JP2006093164A - Manufacturing method of organic el display device, and its manufacturing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic EL display device and its manufacturing apparatus, where splashing of organic EL materials can be prevented, and coating control of the organic EL materials can be simplified. <P>SOLUTION: The manufacturing method of the organic EL display device wherein the organic EL display device is manufactured by coating the organic EL materials on a glass substrate S into a prescribed pattern shape, after a groove 11 according to the prescribed pattern shape on which the organic EL materials are to be coated has been formed on the glass substrate S, is equipped with the glass substrate S and nozzles 4a to 4c moved relatively so as to make the nozzle 4a to 4c positioned alongside the groove 11, and with a process in which the organic EL materials from the nozzles 4a to 4c are poured into the groove 11 to be coated is equipped. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an organic EL display device manufacturing method and an apparatus for manufacturing the organic EL display device, which manufacture an organic EL display device by applying an organic EL (electroluminescence) material on a substrate in a predetermined pattern shape.

  A conventional organic EL display device is manufactured as described below. First, a transparent ITO (indium tin oxide) film is formed on the surface of a glass substrate. Next, the ITO film formed on the glass substrate is patterned and formed on a plurality of stripe-shaped first electrodes by using a photolithography technique. This first electrode corresponds to the anode. Next, an electrically insulating partition wall that protrudes on the glass substrate so as to surround the stripe-shaped first electrode is formed using a photolithography technique.

  Then, the organic EL material is ejected from the inkjet nozzle toward the stripe-shaped first electrode in the partition wall, and the organic EL material is applied onto the stripe-shaped first electrode in the partition wall. Specifically, a red organic EL material is applied onto a striped first electrode in a certain partition wall by an inkjet nozzle for a red organic EL material. On one first electrode adjacent to the first electrode to which the red organic EL material is applied, the green organic EL material is applied by an inkjet nozzle for the green organic EL material. On the next first electrode adjacent to the first electrode to which the green organic EL material is applied, the blue organic EL material is applied by an inkjet nozzle for the blue organic EL material. On the next first electrode adjacent to the first electrode coated with the blue organic EL material, the red organic EL material is coated. In this way, red, green, and blue organic EL materials are individually applied on the first electrode in that order.

  Next, a plurality of stripe-shaped second electrodes that are opposed to each other so as to be orthogonal to the first electrode are formed on the glass substrate in parallel by a vacuum vapor deposition method, and between the first electrode and the second electrode. An organic EL material is sandwiched. This second electrode corresponds to a cathode. Thus, an organic EL display device capable of full-color display in which the first electrode and the second electrode are arranged in a simple XY matrix is manufactured.

  Here, the light emission principle of the organic EL display device will be described. When a DC voltage is applied to the first electrode (anode) and the second electrode (cathode), the organic EL material between the first electrode (anode) and the second electrode (cathode) to which the DC voltage is applied Injects holes from the first electrode (anode) and electrons from the second electrode (cathode), and the holes and electrons recombine in the organic EL material to emit light. . For example, light emitted from the organic EL material toward the first electrode is emitted through the transparent first electrode and the glass substrate. The light emitted from the organic EL material toward the second electrode is opaque at the second electrode, is reflected by the second electrode, and is emitted through the transparent first electrode and the glass substrate.

  However, the conventional example having such a configuration has the following problems. That is, when an organic EL material is ejected from an inkjet nozzle into a partition on a glass substrate and applied, a part of the organic EL material ejected from the inkjet nozzle bounces off the glass substrate and scatters around. However, there is a problem that the organic EL material that has bounced back is mixed into the organic EL materials of other colors around, and the organic EL material is mixed.

  In addition, it is necessary to control the nozzle of the ink jet method with high accuracy in two directions of the XY directions so as to match each ejection position in the partition wall where the organic EL material should be ejected, and further, it is matched to each ejection position. There is also a problem that the on / off timing of ejecting the organic EL material, which ejects the organic EL material at a point in time, needs to be controlled with high accuracy, and the control when applying the organic EL material is very complicated.

  The present invention has been made in view of such circumstances, and provides an organic EL display device manufacturing method and an apparatus for manufacturing the same that can prevent the organic EL material from rebounding and simplify the application control of the organic EL material. The purpose is to do.

In order to achieve such an object, the present invention has the following configuration.
That is, the invention described in claim 1 is a method for manufacturing an organic EL display device in which an organic EL material is applied in a predetermined pattern shape on a substrate to manufacture an organic EL display device. A groove corresponding to the pattern shape is formed on the substrate, the substrate and the nozzle are relatively moved so that the nozzle is along the groove, and the organic EL material from the nozzle is poured into the groove. The viscosity of the organic EL material is in the range of 2 to 15 mPa · s when the temperature condition during the coating process is 23 ° C.

  [Operation / Effect] According to the invention described in claim 1, a groove corresponding to a predetermined pattern shape to which the organic EL material is to be applied is formed on the substrate, and the substrate is arranged along the nozzle along the groove. The organic EL material from the nozzle is poured into the groove and applied, so that the organic EL material is prevented from being rebounded when the organic EL material is applied to the substrate. The application control is simplified. In addition, the viscosity of the organic EL material flows so as to spread in the groove on the substrate because the temperature condition during the coating process is in the range of 2 to 15 mPa · s at 23 ° C.

  The invention described in claim 2 is the method of manufacturing an organic EL display device according to claim 1, wherein the organic EL material is poured into the groove on the substrate and applied in an atmosphere of nitrogen gas. It is what.

  [Operation / Effect] According to the invention described in claim 2, since the organic EL material is poured into the groove on the substrate and applied in an atmosphere of nitrogen gas, the organic EL material is in contact with oxygen, water vapor or the like. The characteristics of the organic EL material are prevented from being changed due to contact with oxygen, water vapor, or the like.

  According to a third aspect of the present invention, in the method of manufacturing an organic EL display device according to the first or second aspect, the organic EL material flows so as to spread in the groove on the substrate. It is a material having viscosity.

  [Operation / Effect] According to the invention described in claim 3, since the organic EL material is a material having a viscosity enough to flow in the groove on the substrate, the organic EL material is in the groove on the substrate. The poured organic EL material is flowed and leveled so as to spread in the groove by its own viscosity, and an organic EL material having a uniform thickness is formed.

  According to a fourth aspect of the present invention, in the method of manufacturing an organic EL display device according to the first aspect, the hole diameter of the nozzle is 10 to 70 μm.

  [Operation / Effect] According to the invention described in claim 4, since the hole diameter of the nozzle is 10 to 70 [mu] m, the width of the groove formed in the substrate is smaller than that of the organic EL in the groove on the substrate. Material is poured.

  According to a fifth aspect of the present invention, in an organic EL display device manufacturing apparatus for manufacturing an organic EL display device by applying an organic EL material in a predetermined pattern shape on a substrate, the organic EL material should be applied. Grooves corresponding to the pattern shape of the substrate are formed on the substrate, moving means for relatively moving the substrate and the nozzles along the grooves, and the organic EL material from the nozzles in the grooves. The organic EL material has a viscosity within a range of 2 to 15 mPa · s at a temperature condition of 23 ° C. .

  [Operation / Effect] According to the invention described in claim 5, the moving means forms on the substrate a groove corresponding to a predetermined pattern shape to which the organic EL material is to be applied, and the nozzle is placed along the groove. The substrate and the nozzle are moved relative to each other. The application control means controls the application by pouring the organic EL material from the nozzle into the groove. Therefore, the organic EL material is prevented from rebounding when the organic EL material is applied to the substrate, and the application control of the organic EL material is simplified. In addition, the viscosity of the organic EL material flows so as to spread in the groove on the substrate because the temperature condition during the coating process is in the range of 2 to 15 mPa · s at 23 ° C.

  According to a sixth aspect of the present invention, in the organic EL display device manufacturing apparatus according to the fifth aspect, the nozzle has a hole diameter of 10 to 70 μm.

  [Operation / Effect] According to the invention described in claim 6, since the nozzle hole diameter is 10 to 70 [mu] m, the width of the groove formed in the substrate is smaller than that of the organic EL in the groove on the substrate. Material is poured.

  According to the first aspect of the present invention, in the method of manufacturing an organic EL display device in which the organic EL material is applied in a predetermined pattern shape on the substrate to manufacture the organic EL display device, the organic EL material should be applied. A groove corresponding to the pattern shape is formed on the substrate, the substrate and the nozzle are relatively moved so that the nozzle is along the groove, and the organic EL material from the nozzle is poured into the groove. Therefore, the organic EL material can be prevented from rebounding when the organic EL material is applied to the substrate, and the application control of the organic EL material can be simplified. In addition, the viscosity of the organic EL material flows so as to spread in the groove on the substrate because the temperature condition during the coating process is in the range of 2 to 15 mPa · s at 23 ° C.

  According to the second aspect of the present invention, since the organic EL material is poured into the groove on the substrate in the nitrogen gas atmosphere and applied, the organic EL material is not contacted with oxygen or water vapor on the substrate. The characteristics of the organic EL material can be prevented from changing due to contact with oxygen or water vapor.

  According to the third aspect of the present invention, since the organic EL material is a material having a viscosity enough to flow so as to spread in the groove on the substrate, the organic EL material is poured into the groove on the substrate. The organic EL material is flowed and leveled so as to spread in the groove due to its own viscosity, and an organic EL material having a uniform thickness can be formed.

  According to the invention described in claim 4, since the hole diameter of the nozzle is 10 to 70 [mu] m, the organic EL material is poured into the groove on the substrate smaller than the width of the groove formed on the substrate. It is.

  According to the invention described in claim 5, the organic EL material is applied in the manufacturing apparatus of the organic EL display device that manufactures the organic EL display device by applying the organic EL material in a predetermined pattern shape on the substrate. A groove corresponding to a predetermined pattern shape to be formed is formed on the substrate, a moving means for relatively moving the substrate and the nozzle so that the nozzle is along the groove, and an organic EL material from the nozzle Since the application control means for controlling the application by pouring into the groove is provided, the organic EL material can be prevented from rebounding when the organic EL material is applied to the substrate, and the application control of the organic EL material can be simplified. In addition, the viscosity of the organic EL material flows so as to spread in the groove on the substrate because the temperature condition during the coating process is in the range of 2 to 15 mPa · s at 23 ° C.

  According to the invention described in claim 6, since the nozzle hole diameter is 10 to 70 [mu] m, the organic EL material is poured into the groove on the substrate smaller than the width of the groove formed on the substrate. It is.

  Embodiments of the present invention will be described below with reference to the drawings. An apparatus for manufacturing an organic EL display device according to an embodiment of the present invention manufactures an organic EL display device by applying an organic EL material in a predetermined pattern shape on a glass substrate. FIG. 1 is a block diagram showing a schematic configuration of a main part of an apparatus for manufacturing an organic EL display device according to an embodiment of the present invention.

  As shown in FIG. 1, an apparatus for manufacturing an organic EL display device according to this embodiment includes a stage 1 on which a glass substrate S that receives application of red, green, and blue organic EL materials 10a to 10c is placed, and this stage. A stage moving mechanism 2 for moving 1 in a predetermined direction, an alignment mark detector 3 for detecting the position of an alignment mark formed on the glass substrate S, and a red organic EL material 10a for a red nozzle 4a. A first supply unit 5 that supplies green, and a second supply unit 6 that supplies green organic EL material 10b to the green nozzle 4b, and a third supply that supplies blue organic EL material 10c to the blue nozzle 4c. Part 7, nozzle moving mechanism part 8 for moving nozzles 4a to 4c of each color in a predetermined direction, stage moving mechanism part 2, alignment mark detecting part 3, first to third supply parts 5 to 7, and nozzle moving mechanism Part 8 and And a control unit 9 for controlling. Hereinafter, the configuration of each unit will be described in detail.

  As shown in FIGS. 2 and 3, the organic EL materials 10a to 10c of the respective colors are to be applied on the surface of the glass substrate S to which the red, green and blue organic EL materials 10a to 10c are applied. A plurality of stripe-shaped grooves 11 corresponding to the pattern shape are formed in parallel. FIG. 2 is a schematic plan view showing a state in which a glass substrate on which grooves corresponding to a predetermined pattern shape to which the organic EL material is to be applied is formed is viewed from above. FIG. 3 is a schematic cross-sectional view showing a cross section of a part of the glass substrate shown in FIG.

  Here, the manufacturing process of the glass substrate S which receives application | coating of the organic EL material 10a-10c of each color is demonstrated. First, a transparent ITO (indium tin oxide) film is formed on the surface of the flat glass substrate S. Next, the ITO film formed on the glass substrate S is patterned and formed on the plurality of striped first electrodes 12 by using a photolithography technique. The first electrode 12 corresponds to an anode. Next, an electrically insulating partition wall 13 protruding on the glass substrate S so as to surround the striped first electrode 12 is formed using a photolithography technique. The partition wall 13 is formed of, for example, chromium (Cr) or a dry film. Thus, on the surface of the glass substrate S, a plurality of stripe-like grooves 11 to be coated with the organic EL materials 10a to 10c of the respective colors are formed side by side. A hole transport layer 14 that positively transports holes toward the organic EL materials 10a to 10c is formed on the striped first electrode 12 in the groove 11. As the hole transport layer 14, for example, PEDT (polyethylene dioxythiophene) -PSS (poly-styrene sulphonate) is adopted. The width of the groove 11 is, for example, about 100 μm, the depth of the groove 11 is, for example, about 1 to 10 μm, and the distance between the groove 11 and the groove 11 is, for example, about 10 to 20 μm. Thus, the glass substrate S in the state which receives the application | coating of the organic EL material 10a-10c of each color is manufactured.

  Returning to FIG. 1, the first supply unit 5 includes, for example, a supply source 20a of a red organic EL material 10a, a pump 21 for taking out the red organic EL material 10a from the supply source 20a, and a red organic EL A flow meter 22 for detecting the flow rate of the material 10a and a filter 23 for removing foreign matter in the red organic EL material 10a are provided.

  For example, the second supply unit 6 detects a supply source 20b of the green organic EL material 10b, a pump 21 for taking out the green organic EL material 10b from the supply source 20b, and a flow rate of the green organic EL material 10b. And a filter 23 for removing foreign matter in the green organic EL material 10b.

  The third supply unit 7 detects, for example, the supply source 20c of the blue organic EL material 10c, the pump 21 for taking out the blue organic EL material 10c from the supply source 20c, and the flow rate of the blue organic EL material 10c. And a filter 23 for removing foreign substances in the blue organic EL material 10c.

  As the red, green, and blue organic EL materials 10a to 10c described above, for example, an organic EL material having a viscosity enough to flow so as to spread in the groove 11 on the glass substrate S may be employed. Employs a polymer type organic EL material for each color having the above-mentioned viscosity. The viscosities of the organic EL materials 10a to 10c of the respective colors are, for example, in the range of 2 to 15 mPa · s (millipascal second) under a temperature condition (for example, 23 ° C.) during the coating process.

  As shown in FIG. 4, the nozzle moving mechanism unit 8 includes the nozzles 4 a to 4 c of the respective colors, a holding member 31 that holds these nozzles 4 a to 4 c in parallel, and the holding member 31 of the support shaft 34. A support member 32 that is rotatably supported around and a guide member 33 for moving the support member 32 along the support member 32 is provided. FIG. 4A is a schematic perspective view of the nozzle moving mechanism unit, FIG. 4B is a schematic plan view of the nozzle moving mechanism unit viewed from above, and FIG. It is a schematic plan view which shows the state rotated around the support shaft of the support member. The support member 32 is provided with a support shaft 34 in a direction orthogonal to the nozzle juxtaposed surface of the holding member 31. The holding member 31 is provided with a fitting hole 35 for fitting with the support shaft 34. A fitting hole 35 of the holding member 31 is fitted to the support shaft 34 of the support member 32, and the support member 32 supports the holding member 31 so as to be rotatable around the support shaft 34. For example, as shown in FIG. 4C, by rotating the holding member 31 around the support shaft 34, the application pitch interval P2 is narrower than the application pitch interval P1 of each color in the state shown in FIG. 4B. And can be adjusted so as to narrow the coating pitch interval of each color. In addition, the hole diameter for outputting the organic EL material in these nozzles 4a to 4c is smaller than the width of the groove 11 formed in the glass substrate S, for example, about several tens of micrometers, and is 10 to 70 μm here. .

  For example, a CCD camera is employed as the alignment mark detection unit 3. When receiving the instruction from the control unit 9, the alignment mark detection unit 3 images the alignment marks M respectively formed at the four corners of the glass substrate S shown in FIG. Are output to the control unit 9.

  The control unit 9 calculates the position of the alignment mark M based on the image data captured by the alignment mark detection unit 3. The control unit 9 is preliminarily given layout data such as the first electrode 12 and the groove 11 designed using CAD (Computer Aided Design). Based on the calculation result of the position of the alignment mark M and the layout data of the groove 11 given in advance, the control unit 9 applies the application start point, that is, one end side of the groove 11 of the glass substrate S. To calculate an application start position (corresponding to an application start position B described later) for starting application. Here, although the alignment marks M formed on the glass substrate S are four points, the number may be other than four points, for example, two points.

  As shown in FIG. 5, the control unit 9 controls the stage moving mechanism unit 2 to move the stage 1 by a predetermined amount in a predetermined direction (y direction), and moves the nozzles 4 a to 4 c in a predetermined direction (x direction). The nozzle moving mechanism unit 8 is controlled to move by a predetermined amount, and as shown in FIG. 1, the nozzles are selected according to the detection values a to c from the flow meters 22 of the first to third supply units 5 to 7. Commands d to f are output to the respective pumps 21 of the first to third supply units 5 to 7 so that the organic EL materials 10a to 10c having a predetermined flow rate are flowed from 4a to 4c. FIG. 5 is a schematic perspective view for explaining the moving direction of the stage and the nozzle.

  The stage moving mechanism unit 2 and the nozzle moving mechanism unit 8 described above correspond to the moving unit in the present invention, and the control unit 9 described above corresponds to the coating control unit in the present invention.

  Next, a manufacturing process for manufacturing the organic EL display device by the embodiment device configured as described above will be described below.

  As shown in FIGS. 2 and 3, since the glass substrate S in a state of receiving the application of the organic EL materials 10a to 10c is already manufactured as described above, it is mounted on the stage 1. The process of applying the organic EL materials 10a to 10c to the grooves 11 of the placed glass substrate S will be described.

  The control unit 9 gives an instruction to the alignment mark detection unit 3 so as to image the alignment marks M at the four corners of the glass substrate S placed on the stage 1. The alignment mark detection unit 3 outputs the captured image data of the alignment mark M to the control unit 9. The control unit 9 calculates the position of the alignment mark M based on the image data captured by the alignment mark detection unit 3. Based on the calculation result of the position of the alignment mark M and the layout data of the groove 11 given in advance, the control unit 9 applies the application start point, that is, one end side of the groove 11 of the glass substrate S. To calculate the application start position B at which application is started. As shown in FIG. 6, the control unit 9 controls the stage moving mechanism unit 2 and the nozzle moving mechanism unit 8 so that the nozzles 4 a to 4 c are positioned at the application start position B of the groove 11 of the glass substrate S. FIG. 6 is a schematic diagram for explaining the movement path of the nozzle. The support member 32 of the nozzle moving mechanism unit 8 is well adjusted so that the red, green, and blue nozzles 4 a to 4 c are positioned near the center of the groove 11 in the width direction.

  Next, as illustrated in FIG. 6, when the nozzles 4 a to 4 c are positioned at the application start position B of the groove 11 of the glass substrate S, the control unit 9 enters the groove 11 on the glass substrate S from each nozzle 4 a to 4 c. The pumps 21 are instructed to start pouring the organic EL materials 10a to 10c, and the support member 32 is guided so that the organic EL materials 10a to 10c are poured into the grooves 11 along the grooves 11 on the glass substrate S. Control is made to move along the member 33. In this way, the red, green, and blue organic EL materials 10a to 10c are poured into the respective grooves 11 at the same time. When the nozzles 4a to 4c are positioned at the application stop position E where the application is stopped on the other end side of the groove 11 of the glass substrate S, the control unit 9 enters the groove 11 on the glass substrate S from each nozzle 4a to 4c. Each pump 21 is instructed to stop the flow of the organic EL materials 10a to 10c, and the movement of the support member 32 along the guide member 33 is stopped. The control unit 9 controls the application amount according to the moving speed of the nozzles 4a to 4c so that the application amount of the organic EL material at each point of the striped groove 11 becomes uniform. Thus, application | coating of the organic EL material 10a-10c to the groove | channel 11 for three rows is completed. As shown in FIG. 7, the organic EL materials 10a to 10c poured into the hole transport layer 14 in the groove 11 flow and level so as to spread in the groove 11 due to their own viscosity, and have a uniform thickness. Organic EL materials 10a to 10c are formed. The thickness of the organic EL materials 10a to 10c poured into the groove 11 can be adjusted by the amount of the organic EL materials 10a to 10c poured, but here the thickness of the organic EL materials 10a to 10c is formed to be about 0.1 μm. Yes.

  Next, as shown in FIG. 6, the stage 1 is pitch-feeded by three rows of grooves 11 in the y direction so that the organic EL materials 10a to 10c can be applied to the grooves 11 of the next three rows. . In the first three rows of the grooves 11 described above, the left end side of the grooves 11 is set as the application start position B, the right end side of the grooves 11 is set as the application stop position E, and the nozzles 4a to 4c are moved from left to right along the grooves 11. The organic EL materials 10a to 10c are flown into the respective grooves 11, and in the next three rows of grooves 11, the right end side of the grooves 11 is set as the application start position B, and the left end side of the grooves 11 is set as the application stop position E. As described above, the nozzles 4 a to 4 c are moved from the right to the left along the grooves 11, and the organic EL materials 10 a to 10 c are poured into the grooves 11.

  And the remaining operation | movement of the remaining groove | channel 11 on the glass substrate S is repeatedly performed, and the organic EL materials 10a-10c of each color are poured into every groove | channel 11. In this way, a so-called stripe arrangement is formed in which the red, green, and blue organic EL materials 10a to 10c are arranged in the order of red, green, and blue for each of the stripe-shaped grooves 11. The semicircular broken line shown in FIG. 6 indicates that each nozzle 4a to 4c moves to the next three rows of grooves 11, and each nozzle 4a to 4c is actually indicated by this broken line. It does not move in a semicircular route. As described above, the organic EL materials 10a to 10c are poured into the groove 11 by moving the nozzles 4a to 4c in the x direction after moving the stage 1 in the y direction.

  Next, when the application of the organic EL materials 10a to 10c in all the grooves 11 on the glass substrate S is completed, the stripe-shaped second electrode 15 opposed to be orthogonal to the first electrode 12 is formed by a vacuum deposition method. A plurality of glass substrates S are formed side by side. As shown in FIG. 8, organic EL materials 10 a to 10 c are sandwiched between the first electrode 12 and the second electrode 15. The second electrode 15 corresponds to a cathode. In this way, an organic EL display device capable of full color display in which the first electrode 12 and the second electrode 15 are arranged in a simple XY matrix is manufactured.

  As described above, the groove 11 is formed on the glass substrate S in accordance with a predetermined pattern shape to which the organic EL materials 10a to 10c are to be applied, and the glass substrate S and the nozzles 4a to 4c are arranged along the groove 11. When the organic EL materials 10a to 10c are applied to the glass substrate S because the organic EL materials 10a to 10c from the nozzles 4a to 4c are poured into the groove 11 and applied by relatively moving the nozzles 4a to 4c. It is possible to prevent the organic EL materials 10a to 10c from rebounding. Further, in the above-described conventional example, the inkjet nozzle is controlled with high precision in two directions in the XY directions so as to match each ejection position in the partition wall, and the organic EL material is ejected when the nozzle is matched with the ejection position. The on / off timing of the organic EL material ejection needs to be controlled with high accuracy, and there is a problem that the control when applying the organic EL material is very complicated. The organic EL materials 10a to 10c need only be poured and controlled along the grooves 11, so that it is not necessary to control the ejection position and the on / off timing of the organic EL materials with high accuracy. Application control of the EL materials 10a to 10c to the glass substrate S can be simplified.

  Further, since the organic EL materials 10a to 10c are materials having such a viscosity that they flow so as to spread in the grooves 11 on the glass substrate S, the organic EL materials poured into the grooves 11 on the glass substrate S are used. The materials 10a to 10c are flowed and leveled so as to spread in the groove 11 due to their own viscosity, and the organic EL materials 10a to 10c having a uniform thickness can be formed.

  In the case where the organic EL materials 10a to 10c are applied by being poured into the groove 11 on the glass substrate S in an atmosphere of nitrogen gas, the glass substrate S is not brought into contact with oxygen, water vapor, or the like. It can be poured into the upper groove 11 and the change in characteristics of the organic EL material due to contact with oxygen or water vapor can be prevented.

  The present invention can be modified as follows.

  (1) In the above-described embodiment, the flow rate of the organic EL materials 10a to 10c flowing out from the nozzles 4a to 4c is detected by feedback control of the flow rate of the organic EL materials 10a to 10c to the nozzles 4a to 4c. The pressure of the organic EL materials 10a to 10c may be detected by pressure detection means such as a pressure sensor, and the flow rate of the organic EL materials 10a to 10c that flows out from the nozzles 4a to 4c may be feedback controlled.

  (2) In the above-described embodiment, as shown in FIG. 5, the stage 1 on which the glass substrate S is placed is in a direction (y) orthogonal to the longitudinal direction (x direction) of the groove 11 on the glass substrate S. The organic EL materials 10a to 10c are poured into the groove 11 of the glass substrate S by moving the nozzles 4a to 4c in the longitudinal direction (x direction) of the groove 11 after pitch feeding in the direction). After pitching the nozzles 4a to 4c in a direction (y direction) perpendicular to the longitudinal direction (x direction) of the groove 11 on the glass substrate S, the stage 1 is moved in the longitudinal direction (x direction) of the groove 11 In this manner, the organic EL materials 10a to 10c may be poured into the groove 11 of the glass substrate S. Further, the stage 1 is fixed, and the nozzles 4a to 4c are pitched in a direction perpendicular to the longitudinal direction of the groove 11 on the glass substrate S, and then the nozzles 4a to 4c are moved in the longitudinal direction of the groove 11 As described above, the organic EL materials 10a to 10c may be poured into the grooves 11 of the glass substrate S, the nozzles 4a to 4c are fixed, and the stage 1 is orthogonal to the longitudinal direction of the grooves 11 on the glass substrate S. Alternatively, the organic EL materials 10a to 10c may be poured into the groove 11 of the glass substrate S so that the stage 1 is moved in the longitudinal direction of the groove 11 after the pitch is fed in the direction.

  (3) In the above-described embodiment, the organic EL materials 10a to 10c are poured into the respective grooves 11 of the glass substrate S by a set of three nozzles 4a to 4c of red, green, and blue. A plurality of sets of nozzles 4 a to 4 c may be provided, and the organic EL materials 10 a to 10 c may be poured into the grooves 11 of the glass substrate S. By doing so, the time required for the coating process can be shortened. Further, the interval between the nozzles 4a to 4c is arranged as a multiple of 4 of the interval between the adjacent grooves 11 (the interval from the width center of a certain groove 11 to the width center of the adjacent groove 11). You may make it pitch-feed these nozzles 4a-4c by the distance for 3 times the space | interval of the adjacent groove | channel 11 in the direction orthogonal to a direction. By doing so, the space between the nozzles is widened and maintenance is facilitated.

  (4) In the embodiment described above, the substrate is the glass substrate S, but a substrate made of a material other than glass may be adopted as long as it has a property of transmitting light.

  (5) In the above-described embodiment, the hole transport layer 14 is formed between the striped first electrode 12 and the organic EL materials 10a to 10c. However, the hole transport layer 14 is not an essential component. The electron transport that positively transports electrons to the organic EL materials 10a to 10c between the second electrode 15 disposed opposite to the first electrode 12 and the organic EL materials 10a to 10c may be omitted. A layer may be formed.

  (6) In the above-described embodiment, the groove 11 is formed on the first electrode 12 so that the partition wall 13 is formed between the striped first electrodes 12 arranged in parallel on the glass substrate S. As shown in FIG. 9, the groove 11 may be formed on the first electrode 12 so that the partition wall 13 is formed including the upper portion on the end portion side of the first electrode 12.

  (7) In the above-described embodiment, as shown in FIG. 4C, the application pitch interval of each color is adjusted by rotating the holding member 31 around the support shaft 34, but as shown in FIG. As described above, the application pitch interval of each color may be adjusted by providing the nozzles 4a and 4c at both ends with a turning mechanism.

  (8) In the above-described embodiment, the red, green, and blue organic EL materials 10a to 10c are formed in a stripe arrangement. However, as shown in FIG. 11, the red, green, and blue organic EL materials 10a to 10c are used. Can be formed in a square array. This case can be realized by forming the grooves 11 in a square shape on the glass substrate S and pouring the organic EL materials 10 a to 10 c of the respective colors along the square grooves 11.

It is a block diagram which shows schematic structure of the principal part of the manufacturing apparatus of the organic electroluminescence display which concerns on the Example of this invention. It is a schematic plan view which shows the state which looked at the glass substrate in which the groove | channel according to the predetermined pattern shape which should apply | coat organic EL material was formed on the surface. It is a schematic sectional drawing which shows the cross section of a part of glass substrate shown in FIG. (A) is a schematic perspective view of the nozzle movement mechanism part of a present Example, (b) is the schematic plan view which looked at the nozzle movement mechanism part from the top, (c) is a support shaft of a support member and a holding member It is a schematic plan view which shows the state rotated around. It is a schematic perspective view for demonstrating the moving direction of the stage and nozzle in a present Example. It is a schematic diagram for demonstrating the movement path | route of the nozzle in a present Example. It is a schematic sectional drawing which shows the cross section of a part of glass substrate with which organic electroluminescent material was apply | coated by the Example apparatus. It is a schematic sectional drawing which shows the cross section of a part of organic electroluminescence display manufactured by the Example apparatus. It is a schematic sectional drawing which shows the cross section of a part of organic EL display apparatus different from a present Example. It is a schematic plan view which shows the nozzle moving mechanism part different from a present Example. It is a schematic diagram for demonstrating the square arrangement | sequence of organic electroluminescent material.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Stage 2 ... Stage moving mechanism part (moving means)
4a ... Nozzle for red 4b ... Nozzle for green 4c ... Nozzle for blue 8 ... Nozzle moving mechanism (moving means)
9: Control unit (application control means)
10a ... Red organic EL material 10b ... Green organic EL material 10c ... Blue organic EL material 11 ... Groove S ... Glass substrate

Claims (6)

In a method for manufacturing an organic EL display device, an organic EL display device is manufactured by applying an organic EL material on a substrate in a predetermined pattern shape.
A groove corresponding to a predetermined pattern shape to which the organic EL material is to be applied is formed on the substrate, and the substrate and the nozzle are relatively moved so that the nozzle is along the groove. A process of pouring and applying an EL material into the groove;
The viscosity of the organic EL material is within a range of 2 to 15 mPa · s at a temperature condition of 23 ° C. during the coating process. In the manufacturing method of the organic electroluminescence display device according to claim 1,
An organic EL display device manufacturing method, wherein an organic EL material is poured into the groove on a substrate in an atmosphere of nitrogen gas and applied. In the manufacturing method of the organic electroluminescent display device of Claim 1 or Claim 2,
The method for manufacturing an organic EL display device, wherein the organic EL material is a material having a viscosity that allows the organic EL material to flow in the groove on the substrate. In the manufacturing method of the organic electroluminescence display device according to claim 1,
The method for manufacturing an organic EL display device, wherein the nozzle has a hole diameter of 10 to 70 μm. In an organic EL display device manufacturing apparatus for manufacturing an organic EL display device by applying an organic EL material in a predetermined pattern shape on a substrate,
Grooves corresponding to a predetermined pattern shape to which the organic EL material is to be applied are formed on the substrate, and moving means for relatively moving the substrate and the nozzles along the grooves,
An application control means for controlling the application by pouring the organic EL material from the nozzle into the groove,
The viscosity of the organic EL material is in the range of 2 to 15 mPa · s when the temperature condition during the coating process is 23 ° C. An apparatus for manufacturing an organic EL display device, wherein: In the manufacturing apparatus of the organic EL display device according to claim 5,
The hole diameter of the said nozzle is 10-70 micrometers, The manufacturing apparatus of the organic electroluminescence display characterized by the above-mentioned.

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