JP2005252038A - Array type photosensitive component - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an array type photosensitive component which is excellent in performance and reliability, and can be also miniaturized by integration with an optical circuit. <P>SOLUTION: The component has a plurality of metal can type PDs 32 wherein a photosensitive element is arranged inside a metal can package, a holding member 31 holding the metal can type PD 32 arranged linear or planar at once, an insertion hole 35 provided on the holding member 31 for inserting the metal can type PD 32 and a plurality of projection parts 36 provided on the holding member 31 to project on a circumferential wall of the insertion hole 35. Since an array type photosensitive component wherein the metal can type PD 32 is arranged at once by the holding member 31 is thereby realized, positioning fixing without angle shift is possible and it can be connected to an optical circuit without large dispersion in light receiving efficiency. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an array type light receiving component, and more particularly to a small and multi-channel array type light receiving component used in the fields of optical communication and optical information processing.

  In the field of conventional wavelength division multiplexing optical communication, there is an optical processing function that temporarily multiplexes multiplexed optical signals in the middle of a transmission line, extracts a desired optical signal, recombines them, and sends them to the transmission line. is necessary. In order to realize such a function, it is necessary to monitor the light intensity and perform feedback control in order to align the optical signal level. Therefore, a multi-channel optical monitor circuit capable of receiving a plurality of optical signals is required. There is a growing need.

  On the other hand, a configuration in which a plurality of metal can photodiodes (hereinafter referred to as PDs) with fiber pigtails are put into practical use has been put into practical use. The metal can type PD is a light receiving component in which a photodiode (PD) element is enclosed in a metal can package. The metal can package is made of a transparent material such as glass at the tip of a cylindrical metal part and a part called a “stem” sealed by penetrating an electrode pin near the center of a disk-shaped metal plate. This is a general-purpose package for an optical semiconductor element composed of a part called a “cap” provided with a window, and after the PD element is mounted at a predetermined position of the stem, the cap is covered by resistance welding or the like. It is common to seal.

In such a configuration, a multi-channel optical monitor component can be realized at low cost without impairing performance by arranging metal can PDs with general-purpose fiber pigtails in a small case. Because, by using mass-produced general-purpose package parts, low cost and high reliability can be secured, and optical fibers are aligned and fixed for each channel, so that light receiving efficiency is good and individual This is because there is no problem such as crosstalk because it is packaged and optically insulated. On the other hand, a configuration as shown in FIG. 1 has been studied as an extremely small form that can be integrated with an optical circuit. Yes.

  FIG. 1 is a block diagram of a conventional multi-channel optical monitor circuit, in which reference numeral 11 denotes a planar optical circuit, 12 denotes a PD array element, and 13 denotes a vertical optical path conversion mirror. A planar optical circuit 11 having a silica-based optical waveguide formed on a silicon substrate is used, and a vertical optical path conversion mirror 13 for reflecting the guided light vertically upward is provided at one end of the optical waveguide, and an upper portion of the vertical optical path conversion mirror 13 is provided. By directly mounting the bare chip PD array element 12, it is possible to realize an extremely small integrated array light receiving circuit. There are various structures and manufacturing methods for such an array light receiving circuit. For example, the methods described in Patent Documents 1 to 3 below may be used.

JP 9-26515 A JP 9-318850 A Japanese Patent Laid-Open No. 11-84183

  As described above, since an optical monitor circuit is often used in combination with an optical signal processing circuit such as a demultiplexer, a multiplexer, a variable attenuator, etc., a configuration that can be made as small as possible when combined with such components is desired. It is rare. However, although the metal can type PD with a fiber pigtail is satisfactory in terms of performance and price, it occupies a large area for the extra length processing of the optical fiber, and as a result, the above-mentioned requirement cannot be satisfied.

  On the other hand, using the structure shown in FIG. 1 has the advantage that the PD array element can be integrated with the optical circuit in a very small size, but it is difficult to satisfy all of the performance and reliability at the same time. That is, firstly, in the bare chip PD array element, there is a problem that crosstalk between channels of about −30 dB occurs inside the element. This is because a part of the light incident on a certain channel propagates inside the device and leaks into another channel, so that a great improvement is difficult as long as the PD array device is used. The second is a reliability problem. That is, in the case of such a structure in which such a multi-channel PD array element is bonded and fixed to the optical circuit, it is necessary to replace the entire circuit even if the PD element for one channel fails. For this reason, extremely high reliability is required, and it becomes expensive. In addition, when the bare chip PD array element is directly mounted on an optical circuit, it is common to perform resin sealing by potting or the like, but the above-described high reliability is ensured by such a sealing structure. Therefore, there is a problem that a great deal of labor is required for process management.

  The present invention has been made in view of such problems, and an object of the present invention is to provide an array-type light receiving component that is excellent in performance and reliability and can be miniaturized by integration with an optical circuit. It is in.

  The present invention has been made to achieve such an object, and the invention according to claim 1 is directed to a plurality of metal can type light receivers in which a light receiving element is arranged in a metal can package, and the metal can type A light receiving device is arranged in a linear or planar shape and held together, and a holding member provided with a light receiving device insertion hole for inserting the metal can type light receiving device, the holding member being the metal can type It has a pressing member for holding a light receiver.

  According to a second aspect of the present invention, in the first aspect of the present invention, the metal can light receiver and the holding member can be replaced without breaking the metal can light receiver. Further, they are fixed to each other only by mechanical contact.

  According to a third aspect of the present invention, in the first or second aspect of the present invention, a lens is fixed to the tip of the metal can type light receiver, and the holding member has a cylindrical center line of the metal can. A holding means for holding the cap portion of the metal can package in a substantially isotropic manner from the periphery so as to be parallel to each other is provided.

  According to a fourth aspect of the present invention, in the third aspect of the present invention, an angle formed by a cylindrical center line of the metal can of the metal can type optical receiver is 2 ° or less.

  According to a fifth aspect of the present invention, in the invention according to the third or fourth aspect, the holding means has a light receiving device insertion hole that is opened larger than the cap portion of the metal can package, and the light receiving device is inserted. The metal can package includes at least three protrusions provided at approximately isotropic positions on the inner periphery of the hole, and a circle inscribed at the tip of the protrusion does not insert the metal can receiver. It is smaller than the cap part.

  According to a sixth aspect of the present invention, in the fifth aspect of the present invention, the inner periphery of the projection and the receiver insertion hole is made of the same material.

  The invention according to claim 7 is the invention according to claim 5, wherein a strain absorbing portion made of an air gap or an elastic material is provided at a substantially isotropic position around the outside of the cylinder of the light receiving device insertion hole. It is characterized by.

  The invention according to claim 8 is the invention according to claim 5, wherein the protrusion is made of an elastic structural component or an elastic material.

  The invention according to claim 9 is the invention according to claim 3 or 4, wherein the holding means includes a light receiving device insertion hole that is slightly larger than the cap portion of the metal can package, and the metal can. It is characterized by comprising an elastic structural part or an elastic material provided between the mold light receiver and the inner wall of the light receiver insertion hole.

  The invention according to claim 10 is the invention according to claim 1 or 2, wherein a lens is fixed to a tip of the metal can type light receiver, and the holding member is made of the metal can package. The metal can type receiver insertion hole that is larger than the cap part, and the stem outer edge of the metal can package with the cap part side inserted into the receiver insertion hole is the stem side surface of the receiver insertion hole. A spring structure is provided which is pressed from the stem side toward the light receiving device insertion hole so as to be evenly contacted with each other.

  According to an eleventh aspect of the present invention, in the invention according to the first or second aspect, the holding member collectively includes the metal can type light receiver and a lens paired with the metal can type light receiver. It is characterized by holding.

  The invention according to claim 12 is the invention according to claim 11, wherein the lens is a ball lens.

  The invention according to claim 13 is the invention according to claim 11, wherein the lens is a microlens array.

  According to a fourteenth aspect of the present invention, in the invention according to any one of the first to thirteenth aspects of the present invention, an inner portion of the metal can package of the metal can-type photoreceiver with respect to a cylindrical center line of the metal can The metal can type light receiver is provided on the holding member so that the center positions of the light receiving portions of the arranged light receiving elements are positioned in substantially the same direction.

  The invention as set forth in claim 1 is characterized in that, in the invention according to any one of claims 1 to 14, the metal can type light receiver has a metal pin provided on a cylindrical center line of the metal can package as one electrode. The outside of the metal can housing is the other electrode.

  With such a configuration, an array type light receiving component in which metal can PDs are collectively arranged by a holding member is realized, so that it can be connected to an optical circuit without a large variation in light receiving efficiency.

  According to the holding member of the present invention, it is possible to hold individually packaged metal can-type PDs without angular deviation. In addition, if a structure that holds the metal can-type PD and the paired lens in a lump is used, the allowable amount of angular deviation of the metal can-type PD can be significantly increased. As described above, according to the present invention, it is possible to hold the metal can type PD effectively without any problem of angular deviation, and thus, high performance, high reliability and integration in which the PD is arranged in one dimension and two dimensions. A possible array type light receiving component was realized. In addition, by using a metal can type PD as a light receiver, cost reduction can be achieved, and by using the shape of the metal can rotation target, the above-described holding structure and PD mounting position deviation can be reduced. The effect of becoming. Furthermore, the holding structure of the present invention has a holding force and positional accuracy sufficient to satisfy optical performance, and has a structure in which the receiver can be easily inserted and removed, so that the receiver can be replaced individually. .

  Therefore, according to the present invention, it is possible to provide an array-type light receiving component that is excellent in performance and reliability and can be miniaturized by integration with an optical circuit.

First, the outline of the present invention will be described below. Specific embodiments will be described later.
The outline of the present invention is as follows: (1) A general-purpose metal can type PD without a fiber pigtail is used, and a plurality of metal can type PDs are integrally fixed to a holder part and used as an array part. (2) Holder part Is that the metal can-type PD is held by mechanical contact, and only a part of the metal can-type PD can be replaced if necessary. Furthermore, as a specific configuration for realizing these, (1) a configuration that holds the metal can-type PD with lens without angular deviation, and (2) a lens that is separately prepared together with the metal-can type PD without lens. It is an object to provide a configuration that holds the relative positions between the centers with high accuracy.

  As described above, a problem in the case of using the metal can type PD is that the fiber pigtail increases the size. On the other hand, the present invention provides an array type light receiving component that uses a metal can type PD without a fiber pigtail and arranges it in a predetermined positional relationship in a linear or planar manner.

  By using such an array light-receiving component, it is possible to integrate with an optical circuit while ensuring high performance and high reliability by directly connecting to an optical circuit having a multi-channel output manufactured separately. The problems caused by the fiber pigtails are not caused. Further, as already mentioned, ensuring reliability is an essential problem of a small and multi-channel light receiving component. This is because when one channel fails or when a defect is found after assembly, it is necessary to discard or replace all channels including defective channels as defective products.

  Compared with single-channel products, this leads to a significant drop in yield and high costs, and the need to ensure reliability so that all channels do not fail when shipping as a product. Therefore, high reliability that is not necessary will be required. In contrast, according to the present invention, the holder part and the metal can-type PD are fixed only by mechanical contact without using chemical bonding or bonding. As a result, it is possible to replace only the metal can PD having a defect.

  Now, the above gist is very simple and clear, but in reality, such a component has not been realized so far. This is because there is a problem of balance between the light receiving characteristics of the metal can-type PD and the dimensional tolerance and mounting accuracy of the general-purpose metal can-type PD. This problem will be described below.

  First of all, it should be noted that the light receiving characteristics of the light receiving parts individually packaged including the metal can type PD are such that the distance from the light incident window portion to the light receiving surface of the PD element is at least 500 μm to 1 mm or more. That is. Therefore, when the light emitted from the optical fiber is directly incident on the metal can type PD, the light spreads beyond the light receiving diameter of the PD element due to diffraction while propagating through this, and the light receiving efficiency is lowered. It is common to use a metal can type PD provided with a condensing lens. Such a metal can type PD with a lens condenses and receives incident light, so that it has not only good light receiving efficiency but also a great advantage in that the displacement tolerance in the lateral direction of the optical axis is greatly increased. . For example, even when a PD element having a light receiving diameter of 300 μm is used, a lateral displacement of incident light of ± 200 μm or more is allowed. This is because the lens is squeezed by the lens, so that even if the position of the incident light largely deviates, the magnification of the lens is reduced to reach the light receiving surface, so that the positional deviation on the light receiving surface becomes much smaller. Such characteristics are advantageous when manufacturing an array type light receiving component as in the present invention. That is, as will be described later, even with a structure in which a through-hole is provided at a predetermined position with a drill or the like on a suitable plate and a metal can type PD is simply inserted therein, the processing accuracy such as the position and the hole diameter is the above-mentioned tolerance. This is because it is sufficiently within the range, and positional deviation due to a difference in thermal expansion from the optical circuit is not a problem.

  However, such a PD with a lens has a characteristic that causes an extremely large decrease in light receiving efficiency when there is an angle shift of incident light. This depends on the design of the lens magnification, PD light receiving diameter, etc. Normally, in the case of a light receiving diameter of about 200 to 300 μm used as an optical monitor PD, the light receiving efficiency is 20 to 40 even with an angle shift of only about 3 °. % Of light reception efficiency may be reduced. Therefore, in order to realize the array-type light receiving component as described above, it is necessary to hold the light receivers without any angular deviation from each other.

  On the other hand, the length of the cap part of the metal can package is usually 2 to 4 mm, and the dimensional tolerance of the outer diameter of the cap part is usually about ± 100 to 200 μm. Of course, if the ones with the same dimensions are selected, the tolerance can be reduced, but this is not practical because it increases the cost.

  Therefore, as shown in FIG. 2, in order to insert the metal can type PD 21 into the plate 24 that has been subjected to the drilling process as described above, a light receiver having a hole diameter larger than the cap diameter of the can in consideration of the maximum tolerance. When the insertion hole 22 is opened, even if the cap 23 has a length of 3.5 mm and an outer diameter tolerance of ± 100 μm, a large angular deviation of 3.2 °, a length of 2 mm, and a tolerance of ± 100 μm is 5.7 °. As a result, the light receiving efficiency is greatly reduced to 50% or less. Naturally, a metal can with a small outer shape should be selected in order to make a small array. The smaller the size, the more difficult it is to avoid the angle shift caused by the backlash of the receiver insertion hole 22 described above. It is.

  Such a situation is a characteristic problem when an array type light receiving component is configured as in the present invention. That is, when the fiber pigtail is attached by aligning to a single metal can, there is no problem because there is an optimum position that can compensate for the angular deviation even if there is an angular deviation. On the other hand, when connecting an array-type light receiving component and an array optical waveguide whose position is fixed in advance, the optical axes cannot be individually adjusted. Can not do it.

  As described above, in the array-type light receiving component, the positional accuracy between the light receivers may be loose, but it is extremely severe with respect to the relative angular deviation, and the normally allowable range is 2 ° or less. On the other hand, according to the first configuration provided by the present invention described above, the lens-equipped metal can PD can be held without angular deviation. According to the second configuration of the present invention, the above-described problem can be solved by ensuring the relative positional accuracy of the lens separately from the holding of the metal can. In other words, since a large angle deviation occurs when the optical axis is deviated from the center of the lens, if the relative position of the center of the lens prepared separately can be determined with high accuracy, the allowable angle deviation of the metal can itself can be increased. It can be greatly increased.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(Embodiment 1)
3A and 3B are configuration diagrams for explaining the first embodiment of the array type light receiving component of the present invention. FIG. 3A is a perspective view, and FIG. 3B is a single light receiver. It is the top view which expanded the insertion hole. In the figure, 30 is an array type light receiving component, 31 is a holder component, 32 is a metal can type PD (light receiver), 33 is a cap portion, 34 is a lens, 35 is a light receiving device insertion hole, and 36 is a protrusion (pressing member). Is shown.

  The array-type light receiving component 30 according to the first embodiment holds a plurality of metal can-type PDs 32 each having a light-receiving element arranged in a metal can package, and the metal can-type PDs 32 arranged in a line or a plane and collectively held. A holder part 31, a light receiver insertion hole 35 provided in the holder part 31 for inserting the metal can type PD 32, and a plurality of protrusions provided in the holder part 31 so as to protrude from the peripheral wall of the light receiver insertion hole 35 Part 36.

  As the metal can type PD 32 with a lens, a small one having an outer diameter of the cap portion 33 and its tolerance of 2 mm ± 0.1 mm and a length of the cap portion 33 of about 2 mm was used for the purpose of miniaturization. The outer diameter of the stem is 2.4 mm ± 0.15 mm, and the lens 34 protrudes from the tip of the cap part 33 by about 0.8 mm. The light receiving element has a light receiving diameter of 300 μm. As the holder part 31, a black polycarbonate resin plate having a thickness of 3 mm was used, and the receiver insertion holes 35 were provided in 2 rows × 4 columns at a pitch of 2.54 mm. If the metal can-type PD 32 is inserted into the light receiver insertion hole 35, the tip of the lens 34 can be fixed at a position where it is retracted 200 μm from the surface of the holder part 31.

  The feature of the first embodiment is the structure of the light receiver insertion hole 35. By machining, a through hole having a diameter of 1.85 mm is first drilled, and further, the maximum diameter of the other portions is set to 2. so that three protrusions 36 remain isotropically from the center on the inner periphery of the receiver insertion hole 35. A hole having a shape as shown in FIG. Such processing can be easily performed by ordinary cutting processing, or a suitable material may be selected and molded using a mold. According to the present invention, the positional shift of the light receiver due to thermal expansion is not a problem with such a size, so the degree of freedom in selecting the material for the holder part is high.

  Now, in the array type light receiving component of the present invention, the inner diameter connecting the tips of the three protrusions 36 arranged on the inner periphery of the light receiving device insertion hole 35 includes the tolerance of the outer diameter of the cap portion 33 of the metal can type PD 32. Since it is smaller than the minimum value, if the cap part 33 of the metal can type PD 32 is press-fitted, it is isotropically tightened from the periphery by the three protrusions 36, and the angle can be automatically set without shifting the cylindrical center position of the metal can. It can be fixed without deviation. Here, the role of the protrusion 36 is extremely important in carrying out the present invention. In other words, since the PD external tolerance reaches a maximum of 200 μm, if such a structure is not provided and only a through hole with an inner diameter of 1.85 mm is provided, the holder part 31 is cracked or the metal can PD32 is provided. In addition to concern about damage to the welded part of the package due to deformation of the metal itself, there are problems that it is difficult to remove the metal can type PD 32 that has been press-fitted and it is difficult to repair the metal can type PD 32 even if there is a problem.

  On the other hand, in the array-type light receiving component 30 of the present invention, the distortion caused by the press-fitting of the metal can type PD 32 is absorbed by the deformation of the protrusion 36, so that a large outer diameter tolerance can be covered. . Further, according to the array type light receiving component 30 of the present invention, the metal can type PD 32 can be stably held during use if the contact area with the metal can type PD 32 is appropriately adjusted by designing the number of the protrusions 36 or the like. In addition, when the replacement is necessary, an effect of adjusting the holding force of the metal can-type PD 32 is obtained so that the replacement can be performed.

  FIG. 4 is a perspective view showing a connection structure with a planar optical circuit, which is an example of use of the array type light receiving component of Embodiment 1, in which the reference numeral 41 is a planar optical circuit, 42 is a glass plate, and 43 is a vertical optical path. A conversion mirror is shown. In addition, the same code | symbol is attached | subjected to the component which has the same function as FIG.

  As an example using the array type light receiving component of the present invention, a configuration of an 8ch array light receiving circuit is shown. A quartz-based planar optical circuit 41 formed on a silicon substrate is used, and the vertical optical path conversion mirrors 43 described in Patent Document 3 described above are provided at the ends of the eight optical waveguides. Further, a glass plate 42 was attached to the upper surface of the planar optical circuit 41 with a transparent adhesive, and an array type light receiving component was further bonded to the upper surface. At this time, only the holder part 31 is bonded to the glass plate 42, and a gap is formed between the glass plate 42 and the lens surface of the metal can-type PD 32. According to such a structure, even if a defect occurs in any of the metal can type PDs 32 after the integrated light receiving circuit is manufactured or in use, only the desired metal can type PD 32 is extracted and replaced or repaired. Is possible.

  In the above description, the electrode structure and electrical connection of the metal can type PD 32 are not particularly mentioned. This is because, as described above, it may be appropriately designed according to the case regardless of the gist of the present invention. Accordingly, in FIGS. 1 to 4, all of the figures have only one electrode pin provided on the back surface of the stem, but the present invention is not limited to this. For example, a positive / negative electrode having two pins may be used. When a one-pin electrode is used, the entire holder part 31 is made of a metal material, or a metal wiring board is prepared separately. The electrode can be taken out if it is brought into contact with the can casing which is the other electrode. When the entire holder part 31 is made of a metal material, a common electrode pin may be erected on the holder part 31.

(Embodiment 2)
FIG. 5 is a configuration diagram for explaining the second embodiment of the array type light receiving component of the present invention, and is an enlarged top view showing a receiver insertion hole provided in the holder component in the array type light receiving component according to the second embodiment. is there. In the figure, reference numeral 51 denotes a strain absorbing hole, and other components having the same functions as those in FIG.

  The array type light receiving component in the second embodiment has the same configuration as that of the first embodiment described above, and only the structure of the light receiver insertion hole 35 provided in the holder component 31 is different. In addition to the structure of the first embodiment, the light receiver insertion hole 35 has a strain absorption hole 51 having a diameter of 0.5 mm formed outside the three protrusions 36. According to such a structure, when the metal can-type PD 32 is press-fitted, the outer strain absorbing hole 51 is crushed in addition to the deformation of the protrusion 36, so that a larger PD external tolerance can be dealt with. In fact, it has been found that this structure can cover an outer tolerance of 300 μm or more. In the present embodiment, the inside of the strain absorbing hole 51 is a gap, but an elastic resin may be injected.

(Embodiment 3)
FIGS. 6A and 6B are configuration diagrams for explaining the third embodiment of the array type light receiving component of the present invention, and FIG. 6A shows the array type light receiving component according to the third embodiment. FIG. 6B is a cross-sectional view of a top view showing the structure of one light receiver insertion hole in the holder part. In the figure, 61 is a holder part, 62 is a receiver insertion hole, 63 is a coil spring insertion hole, 64 is a coil spring (pressing member), and other components having the same functions as those in FIG. is there. In the third embodiment, the holder member 61 and the coil spring 64 constitute a holding member.

  The array-type light receiving component in the third embodiment has the same configuration as that of the first embodiment, and only the structure of the light receiver insertion hole 62 provided in the holder component 61 is different. The light receiving device insertion hole 62 in the third embodiment is configured by a coil spring 67 instead of the projecting portion 36 having the structure of the first embodiment. That is, by machining, a through hole having a diameter of 2.2 mm was first drilled, and coil spring insertion holes 63 having a diameter of 0.5 mm were provided at three positions on the isotropic side at a position 1.4 mm away from the center of the hole. Further, coil springs 64 having an outer diameter of 0.5 mm were inserted into the three coil spring insertion holes 63. As a result, a part of the coil spring 64 protrudes into the receiver insertion hole 62 having a diameter of 2.2 mm, and its inner diameter is approximately 1.8 mm.

  When the metal can cap portion 33 is inserted into the light receiver insertion hole 62 of the array type light receiving component of the present invention, the coil spring 64 is deformed, and a clamping force is applied from the periphery, so that the metal can PD 32 can be held without angular deviation. . As described above, since the coil spring is used instead of the protrusion in the first embodiment described above, it is obvious that the coil spring need not be made of the same material as the holder part.

(Embodiment 4)
FIGS. 7A and 7B are configuration diagrams for explaining Embodiment 4 of the array type light receiving component of the present invention. FIG. 7A shows the array type light receiving component according to Embodiment 4. FIG. FIG. 7B is a cross-sectional view showing an assembly view showing the structure around one light receiver in the holder part. In the figure, reference numeral 71 is a holder part, 72 is a light receiver insertion hole, 73 is a leaf spring (pressing member), and other components having the same functions as those in FIG. In the fourth embodiment, the holder member 71 and the leaf spring 73 constitute a holding member.

  The array-type light receiving component in the fourth embodiment has the same configuration as that of the first embodiment, and only the structure of the light receiver insertion hole 72 of the holder component 71 is different.

  The receiver insertion hole 72 in the fourth embodiment is not provided with a protrusion in the receiver insertion hole 72 as a holding means for holding the cap portion 33 of the metal can package by tightening from the periphery in a substantially isotropic manner. This is that a leaf spring 73 is provided between the mold PD 32 and the inner wall of the light receiver insertion hole 72.

  That is, a plate spring 73 as shown in FIG. 7A was produced using a stainless steel plate having a thickness of 0.2 mm. When this is attached in advance to the cap portion 33 of the metal can type PD 32 and inserted into the light receiving device insertion hole 72 having a diameter of 2.5 mm, it is clamped by the leaf spring 73 and can be held without angular deviation. Thus, the holding means of the present invention does not have to have a structure such as a protrusion provided in advance on the holder component 71.

(Embodiment 5)
FIG. 8 is a configuration diagram for explaining the fifth embodiment of the array type light receiving component of the present invention, and is a cross-sectional view showing the structure around one light receiver in the holder component constituting the array type light receiving component according to the fifth embodiment. In the figure, reference numeral 81 is a holder part, 82 is a receiver insertion hole, 83 is a coil spring (pressing member), 84 is a cover member, and other components having the same functions as those in FIG. It is. In the fifth embodiment, the holder member 81, the coil spring 83, and the cover member 84 constitute a holding member.

  The array type light receiving component according to the fifth embodiment is an 8-channel array type light receiving component as in the first embodiment described above, but the holding means for holding the metal can type PD 32 without angular deviation is different.

  In this fifth embodiment, as in the first to fourth embodiments described above, the cap portion 33 is not held so as to be tightened from the surroundings, but is held so as to press the stem outer edge portion against the upper surface of the holder component 81. . The outer edge of the stem has a substantially flat surface, and this flat surface intersects the cylindrical center line of the metal can at a substantially right angle. Therefore, if the receiver insertion hole 82 on the holder part 81 side has a diameter of 2.2 mm, which is slightly smaller than the outer diameter of the stem, and the stem outer edge is pressed evenly against the flat part around the receiver insertion hole 82, the angle shifts. The position is decided without. The pressing was performed by placing a coil spring 83 on the top of the stem and screwing a cover member 84 having a through hole in the electrode pin portion from above.

  In such a holding method, there is a possibility that the cylindrical center line of the metal can and the center of the light receiver insertion hole 82 are slightly deviated from each other. However, as described above, the tolerance in the horizontal direction of the optical axis is as large as several hundred μm. If only the angular deviation is prevented as in the fifth embodiment, there is a certain effect.

(Embodiment 6)
FIG. 9 is a configuration diagram for explaining an array type light receiving component according to a sixth embodiment of the present invention, and is a cross-sectional view showing a structure around one light receiver in a holder component constituting the array type light receiving component according to the sixth embodiment. In the figure, reference numeral 91 is a holder part, 92 is a metal can type PD (light receiver), 93 is a cap part, 94 is a ball lens, 95 is a light receiver insertion hole, and the other functions are the same as those in FIGS. Constituent elements having the same reference numerals are attached. In the sixth embodiment, the holder member 91, the ball lens 94, the coil spring 83, and the cover member 84 constitute a holding member.

  The difference between the array type light receiving component according to the sixth embodiment and the first to fifth embodiments described above is that the metal can-type PD 92 is not provided with a lens but a lens-free metal can-type PD 92 having a flat window at the tip, Separately, a ball lens 94 is provided for each metal can type PD.

  That is, here, a stainless steel plate having a thickness of 4 mm is used as the holder component 91, and a receiver insertion hole 95 having a diameter of 2.2 mm is provided at a depth of 2.1 mm from the surface on one side, and 1. A 45 mm diameter hole was drilled to a depth of 1.4 mm. Further, a 1.2 mm diameter through hole was provided on the same 0.5 mm thick wall in the center. When a ball lens 94 having a radius of 0.75 mm ± 2.5 μm is press-fitted into the 1.45 mm diameter hole of such a holder component 91, the holder part 91 stops and is fixed at a portion that hits the partition wall. On the other hand, a cap part 93 of a metal can type PD92 without lens was inserted into the hole with a diameter of 2.2 mm, and the cover member 84 was fixed with screws through the coil spring 83 from above as in the fifth embodiment.

  Although the ball lens 94 is an extremely inexpensive general-purpose component, its outer tolerance is usually about 10 μm, and the accuracy is much higher than that of a metal can package. On the other hand, since the pitch error of hole machining by machining is about 10 to 20 μm, a hole that is slightly smaller than the diameter of the ball lens 94 is made as in the sixth embodiment, and the accuracy is improved by press-fitting into the hole. A lens array with a well-aligned center position can be produced.

  Thus, if the relative position between the lenses is accurate, the angle accuracy of the metal can-type PD itself is not necessary. This is because the angle shift becomes a problem in the above-described metal can package with a lens because the shift direction of the lens transmitted light and the shift direction of the light receiving surface are reversed in the angle shift caused by the backlash of the light receiver insertion hole 95. While a large reduction in light receiving efficiency occurs, as in the sixth embodiment, as long as the center position of the lens can be accurately obtained, there is no spot position deviation on the light receiving surface, so the angle required to hold the metal can PD itself The accuracy can be relaxed.

(Embodiment 7)
FIG. 10 is a configuration diagram for explaining an array type light receiving component according to a seventh embodiment of the present invention. FIG. 10 is a cross-sectional view showing a configuration of the array type light receiving component according to the sixth embodiment. Is a metal can type PD (light receiver), 103 is a cap portion, 104 is a microlens array, 104a is a micro lens, 105 is a light receiving device insertion hole, 107 is a coil spring (pressing member), and 106 is a cover member. In the seventh embodiment, the holder member 101, the microlens array 104, the coil spring 107, and the cover member 106 constitute a holding member.

  The difference between the array-type light receiving component according to the seventh embodiment and the sixth embodiment is that a microlens array 104 is used instead of the ball lens.

  That is, a microlens array 104 in which a through hole having a diameter of 2.2 mm is provided in a 2.5 mm thick plate, and a microlens array 104a is formed on one surface of the plate glass by etching, is received at the center of each lens 104a. The paste was aligned and aligned with the center of the insertion hole 105. The lens-free metal can-type PD 102 was inserted into the holder part 101 produced in this manner, and was fixed from the top in the same manner as in the sixth embodiment.

  Even with such a configuration, the relative positional accuracy between the lenses can be sufficiently obtained, and thus the same effect as in the sixth embodiment is obtained.

(Embodiment 8)
FIG. 11 is a block diagram for explaining the eighth embodiment of the array type light receiving component of the present invention. The external shape and the holding means for the metal can type PD are all the same structure as in the first embodiment, and the light incident side. This shows the positional relationship of the PD elements inside the metal can as seen from FIG.

  The feature of the array type light receiving component according to the eighth embodiment is that the metal can type PD 32 is held so that the center of the light receiving surface of the PD element 32a inside the metal can is positioned in substantially the same direction with respect to the cylindrical center line of the metal can 32b. This is the point. Such a configuration can be easily achieved by confirming in advance the center position deviation direction of the light receiving surface using a microscope or the like, and appropriately pressing the holder part 31 after rotating the metal can 32b appropriately so that it is in the same direction. realizable.

  Up to this point, only the outer shape of the metal can type PD has been described, but in reality, it is necessary to consider the mounting position shift of the PD element inside the metal can. In general, the optical monitor PD may have a diameter of 200 to 300 [mu] m so that the dark current is within a predetermined range and positioning is easy. On the other hand, since the mounting position deviation of the PD element is generally within ± 50 μm, in many cases, there is no need to worry about this. On the other hand, when it is desired to reduce the light receiving sensitivity variation to 200 μm, or when it is necessary to allow a mounting error up to about ± 100 μm for cost reduction, the mounting position deviation of the PD element cannot be ignored.

  On the other hand, in the eighth embodiment, the metal can 32b is rotated and held so that the center position of the light receiving surface of the PD element 32a is in the same direction with respect to the center of the metal can 32b. In this way, the effect of mounting error can be effectively reduced by half. If the metal can 32b is rotated and held in this manner, the position of the electrode pin changes, and subsequent handling is inconvenient, so it is convenient to use the one pin. On the other hand, such a structure can be obtained also by using the metal can 32b having a central target shape.

It is a block diagram of the conventional multi-channel optical monitor circuit. It is explanatory drawing of the structural example which arrange | positions metal can type | mold PD, and generation | occurrence | production of an angle shift. BRIEF DESCRIPTION OF THE DRAWINGS It is a block diagram for demonstrating Embodiment 1 of the array type light receiving component of this invention, (a) is a perspective view, (b) is the top view to which one light receiver insertion hole was expanded. FIG. 3 is a perspective view showing an example of use of the array-type light-receiving component of Embodiment 1 and a connection structure with a planar optical circuit. It is a block diagram for demonstrating Embodiment 2 of the array type light receiving component of this invention. FIG. 5 is a configuration diagram for explaining an embodiment 3 of the array type light receiving component of the present invention, where (a) is a top view and (b) is a cross-sectional view. FIG. 6 is a configuration diagram for explaining an embodiment 4 of the array type light receiving component of the present invention, where (a) is an assembly diagram and (b) is a cross-sectional view. It is a block diagram for demonstrating Embodiment 5 of the array type light receiving component of this invention. It is a block diagram for demonstrating Embodiment 6 of the array type light receiving component of this invention. It is a block diagram for demonstrating Embodiment 7 of the array type light receiving component of this invention. It is a block diagram for demonstrating Embodiment 8 of the array type light receiving component of this invention.

Explanation of symbols

11 Planar Optical Circuit 12 PD Array Element 13 Vertical Optical Path Conversion Mirror 24 Plate 21 Metal Can Type PD
22 Light receiver insertion hole 23 Cap part 30 Array type light receiving component 31 Holder component 32 Metal can type PD
33 Cap part 34 Lens 35 Light receiver insertion hole 36 Protrusion part (pressing member)
41 Planar optical circuit 42 Glass plate 43 Vertical optical path conversion mirror 51 Strain absorption holes 61, 71, 81, 91, 101 Holder parts 62, 72, 82 Light receiver insertion hole 63 Coil spring insertion hole 64 Coil spring (pressing member)
73 Leaf spring (pressing member)
83 Coil spring (pressing member)
84 Cover members 92, 102 Metal can type PD
93, 103 Cap portion 94 Ball lens 95, 105 Light receiving device insertion hole 104 Micro lens array 104a Micro lens array 106 Cover member 107 Coil spring (pressing member)

Claims (15)

  A plurality of metal can type light receivers in which a light receiving element is arranged in a metal can package, and the metal can type light receivers are arranged in a line or a plane and held together, and the metal can type light receiver is inserted. And a holding member provided with a light receiving device insertion hole, and the holding member has a pressing member for holding the metal can type light receiving device.   The metal can light receiver and the holding member are fixed to each other only by mechanical contact so that the metal can light receiver can be replaced without breaking. Item 4. The array type light receiving component according to Item 1.   A lens is fixed to the tip of the metal can type receiver, and the holding member tightens the cap portion of the metal can package from the periphery in a substantially isotropic manner so that the cylindrical center lines of the metal can are parallel to each other. The array type light receiving component according to claim 1, further comprising a holding unit that holds the light receiving portion.   The array type light receiving component according to claim 3, wherein an angle formed by a cylindrical center line of the metal can of the metal can type light receiver is 2 ° or less.   The holding means is composed of a light receiving device insertion hole that is opened larger than the cap portion of the metal can package, and a protrusion provided at least three or more at substantially equal positions on the inner periphery of the light receiving device insertion hole, 5. The array type light receiving component according to claim 3, wherein a circle inscribed at a tip of the protrusion is smaller than a cap portion of the metal can package without inserting the metal can type light receiver. .   6. The array-type light receiving component according to claim 5, wherein the inner periphery of the protrusion and the light receiving device insertion hole are made of the same material.   6. The array type light receiving component according to claim 5, wherein a strain absorbing portion made of a gap or an elastic material is provided at a substantially isotropic position around the outside of the cylinder of the light receiving device insertion hole.   The array-type light receiving component according to claim 5, wherein the protrusion is made of an elastic structural component or an elastic material.   The holding means is an elastic structural component or elastic member provided between a light receiving device insertion hole that is slightly larger than the cap portion of the metal can package, and the metal can type light receiving device and an inner wall of the light receiving device insertion hole. 5. The array type light receiving component according to claim 3, wherein the array type light receiving component is made of a material.   A lens is fixed to the tip of the metal can type receiver, and the holding member has the metal can type receiver insertion hole opened larger than the cap portion of the metal can package, A spring that presses the stem outer edge of the metal can package with the cap side inserted into the receiver insertion hole in the direction of the receiver insertion hole from the stem side so that the stem outer surface of the metal can package is evenly contacted with the stem side surface of the receiver insertion hole The array type light receiving component according to claim 1, further comprising a structure.   The array-type light receiving component according to claim 1, wherein the holding member collectively holds a lens that is paired with the metal can type light receiver together with the metal can type light receiver.   The array-type light receiving component according to claim 11, wherein the lens is a ball lens.   The array-type light receiving component according to claim 11, wherein the lens is a microlens array.   The metal can mold so that the center position of the light receiving portion of the light receiving element disposed inside the metal can package of the metal can type receiver is located in substantially the same direction with respect to the cylindrical center line of the metal can. 14. The array-type light receiving component according to claim 1, wherein a light receiver is provided on the holding member. 15. The metal can type photoreceiver, wherein a metal pin provided on a cylindrical center line of the metal can package is used as one electrode, and the outside of the metal can housing is used as the other electrode. The array type light receiving component according to any one of the above.

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