JP2005256139A - 金めっき浴 - Google Patents
金めっき浴 Download PDFInfo
- Publication number
- JP2005256139A JP2005256139A JP2004072705A JP2004072705A JP2005256139A JP 2005256139 A JP2005256139 A JP 2005256139A JP 2004072705 A JP2004072705 A JP 2004072705A JP 2004072705 A JP2004072705 A JP 2004072705A JP 2005256139 A JP2005256139 A JP 2005256139A
- Authority
- JP
- Japan
- Prior art keywords
- plating bath
- gold
- salt
- sulfite
- gold plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007747 plating Methods 0.000 title claims abstract description 111
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 72
- 239000010931 gold Substances 0.000 claims abstract description 71
- 229910052737 gold Inorganic materials 0.000 claims abstract description 71
- 150000003839 salts Chemical class 0.000 claims abstract description 43
- LSNNMFCWUKXFEE-UHFFFAOYSA-N Sulfurous acid Chemical compound OS(O)=O LSNNMFCWUKXFEE-UHFFFAOYSA-N 0.000 claims abstract description 28
- -1 quinoline compound Chemical class 0.000 claims abstract description 21
- SMWDFEZZVXVKRB-UHFFFAOYSA-N anhydrous quinoline Natural products N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 claims abstract description 14
- 150000001875 compounds Chemical class 0.000 claims abstract description 10
- 125000003396 thiol group Chemical group [H]S* 0.000 claims abstract description 6
- SRCZENKQCOSNAI-UHFFFAOYSA-H gold(3+);trisulfite Chemical compound [Au+3].[Au+3].[O-]S([O-])=O.[O-]S([O-])=O.[O-]S([O-])=O SRCZENKQCOSNAI-UHFFFAOYSA-H 0.000 claims description 15
- 239000003638 chemical reducing agent Substances 0.000 claims description 14
- MXZVHYUSLJAVOE-UHFFFAOYSA-N gold(3+);tricyanide Chemical compound [Au+3].N#[C-].N#[C-].N#[C-] MXZVHYUSLJAVOE-UHFFFAOYSA-N 0.000 claims description 13
- DHCDFWKWKRSZHF-UHFFFAOYSA-N sulfurothioic S-acid Chemical compound OS(O)(=O)=S DHCDFWKWKRSZHF-UHFFFAOYSA-N 0.000 claims description 13
- RAIPHJJURHTUIC-UHFFFAOYSA-N 1,3-thiazol-2-amine Chemical class NC1=NC=CS1 RAIPHJJURHTUIC-UHFFFAOYSA-N 0.000 claims description 7
- ZKIHLVYBGPFUAD-UHFFFAOYSA-N quinoline-2-sulfonic acid Chemical compound C1=CC=CC2=NC(S(=O)(=O)O)=CC=C21 ZKIHLVYBGPFUAD-UHFFFAOYSA-N 0.000 claims description 5
- 125000000896 monocarboxylic acid group Chemical group 0.000 claims description 3
- LSNNMFCWUKXFEE-UHFFFAOYSA-L sulfite Chemical compound [O-]S([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-L 0.000 abstract description 6
- 230000002401 inhibitory effect Effects 0.000 abstract description 2
- 238000000151 deposition Methods 0.000 abstract 1
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 24
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 24
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 16
- 229960005070 ascorbic acid Drugs 0.000 description 12
- 235000010323 ascorbic acid Nutrition 0.000 description 11
- 239000011668 ascorbic acid Substances 0.000 description 11
- UMGDCJDMYOKAJW-UHFFFAOYSA-N thiourea Chemical compound NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 description 10
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 239000008139 complexing agent Substances 0.000 description 7
- 238000000354 decomposition reaction Methods 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 7
- 230000008021 deposition Effects 0.000 description 6
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Natural products NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 4
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- GEHJYWRUCIMESM-UHFFFAOYSA-L sodium sulfite Chemical compound [Na+].[Na+].[O-]S([O-])=O GEHJYWRUCIMESM-UHFFFAOYSA-L 0.000 description 4
- 239000003381 stabilizer Substances 0.000 description 4
- 229950003476 aminothiazole Drugs 0.000 description 3
- GABPAXJCPQEORA-UHFFFAOYSA-K azanium;gold(3+);disulfite Chemical compound [NH4+].[Au+3].[O-]S([O-])=O.[O-]S([O-])=O GABPAXJCPQEORA-UHFFFAOYSA-K 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000007772 electroless plating Methods 0.000 description 3
- 238000009713 electroplating Methods 0.000 description 3
- 159000000000 sodium salts Chemical class 0.000 description 3
- ZWZLRIBPAZENFK-UHFFFAOYSA-J sodium;gold(3+);disulfite Chemical compound [Na+].[Au+3].[O-]S([O-])=O.[O-]S([O-])=O ZWZLRIBPAZENFK-UHFFFAOYSA-J 0.000 description 3
- DXYYSGDWQCSKKO-UHFFFAOYSA-N 2-methylbenzothiazole Chemical compound C1=CC=C2SC(C)=NC2=C1 DXYYSGDWQCSKKO-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 150000003863 ammonium salts Chemical class 0.000 description 2
- 150000001491 aromatic compounds Chemical class 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- ADPOBOOHCUVXGO-UHFFFAOYSA-H dioxido-oxo-sulfanylidene-$l^{6}-sulfane;gold(3+) Chemical compound [Au+3].[Au+3].[O-]S([O-])(=O)=S.[O-]S([O-])(=O)=S.[O-]S([O-])(=O)=S ADPOBOOHCUVXGO-UHFFFAOYSA-H 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- FDWREHZXQUYJFJ-UHFFFAOYSA-M gold monochloride Chemical compound [Cl-].[Au+] FDWREHZXQUYJFJ-UHFFFAOYSA-M 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000003002 pH adjusting agent Substances 0.000 description 2
- 239000006174 pH buffer Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- XAEFZNCEHLXOMS-UHFFFAOYSA-M potassium benzoate Chemical compound [K+].[O-]C(=O)C1=CC=CC=C1 XAEFZNCEHLXOMS-UHFFFAOYSA-M 0.000 description 2
- BHZRJJOHZFYXTO-UHFFFAOYSA-L potassium sulfite Chemical compound [K+].[K+].[O-]S([O-])=O BHZRJJOHZFYXTO-UHFFFAOYSA-L 0.000 description 2
- 235000019252 potassium sulphite Nutrition 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 235000010265 sodium sulphite Nutrition 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- KRZKNIQKJHKHPL-UHFFFAOYSA-J tripotassium;gold(1+);disulfite Chemical compound [K+].[K+].[K+].[Au+].[O-]S([O-])=O.[O-]S([O-])=O KRZKNIQKJHKHPL-UHFFFAOYSA-J 0.000 description 2
- YHMYGUUIMTVXNW-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione Chemical compound C1=CC=C2NC(S)=NC2=C1 YHMYGUUIMTVXNW-UHFFFAOYSA-N 0.000 description 1
- DYCLHZPOADTVKK-UHFFFAOYSA-N 2-(2-azaniumyl-1,3-thiazol-4-yl)acetate Chemical compound NC1=NC(CC(O)=O)=CS1 DYCLHZPOADTVKK-UHFFFAOYSA-N 0.000 description 1
- UHGULLIUJBCTEF-UHFFFAOYSA-N 2-aminobenzothiazole Chemical compound C1=CC=C2SC(N)=NC2=C1 UHGULLIUJBCTEF-UHFFFAOYSA-N 0.000 description 1
- MOUCDKVXRXOMTN-UHFFFAOYSA-N 3,5-dimethyl-2h-1,3-thiazol-2-amine Chemical compound CN1C=C(C)SC1N MOUCDKVXRXOMTN-UHFFFAOYSA-N 0.000 description 1
- XDVOLDOITVSJGL-UHFFFAOYSA-N 3,7-dihydroxy-2,4,6,8,9-pentaoxa-1,3,5,7-tetraborabicyclo[3.3.1]nonane Chemical compound O1B(O)OB2OB(O)OB1O2 XDVOLDOITVSJGL-UHFFFAOYSA-N 0.000 description 1
- CQMHIXRPQGPCNT-UHFFFAOYSA-N 3-methyl-1,2-thiazol-5-amine Chemical compound CC=1C=C(N)SN=1 CQMHIXRPQGPCNT-UHFFFAOYSA-N 0.000 description 1
- YEBCRAVYUWNFQT-UHFFFAOYSA-N 4-methoxy-1,3-benzothiazol-2-amine Chemical compound COC1=CC=CC2=C1N=C(N)S2 YEBCRAVYUWNFQT-UHFFFAOYSA-N 0.000 description 1
- OUQMXTJYCAJLGO-UHFFFAOYSA-N 4-methyl-1,3-thiazol-2-amine Chemical compound CC1=CSC(N)=N1 OUQMXTJYCAJLGO-UHFFFAOYSA-N 0.000 description 1
- CMGDVUCDZOBDNL-UHFFFAOYSA-N 4-methyl-2h-benzotriazole Chemical compound CC1=CC=CC2=NNN=C12 CMGDVUCDZOBDNL-UHFFFAOYSA-N 0.000 description 1
- IODWHFFPQHUDAG-UHFFFAOYSA-N 5,6-dimethyl-1,3-benzothiazol-2-amine Chemical compound C1=C(C)C(C)=CC2=C1SC(N)=N2 IODWHFFPQHUDAG-UHFFFAOYSA-N 0.000 description 1
- KOYJWFGMEBETBU-UHFFFAOYSA-N 6-ethoxy-1,3-benzothiazol-2-amine Chemical compound CCOC1=CC=C2N=C(N)SC2=C1 KOYJWFGMEBETBU-UHFFFAOYSA-N 0.000 description 1
- 239000005725 8-Hydroxyquinoline Substances 0.000 description 1
- LGDFHDKSYGVKDC-UHFFFAOYSA-N 8-hydroxyquinoline-5-sulfonic acid Chemical compound C1=CN=C2C(O)=CC=C(S(O)(=O)=O)C2=C1 LGDFHDKSYGVKDC-UHFFFAOYSA-N 0.000 description 1
- ROFVEXUMMXZLPA-UHFFFAOYSA-N Bipyridyl Chemical group N1=CC=CC=C1C1=CC=CC=N1 ROFVEXUMMXZLPA-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical group OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- KXDHJXZQYSOELW-UHFFFAOYSA-N Carbamic acid Chemical compound NC(O)=O KXDHJXZQYSOELW-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- PQUCIEFHOVEZAU-UHFFFAOYSA-N Diammonium sulfite Chemical compound [NH4+].[NH4+].[O-]S([O-])=O PQUCIEFHOVEZAU-UHFFFAOYSA-N 0.000 description 1
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 1
- 239000002211 L-ascorbic acid Substances 0.000 description 1
- 235000000069 L-ascorbic acid Nutrition 0.000 description 1
- DWAQJAXMDSEUJJ-UHFFFAOYSA-M Sodium bisulfite Chemical compound [Na+].OS([O-])=O DWAQJAXMDSEUJJ-UHFFFAOYSA-M 0.000 description 1
- DGEZNRSVGBDHLK-UHFFFAOYSA-N [1,10]phenanthroline Chemical compound C1=CN=C2C3=NC=CC=C3C=CC2=C1 DGEZNRSVGBDHLK-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- XYXNTHIYBIDHGM-UHFFFAOYSA-N ammonium thiosulfate Chemical compound [NH4+].[NH4+].[O-]S([O-])(=O)=S XYXNTHIYBIDHGM-UHFFFAOYSA-N 0.000 description 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 1
- 239000012964 benzotriazole Substances 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000368 destabilizing effect Effects 0.000 description 1
- 150000002611 lead compounds Chemical class 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 150000002790 naphthalenes Chemical class 0.000 description 1
- 229960003540 oxyquinoline Drugs 0.000 description 1
- DJEHXEMURTVAOE-UHFFFAOYSA-M potassium bisulfite Chemical compound [K+].OS([O-])=O DJEHXEMURTVAOE-UHFFFAOYSA-M 0.000 description 1
- 229940099427 potassium bisulfite Drugs 0.000 description 1
- 235000010259 potassium hydrogen sulphite Nutrition 0.000 description 1
- RWPGFSMJFRPDDP-UHFFFAOYSA-L potassium metabisulfite Chemical compound [K+].[K+].[O-]S(=O)S([O-])(=O)=O RWPGFSMJFRPDDP-UHFFFAOYSA-L 0.000 description 1
- RRDWZGMHSCBIGX-UHFFFAOYSA-J potassium;gold(3+);disulfite Chemical compound [K+].[Au+3].[O-]S([O-])=O.[O-]S([O-])=O RRDWZGMHSCBIGX-UHFFFAOYSA-J 0.000 description 1
- HMJCXVAXZCDOLV-UHFFFAOYSA-M potassium;hydroxy-oxido-oxo-sulfanylidene-$l^{6}-sulfane Chemical compound [K+].OS([O-])(=O)=S HMJCXVAXZCDOLV-UHFFFAOYSA-M 0.000 description 1
- KOUKXHPPRFNWPP-UHFFFAOYSA-N pyrazine-2,5-dicarboxylic acid;hydrate Chemical compound O.OC(=O)C1=CN=C(C(O)=O)C=N1 KOUKXHPPRFNWPP-UHFFFAOYSA-N 0.000 description 1
- LISFMEBWQUVKPJ-UHFFFAOYSA-N quinolin-2-ol Chemical compound C1=CC=C2NC(=O)C=CC2=C1 LISFMEBWQUVKPJ-UHFFFAOYSA-N 0.000 description 1
- MCJGNVYPOGVAJF-UHFFFAOYSA-N quinolin-8-ol Chemical compound C1=CN=C2C(O)=CC=CC2=C1 MCJGNVYPOGVAJF-UHFFFAOYSA-N 0.000 description 1
- MRUMAIRJPMUAPZ-UHFFFAOYSA-N quinolin-8-ol;sulfuric acid Chemical compound OS(O)(=O)=O.C1=CN=C2C(O)=CC=CC2=C1 MRUMAIRJPMUAPZ-UHFFFAOYSA-N 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- YGSDEFSMJLZEOE-UHFFFAOYSA-M salicylate Chemical compound OC1=CC=CC=C1C([O-])=O YGSDEFSMJLZEOE-UHFFFAOYSA-M 0.000 description 1
- 229960001860 salicylate Drugs 0.000 description 1
- HRZFUMHJMZEROT-UHFFFAOYSA-L sodium disulfite Chemical compound [Na+].[Na+].[O-]S(=O)S([O-])(=O)=O HRZFUMHJMZEROT-UHFFFAOYSA-L 0.000 description 1
- 235000010267 sodium hydrogen sulphite Nutrition 0.000 description 1
- 235000010262 sodium metabisulphite Nutrition 0.000 description 1
- SDKPSXWGRWWLKR-UHFFFAOYSA-M sodium;9,10-dioxoanthracene-1-sulfonate Chemical compound [Na+].O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2S(=O)(=O)[O-] SDKPSXWGRWWLKR-UHFFFAOYSA-M 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
- NJRXVEJTAYWCQJ-UHFFFAOYSA-N thiomalic acid Chemical compound OC(=O)CC(S)C(O)=O NJRXVEJTAYWCQJ-UHFFFAOYSA-N 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Chemically Coating (AREA)
- Electroplating And Plating Baths Therefor (AREA)
Abstract
【効果】 本発明の金めっき浴は、析出金皮膜特性に影響を与えずに浴安定性が改善されたものである。この場合、メルカプト基含有化合物を添加しないことにより、優れたワイヤボンディング特性を有する金めっき皮膜を得ることができる。
【選択図】 なし
Description
請求項1:
亜硫酸又はその塩を含有する非シアン化金めっき浴であって、キノリン化合物を含有することを特徴とする金めっき浴。
請求項2:
前記キノリン化合物が、下記式で表される化合物である請求項1記載の金めっき浴。
請求項3:
前記キノリン化合物がキノリンスルホン酸又はその塩である請求項1又は2記載の金めっき浴。
請求項4:
更に、アミノチアゾール誘導体を含有する請求項1、2又は3記載の金めっき浴。
請求項5:
メルカプト基含有化合物を含有しない請求項1乃至4のいずれか1項記載の金めっき浴。
請求項6:
前記非シアン化金めっき浴が、亜硫酸金塩、亜硫酸又はその塩を含有し、かつチオ硫酸又はその塩を含有しない電気金めっき浴であることを特徴とする請求項1乃至5のいずれか1項記載の金めっき浴。
請求項7:
前記非シアン化金めっき浴が、亜硫酸金塩、亜硫酸又はその塩、チオ硫酸又はその塩、及び還元剤を含有する無電解金めっき浴であることを特徴とする請求項1乃至5のいずれか1項記載の金めっき浴。
この場合、亜硫酸又はその塩としては、めっき浴中に金源、錯化剤、安定剤等の目的として供給されるものであり、亜硫酸、亜硫酸ナトリウム、亜硫酸カリウム、亜硫酸金ナトリウム、亜硫酸金カリウム、亜硫酸金アンモニウムなどが挙げられる。
表1に示す無電解金めっき浴を作成し、これを90℃に放置して、分解するまでの時間を測定した。結果を表1に示す。
表2に示す電気金めっき浴を作成し、これを50℃において、1分当たり5mL/Lの空気を入れて、36時間放置した後の亜硫酸塩の減少率を測定した。結果を表2に示す。
表3,4,5に示す無電解金めっき浴を作成し、回路部分に無電解ニッケルめっき皮膜上に置換金めっきを施したプリント基板(エポキシ樹脂基板)に下記方法により無電解めっきを行い、回路以外の樹脂上への金析出の有無、浴安定性、皮膜外観、ワイヤボンディング性を評価した。結果を表3,4,5に示す。
無電解金めっき方法
55℃で30分間浸漬
樹脂上への金析出の有無
顕微鏡(×80)で目視により確認
浴安定性
めっき浴を55℃にし、48時間放置しても分解しなかったものを「優」、24時間放置では分解しなかったものを「良」、3時間放置で分解したものを「不可」とした。
皮膜外観
顕微鏡(×50)観察で、ピットや色調を目視により観察して総合的に評価した。
ワイヤボンディング性
KS4524A(K&S社製)を用いて、φ25μmの金ワイヤでワイヤボンディング強度を評価し、強度が6g/L未満を「不可」、6g/L以上を「良」、特に9g/L以上を「優」とした。
表6に示す組成の無電解金めっき浴を建浴した。この無電解金めっき浴を用い、上記と同様にして金めっきを行った。得られた金めっき皮膜につき、上記方法でワイヤボンディング性を評価した。結果を表6に示す。
Claims (7)
- 亜硫酸又はその塩を含有する非シアン化金めっき浴であって、キノリン化合物を含有することを特徴とする金めっき浴。
- 前記キノリン化合物がキノリンスルホン酸又はその塩である請求項1又は2記載の金めっき浴。
- 更に、アミノチアゾール誘導体を含有する請求項1、2又は3記載の金めっき浴。
- メルカプト基含有化合物を含有しない請求項1乃至4のいずれか1項記載の金めっき浴。
- 前記非シアン化金めっき浴が、亜硫酸金塩、亜硫酸又はその塩を含有し、かつチオ硫酸又はその塩を含有しない電気金めっき浴であることを特徴とする請求項1乃至5のいずれか1項記載の金めっき浴。
- 前記非シアン化金めっき浴が、亜硫酸金塩、亜硫酸又はその塩、チオ硫酸又はその塩、及び還元剤を含有する無電解金めっき浴であることを特徴とする請求項1乃至5のいずれか1項記載の金めっき浴。
Priority Applications (1)
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2007254776A (ja) * | 2006-03-20 | 2007-10-04 | Shinko Electric Ind Co Ltd | 非シアン無電解金めっき液及び無電解金めっき方法 |
JP2008208392A (ja) * | 2007-02-23 | 2008-09-11 | Kanto Chem Co Inc | 無電解金めっき液およびそれを用いためっき方法 |
JP2010255010A (ja) * | 2009-04-21 | 2010-11-11 | C Uyemura & Co Ltd | 無電解金めっき浴 |
JP2011012314A (ja) * | 2009-07-02 | 2011-01-20 | Ne Chemcat Corp | 電極形成用金めっき浴及びそれを用いた電極形成方法 |
JP2011122192A (ja) * | 2009-12-09 | 2011-06-23 | Ne Chemcat Corp | 電解硬質金めっき液及びこれを用いるめっき方法 |
CN103290440A (zh) * | 2012-02-22 | 2013-09-11 | 美泰乐科技(日本)股份有限公司 | 金凸点形成用非氰系电解镀金浴及金凸点形成方法 |
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2004
- 2004-03-15 JP JP2004072705A patent/JP4320606B2/ja not_active Expired - Lifetime
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007254776A (ja) * | 2006-03-20 | 2007-10-04 | Shinko Electric Ind Co Ltd | 非シアン無電解金めっき液及び無電解金めっき方法 |
JP2008208392A (ja) * | 2007-02-23 | 2008-09-11 | Kanto Chem Co Inc | 無電解金めっき液およびそれを用いためっき方法 |
JP2010255010A (ja) * | 2009-04-21 | 2010-11-11 | C Uyemura & Co Ltd | 無電解金めっき浴 |
JP2011012314A (ja) * | 2009-07-02 | 2011-01-20 | Ne Chemcat Corp | 電極形成用金めっき浴及びそれを用いた電極形成方法 |
KR101783393B1 (ko) * | 2009-07-02 | 2017-11-06 | 메타로 테쿠노로지 쟈판 가부시키가이샤 | 전극 형성용 금도금욕 및 그것을 사용한 전극 형성 방법 |
JP2011122192A (ja) * | 2009-12-09 | 2011-06-23 | Ne Chemcat Corp | 電解硬質金めっき液及びこれを用いるめっき方法 |
CN103290440A (zh) * | 2012-02-22 | 2013-09-11 | 美泰乐科技(日本)股份有限公司 | 金凸点形成用非氰系电解镀金浴及金凸点形成方法 |
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