JP2006242680A - Eccentricity measuring device and eccentricity measurement method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To precisely measure the amount of lateral shift of the center axis of an outer-periphery surface to the light axis of a lens to be inspected while restraining the deviation between the light axis of the lens and a rotary axis to a negligible degree. <P>SOLUTION: In an eccentricity measuring device 1, an αβ adjustment stage 3 and an XY stage 4 are fixed to a spindle 2 successively, and a lens W to be inspected is held by a lens holder 6 fixed to a lens holder fixing member 5 on the XY stage 4 by suction, or the like. When measuring eccentricity, the center of curvature of a lens surface Wa in the lens W to be inspected is allowed to coincide with the rocking center of the αβ adjustment stage 3 before starting measurement. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an eccentricity measuring apparatus and an eccentricity measuring method for measuring a lateral deviation amount of a central axis of an outer peripheral surface of a lens with respect to an optical axis of the lens.

  When manufacturing a lens such as a spherical lens, polishing and centering are performed. Strictly speaking, the optical axis of the lens (the axis connecting the centers of curvature of both lens surfaces) matches the central axis of the outer peripheral surface of the lens. There is often no lateral shift, often referred to as eccentricity. Since the lens is fixed by fitting its outer peripheral surface to the lens frame, the lateral shift that occurs between the optical axis and the central axis of the outer peripheral surface is a major factor that deteriorates the optical performance of the optical system incorporating the lens. . For this reason, it is necessary to measure the amount of lateral displacement of the lens and grasp whether the value is within an allowable range for ensuring the optical performance of the optical system.

  In order to measure the lateral deviation of the central axis of the outer peripheral surface of the lens with respect to the optical axis of the lens, the inclination of the optical axis of the lens to be inspected (hereinafter referred to as the test lens) is removed, and the light of the test lens There is known a method of reading the displacement of the outer peripheral surface of the lens to be examined by matching the axis with the rotation axis of the lens to be examined. Here, in this method, it is necessary to first match the optical axis of the lens to be examined with the rotation axis accurately. As a means for matching the optical axis of the lens to be examined with the rotation axis, for example, there is an eccentricity measuring apparatus 101 as shown in FIG. The eccentricity measuring apparatus 101 includes a lens holder 103 that holds the lens 102 to be tested, a spindle 104 that rotationally drives the lens holder 103, and an eccentricity that measures the inclination of the optical axis of the lens 102 to be tested with respect to the rotation axis 104 a of the spindle 104. And a measuring unit 105. The center axis of the lens holder 103 is coaxially processed with respect to the rotation axis 104a of the spindle 104. When the lens holder 103 supports the test lens 102, the center of curvature of the lens surface 102b on the lens holder 103 side is Theoretically, it is always on the axis of the rotating shaft 104a. Then, while rotating the lens holder 103 and observing the center of curvature of the lens surface 102a of the lens 102 to be tested by the eccentricity measuring unit 105, the operator adjusts the inclination of the lens 102 to be tested and the center of curvature of the lens surface 102a is adjusted. Adjust so that does not rotate. In this way, the optical axis of the test lens 102 and the rotation axis 104a of the spindle 104 are matched.

FIG. 11 shows another configuration of the conventional eccentricity measuring apparatus. The eccentricity measuring device 111 includes a moving mechanism 115 that moves the lens holder 113 in the horizontal direction with respect to the rotation shaft 104a of the spindle 104, and a tilt adjusting mechanism 116 that adjusts the tilt of the lens holder 113 in the horizontal direction. Yes (see, for example, Patent Document 1). In this eccentricity measuring device 111, a parallel flat plate is placed on the upper surface of the lens holder 113, and the tilt adjustment mechanism 116 is adjusted while measuring by the eccentricity measuring unit 105, and the upper surface of the lens holder 113 is adjusted to the rotating shaft 104 a of the spindle 104. Perpendicular to. Next, a reference spherical surface is placed on the lens holder 113, and the horizontal position of the lens holder 113 is adjusted by the moving mechanism 115 while performing the measurement by the eccentricity measuring unit 105, and the central axis of the lens holder 113 is set as the rotation axis of the spindle 104. Match with 104a. In this way, even if the lens holder 113 is replaced, the center axis of the lens holder 113 can be immediately made coaxial with the rotation axis 104a of the spindle 104, and the lens on the lens holder 113 side of the lens 102 to be examined. The center of curvature of the surface 102b can theoretically be on the axis of the rotating shaft 104a. Thereafter, the operator adjusts the inclination of the test lens 102 so that the optical axis of the test lens 102 coincides with the rotation axis 104 a of the spindle 104.
Japanese Patent Laid-Open No. 9-288041

However, the conventional eccentricity measuring apparatuses 101 and 111 have the following problems.
When the optical axis of the test lens 102 is aligned with the rotation axis 104 a of the spindle 104, the center of curvature of the lens surface 102 b on the lens holder 103, 113 side is theoretically on the rotation axis 104 a of the spindle 104. However, the circular edges of the lens holders 103 and 113 that receive the lens surface 102b are scratched or dust or dust is sandwiched when the lens 102 is held by the lens holders 103 and 113. In the case where the rotation occurs, the center of curvature of the lens surface 102b often does not coincide with the rotation axis 104a. In such a case, since the deflection of the central axis of the outer peripheral surface of the test lens 102 with respect to the optical axis of the test lens 102 is measured in a state where the optical axis is tilted, accurate measurement cannot be performed. . Such a shift does not cause a problem when the allowable range of the lateral shift amount of the central axis of the outer peripheral surface of the test lens 102 with respect to the optical axis of the test lens 102 is large, but in a test lens that requires high accuracy. Is a big problem.

Further, in the eccentricity measuring unit 105, it is considered that the adjustment is completed if the center of curvature of the lens surface 102b coincides with the rotation axis 104a while observing the lens surface 102b on the lens holder 103, 113 side. Since the lens surface 102b on the 113 side is observed under the influence of the lens surface 102a, unless the center of curvature of the lens surface 102a coincides with the rotation axis 104a, the center of curvature of the lens surface 102b is correctly set. It cannot be made to coincide with the rotating shaft 104a.
As described above, the conventional eccentricity measuring apparatuses 101 and 111 cannot easily and accurately measure the amount of lateral deviation of the central axis of the outer peripheral surface of the test lens 102 with respect to the optical axis of the test lens 102. .

  The present invention has been made in view of such circumstances. The main object of the present invention is to measure the lens even if the lens holder is scratched or the measurement is performed with dust in between. The amount of lateral deviation of the central axis of the outer peripheral surface with respect to the optical axis of the lens to be measured is measured with high accuracy while suppressing the deviation between the optical axis and the rotation axis to a negligible level.

The invention according to claim 1 of the present invention that solves the above-described problems includes a lens holding member that holds a lens to be tested, a rotation drive mechanism that rotates the lens holding member, and the lens with respect to the rotation shaft of the rotation drive mechanism. A holding mechanism that adjusts the horizontal position of the holding member, a tilt holding mechanism that adjusts the horizontal holding of the lens holding member and the moving mechanism with respect to the rotation shaft of the rotation driving mechanism, and a holding mechanism held by the lens holding member. Further, an eccentricity detecting means for observing the eccentricity of both surfaces of the subject lens with respect to the rotational axis of the rotational drive mechanism, and an outer periphery shake measuring means for measuring the lateral deviation amount of the central axis of the outer peripheral surface with respect to the optical axis of the subject lens. And the center of curvature of the lens surface of the lens to be tested on the side of the eccentricity detection means is high so that the center of curvature of the lens holding member coincides with the center of oscillation of the tilt adjustment mechanism. There was an eccentric measuring device characterized in that it is set.
In this decentering measuring device, when measuring the decentering of the lens to be tested, the center of curvature of the lens surface on the lens decentering detecting means side is made to coincide with the swing center of the adjusting mechanism, so that the optical axis of the lens to be tested The lens to be tested can be rotated around the rotation axis in a state where the deviation from the rotation axis is negligible. For this reason, the shake amount of the central axis of the outer peripheral surface of the lens to be measured is accurately measured.

According to a second aspect of the present invention, in the eccentricity measuring apparatus according to the first aspect, the lens holding member is configured to be detachable from the moving mechanism, and the curvature of the lens surface on the side of the eccentricity detecting unit of the lens to be measured is determined. It is possible to change to a corresponding lens holding member.
In this decentration measuring apparatus, the lens holding member is exchanged when performing decentration measurement of a lens to be examined having a different curvature. Even when the lens holding member is replaced, the eccentricity measurement can be performed with high accuracy by starting the measurement with the moving mechanism and the tilt adjusting mechanism in such a manner that the center of curvature of the lens to be inspected coincides with the swing center of the tilt adjusting mechanism.

According to a third aspect of the present invention, there is provided a moving mechanism for adjusting a horizontal position of the lens holding member with respect to the rotating shaft of the rotation driving mechanism, and a horizontal direction of the lens holding member and the moving mechanism with respect to the rotating shaft of the rotating driving mechanism. The optical axis of the test lens coincides with the rotation axis of the rotation drive mechanism by a tilt adjustment mechanism that adjusts the tilt of the lens and an eccentricity detection unit that observes the eccentricity of both surfaces of the test lens held by the lens holding member. Thus, the eccentricity measuring method is characterized in that the deflection amount of the central axis of the outer peripheral surface with respect to the optical axis of the lens to be examined is measured.
In this decentering measurement method, first, the optical axis of the test lens is aligned with the rotation axis of the rotation drive mechanism, thereby preventing shake during rotation of the test lens, and then the central axis of the outer peripheral surface of the test lens. Therefore, the shake amount of the central axis of the outer peripheral surface of the lens to be measured is accurately measured.

According to a fourth aspect of the present invention, in the eccentricity measuring method according to the third aspect, when the optical axis of the test lens coincides with the rotation axis of the rotation drive mechanism, the test lens is moved horizontally. Alternately performing the step of matching the center of curvature of the lens surface with the rotation axis and the step of adjusting the tilt of the lens to be tested to match the center of curvature of the other lens surface with the rotation axis. It is characterized by.
In this eccentricity measuring method, the optical axis of the test lens gradually approaches the rotation axis of the rotation drive mechanism by alternately performing horizontal movement of the test lens and adjustment of the tilt of the test lens at least once. The difference between the optical axis and the rotation axis is negligible.

  According to the present invention, since it becomes easy to adjust the inclination and lateral deviation of the optical axis of the test lens with respect to the rotation axis to a negligible level, the center of the outer peripheral surface of the test lens with respect to the optical axis of the test lens The amount of lateral deviation of the shaft can be measured with high accuracy.

(First embodiment)
A first embodiment of the present invention will be described in detail with reference to the drawings. 1 is a perspective view showing a schematic configuration of the eccentricity measuring apparatus, and FIG. 2 is a side view. 3 to 6 are front views showing in a stepwise manner the process of correcting the inclination and lateral deviation of the lens to be examined with respect to the rotation axis.
As shown in FIGS. 1 and 2, the eccentricity measuring apparatus 1 has a spindle 2 that constitutes a rotary drive mechanism together with a drive source (not shown), and an upper part of the spindle 2 is orthogonal to the rotation axis 2 a of the spindle 2. An αβ swinging stage 3 (tilting adjustment mechanism) that can move in a tilt direction (αβ direction in the figure) with respect to a plane (horizontal plane) is fixed. The αβ swing stage 3 is configured by vertically stacking an α-axis direction table 3a movable in the α-direction and a β-axis direction table 3b movable in the β-direction, and swinging each of the tables 3a and 3b. The center is installed so as to coincide with the rotation axis 2 a of the spindle 2. On the αβ swing stage 3, an XY stage 4 that is movable in the horizontal direction (XY direction in the figure) is fixed. The XY stage 4 is a moving mechanism configured by stacking an X-axis direction table 4a that can move in parallel in the X-axis direction and a Y-axis direction table 4b that can move in parallel in the Y direction. Further, a lens holder fixing member 5 is fixed on the XY stage 4. A cylindrical lens holder 6 (lens holding member) is detachably fixed on the lens holder fixing member 5, and the lower surface of the lens W to be tested (on the upper end portion of the hollow portion at the center of the lens holder 6). Adsorption means (not shown) for adsorbing and holding the lens surface Wb) is provided.

  Here, as means for fixing the lens holder 6 to the lens holder fixing member 5, for example, a male screw is provided in the center of the lens holder fixing member 5 and at a position coincident with the rotation shaft 2a, and the same diameter as this male screw. In addition, it is possible to provide a female screw having the same pitch on the inner peripheral portion of the lower portion of the lens holder 6. Further, the height of the lens holder 6 is such that there is no inclination and lateral shift between the lens W 6 held by the lens holder 6 and the lens holder 6 and the optical axis of the lens W is coincident with the rotation axis 2a. In addition, the center of curvature of the upper surface (lens surface Wa) of the lens W to be tested and the center of swing of the αβ swing stage 3 are determined to coincide with each other.

  In addition, above the lens holder 6, that is, above the lens W to be tested, an eccentricity detecting means 7 used for confirming the eccentricity of both lens surfaces Wa and Wb of the lens W to be tested with respect to the rotating shaft 2 a of the spindle 2. is set up. As shown in FIG. 2, the eccentricity detection means 7 includes a measurement light source 11, and a chart (hereinafter referred to as a target) 12, a daylighting lens 13, and a half prism are arranged on the optical path of light emitted from the measurement light source 11. 14 are arranged in order, and an image (target image) obtained by irradiating the light from the measurement light source 11 to the target 12 is made incident on the daylighting lens 13, and is reflected on the test lens W by the reflection of the half prism 14. It is made to enter. Further, above the half prism 14, an image is formed with an imaging lens 15 that focuses reflected light that is reflected by the lens W to be tested and passes through the half prism 14 to form a target image. A magnifying lens 16 for enlarging the target image to be enlarged and a television camera 17 for projecting the target image to be magnified and formed are arranged in order. The output signal of the television camera 17 is connected to the computer 18. The computer 18 incorporates an image processing circuit, and is configured to display the image of the reflected target image on the monitor 19 by performing image processing on the target image reflected by the lens W to be examined. The decentering detecting means 7 can approach or be separated from the lens W to be measured by means not shown so that the object point position can be adjusted to the imaged target image position.

  Further, as shown in FIG. 1, on the side of the test lens W, there is provided an outer shake measuring means 8 for measuring a lateral shift of the outer peripheral surface Wc of the test lens W with respect to the optical axis of the test lens W. . The peripheral shake measuring means 8 is arranged such that the light source 8a and the light receiving portion 8b sandwich the lens W to be tested from the side. The light source 8a emits light so that a part of the light is shielded by the outer peripheral surface Wc of the test lens W, and the light receiving unit 8b receives this light and outputs a signal corresponding to the amount of light. It is possible to measure the outer peripheral shake of the test lens W in a non-contact manner. The peripheral shake measuring means 8 is a means (not shown) so that the height can be adjusted according to the position of the test lens W, and can be moved up and down along the optical axis of the test lens W.

A method for measuring the lateral deviation amount of the central axis of the outer peripheral surface Wc with respect to the optical axis of the lens W to be tested, which is performed using such an eccentricity measuring apparatus 1, will be described.
First, the operator screws and fixes the female screw of the lens holder 6 corresponding to the lens W to be measured to the male screw of the lens holder fixing member 5. Then, the test lens W is held by suction on the fixed lens holder 6. At this time, the optical axis of the lens W to be tested is inclined with respect to the rotation axis 2 a of the spindle 2 and is shifted laterally depending on the position of the lens holder 6. Here, as shown in FIG. 3, the amount of deviation between the center of curvature of the lens surface Wb of the lens W to be examined and the rotation axis 2a of the spindle 2 and in the direction perpendicular to the rotation axis 2a (hereinafter, referred to as “the amount of deviation”) is referred to as lateral deviation amount) delta, the inclination angle of the optical axis of the lens W with respect to the rotation shaft 2a is defined as theta _0.

Next, as shown in FIG. 4, in the state where the center of curvature of the lens surface Wb of the test lens W and the rotation axis 2a coincide (Δ = 0), the lens surface Wa and the lens surface Wb of the test lens W are the distance between the center of curvature L, and the amount of lateral deviation of the rotation axis 2a and the center of curvature of the lens surface Wa of the lens W is defined as X _0, the following equation holds.
X ₀ = L × sin θ ₀ (1)

Here, the eccentricity detecting means 7 is moved close to or away from the lens W to be observed so that the target image reflected by the lens surface Wa of the lens W can be observed on the monitor 19, and then the spindle 2 is rotated. When, on a circle having a radius proportional to delta + X ₀ target image is rotated. In this state, the target image is observed in an eccentric state. Accordingly, when the test lens W is moved horizontally by Δ + X ₀ while watching the target image displayed on the monitor 19, the center of curvature of the lens surface Wa of the test lens W is the rotation axis of the spindle 2. Since it corresponds to 2a, the rotational shake of the target image can be stopped. At this time, as shown in FIG. 5, the distances between the curvature centers of the lens surface Wa and the lens surface Wb of the lens W to be examined and the oscillation center of the αβ oscillation stage 3 are R ₁ and R ₂ , respectively. When the inclination angle between the center of curvature and the rotation axis 2a of the αβ swinging stage 3 of the swing center and a line connecting the spindles 2 of the phi _1, the following expression holds.
sinφ ₁ = X ₀ / R ₂ (2)

Next, the decentering detection means 7 is moved closer to or away from the test lens W so that the target image reflected by the lens surface Wb of the test lens W can be observed on the monitor 19, and then the spindle 2 is rotated. Then, the target image rotates on a circle having a radius proportional to the optical axis inclination θ ₀ of the lens W to be examined. Therefore, while watching the target image displayed on the monitor 19, when tilting the sample lens W by phi ₁ by αβ swinging stage 3, the center of curvature of the lens surface Wb of the lens W is the rotating shaft 2a of the spindle 2 Thus, the rotational shake of the target image can be stopped. At this time, as shown in FIG. 6, when the lateral deviation amount of the center of curvature and the rotation axis 2a of the lens surface Wa of the lens W and X _1, the following expression holds.
sinφ ₁ = X ₁ / R ₁ (3)
Here, the following equation is established from the equations (2) and (3).
X ₁ = (R ₁ / R ₂ ) × X ₀ (4)

From the equation (4), when R ₁ <R ₂ , the relationship X ₁ <X ₀ is established. For this reason, when the lens surface Wa of the test lens W coincides with the rotation axis 2 a, the center of curvature of the lens surface Wa and the lens surface Wb of the test lens W and the swing center of the αβ swing stage 3. When the distance of the lens surface Wa is closer to the center of swing due to the distance, the lateral deviation amount X between the center of curvature of the lens surface Wb after the angle correction of the lens W to be tested by the αβ swing stage 3 and the rotary shaft 2a ₁ is smaller than the lateral shift amount X ₀ before angle modification. Further, when the inclination angle of the optical axis after the angle modification of the lens W by αβ swinging stage 3 and theta _1, the following expression holds.
X ₁ = L × sin θ ₁ (5)

From the expressions (1) and (5) and X ₀ > X ₁ , the relation θ ₀ > θ ₁ is established. Therefore, the inclination θ ₁ of the optical axis of the test lens W after the angle correction by the αβ swing stage 3 is smaller than the angle θ ₀ before the angle correction.
Further, from the equation (4), it can be seen that when R ₁ → 0, X ₁ and θ ₁ become smaller. As described above, the height of the lens holder 6 is such that the center of curvature of the lens surface Wa of the test lens W and the swing center of the αβ swing stage 3 when the optical axis of the test lens W coincides with the rotation axis 2a. since it is configured such bets are matched, the value of R ₁ is determined by the slope of the time held in the first lens holder 6 to the sample lens W, it is expressed by the following equation.
R ₁ = L × (1-cos θ ₀ ) (6)

When the test lens W is held in the lens holder 6, R ₁ can be set to a small value if the operator installs the test lens W so that the tilt of the test lens W is small. Therefore, if the correction of the center of curvature of the lens surface Wa by the XY stage 4 and the correction of the center of curvature of the lens surface Wb by the αβ swing stage 3 are repeated several times while observing with the eccentricity detecting means 7, the spindle 2 The inclination and lateral deviation of the optical axis of the lens W to be measured with respect to the rotation axis 2a can be reduced to a negligible value. Note that the target center position when the target image reflected by the lens W is moved may be obtained by performing image processing on the trajectory of the target image with the computer 18 and calculating.

  In this way, after the optical axis of the test lens W and the rotation axis 2a of the spindle 2 are matched, the outer peripheral shake measuring means 8 is adjusted to the height of the test lens W and the spindle 2 is rotated. When the position of the outer peripheral surface Wc is displaced during rotation of the test lens W, the amount of light received by the light receiving unit 8b changes, so that the amount of light obtained by the light receiving unit 8b of the outer peripheral shake measuring means 8 is The lateral deviation amount of the central axis of the outer peripheral surface Wc with respect to the optical axis of the test lens W can be measured. Then, it is confirmed whether or not the lateral deviation amount of the outer peripheral surface Wc is within a predetermined allowable range.

  Further, when performing decentration measurement on the test lens W having different curvatures, the lens holder 6 matched to the curvature of the test lens W is mounted on the lens holder fixing member 5 and measurement is performed in the same procedure as described above. .

According to this embodiment, while the optical axis of the test lens W is actually measured by the eccentricity detecting means 7, the αβ swing stage 3 and the XY stage 4 are operated and adjusted, whereby the light of the test lens W is adjusted. The axis can coincide with the rotation axis 2 a of the spindle 2. Therefore, the lateral deviation amount of the central axis of the outer peripheral surface Wc with respect to the optical axis of the lens W can be measured with high accuracy.
In addition, since the non-contact outer peripheral shake measuring means 8 is used for measuring the lateral deviation amount of the outer peripheral surface Wc, the optical axis of the test lens W is shifted during the outer peripheral shake measurement even for the minute test lens W. There is no end.

(Second Embodiment)
A second embodiment of the present invention will be described in detail with reference to the drawings. 7 is a perspective view showing a schematic configuration of the eccentricity measuring apparatus, and FIG. 8 is a side view. FIG. 9 is a plan view showing a state in which the test lens is placed on the lens holder. The cross section in FIG. 8 is a cross section along the AOB line shown in FIG. In this embodiment, the same components as those in the first embodiment are denoted by the same reference numerals. In addition, overlapping description is omitted.

  As shown in FIGS. 7 to 9, the eccentricity measuring device 20 includes a lens holder 6 that holds the lens W to be tested, and a male screw is formed on a lower outer peripheral surface of the lens holder 6 whose diameter is reduced. This male screw is attachable to and detachable from a round ant 21 having a female screw having the same outer diameter and the same pitch on the inner peripheral surface. The round ant 21 is supported so as to be movable in the horizontal direction (XY direction in the figure) in a recess formed by the upper surface of the αβ swing stage 3 and the circular member 22 fixed to the αβ swing stage 3. It is stored in a state in which the inclined outer peripheral surface is sandwiched between two movable knobs 23 that can be moved forward and backward and one pressing member 24. The moving knob 23 is screwed into a threaded portion formed on the circular member 22 and can move forward and backward with respect to the round ant 21 by rotation. A force that always presses the round ant 21 against the two moving knobs 23 acts on the pressing member 24 by a compression spring 25 in the cylindrical member 24 a fixed to the outer peripheral side surface of the circular member 22. The two moving knobs 23 and the pressing member 24 are provided so as to form an angle of 120 ° toward the center of the circular member 22, and the test lens W is moved in the horizontal direction by operating the two moving knobs 23. It is possible.

  Further, a pick tester 26 is provided as an outer peripheral shake measuring means for measuring the lateral deviation amount of the central axis of the outer peripheral surface with respect to the optical axis of the lens W to be tested. The pick tester 26 can be moved up and down in the direction of the optical axis of the lens W by means not shown so that its height can be changed according to the position of the lens W.

Next, a method of measuring the lateral deviation amount of the central axis of the outer peripheral surface Wc with respect to the optical axis of the lens W to be tested in this embodiment will be described.
Instead of the XY stage of the first embodiment, the two movement knobs 23 are turned to move the position of the round ant 21, and the test lens W is moved in the horizontal direction to adjust the position. The process of making the optical axis of the lens W to be tested coincide with the rotation axis 2a of the spindle 2 is the same as that in the first embodiment.
Similarly to the first embodiment, after the optical axis of the test lens W is aligned with the rotation axis 2a of the spindle 2, the detection terminal 26a of the pick tester 26 is placed on the outer peripheral surface Wc of the test lens W. Contact is made and the spindle 2 is rotated to measure the lateral deviation of the central axis of the outer peripheral surface Wc with respect to the optical axis of the lens W to be tested.

  According to this embodiment, the height of the moving mechanism for moving the lens W to be horizontally moved can be reduced, and the space between the rocking center of the αβ rocking stage 3 and the upper surface of the round ant 21 can be widened. It is also possible to cope with the measurement of the test lens W having a concave portion with a large curvature.

  Note that the present invention can be widely applied without being limited to the above-described embodiment. For example, in the first embodiment, a pick tester 26 may be used in place of the peripheral runout measuring means 8. Further, the mechanism for performing the horizontal movement and tilt adjustment of the test lens W is not limited to the embodiment. Further, the αβ swing stage 3, the XY stage 4, and the movement knob 23 may be driven under the control of the computer 18.

It is a perspective view which shows schematic structure of the eccentricity measuring apparatus which concerns on embodiment of this invention. It is a side view which shows schematic structure of an eccentric apparatus. It is a front view which shows the state which hold | maintained the to-be-tested lens to the lens holder. It is a front view which shows the state which moved the test lens horizontally so that the center of curvature of the upper lens surface of a test lens and a rotating shaft may correspond. It is a front view which shows the state which moved the to-be-tested lens horizontally so that the center of curvature of the lens surface of the to-be-tested lens and a rotating shaft may correspond. It is a front view which shows the state which adjusted the angle of the to-be-tested lens so that the center of curvature of the lens surface above a to-be-tested lens and a rotating shaft might correspond. It is a perspective view which shows schematic structure of the eccentricity measuring apparatus which concerns on embodiment of this invention. It is a side view which shows schematic structure of an eccentric apparatus. It is a top view of the state which mounted the to-be-tested lens on the lens holder. It is a schematic block diagram of the conventional eccentricity measuring apparatus. It is a schematic block diagram of the conventional eccentricity measuring apparatus.

Explanation of symbols

1 Eccentricity measuring device 2 Spindle (rotary drive mechanism)
2a Rotating shaft 3 αβ swing stage (tilting adjustment mechanism)
4 XY stage (movement mechanism)
6 Lens holder (Lens holding member)
7 Eccentricity detection means 8 Outer circumference shake measurement means W Test lens Wa Lens surface Wc Outer circumference surface

Claims (4)

  A lens holding member that holds the lens to be tested, a rotation drive mechanism that rotates the lens holding member, a moving mechanism that adjusts a horizontal position of the lens holding member with respect to a rotation axis of the rotation drive mechanism, and the rotation drive A tilt adjusting mechanism for adjusting a horizontal tilt of the lens holding member and the moving mechanism with respect to the rotation shaft of the mechanism, and an eccentricity of the both sides of the lens to be tested held by the lens holding member with respect to the rotation shaft of the rotation driving mechanism. And a curvature of the lens surface of the lens to be detected on the side of the eccentricity detecting means, and an outer periphery shake measuring means for measuring a lateral deviation amount of the central axis of the outer peripheral surface with respect to the optical axis of the lens to be tested. The eccentricity measuring device, wherein the height of the lens holding member is set so that the center coincides with the swing center of the tilt adjusting mechanism.   The lens holding member is configured to be detachable from the moving mechanism, and can be changed to a lens holding member corresponding to the curvature of the lens surface of the lens to be tested on the side of the eccentricity detecting means. The eccentricity measuring apparatus as described.   A moving mechanism that adjusts the horizontal position of the lens holding member with respect to the rotation shaft of the rotation driving mechanism, and a tilt adjustment mechanism that adjusts the horizontal tilt of the lens holding member and the moving mechanism with respect to the rotation shaft of the rotation driving mechanism. And an eccentricity detecting means for observing the eccentricity of both surfaces of the test lens held by the lens holding member so that the optical axis of the test lens coincides with the rotation axis of the rotation drive mechanism, and An eccentricity measuring method comprising measuring a deflection amount of a central axis of an outer peripheral surface with respect to an optical axis. When aligning the optical axis of the lens to be tested with the rotation axis of the rotation drive mechanism, horizontally moving the lens to be tested to match the center of curvature of one lens surface with the rotation axis; and 4. The eccentricity measuring method according to claim 3, wherein the step of adjusting the tilt of the detecting lens and alternately aligning the center of curvature of the other lens surface with the rotation axis are performed.

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