JP2005173469A - Optical waveguide device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical waveguide device permitting to easily align a light source with an optical waveguide, and accurately and efficiently make the light incident to the optical waveguide. <P>SOLUTION: The optical waveguide device 64 consists of a platform 4 to which each LED is fixed, and a conjugation of a core layer 19 and cladding layer 6, and has an optical waveguide 9 formed so as to guide the light incident to the core layer 19 to the light exit side and holding bars 5 for holding the platform 4 and the optical waveguide 9 at a fixed interval, and the optical waveguide 9 is fixed on the platform 4 via bars 5. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an optical waveguide device comprising an assembly of a core layer and a clad layer and having an optical waveguide suitable for a light source module, optical interconnection, optical communication, and the like, and an optical information processing device such as a display using the optical waveguide device. It is.

  Until now, information transmission over a relatively short distance, such as between boards in an electronic device or between chips in a board, has been carried out mainly by electrical signals, but in order to improve the performance of integrated circuits, And high-density signal wiring are required. However, in the electric signal wiring, it is difficult to increase the speed of the electric signal and increase the density of the electric signal wiring due to problems such as signal delay and noise generation due to the time constant of the wiring.

  Optical wiring (optical interconnect cushion) that solves these problems has attracted attention. Optical wiring can be applied to various locations such as between electronic devices, between boards in electronic devices, or between chips in a board. For example, chips are used for transmission of signals over a short distance such as between chips. It is possible to construct an optical transmission and communication system in which an optical waveguide is formed on a substrate on which it is mounted, and a signal modulation laser beam or the like is used as a transmission path.

  On the other hand, it is also known to use an optical waveguide as a light source module of a display. For example, the development of a head mounted display that allows you to enjoy video software, games, computer screens, movies, etc. on your own day screen has been developed. There is a personal display that can be easily felt anywhere (see US Pat. No. 5,467,104).

  Red, green and blue light emitting diodes (LEDs) are used as the light source for this head mounted display, but the LED light is not coherent, has a wide radiation angle, and is condensed to combine the three colors. Is difficult. Therefore, a technique is known in which three types of LED light are combined through an optical waveguide to create uniform white light (Nikkei Electronics 2003.3.31, p127).

  An optical waveguide 103 having a structure as shown in FIG. 28 is also known (see Patent Document 1 described later).

  As shown in FIGS. 28A and 28B, the optical waveguide 103 is formed on a InP substrate 101 having a predetermined thickness made of a semiconductor substrate or a dielectric substrate, for example, a cladding made of InP having a thickness of 0.5 μm. A layer 102 is formed, and a core layer 106 made of InGaAs having a linear inclined surface 105 having a width of 50 μm on the incident surface 104 side and a width of 2 μm on the emission surface 107 side is formed thereon.

  Then, for example, a clad layer 108 made of InP having a thickness of 1 μm is formed so as to cover the clad layer 102 and the core layer 106, and the optical waveguide 103 is configured.

  Then, as shown in FIG. 28C, for example, a laser 109 (any color) as a light source is disposed on the incident side of the optical waveguide 103 on the cladding layer 102, and a light beam emitted from the laser 109. Is incident on the core layer 106 from the incident surface 104, and the light beam is condensed so that the spread of the core layer 106 becomes narrow as the width of the core layer 106 changes, as shown by a thick line, and then the light exit surface. The light is emitted from 107 to the outside.

  As another conventional example, an optical waveguide 113 having a structure as shown in FIG. 29 is also known.

  The optical waveguide 113 is formed on the silicon substrate 110 and the silicon substrate 110 and has a mirror-like inclined surface 114 at one end.

  The optical waveguide 113 is formed as a polymer organic compound optical waveguide, and is configured as a planar optical waveguide composed of a clad layer 112 and a core layer 111, each formed of a polymer organic compound resin. The core layer 111 is formed of a high molecular organic compound having a refractive index higher by about 0.1 to 3.0% than that of the cladding layer 112, and the material thereof is oxetane resin.

  Further, the end surfaces on the light incident surface side of the clad layer 112 and the core layer 111 are processed into an oblique shape of 45 degrees so as to rise to the right side to form a mirror-like inclined surface 114, and the laminated clad layer 112 and core are laminated. Of the layers 111, the lower core layer 111 protrudes outward from the upper clad layer 112. Further, the side surface of the substrate 110 is located on the light emission side with respect to the lower region of the mirror-like inclined surface 114.

JP-A-5-173036 (page 2, right column, line 17 to page 3, left column, line 8; FIGS. 1d and 1e)

  In the optical waveguide 113 according to the conventional example shown in FIG. 29, for example, an LED (G) 12G (other colors may be used) is disposed in the lower region of the mirror-like inclined surface 114 to emit light. The emitted light from the LED (G) 12G passes through the lower surface of the clad layer 112 and the core layer 111 and / or the clad layer 112, and is reflected after colliding with the mirror-like inclined surface 114. After entering and propagating as incident light, the light exits from the respective light exit surfaces.

  In this structure, it is larger than the side surface of the core layer 111 than the LED (G) 12G as a light source is disposed on the side surface side of the core layer 111 and the emitted light is incident on the core layer 111 from the side surface of the core 111 layer. In order to allow the emitted light to enter the core layer 111 from the mirror-like inclined surface 114 having an area, more emitted light can be incident into the core layer 111.

  The optical waveguide 113 of FIG. 29 is superior to the optical waveguide 103 of FIG. 28 in terms of the ease of arrangement of the light source with respect to the optical waveguide and the amount of incident light, but both optical waveguides are aligned between the light source and the optical waveguide. Since the reliability of (positioning) is still insufficient, it is desired to make the emitted light from the light source enter the core layer more efficiently and accurately.

  The present invention has been made in view of the above situation, and its purpose is to easily and accurately align the light source and the optical waveguide, and to improve the light incident efficiency and accuracy to the optical waveguide. It is an object of the present invention to provide an optical waveguide device that can be used, and an optical information processing device using the optical waveguide device.

That is, the present invention
A support with a fixed light source;
An optical waveguide composed of a joined body of a core layer and a clad layer, and configured to guide incident light to the core layer to the light exit side;
The present invention relates to an optical waveguide device having a spacer that holds the support and the optical waveguide at regular intervals, and the optical waveguide is fixed on the support via the spacer.

  The present invention also provides an optical information processing apparatus having the optical waveguide device of the present invention, a light source for inputting signal light to the optical waveguide device, and a light receiving means for receiving light emitted from the optical waveguide. It is.

  According to the present invention, the optical waveguide is fixed on the support to which the light source is fixed via the spacer for holding them at a constant interval. In addition, the light source and the optical waveguide can always be arranged at a desired interval (that is, the interval between the light source and the core layer of the optical waveguide is optimized by the spacer). Therefore, positioning between the light source and the optical waveguide can be performed relatively easily, and light incident on the core layer of emitted light emitted from the light source toward the core layer can be efficiently and accurately performed. It can be carried out.

  In the present invention, in order to absorb the reflected light from the core layer so that the reflected light from the optical waveguide (in particular, the core layer) is not emitted as stray light from the light emitting surface, the optical waveguide and the support are supported. It is desirable that a light-absorbing material (for example, a black resin) is filled in the gap that forms the gap with the body.

  Further, in order to provide a desired interval between the optical waveguide and the light source, and to facilitate the arrangement of the light source, the support body under the light incident portion of the optical waveguide fixed on the support body It is desirable that a recess is formed in the recess, and the light source is fixed to the bottom surface of the recess.

  The light incident surface of the light incident portion of the optical waveguide is a fixed surface of the support so that the light emitted from the light source is efficiently incident into the core layer of the optical waveguide from the lower part of the optical waveguide. It is desirable to be inclined with respect to.

  Further, in order to provide a desired interval between the core layer and the light source, the optical waveguide has a structure in which the core layer and the cladding layer are laminated, and the core layer is bonded onto the spacer. It is desirable that

  In addition, in order to prevent incident light entering the clad layer and entering the interface between the clad layer and the substrate from being emitted outside the clad layer and re-entering the clad layer, the clad layer is formed on the clad layer. It is desirable that a substrate having a refractive index larger than that of the layer is bonded.

  The optical waveguide preferably has an air ridge structure having a ridge core layer in order to reduce stray light.

  Further, it is desirable that the support is fixed to the package member in order to fix the support and cope with an impact from the outside.

  Further, in order to electrically connect the light source and the external unit, it is preferable that the support and the package member are provided with a terminal for the light source and / or an external connection terminal.

  Further, it is desirable that the optical waveguide is formed of a polymer organic compound in order to improve the ease of forming the core layer and the clad layer and to improve the economy.

  In addition, in order to make more emitted light from the light source enter the core layer and to converge and emit the incident light, the core layer of the optical waveguide emits light from the light incident side. It is desirable that the width gradually decreases toward the side.

  Further, in order to converge the emitted light of the three primary colors, the light source is three types of light emitting diodes or lasers that emit the three primary colors, and each is disposed to face the light incident surface of the core layer. desirable.

  The core layer is preferably formed of a photocurable resin. This is because it is easy to pattern the core layer corresponding to the exposure pattern by irradiation with light (particularly ultraviolet rays), and it is also advantageous as a constituent material of the cladding layer. Examples of such a photocurable resin include high molecular organic materials such as oxetane resins described in JP 2000-356720 A. Such a high molecular weight organic material preferably transmits 90% or more of possible visible light having a wavelength of 390 nm or less. In addition to the photocurable resin, an inorganic material may be used for the core material or the clad material.

  In addition, as the optical waveguide material, for example, an oxetane resin made of an oxetane compound having an oxetane ring or a polysilane made of an oxirane compound having an oxirane ring can be used. A composition containing a cationic polymerization initiator capable of initiating polymerization by a chain reaction is preferably used.

  In the present invention, the light beam is efficiently condensed into a predetermined light flux and emitted from the optical waveguide, or the signal light emitted after being efficiently incident on the optical waveguide is scanned and projected by the scanning means. The present invention can be effectively used in displays configured as described above, optical information processing apparatuses such as optical communication configured to cause the above-described light to be incident on light receiving elements (optical wiring, photodetectors, etc.) of the next-stage circuit.

  Next, a preferred embodiment of the present invention will be specifically described with reference to the drawings.

First Embodiment Regarding the structure of the optical waveguide device 64 according to the present embodiment, a plan view of FIG. 1A, a cross-sectional view taken along line AA ′ of FIG. 1B (a plan view of FIG. 1A). As shown in the line AA ′ in FIG. 2 and the partial plan view of FIG. 2A, the convex portion 3 that forms an inverted U-shaped peripheral wall and the concave portion 2 formed by the convex portion 3 are provided. A package 1 having the same is disposed.

  A plurality of electrode pads 16 are provided on the top of the convex portion 3 of the package 1, and the electrode pads 16 and the external connection terminals 17 provided on the side surfaces of the package 1 are connected by wiring 18 embedded in the convex portion 3. Electrically connected. The external connection terminal 17 is used as an external terminal to be inserted into a connector of a control circuit unit (not shown).

  Next, as shown in FIG. 2B, there is a recess 11 for fixing the red light emitting LED (R) 12R, the green light emitting LED (G) 12, and the blue light emitting LED (B) 12B. A pair of bars 5 that are formed and for fixing an optical waveguide 9 described later are provided on both sides, and are electrically connected to the LED (R) 12R, LED (G) 12, and LED (B) 12B. The platform 4 having a plurality of electrode pads 15 is fixed at a predetermined position in the recess 2 of the package 1 as indicated by an arrow in the drawing.

  Further, as shown in FIG. 2C, an air ridge structure light beam in which a core layer 19, a cladding layer 6 and a substrate 7 are sequentially laminated in a predetermined shape on a platform 4 via a bar 5 as a spacer. The waveguide 9 is fixed as indicated by an arrow in the figure. As shown in FIG. 1B, the light incident end faces of the core layer 19 and the clad layer 6 are mirror-like inclined surfaces 8 that are inclined upwards by 45 degrees with respect to the horizontal plane. Can be incident in a sufficient amount and reflected into the core layer 19.

  Further, the LED (R) 12R, the LED (G) 12, and the LED (B) 12B and the plurality of electrode pads 15 are electrically connected by the wirings 13, respectively, and the plurality of electrode pads 15 and the plurality of electrode pads 16 are connected. Are electrically connected by a wiring 14.

  When a current is passed through the optical waveguide device 64 assembled by connecting each light emitting diode and each electrode pad with a wire bonding device, each light emitting diode emits light, and incident light is emitted from the light emitting surface of the core layer 19. You can see how they were combined and squeezed. White light can be obtained by combining the three colors of red, green, and blue.

  Next, as shown in the BB ′ sectional view of FIG. 3A (the BB ′ line in the plan view of FIG. 1A) and the right side view of FIG. The clad layer 6 is formed on the lower surface of the Si substrate 7 and the core layer 19 is formed on the lower surface of the air ridge. The core layer 19 and the core layer 19 are provided by the two bars 5 on the platform 4. Further, the clad layer 6 and the upper surface of the platform 4 are fixed with a certain distance (or space) 20 therebetween. Accordingly, the core layer 19 is exposed without contacting the upper surface of the platform 4, and the space 20 is formed between the core layer 19 and the platform 4, whereby an air ridge type optical waveguide can be obtained.

  The reason why the air ridge type has the core layer 19 that is exposed except for the contact portion with the cladding layer 6 is to reduce stray light from the cladding layer. The reason why the core layer 19 has a shape in which the width gradually decreases linearly from the light incident surface side to the light emission surface side is that the light emitting diodes 12 (R), 12 (G), and 12 are formed by the light incident surface having a larger area. This is because the emitted light from (B) is efficiently and sufficiently incident, and after being propagated while converging, the light is emitted from a light exit surface having a smaller area, and a small spot light serving as a pixel is extracted.

  Here, in the optical waveguide 9 composed of the core layer 19, the clad layer 6 and the substrate 7 formed in a predetermined shape, the core layer 19 made of a material having a relatively high refractive index and the clad layer 6 having a relatively low refractive index, The refractive index difference is, for example, 1.7%.

  Furthermore, the size (width) of the light incident surface of the core layer 19 can be set to, for example, 1.5 mm, and the size (width) of the light emitting surface can be set to 50 μm. Further, the length from the light incident surface to the light emitting surface of the core layer 19 can be set to 10 mm, for example, and the opening angle of the core layer 19 from the light emitting surface to the light incident surface is set to 8.4 degrees, for example. Can do.

  The core layer 19 and the clad layer 6 can be formed of a polymer resin. For example, it is preferable to use an oxetane resin (manufactured by Sony Chemical Corporation), which is a polymer organic waveguide disclosed in Japanese Patent Application Laid-Open No. 2000-356720. Moreover, polysilane (trade name Gracia: manufactured by Nippon Paint Co., Ltd.) may be used, and polymer materials having a refractive index suitable for the material of the core layer 19 and the cladding layer 6 can be obtained.

  The mirror-like inclined surface 8 may be formed from the back surface of the substrate 7 by a dicing apparatus (dicer) having a grinding blade. The loss in the mirror-like inclined surface 8 at this time is, for example, 3 dB (transmittance 50%). For example, the refractive index of the Si substrate 7 can be 3.5, the refractive index of the cladding layer 6 can be 1.516, and the refractive index of the core layer 19 can be 1.543.

  When light is emitted from the LED (G) 12G, a part of the light emitted from the light-emitting diode LED (G) 12G, which is the incident light (1) indicated by the thick solid line in FIG. , Is incident on the mirror-like inclined surface 8 and reflected, and then enters the core layer 19. The core layer 19 has a shape in which the width gradually decreases toward the light exit side. The light is converged while being reflected at the interface and the exposed surface, and is emitted from the light emitting surface side.

  As shown in FIGS. 1 to 3, for example, red and green are formed at predetermined positions on a platform 4 formed by bonding members made of Si with an adhesive (for example, product name Eppotech: obtained from Rikeisha). LED (R) 12R, LED (G) 12 and LED (B) 12B, which are light emitting diodes of three colors of blue and blue, are mounted, and an optical waveguide 9 is mounted via a bar 5 serving as a spacer.

  In these light emitting diodes (LEDs), for example, blue and green LEDs 12 (B) and 12 (G) are made of GaN-based materials, and red LEDs 12 (R) are AlGaInP-based materials. It may consist of For optical communication, a laser chip may be arranged instead of the light emitting diode.

  As clearly shown in FIG. 4, a part of the emitted light from, for example, the light emitting diode LED (G) 12 </ b> G that is the stray light (1) is incident on the mirror-like inclined surface 8 and then reflected into the cladding layer 6. However, since the refractive index (3.5) of the Si substrate 7 is larger than the refractive index (1.516) of the cladding layer 6, the incident light is totally reflected at the interface between the cladding layer 6 and the Si substrate 7. In addition, the light path can be changed in the direction of the Si substrate 7. Accordingly, the extra stray light (1) is absorbed by the Si substrate 7.

  In the optical waveguide device 64 of the present embodiment, the optical waveguide 9 composed of the joined body of the core layer 19, the cladding layer 6 and the substrate 7 is held at a constant interval on the platform 4 on which each LED is fixed. In order to fix each of the LEDs and the light guide 9 via the bar 5, the LEDs and the light guide 9 can always be arranged in a desired positional relationship on the common platform 4. The space between the core layer 19 and the core layer 19 can be optimized. For this reason, alignment (positioning) between each LED and the optical waveguide 9 can be performed relatively easily, and light emitted from each LED toward the core layer 19 can be incident on the core layer 19. It can be performed efficiently and accurately.

Second Embodiment Regarding the structure of the optical waveguide device 65 according to the present embodiment, a plan view of FIG. 5A and a cross-sectional view taken along line AA ′ of FIG. 5B (a plane of FIG. 5A). AA ′ line in FIG. 6, FIG. 6A, FIG. 6B and FIG. 6C, and a sectional view taken along line BB ′ in FIG. ) In the plan view of FIG. 7B) and the right side view of FIG. 7B, a plurality of electrode pads 15 are arranged in the recess 2 of the package 1, and the plurality of external connection terminals 15 and a plurality of external connection terminals 17 exposed on the side surface of the package 1 are connected through wiring 18 embedded in the package 1. Further, a recess 21 is provided on the platform 4 fixed on the package 1, and the LEDs 12 R, 12 G, and 12 B are fixed to the recess 21, and each LED and the plurality of electrode pads 15 are connected via the wiring 13. Except for this, it is the same as the first embodiment described above.

  First, as shown in a plan view in FIG. 6A, a convex portion 3 as an inverted U-shaped peripheral wall, and a concave portion 2 that is formed by the convex portion 3 and receives the platform 4 to which the optical waveguide 9 is fixed, The package 1 having the above is manufactured and arranged.

  Next, as shown in FIG. 6B, a recess 21 for fixing the LED (R) 12R, the LED (G) 12, and the LED (B) 12B is formed to fix the optical waveguide 9 described later. The platform 4 provided with the two bars 5 is fixed at a predetermined position in the recess 2.

  Further, as shown in FIG. 2C, an optical waveguide 9 having a structure in which a core layer 19, a clad layer 6 and a substrate 7 are sequentially laminated in a predetermined shape is fixed on the platform 4 via a bar 5.

  According to the present embodiment, since each wiring and electrode pad are provided at a position lower than the height of the top of the package protrusion 3, the package 1 can be easily covered with a lid or the like from the substrate 7 side.

  As shown in the plan view of FIG. 8A and the cross-sectional view taken along the line AA ′ in FIG. 8B (the line AA ′ in the plan view of FIG. 8A), In the same structure, the side surface and the lower surface of the core layer 19 can be covered with a cladding layer 22 having a predetermined thickness and the same material and refractive index as the cladding layer 6. As described above, the optical waveguide 35 in which the clad layer 6, the core layer 19, and the clad layer 22 are sequentially laminated has an inclination angle of 45 degrees depending on the light incident surfaces of the clad layer 6, the core layer 19, and the clad layer 22. A mirror-like inclined surface 66 is formed.

  With this structure, since the core layer 19 is covered with each cladding layer without being exposed to the atmosphere except for the light incident surface and the light emitting surface, the incident light is incident on the interface between each cladding layer and the core layer 19. The reflectance is uniform, and relatively stable light propagation performance can be exhibited.

  In addition, in this embodiment, the same operations and effects as described in the first embodiment are obtained.

Third Embodiment Regarding the structure of the optical waveguide device 68 according to the present embodiment, FIG. 9A is a plan view, and FIG. 9B is a cross-sectional view taken along line AA ′ (the plane of FIG. 9A). AA ′ in the figure), partial plan views of FIGS. 10A, 10B, and 10C, and a side view of FIG. 11A (B in the plan view of FIG. 9A). -B 'line) and as shown in the side view of FIG. 11B, the space 20 that is the exposed surface of the core layer 19 is filled with a light-absorbing resin material to form the light-absorbing resin layer 23. Is the same as in the first embodiment described above.

  In the present embodiment, first, as shown in FIG. 10A, a package 1 having an inverted U-shaped package convex portion 3 and a concave portion 2 formed by the convex portion 3 is disposed.

  Next, as shown in FIG. 10B, a recess 11 for fixing the LED (R) 12R, the LED (G) 12, and the LED (B) 12B is formed to fix an optical waveguide 9 described later. And a platform 4 having a plurality of electrode pads 15 for electrical connection with the LED (R) 12R, the LED (G) 12 and the LED (B) 12B. It is fixed at a predetermined position. At this time, a light-absorbing resin layer is applied by applying a light-absorbing resin material to a region (that is, the space 20 described above) sandwiched between the pair of bars 5 in a region other than the recess 11 where the LEDs are fixed on the platform 4. 23 is formed.

  Further, as shown in FIG. 10C, an optical waveguide 9 having a structure in which a core layer 19, a clad layer 6 and a substrate 7 are sequentially laminated in a predetermined shape on a platform 4 via a bar 5 is provided as a light-absorbing resin. Fix so as to be in close contact with the layer 23.

  In the present embodiment, for example, the light-absorbing black resin material 23 is applied to the region (width is 2 mm) between the bars 5 having a width of 1 mm and fixed to both side ends on the platform 4 having a width of 4 mm. Here, in order not to impede the light incident on the core layer 19, care should be taken not to apply this black resin material to the light incident surface and the light emitting surface of each LED or core layer 19. Next, after an adhesive is applied to the upper surface of the bar 5, the optical waveguide 9 is fixed to the bar 5 and mounted so as to cover the upper surface. Thereafter, the optical resin device 68 is completed by thermosetting the black resin material.

  This light-absorbing black resin material is in a liquid state before thermosetting and can be applied to any place, and has the property of being cured when heat is applied. An example of such a material is CRP-X4478 available from Sumitomo Bakelite Co., Ltd., the viscosity is 46.2 Pa / s, and the curing conditions are 120 ° C. for 1 hour + 165 ° C. for 2 hours. The refractive index is lower than that of the core material used for the core layer 19.

  The light absorbing resin layer 23 can be formed by fixing the optical waveguide 9 on the bar 5, filling the space 20 with the light absorbing resin material, and then thermally curing the material. .

  Next, as shown in FIG. 12, the LED (R) 12R, the LED (G) 12, and the LED (B) 12B are mounted at predetermined positions on the platform 4, and the light-absorbing resin layer 23 and the spacer are mounted. The optical waveguide 9 is mounted through the bar 5.

  When light is emitted from the LED (G) 12G, for example, light emitted from the light emitting diode LED (G) 12G enters the core layer 19 and gradually decreases in width toward the light emitting side. Inside the core layer 19, the light is converged while being reflected at the interface between the cladding layer 6 and the light-absorbing resin layer 23, and emitted from the light emitting surface side.

  Further, a part of the light emitted from, for example, the light emitting diode LED (G) 12G which is the stray light (1) is incident on the clad layer 6, but the Si substrate 7 is higher than the refractive index (1.516) of the clad layer 6. Since the refractive index (3.5) is large, incident light is not totally reflected at the interface between the cladding layer 6 and the Si substrate 7, and the light path can be changed in the direction of the Si substrate 7. Therefore, when it is desired to extract incident light propagating in the core layer 19 on the light emitting surface side as a point light source, the Si substrate 7 can absorb light in the cladding layer 6 that becomes extra stray light (1). It becomes easy to obtain a desired point light source.

  Further, a part of the emitted light from, for example, the light emitting diode LED (G) 12G which is the stray light (2) is reflected by the lower surface of the core layer 19 and then enters the light absorbing resin layer 23. It is absorbed by the resin layer 23 and does not exit from the light exit surface side.

  According to the present embodiment, when only the incident light propagating in the core layer 19 is to be extracted as a point light source from the light emitting surface, the Si substrate 7 absorbs the light in the cladding layer 6 that becomes stray light (1). The light-absorbing resin layer 23 can absorb the light below the core layer that becomes stray light (2), so that a desired point light source consisting only of the light emitted from the core layer 19 can be obtained. it can.

  In addition, in this embodiment, the same operations and effects as described in the first embodiment are obtained.

Fourth Embodiment Regarding the structure of the optical waveguide device 69 according to the present embodiment, FIG. 13A is a plan view, and FIG. 13B is a cross-sectional view taken along line AA ′ (the plane of FIG. 13A). 14A, FIG. 14B and FIG. 14C, and a cross-sectional view taken along the line BB ′ in FIG. 15A (FIG. 13A). ) And a right side view of FIG. 15B, a plurality of electrode pads 15 are arranged in the recess 2 of the package 1, and the plurality of electrode pads 15 are arranged. And a plurality of external connection terminals 17 exposed on the side surface of the package 1 are connected through wiring 18 embedded in the package 1. Further, a light-absorbing resin layer 23 is formed by applying a light-absorbing resin material to the space 20 that is the exposed surface of the core layer 19. A recess 21 is provided on the platform 4 fixed on the package 1, and the LEDs 12 R, 12 G, and 12 B are fixed to the recess 21, and each LED and the plurality of electrode pads 15 are connected via the wiring 13. Other than the above, the second embodiment is the same as the first embodiment.

  First, as shown in the partial plan view of FIG. 14A, a package 1 having an inverted U-shaped package convex portion 3 and a concave portion 2 formed by the convex portion 3 is disposed.

  A plurality of electrode pads 15 are provided in the concave portion 2 of the package 1, and the electrode pads 15 and the external connection terminals 17 provided on the side surfaces of the package 1 are electrically connected by wiring 18 embedded in the package convex portion 3. It is connected to the.

  Next, as shown in FIG. 14B, a recess 21 for fixing the LED (R) 12R, the LED (G) 12, and the LED (B) 12B is formed, and an optical waveguide 9 described later is placed thereon. The platform 4 provided with the two bars 5 is fixed at a predetermined position in the recess 2. At this time, a light-absorbing resin layer 23 is formed by applying a light-absorbing resin material to an area sandwiched between the pair of bars 5 in an area other than the recesses 21 where the LEDs are fixed on the platform 4.

  Further, as shown in FIG. 14C, an optical waveguide 9 having a structure in which a core layer 19, a cladding layer 6 and a substrate 7 are sequentially laminated in a predetermined shape on a platform 4 via a bar 5 is provided as a light absorbing resin. Fix closely to the layer 23.

  In the present embodiment, as described above, the light-absorbing black resin material is applied to the region between the bars 5 having a width of 1 mm (the width is 2 mm) fixed to both ends on the platform 4 having a width of 4 mm. Apply. Here, in order not to impede the light incident on the core layer 19, care should be taken not to apply this black resin material to the light incident surface and the light emitting surface of each LED or core layer 19. Next, after an adhesive is applied to the upper surface of the bar 5, the optical waveguide 9 is fixed to the bar 5 and mounted so as to cover the upper surface. Thereafter, the optical resin device 69 is completed by thermosetting the black resin material.

  Further, as shown in the plan view of FIG. 16A and the AA ′ line cross-sectional view of FIG. 16B (the AA ′ line of the plan view of FIG. 16A), this embodiment and In the same structure, the side surface and the lower surface of the core layer 19 can be covered with the cladding layer 22 having a predetermined thickness and the same material and refractive index as the cladding layer 6. In the optical waveguide 35 in which the clad layer 6, the core layer 19, and the clad layer 22 are sequentially laminated, a mirror shape having an inclination angle of 45 degrees depending on the light incident surfaces of the clad layer 6, the core layer 19, and the clad layer 22. An inclined surface 66 is formed.

  With this structure, since the core layer 19 is covered with each cladding layer without being exposed to the atmosphere except for the light incident surface and the light emitting surface, the incident light is incident on the interface between each cladding layer and the core layer 19. The reflectance becomes uniform and stable light propagation performance can be exhibited.

  Next, as shown in FIG. 17, the LED (R) 12R, LED (G) 12, and LED (B) 12B are mounted at predetermined positions on the platform 4, and further, the light-absorbing resin layer 23 and the spacers are mounted. The optical waveguide 9 is mounted through the bar 5.

  For example, a part of the light emitted from the light emitting diode LED (G) 12G is incident on the core layer 19 after being reflected by the mirror-like inclined surface 8, and its width gradually decreases toward the light emitting side. In the core layer 19, the light is converged while being satisfactorily reflected at the interface between the clad layer 6 and the clad layer 22, and emitted from the light exit surface side.

  Further, a part of the light emitted from, for example, the light emitting diode LED (G) 12G, which is the stray light (1), is reflected by the mirror-like inclined surface 8 and then enters the clad layer 6, and inside the clad layer 6, the substrate 7 The light is reflected at the interface between the core layer 19 and emitted from the light emitting surface side. However, since the refractive index (3.5) of the Si substrate 7 is larger than the refractive index (1.516) of the cladding layer 6, the cladding The incident light is not totally reflected at the interface between the layer 6 and the Si substrate 7, and the light path can be changed toward the Si substrate 7. Therefore, when it is desired to extract incident light propagating in the core layer 19 on the light emitting surface side as a point light source, the Si substrate 7 can absorb light in the cladding layer 6 that becomes extra stray light (1).

  Further, a part of the light emitted from, for example, the light emitting diode LED (G) 12G, which is the stray light (2), is reflected by the lower surface of the clad layer 22 and then enters the light-absorbing resin layer 23, where the light is absorbed. Thus, the light is not emitted from the light exit surface.

  Further, a part of the light emitted from, for example, the light emitting diode LED (G) 12G which is the stray light (3) is incident on the clad layer 22 after being reflected by the mirror-like inclined surface 8, and this is reflected from the clad layer 22. Since it enters in the light absorptive resin layer 23, it can prevent exiting from the light-projection surface side.

  According to the present embodiment, as in the third embodiment described above, the cladding that becomes stray light (1) when it is desired to extract incident light propagating in the core layer 19 on the light emitting surface side as a point light source The light in the layer 6 can be absorbed by the Si substrate 7, the light in the space that becomes stray light (2) can be absorbed by the light absorbing resin layer 23, and the stray light (3) in the cladding layer 22 is further absorbed. Can be absorbed by the light-absorbing resin layer 23, so that it becomes easy to obtain a desired point light source composed of light emitted from the core layer 19. Further, since the clad layer 22 exists on the lower surface of the core layer 19, total reflection at the interface with the clad layers 6 and 22 is easily obtained on the upper and lower surfaces in the core layer 19.

  In addition, in this embodiment, the same operation and effect as described in the above-described embodiment can be obtained.

  18 to 19 show a method of forming the mirror-like inclined surface 8 of the optical waveguide, for example, the optical waveguide 9, in each of the above-described embodiments.

  First, as shown in FIG. 18A, a clad layer 6 and a core layer 19 having a predetermined thickness are sequentially laminated on a substrate 26 having a predetermined thickness to form a laminate for an air ridge type optical waveguide.

  Next, as shown in FIG. 18B, an arrow from the core layer 19 side toward the substrate 26 is formed by the V-shaped grinding surface 25 formed at the circumferential end of the disk-shaped dicer 24 and having an angle of 90 degrees. In this direction, the mirror-like inclined surface 8 is formed by grinding the core layer 19, the cladding layer 6, and the substrate 26 so as to sequentially remove a part thereof.

  As the dicer 24, for example, a dicer manufactured by Disco Co., Ltd. having a V-shaped grinding surface 25 using diamond having a particle diameter of 3 μm as abrasive grains is used. The dimensions of the V-shaped grinding surface 25 are, for example, an inclined surface having a thickness of 300 μm and an inclination of 45 degrees with a width of 150 μm from the center. As such a grinding surface 25, for example, a model made by DISCO Corporation is MBT-1204, and a size of SD5000L25MT38, 52 × 0.3 × 40 × 45 ° can be used.

  Then, for example, after forming an optical waveguide having a thickness of 120 μm on the substrate 26 having a thickness of 620 μm, grinding is performed at a rotational speed of 30,000 rpm and a grinding speed of 0.3 mm / second.

  Next, as shown in FIG. 19C, the substrate 26 is peeled from the lower surface of the cladding layer 6.

  Next, as shown in FIG. 19D, the optical waveguide 9 can be completed by attaching a substrate 7 having a predetermined thickness to the upper surface of the core layer 19.

  In addition, in this embodiment, the same operations and effects as described in the first embodiment are obtained.

Fifth Embodiment Regarding the structure of the optical waveguide device 69 according to the present embodiment, a clad layer 73 is formed between the clad layer 6 and the substrate 7 as shown in the cross-sectional views of FIGS. Except for forming the optical waveguide 72 in which the uneven stripe-shaped metal layer 31 and the core layer 28 are embedded in the clad layer 6, it is the same as in the first embodiment.

  As for the formation of the optical waveguide 72 according to the present embodiment, as shown in FIG. 20A, first, a clad layer 73 having a predetermined thickness is formed on a substrate 7 having a predetermined thickness, and the clad layer 73 is formed on the clad layer 73. A continuous stripe-shaped core layer 28 having a plurality of recesses 27 at regular intervals is formed. Then, it is arranged in a direction perpendicular to the light propagation direction.

  Next, as shown in FIG. 20B, for example, Al is uniformly deposited to a thickness of 50 nm on the stripe-shaped core layer 28 to form the metal layer 31 having the recesses 30.

  Next, as shown in FIG. 20C, a clad material is applied on the metal layer 31 including the inside of the recess 30 to form the clad layer 6, and the surface of this layer is flattened.

  This is a structure intentionally produced in order to remove the lower clad mode generated by the clad layer 6 located below the core layer 33. This clad mode is a mode in which light travels by totally reflecting the inside of the clad layer 6 and causes stray light on the light exit surface.

  In order to cope with this cladding mode, in addition to the formation of the metal layer 31 described above, for example, the thickness is controlled by the rotational speed of the spin coating method, the cladding layer 73 is formed at 5.000 rpm, and the striped core is formed. If the layer 28 is formed at 2.500 rpm and the cladding layer 6 is formed at 3.000 rpm, the cladding mode can be removed.

  Next, as shown in FIG. 21D, a core layer 33 having a predetermined shape and thickness is formed on the clad layer 6.

  Next, as shown in FIG. 21 (e), the mirror-like inclined surface 34 is formed by a back surface dicing process for grinding from the back surface of the substrate 7. As a grinding condition at this time, for example, the height of the blade which is a grinding surface is set to 0.08 mm, and the mirror-like inclined surface 34 is formed by one grinding. In addition, when the chuck table is replaced with a new one, it can be manufactured favorably.

  For the optical waveguide 72, in order to focus light emitted from the LED, which is a light source, to a point light source, for example, the width of the light incident surface of the core layer 33 is 1.5 mm, the width of the light emitting surface is 70 μm, The length is 10 mm. The spread angle of the shape of the core layer 33 at this size is 8.3 degrees. In this way, by performing an optimum design for narrowing the emitted light to a point light source, it is possible to realize a small optical waveguide 72 capable of combining three colors even if the length is 10 mm.

  Further, oxetane resin is used as the material for the core layer 33 and the like. Further, in order to remove the upper cladding mode, an air ridge structure in which the periphery of the core layer 33 is exposed to the atmosphere can be employed.

  Next, as shown in FIG. 22, with respect to the structure of the optical breaker device 71 according to the present embodiment, for example, each LED of three colors is mounted on the platform 4 having a size of 13 mm × 4 mm, and the upper part thereof. The optical waveguide 72 having the mirror-like inclined surface 34 is bonded to the adhesive Epotech (obtained from Rikeisha).

  Although not shown, each electrode is wired from the respective LED chip to the electrode pad on the platform 4 and further wired from the electrode pad to the package.

  For example, when light is emitted from the LED (G) 12G, a part of the light emitted from the light-emitting diode LED (G) 12G is reflected by the mirror-like inclined surface 34 and then enters the core layer 33 to be emitted from the light emitting side. In the core layer 33 whose width is gradually narrowed toward the surface, the light is converged while being reflected at the interface with the cladding layer 6 and the exposed surface, and is emitted from the light emitting surface side.

  Further, a part of the light emitted from, for example, the light emitting diode LED (G) 12G which is stray light (1) is reflected by the mirror-like inclined surface 34 and then enters the clad layer 6, and the core layer is formed inside the clad layer 6. Although it reflects at the interface with 33, it collides with the surface of the metal layer 31 provided in the cladding layer 6 and is absorbed or reflected, so that it propagates in the cladding layer 6 and is not easily emitted from the light emitting surface side. Become.

  In the present embodiment, when the incident light propagating in the core layer 33 on the light emitting surface side is to be extracted as a point light source, the metal layer 31 absorbs or reflects the light in the cladding layer 6 that becomes stray light (1). Therefore, it becomes easy to obtain a desired point light source.

  In addition, in this embodiment, the same operations and effects as described in the first embodiment are obtained.

  Next, for each of the above-described embodiments, the light incidence to the optical waveguide 36 and the optical waveguide state will be described with reference to FIG. It is assumed that the width of the core layer 40 on the light incident surface side is enlarged so as to reach each side surface of the optical waveguide 36.

  FIG. 23A shows, for example, the light from each of the LEDs 12R, 12G, and 12B in the core layer 40 of the optical waveguide 36 corresponding to the optical waveguide 9 described above, for example, incident from the incident surface 37 and emitted from the output surface 38. It shows the state to do. At this time, the width of the incident surface 37 is A (μm), the width of the exit surface 38 is B (μm), and the distance from the entrance surface 37 to the exit surface 38 is d (mm). The width of the core layer 40 is linearly reduced from the light incident surface 37 to the light emitting surface 38 by the linear inclined surface 41. The linear inclined surface 41 improves total reflection at the interface between the core layer 40 and the clad layer 39, and optical waveguide within the core layer 40 can be performed efficiently.

  FIG. 23B shows a correlation characteristic between the length d (mm) from the entrance surface 37 to the exit surface 38 and the optical loss (dB). According to this, when the width B of the exit surface 38 is fixed to 50 μm and the allowable optical loss of the optical waveguide 36 is set to 2 dB or less indicated by a broken line in the graph, the condition a in which the width A of the entrance surface is 200 μm Then, in order to reduce the optical loss to 2 dB or less, the lower limit of the length d from the incident surface 37 to the output surface 38 is about 0.7 mm, and under the condition b where the width A of the incident surface 37 is 300 μm, the optical loss is reduced. In order to be 2 dB or less, the lower limit of the length d from the entrance surface 37 to the exit surface 38 is about 1.5 mm. Similarly, when the width A of the incident surface 37 is increased as in the conditions c, d, and e, the lower limit of the length d from the incident surface 37 to the exit surface 38 is about 3 to reduce the optical loss to 2 dB or less. There is a tendency to increase to 0 mm, about 6.8 mm, and about 15.0 mm.

  From this result, when the width B of the exit surface 38 is made constant, if the width A of the entrance surface 37 is narrowed to reduce the tilt angle of the linear inclined surface 41, the optical loss can be suppressed to 2 dB or less and The length d from the surface 37 to the emission surface 38 can be made relatively short. Therefore, it can be seen that it is desirable to define the width A in order to reliably improve the optical waveguide efficiency by the linear inclined surface 41.

  On the other hand, in the optical waveguide 42 shown in FIG. 24A, the core layer is divided into three types of core portions 40a, 40b, and 40c each formed of a curved inclined surface 46, and these light incident surfaces 37a, 37b, and The light sources 12R, 12G, and 12B are disposed on the 37c side, the core portions 40a and 40c are joined to the core portion 40b at the front of the light emission surface 38, and light is emitted to the emission surface 38 through the common core portion 43. It is structured to guide and emit. Here, when the width of the exit surface 38 is fixed to 50 μm, the pitch between adjacent core portions is P (μm), and the distance from the entrance surfaces 37a, 37b and 37c to the exit surface 38 is d (mm). FIG. 24B shows the correlation characteristics between the length d (mm) from the light incident surfaces 37a, 37b and 37c to the exit surface and the optical loss (dB).

  According to this, when the allowable optical loss of the optical waveguide 42 is set to 2 dB or less indicated by a broken line, the condition from the incident surfaces 37a, 37b, and 37c to the output surface under the condition a in which the pitch P between adjacent core portions is 200 μm is set. The length d up to 38 is required to be about 6 mm or more. Similarly, if the pitch P between adjacent core portions is set to 400 μm and 600 μm, the length d from the incident surfaces 37 a, 37 b and 37 c to the output surface 38 is about 20 mm. As described above, about 60 mm or more is required.

  From this result, even if the pitch P between the adjacent core portions is narrowed and the inclination angle of the curved inclined surface 46 of the core portions 40a and 40c is moderated, the above-mentioned length d is used to suppress the optical loss to 2 dB or less. Needs to be increased to about 6 mm or more. This is because the leak angle from the core layer 40c to the clad layer 39 cannot be sufficiently suppressed because the angle of inclination of the curved inclined surface 46 of the core portions 40a and 40c is still steep. This is because if the slope is not increased, the inclined surface of the curved inclined surface 46 can be made gentle to reduce the light leakage.

  On the other hand, in the case of the optical waveguide 36 shown in FIG. 23, since the inclined surface 41 of the core layer 40 is linear, as long as the inclination angle (that is, the width A of the incident surface 37) is controlled, the core Total reflection at the interface between the layer 40 and the cladding layer 39 is increased, the optical waveguide efficiency in the core layer 40 is improved, and the optical waveguide length d can be reduced. In the optical waveguide 42 in FIG. 24, since the light incident surface is narrow, the degree of freedom of disposing each light source on the corresponding incident surface is small and the loss of light incident amount is large, but in the optical waveguide 36 in FIG. Since the incident surface 37 common to each light source is formed over the width A, the light sources can be easily arranged, and the amount of incident light is also increased.

  In the structure of the optical waveguide according to the present embodiment, by controlling the intensity and color balance of the signal light of each color, the output light emitted from the light output surface of the optical waveguide is a signal light with a desired spot size and a sufficient amount of light. As a result, it is possible to obtain a display that can be projected onto the next stage, for example, a screen and can reproduce a full color image.

  FIG. 25 shows an example in which such a display is applied to a head-mounted display (HMD) 44. The optical waveguide according to the present embodiment is equivalent to a unit pixel, and is arranged in a number of lines in the direction perpendicular to the paper surface. The light of each color from the red light source 12R, the green light source 12G, and the blue light source 12B is multiplexed for each unit pixel, and the emitted light 47 with a reduced beam diameter from the optical waveguide 9 is applied to a scanned image plane 45. After passing, the focal point (spot) is formed on the retina 50 of the human eyeball 49 optically conjugate with the scanning plate 45 by the optical lens 48 or the like.

  This image forming point is formed on the retina 50 by one line. This is scanned on the retina 50 in a direction perpendicular to the line by the scanning plate 45, so that a realistic image can be experienced personally. be able to.

  The head-mounted display 44 can be provided in a compact video device by being incorporated in a projector, a camera, a computer, a game machine, or the like while wearing like sunglasses.

  Next, as shown in FIG. 26, sunglasses-like display observation glasses 51 using the above-described head mounted display 44 will be described.

  In the glasses 51 including the left vine portion 53a, the right vine portion 53b, the left lens portion 52a, and the right lens portion 52b, a head mounted display 44 is provided at the lower left portion of the left lens portion 52a, and at the lower right portion of the right lens portion 52b. A head mounted display 44 is provided.

  Since the glasses 51 have a structure in which incident light from each head mounted display 44 provided in each lens unit is observed as an image with the left eye and the right eye, light is applied to the left lens unit 52a and the right lens unit 52b. Although transparency is not necessary, by providing light transmittance to the left lens portion 52a and the right lens portion 52b, not only images due to light incidence from each head mounted display 44, but also the left lens portion 52a and the right lens portion 52b. The light in front of the eye can be incident through the lens and observed.

  Further, by providing a hood around the left lens portion 52a and the right lens portion 52b to block outside light, it is possible to observe incident light from each head mounted display 44 as a clearer image.

  Next, as shown in FIG. 27, the configuration of the head mounted display 44 is composed of a red light source 12R, a green light source 12G, and a blue light source 12B, and light of each color from each LED provided in the recess 74 of the substrate 54 ( In this figure, only the light from the LED (G) 12G is shown.) Enters the core layer 61 having the mirror-like inclined surface 56 inclined by 45 ° of the optical waveguide 63, propagates the light, and is emitted as outgoing light. 58, and after being collided and reflected by the light reflecting surface 59 of the light reflecting plate 57, the light is incident on the retina of the human eye 62 optically conjugate with the light reflecting plate 57 by an optical lens or the like. The focus (spot) is set.

  In addition, about the emitted light from the red light source 12R, the green light source 12G, and the blue light source 12B, illustration is simplified as what is multiplexed after injecting into the core layer 61. FIG. In this structure, the emitted light is directly incident on the core layer 61 without passing through a substrate or the like.

  The embodiment described above can be variously modified based on the technical idea of the present invention.

  For example, the shape, size, installation number, and installation of the bar 5, the light absorbing resin layer 23, the package 1, each platform, each recess, each substrate, each cladding layer, each light source, the light absorbing resin layer 23, and the metal layer 31 The location, material and thickness, and the inclination angle and processing method of each mirror-like inclined surface may be variously changed as long as a desired effect can be realized. The light-absorbing resin layer 23 may be present in almost the entire region of the optical waveguide, but may be present only on the light emitting side as indicated by a virtual line in FIG.

  Moreover, the constituent material and the layer configuration of the optical waveguide described above may be variously changed. For example, an inorganic material such as lithium niobate is used, formed as a core material on a substrate by CVD (chemical vapor deposition), and etched into a predetermined pattern using a resist mask. A core layer equivalent to the prepared core layer can be formed. Further, a clad layer or the like may be formed in the same shape as the trapezoidal core layer.

  Further, the core shape of the optical waveguide is not limited to a type having a linear inclined surface at the end surface in the width direction, but may be a core layer having a curved inclined surface at the end surface in the width direction. The core layer may be produced by molding using a mold.

  Further, the configuration of the optical system including the above-described optical waveguide may be appropriately changed. For example, a micromirror device, a polygon mirror, or the like may be employed as a scanning unit, or projection may be performed on a screen.

  The present invention includes a display using an optical waveguide using an LED or a laser as a light source, for example, signal light from the optical waveguide using a laser is incident on a light receiving element (optical wiring, photodetector, etc.) of the next stage circuit. It can be widely applied to various optical information processing such as optical communication.

  The present invention relates to a display configured to scan and project the signal light emitted after being efficiently condensed into a predetermined light beam and emitted from the optical waveguide, or after being efficiently incident on the optical waveguide, The present invention can be effectively used for optical information processing such as optical communication configured to cause signal light to be incident on a light receiving element (such as an optical wiring or a photodetector) of the next stage circuit.

It is the top view (A) of the optical waveguide device by the 1st Embodiment of this invention, and its A-A 'sectional view (B). FIG. 2 is a plan view (A) of the package, a plan view (B) of the platform, and a plan view (C) of the optical breakage. FIG. 2 is a cross-sectional view of the optical waveguide device taken along line B-B ′ and a side view thereof. It is sectional drawing of the optical waveguide apparatus which shows the light incident condition to an optical waveguide similarly. It is the top view (A) of the optical waveguide device by the 2nd Embodiment of this invention, and its A-A 'sectional view (B). FIG. 2 is a plan view (A) of the package, a plan view (B) of the platform, and a plan view (C) of the optical breakage. FIG. 2 is a cross-sectional view of the optical waveguide device taken along line B-B ′ and a side view thereof. It is the top view (A) and its A-A 'sectional view (B) of the optical waveguide device by another example same as the above. It is the top view (A) of the optical waveguide device by the 3rd Embodiment of this invention, and its A-A 'sectional view (B). FIG. 2 is a plan view (A) of the package, a plan view (B) of the platform, and a plan view (C) of the optical breakage. FIG. 2 is a cross-sectional view of the optical waveguide device taken along line B-B ′ and a side view thereof. It is sectional drawing of the optical waveguide apparatus which shows the light incident condition to an optical waveguide similarly. It is the top view (A) and its A-A 'sectional view (B) of the optical waveguide device by a 4th embodiment of the present invention. FIG. 2 is a plan view (A) of the package, a plan view (B) of the platform, and a plan view (C) of the optical breakage. FIG. 2 is a cross-sectional view of the optical waveguide device taken along line B-B ′ and a side view thereof. It is the top view (A) and its A-A 'sectional view (B) of the optical waveguide device by another example same as the above. It is sectional drawing of the optical waveguide apparatus which shows the light incident condition to an optical waveguide similarly. It is sectional drawing which shows the preparation processes of an optical waveguide sequentially. It is sectional drawing which shows the preparation processes of an optical waveguide sequentially. It is sectional drawing which shows sequentially the manufacturing process of the optical waveguide by the 5th Embodiment of this invention. FIG. 6 is a cross-sectional view sequentially showing the manufacturing steps of the optical waveguide. It is sectional drawing of the optical waveguide apparatus which shows the light incident condition to an optical waveguide similarly. It is the top view (A) of the optical waveguide by embodiment of this invention, and the graph (B) which shows the relationship between an optical loss and the entrance plane width | variety of a core layer. FIG. 6 is a plan view (A) of the optical waveguide and a graph (B) showing the relationship between the optical loss and the core interlayer pitch. It is a schematic model of a head mounted display. It is a perspective view which shows the example of application of a head mounted display similarly. It is a perspective view of a head mounted display. It is the perspective view (A) of the optical waveguide by a prior art example, its sectional drawing (B), and its side view (C). It is sectional drawing of the optical waveguide apparatus which shows the light incident condition to an optical waveguide similarly.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Package 2, 11, 21, 27, 30, 74 ... Concave part 3 ... Package convex part,
4 ... platform, 5 ... bar, 6, 22, 32, 39, 55, 73 ... cladding layer,
7, 26, 54 ... substrate, 8, 34, 56, 67 ... mirror-like inclined surface,
9, 35, 36, 42, 63, 72 ... optical breakage, 10, 41 ... linear inclined surface,
12R, 12G, 12B ... LED light source, 13, 14, 18 ... wiring,
15, 16 ... electrode pads, 17 ... external connection terminals,
19, 28, 33, 40, 40a, 40b, 40c, 61 ... core layer, 20 ... space,
23 ... Light-absorbing resin layer, 24 ... Dicer, 25 ... Grinding surface, 29 ... Convex part, 31 ... Metal layer,
37, 37a, 37b, 37c, 60 ... entrance surface, 38, 58 ... exit surface,
43 ... Common core part, 44 ... Head mounted display, 45 ... Scanning plate,
46 ... curved inclined surface, 47 ... outgoing light, 48 ... optical lens, 49 ... eyeball, 50 ... retina,
51 ... Glasses, 52a ... Left lens part, 52b ... Right lens part, 53a ... Left vine part,
53b ... right vine, 57 ... light reflecting plate, 59 ... light reflecting surface, 62 ... eye,
64, 65, 66, 68, 69, 70, 71 ... Optical waveguide device

Claims (14)

A support with a fixed light source;
An optical waveguide composed of a joined body of a core layer and a clad layer, and configured to guide incident light to the core layer to the light exit side;
An optical waveguide device, comprising: a spacer that holds the support and the optical waveguide at regular intervals; and the optical waveguide is fixed on the support via the spacer.   The optical waveguide device according to claim 1, wherein a light-absorbing material is filled in a gap that forms the gap between the optical waveguide and the support.   2. The optical waveguide device according to claim 1, wherein a recess is formed in the support below the light incident portion of the optical waveguide fixed on the support, and the light source is fixed to a bottom surface of the recess.   The optical waveguide device according to claim 3, wherein a light incident surface of the light incident portion of the optical waveguide is inclined with respect to a fixed surface of the support.   The optical waveguide device according to claim 1, wherein the optical waveguide has a structure in which the core layer and the clad layer are laminated, and the core layer is bonded onto the spacer.   6. The optical waveguide device according to claim 5, wherein a substrate having a refractive index larger than that of the cladding layer is bonded onto the cladding layer.   The optical waveguide device according to claim 5, wherein the optical waveguide has an air ridge structure having a ridge core layer.   The optical waveguide device according to claim 1, wherein the support is fixed to a package member.   The optical waveguide device according to claim 1, wherein the light source terminal and / or external connection terminal is provided on the support and the package member.   The optical waveguide device according to claim 1, wherein the optical waveguide is formed of a polymer organic compound.   The optical waveguide device according to claim 1, wherein the core layer of the optical waveguide has a width that gradually decreases from a light incident side to a light emitting side.   2. The optical waveguide device according to claim 1, wherein the light sources are three types of light emitting diodes or lasers that emit three primary colors, and are respectively disposed facing the light incident surface of the core layer.   An optical information processing apparatus comprising: the optical waveguide device according to any one of claims 1 to 12, a light source that makes signal light incident on the optical waveguide device, and a light receiving unit that receives outgoing light from the optical waveguide. .   The optical information processing apparatus according to claim 13, wherein the optical information processing apparatus is configured as a display that projects the emitted light by scanning with a scanning unit.

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