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JP2005147756A - Liquid feed pump device - Google Patents

Liquid feed pump device Download PDF

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Publication number
JP2005147756A
JP2005147756A JP2003382678A JP2003382678A JP2005147756A JP 2005147756 A JP2005147756 A JP 2005147756A JP 2003382678 A JP2003382678 A JP 2003382678A JP 2003382678 A JP2003382678 A JP 2003382678A JP 2005147756 A JP2005147756 A JP 2005147756A
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Prior art keywords
liquid
flow path
pump
pump head
fed
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Japanese (ja)
Inventor
Shuzo Maruyama
秀三 丸山
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Shimadzu Corp
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Shimadzu Corp
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Priority to JP2003382678A priority Critical patent/JP2005147756A/en
Priority to US10/977,406 priority patent/US20050100464A1/en
Priority to CN200410102325.7A priority patent/CN1619305A/en
Publication of JP2005147756A publication Critical patent/JP2005147756A/en
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
    • F04B49/24—Bypassing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B11/00—Equalisation of pulses, e.g. by use of air vessels; Counteracting cavitation
    • F04B11/005—Equalisation of pulses, e.g. by use of air vessels; Counteracting cavitation using two or more pumping pistons

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid feed pump device for stably performing liquid feed even if the amount of liquid fed is very little. <P>SOLUTION: An adjustment flow path 40 is provided and connected in parallel with first and second pump mechanisms. The liquid fed from pump heads 7 and 11 is separated; a part of the liquid is fed to the delivery port 15 side while the other part of the liquid is let flow through the flow path 40 back to the suction port side. The flow path 40 is provided with a resistance pipe 16. A pressure on the order of 2 MPa to 20 MPa acts on the resistance pipe 16 at a flow rate of 100 μL/min to 1 mL/min, for example. As to a micro LC and a nano LC, a pressure on the order of several MPa to 20 MPa acts thereon at a column flow rate of 100 nL/min to 10 μL/min. Therefore, 0.1% to 1% of the liquid fed from a drive mechanism is fed from the delivery port 15 and the residual liquid is returned through the flow path 40 to the suction flow path side. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、液体クロマトグラフの溶離液の送液など、液体を送液するのに用いる送液ポンプ装置に関する。   The present invention relates to a liquid feed pump device used for feeding a liquid such as a liquid chromatograph eluent.

従来、ミクロ高速液体クロマトグラフ（ミクロＬＣ）やナノ高速液体クロマトグラフ（ナノＬＣ）用のポンプとしては、スプリッタを用いて１００〜１０００μＬ／ｍｉｎの流量の移動相を分流して必要な流量だけを送液する方式（スプリッタ方式）と、直接的に微少流量を吸入して送出する方式（ダイレクト方式）のものがある。   Conventionally, as a pump for a micro high performance liquid chromatograph (micro LC) or a nano high performance liquid chromatograph (nano LC), a mobile phase having a flow rate of 100 to 1000 μL / min is divided using a splitter to obtain only a necessary flow rate. There are a system for feeding liquid (splitter system) and a system for directly sucking and feeding a minute flow rate (direct system).

スプリッタ方式の送液ポンプは、スプリッタの抵抗が時間の経過とともに変化するため、流量を長時間安定させることが困難である。また、必要流量以外の分流された移動相は排出されるので、移動相を無駄に消費してしまう問題がある。
ダイレクト方式の送液ポンプは、ポンプ動作のわずかな変動であっても、微少な送液量である場合には流量に大きく影響するので、脈動や送液ムラが生じやすい問題がある。 In the splitter type liquid feeding pump, since the resistance of the splitter changes with time, it is difficult to stabilize the flow rate for a long time. Further, since the diverted mobile phase other than the necessary flow rate is discharged, there is a problem that the mobile phase is wasted.
The direct-type liquid feed pump has a problem that even a slight fluctuation in the pump operation greatly affects the flow rate when the amount is small, so that pulsation and liquid feed unevenness are likely to occur.

そこで本発明は、従来の問題点であった移動相の無駄な消費やポンプ動作の変動による脈動・送液ムラを是正して、微少な送液量であっても安定して送液を行なうことのできる送液ポンプ装置を提供することを目的とする。   Therefore, the present invention corrects pulsation / liquid feeding unevenness due to wasteful consumption of the mobile phase and fluctuations in pump operation, which has been a problem in the past, and stably feeds even a minute liquid feeding amount. It is an object of the present invention to provide a liquid feed pump device that can handle the above.

本発明は、吸入口より液を吸入して送出口から送出するポンプヘッドと、前記ポンプヘッドの送出口側に設けられ、送出口から外部に送出される液の流量を測定する流量計と、前記ポンプヘッドに並列に設けられ、前記ポンプヘッドの送出口に送られる液の一部を吸入口側へ戻す調整流路と、前記流量計の出力を入力し、その値が所定値となるように前記ポンプヘッドの駆動を制御する制御装置とを備えたことを特徴とするものである。   The present invention is a pump head that sucks liquid from an inlet and sends it out from the outlet, a flow meter that is provided on the outlet side of the pump head and measures the flow rate of the liquid sent out from the outlet, An adjustment flow path provided in parallel to the pump head for returning a part of the liquid sent to the pump head outlet to the suction port side and the output of the flow meter are input so that the value becomes a predetermined value. And a control device for controlling the driving of the pump head.

この構成により、ポンプの送出口側からの送液の一部を調整流路により吸入口側に戻し、かつ、送出口側で流量を測定して設定値との誤差をフィードバックすることで、ポンプの動作速度をコントロールする。
調整流路により送出口側から吸入口側に戻す割合を大きくする程、微少量の送液に適したものとなる。 With this configuration, a part of the liquid fed from the pump outlet side is returned to the suction port side by the adjustment flow path, and the flow rate is measured at the outlet side to feed back an error from the set value. Controls the speed of operation.
The larger the ratio of returning from the delivery port side to the suction port side by the adjustment channel, the more suitable for feeding a small amount of liquid.

また、調整流路に開閉弁を設けてもよい。   In addition, an open / close valve may be provided in the adjustment channel.

送出口からの送液の一部を調整流路により吸入口側に戻すようにしたので、ポンプヘッドは送出口から外部へ送液する流量よりも多くの量を送ることができるようになるので、ポンプの動作周期を短くすることができ、脈動や送液ムラの影響を小さくすることができる。また、送出口側に流量計を設けて送液量を測定し、その測定値と設定値との誤差をフィードバックするようにしたので、送液量を安定させることができる。   Since a part of the liquid feed from the delivery port is returned to the suction port side by the adjustment flow path, the pump head can send a larger amount than the flow rate sent from the delivery port to the outside. The operation cycle of the pump can be shortened, and the influence of pulsation and liquid feeding unevenness can be reduced. Further, a flow meter is provided on the outlet side to measure the liquid feeding amount, and an error between the measured value and the set value is fed back, so that the liquid feeding amount can be stabilized.

調整流路に開閉弁を設ければ、調整流路への液の流入のオン／オフを切り換えることができ、送液量に応じて対応させることができる。   If an on-off valve is provided in the adjustment flow path, the inflow of liquid into the adjustment flow path can be switched on / off, and can be made to correspond to the amount of liquid fed.

以下に一実施例を説明する。
図１はダブルプランジャー方式のポンプに本発明を適用した一実施例の構成を示す流路図である。
この実施例の送液ポンプ装置は、２つのポンプ機構から構成される。第１のポンプ機構のポンプヘッド７は、プランジャー４ａと吸入口側逆止弁８及び吐出口側逆止弁６とからなる。このポンプヘッド７ではプランジャー４ａが図で右側に移動（後退）することによって逆止弁８が開いて逆止弁６が閉じ、吸入口１４から液が吸入されてポンプヘッド７内にできた空間７ａに溜められる。プランジャー４ａが図で左に移動（前進）すると今度は逆止弁６が開き逆止弁８が閉じ、空間７ａ内に溜められた液がプランジャー４ａによって押し出される。 One embodiment will be described below.
FIG. 1 is a flow chart showing the configuration of an embodiment in which the present invention is applied to a double plunger type pump.
The liquid feed pump device of this embodiment is composed of two pump mechanisms. The pump head 7 of the first pump mechanism includes a plunger 4 a, a suction port side check valve 8, and a discharge port side check valve 6. In this pump head 7, the plunger 4 a is moved (retracted) to the right side in the drawing, whereby the check valve 8 is opened and the check valve 6 is closed, and liquid is sucked from the suction port 14 and formed in the pump head 7. It is stored in the space 7a. When the plunger 4a moves (advances) to the left in the drawing, the check valve 6 opens and the check valve 8 closes, and the liquid stored in the space 7a is pushed out by the plunger 4a.

第２のポンプ機構のポンプヘッド１１も同様に、プランジャー４ｂと吸入口側逆止弁１２及び送出口側逆止弁１０とからなる。このポンプヘッド１１でも、プランジャー４ｂが図で右側に移動することによって逆止弁１２が開いて逆止弁１０が閉じ、吸入口１４から液が吸入されてポンプヘッド１１内にできた空間１１ａに溜められる。プランジャー４ｂが図で左に移動すると今度は逆止弁１０が開き逆止弁１２が閉じ、空間１１ａ内に溜められた液がプランジャー４ｂによって押し出される。   Similarly, the pump head 11 of the second pump mechanism includes a plunger 4 b, an inlet side check valve 12, and an outlet side check valve 10. Also in this pump head 11, the check valve 12 is opened and the check valve 10 is closed by moving the plunger 4b to the right in the drawing, and the space 11a formed in the pump head 11 by sucking liquid from the suction port 14. Can be stored. When the plunger 4b moves to the left in the figure, the check valve 10 opens and the check valve 12 closes, and the liquid accumulated in the space 11a is pushed out by the plunger 4b.

プランジャー４ａはカム２ａの外周表面と常時接するようになっており、カム２ａが回転することによってプランジャー４ａが往復運動を行なう。同様に、プランジャー４ｂはカム２ｂの外周表面と常時接するようになっており、カム２ｂが回転することによってプランジャー４ｂが往復運動を行なう。カム２ａ、２ｂは駆動機構として共通のモータ２と接続されている。カム２ａとカム２ｂはプランジャー４ａとプランジャー４ｂの吸入・送出動作が交互に行なわれるようにモータ２に接続されており、連続して送液できるようになっている。   The plunger 4a is always in contact with the outer peripheral surface of the cam 2a, and the plunger 4a reciprocates as the cam 2a rotates. Similarly, the plunger 4b is always in contact with the outer peripheral surface of the cam 2b, and the plunger 4b reciprocates as the cam 2b rotates. The cams 2a and 2b are connected to a common motor 2 as a drive mechanism. The cam 2a and the cam 2b are connected to the motor 2 so that the suction and delivery operations of the plunger 4a and the plunger 4b are alternately performed, so that the liquid can be continuously fed.

この送液ポンプ装置では、第１及び第２のポンプ機構に並列に、それぞれのポンプヘッド７、１１の吸入口側と吐出口側との間に接続された調整流路４０が設けられている。ポンプヘッド７、１１より送出された液はこの調整流路４０により分流され、一部の液は送出口１５側へ送られ、その他の液は調整流路４０を流れて吸入口側に戻される。調整流路４０には抵抗管１６が設けられており、この抵抗管１６は、例えば、１００μＬ／ｍｉｎ〜１ｍＬ／ｍｉｎの流量で２ＭＰａ〜２０ＭＰａ程度の圧力がかかるようになっている。ミクロＬＣ、ナノＬＣでは、カラムの流量が１００ｎＬ／ｍｉｎ〜１０μＬ／ｍｉｎ程度で数ＭＰａ〜２０ＭＰａ程度の圧力がかかるため、ポンプヘッド７、１１から送出される液のうち０．１％〜１％が送出口１５から送出され、残りの液は調整流路４０を通って吸入流路側に戻される。
抵抗菅流路４０の抵抗管１６より上流側にはストップバルブ（開閉弁）１８が設けられ、このバルブ１８の開閉により抵抗管１６に液を流入させるか流入させないかを切り替えることができるようになっている。 In this liquid feed pump device, an adjustment flow path 40 connected between the suction port side and the discharge port side of each pump head 7, 11 is provided in parallel with the first and second pump mechanisms. . The liquid sent out from the pump heads 7 and 11 is diverted by the adjustment flow path 40, a part of the liquid is sent to the delivery port 15 side, and the other liquids flow through the adjustment flow path 40 and return to the suction port side. . The adjustment flow path 40 is provided with a resistance tube 16, and the resistance tube 16 is applied with a pressure of about 2 MPa to 20 MPa at a flow rate of 100 μL / min to 1 mL / min, for example. In micro LC and nano LC, since the column flow rate is about 100 nL / min to 10 μL / min and a pressure of about several MPa to 20 MPa is applied, 0.1% to 1% of the liquid delivered from the pump heads 7 and 11 Is delivered from the delivery port 15 and the remaining liquid is returned to the suction flow path side through the adjustment flow path 40.
A stop valve (open / close valve) 18 is provided on the upstream side of the resistance pipe 16 in the resistance soot channel 40 so that whether the liquid is allowed to flow into the resistance pipe 16 or not can be switched by opening / closing the valve 18. It has become.

３２、３４は液が吸入口１４からポンプヘッド７、１１内に吸入される際に通る流路である。３６はポンプヘッド７、１１から送出された液の一部が送出口に送液される際に流れる流路であり、ポンプヘッド１１から送出された液の一部は流路３８を流れた後に流路３６を流れて送出口１５に送液される。また、ポンプヘッド７から液が送出される際は、送出された液の一部は流路３８を通って調整流路４０に流入するようになっている。   Reference numerals 32 and 34 denote flow paths through which liquid is sucked into the pump heads 7 and 11 from the suction port 14. Reference numeral 36 denotes a flow path that flows when a part of the liquid sent out from the pump heads 7 and 11 is sent to the outlet, and a part of the liquid sent out from the pump head 11 flows through the flow path 38. The liquid flows through the flow path 36 and is fed to the delivery port 15. Further, when the liquid is delivered from the pump head 7, a part of the delivered liquid flows into the adjustment flow path 40 through the flow path 38.

送出口１５の上流側で、調整流路との分岐点よりも下流には、流量計２２が設けられ、第１及び第２のポンプ機構から送出口１５に送出された液の流量を測定するようになっている。
また、流量計２２には制御装置２４が接続されている。制御装置２４は流量計２２から出力された流量の値を入力し、予め設定された流量と比較してその誤差を小さくするようにモータ２を制御する。このように、流量計２２により送液量を常時測定して所定の流量と比較し、その結果に応じてモータ２の回転数を制御するので、送出口１５に送液される液量の安定化を図ることが可能である。 A flow meter 22 is provided on the upstream side of the delivery port 15 and downstream of the branch point with the adjustment channel, and measures the flow rate of the liquid sent from the first and second pump mechanisms to the delivery port 15. It is like that.
A control device 24 is connected to the flow meter 22. The control device 24 inputs the value of the flow rate output from the flow meter 22 and controls the motor 2 so as to reduce the error compared to a preset flow rate. In this way, the flow rate is always measured by the flow meter 22 and compared with a predetermined flow rate, and the number of revolutions of the motor 2 is controlled according to the result. Can be achieved.

以下に同実施例の送液ポンプ装置の動作を液の流れに沿って説明する。
モータ２が回転することによりモータ２に取り付けられたカム２ａ、２ｂが回転してプランジャー４ａ、４ｂを往復運動させる。図１において上方に位置する第１のポンプ機構では、逆止弁６、８は、プランジャー４ａが右側に移動すると逆止弁６が閉じて逆止弁８が開き、プランジャー４ａが左側に移動すると逆止弁８が閉じて逆止弁６が開くようになっている。プランジャー４ａが右側に移動するとポンプヘッド７内に空間７ａができ、そこに液が吸入口１４より流路３２を通って吸入される。プランジャー４ａが左に移動すると空間７ａ内に吸入された液が押し出されてポンプヘッド７より逆止弁６を介して送出される。ポンプヘッド７より送出された液は、流路３６を流れて送出口１５に送液される液と流路３８、調整流路４０を通って吸入口側に戻される液とに分流される。 Hereinafter, the operation of the liquid feed pump device of the embodiment will be described along the flow of the liquid.
As the motor 2 rotates, the cams 2a and 2b attached to the motor 2 rotate to reciprocate the plungers 4a and 4b. In the first pump mechanism located at the upper side in FIG. 1, the check valves 6 and 8 are closed when the plunger 4a moves to the right side, the check valve 6 is closed and the check valve 8 is opened, and the plunger 4a is moved to the left side. When it moves, the check valve 8 is closed and the check valve 6 is opened. When the plunger 4a moves to the right side, a space 7a is formed in the pump head 7, and liquid is sucked through the flow path 32 from the suction port 14 therein. When the plunger 4a moves to the left, the liquid sucked into the space 7a is pushed out and sent out from the pump head 7 through the check valve 6. The liquid sent from the pump head 7 is divided into a liquid that flows through the flow path 36 and is sent to the outlet 15 and a liquid that returns to the suction port side through the flow path 38 and the adjustment flow path 40.

下方に位置する第２のポンプ機構では、逆止弁１０、１２は、プランジャー４ｂが右側に移動すると逆止弁１０が閉じて逆止弁１２が開き、プランジャー４ｂが左側に移動すると逆止弁１２が閉じて逆止弁１０が開くようになっている。プランジャー４ｂが右側に移動するとポンプヘッド１１内に空間１１ａができ、そこに液が吸入口１４より流路３４を通って吸入される。プランジャー４ｂが左に移動すると空間１１ａ内に吸入された液が押し出されてポンプヘッド１１より逆止弁１０を介して送出される。ポンプヘッド１１より送出された液は、流路３８、３６を流れて送出口１５に送液される液と調整流路４０を通って吸入口側に戻される液とに分流される。   In the second pump mechanism located below, the check valves 10 and 12 are reversed when the plunger 4b moves to the right and the check valve 10 is closed and the check valve 12 is opened and when the plunger 4b moves to the left. The check valve 12 is closed and the check valve 10 is opened. When the plunger 4 b moves to the right side, a space 11 a is formed in the pump head 11, and liquid is sucked through the flow path 34 from the suction port 14. When the plunger 4b moves to the left, the liquid sucked into the space 11a is pushed out and sent out from the pump head 11 through the check valve 10. The liquid delivered from the pump head 11 is divided into a liquid that flows through the flow paths 38 and 36 and is sent to the delivery port 15 and a liquid that is returned to the suction port side through the adjustment flow path 40.

第１又は第２から送出されて流路３６を流れる液は流量計２２によりその流量を測定される。流量計２２により測定される流量の測定結果は制御装置２４に入力される。制御装置２４には予め所望の流量が設定されており、流量計２２からの測定結果が設定された流量となるようにモータ２の回転速度を制御する。   The flow rate of the liquid sent from the first or second and flowing through the flow path 36 is measured by the flow meter 22. The measurement result of the flow rate measured by the flow meter 22 is input to the control device 24. A desired flow rate is set in the control device 24 in advance, and the rotational speed of the motor 2 is controlled so that the measurement result from the flow meter 22 becomes the set flow rate.

ストップバルブ１８が開いている状態では、ポンプヘッド７、１１から送出された液の大部分は調整流路４０を流れて吸入口側に戻される。送出口１５から送出されない液が吸入側に戻されるので、送出口１５からの送液量に対してポンプヘッド７、１１からの送出量を大きくすることができ、送液ムラや脈動を防止することができる。また、ポンプの動作周期を短くすることになるので、脈流や濃度ムラの影響が小さくなる。
従来のポンプでは、１μＬ／ｍｉｎの送液を行なう場合、プランジャーのストローク容量を１０μＬとすると、１０分ごとにプランジャーが往復するので、１０分の周期で送液にムラが生じていた。しかし本発明では、プランジャーからの送液量は１００μＬ／ｍｉｎ程度でよく、プランジャーの往復周期による送液のムラはほとんど分析に影響を及ぼさない。 When the stop valve 18 is open, most of the liquid delivered from the pump heads 7 and 11 flows through the adjustment flow path 40 and is returned to the suction port side. Since the liquid not sent out from the delivery port 15 is returned to the suction side, the delivery rate from the pump heads 7 and 11 can be increased with respect to the delivery rate from the delivery port 15 to prevent uneven delivery and pulsation. be able to. Further, since the pump operating cycle is shortened, the influence of pulsating flow and density unevenness is reduced.
In the conventional pump, when the liquid is fed at 1 μL / min, if the plunger stroke volume is 10 μL, the plunger reciprocates every 10 minutes. However, in the present invention, the amount of liquid fed from the plunger may be about 100 μL / min, and liquid feeding unevenness due to the reciprocating period of the plunger hardly affects the analysis.

バルブ１８は、送液量がミクロ流量又はナノ流量である場合には開いておき、セミミクロ流量以上（約１００μＬ／ｍｉｎ以上）の送液量である場合には閉じておくのが好ましい。
本発明の構成は、プランジャー及びポンプヘッドを１つだけ備えたポンプであっても同様に適用することができる。
調整流路の下流側の一端は、吸入流路３２、３４に接続されていなくてもよく、移動相タンクなどに接続させて液を戻すようにしてもよい。その場合でも送出口１５からの送液量に対してポンプヘッド７、１１からの送出量を大きくすることができるので、送液ムラや脈動を防止することができる。
ストップバルブ１８は制御装置２４によって送液量に応じて開閉が制御されるようにしてもよい。
また、調整流路４０の流路抵抗をバルブ等を用いて調節できるようにしてもよい。 The valve 18 is preferably opened when the liquid feed amount is a micro flow rate or a nano flow rate, and is closed when the liquid feed amount is a semi-micro flow rate or more (about 100 μL / min or more).
The configuration of the present invention can be similarly applied even to a pump having only one plunger and one pump head.
One end on the downstream side of the adjustment flow path may not be connected to the suction flow paths 32 and 34, and may be connected to a mobile phase tank or the like to return the liquid. Even in such a case, the amount of liquid fed from the pump heads 7 and 11 can be increased with respect to the amount of liquid fed from the outlet 15, so that liquid feeding unevenness and pulsation can be prevented.
The stop valve 18 may be controlled to be opened and closed by the control device 24 in accordance with the amount of liquid to be fed.
Further, the flow path resistance of the adjustment flow path 40 may be adjusted using a valve or the like.

一実施例の構成を示す流路図である。It is a flow chart which shows the composition of one example.

符号の説明Explanation of symbols

２ モータ
２ａ、２ｂ カム
４ａ、４ｂ プランジャー
６、８、１０、１２ 逆止弁
７、１１ ポンプヘッド
７ａ、１１ａ ポンプヘッド内空間
１４ 吸入口
１５ 送出口
１６ 抵抗管
１８ ストップバルブ
２２ 流量計
２４ 制御装置
３２、３４、３６、３８ 流路
４０ 調整流路 2 Motor 2a, 2b Cam 4a, 4b Plunger 6, 8, 10, 12 Check valve 7, 11 Pump head 7a, 11a Pump head inner space 14 Suction port 15 Delivery port 16 Resistance tube 18 Stop valve 22 Flow meter 24 Control Apparatus 32, 34, 36, 38 Flow path 40 Adjustment flow path

Claims (2)

吸入口より液を吸入して送出口から送出するポンプヘッドと、
前記ポンプヘッドの送出口側に設けられ、送出口から外部に送出される液の流量を測定する流量計と、
前記ポンプヘッドに並列に設けられ、前記ポンプヘッドの送出口に送られる液の一部を吸入口側へ戻す調整流路と、
前記流量計の出力を入力し、その値が所定値となるように前記ポンプヘッドの駆動を制御する制御装置とを備えたことを特徴とする送液ポンプ装置。 A pump head for sucking liquid from the suction port and delivering it from the delivery port;
A flow meter that is provided on the outlet side of the pump head and measures the flow rate of the liquid sent out from the outlet;
An adjustment flow path provided in parallel with the pump head and returning a part of the liquid sent to the pump head outlet to the suction port;
A liquid feed pump device comprising: a control device for inputting the output of the flow meter and controlling the drive of the pump head so that the value becomes a predetermined value. 前記調整流路に開閉弁を備えた請求項１に記載の送液ポンプ装置。
The liquid feed pump device according to claim 1, wherein an opening / closing valve is provided in the adjustment channel.
JP2003382678A 2003-11-12 2003-11-12 Liquid feed pump device Pending JP2005147756A (en)

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US10/977,406 US20050100464A1 (en) 2003-11-12 2004-10-29 Liquid feed pump apparatus
CN200410102325.7A CN1619305A (en) 2003-11-12 2004-10-29 Liquid feed pump apparatus

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