pixel electrode 27, the hole injection layer 61, the light emitting layer 28, the electron injection layer 62, and the cathode 29 are stacked on the substrate S, and other than the region Q 1 on the pixel electrode 27. By irradiating the hole injection layer 61 and the electron injection layer 62 in the region Q2 with ultraviolet light R, the electrical resistance values of the hole injection layer 61 and the electron injection layer 62 in the region Q2 were increased. A layer made of a predetermined material that absorbs ultraviolet light R is provided on the substrate S directly below the hole injection layer 61 excluding the partition region where the pixel electrode 27 is formed. Similarly, a layer made of a predetermined material that absorbs ultraviolet light R is provided on the substrate S on the light emitting layer 28 in the entire region Q2 other than the region Q1 on the pixel electrode 27 immediately below the electron injection layer 62. And you may make it irradiate the ultraviolet light R using mask M1, M2. By doing so, the ultraviolet light R can be efficiently absorbed by the hole injection layer 61 and the electron injection layer 62 in the entire region Q2 other than the region Q1 on the pixel electrode 27. The electrical resistance values of the hole injection layer 61 and the electron injection layer 62 can be increased.

  In the fourth and fifth embodiments, the hole injection layer 61 is provided on the pixel electrode 27 and the electron injection layer 62 is provided immediately below the cathode 29. However, the present invention is not limited to this. The present invention can also be applied to a structure in which an electron injection layer is formed on the pixel electrode 27 and a hole injection layer is formed immediately below the cathode 29. That is, even when the pixel electrode 27 is a cathode and the cathode 29 is an anode, the electric resistance value of the electron injection layer in the region Q2 other than the region Q1 on the pixel electrode 27 is made higher than that in the region Q1. . Further, the electric resistance value of the hole injection layer in the region Q2 other than the region Q1 on the pixel electrode 27 is made higher than that in the region Q1. By doing in this way, the same effect as the above-described embodiment can be obtained.

FIG. 2 is a main sectional view of an optical printer. The perspective view of the organic EL exposure head for black. (A) is the top view of the light emitting element array of 1st Embodiment, (b) is the sectional view on the aa line in (a), (c) is the sectional view on the bb line in (a). . The figure for demonstrating the structure of an optical member. (A)-(d) is a figure for demonstrating the manufacturing method of an organic electroluminescent exposure head, respectively. (A)-(c) is a top view of the light emitting element array of 2nd Embodiment, respectively. The top view of the light emitting element array of 3rd Embodiment. (A) is a top view of the light emitting element array of 4th Embodiment, (b) is the sectional view on the aa line in (a). (A)-(c) is a figure for demonstrating the manufacturing method of the organic electroluminescent printer head which concerns on 4th Embodiment, respectively. Similarly, (a)-(c) is a figure for demonstrating the manufacturing method of the organic electroluminescent printer head based on 4th Embodiment, respectively. Similarly, (a)-(c) is a figure for demonstrating the manufacturing method of the organic electroluminescent printer head based on 4th Embodiment, respectively. (A) is a top view of the light emitting element array of 5th Embodiment, (b) is the sectional view on the aa line in (a).

Explanation of symbols

DESCRIPTION OF SYMBOLS S ... Substrate, 1 ... Optical printer as electro-optical device, 2C, 2K, 2M, 2Y ... Optical writing head and organic EL exposure head for cyan as light emitting unit, organic EL exposure head for black, organic EL exposure head for magenta , And organic EL exposure heads for yellow, 22, 2
2A, 22B, 22C, 22D ... light emitting element array, 23 ... optical member, 24 ... organic electroluminescence element as light emitting element, 25 ... bank, 27 ... pixel electrode, 28 ... light emitting layer, 29 ... cathode as common electrode, 61: a hole injection layer as an organic conductive layer, 62: an electron injection layer as an organic conductive layer.

Claims (16)

A light emitting element array in which a plurality of light emitting elements are arranged;
An electro-optical device having a partition wall that commonly surrounds the light-emitting element array. The electro-optical device according to claim 1.
The electro-optical device, wherein the partition wall is formed so that its shape follows the shape of each light emitting element. The electro-optical device according to claim 1.
The electro-optical device, wherein the plurality of light emitting elements are formed by a liquid process. The electro-optical device according to claim 3.
The plurality of light emitting elements are formed by forming a functional layer including at least a light emitting layer between a plurality of pixel electrodes and a common electrode disposed to face each of the plurality of pixel electrodes.
The electro-optical device is characterized in that the light emitting layer is made of an organic material. The electro-optical device according to any one of claims 1 to 4,
2. The electro-optical device according to claim 1, wherein the light emitting elements are arranged in a staggered pattern. The electro-optical device according to any one of claims 4 and 5,
The electrical resistance value of the functional layer is the electrical resistance of the functional layer disposed in a region where the electrical resistance value of the functional layer disposed between the plurality of pixel electrodes is sandwiched between the pixel electrode and the common electrode. An electro-optical device characterized by being higher than the value. The electro-optical device according to claim 6.
The functional layer includes an organic conductive layer,
The electrical resistance value of the organic conductive layer disposed between the plurality of pixel electrodes is equal to the electrical resistance value of the organic conductive layer disposed in a region sandwiched between the plurality of pixel electrodes and the common electrode. An electro-optical device characterized by being expensive. The electro-optical device according to claim 7.
The electro-optical device, wherein the organic conductive layer contains polyethylene dioxythiophene. The electro-optical device according to claim 7.
The electro-optical device, wherein the organic conductive layer contains polyaniline. The electro-optical device according to claim 1,
The electro-optical device, wherein the light emitting element array selectively irradiates light onto a photoconductor. In the method of manufacturing the electro-optical device,
Forming a plurality of pixel electrodes;
Forming a partition wall that surrounds the entire plurality of pixel electrodes in common;
And a step of forming a functional layer in a region surrounded by the partition wall. The method of manufacturing an electro-optical device according to claim 11.
The method of manufacturing an electro-optical device, wherein the functional layer is formed by a droplet discharge method. The method of manufacturing an electro-optical device according to claim 11 or 12,
The method of manufacturing an electro-optical device, further comprising a step of selectively irradiating the functional layer with light. The method of manufacturing an electro-optical device according to any one of claims 11 to 13,
A method of manufacturing an electro-optical device, wherein the functional layer disposed in a region between the pixel electrodes is selectively irradiated with light. The method of manufacturing the electro-optical device according to claim 14.
The method of manufacturing an electro-optical device, wherein the light is ultraviolet light. The method of manufacturing an electro-optical device according to claim 14 or 15,
A method of manufacturing an electro-optical device, wherein the functional layer is heat-treated after the light irradiation.

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