JP2006116479A - Microchip, sensor-integrated microchip, and microchip system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microchip which enables the arrangement of a sensor without affecting the flow of a fluid in a passage inside, and further, is easy to manufacture. <P>SOLUTION: The microchip 1 with a groove 14 formed is provided with a plurality of substrates 11, 12 which can be stacked mutually, wherein a concave passage FA is constituted by a plate surface of one substrate 12 of the substrates 11, 12 and a groove formed on a plate surface of the other substrate 11. The substrate 12 has a hole 20 which passes through toward an opening of the groove 14 in order to arrange a sensor 80 for detecting the condition of the fluid RG in the fluid RG, and has a larger size than that of the groove 14 in a width direction of the passage FA from a horizontal view. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a microchip, a sensor-integrated microchip, and a microchip system.

In recent years, research on high-efficiency reaction in a micro space using a microchip has been advanced, and based on this, many applied researches and developments such as chemical analysis and environmental analysis have been conducted.
In research using these microchips, in order to control the state of fluid in the microchip, it is necessary to measure state quantities such as fluid pressure. Here, the measurement of the state quantity of the fluid is usually performed on the fluid outside the microchip in a stage before being introduced into the microchip, but it is caused by a complicated pressure loss inside the microchip. Therefore, it is difficult to control the fluid inside the microchip simply by measuring the state quantity of the fluid outside the microchip.

Therefore, as a method for measuring the state quantity of the fluid inside the microchip, as shown in FIG. 18, a sensor SN is disposed on the substrate BD of the microchip, and the position in the microchip is determined from the position of the sensor SN. A method of forming a hole HL penetrating the substrate BD toward the flow path FA and measuring the state quantity of the sample RG through the hole HL has been studied.
In addition, the state quantity of the fluid inside the microchip can also be measured by making a sensor in the microchip itself (see Patent Document 1 and Non-Patent Document 1). Specifically, the microchip of Patent Document 1 includes a glass substrate and a PDMS (polydimethylsiloxane) chip bonded to the glass substrate, and an optical pressure detection unit (circuit lattice) on the bonding surface of the PDMS chip. And a flow path communicating with the pressure detection unit are integrally provided. A fluid is introduced into the flow path of the PDMS chip from a pipe material attached to the PDMS chip.
The microchip of Non-Patent Document 1 includes a PDMS chip in which a flow path is formed and a sensor array chip (pressure sensor array chip) that is bonded to the PDMS chip. A pressure sensor is provided. Here, in the PDMS chip, a plurality of bypasses are formed along the joint surface of the sensor array chip from a single flow path (fluid reaction field) crossing the center, and each pressure sensor accesses the fluid through the bypass. is doing.

JP 2002-174558 A ([0006], [0010], [0011], FIG. 2) Hsin-Hsiung Wang, Po-Chiang Yabg and Lung-Jieh Yang "Pressure-Sensor array Using as an Experiment Platform for Microfluidics", International Conference on Electrical Engineering 2004, vol.1 (Figures 1, 2, 4-9)

However, in the configuration as shown in FIG. 18, turbulent flow is easily generated between the groove forming the flow path FA and the sensor SN inside the hole HL connecting the sensor SN and the flow path FA. The pressure loss of the fluid occurs due to the resistance on the inner peripheral surface of the hole HL. That is, there is a problem that the flow of the fluid inside the microchip is affected by the arrangement of the sensor SN. Further, the hole HL becomes a dead volume only for guiding the fluid in the flow path to the sensor.
On the other hand, in the configurations in Patent Document 1 and Non-Patent Document 1, both the flow path and the sensor facing the flow path are built in the microchip itself. However, in the microchip in which the flow path and the sensor are built in this way. Is not versatile. In addition, there is a problem that pressure loss occurs in a bypass portion that guides fluid from the flow path along the joint surface. Furthermore, there is a problem that it is extremely difficult to make these flow paths and sensors minute.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a microchip that can be disposed without affecting the flow of fluid in an internal flow path, and that is easy to manufacture, and a microchip in which the sensor is integrated. It is in.

  The microchip of the present invention includes a plurality of substrates that are stacked on each other, and the flow path is configured by a plate surface of one of the substrates stacked on each other and a groove that is recessed from the plate surface of the other substrate. In the microchip, the one substrate penetrates toward the opening of the groove and is seen in a plan view in order to dispose a sensor for detecting a fluid state in the flow path. In this case, a hole larger than the size of the groove in the width direction of the flow path is formed.

According to this configuration, a fluid flow path is formed on the inner side of the inner peripheral surface of the groove and the plate surface facing the groove by a simple configuration in which the substrate in which the groove is formed and the other substrate in which the hole is formed are overlapped. The sensor mounting hole is formed so that the sensor can be brought into contact with the fluid at a position along the surface where the substrates are overlapped with each other.
Here, since the size of the hole is larger than the width dimension of the groove, the end portion of the sensor disposed inside the hole is brought into contact with the end portion on the opening side of the groove, and movement to the inner side of the groove is restricted. Therefore, the sensor does not protrude into the groove. As a result, the sensor can be disposed without affecting the flow of the fluid inside the microchip. In addition, the sensor disposed inside the hole directly contacts the fluid without going through the hole for accessing the flow path from the sensor, so that the pressure loss of the fluid is reduced and the dead volume is almost Does not occur.
In this way, the fluid pressure inside the microchip can be measured without affecting the fluid flow with respect to the sensor arrangement, so the microchip of the present invention is analyzed and synthesized for highly efficient reaction of a small volume of fluid. Available in the field. In addition, a device using a microchip can be put into practical use.

  In addition, since the manufacture of the microchip and the manufacture of the sensor may be performed separately, there are no problems associated with the formation of fine flow paths and sensors, and the manufacture is easy. Various sensors can be easily inserted into the holes formed in the microchip, and more sensors can be incorporated within the specified range of the microchip. can do.

Here, sandblasting, electric discharge machining, ultrasonic machining, drilling, laser machining, etching, pressing, injection molding, and the like can be employed as a method for forming holes in the substrate.
Note that the position of the hole can be arbitrarily selected, and an arbitrary position in the flow path can be controlled according to the position of the hole. For example, when the fluid is introduced and discharged, it is considered that the variation in the state quantity of the fluid is large. Therefore, a hole may be formed in the vicinity of the inlet and the outlet.
When the substrates are bonded to each other, thermal bonding, anodic bonding, laser bonding, brazing, surface activated bonding, or the like can be employed as the bonding method. Note that, instead of joining the substrates, the substrates may be sandwiched and fixed.
And as a sensor arrange | positioned at a microchip, a temperature sensor, a chemical sensor, an electrochemical sensor, a pressure sensor, a flow sensor etc. can be illustrated.
In addition to the sensor, a microfluidic device such as a valve, a pump, or a microchip identification ID tag can be incorporated in the hole formed in the microchip.

In the microchip of the present invention, the thickness of the substrate on which the hole is formed is preferably larger than the height of the sensor disposed in the hole.
According to this configuration, since the sensor is accommodated in the hole and does not protrude from the surface of the substrate, it can be easily inserted into an insertion slot (slot) of the apparatus.

  In the microchip of the present invention, the substrate is formed with a plurality of inlets for introducing the fluid into the flow path and a discharge port for discharging the fluid from the flow path so as to communicate with the groove. The flow path has a merging portion through which the fluid flows from the plurality of introduction ports along a plurality of paths, and the hole is provided between the introduction port and the merging portion in the flow path. It is preferable that

According to this configuration, the state of the fluid in the flow path can be controlled based on the measured value of the state quantity of the fluid between the inlet and the junction. For example, it is conceivable to control each state quantity of the fluid in the plurality of paths based on the measured value of the state quantity of the fluid in any one of the plurality of paths. Moreover, each state quantity of the fluid in a plurality of paths may be measured, or the state quantity of the fluid in any of the paths may be controlled.
Such fluid control can stabilize the phase flow state of each fluid that forms a phase flow at the junction.
The phase flow means, for example, a fluid that flows in a phase-separated state.
In addition, since it is considered that the influence of fluid state quantities such as pressure fluctuation and pressure loss is large at the junction, it is more appropriate to control the fluid by forming a hole for installing the sensor near the junction. Can be done.

In the microchip of the present invention, the substrate is formed with an inlet for introducing the fluid into the channel and a plurality of outlets for discharging the fluid from the channel so as to communicate with the groove. The flow path has a branch portion in which the fluid flows in a plurality of paths to the plurality of discharge ports, and the hole is provided between the branch portion and the discharge port in the flow path. It is preferable.

According to this configuration, the state of the fluid in the flow path can be controlled based on the measured value of the state quantity of the fluid between the branch portion and the discharge port. For example, it is conceivable to measure the fluid state quantity in any one of the plurality of paths and control the fluid state quantity in the plurality of paths based on the measured value. Or you may measure each state quantity of the fluid in a several path | route, or may control the state quantity of the fluid in any path | route.
By such fluid control, a branching operation such as dividing a phase-separated phase flow into a plurality of paths can be performed as intended.
In addition, since it is considered that the influence of fluctuations in the state of the fluid such as pressure fluctuation and pressure loss is large at the bifurcation, fluid control can be performed more appropriately by forming a hole for installing the sensor near the bifurcation. Can be done.

In the microchip of the present invention, the sensor is preferably a pressure sensor that detects the pressure of the fluid.
According to this configuration, the pressure fluctuation and pressure balance of the fluid in the flow path in the microchip can be controlled based on the measurement result by the pressure sensor, and the microchip of the present invention can be used in the field of analysis and synthesis.
Here, the pressure sensor of the present invention may be of any type, such as one having a strain gauge in the fluid pressure sensitive part or one detecting a displacement of the sensitive part as a change in capacitance. The pressure sensor used may be a gauge pressure sensor, an absolute pressure sensor, or a differential pressure sensor.

In the microchip of the present invention, it is preferable that the pressure sensor detects a pressure difference between fluids flowing through a plurality of paths in the flow path.
According to this configuration, since the pressure difference (differential pressure) of the fluid flowing through a plurality of paths such as the front stage of the junction part and the rear stage of the branch part is detected by the pressure sensor, there is an individual difference in the detection accuracy of the sensor. However, it is possible to appropriately control fluid pressure fluctuations and partial pressure states in a plurality of paths.

The sensor-integrated microchip of the present invention preferably includes the above-described microchip, and the sensor is incorporated in the hole.
According to this configuration, since the above-described microchip is provided, the same operations and effects as described above can be obtained.
That is, a sensor can be incorporated in any location without affecting the flow of fluid in the internal flow path, and without being restricted by the use of the microchip and the flow path shape. An integrated microchip can be provided. In addition, by embedding a plurality of sensors in the microchip, it is possible to connect to the sensors embedded in the necessary portions when necessary and perform measurement, and the versatility is excellent.

  The microchip of the present invention includes a plurality of substrates that are stacked on each other, and the flow path is configured by a plate surface of one of the substrates stacked on each other and a groove that is recessed from the plate surface of the other substrate. In the microchip, a flow path piece that is connected to the groove and constitutes the flow path is disposed in a through hole that penetrates the plurality of substrates stacked on each other. A sensor part provided in the connection groove, and a plate member that is stacked on the side of the sensor part on which the connection groove is formed, and the sensor part is disposed inside the connection groove and has a fluid state. A sensor main body for detection is provided.

According to this configuration, the fluid channel is formed between the substrates by a simple configuration in which the substrate and another substrate are overlapped, and a part of the channel in the microchip can be mounted as a channel piece. Thus, the connecting groove formed in the flow path piece is connected to the groove of the microchip. As a result, the flow piece is integrated into any part of the microchip without affecting the fluid flow inside the microchip and without being restricted by the microchip application and flow path shape. Can be
In addition, the pressure loss of the fluid is reduced and the dead volume hardly occurs as the sensor part provided in the connecting groove directly contacts the fluid without going through the hole for accessing the flow path. .

As described above, since the fluid pressure inside the microchip can be measured without affecting the flow of the fluid, the microchip of the present invention is used in the field of analysis and synthesis for high-efficiency reaction of a small volume of fluid. it can. In addition, a device using a microchip can be put into practical use.
In addition, since the manufacture of the microchip and the manufacture of the flow path piece may be performed separately, there are no problems regarding the fabrication of fine flow paths and sensor parts, and the manufacture is easy. It is possible to easily insert a flow channel piece having various shapes of connecting grooves into a hole formed in the microchip, and it is excellent in versatility and can cope with the trend of standardization of microchip.

  In the microchip of the present invention, the flow path has a merging portion into which the fluid flows and / or a branching portion through which the fluid flows separately, and the merging portion and / or the branching portion includes the sensor. It is preferable that it is comprised by the said connection groove | channel.

  According to this configuration, the merging portion or the branching portion is configured as a connection groove inside the flow path piece, so that the merging portion is more than the case where the sensor is disposed near the merging portion or the branching portion formed on the substrate. The dimension which a part and a branch part occupy can be made small. As a result, even when a standardized microchip having a size restriction is used, a fine and complicated flow path can be realized.

  In the microchip according to the aspect of the invention, the flow path sensor unit includes a plurality of paths formed by the connection grooves, and the sensor unit includes a detection unit that detects a pressure difference of the fluid. The detection unit is preferably provided at a boundary portion between the plurality of paths so as to come into contact with any of fluids on both sides of the boundary portion.

According to this configuration, since the detection unit is provided at the boundary portion of the plurality of paths so as to partition these paths from each other, it is unnecessary to form a bypass between the paths when detecting a pressure difference between the plurality of paths. it can. In addition, the flow path sensor part may be formed with a merging part or a branch part that leads to a plurality of paths extending side by side.
Here, the detection unit is a movable member that has one end attached to the bottom of the coupling groove or the sensor main body facing the coupling groove and rotates at the boundary portion of these paths according to the pressure of each fluid in the plurality of paths. For example, a device provided with a strain gauge, a piezoelectric element, a vibrator and the like can be exemplified.

  In the microchip of the present invention, the plurality of paths configured by the connection grooves extend from different directions and merge with the flow path sensor unit, and the sensor unit detects a pressure difference of the fluid. It is preferable that the detection unit is provided at a portion where the fluids of the plurality of paths are combined and in contact with any of these fluids.

According to this configuration, since the pressure difference between these fluids can be directly detected at the portion where the fluids of the plurality of paths are combined, the state of the merging is compared with the case where the pressure of each fluid is detected at the upstream or downstream of the merging portion. It becomes possible to control more appropriately.
The detection unit is a movable member that is pivotally supported on the front side of the merging and rotates at the merging portion of these paths according to the pressure of each fluid in a plurality of paths, and includes a strain gauge, a piezoelectric element, a vibrator, and the like. Can be exemplified.

  The sensor-integrated microchip of the present invention includes a plurality of substrates that are overlaid on each other, and flows from a plate surface of one of the substrates and a groove that is recessed from the plate surface of the other substrate. A sensor-integrated microchip in which a sensor for detecting a fluid state in the flow path is incorporated in a microchip having a path, which penetrates the plurality of stacked substrates and communicates with the groove A hole is formed to dispose the sensor, and the sensor integrally includes a main body and a flow path portion, and the flow path portion includes the sensor when the sensor is disposed in the through hole. A connecting groove that is connected to the groove to form the flow path is formed.

According to this configuration, in the microchip, a fluid flow path is formed between the substrates by a simple configuration in which the substrate in which the grooves and holes are formed and the other substrate in which the holes are formed are overlapped. A through hole for arranging the sensor is formed, which allows the sensor to contact the fluid at a position communicating with the groove to be formed. Thereby, a sensor can be integrated and integrated in a microchip, without affecting the flow of the fluid inside a microchip.
In addition, the sensor disposed inside the hole directly contacts the fluid without going through the hole for accessing the flow path from the sensor, so that the pressure loss of the fluid is reduced and the dead volume is almost Does not occur.
As described above, the fluid pressure inside the microchip can be measured without affecting the flow of the fluid with respect to the sensor arrangement. ,
In addition, since the manufacture of the microchip and the manufacture of the sensor may be performed separately, there are no problems associated with the formation of fine flow paths and sensors, and the manufacture is easy. Various sensors can be easily inserted into the holes formed in the microchip, and more sensors can be incorporated within the specified range of the microchip. it can.

  In addition, since the sensor main body and the flow path portion are integrated, the positional relationship between the sensor portion and the flow path can be guaranteed in the sensor alone. Thereby, when the sensor is incorporated in the microchip, disturbances regarding the positional relationship between the sensor and the fluid flow path in contact with the sensor are eliminated, and the yield can be improved.

The microchip system of the present invention includes the above-described sensor-integrated microchip or the microchip on which the above-described flow path piece can be disposed, and a control device that performs feedback control on the state quantity of the fluid detected by the sensor. It is characterized by that.
According to this configuration, based on the state quantity of the fluid inside the microchip measured by the sensor or the sensor unit provided in the connecting groove, conditions such as the flow velocity or flow pressure applied to this fluid, temperature, etc. are changed. Therefore, the state of the fluid inside the microchip can be made almost the same as the predetermined state quantity. Thereby, the fluid control inside the microchip can be easily and reliably performed.
In particular, in fluids that flow through multiple paths before the merge part and after the branch part, the pressure fluctuations of these fluids and their differential pressures are fed back to pressure sources and valves, etc. It can be controlled appropriately.

<First Embodiment>
[1. Microchip configuration)
Hereinafter, a first embodiment of the present invention will be described with reference to FIGS.
FIG. 1 is an exploded perspective view of the microchip 1 of the present embodiment. FIG. 2 is a plan view of the microchip 1 and FIG. 3 is a cross-sectional view of the microchip 1.
The microchip 1 is used for analyzing the sample RG in the flow path FA formed therein, and has a laminated structure of two substrates 11 and 12. In the present embodiment, three pressure sensors 80 are incorporated in the microchip 1, and the pressures of the sample RG in the flow path FA are measured by these pressure sensors 80.

  The substrates 11 and 12 of the microchip 1 have a flat rectangular shape with a short side of about 30 mm, a long side of about 70 mm, and a thickness of about 0.7 mm, for example, glass, sapphire, aluminum oxide, aluminum nitride, It is made of silicon carbide, plastic resin, silicon, stainless steel or the like. In the present embodiment, both the substrates 11 and 12 are formed of a glass material. However, the substrates 11 and 12 may be formed of another material whose characteristics such as a linear expansion coefficient are approximated.

  The substrates 11 and 12 are overlapped with each other, and a flow path FA for the sample RG is formed on the surface on which the substrates 11 and 12 are overlapped. As shown in FIG. 2, the flow path FA has a Y-shape in plan view that extends substantially along the longitudinal direction of the substrates 11 and 12, and a bifurcated portion in the Y-shape serves as a junction portion JCT. Yes. That is, in the flow path FA, upstream of the junction JCT, there are paths FA1 and FA2 that flow in a plurality of directions from the inlets 121 and 122 of the sample RG to the junction JCT, and downstream of the junction JCT. This is one route FA3. The path FA3 is a reaction field where the reactions of the samples FA1 and FA2 are performed, and the microchip 1 is particularly used for mixing the samples RG1 and RG2 in the path FA3.

As shown in FIG. 1 and FIG. 3, such a flow path FA includes an inner peripheral surface of a groove 14 having a semicircular cross section formed so as to be recessed in the plate plane of one substrate 11 and a substrate facing the groove 14. It is comprised inside 12 plate surfaces.
In this embodiment, the groove 14 has the same diameter in the paths FA1, FA2, and FA3. For example, the diameter of the groove 14 in the path FA3 is larger than the diameter of the groove 14 in the paths FA1 and FA2. For example, the diameter of the groove 14 can be set as appropriate.

  On the other hand, as shown in FIG. 1, the substrate 12 is perforated so as to communicate with the groove 14 at the positions of the three end portions in the Y-shape of the flow path FA when overlapped with the substrate 11. The holes formed at both ends of the Y-shaped expansion side are the inlets 121 and 122 of the sample RG, respectively, and are formed at the end opposite to the Y-shaped expansion side. Is the outlet 125 of the sample RG.

  The sample RG may have any form such as gas, liquid, colloidal solution, and the like. Here, as the RG of the present embodiment, for example, a sample RG1 and a sample RG2 in which components such as water and water and oil and oil are mixed are used. The sample RG1 is introduced into one introduction port 121, and the sample RG2 is introduced into the other introduction port 122.

  Further, the substrate 12 has square holes 20 in plan view that pass through the substrate 12 toward the opening of the groove 14 when the substrate 11 is overlaid on the downstream side of the path FA1, the path FA2, and the junction portion JCT. The pressure sensors 80 are respectively formed in positions corresponding to a certain path FA <b> 3, and the pressure sensors 80 are respectively disposed in the holes 20.

  As shown in FIG. 2, the hole 20 is provided at a position overlapping the groove 14 of the substrate 11 when viewed in plan. Here, the dimension of the hole 20 when viewed in plan is the dimension of the groove 14. Since it is larger than the width, both end portions on the opening side of the groove 14 are exposed inside the hole 20 as shown in FIGS. 2 and 3A. This exposed portion serves as a placement portion 141 where the pressure sensor 80 is disposed when the pressure sensor 80 is disposed.

FIG. 3A is a cross-sectional view in the width direction of the flow path FA. FIG. 3B is a cross-sectional view in the direction along the flow path FA by rotating FIG. 3A by 90 ° in the planar direction of the microchip 1.
The pressure sensor 80 has a cubic shape that is inserted into the hole 20 of the substrate 11. The pressure sensor 80 is disposed in the mounting portion 141 in a state of being inserted into the hole 20 and is in contact with the sample RG flowing through the flow path FA. Yes.
Although not shown in detail, the pressure sensor 80 includes a silicon diaphragm 81 provided on the side facing the groove 14 and a holding body 82 that holds the diaphragm 81. The holding body 82 is a stacked body in which two glass substrates are stacked in a direction crossing the direction in which the substrates 11 and 12 are stacked, and a plurality of conductive patterns are formed between the substrates. As a result, the atmosphere is opened in the gap between the conductive patterns, and the diaphragm 81 and the extraction electrode on the opposite side are conducted through the conductive pattern. In the detection circuit of the pressure sensor 80, the pressure of the sample RG is measured by a change in capacitance between the electrode provided on the holding body 82 and the diaphragm 81.

[2. Microchip manufacturing procedure)
A manufacturing procedure of the microchip 1 having the above configuration will be briefly described.
First, the grooves 14 are formed in the substrate 11 by sandblasting, etching, machining, or the like. In addition, the inlets 121 and 122, the discharge port 125, and the hole 20 are formed in the substrate 12 by sandblasting, electric discharge machining, ultrasonic machining, drilling, laser machining, etching, pressing, injection molding, or the like.

Next, these substrates 11 and 12 are overlapped with each other so that the Y-shape of the groove 14 is aligned with the positions of the inlets 121 and 122 and the outlet 125, and heat fusion is performed.
In addition to this heat fusion, the substrates 11 and 12 may be bonded by anodic bonding, laser bonding, brazing, and surface activation bonding, or the substrates 11 and 12 may be sandwiched between each other without bonding. May be attached.
Thereby, the microchip 1 for disposing the pressure sensor 80 is completed.

  Subsequently, the pressure sensor 80 is inserted into each hole 20 of the microchip 1 and placed on the placement portion 141. Then, each pressure sensor 80 is joined to the inner peripheral surface of the hole 20, whereby each pressure sensor 80 is incorporated into the microchip 1, and a sensor integrated microchip including the pressure sensor 80 is completed.

[3. Action of microchip)
When such a microchip 1 is used, the sample RG1 is introduced from the introduction port 121 and the sample RG2 is introduced from the introduction port 122 by a pump or a valve (not shown) at a predetermined pressure. As a result, the samples RG1 and RG2 flow along the paths FA1 and FA2, respectively, and travel toward the junction JCT. When these samples RG1, RG2 reach the junction JCT, a mixed flow is formed, and the sample RG1, RG2 flows through the path FA3 as it is and is discharged from the discharge port 125.

Here, the samples RG1 and RG2 are introduced into the microchip 1 at a predetermined flow rate or a predetermined pressure. In the microchip 1, the pressures at the inlets 121 and 122 when being introduced into the inlets 121 and 122 are obtained. A complicated pressure loss occurs in the sample RG due to the resistance and the pressure resistance of the groove 14 serving as the inner peripheral surface of the flow path FA and the plate surface of the substrate 11. The amount of pressure loss is not determined by the shape of the inlets 121 and 122 and the grooves 14 and the processing accuracy such as the surface roughness of the inlets 121 and 122, the grooves 14, and the substrate 12, and the like. It also fluctuates depending on the surface condition of the peripheral surface (coating mode and the like) and temperature change due to the reaction of the samples RG1 and RG2.
In the present embodiment, in the flow path FA in the microchip 1, each pressure of the samples RG1 and RG2 in the paths FA1 and FA2 before the junction JCT, and FA3 which is a reaction field of the samples RG1 and RG2 after the junction JCT. Can be measured by the pressure sensor 80.
In mixing the samples RG1 and RG2, it is conceivable that a turbulent flow is generated to increase the mixing efficiency.

[4. Effects according to the first embodiment]
According to this embodiment, there are the following effects.
(1) By simply overlapping the substrate 11 on which the groove 14 is formed and the other substrate 12 on which the hole 20 is formed, the flow path is formed inside the inner peripheral surface of the groove 14 and the plate surface of the substrate 12 facing the groove 14. While the FA is formed, the hole 20 for disposing the pressure sensor 80 can be easily formed.

(2) Here, since the size of the hole 20 is larger than the width dimension of the groove 14, even if the pressure sensor 80 is disposed inside the hole 20, the pressure sensor 80 does not protrude into the groove 14. Thereby, the pressure sensor 80 can be disposed without affecting the flow of the sample RG inside the microchip 1.

(3) Further, since the pressure sensor 80 disposed inside the hole 20 directly contacts the sample RG without passing through the hole for accessing the flow path FA from the pressure sensor 80, the sample RG Pressure loss is reduced and almost no dead volume occurs.

(4) As described above, the sample RG pressure inside the microchip 1 can be measured in a state where there is no influence on the flow of the sample RG and no pressure loss with respect to the arrangement of the pressure sensor 80. Regarding the reaction, the microchip 1 can be used in the field of analysis and synthesis. In addition, a device using the microchip 1 can be put into practical use.

(5) In addition, since the manufacture of the microchip 1 and the manufacture of the pressure sensor 80 only have to be performed separately, there are no problems related to the fabrication of the fine flow path FA and the pressure sensor 80, and the manufacture is easy. Since the pressure sensor 80 can be easily inserted into the hole 20 formed in the microchip 1 and can be incorporated in a predetermined range of the microchip 1, it is possible to standardize the microchip. It is possible to respond to the trend of.
In addition to the pressure sensor 80, the microchip 1 can be provided with various sensors that measure the state quantity of the sample RG, such as a temperature sensor, a chemical sensor, an electrochemical sensor, and an acceleration sensor. It is also possible to incorporate a microfluidic device such as a valve, a pump, or a microchip identification ID tag into the microchip 1.

(6) Since both sides of the groove 14 of the substrate 11 are the placement portions 141, when the pressure sensor 80 is inserted into the hole 20, the placement portion 141 comes into contact with the pressure sensor 80 (stopper). Since the pressure sensor 80 is held at a position on the surface where the substrates 11 and 12 are overlapped, the pressure sensor 80 can be easily disposed at a position in contact with the sample RG in the flow path FA.

(7) In the flow path FA of the microchip 1, where a complicated pressure loss or pressure fluctuation occurs, the pressure sensor 80 is incorporated in the microchip 1 so that the pressure of the sample RG inside the microchip 1 can be measured. The control based on the measurement of the pressure fluctuation of the sample RG in the reaction field in the microchip 1 becomes possible, and the sample RG can be appropriately synthesized.

Second Embodiment
Next, a second embodiment of the present invention will be described with reference to FIGS.
In the following description, the same reference numerals are given to the same configurations as those in the embodiment described above, and the description is omitted or simplified.

In the first embodiment described above, the hole 20 is formed in one of the substrates 12 for disposing the pressure sensor.
On the other hand, this embodiment is different from the first embodiment in that a hole penetrating two substrates constituting the microchip is formed. Thereby, the pressure sensor incorporated in the microchip is also different from that in the first embodiment. This will be specifically described below.

FIG. 4 shows the microchip 2 of the present embodiment. FIG. 5 is a view showing a pressure sensor 90 incorporated in the microchip 2.
The microchip 2 includes a substrate 12 similar to that of the first embodiment, and a substrate 21 that is superposed on the substrate 12.
In the substrate 21, the same groove 14 as the substrate 11 of the first embodiment is formed, and the hole 20 having the same position and shape as the hole 20 formed in the substrate 12 is formed so as to communicate with the groove 14. Has been.
Here, in a state where the substrates 12 and 21 are overlapped with each other, the hole 20 formed in the substrate 12 and the hole 20 formed in the substrate 21 are continuous, thereby penetrating the substrates 12 and 21 and the groove 14. One through hole 25 that communicates is formed. In the present embodiment, a pressure sensor 90 is disposed in the through hole 25.

As shown in FIG. 5, the pressure sensor 90 has a hexahedral shape that is inserted into the through hole 25 of the microchip 2, and is a laminated body including a sensor unit 92 and a flow channel unit 91 as a main body.
Although detailed illustration is omitted, the sensor unit 92 is configured in the same manner as the pressure sensor 80 described in the first embodiment.
The channel portion 91 is a flat square glass substrate having the same thickness as the substrate 21 of the microchip 2, and a connecting groove 94 is formed on the plate surface of the channel portion 91.
The connecting groove 94 has the same cross-sectional shape and the same size as the groove 14 of the microchip 2, and extends so as to bisect the plate surface along one side of the flow path portion 91.

The sensor portion 92 and the flow path portion 91 are overlapped with each other so that a diaphragm (not shown) of the sensor portion 92 faces the connecting groove 94, and the overlapped surfaces are laser welded, surface activated bonding, eutectic bonding, diffusion. Bonded by brazing or brazing. Thereby, the flow path integrated pressure sensor 90 is configured.
When the pressure sensor 90 is inserted into the through hole 25 of the microchip 2, the connecting groove 94 is connected to the groove 14 of the substrate 21, and the groove 14 and the connecting groove 94 allow one continuous flow path FA. Configure.

The manufacturing procedure of the microchip 2 of this embodiment is substantially the same as that of the first embodiment, and the microchip 2 and the pressure sensor 90 are manufactured separately. The substrates 12 and 21 may be overlapped after the holes 20 are formed in the substrates 12 and 21, respectively. However, after the substrates 12 and 21 are joined to each other, the through holes 25 penetrating the substrates 12 and 21 are drilled. As a result, the position of the hole 20 in the substrate 12 and the position of the hole 20 in the substrate 21 are difficult to shift.
The sensor-integrated microchip 2 is completed by joining the through hole 25 formed in the microchip 2 to the inner peripheral surface of the through hole 25 with the pressure sensor 90 inserted.

According to such 2nd Embodiment, there exist the following effects besides having the effect substantially the same as (3), (4), (5), and (7) mentioned above.
(8) The flow path of the sample RG is formed between the substrates 12 and 21 simply by superimposing the substrate 21 on which the grooves 14 are formed and the substrate 12. Further, the holes 20 formed in the substrates 12 and 21 are continuous with each other, so that the through hole 25 for disposing the pressure sensor 90 that allows the pressure sensor 90 to contact the sample RG is formed.
Thereby, the pressure sensor 90 can be disposed without affecting the flow of the sample RG inside the microchip 2.

(9) Since the sensor part 92 of the pressure sensor 90 and the flow path part 91 are integrated and the contact part of the sensor part 92 to the flow path FA is provided inside the pressure sensor 90, the pressure sensor 90 alone In addition, the positional relationship between the contact portion of the sensor unit 92 with the flow channel portion 91 and the flow channel portion 91 can be guaranteed. Thereby, when the pressure sensor 90 is disposed on the microchip 2, disturbances regarding the positional relationship between the pressure sensor 90 and the flow path FA are eliminated, and the yield can be improved.

(10) Further, the pressure sensor 90 has a laminated structure of the sensor part 92 and the flow path part 91, and a flow path FA by the connecting groove 94 is formed between the sensor part 92 and the flow path part 91. Therefore, the sensor unit 92 directly contacts the sample RG. Thereby, the pressure loss of the sample RG can be reduced and the dead volume can be suppressed.

(11) Further, since the substrate thickness of the flow path portion 91 is the same as that of the substrate 21 of the microchip 2, the plate surface of the substrate 21 opposite to the substrate 12 (lower surface in FIG. 4). 4 is used as a guide surface, and the plate surface (the lower surface in FIG. 4) opposite to the sensor portion 92 of the flow passage portion 91 is aligned so that the position of the groove 14 of the microchip 2 and the connecting groove of the pressure sensor 90 The position 94 can be accurately aligned. Thereby, there is no problem in the flow of the sample RG in the flow path FA.

<Third Embodiment>
Next, a third embodiment of the present invention will be described with reference to FIGS.
In each of the above embodiments, a planar flow path is formed, but in this embodiment, a three-dimensional flow path is formed.
FIG. 6 is an exploded perspective view of the microchip 3 in the present embodiment.
The microchip 3 of the present embodiment has a structure in which three substrates 31, 32, and 33 are stacked on each other.
Grooves 321 and 322 are formed on both plate surfaces of the central substrate 32, and these grooves 321 and 322 communicate with each other by a hole 323 that penetrates the substrate 32 in the thickness direction.
Specifically, a groove 321 extending along the longitudinal direction is formed on one surface of the substrate 32, and a groove 322 extending along the groove 321 is formed on the other surface halfway through the groove 321. The end of 322 is communicated with the middle of the groove 321 through the hole 323.
FIG. 7 is a cross-sectional view in the direction along the grooves 321 and 322.
In the present embodiment, the flow path FA is configured by the grooves 321, 322 and the hole 323, and the hole 323 is a joining portion JCT. Also in this flow path FA, the path FA1 is from the inlet 121 to the junction JCT, the path FA2 is from the inlet 122 to the junction JCT, and the path J2 is from the junction JCT to the outlet 125, as in the above embodiment. Is the route FA3.

In the substrate 31, positions corresponding to both ends of the groove 321 are respectively drilled, thereby forming an inlet 121 for the sample RG 1 and an outlet 125 for the samples RG 1 and RG 2. Further, a hole 20 penetrating toward the opening of the groove 321 is formed in the substrate 31 on the upstream side in the vicinity of the junction portion JCT, and the pressure sensor 80 similar to that of the first embodiment is disposed in the hole 20. ing.
The substrate 33 is formed with an introduction port 122 for the sample RG2 by drilling a position corresponding to the end of the groove 322 opposite to the joining portion JCT. Also in the substrate 33, similarly to the hole 20 of the substrate 31, a hole 20 penetrating toward the opening of the groove 322 is formed on the upstream side in the vicinity of the junction portion JCT, and the pressure sensor 80 is disposed in the hole 20. .
The thicknesses of these substrates 31 and 33 are such that when the pressure sensor 80 is disposed in the hole 20 of the substrates 31 and 33, the pressure sensor 80 is accommodated in the hole 20.

  Then, the substrates 31, 32, 33 are overlapped with each other so that the substrate 32 is sandwiched between the substrates 31, 33, so that one continuous surface is formed between the opposing surface of the substrates 31, 32 and the opposing surface of the substrates 32, 33. A flow path FA is configured. Samples RG1 and RG2 respectively introduced from the inlets 121 and 122 flow toward the merging portion JCT and flow from the merging portion JCT as a mixed flow through the path FA3 in substantially the same manner as in the first embodiment. It is discharged from 125.

According to such 3rd Embodiment, in addition to the effect similar to 1st Embodiment, the following effect can be acquired.
(12) Since the pressure sensor 80 is accommodated in the hole 20 and does not protrude from the surfaces of the substrates 31 and 33, there is no problem when the microchip 3 is handled using an adsorption jig or the like.

(13) Since the pressure sensor 80 is provided between the inlets 121 and 122 and the junction JCT and in the vicinity of the junction JCT, the samples RG1 and RG2 immediately before the junction JCT are provided by the pressure sensor 80. Each pressure is measured. Thereby, the pressure and pressure balance of the samples RG1 and RG2 can be controlled more appropriately, and the phase flow by the samples RG1 and RG2 can be stabilized.

<Fourth embodiment>
Next, a fourth embodiment of the present invention will be described with reference to FIGS.
The microchip 4 of the present embodiment is different in the shape of the flow path formed inside from the flow path in each of the above embodiments, and therefore, the position where the pressure sensor is incorporated is also different from that in each of the above embodiments. Yes. In this embodiment, an operation of branching after the sample is brought into a phase flow state will be described.

FIG. 8 is a plan view of the microchip 4 of the present embodiment.
The microchip 4 has a structure in which the substrates 41 and 42 are overlaid, and is basically the same as the structure in which the substrates 11 and 12 in the first embodiment are overlaid. However, the shape of the flow path FAM in the microchip 4 is the same. However, unlike the first embodiment, a groove 44 corresponding to the shape of the flow path FAM is formed in the substrate 41.
The flow path FAM meanders so as to make one reciprocal half along the longitudinal direction of the substrate 41, and the bifurcated portions provided at the start end and the end are the junction portion JCT and the branch portion BFR of the sample RG, respectively. That is, the flow path FAM is configured to include paths FA1 and FA2 that respectively flow to the merging portion JCT, a meandering portion FA3, and routes FA4 and FA5 that are separated from the branching portion BFR.

In the substrate 41, inlets 121 and 122 for introducing the sample RG into the paths FA1 and FA2 and outlets 125 and 126 for discharging the sample RG from the paths FA4 and FA5 are formed, respectively.
Further, the substrate 41 is formed with a total of six holes 20 for disposing the pressure sensor 80, one for each of the paths FA1 and FA2, two for the path FA3, and one for each of the paths FA4 and FA5.
Further, connection patterns CP1, CP2, CP3, CP4, CP5, and CP6 for connecting the pressure sensors 80 respectively disposed in the holes 20 to the outside are formed on the surface of the substrate 41 by a semiconductor process or screen printing technology. Is formed. The connection patterns CP <b> 1 to CP <b> 6 are arranged at an equal pitch along one side along the longitudinal direction of the substrate 41, and extend from the arranged position to an adjacent position of each hole 20. Specifically, the connection pattern CP1 is directed toward the hole 20 in the path FA1, the connection pattern CP2 is directed toward the hole 20 in the path FA2, and the connection pattern CP3 is directed toward the hole 20 near the joining portion JCT in the path FA3. Each extends. Further, the connection pattern CP4 extends toward the hole 20 at a substantially middle point in the path FA3, and the connection pattern CP6 arranged with a pitch from the connection pattern CP5 toward the hole 20 in the path FA4. The connection pattern CP6 extends toward the hole 20 in the path FA5.

A pressure sensor 80 is disposed in each hole 20. Although not shown, the pressure sensor 80 is provided with an extraction electrode having a potential indicating the displacement of the diaphragm on the surface opposite to the side on which the diaphragm is provided. Patterns CP1 to CP6 are connected to each other.
The present embodiment is particularly for explaining the position of the sensor on the microchip. The pressure sensor 90 in the second embodiment and the through hole in which the pressure sensor 90 is disposed are formed. Even when the microchip is employed, the same effects as those described below can be obtained.

  When manufacturing the microchip 4 of the present embodiment, the substrates 41 and 42 are overlapped and bonded to each other by the same procedure as in the first embodiment. The pressure sensor 80 is disposed in each hole 20, and the take-out electrode of the pressure sensor 80 is connected to the connection patterns CP1 to CP6 by solder, solder paste, wire bonding, probing, or the like. At this time, since the connection patterns CP1 to CP6 are arranged at an equal pitch, the connection work is easy. Thus, the sensor-integrated microchip 4 is completed, and the pressure sensor 90 incorporated in the microchip 4 can be connected to an external sensor detection circuit, a power source, a measuring instrument, and the like by the connection patterns CP1 to CP6. In the present embodiment, the pressure sensor 90 is connected to the sensor detection circuit 200 (FIG. 10) by probing, wire bonding, or the like by the connection patterns CP1 to CP6.

Here, FIG. 9 is a diagram for explaining the flow of the sample RG.
As the sample RG of the present embodiment, for example, a sample RG1 and a sample RG2 having different components such as gas and liquid and oil and water are used.
As shown in FIG. 9A, a sample RG1 and a sample RG2 are introduced from the inlets 121 and 122, respectively, and these samples RG1 and RG2 flow along paths FA1 and FA2 toward the junction JCT, respectively. It flows through the path FA3 as a phase flow separated by the part JCT. Then, the flow is again divided into the respective flows of the sample RG1 and the sample RG2 at the branch portion BFR and discharged from the discharge ports 125 and 126, respectively.

  As described above, in the microchip 4, complicated pressure loss is likely to occur due to the pressure resistance of the inner peripheral surface of the groove 44 and the plate surface of the substrate 41, the temperature change due to the reaction of the sample RG, and the like. If the predetermined partial pressure balance between the samples RG1 and RG2 is lost due to this pressure loss, the samples RG1 and RG2 cannot form a desired phase flow at the junction JCT as shown in FIG. There is also a flow. In this state, the flow of the samples RG1 and RG2 cannot be separated in a good state at the branch portion BFR.

  Here, in the six pressure sensors 80 incorporated in the microchip 4, the pressures of the samples RG1 and RG2 are repeatedly measured at a predetermined driving frequency, and these measured values are detected by the detection circuits via the connection patterns CP1 to CP6. 200 (FIG. 10). In the detection circuit 200, feedback processing is performed on the pressure state of the sample RG in the microchip 4.

As shown in FIG. 10, the detection circuit 200 as a control device includes a valve instruction unit 210 that transmits an open / close signal to the valve VL, a calculation unit 220 that performs a comparison operation such as a pressure value, and the valve instruction unit 210 and The control unit 230 is configured to issue a command to the arithmetic unit 220.
When the samples RG1 and RG2 are introduced into the microchip 4, the detection circuit 200 sends a signal to the valve VL to apply a predetermined pressure to the samples RG1 and RG2. Each time the pressure of the sample RG1 or RG2 is received from each pressure sensor 90, the calculation unit 220 compares this pressure value with a predetermined pressure value, and the respective pressures of the samples RG1 and RG2 according to the calculation result. A signal to increase or decrease is transmitted to the valve instruction unit 210. As a result, as shown in FIG. 9A, the samples RG1 and RG2 are kept in a phase flow state in which the phases are separated by a predetermined partial pressure in the flow path FA3, and the samples RG1 and RG2 are also as expected in the branch BFR. Can be branched.

According to the present embodiment, the same operational effects as the above-described embodiments and the following operational effects are combined.
(14) As described above, in the flow path FAM having the junction portion JCT and the branch portion BFR, by providing the six pressure sensors 80, the pressure fluctuations in the samples RG1 and RG2 based on the measurement values of the pressure sensors 80. And the partial pressure state is appropriately controlled. Thereby, the phase flow by each sample RG1, RG2 can be stabilized in the phase-separated state, and this phase flow can be easily branched.

(15) Since the pressures of the samples RG1 and RG2 in the paths FA1, FA2, FA3, and FA4 are feedback-controlled, the pressure control of the samples RG1 and RG2 is more reliably performed, so the phase flow by the samples RG1 and RG2 The state is further stabilized, and the branching operation for re-dividing the phase flow by RG1 and RG2 can be performed as intended.

(16) Since the connection patterns CP1 to CP6 for the pressure sensor 80 are provided on the microchip 4, the sensor detection circuit is adhered to the substrate 42 of the microchip 4 or disposed in the hole 20 as in the past. It is not necessary to run long wires from the pressure sensor 80. Thereby, the pressure sensor 80 can be easily electrically attached to the microchip 4.
In addition, since it is not necessary to include the sensor detection circuit when the pressure sensor 80 is disposed, even if the microchip 4 is standardized and has a limited size, a large number of sensors and other microchips can be used. Fluidic devices can be mounted on a microchip.
Furthermore, since it is not necessary to run a long wiring for the pressure sensor 80, the portability of the microchip 4 is improved and the microchip can be easily replaced.

<Fifth Embodiment>
Next, a fifth embodiment of the present invention will be described.
The present embodiment is different from the fourth embodiment in that fluid control is performed using the pressure difference of the sample in a plurality of paths.

FIG. 11 is a plan view of the microchip 5 in the present embodiment.
Like the flow path FAM in the fourth embodiment, the flow path FAMM formed inside the microchip 5 meanders so as to make one reciprocal half along the longitudinal direction, and both ends of the flow path FAMM are divided into two branches. These are the junction part JCT and the branch part BFR of the sample RG, respectively. In the present embodiment, the bifurcated portions of the junction portion JCT and the branch portion BFR extend in parallel toward the end portion of the flow path FAMM.
Further, the flow path FAMM of the present embodiment has a junction portion JCTS in the meandering manner. Such a flow path FAMM includes paths FA1 and FA2 that flow to the junction portion JCT, FA3 of the meander portion, routes FA4 and FA5 that flow from the branch portion BFR, respectively, and a route FA6 that flows toward the other junction portion JCTS. It is comprised including.

The microchip 5 has a laminated structure in which the substrates 51 and 52 are stacked on each other, and the substrate 51 has a groove 54 corresponding to the shape of the flow path FAMM.
Also, the substrate 51 has inlets 121 and 122 for introducing the sample RG into the paths FA1 and FA2, discharge ports 125 and 126 for discharging the sample RG from the paths FA4 and FA5, and an introduction for introducing the sample RG into the path FA6. A mouth 128 is formed.
On the other hand, the substrate 52 has three holes 30 that are rectangular in plan view for sensor placement. Specifically, the hole 30 is formed between the introduction ports 121 and 122 and the junction portion JCT so as to straddle the paths FA1 and FA2. Further, another hole 30 is formed at a position overlapping the junction portion JCTS and straddling the route FA3 and the route FA6, and between the branch portion BFR and the discharge ports 125 and 126, the routes FA3 and FA4. Another hole 30 is formed so as to straddle.

Each of these holes 30 is provided with a pressure sensor 100 having a rectangular shape in plan view, and these pressure sensors 100 are configured to measure pressure differences in a plurality of paths. Specifically, the measured values of the pressure sensors 100 are respectively the pressure difference between the path FA1 and the path FA2, the pressure difference between the path FA3 and the path FA6, and the pressure difference between the path FA4 and the path FA5.
Although not shown, in the vicinity of these holes 30, the same patterns as the connection patterns CP <b> 1 to CP <b> 6 of the fourth embodiment are arranged, and the pressure sensor 100 disposed in the holes 30 has the same pattern. The measured value is taken out to the detection circuit.

  In such a microchip 5, the samples RG 1 and RG 2 are introduced from the introduction ports 121 and 122, and the sample RG 3 is introduced from the introduction port 128. The samples RG1 and RG2 introduced from the inlets 121 and 122 become phase flows separated in the junction JCT, and the phase flows generated by the samples RG1 and RG2 reach the junction JCTS. In this merging section JCTS, when the phase flow of the samples RG1 and RG2 merges with the sample RG introduced from the inlet 128, the sample RG2 and the sample RG3 are mixed, and the mixed flow of these samples RG2 and RG3 is the sample RG1. Flow into the branch part BFR. In the branch portion BFR, the flow of the sample RG1 and the mixed flow of the sample RG2 and the sample RG3 are divided into two and discharged from the discharge ports 125 and 126, respectively.

As described above, in the flow path FAMM of the microchip 5, complicated pressure loss is likely to occur due to the pressure resistance due to the inner peripheral surface of the groove 54 and the plate surface of the substrate 52 and the temperature change due to the reaction of the sample RG. The samples RG1, RG2, and RG3 must be maintained in a predetermined pressure state and pressure balance.
In this embodiment, feedback processing is performed by the same detection circuit as that in the fourth embodiment. In this feedback processing, pressure differences in a plurality of paths obtained by the pressure sensor 100 are used.
Specifically, in the calculation unit of the detection circuit, the pressure difference received from each pressure sensor 100 is compared with a predetermined pressure difference, and a signal for increasing or decreasing each pressure of the samples RG1, RG2, RG3 based on the calculation result. Is transmitted to the valve indicating unit. Thereby, stabilization of the phase flow by sample RG1, RG2 or the mixed flow by sample RG2, RG3 is achieved. In the mixed flow of the samples RG2 and RG3, the mixing ratio of the samples RG2 and RG3 is constant, so that the phase flow state between the sample RG1 and the samples RG2 and RG3 is also stabilized, and the sample RG1 and the sample RG2, in the branch BFR. RG3 can be branched as intended.

According to the present embodiment, in addition to the above-described operational effects, the following operational effects are achieved.
(17) Since the differential pressures between the samples RG1, RG2, and RG3 flowing through a plurality of paths are used before the junction portion JCT and after the branch portion BFR, even if there is an individual difference in the pressure sensor 100, each sample RG The pressure balance is accurately measured, and based on this, the pressure fluctuation and the partial pressure state in the flow path FAMM can be appropriately controlled.

<Sixth Embodiment>
Next, a sixth embodiment of the present invention will be described with reference to FIGS.
In the present embodiment, a sensor-integrated microchip is obtained by incorporating the same type of sensor as the flow-integrated pressure sensor in the second embodiment into a microchip that is substantially the same as the fifth embodiment.
Further, the sensor configuration is such that the pressure difference of the sample in a plurality of paths is measured as in the fifth embodiment.

  FIG. 12 is a plan view of the microchip 6 in the present embodiment. The microchip 6 has a laminated structure of substrates 51 and 52, and includes three through holes 35 that pass through both of the substrates 51 and 52 and communicate with a groove 54 formed in the substrate 51. Has the same configuration as the microchip 5 of the fifth embodiment. A total of three pressure sensors 110 shown in FIG. 14 and two pressure sensors 130 shown in FIG. 15 are arranged in the through holes 35 formed in the microchip 6.

The pressure sensor 110 shown in FIG. 13 is disposed so as to overlap the junction portion JCTS in the flow path FAMM inside the microchip 6. FIG. 14 is a view of the pressure sensor 110 taken along line XIII-XIII in FIG.
The pressure sensor 110 is a laminated body composed of a glass block 112 which is a plate member and a sensor unit 111.
The sensor portion 111 is formed with a connecting groove 114 having a substantially Y shape in plan view. When the pressure sensor 110 is disposed on the microchip 6, the connection groove 114 is connected to the groove 54 on the microchip 6 side, so that the bifurcated portion of the connection groove 114 constitutes the paths FA3 and FA6 in the flow path FA. Will do.

While such a bifurcated portion of the connecting groove 114 is arranged, a detection unit 115 that detects the pressure of the sample RG is provided.
The detection unit 115 is a rectangular flat plate-shaped movable member, and only the base end portion on the long side end surface side is attached to the bottom of the connection groove 114 between the two fork portions of the connection groove 114, and one plate surface is the fork portion. In contact with the sample RG1, RG2 in the path FA3, and the other plate surface is in contact with the sample RG3 in the path FA6.
A detection element 115 </ b> A such as a strain gauge, a piezoelectric element, or a vibrator is provided at the base end of the detection unit 115.

A pressure sensor 130 shown in FIG. 15 is arranged on the upstream side in the vicinity of the junction JCT of the microchip 6 and on the downstream side in the vicinity of the branch part BFR. The pressure sensor 130 is substantially the same as the pressure sensor 110 except for the configuration of the connecting groove 134 formed inside.
In the pressure sensor 130, two connection grooves 134 are arranged in parallel in the flow path portion 131, and a detection unit 135 is formed between the connection grooves 134.

Here, the detection unit 115 of the pressure sensor 110 rotates at the boundary between the paths FA3 and FA6 according to the pressure of the samples RG1 and RG2 or the sample RG3 in the paths FA3 and FA6. By the rotation of the detection unit 115, the resistance value, voltage, frequency, and the like of the detection element 115A change, and the pressure difference between the sample RG in the path FA3 and the path FA6 can be obtained based on the signal of the detection element 115A. The signal from the detection element 115A is repeatedly sent to the detection circuit at a predetermined drive frequency.
Similarly, in the pressure sensor 130, the detection unit 135 rotates at the boundary portion of each path according to the pressure of each sample RG between the paths FA1 and FA2 or between the paths FA4 and FA5, and the signal of the detection element 135A is detected. Is detected by the detection circuit.

In the present embodiment, fluid control in the microchip 6 is performed based on the differential pressure of the sample RG obtained by the pressure sensors 110 and 130. At this time, the pressures of the samples RG1, RG2 and RG3 in the junction JCTS are appropriately controlled based on the differential pressure between the paths FA3 and FA6 obtained by the pressure sensor 110. Phase flow formation by RG1 and samples RG2 and RG3 works well.
Further, based on the differential pressure between the paths FA1 and FA2 or between the paths FA4 and FA5 obtained by the pressure sensor 130, the merging at the merging portion JCTS or the branching at the branching portion BFR is controlled to a desired state.

According to the present embodiment as described above, the following operational effects are obtained in addition to the operational effects substantially similar to those of the respective embodiments.
(18) The confluence portion JCTS of the sample RG is formed in the pressure sensor 110, and a plurality of paths in the vicinity of the confluence portion JCT and the branch portion BFR are formed in the pressure sensor 130. The dimensions occupied by the junctions JCT, JCTS and the branch part BFR can be made smaller than in the case where a sensor is provided in the vicinity of the branch part. Thereby, even when a standardized microchip having a limited area is used, a complicated and fine flow path FAMM can be realized.

(19) Since the detection units 115 and 135 are provided at the boundary portion between the route FA3 and the route FA6, between the routes FA1 and FA2, or between the routes FA4 and FA5 so as to partition these routes from each other, a plurality of routes It is possible to eliminate the formation of a bypass between the paths when detecting the pressure difference at.

<Seventh embodiment>
Next, a seventh embodiment of the present invention will be described.
The present embodiment shows a pressure sensor having another configuration that can replace the pressure sensor 110 in the sixth embodiment as a configuration for obtaining a pressure difference between fluids in a plurality of paths.

FIG. 16 shows the pressure sensor 140 of this embodiment.
The pressure sensor 140 is disposed in the junction portion JCTS in the flow path FA, and is substantially the same as the configuration of the pressure sensor 110 in the sixth embodiment except for the connection groove 144 and the detection portion 145 in the flow path portion 141.
A connecting groove 144 having a Y-shape in plan view is formed in the flow path portion 141 of the pressure sensor 140. The short side end face side of the rectangular flat plate-like detection unit 145 is attached to a bifurcated root portion where the paths FA3 and FA6 that are the bifurcated portions of the connecting groove 144 are combined, that is, the inner side surface of the connecting groove 144. One plate surface of the detection unit 145 is provided so as to contact the samples RG1 and RG2 in the path FA3, and the other plate surface is contacted to the sample RG3 in the path FA6. A detection element 145A such as a strain gauge, a piezo element, a vibrator, or the like is provided at the base end of the detection unit 145 attached to the connection groove 144.

  The detection unit 145 rotates at the tip according to the pressure of the samples RG1, RG2 or RG3 in the paths FA3, FA6. Changes in the resistance, voltage, frequency, etc. of the detection element 145A caused by the rotation of the detection unit 145 are detected by the detection circuit.

According to this embodiment, in addition to the effect by embodiment mentioned above, there exist the following effects.
(20) Since the pressure difference between these samples RG1, RG2, and RG3 can be directly detected by the junction JCTS where the samples RG1 and RG3 and the samples RG3 of the plurality of paths FA3 and FA6 are combined, each sample is detected before and after the junction JCTS. Compared with the case of detecting the RG pressure, the merging operation can be performed more appropriately.

<Modification of the present invention>
The present invention is not limited to the above-described embodiments, and includes modifications and improvements as described below.

In the fourth embodiment described above, the connection patterns CP1 to CP6 are directly formed on the substrate 42 in order to connect the pressure sensor 80 to the detection circuit. However, the present invention is not limited to this, and the connector CN1 as shown in FIG. It is also possible to bond ~ CN3 on the substrate of the microchip and connect the pressure sensor 80 to these connectors CN1 to CN3 in a detachable manner. By using such a connector, it is easy to replace the microchip and select a sensor to be connected to the circuit.
Moreover, you may affix the sheet | seat in which these connection patterns were formed separately.

  In the embodiment, the introduction port and the discharge port are opened in a direction intersecting the plate plane direction of the substrate on which the flow path is formed. However, the present invention is not limited to this, for example, on the plate surface on which the flow path is formed. You may open to the end surface side of a board | substrate in the direction along substantially.

  Further, in the case of forming a sensor placement hole that penetrates a plurality of substrates and communicates with a groove, in the above-described embodiment, a sensor in which a flow path is integrated in the hole is provided. Not only, but when a hole is formed so as to communicate with the side surface of the groove formed in the substrate of the microchip, the same hole as the pressure sensor 80 in the first embodiment is formed in this hole in the direction in which the diaphragm faces the groove. It is also conceivable to dispose them.

  The shape of the flow path is not limited to the above-described embodiments. For example, the flow path may be merged or branched in a trifurcated shape, or may be merged or branched by four or more branch flows. That is, the state of the mixed flow and the phase flow of the fluid in each of the above embodiments is merely an example, and two or more types of samples may be mixed or a three-layer or more phase flow may be used. Moreover, you may branch the fluid which has a single flow which is not a phase flow in a branch part.

Further, the cross-sectional shape of the groove is not limited to the semicircular shape as in each of the above embodiments, but may be a rectangular shape, a V shape, a U shape, or a trapezoidal shape.
In the first embodiment and the like, the shape of the hole 20 is a square in plan view, but each of the small holes connected to the four corners of the square is perforated to eliminate the rounded corners of the square. The pressure sensor 80 can be easily and reliably disposed. Note that the shape of the hole in which the sensor is disposed is not limited to the square shape in plan view, and may be a circular shape or other shapes.

Furthermore, in the above-described embodiment, the diaphragm 81 is formed of silicon, but the configuration of the diaphragm 81 is not limited to this. As a material for the diaphragm, in addition to a metal material such as silicon, an insulating material such as quartz, SiO ₂ , or SiN can be used. As a detection method, it is possible to detect a change in resistance or voltage of a strain gauge or a piezoelectric element, or a change in frequency of a vibrator.

  INDUSTRIAL APPLICABILITY The present invention can be used in the field of analysis and synthesis related to high-efficiency reaction of fluid in a micro space inside a microchip.

The disassembled perspective view of the microchip in 1st Embodiment of this invention. The top view of the microchip in the said embodiment. Sectional drawing of the microchip in the said embodiment. The perspective view of the microchip in 2nd Embodiment of this invention. The perspective view of the sensor in the said embodiment. The disassembled perspective view of the microchip in 3rd Embodiment of this invention. Sectional drawing of the microchip in the said embodiment. The top view of the microchip in 4th Embodiment of this invention. The figure explaining the flow of the sample in the flow path in the said embodiment. The block diagram of the control apparatus in the said embodiment. The top view of the microchip in 5th Embodiment of this invention. The top view of the microchip in 6th Embodiment of this invention. The disassembled perspective view of the sensor in the said embodiment. The XIV-XIV line arrow figure of FIG. The partial top view of the sensor in the said embodiment. The partial top view of the sensor in 7th Embodiment of this invention. The top view of the microchip in the modification of this invention. The schematic diagram in a prior art example.

Explanation of symbols

1, 2, 3, 4, 5, 6... Microchip 11, 12, 21, 31, 32, 33, 41, 42, 51, 52... Substrate 14, 44, 54, 321, 322. · Grooves 20, 30 ... holes 25, 35 ... through holes 80, 90, 100, 110, 130 ... pressure sensors 91, 131 ... flow path parts 92 ... sensor parts (main body)
94, 114, 124, 134 ... connecting groove 111 ... sensor part 112 ... block (lid part)
115, 125, 135... Detection unit 121, 122, 128... Introduction port 125, 126... Discharge port 135.
200: Detection circuit (control device)
BFR ... Branch part FA, FAM, FAMM ... Flow path FA1, FA2, FA3, FA4, FA5, FA6 ... Path JCT, JCTS ... Junction part RG, RG1, RG2, RG3 ... Sample (fluid)

Claims (13)

A microchip comprising a plurality of substrates stacked on each other, wherein a flow path is constituted by a plate surface of one of the substrates stacked on top of each other and a groove formed by depression from the plate surface of the other substrate. ,
The one substrate is provided with a sensor for detecting the state of fluid in the flow path, and penetrates toward the opening of the groove, and when viewed in plan, the width direction of the flow path A microchip, wherein a hole larger than the dimension of the groove is formed. The microchip according to claim 1, wherein
The microchip according to claim 1, wherein a thickness of the substrate on which the hole is formed is larger than a height of the sensor disposed in the hole. The microchip according to claim 1 or 2,
A plurality of inlets for introducing the fluid into the channel and an outlet for discharging the fluid from the channel are respectively formed in the substrate so as to communicate with the groove.
The flow path has a merging portion through which the fluid flows from the plurality of inlets along a plurality of paths,
The microchip according to claim 1, wherein the hole is provided between the introduction port and the junction in the flow path. The microchip according to any one of claims 1 to 3,
The substrate is formed so that an introduction port for introducing the fluid into the flow path and a plurality of discharge ports for discharging the fluid from the flow path communicate with the groove, respectively.
The flow path has a branch portion in which the fluid flows in a plurality of paths to the plurality of discharge ports,
The microchip according to claim 1, wherein the hole is provided between the branch portion and the discharge port in the flow path. The microchip according to any one of claims 1 to 4, wherein
The microchip according to claim 1, wherein the sensor is a pressure sensor that detects a pressure of the fluid. The microchip according to claim 5, wherein
The microchip according to claim 1, wherein the pressure sensor detects a pressure difference between fluids flowing through a plurality of paths in the flow path. A microchip according to any one of claims 1 to 6, comprising:
A sensor integrated microchip, wherein the sensor is incorporated in the hole. A microchip comprising a plurality of substrates stacked on each other, wherein a flow path is constituted by a plate surface of one of the substrates stacked on top of each other and a groove formed by depression from the plate surface of the other substrate. ,
A flow passage piece that is connected to the groove and constitutes the flow passage is disposed in a through hole that penetrates the plurality of stacked substrates.
The flow path piece includes a sensor portion provided in the connection groove, and a plate member that is stacked on the side of the sensor portion where the connection groove is formed,
The microchip according to claim 1, wherein the sensor unit is provided with a sensor unit body that is disposed inside the connection groove and detects a fluid state. The microchip according to claim 8, wherein
The flow path has a merging portion into which the fluid flows, and / or a branch portion in which the fluid flows separately,
The merging portion and / or the branch portion is constituted by the connecting groove,
The microchip according to claim 1, wherein the sensor unit body is disposed in the vicinity of the merging unit and / or in the vicinity of the branching unit. The microchip according to claim 8 or 9, wherein
In the flow path sensor part, a plurality of paths constituted by the connection grooves extend side by side,
The sensor unit body has a detection unit that detects a pressure difference of the fluid,
The detection unit is provided at a boundary portion between the plurality of paths so as to come into contact with any of fluids on both sides of the boundary portion. The microchip according to any one of claims 8 to 10,
In the flow path sensor unit body, the plurality of paths constituted by the connecting grooves extend from different directions and merge.
The sensor unit includes a detection unit that detects a pressure difference of the fluid,
The microchip is characterized in that the detection unit is provided at a portion where the fluids of the plurality of paths are combined and in contact with any of these fluids. A plurality of substrates that are stacked on each other, and the flow of the flow into the microchip in which the flow path is constituted by a plate surface of one of the substrates stacked on each other and a groove that is recessed from the plate surface of the other substrate. A sensor-integrated microchip in which a sensor for detecting a fluid state in a channel is incorporated,
A through-hole penetrating the plurality of stacked substrates and communicating with the groove is formed for disposing the sensor,
The sensor integrally includes a main body and a flow path portion,
The sensor-integrated microchip, wherein the flow path portion is formed with a connection groove that is connected to the groove when the sensor is disposed in the through-hole and forms the flow path. The sensor-integrated microchip according to claim 7 or 12,
Or the microchip according to any one of claims 8 to 11, and
A microchip system comprising: a control device that performs feedback control on the state quantity of the fluid detected by the sensor.

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