JP2005043230A - Elongated member defect detection method and apparatus - Google Patents
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Abstract
【課題】 一定の断面形状を有する細長部材（チューブ、パイプ、棒材）の外形欠陥（ふくれ、突起、波打ち、破れ、等）及び表面欠陥（亀裂、破れ、シース不良、傷、ピンホール、等）を単一の装置で検出することができ、かつ細長部材が不透明であっても内部欠陥（異物混入、等）を同一の装置で検出することができる細長部材の欠陥検出方法及び装置を提供する。
【解決手段】 断面形状が一定の細長部材１の外形欠陥、表面欠陥及び内部欠陥を検出する細長部材の欠陥検出方法。細長部材１を透過しかつ一部吸収される波長の電磁波２を照射し、細長部材を透過した前記電磁波３の透過強度の変化から細長部材の欠陥を検出する。
【選択図】 図１
PROBLEM TO BE SOLVED: To provide external defects (bulges, protrusions, waviness, tears, etc.) and surface defects (cracks, tears, defective sheaths, scratches, pinholes, etc.) of an elongated member (tube, pipe, bar) having a constant cross-sectional shape. ) Can be detected by a single device, and even if the elongated member is opaque, an internal defect (contamination of foreign matter, etc.) can be detected by the same device. To do.
An elongated member defect detection method for detecting an external defect, a surface defect, and an internal defect of an elongated member 1 having a constant cross-sectional shape. An electromagnetic wave 2 having a wavelength that passes through the elongated member 1 and is partially absorbed is irradiated, and a defect in the elongated member is detected from a change in transmission intensity of the electromagnetic wave 3 that has passed through the elongated member.
[Selection] Figure 1
Description
本発明は、押出し成形等で製造された細長部材の欠陥検出方法及び装置に関する。 The present invention relates to a defect detection method and apparatus for an elongated member manufactured by extrusion molding or the like.
ビニール、プラスチック、ゴム、ガラス等からなる断面形状が一定の細長い中空管や棒材（以下、細長部材と呼ぶ）は、通常、押出し成形等で連続的に高速で製造される。しかし、製造された細長部材は、ふくれ、突起、波打ち、異物混入、亀裂、破れ、シース不良、傷、ピンホール、等の欠陥をもっている場合がある。 An elongated hollow tube or bar (hereinafter, referred to as an elongated member) having a constant cross-sectional shape made of vinyl, plastic, rubber, glass or the like is usually manufactured continuously at a high speed by extrusion molding or the like. However, the manufactured elongated member may have defects such as blisters, protrusions, undulations, foreign matter contamination, cracks, tears, defective sheaths, scratches, and pinholes.
これらの欠陥を検出するために、従来は、非特許文献１、２に例示される外径凹凸検出器と表面欠陥検出器が用いられていた。
In order to detect these defects, conventionally, an outer diameter unevenness detector and a surface defect detector exemplified in Non-Patent
外径凹凸検出器は、チューブの形状的な欠陥（ふくれ、突起、波打ち、破れ、等）を検出するものであり、図６に示すようにチューブに一定光量の可視光を照射し、チューブの凹凸で変化する通過光量の変化から異常を検出するものである。
また、表面欠陥検出器は、チューブの表面の欠陥（亀裂、破れ、シース不良、傷、ピンホール、等）を検出するものであり、図７に示すようにチューブ表面に可視光を照射し、その乱反射光を受光しその光量変化から表面の異常を検出するものである。
The outer diameter unevenness detector detects a shape defect (bulge, protrusion, wave, tear, etc.) of the tube. As shown in FIG. 6, the tube is irradiated with a certain amount of visible light, An abnormality is detected from a change in the amount of light passing through that changes in unevenness.
The surface defect detector is for detecting defects on the surface of the tube (cracks, tears, defective sheaths, scratches, pinholes, etc.), and irradiates the tube surface with visible light as shown in FIG. The irregularly reflected light is received and a surface abnormality is detected from the change in the amount of light.
なお、［非特許文献１］［非特許文献２］はその他の関連文献である。 [Non-patent document 1] and [Non-patent document 2] are other related documents.
上述した外径凹凸検出器と表面欠陥検出器には、以下の問題点があった。
（１）外径凹凸検出器において、チューブの外形異常を検出するためには、ふくれ、突起等の欠陥が周方向のどの位置に発生しているかが不明なため、周方向の複数の向きから光を照射・受光する必要があり、複数の検出器が必要となり、装置が大型化する。
（２）亀裂、シース不良、傷、ピンホール、等の表面欠陥は、外径凹凸検出器では検出できないため、表面欠陥検出器を併用する必要があり、更に装置が大型化する。
（３）図８に示すように、異物混入のような内部欠陥は、対象チューブが不透明の場合、外径凹凸検出器と表面欠陥検出器のどちらでも検出できない。
The above-described outer diameter unevenness detector and surface defect detector have the following problems.
(1) In the outer diameter unevenness detector, in order to detect an abnormality in the outer shape of the tube, it is unclear at which position in the circumferential direction the defects such as blisters and protrusions have occurred. It is necessary to irradiate and receive light, and a plurality of detectors are required, which increases the size of the apparatus.
(2) Since surface defects such as cracks, sheath defects, scratches, pinholes, etc. cannot be detected by the outer diameter unevenness detector, it is necessary to use the surface defect detector in combination, and the apparatus becomes larger.
(3) As shown in FIG. 8, internal defects such as foreign matter contamination cannot be detected by either the outer diameter unevenness detector or the surface defect detector when the target tube is opaque.
本発明は、かかる問題点を解決するために創案されたものである。すなわち、本発明の目的は、一定の断面形状を有する細長部材の外形欠陥（ふくれ、突起、波打ち、破れ、等）及び表面欠陥（亀裂、破れ、シース不良、傷、ピンホール、等）を単一の装置で検出することができ、かつ細長部材が不透明であっても内部欠陥（異物混入、等）を同一の装置で検出することができる細長部材の欠陥検出方法及び装置を提供することにある。 The present invention has been developed to solve such problems. That is, the object of the present invention is to simply remove external defects (blurring, protrusions, undulations, tears, etc.) and surface defects (cracks, tears, sheath defects, scratches, pinholes, etc.) of elongated members having a constant cross-sectional shape. To provide a defect detection method and apparatus for an elongated member that can be detected by one apparatus and that can detect internal defects (contamination of foreign matter, etc.) with the same apparatus even if the elongated member is opaque. is there.
本発明によれば、断面形状が一定の細長部材の外形欠陥、表面欠陥及び内部欠陥を検出する細長部材の欠陥検出方法であって、
細長部材を透過しかつ一部吸収される波長の電磁波を照射し、細長部材を透過した前記電磁波の透過強度の変化から細長部材の欠陥を検出する、ことを特徴とする細長部材の欠陥検出方法が提供される。
According to the present invention, there is provided a defect detection method for an elongated member for detecting external defects, surface defects and internal defects of an elongated member having a constant cross-sectional shape,
A method for detecting a defect in an elongated member, comprising: irradiating an electromagnetic wave having a wavelength that is transmitted through the elongated member and partially absorbed; and detecting a defect in the elongated member from a change in transmission intensity of the electromagnetic wave transmitted through the elongated member. Is provided.
また本発明によれば、断面形状が一定の細長部材を透過しかつ一部吸収される波長の電磁波を発振する発振源と、前記電磁波を細長部材の全断面を透過するように集束する集束素子と、該集束素子の集束面に設置され細長部材を透過した前記電磁波の透過強度を検出する透過強度検出器と、該透過強度の変化から細長部材の欠陥を判別する欠陥判別器とを備えた、ことを特徴とする細長部材の欠陥検出装置が提供される。 Further, according to the present invention, an oscillation source that oscillates an electromagnetic wave having a wavelength that passes through an elongated member having a constant cross-sectional shape and is partially absorbed, and a focusing element that focuses the electromagnetic wave so as to pass through the entire cross section of the elongated member. And a transmission intensity detector that is installed on the focusing surface of the focusing element and detects the transmission intensity of the electromagnetic wave that has passed through the elongated member, and a defect discriminator that determines a defect in the elongated member from the change in the transmission intensity. An elongated member defect detecting device is provided.
本発明の好ましい実施形態によれば、前記電磁波は、テラヘルツ波またはミリ波である。また、前記発振源は、テラヘルツ波を発振するテラヘルツ波源、またはミリ波を発振するミリ波源である。 According to a preferred embodiment of the present invention, the electromagnetic wave is a terahertz wave or a millimeter wave. The oscillation source is a terahertz wave source that oscillates terahertz waves or a millimeter wave source that oscillates millimeter waves.
上記本発明の方法及び装置によれば、以下の効果が得られる。
（１） 物質透過性を有し、欠陥のサイズと同程度の波長であるテラヘルツ波またはミリ波（１０ＧＨｚ〜１０ＴＨｚ：波長約３０μｍ〜３０ｍｍ）を使用するため、従来使用していた可視光では不可能であった不透明な細長部材（チューブ、パイプ、棒材）においても、欠陥などの異常が検出可能である。
（２） 従来技術では円周上の多方向から測定を行い外形異常を検出していたが、透過波で検出を行うので１方向のみの測定でよい。
（３） 従来技術では外形異常検出器および表面欠陥検出器の２台が必要であったが、本発明では、透過波で検出を行うため１台でよい。
According to the method and apparatus of the present invention, the following effects can be obtained.
(1) Since terahertz waves or millimeter waves (10 GHz to 10 THz: wavelength of about 30 μm to 30 mm) having a material permeability and a wavelength comparable to the size of the defect are used, it is not possible with conventional visible light. Abnormalities such as defects can be detected even in opaque elongated members (tubes, pipes, rods) that were possible.
(2) In the prior art, measurement was performed from multiple directions on the circumference to detect an external abnormality. However, since detection is performed using a transmitted wave, measurement in only one direction is sufficient.
(3) In the prior art, two external anomaly detectors and surface defect detectors are required. However, in the present invention, one detector is sufficient because detection is performed with transmitted waves.
以下、本発明の好ましい実施形態を図面を参照して説明する。なお各図において、共通する部分には同一の符号を付し、重複した説明は省略する。 Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. In each figure, common portions are denoted by the same reference numerals, and redundant description is omitted.
図１は、本発明の細長部材の欠陥検出装置の全体構成図である。この図に示すように、本発明の細長部材の欠陥検出装置１０は、発振源１２、集束素子１４、透過強度検出器１６および欠陥判別器１８を備える。
FIG. 1 is an overall configuration diagram of an elongated member defect detection apparatus according to the present invention. As shown in the figure, the elongated member
本発明において、細長部材１は、ビニール、プラスチック、ゴム、ガラス等からなる断面形状が一定の細長いチューブ、中空管、棒材等である。この細長部材１は、全体が均質である限り、透明であっても、可視光に対して不透明であってもよい。また、押出し成形等で連続的に高速で製造され、細長部材の長さ方向に移動するのが好ましいが、これに限定されず、任意の長さに切断し、位置が固定された細長部材であってもよい。
In the present invention, the
発振源１２は、断面形状が一定の細長部材１を透過可能であり、かつ一部が吸収される波長の電磁波２を発振する。この発振源は、１〜１０ＴＨｚ（波長約３０〜３００μｍ）のテラヘルツ波を発振するテラヘルツ波源、または１０〜１０００ＧＨｚ（波長約０．３〜３０ｍｍ）のミリ波を発振するミリ波源であるのがよい。
テラヘルツ波源は、例えば、特許文献１、２に開示されている。またミリ波源は、市販品をそのまま適用することができる。
テラヘルツ波の特徴の１つは、電波の物質透過性を有する最短波長域であり、かつ光波の直進性を備えた最長波長であるという点である。すなわち、電波のように様々な物質を透過することができ、電波帯では最も高い空間分解能が得られ、かつ光波のようにレンズやミラーによる引き回しが可能である。そのため、テラヘルツ波は、半導体、プラスチック、紙、ゴム、ビニル、木材、繊維、セラミック、コンクリート、歯、骨、脂肪、乾燥食品などを透過可能である。
なお、テラヘルツ波またはミリ波は、対象とする細長部材１の材質と大きさに合わせて、その波長と強度を設定する。
The
Terahertz wave sources are disclosed in, for example,
One of the characteristics of the terahertz wave is that it is the shortest wavelength region having a radio wave material permeability and the longest wavelength having straightness of light waves. That is, various substances such as radio waves can be transmitted, the highest spatial resolution can be obtained in the radio wave band, and it can be routed by a lens or mirror like a light wave. Therefore, terahertz waves can penetrate semiconductors, plastics, paper, rubber, vinyl, wood, fibers, ceramics, concrete, teeth, bones, fats, dried foods, and the like.
The wavelength and intensity of the terahertz wave or millimeter wave are set in accordance with the material and size of the
集束素子１４は、前記電磁波２（テラヘルツ波またはミリ波）を細長部材１の全断面を透過するように集束する。集束素子１４として、図１Ａに示す光学的な集光レンズまたは図１Ｂに示す反射ミラーを用いることができる。またその他の光学素子、例えば複合レンズを用いてもよい。
透過強度検出器１６は、集束素子１４による集束面（光学的な焦点面に相当する）に設置され、細長部材１を透過した透過電磁波３の透過強度を検出する。欠陥判別器１８は、例えばＰＣであり、検出した透過電磁波３の強度変化から細長部材１の欠陥を判別する。
The focusing
The
すなわち、図１において、発振源１２より出たテラヘルツ波あるいはミリ波は、細長部材１の断面を透過し、透過強度検出器１５の受光面で集光される。細長部材１に亀裂や異物がある場合、受光面上での透過強度が変化するため、欠陥を検出することができる。
That is, in FIG. 1, the terahertz wave or millimeter wave emitted from the
原理の実証試験として、図２に示すような異物が混入した欠陥チューブを作製し、実験を行った。使用したチューブは外径５ｍｍ、内径３ｍｍのビニールチューブで、内部に４ｍｍ程度のアルミホイルを混入させた。図１に示した装置を用いて測定を行った結果を図３に示す。使用したテラヘルツ波の周波数は１．６ＴＨｚ（１８７μｍ）である。異物（アルミホイル）の領域において、透過強度が減少していることが示されている。 As a proof test of the principle, a defective tube mixed with foreign matter as shown in FIG. 2 was prepared and tested. The tube used was a vinyl tube having an outer diameter of 5 mm and an inner diameter of 3 mm, and an aluminum foil of about 4 mm was mixed inside. FIG. 3 shows the results of measurement using the apparatus shown in FIG. The frequency of the terahertz wave used is 1.6 THz (187 μm). It is shown that the transmission intensity is reduced in the foreign matter (aluminum foil) region.
次に別の実証試験結果を示す。この試験では、図４に示すような欠陥が生じたチューブを作製し、同様の実験を行った。その結果を図５に示す。欠陥の領域において透過強度が変化（増加）していることが示されている。 Next, another demonstration test result is shown. In this test, a tube with defects as shown in FIG. 4 was produced and the same experiment was performed. The result is shown in FIG. It is shown that the transmission intensity changes (increases) in the defect area.
このように異物や亀裂などの欠陥による透過強度が大きく変化するので、非破壊でチューブ内の異常を検出することが可能となる。なお、今回は原理の実証のため実験には透明チューブを用いたが、不透明チューブでも同じ結果が得られる。
なお原理上一方向で検査可能であり、本実施例でも一方向により実証試験を行ったが、検査精度の向上等のため複数方向で検査することを妨げるものではない。
In this way, the transmission intensity due to a defect such as a foreign substance or a crack changes greatly, so that an abnormality in the tube can be detected without destruction. In this case, a transparent tube was used for the experiment to prove the principle, but the same result can be obtained with an opaque tube.
In principle, inspection can be performed in one direction. In this embodiment, the verification test was performed in one direction. However, this does not preclude inspection in a plurality of directions in order to improve inspection accuracy.
上述のように、テラヘルツ波およびミリ波（１０ＴＨｚ〜１０ＧＨｚ：波長約３０μｍ〜３０ｍｍ）を使用すことにより、以下の効果が得られる。
（１）不透明な対象物に対しても欠陥検査が可能。
従来の方法では不透明な対象物の内部の欠陥や異物混入の検出は不可能であった。しかし、テラヘルツ波およびミリ波は対象物の透明・不透明を問わない。
（２）非常に小さい欠陥も検出が可能。
透明な対象物でも非常に小さい欠陥の場合、従来の画像処理や目視観察では検出が困難であった。テラヘルツ波およびミリ波は欠陥との大きな透過強度の違いを検出するので、非常に小さい欠陥も検出が可能である。
（３）製造工程との相性が良い。
本発明の方法は、ラインスキャンで検出できるため、製造過程の高速化が可能であり、製造工程と非常に相性がよい。
（４）ラインスキャン以外に１ショットスキャンでも欠陥検出が可能。
ビームを広げて対象物に照射し、透過の変化を見る。この場合、ラインスキャンとは異なり、１度で対象物の欠陥検出が可能となる。
As described above, the following effects can be obtained by using terahertz waves and millimeter waves (10 THz to 10 GHz: wavelength of about 30 μm to 30 mm).
(1) Defect inspection is possible even for opaque objects.
In the conventional method, it is impossible to detect defects inside the opaque object or contamination of foreign matters. However, the terahertz wave and millimeter wave may be transparent or opaque.
(2) Very small defects can be detected.
In the case of a very small defect even with a transparent object, it has been difficult to detect it by conventional image processing or visual observation. Since terahertz waves and millimeter waves detect a large difference in transmission intensity from defects, even very small defects can be detected.
(3) Good compatibility with the manufacturing process.
Since the method of the present invention can be detected by line scanning, the manufacturing process can be speeded up and is very compatible with the manufacturing process.
(4) Defects can be detected by one-shot scanning in addition to line scanning.
Expand the beam and irradiate the object to see the change in transmission. In this case, unlike the line scan, it is possible to detect the defect of the object at one time.
なお、本発明は、上述した実施形態に限定されず、本発明の要旨を逸脱しない範囲で種々に変更することができることは勿論である。 In addition, this invention is not limited to embodiment mentioned above, Of course, it can change variously in the range which does not deviate from the summary of this invention.
１ 細長部材（チューブ、パイプ、棒材）、
２ 電磁波（テラヘルツ波またはミリ波）、３ 透過波、
１０ 欠陥検出装置、１２ 発振源（テラヘルツ波源またはミリ波源）、
１４ 集束素子（集光レンズ、反射ミラー）、
１６ 透過強度検出器、１８ 欠陥判別器（ＰＣなど）、
1 Elongated member (tube, pipe, bar),
2 electromagnetic waves (terahertz waves or millimeter waves), 3 transmitted waves,
10 defect detection device, 12 oscillation source (terahertz wave source or millimeter wave source),
14 Focusing element (condensing lens, reflecting mirror),
16 Transmission intensity detector, 18 Defect discriminator (PC etc.),
Claims (4)
細長部材を透過しかつ一部吸収される波長の電磁波を照射し、細長部材を透過した前記電磁波の透過強度の変化から細長部材の欠陥を検出する、ことを特徴とする細長部材の欠陥検出方法。 An elongated member defect detection method for detecting external defects, surface defects and internal defects of an elongated member having a constant cross-sectional shape,
A method for detecting a defect in an elongated member, comprising: irradiating an electromagnetic wave having a wavelength that is transmitted through the elongated member and partially absorbed; and detecting a defect in the elongated member from a change in transmission intensity of the electromagnetic wave transmitted through the elongated member. .
4. The elongated member defect detection apparatus according to claim 3, wherein the oscillation source is a terahertz wave source that oscillates a terahertz wave or a millimeter wave source that oscillates a millimeter wave.
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