JP2006167535A - Plotting apparatus, method of manufacturing electro-optic device and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a plotting apparatus in which the length of a liquid feed path for a liquid material is shortened compared to a prior art, a method of manufacturing an electro-optic device and electronic equipment. <P>SOLUTION: The plotting apparatus 1 performs plotting on a work 10A by relatively moving a head carriage 3 loaded with a droplet discharge head for discharging the liquid material as droplets and a stage 4 holding the work 10A and by discharging the droplets of the liquid material from the droplet discharge head, and the plotting apparatus 1 is provided with: a carriage moving mechanism 5 for moving the head carriage 3; a liquid storage part 71 for storing the liquid material; and the liquid feed path 81 for connecting the liquid storage part 71 to the droplet discharge head to feed the liquid material in the liquid storage part 71 to the droplet discharge head. The liquid storage part 71 is disposed in a space above a space where the head carriage 3 is moved and in the near center of the movable range of the head carriage 3 in a plane view. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a drawing apparatus, an electro-optical device manufacturing method, and an electronic apparatus.

For example, as a method of forming a filter layer of a color filter of a liquid crystal display device or a light emitting layer of an organic electroluminescence display device, a liquid material droplet is discharged onto the workpiece using an ink jet drawing device, There is known a method of solidifying the liquid material applied thereon to form a film forming portion such as a filter layer or a light emitting layer.
Conventionally, in such an ink jet drawing apparatus, since the pressure of the liquid material supplied to the droplet discharge head must be negative, the tank (liquid storage part) for storing the liquid material is positioned lower than the droplet discharge head. (For example, refer to Patent Document 1). Therefore, even if the droplet discharge head moves or the stage holding the workpiece moves, the tank is installed outside the movement range of the droplet discharge head and the stage so that they do not interfere with the tank. . For this reason, the length of the tube (liquid supply flow path) for supplying the liquid material in the tank to the droplet discharge head is long.
As described above, in the conventional drawing apparatus, the flow path of the liquid material is extremely long, which causes the problem of poor workability when the liquid material is initially filled, or when the liquid material is replaced with another type. For example, the liquid material in the long flow path is wasted, so that there is a problem that the consumption amount of the liquid material is large.

JP 2002-248794 A

  An object of the present invention is to provide a drawing apparatus, a method for manufacturing an electro-optical device, and an electronic apparatus that can reduce the length of a liquid supply channel for a liquid material.

Such an object is achieved by the present invention described below.
The drawing apparatus of the present invention relatively moves a head carriage mounted with a droplet discharge head that discharges a liquid material as droplets and a stage that holds a workpiece, and drops liquid material droplets from the droplet discharge head. A drawing device for drawing on the workpiece by discharging
A carriage moving mechanism for moving the head carriage;
A liquid storage part for storing a liquid material;
A liquid supply passage for connecting the liquid storage section and the droplet discharge head, and supplying a liquid material in the liquid storage section to the droplet discharge head;
The liquid storage section is a space above the space in which the head carriage moves, and is installed near the center of the movable range of the head carriage in plan view.

According to such a drawing apparatus, the length of the liquid material supply channel can be shortened as compared with the conventional one, and as a result, there are the following advantages.
First, since the flow resistance (pressure loss) in the liquid supply flow path is small, the liquid material can be stably supplied from the liquid storage part to the droplet discharge head, and thus accurate and stable drawing operation. It can be performed.
Secondly, it is excellent in workability when initially filling the liquid material.
Third, since the initial filling amount of the liquid material can be small, the consumption amount of the liquid material can be saved. In addition, when the liquid material filled in the drawing apparatus is replaced with another type, the liquid material remaining in the liquid supply flow path is wasted, but the amount of wasted can be reduced.

In the drawing apparatus of the present invention, it is preferable that a pressure adjusting valve for adjusting the pressure of the liquid material supplied to the droplet discharge head to be a substantially constant negative pressure is provided in the middle of the liquid supply flow path.
As a result, the pressure of the liquid material supplied to the droplet discharge head can always be maintained at an appropriate level of negative pressure. Therefore, it is possible to always stably and accurately eject droplets from the droplet ejection head. In addition, it is possible to implement the liquid storage unit at a position higher than the droplet discharge head with a simple configuration.

In the drawing apparatus of the present invention, it is preferable that the pressure adjusting valve is mounted on the head carriage.
As a result, the pressure regulating valve can be disposed at a position close to the droplet discharge head, so that the pressure of the liquid material supplied to the droplet discharge head can be controlled more accurately.
In the drawing apparatus of the present invention, the pressure regulating valve includes a primary chamber that communicates with the liquid storage unit, a secondary chamber that communicates with the droplet discharge head, one surface facing the secondary chamber, and the other chamber. A diaphragm installed so that the surface faces the outside air, a communication path that communicates the primary chamber and the secondary chamber, and a valve body that opens and closes the communication path in accordance with displacement of the diaphragm preferable.
Thereby, a highly accurate pressure adjusting function can be obtained with a pressure adjusting valve having a relatively simple structure.

In the drawing apparatus of the present invention, it is preferable that the liquid storage part has a flexible bag shape.
Thereby, the deaeration state of a liquid material can be hold | maintained reliably.
In the drawing apparatus of the present invention, the carriage movement mechanism moves the head carriage in a horizontal one-dimensional direction,
It is preferable to further include a stage moving mechanism that moves the stage in a horizontal direction that is perpendicular to the moving direction of the head carriage.
As a result, the relative movement mechanism between the head carriage and the stage can be distributed between the carriage movement mechanism and the stage movement mechanism, so that the overall structure can be made relatively simple and the movement of the head carriage and the stage can be made. Control becomes easy and high-precision drawing can be performed.

The method of manufacturing an electro-optical device according to the present invention includes a step of performing drawing on a work using the drawing device of the present invention, and forming a film-forming portion made of the liquid material on the work.
Accordingly, since the electro-optical device is manufactured using the drawing apparatus as described above, it is possible to manufacture with high accuracy and high efficiency. Examples of the electro-optical device (device) include a liquid crystal display device, an organic EL (Electro-Luminescence) device, an electron emission device, a PDP (Plasma Display Panel) device, and an electrophoretic display device. The electron emission device is a concept including a so-called FED (Field Emission Display) device or SED (Surface-Conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.
According to another aspect of the invention, there is provided an electronic apparatus including the electro-optical device manufactured by the method for manufacturing the electro-optical device according to the invention.
Accordingly, a high-performance and low-cost electronic device can be provided by mounting an electro-optical device manufactured with high accuracy and high efficiency.

Hereinafter, a drawing apparatus, an electro-optical device manufacturing method, and an electronic apparatus according to the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.
1, 2 and 3 are a perspective view, a plan view and a side view, respectively, showing an embodiment of a drawing apparatus of the present invention.
In the drawing apparatus 1 shown in these drawings, a liquid material 111 for forming a filter layer is dropped from a nozzle 21 of a droplet discharge head (inkjet head) 2 on a workpiece 10A for manufacturing a color filter substrate 10. Are discharged and drawing is performed.

Here, in the present invention, the “liquid material” refers to a material having a viscosity that can be discharged from the nozzle 21 of the droplet discharge head 2 including a material for forming a film forming portion in the electro-optical device. In this case, it does not matter whether the material is aqueous or oily. Moreover, it is sufficient if it has fluidity (viscosity) that can be discharged from the nozzle 21, and even if a solid substance is dispersed, it may be a fluid as a whole.
Further, the liquid material 111 in the present embodiment is an organic solvent ink in which a pigment for forming a color element filter layer of the color filter substrate 10 is dissolved or dispersed in an organic solvent.

As shown in FIGS. 1 to 3, the drawing apparatus 1 includes a head carriage 3, a carriage moving mechanism 5 that moves the head carriage 3, a stage 4 that holds a plate-like workpiece 10 </ b> A, and a stage that moves the stage 4. The moving mechanism 6 and the liquid storage part mounting part 7 are provided.
A plurality of droplet discharge heads 2 are mounted on the head carriage 3. The droplet discharge head 2 will be described later.

The head carriage 3 moves in a horizontal one-dimensional direction (the left-right direction in FIGS. 1 and 2) by the operation of the carriage moving mechanism 5. The carriage moving mechanism 5 can be configured to use, for example, a linear motor or a feed screw.
Both ends of the carriage moving mechanism 5 are supported by the support 11. Thereby, the carriage moving mechanism 5 is arranged so as to straddle the space in which the stage 4 moves.

The stage 4 has a horizontal plane, and is configured so that the workpiece 10A can be fixed or held on the plane.
The stage 4 moves in a direction perpendicular to the moving direction of the head carriage 3 and in a horizontal direction by the operation of the stage moving mechanism 6. The stage moving mechanism 6 can be configured using, for example, a linear motor or a feed screw.
In such a drawing apparatus 1, the head carriage 3 can be moved relative to the workpiece 10 </ b> A held on the stage 4 in a two-dimensional direction by a combination of operations of the carriage moving mechanism 5 and the stage moving mechanism 6. Thereby, it is possible to perform drawing on the entire surface of the workpiece 10A.

A liquid storage part 71 that stores the liquid material 111 is mounted on the liquid storage part mounting part 7. The same number of liquid reservoirs 71 as the number of liquid droplet ejection heads 2 mounted on the head carriage 3 are provided. The liquid reservoir mounting unit 7 is fixed to a ceiling 73 of a room in which the drawing apparatus 1 is installed via a support 72 (see FIG. 3).
Each liquid storage part 71 and each droplet discharge head 2 are connected by an individual liquid supply flow path 81. The tubes constituting these liquid supply flow paths 81 are grouped together to form a tube bundle 8, and this tube bundle 8 is stretched between the liquid storage portion mounting portion 7 and the head carriage 3. . The length of the tube bundle 8 is set to a length sufficient to allow the head carriage 3 to move.

As described above, in the drawing apparatus 1, the liquid storage unit 71 is not mounted on the head carriage 3, but is fixedly installed at a separate location, so that the weight of the head carriage 3 is reduced. Inertia at the time is reduced, and the positional accuracy of the head carriage 3 can be controlled with high accuracy. Therefore, accurate drawing can be performed. Furthermore, since the burden on the carriage moving mechanism 5 is small, the cost of the carriage moving mechanism 5 can be reduced.
Further, since the structure of the head carriage 3 can be simplified, it is possible to improve maintainability such as head replacement.

As shown in FIGS. 1 and 3, the liquid storage section mounting portion 7 on which the liquid storage section 71 is mounted is installed in a space above the space in which the head carriage 3 moves. Further, the liquid storage unit mounting unit 7 on which the liquid storage unit 71 is mounted is disposed substantially at the center of the movable range (movable region) of the head carriage 3 in a plan view shown in FIG.
By arranging the liquid storage part 71 at the position as described above, in the drawing apparatus 1, when the liquid storage part 71 is installed so as not to move, the length of the liquid supply flow path 81 (tube bundle 8) is increased. Can be as short as possible.

Therefore, in the drawing apparatus 1, the length of the liquid supply channel 81 can be shortened as compared with the conventional art. This has the following advantages.
First, since the flow resistance (pressure loss) in the liquid supply flow path 81 is small, the liquid material 111 can be stably supplied from the liquid storage portion 71 to the liquid droplet ejection head 2, so A stable drawing operation can be performed.
Second, it is excellent in workability when initially filling the liquid material 111.
Third, since the initial filling amount of the liquid material 111 is small, the consumption amount of the liquid material 111 can be saved. Further, when the liquid material 111 filled in the drawing apparatus 1 is replaced with another type, the liquid material 111 remaining in the liquid supply channel 81 is wasted, but the amount of wasted is small. That's it.

FIG. 4 is a perspective view of the droplet discharge head 2 viewed from the bottom side.
As shown in FIG. 4, a large number of nozzles (nozzle holes) 21 are formed on the nozzle surface 22 of the droplet discharge head 2. In the configuration shown in the drawing, these nozzles 21 form nozzle rows that are linearly arranged at equal intervals, and two nozzle rows are formed side by side.
Such a droplet discharge head 2 is constituted by a known inkjet head. That is, the droplet discharge head 2 has, for each nozzle 21, a cavity that communicates with the nozzle 21 and an actuator that changes the pressure of the liquid material 111 in the cavity. A droplet of the liquid material 111 is discharged from the nozzle 21. As the droplet discharge head 2, a piezoelectric actuator or a type using an electrostatic actuator may be used, or a heater that causes film boiling in the liquid material 111 in the cavity may be used as the actuator.

FIG. 5 is a side view showing the configuration of the head carriage 3 and the liquid reservoir mounting portion 7.
As shown in FIG. 5, each liquid droplet ejection head 2 mounted on the head carriage 3 and each liquid storage section 71 mounted on the liquid storage section mounting section 7 are connected by individual liquid supply channels 81. ing. The liquid material 111 in the liquid reservoir 71 is supplied to the corresponding droplet discharge head 2 through the liquid supply flow path 81.

The liquid storage unit 71 in the present embodiment has a flexible bag shape. The liquid storage part 71 is formed in a bag shape (bag shape) by fusing the periphery of a sheet material made of a laminate including a gas barrier layer and a moisture impermeable layer. The tube constituting the liquid supply flow path 81 is also made of a material having gas barrier properties and moisture impermeability.
The liquid storage unit 71 is vacuum-filled with a liquid material 111 from which dissolved oxygen and the like are removed by performing a deaeration process. Thereby, it is possible to reliably prevent bubbles from being generated in the liquid material 111, and it is possible to accurately and reliably discharge droplets from the nozzles 21 of the droplet discharge head 2.

In the middle of the liquid supply flow path 81, a pressure adjustment valve 9 that adjusts the pressure of the liquid material 111 supplied to the droplet discharge head 2 to be a substantially constant negative pressure is provided. That is, the same number of pressure adjusting valves 9 as the droplet discharge heads 2 and the liquid storage units 71 are provided. These pressure adjusting valves 9 are mounted on the head carriage 3.
FIG. 6 is a sectional view of the pressure regulating valve 9. As shown in FIG. 6, the pressure regulating valve 9 opens and closes the primary chamber 91, the secondary chamber 92, the diaphragm 93, the communication passage 94 that communicates the primary chamber 91 and the secondary chamber 92, and the communication passage 94. And a valve body 95.

A liquid supply flow path 81 from the liquid storage section 71 is connected to an inlet 96 provided in communication with the primary chamber 91. That is, the primary chamber 91 communicates with the liquid storage unit 71, and the liquid material 111 supplied from the liquid storage unit 71 first flows into the primary chamber 91.
A liquid supply flow path 81 directed to the droplet discharge head 2 is connected to an outlet 97 provided in communication with the secondary chamber 92. That is, the secondary chamber 92 communicates with the droplet discharge head 2, and the liquid material 111 in the secondary chamber 92 is supplied to the droplet discharge head 2.

The diaphragm 93 is installed so that one surface thereof faces the secondary chamber 92 and the other surface faces the outside air. The diaphragm 93 includes a diaphragm main body 931 made of a flexible resin film, and a pressure receiving plate 932 fixed to the center of the inner surface of the diaphragm main body 931.
A pressure receiving plate urging spring 98 that presses the pressure receiving plate 932 outward is installed in the secondary chamber 92.

The valve body 95 includes a disc-shaped flange portion 951, a shaft portion 952 that protrudes from the center of the flange portion 95 and passes through the communication passage 94, and a packing 953 that is installed around the root portion of the shaft portion 952. Has been.
In the primary chamber 91, a valve body biasing spring 99 that presses the flange portion 951 toward the communication path 94 is installed. Normally, the packing 953 is pressed against the opening on the primary chamber 91 side of the communication passage 94 by the urging force of the valve body urging spring 99 to close the communication passage 94.

In such a pressure regulating valve 9, the pressure receiving plate urging spring 98 urges the diaphragm 93 toward the outside, so that the inside of the secondary chamber 92 is kept at a negative pressure. The pressure of the supplied liquid material 111 is also maintained at a negative pressure.
The spring constant of the pressure receiving plate urging spring 98 is set to such a value that the negative pressure in the droplet discharge head 2 is at an appropriate level.

  When the droplet discharge head 2 discharges the droplets, the liquid material 111 in the secondary chamber 92 is consumed, and when the pressure in the secondary chamber 92 drops below an appropriate level, the diaphragm 93 is pushed to the atmospheric pressure and the inner side. Deforms (displaces). When the diaphragm 93 is deformed inward, the pressure receiving plate 932 presses the tip of the shaft portion 952 of the valve body 95, and the valve body 95 moves in the valve opening direction. When the valve body 95 is opened, the liquid material 111 in the primary chamber 91 flows into the secondary chamber 92 through the communication path 94. As the liquid material 111 flows into the secondary chamber 92, when the negative pressure in the secondary chamber 92 recovers to an appropriate level, the diaphragm 93 returns to the original position, and the valve body 95 moves in the valve closing direction, and the communication is continued. The passage 94 is blocked.

In the drawing apparatus 1, the pressure of the liquid material 111 supplied to the droplet discharge head 2 can always be maintained at an appropriate level of negative pressure by the operation of the pressure adjustment valve 9 as described above. Accordingly, it is possible to always stably and accurately eject droplets from the droplet ejection head 2.
Further, by providing the pressure adjusting valve 9, it is possible to install the liquid storage unit 71 at a position higher than the droplet discharge head 2.

FIG. 7 is a block diagram showing an electrical circuit configuration of the drawing apparatus 1 shown in FIGS.
As shown in FIG. 7, the drawing apparatus 1 includes a control unit 13 that controls operations of the droplet discharge head 2, the carriage moving mechanism 5, and the stage moving mechanism 6. The control unit 13 includes an input buffer memory 131, a storage unit 132, a processing unit 133, a scanning drive unit 134, a head drive unit 135, a carriage position detection unit 136, and a stage position detection unit 137. .

  The input buffer memory 131 and the processing unit 133 are connected so that they can communicate with each other. The processing unit 133 and the storage unit 132 are connected so that they can communicate with each other. The processing unit 133 and the scan driving unit 134 are connected to be communicable with each other. The processing unit 133 and the head driving unit 135 are connected so as to communicate with each other. The scanning drive unit 134 is connected to the carriage moving mechanism 5 and the stage moving mechanism 6 so as to communicate with each other. Similarly, the head driving unit 135 is connected to each of the plurality of droplet discharge heads 2 so as to be able to communicate with each other.

  The input buffer memory 131 receives data relating to the position at which the liquid material 111 is ejected, that is, drawing pattern data, from the external information processing apparatus. The input buffer memory 131 supplies the drawing pattern data to the processing unit 133, and the processing unit 133 stores the drawing pattern data in the storage unit 132. The storage unit 132 includes a RAM, a magnetic recording medium, a magneto-optical recording medium, or the like.

  The carriage position detection unit 136 detects the position (movement distance) of the head carriage 3 and inputs the detection signal to the processing unit 133. The stage position detection unit 137 detects the position (movement distance) of the stage 4, that is, the workpiece 10 </ b> A, and inputs the detection signal to the processing unit 133. The carriage position detection unit 136 and the stage position detection unit 137 are constituted by, for example, a linear encoder, a laser length measuring device, or the like.

The processing unit 133 controls the operation of the carriage moving mechanism 5 and the stage moving mechanism 6 (closed loop control) via the scanning drive unit 134 based on the detection signals of the carriage position detecting unit 136 and the stage position detecting unit 137. The position of the head carriage 3 and the position of the workpiece 10A are controlled.
Further, the processing unit 133 controls the movement speed of the stage 4, that is, the workpiece 10 </ b> A by controlling the operation of the stage moving mechanism 6.

Further, the processing unit 133 provides the head driving unit 135 with a selection signal for designating ON / OFF of the nozzle 21 at each ejection timing based on the drawing pattern data. Based on this selection signal, the head driving unit 135 gives a discharge signal necessary for discharging the liquid material 111 to the droplet discharge head 2. As a result, the liquid material 111 is discharged as droplets from the corresponding nozzle 21 in the droplet discharge head 2.
The control means 13 may be a computer including a CPU, ROM, and RAM. In this case, the function of the control means 13 is realized by a software program executed by a computer. Of course, the control means 13 may be realized by a dedicated circuit (hardware).

Next, a method for manufacturing the color filter substrate 10 using the drawing apparatus 1 as described above will be described in detail.
FIG. 8 is a cross-sectional view illustrating a method for manufacturing the color filter substrate 10. As illustrated in FIG. 8, the workpiece 10 </ b> A includes a support substrate 12 having light transmittance, a black matrix 14 formed on the support substrate 12, and a bank 16 formed on the black matrix 14. The black matrix 14 is formed of a light-shielding material.

  The black matrix 14 and the bank 16 on the black matrix 14 define a plurality of matrix-shaped light transmission portions on the support substrate 12, that is, a plurality of matrix-shaped color elements (discharge regions) 18R, 18G, and 18B. Located so that. That is, the color elements 18R, 18G, and 18B are partitioned by the support substrate 12, the black matrix 14, and the bank 16. The color element 18R is an area in which the filter layer 111FR that transmits only light in the red wavelength band is to be formed, and the color element 18G is in which the filter layer 111FG that transmits only light in the green wavelength band is to be formed. The color element 18B is a region where the filter layer 111FB that transmits only light in the blue wavelength region is to be formed.

When manufacturing the color filter substrate 10, first, a workpiece 10A is created according to the following procedure. First, a metal thin film is formed on the support substrate 12 by sputtering or vapor deposition. Thereafter, a lattice-like black matrix 14 is formed from the metal thin film by a photolithography process. Examples of the material of the black matrix 14 are metal chromium and chromium oxide. Note that the support substrate 12 is a substrate having optical transparency with respect to visible light, for example, a glass substrate. Subsequently, a resist layer made of a negative photosensitive resin composition is applied so as to cover the support substrate 12 and the black matrix 14. Then, the resist layer is exposed while closely contacting the mask film formed in a matrix pattern shape on the resist layer. Thereafter, the bank 16 is obtained by removing an unexposed portion of the resist layer by an etching process. The workpiece 10A is obtained through the above steps.
In place of the bank 16, a bank made of resin black may be used. In that case, the metal thin film (black matrix 14) becomes unnecessary, and the bank layer is only one layer.

Next, the workpiece 10A is made lyophilic by oxygen plasma treatment under atmospheric pressure. By this processing, the surface of the support substrate 12, the surface of the black matrix 14, and the surface of the bank 16 in the respective concave portions (part of the color elements) defined by the support substrate 12, the black matrix 14, and the bank 16. And become lyophilic. Further, after that, plasma processing using tetrafluoromethane as a processing gas is performed on the workpiece 10A. By the plasma treatment using tetrafluoromethane, the surface of the bank 16 in each recess is fluorinated (treated to be liquid repellent), whereby the surface of the bank 16 becomes liquid repellent. Note that the surface of the support substrate 12 and the surface of the black matrix 14 to which lyophilicity was previously imparted by plasma treatment using tetrafluoromethane slightly lose lyophilicity, but these surfaces are still lyophilic. maintain.
Depending on the material of the support substrate 12, the material of the black matrix 14, and the material of the bank 16, a surface exhibiting desired lyophilicity and liquid repellency can be obtained without performing the above surface treatment. In such a case, the surface treatment may not be performed.

  The workpiece 10A on which the color elements 18R, 18G, and 18B are formed as described above is carried onto the stage 4 of the drawing apparatus 1 and is held on the stage 4. The drawing apparatus 1 operates the stage moving mechanism 6 to move the workpiece 10A and pass under the head carriage 3, while discharging the droplets of the liquid material 111 from the respective droplet discharge heads 2 to each color element 18R. , 18G, 18B. At this time, as shown in FIGS. 8A to 8C, a red liquid material (color filter material) 111R is discharged to the color element 18R, and a green liquid is discharged to the color element 18G. The material (color filter material) 111G is discharged, and the blue liquid material (color filter material) 111B is discharged to the color element 18B.

When the liquid materials 111R, 111G, and 111B are applied to the color elements 18R, 18G, and 18B, the work 10A is conveyed to a drying device (not shown), and the liquid materials 111R, 111G, and 111B in the color elements 18R, 18G, and 18B are dried. . Thereby, filter layers 111FR, 111FG, and 111FB are obtained on the color elements 18R, 18G, and 18B. Note that the final filter layers 111FR, 111FG, and 111FB may be formed by repeatedly applying the liquid materials 111R, 111G, and 111B in the drawing apparatus 1 and drying in the drying apparatus and stacking them.
In addition to the above method, the liquid material 111 of each color may be applied to each of the color elements 18R, 18G, and 18B using the individual drawing devices 1 respectively.

Thereafter, the workpiece 10A is conveyed into an oven (not shown), and the filter layers 111FR, 111FG, and 111FB are reheated (post-baked) in the oven.
Next, the workpiece 10A is conveyed to a protective film forming apparatus (not shown), and a protective film (overcoat) 20 that covers the filter layers 111FR, 111FG, 111FB, and the bank 16 is formed by the protective film forming apparatus.
After the protective film 20 covering the filter layers 111FR, 111FG, 111FB and the bank 16 is formed, the protective film 20 is completely dried by a drying device. Furthermore, the work 10 </ b> A becomes the color filter substrate 10 by heating and completely curing the protective film 20 with a curing device (not shown).

The present invention as described above can be applied not only to the manufacture of the color filter substrate 10 but also to the manufacture of other electro-optical devices such as an electroluminescence display device.
FIG. 9 is a cross-sectional view illustrating a method for manufacturing the organic electroluminescence display device 30. Hereinafter, the case where the organic electroluminescence display device 30 is manufactured according to the present invention will be described. However, the description will focus on differences from the case where the color filter substrate 10 described above is manufactured, and description of similar matters will be omitted. .

A workpiece 30 </ b> A illustrated in FIG. 9 is a substrate for manufacturing the organic electroluminescence display device 30. The work 30A has a plurality of color elements (discharge regions) 38R, 38G, and 38B arranged in a matrix.
Specifically, the workpiece 30A includes a support substrate 32, a circuit element layer 34 formed on the support substrate 32, a plurality of pixel electrodes 36 formed on the circuit element layer 34, and a plurality of pixel electrodes 36. And a bank 40 formed therebetween. The support substrate 32 is a substrate having optical transparency with respect to visible light, and is, for example, a glass substrate. Each of the plurality of pixel electrodes 36 is an electrode having optical transparency with respect to visible light, for example, an ITO (Indium-Tin Oxide) electrode. The plurality of pixel electrodes 36 are arranged in a matrix on the circuit element layer 34, and each defines a color element. The bank 40 has a lattice shape and surrounds each of the plurality of pixel electrodes 36. The bank 40 includes an inorganic bank 40A formed on the circuit element layer 34 and an organic bank 40B positioned on the inorganic bank 40A.

  The circuit element layer 34 includes a plurality of scan electrodes extending in a predetermined direction on the support substrate 32, an insulating film 42 formed so as to cover the plurality of scan electrodes, and a plurality of scan electrodes positioned on the insulating film 42. A plurality of signal electrodes extending in a direction orthogonal to the direction in which the electrodes extend, a plurality of switching elements 44 located near the intersections of the scan electrodes and the signal electrodes, and polyimide formed so as to cover the plurality of switching elements 44 This is a layer having an interlayer insulating film 45. The gate electrode 44G and the source electrode 44S of each switching element 44 are electrically connected to the corresponding scan electrode and the corresponding signal electrode, respectively. A plurality of pixel electrodes 36 are located on the interlayer insulating film 45. The interlayer insulating film 45 is provided with a through hole 44V at a portion corresponding to the drain electrode 44D of each switching element 44. Between the switching element 44 and the corresponding pixel electrode 36 through the through hole 44V. The electrical connection is formed. Each switching element 44 is located at a position corresponding to the bank 40. That is, when viewed from the upper side in FIG. 9, each of the plurality of switching elements 44 is positioned so as to be covered by the bank 40.

  The recesses defined by the pixel electrode 36 and the bank 40 of the work 30A correspond to the color element 38R, the color element 38G, and the color element 38B. The color element 38R is a region in which the light emitting layer 211FR that emits light in the red wavelength region is to be formed, and the color element 38G is a region in which the light emitting layer 211FG that emits the light in the green wavelength region is to be formed. The color element 38B is a region where the light emitting layer 211FB that emits light in the blue wavelength region is to be formed.

Such a workpiece 30A can be manufactured using a known film forming technique and patterning technique.
Next, the workpiece 30A is made lyophilic by oxygen plasma treatment under atmospheric pressure. By this processing, the surface of the pixel electrode 36, the surface of the inorganic bank 40A, and the surface of the organic bank 40B in the color elements 38R, 38G, and 38B defined by the pixel electrode 36 and the bank 40 are lyophilic. Become. Further, after that, plasma processing using tetrafluoromethane as a processing gas is performed on the workpiece 30A. By the plasma treatment using tetrafluoromethane, the surface of the organic bank 40B in each recess is fluorinated (treated to be liquid repellent) so that the surface of the organic bank 40B exhibits liquid repellency. Become. Note that the surface of the pixel electrode 36 and the surface of the inorganic bank 40A previously given lyophilicity by plasma treatment using tetrafluoromethane lose some lyophilicity, but still maintain lyophilicity. .

Depending on the material of the pixel electrode 36, the material of the inorganic bank 40, and the material of the organic bank 40, a surface exhibiting desired lyophilicity and liquid repellency can be obtained without performing the above surface treatment. Sometimes. In such a case, the surface treatment may not be performed.
In addition, corresponding hole transport layers 37R, 37G, and 37B may be formed on each of the plurality of pixel electrodes 36 subjected to the surface treatment. If the hole transport layers 37R, 37G, and 37B are positioned between the pixel electrode 36 and light emitting layers 211FR, 211FG, and 211FB, which will be described later, the light emission efficiency of the electroluminescence display device is increased.

  As shown in FIGS. 9A to 9C, the color filter substrate described above is used for the workpiece 30A on which the color elements 38R, 38G, and 38B are formed as described above, as shown in FIGS. Similarly to the case of 10, the liquid materials 211R, 211G, and 211B are applied to the color elements 38R, 38G, and 38B, respectively. The liquid material 211R includes a red organic light emitting material, the liquid material 211G includes a green organic light emitting material, and the liquid material 211B includes a blue organic light emitting material.

Thereafter, the work 30A is transferred to a drying device, and the liquid materials 211R, 211G, and 211B applied to the color elements 38R, 38G, and 38B are dried, so that the light emitting layers 211FR and FG are formed on the color elements 38R, 38G, and 38B. , FB is obtained.
Next, the counter electrode 46 is provided so as to cover the light emitting layers 211FR, 211FG, 211FB, and the bank 40. The counter electrode 46 functions as a cathode.

Then, the sealing substrate 48 and the workpiece | work 30A are adhere | attached by a mutual peripheral part, and the organic electroluminescent display apparatus 30 shown in FIG.9 (d) is obtained. Note that an inert gas 49 is sealed between the sealing substrate 48 and the workpiece 30A.
In the organic electroluminescence display device 30, light emitted from the light emitting layers 211 FR, 211 FG, and 211 FB is emitted through the pixel electrode 36, the circuit element layer 34, and the support substrate 32. The electroluminescence display device that emits light through the circuit element layer 34 in this manner is called a bottom emission type display device.

  The present invention has been described with respect to the case where the present invention is applied to the manufacture of a liquid crystal display device (color filter substrate) and the manufacture of an electroluminescence display device. However, the present invention is not limited to these, and for example, a back substrate of a plasma display device The present invention can also be applied to the manufacture of an image display device (also referred to as SED (Surface-Conduction Electron-Emitter Display) or FED (Field Emission Display)) equipped with an electron-emitting device.

<Embodiment of Electronic Device of the Present Invention>
The liquid crystal display device including the color filter substrate 10 manufactured by the method as described above, and the image display device 1000 such as the electroluminescence display device manufactured by the method as described above are used for display portions of various electronic devices. be able to.
FIG. 10 is a perspective view showing a configuration of a mobile (or notebook) personal computer to which the electronic apparatus of the present invention is applied.

In this figure, a personal computer 1100 includes a main body 1104 having a keyboard 1102 and a display unit 1106. The display unit 1106 is supported by the main body 1104 via a hinge structure so as to be rotatable. Yes.
In the personal computer 1100, the display unit 1106 includes an image display device 1000.

FIG. 11 is a perspective view showing a configuration of a mobile phone (including PHS) to which the electronic apparatus of the invention is applied.
In this figure, a cellular phone 1200 is provided with an image display device 1000 in a display unit, together with a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206.
FIG. 12 is a perspective view showing the configuration of a digital still camera to which the electronic apparatus of the present invention is applied. In this figure, connection with an external device is also simply shown.

Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an imaging device such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.
On the back of a case (body) 1302 in the digital still camera 1300, an image display device 1000 is provided in the display unit, and is configured to display based on an imaging signal from the CCD, and a finder that displays a subject as an electronic image. Function as.

A circuit board 1308 is installed inside the case. The circuit board 1308 is provided with a memory that can store (store) an imaging signal.
A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side of the case 1302 (on the back side in the illustrated configuration).
When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory of the circuit board 1308.

  In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory of the circuit board 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.

  The electronic apparatus according to the present invention includes, for example, a television, a video camera, a viewfinder type, and a monitor direct-view type video tape recorder in addition to the above-described personal computer (mobile personal computer), mobile phone, and digital still camera. , Laptop personal computers, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, videophones, security TV monitors, electronic binoculars, POS terminals , Devices equipped with touch panels (for example, cash dispensers of financial institutions, automatic ticket vending machines), medical devices (for example, electronic thermometers, blood pressure monitors, blood glucose meters, electrocardiographic display devices, ultrasonic diagnostic devices, endoscope display devices), Fish finder, various measuring instruments, instruments (eg If, gages for vehicles, aircraft, and ships), a flight simulator, various monitors, and a projection display such as a projector.

The drawing apparatus, the electro-optical device manufacturing method, and the electronic apparatus according to the present invention have been described above with reference to the illustrated embodiments. However, the present invention is not limited thereto. Moreover, each part which comprises a drawing apparatus can be substituted with the thing of the arbitrary structures which can exhibit the same function. Moreover, arbitrary components may be added.
For example, in the above-described embodiment, the entire surface of the workpiece can be drawn by moving both the head carriage and the stage in directions perpendicular to each other. However, the present invention is not limited to this configuration, and the stage is fixed. The head carriage may perform drawing on the entire surface of the work by moving in a two-dimensional direction in a horizontal plane. In this case, the liquid storage unit may be installed near the center of the two-dimensional movable region of the head carriage in plan view.

The perspective view which shows embodiment of the drawing apparatus of this invention. The top view which shows embodiment of the drawing apparatus of this invention. The side view which shows embodiment of the drawing apparatus of this invention. The perspective view which looked at the droplet discharge head from the bottom side. The side view which shows the structure of a head carriage and a liquid storage part mounting part. Sectional drawing of a pressure regulating valve. FIG. 4 is a block diagram showing an electrical circuit configuration of the drawing apparatus shown in FIGS. 1 to 3. Sectional drawing which shows the manufacturing method of a color filter board | substrate. Sectional drawing which shows the manufacturing method of an organic electroluminescent display apparatus. FIG. 14 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer to which the electronic apparatus of the invention is applied. The perspective view which shows the structure of the mobile telephone (PHS is also included) to which the electronic device of this invention is applied. FIG. 14 is a perspective view illustrating a configuration of a digital still camera to which the electronic apparatus of the invention is applied.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Drawing apparatus 2 ... Droplet discharge head 21 ... Nozzle 22 ... Nozzle surface 3 ... Head carriage 4 ... Stage 5 ... Carriage moving mechanism 6 ... Stage moving mechanism 7 ... Liquid storage part mounting part 71 …… Liquid storage part 72 …… Stand 73 …… Ceiling 8 …… Tube bundle 81 …… Liquid supply channel 9 …… Pressure adjustment valve 91 …… Primary chamber 92 …… Secondary chamber 93 …… Diaphragm 931 …… Diaphragm main body 932 …… Pressure receiving plate 94 …… Communication passage 95 …… Valve element 951 …… Flange portion 952 …… Shaft portion 953 …… Packing 96 …… Inlet 97 …… Outlet 98 …… Pressure receiving plate biasing spring 99… ... Valve urging spring 11 …… Still 13 …… Control means 131 …… Input buffer memory 132 …… Storage means 133 …… Processing part 134 …… Scanning drive part 135 …… Head drive part 136 …… Carriage position Detection means 137... Stage position detection means 10A, 30A... Work 10... Color filter substrate 12, 32... Support substrate 14 ... Black matrix 16, 40 ... Bank 20 ... Protective film 18R, 18G, 18B, 38R, 38G, 38B ... Color elements 111, 111R, 111G, 111B, 211R, 211G, 211B ... Liquid material 111FR, 111FG, 111FB ... Filter layer 30 ... Organic electroluminescence display device 34 ... Circuit element layer 36 …… Pixel electrode 40A …… Inorganic bank 40B …… Organic bank 42 …… Insulating film 44 …… Switching element 44G …… Gate electrode 44S …… Source electrode 44D …… Drain electrode 44V …… Through hole 45 …… Interlayer insulating film 46 …… Counter electrode 48 …… Sealing substrate 4 …… Inert gas 1000 …… Image display device 1100 …… Personal computer 1102 …… Keyboard 1104 …… Main body 1106 …… Display unit 1200 …… Mobile phone 1202 …… Operation buttons 1204 …… Entrance 1206 …… Send 1300 …… Digital still camera 1302 …… Case (body) 1304 …… Light receiving unit 1306 …… Shutter button 1308 …… Circuit board 1312 …… Video signal output terminal 1314 …… Input / output terminal for data communication 1430 …… TV Monitor 1440 ... Personal computer 37R, 37G, 37B ... Hole transport layer 211FR, 211FG, 211FB ... Light emitting layer

Claims (8)

By relatively moving a head carriage mounted with a droplet discharge head for discharging a liquid material as droplets and a stage for holding a workpiece, and discharging droplets of the liquid material from the droplet discharge head, A drawing device for drawing on a workpiece,
A carriage moving mechanism for moving the head carriage;
A liquid storage part for storing a liquid material;
A liquid supply passage for connecting the liquid storage section and the droplet discharge head, and supplying a liquid material in the liquid storage section to the droplet discharge head;
The drawing apparatus, wherein the liquid storage section is a space above the space in which the head carriage moves, and is installed near the center of the movable range of the head carriage in plan view.   2. The drawing apparatus according to claim 1, further comprising a pressure adjusting valve that adjusts the pressure of the liquid material supplied to the droplet discharge head to a substantially constant negative pressure in the middle of the liquid supply flow path.   The drawing apparatus according to claim 2, wherein the pressure adjustment valve is mounted on the head carriage.   The pressure regulating valve includes a primary chamber communicating with the liquid storage unit, a secondary chamber communicating with the droplet discharge head, and one surface faces the secondary chamber and the other surface faces the outside air. 4. The drawing according to claim 2, further comprising: a diaphragm installed in the chamber; a communication path that communicates the primary chamber and the secondary chamber; and a valve body that opens and closes the communication path when the diaphragm is displaced. apparatus.   The drawing apparatus according to claim 1, wherein the liquid storage part has a flexible bag shape. The carriage moving mechanism moves the head carriage in a horizontal one-dimensional direction.
The drawing apparatus according to claim 1, further comprising a stage moving mechanism that moves the stage in a horizontal direction that is perpendicular to a moving direction of the head carriage.   An electro-optical device manufacturing method, comprising: a step of performing drawing on a workpiece using the drawing device according to claim 1 and forming a film-forming portion of the liquid material on the workpiece. Method. An electronic apparatus comprising the electro-optical device manufactured by the electro-optical device manufacturing method according to claim 7.

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