JP2005180978A - Device for inspecting optical member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical member inspection device having handleability, capable of discovering flaws, defects or the like of a small-diameter member having a small diameter and a small radius of curvature, easily by one-time focusing. <P>SOLUTION: An inspection stand 2 of this optical member inspection device 1 is equipped with a first stage 21, having an X-table 27 and a second stage 22, having a Y-table 29 moving forward and backward or in the right and left directions, a third stage 23 having a rotating table 31 arranged in mat coincidence with the observation optical axis of an objective lens 41a and rotating about axis in the vertical direction, a fifth stage 25 having a curvedly moving table 36 for changing inclination, by moving slidingly on a concavely curved part 35a formed so that the dimension of its radius, whose rotation center is arranged on the observation optical axis is equal to a prescribed dimension, and a fourth stage 24 having a Z-table 34 moving in the vertical direction. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention provides an optical system capable of observing the outer surface by moving the stage and changing the position of the curved surface without adjusting the focal position after focusing on one place on the curved surface having a predetermined radius of curvature. The present invention relates to a member inspection apparatus.

  Conventionally, an elongated insertion portion of an endoscope is inserted into a body cavity or a duct, and a subject image in the body cavity or the duct is displayed on the screen of a display device so that the image can be observed. Endoscopic devices are widely used. In an endoscope used in such an endoscope apparatus, it is desired to further reduce the diameter of the insertion portion.

  In an electronic endoscope in which an imaging unit including a solid-state imaging device that captures a subject image is incorporated in an insertion portion of the endoscope, downsizing of the imaging unit is required in order to reduce the diameter of the insertion portion. .

  A flat cover glass or a plano-convex field lens is disposed on the front side of the light receiving surface of a CCD, which is a solid-state image sensor constituting these small image pickup units. If there are scratches or defects on the surface of the field lens or the like, the image quality of the endoscopic image is adversely affected depending on the location and size of the scratches. For this reason, all the lens surfaces were visually inspected.

  When inspecting a general lens with a relatively large diameter, an inspection method has been established in which the lens is placed on a cylindrical inspection jig such as an unfinished lens and the inspector visually inspects the lens surface. It was. In the case of this inspection, it was relatively easy to find scratches on the lens surface.

  In contrast, the field lens has a diameter of 3 mm or less. For this reason, it is impossible to install this small-diameter lens on a conventional cylindrical inspection jig. Therefore, it is conceivable to form a new cylindrical inspection jig and install small diameter lenses on the jig one by one, but the work of installing the small diameter lenses in a predetermined state is complicated and corresponds to inspection. It is expected to take a long time.

  For this reason, a plurality of field lenses are arranged on a pallet, for example, 10 vertically and horizontally, and a sensory test is performed by an inspector. At that time, first, screening is performed in the first inspection step. In this screening, field lenses arranged on a pallet are inspected collectively. In this inspection, the lens surface that has been judged as “Is there a flaw?” Is removed from the pallet, and a detailed re-inspection is performed in the second inspection step. On the other hand, if it is determined that “the lens surface is not damaged at all”, it is stored as an acceptable product and then sent to the next process.

  In the second inspection process, the size and position of the lens scratches determined as “Is there a scratch?” Are inspected in detail one by one through a stereomicroscope. At this time, the inspector picks the small-diameter lenses one by one with the tweezers and holds the lens picked with the tweezers so as to change the angle with respect to the illumination light for inspection, and judges the size of the wound or the like. Was judged. And the lens judged to be rejected was discarded as a defective product. The field lens is provided with an AR coating which is a centering, polishing and antireflection coating.

  However, the visual inspection using the stereomicroscope in the second inspection step is a skillful technique, and it takes time to train the inspector, so it is difficult to secure the inspector. Moreover, since it is a visual sensory test, the judgment criteria are different for each inspector. For this reason, there has been a problem that the quality varies. Moreover, even when the same inspector inspects the same lens on different days, it is known that the same inspection result as the previous inspection result cannot be obtained, and it is difficult to maintain stable quality.

  For this reason, it is conceivable to introduce a commercially available general-purpose measuring device into the inspection process, but this measuring device is expensive and cumbersome. In addition, there are problems such as the time and cost required for maintenance and management of the measuring instruments, so it has not been possible to introduce general-purpose measuring instruments.

  The present invention has been made in view of the above circumstances, and is an easy-to-use optical that can easily find a scratch or a defect on the surface of a small-diameter member having a small diameter and a small radius of curvature by adjusting the focus once. It aims at providing a member inspection device.

An optical member inspection apparatus according to the present invention includes an inspection table including a plurality of electrically driven stages including a stage having a table on which an inspection target member is disposed, and an inspection target member disposed on a predetermined stage of the inspection table. A microscope equipped with an objective lens facing the illuminator, an illuminating device for generating illumination light for illuminating the inspection target member disposed on the stage, and an illumination light disposed on the stage and generated by the illuminating device. A camera device including a solid-state imaging device that images the inspection target member through the objective lens, a control unit that performs operation control of an electrically driven stage of the inspection table, and optics of the inspection target member imaged by the camera device An optical member inspection apparatus comprising: a control device having an image processing unit that constructs an image of a member to be inspected based on an electrical signal obtained by photoelectrically converting an image. Te,
The inspection table moves to at least one of the first axis direction orthogonal to the vertical axis or the second axis direction orthogonal to the first axis orthogonal to the vertical direction to the table. A first moving unit that moves the arranged inspection target member in the front-rear or left-right direction, and a vertical axis that is arranged to coincide with the observation optical axis of the objective lens, are arranged on the table A second moving part that rotates and moves a member to be inspected, and a sliding movement on a concave curved surface formed with a predetermined radial dimension above the table and having a center of rotation disposed on the observation optical axis. A third moving part that swings so as to change a tilt state of the inspection target member arranged on the table, and a vertical movement to rotate a predetermined position of the inspection target member arranged on the table Up and down to match the center It has and a fourth moving section for moving to the direction.

  According to this configuration, when the inspection target member is a plano-convex lens having a curved surface with a radius of curvature A, for example, after the plane of the plano-convex lens is arranged facing the table surface, first, the stage is moved by the fourth moving unit. The height position of the center of curvature of the plano-convex lens is made to coincide with the position of the rotation center that is the center of the concave curved surface with the radius B, for example. Then, a focus adjustment mechanism (not shown) provided in the microscope is used to focus on, for example, a part of the outer peripheral portion of the plano-convex lens. Next, the stage is moved by the first moving unit and adjusted so that the center of the plano-convex lens is positioned on the observation optical axis of the objective lens.

  Then, the distance from the point where the plano-convex lens surface formed of a curved surface intersects the observation center to the concave curved surface is A + B. From this state, for example, when the inclination of the plano-convex lens is changed by operating the third moving unit, the surface position of the plano-convex lens that intersects the observation optical axis changes, but the plano-convex lens that intersects the observation optical axis The distance from the surface to the concave curved surface does not change with A + B. In this state, for example, when the plano-convex lens is rotated by operating the second moving unit, the surface position of the plano-convex lens that intersects the observation optical axis changes, but the plano-convex lens surface that intersects the observation optical axis The distance from the concave surface to the concave curved surface remains A + B and does not change.

  Therefore, the center of curvature of the member to be inspected is arranged on the observation optical axis, and after focusing on a part on the curved surface in a state where the center of curvature is matched with the height position of the concave curved surface, the second By appropriately operating the moving unit or the third moving unit to change the inspection posture of the inspection target member with respect to the observation optical axis, the curved surface of the inspection target member can be observed.

  According to the present invention, it is possible to provide an easy-to-use optical member inspection apparatus that can easily find a scratch or a defect on a surface of a small-diameter member having a small diameter and a small curvature radius by performing focus adjustment once. it can.

Embodiments of the present invention will be described below with reference to the drawings.
1 to 5 relate to an embodiment of the present invention, FIG. 1 is a perspective view illustrating the configuration of an optical member inspection device, FIG. 2 is a block diagram illustrating the configuration of the optical member inspection device, and FIG. 3 is an inspection table. FIG. 4 is a diagram for explaining a state in which the inspection target member is arranged on the examination table and a state in which the examination target member is arranged at the examination position. FIG. 5 is a diagram for explaining the operation of the examination table. FIG.

  4A shows a state in which the inspection target member is arranged on the inspection table, FIG. 4B shows a state in which the inspection target member of the inspection table is moved to the inspection position, and FIG. ) Is a diagram for explaining the relationship between the change in position of the inspection target member and the observation state when the inspection target member moved to the inspection position is moved around the rotation center of the bending table. FIG. 5B is a diagram for explaining the relationship between the change in position of the inspection target member and the observation state in a state in which the bending table is further moved around the rotation center.

  As shown in FIGS. 1 and 2, an optical member inspection apparatus (hereinafter abbreviated as an inspection apparatus) 1 according to this embodiment is a centering, polishing, and reflection that constitutes an imaging apparatus of an endoscope, which is a member to be inspected. A plurality of stages 21,..., 25 that can be operated electrically, including a stage 21 having a table on which a plano-convex lens (hereinafter abbreviated as a lens) is arranged, which is called a field lens with an AR coat as a prevention coat The microscope 3 including the inspection table 2 provided, a plurality of objective lenses 41 a, 41 b, 41 c... For observing the lens 20 arranged on the table of the stage 21 of the inspection table 2, and the stage 21. The illumination device 4 that supplies the illumination light for inspection that illuminates the lens 20 that is disposed, and the inspection target surface of the lens 20 that is disposed in the microscope 3 and disposed on the stage 21 For example, a CCD camera (hereinafter abbreviated as a camera) 5 having a built-in CCD 5a, which is a solid-state imaging device, and the operation control of each stage 21,. A stage control unit 61 based on this, an image processing unit 62 that generates lens surface image data based on an electrical signal obtained by photoelectric conversion of the curved surface 20a of the lens 20 imaged by the camera 5, and this test A personal computer (hereinafter abbreviated as “PC”) 6 that also serves as a control device including a control unit 60 such as a calculation unit 63 that determines scratches and defective portions from lens surface image data and performs pass / fail determination of lenses based on a control program. For example, a liquid crystal monitor (hereinafter abbreviated as a monitor) is a display device on which the surface image of the lens to be tested generated by image processing by the PC 6 is displayed. It is mainly composed of) 7 and.

  Reference numeral 8 denotes an electrical box that supplies power to the PC 6 and the monitor 7. Reference numeral 9 denotes a keyboard, for example, for inputting lens data of a plano-convex lens or inputting various inspection information. Reference numeral 10 denotes a mouse, which operates a button or the like provided on a screen displayed on the screen of the monitor 7 to instruct a lens inspection mode to be described later. Reference numeral 11 denotes a manual operation switch box (hereinafter abbreviated as “switch box”), a suction switch for instructing start or stop of suction, an inspection switch for instructing start or stop of inspection, and the illumination device 4. An illumination switch for switching ON / OFF is provided. Reference numeral 12 denotes a gantry on which the monitor 7, the microscope 3, the inspection table 2, and the like are placed.

The inspection table 2, the microscope 3, the illumination device 4, the camera 5, and the PC 6 will be described with reference to FIGS.
First, the inspection table 2 will be described.

  The plurality of stages 21,..., 25 constituting the inspection table 2 are, for example, the X stage 21 as the first stage and the Y stage as the second stage in order from the objective lens 41 a side provided in the microscope 3. 22, a rotary stage 23 as a third stage, a Z stage 24 as a fourth stage, and an inclined stage 25 as a fifth stage.

  The X stage 21 includes an X stage main body 26 that is a first stage main body, and an X table 27 that is a first table slidably disposed with respect to the X stage main body 26. The X stage body 26 is a fixed member, and the X table 27 is a moving member. The moving direction of the X table 27 is slidably arranged in the left-right direction, which is the X direction shown in FIG. 3, which is the first axis orthogonal to the vertical direction. The X table 27 is formed with suction holes (see reference numeral 27b in FIG. 3) at predetermined positions for fixing and arranging the lens 20, which is an inspection target member, by suction. The X stage main body 26 is provided with an X direction moving mechanism including the X table 27 constituting the first moving unit and an X direction motor 27a for moving the X table 27 forward and backward.

  The Y stage 22 includes a Y stage main body 28 that is a second stage main body, and a Y table 29 that is a second table that is slidably disposed with respect to the Y stage main body 28. The Y stage main body 28 is a fixed member, and the Y table 29 is a moving member. The Y table 29 is slidably arranged in the front-rear direction, which is the Y direction shown in FIG. 3, which is a second axis orthogonal to the first axis.

  The X stage main body 26 is integrally fixed to the Y table 29. When the X stage main body 26 is fixed to the Y table 29, the positional relationship is such that the moving direction of the Y table 29 and the moving direction of the X table 27 sliding with respect to the X stage main body 26 are orthogonal to each other. Set. The Y stage main body 28 is provided with a Y direction moving mechanism including the Y table 29 constituting the first moving portion and a Y direction motor 29a for moving the Y table 29 forward and backward.

  The rotary stage 23 includes a rotary stage main body 30 that is a third stage main body, and a rotary table 31 that is a third table that is rotatably arranged with respect to a vertical axis of the rotary stage main body 30. The rotary stage body 30 is a fixed member, and the rotary table 31 is a moving member.

  The Y stage main body 28 is integrally fixed to the rotary table 31. By rotating the rotary table 31 in this fixed state, the Y stage 22 and the X stage 21 are rotated. The rotating stage body 30 is provided with a rotating mechanism including the rotating table 31 constituting the second moving unit and a rotating motor 31a for rotating the rotating table 31.

  The Z stage 24 includes a Z stage main body 32 that is a fourth stage main body, a sliding block 33 that is a sliding support member fixed to the Z stage main body 32 in a vertical state, and the sliding block 33. And a Z table 34, which is a fourth table, slidably arranged in the vertical direction, which is the Z direction in FIG. The Z stage main body 32 and the sliding block 33 are fixed members, and the Z table 34 is a moving member.

  The rotary stage body 30 is integrally fixed to the Z table 34. By moving the Z table 34 up and down in this fixed state, the rotary stage 23, the Y stage 22 and the X stage 21 move up and down, and the distance from the fifth stage changes. The Z stage main body 32 is provided with a Z direction moving mechanism provided with the Z table 34 constituting the fourth moving portion and a Z direction motor 34a which is a height adjusting mechanism for moving the Z table 34 up and down. Is provided.

  The tilt stage 25 includes a bending block 35 which is a fifth stage body, and a bending table 36 which is arranged so as to be swingable in the direction of arrow W in FIG. The bending block 35 is a fixed member, and the bending table 36 is a moving member. The curved block 35 is formed with an arcuate concave curved portion 35a having a predetermined radius (denoted as R in the drawing). On the other hand, the curved table 36 is formed with a curved convex portion 36b that slides with respect to the concave curved portion 35a of the curved block 35.

  The Z stage main body 32 is integrally fixed on the plane of the bending table 36 via a wedge-shaped attachment member 37. In this fixed state, the Z stage 24, the rotary stage 23, the Y stage 22 and the X stage 21 are changed into an inclined state by sliding the bending table 36 along the concave curved portion 35a. The bending block 35 includes a movement table 36 that constitutes a third moving unit, and a movement motor 36a that slides the bending table 36 on the concave curved portion 35a. A mechanism is provided.

  Then, in the inspection table 2 configured by combining the stages 21,..., 25, as shown in FIG. 3, the observation optical axis indicated by the two-dot chain line of the objective optical system and the rotary table 31 configuring the rotary stage 23. And the center of the concave curved portion 35a of the bending block 35 constituting the tilting stage 25, in other words, the rotation center C2 when the bending table 36 is swung is the observation optical axis. Located on the top.

Next, the microscope 3 will be described.
The microscope 3 mainly includes the objective lenses 41a, 41b, 41c,..., A lens barrel 42, and a microscope casing 43. The objective lenses 41a, 41b, 41c,... Have different magnifications. The lens barrel 42 is provided with a rotating plate 44 to which a plurality of types of objective lenses 41a, 41b,. The rotating plate 44 is rotated by an objective lens switching mechanism provided with an objective lens switching motor 44 a provided in the microscope casing 43. Accordingly, by rotating the rotating plate 44 by the objective lens switching mechanism, it is possible to switch and arrange an objective lens optimal for observation on the observation optical axis.

  Reference numeral 45 denotes a focus adjustment table. The inspection table 2 is placed on the focus adjustment table 45. The inspection table 2 is moved up and down by a focus adjustment mechanism provided with a focus adjustment motor 45 a provided on the focus adjustment table 45. In other words, by moving the inspection table 2 placed on the focus adjustment table 45 in the vertical direction by the focus adjustment mechanism, for example, the lens 20 is focused on the curved surface 20a of the lens 20 arranged on the X table 27. Can be done.

Next, the lighting device 4 will be described.
The illumination device 4 emits illumination light or the like for observing the lens 20 disposed on the X table 27 of the X stage 21. Specifically, the illumination light illuminated from the illuminating device 4 is such that when the inspection target member is a member that transmits light, such as the lens 20, the illumination light scattered from an oblique direction is made black in the observation range. The dark field illumination is used so as to leak into the observation range that looks black. Under this dark field illumination, for example, if there is a scratch on the surface of the lens 20, the scattered light is reflected by the scratch and the scratched portion looks white. This makes it possible to determine whether the surface of the lens 20 is scratched.

On the other hand, when the inspection target member is a member that reflects light, such as a metal sphere, for example, the illumination light from a halogen light source is uniformly illuminated from the center of the objective lens directly below. Use bright field lighting.
That is, the illumination device 4 can perform inspection by switching between dark field illumination and bright field illumination.

Next, the camera 5 will be described.
The camera 5 photographs the inspection object member through the objective lenses 41a, 41b, 41c,. The camera 5 is attached to a predetermined position of the lens barrel 42 of the microscope 3. Specifically, it is attached so that the center of the CCD 5 a built in the camera 5 and the observation optical axis of the observation optical system of the microscope 3 coincide. Thus, when the observation image captured by the camera 5 is displayed on the display screen of the monitor 7, the center of the observation screen coincides with the center of the observation image.

  And in the inspection apparatus 1 of this embodiment, it is confirmed whether the camera position is attached to the predetermined position twice in the morning and evening, for example, within one day. If the center of the CCD 5a and the observation optical axis of the microscope 3 are misaligned, adjustment is performed by moving the camera 5 side.

Finally, the PC 6 will be described.
A CPU (not shown) of the PC 6 is provided with a control program for automatically inspecting, an operation program for operating each device individually, and the like. The inspection table 2, microscope 3, illumination device 4, and camera 5 described above are controlled based on the control program so that the stages 21,. Control for switching the objective lenses 41a, 41b, 41c... Of the microscope 3, control for switching the illumination light emitted from the illumination device 4 to dark field illumination or bright field illumination, and driving of the CCD 5a provided in the camera 5 The inspection target member is an acceptable product by controlling, processing for generating image data from the electrical signal transmitted from the CCD 5a, and judging the size and position of the scratch on the surface of the inspection target based on this image data. A process for quantitatively determining whether or not is performed.

  In addition to the stage control unit 61, the image processing unit 62, and the arithmetic processing unit 63, the control unit 60 of the PC 6 includes an objective lens control unit 64, a focus adjustment unit 65, an illumination light control unit 66, and the like. Yes.

  The stage control unit 61 controls driving of the X-direction motor 27a of the X-direction moving mechanism that moves the X table 27 forward and backward based on a control program provided in the PC 6, and Y that moves the Y table 29 forward and backward. Driving control of the Y-direction motor 29a of the direction moving mechanism, driving control of the rotating motor 31a of the rotating mechanism that rotates the rotating table 31, and the Z-direction motor 34a of the Z-direction moving mechanism that moves the Z table 34 up and down Drive control and drive control of the moving motor 36a of the moving mechanism that swings the bending table 36 with respect to the rotation center are appropriately performed.

  The image processing unit 62 outputs a drive signal for driving the CCD 5a based on a control program provided in the PC 6, and forms an image on an imaging surface (not shown) of the CCD 5a, photoelectrically converts it, and transmits it. Image processing for generating image data from the electrical signal, processing for outputting the image data obtained by the image processing to the arithmetic processing unit 63 and the monitor 7 are performed.

  The arithmetic processing unit 63 performs drive control for changing the arrangement position of the lens 20 arranged on the X table 27 based on the lens data based on a control program provided in the PC 6, and the image processing unit 62. Various calculation processes are performed based on the image data output from the image data to determine the illumination state, whether or not the inspection target member is arranged at a predetermined inspection position, or the inspection target of the inspection target member Determine whether the surface is in focus, or calculate the size, position, etc. of the surface of the object to be inspected, and quantitatively determine whether the inspected member is acceptable Then, a control signal is output to each unit 61, 64, 65.

  Based on the lens data, the objective lens control unit 64 selects an optimal objective lens for inspection from among a plurality of objective lenses 41a, 41b, 41c... Based on a control program provided in the PC 6. A control signal for operating the rotating plate 44 so as to be arranged on the observation optical axis is output.

  The focus adjustment unit 65 performs control to move the focus adjustment table 45 on which the inspection table 2 is placed in the vertical direction based on a control program provided in the PC 6. Then, based on the calculation result of the calculation processing unit 63, a control signal for moving and placing the control signal so as to focus on the inspection target surface of the inspection target member arranged on the X table 27 of the inspection table 2 is provided. Output. The focus adjustment can also be performed using a manual focus adjustment knob indicated by reference numeral 46 in FIG.

  Based on a control program provided in the PC 6, the illumination light control unit 66 supplies dark field illumination or bright field to a control signal for maintaining the illumination light amount in an optimum state and illumination light for illuminating the inspection target member. A control signal for switching to illumination is output.

Here, the operation of the inspection table 2 in the inspection apparatus 1 configured as described above will be described with reference to FIGS. 4 (a) to 5 (b).
The inspection target member shown in the drawing is, for example, an opaque test piece 20A having a curved surface 20b with a radius of curvature r.
As shown in FIG. 4A, the test piece 20 </ b> A is arranged on the X table 27. At this time, a part of the test piece 20A is out of the observation range of the objective lens 41a or the curved surface 20b of the test piece 20A is not in focus.

  Therefore, first, based on a control program provided in the PC 6, the Z table 34 is moved, and the X table 27 and the Y table 29 are moved so that the curvature center C1 of the test piece 20A is set to the While being positioned at the rotation center C2 of the bending table 36, the curvature center C1 of the test piece 20A is made to coincide with the observation optical axis.

  As a result, as shown in FIG. 4B, the center of curvature C1 of the test piece 20A coincides with the observation optical axis, and the center of curvature C1 of the test piece 20A and the rotation of the bending table 36 are rotated. The center C2 coincides with the center C2 (denoted as C in the figure).

  Next, based on a control program provided in the PC 6, the focus adjustment table 45 is moved up and down while maintaining the aforementioned state. By this vertical movement, as shown in FIG. 4B, the focal point is brought into focus, for example, on the vertex of the curved surface 20b of the test piece 20A. When this in-focus state is obtained, the X table 27, the Y table 29, the Z table 34, and the focus adjustment table 45 are brought into a locked state.

  Next, with the tables 27, 29, 34, and 45 locked, based on the control program provided in the PC 6, only the turntable 36 is moved to the rotation center C2 as shown in FIG. With respect to the center C which is located, the concave curved portion 35a of the bending block 35 is slid in the direction of the arrow P, for example.

  Then, the inclination angle of the test piece 20A arranged on the X table 27 changes to θ1. At this time, instead of the curved surface vertex of the test piece 20A, a curved middle portion is positioned at the focal position. Further, when the bending table 36 is further slid in the direction of arrow P around the center C as shown in FIG. 5B, the test piece 20A disposed on the X table 27 The inclination angle further changes to the inclination angle θ2. At this time, instead of the middle part of the curved surface of the test piece 20A, the vicinity of the edge where the curved surface 20b and the side circumferential surface intersect is located at the focal position. Here, by further sliding the bending table 36 by a predetermined amount, although not shown in the figure, the test piece 20A is further changed to a tilted state, and the focus table is brought into a focused position. The edge portion of the test piece 20A is disposed.

  That is, the curved table 36 slides and moves on the concave curved portion 35a of the curved block 35 around the center C where the rotation center C2 is located. The distance from the surface 35a to the curved surface 20b of the focused test piece 20A is always constant (R + r). For this reason, when the bending table 36 is slid and moved, a part of the curved surface 20b of the test piece 20A is always placed at the in-focus position located on the observation optical axis.

  Therefore, with the center of curvature C1 of the test piece 20A aligned with the observation optical axis and with the center of curvature C1 of the test piece 20A aligned with the rotation center C2 of the bending table 36, The case where the bending table 36 or the rotary table 31 is operated in a state where the focus of the microscope 3 is focused on, for example, the edge of the test piece 20A will be described.

  First, when only the bending table 36 is slid about the center C, the vertex of the test piece 20A is passed through the apex without performing the operation of adjusting the focus of the microscope 3. Observe up to the other edge. Next, by rotating only the rotary table 31 about the rotation axis C3, observation over the entire edge of the test piece 20A can be performed without performing an operation of adjusting the focus of the microscope 3.

Therefore, in the state described above, based on a control program provided in the PC 6, the bending table 36 and the rotary table 31 are appropriately moved without performing an operation of adjusting the focus of the microscope. The entire outer surface of the curved surface 20b of the test piece 20A can be observed.
In this way, by configuring the inspection table constituting the inspection apparatus with an X table, a Y table, a Z table, a rotating table, and a bending table that can be moved, processing data such as a curvature radius, a thickness, a diameter, and the like in advance. When inspecting the inspection object member that can be obtained, the center of curvature of the inspection object member arranged on the table of the inspection table is made to coincide with the rotation center of the bending table, and the center of the inspection object member is By placing the observation table on the observation optical axis and moving the inspection table up and down in this state, the focus of the microscope is focused on the surface of the inspection target member. By appropriately moving, the surface of the inspection object member arranged on the table can be observed over the entire surface without adjusting the focus of the microscope.

In addition, since the X table, Y table, Z table, rotation table, and bending table that constitute the inspection table are configured by drive motors that move forward and backward with respect to one axis, the configuration of the inspection apparatus can be simplified. .
As a result, the inspection apparatus can be made cheaper and maintainability can be greatly improved as compared with a case where a complicated mechanism having a plurality of axes called parallel links is used.

  In this embodiment, the inspection target member is a plano-convex test piece having a radius of curvature r. However, as described above, the inspection target member is, for example, centering, polishing, and antireflection constituting an imaging apparatus for an endoscope. It is a ball member that reflects light, such as a plano-convex lens or a metal sphere, called a field lens with an AR coating as a coating. The lens is not limited to a plano-convex lens, and may be a plano-concave lens, a convex lens or a concave lens having curved surfaces on both sides, a flat glass having both surfaces flat, a spherical lens, or the like. Even if the inspection target member is an aspherical member, if it is possible to obtain processing data in advance, it is possible to perform inspection by moving each stage based on the processing data. .

  Further, in the present embodiment, the stage operation is performed on five axes, but the stage operation of the inspection apparatus is not limited to five axes, and any mechanism that can trace on a curved surface may be used.

  It should be noted that the present invention is not limited to the embodiments described above, and various modifications can be made without departing from the spirit of the invention.

[Appendix]
According to the embodiment of the present invention as described above in detail, the following configuration can be obtained.

(1) An inspection table including a plurality of electrically driven stages including a stage having a table on which an inspection target member is disposed, and an objective lens facing the inspection target member disposed on a predetermined stage of the inspection table A microscope, an illumination device that generates illumination light that illuminates an inspection target member disposed on the stage, and an inspection target member that is disposed on the stage and illuminated with illumination light generated by the illumination device. A photoelectric conversion is performed on a camera device including a solid-state imaging device that images through an objective lens, a control unit that performs operation control of an electrically driven stage of the inspection table, and an optical image of a member to be inspected imaged by the camera device. An optical member inspection device comprising a control device having an image processing unit that constructs an image of a member to be inspected based on an obtained electrical signal,
The inspection table is
An inspection object arranged on the table by moving to at least one of a first axis direction orthogonal to the vertical axis or a second axis direction orthogonal to the first axis orthogonal to the vertical direction. A first moving unit that moves the member in the front-rear or left-right direction;
A second moving unit that rotates about a vertical axis arranged in alignment with the observation optical axis of the objective lens, and that rotates and moves the inspection target member arranged on the table;
A tilted state of a member to be inspected arranged on the table by sliding and moving on a concave curved surface formed with a predetermined radial dimension above which the rotation center is arranged on the observation optical axis. A third moving part that swings so as to change
A fourth moving unit that moves in the vertical direction and moves in a vertical direction so that a predetermined position of the inspection target member arranged on the table matches the rotation center;
An optical member inspection apparatus comprising:

(2) The optical member inspection apparatus according to appendix 1, wherein the control unit of the control device controls the first moving unit, the second moving unit, the third moving unit, and the fourth moving unit.

(3) A first table including a first stage body that is a fixed member, and a first table on which the inspection target member that constitutes a first moving unit that is slidable in a predetermined direction of the first stage body is disposed, and the first table. A first stage having a first table moving mechanism for moving one table forward and backward with respect to the first stage body;
The first table includes a second stage body that is a fixed member, and constitutes the first moving unit that is slidable in a predetermined direction of the second stage body. A second stage having a second table on which the first stage main body is fixed so as to slide, and a second table moving mechanism for moving the second table forward and backward with respect to the second stage main body,
A third table provided with a third stage body as a fixed member, and constituting the second moving part rotatable with respect to a shaft part provided in the third stage body; A third stage having a third table rotation mechanism for rotating the third table relative to the third stage body;
A fourth table including the fourth stage main body, which is a fixed member, and constituting the fourth moving unit that is slidable in the vertical direction with respect to the fourth stage main body. And a fourth stage having a fourth table moving mechanism for moving the fourth table up and down with respect to a sliding support member disposed on the fourth stage body,
The third moving part is provided with a fifth stage main body that is a fixed member and has a concave curved surface with a predetermined radius, and has a convex curved surface that is slidable with respect to the concave curved surface formed on the fifth stage main body. A fifth stage having a fifth table on which the fourth stage main body is fixed and a fifth table moving mechanism for sliding the fifth table against the concave curved surface of the fifth stage main body;
The optical member inspection apparatus according to Supplementary Note 1 or Supplementary Note 2, comprising:

  According to this configuration, the inspection target member disposed on the first table of the first stage by appropriately moving each table of each stage by outputting a control signal from the control unit of the control device to each moving unit. By appropriately changing the inspection posture and the inspection position with respect to the objective lens, it is possible to automatically inspect a predetermined range of the outer surface of the inspection target member.

(4) The microscope includes a plurality of objective lenses having different magnifications, a rotating plate on which the objective lenses are disposed, and a lens switching mechanism that switches the objective lens by rotating the rotating plate,
The optical member inspection apparatus according to appendix 1, wherein a microscope control unit that rotationally controls the lens switching mechanism is provided in the control apparatus.

  According to this configuration, the objective lens arranged on the rotating plate can be switched based on the control signal from the microscope control unit of the control device. Therefore, for example, by setting the observation state at a low magnification at the start of the inspection, the inspection object member arranged on the table can be quickly captured. Then, after adjusting the position of the inspection object member, the inspection can be smoothly performed by operating the lens switching mechanism to switch the magnification of the objective lens. In other words, since the inspection can be started without arranging the inspection target member on the stage with high accuracy, the burden on the operator is reduced.

(5) The illumination device includes bright field illumination and dark field illumination for illuminating the inspection target member,
The optical member inspection apparatus according to appendix 1, wherein the control device is provided with an illumination control unit that switches the illumination state for illuminating the inspection target member between an illumination state by bright field illumination and an illumination state by dark field illumination.

  According to this configuration, for example, when the inspection target member transmits light such as an optical lens by switching to the illumination state corresponding to the inspection target member based on the control signal from the illumination control unit of the control device. Inspection can be performed using dark field illumination, and inspection can be performed using bright field illumination when the inspection target member is a member that reflects light, such as a ball bearing.

The perspective view explaining the structure of an optical member inspection apparatus Block diagram explaining the configuration of the optical member inspection apparatus Diagram explaining the configuration of the inspection table The figure explaining the state by which the inspection object member was arrange | positioned on the inspection stand, and the state which has arrange | positioned the inspection object member to an inspection position Diagram explaining the operation of the inspection table

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Optical member inspection apparatus 2 ... Inspection stand 3 ... Microscope 5 ... CCD camera 6 ... Personal computer 21 ... 1st stage 22 ... 2nd stage 23 ... 3rd stage 24 ... 4th stage 25 ... 5th stage 26 ... X stage Main body 27 ... X table 28 ... Y stage main body 29 ... Y table 30 ... Rotary stage main body 31 ... Rotary table 32 ... Z stage main body 33 ... Sliding block 34 ... Z table 35 ... Bending block 35a ... Concave curved portion 36 ... Music Moving table 45… Focus adjustment table Agent Patent attorney Susumu Ito

Claims (1)

A microscope including an inspection table including a plurality of electrically driven stages including a stage having a table on which an inspection target member is disposed, and an objective lens facing the inspection target member disposed on a predetermined stage of the inspection table And an illumination device that generates illumination light that illuminates the inspection target member disposed on the stage, and an inspection target member that is disposed on the stage and illuminated by the illumination light generated by the illumination device, through the objective lens. A camera device including a solid-state imaging device for imaging, a control unit that performs operation control of an electrically driven stage of the inspection table, and electricity obtained by photoelectric conversion of an optical image of a member to be inspected imaged by the camera device An optical member inspection device comprising a control device having an image processing unit for constructing an image of a member to be inspected based on a signal,
The inspection table is
An inspection object arranged on the table by moving to at least one of a first axis direction orthogonal to the vertical axis or a second axis direction orthogonal to the first axis orthogonal to the vertical direction. A first moving unit that moves the member in the front-rear or left-right direction;
A second moving unit that rotates about a vertical axis arranged in alignment with the observation optical axis of the objective lens, and that rotates and moves the inspection target member arranged on the table;
A tilted state of a member to be inspected arranged on the table by sliding and moving on a concave curved surface formed with a predetermined radial dimension above which the rotation center is arranged on the observation optical axis. A third moving part that swings so as to change
A fourth moving unit that moves in the vertical direction and moves in a vertical direction so that a predetermined position of the inspection target member arranged on the table matches the rotation center;
An optical member inspection apparatus comprising:

Images