JP2005279473A - Washing apparatus and washing method for adsorption filter - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a washing apparatus for an adsorption filter which permits man-power saving from the aspect of energy cost and makes it possible to save a useless washing time by performing washing while selecting the density of supercritical or subcritical fluid. <P>SOLUTION: The washing apparatus for the adsorption filter is provided with a washing tub 16 that houses and washes the adsorption filter and a controller 26 that controls temperature and pressure of fluid so that the density of the supercritical fluid or subcritical fluid allowed to flow through the adsorption filter in the washing tub 16 falls into the prescribed range upon the washing. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention selects a fluid density condition that provides the most efficient cleaning when flowing a supercritical or subcritical fluid and cleans an object to be cleaned, and sets the pressure and temperature so as to satisfy the fluid density condition. The present invention relates to a cleaning apparatus and a cleaning method for controlling an object to be cleaned in an optimal time under the fluid density condition, and particularly to a cleaning apparatus and a cleaning method suitable for an adsorption filter as an object to be cleaned. is there.

  An adsorption filter is a filter that physically or chemically adsorbs chemical substances in the air or liquid by supporting an adsorbent such as activated carbon or attaching a reactant such as sulfuric acid. Includes a sorption action inside the adsorbent. In a clean room such as a semiconductor manufacturing factory, a product is defective even if low concentrations of acidic gaseous pollutants, basic gaseous pollutants, and gaseous organic pollutants are present in the air. For this reason, the concentration of gaseous pollutants in the clean room is always controlled to several ppb or less by using the adsorption filter. Moreover, in a pure water apparatus or a water purifier, impurities in water are removed by an adsorption filter.

  In general, the adsorption filter accumulates dirt or the adsorption amount is saturated within a few months to one year under normal use conditions, and therefore needs to be periodically replaced. However, since the adsorption filter is made of a non-combustible material, when it is discarded, it becomes industrial waste, which is not preferable in terms of environmental load. Therefore, if the exchanged adsorption filter can be reused, the amount of industrial waste generated can be reduced and the running cost can be reduced.

  Up to now, as a regeneration technique of the adsorption filter, a technique of heating to 200 ° C. or higher in order to desorb an adsorbed substance adsorbed in the back of the pores of the adsorbent or to reliably remove the cleaning liquid, or a cation exchange filter A technique for bringing a material and an anion exchange filter material into contact with an acidic and alkaline aqueous solution (see, for example, Patent Document 1) is known. In addition, the step of washing the used adsorption filter with water, the addition of an adsorbing solution obtained by diluting a water-soluble acidic reactant or water-soluble alkaline reactant to the adsorption filter with water or a volatile liquid, and the adsorbing solution attached to the adsorption filter An adsorption filter regeneration method (for example, refer to Patent Document 2) having a step of alternately repeating the drying of a plurality of times is proposed. However, the conventional adsorption filter regeneration technology has many processes, wastes cost and energy, and has a problem in terms of cost effectiveness.

  By the way, there is a cleaning method using a fluid in a supercritical state or a subcritical state as a method excellent in cleaning a fine structure with a cleaning solvent other than a liquid such as water.

  The supercritical state is a state where no liquid is formed no matter how much pressure is applied. Supercritical fluids have values for viscosity, diffusion coefficient, density, and dissolving power that are intermediate between those of gas and liquid, the density is close to that of liquid, and its viscosity behaves like gas. It has the characteristic that it is excellent in nature. Furthermore, it is excellent in mass transfer because of its high diffusivity. In addition, the supercritical fluid has a feature that a large density change can be obtained with a slight pressure or temperature change. In general, since the solubility of a substance is proportional to the density, a supercritical fluid can obtain a large difference in solubility depending on pressure and temperature, and has an excellent advantage as a cleaning solvent.

Cleaning using a supercritical fluid is superior to conventional wet cleaning, and is superior in cleaning effects on fine objects, does not require drying after cleaning, can be processed in a short time, and does not emit waste liquid by vaporization. The advantages are very great, such as the ability to freely control the dissolving power by adding additives and low running costs. So far, this type of cleaning method includes immersing the object to be cleaned in the supercritical fluid and dissolving the contaminants in the fluid, or circulating the supercritical fluid without using power. A cleaning method (for example, see Patent Documents 3 to 5) has been proposed.
Japanese Patent Laid-Open No. 10-118431 JP 2000-254421 A Japanese Patent Laid-Open No. 10-94766 JP-A-10-163152 JP 2000-153244 A

  In cleaning using a supercritical or subcritical fluid, energy is required for heating / pressurizing to a supercritical or subcritical state, cooling after cleaning, and it takes time to discharge the fluid and objects to be cleaned after cleaning. In addition, there are restrictions such as processing in a sealed cleaning tank, and there is room for further improvement in terms of reduction of energy costs and reduction of required time.

  In cleaning using a supercritical or subcritical fluid, the cleaning conditions (fluid temperature, pressure, flow rate) of the object to be cleaned are very important parameters. This is because the cleaning performance of an object to be cleaned is greatly influenced by such conditions. In general, it is said that the density of the supercritical fluid determined by the pressure and temperature conditions is proportional to the solubility of the substance, but the optimum density is determined especially when cleaning the object to be cleaned using the supercritical fluid. Not. It also shows how much cleaning time can be taken in an optimal density condition depending on the amount of objects to be cleaned and the flow rate of supercritical or subcritical fluid used for cleaning. Not. For these reasons, there is a problem that unnecessary energy and cleaning time are generated by setting unnecessary cleaning conditions.

  The present invention has been made in view of the above circumstances, and selects a fluid density condition that provides the most efficient cleaning when flowing the supercritical or subcritical fluid to clean the adsorption filter. By controlling the pressure and temperature so as to satisfy the conditions, energy costs can be reduced and labor can be saved, and the adsorption filter can be optimized according to the weight of the adsorption filter and the fluid flow rate under the fluid density conditions. It is an object of the present invention to provide an adsorption filter cleaning device and a cleaning method that can eliminate useless cleaning time by cleaning in a short time.

  In order to achieve the above object, the present invention provides an adsorption filter cleaning apparatus for cleaning an adsorption filter using a supercritical or subcritical fluid, the cleaning tank containing and cleaning the adsorption filter, and the adsorption in the cleaning tank And a control device for controlling the temperature and pressure of the fluid so that the density of the supercritical or subcritical fluid passed through the filter falls within a predetermined range during cleaning.

  The present invention also relates to an adsorption filter cleaning method for cleaning an adsorption filter using a supercritical or subcritical fluid, wherein the fluid density of the supercritical or subcritical fluid flowing through the adsorption filter in the cleaning tank is within a predetermined range. It is controlled.

  According to the present invention, when cleaning the adsorption filter by passing a supercritical or subcritical fluid, the fluid density condition that provides the most efficient cleaning is selected, and the pressure / temperature is set to satisfy the fluid density condition. By performing cleaning while controlling the energy consumption, it is possible to reduce energy costs and save labor, and it is possible to save unnecessary cleaning time by cleaning the adsorption filter in an optimal time under the fluid density conditions.

  In addition, by providing a pollutant concentration measuring means downstream of the washing tank that cleans the adsorption filter, it is possible to constantly monitor the concentration of pollutants discharged from the washing tank. It is possible to clean the adsorption filter with a simple cleaning time.

  Embodiments of the present invention will be described below in detail with reference to the drawings. In the present embodiment, supercritical carbon dioxide will be described as an example of a fluid to be passed through an adsorption filter that is an object to be cleaned.

  FIG. 1 shows a basic configuration example of an adsorption filter cleaning device according to an embodiment of the present invention. 11 is a cylinder for supplying carbon dioxide (carbon dioxide supply device), 12 is a shut valve, 13 is a compressor (pressure feeding device for carbon dioxide), 14 is a heater (heating device), and 15 is a cooler (cooling device). , 16 is a washing tank, 17 is a pressure control valve, 18 is a separation filter for removing contaminants in carbon dioxide, 191 to 195 are pipes for passing carbon dioxide, 20 is a pipe for circulating and supplying carbon dioxide, 21 is a thermometer that detects the fluid temperature in the cleaning tank, 22 is a pressure gauge that detects the fluid pressure in the cleaning tank, 23 is a thermometer that detects the fluid temperature in the pipe 194, and 24 is the fluid pressure in the pipe 194. , 25 is a flow meter for detecting the fluid flow rate in the pipe 191, 26 is a cleaning device controller, 27 is a gas chromatograph (contaminant concentration measuring means), and 28 is an on-off valve.

  The adsorption filter is housed and fixed in the cleaning tank 16. The heater 14 and the cooler 15 function as a temperature adjusting device that adjusts the fluid temperature, and the compressor 13 and the pressure control valve 17 function as a pressure adjusting device that adjusts the fluid pressure.

  FIG. 2 is a flowchart showing a cleaning process of the adsorption filter cleaning device according to the embodiment of the present invention. The process is described in detail below.

(1) Fluid Filling Process A method for supplying carbon dioxide to the cleaning tank 16 holding the adsorption filter will be described.

  First, an adsorption filter is introduced and held in the cleaning tank 16 (step S11). Next, the shut valve 12 is opened (step S12), and liquefied carbon dioxide from the cylinder 11 is introduced into the pipe 191 in a liquid state. The heating switch of the heater 14 is turned on (step S13), the temperature of the liquefied carbon dioxide introduced into the pipe 191 by the heater 14 is increased, and the carbon dioxide is changed from a liquid to a gas state. The details of the adsorption filter held in the cleaning tank 16 are introduced by introducing carbon dioxide, which has been made into a gas state by the heater 14, into the cleaning tank 16 from the pipe 192 through the compressor 13 and adjusting the opening of the pressure control valve 17. Gas carbon dioxide is filled (step S14). The gaseous carbon dioxide discharged from the cleaning tank 16 through the pressure control valve 17 is sent to the cooler 15 from the pipe 193, and the cooler 15 is turned on (step S15). The carbon dioxide returned from the gaseous state to the liquid state by the cooling operation and returned to the liquid state by the cooler 15 is discharged from the pipe 195 via the pipe 194 and the separation filter 18 or circulated from the pipe 20 and recirculated. Used. Here, the heating operation of the heater 14 and the cooling operation of the cooler 15 are performed with reference to the actual measurement value of the thermometer of the cleaning tank 16.

(2) Boosting / Temperature Process Next, a method for shifting the gas in the cleaning tank 16 to the supercritical state will be described.

  While comparing and referring to the measured temperature and pressure values of the fluid in the cleaning tank 16 with the cleaning conditions, the pressure control valve 17 is throttled to increase the pressure in the cleaning tank 16 to change the carbon dioxide from a gaseous state to a supercritical state. The gas in the gaseous state is pressurized by the compressor 13 and / or is gradually shifted to the supercritical state (step S16), and the fluid in the cleaning tank 16 is changed to the supercritical state (step S17). ).

  Specifically, the pressure in the cleaning tank 16 is gradually increased to a critical pressure (7.38 MPa) or more, preferably 20 MPa at 0.12 MPa / min, and the carbon dioxide in the cleaning tank 16 is brought into a supercritical state. . The temperature is adjusted at any time by the heater 14 so that the temperature is 40 ° C. The fluid temperature in the cleaning tank 16 is adjusted so as to reach 40 ° C. until the pressure reaches 20 MPa. Note that the fluid discharged from the cleaning tank 16 is reused by circulation after being cooled by the cooler 15 even when the state transitions to the supercritical state.

(3) Cleaning Process Next, the operation during cleaning will be described.

  While adjusting the heater 14 as needed to maintain the cleaning conditions, the pressure control valve 17 and / or the compressor 13 is controlled (step S18), and cleaning is performed in a state where the carbon dioxide in the cleaning tank 16 is in a supercritical state. carry out. The cleaning time is the time until the contaminant concentration becomes equal to or lower than the predetermined concentration (step S19). During cleaning, carbon dioxide in the cleaning tank 16 is a supercritical fluid (step S20).

The supercritical carbon dioxide introduced into the cleaning tank 16 from the pipe 192 forcibly separates and dissolves the contaminants of the adsorption filter, flushes the contaminants downstream, and is discharged from the pipe 193. The supercritical carbon dioxide containing the contaminants is cooled by the cooler 15 and is transferred to a liquid state. After the contaminants are removed by the separation filter 18, the fluid is circulated and supplied to the cleaning tank 16 again. The supply path is switched and recycled. In the present embodiment, the cleaning tank 16 is cleaned by flowing supercritical carbon dioxide for 60 minutes under conditions of a pressure of 20 MPa, a temperature of 40 ° C., and a fluid density of 0.84 g / cm ³ . In this cleaning process, it is important to appropriately control the fluid density of carbon dioxide flowing through the adsorption filter in the cleaning tank 16. The fluid density is monitored on the control device 26 side by a method described later, and the temperature and pressure of carbon dioxide are controlled so that the value falls within a predetermined range.

(4) Depressurization / Temperature Reduction Process Next, a method of depressurizing / reducing the temperature of the cleaning tank 16 after washing and returning to normal temperature / normal pressure will be described.

  While referring to the temperature and pressure of the fluid in the cleaning tank 16, the opening degree of the pressure control valve 17 and / or the rotational speed of the compressor 13 is adjusted or turned off (step S21), and the pressure in the cleaning tank 16 is set to 0.12 MPa / The pressure is gradually reduced at min to shift the carbon dioxide from the supercritical fluid state to the gas state (step S22). At the same time, the output of the heater 14 is reduced (step S21), and the temperature is lowered to room temperature while maintaining the gas state. The fluid temperature in the cleaning tank 16 is adjusted so that the pressure reaches a normal temperature before the pressure reaches the normal pressure. Then, it is confirmed that the inside of the washing tank 16 has shifted to room temperature and normal pressure, and the cooling switch of the cooler 15 is turned off (step S23). The shut valve 12 is closed (step S24), the adsorption filter is taken out from the cleaning tank 16 (step S25), and the series of cleaning processes is completed.

  The above four processes of fluid filling, pressure increase / temperature increase, cleaning, pressure reduction / temperature decrease may be automatically transferred to the next process when a predetermined control start condition is reached. In this case, the control device 26 is provided with a control mode for executing four operations of fluid filling, pressure increase / temperature increase, cleaning, pressure reduction / temperature decrease, and can be set / stored in the memory of the control device 26 in a changeable manner. The above-described control modes are sequentially executed based on the control start conditions.

  In the above-described cleaning process, the fluid density of the supercritical or subcritical fluid to be passed through the cleaning tank 16 is calculated as follows by a fluid density calculation unit (fluid density calculation means) mounted in the control device 26. Is done. That is, a tabular calculation table that refers to fluid density from a combination of fluid temperature and fluid pressure (for example, fluid temperature is expressed in units of 1 ° C., fluid pressure is expressed in units of 1 MPa, and the fluid density corresponding to the combination of these numerical values is Previously recorded) in the memory of the control device 26, and the actual fluid temperature and fluid pressure in the cleaning tank 16 input to the control device 26 via the thermometer 21 and the pressure gauge 22 are The actual fluid density is interpolated and approximated by collating with the discretely expressed calculation table. It should be noted that the fluid density calculation means may be mounted anywhere as long as the calculation result is reliably transmitted to the control device 26. For example, the fluid density calculation means is mounted in a device other than the control device 26 such as the cleaning tank 16. May be.

  Further, in the above-described pressure increase / temperature increase and pressure decrease / temperature decrease processes, the speed of pressure increase / decrease in the cleaning tank 16 and the transition path of the liquid phase / gas phase / supercritical phase depend on the material of the adsorption filter, It is determined as appropriate depending on the strength, and depending on the type of the adsorption filter, it may be performed at a speed / route other than this. In this embodiment, pressure increase / temperature increase and pressure decrease / decrease are performed at a predetermined speed. However, if the change speed is a relatively slow change that does not impair the function of the adsorption filter, it can be set. There may be some width, and it is of course possible to vary this speed at the time of pressure increase / temperature increase and pressure decrease / temperature decrease.

  Next, in the case of cleaning regeneration of the adsorption filter with supercritical carbon dioxide, the pressure and temperature conditions are set so as to satisfy various fluid density conditions, and the results of examining the influence on the cleaning performance will be described.

  FIG. 5 shows the result of cleaning using the adsorption filter cleaning device of FIG. In the figure, the horizontal axis indicates the fluid density of carbon dioxide flowing through the cleaning tank, and the vertical axis indicates the cleaning regeneration rate. The cleaning regeneration rate is defined by (adsorption capacity of the adsorption filter after cleaning) / (adsorption capacity of a new adsorption filter). In the experiment, a DEP gas volatilized and generated from liquid diethyl phthalate (DEP) at a high temperature was used to clean an organic matter collecting adsorption filter until it reached breakthrough using supercritical carbon dioxide under various cleaning conditions (FIG. 3). ). In the organic matter collecting adsorption filter, the substance to be adsorbed is collected mainly by a physical adsorption action. The verified cleaning conditions are plotted on the state diagram near the critical point of carbon dioxide shown in FIG.

From FIG. 5, it can be seen that there is a positive correlation between the cleaning regeneration rate of the adsorption filter and the fluid density, and the cleaning regeneration rate of the adsorption filter varies between 20% and 100% depending on the fluid density condition. Also, under the cleaning conditions of No. 3 and No. 4 in FIG. 3, a cleaning regeneration rate of almost 100% was obtained. Therefore, the higher the fluid density of the supercritical carbon dioxide to be passed, the better the cleaning regeneration. It can be inferred that it can be realized. Among these cleaning conditions, no. 4 (pressure 20 MPa, temperature 60 ° C., fluid density 0.72 g / cm ³ ), and No. 4 No. 3 cleaning pressure (pressure 20 MPa, temperature 40 ° C., fluid density 0.84 g / cm ³ ) shows a high cleaning regeneration rate. No. 4 for a temperature condition of 60 ° C. No. 3 temperature condition of 40 ° C. is closer to normal temperature and is more advantageous in terms of reducing energy costs during cleaning. The cleaning condition 3 is the optimum cleaning condition. That is, the optimum cleaning condition of the adsorption filter is that the fluid density of carbon dioxide to be passed through the adsorption filter is a predetermined high density, preferably, the fluid is supercritical carbon dioxide (critical pressure of 7.38 MPa or more). Carbon dioxide having a critical temperature of 31.1 ° C. or higher) and a fluid density of 0.7 g / cm ³ or more is desirable. It is desirable that the fluid temperature be close to room temperature. Note that the upper limit value of the fluid density as the cleaning condition exists on the curve of the fluid temperature of 31.1 ° C. in the state diagram of FIG. 4, and the value varies according to the fluid pressure.

  If the type of adsorption filter, the weight of the adsorption filter, the filling rate of the adsorption filter in the washing tank, the substance to be adsorbed, and the weight of the substance to be adsorbed by the adsorption filter are known, the washing conditions (fluid temperature, pressure) , The cleaning time can be determined according to the flow rate). For example, when the weight of the adsorption filter is large, when the weight of the substance to be adsorbed is large, or when the flow rate of the fluid is small, the cleaning time is set longer according to these conditions. Similarly, when the filling rate of the adsorption filter into the cleaning tank is large, the cleaning time is set to be long. The cleaning time means the time for allowing the fluid to flow through the adsorption filter in the above-described cleaning process.

  FIG. This is a result of examination of the optimum cleaning time under the cleaning condition of No. 3. From the result of FIG. 6, since the highest cleaning regeneration rate of 90% or more was obtained in the cleaning time of 60 minutes in both the first cleaning and the second cleaning, there is an optimal cleaning time in the cleaning of the adsorption filter. It is shown. In this embodiment, the cleaning time of 60 minutes is set as the optimal cleaning time.

  In the embodiment described above, the carbon dioxide used in the cleaning process is circulated and reused (circulation method). However, when a small amount of carbon dioxide is required for cleaning, it is introduced into the cleaning tank 16, for example. In the case where the adsorption filter has a small weight and the substance to be adsorbed is washed away in a short time, carbon dioxide may be supplied by a one-pass method instead of the circulation method. In that case, the operation regarding the pipe 20 and the cooler 15 can be omitted. Hereinafter, an embodiment of the suction filter cleaning using the one-pass method will be described with reference to FIGS. 1 and 2.

(Fluid filling process)
In the fluid filling process, the operation until the cleaning tank 16 is filled with gaseous carbon dioxide (step S14) is the same as the circulation system described above. On the other hand, in the case of the one-pass method, the gaseous carbon dioxide discharged from the cleaning tank 16 via the pressure control valve 17 is discharged in a gaseous state without performing the cooling operation of the cooler 15. Therefore, it is not necessary to turn on the cooling switch of the cooler 15 (step S15).

(Temperature increase / pressure increase process)
In the temperature raising / pressurizing process, the operation up to the operation of bringing the fluid in the cleaning tank 16 into a supercritical state (step S17) is the same as the above-described circulation method. On the other hand, in the case of the one-pass method, the fluid discharged from the cleaning tank 16 at the time of transition to the supercritical state is also discharged as it is without performing the cooling operation of the cooler 15.

(Cleaning process)
In the cleaning process, the carbon dioxide in the cleaning tank 16 is the same as the above-described circulation system until it becomes a supercritical fluid (step S20). On the other hand, in the case of the one-pass system, supercritical carbon dioxide containing pollutants is discharged after the pollutants are removed by the separation filter 18.

(Decompression and temperature reduction process)
In the depressurization / temperature reduction process, in the one-pass method, there is no need for the operation of turning off the cooling switch of the cooler 15 performed in the above-described circulation method (step S23).

  In the circulation method and the one-pass method, in the fluid filling process, the cleaning tank 16 is filled with gaseous carbon dioxide, and the cleaning process is performed by shifting from the gaseous state to the supercritical state. The cleaning process may be performed by filling the cleaning tank 16 with carbon dioxide and shifting from a liquid state to a supercritical state. In that case, by installing the heater 14 in the cleaning tank 16, liquid carbon dioxide is introduced into the cleaning tank 16, and the state is shifted to a supercritical state as it is. In the case where the cleaning process is performed by circulating and reusing carbon dioxide and shifting from the liquid state to the supercritical state, the fluid discharged from the cleaning tank 16 is cooled by the cooler 15 to be in the liquid state. It is good to move to. By performing the filling operation to the washing tank 16 in the state of a liquid having a high density in this way, it is possible to increase the pressure without using a compressor in the temperature increase / pressure increase process.

  Although the preferred embodiment of the present invention has been described above, the embodiment of the adsorption filter cleaning device is not limited to the above-described example.

  For example, if the type and material of the adsorption filter are new and the optimum cleaning time is unknown, the concentration of contaminants contained in carbon dioxide discharged from the cleaning tank 16 is measured downstream of the cleaning tank 16. A gas chromatograph 27 (contaminant concentration measuring means) may be provided through an on-off valve 28 (see FIG. 1). The gas chromatograph 27 constantly monitors the pollutant concentration, so that the cleaning efficiency of the adsorption filter can be confirmed in real time. In this case, the cleaning control is performed until the downstream contaminant concentration decreases to a predetermined concentration (preferably 10% or less of the initial concentration). If the contaminant concentration reaches a predetermined concentration, the controller 26 ends the cleaning process and shifts the control mode to the subsequent process. The pollutant concentration measuring means is not limited to a gas chromatograph, and an apparatus configuration and a measuring method can be appropriately selected according to the type and characteristics of the target pollutant. For example, absorption of ultraviolet light, infrared light, etc. of the adsorbed substance may be measured with a photometer. Further, the installation location of the pollutant concentration measuring means is not limited to the downstream side of the cleaning tank, and can be appropriately selected such as being provided in the cleaning tank.

It is a configuration explanatory view showing an adsorption filter cleaning device according to an embodiment of the present invention. It is a flowchart which shows the cleaning process of the adsorption filter cleaning apparatus which concerns on the example of embodiment of this invention. It is explanatory drawing which shows the washing | cleaning conditions of the adsorption filter washing | cleaning apparatus which concerns on the example of embodiment of this invention. It is a characteristic view which shows the state diagram of the carbon dioxide used for the embodiment of this invention. It is a characteristic view which shows the relationship between the washing | cleaning reproduction | regeneration rate of the adsorption filter by the supercritical carbon dioxide based on the example of embodiment of this invention, and fluid density. It is a characteristic view which shows the examination result of the washing | cleaning time of the adsorption filter washing | cleaning apparatus which concerns on the example of embodiment of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 11 ... Cylinder (carbon dioxide supply device), 12 ... Shut valve, 13 ... Compressor (carbon dioxide pressure feeding device), 14 ... Heater (heating device), 15 ... Cooler (cooling device), 16 ... Cleaning tank , 17 ... Pressure control valve, 18 ... Separation filter, 191 to 195 ... Piping, 20 ... Pipe, 21 ... Thermometer, 22 ... Pressure gauge, 23 ... Thermometer, 24 ... Pressure gauge, 25 ... Flow meter, 26 ... Washing Device control device, 27... Gas chromatograph (contaminant concentration measuring means), 28.

Claims (6)

An adsorption filter cleaning device for cleaning an adsorption filter using a supercritical or subcritical fluid,
A cleaning tank for storing and cleaning the adsorption filter;
An adsorption filter comprising: a control device that controls the temperature and pressure of the fluid so that the density of the supercritical or subcritical fluid flowing through the adsorption filter in the washing tank is within a predetermined range during washing. Cleaning device.   Fluid density calculation means for calculating the fluid density from the temperature and pressure of the supercritical or subcritical fluid is further provided, and the control device calculates the temperature and pressure of the fluid based on the fluid density calculated by the fluid density calculation means. The suction filter cleaning device according to claim 1, wherein the suction filter cleaning device is controlled.   Contaminant concentration measuring means for measuring the pollutant concentration in the supercritical or subcritical fluid is further provided, and after the start of the cleaning control, the control device has a predetermined pollutant concentration measured by the contaminant concentration measuring means. 3. The adsorption filter cleaning device according to claim 1, wherein cleaning control is performed until the concentration is reduced.   The flow time of the supercritical or subcritical fluid to be passed through the adsorption filter in the washing tank is at least the type of the adsorption filter in the washing tank, the weight of the adsorption filter, the filling rate of the adsorption filter in the washing tank, 4. The adsorption filter cleaning apparatus according to claim 1, wherein the adsorption filter cleaning apparatus is determined by an adsorbed substance, a weight of an adsorbed substance adsorbed on the adsorption filter, and a cleaning condition. The adsorption filter is an adsorption filter that collects a substance to be adsorbed by at least a physical adsorption action, and the control device sets a fluid density of a supercritical fluid to flow through the adsorption filter in the washing tank to 0.7 g / The suction filter cleaning device according to claim 1, wherein the suction filter cleaning device is controlled to be cm ³ or more.   An adsorption filter cleaning method for cleaning an adsorption filter using a supercritical or subcritical fluid, wherein the fluid density of the supercritical or subcritical fluid flowing through the adsorption filter in the cleaning tank is controlled within a predetermined range. An adsorption filter cleaning method.

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