[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

JP2004333398A - Laser distance measuring device and calibration method for the laser distance meter - Google Patents

Laser distance measuring device and calibration method for the laser distance meter Download PDF

Info

Publication number
JP2004333398A
JP2004333398A JP2003132339A JP2003132339A JP2004333398A JP 2004333398 A JP2004333398 A JP 2004333398A JP 2003132339 A JP2003132339 A JP 2003132339A JP 2003132339 A JP2003132339 A JP 2003132339A JP 2004333398 A JP2004333398 A JP 2004333398A
Authority
JP
Japan
Prior art keywords
distance
measured
laser
laser distance
standard reflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003132339A
Other languages
Japanese (ja)
Other versions
JP2004333398A5 (en
JP4315327B2 (en
Inventor
Yasuhiro Shimizu
保博 清水
Masaki Takeuchi
雅樹 竹内
Yasuaki Matsui
康明 松井
Masaki Koroyasu
雅樹 頃安
Arata Koroyasu
新 頃安
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyokuto Sanki Co Ltd
Original Assignee
Kyokuto Sanki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyokuto Sanki Co Ltd filed Critical Kyokuto Sanki Co Ltd
Priority to JP2003132339A priority Critical patent/JP4315327B2/en
Publication of JP2004333398A publication Critical patent/JP2004333398A/en
Publication of JP2004333398A5 publication Critical patent/JP2004333398A5/ja
Application granted granted Critical
Publication of JP4315327B2 publication Critical patent/JP4315327B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Measurement Of Optical Distance (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To calibrate errors caused in distance data, based on the color and gloss of an object to be measured, when distance is measured using a laser distance meter. <P>SOLUTION: The laser distance measuring device is constituted, by providing a standard reflector S of a reference color and reference glossiness on the surface of the object to be measured T, measuring the distance to the object T by a laser distance meter 1, removing the standard reflector S from the object, and measuring the distance twice. When a difference over the thickness (a) of the standard reflector S is produced, calibration is conducted by setting the difference as a deviation. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

【0001】
【産業上の利用分野】
この発明は、レーザー距離計を用いて光学的に距離を測定する装置および校正方法に関し、特に、被測定物体表面の色彩・光沢に基づく測定誤差を少なくするように構成したものである。
【0002】
【従来の技術】
レーザー距離計は、比較的高価ではあるが、取り扱いが簡便であり、かつ見通しが可能である限り正確に測定できるので、普及しつつある。
【0003】
このレーザー距離計4として、スイスのライカ ジオシステムズ社製のモジュール「DISTO proa」を組み込んだ株式会社村上技研産業より「レーザー距離センサ LDS−1」という名称で販売されている。
【0004】
このレーザー距離計は、出力データとして、目標物までの距離を示す「距離データ」と、受光した反射光線の強度を示す「反射強度データ」などがあり、コマンドにより何れか一つのデータを出力させるモードを選択することができるものである。
【0005】
【発明が解決しようとする課題】
このような従来のレーザー距離計により被測定物体までの距離を測定したとき、被測定物体表面の色彩・光沢により測定した距離データに誤差を生じることがあり、かつ、その誤差は、距離および被測定物体の表面と光軸がなす角度に関係なくほぼ一定であることが明らかになった。
【0006】
そこで、この発明は、レーザー距離計を使用して距離測定したときに、被測定物体の色彩・光沢に基づいて生じる距離データの誤差を補正するために考えられたものである。
【0007】
【課題を解決するための手段】
この発明の校正手段を備えたレーザー距離測定装置は、レーザー距離計から出力された距離データを表示する距離表示器と、数値データ発生器と、レーザー距離計から出力された距離データに上記数値データ発生器から出力される数値データを加減算する加減算器を設け、被測定物体の表面に基準色・基準光沢の標準反射体を設けて、上記レーザー距離計により被測定物体までの距離を測定し、被測定物体から上記標準反射体を取り去って再び距離を測定し、2度の測定による距離データに、上記標準反射体の厚み分以上の相違を生じたとき、その相違量を上記数値データ発生器に設定するものである。
【0008】
この発明のレーザー距離計の校正方法は、被測定物体の表面に基準色・基準光沢の標準反射体を設けて、レーザー距離計により被測定物体までの距離を測定し、被測定物体から上記標準反射体を取り去って再び距離を測定し、2度の測定による距離データに、上記標準反射体の厚み分以上の相違を生じたとき、その相違量を偏差値として校正する方法である。
【0009】
【発明の実施の形態】
この発明のレーザー距離計の校正方法においては、図1に示すように、レーザー距離計1と、このレーザー距離計1から出力された距離データを表示する距離表示器2との間に加減算器3が設けられている。そして、ディップ・スイッチ、ディジタル・スイッチなどの数値データ発生器4を設け、この数値データ発生器4の出力を加減算器3で距離データと加減算するように構成されている。
【0010】
この発明のレーザー距離計の校正方法は、図1に示すように、レーザー距離計から放射されるレーザー・ビームBを反射させる基準色・基準光沢の標準反射体Sを使用する。
【0011】
工場出荷時に、レーザー距離計1により基準色・基準光沢の標準反射体Sまでの距離を測定して、実測値と得られた測定データを比較して校正する。
【0012】
測定現場において、数値データ発生器4を零に設定し、レーザー距離計1を動作させて被測定物体Tの表面に標準反射体Sを設けて距離を測定する。次に、被測定物体Tから標準反射体Sを取り去って距離を測定する。このように、2度の測定による距離データに、標準反射体Sの厚み分以上の相違がなければ、被測定物体Tは光学的に標準反射体と近似した反射特性を有するものと判断して、標準反射体Sを使用せずに測定動作を継続すればよいのである。
【0013】
被測定物体Tの表面に標準反射体Sを設けた場合と、被測定物体Tから標準反射体Sを取り去った場合との距離表示が、標準反射体Sの厚みa分以上相違すれば、その相違量を誤差として数値データ発生器4に設定し、標準反射体Sを使用せずに測定した距離データに対して、数値データ発生器4に設定された誤差を加減算して校正し、正しい距離を距離表示器2に表示させる。
【0014】
以上で説明した実施形態においては、数値データ発生器4を使用して人手により誤差を入力しているが、マイクロコンピュータを使用して、被測定物体Tの表面に標準反射体Sを設けた場合と標準反射体Sを取り去った場合との誤差を自動的に取得して、この取得した誤差で自動的に校正してもよいのである。
【0015】
以上で説明したレーザー距離計の校正を適用する測定は、例えば、床材、畳を敷き込むための部屋の寸法の測定や内外壁の形状を測定、または面積を算出するための測定のように、被測定物体表面の色彩・光沢が多様なものを扱う分野に使用することができ、測定の精度を向上させることができるのである。
【0016】
【発明の効果】
以上の実施の形態に基づく説明から明らかなように、この発明のレーザー距離計の校正方法によると、被測定物体の色彩・光沢に基づいて生じる距離データの誤差を補正することができ、距離測定の精度を向上させることができる。
【図面の簡単な説明】
【図1】この発明の部屋のレーザー距離計の校正方法で使用する距離・方位角測定装置の実施形態を示すブロック図である。
【符号の説明】
1 レーザー距離計
2 距離表示器
3 加減算器
4 数値データ発生器
T 被測定物体
S 標準反射体
[0001]
[Industrial applications]
The present invention relates to an apparatus and a calibration method for optically measuring a distance using a laser range finder, and more particularly, to a method for reducing a measurement error based on the color and gloss of the surface of an object to be measured.
[0002]
[Prior art]
Laser rangefinders are relatively expensive, but are becoming popular because they are easy to handle and can measure accurately as long as they are line of sight.
[0003]
As the laser range finder 4, which is sold under the name "laser distance sensor LDS-1" from the Swiss Leica Geosystems Inc. of module "DISTO pro 4 a" Murakami Giken industry that incorporates.
[0004]
This laser range finder has, as output data, "distance data" indicating a distance to a target, "reflection intensity data" indicating the intensity of a reflected light beam received, and the like, and any one of the data is output by a command. The mode can be selected.
[0005]
[Problems to be solved by the invention]
When the distance to the object to be measured is measured by such a conventional laser distance meter, errors may occur in the distance data measured due to the color and gloss of the surface of the object to be measured, and the errors are caused by the distance and the distance. It became clear that it was almost constant regardless of the angle between the optical axis and the surface of the measurement object.
[0006]
Therefore, the present invention has been conceived to correct an error in distance data generated based on the color and gloss of a measured object when a distance is measured using a laser distance meter.
[0007]
[Means for Solving the Problems]
A laser distance measuring device provided with the calibration means of the present invention includes a distance indicator for displaying distance data output from the laser distance meter, a numerical data generator, and the numerical data to the distance data output from the laser distance meter. Providing an adder / subtractor for adding / subtracting numerical data output from the generator, providing a standard reflector of a reference color / reference gloss on the surface of the measured object, measuring the distance to the measured object by the laser distance meter, The standard reflector is removed from the object to be measured, and the distance is measured again. When a difference of two times or more in the distance data is greater than the thickness of the standard reflector, the difference is represented by the numerical data generator. Is set to
[0008]
The calibration method of the laser range finder of the present invention includes the steps of: providing a standard reflector having a reference color and a standard gloss on the surface of the object to be measured; measuring a distance to the object to be measured by the laser range finder; In this method, the reflector is removed, the distance is measured again, and when a difference of two times or more in the distance data is greater than the thickness of the standard reflector, the difference is calibrated as a deviation value.
[0009]
BEST MODE FOR CARRYING OUT THE INVENTION
In the method for calibrating a laser distance meter according to the present invention, as shown in FIG. 1, an adder / subtractor 3 is provided between a laser distance meter 1 and a distance indicator 2 for displaying distance data output from the laser distance meter 1. Is provided. A numerical data generator 4 such as a dip switch or a digital switch is provided, and an output of the numerical data generator 4 is added to or subtracted from distance data by an adder / subtractor 3.
[0010]
As shown in FIG. 1, the calibration method of the laser range finder of the present invention uses a standard reflector S of a reference color and a reference gloss for reflecting a laser beam B emitted from the laser range finder.
[0011]
At the time of shipment from the factory, the distance to the standard reflector S of the reference color and the reference gloss is measured by the laser distance meter 1, and the measured value is compared with the obtained measurement data to calibrate.
[0012]
At the measurement site, the numerical data generator 4 is set to zero, the laser distance meter 1 is operated, and the standard reflector S is provided on the surface of the measured object T to measure the distance. Next, the standard reflector S is removed from the measured object T, and the distance is measured. As described above, if there is no difference in the distance data obtained by the two measurements that is equal to or more than the thickness of the standard reflector S, it is determined that the measured object T has optically similar reflection characteristics to the standard reflector. The measurement operation may be continued without using the standard reflector S.
[0013]
If the distance display between the case where the standard reflector S is provided on the surface of the measured object T and the case where the standard reflector S is removed from the measured object T is different by at least the thickness a of the standard reflector S, The difference amount is set as an error in the numerical data generator 4, and the distance data measured without using the standard reflector S is added to or subtracted from the error set in the numerical data generator 4 for calibration. Is displayed on the distance display 2.
[0014]
In the embodiment described above, the error is manually input by using the numerical data generator 4. However, when the standard reflector S is provided on the surface of the measured object T using a microcomputer. It is also possible to automatically obtain an error between the case where the standard reflector S is removed and the case where the standard reflector S is removed, and to automatically calibrate the error based on the obtained error.
[0015]
The measurement applying the calibration of the laser range finder described above is, for example, a floor material, measurement of the dimensions of a room for laying tatami mats, measurement of the shape of the inner and outer walls, or measurement for calculating the area It can be used in a field where the color and gloss of the surface of an object to be measured are various, and the accuracy of measurement can be improved.
[0016]
【The invention's effect】
As is clear from the description based on the above embodiment, according to the calibration method of the laser distance meter of the present invention, it is possible to correct the error of the distance data generated based on the color and gloss of the measured object, and to perform the distance measurement. Accuracy can be improved.
[Brief description of the drawings]
FIG. 1 is a block diagram showing an embodiment of a distance / azimuth measuring device used in a method of calibrating a room laser range finder according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Laser range finder 2 Distance indicator 3 Adder / subtractor 4 Numerical data generator T Object to be measured S Standard reflector

Claims (2)

レーザー距離計と、該レーザー距離計から出力された距離データを表示する距離表示器と、数値データ発生器と、レーザー距離計から出力された距離データに上記数値データ発生器から出力される数値データを加減算する加減算器を設け、
被測定物体の表面に基準色・基準光沢の標準反射体を設けて、上記レーザー距離計により被測定物体までの距離を測定し、被測定物体から上記標準反射体を取り去って再び距離を測定し、2度の測定による距離データに、上記標準反射体の厚み分以上の相違を生じたとき、その相違量を上記数値データ発生器に設定する校正手段を備えたことを特徴とするレーザー距離測定装置。
A laser distance meter, a distance indicator for displaying distance data output from the laser distance meter, a numerical data generator, and numerical data output from the numerical data generator to the distance data output from the laser distance meter Is provided with an adder / subtractor for adding and subtracting
Provide a standard reflector of reference color and gloss on the surface of the object to be measured, measure the distance to the object to be measured by the laser distance meter, remove the standard reflector from the object to be measured, and measure the distance again. 2. A laser distance measuring device, comprising: a calibration means for setting a difference amount in the numerical data generator when a difference of not less than the thickness of the standard reflector occurs in the distance data obtained by the twice measurement. apparatus.
被測定物体の表面に基準色・基準光沢の標準反射体を設けて、レーザー距離計により被測定物体までの距離を測定し、被測定物体から上記標準反射体を取り去って再び距離を測定し、2度の測定による距離データに、上記標準反射体の厚み分以上の相違を生じたとき、その相違量を偏差値として校正することを特徴とするレーザー距離計の校正方法。Provide a standard reflector of reference color and gloss on the surface of the measured object, measure the distance to the measured object with a laser distance meter, remove the standard reflector from the measured object and measure the distance again, A method for calibrating a laser range finder, comprising: when a difference in the distance data obtained by two measurements is equal to or greater than the thickness of the standard reflector, correcting the difference as a deviation value.
JP2003132339A 2003-05-09 2003-05-09 Laser distance measuring device and laser distance meter calibration method Expired - Lifetime JP4315327B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003132339A JP4315327B2 (en) 2003-05-09 2003-05-09 Laser distance measuring device and laser distance meter calibration method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003132339A JP4315327B2 (en) 2003-05-09 2003-05-09 Laser distance measuring device and laser distance meter calibration method

Publications (3)

Publication Number Publication Date
JP2004333398A true JP2004333398A (en) 2004-11-25
JP2004333398A5 JP2004333398A5 (en) 2009-04-09
JP4315327B2 JP4315327B2 (en) 2009-08-19

Family

ID=33507243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003132339A Expired - Lifetime JP4315327B2 (en) 2003-05-09 2003-05-09 Laser distance measuring device and laser distance meter calibration method

Country Status (1)

Country Link
JP (1) JP4315327B2 (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010060910A (en) * 2008-09-04 2010-03-18 Ricoh Co Ltd Image forming apparatus
JP2013539533A (en) * 2010-07-26 2013-10-24 ファロ テクノロジーズ インコーポレーテッド Device for optically scanning and measuring the ambient environment
US8997362B2 (en) 2012-07-17 2015-04-07 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine with optical communications bus
US9009000B2 (en) 2010-01-20 2015-04-14 Faro Technologies, Inc. Method for evaluating mounting stability of articulated arm coordinate measurement machine using inclinometers
US9168654B2 (en) 2010-11-16 2015-10-27 Faro Technologies, Inc. Coordinate measuring machines with dual layer arm
USRE45854E1 (en) 2006-07-03 2016-01-19 Faro Technologies, Inc. Method and an apparatus for capturing three-dimensional data of an area of space
US9372265B2 (en) 2012-10-05 2016-06-21 Faro Technologies, Inc. Intermediate two-dimensional scanning with a three-dimensional scanner to speed registration
US9417056B2 (en) 2012-01-25 2016-08-16 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US9513107B2 (en) 2012-10-05 2016-12-06 Faro Technologies, Inc. Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner
US9551575B2 (en) 2009-03-25 2017-01-24 Faro Technologies, Inc. Laser scanner having a multi-color light source and real-time color receiver
US9607239B2 (en) 2010-01-20 2017-03-28 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US9628775B2 (en) 2010-01-20 2017-04-18 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US10067231B2 (en) 2012-10-05 2018-09-04 Faro Technologies, Inc. Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner
US10175037B2 (en) 2015-12-27 2019-01-08 Faro Technologies, Inc. 3-D measuring device with battery pack
US10281259B2 (en) 2010-01-20 2019-05-07 Faro Technologies, Inc. Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features
CN112711005A (en) * 2020-12-29 2021-04-27 深圳市利拓光电有限公司 Distance measuring device based on laser and control method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015122057B3 (en) * 2015-12-17 2017-07-06 Endress+Hauser Gmbh+Co. Kg Calibration system for calibrating at least one distance measuring device and associated calibration method

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE45854E1 (en) 2006-07-03 2016-01-19 Faro Technologies, Inc. Method and an apparatus for capturing three-dimensional data of an area of space
JP2010060910A (en) * 2008-09-04 2010-03-18 Ricoh Co Ltd Image forming apparatus
US9551575B2 (en) 2009-03-25 2017-01-24 Faro Technologies, Inc. Laser scanner having a multi-color light source and real-time color receiver
US9628775B2 (en) 2010-01-20 2017-04-18 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US9009000B2 (en) 2010-01-20 2015-04-14 Faro Technologies, Inc. Method for evaluating mounting stability of articulated arm coordinate measurement machine using inclinometers
US10281259B2 (en) 2010-01-20 2019-05-07 Faro Technologies, Inc. Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features
US9607239B2 (en) 2010-01-20 2017-03-28 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
US10060722B2 (en) 2010-01-20 2018-08-28 Faro Technologies, Inc. Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations
JP2013539533A (en) * 2010-07-26 2013-10-24 ファロ テクノロジーズ インコーポレーテッド Device for optically scanning and measuring the ambient environment
US9168654B2 (en) 2010-11-16 2015-10-27 Faro Technologies, Inc. Coordinate measuring machines with dual layer arm
US9417056B2 (en) 2012-01-25 2016-08-16 Faro Technologies, Inc. Device for optically scanning and measuring an environment
US8997362B2 (en) 2012-07-17 2015-04-07 Faro Technologies, Inc. Portable articulated arm coordinate measuring machine with optical communications bus
US9372265B2 (en) 2012-10-05 2016-06-21 Faro Technologies, Inc. Intermediate two-dimensional scanning with a three-dimensional scanner to speed registration
US9513107B2 (en) 2012-10-05 2016-12-06 Faro Technologies, Inc. Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner
US9746559B2 (en) 2012-10-05 2017-08-29 Faro Technologies, Inc. Using two-dimensional camera images to speed registration of three-dimensional scans
US9618620B2 (en) 2012-10-05 2017-04-11 Faro Technologies, Inc. Using depth-camera images to speed registration of three-dimensional scans
US10067231B2 (en) 2012-10-05 2018-09-04 Faro Technologies, Inc. Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner
US11815600B2 (en) 2012-10-05 2023-11-14 Faro Technologies, Inc. Using a two-dimensional scanner to speed registration of three-dimensional scan data
US10203413B2 (en) 2012-10-05 2019-02-12 Faro Technologies, Inc. Using a two-dimensional scanner to speed registration of three-dimensional scan data
US9739886B2 (en) 2012-10-05 2017-08-22 Faro Technologies, Inc. Using a two-dimensional scanner to speed registration of three-dimensional scan data
US10739458B2 (en) 2012-10-05 2020-08-11 Faro Technologies, Inc. Using two-dimensional camera images to speed registration of three-dimensional scans
US11112501B2 (en) 2012-10-05 2021-09-07 Faro Technologies, Inc. Using a two-dimensional scanner to speed registration of three-dimensional scan data
US11035955B2 (en) 2012-10-05 2021-06-15 Faro Technologies, Inc. Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner
US10175037B2 (en) 2015-12-27 2019-01-08 Faro Technologies, Inc. 3-D measuring device with battery pack
CN112711005A (en) * 2020-12-29 2021-04-27 深圳市利拓光电有限公司 Distance measuring device based on laser and control method
CN112711005B (en) * 2020-12-29 2024-05-17 深圳市利拓光电有限公司 Distance measuring device based on laser and control method

Also Published As

Publication number Publication date
JP4315327B2 (en) 2009-08-19

Similar Documents

Publication Publication Date Title
JP2004333398A (en) Laser distance measuring device and calibration method for the laser distance meter
US8858069B2 (en) Optical fiber temperature distribution measuring device
KR101497187B1 (en) Manual Type Surveying Instrument Having Collimation Assisting Device
US3900260A (en) Method and apparatus for measuring the distance and/or relative elevation between two points in an opto-electronic manner
US9674423B2 (en) Surveying apparatus with function for calibrating focusing optical unit positions to be set in a distance-dependent manner
JP2008051696A (en) Optical axis deviation type laser interferometer, its calibration method, correction method, and measuring method
JP2010038558A (en) Method and apparatus for measuring distance by optoical wave interference
CN110609299A (en) Three-dimensional imaging system based on TOF
JP7025317B2 (en) Object monitoring system with range measuring device
KR20160046746A (en) Method for determining a local refractive index and device therefor
JP2012093235A (en) Three-dimensional shape measurement device, three-dimensional shape measurement method, structure manufacturing method, and structure manufacturing system
Šiaudinytė et al. Uncertainty evaluation of proposed setup for the calibration of vertical angle measuring systems by using means for the flat angle calibration
CN104748947B (en) Method of calibrating rotational angle of automatic turntable of luminous distribution performance test system for lamps
JP2017198613A (en) Refractive index measurement method, refractive index measurement device, and optical element manufacturing method
Steiger et al. Calibration of time-of-flight range imaging cameras
JP4786923B2 (en) Conversion coefficient calibration method and apparatus for fringe measurement apparatus, and fringe measurement apparatus provided with the conversion coefficient calibration apparatus
JP5645311B2 (en) Light wave distance meter
Jakubkovič et al. Displacement Measurement in the Vertical Axis of the Measuring Microscope using Laser Triangulation Sensor
US4738532A (en) Method of calibrating an optical measuring system
CN115469331A (en) ITOF camera, calibration method and related equipment
JPS62105002A (en) High-precision measuring method for center position of light
US20240255639A1 (en) Measurement method and non-contact displacement detection apparatus thereof
JP2010112819A (en) Method of correcting measurement sensitivity in oblique incidence interferometer
JPH04339289A (en) Laser distance measurement device
JP2014132252A (en) Measurement method, measurement device and article fabrication method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060424

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090225

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20090226

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20090421

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20090514

R150 Certificate of patent or registration of utility model

Ref document number: 4315327

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120529

Year of fee payment: 3

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090225

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120529

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130529

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130529

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140529

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term