JP2005346655A - Process control system, process control method, process control program and recording medium for program - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a process control system enabling a user to select a proper abnormal causes and countermeasure, even when there are a plurality of causes for a certain abnormality. <P>SOLUTION: The process control system first stores a time series data collected, until an abnormality occurs in the process (S10/S11), extracts waveform features of the time series data of a specified interval (S12) when the abnormality occurs (S11), calculates similarities to the past waveform features (S13), adds priority orders to the causes for abnormality based on the calculated waveform similarities (S14), and outputs to the user the causes for abnormality and countermeasures based on the priority orders added (S15). <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a process management apparatus, a process management method, a process management program, and a recording medium that records the program.

  Conventionally, a number of methods have been implemented and proposed as process management methods for detecting abnormalities in various manufacturing processes and identifying causes and countermeasures.

  As a generally practiced method, there are the following process control methods. In other words, facility operation data and product quality data in the manufacturing process are collected in time series, and the collected time series data is represented in a control chart to automatically detect process abnormalities in real time during equipment operation. To do. When an abnormality is detected, the cause of the abnormality and a countermeasure are derived by examining the symptoms of the abnormality according to FMEA (Failure Mode and Effects Analysis) prepared in advance by human hands. To do.

  Further, in the semiconductor device manufacturing management system described in Patent Document 1, the following process management method has been proposed. First, the manufacturing conditions in the manufacturing process of the semiconductor device and the conditions executed in the actual processing are collected and accumulated for each process, and the measurement results for each measurement item including the measurement values in the inspection process are collected and accumulated. A measurement value for each measurement item measured in the inspection process is determined according to a standard and a determination method registered in advance. When a defect occurs as a result of the determination, the analysis is automatically executed based on the analysis data and the analysis procedure registered in advance, and the cause equipment, the cause process, and the cause lot are specified.

  If the equipment is the cause, it is determined whether or not it is possible to cope with the condition modification of the cause equipment, and if possible, the condition of the subsequent lot working on the cause equipment is corrected, while if not possible, Stop working at the cause equipment. On the other hand, if the lot is the cause, it is determined whether it can be dealt with by correcting the conditions in the post-process of the cause lot. If possible, the conditions of the post-process are corrected. Stop work on the lot after the lot.

  Further, in the quality analysis method described in Patent Document 2, the following method has been proposed. First, equipment operation or product quality data is recorded, and defect feature extraction data corresponding to product defects is extracted and processed from the data. Then, the correspondence table DB (database) expressing the relationship between known typical defect feature extraction data and the corresponding failure factor or the maintenance information of the equipment for the defect is compared with the extracted defect feature extraction data. Then, the cause of failure or the maintenance information of the equipment is output.

In addition, in the equipment maintenance method described in Patent Document 3, the following method has been proposed. First, in a facility for manufacturing a product, various quality / operation information obtained by inspecting the quality of the product is managed as a quality / operation DB. Next, the product quality defect caused by each component unit of the equipment and the maintenance information of the equipment are associated with each other and stored as a knowledge DB. Next, using the information in the quality / operation DB, the cause of product failure and operation deterioration is automatically analyzed. Then, using this analysis result and the knowledge DB, the facility maintenance portion is narrowed down.
Japanese Patent Laid-Open No. 6-333791 (released on December 2, 1994) JP-A-8-32281 (published February 2, 1996) JP-A-9-289396 (published November 4, 1997)

  However, the above-described process management method has the following problems.

  First of all, in the generally practiced method, even process abnormalities can be automatically detected, but when examining abnormal symptoms from the detected abnormalities, it is necessary for a person to visually check all abnormal symptoms according to FMEA. is there. For this reason, it took a long time to derive the cause of the abnormality and the countermeasure. Moreover, since FMEA is listed by the workers involved in the manufacturing process discussing the causal relationship of abnormality, there is a problem that quantification is difficult depending on the subjectivity of the workers.

  In the method described in Patent Document 1, the cause equipment, the cause process, and the cause lot when a defect occurs is identified by automatically executing analysis based on analysis data and analysis procedures registered in advance. Yes. For this reason, it is necessary to analyze and determine the causal relationship of defects in advance, but this becomes more difficult as the process becomes more complicated.

  Further, the method described in Patent Document 2 uses a correspondence table DB that expresses the relationship between known typical defect feature extraction data and the corresponding failure factor or facility maintenance information for the failure. However, the more complicated the process is, the more various causes of defects become, making it difficult to create the correspondence table DB. In addition, there is a problem that it is impossible to deal with a case where a failure occurs due to an unknown failure cause.

  In the method described in Patent Document 3, the equipment maintenance portion is further narrowed down after automatically analyzing the cause of product failure and operation deterioration. However, since this narrowing down is performed in the form of dialogue with humans, it results in making the worker troublesome. In addition, the more complicated the process, the more various causes of product defects and reduced operation, resulting in a longer time for narrowing down.

  The present invention has been made in view of the above-described problems, and the object of the present invention is to provide a user with an appropriate cause of abnormality and / or an appropriate abnormality even when there are a plurality of causes and / or countermeasures for the abnormality. Another object of the present invention is to provide a process management apparatus or the like that can select a coping method.

  In order to solve the above problems, a process management apparatus according to the present invention is a process management apparatus that manages a large number of processes, and stores a correspondence relationship between the abnormality of the process and abnormality-related information related to the abnormality. Means, detection means for detecting an abnormality in the process, and extraction means for extracting one or more of the abnormality-related information corresponding to the abnormality detected by the detection means using the correspondence stored in the storage means And a list creation means for creating a list including the abnormality related information extracted by the extraction means based on the fitness of the abnormality related information and / or the degree of influence of the abnormality on the process. Yes.

  Here, examples of the abnormality-related information include the cause of the abnormality and a countermeasure for the abnormality.

  In the above configuration, when a process abnormality is detected, one or a plurality of abnormality-related information corresponding to the detected abnormality is extracted using the correspondence relationship, and a list including the extracted abnormality-related information is displayed as the fitness and / or Created based on impact. Thereby, even when there are a plurality of abnormality-related information for a certain abnormality, a list is created based on the degree of conformity and the degree of influence, so the user can refer to the created list appropriately, And / or abnormality-related information having a large influence can be selected.

  Further, the process management apparatus according to the present invention, in the above configuration, when the abnormality related information is confirmed, the correspondence update means for updating the correspondence stored in the storage means based on the confirmed abnormality related information. Is further provided.

  According to the above configuration, when an abnormality occurs and a countermeasure is taken and the abnormality related information is confirmed, the correspondence is updated based on the confirmed abnormality related information. As a result, a detailed and highly accurate correspondence is established, so that more appropriate abnormality related information can be extracted for a certain abnormality.

  In addition, when the determined abnormality related information does not exist in the previous correspondence relationship, a new correspondence relationship is added to the previous correspondence relationship. Therefore, even if the correspondence relationship is not stored in advance in the storage unit, the correspondence relationship updating unit repeatedly updates the correspondence relationship, so that a detailed and highly accurate correspondence relationship can be established.

  In the process management device according to the present invention, in the above configuration, the abnormality-related information is a cause of the abnormality, and the storage unit is an abnormality that is a correspondence relationship between the abnormality of the process and the cause of the abnormality. The cause correspondence relationship is stored as the correspondence relationship, and the cause / response correspondence relationship that is the correspondence relationship between the cause of the abnormality and a countermeasure for the abnormality is stored.

  According to the above configuration, since a coping method corresponding to the cause of the abnormality can be obtained using the cause / coping correspondence relationship, an appropriate coping method can be instructed to the user.

  Further, in the above-described configuration, the process management apparatus according to the present invention extracts a coping method corresponding to each cause of the abnormality detected by the extraction unit, using the cause / coping correspondence relationship stored by the storage unit. The present invention is further characterized by further comprising a handling method extraction unit and a handling method list creation unit that creates a handling method list including the handling method extracted by the handling method extraction unit based on the degree of suitability of the handling method.

  According to the above configuration, one or a plurality of coping methods corresponding to the cause of the extracted abnormality are extracted using the above cause / coping correspondence relationship, and a coping method list including the extracted coping methods is obtained, and the degree of suitability of the coping method Create based on. Thus, even when there are a plurality of countermeasures for the cause of a certain abnormality, the countermeasure list is created based on the degree of conformity. Therefore, the user can refer to the prepared countermeasure list and A coping method can be selected.

  Further, the process management apparatus according to the present invention, in the above configuration, when the coping method is determined, based on the determined coping method, update the cause / coping correspondence stored in the storage unit It is characterized by further providing a means.

  According to the above configuration, when an abnormality occurs and a countermeasure is performed and a countermeasure is determined, the cause / response correspondence is updated based on the determined countermeasure. As a result, a detailed and highly accurate cause / response relationship is established, so that a more appropriate response method can be extracted for the cause of a certain abnormality.

  In addition, when the determined countermeasure method does not exist in the previous cause / response correspondence, a new cause / response correspondence is added to the previous cause / response correspondence. Therefore, even if the cause / countermeasure correspondence is not stored in the storage unit in advance, the correspondence update unit can construct a detailed and high-precision correspondence by repeatedly updating the cause / countermeasure correspondence. .

  Further, the process management apparatus according to the present invention further includes a collecting unit that collects time-series data relating to the process in the configuration described above, and the detection unit uses the control projection method to collect the time-series data collected by the collecting unit. It is characterized by detecting the abnormality of the said process by processing by.

  Here, as the time series data regarding the process, for example, data regarding the operation of the equipment in the process and data regarding the quality of the product can be cited.

  According to the above configuration, since the process abnormality is detected by processing the time-series data by the control chart method, it is possible to eliminate an accidental abnormality and detect an abnormality having some cause.

  In the process management device according to the present invention, in the configuration described above, the correspondence relationship is a correspondence relationship between the waveform feature amount of the time-series data and the abnormality-related information when the process is abnormal, and the extraction is performed. The means obtains a plurality of abnormality related information corresponding to a plurality of waveform feature quantities close to the waveform feature quantity of the time series data when the detection means detects the abnormality using the correspondence relationship, and the abnormality The degree of fitness of related information is characterized in that it includes the similarity between the waveform feature quantity of the time series data detected by the detection means and the waveform feature quantities respectively corresponding to the plurality of abnormality related information.

  According to the above configuration, the abnormal state is represented by the waveform feature amount of the time-series data, and the waveform feature amount at the time of abnormality detection and the waveform included in the correspondence relationship are used as the fitness used when creating the list. The degree of similarity between the feature quantities can be used. As a result, abnormality-related information that matches a certain abnormal state can be obtained quantitatively and objectively.

  In addition to the similarity of the waveform feature amount, the degree of conformity of the abnormality-related information includes, for example, an abnormality occurrence frequency and an abnormality probability. Examples of the degree of influence of an abnormality on a process include a loss ratio due to abnormality, an average countermeasure time, a recent failure rate, and a recent failure increase rate.

  The process management apparatus according to the present invention is a process management apparatus for managing a large number of processes, wherein a storage means for storing a correspondence relationship between the abnormality of the process and the abnormality-related information related to the abnormality, and the abnormality-related information It is characterized by comprising correspondence updating means for updating the correspondence based on the confirmed abnormality related information when confirmed.

  According to the above configuration, when an abnormality occurs and a countermeasure is taken and the abnormality related information is confirmed, the correspondence is updated based on the confirmed abnormality related information. As a result, a detailed and highly accurate correspondence is established, so that more appropriate abnormality related information can be extracted for a certain abnormality.

  In addition, when the determined abnormality related information does not exist in the previous correspondence relationship, a new correspondence relationship is added to the previous correspondence relationship. Therefore, even if the correspondence relationship is not stored in advance in the storage unit, the correspondence relationship updating unit repeatedly updates the correspondence relationship, so that a detailed and highly accurate correspondence relationship can be established.

  In the process management apparatus according to the present invention, in the configuration described above, the storage unit stores an abnormality / cause correspondence that is a correspondence between the abnormality of the process and the cause of the abnormality as the correspondence. , The cause / action correspondence that is the correspondence between the cause of the abnormality and the countermeasure against the abnormality is stored, and when the countermeasure is determined, the cause / response is determined based on the determined countermeasure. It further comprises correspondence update means for updating the relationship.

  According to the above configuration, when an abnormality occurs and a countermeasure is performed and a countermeasure is determined, the cause / response correspondence is updated based on the determined countermeasure. As a result, a detailed and highly accurate cause / response relationship is established, so that a more appropriate response method can be extracted for the cause of a certain abnormality.

  In addition, when the determined countermeasure method does not exist in the previous cause / response correspondence, a new cause / response correspondence is added to the previous cause / response correspondence. Therefore, even if the cause / response correspondence is not previously stored in the storage means, the cause / response correspondence update means repeats the update of the cause / response correspondence so that detailed and highly accurate cause / response correspondence is obtained. Can be built.

  The process management method of the process management apparatus according to the present invention is a process management method of a process management apparatus that manages a large number of processes, and the process management apparatus includes the abnormality in the process and abnormality related information related to the abnormality. Storage means for storing the correspondence relationship between the detection step and the detection step for detecting an abnormality in the process, and using the correspondence relationship stored in the storage means, 1 corresponding to the abnormality detected in the detection step. Alternatively, an extraction step for extracting a plurality of abnormality-related information, and a list including the abnormality-related information extracted in the extraction step are used as the degree of fitness of the abnormality-related information and / or the degree of influence of the abnormality on the process. And a list creation step of creating based on the list.

  According to the above method, when a process abnormality is detected, one or a plurality of abnormality-related information corresponding to the detected abnormality is extracted using the correspondence relationship, and the list including the extracted abnormality-related information is obtained as the fitness level and / or Or create based on the impact. Thereby, even when there are a plurality of abnormality-related information for a certain abnormality, a list is created based on the degree of conformity and the degree of influence, so the user can refer to the created list appropriately, And / or abnormality-related information having a large influence can be selected.

  Each unit in the process management apparatus can be executed on a computer by a process management program. Furthermore, by storing the process management program in a computer-readable recording medium, the process management program can be executed on an arbitrary computer.

  As described above, the process management apparatus according to the present invention creates a list including one or more abnormality causes and countermeasures corresponding to the detected abnormality based on the fitness and / or the influence. There is an effect that the user can select an appropriate cause and / or an abnormal cause having a great influence and a coping method.

  In addition, since the correspondence relationship is updated based on the determined abnormality cause and the coping method when the abnormality cause and the coping method are determined, the process management apparatus according to the present invention can deal with detailed and high accuracy by repeating the update. Since the relationship is established, there is an effect that it is possible to provide the user with a more appropriate cause of abnormality and a countermeasure for a certain abnormality.

  Hereinafter, an embodiment of the present invention will be described with reference to FIGS. FIG. 2 shows a schematic configuration of a process management system according to an embodiment of the present invention. As illustrated, the process management system 1 includes a plurality of equipment operation sensors 2, a plurality of product quality sensors 3, a process management apparatus 4, and a terminal 5. Although not shown in the figure, each device includes various I / Fs (interfaces) for transmitting / receiving signals to / from other devices.

  The facility operation sensor 2 is provided in each of a plurality of facilities provided in a plurality of processes, and measures the operation state of the facility in real time during operation of the facility. The equipment operation sensor 2 converts the measured analog signal into digital data, and transmits the converted digital data to the process management apparatus 4 as equipment operation data. The equipment operation sensor 2 transmits equipment operation data every predetermined period, every product, or every product lot.

  The product quality sensor 3 is provided in each of a plurality of processes, and measures the quality state of the product in real time during the execution of the processes. The product quality sensor 3 converts the measured analog signal into digital data, and transmits the converted digital data to the process management apparatus 4 as product quality data. The product quality sensor 3 transmits product quality data every predetermined period, every product, or every product lot.

  The process management device 4 manages a plurality of processes. In the present embodiment, the process management apparatus 4 includes an abnormality / cause correspondence table (abnormality / cause correspondence) 18 indicating a causal relationship (correspondence) between a process abnormality and an abnormality cause, and a correspondence between the abnormality cause and a countermeasure. A storage unit (storage unit) 11 that stores a cause / response correspondence table (cause / response correspondence) 19 indicating the relationship is provided.

  When the process management device 4 detects an abnormality in the process, the process management apparatus 4 extracts one or a plurality of abnormality causes corresponding to the detected abnormality based on the abnormality / cause correspondence table 18 and stores them in the cause / response correspondence table 19. Based on the extracted abnormal causes, one or a plurality of coping methods corresponding to each of the extracted abnormal causes are extracted. In addition, the process management device 4 displays a cause / action list including the extracted abnormality causes and countermeasures on the basis of the suitability of the abnormality causes and / or the influence of the abnormality on the processes. Anomaly causes and countermeasures are created side by side, and the created cause / action list is transmitted to the terminal 5.

  In addition, when the process management apparatus 4 receives the information on the cause of the abnormality and the coping method determined by the user from the terminal 5, the process management apparatus 4 updates the abnormality / cause handling table 18 and the cause / action handling table 19 based on the determined cause of the abnormality. To do.

  The terminal 5 inputs / outputs information to / from the process management device 4. In the present embodiment, the terminal 5 displays and outputs the cause / handling list received from the process management device 4, accepts input of information on the cause of abnormality and the coping method determined by the user, and sends the information to the process management device 4. It is.

  In the process management system 1 having the above-described configuration, when the process management apparatus 4 detects a process abnormality, the process management apparatus 4 extracts one or a plurality of abnormality causes corresponding to the detected abnormality from the abnormality / cause correspondence table 18, and sets the extracted abnormality cause. One or more corresponding coping methods are extracted from the cause / coping correspondence table 19, and a cause / cooking list including the extracted abnormality cause and coping method is extracted based on the degree of conformity and / or the degree of influence. The causes and countermeasures are prepared in order from the highest one, and the created cause and countermeasure list is displayed on the display unit 20 of the terminal 5.

  As a result, even when there are a plurality of abnormality causes for a certain abnormality, the cause / action list is created based on the degree of conformity and the degree of influence, so the user can refer to the created cause / action list. Thus, the user can select an appropriate and / or greatly affected cause of the abnormality. In addition, even when there are a plurality of countermeasures for a certain cause of an abnormality, a cause / action list is created based on the degree of conformity. The user can select a coping method.

  Hereinafter, the process management device 4 and the terminal 5 will be described in detail. As shown in FIG. 2, the process management device 4 is configured to include a control unit 10 and a storage unit 11, and the terminal 5 is configured to include a display unit 20 and an input unit 21.

  The control unit 10 comprehensively controls the operations of various components in the process management apparatus 4. The control unit 10 is configured by a PC (Personal Computer) -based computer, for example. And operation control of various composition is performed by making a computer run a control program. This program may be in the form of reading and using what is recorded on a removable medium such as a CD-ROM, or may be in the form of reading and using what is installed on a hard disk or the like. Further, a mode in which the program is downloaded via an external I / F (not shown), installed on a hard disk, and the like is also conceivable. Details of each block in the control unit 10 will be described later.

  The storage unit 11 is configured by a nonvolatile storage device such as the hard disk described above. The contents stored in the storage unit 11 include the above-described control program, OS (operating system) program, various other programs, and various data.

  The display unit 20 is configured by a display device such as a CRT (cathode ray tube) or LCD (liquid crystal display element). The display unit 20 displays and outputs various types of information such as characters and images based on the display data received from the process management device 4.

  The input unit 21 receives various inputs from the user, and includes an input button, a keyboard, a pointing device such as a mouse, and other input devices. The input unit 21 converts information input from the user into input data and transmits the input data to the process management device 4.

  Next, each block of the control unit 10 and data in the storage unit 11 will be described in detail. The control unit 10 includes a process state collection unit (collection unit) 12, a process abnormality monitoring unit (detection unit) 13, an abnormality cause extraction unit (extraction unit) 14, and a cause / handling list creation unit (list creation unit, countermeasure method extraction unit). , Coping method list creating means) 15 and cause / coping correcting unit (corresponding relation updating means, causal / coping correspondence updating means) 16. The various data stored in the storage unit 11 includes a process state DB 17, an abnormality / cause correspondence table 18, and a cause / response correspondence table 19.

  The process state collection unit 12 collects state information of all processes. Specifically, the process state collection unit 12 collects facility operation data from all facility operation sensors 2 and product quality data from all product quality sensors 3. Is to collect. The process state collection unit 12 stores the collected facility operation data and product quality data in the process state DB 17 of the storage unit 11 as time series data together with the reception time.

  The process abnormality monitoring unit 13 refers to time series data stored in the process state DB 17 of the storage unit 11 and monitors process abnormality. The process abnormality monitoring unit 13 determines whether or not the process is abnormal according to the control chart method. The determination as to whether or not this abnormality is present may be in accordance with a determination rule defined in JIS (Japanese Industrial Standard), or may be defined independently by the user. In addition, the time-series data may be used as it is without being limited to the control chart using the average and variation of the time-series data.

  When the process abnormality monitoring unit 13 detects a process abnormality, the process abnormality monitoring unit 13 warns an on-site worker using an alarm device (not shown). At the same time, the process abnormality monitoring unit 13 relates to time series data relating to each of the equipment operation sensor 2 and the product quality sensor 3 from a predetermined time or number of data before the occurrence of the abnormality, and for a predetermined time or data from the occurrence of the abnormality. The time-series data up to the number after is extracted and transmitted to the abnormality cause extraction unit 14.

  FIG. 4 shows an example of a management chart. The control chart is devised to manage the process by distinguishing a change due to chance and a change due to an abnormality in the process. As shown in the figure, the control chart is such that the horizontal axis is the time axis and the vertical axis is the data axis, one center line CL parallel to the horizontal axis, and the upper side reasonably set above and below the center line CL. A control limit line UCL and a lower control limit line LCL are drawn. When time series data is plotted on this control chart, if all points exist between the upper control limit line UCL and the lower control limit line LCL, and there is no flaw in the way the points are arranged, the process is normal. Can be determined.

  On the other hand, if a point protrudes between the upper control limit line UCL and the lower control limit line LCL, or if there is a flaw in the way the points are arranged, it can be determined that an abnormality has occurred in the process. In this case, as described above, time-series data existing in the extraction section from a predetermined time or number of data before the occurrence of the abnormality to a predetermined time or the number of data after the occurrence of the abnormality is extracted. Since the occurrence of an abnormality is often caused by a state before the occurrence, as shown in FIG. 4, it is desirable that the extraction section is longer before the occurrence of the abnormality than after the occurrence of the abnormality.

  FIG. 3 shows details of the abnormality cause extraction unit 14 and the cause / action list creation unit 15. The abnormality cause extraction unit 14 includes a feature amount extraction unit 22 and a similarity calculation unit 23, and the cause / action list creation unit 15 includes a priority order assignment unit 24 and a list creation unit 25.

  When the process abnormality monitoring unit 13 receives the time series data extracted by detecting the process abnormality, the feature quantity extraction unit 22 calculates the current waveform feature quantity from the received time series data, and the abnormality / cause correspondence table. The past waveform feature values are extracted from all the abnormal causes from 18. The feature amount extraction unit 22 transmits the calculated current waveform feature amount and the extracted past waveform feature amount to the similarity calculation unit 23.

  FIG. 5A shows an example of the abnormality / cause correspondence table 18 in a table format. As shown in the figure, the abnormality / cause correspondence table 18 includes a plurality of abnormality causes, waveform feature amounts corresponding to each abnormality cause, the number of occurrences, and a loss amount. If there is no need to display the cause of the abnormality because there are few types of causes of the abnormality, the abnormality / cause correspondence table 18 may be directly related to a countermeasure method instead of the cause of the abnormality.

  By the way, in the extraction section shown in FIG. For this reason, it is not desirable to use the waveform itself or the average waveform of the time series data extracted by the process abnormality monitoring unit 13 as the waveform feature amount. Therefore, the waveform feature quantity is desirably a position invariant such as a simple statistical quantity such as average or variance, or a frequency component such as FFT (Fast Fourier Transform) transform or autocorrelation coefficient.

  The similarity calculator 23 calculates the waveform similarity by comparing the current waveform feature received from the feature extractor 22 with the past waveform feature. The similarity calculation unit 23 transmits the calculated waveform similarity to the priority level assigning unit 24.

  It is desirable that the waveform similarity is standardized so as to take a value of 0 to 1 in consideration of giving priority by the priority assigning unit 24. In this embodiment, the absolute value of the correlation function that can be easily calculated is used as the waveform similarity. The correlation function is obtained by calculating a unit vector from vectors having a plurality of waveform feature quantities as components, and calculating the inner product of the unit vector relating to the current waveform feature quantity and the unit vector relating to the past waveform feature quantity. The inner product of the unit vectors takes a value of −1 to +1, but if only the directionality of the vector is considered and the direction is ignored, it is equivalent to taking the absolute value of the inner product.

When the absolute value of the correlation function is the waveform similarity, the waveform similarity Xsi can be obtained from the following equation.
Xsi = | {k is the sum of up to p 1 (Xaik × Xck)} / { sum of XCK ² (k from 1 Xaik sum of ² to ^p) from ^1/2 × (k is 1 to p ) ^1/2 } |.
Here, Xaik is a past average waveform feature amount, and is represented by Xaik = Xik / Yi. Xik is the total sum of past waveform feature values, and Yi is the number of occurrences. Xck is the current waveform feature amount. Further, i is the order of the cause of abnormality in the abnormality / cause correspondence table 18 shown in FIG. 5A, and takes values of 1, 2,. Further, k is the order of the waveform feature amount in each abnormality cause in the abnormality / cause correspondence table 18, and takes values of 1, 2,..., P.

  The priority level assigning unit 24 calculates the certainty factor using the waveform similarity degree received from the similarity calculating unit 23, the past occurrence frequency and the loss ratio, and prioritizes abnormal causes based on the calculated certainty factor. Is to do. The priority level assigning unit 24 transmits the prioritization of the cause of abnormality to the list creating unit 25.

The certainty factor Pi can be obtained from the following equation, and the order of abnormality causes is arranged in descending order of the obtained certainty factor Pi.
Pi = Xsi * Yri * Zri.
Here, Xsi is the waveform similarity as described above. Yri is the frequency of occurrence, and is expressed as Yri = Yi / (the maximum value of Yi among all abnormal causes) using the number of occurrences Yi. Zri is a loss ratio, and is expressed as Zri = Zi / (maximum value of Zi among all abnormal causes) using the loss amount Zi. Further, i is the order of the cause of abnormality in the abnormality / cause correspondence table 18 as described above, and takes values of 1, 2,..., M.

  The occurrence frequency Yri and the loss ratio Zri are the ratios of the occurrence frequency Yi and the loss amount Zi to the maximum value, but considering the calculation of the certainty factor Pi, the occurrence frequency Yri and the loss ratio Zri are similar in waveform. This is because it is desirable to be normalized to 0 to 1 in the case of the degree Xsi.

  The list creation unit 25 creates a cause / response list based on the priority received from the priority level assigning unit 24 and the cause / response table 19. The list creation unit 25 transmits the created cause / response list to the terminal 5, whereby the cause / response list is displayed on the display unit 20 of the terminal 5. The procedure for creating the cause / action list will be described below.

  FIG. 5B shows an example of the cause / countermeasure correspondence table 19 in a table format. As shown in the figure, the cause / countermeasure correspondence table 19 includes a plurality of abnormality causes, a plurality of countermeasure methods corresponding to each abnormality cause, and the number of occurrences.

First, the list creation unit 25 reads a plurality of coping methods and the number of occurrences from the cause / coping correspondence table 19 with respect to the upper abnormal cause in the priority order received from the priority order assigning unit 24. Next, the occurrence frequency Crij is obtained from the following expression from the read occurrence number Cij.
Crij = Cij / (maximum value of Cij among certain abnormality causes Ai).
Here, i is the order of the cause of abnormality in the cause / countermeasure correspondence table 19, and takes values of i = 1, 2,..., M. Further, j is the order of countermeasure methods for a certain cause of abnormality in the cause / countermeasure correspondence table 19, and takes values j = 1, 2,..., N.

  Next, a coping method is selected in descending order of occurrence frequency Crij, and a cause / coping list is created. FIG. 6 shows an example of the cause / action list in a table format. In the case shown in the figure, the cause / action list is arranged with the cause of abnormality and the certainty degree from the highest priority, and the countermeasure method and the number of occurrences are arranged for each abnormality cause from the highest occurrence frequency Crij. .

  The display unit 20 of the terminal 5 may display the entire cause / response list on the screen, may display only frequently occurring items, or may be divided by the number of abnormal causes. , It may be separated by a certainty value.

  Referring again to FIG. 2, the cause / response correcting unit 16 actually performs a response operation for the process abnormality, and after determining an appropriate error cause and a response method, the error / cause correspondence table 18 and the cause / response The correspondence table 19 is corrected.

  Specifically, the cause / response correcting unit 16 first transmits all or necessary parts of the abnormality / cause correspondence table 18 and the cause / response correspondence table 19 to the terminal 5, and the display unit 20 of the terminal 5 indicate. Next, when an appropriate abnormality cause or countermeasure is not present in the abnormality / cause correspondence table 18 and the cause / response correspondence table 19, the abnormality / cause correspondence table 18 and the cause are indicated by an instruction from the input unit 21 of the user. Add a new abnormality cause item or countermeasure item to the countermeasure handling table 19.

  Then, according to an instruction from the input unit 21 by the user, the waveform feature amount, occurrence frequency, and loss amount of the appropriate abnormality cause and countermeasure method items in the abnormality / cause correspondence table 18 and the cause / response correspondence table 19 are respectively set to the previous values. Add to things and update.

  Next, the processing operation in the process management apparatus 4 having the above-described configuration will be described with reference to FIGS. FIG. 1 shows a flow of processing for monitoring a process and displaying the cause of an abnormality and a countermeasure on the display unit 20 of the terminal 5 when an abnormality occurs. FIG. 7 shows a flow of processing for updating the abnormality / cause correspondence table 18 and the cause / response correspondence table 19 after the actual countermeasure work is completed.

  As shown in FIG. 1, first, until a process abnormality occurs, the process state collection unit 12 uses the collected equipment operation data and product quality data as time series data together with the reception time of the process state of the storage unit 11. It is stored in the DB 17 (Step S10 (hereinafter simply referred to as “S10”. The same applies to other steps), NO in S11).

  When a process abnormality occurs (YES in S11), the process abnormality monitoring unit 13 extracts the time series data of the extraction section (FIG. 4) from the process state DB 17, and the feature amount extraction unit 22 extracts the time series data from the extracted time series data. The current waveform feature amount is calculated, and the past waveform feature amount is extracted for all abnormality causes from the abnormality / cause correspondence table 18 (S12).

  Next, the similarity calculation unit 23 compares the current waveform feature amount with the past waveform feature amount to calculate the waveform similarity (S13). Next, the priority level assigning unit 24 calculates the certainty factor using the waveform similarity calculated by the similarity calculating unit 23, the past occurrence frequency and the loss ratio, and based on the calculated certainty factor, Prioritization is performed (S14). Then, the list creation unit 25 creates a cause / countermeasure list including the cause of the abnormality and the coping method based on the priority order and the cause / countermeasure handling table 19, and outputs it to the terminal 5 (S15). Then, it returns to step S10 and repeats the above operation | movement.

  When the actual coping operation is completed, as shown in FIG. 7, first, the cause / response correcting unit 16 displays all or necessary parts of the abnormality / cause correspondence table 18 and the cause / response correspondence table 19 on the terminal 5. The information is displayed on the unit 20 to allow the user to determine whether or not an appropriate abnormality cause exists (S20). When the user determines that there is no appropriate cause of abnormality according to an instruction from the input unit 21, a new abnormality cause item is added to the abnormality / cause correspondence table 18 and the cause / action correspondence table 19. (S21), a new countermeasure method item is added to the cause / countermeasure correspondence table 19 (S22).

  On the other hand, when the user determines that there is an appropriate cause of abnormality, the user is determined whether or not an appropriate countermeasure is present (S23). The item of the new coping method is added to the item of the cause of abnormality to be performed (S22).

  Next, in response to an instruction from the user input unit 21, the cause / response correcting unit 16 generates a waveform feature amount and occurrence of an appropriate abnormality cause and countermeasure method item in the abnormality / cause correspondence table 18 and the cause / response correspondence table 19. The number of times and the amount of loss are each updated by adding to the previous one (S24). Thereafter, the process ends.

  The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope shown in the claims. That is, embodiments obtained by combining technical means appropriately modified within the scope of the claims are also included in the technical scope of the present invention.

  For example, in the above-described embodiment, the abnormality / cause correspondence table 18 associates the process abnormality with the abnormality cause, and the cause / response correspondence table 19 associates the abnormality cause with the countermeasure. Methods can also be associated. In this case, when an abnormality occurs, a countermeasure can be directly derived without going through the cause of the abnormality. As described above, any abnormality-related information related to the abnormality such as the cause of the abnormality and the countermeasures can be used as the one associated with the process abnormality.

  In the above embodiment, the absolute value of the correlation function is used as the waveform similarity. However, if a set-theoretic distribution is considered, the Mahalanobis distance is calculated, and the height of the normal distribution with respect to that value is calculated. It may be considered as a distribution probability. In this case, it is necessary to store not only an average value of a plurality of waveform feature amounts but also information capable of calculating a variance-covariance matrix in the abnormality / cause correspondence table 18 of the storage unit 11.

  In the above embodiment, the list is rearranged and displayed in descending order of priority. However, by changing the character size, color, and background color of the higher priority, the higher priority is emphasized. May be displayed. Further, instead of displaying on the display unit 20, other output forms such as printing using a printer or a speaker or outputting sound can be used.

  Moreover, in the said embodiment, although the priority order is provided using the waveform similarity, the occurrence frequency, and the loss ratio, the priority order may be provided using at least one of these.

  In addition to the waveform similarity and the occurrence frequency, an abnormality probability may be used as the degree of conformity of the cause of the abnormality. The abnormality probability can be used by calculating the probability that a process abnormality has occurred from a control chart. For example, the abnormality probability can be higher as the amount of protrusion exceeds the upper limit control limit.

  Further, as the degree of influence of the abnormality on the process, in addition to the loss ratio, an average countermeasure time, the latest failure rate, the latest failure increase rate, or the like may be used. Here, the average countermeasure time refers to the average value of the time required to implement the countermeasure for the process abnormality, and the latest defect rate refers to the defect rate immediately before the process abnormality occurs, and the latest defect increase rate. Means the rate of increase of the most recent defect rate.

Moreover, in the said embodiment, although the control chart method is utilized as a method of detecting the abnormality of a process, the arbitrary methods which can detect the abnormality of a process and can acquire the data at the time of abnormality can be utilized. For example, an online monitoring function is a function that has been applied to process systems. The online monitor function calculates a predetermined feature amount from time-series data of the process, and when the calculated feature amount deviates from the management range set in advance based on the specific manufacturing technology for the product, There are many warnings. Such an online monitoring function can automatically detect process abnormalities and can acquire time-series data at the time of abnormalities, and thus can be applied to the above-described embodiment as a method for detecting process abnormalities.

  Each block of the control unit 10 in the process management apparatus 4 may be configured by hardware logic, or may be realized by software using a CPU as follows.

  That is, the control unit 10 is a storage device (recording device) such as a CPU that executes instructions of a control program that realizes each function, a ROM that stores the program, a RAM that expands the program, a memory that stores the program and various data, and the like. Medium). An object of the present invention is a recording medium on which a program code (execution format program, intermediate code program, source program) of a control program of the control unit 10 which is software that realizes the above-described functions is recorded so as to be readable by a computer. This can also be achieved by supplying the control unit 10 and reading and executing the program code recorded on the recording medium by the computer (or CPU or MPU).

  Examples of the recording medium include a tape system such as a magnetic tape and a cassette tape, a disk system including a magnetic disk such as a flexible disk / hard disk and an optical disk such as a CD-ROM / MO / MD / DVD / CD-R, and an IC card. A card system such as an optical card (including a memory card) or a semiconductor memory system such as a mask ROM / EPROM / EEPROM / flash ROM can be used.

  The control unit 10 may be configured to be connectable to a communication network, and the program code may be supplied via the communication network. The communication network is not particularly limited. For example, the Internet, intranet, extranet, LAN, ISDN, VAN, CATV communication network, virtual private network, telephone line network, mobile communication network, satellite communication. A net or the like is available. Further, the transmission medium constituting the communication network is not particularly limited. For example, even in the case of wired such as IEEE 1394, USB, power line carrier, cable TV line, telephone line, ADSL line, etc., infrared rays such as IrDA and remote control, Bluetooth ( (Registered trademark), 802.11 wireless, HDR, mobile phone network, satellite line, terrestrial digital network, and the like can also be used. The present invention can also be realized in the form of a carrier wave or a data signal sequence in which the program code is embodied by electronic transmission.

  In addition to the manufacturing process, the process management apparatus according to the present invention manages various processing processes performed in electronically controlled apparatuses and systems such as home appliances and automobiles in addition to the manufacturing process. It can also be applied to.

5 is a flowchart showing a flow of processing for monitoring a process and outputting an abnormality cause and a coping method when an abnormality occurs in the process management apparatus of the process management system according to the embodiment of the present invention. It is a block diagram which shows schematic structure of the said process management system. It is a block diagram which shows the detail of the abnormality cause extraction part and cause coping list preparation part of the said process management apparatus. It is a graph which shows an example of the control chart utilized in order that the process abnormality monitoring part of the said process management apparatus may monitor process abnormality. FIG. 6A is a diagram showing an example of an abnormality / cause correspondence table stored in the storage unit of the process management apparatus in a table format. FIG. It is a figure which shows an example of a countermeasure correspondence table in a table format. It is a figure which shows an example of the cause and countermeasure list which the cause and countermeasure list preparation part of the said process management apparatus produces in a table format. FIG. 5 is a flowchart showing a flow of processing for updating the abnormality / cause correspondence table and the cause / response correspondence table after the actual countermeasure work is completed in the process management apparatus. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Process management system 4 Process management apparatus 11 Memory | storage part (memory | storage means)
12 Process status collection unit (collection means)
13 Process abnormality monitoring part (detection means)
14 Abnormal cause extraction unit (extraction means)
15 Cause / Correction List Creation Unit (List creation means, countermeasure method extraction means, countermeasure method list creation means)
16 Cause / Correction Correction Unit (Correspondence Update Unit, Cause / Countermeasure Update Unit)
18 Abnormality / cause correspondence table (correspondence, abnormality / cause correspondence)
19 Cause / Countermeasure Response Table (Cause / Countermeasure Response Relationship)

The present invention relates to a process management apparatus that manages a plurality of processes, a process management method, a process management program, and a recording medium on which the program is recorded.

  Conventionally, a number of methods have been implemented and proposed as process management methods for detecting abnormalities in various manufacturing processes and identifying causes and countermeasures.

  As a generally practiced method, there are the following process control methods. In other words, facility operation data and product quality data in the manufacturing process are collected in time series, and the collected time series data is represented in a control chart to automatically detect process abnormalities in real time during equipment operation. To do. When an abnormality is detected, the cause of the abnormality and a countermeasure are derived by examining the symptoms of the abnormality according to FMEA (Failure Mode and Effects Analysis) prepared in advance by human hands. To do.

  Further, in the semiconductor device manufacturing management system described in Patent Document 1, the following process management method has been proposed. First, the manufacturing conditions in the manufacturing process of the semiconductor device and the conditions executed in the actual processing are collected and accumulated for each process, and the measurement results for each measurement item including the measurement values in the inspection process are collected and accumulated. A measurement value for each measurement item measured in the inspection process is determined according to a standard and a determination method registered in advance. When a defect occurs as a result of the determination, the analysis is automatically executed based on the analysis data and the analysis procedure registered in advance, and the cause equipment, the cause process, and the cause lot are specified.

  If the equipment is the cause, it is determined whether or not it is possible to cope with the condition modification of the cause equipment, and if possible, the condition of the subsequent lot working on the cause equipment is corrected, while if not possible, Stop working at the cause equipment. On the other hand, if the lot is the cause, it is determined whether it can be dealt with by correcting the conditions in the post-process of the cause lot. If possible, the conditions of the post-process are corrected. Stop work on the lot after the lot.

  Further, in the quality analysis method described in Patent Document 2, the following method has been proposed. First, equipment operation or product quality data is recorded, and defect feature extraction data corresponding to product defects is extracted and processed from the data. Then, the correspondence table DB (database) expressing the relationship between known typical defect feature extraction data and the corresponding failure factor or the maintenance information of the equipment for the defect is compared with the extracted defect feature extraction data. Then, the cause of failure or the maintenance information of the equipment is output.

In addition, in the equipment maintenance method described in Patent Document 3, the following method has been proposed. First, in a facility for manufacturing a product, various quality / operation information obtained by inspecting the quality of the product is managed as a quality / operation DB. Next, the product quality defect caused by each component unit of the equipment and the maintenance information of the equipment are associated with each other and stored as a knowledge DB. Next, using the information in the quality / operation DB, the cause of product failure and operation deterioration is automatically analyzed. Then, using this analysis result and the knowledge DB, the facility maintenance portion is narrowed down.
Japanese Patent Laid-Open No. 6-333791 (released on December 2, 1994) JP-A-8-32281 (published February 2, 1996) JP-A-9-289396 (published November 4, 1997)

  However, the above-described process management method has the following problems.

  First of all, in the generally practiced method, even process abnormalities can be automatically detected, but when examining abnormal symptoms from the detected abnormalities, it is necessary for a person to visually check all abnormal symptoms according to FMEA. is there. For this reason, it took a long time to derive the cause of the abnormality and the countermeasure. Moreover, since FMEA is listed by the workers involved in the manufacturing process discussing the causal relationship of abnormality, there is a problem that quantification is difficult depending on the subjectivity of the workers.

  In the method described in Patent Document 1, the cause equipment, the cause process, and the cause lot when a defect occurs is identified by automatically executing analysis based on analysis data and analysis procedures registered in advance. Yes. For this reason, it is necessary to analyze and determine the causal relationship of defects in advance, but this becomes more difficult as the process becomes more complicated.

  Further, the method described in Patent Document 2 uses a correspondence table DB that expresses the relationship between known typical defect feature extraction data and the corresponding failure factor or facility maintenance information for the failure. However, the more complicated the process is, the more various causes of defects become, making it difficult to create the correspondence table DB. In addition, there is a problem that it is impossible to deal with a case where a failure occurs due to an unknown failure cause.

  In the method described in Patent Document 3, the equipment maintenance portion is further narrowed down after automatically analyzing the cause of product failure and operation deterioration. However, since this narrowing down is performed in the form of dialogue with humans, it results in making the worker troublesome. In addition, the more complicated the process, the more various causes of product defects and reduced operation, resulting in a longer time for narrowing down.

  The present invention has been made in view of the above-described problems, and the object of the present invention is to provide a user with an appropriate cause of abnormality and / or an appropriate abnormality even when there are a plurality of causes and / or countermeasures for the abnormality. Another object of the present invention is to provide a process management apparatus or the like that can select a coping method.

In order to solve the above problems, a process management apparatus according to the present invention is a process management apparatus that manages a plurality of processes, a collection unit that collects time-series data relating to the process, and the time series when the process is abnormal. a waveform feature amount of data, by using a storage means for storing a correspondence relationship between the abnormality-related information related to the abnormality, a detection means for detecting an abnormality of the process, the relationship which the storage means is stored, the Extraction means for extracting a plurality of the abnormality related information corresponding to a plurality of waveform feature quantities close to the waveform feature quantities of the time series data collected by the collection means when the detection means detects an abnormality, and the extraction means extracted abnormality list including related information, the waveform feature amount of the time-series data which the collecting means collects when said detecting means detects the abnormality, respectively pairs to the plurality of abnormality-related information It is characterized in that it comprises a list creation means for creating, based on the similarity between the waveform feature amount.

Here, examples of the abnormality-related information include the cause of the abnormality and a countermeasure for the abnormality. Examples of time-series data related to the process include data related to operation of equipment in the process and data related to product quality.

In the above configuration, when a process abnormality is detected, a plurality of abnormality related information corresponding to the detected abnormality is extracted using the correspondence relationship, and a list including the extracted abnormality related information is created based on the similarity. ing. This similarity is included in the degree of matching indicating the degree of matching of the abnormality related information. As a result, even when a plurality of abnormality-related information exists for a certain abnormality, a list is created based on the similarity , and the user selects appropriate abnormality-related information by referring to the created list. can do. In addition, by creating a list using the similarity between the waveform feature amount at the time of abnormality detection and the waveform feature amount included in the correspondence relationship, abnormality-related information that matches a certain abnormal state can be quantitatively analyzed. And it can be obtained objectively.

  Further, the process management apparatus according to the present invention, in the above configuration, when the abnormality related information is confirmed, the correspondence update means for updating the correspondence stored in the storage means based on the confirmed abnormality related information. Is further provided.

  According to the above configuration, when an abnormality occurs and a countermeasure is taken and the abnormality related information is confirmed, the correspondence is updated based on the confirmed abnormality related information. As a result, a detailed and highly accurate correspondence is established, so that more appropriate abnormality related information can be extracted for a certain abnormality.

  In addition, when the determined abnormality related information does not exist in the previous correspondence relationship, a new correspondence relationship is added to the previous correspondence relationship. Therefore, even if the correspondence relationship is not stored in advance in the storage unit, the correspondence relationship updating unit repeatedly updates the correspondence relationship, so that a detailed and highly accurate correspondence relationship can be established.

  In the process management device according to the present invention, in the above configuration, the abnormality-related information is a cause of the abnormality, and the storage unit is an abnormality that is a correspondence relationship between the abnormality of the process and the cause of the abnormality. The cause correspondence relationship is stored as the correspondence relationship, and the cause / response correspondence relationship that is the correspondence relationship between the cause of the abnormality and a countermeasure for the abnormality is stored.

  According to the above configuration, since a coping method corresponding to the cause of the abnormality can be obtained using the cause / coping correspondence relationship, an appropriate coping method can be instructed to the user.

Further, the process management apparatus according to the present invention has a plurality of coping methods corresponding to each cause of the abnormality detected by the extracting unit using the cause / coping correspondence relationship stored by the storing unit in the above configuration. A coping method extracting means for extracting, and a coping method list creating means for creating a coping method list including a plurality of coping methods extracted by the coping method extracting means based on a matching degree indicating a degree of fitting of the coping method. Furthermore, it is characterized by providing.

  According to the above configuration, a plurality of coping methods corresponding to the cause of the extracted abnormality are extracted using the above cause / coping correspondence relationship, and the coping method list including the extracted coping methods is based on the suitability of the coping method Have created. Thus, even when there are a plurality of countermeasures for the cause of a certain abnormality, the countermeasure list is created based on the degree of conformity. Therefore, the user can refer to the prepared countermeasure list and A coping method can be selected.

  Further, the process management apparatus according to the present invention, in the above configuration, when the coping method is determined, based on the determined coping method, update the cause / coping correspondence stored in the storage unit It is characterized by further providing a means.

  According to the above configuration, when an abnormality occurs and a countermeasure is performed and a countermeasure is determined, the cause / response correspondence is updated based on the determined countermeasure. As a result, a detailed and highly accurate cause / response relationship is established, so that a more appropriate response method can be extracted for the cause of a certain abnormality.

  In addition, when the determined countermeasure method does not exist in the previous cause / response correspondence, a new cause / response correspondence is added to the previous cause / response correspondence. Therefore, even if the cause / countermeasure correspondence is not stored in the storage unit in advance, the correspondence update unit can construct a detailed and high-precision correspondence by repeatedly updating the cause / countermeasure correspondence. .

  Further, the process management apparatus according to the present invention is characterized in that, in the above configuration, the detection means detects abnormality in the process by processing the time series data collected by the collection means by a control projection method. Yes.

  According to the above configuration, since the process abnormality is detected by processing the time-series data by the control chart method, it is possible to eliminate an accidental abnormality and detect an abnormality having some cause.

Note that the list creation means can create the list based on the degree of conformity indicating the degree of conformity of the abnormality-related information and including the similarity. Here, the degree of conformity of the abnormality-related information includes, for example, an abnormality occurrence frequency and an abnormality probability in addition to the similarity of the waveform feature amount.

The list creation means can also create the list based on the similarity and the degree of influence indicating the degree of influence of the abnormality on the process. Here , examples of the degree of influence of an abnormality on a process include a loss ratio due to abnormality, an average countermeasure time, a recent failure rate, and a recent failure increase rate.

Further, examples of the waveform feature amount of the time series data include a statistic amount and a frequency component of the time series data.

The process management apparatus according to the present invention is a process management apparatus that manages a plurality of processes, a collection unit that collects time-series data related to the process, and a waveform feature amount of the time-series data when the process is abnormal, Storage means for storing the correspondence relationship with the abnormality-related information related to the abnormality, detection means for detecting the abnormality of the process, and time series collected by the collecting means when the detection means detects the abnormality of the process Feature amount extraction means for extracting the waveform feature amount of data, similarity calculation means for calculating the similarity between the waveform feature amount extracted by the feature amount extraction means and the waveform feature amount stored in the storage means; And a list creation means for creating a list including a plurality of the abnormality related information corresponding to the plurality of waveform feature quantities stored in the storage means based on the similarity calculated by the similarity calculation means. It is characterized by a door.

In the above configuration, when a process abnormality is detected, the waveform feature amount of the time series data collected by the collecting unit is extracted, and the similarity between the extracted waveform feature amount and the waveform feature amount stored by the storage unit is obtained. Based on the calculated similarity, a list including a plurality of abnormality related information corresponding to the plurality of waveform feature values stored in the storage unit is created. As a result, even when there are a plurality of abnormality-related information for a certain abnormality, a list is created based on the similarity between the waveform feature amount at the time of abnormality detection and the waveform feature amount included in the correspondence relationship. Therefore, it is possible to quantitatively and objectively obtain abnormality related information that matches a certain abnormal state. Accordingly, appropriate abnormality-related information can be selected by the user referring to the created list.

The process management method of the process management apparatus according to the present invention is a process management apparatus that manages a plurality of processes, and includes a collection unit that collects time-series data regarding the process, and the time-series data when the process is abnormal. a waveform feature amount of a process control method for process management and storage means for storing a correspondence relationship between the abnormality-related information related to the abnormality, the process management apparatus detects the abnormality of the process , using the corresponding relationship said memory means has stored, extracts a plurality of the abnormality-related information corresponding to a plurality of waveform feature amount is close to the waveform feature quantity of time-series data the collecting means collects the extracted abnormality-related a list containing information, to create on the basis of the similarity between the waveform feature amount of the time-series data which the collecting means collects, a waveform feature amounts corresponding respectively to the plurality of abnormality-related information It is characterized in that.

According to the above method, when a process abnormality is detected, a plurality of abnormality related information corresponding to the detected abnormality is extracted using the correspondence relation, and a list including the extracted abnormality related information is created based on the similarity. doing. As a result, even when a plurality of abnormality-related information exists for a certain abnormality, a list is created based on the similarity , and the user selects appropriate abnormality-related information by referring to the created list. can do. In addition, by creating a list using the similarity between the waveform feature amount at the time of abnormality detection and the waveform feature amount included in the correspondence relationship, abnormality-related information that matches a certain abnormal state can be quantitatively analyzed. And it can be obtained objectively.

  Each unit in the process management apparatus can be executed on a computer by a process management program. Furthermore, by storing the process management program in a computer-readable recording medium, the process management program can be executed on an arbitrary computer.

As described above, the process management apparatus according to the present invention includes a list including a plurality of causes of abnormality and countermeasures corresponding to the detected abnormality, a waveform feature amount at the time of abnormality detection, and a waveform feature amount included in the correspondence relationship. Because it is created based on the similarity between the two, it is possible to quantitatively and objectively find abnormality-related information that matches a certain abnormal state, and the user can select an appropriate cause and countermeasure method There is an effect.

  Hereinafter, an embodiment of the present invention will be described with reference to FIGS. FIG. 2 shows a schematic configuration of a process management system according to an embodiment of the present invention. As illustrated, the process management system 1 includes a plurality of equipment operation sensors 2, a plurality of product quality sensors 3, a process management apparatus 4, and a terminal 5. Although not shown in the figure, each device includes various I / Fs (interfaces) for transmitting / receiving signals to / from other devices.

  The facility operation sensor 2 is provided in each of a plurality of facilities provided in a plurality of processes, and measures the operation state of the facility in real time during operation of the facility. The equipment operation sensor 2 converts the measured analog signal into digital data, and transmits the converted digital data to the process management apparatus 4 as equipment operation data. The equipment operation sensor 2 transmits equipment operation data every predetermined period, every product, or every product lot.

  The product quality sensor 3 is provided in each of a plurality of processes, and measures the quality state of the product in real time during the execution of the processes. The product quality sensor 3 converts the measured analog signal into digital data, and transmits the converted digital data to the process management apparatus 4 as product quality data. The product quality sensor 3 transmits product quality data every predetermined period, every product, or every product lot.

  The process management device 4 manages a plurality of processes. In the present embodiment, the process management apparatus 4 includes an abnormality / cause correspondence table (abnormality / cause correspondence) 18 indicating a causal relationship (correspondence) between a process abnormality and an abnormality cause, and a correspondence between the abnormality cause and a countermeasure. A storage unit (storage unit) 11 that stores a cause / response correspondence table (cause / response correspondence) 19 indicating the relationship is provided.

  When the process management device 4 detects an abnormality in the process, the process management apparatus 4 extracts one or a plurality of abnormality causes corresponding to the detected abnormality based on the abnormality / cause correspondence table 18 and stores them in the cause / response correspondence table 19. Based on the extracted abnormal causes, one or a plurality of coping methods corresponding to each of the extracted abnormal causes are extracted. In addition, the process management device 4 displays a cause / action list including the extracted abnormality causes and countermeasures on the basis of the suitability of the abnormality causes and / or the influence of the abnormality on the processes. Anomaly causes and countermeasures are created side by side, and the created cause / action list is transmitted to the terminal 5.

  In addition, when the process management apparatus 4 receives the information on the cause of the abnormality and the coping method determined by the user from the terminal 5, the process management apparatus 4 updates the abnormality / cause handling table 18 and the cause / action handling table 19 based on the determined cause of the abnormality. To do.

  The terminal 5 inputs / outputs information to / from the process management device 4. In the present embodiment, the terminal 5 displays and outputs the cause / handling list received from the process management device 4, accepts input of information on the cause of abnormality and the coping method determined by the user, and sends the information to the process management device 4. It is.

  In the process management system 1 having the above-described configuration, when the process management apparatus 4 detects a process abnormality, the process management apparatus 4 extracts one or a plurality of abnormality causes corresponding to the detected abnormality from the abnormality / cause correspondence table 18, and sets the extracted abnormality cause. One or more corresponding coping methods are extracted from the cause / coping correspondence table 19, and a cause / cooking list including the extracted abnormality cause and coping method is extracted based on the degree of conformity and / or the degree of influence. The causes and countermeasures are prepared in order from the highest one, and the created cause and countermeasure list is displayed on the display unit 20 of the terminal 5.

  As a result, even when there are a plurality of abnormality causes for a certain abnormality, the cause / action list is created based on the degree of conformity and the degree of influence, so the user can refer to the created cause / action list. Thus, the user can select an appropriate and / or greatly affected cause of the abnormality. In addition, even when there are a plurality of countermeasures for a certain cause of an abnormality, a cause / action list is created based on the degree of conformity. The user can select a coping method.

  Hereinafter, the process management device 4 and the terminal 5 will be described in detail. As shown in FIG. 2, the process management device 4 is configured to include a control unit 10 and a storage unit 11, and the terminal 5 is configured to include a display unit 20 and an input unit 21.

  The control unit 10 comprehensively controls the operations of various components in the process management apparatus 4. The control unit 10 is configured by a PC (Personal Computer) -based computer, for example. And operation control of various composition is performed by making a computer run a control program. This program may be in the form of reading and using what is recorded on a removable medium such as a CD-ROM, or may be in the form of reading and using what is installed on a hard disk or the like. Further, a mode in which the program is downloaded via an external I / F (not shown), installed on a hard disk, and the like is also conceivable. Details of each block in the control unit 10 will be described later.

  The storage unit 11 is configured by a nonvolatile storage device such as the hard disk described above. The contents stored in the storage unit 11 include the above-described control program, OS (operating system) program, various other programs, and various data.

  The display unit 20 is configured by a display device such as a CRT (cathode ray tube) or LCD (liquid crystal display element). The display unit 20 displays and outputs various types of information such as characters and images based on the display data received from the process management device 4.

  The input unit 21 receives various inputs from the user, and includes an input button, a keyboard, a pointing device such as a mouse, and other input devices. The input unit 21 converts information input from the user into input data and transmits the input data to the process management device 4.

  Next, each block of the control unit 10 and data in the storage unit 11 will be described in detail. The control unit 10 includes a process state collection unit (collection unit) 12, a process abnormality monitoring unit (detection unit) 13, an abnormality cause extraction unit (extraction unit) 14, and a cause / handling list creation unit (list creation unit, countermeasure method extraction unit). , Coping method list creating means) 15 and cause / coping correcting unit (corresponding relation updating means, causal / coping correspondence updating means) 16. The various data stored in the storage unit 11 includes a process state DB 17, an abnormality / cause correspondence table 18, and a cause / response correspondence table 19.

  The process state collection unit 12 collects state information of all processes. Specifically, the process state collection unit 12 collects facility operation data from all facility operation sensors 2 and product quality data from all product quality sensors 3. Is to collect. The process state collection unit 12 stores the collected facility operation data and product quality data in the process state DB 17 of the storage unit 11 as time series data together with the reception time.

  The process abnormality monitoring unit 13 refers to time series data stored in the process state DB 17 of the storage unit 11 and monitors process abnormality. The process abnormality monitoring unit 13 determines whether or not the process is abnormal according to the control chart method. The determination as to whether or not this abnormality is present may be in accordance with a determination rule defined in JIS (Japanese Industrial Standard), or may be defined independently by the user. In addition, the time-series data may be used as it is without being limited to the control chart using the average and variation of the time-series data.

  When the process abnormality monitoring unit 13 detects a process abnormality, the process abnormality monitoring unit 13 warns an on-site worker using an alarm device (not shown). At the same time, the process abnormality monitoring unit 13 relates to time series data relating to each of the equipment operation sensor 2 and the product quality sensor 3 from a predetermined time or number of data before the occurrence of the abnormality, and for a predetermined time or data from the occurrence of the abnormality. The time-series data up to the number after is extracted and transmitted to the abnormality cause extraction unit 14.

  FIG. 4 shows an example of a management chart. The control chart is devised to manage the process by distinguishing a change due to chance and a change due to an abnormality in the process. As shown in the figure, the control chart is such that the horizontal axis is the time axis and the vertical axis is the data axis, one center line CL parallel to the horizontal axis, and the upper side reasonably set above and below the center line CL. A control limit line UCL and a lower control limit line LCL are drawn. When time series data is plotted on this control chart, if all points exist between the upper control limit line UCL and the lower control limit line LCL, and there is no flaw in the way the points are arranged, the process is normal. Can be determined.

  On the other hand, if a point protrudes between the upper control limit line UCL and the lower control limit line LCL, or if there is a flaw in the way the points are arranged, it can be determined that an abnormality has occurred in the process. In this case, as described above, time-series data existing in the extraction section from a predetermined time or number of data before the occurrence of the abnormality to a predetermined time or the number of data after the occurrence of the abnormality is extracted. Since the occurrence of an abnormality is often caused by a state before the occurrence, as shown in FIG. 4, it is desirable that the extraction section is longer before the occurrence of the abnormality than after the occurrence of the abnormality.

  FIG. 3 shows details of the abnormality cause extraction unit 14 and the cause / action list creation unit 15. The abnormality cause extraction unit 14 includes a feature amount extraction unit 22 and a similarity calculation unit 23, and the cause / action list creation unit 15 includes a priority order assignment unit 24 and a list creation unit 25.

  When the process abnormality monitoring unit 13 receives the time series data extracted by detecting the process abnormality, the feature quantity extraction unit 22 calculates the current waveform feature quantity from the received time series data, and the abnormality / cause correspondence table. The past waveform feature values are extracted from all the abnormal causes from 18. The feature amount extraction unit 22 transmits the calculated current waveform feature amount and the extracted past waveform feature amount to the similarity calculation unit 23.

  FIG. 5A shows an example of the abnormality / cause correspondence table 18 in a table format. As shown in the figure, the abnormality / cause correspondence table 18 includes a plurality of abnormality causes, waveform feature amounts corresponding to each abnormality cause, the number of occurrences, and a loss amount. If there is no need to display the cause of the abnormality because there are few types of causes of the abnormality, the abnormality / cause correspondence table 18 may be directly related to a countermeasure method instead of the cause of the abnormality.

  By the way, in the extraction section shown in FIG. For this reason, it is not desirable to use the waveform itself or the average waveform of the time series data extracted by the process abnormality monitoring unit 13 as the waveform feature amount. Therefore, the waveform feature quantity is desirably a position invariant such as a simple statistical quantity such as average or variance, or a frequency component such as FFT (Fast Fourier Transform) transform or autocorrelation coefficient.

  The similarity calculator 23 calculates the waveform similarity by comparing the current waveform feature received from the feature extractor 22 with the past waveform feature. The similarity calculation unit 23 transmits the calculated waveform similarity to the priority level assigning unit 24.

  It is desirable that the waveform similarity is standardized so as to take a value of 0 to 1 in consideration of giving priority by the priority assigning unit 24. In this embodiment, the absolute value of the correlation function that can be easily calculated is used as the waveform similarity. The correlation function is obtained by calculating a unit vector from vectors having a plurality of waveform feature quantities as components, and calculating the inner product of the unit vector relating to the current waveform feature quantity and the unit vector relating to the past waveform feature quantity. The inner product of the unit vectors takes a value of −1 to +1, but if only the directionality of the vector is considered and the direction is ignored, it is equivalent to taking the absolute value of the inner product.

When the absolute value of the correlation function is the waveform similarity, the waveform similarity Xsi can be obtained from the following equation.
Xsi = | {k is the sum of up to p 1 (Xaik × Xck)} / { sum of XCK ² (k from 1 Xaik sum of ² to ^p) from ^1/2 × (k is 1 to p ) ^1/2 } |.
Here, Xaik is a past average waveform feature amount, and is represented by Xaik = Xik / Yi. Xik is the total sum of past waveform feature values, and Yi is the number of occurrences. Xck is the current waveform feature amount. Further, i is the order of the cause of abnormality in the abnormality / cause correspondence table 18 shown in FIG. 5A, and takes values of 1, 2,. Further, k is the order of the waveform feature amount in each abnormality cause in the abnormality / cause correspondence table 18, and takes values of 1, 2,..., P.

  The priority level assigning unit 24 calculates the certainty factor using the waveform similarity degree received from the similarity calculating unit 23, the past occurrence frequency and the loss ratio, and prioritizes abnormal causes based on the calculated certainty factor. Is to do. The priority level assigning unit 24 transmits the prioritization of the cause of abnormality to the list creating unit 25.

The certainty factor Pi can be obtained from the following equation, and the order of abnormality causes is arranged in descending order of the obtained certainty factor Pi.
Pi = Xsi * Yri * Zri.
Here, Xsi is the waveform similarity as described above. Yri is the frequency of occurrence, and is expressed as Yri = Yi / (the maximum value of Yi among all abnormal causes) using the number of occurrences Yi. Zri is a loss ratio, and is expressed as Zri = Zi / (maximum value of Zi among all abnormal causes) using the loss amount Zi. Further, i is the order of the cause of abnormality in the abnormality / cause correspondence table 18 as described above, and takes values of 1, 2,..., M.

  The occurrence frequency Yri and the loss ratio Zri are the ratios of the occurrence frequency Yi and the loss amount Zi to the maximum value, but considering the calculation of the certainty factor Pi, the occurrence frequency Yri and the loss ratio Zri are similar in waveform. This is because it is desirable to be normalized to 0 to 1 in the case of the degree Xsi.

  The list creation unit 25 creates a cause / response list based on the priority received from the priority level assigning unit 24 and the cause / response table 19. The list creation unit 25 transmits the created cause / response list to the terminal 5, whereby the cause / response list is displayed on the display unit 20 of the terminal 5. The procedure for creating the cause / action list will be described below.

  FIG. 5B shows an example of the cause / countermeasure correspondence table 19 in a table format. As shown in the figure, the cause / countermeasure correspondence table 19 includes a plurality of abnormality causes, a plurality of countermeasure methods corresponding to each abnormality cause, and the number of occurrences.

First, the list creation unit 25 reads a plurality of coping methods and the number of occurrences from the cause / coping correspondence table 19 with respect to the upper abnormal cause in the priority order received from the priority order assigning unit 24. Next, the occurrence frequency Crij is obtained from the following expression from the read occurrence number Cij.
Crij = Cij / (maximum value of Cij among certain abnormality causes Ai).
Here, i is the order of the cause of abnormality in the cause / countermeasure correspondence table 19, and takes values of i = 1, 2,..., M. Further, j is the order of countermeasure methods for a certain cause of abnormality in the cause / countermeasure correspondence table 19, and takes values j = 1, 2,..., N.

  Next, a coping method is selected in descending order of occurrence frequency Crij, and a cause / coping list is created. FIG. 6 shows an example of the cause / action list in a table format. In the case shown in the figure, the cause / action list is arranged with the cause of abnormality and the certainty degree from the highest priority, and the countermeasure method and the number of occurrences are arranged for each abnormality cause from the highest occurrence frequency Crij. .

  The display unit 20 of the terminal 5 may display the entire cause / response list on the screen, may display only frequently occurring items, or may be divided by the number of abnormal causes. , It may be separated by a certainty value.

  Referring again to FIG. 2, the cause / response correcting unit 16 actually performs a response operation for the process abnormality, and after determining an appropriate error cause and a response method, the error / cause correspondence table 18 and the cause / response The correspondence table 19 is corrected.

  Specifically, the cause / response correcting unit 16 first transmits all or necessary parts of the abnormality / cause correspondence table 18 and the cause / response correspondence table 19 to the terminal 5, and the display unit 20 of the terminal 5 indicate. Next, when an appropriate abnormality cause or countermeasure is not present in the abnormality / cause correspondence table 18 and the cause / response correspondence table 19, the abnormality / cause correspondence table 18 and the cause are indicated by an instruction from the input unit 21 of the user. Add a new abnormality cause item or countermeasure item to the countermeasure handling table 19.

  Then, according to an instruction from the input unit 21 by the user, the waveform feature amount, occurrence frequency, and loss amount of the appropriate abnormality cause and countermeasure method items in the abnormality / cause correspondence table 18 and the cause / response correspondence table 19 are respectively set to the previous values. Add to things and update.

  Next, the processing operation in the process management apparatus 4 having the above-described configuration will be described with reference to FIGS. FIG. 1 shows a flow of processing for monitoring a process and displaying the cause of an abnormality and a countermeasure on the display unit 20 of the terminal 5 when an abnormality occurs. FIG. 7 shows a flow of processing for updating the abnormality / cause correspondence table 18 and the cause / response correspondence table 19 after the actual countermeasure work is completed.

  As shown in FIG. 1, first, until a process abnormality occurs, the process state collection unit 12 uses the collected equipment operation data and product quality data as time series data together with the reception time of the process state of the storage unit 11. It is stored in the DB 17 (Step S10 (hereinafter simply referred to as “S10”. The same applies to other steps), NO in S11).

  When a process abnormality occurs (YES in S11), the process abnormality monitoring unit 13 extracts the time series data of the extraction section (FIG. 4) from the process state DB 17, and the feature amount extraction unit 22 extracts the time series data from the extracted time series data. The current waveform feature amount is calculated, and the past waveform feature amount is extracted for all abnormality causes from the abnormality / cause correspondence table 18 (S12).

  Next, the similarity calculation unit 23 compares the current waveform feature amount with the past waveform feature amount to calculate the waveform similarity (S13). Next, the priority level assigning unit 24 calculates the certainty factor using the waveform similarity calculated by the similarity calculating unit 23, the past occurrence frequency and the loss ratio, and based on the calculated certainty factor, Prioritization is performed (S14). Then, the list creation unit 25 creates a cause / countermeasure list including the cause of the abnormality and the coping method based on the priority order and the cause / countermeasure handling table 19, and outputs it to the terminal 5 (S15). Then, it returns to step S10 and repeats the above operation | movement.

  When the actual coping operation is completed, as shown in FIG. 7, first, the cause / response correcting unit 16 displays all or necessary parts of the abnormality / cause correspondence table 18 and the cause / response correspondence table 19 on the terminal 5. The information is displayed on the unit 20 to allow the user to determine whether or not an appropriate abnormality cause exists (S20). When the user determines that there is no appropriate cause of abnormality according to an instruction from the input unit 21, a new abnormality cause item is added to the abnormality / cause correspondence table 18 and the cause / action correspondence table 19. (S21), a new countermeasure method item is added to the cause / countermeasure correspondence table 19 (S22).

  On the other hand, when the user determines that there is an appropriate cause of abnormality, the user is determined whether or not an appropriate countermeasure is present (S23). The item of the new coping method is added to the item of the cause of abnormality to be performed (S22).

  Next, in response to an instruction from the user input unit 21, the cause / response correcting unit 16 generates a waveform feature amount and occurrence of an appropriate abnormality cause and countermeasure method item in the abnormality / cause correspondence table 18 and the cause / response correspondence table 19. The number of times and the amount of loss are each updated by adding to the previous one (S24). Thereafter, the process ends.

  The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope shown in the claims. That is, embodiments obtained by combining technical means appropriately modified within the scope of the claims are also included in the technical scope of the present invention.

  For example, in the above-described embodiment, the abnormality / cause correspondence table 18 associates the process abnormality with the abnormality cause, and the cause / response correspondence table 19 associates the abnormality cause with the countermeasure. Methods can also be associated. In this case, when an abnormality occurs, a countermeasure can be directly derived without going through the cause of the abnormality. As described above, any abnormality-related information related to the abnormality such as the cause of the abnormality and the countermeasures can be used as the one associated with the process abnormality.

  In the above embodiment, the absolute value of the correlation function is used as the waveform similarity. However, if a set-theoretic distribution is considered, the Mahalanobis distance is calculated, and the height of the normal distribution with respect to that value is calculated. It may be considered as a distribution probability. In this case, it is necessary to store not only an average value of a plurality of waveform feature amounts but also information capable of calculating a variance-covariance matrix in the abnormality / cause correspondence table 18 of the storage unit 11.

  In the above embodiment, the list is rearranged and displayed in descending order of priority. However, by changing the character size, color, and background color of the higher priority, the higher priority is emphasized. May be displayed. Further, instead of displaying on the display unit 20, other output forms such as printing using a printer or a speaker or outputting sound can be used.

  Moreover, in the said embodiment, although the priority order is provided using the waveform similarity, the occurrence frequency, and the loss ratio, the priority order may be provided using at least one of these.

  In addition to the waveform similarity and the occurrence frequency, an abnormality probability may be used as the degree of conformity of the cause of the abnormality. The abnormality probability can be used by calculating the probability that a process abnormality has occurred from a control chart. For example, the abnormality probability can be higher as the amount of protrusion exceeds the upper limit control limit.

  Further, as the degree of influence of the abnormality on the process, in addition to the loss ratio, an average countermeasure time, the latest failure rate, the latest failure increase rate, or the like may be used. Here, the average countermeasure time refers to the average value of the time required to implement the countermeasure for the process abnormality, and the latest defect rate refers to the defect rate immediately before the process abnormality occurs, and the latest defect increase rate. Means the rate of increase of the most recent defect rate.

Moreover, in the said embodiment, although the control chart method is utilized as a method of detecting the abnormality of a process, the arbitrary methods which can detect the abnormality of a process and can acquire the data at the time of abnormality can be utilized. For example, an online monitoring function is a function that has been applied to process systems. The online monitor function calculates a predetermined feature amount from time-series data of the process, and when the calculated feature amount deviates from the management range set in advance based on the specific manufacturing technology for the product, There are many warnings. Such an online monitoring function can automatically detect process abnormalities and can acquire time-series data at the time of abnormalities, and thus can be applied to the above-described embodiment as a method for detecting process abnormalities.

  Each block of the control unit 10 in the process management apparatus 4 may be configured by hardware logic, or may be realized by software using a CPU as follows.

  That is, the control unit 10 is a storage device (recording device) such as a CPU that executes instructions of a control program that realizes each function, a ROM that stores the program, a RAM that expands the program, a memory that stores the program and various data, and the like. Medium). An object of the present invention is a recording medium on which a program code (execution format program, intermediate code program, source program) of a control program of the control unit 10 which is software that realizes the above-described functions is recorded so as to be readable by a computer. This can also be achieved by supplying the control unit 10 and reading and executing the program code recorded on the recording medium by the computer (or CPU or MPU).

  Examples of the recording medium include a tape system such as a magnetic tape and a cassette tape, a disk system including a magnetic disk such as a flexible disk / hard disk and an optical disk such as a CD-ROM / MO / MD / DVD / CD-R, and an IC card. A card system such as an optical card (including a memory card) or a semiconductor memory system such as a mask ROM / EPROM / EEPROM / flash ROM can be used.

  The control unit 10 may be configured to be connectable to a communication network, and the program code may be supplied via the communication network. The communication network is not particularly limited. For example, the Internet, intranet, extranet, LAN, ISDN, VAN, CATV communication network, virtual private network, telephone line network, mobile communication network, satellite communication. A net or the like is available. Further, the transmission medium constituting the communication network is not particularly limited. For example, even in the case of wired such as IEEE 1394, USB, power line carrier, cable TV line, telephone line, ADSL line, etc., infrared rays such as IrDA and remote control, Bluetooth ( (Registered trademark), 802.11 wireless, HDR, mobile phone network, satellite line, terrestrial digital network, and the like can also be used. The present invention can also be realized in the form of a carrier wave or a data signal sequence in which the program code is embodied by electronic transmission.

The present invention can also be configured as follows.

That is, the process management apparatus according to the present invention is a process management apparatus that manages a large number of processes, a storage unit that stores a correspondence relationship between the abnormality of the process and abnormality-related information related to the abnormality, and the process Detection means for detecting the abnormality, extraction means for extracting one or a plurality of the abnormality-related information corresponding to the abnormality detected by the detection means using the correspondence relationship stored in the storage means, and the extraction means And a list creation unit that creates a list including the extracted abnormality-related information based on the degree of fitness of the abnormality-related information and / or the degree of influence of the abnormality on the process.

In the above configuration, when a process abnormality is detected, one or a plurality of abnormality-related information corresponding to the detected abnormality is extracted using the correspondence relationship, and a list including the extracted abnormality-related information is displayed as the fitness and / or Created based on impact. Thereby, even when there are a plurality of abnormality-related information for a certain abnormality, a list is created based on the degree of conformity and the degree of influence, so the user can refer to the created list appropriately, And / or abnormality-related information having a large influence can be selected.

In the process management device according to the present invention, in the configuration described above, the correspondence relationship is a correspondence relationship between the waveform feature amount of the time-series data and the abnormality-related information when the process is abnormal, and the extraction is performed. The means obtains a plurality of abnormality related information corresponding to a plurality of waveform feature quantities close to the waveform feature quantity of the time series data when the detection means detects an abnormality using the correspondence relationship, and the abnormality The degree of fitness of the related information includes a similarity between the waveform feature amount of the time series data detected by the detection unit and the waveform feature amount corresponding to each of the plurality of abnormality related information.

According to the above configuration, the abnormal state is represented by the waveform feature amount of the time-series data, and the waveform feature amount at the time of abnormality detection and the waveform included in the correspondence relationship are used as the fitness used when creating the list. The degree of similarity between the feature quantities can be used. As a result, abnormality-related information that matches a certain abnormal state can be obtained quantitatively and objectively.

The process management apparatus according to the present invention is a process management apparatus for managing a large number of processes, wherein a storage means for storing a correspondence relationship between the abnormality of the process and the abnormality-related information related to the abnormality, and the abnormality-related information It is a structure provided with the corresponding relationship update means which updates the said corresponding relationship based on the confirmed abnormality related information when it is fixed.

According to the above configuration, when an abnormality occurs and a countermeasure is taken and the abnormality related information is confirmed, the correspondence is updated based on the confirmed abnormality related information. As a result, a detailed and highly accurate correspondence is established, so that more appropriate abnormality related information can be extracted for a certain abnormality.

In addition, when the determined abnormality related information does not exist in the previous correspondence relationship, a new correspondence relationship is added to the previous correspondence relationship. Therefore, even if the correspondence relationship is not stored in advance in the storage unit, the correspondence relationship updating unit repeatedly updates the correspondence relationship, so that a detailed and highly accurate correspondence relationship can be established.

In the process management apparatus according to the present invention, in the configuration described above, the storage unit stores an abnormality / cause correspondence that is a correspondence between the abnormality of the process and the cause of the abnormality as the correspondence. Stores the cause / response relationship that is the correspondence between the cause of the abnormality and the countermeasure against the abnormality, and when the countermeasure is determined, the cause / response is determined based on the determined countermeasure. The configuration further includes correspondence update means for updating the relationship.

According to the above configuration, when an abnormality occurs and a countermeasure is performed and a countermeasure is determined, the cause / response correspondence is updated based on the determined countermeasure. As a result, a detailed and highly accurate cause / response relationship is established, so that a more appropriate response method can be extracted for the cause of a certain abnormality.

In addition, when the determined countermeasure method does not exist in the previous cause / response correspondence, a new cause / response correspondence is added to the previous cause / response correspondence. Therefore, even if the cause / response correspondence is not previously stored in the storage means, the cause / response correspondence update means repeats the update of the cause / response correspondence so that detailed and highly accurate cause / response correspondence is obtained. Can be built.

The process management method of the process management apparatus according to the present invention is a process management method of a process management apparatus that manages a large number of processes, and the process management apparatus includes the abnormality in the process and abnormality related information related to the abnormality. Storage means for storing the correspondence relationship between the detection step and the detection step for detecting an abnormality in the process, and using the correspondence relationship stored in the storage means, 1 corresponding to the abnormality detected in the detection step. Alternatively, an extraction step for extracting a plurality of abnormality-related information, and a list including the abnormality-related information extracted in the extraction step are used as the degree of fitness of the abnormality-related information and / or the degree of influence of the abnormality on the process. A list creation step of creating based on the list.

According to the above method, when a process abnormality is detected, one or a plurality of abnormality-related information corresponding to the detected abnormality is extracted using the correspondence relationship, and the list including the extracted abnormality-related information is obtained as the fitness level and / or Or create based on the impact. Thereby, even when there are a plurality of abnormality-related information for a certain abnormality, a list is created based on the degree of conformity and the degree of influence, so the user can refer to the created list appropriately, And / or abnormality-related information having a large influence can be selected.

  In addition to the manufacturing process, the process management apparatus according to the present invention manages various processing processes performed in electronically controlled apparatuses and systems such as home appliances and automobiles in addition to the manufacturing process. It can also be applied to.

5 is a flowchart showing a flow of processing for monitoring a process and outputting an abnormality cause and a coping method when an abnormality occurs in the process management apparatus of the process management system according to the embodiment of the present invention. It is a block diagram which shows schematic structure of the said process management system. It is a block diagram which shows the detail of the abnormality cause extraction part and cause coping list preparation part of the said process management apparatus. It is a graph which shows an example of the control chart utilized in order that the process abnormality monitoring part of the said process management apparatus may monitor process abnormality. FIG. 6A is a diagram showing an example of an abnormality / cause correspondence table stored in the storage unit of the process management apparatus in a table format. FIG. It is a figure which shows an example of a countermeasure correspondence table in a table format. It is a figure which shows an example of the cause and countermeasure list which the cause and countermeasure list preparation part of the said process management apparatus produces in a table format. FIG. 5 is a flowchart showing a flow of processing for updating the abnormality / cause correspondence table and the cause / response correspondence table after the actual countermeasure work is completed in the process management apparatus. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Process management system 4 Process management apparatus 11 Memory | storage part (memory | storage means)
12 Process status collection unit (collection means)
13 Process abnormality monitoring part (detection means)
14 Abnormal cause extraction unit (extraction means)
15 Cause / Correction List Creation Unit (List creation means, countermeasure method extraction means, countermeasure method list creation means)
16 Cause / Correction Correction Unit (Correspondence Update Unit, Cause / Countermeasure Update Unit)
18 Abnormality / cause correspondence table (correspondence, abnormality / cause correspondence)
19 Cause / Countermeasure Response Table (Cause / Countermeasure Response Relationship)

Claims (15)

In a process management device that manages many processes,
Storage means for storing a correspondence relationship between the abnormality in the process and the abnormality-related information related to the abnormality;
Detecting means for detecting an abnormality in the above process;
Extraction means for extracting one or more of the abnormality-related information corresponding to the abnormality detected by the detection means using the correspondence relationship stored by the storage means;
And a list creation means for creating a list including the abnormality related information extracted by the extraction means based on the degree of fitness of the abnormality related information and / or the degree of influence of the abnormality on the process. Process management device.   The process management according to claim 1, further comprising: correspondence updating means for updating the correspondence stored in the storage unit based on the confirmed abnormality related information when the abnormality related information is confirmed. apparatus.   The process management apparatus according to claim 1, wherein the abnormality related information is a cause of the abnormality or a coping method for the abnormality. The abnormality related information is the cause of the abnormality,
The storage means stores an abnormality / cause correspondence relationship that is a correspondence relationship between the abnormality of the process and the cause of the abnormality as the correspondence relationship, and further includes a correspondence relationship between the cause of the abnormality and a countermeasure for the abnormality. The process management apparatus according to claim 1, wherein a certain cause / response correspondence is stored. A coping method extraction unit that extracts coping methods corresponding to each cause of the abnormality detected by the extraction unit using the cause / coping correspondence relationship stored by the storage unit;
5. The process management according to claim 4, further comprising: a handling method list creating unit that creates a handling method list including the handling method extracted by the handling method extraction unit based on a degree of suitability of the handling method. apparatus.   5. The apparatus according to claim 4, further comprising a cause / countermeasure correspondence updating unit that updates the cause / countermeasure correspondence stored by the storage unit based on the fixed measure when the coping method is determined. The process management apparatus described. It further comprises a collecting means for collecting time series data related to the above process,
2. The process management apparatus according to claim 1, wherein the detection means detects the abnormality of the process by processing the time-series data collected by the collection means by a control projection method. The correspondence relationship is a correspondence relationship between the waveform feature amount of the time-series data at the time of abnormality in the process and the abnormality-related information,
The extraction means uses the correspondence relationship to obtain a plurality of abnormality related information corresponding to a plurality of waveform feature quantities close to the waveform feature quantity of the time series data when the detection means detects an abnormality,
The degree of fitness of the abnormality-related information includes a similarity between the waveform feature amount of the time-series data detected by the detection means and the waveform feature amount corresponding to each of the plurality of abnormality-related information, The process management apparatus according to claim 7.   The process management apparatus according to claim 1, wherein the degree of conformity of the abnormality-related information includes the frequency of occurrence of the abnormality.   The process management apparatus according to claim 1, wherein the degree of influence of the abnormality on the process includes a loss ratio due to the abnormality. In a process management device that manages many processes,
Storage means for storing a correspondence relationship between the abnormality in the process and the abnormality-related information related to the abnormality;
A process management apparatus comprising: a correspondence update unit that updates the correspondence based on the confirmed abnormality-related information when the abnormality-related information is confirmed. The storage means stores an abnormality / cause correspondence relationship that is a correspondence relationship between the abnormality of the process and the cause of the abnormality as the correspondence relationship, and further includes a correspondence relationship between the cause of the abnormality and a countermeasure for the abnormality. Remembers the cause / response relationship,
12. The process management apparatus according to claim 11, further comprising a cause / countermeasure correspondence updating unit that updates the cause / countermeasure correspondence based on the confirmed measure when the countermeasure is determined. . A process management method for a process management apparatus for managing a large number of processes,
The process management apparatus includes storage means for storing a correspondence relationship between the abnormality of the process and abnormality-related information related to the abnormality,
A detection step for detecting an abnormality in the above process;
An extraction step for extracting one or more abnormality-related information corresponding to the abnormality detected in the detection step using the correspondence relationship stored in the storage means;
A list creation step for creating a list including the abnormality-related information extracted in the extraction step based on the degree of fitness of the abnormality-related information and / or the degree of influence of the abnormality on the process. A process management method for a process management apparatus.   11. A process management program for operating the process management apparatus according to claim 1, wherein the process management program causes a computer to function as each means.   A computer-readable recording medium on which the process management program according to claim 14 is recorded.

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