[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

JP2006049783A - Manufacturing method and electrode connection method for anisotropic conductive adhesive film - Google Patents

Manufacturing method and electrode connection method for anisotropic conductive adhesive film Download PDF

Info

Publication number
JP2006049783A
JP2006049783A JP2004239511A JP2004239511A JP2006049783A JP 2006049783 A JP2006049783 A JP 2006049783A JP 2004239511 A JP2004239511 A JP 2004239511A JP 2004239511 A JP2004239511 A JP 2004239511A JP 2006049783 A JP2006049783 A JP 2006049783A
Authority
JP
Japan
Prior art keywords
electrodes
conductive particles
adhesive
connection
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004239511A
Other languages
Japanese (ja)
Inventor
Yuji Suda
祐史 須田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASIAN SHIELD KK
LIFE KK
Life KK
Original Assignee
ASIAN SHIELD KK
LIFE KK
Life KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASIAN SHIELD KK, LIFE KK, Life KK filed Critical ASIAN SHIELD KK
Priority to JP2004239511A priority Critical patent/JP2006049783A/en
Publication of JP2006049783A publication Critical patent/JP2006049783A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector

Landscapes

  • Adhesive Tapes (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
  • Wire Bonding (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for an anisotropic conductive adhesive film that can scatter and form a dense region (6) of electrically conductive particles (5) without directly contacting a sticky adhesive layer (4), and an electrode connection method using an anisotropic conductive adhesive agent. <P>SOLUTION: The method is to use the ink-jet method to jet ink (3) containing electro-conductive particles (5) from a jet nozzle (10) onto an adhesive resinous film (2) or an adhesive layer (4), thus scattering and forming a dense region (6) of conductive particles (5) smaller than a minimum insulation distance d between connection electrodes (20) or connected electrodes (21) whose maximum outside diameter A of the region (6) is adjacent to the adhesive resinous film (2) or the adhesive layer (4) at least in an arrangement direction. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、それぞれ狭ピッチで配列された電子部品と回路基板の接続電極間を電気接続する為に用いる異方性導電フィルムの製造方法と、狭ピッチで配列された電子部品の接続電極と回路基板の被接続電極間を異方性導電接着剤を用いて接続する電極接続方法に関する。   The present invention relates to a method of manufacturing an anisotropic conductive film used for electrical connection between electronic components arranged at a narrow pitch and connection electrodes of a circuit board, and connection electrodes and circuits of electronic components arranged at a narrow pitch. The present invention relates to an electrode connection method for connecting electrodes to be connected between substrates using an anisotropic conductive adhesive.

近年、電子部品の小型化に伴いその電極も微細、狭ピッチ化し高分解能の接続方法が求められ、また、自然環境保護の観点からも鉛を使用する半田に代わる接続方法が求められ、異方性導電接着フィルムや異方性導電接着剤による接続が着目されている。   In recent years, with the miniaturization of electronic components, the electrodes have become finer and narrower and a high-resolution connection method is required. Also, from the viewpoint of protecting the natural environment, a connection method that replaces lead-based solder is also required. Attention has been focused on connection using a conductive conductive adhesive film or an anisotropic conductive adhesive.

この接続方法は、対向する電子部品の接続電極と回路基板の被接続電極間に異方性導電接着フィルムや異方性導電接着剤を介在させ、接続電極と被接続電極間を加熱加圧するもので、加圧方向では、異方性導電接着フィルムや異方性導電接着剤に含まれる導電性粒子を介して電極間が電気接続するとともに、加圧方向と直交する接続電極若しくは被接続電極の配列方向では、隣接する電極間の絶縁間隔より導電性粒子の外径を小さくするとにより、電極間の絶縁が保たれるものである。   In this connection method, an anisotropic conductive adhesive film or an anisotropic conductive adhesive is interposed between the connection electrode of the opposing electronic component and the connection electrode of the circuit board, and the connection electrode and the connection electrode are heated and pressurized. In the pressing direction, the electrodes are electrically connected via the conductive particles contained in the anisotropic conductive adhesive film or the anisotropic conductive adhesive, and the connection electrode or the connected electrode orthogonal to the pressing direction is connected. In the arrangement direction, the insulation between the electrodes is maintained by making the outer diameter of the conductive particles smaller than the insulation interval between the adjacent electrodes.

この導電性粒子は、エポキシ系樹脂などのバインダーに均一に分散されるように配合されるが、隣接する電極間の絶縁間隔が10μm程度の微少間隔となると、凝集する複数の導電性粒子が電極間を導通させ、絶縁不良となる問題が生じる。一方、導電性粒子の配合密度を減少させると、加圧方向の接続電極と被接続電極電極間に介在する導電性粒子数も減少し、接続の信頼性が得られないという問題が生じる。   These conductive particles are blended so as to be uniformly dispersed in a binder such as an epoxy resin, but when the insulating interval between adjacent electrodes is a very small interval of about 10 μm, a plurality of aggregated conductive particles are electroded. There arises a problem that electrical conduction is established between them and insulation failure occurs. On the other hand, when the blending density of the conductive particles is reduced, the number of conductive particles interposed between the connecting electrode in the pressing direction and the connected electrode electrode is also reduced, resulting in a problem that connection reliability cannot be obtained.

そこでこの問題を解決する為に、従来、導電性粒子の密集領域を、メタルマスクまたはグラビア印刷によって、接着性フィルム上に転写固定する異方性導電接着フィルムの製造法が知られている(特許文献1参照)。   Therefore, in order to solve this problem, a method for producing an anisotropic conductive adhesive film in which a dense region of conductive particles is transferred and fixed on an adhesive film by a metal mask or gravure printing has been known (patent). Reference 1).

また、同様の目的で、感光ドラムの一部を帯電させ、帯電部分に導電性粒子を吸着させて密集領域を形成し、樹脂フィルム上へ転写する異方性導電接着フィルムの製造法が知られている(特許文献2参照)。   For the same purpose, a method for producing an anisotropic conductive adhesive film in which a part of a photosensitive drum is charged, conductive particles are adsorbed on the charged part to form a dense region, and transferred onto a resin film is known. (See Patent Document 2).

更に、同様の目的で、コアフィルムの複数の貫通孔に各1個の導電性粒子を配置し、導電性粒子を確実に分散させる異方性導電接着フィルムの製造法が知られている(特許文献3参照)。   Furthermore, for the same purpose, an anisotropic conductive adhesive film manufacturing method is known in which one conductive particle is disposed in each of a plurality of through holes of a core film and the conductive particles are reliably dispersed (patent) Reference 3).

特許第3472987号公報(第3頁第5欄1行乃至23行、図2)Japanese Patent No. 3472987 (page 3, column 5, lines 1 to 23, FIG. 2) 特開平3−8213号公報(第2頁第1欄10行乃至17行、第1図)Japanese Patent Laid-Open No. 3-8213 (page 2, column 1, line 10 to line 17, FIG. 1) 特開2003−13021号公報(第2頁第3欄37行乃至46行、図1)JP 2003-13021 A (2nd page, third column, lines 37 to 46, FIG. 1)

しかしながら、メタルマスクまたはグラビア印刷によって、バインダー上に密集領域を分散配置する特許文献1の製造方法では、粘着性のあるバインダーにメタルマスクやグラビアロールを密着させた後、取り除く必要があり、バインダーの一部がメタルマスクやグラビアロールに付着して残ったり、バインダーの厚みがフィルムの長手方向に沿って不均一になるという問題がある。   However, in the manufacturing method of Patent Document 1 in which dense regions are dispersedly arranged on a binder by metal mask or gravure printing, it is necessary to remove the binder after adhering the metal mask or gravure roll to the adhesive binder. There is a problem that a part of the film remains attached to the metal mask or the gravure roll, and the thickness of the binder becomes non-uniform along the longitudinal direction of the film.

また、感光ドラムを帯電させて導電粒子を吸着する特許文献2の製造方法であっても、粘着するバインダーと感光ドラムを密着させるものであり、感光ドラムからバインダーを分離させることは同様に困難なものである。   Moreover, even in the manufacturing method of Patent Document 2 in which the photosensitive drum is charged and the conductive particles are adsorbed, the adhesive binder and the photosensitive drum are brought into close contact with each other, and it is similarly difficult to separate the binder from the photosensitive drum. Is.

また、導電性粒子をコアフィルムの複数の貫通孔に収容させて分散させる特許文献3の製造方法では、各貫通孔にもれなく導電性粒子を収容させることが困難であり、また、余分なコアフィルムを用いるのでコスト高となるとともに、異方性導電接着フィルムの厚みが増すものとなっていた。   Moreover, in the manufacturing method of Patent Document 3 in which conductive particles are accommodated in and dispersed in a plurality of through holes of the core film, it is difficult to accommodate the conductive particles without passing through each through hole, and an extra core film Therefore, the cost is increased and the thickness of the anisotropic conductive adhesive film is increased.

更に、これらのいずれの製造方法も、電子部品と回路基板との間に異方性導電接着剤を配置し、対向する接続電極と被接続電極間を接続する接続方法に利用することはできないものであった。すなわち、接続電極若しくは被接続電極の少なくとも一方に付着させたバインダーに対して、導電性粒子の密集領域を形成する必要があるが、バインダーに対してメタルマスクなどを密着させたり、コアフィルムを介在させる上記従来の方法では、電子部品や回路基板がじゃまになり、また、付着させたバインダー自体がメタルマスク等と共に剥離する恐れがあり、極めて困難なものであった。   Furthermore, none of these manufacturing methods can be used for a connection method in which an anisotropic conductive adhesive is disposed between an electronic component and a circuit board to connect the connecting electrode and the connected electrode that face each other. Met. That is, it is necessary to form a dense region of conductive particles with respect to the binder attached to at least one of the connection electrode or the connected electrode, but a metal mask or the like is adhered to the binder or a core film is interposed. In the above conventional method, the electronic parts and the circuit board are disturbed, and the adhered binder itself may be peeled off together with the metal mask or the like, which is extremely difficult.

本発明は、このような従来の問題点を考慮してなされたものであり、粘着するバインダーに直接触れることなく、導電性粒子の密集領域を分散して形成することができる異方性導電接着フィルムの製造方法を提供することを目的とする。   The present invention has been made in view of such conventional problems, and an anisotropic conductive adhesive that can be formed by dispersing dense regions of conductive particles without directly touching an adhesive binder. It aims at providing the manufacturing method of a film.

また、異方性導電性接着剤を用いた接続電極と被接続電極間の接続において、隣接する電極間の絶縁間隔が微少となっても、導電性粒子間の接触による電極間の絶縁不良が生じることがなく、加圧方向の電極間の接続信頼性が得られる電極接続方法を提供することを目的とする。   In addition, in the connection between the connection electrode and the connected electrode using an anisotropic conductive adhesive, even if the insulation interval between adjacent electrodes is very small, the insulation failure between the electrodes due to the contact between the conductive particles does not occur. An object of the present invention is to provide an electrode connection method that does not occur and that provides connection reliability between electrodes in the pressurizing direction.

上述の目的を達成するため、請求項1の異方性導電接着フィルムの製造方法は、複数の接続電極が配列された電子部品と、複数の被接続電極が配列された回路基板との間に配置され、接続電極と被接続電極間を加熱加圧し、加圧方向の電極間を電気接続する異方性導電接着フィルムの製造方法であって、
インクジェット方式により、導電性粒子を含有するインクを吐出ノズルから接着樹脂剤フィルム上に吐出し、接着樹脂剤フィルムに、領域の最大外径が少なくとも配列方向で隣接する接続電極若しくは被接続電極間の最小絶縁間隔dより小さい導電性粒子の密集領域を分散して形成することを特徴とする。
In order to achieve the above-described object, a method for producing an anisotropic conductive adhesive film according to claim 1 is provided between an electronic component in which a plurality of connection electrodes are arranged and a circuit board in which a plurality of connected electrodes are arranged. It is a method for producing an anisotropic conductive adhesive film that is disposed and heated and pressed between a connection electrode and a connected electrode, and electrically connected between electrodes in a pressing direction,
The ink containing conductive particles is ejected from the ejection nozzle onto the adhesive resin film by an inkjet method, and the maximum outer diameter of the region is at least between the connection electrodes or the connected electrodes adjacent to each other in the arrangement direction. A dense region of conductive particles smaller than the minimum insulation interval d is formed in a dispersed manner.

導電性粒子を含有するインクは、インクジェット方式により接着樹脂剤フィルム上に吐出されると、導電性粒子が密集する密集領域として接着樹脂剤フィルムに形成される。領域の最大外径は、接続電極若しくは被接続電極間の最小絶縁間隔dより小さいので、配列方向で隣接する電極間が導電性粒子を介して電気接続することがない。   When ink containing conductive particles is ejected onto the adhesive resin film by an ink jet method, the ink is formed on the adhesive resin film as a dense region where the conductive particles are dense. Since the maximum outer diameter of the region is smaller than the minimum insulation distance d between the connection electrodes or the connected electrodes, the electrodes adjacent in the arrangement direction are not electrically connected via the conductive particles.

また、導電性粒子の密集領域は、分散し接着樹脂剤フィルムに形成されるので、いずれかの密集領域が、対向する接続電極と被接続電極間に介在し、対向する接続電極間を電気接続する。   In addition, since the dense region of conductive particles is dispersed and formed in the adhesive resin film, any dense region is interposed between the opposing connection electrode and the connected electrode, and the opposing connection electrodes are electrically connected. To do.

請求項2の異方性導電接着フィルムの製造方法は、複数の吐出ノズルが、接着樹脂剤フィルム上に配置されるノズルプレートの長手方向に沿って配列され、複数の各吐出ノズルから導電性粒子を含有するインクを吐出する工程と、接着樹脂剤フィルムを吐出ノズルの配列方向と直交する方向に、少なくとも密集領域の最大外径Aより長いピッチで送る工程を、交互に繰り返し、接着樹脂剤フィルム上に、導電性粒子の密集領域を分散して形成することを特徴とする。   The method for producing an anisotropic conductive adhesive film according to claim 2, wherein a plurality of discharge nozzles are arranged along a longitudinal direction of a nozzle plate disposed on the adhesive resin film, and conductive particles are discharged from each of the plurality of discharge nozzles. The step of discharging the ink containing, and the step of feeding the adhesive resin film in a direction orthogonal to the arrangement direction of the discharge nozzles at a pitch longer than at least the maximum outer diameter A of the dense area, In addition, a dense region of conductive particles is formed in a dispersed manner.

各吐出ノズルからインクを突出させることにより、接着樹脂剤フィルム上に短時間で多数の密集領域が形成される。   By causing the ink to protrude from each discharge nozzle, a large number of dense regions are formed in a short time on the adhesive resin film.

突出ノズルの配列ピッチと接着樹脂剤フィルムの送りピッチを調整することにより、分散して形成される密集領域間の直交方向の各間隔が設定される。   By adjusting the arrangement pitch of the projecting nozzles and the feed pitch of the adhesive resin film, each interval in the orthogonal direction between densely formed regions is set.

請求項3の異方性導電接着フィルムの製造方法は、複数の吐出ノズルは、ノズルプレートの長手方向に沿って、千鳥状に2列平行に配列されることを特徴とする。   The anisotropic conductive adhesive film manufacturing method according to claim 3 is characterized in that the plurality of discharge nozzles are arranged in parallel in two rows in a staggered manner along the longitudinal direction of the nozzle plate.

吐出ノズルが2列平行に配列されることにより、長手方向の配列ピッチを長くしても、多数の密集領域が短時間で形成される。   By arranging the discharge nozzles in parallel in two rows, a large number of dense regions are formed in a short time even if the arrangement pitch in the longitudinal direction is increased.

吐出ノズルが千鳥状に2列平行に配列されることにより、2列平行に形成される密集領域の送り方向の間隔が最大外径Aより短いものとなっても、互いに重ならない。   By arranging the discharge nozzles in a staggered manner in two rows in parallel, even if the interval in the feeding direction of dense regions formed in two rows is shorter than the maximum outer diameter A, they do not overlap each other.

請求項4の異方性導電接着フィルムの製造方法は、吐出ノズルの突出口の輪郭がノズルプレートの長手方向を長軸とする長円で形成され、導電性粒子の密集領域の輪郭を、接着樹脂剤フィルムの送り方向と直交する方向を長軸とする長円とすることを特徴とする。   The method for producing an anisotropic conductive adhesive film according to claim 4 is characterized in that the outline of the projection opening of the discharge nozzle is formed as an ellipse having the longitudinal direction of the nozzle plate as a major axis, and the outline of the dense region of conductive particles is bonded. An ellipse having a major axis in a direction perpendicular to the feeding direction of the resin film is characterized.

密集領域が、接着樹脂剤フィルムの送り方向で重ならずに、接着樹脂剤フィルムの単位面積あたりの密集領域の面積が拡大する。   The dense area does not overlap in the feeding direction of the adhesive resin film, and the area of the dense area per unit area of the adhesive resin film is increased.

請求項5の電極接続方法は、複数の接続電極が配列された電子部品と、複数の被接続電極が配列された回路基板との間に異方性導電接着剤を配置し、接続電極と被接続電極間を加熱加圧し、加圧方向の電極間を電気接続する電極接続方法であって、
(a)接続電極若しくは被接続電極の少なくとも一方の表面に接着樹脂層を付着させ、接着樹脂層を形成する工程と、(b)インクジェット方式により、導電性粒子を含有するインクを吐出ノズルから接着樹脂層上に吐出し、接着樹脂層に、領域の最大外径が少なくとも配列方向で隣接する接続電極若しくは被接続電極間の最小絶縁間隔dより小さい導電性粒子の密集領域を分散して形成する工程と、(c)接続電極と被接続電極間を加熱加圧し、加圧方向の電極間を電気接続する工程と、を有することを特徴とする。
According to a fifth aspect of the present invention, there is provided an electrode connection method in which an anisotropic conductive adhesive is disposed between an electronic component having a plurality of connection electrodes arranged and a circuit board having a plurality of connection electrodes arranged. An electrode connection method for heating and pressurizing between connecting electrodes and electrically connecting electrodes in a pressurizing direction,
(A) a step of adhering an adhesive resin layer to at least one surface of the connection electrode or the electrode to be connected, and forming an adhesive resin layer; and (b) adhering ink containing conductive particles from a discharge nozzle by an inkjet method. Discharge onto the resin layer, and form a dense region of conductive particles having a maximum outer diameter of the region smaller than the minimum insulating distance d between adjacent connection electrodes or connected electrodes in the arrangement direction in the adhesive resin layer. And (c) heating and pressurizing between the connection electrode and the electrode to be connected, and electrically connecting the electrodes in the pressurizing direction.

導電性粒子を含有するインクは、インクジェット方式により接着樹脂層上に吐出されると、導電性粒子が密集する密集領域として接着樹脂層に形成される。領域の最大外径は、接続電極若しくは被接続電極間の最小絶縁間隔dより小さいので、配列方向で隣接する電極間が導電性粒子を介して電気接続することがない。   When ink containing conductive particles is ejected onto the adhesive resin layer by an ink jet method, the ink is formed in the adhesive resin layer as a dense region where the conductive particles are concentrated. Since the maximum outer diameter of the region is smaller than the minimum insulation distance d between the connection electrodes or the connected electrodes, the electrodes adjacent in the arrangement direction are not electrically connected via the conductive particles.

また、導電性粒子の密集領域は、分散し接着樹脂層に形成されるので、いずれかの密集領域が、対向する接続電極と被接続電極間に介在し、対向する接続電極間を電気接続する。   In addition, since the dense regions of conductive particles are dispersed and formed in the adhesive resin layer, any dense region is interposed between the opposed connection electrode and the connected electrode, and electrically connects the opposed connection electrodes. .

請求項1の発明によれば、インクジェット方式により、複数の導電性粒子の密集領域を接着樹脂剤フィルムに形成するので、粘着性のある接着樹脂剤フィルムに直接接触することなく、簡単な印刷工程で密集領域を形成できる。   According to the first aspect of the present invention, since a dense region of a plurality of conductive particles is formed on the adhesive resin film by an inkjet method, a simple printing process can be performed without directly contacting the adhesive resin film with adhesiveness. A dense region can be formed.

また、接着樹脂剤フィルムの粘着面を他に接触させることなく、導電性粒子の密集領域を形成できるので、接着樹脂剤フィルムが変形することなく、設計値通りの厚みで形成できる。   Further, since the dense region of the conductive particles can be formed without bringing the adhesive surface of the adhesive resin film into contact with the other, the adhesive resin film can be formed with a thickness as designed without deformation.

また、インクジェット方式により、インクを吐出して導電性粒子の密集領域を形成するので、密集領域の大きさ、形成位置を精度良く制御することができ、必要最小限の導電性粒子を用いて、配列方向の接続電極間の絶縁と、配列方向に直交する加圧方向の接続電極間の電気接続が可能となる。   In addition, since the dense region of the conductive particles is formed by ejecting ink by the inkjet method, the size and the formation position of the dense region can be controlled with high accuracy, and using the minimum necessary conductive particles, Insulation between the connection electrodes in the arrangement direction and electrical connection between the connection electrodes in the pressing direction orthogonal to the arrangement direction are possible.

請求項2の発明によれば、接着樹脂剤フィルム上に短時間で多数の密集領域を形成することができ、密集領域を形成した接着樹脂剤フィルムの送り方向に沿って切断することにより、細長帯状の異方性導電接着フィルムを同時に多数製造できる。   According to the invention of claim 2, a large number of dense regions can be formed in a short time on the adhesive resin agent film, and by cutting along the feed direction of the adhesive resin agent film having the dense regions formed, Many strip-like anisotropic conductive adhesive films can be produced simultaneously.

突出ノズルの配列ピッチと接着樹脂剤フィルムの送りピッチを調整することにより、接続電極や被接続電極の大きさと配置ピッチに合わせて、効率的に導電性粒子の密集領域を分散して形成できる。   By adjusting the arrangement pitch of the protruding nozzles and the feed pitch of the adhesive resin film, the dense region of conductive particles can be efficiently dispersed and formed in accordance with the size and arrangement pitch of the connection electrodes and the electrodes to be connected.

請求項3の発明によれば、請求項2の発明に対して、更に多数の密集領域を短時間で形成することができる。   According to the invention of claim 3, in contrast to the invention of claim 2, a larger number of dense regions can be formed in a short time.

接着樹脂剤フィルム上に形成される密集領域は、千鳥状に形成されるので、送り方向の間隔が最大外径Aより短いものとしても互いに重ならず、高密度に密集領域を形成できる。   Since the dense regions formed on the adhesive resin film are formed in a staggered pattern, even if the interval in the feeding direction is shorter than the maximum outer diameter A, the dense regions can be formed at high density without overlapping each other.

請求項4の発明によれば、請求項2若しくは請求項3の発明に対して、更に密集利用域が互いに重なることなく、接着樹脂剤フィルムの単位面積あたりの密集領域の面積を拡大させ、接続電極と被接続電極間に介在する導電性粒子数を増加させることができる。   According to the invention of claim 4, compared to the invention of claim 2 or claim 3, the area of the dense area per unit area of the adhesive resin film is expanded without overlapping the dense use area, The number of conductive particles interposed between the electrode and the connected electrode can be increased.

請求項5の発明によれば、接着樹脂層に導電性粒子の密集領域が分散して形成されるので、接続電極若しくは被接続電極間の配列方向の絶縁間隔を微小間隔に狭めても、異方性導電接着剤に起因する絶縁不良が発生しない。   According to the invention of claim 5, since the dense region of conductive particles is formed dispersed in the adhesive resin layer, even if the insulating interval in the arrangement direction between the connection electrodes or the connected electrodes is narrowed to a very small interval, the difference is different. Insulation failure due to the isotropic conductive adhesive does not occur.

また、インクジェット方式により、接着樹脂層に形成される導電性粒子の密集領域の大きさ、形成位置を精度良く制御することができので、必要最小限の導電性粒子を用いて、確実に配列方向に直交する加圧方向の接続電極間の電気接続を行うことができる。   In addition, the size and formation position of the conductive particles formed in the adhesive resin layer can be accurately controlled by the ink jet method, so the arrangement direction can be ensured using the minimum necessary conductive particles. The electrical connection between the connection electrodes in the pressurizing direction orthogonal to can be performed.

以下、本発明の一実施の形態に係る異方性導電接着フィルムの製造方法を、図1乃至図5を用いて説明する。図1は、ヘッドユニット9の底面図、図2は、ヘッドユニット9の縦断面図、図3は、接着樹脂剤フィルム2へインク3を吐出する状態を示す平面図、図4は、図3の要部拡大縦断面図、図5は、表面セパレータ7を除いた異方性導電接着フィルム1の平面図である。   Hereinafter, the manufacturing method of the anisotropic conductive adhesive film which concerns on one embodiment of this invention is demonstrated using FIG. 1 thru | or FIG. 1 is a bottom view of the head unit 9, FIG. 2 is a longitudinal sectional view of the head unit 9, FIG. 3 is a plan view showing a state in which the ink 3 is discharged to the adhesive resin film 2, and FIG. FIG. 5 is a plan view of the anisotropic conductive adhesive film 1 excluding the surface separator 7.

本実施の形態で製造する異方性導電接着フィルム1は、図4,図5に示すように、多数の導電性粒子5の密集領域6が分散して形成されたバインダーとなる接着剤層4の表裏に表面セパレータ7と裏面セパレータ8が貼り付けられた3層構造のフィルムで、導電性粒子5の密集領域6は、インクジェット方式により、接着剤層4に形成される。   As shown in FIGS. 4 and 5, the anisotropic conductive adhesive film 1 manufactured in the present embodiment has an adhesive layer 4 serving as a binder formed by dispersing dense regions 6 of a large number of conductive particles 5. The dense region 6 of the conductive particles 5 is formed in the adhesive layer 4 by an ink jet method.

インクジェット方式とは、インクジェットプリンタにおいて、文字を構成するドット列に対応して配置した微細な吐出ノズルにインクを供給し、吐出ノズル内に保持したインクを加圧してインク滴を記録用紙に対して吐出させて記録を行う方式をいうが、本発明では、吐出ノズルから少なくとも導電性粒子を含有するインクを、接着剤層上に非接触で吐出する全ての方式をいう。本実施の形態においては、図1、図2に示すヘッドユニット9を用いて、エポキシ系樹脂と溶剤に導電性粒子5を配合したインク3を、接着剤層4へ吐出させる。ここで使用される導電性粒子5は、樹脂から成形した球形のコアの周囲にニッケル層と更にその外周に金メッキを施し、外径が3乃至4μmの球体であるが、本発明の目的の範囲内で、必ずしもこの大きさに限らず例えば、外径を10μm以上としてもよく、また、他の外形、材質、構造の導電性粒子としてもよい。   Ink jet system is an ink jet printer that supplies ink to fine discharge nozzles arranged corresponding to the dot rows constituting characters, pressurizes the ink held in the discharge nozzles, and applies ink droplets to the recording paper. In the present invention, it refers to all systems in which ink containing at least conductive particles is ejected from an ejection nozzle onto an adhesive layer in a non-contact manner. In the present embodiment, using the head unit 9 shown in FIGS. 1 and 2, the ink 3 in which conductive particles 5 are blended with an epoxy resin and a solvent is discharged onto the adhesive layer 4. The conductive particles 5 used here are spheres having a nickel layer around a spherical core molded from a resin and further gold-plated on the outer periphery thereof, and an outer diameter of 3 to 4 μm. However, the outer diameter is not necessarily limited to this size. For example, the outer diameter may be 10 μm or more, and the conductive particles may have other external shapes, materials, and structures.

ヘッドユニット9は、インク3を加熱し気泡を発生させてその圧力で吐出ノズル10からインク3を噴出させるサーマルジェット方式のヘッドユニット9であり、図1に示すように、ユニット基板11のインク吐出面にノズルプレート12が積層されている。このノズルプレート12には、吐出口10aの輪郭を円形とした多数の吐出ノズル10がノズルプレート12の長手方向(図中X方向)に沿って2列平行に穿設され、各列の吐出ノズル10は、X方向の半ピッチ毎にずれた位置にあり、これにより千鳥状に配列されている。   The head unit 9 is a thermal jet type head unit 9 that heats the ink 3 to generate bubbles, and ejects the ink 3 from the discharge nozzle 10 with the pressure. As shown in FIG. A nozzle plate 12 is laminated on the surface. The nozzle plate 12 is provided with a plurality of discharge nozzles 10 having a circular outline of the discharge ports 10a in parallel along the longitudinal direction (X direction in the figure) of the nozzle plate 12, and the discharge nozzles in each row. 10 are located at positions shifted every half pitch in the X direction, and are arranged in a staggered manner.

ノズルプレート12の吐出ノズル10の内方は、隔壁13により仕切られた加圧室14となっていて、吐出ノズル10に対向する加圧室14の内面に図示しない駆動電源回路から印加される駆動電圧で発熱する発熱抵抗体15が取り付けられている。加圧室14は、更にユニット基板11の内方に穿設されたインク供給溝16を介して外部の図示しないインクタンクに連通している。   The inside of the discharge nozzle 10 of the nozzle plate 12 is a pressurizing chamber 14 partitioned by a partition wall 13, and driving applied from an unshown drive power supply circuit to the inner surface of the pressurizing chamber 14 facing the discharge nozzle 10. A heating resistor 15 that generates heat by voltage is attached. The pressurizing chamber 14 further communicates with an external ink tank (not shown) via an ink supply groove 16 drilled inward of the unit substrate 11.

このように構成されたヘッドユニット9は、多数のヘッドユニット9が、長手方向に沿って連続して、図3に示すように、ラインヘッド17のケース17aに収容され、インク3を吐出する接着樹脂剤フィルム2が、各吐出ノズル10の下方に配置される。接着樹脂剤フィルム2は、図4に示すように、予め裏面セパレータ8の表面側全面にバインダー4となるエポキシ系接着剤を付着させたものである。接着剤層となるバインダー4としては、この他、アクリル系接着剤を用いてもよい。   The head unit 9 configured in this manner has a large number of head units 9 that are accommodated in the case 17a of the line head 17 and eject the ink 3 as shown in FIG. The resin agent film 2 is disposed below each discharge nozzle 10. As shown in FIG. 4, the adhesive resin film 2 is obtained by previously attaching an epoxy-based adhesive serving as the binder 4 to the entire front surface side of the back separator 8. In addition to this, an acrylic adhesive may be used as the binder 4 serving as the adhesive layer.

ラインヘッド17は、長手方向(図3においてX方向)に沿った2列全ての吐出ノズル10から、同時に接着樹脂剤フィルム2上にインク3を吐出させるもので、この制御は、各吐出ノズル10の加圧室14内の発熱抵抗体15に駆動電圧を印可することにより行われる。加圧室10には、インク供給溝16から導電性粒子5が配合されたインク3が供給され、発熱抵抗体15の発熱によって加圧室10内のインク3が加熱され、気泡を発生することによりその圧力で吐出ノズル10から接着樹脂剤フィルム2上に吐出される。   The line head 17 causes the ink 3 to be simultaneously discharged onto the adhesive resin film 2 from all the two rows of discharge nozzles 10 along the longitudinal direction (X direction in FIG. 3). This is performed by applying a driving voltage to the heating resistor 15 in the pressurizing chamber 14. The pressure chamber 10 is supplied with the ink 3 in which the conductive particles 5 are blended from the ink supply groove 16, and the heat generated by the heating resistor 15 heats the ink 3 in the pressure chamber 10 to generate bubbles. Thus, the pressure is discharged from the discharge nozzle 10 onto the adhesive resin film 2 with that pressure.

接着樹脂剤フィルム2上には、導電性粒子5を含むインク3が付着することにより、図4に示すように、千鳥状に2列に配置された各吐出ノズル10の配置部位に対応し、多数の導電性粒子5の密集領域6が千鳥状に分散して形成される。   On the adhesive resin film 2, the ink 3 containing the conductive particles 5 adheres, so that as shown in FIG. 4, corresponding to the arrangement sites of the discharge nozzles 10 arranged in two rows in a staggered manner, A dense region 6 of a large number of conductive particles 5 is formed in a staggered manner.

吐出ノズル10の吐出口10aの輪郭を円形とすることにより、輪郭が円形となった密集領域6の最大外径(直径)Aは、密集領域6が形成された異方性導電接着フィルム1を用いて接続する接続電極(被接続電極)20、21の配列方向(図7のY方向)で隣接する接続電極(被接続電極)間の最小絶縁距離dよりも小さいものとする。これにより、任意の位置に分散して形成された密集領域6であっても、隣接する2つの接続電極の双方に跨ることがなく、密集領域6内の導電性粒子5により接続電極間の短絡を防止できる。   By making the outline of the discharge port 10a of the discharge nozzle 10 circular, the maximum outer diameter (diameter) A of the dense area 6 having the circular outline is the same as that of the anisotropic conductive adhesive film 1 in which the dense area 6 is formed. It is assumed that it is smaller than the minimum insulation distance d between adjacent connection electrodes (connected electrodes) in the arrangement direction (Y direction in FIG. 7) of the connection electrodes (connected electrodes) 20 and 21 to be connected. Thereby, even if it is the dense region 6 formed by being dispersed at an arbitrary position, it does not straddle both adjacent two connection electrodes, and the conductive particles 5 in the dense region 6 short-circuit between the connection electrodes. Can be prevented.

この密集領域6の最大外径Aは、ヘッドユニット9に形成される吐出ノズル10の吐出口10aの内径と、吐出ノズル10から接着樹脂剤フィルム2までの距離により定められるので、例えば、吐出ノズル10の内径に対して、インク3の拡散により密集領域6の外径が25%拡大するとすれば、吐出ノズル10の内径を、少なくとも導電性粒子5の最大外径より大きく、接続電極間の最小絶縁距離d*0.8より小さいものとする。   Since the maximum outer diameter A of the dense region 6 is determined by the inner diameter of the discharge port 10a of the discharge nozzle 10 formed in the head unit 9 and the distance from the discharge nozzle 10 to the adhesive resin film 2, for example, the discharge nozzle If the outer diameter of the dense region 6 is expanded by 25% by the diffusion of the ink 3 with respect to the inner diameter of 10, the inner diameter of the discharge nozzle 10 is at least larger than the maximum outer diameter of the conductive particles 5, and the minimum between the connection electrodes It is assumed that the insulation distance is less than d * 0.8.

2列の各吐出ノズル10からインク3を吐出させた後、接着樹脂剤フィルム2をヘッドユニット9の短手方向(図3において下方)に1ピッチ送り、再び、X方向に沿った2列全ての吐出ノズル10から、同時に接着樹脂剤フィルム2上にインク3を吐出させ、これを接着樹脂剤フィルム2の全体に密集領域6が形成されるまで繰り返す。1ピッチで接着樹脂剤フィルム2を送る送り量は、2列の吐出ノズル10で接着樹脂剤フィルム2に形成される密集領域6、6間の短手方向(Y方向)の間隔Pyの2倍の幅であり、これにより、接着樹脂剤フィルム2の全体にY方向に等ピッチPyの密集領域6が分散して形成される。   After the ink 3 is discharged from each of the two discharge nozzles 10, the adhesive resin film 2 is fed by one pitch in the short direction (downward in FIG. 3) of the head unit 9, and again, all the two rows along the X direction The ink 3 is simultaneously discharged from the discharge nozzle 10 onto the adhesive resin film 2 and this is repeated until the dense region 6 is formed on the entire adhesive resin film 2. The feed amount for feeding the adhesive resin film 2 at one pitch is twice the short direction (Y direction) interval Py between the dense regions 6 and 6 formed on the adhesive resin film 2 by the two discharge nozzles 10. As a result, the dense regions 6 with the equal pitch Py are formed in the Y direction in a dispersed manner throughout the adhesive resin film 2.

後述するように、上述の過程で製造される異方性導電接着フィルム1は、送り方向(図3のY方向)を、接続電極(被接続電極)20、21の配列方向(図7のY方向)に沿って貼り付けられるものであり、送り方向に等ピッチPyで形成される密集領域6の少なくともいずれかの列が接続電極20と被接続電極21(図7参照)上に重なるように設定する必要があり、送り方向のピッチPyは、少なくとも接続電極20と被接続電極21の配列方向(図7のY方向)の幅Eyより狭く、密集領域6間が重ならないことを限度に可能な限り小さくすることが好ましい。従って、密集領域6の送り方向ピッチPyにほぼ等しいヘッドユニット9の2列の吐出ノズル10の短手方向(Y方向)の間隔も、接続電極20及び被接続電極21の配列方向(図7のY方向)の幅Eyより小さい値に設定する。   As will be described later, the anisotropic conductive adhesive film 1 manufactured in the above-described process has a feeding direction (Y direction in FIG. 3) in the arrangement direction of the connection electrodes (connected electrodes) 20 and 21 (Y in FIG. 7). Direction) and at least one column of the dense region 6 formed at an equal pitch Py in the feed direction overlaps the connecting electrode 20 and the connected electrode 21 (see FIG. 7). It is necessary to set the pitch Py in the feed direction at least as narrow as the width Ey in the arrangement direction of the connection electrodes 20 and the connected electrodes 21 (Y direction in FIG. 7), so that the dense regions 6 do not overlap. It is preferable to make it as small as possible. Therefore, the distance in the short direction (Y direction) of the two rows of discharge nozzles 10 of the head unit 9 that is substantially equal to the feed direction pitch Py of the dense region 6 is also the arrangement direction of the connection electrodes 20 and the connected electrodes 21 (see FIG. 7). A value smaller than the width Ey in the Y direction) is set.

また、接着樹脂剤フィルム2の送り方向と直交する方向(X方向)は、接続電極20及び被接続電極21のそれぞれ配列方向と直交する電極の長手方向(図7のX方向)となる。一般に、上述の異方性導電接着フィルム1を用いて接続電極(被接続電極)20、21間を電気接続する際に、接続電極(被接続電極)20、21の配列方向の幅Eyが20μm、電極の長手方向の幅Exが80μmであるとすれば、少なくともこの大きさの接続電極(被接続電極)20、21間に、3乃至4μmの導電性粒子5が5個以上介在していれば、充分に電気接続の接続電流を流すことができるとされている。   Moreover, the direction (X direction) orthogonal to the feed direction of the adhesive resin film 2 is the longitudinal direction (X direction in FIG. 7) of the electrodes orthogonal to the arrangement direction of the connection electrodes 20 and the connected electrodes 21. In general, when the connection electrodes (connected electrodes) 20 and 21 are electrically connected using the anisotropic conductive adhesive film 1 described above, the width Ey in the arrangement direction of the connection electrodes (connected electrodes) 20 and 21 is 20 μm. If the width Ex in the longitudinal direction of the electrode is 80 μm, at least five or more conductive particles 5 of 3 to 4 μm are interposed between the connecting electrodes (connected electrodes) 20 and 21 of this size. In this case, it is said that a sufficient connection current for electrical connection can flow.

このことから、単位密集領域6あたり少なくとも1個の導電性粒子5が含まれていると仮定すれば、電極の長手方向の幅Exに5以上の密集領域6が、接着樹脂剤フィルム2の送り方向と直交する方向(X方向)に存在する必要があり、送り方向と直交する方向ピッチPxは、接続電極(被接続電極)20、21の長手方向(図7のX方向)の幅Exの1/5より狭く、密集領域6間が重ならないことを限度に可能な限り小さくすることが好ましい。従って、密集領域6のピッチPxにほぼ等しいヘッドユニット9の吐出ノズル10の長手方向(X方向)の間隔も、接続電極(被接続電極)20、21の電極の長手方向(図7のX方向)の幅Exの5分の1より小さい値に設定する。   From this, assuming that at least one conductive particle 5 is included in the unit dense region 6, five or more dense regions 6 in the width Ex in the longitudinal direction of the electrode are fed to the adhesive resin film 2. The direction pitch Px perpendicular to the feed direction must be present in the direction orthogonal to the direction (X direction), and the width Px of the longitudinal direction (X direction in FIG. 7) of the connection electrodes (connected electrodes) 20 and 21 It is preferable to make it as small as possible as long as it is narrower than 1/5 and does not overlap between the dense regions 6. Accordingly, the distance in the longitudinal direction (X direction) of the discharge nozzles 10 of the head unit 9 that is substantially equal to the pitch Px of the dense region 6 is also the longitudinal direction of the electrodes of the connection electrodes (connected electrodes) 20 and 21 (the X direction in FIG. 7). ) To a value smaller than one fifth of the width Ex.

このように密集領域6が分散して形成され接着樹脂剤フィルム2は、図4に示すように、接着剤層4上が表面セパレータ7により覆われた後、図3の破線で示す1mm幅で接着樹脂剤フィルム2の送り方向に沿って裁断され、図示しない巻き取りローラに巻き取られ、異方性導電接着フィルム1が製造される。   As shown in FIG. 4, the adhesive resin film 2 formed by dispersing the dense regions 6 in this way is covered with the surface separator 7, and then the adhesive resin film 2 is 1 mm wide as indicated by the broken line in FIG. 3. Cut along the feeding direction of the adhesive resin film 2 and wound on a winding roller (not shown), the anisotropic conductive adhesive film 1 is manufactured.

表面セパレータ7と裏面セパレータ8は、それぞれ粘着性の接着剤層4に対して容易に剥離可能な材質で形成され、本実施の形態では、表面セパレータ7の厚みが20μm、裏面セパレータ8の厚みが40μm、接着剤層4の厚みが20μmで、巻き取りローラに巻き付けられる異方性導電接着フィルム1の厚みは、80μmとなっている。   The front separator 7 and the back separator 8 are each formed of a material that can be easily peeled from the adhesive adhesive layer 4. In this embodiment, the thickness of the front separator 7 is 20 μm, and the thickness of the back separator 8 is The thickness of the adhesive conductive film 1 wound around the winding roller is 80 μm, and the thickness of the adhesive layer 4 is 40 μm and the thickness of the adhesive layer 4 is 20 μm.

このようにして製造された異方性導電接着フィルム1には、図5に示すように、多数の導電性粒子5の密集領域6が、直交する2方向で等間隔のピッチPx、Pyの千鳥状に形成される。   In the anisotropic conductive adhesive film 1 manufactured in this way, as shown in FIG. 5, dense regions 6 of a large number of conductive particles 5 are staggered with pitches Px and Py equally spaced in two orthogonal directions. It is formed in a shape.

次に、このようにして製造された異方性導電接着フィルム1を用いて、接続電極20と被接続電極21間を電気接続する工程を、図6乃至図8で説明する。   Next, a process of electrically connecting the connection electrode 20 and the connected electrode 21 using the anisotropic conductive adhesive film 1 manufactured in this way will be described with reference to FIGS.

ここでは、これらの図に示すように、プリント配線基板23上に配列された複数の被接続電極21、21・・に対して、液晶表示素子24の複数の接続電極20,20を個々に対応させて接続させるものであり、液晶ドライバーICの出力制御端子に接続する被接続電極20を、液晶表示素子24の入出力端子に接続する接続電極20に対応させて接続し、液晶ドライバーICで液晶表示素子24の表示制御を行うものである。   Here, as shown in these drawings, the plurality of connection electrodes 20, 20 of the liquid crystal display element 24 are individually associated with the plurality of connected electrodes 21, 21... Arranged on the printed wiring board 23. The connected electrode 20 connected to the output control terminal of the liquid crystal driver IC is connected in correspondence with the connecting electrode 20 connected to the input / output terminal of the liquid crystal display element 24, and the liquid crystal driver IC Display control of the display element 24 is performed.

上述したように、被接続電極21の配列方向(図7のY方向)の幅Eyは、20μm、配列方向で隣接する被接続電極21,21間の絶縁距離dは、10μmとなっているので、複数の被接続電極21、21・・は、30μmのピッチで、図中左右に配列されている。尚、この被接続電極21に対応させて接続する接続電極20は、被接続電極21の対向位置に配列されるので、複数の接続電極20,20についても、液晶表示素子24に同一方向に同一ピッチで配列される。   As described above, the width Ey of the connected electrodes 21 in the arrangement direction (Y direction in FIG. 7) is 20 μm, and the insulation distance d between the connected electrodes 21 and 21 adjacent in the arrangement direction is 10 μm. The plurality of connected electrodes 21, 21... Are arranged on the left and right in the drawing at a pitch of 30 μm. Since the connection electrodes 20 connected in correspondence with the connected electrodes 21 are arranged at positions opposite to the connected electrodes 21, the plurality of connecting electrodes 20, 20 are also the same in the same direction as the liquid crystal display element 24. Arranged at pitch.

異方性導電接着フィルム1は、図5に示す表面セパレータ7を剥離し、接着剤層4と密集領域6が露出した状態で、その露出面(表面)を被接続電極21,21の配列方向に沿って被接続電極21に貼り付ける。すなわち、接着樹脂剤フィルム2の送り方向(図3のY方向)が、被接続電極21の配列方向(図7のY方向)となる。   The anisotropic conductive adhesive film 1 peels off the surface separator 7 shown in FIG. 5 and exposes the adhesive layer 4 and the dense region 6 with the exposed surface (surface) in the direction in which the connected electrodes 21 and 21 are arranged. Affixed to the electrode 21 to be connected. That is, the feeding direction of the adhesive resin film 2 (Y direction in FIG. 3) is the arrangement direction of the connected electrodes 21 (Y direction in FIG. 7).

接着剤層4をプリント配線基板23と被接続電極21に充分密着させた後、図6、図7に示すように、裏面セパレータ8を剥離した状態とする。この状態で各被接続電極21には、少なくとも5以上の導電性粒子5の密集領域6が存在するものとなる。   After the adhesive layer 4 is sufficiently adhered to the printed wiring board 23 and the connected electrode 21, the back separator 8 is peeled off as shown in FIGS. 6 and 7. In this state, each connected electrode 21 has at least five dense regions 6 of the conductive particles 5.

続いて、複数の被接続電極21、21・・と、それぞれに対応して接続される接続電極20、20・・が対向するように、接続電極20、20の配列面を接着剤層4上に密着させ、接続電極20と被接続電極21間を加熱しながら加圧する。この加圧時間は、例えば190℃であれば5秒、170℃であれば15秒である。   Subsequently, the arrangement surface of the connection electrodes 20, 20 is placed on the adhesive layer 4 so that the plurality of connected electrodes 21, 21. The contact electrode 20 and the connected electrode 21 are pressed while being heated. The pressurizing time is, for example, 5 seconds at 190 ° C. and 15 seconds at 170 ° C.

加熱、加圧工程により、被接続電極21上の密集領域6に含まれる導電性粒子5は、接続電極20との間に挟まれて、両者を導通させる。同時に、熱硬化性である接着剤層4は加熱されることにより硬化し、上述の加圧状態を保ったまま、接続電極20と被接続電極21が物理的にも固着される。   By the heating and pressurizing steps, the conductive particles 5 included in the dense region 6 on the connected electrode 21 are sandwiched between the connecting electrode 20 and make the two conductive. At the same time, the thermosetting adhesive layer 4 is cured by heating, and the connecting electrode 20 and the connected electrode 21 are physically fixed while maintaining the above-mentioned pressure state.

一方、接続電極(被接続電極)20、21の配列方向で隣接する電極間には、必ず密集領域6が存在しない部位が形成され、導電性粒子5も存在しないので、配列方向の接続電極(被接続電極)20、21間の絶縁は保たれる。   On the other hand, between the electrodes adjacent to each other in the arrangement direction of the connection electrodes (connected electrodes) 20 and 21, there is always a portion where the dense region 6 does not exist, and the conductive particles 5 do not exist. The insulation between the connected electrodes) 20 and 21 is maintained.

上述の実施の形態において、導電性粒子5の密集領域6は、千鳥状に等ピッチで接着樹脂剤フィルム2上に分散させたが、必ずしも等ピッチで形成する必要はない。   In the above-described embodiment, the dense regions 6 of the conductive particles 5 are dispersed on the adhesive resin film 2 at an equal pitch in a staggered manner, but it is not always necessary to form them at an equal pitch.

上述の実施の形態によれば、インクジェット方式で、接着樹脂剤フィルム2へ導電性粒子5の密集領域6を形成するので、粘着する接着剤層4へその形成過程で触れることがなく、更に、導電性粒子5を含むインク3の吐出方向、吐出速度を制御することができることから、接着樹脂剤フィルム2の任意の位置に、任意の大きさの導電性粒子5の密集領域6を形成することができる。従って、接続の信頼性が得られる必要最小限の導電性粒子5のみで、導電性粒子5効率的に分散させて、電極20,21間を接続することができる。
図9乃至図11は、
According to the above-described embodiment, the dense region 6 of the conductive particles 5 is formed on the adhesive resin film 2 by an ink jet method, so that the adhesive layer 4 to be adhered is not touched during the formation process, Since the discharge direction and discharge speed of the ink 3 containing the conductive particles 5 can be controlled, the dense region 6 of the conductive particles 5 of any size can be formed at any position of the adhesive resin film 2. Can do. Therefore, it is possible to connect the electrodes 20 and 21 by efficiently dispersing the conductive particles 5 using only the minimum necessary conductive particles 5 that can provide connection reliability.
9 to 11 are

また、インクジェット方式を用いて、粘着する接着剤層4に触れることがなく、その表面に導電性粒子5の密集領域6を形成できるので、接続電極が配列された電子部品と、被接続電極が配列された回路基板間に異方性導電接着剤を配置し、接続電極と被接続電極間を加熱加圧し、加圧方向の電極間を電気接続する電極接続方法にも適用できる。   Further, since the dense region 6 of the conductive particles 5 can be formed on the surface without touching the adhesive layer 4 to be adhered using the ink jet method, the electronic component in which the connection electrodes are arranged and the connected electrode are provided. The present invention can also be applied to an electrode connection method in which an anisotropic conductive adhesive is arranged between arranged circuit boards, a connection electrode and a connected electrode are heated and pressurized, and an electrode in a pressing direction is electrically connected.

以下、この本発明の他の実施の形態に係る電極接続方法を図9乃至図11を用いて説明する。これらの図において、上述した実施の形態と同一の構成、若しくは同様に作用する構成については、同一の番号を付してその説明を省略する。   Hereinafter, an electrode connection method according to another embodiment of the present invention will be described with reference to FIGS. In these drawings, the same components as those in the above-described embodiment or the components that operate in the same manner are designated by the same reference numerals and the description thereof is omitted.

本実施の形態においても、プリント配線基板23上に配列された複数の被接続電極21、21・・に対して、液晶表示素子24の複数の接続電極20,20を個々に対応させて接続させるものとし、予め一方の電極、ここでは図9に示すように、プリント配線基板23上に配列された複数の被接続電極21、21・・に、バインダーとなる接着剤をむらなく付着させ、接着剤層4を形成する。   Also in the present embodiment, the plurality of connection electrodes 20, 20 of the liquid crystal display element 24 are connected to the plurality of connected electrodes 21, 21,. As shown in FIG. 9, an adhesive serving as a binder is evenly adhered to one of the electrodes, in this case, as shown in FIG. 9, on the plurality of connected electrodes 21, 21. The agent layer 4 is formed.

続いて、プリント配線基板23上に形成された接着剤層4に、所定間隔を隔ててラインヘッド17を対向させ、ラインヘッド17に備えられた吐出ノズル10から接着剤層4上にインク3を吐出させる工程と、プリント配線基板23とラインヘッド17のいずれかを相対移動させる工程を交互に繰り返し、図10に示すように、接着剤層4の表面に導電性粒子5の密集領域6を多数分散して形成する。   Subsequently, the line head 17 is opposed to the adhesive layer 4 formed on the printed wiring board 23 at a predetermined interval, and the ink 3 is applied onto the adhesive layer 4 from the discharge nozzle 10 provided in the line head 17. The step of discharging and the step of relatively moving either the printed wiring board 23 or the line head 17 are alternately repeated, and a large number of dense regions 6 of the conductive particles 5 are formed on the surface of the adhesive layer 4 as shown in FIG. Dispersed to form.

密集領域6の最大外径(直径)Aは、隣接する接続電極20、20間、若しくは被接続電極21、21間の最小絶縁距離dよりも小さく、従って、配列方向(図中左右)で隣接する電極間を密集領域6が跨ぐことがなく、配列方向の電極間は絶縁される。   The maximum outer diameter (diameter) A of the dense region 6 is smaller than the minimum insulation distance d between the adjacent connection electrodes 20 and 20 or the connected electrodes 21 and 21, and is therefore adjacent in the arrangement direction (left and right in the figure). The dense regions 6 do not straddle the electrodes to be insulated, and the electrodes in the arrangement direction are insulated.

一方、導電性粒子5の密集領域6は、互いに重ならないように接着剤層4の表面に分散して形成され、各接続電極20の鉛直線上に複数の密集領域6が存在するものとなる。   On the other hand, the dense regions 6 of the conductive particles 5 are formed dispersed on the surface of the adhesive layer 4 so as not to overlap each other, and a plurality of dense regions 6 exist on the vertical lines of the connection electrodes 20.

続いて、複数の被接続電極21、21・・と、それぞれに対応して接続される接続電極20、20・・が対向するように、接続電極20、20の配列面を接着剤層4上に密着させ、接続電極20と被接続電極21間を加熱しながら加圧し、熱硬化性である接着剤層4は硬化させ、プリント配線基板23と液晶表示素子24を物理的に固着させる。   Subsequently, the arrangement surface of the connection electrodes 20, 20 is placed on the adhesive layer 4 so that the plurality of connected electrodes 21, 21. The adhesive layer 4 which is thermosetting is cured, and the printed wiring board 23 and the liquid crystal display element 24 are physically fixed.

同時に、図12に示すように、接続電極20と被接続電極21間が加圧されることにより、両電極20、21間に介在する密集領域6に含まれる導電性粒子5は、両電極20、21に高い接触圧で接触し、接着剤層4が硬化することによりその接触状態が保たれ、加圧方向の両電極20、21間が導通する。   At the same time, as shown in FIG. 12, when the connection electrode 20 and the connected electrode 21 are pressurized, the conductive particles 5 contained in the dense region 6 interposed between the two electrodes 20 and 21 are separated from both the electrodes 20. , 21 is contacted with a high contact pressure, and the adhesive layer 4 is cured, so that the contact state is maintained, and the electrodes 20 and 21 in the pressurizing direction are electrically connected.

上述の実施の形態では、インクジェット方式としてサーマルジェット方式のヘッドユニット9で説明したが、ピエゾ抵抗素子(圧電素子)の変形によってインクを噴出するピエゾジェット方式を用いてもよく、流路を変えることにより接着樹脂剤フィルム2の所定位置へインクを吐出させるコンティニュアス方式を用いてもよい。   In the above-described embodiment, the thermal jet type head unit 9 has been described as an ink jet type, but a piezo jet type that ejects ink by deformation of a piezoresistive element (piezoelectric element) may be used, and the flow path is changed. Thus, a continuous method in which ink is ejected to a predetermined position of the adhesive resin film 2 may be used.

更に、インクジェット方式のラインプリンタに採用されるラインヘッド17で、同時に1列複数の吐出ノズル10からインク3を吐出させたが、これより少ない吐出ノズル10を接着樹脂剤フィルム2に対して相対移動制御し、導電性粒子5の密集領域6を分散して形成するようにしてもよい。   Further, the line head 17 employed in the ink jet type line printer simultaneously ejected the ink 3 from the plurality of ejection nozzles 10 in one row, but the smaller number of ejection nozzles 10 moved relative to the adhesive resin film 2. The dense region 6 of the conductive particles 5 may be dispersed and formed.

また、吐出ノズル10の吐出口10aの輪郭を円形とし、密集領域6の輪郭を円形としたが、密集領域6の輪郭は吐出口10aの形状を変えたり、接着樹脂剤フィルム2若しくは接着剤層4と、吐出ノズル10のいずれかを、インク3の吐出中に相対移動させることにより任意の形状とすることができる。例えば、第1の実施の形態において、吐出口10aの輪郭を、ノズルプレート12の長手方向を長軸とする長円で形成すると、接着樹脂剤フィルム2に形成される導電性粒子5の密集領域6の輪郭は、接着樹脂剤フィルム2の送り方向と直交する方向(X方向)を長軸とする長円となる。従って、図7に示すX方向を長手方向とする電極21に、異方性導電接着フィルム1を貼り付けると、密集領域6は、電極21、21間を跨がない幅で、X方向を長軸とする長円の輪郭となり、電極21の配列方向(X方向)の単位長さあたりの密集領域6の面積を増加させることができ、各電極21上に配置される導電性粒子5を増加させ、より確実に加圧方向の電極20、21間を電気接続することができる。   Further, although the contour of the discharge port 10a of the discharge nozzle 10 is circular and the contour of the dense region 6 is circular, the contour of the dense region 6 changes the shape of the discharge port 10a, or the adhesive resin film 2 or adhesive layer. 4 and any of the ejection nozzles 10 can be formed in an arbitrary shape by relatively moving during ejection of the ink 3. For example, in the first embodiment, when the outline of the discharge port 10a is formed as an ellipse whose major axis is the longitudinal direction of the nozzle plate 12, a dense region of the conductive particles 5 formed on the adhesive resin film 2 is used. The outline 6 becomes an ellipse having a major axis in the direction (X direction) orthogonal to the feeding direction of the adhesive resin film 2. Therefore, when the anisotropic conductive adhesive film 1 is attached to the electrode 21 whose longitudinal direction is the X direction shown in FIG. 7, the dense region 6 has a width that does not extend between the electrodes 21, 21 and the X direction is long. The outline of the ellipse is used as an axis, the area of the dense region 6 per unit length in the arrangement direction (X direction) of the electrodes 21 can be increased, and the number of conductive particles 5 arranged on each electrode 21 is increased. Thus, the electrodes 20 and 21 in the pressurizing direction can be more reliably electrically connected.

本発明は、特に狭ピッチで、半田による接続ができない電極間を接続する異方性導電接着フィルムの製造や、異方性導電接着剤を用いた電極間の接続に適している。   The present invention is particularly suitable for manufacturing an anisotropic conductive adhesive film for connecting electrodes that cannot be connected by solder at a narrow pitch, and for connecting electrodes using an anisotropic conductive adhesive.

ヘッドユニット9の底面図である。4 is a bottom view of the head unit 9. FIG. ヘッドユニット9の部分省略縦断面図である。FIG. 3 is a partially omitted vertical sectional view of the head unit 9. 接着樹脂剤フィルム2へインク3を吐出する状態を示す平面図である。3 is a plan view showing a state in which ink 3 is ejected onto an adhesive resin film 2. FIG. 図3の要部拡大縦断面図である。FIG. 4 is an enlarged vertical cross-sectional view of a main part of FIG. 3. 表面セパレータ7を除いた異方性導電接着フイルム1の平面図である。It is a top view of the anisotropic conductive adhesive film 1 except the surface separator 7. FIG. 裏面セパレータ8を剥離し、接着剤層4をプリント配線基板23の被接続電極21に密着させた状態を示す縦断面図である。4 is a longitudinal sectional view showing a state in which the back separator 8 is peeled off and the adhesive layer 4 is brought into close contact with the connected electrode 21 of the printed wiring board 23. FIG. 図6の平面図である。FIG. 7 is a plan view of FIG. 6. 接続電極20と被接続電極21間を接続した状態を示す縦断面図である。FIG. 3 is a longitudinal sectional view showing a state in which a connection electrode 20 and a connected electrode 21 are connected. プリント配線基板23の被接続電極21に、接着剤層4を付着させた状態を示す縦断面図である。3 is a longitudinal sectional view showing a state in which an adhesive layer 4 is attached to a connected electrode 21 of a printed wiring board 23. FIG. 図9の接着剤層4の表面に、導電性粒子5の密集領域6を形成した状態を示す縦断面図である。It is a longitudinal cross-sectional view which shows the state which formed the dense area | region 6 of the electroconductive particle 5 in the surface of the adhesive bond layer 4 of FIG. 接続電極20と被接続電極21間を接続した状態を示す縦断面図である。FIG. 3 is a longitudinal sectional view showing a state in which a connection electrode 20 and a connected electrode 21 are connected.

符号の説明Explanation of symbols

1 異方性導電接着フィルム
2 接着樹脂剤フィルム
3 インク
5 導電性粒子
6 密集領域
10 吐出ノズル
20 接続電極
21 被接続電極
23 回路基板(プリント配線基板)
24 電子部品(液晶表示素子)
DESCRIPTION OF SYMBOLS 1 Anisotropic conductive adhesive film 2 Adhesive resin film 3 Ink 5 Conductive particle 6 Dense area
10 Discharge nozzle 20 Connection electrode 21 Connected electrode 23 Circuit board (printed wiring board)
24 Electronic components (liquid crystal display elements)

Claims (5)

複数の接続電極が配列された電子部品と、複数の被接続電極が配列された回路基板との間に配置され、接続電極と被接続電極間を加熱加圧し、加圧方向の電極間を電気接続する異方性導電接着フィルムの製造方法であって、
インクジェット方式により、導電性粒子を含有するインクを吐出ノズルから接着樹脂剤フィルム上に吐出し、
接着樹脂剤フィルムに、領域の最大外径Aが少なくとも配列方向で隣接する接続電極若しくは被接続電極間の最小絶縁間隔dより小さい導電性粒子の密集領域を分散して形成することを特徴とする異方性導電接着フィルムの製造方法。
Arranged between an electronic component in which a plurality of connection electrodes are arranged and a circuit board in which a plurality of connection electrodes are arranged, between the connection electrodes and the connection electrodes are heated and pressurized, and the electrodes in the pressurizing direction are electrically connected. A method for manufacturing an anisotropic conductive adhesive film to be connected,
By ink jet method, ink containing conductive particles is discharged from the discharge nozzle onto the adhesive resin film,
The adhesive resin film is formed by dispersing dense regions of conductive particles having a maximum outer diameter A of the region that is at least smaller than the minimum insulation distance d between connection electrodes or connected electrodes in the arrangement direction. A method for producing an anisotropic conductive adhesive film.
複数の吐出ノズルが、接着樹脂剤フィルム上に配置されるノズルプレートの長手方向に沿って配列され、
複数の各吐出ノズルから導電性粒子を含有するインクを吐出する工程と、接着樹脂剤フィルムを吐出ノズルの配列方向と直交する方向に、少なくとも密集領域の最大外径Aより長いピッチで送る工程を、交互に繰り返し、
接着樹脂剤フィルム上に、導電性粒子の密集領域を分散して形成することを特徴とする請求項1に記載の異方性導電接着フィルムの製造方法。
A plurality of discharge nozzles are arranged along the longitudinal direction of the nozzle plate disposed on the adhesive resin film,
A step of discharging ink containing conductive particles from each of the plurality of discharge nozzles, and a step of feeding the adhesive resin agent film at a pitch longer than at least the maximum outer diameter A of the dense region in a direction orthogonal to the arrangement direction of the discharge nozzles. , Repeat alternately,
The method for producing an anisotropic conductive adhesive film according to claim 1, wherein a dense region of conductive particles is dispersed and formed on the adhesive resin film.
複数の吐出ノズルは、ノズルプレートの長手方向に沿って、千鳥状に2列平行に配列されることを特徴とする請求項2に記載の異方性導電接着フィルムの製造方法。 The method for producing an anisotropic conductive adhesive film according to claim 2, wherein the plurality of discharge nozzles are arranged in parallel in two rows in a staggered manner along the longitudinal direction of the nozzle plate. 吐出ノズルの突出口の輪郭は、ノズルプレートの長手方向を長軸とする長円で形成され、導電性粒子の密集領域の輪郭を、接着樹脂剤フィルムの送り方向と直交する方向を長軸とする長円とすることを特徴とする請求項2又は請求項3のいずれか1項に記載の異方性導電接着フィルムの製造方法。 The outline of the discharge nozzle projection opening is formed as an ellipse with the longitudinal direction of the nozzle plate as the major axis, and the outline of the dense region of the conductive particles is defined as the major axis in the direction perpendicular to the feeding direction of the adhesive resin film. The method for producing an anisotropic conductive adhesive film according to any one of claims 2 and 3, wherein the ellipse is an ellipse. 複数の接続電極が配列された電子部品と、複数の被接続電極が配列された回路基板間に異方性導電接着剤を配置し、接続電極と被接続電極間を加熱加圧し、加圧方向の電極間を電気接続する電極接続方法であって、
(a)接続電極若しくは被接続電極の少なくとも一方に接着剤層を付着させる工程と、
(b)インクジェット方式により、導電性粒子を含有するインクを吐出ノズルから接着樹脂層上に吐出し、接着樹脂層に、領域の最大外径Aが少なくとも配列方向で隣接する接続電極若しくは被接続電極間の最小絶縁間隔dより小さい導電性粒子の密集領域を分散して形成する工程と、
(c)接続電極と被接続電極間を加熱加圧し、加圧方向の電極間を電気接続する工程と、
を有することを特徴とする電極接続方法。
An anisotropic conductive adhesive is disposed between an electronic component in which a plurality of connection electrodes are arranged and a circuit board in which a plurality of connection electrodes are arranged, and the pressure between the connection electrodes and the connection electrodes is heated and pressurized. An electrode connection method for electrically connecting the electrodes of
(A) attaching the adhesive layer to at least one of the connection electrode or the connection electrode;
(B) An ink containing conductive particles is ejected from an ejection nozzle onto an adhesive resin layer by an inkjet method, and a connection electrode or a connected electrode whose maximum outer diameter A is adjacent to the adhesive resin layer at least in the arrangement direction A step of dispersing and forming a dense region of conductive particles smaller than the minimum insulation interval d between
(C) heating and pressurizing between the connection electrode and the connected electrode, and electrically connecting the electrodes in the pressurizing direction;
An electrode connection method comprising:
JP2004239511A 2004-06-29 2004-08-19 Manufacturing method and electrode connection method for anisotropic conductive adhesive film Pending JP2006049783A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004239511A JP2006049783A (en) 2004-06-29 2004-08-19 Manufacturing method and electrode connection method for anisotropic conductive adhesive film

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004192177 2004-06-29
JP2004239511A JP2006049783A (en) 2004-06-29 2004-08-19 Manufacturing method and electrode connection method for anisotropic conductive adhesive film

Publications (1)

Publication Number Publication Date
JP2006049783A true JP2006049783A (en) 2006-02-16

Family

ID=36027952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004239511A Pending JP2006049783A (en) 2004-06-29 2004-08-19 Manufacturing method and electrode connection method for anisotropic conductive adhesive film

Country Status (1)

Country Link
JP (1) JP2006049783A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009029862A (en) * 2007-07-25 2009-02-12 Asahi Kasei Electronics Co Ltd Anisotropic conductive film
JP2009029861A (en) * 2007-07-25 2009-02-12 Asahi Kasei Electronics Co Ltd Anisotropic conductive film
WO2016068169A1 (en) * 2014-10-28 2016-05-06 デクセリアルズ株式会社 Anisotropic conductive film and connection structure
KR20170010965A (en) * 2015-07-20 2017-02-02 삼성디스플레이 주식회사 Acf film manufacturing device and manufaturing method
JP2020188018A (en) * 2014-11-17 2020-11-19 デクセリアルズ株式会社 Anisotropic conductive film
CN113963855A (en) * 2021-09-21 2022-01-21 北京大华博科智能科技有限公司 Z-axis conductor and Z-axis conductive film, and preparation method and application thereof

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02151045A (en) * 1988-12-02 1990-06-11 Hitachi Ltd Connection structure of electronic component and connection and formation of electronic component
JPH0563028A (en) * 1992-02-06 1993-03-12 Casio Comput Co Ltd Bonding method for semiconductor device
JPH06223943A (en) * 1993-01-29 1994-08-12 Hitachi Chem Co Ltd Manufacture of connecting member and its manufacturing device
JPH0946028A (en) * 1995-07-31 1997-02-14 Nec Corp Terminal connecting method and circuit board manufactured by method thereof
JP2004064047A (en) * 2002-06-07 2004-02-26 Sharp Corp Wiring board, display device, and method of manufacturing wiring board
JP2004087996A (en) * 2002-08-29 2004-03-18 Casio Comput Co Ltd Terminal structure and electronic component connection method
JP2004179398A (en) * 2002-11-27 2004-06-24 Seiko Epson Corp Electronic component mounting method, electronic component mounting substrate, electrooptical apparatus, and electronic equipment
JP2005019274A (en) * 2003-06-27 2005-01-20 Sumitomo Bakelite Co Ltd Manufacturing method of anisotropic conductive film

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02151045A (en) * 1988-12-02 1990-06-11 Hitachi Ltd Connection structure of electronic component and connection and formation of electronic component
JPH0563028A (en) * 1992-02-06 1993-03-12 Casio Comput Co Ltd Bonding method for semiconductor device
JPH06223943A (en) * 1993-01-29 1994-08-12 Hitachi Chem Co Ltd Manufacture of connecting member and its manufacturing device
JPH0946028A (en) * 1995-07-31 1997-02-14 Nec Corp Terminal connecting method and circuit board manufactured by method thereof
JP2004064047A (en) * 2002-06-07 2004-02-26 Sharp Corp Wiring board, display device, and method of manufacturing wiring board
JP2004087996A (en) * 2002-08-29 2004-03-18 Casio Comput Co Ltd Terminal structure and electronic component connection method
JP2004179398A (en) * 2002-11-27 2004-06-24 Seiko Epson Corp Electronic component mounting method, electronic component mounting substrate, electrooptical apparatus, and electronic equipment
JP2005019274A (en) * 2003-06-27 2005-01-20 Sumitomo Bakelite Co Ltd Manufacturing method of anisotropic conductive film

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009029861A (en) * 2007-07-25 2009-02-12 Asahi Kasei Electronics Co Ltd Anisotropic conductive film
JP2009029862A (en) * 2007-07-25 2009-02-12 Asahi Kasei Electronics Co Ltd Anisotropic conductive film
US9953947B2 (en) 2014-10-28 2018-04-24 Dexerials Corporation Anisotropic conductive film and connection structure
WO2016068169A1 (en) * 2014-10-28 2016-05-06 デクセリアルズ株式会社 Anisotropic conductive film and connection structure
CN106797082A (en) * 2014-10-28 2017-05-31 迪睿合株式会社 Anisotropic conductive film and connection structural bodies
JP7140162B2 (en) 2014-11-17 2022-09-21 デクセリアルズ株式会社 anisotropic conductive film
JP2020188018A (en) * 2014-11-17 2020-11-19 デクセリアルズ株式会社 Anisotropic conductive film
JP2022173254A (en) * 2014-11-17 2022-11-18 デクセリアルズ株式会社 anisotropic conductive film
JP7440789B2 (en) 2014-11-17 2024-02-29 デクセリアルズ株式会社 Anisotropic conductive film, connected structure and manufacturing method thereof
US11923333B2 (en) 2014-11-17 2024-03-05 Dexerials Corporation Anisotropic electrically conductive film
US12087722B2 (en) 2014-11-17 2024-09-10 Dexerials Corporation Anisotropic electrically conductive film
KR102301725B1 (en) 2015-07-20 2021-09-15 삼성디스플레이 주식회사 Acf film manufacturing device and manufaturing method
KR20170010965A (en) * 2015-07-20 2017-02-02 삼성디스플레이 주식회사 Acf film manufacturing device and manufaturing method
CN113963855A (en) * 2021-09-21 2022-01-21 北京大华博科智能科技有限公司 Z-axis conductor and Z-axis conductive film, and preparation method and application thereof

Similar Documents

Publication Publication Date Title
US9381737B2 (en) Method of manufacturing a print head
EP1976355B1 (en) Method for connecting two objects electrically
JP2011025493A (en) Liquid ejection head, method for manufacturing the same, and liquid ejection device
JPH071739A (en) Production of printing head and printing head
US8621750B2 (en) Method of making an electrical circuit structure
JP4618368B2 (en) Recording head manufacturing method and recording head
EP2769846B1 (en) Liquid ejection apparatus and connection method for flexible wiring board
JP2009226923A (en) Liquid jet head, liquid jet apparatus, and actuator device
JP2006049783A (en) Manufacturing method and electrode connection method for anisotropic conductive adhesive film
JP2012081639A (en) Liquid ejecting head and liquid ejecting apparatus
JP2008238462A (en) Structure of wiring board with drive circuit and liquid droplet ejection head
JP2002026491A (en) Plating method of printed circuit board, packaging structure body, liquid crystal device, and method for manufacturing liquid crystal device
JP4985623B2 (en) Wiring member connection method, wiring member manufacturing method, and wiring member
JP2020001342A (en) Liquid ejection head and manufacturing method therefor
JP6604035B2 (en) Liquid ejection device and method of manufacturing liquid ejection device
JP2008143011A (en) Droplet discharge head and its manufacturing method, and droplet discharge device
JP2009056756A (en) Manufacturing method of actuator unit, actuator unit, and liquid jetting head using the same
US10086611B2 (en) Inkjet head and printer
JP6033104B2 (en) Method for manufacturing liquid discharge head
JP2011062895A (en) Inkjet head
JP2011093105A (en) Liquid jetting head and recorder
JP2007301851A (en) Liquid droplet jet head, liquid droplet jet device, and method for manufacturing liquid droplet jet head
JP2017185705A (en) Ink jet head recording device
JP2007203595A (en) Liquid jet head
JP5464291B2 (en) Wiring board connection structure and connection method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070817

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090814

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090915

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20100518