JP2006300706A - Life decision method for ultraviolet light source, ultraviolet light source device, and ultraviolet irradiation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To decide the life of an ultraviolet light source accurately without being affected by a change in the absolute value of the output of an ultraviolet sensor in an ultraviolet light source applying ultraviolet rays through a transmission member which allows ultraviolet rays to pass therethrough, to prevent situations which reduce product yield such as a loss of a target product due to a change in the output of the ultraviolet sensor in the middle of manufacturing the target product by an ultraviolet light source device or an ultraviolet irradiation device adopting the ultraviolet light source, and to prevent situations which require the maintenance of the ultraviolet light source in the middle of manufacturing the target product. <P>SOLUTION: The life of the ultraviolet light source 1 is decided from a temporal change in the spectral shape of the ultraviolet rays 1a passed through the transmission member 4. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a lifetime determination method for determining the lifetime of an ultraviolet light source such as an excimer lamp, and an ultraviolet light source device and an ultraviolet irradiation device that employ this ultraviolet light source lifetime determination method.

  In recent years, high-intensity ultraviolet irradiation has been performed for the purpose of removing organic substances on the surface of a glass substrate in a manufacturing process of a flat-screen television such as a liquid crystal television. This is to clean the surface by cutting the chemical bonds of organic substances by the strong energy of ultraviolet rays and changing them to gases such as CO2. Conventionally, low-pressure mercury lamps having emission wavelengths of 185 nm and 254 nm have been used, but excimer lamps having a central wavelength in the vacuum ultraviolet region are rapidly spreading with the increase in size of the base material. For example, a xenon excimer lamp has higher energy than a low-pressure mercury lamp and does not emit light other than 172 nm. Therefore, if a xenon excimer lamp is used, all of the input energy becomes ultraviolet light emission with a wavelength of 172 nm, and the processing efficiency of ultraviolet light irradiation is high, so that the line speed can be increased by increasing the substrate size. Become. In addition, when using a low-pressure mercury lamp, the temperature of the substrate is not increased by absorbing ultraviolet light of a wavelength that is not related to the processing, so that the substrate can be processed at a low temperature. Thus, it is possible to avoid the substrate from being damaged due to the generation of thermal stress due to the temperature rise.

  Therefore, various light source devices that employ excimer lamps have been recently proposed. For example, Patent Document 1 includes an excimer lamp that radiates ultraviolet rays and a casing that surrounds the excimer lamp and partially includes an ultraviolet transmissive member so as to cope with an increase in the area of an object to be processed. A lamp light source device and a technique for manufacturing the same are disclosed.

  However, when a light source device employing such an excimer lamp is used for cleaning a target product such as a base material, in order to reliably remove organic substances by ultraviolet irradiation, the intensity of ultraviolet rays is accurately observed and the intensity is reduced. If this is observed, the UV lamp must be replaced promptly.

  Thus, a light source device employing an excimer lamp has been developed that includes an ultraviolet monitor. For example, Patent Literature 2 includes an excimer lamp, a lamp house having a light irradiation / transmission member, and housing the excimer lamp, and an ultraviolet monitor for detecting the ultraviolet intensity from the light irradiation / transmission member. The technology of an ultraviolet irradiation device that enables easy measurement of the ultraviolet intensity from is disclosed.

  In an ultraviolet irradiation apparatus equipped with such an ultraviolet monitor, in order to perform stable observation over a long period of time with good reproducibility, the sensor of the ultraviolet monitor is easily damaged due to the high energy level of ultraviolet rays. The sensor is required to have high durability.

  Conventionally, a sensor element in which silicon or the like having a narrow band gap and a wavelength filter are combined, a photoelectric tube, or the like has been used for such ultraviolet measurement. However, since such a sensor has insufficient durability against ultraviolet rays and cannot withstand long-time measurement, it cannot be used for an ultraviolet light source such as a xenon excimer lamp.

  Therefore, recently, a sensor having sufficient durability has been demanded. For example, Non-Patent Document 1 discloses a technology of an ultraviolet sensor using a diamond thin film to improve durability.

Unlike conventional devices such as silicon with a narrow band gap, the diamond thin film has properties as a semiconductor with a wide band gap, so there is no need to use a wavelength filter, and because it has excellent heat resistance and durability, A highly reliable sensor can be realized at low cost. For example, a semiconductor sensor using this diamond thin film is cheaper and more durable than a conventional sensor element that combines a wavelength filter with silicon or the like. In addition, there is an advantage that it can be reduced in size and weight as compared with a sensor using a conventional photoelectric tube or the like, and a complicated circuit configuration is not required.
JP 2003-195000 A JP 2003-275576 A Kazushi Hayashi and two others, “Development of UV sensor using highly oriented diamond thin film”, R & D Kobe Steel Engineering Reports Vol. 52, NO. 2, pp. 23-26

  However, even if a sensor with enhanced durability using a diamond thin film is employed, the following problems of the ultraviolet sensor that have been pointed out have not been solved. That is, both the ultraviolet sensor as described in Patent Document 2 and the sensor using a diamond thin film as described in Non-Patent Document 1 have the following problems. .

  The first problem is that light in a short wavelength region such as ultraviolet rays has a high energy level, so that organic substances present in the atmosphere may be decomposed and adhere to the sensor surface during irradiation with ultraviolet rays. It is. When an organic substance or the like adheres to the sensor surface, the amount of incident light is reduced, and the detected signal intensity is reduced.

  The second problem is that water may be adsorbed on the sensor surface, but when it receives strong ultraviolet rays, the water adsorbed on the sensor surface is dissociated and ionized, and the electric field applied between the electrodes. As a result, the sensor surface moves easily and slowly, which causes a decrease in electrical resistance. In such a case, an output corresponding to the light intensity may not be obtained, such as a temporal output change of several hundred seconds or more observed at the start or end of ultraviolet irradiation.

  The third problem is that when the output of the excimer lamp is reduced, the output of the ultraviolet light source itself is reduced, or the transmission member disposed in front of the ultraviolet light source is deteriorated by receiving intense ultraviolet light. It is impossible to distinguish whether the transmittance of the member has changed and the amount of transmitted light has decreased. For example, in a xenon excimer lamp having a center wavelength of 172 nm, ultraviolet rays having a wavelength in the vicinity are strongly absorbed by oxygen in the air, so a lamp and a reflector are usually installed in a box filled with nitrogen or the like. The substrate is irradiated with ultraviolet rays through a quartz glass transmission member or the like, but this quartz glass transmission member is deteriorated by the ultraviolet rays and the amount of transmitted light is reduced.

  Conventional sensors, such as an ultraviolet sensor as described in Patent Document 2 and a sensor using a diamond thin film as described in Non-Patent Document 1, transmit ultraviolet light that has passed through a transmitting member and reached the sensor. Since the intensity was simply measured and the life was determined based on the intensity, whether the output of the light source itself to be monitored had decreased, or the intensity of the ultraviolet rays that reached the sensor was the first to third as described above It was impossible to distinguish whether it was lowered due to a problem, and the life of the light source could not be accurately determined.

  In addition, the fourth problem is that the change in sensor output due to the first to third problems is caused by irradiating the target product with ultraviolet rays in the manufacturing process of the glass substrate of the liquid crystal television. It can happen. And if the target product is damaged due to such troubles in the manufacturing process, it will greatly affect the yield of the target product, or the production line is stopped and the ultraviolet light source is replaced, or the quartz glass transmitting member It will be necessary to perform maintenance such as replacing.

  The present invention has been made in view of such problems, and organic substances are decomposed and adhere to the sensor surface, water adsorbed on the sensor surface is dissociated and ionized, or the transmittance of the transmission member is increased. Even if the absolute value of the output of the sensor changes due to a change or the like, it is possible to accurately determine the lifetime of the ultraviolet light source without being affected by these, It is an object to provide a light source device and an ultraviolet irradiation device.

  In addition, in ultraviolet light source devices and ultraviolet irradiation devices that employ ultraviolet light sources, the output of the ultraviolet sensor changes while these devices are manufacturing the target product, and the product yield is reduced. It is possible to prevent the situation that makes it worse, and to avoid the situation that the UV light source needs to be maintained while the target product is being manufactured. It is an object to provide a method, an ultraviolet light source device, and an ultraviolet irradiation device.

  According to the present invention for solving the above-mentioned problem, the method of determining the lifetime of an ultraviolet light source is a temporal change in the spectral shape of ultraviolet light transmitted through the transmitting member in the ultraviolet light source that irradiates ultraviolet light through a transmitting member that transmits ultraviolet light. And determining the lifetime of the ultraviolet light source from the ultraviolet light source.

  According to the present invention, the organic matter is decomposed and adhered to the sensor surface by the ultraviolet light transmitted through the transmission member, the water adsorbed on the sensor surface is dissociated and ionized, or the transmittance of the transmission member is changed. Even if the absolute value of the sensor output changes due to, for example, the lifetime of the UV light source is determined from the temporal change of the spectrum shape based on the spectrum shape that is not affected by these causes. The lifetime of the light source can be accurately determined.

  Also, in ultraviolet light source devices and ultraviolet irradiation devices that employ ultraviolet light sources, the output of the ultraviolet sensor changes while the target product is being manufactured and the target product is damaged, etc. The situation can be prevented. In addition, it is possible to avoid a situation where the ultraviolet light emission source has to be maintained while the target product is being manufactured.

  Another method of determining the lifetime of an ultraviolet light source according to the present invention for solving the above-described problem is that in an ultraviolet light source that irradiates ultraviolet light through a transmission member that transmits ultraviolet light, the ultraviolet light source that transmits the ultraviolet light passes through the transmission member. This is a method for determining the lifetime of an ultraviolet light source, wherein the lifetime of the ultraviolet light source is determined from a temporal change in intensity ratio with respect to different wavelengths.

  According to the present invention, the organic matter is decomposed and adhered to the sensor surface by the ultraviolet light transmitted through the transmission member, the water adsorbed on the sensor surface is dissociated and ionized, or the transmittance of the transmission member is changed. Even if the absolute value of the sensor output changes due to, for example, the intensity ratio of ultraviolet rays that are not affected by these causes to different wavelengths, the UV light source lifetime is determined from the change in intensity ratio over time. Since the determination is made, it is possible to accurately determine the lifetime of the ultraviolet light emission source without measuring all the spectra, and the apparatus can be simplified and the measurement time can be shortened.

  Also, in ultraviolet light source devices and ultraviolet irradiation devices that employ ultraviolet light sources, the output of the ultraviolet sensor changes while the target product is being manufactured and the target product is damaged, etc. The situation can be prevented. In addition, it is possible to avoid a situation where the ultraviolet light emission source has to be maintained while the target product is being manufactured.

  Here, of the at least two different wavelengths, one is a wavelength in the vicinity of the wavelength at which the intensity of the ultraviolet light source reaches a peak, and the remaining at least one is in the vicinity of the wavelength at which the change with time is most observed. Preferably, the wavelength is

  According to this preferred embodiment, by taking the first point at a wavelength in the vicinity of the wavelength at which the intensity of the ultraviolet light emission peak, and taking at least one other point at a wavelength in the vicinity of the wavelength at which the most change with time is observed, The change in intensity ratio for different wavelengths of ultraviolet light becomes clearer, and measurement with high accuracy becomes possible.

  The ultraviolet light source is preferably a xenon excimer lamp.

  According to this preferred embodiment, the xenon excimer lamp has high energy and does not emit light other than 172 nm, so that all of the input energy becomes ultraviolet light emission, and the processing efficiency is high. It becomes possible to cope with an increase in substrate size and an increase in line speed. In addition, the base material does not increase the temperature of the base material by absorbing ultraviolet light having a wavelength not related to the processing, so that the base material can be processed at a low temperature. It becomes possible to avoid being damaged.

  The transmitting member is preferably quartz glass.

  According to this preferred embodiment, the light transmittance in the ultraviolet region can be selectively increased.

  And this lifetime determination method of the ultraviolet light emission source measures the ultraviolet absorptivity due to the ultraviolet deterioration of the transmission member from the change of the standard ultraviolet ray generated by the calibration ultraviolet light emission source that generates the standard ultraviolet ray and transmitted through the transmission member, It is preferable to determine the lifetime of the ultraviolet light source from which the influence of ultraviolet deterioration of the transmission member is removed by correcting the intensity of the ultraviolet light generated by the ultraviolet light source and transmitted through the transmission member based on the ultraviolet absorption rate.

  According to this preferred embodiment, for example, when the processing ultraviolet light source is turned off, the standard ultraviolet light is transmitted through the transmission member from the calibration ultraviolet light source having an output smaller than that of the processing ultraviolet light source, and the standard ultraviolet light is transmitted. By measuring the change in the spectrum and the change in the intensity ratio at a specific wavelength, it is possible to determine the ultraviolet deterioration of the transmission member. As a result, the UV absorption rate due to the UV deterioration of the transmission member is used to correct the intensity of the UV light generated by the UV light source and transmitted through the transmission member, thereby determining the life of the UV light source without the influence of the UV deterioration of the transmission member. Therefore, the life of the UV light source can be increased with higher accuracy than the method of determining the life of the UV light source from the temporal change in the spectral shape of the UV light that has passed through the transmitting member and the change in intensity ratio with respect to different wavelengths. It becomes possible to judge.

  In addition, the method for determining the lifetime of the ultraviolet light source is based on the change in the standard ultraviolet light generated by the calibration ultraviolet light source and transmitted through the transmission member, and by measuring the ultraviolet absorption rate due to the ultraviolet deterioration of the transmission member, It is preferable to determine the lifetime.

  According to this preferable aspect, since the lifetime of the transmissive member can be determined, it is possible to appropriately determine the deterioration of only the transmissive member and replace the transmissive member before damaging the substrate to be treated, And damage to the substrate to be treated can be prevented. In addition, a very expensive transmission member can be used up to its full lifetime, which is economical.

  An ultraviolet light source device according to the present invention for solving the above-mentioned problems is an ultraviolet light source device comprising an ultraviolet light source that generates ultraviolet light and a transmission member that transmits the ultraviolet light generated by the ultraviolet light source. A measuring means for measuring the spectral shape of the ultraviolet light generated by the ultraviolet light source and transmitted through the transmitting member; a recording means for recording and holding the spectral shape of the ultraviolet light measured by the spectral measuring means; and a temporal change in the spectral shape. An ultraviolet light source device comprising life determining means for determining the life of an ultraviolet light source.

  According to the present invention, the spectral shape of the ultraviolet light transmitted through the transmitting member is measured and recorded and held, and the lifetime of the ultraviolet light emission source is determined from the temporal change of the spectral shape. Even if the absolute value changes, the life of the ultraviolet light source is judged from the temporal change of the spectral shape based on the spectral shape that is not affected by these causes, so the life of the ultraviolet light source is accurately judged. Will be able to.

  Also, in ultraviolet light source devices and ultraviolet irradiation devices that employ ultraviolet light sources, the output of the ultraviolet sensor changes while the target product is being manufactured and the target product is damaged, etc. The situation can be prevented. In addition, it is possible to avoid a situation where the ultraviolet light emission source has to be maintained while the target product is being manufactured.

  Another ultraviolet light source device according to the present invention for solving the above problems is an ultraviolet light source device comprising an ultraviolet light source that generates ultraviolet light and a transmission member that transmits the ultraviolet light generated by the ultraviolet light source. Measuring means for measuring the intensity of at least two different wavelengths of ultraviolet light transmitted through the transmitting member, recording means for recording and holding the intensity measured by the measuring means, and time for the intensity ratio for the at least two different wavelengths. An ultraviolet light source device comprising life determining means for determining the life of an ultraviolet light emitting source based on a change in temperature.

  According to the present invention, even if the absolute value of the output of the sensor changes due to the above-mentioned causes, the intensity ratio with respect to different wavelengths of ultraviolet rays that are not affected by these causes is used as a reference, and the change in the intensity ratio with time can be Since the lifetime of the light emitting source is determined, the lifetime of the ultraviolet light emitting source can be accurately determined without measuring all the spectra, and the apparatus can be simplified and the measurement time can be shortened.

  Also, in ultraviolet light source devices and ultraviolet irradiation devices that employ ultraviolet light sources, the output of the ultraviolet sensor changes while the target product is being manufactured and the target product is damaged, etc. The situation can be prevented. In addition, it is possible to avoid a situation where the ultraviolet light emission source has to be maintained while the target product is being manufactured.

  Here, in the ultraviolet light source device, the measuring unit includes at least two filters that transmit different wavelengths, a switching unit that switches the filters, and an ultraviolet sensor that measures the intensity of ultraviolet light that has passed through the filter. Is preferred.

  According to this preferred aspect, the measuring means comprises at least two filters that transmit different wavelengths, a switching means that switches the filters, and an ultraviolet sensor that measures the intensity of ultraviolet light that has passed through the filter. Therefore, a plurality of ultraviolet sensors are not required, and the intensity of at least two different wavelengths of the ultraviolet rays transmitted through the transmitting member can be easily measured with one ultraviolet sensor.

  Further, the ultraviolet light source device includes a calibration ultraviolet light source that generates standard ultraviolet light, and the measuring means is caused by the change in the standard ultraviolet light that is generated by the calibration ultraviolet light source and transmitted through the transmission member. In addition to measuring the ultraviolet absorptivity according to the above, and correcting the intensity of the ultraviolet rays generated by the ultraviolet light source and transmitted through the transmitting member by the ultraviolet absorptivity, the ultraviolet light source that has removed the influence of the ultraviolet degradation of the transmitting member It is preferable to determine the lifetime of the.

  According to this preferred embodiment, for example, when the processing ultraviolet light source is turned off, the standard ultraviolet light is transmitted through the transmission member from the calibration ultraviolet light source having an output smaller than that of the processing ultraviolet light source, and the standard ultraviolet light is transmitted. By measuring the change in the spectrum and the change in the intensity ratio at a specific wavelength, it is possible to determine the ultraviolet deterioration of the transmission member. As a result, the lifetime of the ultraviolet light source that eliminates the influence of the ultraviolet light deterioration of the transmission member by correcting the intensity of the ultraviolet light generated by the ultraviolet light source and transmitted through the transmission member by the ultraviolet absorption rate due to the ultraviolet deterioration of the transmission member. UV light emission with higher accuracy than the ultraviolet light source device that determines the lifetime of the ultraviolet light source from the temporal change in the spectral shape of the ultraviolet light that has passed through the transmission member and the temporal change in the intensity ratio for different wavelengths. The lifetime of the source can be determined.

  In addition, the ultraviolet light source device can determine the lifetime of the transmissive member by measuring the ultraviolet absorptivity due to the ultraviolet deterioration of the transmissive member from the change in standard ultraviolet light generated by the calibration ultraviolet light source and transmitted through the transmissive member. preferable.

  According to this preferable aspect, since the lifetime of the transmissive member can be determined, it is possible to appropriately determine the deterioration of only the transmissive member and replace the transmissive member before damaging the substrate to be treated, And damage to the substrate to be treated can be prevented. In addition, a very expensive transmission member can be used up to its full lifetime, which is economical.

  Furthermore, according to this preferable aspect, the ultraviolet absorptivity due to the ultraviolet deterioration of the transmissive member is measured from the change of the standard ultraviolet light transmitted through the transmissive member, and this ultraviolet absorptivity is generated in the ultraviolet light source and transmitted through the transmissive member. The life of the ultraviolet light source is corrected by correcting the intensity of the ultraviolet light and removing the influence of the ultraviolet deterioration of the transmitting member. Therefore, the temporal change in the spectrum shape of the ultraviolet light transmitted through the transmitting member and the intensity ratio for different wavelengths The lifetime of the ultraviolet light source can be determined with higher accuracy than the ultraviolet light source device that determines the lifetime of the ultraviolet light source from the temporal change.

  The measuring means preferably includes an ultraviolet sensor using a diamond thin film.

  According to this preferred embodiment, since the ultraviolet sensor uses a diamond thin film, an ultraviolet light source device with higher durability and stability can be obtained.

  The diamond thin film is preferably composed of a highly oriented diamond layer.

  According to this preferred embodiment, the diamond thin film is composed of a highly oriented diamond layer, and both the growth direction and in-plane direction of crystal grains in the polycrystalline diamond are oriented in a fixed direction with respect to the substrate surface. Detection performance is improved compared to diamond sensors.

  Here, the diamond layer is preferably a highly oriented diamond layer having a (100) surface and crystal grains oriented in one direction with respect to the substrate. In that case, since the surface has a characteristic surface form in which flat (001) facets are arranged, the crystal defect density in the vicinity of the surface of this film is smaller than that of a general polycrystalline film, and the carrier mobility. As a result, the detection performance is improved as compared with the conventional diamond sensor.

  Furthermore, an ultraviolet irradiation device according to the present invention for solving the above-mentioned problems is an ultraviolet irradiation device comprising the above-described ultraviolet light source device and irradiating ultraviolet rays generated by the ultraviolet light source device. .

  According to the ultraviolet irradiation device according to the present invention, the target product is irradiated with the ultraviolet rays generated by the ultraviolet light source device as described above. As a result, the lifetime of the ultraviolet light emission source can be accurately determined. As a result, not only can the situation that deteriorates the yield of the product, such as the output of the UV sensor change and damage the target product, but also the equipment must be maintained during the manufacturing of the target product. The situation can be avoided.

  As described above, according to the present invention, organic matter is decomposed and adheres to the sensor surface, water adsorbed on the sensor surface is dissociated and ionized, or the transmittance of the transmissive member changes. Even if the absolute value of the output of the sensor changes due to a cause such as the above, it is possible to accurately determine the lifetime of the ultraviolet light emission source without being influenced by these.

  In addition, in ultraviolet light source devices and ultraviolet irradiation devices that employ ultraviolet light sources, the life of the ultraviolet light source is accurately determined, and in these devices, the output of the ultraviolet sensor changes while the target product is being manufactured. Thus, it is possible to prevent a situation in which the yield of the product is deteriorated, such as damage to the target product. In addition, it is possible to avoid a situation where the ultraviolet light emission source has to be maintained while the target product is being manufactured.

  Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is an explanatory diagram showing a configuration of an ultraviolet light source device 10 according to the first embodiment of the present invention.

  With reference to FIG. 1, the ultraviolet light source device 10 according to the first embodiment of the present invention is intended to remove organic substances on the surface of a base material such as a glass base material in a manufacturing process of a thin TV such as a liquid crystal television. The ultraviolet light source 1, the reflecting mirror 2 that reflects the ultraviolet light 1 a generated by the ultraviolet light source 1, and the lamp box that houses the reflecting mirror 2 and the ultraviolet light source 1. 3, a transmission member 4 that is attached to the opening 3 a of the lamp box 3 and transmits the ultraviolet light 1 a generated by the ultraviolet light source 1, a measuring unit 5 that measures the ultraviolet light 1 a that has passed through the transmission member 4, and ultraviolet light emission A life determination system 6 for determining the life of the source 1 is provided.

  The ultraviolet light source 1 is a light source for generating ultraviolet light 1a, and a xenon excimer lamp is employed in this embodiment. This xenon excimer lamp has higher energy than the low-pressure mercury lamp and does not emit light other than 172 nm. Accordingly, all of the input energy becomes ultraviolet light emission having a wavelength of 172 nm, and the processing efficiency is high, so that it is possible to cope with the increase in the line speed due to the increase in the size of the base material. In addition, as in the case of using a low pressure mercury lamp, the temperature of the base material is not increased by absorbing the ultraviolet ray 1a having a wavelength not related to the processing to the base material, so that the base material can be processed at a low temperature. It is possible to prevent the substrate from being damaged due to the generation of thermal stress due to temperature rise.

  The reflecting mirror 2 is composed of a stainless steel plate or the like whose surface irradiated with the ultraviolet rays 1a generated by the ultraviolet light source 1 and irradiated downward is polished.

  The lamp box 3 houses the ultraviolet light emitting source 1 and the reflecting mirror 2 and is filled with nitrogen gas to prevent the ultraviolet light 1a from being absorbed by oxygen contained in the air in the lamp box 3. Yes.

  The transmission member 4 is a member that protects the ultraviolet light emission source 1 and transmits the ultraviolet light 1a generated by the ultraviolet light emission source 1, and is made of quartz glass in this embodiment.

  The measuring means 5 has a spectroscope 5a and an ultraviolet sensor 5b. The spectroscope 5a employs a wavelength selectable one such as a spectroscope using a diffraction grating, and the selected wavelength can be controlled from the outside. The ultraviolet ray 1a dispersed by the spectroscope 5a enters the ultraviolet sensor 5b, the intensity of which is measured, and an electrical signal relating to this intensity is sent to the life determination system 6 via the cable 5c. The ultraviolet sensor 5b is a sensor using a diamond thin film. In this embodiment, the ultraviolet sensor 1b measures the spectral shape of the ultraviolet light 1a generated by the ultraviolet light source 1 and transmitted through the transmitting member 4. The diamond thin film of the ultraviolet sensor 5b is composed of a highly oriented diamond layer, and both the crystal grain growth direction and the in-plane direction of the polycrystalline diamond are oriented in a fixed direction with respect to the substrate surface.

  Here, the diamond layer is preferably a highly oriented diamond layer having a (100) surface and crystal grains oriented in one direction with respect to the substrate. In that case, since the surface has a characteristic surface form in which flat (001) facets are arranged, the crystal defect density in the vicinity of the surface of this film is smaller than that of a general polycrystalline film, and the carrier mobility. As a result, the detection performance is improved as compared with the conventional diamond sensor.

  The lifetime determination system 6 is composed of a personal computer, and records the recording means 6a for recording and holding the spectrum shape of the ultraviolet ray 1a measured by the spectrum measuring means 5, and determines the lifetime of the ultraviolet light emission source 1 from the temporal change of the spectrum shape. And a life judging means 6b. The recording means 6a is composed of a hard disk of a personal computer, and records and holds the spectral shape of the ultraviolet light emitting source 1 at the time of replacement and the spectral shape of the ultraviolet light 1a measured by the spectrum measuring means 5 as numerical data. The life determination means 6b is composed of a CPU of a personal computer and its storage area, and the current spectral shape of the ultraviolet light source 1 is changed to the spectral shape of the ultraviolet light source 1 at the replacement time recorded in the recording means 6a. The lifetime of the ultraviolet light emission source 1 is determined by comparing whether or not it has reached.

  Next, with reference to FIGS. 1-3, the lifetime determination method of the ultraviolet light source 1 employ | adopted for the ultraviolet light source device 10 which concerns on 1st Embodiment, and its effect | action are demonstrated.

  With reference to FIG. 1, in the ultraviolet light source device 10 according to the first embodiment of the present invention, the transmitting member 4 transmits the ultraviolet light 1 a generated by the ultraviolet light emitting source 1, and the measuring means 5 includes the transmitting member 4. The spectrum shape of the ultraviolet ray 1a that has passed through is measured. The recording means 6a of the life determination system 6 constituted by a personal computer records and holds the spectrum shape of the ultraviolet ray 1a measured by the spectrum measuring means 5, and the current spectrum shape of the ultraviolet light source 1 is stored in the recording means 6a. The lifetime determination means 6b of the lifetime determination system 6 compares the recorded spectral shape of the ultraviolet emission source 1 at the replacement time to determine the lifetime of the ultraviolet emission source 1.

  FIG. 2 is a graph showing temporal changes in the spectral shape of the ultraviolet light source 1 of the ultraviolet light source device 10. According to this, the spectrum of the ultraviolet light emission source 1 shows a spread from 155 nm to 200 nm before use and after 2000 hours use, but after 2000 hours use, the emission spectrum shape itself changes, and the center The output decrease on the short wavelength side with respect to the wavelength is clear. In the present embodiment, the spectrum shape after 2000 hours of use is the spectrum shape at the time of replacement of the ultraviolet light source 1.

  FIG. 3 is a graph showing the temporal change of the ultraviolet transmittance of the transmissive member 4, and shows the change of the spectral transmittance before and after use of the quartz glass transmissive member 4 used in the xenon excimer lamp arc tube. It is. Thus, after 2000 hours of excimer lamp irradiation, the absorption is increased on the short wavelength side close to the cutoff wavelength of quartz glass.

  As described above, according to the ultraviolet light source device 10 and the lifetime determination method of the ultraviolet light source 1 according to the first embodiment of the present invention, the organic matter is decomposed by the ultraviolet light 1a and adhered to the sensor surface. Even if the absolute value of the sensor output changes due to the fact that water adsorbed on the sensor surface is dissociated and ionized, or the transmittance of the transmission member changes, it is not affected by these causes. Since the lifetime of the ultraviolet light source 1 is determined from the temporal change of the spectral shape with reference to the spectrum shape, the lifetime of the ultraviolet light source 1 can be accurately determined.

  In addition, in the ultraviolet light source device 10 and the ultraviolet irradiation device employing the ultraviolet light source 1, the output of the ultraviolet sensor changes during the production of the target product, and the product yield is deteriorated. Such a situation can be prevented. In addition, it is possible to avoid a situation in which the ultraviolet light emission source 1 must be maintained while the target product is being manufactured.

  Further, since the ultraviolet sensor 5b uses a diamond thin film, the ultraviolet light source device 10 having higher durability and stability can be obtained.

  Furthermore, the diamond thin film is composed of a highly oriented diamond layer, and the crystal grain growth direction and in-plane direction of polycrystalline diamond are both oriented in a fixed direction with respect to the substrate surface. Detection performance is improved.

  Here, with reference to FIG. 1, the ultraviolet light source device 10 which concerns on the 1st Embodiment of this invention, and the modification of the lifetime determination method of the ultraviolet light source 1 are demonstrated.

  In the ultraviolet light source device 10a and the method for determining the lifetime of the ultraviolet light emitting source 1 according to the modification of the first embodiment of the present invention, the measuring means 5 does not measure the entire spectrum of ultraviolet light, but transmits the transmissive member 4. Only the intensities for at least two different wavelengths are measured in the spectrum of the ultraviolet ray 1a transmitted through.

  The recording means 6a records and holds only the intensities for at least two different wavelengths measured by the measuring means 5.

  And the said lifetime determination means 6b determines the lifetime of the ultraviolet light emission source 1 from the time change of the intensity ratio with respect to at least two different wavelengths.

  In this modification, one of these at least two different wavelengths is set to a wavelength in the vicinity of the wavelength at which the intensity of the ultraviolet light source 1 reaches a peak, that is, 172 nm, which is the center wavelength of the xenon excimer lamp, One was a wavelength in the vicinity of the wavelength on the short wavelength side where the change with time was most observed, that is, 165 nm.

  FIG. 4 is a graph showing a temporal change in the intensity ratio of the intensity at 165 nm to the intensity at 172 nm. Referring to FIG. 4, this intensity ratio gradually decreases and decreases to approximately 45% after 2000 hours. Therefore, in this modification, the value of the intensity ratio of 165 nm to 172 nm is 45%, which is used as the determination value of the lifetime of the ultraviolet light source 1. The absolute value of the irradiation intensity at this time is 71% of the start of irradiation, which coincides with the recommended replacement time of the lamp.

  As described above, according to the lifetime determination method of the ultraviolet light source device 10a and the ultraviolet light emission source 1 according to the modification of the first embodiment of the present invention, even if the absolute value of the sensor output changes due to the above-described cause. The life of the ultraviolet light source 1 is determined from the temporal change of the intensity ratio on the basis of the intensity ratio of the ultraviolet light 1a that is not affected by these causes, and the ultraviolet light emission without measuring all the spectra. The lifetime of the source 1 can be accurately determined, and the apparatus can be simplified and the measurement time can be shortened.

  Next, the ultraviolet light source device 20 according to the second embodiment of the present invention will be described in detail with reference to FIG. FIG. 5 is an explanatory diagram showing the configuration of the ultraviolet light source device 20 according to the second embodiment of the present invention. Hereinafter, the same reference numerals will be given to the same configurations, and overlapping description will be avoided.

  Referring to FIG. 5, in the ultraviolet light source device 20 according to the second embodiment of the present invention, the measuring unit 25 includes at least two filters 25d that transmit different wavelengths, and a switching unit 25e that switches between the filters 25d. And an ultraviolet sensor 25b.

  The ultraviolet sensor 25b employs an ultraviolet sensor using a diamond thin film similar to the ultraviolet sensor 5b of the ultraviolet light source device 10 according to the first embodiment.

  The filter 25d employs a spectral filter that selectively transmits only the target wavelength instead of the spectroscope 5a.

  The switching means 25e has a disk-shaped disk 25f and a rotation mechanism 25g such as a motor, and appropriately switches the two filters 25d provided on the disk 25f by rotating them using the rotation mechanism 25g. The intensity of the ultraviolet ray 1a is measured.

  The ultraviolet ray 1a selected by the filter 25d enters the ultraviolet sensor 25b of the measuring means 25, and the intensity is recorded. The measurement is performed sequentially by switching the filter 25d, and the intensity ratio between the two becomes a certain value. By the way, as described above, it is determined that the lifetime is reached.

  In the ultraviolet light source device 20 according to the second embodiment of the present invention, the target wavelengths of 165 nm and 172 nm are the same, but since the transmission wavelength region of the filter 25d is large, the ultraviolet light according to the first embodiment described above. It is higher than the determination value 45% of the modified example of the light source device 10, and becomes 70% in 2000 hours. Therefore, in the second embodiment, the lifetime of the ultraviolet light emitting source 1 is determined with a value of 75% of the intensity ratio of the intensity at 165 nm to the intensity at 172 nm. As a result of determining the lifetime of the ten lamps using this value as a determination value, a favorable determination result was obtained.

  As described above, according to the ultraviolet light source device 20 according to the second embodiment of the present invention, the measuring unit 5 includes at least two filters 25d that transmit different wavelengths, a switching unit 25e that switches the filter 25d, and a filter. Since it is configured to include an ultraviolet sensor 25b that measures the intensity of ultraviolet light that has passed through 25d, the intensity of at least two different wavelengths of ultraviolet light 1a that has passed through the transmitting member 4 can be easily measured with a single sensor. Will be able to.

  FIG. 6 is an explanatory diagram showing the configuration of the ultraviolet light source device 30 according to the third embodiment of the present invention. Referring to FIG. 6, an ultraviolet light source device 30 according to the third embodiment of the present invention includes a calibration ultraviolet light source 31, and a measuring unit 25 is a transmission member generated by the calibration ultraviolet light source 31. 4 is measured from the change in the standard ultraviolet ray 31a that has passed through 4, and the ultraviolet absorptivity due to the ultraviolet deterioration of the transmissive member 4 is measured. By doing so, the lifetime of the ultraviolet light emitting source 1 is determined by removing the influence of the ultraviolet deterioration of the transmitting member 4.

  Further, the ultraviolet light source device 30 transmits the light by measuring the ultraviolet absorptivity due to the ultraviolet deterioration of the transmission member 4 from the change of the standard ultraviolet light 31a generated in the calibration ultraviolet light source 31 and transmitted through the transmission member 4 in this way. It is also configured to determine the life of the member.

  Here, the calibration ultraviolet light source 31 emits standard ultraviolet light 31a having a constant spectrum by emitting light at the time of life determination. As the calibration ultraviolet light source 31, for example, when the transmitting member 4 is quartz glass, a xenon excimer lamp having a wavelength close to the cutoff of the quartz glass is preferably used.

  As described above, according to the ultraviolet light source device 30 according to the third embodiment of the present invention, for example, when the processing ultraviolet light source 1 is turned off, the calibration has a smaller output than the processing ultraviolet light source 1. The standard ultraviolet ray 31a is transmitted through the transmissive member 4 from the ultraviolet light source 31 and the change in the spectrum of the standard ultraviolet ray 31a or the change in the intensity ratio at a specific wavelength is measured to determine the ultraviolet deterioration of the transmissive member 4. It becomes possible. As a result, the intensity of the ultraviolet light 1a generated by the ultraviolet light source 1 and transmitted through the transmission member 4 is corrected by the ultraviolet absorption rate due to the ultraviolet deterioration of the transmission member 4, and the influence of the ultraviolet deterioration of the transmission member 4 is removed. Since the lifetime of the ultraviolet light source 1 is determined, the ultraviolet light source device that determines the lifetime of the ultraviolet light source 1 from the temporal change in the spectral shape of the ultraviolet light 1a transmitted through the transmission member 4 and the temporal change in the intensity ratio for different wavelengths. The lifetime of the ultraviolet light source can be determined with higher accuracy than 10, 10a and 20. As described above, by examining only the deterioration state of the transmission member 4 in more detail, it is possible to perform highly accurate measurement.

  Furthermore, according to the ultraviolet light source device 30 according to the third embodiment of the present invention, the lifetime of the transmissive member is determined by measuring the ultraviolet absorption rate due to the ultraviolet degradation of the transmissive member 4, so that only the transmissive member 4 is present. It is possible to prevent the apparatus and the substrate to be treated from being damaged by appropriately determining the deterioration of the substrate and replacing the transmissive member 4 before damaging the substrate to be treated. Moreover, since the very expensive transmission member 4 can be used until the end of its lifetime, it is economical.

  The above-described embodiment is merely a preferred specific example of the present invention, and the present invention is not limited to the above-described embodiment.

  For example, in the above-described embodiments, the ultraviolet light source 1 employs a xenon excimer lamp having a light emission wavelength close to the cutoff wavelength of the quartz glass transmission member 4 in particular, but a low-pressure mercury lamp or other ultraviolet light emission. Application to Source 1 is not excluded.

  In the above-described embodiment, the transmissive member 4 is made of quartz glass, but other materials can be used.

  The transmitting member 4 is a concept that includes all the transmitting members 4 in the optical path until the irradiated ultraviolet ray 1a is irradiated to the irradiated object, and protects the ultraviolet light emitting source 1 and the ultraviolet light emitting source. 1 is not necessarily applied to the window provided in the lamp box 3 as long as it is a member that transmits the ultraviolet light 1 a generated in the lamp 1. For example, the tube member of the ultraviolet ray 1a lamp can be used as the transmission member 4.

  Further, the calibration ultraviolet light source 31 is not limited to one, and includes a calibration ultraviolet light source for determining the life of the ultraviolet light source 1 and a calibration ultraviolet light source for determining the life of the transmission member. It is also possible to provide each.

  Similarly, apart from the measuring means 5 for determining the lifetime of the ultraviolet light emitting source 1, a measuring means for determining the lifetime of the transmitting member 4 can be provided independently.

  Furthermore, although embodiment mentioned above demonstrated the lifetime determination method of ultraviolet light source device 10, 10a, 20, 30 and each ultraviolet light emission source 1, this invention is said ultraviolet light source device 10, 10a, 20, and 30. The present invention is also applied to an ultraviolet irradiation device characterized in that the target product is irradiated with ultraviolet rays 1a generated by the ultraviolet light source devices 10, 10a, 20, and 30.

  According to such an ultraviolet irradiation device, since the target product is irradiated with the ultraviolet ray 1a generated by the ultraviolet light source devices 10, 10a, 20, and 30 as described above, the lifetime of the ultraviolet light source 1 is accurately determined. As a result of the determination, not only can the situation that deteriorates the yield of the product, such as the output of the UV sensor change and damage the target product during the production of the target product, but also during the production of the target product can be prevented. It is possible to avoid a situation in which the apparatus must be maintained.

  In addition, it goes without saying that various design changes are possible within the scope of the claims of the present invention.

It is explanatory drawing which shows the structure of the ultraviolet light source device which concerns on the 1st Embodiment of this invention. It is a graph which shows the time change of the spectrum shape of the ultraviolet light source of an ultraviolet light source device. It is a graph which shows the time change of the ultraviolet-ray transmittance of a transmissive member, and has shown the change of the spectral transmittance before and behind use of the quartz glass transmissive member used for a xenon excimer lamp arc tube. It is the graph which showed the time change of the intensity ratio with respect to the intensity | strength of 172 nm of the intensity | strength of 165 nm. It is explanatory drawing which shows the structure of the ultraviolet light source device which concerns on the 2nd Embodiment of this invention. It is explanatory drawing which shows the structure of the ultraviolet light source device which concerns on the 3rd Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Ultraviolet light source 1a Ultraviolet light 4 Transmission member 5 Measuring means 6a Recording means 6b Life determination means 10, 10a, 20, 30 Ultraviolet light source device 25b Ultraviolet sensor 25c Filter 25d Switching means 31 Calibration ultraviolet light source 31a Standard ultraviolet light

Claims (15)

In an ultraviolet light source that irradiates ultraviolet rays through a transmitting member that transmits ultraviolet rays,
A method for determining the lifetime of an ultraviolet light source, wherein the lifetime of the ultraviolet light source is determined from a temporal change in the spectral shape of the ultraviolet light transmitted through the transmitting member. In an ultraviolet light source that irradiates ultraviolet rays through a transmitting member that transmits ultraviolet rays,
A method for determining a lifetime of an ultraviolet light source, wherein the lifetime of the ultraviolet light source is determined from a temporal change in intensity ratio of at least two different wavelengths of ultraviolet light transmitted through the transmitting member. A method for determining the lifetime of an ultraviolet light source according to claim 2,
Of the at least two different wavelengths, one is a wavelength in the vicinity of the wavelength at which the intensity of the ultraviolet light source reaches a peak, and at least one of the remaining wavelengths is a wavelength in the vicinity of the wavelength that is most likely to change over time. A method for determining the lifetime of an ultraviolet light source. It is the lifetime determination method of the ultraviolet-ray light source in any one of Claims 1 thru | or 3, Comprising:
A method for determining the lifetime of an ultraviolet light source, wherein the ultraviolet light source is a xenon excimer lamp. A method for determining the lifetime of an ultraviolet light source according to any one of claims 1 to 4,
The method for determining the lifetime of an ultraviolet light source, wherein the transmitting member is quartz glass. A method for determining the lifetime of an ultraviolet light emitting source according to any one of claims 1 to 5,
From the change in standard UV light generated by the calibration UV light source that generates standard UV light and transmitted through the transmission member, the UV absorption rate due to UV deterioration of the transmission member is measured, and this UV light absorption rate is generated at the UV light source. A method for determining the lifetime of an ultraviolet light source, wherein the lifetime of the ultraviolet light source is determined by correcting the intensity of the ultraviolet light transmitted through the transmission member to eliminate the influence of ultraviolet degradation of the transmission member. The method for determining the lifetime of an ultraviolet light source according to claim 6,
An ultraviolet light source characterized in that the lifetime of a transmissive member is determined by measuring an ultraviolet absorptivity due to ultraviolet deterioration of the transmissive member from a change in standard ultraviolet light generated by the calibration ultraviolet light source and transmitted through the transmissive member. Life judgment method. An ultraviolet light source that generates ultraviolet light;
An ultraviolet light source device comprising a transmitting member that transmits ultraviolet light generated by the ultraviolet light source;
Measuring means for measuring the spectral shape of the ultraviolet light generated by the ultraviolet light source and transmitted through the transmitting member;
Recording means for recording and holding the spectrum shape of ultraviolet rays measured by the spectrum measuring means;
An ultraviolet light source apparatus comprising: life determination means for determining the life of the ultraviolet light emission source from the temporal change of the spectrum shape. An ultraviolet light source that generates ultraviolet light;
An ultraviolet light source device comprising a transmitting member that transmits ultraviolet light generated by the ultraviolet light source;
Measurement means for measuring the intensity of at least two different wavelengths of ultraviolet light transmitted through the transmission member;
Recording means for recording and holding the intensity measured by the measuring means;
An ultraviolet light source apparatus comprising: life determination means for determining the life of the ultraviolet light emission source from the temporal change of the intensity ratio with respect to the at least two different wavelengths. The ultraviolet light source device according to claim 9,
The measuring means includes at least two filters that transmit different wavelengths;
Switching means for switching the filter;
An ultraviolet light source device comprising: an ultraviolet sensor that measures the intensity of ultraviolet light that has passed through a filter. The ultraviolet light source device according to any one of claims 8 to 10,
Equipped with a calibration UV light source that generates standard UV light,
The measuring means measures the ultraviolet absorptivity due to the ultraviolet degradation of the transmitting member from the change in standard ultraviolet rays generated by the calibration ultraviolet light source and transmitted through the transmitting member, and is generated at the ultraviolet light source by the ultraviolet absorption rate. An ultraviolet light source device characterized by determining the lifetime of the ultraviolet light emission source from which the influence of ultraviolet deterioration of the transmission member is removed by correcting the intensity of ultraviolet light transmitted through the transmission member. The ultraviolet light source device according to claim 11,
An ultraviolet light source device characterized in that the lifetime of a transmission member is determined by measuring an ultraviolet absorptivity due to ultraviolet deterioration of the transmission member from a change in standard ultraviolet rays generated by the calibration ultraviolet light source and transmitted through the transmission member. The ultraviolet light source device according to any one of claims 8 to 12,
The ultraviolet light source device, wherein the measuring means includes an ultraviolet sensor using a diamond thin film. The ultraviolet light source device according to claim 13,
The ultraviolet light source device, wherein the diamond thin film comprises a highly oriented diamond layer.   An ultraviolet irradiation device comprising the ultraviolet light source device according to claim 8 and irradiating ultraviolet rays generated by the ultraviolet light source device.

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