JP2005134126A - Electromagnetic spectrometer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a small electromagnetic wave spectroscopic apparatus having a high wavelength resolution with respect to a spectroscopic analysis technique for the purpose of qualitative / quantitative analysis of a substance.
In an electromagnetic wave spectroscopic device, a wavelength selection filter that selectively transmits specific wavelength components (λ ₂ , λ ₄ ...) Of an input electromagnetic wave P, and a wavelength of the transmitted specific wavelength component are continuously set. Wavelength scanning means 14 to be changed, diffraction grating 12 that separates the plurality of transmitted specific wavelength components for each wavelength, and a plurality of outputs provided continuously on the irradiation surface irradiated with the electromagnetic waves diffracted by the diffraction grating 12 The wavelength selection filter 13 selects a specific wavelength component so as to be output from each of the separate output ends 11b, and the wavelength scanning unit 14 includes a specific and single wavelength component. The wavelength of the specific wavelength component is continuously changed so as to scan the inside of the output end or the adjacent output end.
[Selection] Figure 1

Description

  The present invention relates to a spectroscopic analysis technique for the purpose of qualitative / quantitative analysis of a substance using electromagnetic waves, and particularly relates to an electromagnetic wave spectroscopic apparatus that is small and has high wavelength resolution.

  Conventionally, a continuous spectrum obtained by applying an electromagnetic wave to a substance to be measured and spectrally transmitting a transmitted wave or a reflected wave of the electromagnetic wave is measured, and qualitative / quantitative analysis of the substance is performed. And the miniaturization of a measuring apparatus is tried for the purpose of the simplicity of a measurement.

  FIG. 3 is a conceptual diagram showing an electromagnetic wave spectroscopic apparatus according to a conventional method for the purpose of downsizing. The conventional electromagnetic wave spectroscopic device 30 transmits a thin plate-like slab waveguide 31 transparent to an electromagnetic wave to be detected and an input electromagnetic wave P reflected or transmitted from a substance to be measured (not shown) to the slab waveguide 31. And an input channel waveguide 33. A diffraction grating 32 is formed on one end surface of the slab waveguide 31, and the input electromagnetic wave P input from the channel waveguide 33 connected to the other end surface is diffused in the slab waveguide 31 and diffused. Irradiate the entire surface. The input electromagnetic wave P is diffracted by the diffraction grating 32, is reflected in a different direction for each wavelength, and is thus spectrally separated.

  Then, the split electromagnetic wave R of the continuous spectrum is irradiated on the other end surface of the slab waveguide 31 and corresponds to the position of the detection element by a plurality of detection elements 34, 34. The electromagnetic wave intensity at the wavelength is detected. In this way, by analyzing the wavelength distribution of the intensity of the obtained input electromagnetic wave P, qualitative and quantitative analysis of the substance to be measured is performed.

Note that such analysis has been realized by an apparatus that is configured by disposing a single element such as a diffraction grating, an entrance / exit slit, and various lens systems in a free space propagation system from the past. The size of cm square and several cm thickness was required. On the other hand, in the electromagnetic wave spectroscopic device 30 shown in FIG. 3, the diffraction grating and the input / output structure are integrally formed by adopting the light propagation system constituted by the slab waveguide 31, and the device size is several cm square, It is possible to reduce the size to 1 mm (for example, see Non-Patent Document 1).
Takanori Kiyokura, Spectroscopic Research Vol. 51, No. 1, p. 23 (2002)

  However, when the above-described conventional electromagnetic wave spectroscopic device 30 is applied to an analysis in which a plurality of line spectra are close to each other such as a gas analysis and a high wavelength resolution is required for the separation and detection thereof, the following problems are described. was there.

That is, the wavelength range of the input electromagnetic wave P to be dispersed is set to the near infrared ray near the wavelength of 1500 nm, the distance between the diffraction grating 32 and the detection elements 34, 34. When the arrangement interval of... Is assumed to be about 10 .mu.m, the obtained wavelength resolution is about 15 nm.
On the other hand, considering that the wavelength resolution generally required in the above-described gas analysis is 0.1 to 1 nm, the conventional electromagnetic wave spectrometer 30 cannot sufficiently meet the demand for such high resolution measurement.

Further, in the technique in which the input electromagnetic wave P is separated only by the diffraction grating 32 as in the electromagnetic wave spectroscopy apparatus 30 shown in FIG. 3, the wavelength resolution of the electromagnetic wave spectroscopy apparatus 30 is such that the diffraction grating 32 and the detection elements 34, 34. In principle, and in inverse proportion to the arrangement interval of the detection elements 34, 34.
Therefore, when the wavelength resolution of the electromagnetic wave spectroscopic device 30 is improved, it is necessary to increase the distance between the diffraction grating 32 and the detection elements 34, 34... Or to reduce the arrangement interval of the detection elements 34, 34.

However, the upper limit of the size of the small electromagnetic wave spectroscopic device 30 that places importance on portability is about several centimeters, and the arrangement interval of the detection elements 34, 34. In general, it cannot be made smaller than 10 μm.
That is, in the conventional electromagnetic wave spectroscopic device 30, there is a trade-off between miniaturization of the device and high resolution, and it is generally difficult for an electromagnetic wave spectroscopic device for electromagnetic waves for miniaturization to obtain high resolution. There was a problem.

  The present invention has been made for the purpose of solving the above problems, and an object of the present invention is to provide an electromagnetic wave spectroscopic device that is small and has high wavelength resolution.

  The present invention was devised in order to achieve the above-described object. First, the electromagnetic wave spectroscopic device according to claim 1 is an electromagnetic wave spectroscopic device that separates and extracts an electromagnetic wave for each wavelength, and includes wavelength selection. A filter, a wavelength scanning unit, a diffraction grating, and a plurality of output terminals, wherein the wavelength filter is configured to transmit a specific wavelength component (hereinafter referred to as a specific wavelength component) having a plurality of line spectra or a narrow wavelength band transmitted by the filter. Each of the specific wavelength components is selected so that each is output from a separate output end, and the wavelength scanning means has the specific wavelength component within or adjacent to the specific and single output end. The wavelength of the specific wavelength component is continuously changed so as to scan a plurality of the output terminals.

  According to such a configuration, the electromagnetic wave transmitted or reflected through the substance to be measured is first input to the wavelength selection filter as the input electromagnetic wave P, and only a plurality of specific wavelength components are selectively extracted at predetermined discrete intervals. . The plurality of specific wavelength components extracted by the wavelength selection filter are multiplexed (hereinafter referred to as extraction waves) and transmitted through the wavelength selection filter. In addition, the wavelength of the specific wavelength component which comprises an extraction wave can be continuously changed by the wavelength scanning means provided in the wavelength selection filter. Then, when the extracted wave transmitted from the wavelength selection filter enters the diffraction grating, the extracted wave is separated and reflected in different directions for each wavelength, that is, dispersed.

  A plurality of output ends are continuously provided on the irradiation surface on which the dispersed electromagnetic waves are irradiated. The wavelength intervals of the plurality of specific wavelength components are adjusted by the wavelength selection filter so that each of these spectral lines is output from a separate output end. In response to the continuous change of the wavelength of the specific wavelength component extracted by the wavelength scanning means, the plurality of extracted specific wavelength components are scanned at the output surface and simultaneously detected at the plurality of output ends. The

  If the wavelength scanning means is controlled so that both end portions of the scanning range of a specific wavelength component are in contact with both end portions of the scanning range of the specific wavelength component adjacent thereto, the incident electromagnetic wave P is continuously applied to the wavelength. Can be spectroscopically separated.

  The electromagnetic wave spectroscopic device according to claim 2 is characterized in that in the electromagnetic wave spectroscopic device according to claim 1, a waveguide through which the specific wavelength component is transmitted is connected to the output end.

  According to such a configuration, the plurality of specific wavelength components diffracted by the diffraction grating can be separated and extracted outside the electromagnetic wave spectrometer.

  The electromagnetic wave spectroscopic device according to claim 3 is the electromagnetic wave spectroscopic device according to claim 1, wherein a detection element for detecting the intensity of the specific wavelength component is provided at the output end.

  According to such a configuration, the electromagnetic wave spectroscopic device can continuously detect and detect the electromagnetic wave with respect to the wavelength.

  The electromagnetic wave spectroscopic device according to claim 4 is the electromagnetic wave spectroscopic device according to any one of claims 1 to 3, wherein the wavelength selection filter includes a ring resonator. .

  According to such a configuration, only the specific wavelength component that matches the resonance wavelength of the ring resonator is selectively extracted from the electromagnetic wave input to the electromagnetic wave spectroscopic device, thereby forming an extracted wave that is multiplexed and transmitted from the wavelength selection filter. The

  The electromagnetic wave spectroscopic device according to claim 5 is the electromagnetic wave spectroscopic device according to claim 4, wherein the wavelength scanning unit is a temperature controller that changes a temperature of the ring resonator.

  According to this configuration, the refractive index of the ring resonator changes corresponding to the change in the temperature value of the ring resonator due to the action of the temperature regulator, and the resonance wavelength also changes accordingly, and is extracted to the wavelength selection filter. The wavelength of the specific wavelength component is changed.

  The electromagnetic wave spectroscopic device according to claim 6 is the electromagnetic wave spectroscopic device according to claim 4, wherein the wavelength scanning means is a mechanism for injecting carriers into the ring resonator electrically.

  According to such a configuration, this carrier injection mechanism changes the refractive index of the ring resonator in response to a change in the amount of carriers injected into the ring resonator, and the resonance wavelength also changes accordingly. The wavelength of the specific wavelength component extracted by the selection filter is changed.

  The electromagnetic wave spectroscopic device according to claim 7 is the electromagnetic wave spectroscopic device according to any one of claims 1 to 6, wherein the electromagnetic wave spectroscopic device is a medium that transmits the incident electromagnetic wave, the extracted wave, and a specific wavelength component thereof. The material of the core part is one substance selected from the group consisting of silicon, silicon nitride compound, gallium arsenide compound and indium phosphorus compound, and the cladding part covering the outer peripheral surface of the core part is made of gallium arsenide It is one substance selected from the group consisting of a compound, an indium phosphorus compound, a silicon oxide compound, an epoxy polymer, a polyimide polymer, and air.

  According to such a configuration, the core portion is made of a material having a higher refractive index than the cladding portion. Thereby, even if the transmission medium for transmitting the input electromagnetic wave, the extracted wave and the specific wavelength component is accompanied by a bend with a small curvature radius, the electromagnetic wave being transmitted does not leak to the outside.

  The electromagnetic wave spectroscopic device according to claim 8 is the electromagnetic wave spectroscopic device according to any one of claims 1 to 7, wherein the diffraction grating is one end surface of a dielectric slab that is transparent to the electromagnetic wave to be detected. The connection ends of the plurality of output ends and the wavelength selection filter are formed on the other end surface of the dielectric slab.

  The electromagnetic wave spectroscopic device according to claim 9 is the electromagnetic wave spectroscopic device according to claim 8, wherein the thickness of the dielectric slab is the input electromagnetic wave propagating through a uniform medium made of a material constituting the dielectric slab, It is characterized in that it is ½ or less of the wavelength of the extracted wave and its specific wavelength component.

  According to such a configuration, the entire shape of the electromagnetic wave spectroscopic device is manufactured in a small size by applying a semiconductor device manufacturing process, for example. Moreover, when the thickness of the dielectric slab is ½ or less of the wavelength of the input electromagnetic wave, the extracted wave, and the specific wavelength component thereof, the dielectric slab satisfies the single mode propagation condition for these electromagnetic waves. As a result, when the extracted wave transmitted to the dielectric slab is incident on the diffraction grating and diffracted, a phenomenon that occurs in multimode conditions such as the diffraction angle varies depending on the propagation mode is avoided, and a narrow and strong spectral line is generated. obtain.

  The electromagnetic wave spectroscopic device according to claim 10 is the electromagnetic wave spectroscopic device according to any one of claims 1 to 9, wherein a ring resonator is formed inside the ring resonator, and the input electromagnetic wave, The cross-section of the core portion of the channel waveguide that transmits the extracted wave and the specific wavelength component thereof is less than the wavelength of the input electromagnetic wave, the extracted wave, and the specific wavelength component that propagates in the uniform medium made of the material constituting the core portion. It is a quadrangle whose length is one side.

  According to such a configuration, the input electromagnetic wave transmitted through the ring resonator, the extracted wave, and the specific wavelength component thereof satisfy a single mode condition, and the extracted wave to be transmitted has a plurality of wavelength intervals at equal intervals. It is composed of specific wavelength components.

  The electromagnetic wave spectroscopic device according to the present invention can provide an electromagnetic wave spectroscopic device that is small enough to be carried and has high wavelength resolution.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a top view showing a basic configuration of an electromagnetic wave spectroscopy apparatus according to an embodiment.

  As shown in FIG. 1A, the electromagnetic wave spectroscopic device 10 includes a slab waveguide (dielectric slab) 11, a wavelength selection filter 13, a wavelength scanning unit 14, and a specific wavelength extraction waveguide 15.

The wavelength selection filter 13 includes an input optical waveguide 13a, a ring resonator 13b, and a channel waveguide 13c, and is connected to the slab waveguide 11 at the connection end 11a.
The wavelength selection filter 13 channel-guides an extracted wave W obtained by selectively extracting only a specific wavelength component that matches the resonance wavelength of the ring resonator 13b from the input electromagnetic wave P input to one end of the input optical waveguide 13a. The signal is output from one end of the waveguide 13c.

The ring resonator 13b usually has many resonance points, and the intervals between the resonance wavelengths (λ ₂ , λ ₄ , λ ₆ ...) Are almost constant. Further, since the ring resonator 13b can realize a Q value of about 1000 to 10000, a specific wavelength component having a narrow wavelength distribution of about 1 / Q of the resonance wavelength, that is, the order of 0.1 to 1 nm can be obtained. it can. A plurality of specific wavelength components discretely extracted from the input electromagnetic wave P at a certain wavelength interval (λ ₂ , λ ₄ , λ ₆ ...) Are output from the wavelength selection filter 13 as multiplexed extracted waves W. Is done.

  Here, although not particularly referring to the drawings, the core portion, which is a medium for transmitting the input electromagnetic wave P and the extracted wave W, inside the input optical waveguide 13a, the ring resonator 13b, and the channel waveguide 13c, and the outer peripheral surface of the core portion The design criteria for the clad part coated on the substrate will be described. First, the material of the core part and the clad part is preferably selected so that the refractive index of the material in the clad part is smaller than the material of the core part, and the refractive index difference between them is as large as possible. Specifically, for example, in the infrared region often used in gas analysis, silicon, a silicon nitride compound, a gallium arsenide compound, an indium phosphorus compound, or the like is used for the core portion, and a gallium arsenide compound or indium phosphorus is used for the cladding portion. System compounds, silicon oxide compounds, epoxy polymers, polyimide polymers, air, and the like are used.

  Thus, even if the waveguide through which the electromagnetic wave is transmitted is arranged with a small radius of curvature by selecting the material of the core part and the clad part, the electromagnetic wave being transmitted has the small radius of curvature. There is no leakage to the outside. Therefore, since the bendability of the circuit pattern is allowed at a certain level in the design of the circuit pattern of the waveguide, a preferable result can be obtained from the viewpoint of pursuing the miniaturization of the electromagnetic wave spectroscopic device 10. In addition, the determination of the material of the core part and the clad part also takes into consideration factors such as the propagation characteristics of the wavelength band of the transmitted electromagnetic wave, the workability of the waveguide structure, and the availability.

Next, regarding the cross-sectional dimension of the core part, the cross-sectional dimension of the core part of the ring resonator 13b and the channel waveguide 13c is a length equal to or shorter than the wavelength of the electromagnetic wave P or the extracted wave W transmitted through the waveguide. And a rectangle. As a result, the electromagnetic wave P or the extracted wave W transmitted through the waveguide satisfies the single mode condition. Thus, by satisfying the single mode condition, an effect is obtained in which the wavelength intervals (λ ₂ , λ ₄ , λ ₆ ...) Of a plurality of specific wavelength components constituting the extracted wave are equal.

  The wavelength scanning unit 14 has a function of continuously changing the wavelength of a specific wavelength component that is a component of the extracted wave W output from the wavelength selection filter 13. Specifically, this action is achieved by the method described below. That is, a method in which the refractive index of the ring resonator 13b and the channel waveguide 13c is controlled by installing a temperature control medium such as an ohmic resistance heater (not shown) and appropriately controlling the temperature. Alternatively, a method in which the refractive index of the ring resonator 13b and the channel waveguide 13c is appropriately controlled by arranging electrodes and electrically injecting carriers by the applied voltage.

  The slab waveguide (dielectric slab) 11 includes a diffraction grating 12 formed on one end surface, a connection end 11a connected to the other end surface of the channel waveguide 13c, and an aperture window of a spectral line S described later on the other end surface. The output ends 11b are formed. When the extracted wave W is input from the connection end 11 a to the slab waveguide 11, the extracted wave W is diffused and propagated inside the slab waveguide 11 and emitted to the entire surface of the diffraction grating 12.

The material of the core portion of the slab waveguide 11 is a dielectric slab that is transparent to the extracted wave W, and specifically includes the materials described above. Further, the outer peripheral surface of the core portion of the slab waveguide 11 is covered with the clad portion of the above-described material in the same manner.
The thickness of the dielectric slab is about ½ of the wavelength of the electromagnetic wave transmitted through the slab waveguide 11. Specifically, when the target electromagnetic wave is infrared having a wavelength of 1500 nm and the refractive index of the dielectric slab is 3.5, the thickness of the dielectric slab is 214 nm or less.

  Thus, when the thickness of the dielectric slab becomes a predetermined value, the electromagnetic wave transmitted to the slab waveguide 11 satisfies the single mode condition. Thereby, when the extraction wave W transmitted through the slab waveguide 11 enters the diffraction grating 12 and is diffracted, a phenomenon that occurs in a multimode condition in which the diffraction angle varies depending on the propagation mode is avoided. For this reason, an effect that cannot be obtained under a multi-mode condition is obtained such that a specific wavelength component of a single mode is diffracted by the diffraction grating 12 to obtain a spectral output having a large intensity even in a narrow width.

  The diffraction grating 12 is formed on one end face of the slab waveguide 11 and has an infinite number of equally spaced grooves on its surface. When the extracted wave W is input to the diffraction grating 12, the diffracted lights diffracted in the respective grooves interfere with each other, and a plurality of specific wavelength components constituting the extracted wave W are separated from each other at the other end surface, thereby slab waveguide. 11 is condensed at the end opposite to the diffraction grating 12. Therefore, if a plurality of output ends 11b, 11b,... Having a constant aperture width and arranged at a constant interval are provided at the plurality of condensing points, each specific wavelength component can be extracted independently.

  The specific wavelength extraction waveguides 15, 15... (FIG. 1A) are connected to the output ends 11 b, 11 b, respectively, and each of the dispersed specific wavelength components is extracted to the outside of the slab waveguide 11. is there. Moreover, as shown in FIG.1 (b), the structure which arrange | positions the detection elements 16, 16 ... to output ends 11b, 11b ..., respectively is also considered.

  The detection element 16 detects the intensity of the electromagnetic wave, and the electromagnetic wave incident on the diffraction grating 12 from the distribution of the intensity of each specific wavelength component detected by the plurality of detection elements 16, 16. Is detected. In addition, although the detection element 16 is displayed with a certain gap in FIG. 1B, it is assumed that the detection element 16 is actually spread without a gap.

  Next, the operation of the electromagnetic wave spectroscopic device 10 will be described with reference to FIG. FIG. 2 is a conceptual diagram showing the output of the electromagnetic wave spectrometer. In FIG. 2, the horizontal axis corresponds to the wavelength of the detected electromagnetic wave, but may be converted to the distance of the portion where the output ends 11b, 11b. In FIG. 2, the vertical axis indicates the output intensity of the detection element 16.

In FIG. 2, output terminals 11 b (n, n + 1...) Indicate correspondence with arbitrary adjacent output terminals 11 b arranged on the other end surface of the slab waveguide 11. A broken line indicates an output distribution in the detection elements 16, 16... When an electromagnetic wave having a flat wavelength distribution characteristic is input to the connection end 11a without passing through the wavelength selection filter 13. A broken vertical line portion corresponds to a boundary portion between the detection elements 16 and indicates that the output (output intensity) is zero in this portion. Moreover, the reason why the upper part of the broken line is curved is that there is a sensitivity distribution that increases toward the center of the detection element 16.
The interval between the dashed vertical lines (indicated in the figure as 15 nm for convenience) is the wavelength resolution of the conventional electromagnetic wave spectrometer 30 (FIG. 3) that does not use the wavelength selection filter 13 and the wavelength scanning means 14. This corresponds to the arrangement interval of the detection elements 16b.

First, the input electromagnetic wave P is input from one end of the input optical waveguide 13a (FIG. 1). The input electromagnetic wave P is the wavelength of λ ₁ ... λ _n is a continuous wave multiplexed continuously. Here, it is assumed that the resonance wavelengths of the ring resonator 13b are λ ₂ , λ ₄ , λ ₆ . Then, specific wavelength components corresponding to the wavelengths λ ₂ , λ ₄ , λ ₆ ... Are selectively extracted from the input electromagnetic wave P and output to the channel waveguide 13c. Here, the wavelengths λ ₂ , λ ₄ , λ ₆ ... Are set such that the wavelength interval is the interval (15 nm) of the vertical stripes of the broken line. Then, the remaining wavelength components (λ ₁ , λ ₃ , λ ₅ ...) Of the input electromagnetic wave P pass through the input optical waveguide 13a as they are and are discharged from the other end.

An extracted wave W in which a plurality of extracted specific wavelength components (λ ₂ , λ ₄ , λ ₆ ...) Are multiplexed is input to the slab waveguide 11 from the connection end 11a, while diffusing the dielectric slab (core portion). Propagates toward the diffraction grating 12. When the extracted wave W is reflected by the diffraction grating 12, the extracted wave W is separated for each of the specific wavelength components (λ ₂ , λ ₄ , λ ₆ ...), And is projected onto the portion where the output ends 11b, 11b. . In this way, the specific wavelength components (λ ₂ , λ ₄ , λ ₆ ...) Are respectively separated from the specific wavelength extraction waveguides 15, 15... (FIG. 1A) or the detection elements 16, 16. ... (Figure 1 (b)).

The sharp peaks of a plurality of solid lines shown in FIG. 2 indicate the intensities of the specific wavelength components corresponding to the specific wavelength components (λ ₂ , λ ₄ , λ ₆ ...) In order. Here, as described above, the intervals of the wavelengths λ ₂ , λ ₄ , λ ₆ ... Are matched to the detection width of one detection element 16, so that each of the detection elements 16, 16. Specific wavelength components are distributed one by one.

  Next, the wavelength scanning unit 14 is operated to continuously change the resonance wavelength of the ring resonator 13b (15 nm or more). Then, the sharp peak of the solid line shown in FIG. 2 moves in the direction of the sharp peak indicated by the two-dot chain line in accordance with the change of the resonance wavelength. If the detection values in the detection elements 16, 16... Are plotted in correspondence with the amount of change in the resonance wavelength, a continuous wavelength distribution curve of the input electromagnetic wave P can be obtained.

  In the first place, in the prior art shown in FIG. 3, the arrangement interval of the detection elements 16 determines the resolution of wavelength detection. That is, the intensities of all wavelength components allowed by the opening of the detection element 16 are averaged and output. On the other hand, in the present invention, a plurality of specific line spectra or narrow band wavelength components are extracted from the input electromagnetic wave P by the wavelength selection filter 13, and the wavelength is continuously changed by the wavelength scanning means 14 and output. It was decided to detect at the end 11b. This makes it possible to detect the wavelength distribution of the input electromagnetic wave P with extremely high resolution in the electromagnetic wave spectroscopic device 10 according to the present invention.

  The above-described embodiment is an example for explaining the present invention, and the present invention is not limited to the above-described embodiment, and various modifications are possible within the scope of the invention. . For example, in the above description, the wavelengths of the plurality of specific wavelength components extracted from the input electromagnetic wave P are equal intervals, and the intervals coincide with the arrangement intervals of the output end 11b. By the way, the wavelength of the specific wavelength component extracted from the input electromagnetic wave P should just cover the whole wavelength range in the input electromagnetic wave P.

  Therefore, if the scanning range of the specific wavelength component is controlled by the wavelength scanning unit 14 so that adjacent ones touch each other or overlap each other, the wavelengths of the plurality of specific wavelength components need to be equally spaced. However, it is not necessary to make the interval coincide with the arrangement interval of the output end 11b. In this case, on this output end 11b, the wavelength scanning means is arranged so that both end portions of the scanning range of one specific wavelength component are in contact with or overlap each end portion of the scanning range of the specific wavelength component adjacent thereto. Control. This is because the detection of the specific wavelength component constituting the input electromagnetic wave P is performed without omission.

(A) It is a top view which shows the electromagnetic wave spectroscopy apparatus concerning embodiment of this invention. (B) It is a top view which shows the electromagnetic wave spectroscopy apparatus concerning other embodiment of this invention. It is a conceptual diagram which shows the output of the electromagnetic wave spectroscopy apparatus concerning embodiment of this invention. It is a top view which shows the conventional electromagnetic wave spectroscopy apparatus.

Explanation of symbols

10 Electromagnetic Spectrometer 11 Slab Waveguide (Dielectric Slab)
11a Connection end 11b, 11b ... Output end 12 Diffraction grating 13 Wavelength selection filter 13a Input optical waveguide 13b Ring resonator 13c Channel waveguide 14 Wavelength scanning means 15, 15 ... Specific wavelength component extraction waveguide (waveguide)
16, 16 ... Detection element P Input electromagnetic wave (electromagnetic wave)
W Extraction wave

Claims (10)

An electromagnetic wave spectroscopic device for separating and extracting electromagnetic waves for each wavelength,
Among the electromagnetic waves, a plurality of specific wavelength components having a line spectrum or a narrow band, a wavelength selection filter for selectively transmitting,
Wavelength scanning means for continuously changing the wavelength of the specific wavelength component transmitted by the wavelength selective filter;
A diffraction grating that separates the plurality of specific wavelength components transmitted from the wavelength selective filter for each wavelength;
A plurality of output ends provided continuously on an irradiation surface to which the electromagnetic wave diffracted by the diffraction grating irradiates, and
The wavelength selection filter selects the specific wavelength component such that each of the plurality of specific wavelength components is output from a separate output end,
The wavelength scanning unit continuously changes the wavelength of the specific wavelength component so that the specific wavelength component scans a specific and single output end or a plurality of output ends adjacent to the specific output end. An electromagnetic wave spectrometer characterized by that.   The electromagnetic wave spectroscopic apparatus according to claim 1, wherein an optical waveguide through which the specific wavelength component is transmitted is connected to the output end.   The electromagnetic wave spectroscopic apparatus according to claim 1, wherein a detection element that detects an output intensity of the specific wavelength component is provided at the output end.   The said wavelength selection filter is comprised from the ring resonator which permeate | transmits the said specific wavelength component which corresponds to a resonance wavelength among the said electromagnetic waves, The Claim 1 thru | or 3 characterized by the above-mentioned. Electromagnetic spectroscopy equipment.   The wavelength scanning unit is a temperature controller that changes a temperature of the ring resonator, and the ring resonator changes a refractive index corresponding to the temperature value. Electromagnetic spectroscopy equipment.   The wavelength scanning unit is a mechanism for electrically injecting carriers into the ring resonator, and the ring resonator changes a refractive index in accordance with an injection amount of the carriers. 4. The electromagnetic wave spectroscopic device according to 4.   The material of the core part, which is a medium for transmitting the single wavelength component, is one substance selected from the group consisting of silicon, silicon nitride compound, gallium arsenide compound, and indium phosphorus compound, and the outer peripheral surface of the core part is The clad portion to be coated is one substance selected from the group consisting of a gallium arsenide compound, an indium phosphorus compound, a silicon oxide compound, an epoxy polymer, a polyimide polymer, and air. Item 7. The electromagnetic wave spectroscopic device according to any one of items 6.   The diffraction grating is formed on one end surface of a dielectric slab that is transparent to the electromagnetic wave, and the plurality of output ends and the connection end of the wavelength selection filter are formed on the other end surface of the dielectric slab. The electromagnetic wave spectroscopic device according to claim 1, wherein: 9. The electromagnetic wave spectroscopic apparatus according to claim 8, wherein a thickness of the dielectric slab is equal to or less than ½ of a wavelength of the electromagnetic wave propagating through a uniform medium made of a material constituting the dielectric slab. .   The cross section of the core portion of the medium through which the electromagnetic wave is transmitted inside the ring resonator has a side length equal to or shorter than the wavelength of the electromagnetic wave propagating in the uniform medium made of the material constituting the core portion. The electromagnetic wave spectroscopic device according to any one of claims 1 to 9, wherein the electromagnetic wave spectroscopic device is a quadrangle.

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