JP2005238110A - Method for applying material, method for manufacturing color filter substrate, method for manufacturing elecroluminescence display, method for manufacturing plasma display and discharge device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To shorten the time of a coating process when the coating process requires a plurality of scanning periods. <P>SOLUTION: A method for applying a material includes a step (A) of discharging a liquid material from a nozzle to a part to be discharged while the relative position of the nozzle in a discharge device to the part to be discharged is changed at a first speed and a step (B) of discharging the liquid material from the nozzle to the part to be discharged while the relative position of the nozzle to the part to be discharged is changed at a second speed higher than the first speed. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a discharge device and a material coating method, and more particularly to a discharge device and a material coating method suitable for manufacturing a color filter substrate, an electroluminescence display device, and a plasma display device.

  An ink jet device used for manufacturing a color filter, an electroluminescence display device, or the like is known (for example, Patent Document 1).

JP 2002-221616 A

  Along with the increase in size of the display device, the size of the discharge target portion (the region where the filter layer is to be provided) of the color filter substrate is also increasing. When the size of the discharged portion is large, it is effective to perform the coating process while changing the drawing resolution. This is because the liquid color filter material can be easily spread and spread to every corner in the discharged portion. However, changing the drawing resolution during one scanning period leads to complicated control. Therefore, in order to apply a material to one discharge target part with a plurality of different drawing resolutions, a plurality of scanning periods are required. It will take. And when a some scanning period is required, the time of an application | coating process tends to become long.

  The present invention has been made in view of the above problems, and one of its purposes is to shorten the time of the coating process when the coating process requires a plurality of scanning periods.

  The material application method of the present invention is a material application method in which the liquid material is applied to a portion to be discharged of the substrate using a discharge device including a stage on which the substrate is placed and a head that discharges the liquid material from a nozzle. A step (A) of discharging the liquid material from the nozzle to the discharged portion while changing a relative position of the nozzle to the discharged portion at a first speed; and A step (B) of discharging the liquid material from the nozzle to the discharge target portion while changing the relative position of the nozzle at a second speed higher than the first speed.

  One of the effects obtained by the above configuration is that the application process time can be shortened when the application process requires a plurality of scanning periods.

  According to an aspect of the present invention, in the step (A), while changing the relative position of the nozzle with respect to the discharge target portion at the first speed, the liquid material is supplied from the nozzle to the discharge target portion. The step (B1) includes a step (A1) of discharging according to a predetermined cycle, wherein the step (B) changes the relative position of the nozzle with respect to the discharge target portion at the second speed, while the liquid is discharged from the nozzle to the discharge target portion. A step (B1) of discharging the material according to the predetermined period.

  According to another aspect of the present invention, in the step (A), one discharge is performed from the nozzle to the discharged portion while changing the relative position of the nozzle with respect to the discharged portion at the first speed. The step (A2) includes a step (A2) of discharging the liquid material by a first volume, and the step (B) includes changing the relative position of the nozzle with respect to the portion to be discharged at the second speed. A step (B2) of discharging the liquid material by a second volume larger than the first volume per discharge from the nozzle.

  The present invention can be realized in various modes, for example, in a mode such as a method for manufacturing a color filter substrate, a method for manufacturing an electroluminescence display device, a method for manufacturing a plasma display device, or the like.

An ejection apparatus according to the present invention includes a stage on which a substrate having an ejection target is placed, a head that ejects a liquid material from a nozzle, a scanning unit that changes the relative position of the nozzle with respect to the ejection target,
It has. Then, in the first scanning period, the scanning unit changes the relative position of the nozzle with respect to the ejection target at a first speed, and in the second scanning period, the scanning unit is relative to the ejection target. The relative position of the nozzle is changed at a second speed faster than the first speed.

(A. Overall configuration of discharge device 100R)
1 includes a tank 101R that holds a liquid color filter material 111R, a tube 110R, and a discharge scanning unit 102 that is supplied with the liquid color filter material 111R from the tank 101R via the tube 110R. It is the provided material application device. The ejection scanning unit 102 includes a ground stage GS, an ejection head unit 103, a first position control device 104, a stage 106, a second position control device 108, and a control unit 112.

  The discharge head unit 103 holds a plurality of heads 114 (FIG. 2) for discharging the liquid color filter material 111R on the stage 106 side. Each of the plurality of heads 114 ejects droplets of the liquid color filter material 111R in response to a signal from the control unit 112. The tank 101R and the plurality of heads 114 in the ejection head unit 103 are connected by a tube 110R, and a liquid color filter material 111R is supplied from the tank 101R to each of the plurality of heads 114.

  Here, the liquid color filter material 111R corresponds to the “liquid material” of the present invention. The “liquid material” refers to a material having a viscosity that can be ejected as droplets from a nozzle (described later) of the head 114. In this case, it does not matter whether the material is aqueous or oily. It is sufficient if it has fluidity (viscosity) that can be discharged from the nozzle, and even if a solid substance is mixed, it may be a fluid as a whole.

  The first position control device 104 moves the ejection head unit 103 along the X-axis direction and the Z-axis direction orthogonal to the X-axis direction in response to a signal from the control unit 112. Furthermore, the first position control device 104 also has a function of rotating the ejection head unit 103 around an axis parallel to the Z axis. In the present embodiment, the Z-axis direction is a direction parallel to the vertical direction (that is, the direction of gravitational acceleration).

  Specifically, the first position control device 104 includes a pair of linear motors extending in the X-axis direction, a pair of X-axis guide rails extending in the X-axis direction, an X-axis air slider, a carriage rotating unit, and a support. And a structure 14. The support structure 14 positions the pair of linear motors, the pair of X-axis guide rails, the pair of X-axis air sliders, and the carriage rotation unit at a position away from the stage 106 by a predetermined distance in the Z-axis direction. It is fixed. On the other hand, the X-axis air slider is movably supported by a pair of X-axis guide rails. The X-axis air slider moves in the X-axis direction along the pair of X-axis guide rails by the action of the pair of linear motors. Since the discharge head unit 103 is connected to the X-axis air slider via the carriage rotation unit, the discharge head unit 103 moves in the X-axis direction together with the X-axis air slider. The discharge head unit 103 is supported by an X-axis air slider so that a nozzle (described later) in the discharge head unit 103 faces the stage 106 side. The carriage rotation unit has a servo motor and has a function of rotating the ejection head unit 103 around an axis parallel to the Z axis.

  The second position control device 108 moves the stage 106 along the Y-axis direction orthogonal to both the X-axis direction and the Z-axis direction in accordance with a signal from the control unit 112. Further, the second position control device 108 also has a function of rotating the stage 106 around an axis parallel to the Z axis. Specifically, the second position control device 108 includes a pair of linear motors extending in the Y-axis direction, a pair of Y-axis guide rails extending in the Y-axis direction, a Y-axis air slider, a support base, and a θ table. It is equipped with. The pair of linear motors and the pair of Y-axis guide rails are located on the ground stage GS. On the other hand, the Y-axis air slider is movably supported by a pair of Y-axis guide rails. The Y-axis air slider moves in the Y-axis direction along the pair of Y-axis guide rails by the action of the pair of linear motors. Since the Y-axis air slider is connected to the back surface of the stage 106 via the support base and the θ table, the stage 106 moves in the Y-axis direction together with the Y-axis air slider. The θ table has a motor, and has a function of rotating the stage 106 around an axis parallel to the Z axis.

  In the present specification, the first position control device 104 and the second position control device 108 are also referred to as “scanning unit” or “robot”.

  In this embodiment, the X-axis direction, the Y-axis direction, and the Z-axis direction coincide with the direction in which one of the ejection head unit 103 and the stage 106 moves relative to the other. The virtual origin of the XYZ coordinate system that defines the X-axis direction, the Y-axis direction, and the Z-axis direction is fixed to the reference portion of the ejection device 100R. In this specification, the X coordinate, the Y coordinate, and the Z coordinate are coordinates in such an XYZ coordinate system. Note that the above virtual origin may be fixed not only to the reference portion but also to the stage 106, or may be fixed to the ejection head unit 103.

  As described above, the ejection head unit 103 is moved in the X-axis direction by the first position control device 104. On the other hand, the stage 106 is moved in the Y-axis direction by the second position control device 108. That is, the relative position of the head 114 with respect to the stage 106 is changed by the first position control device 104 and the second position control device 108. More specifically, by these operations, the ejection head unit 103, the head 114, or the nozzle 118 (FIG. 2) sets a predetermined distance in the Z-axis direction with respect to the ejection target part positioned on the stage 106. While maintaining, relatively move in the X-axis direction and the Y-axis direction, that is, relatively scan. Here, the ejection head unit 103 may move in the Y-axis direction with respect to the stationary ejection unit. Further, even when the liquid color filter material 111R is discharged from the nozzle 118 (FIG. 2) to the stationary discharge target portion within a period in which the discharge head portion 103 moves between two predetermined points along the Y-axis direction. Good. “Relative movement” or “relative scanning” refers to moving at least one of the side from which the liquid color filter material 111R is discharged and the side from which the discharged material lands (discharged part side) relative to the other. including.

  Furthermore, the relative movement of the ejection head unit 103, the head 114, or the nozzle 118 (FIG. 2) means that the relative position of the ejection head unit 103, the head 114, or the nozzle 118 (FIG. 2) with respect to the stage, the substrate, or the ejection target portion changes. For this reason, in this specification, even when the ejection head unit 103, the head 114, or the nozzle 118 is stationary with respect to the ejection apparatus 100R and only the stage 106 moves, the ejection head unit 103, the head 114, Alternatively, the nozzle 118 is described as moving relative to the stage 106, the base body, or the discharge target portion. In addition, a combination of relative scanning or relative movement and material ejection may be referred to as “application scanning”.

  The discharge head unit 103 and the stage 106 further have a degree of freedom of translation and rotation other than those described above. However, in the present embodiment, descriptions relating to degrees of freedom other than the above degrees of freedom are omitted for the sake of simplicity.

  The control unit 112 is configured to receive ejection data representing a relative position at which the liquid color filter material 111R is to be ejected from an external information processing apparatus. The detailed configuration and function of the control unit 112 will be described later.

(B. Head)
A head 114 shown in FIG. 2 is one of a plurality of heads 114 included in the ejection head unit 103. FIG. 2 is a view of the head 114 as viewed from the stage 106 side, and shows the bottom surface of the head 114. The head 114 has a nozzle row 116 extending in the X-axis direction. The nozzle row 116 is composed of a plurality of nozzles 118 arranged substantially evenly in the X-axis direction. The plurality of nozzles 118 are arranged such that the nozzle pitch HXP in the X-axis direction of the head 114 is about 70 μm. Here, “the nozzle pitch HXP of the head 114 in the X-axis direction” is the interval between a plurality of nozzle images obtained by projecting all of the nozzles 118 in the head 114 onto the X-axis from a direction orthogonal to the X-axis direction. It corresponds to the pitch.

  The number of nozzles 118 in the nozzle row 116 is 180. However, 10 nozzles at both ends of the nozzle row 116 are set as “pause nozzles”. Then, the liquid color filter material 111R is not discharged from these 20 “rest nozzles”. Therefore, of the 180 nozzles 118 in the head 114, 160 nozzles 118 function as the nozzles 118 that discharge the liquid color filter material 111R. In the present specification, these 160 nozzles 118 may be referred to as “ejection nozzles 118T”.

  Note that the number of nozzles 118 in one head 114 is not limited to 180. One nozzle 114 may be provided with 360 nozzles.

  As shown in FIGS. 3A and 3B, each head 114 is an inkjet head. More specifically, each head 114 includes a diaphragm 126 and a nozzle plate 128. Between the diaphragm 126 and the nozzle plate 128, there is a liquid pool 129 in which the liquid color filter material 111R supplied from the two tanks 101R (FIG. 1) through the holes 131 is always filled. Yes.

  In addition, a plurality of partition walls 122 are located between the diaphragm 126 and the nozzle plate 128. A portion surrounded by the diaphragm 126, the nozzle plate 128, and the pair of partition walls 122 is a cavity 120. Since the cavities 120 are provided corresponding to the nozzles 118, the number of the cavities 120 and the number of the nozzles 118 are the same. The liquid color filter material 111R is supplied from the liquid pool 129 to the cavity 120 through the supply port 130 positioned between the pair of partition walls 122.

  On the diaphragm 126, the vibrator 124 is positioned corresponding to each cavity 120. The vibrator 124 includes a piezoelectric element 124C and a pair of electrodes 124A and 124B that sandwich the piezoelectric element 124C. By applying a driving voltage between the pair of electrodes 124A and 124B, the liquid color filter material 111R is discharged from the corresponding nozzle 118. The shape of the nozzle 118 is adjusted so that the liquid color filter material 111R is discharged from the nozzle 118 in the Z-axis direction.

  The control unit 112 (FIG. 1) may be configured to give a signal to each of the plurality of transducers 124 independently of each other. That is, the volume of the color filter material 111 </ b> R ejected from the nozzle 118 may be controlled for each nozzle 118 in accordance with a signal from the control unit 112. In such a case, the volume of the color filter material 111R discharged from each of the nozzles 118 may be variable between 0 pl to 42 pl (picoliter). Further, as will be described later, the control unit 112 can also set the nozzle 118 that performs the discharge operation and the nozzle 118 that does not perform the discharge operation during the coating process.

  In this specification, a portion including one nozzle 118, a cavity 120 corresponding to the nozzle 118, and a vibrator 124 corresponding to the cavity 120 may be referred to as “ejection unit 127”. According to this notation, one head 114 has the same number of ejection units 127 as the number of nozzles 118. The discharge unit 127 may include an electrothermal conversion element instead of the piezo element. That is, the discharge unit 127 may have a configuration for discharging a material by utilizing thermal expansion of the material by the electrothermal conversion element.

(C. Control unit)
Next, the configuration of the control unit 112 will be described. As shown in FIG. 4, the control unit 112 includes an input buffer memory 200, a storage unit 202, a processing unit 204, a scan driving unit 206, and a head driving unit 208. The buffer memory 200 and the processing unit 204 are connected so that they can communicate with each other. The processing unit 204 and the storage unit 202 are connected to be communicable with each other. The processing unit 204 and the scan driving unit 206 are connected so as to communicate with each other. The processing unit 204 and the head driving unit 208 are connected so as to communicate with each other. The scan driver 206 is connected to the first position control device 104 and the second position control device 108 so as to communicate with each other. Similarly, the head driving unit 208 is connected to each of the plurality of heads 114 so as to communicate with each other.

  The input buffer memory 200 receives ejection data for ejecting droplets D of the liquid color filter material 111R from a host computer (not shown) located outside the ejection device 100R. The input buffer memory 200 supplies the ejection data to the processing unit 204, and the processing unit 204 stores the ejection data in the storage unit 202. In FIG. 4, the storage means 202 is a RAM.

  The processing unit 204 gives data indicating the relative position of the nozzle 118 to the discharge target unit to the scan driving unit 206 based on the discharge data in the storage unit 202. The scanning drive unit 206 gives the second position control device 108 a stage drive signal corresponding to this data and an ejection period EP (FIG. 5) to be described later. As a result, the head 114 performs relative scanning with respect to the discharge target portion. On the other hand, the processing unit 204 gives a discharge signal ES necessary for discharging the liquid color filter material 111R to the head 114 based on the discharge data stored in the storage unit 202. As a result, the droplet D of the liquid color filter material 111R is ejected from the corresponding nozzle 118 in the head 114.

  The control unit 112 may be a computer including a CPU, a ROM, a RAM, and a bus. In this case, the function of the control unit 112 is realized by a software program executed by a computer. Of course, the control unit 112 may be realized by a dedicated circuit (hardware).

  Next, the configuration and function of the head drive unit 208 in the control unit 112 will be described.

  As shown in FIG. 5A, the head drive unit 208 includes one drive signal generation unit 203 and a plurality of analog switches AS. As shown in FIG. 5B, the drive signal generation unit 203 generates a drive signal DS. The potential of the drive signal DS changes with respect to the reference potential L over time. Specifically, the drive signal DS includes a plurality of ejection waveforms P that are repeated at the ejection cycle EP. Here, the discharge waveform P corresponds to a drive voltage waveform to be applied between a pair of electrodes of the corresponding vibrator 124 in order to discharge one droplet from the nozzle 118.

  The drive signal DS is supplied to each input terminal of the analog switch AS. Each of the analog switches AS is provided corresponding to each of the ejection units 127. That is, the number of analog switches AS and the number of ejection units 127 (that is, the number of nozzles 118) are the same.

  The processing unit 204 supplies a selection signal SC (i) indicating ON / OFF of the nozzle 118 to each analog switch AS. Here, the selection signal SC (i) can take either a high level or a low level independently for each analog switch AS. On the other hand, the analog switch AS supplies the ejection signal ES (i) to the electrode 124A of the vibrator 124 in accordance with the drive signal DS and the selection signal SC (i). Specifically, when the selection signal SC (i) is at a high level, the analog switch AS propagates the drive signal DS as the ejection signal ES (i) to the electrode 124A. On the other hand, when the selection signal SC (i) is at a low level, the potential of the ejection signal ES (i) output from the analog switch AS is the reference potential L. When the drive signal DS is applied to the electrode 124A of the vibrator 124, the liquid color filter material 111R is discharged from the nozzle 118 corresponding to the vibrator 124. A reference potential L is applied to the electrode 124B of each vibrator 124.

  In the example shown in FIG. 5B, in each of the two ejection signals ES (1) and ES (2), the two selection signals SC so that the ejection waveform P appears in the period 2EP that is twice the ejection period EP. In each of (1) and SC (2), a high level period and a low level period are set. As a result, a liquid material is discharged from each of the two corresponding nozzles 118 with a period of 2EP. A common drive signal DS from the common drive signal generation unit 203 is given to each of the vibrators 124 corresponding to these two nozzles 118. For this reason, a liquid material (color filter material) is discharged from the two nozzles 118 at substantially the same timing. Note that the corresponding selection signal SC (3) is maintained at a low level so that the drive waveform P does not appear in the ejection signal ES (3) in FIG. 5B.

  In the present embodiment, the period 2EP is an effective ejection period EPM of the liquid color filter material 111R. Here, the reciprocal of the effective discharge period EPM is expressed as an effective discharge frequency EF. The effective discharge period EPM (or effective discharge frequency EF) is a period (frequency) in a range in which the color filter material 111R can be normally discharged from the head 114. In the effective ejection cycle EPM shorter than this range, it is not easy to normally eject the color filter material 111R. In the case of the color filter material 111R of the present embodiment, the range of the effective ejection period EPM is approximately 50 μsec or more (greater than 0 Hz and 20 kHz or less). The range of the effective ejection cycle EPM can be different for each color filter material, light emitting material for an electroluminescence display device, fluorescent material used in a plasma display device, and a conductive thin film material.

  With the above configuration, the ejection device 100 </ b> R applies the liquid material 111 in accordance with ejection data given to the control unit 112.

(D. Color filter substrate)
A base 10A shown in FIGS. 6A and 6B is a substrate that becomes the color filter substrate 10 through processing by the manufacturing apparatus 1 described in the second embodiment to be described later. The base 10A has a plurality of discharged portions 18R, 18G, and 18B arranged in a matrix.

  Specifically, the base body 10 </ b> A includes a support substrate 12 having optical transparency, a black matrix 14 formed on the support substrate 12, and a bank 16 formed on the black matrix 14. The black matrix 14 is formed of a light-shielding material. The black matrix 14 and the bank 16 on the black matrix 14 are positioned on the support substrate 12 so that a plurality of matrix-like light transmission portions, that is, a plurality of matrix-like pixel regions are defined.

  In each pixel region, the recesses defined by the support substrate 12, the black matrix 14, and the bank 16 correspond to the discharged portion 18R, the discharged portion 18G, and the discharged portion 18B. The discharged portion 18R is a region where the filter layer 111FR that transmits only light in the red wavelength region is to be formed, and the discharged portion 18G is formed with the filter layer 111FG that transmits only light in the green wavelength region. The discharged portion 18B is a region where the filter layer 111FB that transmits only light in the blue wavelength region is to be formed.

  The base 10A shown in FIG. 6B is located on a virtual plane parallel to both the X-axis direction and the Y-axis direction. The row direction and the column direction of the matrix formed by the plurality of discharged portions 18R, 18G, and 18B are parallel to the X-axis direction and the Y-axis direction, respectively. In the base body 10A, the discharged portion 18R, the discharged portion 18G, and the discharged portion 18B are periodically arranged in this order in the X-axis direction. On the other hand, the discharged parts 18R are arranged in a line at a predetermined constant interval in the Y-axis direction, and the discharged parts 18G are arranged in a line at a predetermined fixed interval in the Y-axis direction. In addition, the discharged parts 18B are arranged in a line at a predetermined constant interval in the Y-axis direction. Note that the planar images of the discharged portions 18R, 18G, and 18B are polygons having a longitudinal direction.

(E. Application process)
In order to simplify the description of the coating process of the present embodiment, some definitions are introduced. First, the “scanning period” refers to the relative position of the head 114 or the ejection head unit 103 with respect to the stage 106 from one end E1 to the other end E2 (FIG. 11) or the other end E2 to one end E1 of the scanning range in the Y-axis direction. Means a period of time. One scanning period may be referred to as “one-pass period”.

  Here, the “scanning range” means that, as shown in FIG. 11, one side of the ejection head unit 103 moves relative to the stage 106 so that the material can be applied to all of the ejection target parts 18R on the substrate 10A. Means range. For this reason, all the discharged parts 18R are covered by the scanning range. In the present embodiment, the ejection head unit 103 moves in the scanning range within one scanning period.

  In some cases, the term “scanning range” may mean a range in which one nozzle 118 (FIG. 2) moves relative to the stage 106, or one nozzle row 116 (FIG. 2) moves relatively. It may mean a range, or it may mean a range in which the head 114 (FIG. 2) moves relatively.

  Furthermore, when the ejection head unit 103, the head 114 (FIG. 2), or the nozzle 118 (FIG. 2) moves relative to the stage 106, the relative position of the stage 106, the base body 10A, or the ejection target 18R changes. It means changing. For this reason, in this specification, even when the ejection head unit 103, the head 114, or the nozzle 118 is stationary with respect to the ejection device 100R and only the stage 106 moves, the ejection head unit 103, the head 114, Alternatively, the nozzle 118 is described as moving relative to the stage 106, the base 10A, or the discharge target 18R. In addition, a combination of relative scanning or relative movement and material ejection may be referred to as “application scanning”.

  Hereinafter, for convenience of explanation, it is assumed that the total volume of the liquid color filter material 111R to be discharged to each of the plurality of discharged portions 18R is 10 q picoliter. Here, q is a constant introduced for the purpose of generalizing the explanation. The value of q can be different for each substrate 10A.

  Before the coating process is started, a transfer device (not shown in FIG. 7) having a fork portion places the substrate 10A on the stage 106. Specifically, the base body 10A is arranged on the stage 106 so that the row direction and the column direction of the matrix formed by the plurality of ejection target portions 18R coincide with the X-axis direction and the Y-axis direction. In the present embodiment, the base body 10A is oriented so that the longitudinal direction of the portion to be ejected 18R coincides with the Y-axis direction.

  When the coating process is started, the control unit 112 causes the discharge head unit 103 to be relative to the stage 106 so that at least one of the discharge nozzles 118T corresponds to the discharge target unit 18R via the first position control device 104. The position is adjusted along the X-axis direction.

(E1. First scanning period)
In the first scanning period, the ejection device 100R applies the liquid color filter material 111R to each of the ejection target portions 18R with a drawing resolution of 10 μm. That is, a plurality of droplets D of the color filter material 111R are landed at intervals of 10 μm by the discharge device 100R in the respective portions to be discharged 18R. In the present embodiment, since the length of the dischargeable range YE in the Y-axis direction of the discharged portion 18R is approximately 65 μm, the droplets D land on each of the six positions aligned at a pitch of 10 μm on the discharged portion 18R.

  Here, the “dischargeable range YE” will be described with reference to FIG. As shown in FIG. 10, if the discharge nozzle 118 is within the dischargeable range YE in the Y-axis direction of the discharged portion 18R, the droplet D can be normally landed in the discharged portion 18R. On the other hand, when the discharge nozzle 118T is outside the dischargeable range YE in the Y-axis direction, the droplet D from the discharge nozzle 118T cannot normally land on the discharged portion 18R. For example, as shown in FIG. 10, the droplet D from the discharge nozzle 118T collides with the bank 16 before landing on the discharged portion 18R, or gets over the bank 16 after landing. The length of the dischargeable range YE in the Y-axis direction can vary depending on the volume and size of the discharged droplet D. For example, if the volume of the droplet D is large, the dischargeable range YE becomes smaller.

  The length of the dischargeable range YE in the Y-axis direction of the discharged portion 18R is equal to or shorter than the length of the Y coordinate range EYT of the discharged portion 18R. Here, the “Y coordinate range EYT” is a range from end to end of the discharged portion 18R along the Y-axis direction. In the present embodiment, the length of the Y coordinate range EYT is equal to the length of the long side of the discharged portion 18R. The dischargeable range XE in the X-axis direction of the discharged portion 18R is also determined in the same manner as the dischargeable range YE.

  By the way, the “drawing resolution” can be expressed, for example, by a distance between two adjacent landing positions. The landing position is a position where the droplet D should land. Further, discharging the droplet D with a higher “drawing resolution” means that the droplet D is landed at a finer interval.

  The control unit 112 starts the first scanning period. Specifically, during the first scanning period, the control unit 112 changes the relative position of the ejection head unit 103 with respect to the stage 106 in the Y-axis direction from one end E1 to the other end E2 of the scanning range.

  In the present embodiment, the control unit 112 changes the relative position of the discharge nozzle 118T with respect to the stage 106 in the positive direction of the Y-axis direction (from right to left in FIG. 7A) at the relative movement speed v1. When the discharge nozzle 118T is relatively moved in the region corresponding to the discharged portion 18R, the head 114 moves from the discharge nozzle 118T according to the effective discharge period EPM (that is, the reciprocal of the effective discharge frequency EF). A droplet D of the liquid color filter material 111R is discharged. In this case, specifically, the head 114 discharges the droplet D from the discharge nozzle 118T for each effective discharge period EPM. As a result, six droplets D are discharged from one discharge nozzle 118T to each of the discharge target portions 18R. In FIG. 7A, the landing positions in the first scanning period are indicated by black circles.

  Now, in the first scanning period, the volume of the droplet D ejected by one ejection from one ejection nozzle 118T is approximately 1q picoliter. For this reason, the volume of the color filter material 111R discharged to each of the plurality of discharged portions in the first scanning period is 6q picoliter. Here, since the total volume of the volume of the color filter material 111R to be discharged to the discharged portion l8R is 10q picoliter, the color filter material 111R having a volume of 6/10 of the total volume is discharged in the first scanning period. .

  The relative movement speed of the discharge nozzle 118T with respect to the stage 106 is determined based on the drawing resolution and the effective discharge frequency EF. When the drawing resolution is 10 μm and the effective ejection frequency EF is 20 kHz, the relative movement speed V1 may be approximately 200 mm / s (that is, 20 kHz × 10 μm). Therefore, when the color filter material 111R having an effective ejection frequency EF of 20 kHz is used, if the relative movement speed V1 of the ejection device 100R is set to 200 mm / s, the ejection target 18R can be applied with a drawing resolution of 10 μm.

  As shown in FIG. 7B, the droplets D landed during the first scanning period are spread and spread from the respective landing positions. Note that the size of the circle in FIG. 7B schematically represents the size of the volume of each droplet D that has landed. For convenience of explanation, these circles are drawn so as to exceed the bank 16, but actually, the landed color filter material 111 </ b> R remains in the discharged portion 18 </ b> R surrounded by the bank 16.

  When the first scanning period ends, the control unit 112 moves the stage 106 so that the relative position of the ejection head unit 103 returns to one end E1 of the scanning range.

  During the first scanning period, the color filter material 111R having a volume of 6/10 of the total volume to be discharged is discharged to each of the plurality of discharged portions 18R. For this reason, the color filter material 111R having a volume of 4/10 may be ejected to the ejection target portion 18R in the second scanning period after the first scanning period.

(E2. Second scanning period)
In the second scanning period, the control unit 112 sets the volume of the droplet D ejected by one ejection of the ejection nozzle 118T to 2q picoliter. Here, since the remaining liquid color filter material 111R to be discharged to the discharge target portion 18R is 4q picoliter, the number of discharges to the discharge target portion 18R may be two. If the drawing resolution is shorter than 65 μm, it can be discharged twice to the discharge target portion 18R. In this embodiment, the control unit 112 sets the drawing resolution in the second scanning period to a value smaller than 65 μm of the dischargeable range and longer than the drawing resolution of 10 μm in the first scanning period. Specifically, the control unit 112 sets the drawing resolution in the second scanning period to 20 μm.

  Since the effective discharge frequency EF is 20 kHz, the relative movement speed v2 of the discharge nozzle 118T with respect to the stage 106 is 400 mm / s (that is, 20 kHz × 30 μm).

  The control unit 112 starts the second scanning period. Specifically, during the second scanning period, the control unit 112 changes the relative position of the ejection head unit 103 with respect to the stage 106 in the Y-axis direction from one end E1 to the other end E2 of the scanning range.

  In the present embodiment, the control unit 112 changes the relative position of the discharge nozzle 118T with respect to the stage 106 in the positive direction of the Y-axis direction (from right to left in FIG. 8A) at the relative movement speed v2. When the discharge nozzle 118T is relatively moved in the region corresponding to the discharged portion 18R, the head 114 moves from the discharge nozzle 118T according to the effective discharge period EPM (that is, the reciprocal of the effective discharge frequency EF). A droplet D of the liquid color filter material 111R is discharged. In this case, specifically, the head 114 discharges the droplet D from the discharge nozzle 118T for each effective discharge period EPM. As a result, two droplets D are discharged from one discharge nozzle 118T to each of the discharge target portions 18R. In FIG. 8A, the landing positions in the second scanning period are indicated by black circles. For comparison, in FIG. 8A, the landing positions in the first scanning period are indicated by white circles.

  The droplets D that have landed during the second scanning period are spread and spread from the respective landing positions as shown in FIG. 8B. Note that the size of the circle in FIG. 8B schematically represents the size of the volume of each droplet D that has landed. For convenience of explanation, these circles are drawn so as to exceed the bank 16, but actually, the landed color filter material 111 </ b> R remains in the discharged portion 18 </ b> R surrounded by the bank 16.

  In the second scanning period, the ejection head unit 103 is relatively moved from E1 to E2, but may be relatively moved from E2 to E1.

(F. Comparative example)
An example in which the relative movement speed in the second scanning period is the same as the relative movement speed v1 in the first scanning period will be described with reference to FIG. As shown in FIG. 9, if the relative moving speed in the second scanning period is also v1, the maximum number of times that the droplet D can be discharged to the discharge target 18R in the second scanning period is six. Since the volume of the color filter material 111R to be discharged in the second scanning period is 4q picoliter, if the volume discharged by one discharge is set to 0.7q picoliter or more, one discharged portion 18R. The color filter material 111R having a volume (10q picoliter) necessary for the discharge can be discharged to the discharge target portion 18R.

(G. Verification of effect)
FIG. 12 is a graph for explaining the time required for the coating process of this embodiment. The length between E1 and E2 of the scanning range (FIG. 11) is 1800 mm. Further, the range in the Y-axis direction corresponding to the matrix formed by the ejected portion 18R within the scanning range is 1600 mm. In the present embodiment, the boundaries of the range in the Y-axis direction corresponding to the matrix formed by the discharged portions 18R are denoted by E3 and E4. The distance between E1 and E3 is 100 mm. The distance between E4 and E2 is also 100 mm.

  In the case of the first scanning period, the ejection head unit 103 passes between E1 and E3 in approximately 0.5 seconds, and the relative movement speed becomes 0 to v1 from E1 to E3. And so on. On the other hand, the ejection head unit 103 passes between E4 and E2 in approximately 0.5 seconds, and moves at a constant acceleration so that the relative movement speed is changed from v1 to 0 from E4 to E2. Between E3 and E4, the ejection head 103 moves at a constant speed in the Y-axis direction with respect to the stage 106 at a relative movement speed v1 (200 mm / s). Therefore, it takes approximately 9 seconds (that is, 0.5+ (1800-100-100) /200+0.5) for the ejection head unit 103 to reach the scanning range from E1 to E2.

  In the case of the second scanning period, the ejection head unit 103 passes between E1 and E3 in approximately 0.5 seconds, and the relative movement speed is changed from 0 to v2 before reaching E1 to E3. And so on. On the other hand, the ejection head portion 103 passes between E4 and E2 in approximately 0.5 seconds, and moves at a constant acceleration so that the relative movement speed is changed from v2 to 0 from E4 to E2. Now, between E3 and E4, the ejection head 103 moves at a constant speed in the Y-axis direction with respect to the stage 106 at a relative movement speed v2 (400 mm / s). Therefore, it takes approximately 5 seconds (that is, 0.5+ (1800-100-100) /400+0.5) for the ejection head unit 103 to reach from E1 to E2 in the scanning range.

  Therefore, according to the coating process of this embodiment, the time required for the first scanning period and the second scanning period is approximately 14 seconds.

  On the other hand, as in the comparative example, the shape of the discharged portion is the same as the shape of the discharged portion 18R of the present embodiment, and the total volume of the liquid color filter material to be discharged to the discharged portion is the present embodiment. If the relative movement speed in the first scanning period and the relative movement speed in the second scanning period are the same (v2 = v1), only about 18 seconds (that is, 9 seconds × 2). I need it.

  Thus, according to the coating process of this embodiment, the time of the coating process is shortened.

(Embodiment 2)
In the first embodiment, the volume of the droplet D ejected during the first scanning period is different from the volume of the droplet D ejected during the second scanning period. However, as shown in this embodiment, the volume of the droplet D ejected in the first scanning period may be the same as the volume of the droplet D ejected in the second scanning period. Even when the volume of the droplet D is the same, when the liquid color filter material 111R is applied to the ejected portion 18R over a plurality of scanning periods, the number of ejections in one scanning period may be different from the other scanning period. If the relative movement speed in one scanning period is larger than the relative movement speed in the other scanning period, the same effect as that of the first embodiment can be obtained.

  The discharge device 100R performs a coating process according to the image data and the relative movement speed data. . In the following, when the volume of the droplet D ejected in the first scanning period and the volume of the droplet D ejected in the second scanning period are the same, the control unit 112 performs the image data and the relative movement speed. A flow for generating data will be described.

  In step S0 shown in FIG. 13, the control unit 112 starts processing. In step S1 subsequent to step S0, the minimum required drawing resolution is determined based on the shape and size of the discharged portion 18R represented by the discharge data. Then, the relative moving speed v1 in the first scanning period is determined from the determined drawing resolution. Specifically, the relative movement speed v1 is obtained by obtaining the product of the required drawing resolution and the effective ejection frequency EF. Further, if the drawing resolution in the first scanning period is determined, the number of ejections EJ1 at which the droplets D are ejected to one ejection target 18R in the first scanning period is also determined. The ejection data is given to the control unit 112 in advance from an external host computer.

  In step S3 subsequent to step S1, the difference between the total number of ejections (a value proportional to the total volume) required for one ejection target 18R and the number of ejections EJ1 is taken, so that the second scanning period. The number of ejections EJ2 required for one discharged portion 18R is derived. Next, in step S5 following step S3, it is determined whether or not the derived ejection number EJ2 is equal to or less than the ejection number EJ1 in the first scanning period. If it is determined in step S5 that the number of ejections EJ2 is equal to or less than the number of ejections EJ1 (step S5 is YES), the process proceeds to step S7. In step S7, the drawing resolution of the second scanning period is obtained according to the number of ejections EJ2 and the ejectable range YE. In step S9 following step S7, the relative movement speed v2 in the second scanning period is derived based on the derived drawing resolution and the effective ejection frequency EF.

  If it is determined in step S5 that the ejection number EJ2 is greater than the ejection number EJ1 (step S5 is NO), the process proceeds to step S11. In step S11, for the third scanning period, the number of ejections EJ3 per ejection target 18R is set to a value obtained by subtracting the number of ejections EJ1 from the number of ejections EJ2. Further, the value of the ejection number EJ1 is substituted into the ejection number EJ2 in the second scanning period. The notations “EJ3 = EJ2-EJ1” and “EJ2 = EJ1” in step S11 in FIG. 13 mean that these operations are executed in this order. It means assigning to a variable.

  In step S13 subsequent to step S11, it is determined whether or not the number of ejections EJ3 is equal to or less than the number of ejections EJ1. If the ejection number EJ3 is less than or equal to the ejection number EJ1 (step S13 is YES), the process proceeds to step S15. In step S15, the drawing resolution in the third scanning period is obtained according to the number of ejections EJ3 and the ejectable range YE. In step S17 subsequent to step S15, the relative moving speed v3 in the third scanning period is derived based on the drawing resolution in the third scanning period and the effective ejection frequency EF. In step S17, the relative movement speed in the second scanning period is set to v1.

  If it is determined in step S13 that the ejection number EJ3 is greater than the ejection number EJ1 (NO in step S13), the process proceeds to step S19. In step S19, for the fourth scanning period, the number of ejections EJ4 per ejection target 18R is set to a value obtained by subtracting the number of ejections EJ1 from the number of ejections EJ3. Further, the value of the ejection number EJ1 is substituted for the ejection number EJ3 in the third scanning period. The notations “EJ4 = EJ3−EJ1” and “EJ3 = EJ1” in step S19 in FIG. 13 mean that these operations are executed in this order. It means assigning to a variable.

  In step S21 following step S19, the drawing resolution of the fourth scanning period is obtained according to the number of ejections EJ4 and the ejectable range YE. In step S23 subsequent to step S21, the relative moving speed v4 in the fourth scanning period is derived based on the drawing resolution in the fourth scanning period and the effective ejection frequency EF. In step S23, the relative movement speed in the second scanning period and the relative movement speed in the third scanning period are set to v1.

  After step S9, step S17, or step S23, image data and relative movement speed data are created in step S25. The image data is data indicating the landing position (discharge position) for each scanning period, and the relative movement speed data is data indicating the relative movement speed for each scanning period.

  Then, in step S27 subsequent to step S25, the control unit 112 executes the application process of the ejection device 100R according to the generated image data and relative movement speed data. When the color filter material 111R is applied to all of the plurality of ejected portions 18R on the base body 10A, all the processes are finished in step S29.

  Instead of the control unit 112 in the ejection device 100R generating image data and relative movement speed data, a host computer outside the ejection device 100R generates image data and relative movement speed data according to the above-described flow. May be.

(Embodiment 3)
In the first and second embodiments, the process of applying the color filter material 111R to the discharged portion 18R has been described. Below, a series of processes until the color filter substrate 10 is obtained by the manufacturing apparatus 1 will be described.

  The manufacturing apparatus 1 shown in FIG. 14 is an apparatus that discharges a corresponding color filter material to each of the discharge target portions 18R, 18G, and 18B of the base body 10A of FIG. Specifically, the manufacturing apparatus 1 includes a discharge device 100R that applies the color filter material 111R to all of the discharged portions 18R, a drying device 150R that dries the color filter material 111R on the discharged portions 18R, and a discharged portion. 100G for applying the color filter material 111G to all of 18G, a drying device 150G for drying the color filter material 111G on the discharged portion 18G, 100B for applying the color filter material 111B to all of the discharged portions 18B, A drying device 150B that dries the color filter material 111B of the discharge unit 18B, an oven 160 that reheats (post-bake) the color filter materials 111R, 111G, and 111B, and a layer of post-baked color filter materials 111R, 111G, and 111B Discharging to provide a protective film 20 on It includes a location 100C, and the drying device 150C for drying the protective film 20, a curing device 165 which cures by heating the dried protective film 20 again, the. Further, the manufacturing apparatus 1 transports the base body 10A in the order of the ejection device 100R, the drying device 150R, the ejection device 100G, the drying device 150G, the ejection device 100B, the drying device 150B, the ejection device 100C, the drying device 150C, and the curing device 165. A device 170 is also provided. The transport device 170 includes a fork unit, a drive unit that moves the fork unit up and down, and a self-running unit.

  Since the configuration of the ejection device 100R has been described in the first embodiment, the description thereof is omitted. The configuration of the ejection device 100G, the configuration of the ejection device 100B, and the configuration of the ejection device 100C are basically the same as the configuration of the ejection device 100R. However, the configuration of the ejection device 100G is different from the configuration of the ejection device 100R in that the ejection device 100G includes a tank and a tube for the color filter material 111G instead of the tank 101R and the tube 110R in the ejection device 100R. Similarly, the configuration of the ejection device 100B is different from the configuration of the ejection device 100R in that the ejection device 100B includes a tank and a tube for the color filter material 111B instead of the tank 101R and the tube 110R. Further, the configuration of the ejection device 100C is different from the configuration of the ejection device 100R in that the ejection device 100C includes a tank and a tube for protective film material instead of the tank 101R and the tube 110R. Each of the liquid color filter materials 111R, 111G, and 111B in the present embodiment is an example of the “liquid material” in the present invention.

  First, the base body 10A of FIG. 6 is prepared according to the following procedure. First, a metal thin film is formed on the support substrate 12 by sputtering or vapor deposition. Thereafter, a lattice-like black matrix 14 is formed from the metal thin film by a photolithography process. Examples of the material of the black matrix 14 are metal chromium and chromium oxide. Note that the support substrate 12 is a substrate having optical transparency with respect to visible light, for example, a glass substrate. Subsequently, a resist layer made of a negative photosensitive resin composition is applied so as to cover the support substrate 12 and the black matrix 14. Then, the resist layer is exposed while closely contacting the mask film formed in a matrix pattern shape on the resist layer. Thereafter, the bank 16 is obtained by removing an unexposed portion of the resist layer by an etching process. The base body 10A is obtained through the above steps.

  In place of the bank 16, a bank made of resin black may be used. In that case, the metal thin film (black matrix 14) becomes unnecessary, and the bank layer is only one layer.

  Next, the substrate 10A is made lyophilic by oxygen plasma treatment under atmospheric pressure. By this processing, the surface of the support substrate 12, the surface of the black matrix 14, the surface of the bank 16, and the recesses defined by the support substrate 12, the black matrix 14, and the bank 16 (part of the pixel region) The surface becomes lyophilic. Further, thereafter, a plasma treatment using tetrafluoromethane as a treatment gas is performed on the base 10A. By the plasma treatment using tetrafluoromethane, the surface of the bank 16 in each recess is fluorinated (treated to be liquid repellent), whereby the surface of the bank 16 becomes liquid repellent. Note that the surface of the support substrate 12 and the surface of the black matrix 14 to which lyophilicity was previously imparted by plasma treatment using tetrafluoromethane slightly lose lyophilicity, but these surfaces are still lyophilic. maintain. In this way, the surface of the recess is subjected to predetermined surface treatment on the surface of the recess defined by the support substrate 12, the black matrix 14, and the bank 16, so that the surface of the recess becomes the discharged portions 18R, 18G, and 18B. Become.

  Depending on the material of the support substrate 12, the material of the black matrix 14, and the material of the bank 16, a surface exhibiting desired lyophilicity and liquid repellency can be obtained without performing the above surface treatment. There is also. In such a case, the surface of the recess defined by the support substrate 12, the black matrix 14, and the bank 16 is the discharged portions 18R, 18G, and 18B without performing the surface treatment.

  The base 10A on which the discharged portions 18R, 18G, and 18B are formed is carried to the stage 106 of the discharge device 100R by the transport device 170. Then, as shown in FIG. 15A, the ejection device 100R uses the color filter material 111R from the head 114 in accordance with ejection data so that the layer of the color filter material 111R is formed on all of the ejected portions 18R. Is discharged. More specifically, the ejection device 100R applies the color filter material 111R to each of the plurality of ejection target portions 18R by performing the application process described in the first embodiment.

  When the layer of the color filter material 111R is formed on all of the discharged portions 18R of the base 10A, the transport device 170 positions the base 10A in the drying device 150R. Then, the filter layer 111FR is obtained on the discharged portion 18R by completely drying the color filter material 111R on the discharged portion 18R.

  Next, the transport device 170 positions the base body 10A on the stage 106 of the ejection device 100G. Then, as shown in FIG. 15B, the ejection device 100G is arranged in accordance with ejection data corresponding to the ejected portion 18G so that the layer of the color filter material 111G is formed on the entire ejected portion 18G. The color filter material 111G is discharged from the head 114. More specifically, the ejection device 100G applies the color filter material 111G to each of the plurality of ejection target portions 18G by performing the application process described in the first embodiment.

  When the layer of the color filter material 111G is formed on all of the discharge target portions 18G of the base 10A, the transport device 170 positions the base 10A in the drying device 150G. Then, the filter layer 111FG is obtained on the discharged portion 18G by completely drying the color filter material 111G on the discharged portion 18G.

  Next, the transport device 170 positions the base body 10A on the stage 106 of the ejection device 100B. And as shown in FIG.15 (c), the discharge apparatus 100B respond | corresponds to the discharge data corresponding to the to-be-discharged part 18B so that the layer of the color filter material 111B may be formed in all the to-be-discharged parts 18B. The color filter material 111B is discharged from the head 114. More specifically, the ejection device 100B applies the color filter material 111B to each of the plurality of ejection target portions 18B by performing the application process described in the first embodiment.

  When the layer of the color filter material 111B is formed on all of the discharged portions 18B of the base 10A, the transport device 170 positions the base 10A in the drying device 150B. Then, the filter layer 111FB is obtained on the discharged portion 18B by completely drying the color filter material 111B on the discharged portion 18B.

  Next, the transfer device 170 positions the base body 10 </ b> A in the oven 160. Thereafter, the oven 160 reheats (post-bake) the filter layers 111FR, 111FG, and 111FB.

  Next, the transport device 170 positions the base body 10A on the stage 106 of the ejection device 100C. The ejection device 100C ejects a liquid protective film material so that the protective film 20 is formed so as to cover the filter layers 111FR, 111FG, 111FB and the bank 16. After the protective film 20 covering the filter layers 111FR, 111FG, 111FB and the bank 16 is formed, the transfer device 170 positions the base body 10A in the oven 150C. Then, after the oven 150C completely dries the protective film 20, the curing device 165 heats the protective film 20 and completely cures, whereby the base 10A becomes the color filter substrate 10.

(Embodiment 4)
Next, the example which applied this invention to the manufacturing apparatus of an electroluminescent display apparatus is demonstrated.

  A substrate 30A shown in FIGS. 16A and 16B is a substrate that becomes the electroluminescence display device 30 by processing by the manufacturing apparatus 2 (FIG. 17) described later. The base body 30A has a plurality of discharged portions 38R, 38G, and 38B arranged in a matrix.

  Specifically, the base body 30A includes a support substrate 32, a circuit element layer 34 formed on the support substrate 32, a plurality of pixel electrodes 36 formed on the circuit element layer 34, and a plurality of pixel electrodes 36. And a bank 40 formed therebetween. The support substrate is a substrate having optical transparency to visible light, for example, a glass substrate. Each of the plurality of pixel electrodes 36 is an electrode having optical transparency with respect to visible light, for example, an ITO (Indium-Tin Oxide) electrode. The plurality of pixel electrodes 36 are arranged in a matrix on the circuit element layer 34, and each define a pixel region. The bank 40 has a lattice shape and surrounds each of the plurality of pixel electrodes 36. The bank 40 includes an inorganic bank 40A formed on the circuit element layer 34 and an organic bank 40B positioned on the inorganic bank 40A.

  The circuit element layer 34 includes a plurality of scan electrodes extending in a predetermined direction on the support substrate 32, an insulating film 42 formed so as to cover the plurality of scan electrodes, and a plurality of scan electrodes positioned on the insulating film 42. A plurality of signal electrodes extending in a direction orthogonal to the direction in which the electrodes extend, a plurality of switching elements 44 located near the intersections of the scan electrodes and the signal electrodes, and polyimide formed so as to cover the plurality of switching elements 44 And an interlayer insulating film 45. The gate electrode 44G and the source electrode 44S of each switching element 44 are electrically connected to the corresponding scan electrode and the corresponding signal electrode, respectively. A plurality of pixel electrodes 36 are located on the interlayer insulating film 45. The interlayer insulating film 45 is provided with a through hole 44V at a portion corresponding to the drain electrode 44D of each switching element 44, and the switching element 44 and the corresponding pixel electrode 36 are connected via the through hole 44V. An electrical connection between them is formed. Each switching element 44 is located at a position corresponding to the bank 40. That is, when viewed from a direction perpendicular to the paper surface of FIG. 13B, each of the plurality of switching elements 44 is positioned so as to be covered by the bank 40.

  A recess (a part of the pixel region) defined by the pixel electrode 36 and the bank 40 of the base body 30A corresponds to the discharged portion 38R, the discharged portion 38G, and the discharged portion 38B. The discharged portion 38R is a region where the light emitting layer 211FR that emits light in the red wavelength region is to be formed, and the discharged portion 38G is formed with the light emitting layer 211FG that emits light in the green wavelength region. The ejected portion 38B is a region where the light emitting layer 211GB that emits light in the blue wavelength region is to be formed.

  The base body 30A shown in FIG. 16B is located on a virtual plane parallel to both the X-axis direction and the Y-axis direction. The row direction and the column direction of the matrix formed by the plurality of ejected portions 38R, 38G, and 38B are parallel to the X-axis direction and the Y-axis direction, respectively. In the base body 30A, the discharged portion 38R, the discharged portion 38G, and the discharged portion 38B are periodically arranged in this order in the X-axis direction. On the other hand, the discharged parts 38R are arranged in a line at a predetermined constant interval in the Y-axis direction, and the discharged parts 38G are arranged in a line at a predetermined fixed interval in the Y-axis direction. Similarly, the portions to be ejected 38B are arranged in a line at predetermined intervals in the Y-axis direction. Note that the planar images of the discharged portions 38R, 38G, and 38B are rectangles having a longitudinal direction.

  The manufacturing apparatus 2 shown in FIG. 17 is an apparatus that discharges a corresponding luminescent material to each of the discharged portions 38R, 38G, and 38B of the base body 30A of FIG. The manufacturing apparatus 2 includes a discharge device 200R for applying the light emitting material 211R to all of the discharged portions 38R, a drying device 250R for drying the light emitting material 211R on the discharged portions 38R, and a light emitting material 211G for all of the discharged portions 38G. , A drying device 250G for drying the light emitting material 211G on the discharged portion 38G, a discharging device 200B for applying the light emitting material 211B to all of the discharged portions 38B, and the light emission on the discharged portion 38B. A drying device 250B for drying the material B. The manufacturing apparatus 2 further includes a transport device 270 that transports the base body 30A in the order of the discharge device 200R, the drying device 250R, the discharge device 200G, the drying device 250G, the discharge device 200B, and the drying device 250B. The transport apparatus 270 includes a fork unit, a drive unit that moves the fork unit up and down, and a self-running unit.

  A discharge device 200R shown in FIG. 18 includes a tank 201R that holds a liquid light-emitting material 211R, a tube 210R, and a discharge scanning unit 102 that is supplied with the light-emitting material 211R from the tank 201R via the tube 210R. Since the configuration of the ejection scanning unit 102 is the same as the configuration of the ejection scanning unit 102 (FIG. 1) of the first embodiment, the same reference numerals are given to the same components, and redundant description is omitted. Further, the configuration of the ejection device 200G and the configuration of the ejection device 200B are both basically the same as the configuration of the ejection device 200R. However, the configuration of the ejection device 200G is different from the configuration of the ejection device 200R in that the ejection device 200G includes a tank and a tube for the light emitting material 211G instead of the tank 201R and the tube 210R. Similarly, the configuration of the ejection device 200B is different from the configuration of the ejection device 200R in that the ejection device 200B includes a tank and a tube for the light emitting material 211B instead of the tank 201R and the tube 210R. Note that the liquid light emitting materials 211R, 211B, and 211G in the present embodiment are examples of the liquid material of the present invention.

  A method for manufacturing the electroluminescence display device 30 using the manufacturing apparatus 2 will be described. First, a base 30A shown in FIG. 16 is manufactured using a known film forming technique and patterning technique.

  Next, the base 30A is made lyophilic by oxygen plasma treatment under atmospheric pressure. By this processing, the surface of the pixel electrode 36, the surface of the inorganic bank 40A, and the surface of the organic bank 40B in the respective recesses (a part of the pixel region) defined by the pixel electrode 36 and the bank 40 are made lyophilic. Present. Further, thereafter, a plasma process using tetrafluoromethane as a process gas is performed on the base 30A. By the plasma treatment using tetrafluoromethane, the surface of the organic bank 40B in each concave portion is fluorinated (treated to be liquid repellent) so that the surface of the organic bank 40B exhibits liquid repellency. Become. Note that the surface of the pixel electrode 36 and the surface of the inorganic bank 40A previously given lyophilicity by plasma treatment using tetrafluoromethane lose some lyophilicity, but still maintain lyophilicity. . As described above, the surface of the concave portion defined by the pixel electrode 36 and the bank 40 is subjected to a predetermined surface treatment, so that the surface of the concave portion becomes the discharged portions 38R, 38G, and 38B.

  Depending on the material of the pixel electrode 36, the material of the inorganic bank 40A, and the material of the organic bank 40B, a surface exhibiting desired lyophilicity and liquid repellency can be obtained without performing the above surface treatment. Sometimes. In such a case, even if the surface treatment is not performed, the surfaces of the recesses defined by the pixel electrodes 36 and the banks 40 are the discharged portions 38R, 38G, and 38B.

  Here, the corresponding hole transport layers 37R, 37G, and 37B may be formed on each of the plurality of pixel electrodes 36 subjected to the surface treatment. If the hole transport layers 37R, 37G, and 37B are positioned between the pixel electrode 36 and light emitting layers 211RF, 211GF, and 211BF, which will be described later, the light emission efficiency of the electroluminescence display device is increased. When a hole transport layer is provided on each of the plurality of pixel electrodes 36, the recesses defined by the hole transport layer and the bank 40 correspond to the discharged portions 38R, 38G, and 38B.

  Note that the hole transport layers 37R, 37G, and 37B can be formed by an inkjet method. In this case, the hole transport layer can be formed by applying a predetermined amount of a solution containing a material for forming the hole transport layers 37R, 37G, and 37B to each pixel region and then drying the solution.

  The base body 30A on which the portions to be ejected 38R, 38G, and 38B are formed is carried to the stage 106 of the ejection device 200R by the transport device 270. Then, as shown in FIG. 19A, the ejection device 200R ejects the light emitting material 211R from the head 114 according to the ejection data so that the layer of the light emitting material 211R is formed on all of the ejection target portions 38R. To do. More specifically, the ejection device 200R applies the light emitting material 211R to each of the plurality of ejection target portions 38R by performing the application process described in the first embodiment.

  When the layer of the light emitting material 211R is formed on all of the discharge target portions 38R of the base body 30A, the transport device 270 positions the base body 30A in the drying device 250R. Then, by completely drying the light emitting material 211R on the discharged portion 38R, the light emitting layer 211FR is obtained on the discharged portion 38R.

  Next, the transport device 270 positions the base body 30A on the stage 106 of the ejection device 200G. Then, as shown in FIG. 19B, the ejection device 200G has a head according to ejection data corresponding to the ejected portion 38G so that the layer of the light emitting material 211G is formed on the entire ejected portion 38G. The light emitting material 211 </ b> G is discharged from 114. More specifically, the ejection device 200G applies the light emitting material 211G to each of the plurality of ejection target portions 38G by performing the application process described in the first embodiment.

  When the layer of the light emitting material 211G is formed on all of the discharge target portions 38G of the base body 30A, the transport device 270 positions the base body 30A in the drying device 250G. Then, the light emitting material 211G on the portion to be discharged 38G is completely dried to obtain the light emitting layer 211FG on the portion to be discharged 38G.

  Next, the transport device 270 positions the base body 30A on the stage 106 of the ejection device 200B. Then, as shown in FIG. 19C, the ejection device 200B has a head according to ejection data corresponding to the ejection target part 38B so that the layer of the light emitting material 211B is formed on the entire ejection target part 38B. The light emitting material 211 </ b> B is discharged from 114. More specifically, the ejection device 200B applies the light emitting material 211B to each of the plurality of ejection target portions 38B by performing the application process described in the first embodiment.

  When the layer of the light emitting material 211B is formed on all of the discharged portions 38B of the base body 30A, the transport device 270 positions the base body 30A in the drying device 250B. Then, by completely drying the light emitting material 211B on the discharged portion 38B, the light emitting layer 211FB is obtained on the discharged portion 38B.

  Next, as shown in FIG. 19D, the counter electrode 46 is provided so as to cover the light emitting layers 211FR, 211FG, 211FB and the bank 40. The counter electrode 46 functions as a cathode. Then, the electroluminescent display apparatus 30 shown in FIG.19 (d) is obtained by adhere | attaching the sealing substrate 48 and the base | substrate 30A in a mutual peripheral part. An inert gas 49 is enclosed between the sealing substrate 48 and the base body 30A.

  In the electroluminescence display device 30, light emitted from the light emitting layers 211 FR, 211 FG, and 211 FB is emitted through the pixel electrode 36, the circuit element layer 34, and the support substrate 32. The electroluminescence display device that emits light through the circuit element layer 34 in this manner is called a bottom emission type display device.

(Embodiment 5)
An example in which the present invention is applied to an apparatus for manufacturing a back substrate of a plasma display device will be described.

  A substrate 50A shown in FIGS. 20A and 20B is a substrate that becomes the back substrate 50B of the plasma display device by processing by the manufacturing apparatus 3 (FIG. 21) described later. The base 50A has a plurality of discharged portions 58R, 58G, 58B arranged in a matrix.

  Specifically, the base 50A includes a support substrate 52, a plurality of address electrodes 54 formed in a stripe shape on the support substrate 52, a dielectric glass layer 56 formed so as to cover the address electrodes 54, a lattice And a partition wall 60 having a shape and defining a plurality of pixel regions. The plurality of pixel regions are located in a matrix, and each column of the matrix formed by the plurality of pixel regions corresponds to each of the plurality of address electrodes 54. Such a base 50A is formed by a known screen printing technique.

  In each pixel region of the substrate 50A, the recesses defined by the dielectric glass layer 56 and the partition wall 60 correspond to the discharged portion 58R, the discharged portion 58G, and the discharged portion 58B. The discharged portion 58R is a region where a fluorescent layer 311FR that emits light in the red wavelength region is to be formed, and the discharged portion 58G is formed with a fluorescent layer 311FG that emits light in the green wavelength region. The ejected portion 58B is a region where the fluorescent layer 311FB that emits light in the blue wavelength region is to be formed.

  The base body 50A shown in FIG. 20B is located on a virtual plane parallel to both the X-axis direction and the Y-axis direction. The row direction and the column direction of the matrix formed by the plurality of discharged portions 58R, 58G, and 58B are parallel to the X-axis direction and the Y-axis direction, respectively. In the base body 50A, the discharged portion 58R, the discharged portion 58G, and the discharged portion 58B are periodically arranged in this order in the X-axis direction. On the other hand, the discharged parts 58R are arranged in a line at a predetermined constant interval in the Y-axis direction, and the discharged parts 58G are arranged in a line at a predetermined fixed interval in the Y-axis direction. Similarly, the portions to be ejected 58B are arranged in a line at a predetermined constant interval in the Y-axis direction. The planar images of the discharged portions 58R, 58G, and 58B are rectangles having a longitudinal direction.

  The manufacturing apparatus 3 shown in FIG. 21 is an apparatus that discharges a corresponding fluorescent material to each of the discharged portions 58R, 58G, and 58B of the base body 50A of FIG. The manufacturing apparatus 3 includes a discharge device 300R that applies the fluorescent material 311R to all of the discharged portions 58R, a drying device 350R that dries the fluorescent material 311R on the discharged portions 58R, and a fluorescent material 311G for all of the discharged portions 58G. , A drying device 350G for drying the fluorescent material 311G on the discharged portion 58G, a discharging device 300B for applying the fluorescent material 311B to all of the discharged portions 58B, and a fluorescent light on the discharged portion 58B. And a drying device 350B that dries the material 311B. The manufacturing apparatus 3 further includes a transport device 370 that transports the base body 50A in the order of the discharge device 300R, the drying device 350R, the discharge device 300G, the drying device 350G, the discharge device 300B, and the drying device 350B. The transport device 370 includes a fork unit, a drive unit that moves the fork unit up and down, and a self-running unit.

  A discharge device 300R illustrated in FIG. 22 includes a tank 301R that holds a liquid fluorescent material 311R, a tube 310R, and a discharge scanning unit 102 that is supplied with a color filter material from the tank 301R via the tube 310R. Since the configuration of the ejection scanning unit 102 has been described in the first embodiment, a duplicate description is omitted.

  Both the configuration of the ejection device 300G and the configuration of the ejection device 300B are basically the same as the configuration of the ejection device 300R. However, the configuration of the ejection device 300G is different from the configuration of the ejection device 300R in that the ejection device 300G includes a tank and a tube for the fluorescent material 311G instead of the tank 301R and the tube 310R. Similarly, the configuration of the ejection device 300B is different from the configuration of the ejection device 300R in that the ejection device 300B includes a tank and a tube for the fluorescent material 311B instead of the tank 301R and the tube 310R. The liquid fluorescent materials 311R, 311B, and 311G in the present embodiment are a kind of light emitting material and correspond to the “liquid material” of the present invention.

  A method for manufacturing a plasma display device using the manufacturing apparatus 3 will be described. First, a plurality of address electrodes 54, a dielectric glass layer 56, and a partition wall 60 are formed on a support substrate 52 by a known screen printing technique to obtain a base body 50A shown in FIG.

  Next, the base 50A is made lyophilic by oxygen plasma treatment under atmospheric pressure. By this treatment, the surface of the partition wall 60 and the surface of the dielectric glass layer 56 in the respective recesses (a part of the pixel region) defined by the partition wall 60 and the dielectric glass layer 56 exhibit lyophilic properties. Becomes the discharged portions 58R, 58G, and 58B. Depending on the material, a surface having a desired lyophilic property may be obtained without performing the surface treatment as described above. In such a case, even if the surface treatment is not performed, the surfaces of the recesses defined by the partition wall 60 and the dielectric glass layer 56 are the discharged portions 58R, 58G, and 58B.

  The base body 50A on which the discharged portions 58R, 58G, and 58B are formed is carried to the stage 106 of the discharge device 300R by the transport device 370. Then, as shown in FIG. 23A, the ejection device 300R ejects the fluorescent material 311R from the head 114 according to the ejection data so that the fluorescent material 311R layer is formed on all of the ejected portions 58R. To do. More specifically, the ejection device 300R applies the fluorescent material 311R to each of the plurality of ejection target portions 58R by performing the application process described in the first embodiment.

  When the fluorescent material 311R layer is formed on all of the discharged portions 58R of the base body 50A, the transport device 370 positions the base body 50A in the drying device 350R. Then, the fluorescent material 311R on the discharged portion 58R is completely dried to obtain the fluorescent layer 311FR on the discharged portion 58R.

  Next, the transport device 370 positions the base body 50A on the stage 106 of the ejection device 300G. Then, as shown in FIG. 23B, the ejection device 300G has a head according to ejection data corresponding to the ejection target 58G so that a layer of the fluorescent material 311G is formed on the entire ejection target 58G. The fluorescent material 311G is discharged from 114. More specifically, the ejection device 300G applies the fluorescent material 311G to each of the plurality of ejection target portions 58G by performing the application process described in the first embodiment.

  When the fluorescent material 311G layer is formed on all of the discharged portions 58G of the base body 50A, the transport device 370 positions the base body 50A in the drying device 350G. Then, the fluorescent material 311G on the discharged portion 58G is completely dried to obtain the fluorescent layer 311FG on the discharged portion 58G.

  Next, the transport device 370 positions the base body 50A on the stage 106 of the ejection device 300B. Then, as shown in FIG. 23 (c), the ejection device 300B has a head according to ejection data corresponding to the ejection target 58B so that a layer of the fluorescent material 311B is formed on the entire ejection target 58B. The fluorescent material 311B is discharged from 114. More specifically, the ejection device 300B applies the fluorescent material 311B to each of the plurality of ejection target portions 58B by performing the application process described in the first embodiment.

  When the fluorescent material B layer is formed on all of the discharged portions 58B of the base body 50A, the transport device 370 positions the base body 50A in the drying device 350B. Then, the fluorescent material 311B on the discharged portion 58B is completely dried to obtain the fluorescent layer 311FB on the discharged portion 58B.

  Through the above steps, the substrate 50A becomes the back substrate 50B of the plasma display device.

  Next, as shown in FIG. 24, the back substrate 50B and the front substrate 50C are bonded together by a known method to obtain the plasma display device 50. The front substrate 50C is a dielectric glass formed so as to cover the glass substrate 68, the display electrode 66A and the display scan electrode 66B patterned in parallel with each other on the glass substrate 68, and the display electrode 66A and the display scan electrode 66B. A layer 64 and a MgO protective layer 62 formed on the dielectric glass layer 64. The back substrate 50B and the front substrate 50C are aligned so that the address electrodes 54 of the back substrate 50B and the display electrodes 66A and the display scan electrodes 66B of the front substrate 50C are orthogonal to each other. A discharge gas 69 is sealed at a predetermined pressure in a cell (pixel region) surrounded by each partition wall 60.

(Embodiment 6)
Next, an example in which the present invention is applied to an apparatus for manufacturing an image display device including an electron-emitting device will be described.

  A base 70A shown in FIGS. 25A and 25B is a substrate that becomes an electron source substrate 70B of the image display device by processing by the manufacturing apparatus 3 (FIG. 26) described later. The base body 70A has a plurality of discharged portions 78 arranged in a matrix.

  Specifically, the base body 70A includes a base body 72, a sodium diffusion prevention layer 74 located on the base body 72, a plurality of element electrodes 76A and 76B located on the sodium diffusion prevention layer 74, and a plurality of element electrodes 76A. And a plurality of metal wirings 79B positioned on the plurality of element electrodes 76B. Each of the plurality of metal wirings 79A has a shape extending in the Y-axis direction. On the other hand, each of the plurality of metal wirings 79B has a shape extending in the X-axis direction. Since the insulating film 75 is formed between the metal wiring 79A and the metal wiring 79B, the metal wiring 79A and the metal wiring 79B are electrically insulated.

  A portion including the pair of element electrode 76A and element electrode 76B corresponds to one pixel region. The pair of element electrode 76A and element electrode 76B are opposed to each other on the sodium diffusion preventing layer 74 with a predetermined distance therebetween. The element electrode 76A corresponding to a certain pixel region is electrically connected to the corresponding metal wiring 79A. The element electrode 76B corresponding to the pixel region is electrically connected to the corresponding metal wiring 79B. In the present specification, a portion where the base 72 and the sodium diffusion preventing layer 74 are combined may be referred to as a support substrate.

  In each pixel region of the base body 70A, a part of the element electrode 76A, a part of the element electrode 76B, and the sodium diffusion prevention layer 74 exposed between the element electrode 76A and the element electrode 76B are discharged parts 78. Corresponding to More specifically, the discharged portion 78 is a region where the conductive thin film 411F (FIG. 29) is to be formed. The conductive thin film 411F includes a part of the element electrode 76A and a part of the element electrode 76B. , So as to cover the gap between the device electrodes 76A and 76B. As shown by a dotted line in FIG. 25B, the planar shape of the discharged portion 78 in this embodiment is a circle. As described above, the planar shape of the discharged portion of the present invention may be a circle determined by the X coordinate range and the Y coordinate range.

  The base 70A shown in FIG. 25B is located on a virtual plane parallel to both the X-axis direction and the Y-axis direction. The row direction and the column direction of the matrix formed by the plurality of discharged portions 78 are parallel to the X-axis direction and the Y-axis direction, respectively. That is, in the base body 70A, the plurality of discharged portions 78 are arranged in the X-axis direction and the Y-axis direction. Note that the X-axis direction and the Y-axis direction are orthogonal to each other.

  An interval L, that is, a pitch, along the X-axis direction between the portions to be ejected 78 is approximately 190 μm. Further, the length of the discharged portion 78R in the X-axis direction (the length of the X coordinate range) is approximately 100 μm, and the length in the Y-axis direction (the length of the Y coordinate range) is also approximately 100 μm.

  The manufacturing apparatus 4 shown in FIG. 26 is an apparatus that discharges the conductive thin film material 411 to each of the discharged portions 78 of the base body 70A of FIG. Specifically, the manufacturing apparatus 4 includes a discharge device 400 that applies the conductive thin film material 411 to all of the discharged portions 78, and a drying device 450 that dries the conductive thin film material 411 on the discharged portions 78. I have. The manufacturing apparatus 4 further includes a transport device 470 that transports the base body 70A in the order of the discharge device 400 and the drying device 450. The conveyance device 470 includes a fork unit, a drive unit that moves the fork unit up and down, and a self-running unit.

  27 includes a tank 401 that holds a liquid conductive thin film material 411, a tube 410, and a discharge scanning unit 102 that is supplied with the conductive thin film material 411 from the tank 401 via the tube 410. Is provided. The description of the discharge scanning unit 102 is omitted because it has been described in the first embodiment. In the present embodiment, the liquid conductive thin film material 411 is an organic palladium solution. The liquid conductive thin film material 411 in the present embodiment is an example of the “liquid material” in the present invention.

A method for manufacturing an image display apparatus using the manufacturing apparatus 4 will be described. First, a sodium diffusion prevention layer 74 containing SiO ₂ as a main component is formed on a base 72 made of soda glass or the like. Specifically, the sodium diffusion preventing layer 74 is obtained by forming a 1 μm thick SiO ₂ film on the substrate 72 by sputtering. Next, a titanium layer having a thickness of 5 nm is formed on the sodium diffusion preventing layer 74 by sputtering or vacuum deposition. Then, using the photolithography technique and the etching technique, a plurality of pairs of the element electrode 76A and the element electrode 76B that are located at a predetermined distance from the titanium layer are formed.

  Thereafter, using a screen printing technique, Ag paste is applied onto the sodium diffusion prevention layer 74 and the plurality of element electrodes 76A and baked, thereby forming a plurality of metal wirings 79A extending in the Y-axis direction. Next, the insulating film 75 is formed by applying a glass paste to a part of each metal wiring 79A and baking it using a screen printing technique. Then, a plurality of metal wirings 79B extending in the X-axis direction are formed by applying an Ag paste on the sodium diffusion preventing layer 74 and the plurality of element electrodes 76B and baking using a screen printing technique. When the metal wiring 79B is manufactured, an Ag paste is applied so that the metal wiring 79B intersects the metal wiring 79A with the insulating film 75 interposed therebetween. The base body 70A shown in FIG. 25 is obtained by the process as described above.

  Next, the substrate 70A is made lyophilic by oxygen plasma treatment under atmospheric pressure. By this treatment, a part of the surface of the element electrode 76A, a part of the surface of the element electrode 76B, and the surface of the support substrate exposed between the element electrode 76A and the element electrode 76B are made lyophilic. These surfaces become the discharged parts 78. Depending on the material, a surface having a desired lyophilic property may be obtained without performing the surface treatment as described above. In such a case, even if the surface treatment is not performed, a part of the surface of the element electrode 76A, a part of the surface of the element electrode 76B, and the sodium exposed between the element electrode 76A and the element electrode 76B. The surface of the diffusion preventing layer 74 becomes the discharged portion 78.

  The base 70 </ b> A on which the portion to be ejected 78 is formed is carried to the stage 106 of the ejection device 400 by the transport device 470. Then, as shown in FIG. 28, the discharge device 400 includes a conductive thin film from the head 114 in accordance with the discharge data described in the first embodiment so that the conductive thin film 411F is formed on all of the discharged portions 78. The material 411 is discharged. More specifically, the discharge device 400 applies the conductive thin film material 411 to each of the plurality of discharged portions 78 by performing the application process described in the first embodiment.

  Further, in this embodiment, the control unit 112 gives a signal to the head 114 so that the diameter of the droplet of the conductive thin film material 411 landed on the discharged portion 78 is in the range of 60 μm to 80 μm. When the layer of the conductive thin film material 411 is formed on all of the discharged portions 78 of the base body 70A, the transfer device 470 positions the base body 70A in the drying device 450. Then, the conductive thin film material 411 on the discharged portion 78 is completely dried, so that the conductive thin film 411F containing palladium oxide as a main component is obtained on the discharged portion 78. As described above, in each pixel region, the conductivity covering a part of the element electrode 76A, a part of the element electrode 76B, and the sodium diffusion preventing layer 74 exposed between the element electrode 76A and the element electrode 76B. A thin film 411F is formed.

  Next, an electron emission portion 411D is formed in a part of the conductive thin film 411F by applying a predetermined pulse voltage between the element electrode 76A and the element electrode 76B. Note that it is preferable to apply a voltage between the element electrode 76A and the element electrode 76B under an organic atmosphere and under vacuum conditions, respectively. This is because the electron emission efficiency from the electron emission portion 411D is further increased. The element electrode 76A, the corresponding element electrode 76B, and the conductive thin film 411F provided with the electron emission portion 411D are electron emission elements. Each electron-emitting device corresponds to each pixel region.

  Through the above steps, the base body 70A becomes the electron source substrate 70B as shown in FIG.

  Next, as shown in FIG. 30, the image display device 70 is obtained by bonding the electron source substrate 70 </ b> B and the front substrate 70 </ b> C by a known method. The front substrate 70 </ b> C includes a glass substrate 82, a plurality of fluorescent portions 84 positioned in a matrix on the glass substrate 82, and a metal plate 86 that covers the plurality of fluorescent portions 84. The metal plate 86 functions as an electrode for accelerating the electron beam from the electron emission portion 411D. The electron source substrate 70B and the front substrate 70C are aligned such that each of the plurality of electron-emitting devices faces each of the plurality of fluorescent portions 84. Further, a vacuum state is maintained between the electron source substrate 70B and the front substrate 70C.

  Note that the image display device 70 including the above-described electron-emitting device may be referred to as SED (Surface-Conduction Electron-Emitter Display) or FED (Field Emission Display). In this specification, a liquid crystal display device, an electroluminescence display device, a plasma display device, an image display device using an electron-emitting device, and the like may be referred to as “electro-optical devices”. Here, the “electro-optical device” used in the present specification utilizes a change in optical characteristics (so-called electro-optical effect) such as a change in birefringence, a change in optical rotation, or a change in light scattering. The present invention is not limited to a device, and refers to any device that emits, transmits, or reflects light in response to application of a signal voltage.

FIG. 2 is a schematic diagram illustrating a discharge device according to the first embodiment. FIG. 3 is a schematic diagram illustrating an arrangement of nozzles in the head according to the first embodiment. (A) And (b) is a schematic diagram which shows the discharge part in the head of Embodiment 1. FIG. FIG. 3 is a functional block diagram of a control unit in the ejection device according to the first embodiment. (A) And (b) is a schematic diagram of the head drive part in the discharge apparatus of Embodiments 1-6. FIG. 2A is a schematic diagram illustrating a cross section of a base body according to Embodiment 1, and FIG. 2B is a schematic diagram illustrating an upper surface of the base body according to Embodiment 1. (A) And (b) is a figure explaining the application | coating process of Embodiment 1. FIG. (A) And (b) is a figure explaining the application | coating process of Embodiment 1. FIG. The figure explaining the application | coating process of a comparative example. FIG. 3 is a diagram illustrating a dischargeable range of the first embodiment. FIG. 3 is a schematic diagram illustrating a scanning period and a scanning range according to the first embodiment. FIG. 3 is a schematic diagram illustrating a relative movement speed according to the first embodiment. The figure which shows the flow which produces | generates the image data and relative movement speed data of Embodiment 2. FIG. FIG. 6 is a schematic diagram illustrating a color filter substrate manufacturing apparatus according to a third embodiment. FIG. 6 is a diagram for explaining a method for manufacturing a color filter substrate according to a third embodiment. (A) is a schematic diagram which shows the cross section of the base | substrate of Embodiment 4, (b) is a schematic diagram which shows the upper surface of the base | substrate of Embodiment 4. FIG. FIG. 6 is a schematic diagram illustrating a manufacturing apparatus for an electroluminescence display device according to a fourth embodiment. FIG. 6 is a schematic diagram illustrating a discharge device according to a fourth embodiment. 6A and 6B illustrate a method for manufacturing the electroluminescence display device according to the fourth embodiment. (A) is a schematic diagram which shows the cross section of the base | substrate of Embodiment 5, (b) is a schematic diagram which shows the upper surface of the base | substrate of Embodiment 5. FIG. FIG. 6 is a schematic diagram illustrating a plasma display device manufacturing apparatus according to a fifth embodiment. FIG. 6 is a schematic diagram illustrating a discharge device according to a fifth embodiment. FIG. 6 is a view for explaining a manufacturing method of a plasma display device according to a fifth embodiment. FIG. 6 is a schematic view showing a cross section of a plasma display device manufactured by the manufacturing method of Embodiment 5. (A) is a schematic diagram which shows the cross section of the base | substrate of Embodiment 6, (b) is a schematic diagram which shows the upper surface of Embodiment 6. FIG. FIG. 7 is a schematic diagram illustrating a display device manufacturing apparatus according to a sixth embodiment. FIG. 10 is a schematic diagram illustrating a discharge device according to a sixth embodiment. 8A and 8B illustrate a method for manufacturing a display device according to a sixth embodiment. 8A and 8B illustrate a method for manufacturing a display device according to a sixth embodiment. FIG. 10 is a schematic view showing a cross section of a display device manufactured by the manufacturing method of Embodiment 6.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10A ... Base | substrate 10 ... Color filter board | substrate, 18R, 18G, 18B ... Discharge part, 100R, 100G, 100B ... Discharge apparatus, 102 ... Discharge scanning part, 103 ... Discharge head, 104 ... 1st position control apparatus, 106 ... Stage 108, second position control device, 110, tube, 110R, tube, 111R, color filter material, 112, control unit, 114, head, 116, nozzle row, 118, nozzle.

Claims (7)

A material application method for applying the liquid material to the discharged portion of the substrate using a discharge device comprising a stage for placing the substrate and a head for discharging a liquid material from a nozzle,
(A) discharging the liquid material from the nozzle to the discharged portion while changing the relative position of the nozzle to the discharged portion at a first speed;
(B) discharging the liquid material from the nozzle to the discharged portion while changing the relative position of the nozzle with respect to the discharged portion at a second speed higher than the first speed;
A material application method including The material application method according to claim 1,
The step (A) is a step (A1) of discharging the liquid material from the nozzle to the discharge target portion according to a predetermined cycle while changing the relative position of the nozzle with respect to the discharge target portion at the first speed. )
The step (B) is a step of discharging the liquid material from the nozzle to the discharge target portion according to the predetermined period while changing the relative position of the nozzle to the discharge target portion at the second speed ( Including B1),
Material application method. The material application method according to claim 1,
In the step (A), while changing the relative position of the nozzle with respect to the discharge target portion at the first speed, the liquid material is discharged from the nozzle to the discharge target portion at a first volume. Only discharging (A2),
In the step (B), while changing the relative position of the nozzle with respect to the discharge target portion at the second speed, the liquid material is discharged from the nozzle to the discharge target portion at a first volume. Discharging a larger second volume (B2),
Material application method. A method for producing a color filter substrate using a discharge device comprising a stage on which a substrate having a discharge target portion is placed and a head for discharging a liquid color filter material from a nozzle,
(A) discharging the liquid color filter material from the nozzle to the discharged portion while changing the relative position of the nozzle to the discharged portion at a first speed;
(B) discharging the liquid color filter material from the nozzle to the discharged portion while changing the relative position of the nozzle with respect to the discharged portion at a second speed higher than the first speed;
Of manufacturing a color filter substrate including A method of manufacturing an electroluminescence display device using a discharge device including a stage on which a substrate having a discharge target portion is placed, and a head that discharges a liquid luminescent material from a nozzle,
(A) discharging the liquid luminescent material from the nozzle to the discharged portion while changing the relative position of the nozzle to the discharged portion at a first speed;
(B) discharging the liquid luminescent material from the nozzle to the discharged portion while changing the relative position of the nozzle to the discharged portion at a second speed higher than the first speed;
A method for manufacturing an electroluminescence display device comprising: A method of manufacturing a plasma display device using a discharge device including a stage on which a substrate having a discharge target portion is placed, and a head that discharges a liquid luminescent material from a nozzle,
(A) discharging the liquid fluorescent material from the nozzle to the discharged portion while changing the relative position of the nozzle to the discharged portion at a first speed;
(B) discharging the liquid fluorescent material from the nozzle to the discharged portion while changing the relative position of the nozzle with respect to the discharged portion at a second speed higher than the first speed;
Of manufacturing a plasma display device including A stage on which a substrate having a discharged portion is placed;
A head for discharging a liquid material from a nozzle;
A scanning unit that changes a relative position of the nozzle with respect to the discharge target unit;
A discharge device comprising:
In the first scanning period, the scanning unit changes the relative position of the nozzle with respect to the ejection target at a first speed, and in the second scanning period, the scanning unit performs the nozzle relative to the ejection target. Is changed at a second speed higher than the first speed.
Discharge device.

Images