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JP2006145546A5 - - Google Patents

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Publication number
JP2006145546A5
JP2006145546A5 JP2005356704A JP2005356704A JP2006145546A5 JP 2006145546 A5 JP2006145546 A5 JP 2006145546A5 JP 2005356704 A JP2005356704 A JP 2005356704A JP 2005356704 A JP2005356704 A JP 2005356704A JP 2006145546 A5 JP2006145546 A5 JP 2006145546A5
Authority
JP
Japan
Prior art keywords
weight
fixing portion
acceleration sensor
sensor according
peripheral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005356704A
Other languages
Japanese (ja)
Other versions
JP2006145546A (en
JP4093267B2 (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2005356704A priority Critical patent/JP4093267B2/en
Priority claimed from JP2005356704A external-priority patent/JP4093267B2/en
Publication of JP2006145546A publication Critical patent/JP2006145546A/en
Publication of JP2006145546A5 publication Critical patent/JP2006145546A5/ja
Application granted granted Critical
Publication of JP4093267B2 publication Critical patent/JP4093267B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Claims (6)

錘固定部を可撓的に支持する周辺固定部と、
前記周辺固定部に固定する台座部と、
前記錘固定部に固定され、下部の周囲に切除部が設けられた錘部とを、
備えたことを特徴とする加速度センサ。 A peripheral fixing portion that flexibly supports the weight fixing portion;
A pedestal portion to be fixed to the peripheral fixing portion;
A weight part fixed to the weight fixing part and provided with a cutting part around the lower part;
An acceleration sensor comprising: 前記錘部の変位を制限するために該錘部を一定の間隔をおいて覆うように配置したストッパを更に備えたことを特徴とする請求項１記載の加速度センサ。   The acceleration sensor according to claim 1, further comprising a stopper disposed so as to cover the weight portion at a predetermined interval in order to limit the displacement of the weight portion. 錘固定部、該錘固定部の周辺に配置された周辺固定部、該錘固定部を該周辺固定部に可撓的に接続する梁部を一体に形成した基板と、
前記錘固定部よりも大きな面積を有する錘部と、
前記錘部の周辺に所定の間隙を介して配置される台座部と、
前記台座部と周辺固定部、及び前記錘固定部と前記錘部とをそれぞれ接続する接続層とで構成され、
前記錘部の下部の周囲に切除部が設けられたことを特徴とする加速度センサ。 A weight fixing portion, a peripheral fixing portion disposed around the weight fixing portion, a substrate integrally formed with a beam portion that flexibly connects the weight fixing portion to the peripheral fixing portion;
A weight portion having an area larger than the weight fixing portion;
A pedestal portion disposed around the weight portion with a predetermined gap;
The pedestal portion and the peripheral fixing portion, and the weight fixing portion and the connection layer that connects the weight portion, respectively,
An acceleration sensor, wherein a cut portion is provided around a lower portion of the weight portion. 前記基板は、前記錘部の変位を制限するストッパを更に含むことを特徴とする請求項３記載の加速度センサ。 The acceleration sensor according to claim 3, wherein the substrate further includes a stopper that limits displacement of the weight portion. 前記切除部は段差部によって構成されることを特徴とする請求項１、２、３または４記載の加速度センサ。 The acceleration sensor according to claim 1, wherein the cut portion includes a stepped portion. 前記切除部は複数の平面によって構成されることを特徴とする請求項１、２、３または４記載の加速度センサ。 The acceleration sensor according to claim 1, wherein the excision part is constituted by a plurality of planes.
JP2005356704A 2005-12-09 2005-12-09 Acceleration sensor Expired - Fee Related JP4093267B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005356704A JP4093267B2 (en) 2005-12-09 2005-12-09 Acceleration sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005356704A JP4093267B2 (en) 2005-12-09 2005-12-09 Acceleration sensor

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2002366814A Division JP4518738B2 (en) 2002-12-18 2002-12-18 Acceleration sensor

Publications (3)

Publication Number Publication Date
JP2006145546A JP2006145546A (en) 2006-06-08
JP2006145546A5 true JP2006145546A5 (en) 2007-07-12
JP4093267B2 JP4093267B2 (en) 2008-06-04

Family

ID=36625375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005356704A Expired - Fee Related JP4093267B2 (en) 2005-12-09 2005-12-09 Acceleration sensor

Country Status (1)

Country Link
JP (1) JP4093267B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7845229B2 (en) 2006-08-11 2010-12-07 Rohm Co., Ltd. Acceleration sensor
JP5112659B2 (en) * 2006-08-11 2013-01-09 ローム株式会社 Acceleration sensor, sensor chip and manufacturing method thereof
JP4799533B2 (en) * 2007-11-19 2011-10-26 Ｏｋｉセミコンダクタ株式会社 Semiconductor acceleration sensor

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