JP2004268983A - Glass substrate transporting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a glass substrate transporting device capable of easily storing even a large size glass substrate without hitting against a ceiling. <P>SOLUTION: This glass substrate transporting device can store a plurality of glass substrates 1 in a superimposed state. The device is constituted of a box body 2 having an insertion opening for the glass substrates 1, a shock-absorbing member 17 positioned in an edge region of the glass substrates 1 in the box body 2 for preventing the abutting of adjacent glass substrates 1, 1, and of a pressing means 3 for blocking the movement of the glass substrates 1 during transportation by the glass substrate transporting device by pressing the shock-absorbing member 17 from the opening side for inserting the glass substrates 1. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a glass substrate transport apparatus in which glass substrates are sequentially guided and stored in a box body from a horizontal direction or a vertical direction by a transport apparatus.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, various types of substrates such as a base glass, a glass substrate for liquid crystal display, a glass substrate for plasma display, a hybrid IC ceramic substrate, and a wafer, or a completed panel manufactured using these substrates (hereinafter, simply referred to as a “glass substrate”) are used, for example. A box as shown in FIG. 13 has been known as a transport box used when transferring from a glass maker to a device maker.
[0003]
In FIG. 13, reference numeral 01 denotes a glass substrate transport box, which is composed of a bottomed main body portion 02 having an open upper end and a lid (not shown). In the main body portion 02, both sides or lower sides of a plurality of glass substrates 03 are provided. A pair of insert plates 04 each having a plurality of vertical grooves 04a for supporting (not shown) are inserted. These glass substrates 03 are engaged and supported one by one in the vertical groove 04a of the facing insert plate 04, and the lid is conveyed over the main body 02 so as to press the upper side of the glass substrate 03 from above. However, in recent years, the vertical and horizontal dimensions of the glass substrate have tended to be large because of the reasons of improving the transport efficiency of the glass substrate, improving the loading efficiency, and reducing the unit price per transported number. However, 1800 × 2000 × 0.7 has become mainstream.
[0004]
However, even if the glass substrate 03 having the above dimensions is to be inserted into the glass substrate box 02 from above by a conventional method, the end portion 03a of the glass substrate 03 collides with the ceiling 05 as shown in FIG. In addition to the problem that the transfer device 06 can be inserted into the glass substrate box 02 by the transfer device 06 and the vacuum suction tool 07, the transfer device 06 needs a space into which the transfer device 06 can be inserted. Storage space was limited.
[0005]
[Problems to be solved by the invention]
The present invention has been made in view of such a problem, and it is an object of the present invention to provide an apparatus for transporting a glass substrate, which can easily store a large-sized glass substrate, which has become a mainstream in recent years, without hitting a ceiling. With the goal.
[0006]
[Means for Solving the Problems]
In order to solve the above problems, a glass substrate transport device of the present invention is a glass substrate transport device capable of storing a plurality of glass substrates in an overlapping manner, and the transport device is a box having a glass substrate insertion opening. A main body, a buffer member positioned in an edge region of the glass substrate in the box main body to prevent abutting between adjacent glass substrates, and pressing the buffer member from an insertion opening side of the glass substrate to transfer the glass substrate. And pressing means for preventing movement of the glass substrate during transport of the apparatus.
According to this feature, the glass substrate to which the buffer member is attached can be stored by the transfer device in an overlapping manner from the opening, so that the glass substrate does not hit the ceiling. Further, the glass substrate is a buffer member arranged in the edge region, so that the contact between the glass substrates (particularly, the center portion) is prevented, and all the glass substrates are pressed and fixed via the buffer member. Not only is there no risk of breakage of the glass substrate in the transfer process, but a large number of glass substrates can be stored compared to a conventional glass substrate transfer box.
[0007]
The glass substrate transport apparatus of the present invention may be configured such that the buffer member can be held on the glass substrate at least so as not to fall from the glass substrate until the glass substrate is installed in the box main body from the insertion opening side. preferable.
With this configuration, the buffer member is held in a state held by the glass substrate, so that the glass substrate and the buffer member can be efficiently and simultaneously carried into the box body.
[0008]
In the apparatus for transporting a glass substrate of the present invention, it is preferable that the buffer member has a holding portion for holding the glass substrate from both sides.
With this configuration, since the glass substrate can be sandwiched from both sides by the sandwiching portion of the buffer member, there is no possibility that the buffer member falls off the glass substrate in the step of storing the glass substrate in the box body.
[0009]
In the glass substrate transporting apparatus of the present invention, it is preferable that a cavity having a slightly larger size is formed inside the holding section.
With this configuration, not only is it easy to clamp the buffer member to the end of the glass substrate, but also the clamping force of the clamping section increases.
[0010]
In the apparatus for transporting a glass substrate of the present invention, it is preferable that the buffer member has a connecting portion for connecting with each other.
By doing so, the respective buffer members are connected to each other, and the displacement of each of the glass substrates at the time of transport can be prevented as much as possible, and the storage and installation state is stabilized.
[0011]
In the apparatus for transporting a glass substrate of the present invention, a concave portion and a convex portion are respectively formed on a front portion and a rear surface portion of the buffer member, and a connecting portion is formed by fitting the concave portion and the convex portion. Is preferred.
With this configuration, the respective buffer members are connected to each other by fitting the concave portions and the convex portions, and the storage and installation state of each glass substrate is further stabilized.
[0012]
In the apparatus for transporting a glass substrate of the present invention, it is preferable that the pressing means is a lid for closing an insertion opening of the box body.
With this configuration, after the glass substrate and the buffer member are carried into the box body, the movement of the internal glass substrate can be prevented only by installing the lid.
[0013]
In the apparatus for transporting a glass substrate according to the present invention, it is preferable that the pressing means is a contact pad extending from a lid closing an insertion opening of the box body via a length-adjustable connector.
In this case, any number of glass substrates can be securely stored and fixed according to the number of glass substrates to be stored.
[0014]
In the glass substrate transfer device of the present invention, a contact pad for regulating the buffer member is attached to a surface facing the insertion opening, and the contact pad is formed so as to be inclined upward from the bottom surface. Is preferred.
With this configuration, there is no possibility that the glass substrate falls down toward the opening in the housing process.
[0015]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0016]
1 to 12 show one embodiment of the present invention. FIG. 1 is a perspective view of a glass substrate conveying apparatus according to the present invention, and FIG. FIG. 3 is a perspective view showing a state in which the glass substrate according to the present invention is held by a buffer member, FIG. 4 is a cross-sectional view of FIG. 1 with a part of line XX omitted, and FIGS. (C), (d), (e), and (f) are plan views of various buffer members used for buffering between glass substrates according to the present invention, and FIGS. 6 (a), (b), (c), (d) ( 7 (a), 7 (b), 7 (c), and 7 (d) are cross-sectional views showing steps of storing a glass substrate in the glass substrate transport box according to the present invention. 8 (a), (b), (c), and (d) are cross-sectional views showing a process of accommodating the glass substrate of the second embodiment, and FIG. 9 is a sectional view of a glass substrate transport box according to the present invention. FIGS. 10 (a), 10 (b) and 10 (c) are cross-sectional views showing a process for accommodating the glass substrate of the third embodiment, and FIGS. 11 (a), (b) and (c) are fourth embodiments. FIG. 12 is an enlarged cross-sectional view with a part thereof omitted, FIG. 13 is a perspective view of a conventional transport box, and FIG. 14 is a cross-sectional view illustrating a conventional glass substrate storing process. is there.
[0017]
The glass substrate transfer apparatus shown in FIG. 1 is used as a transfer apparatus used when transferring a predetermined number of glass substrates 1 (1800 mm × 2000 mm × 0.7 mm), for example, from a glass maker to a device maker. The box body 2 is composed of a horizontal rectangular parallelepiped box body 2 having a side opening and a side lid 3, and the box body 2 is constructed by combining a ceiling plate 4, a bottom plate 5, horizontal plates 6a and 6b, and a vertical plate 7. . The three side plates 6a, 6b and 7 are composed of long rectangular side plates 6a and 6b and a short rectangular vertical plate 7, and a cross section in which styrene foam resin (eg, polyethylene resin) is sandwiched between aluminum composite plates from both sides. The outermost and innermost surfaces of the aluminum composite plate are coated with a baking paint of a polyester resin for conductive treatment.
[0018]
Each of the ceiling plate 4 and the bottom plate 5 has a long rectangular shape, and is made of the same material as that of the side plates 7, 6a and 6b and has the same cross-sectional structure.
[0019]
Further, the side cover 3 has a short rectangular shape, and is formed of the same material as the side plates 7, 6a and 6b and has the same cross-sectional structure.
[0020]
On the inner surface of the vertical side plate 7, a glass substrate contact pad 9 made of a hard material such as a polyethylene foam is adhered. The glass substrate contact pad 9 is formed in a hollow structure so that the main part of the glass substrate 1 does not contact.
[0021]
The glass substrate contact pad 9 is formed to have a right-angled triangular cross section, and is in contact with a buffer member 17 holding the glass substrate 1 in which the inclined surface 10 of the right-angled triangle is housed. 7 is stuck on the inner surface.
[0022]
A side cover pad 12 made of an elastic material such as a resilient polyethylene foam is adhered to the inner surface of the side cover 3 with an adhesive or the like. The side lid pad 12 is formed in a hollow structure so that the main part of the glass substrate 1 does not abut.
[0023]
The side lid pad 12 is formed in an inverted right-angled triangle in cross section. The side lid pad 12 is in contact with a buffer member 17 holding the glass substrate 1 in which the inclined surface 11 of the inverted right-angled triangle is housed, and the vertical surface 11 ′ is It is stuck on the inner surface of the lid 3. Since both the glass substrate contact pad 9 and the side cover pad 12 are formed in a hollow structure so as not to contact the main part of the glass substrate 1, even if pressed, the pads 9, 12 are made of glass. There is no danger of contacting the main part of the surface.
Hard aluminum frames W are attached to the outer peripheral edges of the side lid 3, the ceiling plate 4, the bottom plate 5, the horizontal plates 6a and 6b, and the vertical plate 7, respectively.
[0024]
On the outer periphery of the side cover 3 for closing the opening K of the box main body 2, a connected metal fitting 14 ′ is attached in a positional relationship corresponding to the connecting metal fitting 14 of the box main body 2.
[0025]
For example, a patch lock is used as the connecting fitting 14 and the connected fitting 14 ′, and is engaged and held by the action of the urging force, so that the opening of the side lid 3 is locked.
[0026]
A large number of glass substrates 1 are placed in the box main body 2 in an overlapping manner via a buffer member 17.
[0027]
The buffer member 17 is integrally formed of non-combustible rubber, elastic synthetic resin or the like. As shown in FIGS. 2 and 3, the cushioning member 17 is located only in the edge region of the glass substrate 1 without contacting the main portion (particularly, the center portion) of the delicate glass surface, and can hold the glass substrate. The structure is formed. Therefore, contact between the glass substrates 1 is prevented.
[0028]
As a structure capable of holding the glass substrate 1, a holding portion 23 for holding the glass substrate 1 from both sides is provided at a contact portion of the buffer member 17 with the glass substrate 1 (an edge region of the glass substrate 1). . Therefore, there is no possibility that the buffer member 17 will fall off during the process of storing the glass substrate 1. The sandwiching portion 23 sandwiches the glass substrate 1 from both sides by elasticity, and has a hollow portion 25 having a narrow entrance portion 24 and a slightly large inside so that the end portion of the glass substrate 1 can be stably installed. This makes it easier to hold the buffer member 17 at the end of the glass substrate 1. Further, a concave portion 21 and a convex portion 22 are formed on the front portion and the rear surface portion of the buffer member 17, respectively. As shown in FIG. 4, the buffer members can be connected to each other by the concave portions 21 and the convex portions 22, and the mutual displacement of each glass substrate can be prevented as much as possible, and the storage and installation state is stabilized.
[0029]
Next, as shown in FIG. 5, the external shape of various buffer members 17 used for buffering the glass substrate 1 can be formed in an L-shape, a U-shape, an I-shape or the like. The cushioning members 17 not only protect the corner portions 18 and the straight portions 19 of the glass substrate 1, but also connect the respective cushioning members 17 to each other as shown in FIGS. 6 (b), 6 (c) and 6 (d). It is also possible to form the concave portions 21 and the convex portions 22 at predetermined locations.
By connecting the buffer members 17 in this manner, the glass substrates 1, 1,... Can be firmly fixed in the box main body 2, and the mutual displacement during transport can be prevented as much as possible.
[0030]
As shown in FIGS. 6A and 6E, it is also possible to form them on the flat surface 20 so that they can be placed on each other without providing the concave portions 21 and the convex portions 22.
Further, as shown in FIG. 6F, the edge region of the glass substrate 1 can be placed on the upper surface of the buffer member 17, and in this case, a concave portion is provided on the contact surface of the buffer member 17 with the glass substrate 1. Can be easily fixed to each other.
[0031]
Next, a method of storing the glass substrate 1 to which the buffer member 17 is attached in a predetermined manner in the box body 2 will be described.
[0032]
As shown in FIG. 7A, for example, the glass substrate 1 is sucked by a vacuum suction tool 27 attached to a transport machine (hereinafter, referred to as a transport device) 26 such as a special forklift or a crane, and is placed in the box body 2. It is conveyed in the direction of the arrow through the opening K from the lateral direction. Instead of the vacuum suction device 27, any device may be used as long as it can temporarily hold the glass substrate 1.
[0033]
When the glass substrate 1 is transferred by the transfer device 26 to the position shown in FIG. 7B, the tip end surface of the buffer member 17 attached to the glass substrate is attached to the glass substrate contact pad attached to the inner surface of the vertical side plate 7. When the glass substrate 1 comes into contact with only the inclined surface 10 and releases the suction of the vacuum suction tool 27 in this state, the glass substrate 1 stands vertically on the inclined surface 10, that is, as the upper part of the contact pad 9 is reached, the glass substrate 1 becomes longer. It is stably stored in the direction approaching the inner surface of the side plate 7. If a rubber or synthetic resin anti-slip mat 28 is adhered to the inner surface of the bottom plate 5 of the box body 2, the mounting state of the glass substrate 1 is further stabilized by friction between the buffer member 17 and the anti-slip mat 28. .
[0034]
A predetermined glass substrate 1 is stored in the box body 2 by sequentially repeating the storing process of the glass substrate 1.
Next, as shown in FIG. 7 (c), when the pressing means for preventing the movement of the glass substrates 1, 1,... Each of the glass substrates 1, 1,... Is inclined at a certain angle, as shown in FIG. 7D, in contact with only the buffer member 17 of the glass substrate 1 in which the inclined surface 11 of the side cover pad 12 is stored. It is firmly fixed and stored in the state. Further, in order to maintain this state, the box body 2 and the side cover 3 are locked by the connecting fitting 14 of the box body 2 and the connected fitting 14 'of the side cover 3 shown in FIG. Are securely held and fixed.
[0035]
The glass substrate transfer apparatus stored by the above method is used, for example, as an apparatus for transferring from a glass maker to a device maker.
[0036]
The storage method when the number of the glass substrates 1, 1,... Stored in the box body 2 is less than a predetermined number will be described. First, as shown in FIG. The glass substrates 1, 1,... Are stored. When the storage of the glass substrate 1 of the box main body 2 is completed in the state shown in FIG. 8B, the insertion opening K of the box main body 2 is closed with the lid 3 as shown in FIG. When the connector 29 is slid to move the inner cover 30 in the direction of the arrow, a hollow structure is formed so as not to come into contact with the main part (particularly the center) of the glass substrate 1 attached to the inner cover 30. The formed inner cover pad 31 is stored and fixed as shown in FIG. 8D with only the buffer member 17 attached to the glass substrate 1 pressed.
[0037]
As shown in FIG. 9, a plurality of length-adjustable connecting members 29 are independently and slidably attached to the side cover 3 that closes the opening K. Is fixed to an inner lid 30 that can be inserted into the box body 2. An inner lid pad 31 formed of an elastic polyethylene-based foam or the like is attached to the inner surface of the inner lid 30 with an adhesive or the like. The length of the connecting tool 29 as the pressing means is adjusted by screwing in the screw. However, the connecting tool 29 may be a cylinder of air, liquid, or the like, and is not limited.
[0038]
Next, a method of storing the glass substrate 1 in the box main body 2 having the opening K ′ in the ceiling surface as well as the insertion opening K of the glass substrate 1 will be described with reference to FIGS. It will be described based on. As shown in FIG. 10A, the box body 2 is mounted on the inclined mounting table 32 so as to incline upward toward the insertion opening K, and the transfer device is the same as the method for storing the glass substrate 1 described above. 26 sequentially stored. The glass substrate 1 accommodated by the inclination of the inclined mounting table 32 is also accommodated by being inclined. When the storage of the inclined glass substrates 1, 1,... Is completed, the glass substrates are closed by the side lid 3 and the ceiling lid 8 in the direction of the arrow as shown in FIG. Next, as shown in FIG. 10 (c), the cushioning members 17 are pressed from the vertical and horizontal directions by the side lid pad 12 and the ceiling lid pad 13 attached to the side lid 3 and the ceiling lid 8. And is securely fixed in the box body 2.
[0039]
Next, a method of storing the glass substrates 1... In the vertical box main body 2 will be described with reference to FIGS. It is sucked by the vacuum suction tool 27 attached to the transfer device 26, and is transferred into the box body 2 from above through the opening K in the direction of the arrow shown in FIG. The glass substrate 1 is accommodated on the pad 16 in an overlapping manner. By repeating this process sequentially, the cells are stored as shown in FIG. Next, the buffer member 17 attached to the glass substrate 1 is pressed by the ceiling lid pad 13 attached to the ceiling lid 8, and the glass substrate 1 is stored and fixed in the state shown in FIG. The bottom pad 16 is formed in a hollow structure that does not contact the main part of the glass substrate 1.
[0040]
FIG. 12 shows a state in which buffer members 17 are interposed only in the edge region of the glass substrate 1 and housed in the box main body 2. Since this buffer member 17 does not require a holding portion or a connecting portion, a simple buffer member 17 can be provided.
[0041]
Reference numeral 33 denotes a bottom contact pad which prevents each of the glass substrates 1, 1,... From coming into direct contact with the inner surface of the box main body 2, and has a cushioning effect.
[0042]
As described above, the embodiments of the present invention have been described with reference to the drawings. However, the specific configuration is not limited to these embodiments, and even if there are changes and additions without departing from the gist of the present invention, they are included in the present invention. It is.
[0043]
【The invention's effect】
According to the present invention, the following effects can be obtained.
[0044]
(A) According to the first aspect of the present invention, the glass substrate to which the buffer member is attached can be stored by the transfer device in an overlapping manner from the opening, so that the glass substrate does not hit the ceiling. Further, the glass substrate is a buffer member arranged in the edge region, so that the contact between the glass substrates (particularly, the center portion) is prevented, and all the glass substrates are pressed and fixed via the buffer member. Not only is there no risk of breakage of the glass substrate in the transfer process, but a large number of glass substrates can be stored compared to a conventional glass substrate transfer box.
[0045]
(B) According to the second aspect of the present invention, since the buffer member is stored in the glass substrate while being held, the glass substrate and the buffer member can be efficiently and simultaneously carried into the box body.
[0046]
(C) According to the third aspect of the present invention, since the glass substrate can be sandwiched from both sides by the sandwiching portion of the buffer member, there is a possibility that the buffer member falls off the glass substrate in the step of storing the glass substrate in the box body. Absent.
[0047]
(D) According to the invention described in claim 4, not only is the buffer member easily pinched to the end of the glass substrate, but also the pinching force of the pinching portion is increased.
[0048]
(E) According to the invention as set forth in claim 5, the respective buffer members are connected to each other, and a deviation between the respective glass substrates at the time of transporting the glass substrates can be prevented as much as possible.
[0049]
(F) According to the invention as set forth in claim 6, the respective buffer members are connected to each other by the fitting of the concave portions and the convex portions, and the storage and installation state of each glass substrate is further stabilized.
[0050]
(G) According to the invention of claim 7, after the glass substrate and the buffer member are carried into the box main body, the movement of the internal glass substrate can be prevented only by installing the lid.
[0051]
(H) According to the eighth aspect of the invention, any number of glass substrates can be securely stored and fixed according to the number of glass substrates to be stored.
[0052]
(I) According to the ninth aspect of the invention, there is no possibility that the glass substrate falls down toward the opening in the housing process.
[Brief description of the drawings]
FIG. 1 is a perspective view of an apparatus for transporting a glass substrate according to the present invention.
FIG. 2 is a cross-sectional view in which a part of a buffer member according to the present invention is omitted.
FIG. 3 is a perspective view showing a state in which the glass substrate according to the present invention is held by a buffer member.
FIG. 4 is a cross-sectional view in which a part of line XX in FIG. 1 is omitted.
FIGS. 5 (a), (b), (c), (d), (e), and (f) are plan views of various buffer members used for buffering between glass substrates according to the present invention.
6 (a), (b), (c), (d), (e), and (f) are cross-sectional views of various cushioning members.
FIGS. 7 (a), (b), (c) and (d) are cross-sectional views showing steps of storing a glass substrate in a glass substrate transport box according to the present invention.
FIGS. 8 (a), (b), (c) and (d) are cross-sectional views showing steps of accommodating the glass substrate of the second embodiment.
FIG. 9 is a perspective view of a second embodiment of the glass substrate transport box according to the present invention.
FIGS. 10 (a), (b) and (c) are cross-sectional views showing steps of accommodating the glass substrate of the third embodiment.
FIGS. 11 (a), (b) and (c) are cross-sectional views showing steps of accommodating the glass substrate of the fourth embodiment.
FIG. 12 is an enlarged sectional view in which a part is omitted.
FIG. 13 is a perspective view of a conventional transport box.
FIG. 14 is a cross-sectional view showing a conventional glass substrate housing process.
DESCRIPTION OF SYMBOLS 1 Glass substrate 2 Box body 3 Side cover 4 Ceiling plate 5 Bottom plate 6a, 6b Side plate 7 Vertical side plate 8 Ceiling cover 9 Glass substrate contact pad 10 Inclined surface 10 'Vertical surface 11 Inclined surface 11' Vertical surface 12 Side cover Body pad 14 Connecting metal fitting 14 ′ Connecting metal fitting 16 Bottom pad 17 Buffer member 18 Corner part 19 Straight part 20 Flat surface 21 Depressed part 22 Convex part 23 Nipping part 24 Inlet part 25 Cavity part 26 Transfer device 27 Vacuum suction tool 28 Non-slip mat 29 Connecting Tool 30 Inner Lid 31 Inner Lid Pad 32 Inclined Mounting Table 33 Bottom Contact Pads K, K 'Opening W Frame

Claims (9)

A glass substrate transfer device capable of storing a plurality of glass substrates in an overlapping manner, the transfer device being located adjacent to a box body having an insertion opening for a glass substrate in an edge region of the glass substrate in the box body. A buffer member for preventing the glass substrates from contacting each other, and pressing means for pressing the buffer member from the insertion opening side of the glass substrate to prevent movement of the glass substrate during transport of the glass substrate transport device. An apparatus for transporting a glass substrate. The glass substrate transport apparatus according to claim 1, wherein the buffer member has a structure capable of being held on the glass substrate so as not to drop from the glass substrate at least until the glass substrate is placed in the box main body from the insertion opening side. 3. The glass substrate transport device according to claim 2, wherein the buffer member has a holding portion for holding the glass substrate from both sides. 4. 4. The glass substrate transfer apparatus according to claim 3, wherein a cavity having a slightly larger dimension is formed inside the holding portion. The apparatus for transporting a glass substrate according to any one of claims 1 to 4, wherein a connection portion for connecting the buffer members to each other is formed. The glass substrate according to claim 5, wherein a concave portion and a convex portion are respectively formed on a front portion and a rear surface portion of the cushioning member, and a coupling portion is formed by fitting the concave portion and the convex portion. Equipment for transport. The apparatus for transporting a glass substrate according to claim 1, wherein the pressing unit is a lid that closes an insertion opening of the box body. The glass substrate transport apparatus according to any one of claims 1 to 6, wherein the pressing means is a contact pad extending from a lid closing an insertion opening of the box main body via a length-adjustable connecting tool. The glass substrate according to claim 1, wherein a contact pad for regulating the buffer member is attached to a surface facing the insertion opening, and the contact pad is formed so as to be inclined upward from a bottom surface. Equipment for transport.

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