JP2005161130A - Discharge head mechanism, droplet discharge apparatus including the same, electro-optical device manufacturing method, electro-optical device, and electronic apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a discharge head mechanism or the like having a simple structure and capable of removing bubbles from a flow path from a functional liquid storage means to a functional liquid droplet discharge head.
A piping unit 143 for connecting a functional liquid storage means 141 and a functional liquid droplet ejection head 16 forms a single inflow port 201 connected to the functional liquid storage means 141 on the upstream side and mainstream on the outflow side. A branch joint 161 having an outlet port 202 and a secondary outlet port 203 extending upward; a functional liquid conduit 163 whose upstream end is connected to the main outlet port 202 and whose downstream end is connected to the main head flow path; An air vent line 164 having an end connected to the sub-outflow port 203 and a downstream end connected to the air discharge part. The air discharge part is independent of the main head flow path, and the functional liquid droplet ejection head 16 And is formed by a sub-head flow path extending from the sub-function liquid inlet 52b to the non-ejection nozzle 65b.
[Selection] Figure 3

Description

  The present invention relates to a discharge head mechanism for supplying a functional liquid from a functional liquid storage unit to a functional liquid droplet discharge head as a liquid droplet is discharged from a functional liquid droplet discharge head, a liquid droplet discharge apparatus including the same, and an electro-optical device The manufacturing method, the electro-optical device, and the electronic apparatus.

Conventionally, in a discharge head mechanism of an ink jet recording apparatus provided with a print head (functional liquid droplet discharge head), when supplying a functional liquid of an ink tank to a print head manifold (head flow path) via an ink tube, If air bubbles are mixed in the ink flowing through the manifold, the pumping force by an actuator such as a piezoelectric element is absorbed by the air bubbles, so that the ink may not be ejected properly. Therefore, a bypass tube that returns from the ink introduction port of the print head to the ink tank is provided, and a closed channel that returns from the ink tank to the ink tank through the ink tube, the ink introduction port, and the bypass tube is configured. There is known a discharge head mechanism that circulates ink by an ink circulation pump and discharges air bubbles mixed in the ink to an ink tank so that the ink mixed with air bubbles does not flow into the print head. (For example, refer to Patent Document 1).
JP 2000-103074 A

However, in the conventional discharge head mechanism, the ink circulation pump needs to be provided with a plurality of tubes such as a bypass tube from the beginning, and the mechanical structure becomes complicated and the control system becomes complicated accordingly. There was a problem.
In addition, since the ink mixed with bubbles is collected in the ink tank in order to discharge the bubbles, even if the functional liquid mixed with bubbles is prevented from flowing into the print head, the ink stored in the ink tank Air bubbles (air) were to be supplied. Therefore, oxygen and moisture contained in the bubbles mixed in the ink react with the ink components dissolved in the ink to reduce the quality of the functional liquid, or due to the undulation of the liquid level accompanying the supply of ink to the ink tank. There was a problem that air remixed in the ink.

  The present invention has a simple structure, a discharge head mechanism capable of removing bubbles from a flow path from a functional liquid storage means to a functional liquid droplet discharge head, a liquid droplet discharge apparatus including the same, a method for manufacturing an electro-optical device, An object is to provide an optical device and an electronic apparatus.

  The discharge head mechanism according to the present invention is configured to discharge the functional liquid droplets via a piping unit that connects the functional liquid storage means that stores the functional liquid and the functional liquid droplet discharge head in accordance with the liquid droplet discharge of the functional liquid droplet discharge head. A discharge head mechanism for supplying a functional liquid from a functional liquid storage means to a flow path in the main head from a main functional liquid introduction port of the head to a discharge nozzle, wherein the piping unit is connected to the functional liquid storage means upstream. A branch joint that forms a single inflow port, a main outflow port on the outflow side, and a secondary outflow port that extends upward, and an upstream end connected to the main outflow port, and a downstream end connected to the flow path in the main head A functional fluid line that is connected; and an air vent line that has an upstream end connected to the sub-outflow port and a downstream end connected to the air discharge part. The air discharge part is independent of the main head flow path. Formed on a functional droplet discharge head Characterized in that the sub-function liquid introduction port is configured by the sub-head flow path to the ejection failure nozzle.

  In this case, it is preferable to further include a suction unit that performs a suction operation on the discharge nozzle and the non-discharge nozzle through a cap that is in close contact with the nozzle surface of the functional liquid droplet discharge head.

According to these configurations, when bubbles are mixed in the flowing functional liquid introduced into the piping unit from the functional liquid storage means, the bubbles do not go to the main outflow port due to the buoyancy at the branch joint. Then, it rises toward the sub-outflow port that extends upward, and is discharged to the flow path in the sub-head through the air vent line. For this reason, the functional liquid in which bubbles are not mixed is supplied to the flow path in the main head connected to the main outflow port. In addition, if a suction operation is appropriately performed by the suction means in this state, the air bubbles guided to the sub head flow path can be sucked together with the functional liquid and discharged to the cap. That is, at the same time as performing the suction operation for preventing nozzle clogging, bubbles (actually, functional liquid mixed with bubbles) can be removed by suction from the sub-head flow path.
In this case, a so-called double functional droplet ejection head having two nozzle rows can be used as the functional droplet ejection head in this case.

  In these cases, the branch joint is preferably provided in the vicinity of the functional liquid droplet ejection head.

  According to this configuration, the function that the mixed bubbles are discharged from the main outflow port toward the functional liquid droplet ejection head in a state where the mixed bubbles are discharged from the sub outflow port of the branch joint to the flow path in the sub head (no bubbles are mixed in). Where there is a possibility that bubbles may be generated in the functional liquid conduit with respect to the liquid, the functional liquid conduit becomes extremely short, so there is almost no possibility of this. In particular, it is useful when the flow path is constituted by a resin tube having a low gas barrier property.

  In these cases, it is preferable that the sub outflow port has an air trap part for capturing air mixed in the functional liquid at the base part.

  According to this configuration, even when the flow rate of the functional liquid is high, since air bubbles mixed in the functional liquid are reliably captured by the air trap portion, it is possible to prevent the bubbles from flowing out to the main outflow port side, Air bubbles can be reliably guided from the auxiliary outflow port to the air vent line.

  In these cases, the main outlet port preferably extends downward.

  According to this configuration, when the functional liquid mixed with air bubbles passes through the branch joint, the air bubbles are discharged into the functional liquid pipe without being discharged to the flow path in the sub head, or a new liquid is added in the functional liquid pipe. Even if air bubbles are mixed in the functional liquid flowing in the functional liquid pipe, as in the case where air bubbles are generated, the air bubbles rise due to buoyancy and flow from the main outflow port of the branch joint to the sub outflow port. Therefore, it is discharged to the sub-head flow path. Therefore, it is possible to more reliably prevent the functional liquid mixed with bubbles from flowing into the main head flow path.

  In these cases, the branch joint is preferably composed of a T-shaped branch joint in a lateral orientation in which two branch ports on the same axis are used as a sub-outflow port and a main outflow port, respectively, and these are arranged vertically.

According to this configuration, the other branch port (main outflow port) extends downward with respect to one branch port (sub outflow port) of the T-shaped branch joint extending upward, and the inflow ports are both connected. Orthogonal to the branch port. Accordingly, since the flow of the functional liquid is bent by 90 ° between the inflow port and the main outflow port, the bubbles mixed in the functional liquid are easily separated from the flow of the functional liquid and easily rise to the auxiliary outflow port. Become.
Even if bubbles are mixed in the functional liquid flowing through the functional liquid conduit, the bubbles rise by buoyancy and are guided from the main outlet port of the branch joint to the auxiliary outlet port. It is discharged to the flow path. In this manner, bubbles can be separated and removed with a simple configuration using the T-shaped branch joint in a horizontal posture.

  The droplet discharge apparatus of the present invention includes the above-described discharge head mechanism and an XY movement mechanism that moves the functional droplet discharge head relative to the workpiece.

  According to this configuration, it is possible to eliminate bubbles from the flow path from the functional liquid storage unit to the functional liquid droplet ejection head with almost no change in the mechanical structure and control operation of the entire liquid droplet ejection apparatus.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film-forming unit made of functional droplets is formed on a workpiece using the above-described droplet discharge device.

  In addition, an electro-optical device according to the present invention is characterized in that the above-described droplet discharge device is used to form a film forming portion using functional droplets on a workpiece.

  According to these configurations, since it is manufactured using a droplet discharge device that can exclude bubbles from the flow path from the functional liquid storage means to the functional droplet discharge head, drawing accuracy is high, Since there is no deterioration, a highly reliable electro-optical device can be manufactured. As the electro-optical device (flat panel display), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to the present invention includes the above-described electro-optical device.

  In this case, the electronic apparatus corresponds to various electric products in addition to a mobile phone and a personal computer equipped with a so-called flat panel display.

  According to the discharge head mechanism of the present invention, bubbles can be eliminated from the flow path from the functional liquid storage means to the functional liquid droplet discharge head with a simple structure.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a plan view schematically showing a droplet discharge device 1 to which the present invention is applied. Although details will be described later, the droplet discharge device 1 introduces a functional liquid such as special ink or a light-emitting resin liquid into the functional droplet discharge head 16, and uses functional droplets on a workpiece W such as a substrate. A film forming unit is formed.

  The droplet discharge device 1 includes a machine base 2, a drawing device 3 widely placed over the entire area of the machine base 2, a head function recovery device 4 installed at an end of the machine base 2, and a head function recovery. A maintenance system moving table 5 that places various units of the apparatus 4 together and moves on the machine base 2, a functional liquid supply apparatus 6 having a functional liquid tank 141 that supplies functional liquid to the functional liquid droplet ejection head 16, and the like. The functional recovery process of the functional liquid droplet ejection head 16 is periodically performed by the head function recovery device 4 and the drawing by the functional liquid droplets is performed on the workpiece W by the drawing device 3. Further, in the droplet discharge device 1, a functional liquid recovery device 7 (see FIGS. 3 and 4) that recovers the functional liquid sucked by the suction unit 82 of the head function recovery device 4 and the above-described components are integratedly controlled. A control device (not shown) is incorporated.

  The drawing apparatus 3 includes an XY movement mechanism 11 including an X-axis table 12 and a Y-axis table 13 orthogonal to the X-axis table 12, a main carriage 14 that is movably attached to the Y-axis table 13, and a main carriage 14 that is suspended from the main carriage 14. The head unit 15 is provided. A functional liquid droplet ejection head 16 is mounted on the head unit 15 via a sub-carriage (not shown). In this case, the workpiece W, which is a substrate, is mounted in a state of being positioned on the X-axis table 12 by a pair of workpiece recognition cameras 17, 17 facing the end of the X-axis table 12. The functional liquid droplet ejection head 16 can be disposed at a predetermined angle with respect to the sub-scanning direction (Y-axis direction) in order to ensure a sufficient application density of functional liquid droplets with respect to the workpiece W. is there. In addition, although one functional liquid droplet ejection head 16 is mounted on the illustrated head unit 15, a plurality of functional liquid droplet ejection heads 16 may be provided.

  The X-axis table 12 has a motor-driven X-axis slider 21 that constitutes a drive system in the X-axis direction, and a work table 22 including a suction table 23 on which a work W is suction-mounted and a work θ-axis table 24 is provided. It is mounted and configured to move freely. Similarly, the Y-axis table 13 has a motor-driven Y-axis slider 31 that constitutes a drive system in the Y-axis direction, and the main carriage 14 is movably mounted thereon via a head θ-axis table 32. Configured.

  In this case, the X-axis table 12 is directly supported on the machine base 2, while the Y-axis table 13 is supported by left and right columns 33, 33 erected on the machine base 2. The X-axis table 12 and the maintenance system moving table 5 are arranged in parallel to each other in the X-axis direction, and the Y-axis table 13 extends so as to straddle the X-axis table 12 and the maintenance system moving table 5. doing.

  The Y-axis table 13 includes the head unit 15 mounted on the Y-axis table 13 between the drawing area 41 positioned immediately above the X-axis table 12 and the function recovery area 42 positioned directly above the maintenance system moving table 5. Move appropriately between. That is, when drawing on the workpiece W introduced into the X-axis table 12, the Y-axis table 13 places the head unit 15 on the drawing area 41 and performs function recovery processing of the functional liquid droplet ejection head 16. First, the head unit 15 is caused to face the function recovery area 42.

  On the other hand, one end of the X-axis table 12 serves as a work introduction area 43 for setting the work W on the X-axis table 12, and the work introduction area 43 includes the pair of work recognition cameras 17, 17 is disposed. The pair of workpiece recognition cameras 17 and 17 simultaneously recognize two reference marks of the workpiece W supplied on the suction table 23, and the workpiece W is aligned based on the recognition result.

  As shown in FIG. 2, the functional liquid droplet ejection head 16 is a so-called dual type, and a ejection nozzle row 64 a configured by arranging a large number of ejection nozzles 65 a that eject functional liquid droplets onto the workpiece W at an equal pitch. And a non-ejection nozzle row 64b configured by arranging non-ejection nozzles 65b that do not eject functional droplets onto the workpiece W at an equal pitch. In addition, a functional liquid introduction unit 51 having a main connection needle 52a (main function liquid introduction port) and a sub connection needle 52b (sub function liquid introduction port) communicating with the discharge nozzle 65a and the non-discharge nozzle 65b, respectively. 51, a main head substrate 53a and a sub head substrate 53b corresponding to the main connection needle 52a and the sub connection needle 52b, respectively, and a head body 54 connected to the lower side (upper side in the figure) of the functional liquid introduction unit 51. ing. The head main body 54 is composed of a piezo element or the like, and corresponds to the main pump portion 61a and the sub pump portion 61b corresponding to the main connection needle 52a and the sub connection needle 52b, respectively, and the main pump portion 61a and the sub pump portion 61b, respectively. And a nozzle plate 62 having a nozzle surface 63 on which the discharge nozzle 65a and the non-discharge nozzle 65b are formed.

In the head main body 54, a main head flow path from the main connection needle 52a to the discharge nozzle 65a and a sub head flow path from the sub connection needle 52b to the non-discharge nozzle 65b are formed independently of each other. ing.
Although details will be described later, the functional liquid tube 163 and the air vent tube 164 of the functional liquid supply device 6 are connected to the main connection needle 52a and the sub connection needle 52b, respectively (see FIGS. 3 and 4). The functional liquid in which bubbles are not mixed is supplied to the flow path in the main head via the functional liquid tube 163, and the functional liquid that fills the flow path in the main head is discharged from the discharge nozzle 65a to the workpiece W. . On the other hand, the functional liquid mixed with bubbles is discharged through the air vent tube 164 into the sub-head flow path. However, the flow path in the sub head has substantially the same configuration as the flow path in the main head, and the functional liquid droplets can be ejected from the non-ejection nozzle 65b to the workpiece W. That is, the functional liquid droplet ejection head 16 can cause liquid droplets to be ejected from both the ejection nozzle 65a and the non-ejection nozzle 65b.

The functional liquid droplet ejection head 16 of the embodiment has a large number of non-ejection nozzles 65b, but the number of non-ejection nozzles 65b is arbitrary as long as it is sufficient to discharge bubbles mixed in the functional liquid. For example, it may be one. However, as in the embodiment, one of the two nozzle rows composed of a number of nozzles that can function as ejection nozzles is designated as a non-ejection nozzle row 64b, and the number of nozzles in the non-ejection nozzle row 64b is designated as a non-ejection nozzle. By functioning as an (air discharge part), the existing so-called double functional droplet discharge head 16 can be used effectively.
The functional liquid droplet ejection head 16 has two nozzle rows, ie, a ejection nozzle row 64a and a non-ejection nozzle row 64b, but has three or more nozzle rows, of which one or more rows are not ejected. The configuration may be a nozzle row 64b.

  Here, with reference to FIG. 1, the discharge operation | movement to the workpiece | work W by the drawing apparatus 3, ie, a drawing operation | movement, is demonstrated easily. First, as preparation before discharging functional droplets, the position correction of the workpiece W set on the suction table 23 is performed by correcting the position in the X-axis direction by the X-axis table 12 and the position in the θ-axis direction by the workpiece θ-axis table 24. In addition to correction, position correction of the head unit 15 set on the main carriage 14 is performed by position correction in the Y-axis direction by the Y-axis table 13 and position correction in the θ-axis direction by the head θ-axis table 32.

Next, the work W is reciprocated in the main scanning direction (X-axis direction) by the X-axis table 12, and the functional liquid droplet ejection head 16 is selectively driven in synchronism with this so that the functional liquid with respect to the work W is discharged. Discharging is performed. Then, after the work W is moved backward, the head unit 15 is moved in the sub-scanning direction (Y-axis direction) by the Y-axis table 13, and the reciprocating movement of the work W in the main scanning direction and the functional liquid droplet ejection head 16 are performed again. Is driven. Then, by repeating this a plurality of times, drawing is performed from end to end of the workpiece W.
In the droplet discharge device 1 of the present embodiment, the drawing operation is performed with the movement of the workpiece W in the X-axis direction as main scanning and the movement of the head unit 15 in the Y-axis direction as sub-scanning. The unit 15 may be moved in the main scanning direction. Alternatively, the work W may be fixed and the head unit 15 may be moved in the X-axis direction and the Y-axis direction.

  The maintenance system moving table 5 extends in the longitudinal direction (X-axis direction) of the main body 2, and includes a common base 71 on which various units of the head function recovery device 4 are placed in a distributed manner, and a common base 71. The head function recovery device 4 is provided with a pair of guide rails 72 that are slidably supported in the X-axis direction and a motor-driven X-axis moving mechanism (not shown), which are dispersedly placed on the common base 71. Are moved in the X-axis direction.

The head function recovery device 4 includes a storage unit 81, a suction unit 82, and a wiping unit 83 that are placed adjacent to each other on the maintenance system moving table 5.
The storage unit 81 seals this in order to prevent the discharge nozzle 65a of the functional liquid droplet discharge head 16 from drying when the operation of the apparatus is stopped. That is, the storage unit 81 is provided with a sealing cap 91 corresponding to the functional liquid droplet ejection head 16 so as to be movable up and down, and rises toward the head unit 15 when the operation of the apparatus is stopped. The sealing cap 91 is brought into close contact with the nozzle surface 63 and sealed. Thereby, vaporization of the functional liquid on the nozzle surface 63 of the functional liquid droplet ejection head 16 is suppressed, and so-called nozzle clogging is prevented.

The suction unit 82 sucks the functional liquid droplet ejection head 16 from the ejection nozzle 65 a and the non-ejection nozzle 65 b side, and performs suction (cleaning) for removing the functional liquid thickened in the functional liquid droplet ejection head 16. Used when performing. That is, the suction unit 82 is positioned corresponding to the functional liquid droplet ejection head 16 and has a suction cap 101 in which a liquid absorbent material is laid at the bottom portion, and the functional liquid droplet ejection head 16 is sucked through the suction cap 101. , A lifting mechanism (not shown) for raising and lowering the suction cap 101, and a suction tube 103 for connecting the suction cap 101 and the suction pump 102 are provided. Pump suction is performed while being in close contact with the nozzle surface 63 of the droplet discharge head 16. Then, the sucked functional liquid is guided to a recovery tank 121 of the functional liquid recovery apparatus 7 described later.
Although details will be described later, the suction unit 82 also functions as a suction means of the discharge head mechanism described in the claims, and sucks bubbles introduced into the flow path in the sub head together with the functional liquid into the cap. Also used when discharging.

  The wiping unit 83 includes a sheet supply unit 111 and a wiping unit 112, and a wiping sheet 113 is provided so as to be fed out and wound up. Further, although not shown, a cleaning liquid supply device that supplies a cleaning liquid (such as a solvent for the functional liquid) stored in the cleaning liquid tank to the wiping sheet 113 via the cleaning liquid spray nozzle is provided. The sheet supply unit 111 and the wiping unit 112 are arranged on the maintenance system moving table 5 side by side in the X-axis direction with the wiping unit 112 positioned on the suction unit 82 side. The wiping unit 112 moves to one of the wiping directions in the X-axis direction (upward in FIG. 1) integrally with the sheet supply unit 111 by the movement of the maintenance system moving table 5 toward the existing head unit 15 and soaks the cleaning liquid. The nozzle surface 63 of the functional liquid droplet ejection head 16 of the head unit 15 is wiped through the wiping sheet 113.

  When the function recovery of the functional droplet discharge head 16 is performed, the suction unit 82 is moved to the function recovery area 42 by the maintenance system moving table 5 and the head unit 15 is moved by the Y-axis table 13 as described above. 42, the functional liquid droplet ejection head 16 is cleaned (pump suction). When cleaning is performed, the wiping unit 83 is subsequently moved to the function recovery area 42 by the maintenance system moving table 5, and the functional liquid droplet ejection head 16 in which the nozzle surface 63 becomes dirty by cleaning is wiped.

  The functional liquid recovery device 7 is for storing the functional liquid sucked by the suction unit 82, and is connected to the recovery tank 121 for storing the sucked functional liquid and the suction pump 102, and collects the sucked functional liquid in the recovery tank 121. And a collection tube 122 leading to

Next, the functional liquid supply device 6 provided in the droplet discharge device 1 will be described in detail. As shown in FIG. 3, the functional liquid supply device 6 is located in the vicinity of the drawing area 41 of the droplet discharge device 1 (see FIG. 1), the functional liquid tank 141 that stores the functional liquid, and the machine base 2. And a tank base 142 with a lifting mechanism on which the functional liquid tank 141 is placed, and a piping unit 143 that connects the functional liquid tank 141 and the functional liquid droplet ejection head 16. The functional liquid in the functional liquid tank 141 is supplied to the functional liquid droplet ejection head 16 via the piping unit 143 by the pump action (discharge of the functional liquid) of the head 16.
The functional liquid tank 141 and the piping unit 143 of the functional liquid supply device 6 and the functional liquid droplet ejection head 16 and the suction unit 82 constitute a discharge head mechanism as defined in the claims.

The functional liquid tank 141 is mounted so as to be movable up and down by the tank mount 142, and is installed at a position lower than the functional liquid droplet ejection head 16, that is, adjusted to a height position causing a predetermined water head difference, In addition to preventing dripping from the discharge nozzle 65a of the functional liquid droplet discharge head 16, a predetermined amount of liquid droplets are discharged. As shown in FIG. 5, the functional liquid tank 141 has a functional liquid pack 151 accommodated in a resin case (not shown). The functional liquid pack 151 is made of, for example, an aluminum vapor-deposited film, and a main part is constituted by a bag-shaped pack main body 152 having deformable flexibility. Yes. The functional liquid supply port 153 is made of a resin material and has a predetermined strength, and includes a base side mounting hole 154 that is the pack body 152 side, and an outer flange portion 155 that is formed integrally with the mounting hole 154. It consists of and. The flange portion 155 has a circular outer shell, and a circular opening 156 that communicates with the inside of the pack main body 152 and serves as an ink outlet at the center thereof. The functional liquid supply port 153 has an elastic connecting portion 157 made of butyl rubber that plugs the opening 156. Then, by inserting a hollow needle 167 attached to an upstream end of a tank connection tube 162 (described later) of the piping unit 143 into the elastic connection portion 157, the functional liquid tank 141 and the functional liquid droplet are discharged via the piping unit 143. The head 16 is communicated.
The functional liquid tank 141 is filled with the functional liquid that has been sufficiently deaerated during the manufacturing process in an airtight state in which air is excluded, resulting in a decrease in ejection performance due to oxygen remaining or dissolved in the functional liquid. It prevents problems such as liquid alteration and cracking in the drying process. The functional liquid pack 151 is preferably housed in a case and has a cartridge structure.

The piping unit 143 includes a T-shaped branch joint 161 provided in the vicinity of the functional droplet discharge head 16, a tank connection tube 162 that connects the T-shaped branch joint and the functional liquid tank 141, the T-shaped branch joint 161, and the functional droplet. The functional liquid tube 163 that connects the main connection needle 52a of the discharge head 16 and the air vent tube 164 that connects the T-shaped branch joint 161 and the sub connection needle 52b of the functional liquid droplet discharge head 16 are connected.
The functional liquid tube 163 and the air vent tube 164 are made of hard resin, and support a T-shaped branch joint 161 connected thereto in a predetermined posture (described later). Furthermore, it is preferable that the tank connection tube 162 is made of a material having excellent gas barrier properties and waterproof properties, such as an inner layer made of ethylene vinyl alcohol having a low gas permeability and an outer layer made of polyethylene having a high waterproof property. According to this, oxygen and moisture in the air can be prevented from reacting with the functional liquid flowing through the tube through the tube.

  The functional liquid tube 163 and the main connection needle 52a are connected to each other via a main head side connector 165 made of butyl rubber, and the air vent tube 164 and the sub connection needle 52b are connected to each other via a sub head side connector 166 made of butyl rubber. Further, a hollow needle 167 to be inserted into the elastic connection portion 157 of the functional liquid tank 141 is connected to the upstream end of the tank connection tube 162 via a hollow needle connection member 168.

  As shown in FIG. 6, the hollow needle connecting member 168 includes a needle side connecting member 171 into which the hollow needle 167 is inserted into the axis, and a supply line side connecting member 172 into which the tank connecting tube 162 is inserted into the axis. The hollow needle 167 is connected to the upstream end of the tank connection tube 162 by flange-joining both. The needle-side connection member 171 has a disc-like needle-side flange 181 made of brass, and a seal for the through-hole 182 is provided at the needle base of the hollow needle 167 fitted into the through-hole 182 of the shaft center. A small-diameter O-ring 183 is interposed.

  The supply pipe side connection member 172 has a brass pipe-like pipe side flange 191 and a brass female screw member 196 attached to a male screw part 192 concentrically protruding on one surface thereof. doing. A concentric recess 193 having substantially the same diameter as the outer diameter of the small-diameter O-ring 183 is formed on the other surface of the pipe-side flange 191, and a recess 193 is formed from the male screw portion 192 on the axis. A penetrating through hole 194 is formed. The female screw member 196 has a circular cross-sectional shape that is complementary to the male screw portion 192. The female screw member 196 has an insertion hole 197 formed in the shaft center of the bottom portion and a female screw formed on the inner surface thereof. It is screwed into a male screw formed on the outer surface of the male screw part 192 and fixed to the duct side flange 191. The tank connection tube 162 is inserted from the insertion hole 197 of the female screw member 196 into the through hole 194 of the pipe-side flange 191 so that the upstream end is located in the recess 193. A large-diameter O-ring 198 for sealing the through-hole 194 is interposed between the upper surface of the male screw portion 192 and the bottom inner surface of the female screw member 196.

  Then, the small diameter O-ring 183 of the needle side connecting member 171 is fitted into the concave portion 193 of the pipe side flange 191 and the needle side flange 181 and the pipe side flange 191 are flange-joined, whereby the hollow needle 167 and the tank connection tube 162 are joined. And are connected.

The T-shaped branch joint 161 has an inflow port 201 formed in the same diameter, a main outflow port 202, and a sub outflow port 203, and is made of resin, stainless steel, or the like. In this case, the T-shaped branch joint 161 has the above-described hard resin functional liquid tube 163 and air so that the sub outflow port 203 faces upward, the main outflow port 202 faces downward, and the inflow port 201 becomes horizontal. The sideways posture is held by the punch tube 164. That is, the sub outflow port 203 and the main outflow port 202 are located on the same axis and arranged vertically. And it is preferable to connect each port and each tube by heat welding etc., unitize them, and to be replaceable as a whole.
In addition, the functional liquid tube 163 and the air vent tube 164 may be configured by a flexible flexible tube, and the T-shaped branch joint 161 may be supported by a pipe support.

  In the functional liquid supply apparatus 6 configured as described above, when the pressure in the main head flow path becomes negative with the liquid droplet ejection of the functional liquid droplet ejection head 16, the tank connection tube 162 and the functional liquid tube of the piping unit 143. Through 163, the functional liquid is supplied from the functional liquid tank 141 to the main head flow path. When the functional liquid is initially filled in the flow path from the functional liquid tank 141 to the main head flow path, the suction unit 82 performs a suction operation on the discharge nozzle 65a and the non-discharge nozzle 65b. For this reason, functional droplets are not ejected from the non-ejection nozzle 65 b communicating with the sub-head flow path, but the sub-outflow port 203 of the T-shaped branch joint 161 reaches the sub-head flow path of the functional liquid droplet ejection head 16. The flow path is also filled with the functional liquid.

  By the way, in the flow path from the functional liquid tank 141 to the functional liquid droplet ejection head 16, air enters from the hollow needle 167 when the hollow needle 167 is inserted into and removed from the elastic connection portion 157 for replacement of the functional liquid tank 141 or the like. Or air may pass through each tube (especially a non-gas barrier tube), and bubbles may be mixed into the functional liquid. To be separated. That is, the functional liquid flowing in from the inflow port 201 hits the inner wall facing the inflow port 201 in the flow path in the T-shaped branch joint 161 and bends downward by 90 ° (FIG. 3 shows the flow of the functional liquid as an arrow. 2), and flows out to the main outflow port 202. Therefore, since turbulent flow is generated at the branch portion of the flow path in the T-shaped branch joint 161, the air bubbles mixed in the functional liquid are easily separated from the flow of the functional liquid and rise to the sub outflow port 203. The bubbles rising to the sub outflow port 203 are guided to the sub head flow path through the air vent tube 164 in a state of being mixed into the functional liquid.

In addition, since the T-shaped branch joint 161 is provided in the vicinity of the functional liquid droplet ejection head 16, the functional liquid tube 163 becomes extremely short, so that the air passes through the functional liquid tube 163. There is less possibility that new bubbles are generated in the tube 163.
Further, since the main outflow port 202 extends downward, even if a new bubble is generated in the functional liquid tube 163, the bubble rises due to buoyancy, and the main outflow port of the T-shaped branch joint 161 Since it is led from 202 to the sub outflow port 203, it is discharged to the flow path in the sub head. Therefore, it is possible to reliably prevent the functional liquid mixed with bubbles from flowing into the main head flow path. Note that if the T-shaped branch joint 161 is not provided in the vicinity of the functional liquid droplet ejection head 16 and the functional liquid tube 163 is not extremely short, bubbles may be newly generated in the functional liquid tube 163. However, even in this case, if the main outflow port 202 extends downward, bubbles generated in the functional liquid tube 163 can be discharged to the sub-head flow path.

  As the functional liquid is supplied to the main head flow path of the functional liquid droplet ejection head 16, bubbles mixed in the functional liquid accumulate in the air vent pipe and the sub head flow path. In this state, if the suction operation is performed by the suction unit 82 described above, the air bubbles guided to the sub-head flow path can be sucked together with the functional liquid and discharged to the suction cap 101. In this case, since the functional liquid mixed with bubbles can be removed by suction from the sub-head flow path at the same time as the suction operation (cleaning) for preventing nozzle clogging is performed, the air vent pipe path or sub-head flow path There is no need to provide a new device for discharging the air bubbles accumulated in the container or to perform complicated control operations.

  Note that the T-shaped branch joint 161 only needs to have the secondary outflow port 203 extending upward. In addition to the above-described configuration, the T-shaped branch joint 161 is positioned in the vicinity of the functional liquid droplet ejection head 16, for example, as shown in FIG. , The functional liquid tube 163 and the air vent tube so that the sub outflow port 203 faces upward and the main outflow port 202 and the inflow port 201 are horizontal (the inflow port 201 and the main outflow port 202 are positioned coaxially). The configuration may be held by 164. In this case, unlike the above-described configuration, the functional liquid flowing in from the inflow port 201 does not bend in the flow path in the T-shaped branch joint 161 but flows linearly toward the main outflow port 202 (same as above). The flow of the functional liquid is indicated by an arrow 212 in the figure), and since the bubbles are difficult to separate from the functional liquid, an air trap section 204 that supplements air (bubbles) mixed in the functional liquid is provided at the base of the sub outflow port 203. ing. The air trap portion 204 has a configuration in which the sub outflow port 203 is expanded in a funnel shape toward the inflow side, and the base portion of the sub outflow port 203 (air trap portion 204) is larger in diameter than the base portion of the main outflow port 202. Is getting bigger. According to this, since air bubbles mixed in the functional liquid are surely captured by the air trap unit 204, it is possible to prevent the air bubbles from flowing out to the main outflow port 202 side, and the air vent tube from the sub outflow port 203. Air bubbles can be reliably guided to 164.

  Further, in the present embodiment, the T-shaped branch joint 161 is used. However, a branch joint having another shape may be used. For example, the branch joint in which the inflow port 201, the main outflow port 202, and the sub outflow port 203 are orthogonal to each other. May be used.

  As described above, the functional liquid tank has almost no change in the mechanical structure and control operation of the entire droplet discharge device 1 simply by discharging the air bubbles mixed in the functional liquid into the sub head flow path. Air bubbles can be eliminated from the flow path from 141 to the functional liquid droplet ejection head 16 (the flow path in the main head).

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 7 is a flowchart showing a manufacturing process of the color filter, and FIG. 8 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix formation step (S11), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S12), the bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 8B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 8C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 therebelow serve as a partition wall portion 507b that partitions each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material of the bank 503, a resin material whose coating film surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. The landing position accuracy is improved.

  Next, in the colored layer forming step (S13), as shown in FIG. 8D, functional droplets are ejected by the functional droplet ejecting head 16 and each pixel region 507a is surrounded by the partition wall portion 507b. Let it land. In this case, the functional liquid droplet ejection head 16 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. If the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S14), and as shown in FIG. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 9 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 8, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 9 are formed at a predetermined interval. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 16. Furthermore, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 16.

FIG. 10 is a cross-sectional view of a main part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 11 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also.

  Next, FIG. 12 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2 and the} like, and is laminated on the inorganic bank layer 618a. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, the manufacturing process of said display apparatus 600 is demonstrated with reference to FIGS.
As shown in FIG. 13, the display device 600 includes a bank part forming step (S21), a surface treatment step (S22), a hole injection / transport layer forming step (S23), a light emitting layer forming step (S24), It is manufactured through an electrode formation step (S25). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S21), as shown in FIG. 14, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S22), a lyophilic process and a lyophobic process are performed. The region to be subjected to the lyophilic treatment is the first laminated portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b. )
By performing this surface treatment process, when the functional layer 617 is formed using the functional liquid droplet ejection head 16, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the work table 22 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S23) and light emitting layer forming step (S24) are performed. .

  As shown in FIG. 16, in the hole injection / transport layer forming step (S23), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 16 to each opening 619 that is a pixel region. Discharge inside. After that, as shown in FIG. 17, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S24) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Next, as shown in FIG. 18, the second composition containing the light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 18) is used as a functional liquid droplet in the pixel region ( A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 19, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 16, as shown in FIG. 20, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. Further, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S25).

In the counter electrode forming step (S25), as shown in FIG. 21, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as electrodes, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are provided as appropriate.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 22 is an exploded perspective view of a main part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the work table 22 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 16. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 16 to cope with it. Land in the color discharge chamber 705.

Next, FIG. 23 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A lattice-shaped bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 24A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

1 is a plan view schematically illustrating a droplet discharge device according to an embodiment. It is a perspective view of the functional liquid droplet ejection head concerning an embodiment. It is the figure which represented typically the operation | movement which supplies a functional liquid from a functional liquid tank to a functional droplet discharge head via the piping unit which concerns on embodiment. It is the figure which represented typically the operation | movement which supplies a functional liquid to a functional droplet discharge head from a functional liquid tank via the piping unit which concerns on other embodiment. It is a perspective view of the functional liquid tank concerning an embodiment. It is principal part sectional drawing of the hollow needle connection member which concerns on embodiment. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device 6 ... Functional liquid supply device 11 ... XY moving mechanism 16 ... Functional droplet discharge head 52a ... Main connection needle 52b ... Sub connection needle 61a ... Main pump part 62b ... Sub pump part 65a ... Discharge nozzle 65b ... Non-discharge nozzle 82 ... Suction unit 141 ... Functional liquid tank 143 ... Piping unit 161 ... T-shaped branch joint 163 ... Functional liquid tube 164 ... Air vent tube 201 ... Inflow port 202 ... Main outflow port 203 ... Sub outflow port 204 ... Air trap Part 500 ... Color filter 508 ... Colored layer W ... Workpiece

Claims (10)

As the liquid droplets are discharged from the functional liquid droplet ejection head, the main functional liquid of the functional liquid droplet ejection head is introduced through a piping unit that connects the functional liquid storage means that stores the functional liquid and the functional liquid droplet ejection head. A discharge head mechanism for supplying a functional liquid from the functional liquid storage means to a flow path in the main head extending from the mouth to the discharge nozzle,
The piping unit is
Forming a single inflow port connected to the functional liquid storage means on the upstream side, and forming a main outflow port and a secondary outflow port extending upward on the outflow side;
A functional liquid conduit having an upstream end connected to the main outflow port and a downstream end connected to the flow path in the main head;
An upstream end is connected to the sub-outflow port, and a downstream end is connected to the air discharge part, and has an air vent line,
The air discharge section is formed in the functional liquid droplet ejection head independently of the main head flow path, and is configured by a sub head flow path from the sub function liquid inlet to the non-ejection nozzle. A discharge head mechanism.   2. The suction device according to claim 1, further comprising a suction unit that performs a suction operation on the discharge nozzle and the non-discharge nozzle through a cap that is in close contact with the nozzle surface of the functional liquid droplet discharge head. Discharge head mechanism.   The ejection head mechanism according to claim 1, wherein the branch joint is provided in the vicinity of the functional liquid droplet ejection head.   The discharge head mechanism according to any one of claims 1 to 3, wherein the sub-outflow port has an air trap part that supplements air mixed in the functional liquid at a base part.   The discharge head mechanism according to claim 1, wherein the main outflow port extends downward.   The said branch joint is comprised by the T-shaped branch joint of the horizontal attitude | position which arrange | positioned the two branch ports on the same axis as the said sub outflow port and the said main outflow port, respectively, and these were arrange | positioned up and down. 3. The discharge head mechanism according to 1 or 2.   7. A droplet discharge apparatus comprising: the discharge head mechanism according to claim 1; and an XY moving mechanism that moves the functional droplet discharge head relative to a workpiece.   8. A method for manufacturing an electro-optical device, wherein the droplet discharge device according to claim 7 is used to form a film forming portion with functional droplets on the workpiece.   An electro-optical device using the droplet discharge device according to claim 7, wherein a film-forming unit using functional droplets is formed on the workpiece. An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 8 or the electro-optical device according to claim 9.

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