JP2006014208A - 水晶発振器 - Google Patents
水晶発振器 Download PDFInfo
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- JP2006014208A JP2006014208A JP2004191826A JP2004191826A JP2006014208A JP 2006014208 A JP2006014208 A JP 2006014208A JP 2004191826 A JP2004191826 A JP 2004191826A JP 2004191826 A JP2004191826 A JP 2004191826A JP 2006014208 A JP2006014208 A JP 2006014208A
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- 239000013078 crystal Substances 0.000 title claims abstract description 65
- 239000000758 substrate Substances 0.000 claims abstract description 48
- 238000010438 heat treatment Methods 0.000 claims abstract description 39
- 230000010355 oscillation Effects 0.000 claims abstract description 22
- 230000020169 heat generation Effects 0.000 claims description 4
- 239000011810 insulating material Substances 0.000 claims description 2
- 230000008859 change Effects 0.000 abstract description 30
- 230000002093 peripheral effect Effects 0.000 abstract description 14
- 238000001514 detection method Methods 0.000 abstract description 8
- 239000000919 ceramic Substances 0.000 abstract description 2
- 238000004140 cleaning Methods 0.000 description 6
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 6
- 239000002184 metal Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000006903 response to temperature Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
- H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/0504—Holders or supports for bulk acoustic wave devices
- H03H9/0528—Holders or supports for bulk acoustic wave devices consisting of clips
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
- H03H9/0542—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a lateral arrangement
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
- H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
- H03H9/0552—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement the device and the other elements being mounted on opposite sides of a common substrate
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L1/00—Stabilisation of generator output against variations of physical values, e.g. power supply
- H03L1/02—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
- H03L1/04—Constructional details for maintaining temperature constant
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
【解決手段】 パッケージ内にセラミックスなどの基板を当該基板の周縁部が支持されるように設け、この基板の一面及び他面の少なくとも一方に基板の周縁に沿って当該基板の内側領域を囲むように抵抗発熱層からなる帯状の加熱手段を設ける。そして加熱手段により囲まれた領域内にて水晶振動子、発振回路部及び感温素子を各々パッケージの内面に接しない状態で装着し、感温素子の温度検出値に基づいて温度制御回路部を介して加熱手段を制御する。
【選択図】 図1
Description
この基板の一面及び他面の少なくとも一方に当該基板の内側領域を囲むように配置された加熱手段と、
この加熱手段により囲まれた領域内に設けられた水晶振動子及び発振回路部と、
前記加熱手段により囲まれた領域内に設けられ、その出力に応じて前記加熱手段の発熱量が制御される感温素子と、を備えたことを特徴とする。
21 台座
22 蓋体
3 基板
4 ヒータ
51 水晶振動子
52 発振回路部
53 感温素子
54 周辺回路部品
55 温度制御部
63 ワイヤ
Claims (7)
- パッケージ内に設けられた基板と、
この基板の一面及び他面の少なくとも一方に当該基板の内側領域を囲むように配置された加熱手段と、
この加熱手段により囲まれた領域内に設けられた水晶振動子及び発振回路部と、
前記加熱手段により囲まれた領域内に設けられ、その出力に応じて前記加熱手段の発熱量が制御される感温素子と、を備えたことを特徴とする水晶発振器。 - 基板は加熱手段よりも外側部位にて支持されており、
基板に設けられている部品はパッケージに接していないことを特徴とする請求項1記載の水晶発振器。 - 加熱手段は、抵抗発熱層により構成されたことを特徴とする請求項1または2記載の水晶発振器。
- パッケージ内は真空雰囲気であることを特徴とする請求項1ないし3のいずれか一に記載の水晶発振器。
- パッケージ内は断熱材が充填されていることを特徴とする請求項1ないし3のいずれか一に記載の水晶発振器。
- 水晶振動子は、水晶振動子用パッケージ内に封入されていることを特徴とする請求項1ないし5のいずれか一に記載の水晶発振器。
- 加熱手段により囲まれた領域内に更に加熱手段が設けられていることを特徴とする請求項1ないし6のいずれか一に記載の水晶発振器。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004191826A JP4354347B2 (ja) | 2004-06-29 | 2004-06-29 | 水晶発振器 |
US11/154,289 US7088032B2 (en) | 2004-06-29 | 2005-06-16 | Crystal oscillator |
CNB2005100814744A CN100485991C (zh) | 2004-06-29 | 2005-06-29 | 晶体振荡器 |
EP05270026A EP1612930B8 (en) | 2004-06-29 | 2005-06-29 | Crystal oscillator |
AT05270026T ATE383673T1 (de) | 2004-06-29 | 2005-06-29 | Quarzoszillator |
DE602005004205T DE602005004205T2 (de) | 2004-06-29 | 2005-06-29 | Quarzoszillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004191826A JP4354347B2 (ja) | 2004-06-29 | 2004-06-29 | 水晶発振器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006014208A true JP2006014208A (ja) | 2006-01-12 |
JP4354347B2 JP4354347B2 (ja) | 2009-10-28 |
Family
ID=34941864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004191826A Expired - Fee Related JP4354347B2 (ja) | 2004-06-29 | 2004-06-29 | 水晶発振器 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7088032B2 (ja) |
EP (1) | EP1612930B8 (ja) |
JP (1) | JP4354347B2 (ja) |
CN (1) | CN100485991C (ja) |
AT (1) | ATE383673T1 (ja) |
DE (1) | DE602005004205T2 (ja) |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007201858A (ja) * | 2006-01-27 | 2007-08-09 | Epson Toyocom Corp | 水晶振動子、高精度水晶発振器 |
JP2007312387A (ja) * | 2006-05-18 | 2007-11-29 | Taitien Electronics Co Ltd | 水晶発振器モジュール |
JP2011035548A (ja) * | 2009-07-30 | 2011-02-17 | Kyocera Kinseki Corp | 圧電デバイス |
JP2013009419A (ja) * | 2012-09-06 | 2013-01-10 | Seiko Epson Corp | 温度補償型圧電発振器の調整方法およびその方法により調整された温度補償型圧電発振器 |
US8547182B2 (en) | 2010-10-08 | 2013-10-01 | Nihon Dempa Kogyo Co., Ltd. | Oven controlled crystal oscillator |
JP2014030128A (ja) * | 2012-07-31 | 2014-02-13 | Kyocera Crystal Device Corp | 圧電デバイス |
JP2014107862A (ja) * | 2012-11-30 | 2014-06-09 | Seiko Epson Corp | 温度補償型発振器、電子機器、及び移動体 |
JP2015119378A (ja) * | 2013-12-19 | 2015-06-25 | 日本電波工業株式会社 | 高安定発振器 |
JP2015122607A (ja) * | 2013-12-24 | 2015-07-02 | セイコーエプソン株式会社 | 発振器、電子機器および移動体 |
JP2016195345A (ja) * | 2015-04-01 | 2016-11-17 | 京セラクリスタルデバイス株式会社 | 圧電デバイス及びその製造方法 |
US10084429B2 (en) | 2013-12-24 | 2018-09-25 | Seiko Epson Corporation | Heating body, resonation device, electronic apparatus, and moving object |
US10103708B2 (en) | 2013-12-24 | 2018-10-16 | Seiko Epson Corporation | Heating body, vibration device, electronic apparatus, and moving object |
WO2021240877A1 (ja) * | 2020-05-25 | 2021-12-02 | 日本電波工業株式会社 | 水晶発振器 |
JP2022034974A (ja) * | 2020-08-19 | 2022-03-04 | 日本電波工業株式会社 | 恒温槽付水晶発振器 |
JPWO2022050414A1 (ja) * | 2020-09-07 | 2022-03-10 | ||
WO2022181546A1 (ja) * | 2021-02-25 | 2022-09-01 | 株式会社大真空 | 恒温槽型圧電発振器 |
JP7581730B2 (ja) | 2020-09-24 | 2024-11-13 | 株式会社大真空 | 圧電発振器 |
Families Citing this family (32)
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US20060022556A1 (en) * | 2004-07-29 | 2006-02-02 | Bail David L | Quartz resonator package having a housing with thermally coupled internal heating element |
EP3547047B1 (en) * | 2006-08-22 | 2021-05-19 | Juniper Networks, Inc. | Apparatus and method for thermal stabilization of pcb-mounted electronic components within an enclosed housing |
US20080102761A1 (en) * | 2006-10-27 | 2008-05-01 | Stratex Networks, Inc. | System and method for compensation of phase hits |
US7683727B2 (en) * | 2007-03-15 | 2010-03-23 | Honeywell International Inc. | Acceleration feedback control for crystal oscillators |
EP1990911A1 (en) | 2007-05-09 | 2008-11-12 | Taitien Electronics Co., Ltd. | Crystal oscillator device capable of maintaining constant temperature condition |
US10266392B2 (en) * | 2007-06-07 | 2019-04-23 | E-Pack, Inc. | Environment-resistant module, micropackage and methods of manufacturing same |
US8049326B2 (en) * | 2007-06-07 | 2011-11-01 | The Regents Of The University Of Michigan | Environment-resistant module, micropackage and methods of manufacturing same |
US7782147B2 (en) * | 2007-06-20 | 2010-08-24 | Motorola, Inc. | Apparatus for providing oscillator frequency stability |
GB2450620B (en) | 2007-06-27 | 2010-07-07 | Fluke Corp | System for providing a thermally stabilized fixed frequency piezoelectric optical modulator |
US8059425B2 (en) * | 2008-05-28 | 2011-11-15 | Azurewave Technologies, Inc. | Integrated circuit module with temperature compensation crystal oscillator |
JP4803758B2 (ja) * | 2008-11-21 | 2011-10-26 | 日本電波工業株式会社 | 発振装置 |
JP4955042B2 (ja) * | 2009-05-18 | 2012-06-20 | 日本電波工業株式会社 | 恒温型の水晶発振器 |
EP2568496A3 (en) * | 2011-09-09 | 2017-12-06 | Assa Abloy Ab | Method and apparatus for maintaining operational temperature of an integrated circuit |
US20130321088A1 (en) * | 2012-06-01 | 2013-12-05 | Pierino Vidoni | Surface mount ovenized oscillator assembly |
US9576868B2 (en) * | 2012-07-30 | 2017-02-21 | General Electric Company | Semiconductor device and method for reduced bias temperature instability (BTI) in silicon carbide devices |
CN102902288B (zh) * | 2012-09-26 | 2015-12-02 | 广东大普通信技术有限公司 | 一种恒温控制晶体振荡器及其恒温槽温度控制方法 |
US9287882B2 (en) * | 2013-11-07 | 2016-03-15 | Kyocera Crystal Device Corporation | Temperature compensated crystal oscillator |
JP6376330B2 (ja) * | 2014-03-25 | 2018-08-22 | セイコーエプソン株式会社 | 電子部品、電子機器および移動体 |
JP6041070B2 (ja) * | 2014-05-07 | 2016-12-07 | 株式会社村田製作所 | 水晶振動装置 |
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JP6507565B2 (ja) * | 2014-10-28 | 2019-05-08 | セイコーエプソン株式会社 | 電子デバイス、電子機器および移動体 |
JP6561487B2 (ja) * | 2015-02-16 | 2019-08-21 | セイコーエプソン株式会社 | 発振回路、発振器、電子機器および移動体 |
US10069500B2 (en) * | 2016-07-14 | 2018-09-04 | Murata Manufacturing Co., Ltd. | Oven controlled MEMS oscillator |
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CN106559070A (zh) * | 2016-10-18 | 2017-04-05 | 北京无线电计量测试研究所 | 一种恒温晶体振荡器 |
US11223752B2 (en) * | 2017-04-06 | 2022-01-11 | Lg Innotek Co., Ltd. | Camera module having extended support members for reduced power consumption |
CN109981052A (zh) * | 2019-04-17 | 2019-07-05 | 南京信息职业技术学院 | 双层恒温槽晶体振荡器结构及其制造方法 |
US11417611B2 (en) | 2020-02-25 | 2022-08-16 | Analog Devices International Unlimited Company | Devices and methods for reducing stress on circuit components |
US11981560B2 (en) | 2020-06-09 | 2024-05-14 | Analog Devices, Inc. | Stress-isolated MEMS device comprising substrate having cavity and method of manufacture |
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2004
- 2004-06-29 JP JP2004191826A patent/JP4354347B2/ja not_active Expired - Fee Related
-
2005
- 2005-06-16 US US11/154,289 patent/US7088032B2/en not_active Expired - Fee Related
- 2005-06-29 EP EP05270026A patent/EP1612930B8/en not_active Expired - Lifetime
- 2005-06-29 DE DE602005004205T patent/DE602005004205T2/de not_active Expired - Lifetime
- 2005-06-29 CN CNB2005100814744A patent/CN100485991C/zh not_active Expired - Fee Related
- 2005-06-29 AT AT05270026T patent/ATE383673T1/de not_active IP Right Cessation
Cited By (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007201858A (ja) * | 2006-01-27 | 2007-08-09 | Epson Toyocom Corp | 水晶振動子、高精度水晶発振器 |
JP2007312387A (ja) * | 2006-05-18 | 2007-11-29 | Taitien Electronics Co Ltd | 水晶発振器モジュール |
JP2011035548A (ja) * | 2009-07-30 | 2011-02-17 | Kyocera Kinseki Corp | 圧電デバイス |
US8547182B2 (en) | 2010-10-08 | 2013-10-01 | Nihon Dempa Kogyo Co., Ltd. | Oven controlled crystal oscillator |
JP2014030128A (ja) * | 2012-07-31 | 2014-02-13 | Kyocera Crystal Device Corp | 圧電デバイス |
JP2013009419A (ja) * | 2012-09-06 | 2013-01-10 | Seiko Epson Corp | 温度補償型圧電発振器の調整方法およびその方法により調整された温度補償型圧電発振器 |
JP2014107862A (ja) * | 2012-11-30 | 2014-06-09 | Seiko Epson Corp | 温度補償型発振器、電子機器、及び移動体 |
JP2015119378A (ja) * | 2013-12-19 | 2015-06-25 | 日本電波工業株式会社 | 高安定発振器 |
JP2015122607A (ja) * | 2013-12-24 | 2015-07-02 | セイコーエプソン株式会社 | 発振器、電子機器および移動体 |
US10084429B2 (en) | 2013-12-24 | 2018-09-25 | Seiko Epson Corporation | Heating body, resonation device, electronic apparatus, and moving object |
US10103708B2 (en) | 2013-12-24 | 2018-10-16 | Seiko Epson Corporation | Heating body, vibration device, electronic apparatus, and moving object |
JP2016195345A (ja) * | 2015-04-01 | 2016-11-17 | 京セラクリスタルデバイス株式会社 | 圧電デバイス及びその製造方法 |
WO2021240877A1 (ja) * | 2020-05-25 | 2021-12-02 | 日本電波工業株式会社 | 水晶発振器 |
JP7426286B2 (ja) | 2020-05-25 | 2024-02-01 | 日本電波工業株式会社 | 水晶発振器 |
US12028020B2 (en) | 2020-05-25 | 2024-07-02 | Nihon Dempa Kogyo Co., Ltd. | Crystal oscillator |
JP2022034974A (ja) * | 2020-08-19 | 2022-03-04 | 日本電波工業株式会社 | 恒温槽付水晶発振器 |
JP7492882B2 (ja) | 2020-08-19 | 2024-05-30 | 日本電波工業株式会社 | 恒温槽付水晶発振器 |
JPWO2022050414A1 (ja) * | 2020-09-07 | 2022-03-10 | ||
WO2022050414A1 (ja) * | 2020-09-07 | 2022-03-10 | 株式会社大真空 | 恒温槽型圧電発振器 |
JP7505564B2 (ja) | 2020-09-07 | 2024-06-25 | 株式会社大真空 | 恒温槽型圧電発振器 |
JP7581730B2 (ja) | 2020-09-24 | 2024-11-13 | 株式会社大真空 | 圧電発振器 |
WO2022181546A1 (ja) * | 2021-02-25 | 2022-09-01 | 株式会社大真空 | 恒温槽型圧電発振器 |
JPWO2022181546A1 (ja) * | 2021-02-25 | 2022-09-01 | ||
JP7544247B2 (ja) | 2021-02-25 | 2024-09-03 | 株式会社大真空 | 恒温槽型圧電発振器 |
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DE602005004205T2 (de) | 2008-04-17 |
US7088032B2 (en) | 2006-08-08 |
CN100485991C (zh) | 2009-05-06 |
CN1716656A (zh) | 2006-01-04 |
ATE383673T1 (de) | 2008-01-15 |
JP4354347B2 (ja) | 2009-10-28 |
US20050285482A1 (en) | 2005-12-29 |
EP1612930B8 (en) | 2008-04-30 |
DE602005004205D1 (de) | 2008-02-21 |
EP1612930A1 (en) | 2006-01-04 |
EP1612930B1 (en) | 2008-01-09 |
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