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JP2005051257A - Multi-wavelength measuring system having time-division wavelength multiplex pulse light source - Google Patents

Multi-wavelength measuring system having time-division wavelength multiplex pulse light source Download PDF

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JP2005051257A
JP2005051257A JP2004252755A JP2004252755A JP2005051257A JP 2005051257 A JP2005051257 A JP 2005051257A JP 2004252755 A JP2004252755 A JP 2004252755A JP 2004252755 A JP2004252755 A JP 2004252755A JP 2005051257 A JP2005051257 A JP 2005051257A
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pulse light
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JP3857284B2 (en
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Toshio Goto
俊夫 後藤
Norihiko Nishizawa
典彦 西澤
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Japan Science and Technology Agency
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a multi-wavelength measuring system having a time-division wavelength division multiplex pulse light source, which can change multiplexed super-short pulse light of various wavelengthes at a high speed over a wide band at a desired time-division period by installing an oscillator synchronous with output of a short pulse light source to the short pulse light source, a light intensity modulator , and an optical fiber, and by driving the light intensity modulator with the output of the oscillator. <P>SOLUTION: The muli-wavelength measuring system is equipped with the time-division wavelength multiplex pulse light source A, outputting a pulse light temporally changing the wavelength periodically, which includes the short pulse light source 1, the oscillator 5 synchronous with repeated frequencies of the output of the short pulse light source 1, the light intensity modulator 2 which is driven by the output of the oscillator 5 and changes the intensity of transmitted light, and an optical fiber 7 by which a soliton pulse of wavelength shifted linearly to the intensity of the incident pulse light from the light intensity modulator 2; a to-be-measured object 21 which introduces the short pulse light output from the pulse light source A; and a device which evaluates the to-be-measured object 21. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、単一の超短パルス光源と光強度変調器、光ファイバを用いて光の波長が時間に対し周期的に変化する超短パルスを生成する時分割波長多重パルス光源を有する多波長計測システムに関するものである。   The present invention relates to a multi-wavelength light source having a time-division wavelength multiplex pulse light source that generates an ultra-short pulse whose wavelength of light periodically changes with time using a single ultra-short pulse light source, an optical intensity modulator and an optical fiber. It relates to a measurement system.

従来より、これまで超短パルス光は色素レーザーや固体レーザーを用いて生成されてきたが、光学系が大がかり、且つ、複雑で、波長の可変範囲も数十nmと狭いものであった。
なし
Conventionally, ultra-short pulse light has been generated by using a dye laser or a solid-state laser. However, the optical system is large and complicated, and the variable wavelength range is as narrow as several tens of nm.
None

また、これまでの波長可変光源は、機械的にミラー等の光学部品を回転させて波長を変化させていたため、高速に波長を変化させることができず、装置が大掛かりであった。   In addition, since the wavelength variable light source so far has changed the wavelength by mechanically rotating an optical component such as a mirror, the wavelength cannot be changed at high speed, and the apparatus is large.

また、波長可変光源等により波長可変した光を周期的に出力することはできるが、ほぼ同時間に波長の異なるソリトンパルスを周期的に出力することはできなかった。   Further, although the wavelength-variable light can be periodically output by a wavelength variable light source or the like, soliton pulses having different wavelengths cannot be periodically output almost simultaneously.

本発明では、上記問題点を除去し、短パルス光源と光強度変調器及び光ファイバに、短パルス光源の出力に同期する発振器を加え、その発振器の出力により光強度変調器を駆動させることにより、任意の時分割周期で波長の異なる多重の超短パルス光を高速に広帯域に渡って変化させることができる時分割波長多重パルス光源を有する多波長計測システムを提供することを目的とする。   In the present invention, the above problems are eliminated, and an oscillator synchronized with the output of the short pulse light source is added to the short pulse light source, the light intensity modulator, and the optical fiber, and the light intensity modulator is driven by the output of the oscillator. Another object of the present invention is to provide a multi-wavelength measurement system having a time-division wavelength-multiplexed pulse light source capable of changing multiple ultrashort pulse lights having different wavelengths at an arbitrary time-division period over a wide band at high speed.

本発明は、上記目的を達成するために、
〔1〕時分割波長多重パルス光源を有する多波長計測システムにおいて、短パルス光源と、この短パルス光源の出力の繰り返し周波数に同期する発振器と、この発振器の出力によって駆動され、透過光の強度を時間に対し周期的に変化させる光強度変調器と、この光強度変調器から入射パルス光の強度に対し、ほぼ線形に波長のシフトしたソリトンパルスが生成される光ファイバとを具備し、時間に対し周期的に波長の変化するパルス光を出力する時分割波長多重パルス光源と、このパルス光源から出力される短パルス光を導入する被測定対象物と、この被測定対象物を評価する装置を具備することを特徴とする。
In order to achieve the above object, the present invention provides
[1] In a multi-wavelength measurement system having a time division wavelength multiplexed pulse light source, a short pulse light source, an oscillator synchronized with the repetition frequency of the output of the short pulse light source, driven by the output of the oscillator, and the intensity of transmitted light A light intensity modulator that periodically changes with respect to time, and an optical fiber that generates a soliton pulse having a wavelength shifted substantially linearly with respect to the intensity of the incident pulse light from the light intensity modulator. In contrast, a time-division wavelength multiplex pulse light source that outputs pulsed light whose wavelength changes periodically, an object to be measured that introduces short pulse light output from the pulsed light source, and an apparatus for evaluating the object to be measured It is characterized by comprising.

〔2〕上記〔1〕記載の時分割波長多重パルス光源を有する多波長計測システムにおいて、前記被測定対象物からの出力光を一つの受光器を用いて測定し、信号を時分割に測定することを特徴とする。   [2] In the multi-wavelength measurement system having the time-division wavelength multiplex pulse light source described in [1], the output light from the measurement object is measured using a single light receiver, and the signal is measured in a time-division manner. It is characterized by that.

〔3〕上記〔1〕記載の時分割波長多重パルス光源を有する多波長計測システムにおいて、前記被測定対象物からの出力光を波長によって分離し、それぞれの信号を測定することを特徴とする。   [3] The multi-wavelength measurement system having the time-division wavelength multiplex pulse light source according to [1], wherein output light from the measurement object is separated according to wavelength, and each signal is measured.

〔4〕時分割波長多重パルス光源を有する多波長計測システムにおいて、短パルス光源と、この短パルス光源の出力の繰り返し周波数に同期する発振器と、この発振器の出力によって駆動され、透過光の強度を時間に対し周期的に変化させる光強度変調器と、この光強度変調器から入射パルス光の強度に対し、ほぼ線形に波長のシフトしたソリトンパルスが生成される光ファイバとを備え、時間に対し周期的に波長の変化するパルス光を出力するとともに、可搬型に組み立てる時分割波長多重パルス光源と、このパルス光源から出力される短パルス光を導入する被測定対象物と、この被測定対象物を評価する装置を具備することを特徴とする。   [4] In a multi-wavelength measurement system having a time-division wavelength multiplex pulse light source, a short pulse light source, an oscillator synchronized with the repetition frequency of the output of the short pulse light source, and an output of the oscillator to drive the intensity of transmitted light. A light intensity modulator that periodically changes with respect to time, and an optical fiber that generates a soliton pulse having a wavelength shifted substantially linearly with respect to the intensity of the incident pulse light from the light intensity modulator. A time-division wavelength-multiplexed pulse light source that outputs pulse light whose wavelength changes periodically and is assembled in a portable manner, a measurement object that introduces short pulse light output from the pulse light source, and the measurement object It is characterized by comprising a device for evaluating the above.

〔5〕上記〔4〕記載の時分割波長多重パルス光源を有する多波長計測システムにおいて、前記被測定対象物からの出力光を一つの受光器を用いて測定し、信号を時分割に測定することを特徴とする。   [5] In the multi-wavelength measurement system having the time-division wavelength multiplex pulse light source as described in [4] above, the output light from the measurement object is measured using a single light receiver, and the signal is measured in a time-division manner. It is characterized by that.

〔6〕上記〔4〕記載の時分割波長多重パルス光源を有する多波長計測システムにおいて、前記被測定対象物からの出力光を波長によって分離し、それぞれの信号を測定することを特徴とする。   [6] The multi-wavelength measurement system having the time-division wavelength multiplex pulse light source according to [4], wherein output light from the measurement target is separated according to wavelength, and each signal is measured.

〔7〕上記〔1〕又は〔4〕記載の時分割波長多重パルス光源を有する多波長計測システムにおいて、前記短パルス光源がフェムト秒ファイバレーザであることを特徴とする。   [7] The multi-wavelength measurement system having the time-division wavelength multiplex pulse light source according to [1] or [4], wherein the short pulse light source is a femtosecond fiber laser.

〔8〕上記〔1〕又は〔4〕記載の時分割波長多重パルス光源を有する多波長計測システムにおいて、前記光ファイバが定偏波ファイバであることを特徴とする。   [8] In the multi-wavelength measurement system having the time-division wavelength-multiplexed pulse light source according to [1] or [4], the optical fiber is a constant polarization fiber.

〔9〕上記〔8〕記載の時分割波長多重パルス光源を有する多波長計測システムにおいて、入射光の偏光方向を定偏波ファイバの複屈折軸から傾け、同時に異なる2波長のパルスを生成することを特徴とする。   [9] In the multi-wavelength measurement system having the time-division wavelength multiplex pulse light source described in [8] above, the polarization direction of the incident light is tilted from the birefringence axis of the constant polarization fiber, and simultaneously two different wavelength pulses are generated. It is characterized by.

上記のように構成したので、
(A)単一のファイバから高速に波長の変化する超短パルス光を出力することができる。
(B)パルス光の波長を広帯域に、時間に対し周期的に可変することができる。
(C)コンパクトなシステムで、理想的なソリトンパルスを広帯域に渡って出力することができる。
Since it was configured as above,
(A) Ultrashort pulse light whose wavelength changes at high speed can be output from a single fiber.
(B) The wavelength of the pulsed light can be periodically varied over time in a wide band.
(C) An ideal soliton pulse can be output over a wide band with a compact system.

本発明によれば、以下のような効果を奏することができる。   According to the present invention, the following effects can be achieved.

(A)時分割波長多重パルス光発生装置(光源)では、光の波長が光の強度に依存して変化するため、光の強度を変調することによって、超短パルス光の波長を高速に広帯域に渡って変化させることができる。   (A) In the time division wavelength multiplexed pulsed light generator (light source), the wavelength of the light changes depending on the intensity of the light. Can vary.

また、生成されるパルス光は理想的なソリトンパルスになる。   Further, the generated pulse light becomes an ideal soliton pulse.

(B)本発明の時分割波長多重パルス光源を有する多波長計測システムによって、分光計測や波長に依存する各種光計測を高速に簡便な系で行うことが可能となる。   (B) The multi-wavelength measurement system having the time-division wavelength multiplex pulse light source of the present invention makes it possible to perform spectroscopic measurement and various optical measurements depending on the wavelength with a simple system at high speed.

本発明の時分割波長多重パルス光源を有する多波長計測システムは、短パルス光源と、この短パルス光源の出力の繰り返し周波数に同期する発振器と、この発振器の出力によって駆動され、透過光の強度を時間に対し周期的に変化させる光強度変調器と、この光強度変調器から入射パルス光の強度に対し、ほぼ線形に波長のシフトしたソリトンパルスが生成される光ファイバとを具備し、時間に対し周期的に波長の変化するパルス光を出力する時分割波長多重パルス光源と、このパルス光源から出力される短パルス光を導入する被測定対象物と、この被測定対象物を評価する装置を具備する。よって、分光計測や波長に依存する各種光計測を高速に簡便な系で行うことが可能となる。   The multi-wavelength measurement system having a time-division wavelength multiplex pulse light source of the present invention includes a short pulse light source, an oscillator synchronized with the repetition frequency of the output of the short pulse light source, and an output of the oscillator to drive the intensity of transmitted light. A light intensity modulator that periodically changes with respect to time, and an optical fiber that generates a soliton pulse having a wavelength shifted substantially linearly with respect to the intensity of the incident pulse light from the light intensity modulator. In contrast, a time-division wavelength multiplex pulse light source that outputs pulsed light whose wavelength changes periodically, an object to be measured that introduces short pulse light output from the pulsed light source, and an apparatus for evaluating the object to be measured It has. Therefore, it is possible to perform spectroscopic measurement and various optical measurements depending on the wavelength at high speed with a simple system.

以下、本発明の実施の形態について詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail.

図1は、本発明の第1実施例を示す時分割波長多重光源の構成図である。   FIG. 1 is a block diagram of a time division wavelength multiplexing light source showing a first embodiment of the present invention.

この図に示すように、fs(フェムト秒)ファイバレーザー1から出力される短パルス光を、光特性調整器である光強度変調器2に通す。また、fsファイバレーザー1から出力されるパルス光の繰り返し信号3を分周器4に通し、この分周器4からの信号で発振器5を駆動し、任意の繰り返し波形を生成する。この発振器5の出力で光強度変調器2を駆動し、透過光の強度を時間に対し周期的に変化させる。8は波長フィルタである。   As shown in this figure, the short pulse light output from the fs (femtosecond) fiber laser 1 is passed through a light intensity modulator 2 which is an optical characteristic adjuster. Further, the repetition signal 3 of the pulsed light output from the fs fiber laser 1 is passed through the frequency divider 4, and the oscillator 5 is driven by the signal from the frequency divider 4, thereby generating an arbitrary repetitive waveform. The light intensity modulator 2 is driven by the output of the oscillator 5 to periodically change the intensity of transmitted light with respect to time. Reference numeral 8 denotes a wavelength filter.

一方、光ファイバ7においては、パルス光の強度に対し、ほぼ線形に波長のシフトしたソリトンパルスが生成される。   On the other hand, in the optical fiber 7, a soliton pulse having a wavelength shifted substantially linearly with respect to the intensity of the pulsed light is generated.

図2はその光ファイバの出力を表しており、横軸は時間を、縦軸は光波長及び光強度を表している。   FIG. 2 represents the output of the optical fiber, the horizontal axis represents time, and the vertical axis represents light wavelength and light intensity.

この図から明らかなように、周期的に波長が変化した綺麗なソリトンパルス(波長1〜波長4)が等間隔に繰り返し出力されている。   As is clear from this figure, beautiful soliton pulses (wavelength 1 to wavelength 4) whose wavelength is periodically changed are repeatedly output at equal intervals.

従って、光ファイバ7の出力において、周期的に波長の変化するソリトンを得ることができる。その際、光ファイバ7の出力には、ソリトンパルスに変換されなかった励起パルスも出力されるが、波長フィルタ8を用いてそれらの成分を取り除き、ソリトンパルスのみを生成することができる。   Therefore, a soliton whose wavelength changes periodically can be obtained at the output of the optical fiber 7. At this time, although the excitation pulse that has not been converted into the soliton pulse is also output to the output of the optical fiber 7, these components can be removed using the wavelength filter 8 to generate only the soliton pulse.

次に、図3は本発明の実施例を示す発振器出力の時間変化とそれに伴うソリトンパルスの波長の時間変化を示す図であり、図3(a)は発振器出力が鋸歯状波としたとき、図3(b)は階段状に変化する信号としたときを示している。   Next, FIG. 3 is a diagram showing the time change of the oscillator output and the time change of the wavelength of the soliton pulse according to the embodiment of the present invention, and FIG. 3 (a) shows when the oscillator output is a sawtooth wave. FIG. 3B shows the case where the signal changes stepwise.

発振器5の出力によって、光強度変調器2を駆動するため、ソリトンパルスの波長も発振器5の出力に応じて変化する。そのため、発振器5から鋸歯状波を出力すれば、図3(a)に示すように、鋸歯状波に波長が変化するソリトンパルスを、また、階段状に変化する信号を利用すれば、図3(b)に示すように、階段状に波長が変化するソリトンパルスを出力することができる。   Since the light intensity modulator 2 is driven by the output of the oscillator 5, the wavelength of the soliton pulse also changes according to the output of the oscillator 5. Therefore, if a sawtooth wave is output from the oscillator 5, as shown in FIG. 3A, if a soliton pulse whose wavelength changes to a sawtooth wave or a signal which changes stepwise is used, FIG. As shown in (b), a soliton pulse whose wavelength changes stepwise can be output.

この第1実施例では、短パルス光源(fsファイバレーザー)1と、この短パルス光源1の出力の繰り返し周波数に同期する発振器5と、この発振器5の出力によって駆動され、この短パルス光源1からの出力を変調する光強度変調器2と、この光強度変調器2から入射パルスが入射されるとともに、出力パルスの波長を変化させる光ファイバ7とを具備し、時間に対し周期的に波長の変化するパルス光を出力する。   In the first embodiment, a short pulse light source (fs fiber laser) 1, an oscillator 5 synchronized with the repetition frequency of the output of the short pulse light source 1, and an output of the oscillator 5 are driven. A light intensity modulator 2 that modulates the output of the light, and an optical fiber 7 that receives the incident pulse from the light intensity modulator 2 and changes the wavelength of the output pulse. Outputs changing pulse light.

なお、例えば、上記光ファイバ7としては、定偏波光ファイバを用いる。   For example, a constant polarization optical fiber is used as the optical fiber 7.

この場合、入射光の偏光方向をこの定偏波光ファイバの複屈折軸から傾け、同時に異なる2波長のパルスを生成するようにする。   In this case, the polarization direction of the incident light is tilted from the birefringence axis of the constant polarization optical fiber, and pulses of two different wavelengths are generated simultaneously.

更に、短パルス光源(fsファイバレーザー)1と、この短パルス光源1の出力の繰り返し周波数に同期する発振器5と、この発振器5の出力によって駆動され、この短パルス光源1からの出力を変調する光強度変調器2と、この光強度変調器2から入射パルスが入射されるとともに、出力パルスの波長を変化させる光ファイバ7とを備え、時間に対し周期的に波長の変化するパルス光を出力するとともに、可搬型に組み立てるようにした。   Furthermore, the short pulse light source (fs fiber laser) 1, an oscillator 5 synchronized with the repetition frequency of the output of the short pulse light source 1, and the output from the short pulse light source 1 are driven by the output of the oscillator 5. A light intensity modulator 2 and an optical fiber 7 that receives an incident pulse from the light intensity modulator 2 and changes the wavelength of the output pulse, and outputs pulsed light whose wavelength periodically changes with time. In addition, it was assembled into a portable type.

更に、前記光ファイバは定偏波光ファイバである。   Further, the optical fiber is a constant polarization optical fiber.

また、入射光の偏光方向を定偏波ファイバの複屈折軸から傾け、同時に異なる2波長のパルスを生成する。   Further, the polarization direction of incident light is tilted from the birefringence axis of the constant polarization fiber, and pulses of two different wavelengths are generated simultaneously.

図4は本発明の実施例を示す時分割波長多重パルス光源の出力を光スペクトル観測器を用いて測定した光スペクトルを示す図である。横軸は波長、縦軸はスペクトルの強度を表している。   FIG. 4 is a diagram showing an optical spectrum obtained by measuring the output of the time division wavelength multiplex pulse light source according to the embodiment of the present invention using an optical spectrum observer. The horizontal axis represents wavelength and the vertical axis represents spectrum intensity.

出力には波長が周期的に高速に変化するパルス光が出力されるため、スペクトル観測器では同時に多波長のスペクトルが観測される。スペクトル波長は綺麗なsech2型になっている。図では、光ファイバ長が220mの時に、1.56μm、1.625μm、1.675μm、1.725μmの4波長において、時分割波長多重パルス光が生成されている。これまで最大1.56〜2.03μmまでの波長シフトが観測されている。   Since pulsed light whose wavelength periodically changes at high speed is output, the spectrum observer simultaneously observes multiple wavelength spectra. The spectrum wavelength is a beautiful sech2 type. In the figure, when the optical fiber length is 220 m, time-division wavelength multiplexed pulse light is generated at four wavelengths of 1.56 μm, 1.625 μm, 1.675 μm, and 1.725 μm. So far, wavelength shifts of up to 1.56-2.03 μm have been observed.

図5は本発明の実施例を示すソリトンパルスの自己相関波形を示す図である。
この図において、生成されるソリトンパルスの時間波形は、台座のない、理想的なsech2型になっている。時間波形は安定に観測される。光ファイバ長が220mの時に、自己相関波形の時間幅は430fsであった。このとき、時間波形の幅は280fsと見積もられる。
FIG. 5 is a diagram showing an autocorrelation waveform of a soliton pulse showing an embodiment of the present invention.
In this figure, the time waveform of the generated soliton pulse is an ideal sech2 type without a pedestal. The time waveform is observed stably. When the optical fiber length was 220 m, the time width of the autocorrelation waveform was 430 fs. At this time, the width of the time waveform is estimated to be 280 fs.

図6は本発明の第2実施例を示す2波長時分割多重多波長パルス光生成システムの構成図である。   FIG. 6 is a block diagram of a two-wavelength time division multiplexed multi-wavelength pulsed light generation system showing a second embodiment of the present invention.

この実施例において、光ファイバとして定偏波光ファイバ11を用いる。定偏波光ファイバ11の複屈折軸に対して、偏光方向を傾けてパルス光を入射すると、二つの偏光成分がそれぞれ同時にソリトンパルスを生成するため、出力において2波長のソリトンパルスを得ることができる。この手法と前述の光強度変調器を発振器を用いて変調する手法を組み合わせることによって、時分割波長多重パルス光の波長を更に2倍に増加することができる。なお、ここで、12は波長フィルタ、13は偏波光分岐器である。この偏波光分岐器13において、二つの偏向成分を分離することができる。   In this embodiment, a constant polarization optical fiber 11 is used as an optical fiber. When pulsed light is incident with the polarization direction tilted with respect to the birefringence axis of the polarization optical fiber 11, two polarization components simultaneously generate soliton pulses, so that a two-wavelength soliton pulse can be obtained at the output. . By combining this method with the above-described method of modulating the light intensity modulator using an oscillator, the wavelength of the time-division wavelength multiplexed pulse light can be further doubled. Here, 12 is a wavelength filter, and 13 is a polarization beam splitter. In this polarization beam splitter 13, the two deflection components can be separated.

次に、上記した時分割波長多重パルス光源を有する多波長計測システムについて説明する。   Next, a multi-wavelength measurement system having the above-described time division wavelength multiplex pulse light source will be described.

図7は本発明の実施例を示す時分割波長多重パルス光源を有する時分割多波長計測システムを示す図(その1)である。   FIG. 7 is a diagram (part 1) illustrating a time division multi-wavelength measurement system having a time division wavelength multiplexed pulse light source according to an embodiment of the present invention.

この図に示すように、図1に示した時分割波長多重パルス光源Aを用いて、被測定対象物21の多波長における透過率や反射率の変化を、単一の受光器(フォトダイオード)22を用いて時分割信号処理部23とパーソナルコンピュータ24により時分割で測定する。フォトダイオード22で受光した信号は増幅後、時分割信号処理部23で時間的に分割・処理し、各波長について測定する。   As shown in this figure, using the time-division wavelength multiplex pulse light source A shown in FIG. 1, the change in transmittance and reflectance of the object to be measured 21 at multiple wavelengths is changed to a single light receiver (photodiode). The time division signal processing unit 23 and the personal computer 24 are used for time division measurement. The signal received by the photodiode 22 is amplified and then temporally divided and processed by the time division signal processing unit 23 and measured for each wavelength.

図8は本発明の実施例を示す時分割多波長計測システムの信号処理システムを示す図である。   FIG. 8 is a diagram showing a signal processing system of a time division multi-wavelength measurement system showing an embodiment of the present invention.

この図において、31はフォトダイオード、32は増幅器、33〜36はサンプル&ホールド回路1〜4、37は制御信号生成器、38はパーソナルコンピュータである。   In this figure, 31 is a photodiode, 32 is an amplifier, 33 to 36 are sample and hold circuits 1 to 4, 37 is a control signal generator, and 38 is a personal computer.

図8に示すように、時分割波長多重パルス光をフォトダイオード31で受信し、増幅器32を用いて増幅する。また、発振器出力信号を用いてサンプル&ホールド回路33〜36を制御するための信号を制御信号生成器37において生成し、波長1のパルス光を受光した時にはサンプル&ホールド回路33(回路1)で信号を保持し、また、波長2のパルス光を受光した時にはサンプル&ホールド回路34(回路2)で信号を保持する。このように、それぞれの波長の信号をサンプル&ホールド回路33〜36で保持した後、パーソナルコンピュータ38に取り込み、各波長の信号をそれぞれ同時に計測する。   As shown in FIG. 8, time division wavelength multiplexed pulse light is received by a photodiode 31 and amplified using an amplifier 32. Further, a signal for controlling the sample and hold circuits 33 to 36 is generated by the control signal generator 37 using the oscillator output signal, and when the pulsed light of wavelength 1 is received, the sample and hold circuit 33 (circuit 1). The signal is held, and when the pulsed light of wavelength 2 is received, the signal is held by the sample & hold circuit 34 (circuit 2). In this way, after the signals of the respective wavelengths are held by the sample and hold circuits 33 to 36, they are taken into the personal computer 38 and the signals of the respective wavelengths are simultaneously measured.

図9は本発明の実施例を示す時分割波長多重パルス光を用いた気体中における原子・分子に対する時分割多波長分光計測の測定結果を示す図である。横軸は時間、縦軸は透過光強度を示している。透過光強度の変化は、各原子・分子密度の変化に対応している。   FIG. 9 is a diagram showing measurement results of time-division multi-wavelength spectroscopic measurement for atoms / molecules in gas using time-division wavelength multiplex pulse light according to an embodiment of the present invention. The horizontal axis represents time, and the vertical axis represents transmitted light intensity. The change in transmitted light intensity corresponds to the change in the density of each atom and molecule.

この図から明らかなように、時間の変化に対する媒質の透過光強度の変化を多波長において同時に測定することができる。このような多波長における分光計測は、これまで単一の光学系で行うことができなかった。   As is apparent from this figure, the change in the transmitted light intensity of the medium with respect to the change in time can be simultaneously measured at multiple wavelengths. Such spectral measurement at multiple wavelengths has not been possible with a single optical system.

図10は本発明の実施例を示す時分割波長多重パルス光源を有する多波長分光計測システムを示す図(その2)である。なお、この実施例において、上記実施例と同じ部分には、同じ符号を付してそれらの説明は省略する。   FIG. 10 is a diagram (part 2) illustrating a multi-wavelength spectroscopic measurement system having a time-division wavelength multiplex pulse light source according to an embodiment of the present invention. In this embodiment, the same parts as those in the above embodiment are denoted by the same reference numerals, and description thereof is omitted.

図10において、時分割波長多重パルス光源Aからの出力を被測定対象物21に入射し、回折格子41や波長フィルタで各波長成分ごとに分離し、受光し、増幅器42で増幅後、信号処理部43を介してパーソナルコンピュータ44に取り込む。   In FIG. 10, the output from the time-division wavelength multiplex pulse light source A is incident on the object 21 to be measured, separated for each wavelength component by the diffraction grating 41 or the wavelength filter, received, amplified by the amplifier 42, and signal processing. The data is taken into the personal computer 44 via the unit 43.

上記のように、本発明によれば、
(1)単一のシステムで多波長の超短パルス光を用いた計測を時分割で同時に行うことができる。
(2)コンパクトなシステムで、超短パルス光を用いた多波長計測を広帯域に行うことができる。
(3)理想的なソリトンパルスを生成することができる。
As mentioned above, according to the present invention,
(1) It is possible to simultaneously perform measurement using multi-wavelength ultrashort pulse light in a single system in a time division manner.
(2) With a compact system, multi-wavelength measurement using ultra-short pulse light can be performed over a wide band.
(3) An ideal soliton pulse can be generated.

なお、本発明は上記実施例に限定されるものではなく、本発明の趣旨に基づいて種々の変形が可能であり、これらを本発明の範囲から排除するものではない。   In addition, this invention is not limited to the said Example, A various deformation | transformation is possible based on the meaning of this invention, and these are not excluded from the scope of the present invention.

本発明の時分割波長多重パルス光源を有する多波長計測システムは、分光計測や波長に依存する各種光計測に好適である。   The multi-wavelength measurement system having the time-division wavelength multiplex pulse light source of the present invention is suitable for spectroscopic measurement and various optical measurements depending on the wavelength.

本発明の第1実施例を示す時分割波長多重光源の構成図である。It is a block diagram of the time division wavelength multiplexing light source which shows 1st Example of this invention. 本発明の実施例を示す時分割波長多重光源のソリトンパルスを示す図である。It is a figure which shows the soliton pulse of the time division wavelength multiplexing light source which shows the Example of this invention. 本発明の実施例を示す発振器出力の時間変化とそれに伴うソリトンパルスの波長の時間変化を示す図である。It is a figure which shows the time change of the wavelength of the soliton pulse accompanying the time change of the oscillator output which shows the Example of this invention. 本発明の実施例を示す時分割波長多重パルス光源の出力を、光スペクトル観測器を用いて測定した光スペクトルを示す図である。It is a figure which shows the optical spectrum which measured the output of the time division wavelength multiplexing pulse light source which shows the Example of this invention using the optical spectrum observer. 本発明の実施例を示すソリトンパルスの自己相関波形を示す図である。It is a figure which shows the autocorrelation waveform of the soliton pulse which shows the Example of this invention. 本発明の第2実施例を示す2波長時分割多重多波長パルス光生成システムの構成図である。It is a block diagram of the 2 wavelength time division multiplexing multiwavelength pulsed light generation system which shows 2nd Example of this invention. 本発明の実施例を示す時分割波長多重パルス光源を有する時分割多波長計測システムを示す図(その1)である。It is FIG. (1) which shows the time division multiwavelength measuring system which has a time division wavelength multiplexing pulse light source which shows the Example of this invention. 本発明の実施例を示す時分割多波長計測システムの信号処理システムを示す図である。It is a figure which shows the signal processing system of the time division multiwavelength measuring system which shows the Example of this invention. 本発明の実施例を示す時分割波長多重パルス光を用いた気体中における原子・分子に対する時分割多波長分光計測の測定結果を示す図である。It is a figure which shows the measurement result of the time division multiwavelength spectroscopy measurement with respect to the atom and molecule | numerator in the gas using the time division wavelength multiplexed pulse light which shows the Example of this invention. 本発明の実施例を示す時分割波長多重パルス光源を有する多波長分光計測システムを示す図(その2)である。It is FIG. (2) which shows the multiwavelength spectroscopy measuring system which has a time division wavelength multiplexing pulse light source which shows the Example of this invention.

符号の説明Explanation of symbols

1 短パルス光源〔fs(フェムト秒)ファイバレーザー〕
2 光強度変調器(光特性調整器)
3 パルス光の繰り返し信号
4 分周器
5 発振器
7 光ファイバ
8,12 波長フィルタ
11 定偏波光ファイバ
13 偏波光分岐器
21 被測定対象物
22 単一の受光器(フォトダイオード)
23 時分割信号処理部
24,38,44 パーソナルコンピュータ
31 フォトダイオード
32,42 増幅器
33〜36 サンプル&ホールド回路
37 制御信号生成器
41 回折格子
43 信号処理部
1 Short pulse light source [fs (femtosecond) fiber laser]
2 Light intensity modulator (light characteristic adjuster)
3 Repetitive signal of pulsed light 4 Divider 5 Oscillator 7 Optical fiber 8, 12 Wavelength filter 11 Constant polarization optical fiber 13 Polarized light splitter 21 Object to be measured 22 Single receiver (photodiode)
23 Time Division Signal Processing Unit 24, 38, 44 Personal Computer 31 Photodiode 32, 42 Amplifier 33-36 Sample & Hold Circuit 37 Control Signal Generator 41 Diffraction Grating 43 Signal Processing Unit

Claims (9)

(a)短パルス光源と、該短パルス光源の出力の繰り返し周波数に同期する発振器と、該発振器の出力によって駆動され、透過光の強度を時間に対し周期的に変化させる光強度変調器と、該光強度変調器から入射パルス光の強度に対し、ほぼ線形に波長のシフトしたソリトンパルスが生成される光ファイバとを具備し、時間に対し周期的に波長の変化するパルス光を出力する時分割波長多重パルス光源と、
(b)該パルス光源から出力される短パルス光を導入する被測定対象物と、
(c)該被測定対象物を評価する装置を具備することを特徴とする時分割波長多重パルス光源を有する多波長計測システム。
(A) a short pulse light source, an oscillator synchronized with the repetition frequency of the output of the short pulse light source, a light intensity modulator driven by the output of the oscillator and periodically changing the intensity of transmitted light with respect to time, An optical fiber that generates a soliton pulse whose wavelength is substantially linearly shifted with respect to the intensity of incident pulsed light from the light intensity modulator, and outputs pulsed light whose wavelength changes periodically with respect to time A split wavelength multiplexed pulse light source;
(B) an object to be measured for introducing short pulse light output from the pulse light source;
(C) A multi-wavelength measurement system having a time-division wavelength-multiplexed pulse light source, characterized by comprising a device for evaluating the measurement object.
請求項1記載の時分割波長多重パルス光源を有する多波長計測システムにおいて、前記被測定対象物からの出力光を一つの受光器を用いて測定し、信号を時分割に測定することを特徴とする時分割波長多重パルス光源を有する多波長計測システム。   The multi-wavelength measurement system having a time-division wavelength multiplex pulse light source according to claim 1, wherein the output light from the object to be measured is measured using a single light receiver, and the signal is measured in a time-division manner. A multi-wavelength measurement system having a time-division wavelength multiplex pulse light source. 請求項1記載の時分割波長多重パルス光源を有する多波長計測システムにおいて、前記被測定対象物からの出力光を波長によって分離し、それぞれの信号を測定することを特徴とする時分割波長多重パルス光源を有する多波長計測システム。   2. A multi-wavelength measurement system having a time-division wavelength multiplex pulse light source according to claim 1, wherein output light from the object to be measured is separated according to wavelength and each signal is measured. Multi-wavelength measurement system with light source. (a)短パルス光源と、該短パルス光源の出力の繰り返し周波数に同期する発振器と、該発振器の出力によって駆動され、透過光の強度を時間に対し周期的に変化させる光強度変調器と、該光強度変調器から入射パルス光の強度に対し、ほぼ線形に波長のシフトしたソリトンパルスが生成される光ファイバとを備え、時間に対し周期的に波長の変化するパルス光を出力するとともに、可搬型に組み立てる時分割波長多重パルス光源と、
(b)該パルス光源から出力される短パルス光を導入する被測定対象物と、
(c)該被測定対象物を評価する装置を具備することを特徴とする時分割波長多重パルス光源を有する多波長計測システム。
(A) a short pulse light source, an oscillator synchronized with the repetition frequency of the output of the short pulse light source, a light intensity modulator driven by the output of the oscillator and periodically changing the intensity of transmitted light with respect to time, The optical intensity modulator comprises an optical fiber that generates a soliton pulse whose wavelength is substantially linearly shifted with respect to the intensity of incident pulsed light, and outputs pulsed light whose wavelength changes periodically with respect to time. A time-division wavelength multiplex pulse light source that is assembled into a portable type,
(B) an object to be measured for introducing short pulse light output from the pulse light source;
(C) A multi-wavelength measurement system having a time-division wavelength-multiplexed pulse light source, characterized by comprising a device for evaluating the measurement object.
請求項4記載の時分割波長多重パルス光源を有する多波長計測システムにおいて、前記被測定対象物からの出力光を一つの受光器を用いて測定し、信号を時分割に測定することを特徴とする時分割波長多重パルス光源を有する多波長計測システム。   The multi-wavelength measurement system having a time-division wavelength multiplex pulse light source according to claim 4, wherein the output light from the object to be measured is measured using a single light receiver, and the signal is measured in a time-division manner. A multi-wavelength measurement system having a time-division wavelength multiplex pulse light source. 請求項4記載の時分割波長多重パルス光源を有する多波長計測システムにおいて、前記被測定対象物からの出力光を波長によって分離し、それぞれの信号を測定することを特徴とする時分割波長多重パルス光源を有する多波長計測システム。   5. A multi-wavelength measurement system having a time-division wavelength multiplex pulse light source according to claim 4, wherein output light from the object to be measured is separated according to wavelength and each signal is measured. Multi-wavelength measurement system with light source. 請求項1又は4記載の時分割波長多重パルス光源を有する多波長計測システムにおいて、前記短パルス光源がフェムト秒ファイバレーザであることを特徴とする時分割波長多重パルス光源を有する多波長計測システム。   5. The multi-wavelength measurement system having a time-division wavelength multiplex pulse light source according to claim 1, wherein the short pulse light source is a femtosecond fiber laser. 請求項1又は4記載の時分割波長多重パルス光源を有する多波長計測システムにおいて、前記光ファイバが定偏波ファイバであることを特徴とする時分割波長多重パルス光源を有する多波長計測システム。   5. A multi-wavelength measurement system having a time-division wavelength-multiplexed pulse light source according to claim 1, wherein the optical fiber is a polarization maintaining fiber. 請求項8記載の時分割波長多重パルス光源を有する多波長計測システムにおいて、入射光の偏光方向を定偏波ファイバの複屈折軸から傾け、同時に異なる2波長のパルスを生成することを特徴とする時分割波長多重パルス光源を有する多波長計測システム。   9. A multi-wavelength measurement system having a time-division wavelength multiplex pulse light source according to claim 8, wherein the polarization direction of incident light is tilted from the birefringence axis of the constant polarization fiber, and pulses of two different wavelengths are generated simultaneously. A multi-wavelength measurement system having a time-division wavelength multiplex pulse light source.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010171131A (en) * 2009-01-21 2010-08-05 Omron Corp Laser beam source device and laser machining device
JP2010200916A (en) * 2009-03-02 2010-09-16 Nidek Co Ltd Ophthalmologic imaging apparatus
WO2023191801A1 (en) * 2022-03-31 2023-10-05 Onto Innovation Inc. System and method for performing characterization of a sample using multi-wavelength laser acoustics

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010171131A (en) * 2009-01-21 2010-08-05 Omron Corp Laser beam source device and laser machining device
JP2010200916A (en) * 2009-03-02 2010-09-16 Nidek Co Ltd Ophthalmologic imaging apparatus
US8246169B2 (en) 2009-03-02 2012-08-21 Nidek Co., Ltd. Ophthalmic imaging apparatus
WO2023191801A1 (en) * 2022-03-31 2023-10-05 Onto Innovation Inc. System and method for performing characterization of a sample using multi-wavelength laser acoustics

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